WO2008149490A1 - 切断方法およびワイヤソー装置 - Google Patents

切断方法およびワイヤソー装置 Download PDF

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Publication number
WO2008149490A1
WO2008149490A1 PCT/JP2008/001143 JP2008001143W WO2008149490A1 WO 2008149490 A1 WO2008149490 A1 WO 2008149490A1 JP 2008001143 W JP2008001143 W JP 2008001143W WO 2008149490 A1 WO2008149490 A1 WO 2008149490A1
Authority
WO
WIPO (PCT)
Prior art keywords
ingot
cutting
wire saw
wire
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001143
Other languages
English (en)
French (fr)
Inventor
Koji Kitagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to CN2008800166921A priority Critical patent/CN101678563B/zh
Priority to KR1020097025446A priority patent/KR101476670B1/ko
Priority to US12/451,669 priority patent/US8267742B2/en
Publication of WO2008149490A1 publication Critical patent/WO2008149490A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0633—Grinders for cutting-off using a cutting wire
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

　本発明は、ワイヤを複数の溝付きローラに巻掛けし、該溝付きローラに切断用スラリを供給しつつ、前記ワイヤを往復走行させながらインゴットに押し当て、インゴットをウエーハ状に切断する方法であって、前記インゴットに、インゴット温調用スラリを前記切断用スラリとは独立して供給温度を制御して供給することにより、インゴットの温度を制御して切断するようにし、この際に、前記インゴットに対し、前記往復走行させるワイヤの出側へのみ、インゴット温調用スラリを供給する切断方法およびワイヤソー装置である。これにより、ワイヤソーを用いてインゴットを切断する際、特にインゴットの切断終了時付近におけるインゴットの急激な冷却を軽減し、その結果ナノトポグラフィの悪化を抑制するとともに、さらに厚さも均一な高品質なウエーハに切断する方法およびワイヤソー装置が提供される。 　
PCT/JP2008/001143 2007-06-08 2008-05-02 切断方法およびワイヤソー装置 Ceased WO2008149490A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008800166921A CN101678563B (zh) 2007-06-08 2008-05-02 切断方法及线锯装置
KR1020097025446A KR101476670B1 (ko) 2007-06-08 2008-05-02 절단 방법 및 와이어 쏘 장치
US12/451,669 US8267742B2 (en) 2007-06-08 2008-05-02 Slicing method and a wire saw apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-152788 2007-06-08
JP2007152788A JP5003294B2 (ja) 2007-06-08 2007-06-08 切断方法

Publications (1)

Publication Number Publication Date
WO2008149490A1 true WO2008149490A1 (ja) 2008-12-11

Family

ID=40093324

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001143 Ceased WO2008149490A1 (ja) 2007-06-08 2008-05-02 切断方法およびワイヤソー装置

Country Status (6)

Country Link
US (1) US8267742B2 (ja)
JP (1) JP5003294B2 (ja)
KR (1) KR101476670B1 (ja)
CN (1) CN101678563B (ja)
TW (1) TW200909170A (ja)
WO (1) WO2008149490A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021077793A (ja) * 2019-11-12 2021-05-20 株式会社Sumco 半導体インゴットのスライシング加工条件決定方法および半導体ウェーハの製造方法
CN113733378A (zh) * 2021-11-05 2021-12-03 江苏晟大光电科技有限公司 一种太阳能电池板组件晶硅电池片切割加工设备

