Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING OR COUNTING
  • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
  • G06Q10/00—Administration; Management
  • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING OR COUNTING
  • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
  • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
  • G06Q50/04—Manufacturing

Definitions

• Group management system process information management device, control device, and program
• the present invention relates to a group management system that manages recipes that are information on control of processing apparatuses such as semiconductor manufacturing apparatuses and liquid crystal panel manufacturing apparatuses.
• a variable called a process parameter is described in a recipe of a control device (such as a semiconductor manufacturing device) that constitutes a conventional group management system in order to absorb a difference between devices (device difference).
• this process parameter is commonly described in multiple recipes.
• Patent Document 1 Japanese Patent Application Laid-Open No. 11-340111 (Page 1, Fig. 1 etc.)
• the process information management device of the present invention includes two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the control device.
• a process information management device that constitutes a group management system, and associates two or more recipes that are information about processes held by the two or more control devices with the two or more control devices, respectively.
• a reception unit that receives process parameter information that is information about the process parameters included in the recipe, and the process parameter information
• the recipe storage unit is searched for a recipe and the search is performed.
• the recipe information acquisition unit that acquires recipe information that is the information of the recipe and the recipe acquired by the recipe information acquisition unit
• a process information management apparatus having the output unit for outputting the broadcast.
• FIG. 1 is a conceptual diagram of a group management system in the present embodiment.
• the group management system is a system that controls a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus.
• the group management system includes one or more processing devices 11 (processing device 11 (1) to processing device ll (n)), one or more control devices 12 (control device 12 (1) to control device 12 (n) ), And a process information management device 13 and a client device 14.
• the processing apparatus 11 is an apparatus that performs a predetermined process on a substrate to be processed. More specifically, the processing apparatus 11 is a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. The processing apparatus 11 performs various processes on the substrate to be processed such as a film forming process, an etching process, and a thermal oxidation process. The processing apparatus 11 is, for example, a composite process type semiconductor wafer manufacturing apparatus. Figure 2 shows an example of this semiconductor wafer manufacturing equipment. As shown in FIG.
• the semiconductor wafer manufacturing apparatus includes a plurality of (for example, three) process chambers 1 that perform various processes on the semiconductor wafer, such as a film forming process, an etching process, and a thermal oxidation process, 2 and 3, and cassettes Cl and C2 that can accommodate a large number of wafers W (for example, 50) W between cassette chambers 4 and 5 and process chambers 1 and 2 and cassette chambers 4 and 5
• a transfer chamber 6 that delivers Wu W.
• Each chamber is connected through a gate valve G so as to be freely opened and closed.
• an articulated transfer arm 7 capable of bending and extending and rotating is provided, and the transfer arm 7 transfers the wafer W between the chambers.
• the cassettes Cl and C2 When the cassettes Cl and C2 are taken into the cassette chambers 4 and 5, the cassettes Cl and C2 are turned 90 degrees, and the wafer outlet of the cassettes Cl and C2 is rotated so as to face the center in the transfer chamber 6 for transfer.
• the arm 7 is installed in a posture that allows woofer W to be taken in and out.
• control device 12 is a device that controls the processing device 11, and is usually provided corresponding to the processing device 11.
• the control device 12 stores a recipe, and the control device 12 controls the processing device 11 using the recipe.
• a recipe is information on a predetermined process for a substrate to be processed, and is usually information on a set of process condition values.
• control device 12 acquires and stores control device specific information that is information unique to the control device such as an alarm list that is a set of information of alarms that are generated when the processing device 11 is controlled. Yes.
• control device specific information that is information unique to the control device such as an alarm list that is a set of information of alarms that are generated when the processing device 11 is controlled. Yes.
• the processing device 11 and the control device 12 may be integrated or separated.
• FIG. 3 is a block diagram of the group management system in the present embodiment.
• the group management system includes a processing device 11, a control device 12, a process information management device 13, and a client device 14.
• the processing device 11 is omitted.
• the control device 12 includes a control device-side recipe storage unit 121, a recipe transmission unit 122, and a control unit 123.
