Classifications

• • C—CHEMISTRY; METALLURGY
  • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
  • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
  • C08K5/00—Use of organic ingredients
  • C08K5/54—Silicon-containing compounds
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K3/00—Materials not provided for elsewhere
  • C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
  • C09K3/1006—Materials in mouldable or extrudable form for sealing or packing joints or covers characterised by the chemical nature of one of its constituents
  • C09K3/1009—Fluorinated polymers, e.g. PTFE
• • C—CHEMISTRY; METALLURGY
  • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
  • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
  • C08K5/00—Use of organic ingredients
  • C08K5/54—Silicon-containing compounds
  • C08K5/5406—Silicon-containing compounds containing elements other than oxygen or nitrogen
• • C—CHEMISTRY; METALLURGY
  • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
  • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
  • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
  • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
  • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
  • C08L27/18—Homopolymers or copolymers or tetrafluoroethene
• • C—CHEMISTRY; METALLURGY
  • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
  • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
  • C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers

Definitions

• the present invention relates to a perfluoroelastomer composition and a sealing material using the same.
• Perfluoroelastomers may be used as a sealing material for semiconductor equipment (such as a dry etching apparatus or a chemical vapor deposition (CVD) apparatus) because of its excellent plasma resistance, chemical resistance, and heat resistance.
• semiconductor equipment such as a dry etching apparatus or a chemical vapor deposition (CVD) apparatus
• CVD chemical vapor deposition
• the perfluoroelastomer seal may stick to the equipment substrate (for example, metal).
• a surface treatment agent may be dissolved in a solvent capable of swelling an elastomer or rubber. A rubber is then immersed in the solution, thereby impregnating the swollen rubber with the surface treatment agent.
• a surface treatment agent having an analogous structure to an elastomer is coated onto the surface of the elastomer. Such a method has been disclosed in J.P Application No. 2006-36884.
• the surface treatment agent may comprise a compound having a perfluoropolyether having a self-crosslinking functional group.
• the perfluoroelastomer is coated with the surface treatment agent and heated, thereby; the compound having a perfluoropolyether is polymerized.
• additional processing steps are necessary. In the case of the first example, a treatment step is required and in the second example, a coating and a heating step are required.
• the present invention includes the following:
• a perfluoroelastomer composition comprising (A) a perfluoroelastomer and (B) a fluorosilane compound.
• the perfluoroelastomer composition according to the present invention contains a small amount of a fluorosilane compound and thereby, the firm fixation of the fluoroelastomer to a substrate (for example, metal) can be prevented.
• a small amount means an amount sufficient to make the polymer tack free, but not compromise the elastomeric properties of the fluoroelastomer.
• the perfluoroelastomer compositions according to the present invention do not require an additional step(s) to generate a tack free fluoroelastomer. Because a small amount of fluorosilane is used, a tack free perfluoroelastomer composition is obtained while the elastomeric properties of the perfluoroelastomer composition are not degraded.
• a perfluoroelastomer is considered a material essentially made from perfluorinated monomers (that is, greater than 95 mole % is perfluorinated).
• the polymerized perfluoroelastomer may have end groups that are not perfluorinated because the end groups are dependent on the initiator system or chain transfer agent that is used.
• perfluorinated, partially fluorinated and non fluorinated initiator systems and chain transfer agents are considered.
• a perfluoroelastomer that can be used for the perfluoroelastomer composition according to the present invention is not particularly limited and is a typical perfluoroelastomer. It is preferable that a main monomer unit composing the perfluoroelastomer is a combination of a perfluoroolefin and a perfluorovinylether.
• the perfluoroolefin may include: tetrafluoroethylene, hexafluoropropylene, a mixture thereof, and so forth, and particularly tetrafluoroethylene is preferable.
