WO2008126836A1 - 光学式エンコーダ - Google Patents

光学式エンコーダ Download PDF

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Publication number
WO2008126836A1
WO2008126836A1 PCT/JP2008/056925 JP2008056925W WO2008126836A1 WO 2008126836 A1 WO2008126836 A1 WO 2008126836A1 JP 2008056925 W JP2008056925 W JP 2008056925W WO 2008126836 A1 WO2008126836 A1 WO 2008126836A1
Authority
WO
WIPO (PCT)
Prior art keywords
scale
light
optical
type encoder
detecting
Prior art date
Application number
PCT/JP2008/056925
Other languages
English (en)
French (fr)
Inventor
Jun Hane
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to JP2009509345A priority Critical patent/JP5198434B2/ja
Priority to US12/595,722 priority patent/US8035079B2/en
Publication of WO2008126836A1 publication Critical patent/WO2008126836A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

　スケールと、スケールに対向して配置された検出ヘッドと、を備え、スケールには、相対移動する方向に対して所定の光学パタンを有する格子が設けられており、検出ヘッドには、スケールに所定の光を照射する発光部と、発光部からスケールに照射されて格子により反射した光により光検出器の受光面上に形成される光分布のパタンの動きを検出する光検出部と、が設けられた光学式エンコーダであって、検出ヘッドの発光部と光検出器とのスケール側の面には光透過部材が配置され、光透過部材の、前記スケールに対向する表面に光の伝播を抑制するための光伝播抑制パタンが配置されている。
PCT/JP2008/056925 2007-04-10 2008-04-08 光学式エンコーダ WO2008126836A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009509345A JP5198434B2 (ja) 2007-04-10 2008-04-08 光学式エンコーダ
US12/595,722 US8035079B2 (en) 2007-04-10 2008-04-08 Optical encoder

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-102590 2007-04-10
JP2007102590 2007-04-10

Publications (1)

Publication Number Publication Date
WO2008126836A1 true WO2008126836A1 (ja) 2008-10-23

Family

ID=39863933

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056925 WO2008126836A1 (ja) 2007-04-10 2008-04-08 光学式エンコーダ

Country Status (3)

Country Link
US (1) US8035079B2 (ja)
JP (1) JP5198434B2 (ja)
WO (1) WO2008126836A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223629A (ja) * 2009-03-19 2010-10-07 Olympus Corp 光学式エンコーダ
JP2010230409A (ja) * 2009-03-26 2010-10-14 Olympus Corp 光学式エンコーダ
US20100258712A1 (en) * 2009-04-14 2010-10-14 Intersil Americas Inc. Optical sensors that reduce spectral reflections
JP2010266335A (ja) * 2009-05-14 2010-11-25 Nikon Corp 受発光センサ、エンコーダ及び受発光センサの製造方法
JP2015212648A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP2016057127A (ja) * 2014-09-08 2016-04-21 日本精工株式会社 センサ及びセンサの製造方法
JPWO2014054084A1 (ja) * 2012-10-05 2016-08-25 パイオニア株式会社 半導体デバイス、これを備えた近接センサーおよび半導体デバイスの製造方法
JP2021170018A (ja) * 2017-06-15 2021-10-28 株式会社ミツトヨ 受光装置およびこれを備えた光電式エンコーダ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置
US8324602B2 (en) * 2009-04-14 2012-12-04 Intersil Americas Inc. Optical sensors that reduce specular reflections
JP5984364B2 (ja) 2011-11-22 2016-09-06 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
US10165954B2 (en) 2014-07-31 2019-01-01 Salutron Inc. Integrated sensor modules
EP3399284B1 (de) * 2017-05-03 2019-07-10 Dr. Johannes Heidenhain GmbH Sensoreinheit zur positionsmessung
WO2019162998A1 (ja) * 2018-02-20 2019-08-29 三菱電機株式会社 アブソリュートエンコーダ
KR102360458B1 (ko) * 2019-04-11 2022-02-14 미쓰비시덴키 가부시키가이샤 인코더
JP7012057B2 (ja) * 2019-11-07 2022-01-27 キヤノンプレシジョン株式会社 反射型センサおよびこれを備える光学式エンコーダ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048600A (ja) * 2000-07-10 2002-02-15 Dr Johannes Heidenhain Gmbh 光学的な位置測定装置
JP2005049345A (ja) * 2003-07-15 2005-02-24 Olympus Corp 光学式変位センサ
JP2006170964A (ja) * 2004-12-20 2006-06-29 Olympus Corp 反射型光学式エンコーダー