• the process information management device 13 includes a recipe storage unit 131, a recipe reception unit 132, and a recipe storage unit.
• the client device 14 includes a process parameter information input unit 141, a process parameter information sending unit 142, a recipe information receiving unit 143, and a recipe information display unit 144.
• the control device-side recipe storage unit 121 stores a recipe that is used to control the processing device 11.
• a recipe is information about a predetermined process for a substrate to be processed.
• the information includes a set of process parameter information.
• the recipe includes, for example, link information that is information on a link to a process parameter. Recipes may have process parameter information directly.
• the process parameter information includes, for example, a category name, an item name, a parameter name, and a value.
• the category name is a name indicating the type of process parameter, for example, “temperature”, “gas flow rate”, “boat elevator speed”, and the like.
• the item name is a name indicating the attribute of the process parameter, such as “vertical speed” and “rotational speed”.
• the parameter name is a name of a process parameter, for example, “C” “A” or the like.
• the value is the value given to a variable called a process parameter.
• the controller-side recipe storage unit 121 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.
• the recipe transmission unit 122 transmits the recipe stored in the control device side recipe storage unit 121 to the process information management device 13.
• the recipe transmission unit 122 can be realized by a wireless or wired communication means or the like.
• the control unit 123 uses the recipe in the control device side recipe storage unit 121 to control the processing device 11 to execute a predetermined process on the substrate to be processed.
• the control unit 123 can be usually realized by an MCU, a memory, or the like.
• the processing procedure of the control unit 123 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it can be realized with a hard disk (dedicated circuit).
• the recipe storage unit 131 stores two or more recipes, which are information relating to processes held by the two or more control devices 12, in association with the two or more control devices 12, respectively.
• the recipe includes, for example, link information that is information of a link to the process parameter. Multiple recipes have link information for the process parameters. In such a case, the ability to change the information of one process parameter of one recipe directly affects other recipes. This is because other recipes refer to the information of the one process parameter by the link information.
• the recipe stored in the recipe storage unit 131 is normally a recipe received from two or more control devices 12, but may be a recipe read from a portable recording medium.
• the recipe storage unit 131 can also be realized by a power volatile recording medium, which is preferably a non-volatile recording medium.
• the recipe receiving unit 132 receives recipes from two or more control devices 12.
• the recipe receiving unit 132 is usually realized by a wireless or wired communication means, but may be realized by a means for receiving a broadcast.
• the recipe accumulation unit 133 accumulates the recipe received by the recipe reception unit 132 in the recipe storage unit 131.
• the recipe storage unit 133 can usually be realized by an MPU, a memory, or the like.
• the processing procedure of the recipe storage unit 133 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
• the receiving unit 134 receives process parameter information that is information about process parameters included in a recipe.
• the reception of process parameter information here includes reception, reading from a storage medium, input reception from a user, and the like.
• the process parameter information is information about process parameters included in the recipe.
• the process parameter information includes, for example, a process parameter name. Further, for example, the process parameter information includes a process parameter name and a process parameter value.
• the process parameter information input means is, for example, a numeric keypad, keyboard, mouse, or menu screen.
• the receiving unit 134 can be realized by a receiving means (wireless or wired communication means), a device driver of an input means such as a numeric keypad or a keyboard, control software for a menu screen, and the like.
• the recipe information acquisition unit 135 searches for a recipe from the recipe storage unit 131 using the process parameter information received by the reception unit 134, and acquires recipe information that is information about the searched recipe. More specifically, the recipe information acquisition unit 135 includes a recipe including process parameter information received by the receiving unit 134 or process parameter information having a predetermined relationship with the process parameter information received by the receiving unit 134. The search retrieves recipe information that is information about the retrieved recipe.
• the recipe information is, for example, information (line number or the like) indicating a recipe name or a location including the recipe name and process parameter information in the contents of the recipe.
• the recipe information acquisition unit 135 searches the recipe storage unit 131 for a recipe that uses the process parameter identified by the process parameter name included in the process parameter information, and uses the information about the searched recipe. Get some recipe information.