• the perfluorovinylether is typically a perfluoro(alkylvinyl)ether or a perfluoro(alkoxyvinyl) ether represented by the following formula (1):
• CF 2 CFO(R'fO) n (R"fO) m Rf (1) wherein R'f and R"f are the same or different linear or branched perfluoroalkylene groups having 2 to 6 carbon atoms, m and n independently represent an integer of 0 to 10, and R f is a perfluoroalkyl group having 1 to 6 carbon atoms.
• the preferable perfluoro(alkylvinyl)ether includes the compounds of the following formula (2):
• CF 2 CFO(CF 2 CFXO) n Rf (2) wherein X is F or CF 3 , n is 0 to 5, and R f is a perfluoroalkyl group having 1 to 6 carbon atoms.
• a preferable perfluoro(alkylvinyl)ether is a compound in which n is 0 or 1 in the formula (2) and R f contains 1 to 3 carbon atom(s). Examples include: a perfluoro(alkylvinyl)ether such as perfluoro(methylvinyl)ether, perfluoro(ethylvinyl)ether, perfluoro(propylvinyl)ether, and combinations thereof.
• Another perfluoro(alkylvinyl)ether monomer that is useful in the present invention includes a compound represented by the following formula (3):
• CF 2 CFO[(CF 2 ) m CF 2 CFZO] n R f (3) wherein R f is a perfluoroalkyl group having 1 to 6 carbon atoms, m is 0 or 1, n is 0 to 5, and Z is F or CF 3 .
• a preferable perfluoro(alkylvinyl) ether monomer is a compound in which Rf is C3F7, m is 0, and n is 1.
• Another perfluoro(alkylvinyl)ether monomer that is useful in the present invention includes a compound represented by the following formula (4):
• CF 2 CFO[(CF 2 CFCF 3 O) n (CF 2 CF 2 CF 2 O) m (CF 2 ) p ]C x F 2x+1 (4) wherein m and n each represent an integer of 0 or 1 to 10, p is 0 to 3, and x is 0 to 5.
• the perfluoro(alkoxyvinyl)ether that is useful in the present invention includes a compound represented by the following formula (5):
• CF 2 CFOCF 2 CF(CF 3 )O(CF 2 O) 1n C n F 2n+I (5) wherein n is 1 to 5, and preferably 1, and m is 1 to 3.
• a cure site monomer is introduced in the perfluoroelastomer and a crosslinked structure is formed to achieve the elastomeric properties.
• the cure site monomer may participate in peroxide cure reactions.
• the most preferable cure site monomer contains one or more bromine (Br) group(s) or iodine (I) group(s).
• the cure site monomer may contain another functional group such as a nitrile (CN) group.
• a preferable cure site monomer containing CN includes perfluoro(8-cyano-5- methyl-3,6-dioxa-l-octene).
• a particularly useful cure site monomer used in the present invention is bromotrifluoroethylene .
• the fluorosilane compound is added in the perfluoroelastomer in a small amount and thereby, firm fixation of the fluoroelastomer to a substrate can be prevented.
• the fluorosilane compounds of this disclosure are part of a perfluoropolyether, In one embodiment, the fluorosilane compounds are perfluoropolyethers terminated with a silane.
• An extremely small amount of the fluorosilane compound can be added to the elastomer and not degrade the elastomeric properties of the elastomer such as an inherent sealing material (for example, heat resistance/compression set).
• the fluorosilane compound preferably is a perfluoropolyether and is, for example, a fluorosilane compound having a perfluoropolyether structure containing the following formula (9): RKSi(OR) 3 ) n (9) where R f is a structure having a perfluoroether group, R is an alkyl group and n is 1 or 2.
• the fluorinated polyether silane may have the structure containing the following formula (10): wherein R f 1 represents a monovalent or divalent polyfluoropolyether group, Q represents an organic divalent linking group, R 1 represents a Cl to C4 alkyl group, Y represents a hydrolysable group, x is 0 or 1 and y is 1 or 2. Y represents a hydrolysable group such as for example, a halide, a C1-C4 alkoxy group, and acyloxy group or a polyoxyalkylene group. Specific examples of hydrolysable groups include: methoxy, ethoxy, and propoxy groups, chlorine and an acetoxy group.
• the fluorinated polyether silane may have the structure containing the following formula (11):
• R is an alkyl group.
• An example includes: (CH 3 O) 3 SiC 3 H 6 NHCOCF 2 (OCF 2 CF 2 ) m (OCF 2 ) « CF 2 CONHC 3 H 6 Si(OCH 3 ) 3 .
• the fluorinated polyether silane may have the structure containing the following formulas (12) or (13): R f O-(R' f O) n -Rr(R) r -L-Si(OR) x (12) or
• R' f independently is at least one of the following structures: (CFCF3CF2), (CF 2 CFCF 3 ), (C 2 F 4 ), (CF 2 CF 3 ), or (C 4 F 9 ), R f independently is a perfluorinated (Cl -C4) alkyl group; x is 2 or 3, m, s, and r independently are 0 or 1; n, p and q are integers from 0 to 50; n+p+q>l; L is a linking organic group R-S-C 3 H 6 , 0-R-S-C 3 H 6 or CO 2 -R-S-C 3 H 6 ;