Family Cites Families (13)

* Cited by examiner, † Cited by third party
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US5066130A (en) * 1988-05-10 1991-11-19 Canon Kabushiki Kaisha Displacement measuring apparatus
US5317149A (en) 1992-11-12 1994-05-31 Hewlett-Packard Company Optical encoder with encapsulated electrooptics
JP3631551B2 (ja) * 1996-01-23 2005-03-23 株式会社ミツトヨ 光学式エンコーダ
JPH09196705A (ja) * 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
JP4444469B2 (ja) * 2000-08-07 2010-03-31 株式会社ミツトヨ 光学式変位測定装置
JP2004006753A (ja) 2002-04-05 2004-01-08 Canon Inc 光半導体用パッケージ
JP4024644B2 (ja) 2002-05-14 2007-12-19 株式会社ミツトヨ 反射型エンコーダ
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
JP2005156549A (ja) 2003-11-05 2005-06-16 Sendai Nikon:Kk 光学式エンコーダ
JP4418278B2 (ja) * 2004-03-30 2010-02-17 オリンパス株式会社 光学式エンコーダ及びその製造方法
JP4803641B2 (ja) * 2005-05-12 2011-10-26 オリンパス株式会社 光学式エンコーダ
JP4912801B2 (ja) * 2006-09-11 2012-04-11 オリンパス株式会社 光学式エンコーダ
JP2009236854A (ja) * 2008-03-28 2009-10-15 Olympus Corp 光学式エンコーダ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048600A (ja) * 2000-07-10 2002-02-15 Dr Johannes Heidenhain Gmbh 光学的な位置測定装置
JP2005049345A (ja) * 2003-07-15 2005-02-24 Olympus Corp 光学式変位センサ
JP2006170964A (ja) * 2004-12-20 2006-06-29 Olympus Corp 反射型光学式エンコーダー

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223629A (ja) * 2009-03-19 2010-10-07 Olympus Corp 光学式エンコーダ
JP2010230409A (ja) * 2009-03-26 2010-10-14 Olympus Corp 光学式エンコーダ
US20100258712A1 (en) * 2009-04-14 2010-10-14 Intersil Americas Inc. Optical sensors that reduce spectral reflections
US8232541B2 (en) * 2009-04-14 2012-07-31 Intersil Americas Inc. Optical sensors that reduce specular reflections
JP2010266335A (ja) * 2009-05-14 2010-11-25 Nikon Corp 受発光センサ、エンコーダ及び受発光センサの製造方法
JPWO2014054084A1 (ja) * 2012-10-05 2016-08-25 パイオニア株式会社 半導体デバイス、これを備えた近接センサーおよび半導体デバイスの製造方法
JP2015212648A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP2016057127A (ja) * 2014-09-08 2016-04-21 日本精工株式会社 センサ及びセンサの製造方法
JP2021170018A (ja) * 2017-06-15 2021-10-28 株式会社ミツトヨ 受光装置およびこれを備えた光電式エンコーダ

Also Published As

Publication number Publication date
JP5198434B2 (ja) 2013-05-15
JPWO2008126836A1 (ja) 2010-07-22
US20100165359A1 (en) 2010-07-01
US8035079B2 (en) 2011-10-11

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