• the recipe information acquisition unit 135 may The process parameter identified by the process parameter name included in the process parameter information is used, and the value S of the process parameter and the value included in the process parameter information received by the receiving unit 134 have a predetermined relationship.
• a recipe having a certain value is searched from the recipe storage unit 131, and recipe information that is information about the searched recipe is acquired.
• the recipe information acquisition unit 135 can usually be realized by an MPU, a memory, or the like.
• the processing procedure of the recipe information acquisition unit 135 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
• the output unit 136 outputs the recipe information acquired by the recipe information acquisition unit 135.
• the output is a concept including display on a display, printing on a printer, transmission to an external device, accumulation on a recording medium, and the like.
• the output unit 136 is realized by, for example, a wireless or wired communication means.
• the output unit 136 may be realized by output device driver software, or output device driver software and an output device. In such a case, the output unit 136 may or may not include an output device such as a display or a speaker.
• the process parameter information input unit 141 inputs process parameter information.
• the process parameter information input unit 141 can be realized by, for example, a keyboard, a mouse, and their driver software.
• the process parameter information sending unit 142 sends the process parameter information input by the user using the process parameter information input unit 141 to the process information management apparatus 13.
• sending is, for example, sending.
• the process parameter information sending unit 142 is realized by, for example, a wireless or wired communication means.
• the recipe information receiving unit 143 receives recipe information from the process information management device 13.
• reception is, for example, reception.
• the recipe information receiving unit 143 is realized by, for example, a wireless or wired communication unit.
• the recipe information display unit 144 displays the recipe information received by the recipe information receiving unit 143 on the display.
• the recipe information display unit 144 can be realized by, for example, display driver software.
• the recipe transmission unit 122 of the control device 12 includes the control device 12 and process information. It detects that the management device 13 has been connected, or reads the recipe in the control device side recipe storage unit 121 and transmits it to the process information management device 13 in response to a request from the process information management device 13.
• the control unit 123 of the control device 12 reads the recipe in the control device side recipe storage unit 121 and controls the processing device 11 according to the recipe. Then, the processing apparatus 11 executes a process for the substrate to be processed in accordance with an instruction from the control apparatus 12.
• Step S 401 The recipe receiving unit 132 determines whether or not a recipe has been received from the control device 12. If a recipe is received, the process goes to step S402. If no recipe is received, the process goes to step S403.
• Step S 402 Recipe accumulation unit 133 accumulates the recipe received in step S 401 in recipe storage unit 131.
• Step S 403 The receiving unit 134 determines whether or not process parameter information has been received. If the process parameter information is accepted, the process goes to step S404. If the process parameter information is not accepted, the process returns to step S401.
• Step S 404 Recipe information acquisition unit 135 substitutes 1 for counter i.
• Step S 405 Recipe information acquisition section 135 determines whether or not i-th recipe exists in recipe storage section 131. If the i-th recipe exists, the process goes to step S406, and if the i-th recipe does not exist, the process goes to step S415.
• Step S406 Recipe information acquisition section 135 substitutes 1 for counter j.
• Step S407 The recipe information acquisition unit 135 reads the i-th recipe (eg, file) from the recipe storage unit 131 and opens it.
• the i-th recipe eg, file
• Step S408 The recipe information acquisition unit 135 determines whether or not the j-th process parameter information of the i-th recipe exists. If the j-th process parameter information exists, go to step S409. If the j-th process parameter information does not exist, go to step S409.
• Step S409 The recipe information acquisition unit 135 reads the j-th process parameter information. put out.
• Step S410 The recipe information acquisition unit 135 compares the process parameter information received in Step S403 with the j-th process parameter information read in Step S409, and determines whether or not a predetermined condition is met. To do. If the predetermined condition is not met, the process goes to step S411, and if the predetermined condition is met, the process goes to step S412.
• the predetermined condition is, for example, a perfect match.
• the predetermined condition is, for example, that three pieces of information of a category name, an item name, and a parameter name match among process parameter information.