• the fluorosilane compound is added in an amount of 0.1 to 2 parts by mass based on 100 parts by mass of the perfluoroelastomer, 0.2 to 1 parts by mass based on 100 parts by mass of the perfluoroelastomer, or even 0.5 to 1 parts by mass based on 100 parts by mass of the perfluoroelastomer. If the amount of the fluorosilane compound is too small, then a sufficient tack free effect cannot be realized. If the amount of fluorosilane is too large, the properties of the elastomer may be compromised (for example, sealing and plasma-resistance).
• the elastomer composition according to the present invention may contain a filler such as carbon black or silica, a catalytic agent for vulcanization, or the like, as well as the the fluorosilane compound.
• a special step is not needed to generate a tack free fluoroelastomer because the fluorosilane compound can be added with a filler when compounding the elastomer. Further, the addition of the fluorosilane compound into the perfluoroelastomer can be performed by using existing processing equipment. Therefore, the generation of a tack free fluoroelastomer can be performed more easily and at a lower cost than that of a conventional surface treatment method.
• a shaped elastomeric product can be produced by putting the components of the composition in a compounder and then vulcanizing and shaping the components by a conventional method such as a first vulcanization and a post cure.
• the shaped elastomeric product obtained from the elastomer composition according to the present invention can be used as a sealing material or the like for a semiconductor equipment (such as a dry etching apparatus or a CVD apparatus). Because a surface of the treated elastomer is made to be non-tacky, the elastomer can be prevented from adhering to a surface with which the elastomer sealing material is in contact, and thereby, the sealing material can be prevented from being damaged by the adherence.
• a semiconductor equipment such as a dry etching apparatus or a CVD apparatus
• the obtained compound was subjected to a first vulcanization at 188 0 C for 15 min. Then, the compound was vulcanized and molded under a post cure condition of 200 0 C for 16 hours and 25O 0 C for 8 hours and thereby, a sheet having a thickness of 2 mm was produced.
• Example 2 The same operation as in Example 1 was performed, except that the amount of the ECC-1000 was set to 0.5 parts by mass.
• Example 1 The same operation as in Example 1 was performed, except that the amount of the ECC-1000 was set to 0.75 parts by mass.
• Example 4 The same operation as in Example 1 was performed, except that the amount of
• ECC-1000 was set to 1.0 parts by mass. Moreover, in the same condition as the production of the sheet, an O-shaped ring having a ring diameter of 25.7 mm (inner diameter) and a wire diameter of 3.5 mm was produced.
• Example 2 The same operation as in Example 1 was performed, except that the fluorodisilane compound (ECC-1000) was not added. Moreover, in the same condition as the production of the sheet, an O-shaped ring having a ring diameter of 25.7 mm (inner diameter) and a wire diameter of 3.5 mm was produced.
• ECC-1000 fluorodisilane compound
• MH means the torque maximum value
• ML means the torque minimum value
• Ts2 means the time required for 2-point rise
• T50 means the time of 50% vulcanization (midpoint of the vulcanization reaction)
• T90 means the time of 90% vulcanization time (optimal vulcanization point).
• Example 4 The O-rings in Example 4 and the Comparative Example were tested for compression set for 48 hours at 200 0 C in a similar manner as described in ASTM D 395- 03 Method B and ASTM D 1414-94. Results are reported as percentages. The results are shown in the following Table 2.

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• Chemical & Material Sciences (AREA)
• Organic Chemistry (AREA)
• Health & Medical Sciences (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Medicinal Chemistry (AREA)
• Polymers & Plastics (AREA)
• Engineering & Computer Science (AREA)
• Materials Engineering (AREA)
• Compositions Of Macromolecular Compounds (AREA)
• Sealing Material Composition (AREA)

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• 2007
  • 2007-04-16 JP JP2007107167A patent/JP5336051B2/ja active Active
• 2008
  • 2008-04-11 WO PCT/US2008/060018 patent/WO2008130872A2/en not_active Ceased
  • 2008-04-11 EP EP08745598A patent/EP2137245A4/en not_active Withdrawn
  • 2008-04-11 KR KR1020097022816A patent/KR101548023B1/ko active Active
  • 2008-04-11 BR BRPI0810363-1A2A patent/BRPI0810363A2/pt not_active Application Discontinuation
  • 2008-04-11 CN CN2008800119916A patent/CN101657493B/zh not_active Expired - Fee Related
  • 2008-04-11 US US12/532,466 patent/US8013064B2/en active Active
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