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4791306B2 (ja) * 2006-09-22 2011-10-12 信越半導体株式会社 切断方法
JP2009029078A (ja) * 2007-07-30 2009-02-12 Toyo Advanced Technologies Co Ltd ワイヤーソー装置
JP5475772B2 (ja) * 2008-07-11 2014-04-16 サンーゴバン アブレイシブズ，インコーポレイティド ワイヤスライシングシステム
JP5370006B2 (ja) 2009-08-31 2013-12-18 株式会社Ｓｕｍｃｏ ワイヤソー装置
JP5515593B2 (ja) * 2009-10-07 2014-06-11 株式会社Ｓｕｍｃｏ ワイヤーソーによるシリコンインゴットの切断方法およびワイヤーソー
TWI415714B (zh) * 2010-03-01 2013-11-21 Ihi Compressor And Machinery Co Ltd Saw the slurry management device
KR101149508B1 (ko) * 2010-06-11 2012-05-25 (주)새한나노텍 와이어 슬라이싱 장치
KR20120037576A (ko) * 2010-10-12 2012-04-20 주식회사 엘지실트론 단결정 잉곳 절단장치 및 단결정 잉곳 절단방법
DE102011008400B4 (de) * 2011-01-12 2014-07-10 Siltronic Ag Verfahren zur Kühlung eines Werkstückes aus Halbleitermaterial beim Drahtsägen
JP5494558B2 (ja) * 2011-04-20 2014-05-14 信越半導体株式会社 ワイヤソーの運転再開方法及びワイヤソー
CN102922610B (zh) * 2011-08-10 2016-01-27 浙江昱辉阳光能源有限公司 一种金刚线多线切割方法、设备和系统
JP5185419B2 (ja) 2011-08-22 2013-04-17 コマツＮｔｃ株式会社 ワイヤソー
JP5590001B2 (ja) 2011-10-04 2014-09-17 信越半導体株式会社 ワークの切断方法及びワイヤソー
EP2586554A1 (en) * 2011-10-27 2013-05-01 Applied Materials Switzerland Sàrl Wire saw device with two independent wire webs and method thereof
US20130139801A1 (en) * 2011-12-01 2013-06-06 Memc Electronic Materials, Spa Methods For Controlling Displacement Of Bearings In A Wire Saw
US20130139800A1 (en) * 2011-12-02 2013-06-06 Memc Electronic Materials, Spa Methods For Controlling Surface Profiles Of Wafers Sliced In A Wire Saw
US20130174828A1 (en) * 2011-12-09 2013-07-11 Memc Electronic Materials, Spa Systems and Methods For Controlling Surface Profiles Of Wafers Sliced In A Wire Saw
DE102012221904B4 (de) 2012-11-29 2018-05-30 Siltronic Ag Verfahren zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
JP5791642B2 (ja) * 2013-01-10 2015-10-07 信越半導体株式会社 ワイヤソーの運転再開方法
JP6183074B2 (ja) * 2013-09-03 2017-08-23 新日鐵住金株式会社 反りの低減が可能なマルチワイヤー加工方法及びマルチワイヤー加工装置
DE102013223344B3 (de) * 2013-11-15 2015-05-07 Siltronic Ag Verfahren zum Zersägen eines temperierten Werkstückes mit einer Drahtsäge
CN103722624A (zh) * 2013-12-19 2014-04-16 上海汉虹精密机械有限公司 用于切方机的金刚线切割工艺
JP6281312B2 (ja) * 2014-02-20 2018-02-21 株式会社Sumco シリコンウェーハの製造方法
KR101690246B1 (ko) * 2015-01-26 2017-01-09 주식회사 엘지실트론 와이어 쏘잉 장치
DE102015204275B3 (de) * 2015-03-10 2016-05-12 Siltronic Ag Verfahren zur Wiederaufnahme eines Drahttrennläppvorgangs mit strukturiertem Sägedraht nach Unterbrechung
JP6304118B2 (ja) * 2015-05-01 2018-04-04 信越半導体株式会社 ワイヤソー装置
JP6589735B2 (ja) * 2016-04-21 2019-10-16 信越半導体株式会社 ワイヤソー装置の製造方法
DE102016211883B4 (de) 2016-06-30 2018-02-08 Siltronic Ag Verfahren und Vorrichtung zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
DE102016222899A1 (de) 2016-11-21 2018-05-24 Siltronic Ag Vorrichtung und Verfahren zum Zersägen eines Werkstückes mit einer Drahtsäge
KR102077368B1 (ko) 2016-11-30 2020-02-14 전북대학교산학협력단 데옥시노지리마이신 및 아르기닌 함량이 증가된 누에 추출물 제조방법
DE102016224640B4 (de) 2016-12-09 2024-03-28 Siltronic Ag Verfahren zum Zersägen eines Werkstückes mit einer Drahtsäge
JP7020286B2 (ja) * 2018-05-15 2022-02-16 信越半導体株式会社 インゴットの切断方法及びワイヤーソー
CN108927908B (zh) * 2018-07-12 2021-01-05 阜宁协鑫光伏科技有限公司 线切割机用的切割方法
DE102018212734B4 (de) 2018-07-31 2023-03-23 Siltronic Ag Verfahren zum gleichzeitigen Abtrennen einer Vielzahl von Scheiben von einem Stab
DE102018221922A1 (de) 2018-12-17 2020-06-18 Siltronic Ag Verfahren zur Herstellung von Halbleiterscheiben mittels einer Drahtsäge, Drahtsäge und Halbleiterscheibe aus einkristallinem Silizium
CN111085726B (zh) * 2020-01-13 2025-07-25 厦门理工学院 一种线锯切割机及其控制方法
CN117207055A (zh) * 2023-09-20 2023-12-12 杭州中欣晶圆半导体股份有限公司 超高平坦度dsg调整操作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000043162A1 (fr) * 1999-01-20 2000-07-27 Shin-Etsu Handotai Co., Ltd. Fil helicoidal et procede de decoupe
JP2003001624A (ja) * 2001-05-10 2003-01-08 Wacker Siltronic Ag 被加工物から基板を切り離す方法
JP2007320011A (ja) * 2006-06-05 2007-12-13 Toyo Advanced Technologies Co Ltd ワイヤソー

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2571488B2 (ja) * 1992-01-14 1997-01-16 信越半導体株式会社 ワイヤーソーによるワークの切断方法及び切断装置
JP3656317B2 (ja) 1996-03-27 2005-06-08 信越半導体株式会社 ワイヤソーによるワーク切断方法及び装置
JPH10217036A (ja) 1997-01-29 1998-08-18 Komatsu Electron Metals Co Ltd 半導体結晶棒の切断装置及び切断方法
MY126994A (en) * 1999-12-14 2006-11-30 Hitachi Metals Ltd Method and apparatus for cutting a rare earth alloy
US6889684B2 (en) * 2002-11-06 2005-05-10 Seh America, Inc. Apparatus, system and method for cutting a crystal ingot
EP2343155B1 (en) * 2003-10-27 2014-08-20 Mitsubishi Denki Kabushiki Kaisha Multi-wire saw
JP4313174B2 (ja) * 2003-12-15 2009-08-12 コマツＮｔｃ株式会社 ワイヤソー
US7878883B2 (en) * 2006-01-26 2011-02-01 Memc Electronics Materials, Inc. Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000043162A1 (fr) * 1999-01-20 2000-07-27 Shin-Etsu Handotai Co., Ltd. Fil helicoidal et procede de decoupe
JP2003001624A (ja) * 2001-05-10 2003-01-08 Wacker Siltronic Ag 被加工物から基板を切り離す方法
JP2007320011A (ja) * 2006-06-05 2007-12-13 Toyo Advanced Technologies Co Ltd ワイヤソー

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021077793A (ja) * 2019-11-12 2021-05-20 株式会社Sumco 半導体インゴットのスライシング加工条件決定方法および半導体ウェーハの製造方法
JP7427921B2 (ja) 2019-11-12 2024-02-06 株式会社Sumco 半導体インゴットのスライシング加工条件決定方法および半導体ウェーハの製造方法
CN113733378A (zh) * 2021-11-05 2021-12-03 江苏晟大光电科技有限公司 一种太阳能电池板组件晶硅电池片切割加工设备

Also Published As

Publication number Publication date
US20100163010A1 (en) 2010-07-01
KR101476670B1 (ko) 2015-01-06
TW200909170A (en) 2009-03-01
JP5003294B2 (ja) 2012-08-15
CN101678563A (zh) 2010-03-24
US8267742B2 (en) 2012-09-18
CN101678563B (zh) 2012-08-08
JP2008302618A (ja) 2008-12-18
KR20100020463A (ko) 2010-02-22
TWI375617B (ja) 2012-11-01

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