• the predetermined condition is, for example, that four pieces of information of a category name, an item name, a parameter name, and a value in process parameter information match.
• the predetermined condition is, for example, that the process parameter information includes three information items such as a category name, an item name, and a parameter name, and the difference in values is not more than a predetermined value.
• Step S 411 Recipe information acquisition section 135 increments counter j by 1. Then, the process returns to step S408.
• Recipe information acquisition section 135 acquires recipe information that is information of the i-th recipe.
• the recipe information is, for example, a recipe name.
• the recipe information is, for example, information on the name of the recipe and the location of the j-th process parameter information (such as the line number and the offset from the beginning of the file).
• the recipe information acquisition unit 135 performs processing so as to find all the process parameter information that matches the condition. is there.
• Step S413 The recipe information acquisition unit 135 obtains the recipe information acquired in Step S412.
• Step S415) The output unit 136 reads and outputs the recipe information acquired and temporarily stored by the recipe information acquisition unit 135.
• the output mode of the recipe information of the output unit 136 does not matter.
• the parameter information input unit 141 accepts input of process parameter information from the user. Then, the process parameter information sending unit 142 sends the input process parameter information to the process information management apparatus 13. And the recipe information reception part 143 receives recipe information corresponding to transmission of process parameter information. Next, the recipe information display unit 144 displays the received recipe information.
• Figure 1 shows a conceptual diagram of the group management system.
• the process information management device 13 receives recipes from two or more control devices 12, and the recipe storage unit 131 stores a large number of recipes as shown in FIG.
• Each recipe shown in Figure 5 has multiple steps.
• Each step has information such as “Step No.”, “Step Name”, “Step Time”, “Category Name”, “Item Name”, “Parameter Name”, and “Value”.
• “Step No.” is an ID for identifying a step.
• “Step name” is the name given to the step.
• “Step time” indicates the time at which the step is executed.
• Category name is the name of the category that constitutes the process parameter information.
• “Item name” is the name of the item that constitutes the process parameter information.
• “Parameter name” is a name of a parameter constituting process parameter information. “Value” is the value given to the variable indicated by “Parameter name”.
• Each step includes process parameter information.
• the process parameter information includes information of “category name”, “item name”, “parameter name”, and “value”. Needless to say, the process parameter information may include information other than “category name”, “item name”, “parameter name”, and “value”.
• the user inputs information about the process parameter to be changed from the client device 14 in order to know the effect of the change in the value of the process parameter on other process parameters.
• the user inputs process parameter information from the screen shown in FIG.
• the process parameter information includes “category one name”, “item name”, “parameter name”. Then, it is assumed that the user presses the “execute” button with the mouse.
• the process parameter information input unit 141 of the client device 14 reads "category name
• a step including process parameter information consisting of “ ⁇ ” is searched, and a recipe name including the step (for example, “recipe XY”) is acquired. Also, obtain “Step ⁇ ” that identifies the step that contains the process parameter information.
• the recipe information acquisition unit 135 obtains the acquired recipe information management table shown in FIG. 7 on the memory.
• the acquired recipe information management table has attributes of “ID”, “Recipe name”, and “Step No”. “ID” is information for identifying a record and exists for record management in a table.
• the output unit 136 outputs the acquired recipe information using the acquired recipe information management table shown in FIG. The output here is transmission to the client device 14.
• the recipe information receiving unit 143 of the client device 14 receives recipe information from the process information management device 13. Then, the recipe information display unit 144 displays the received recipe information.
• Fig. 8 shows an example of recipe information output.
• the attribute values (editor, update date, etc.) of the recipe identified by “recipe name” and “recipe name” are displayed.
• the recipe information here includes the recipe name and the attribute values of the recipe (editor, update date, etc.).
• step number corresponding to the recipe identified by that recipe name is displayed. Used to display step information (process parameter information).
• the user when changing the process parameter information, the user can easily know one or more recipes that can be affected by the change of the process parameter. Therefore, the user can easily check the validity of the process parameter change. Further, according to the present embodiment, one or more recipes that can be affected by the change of the process parameter can be easily known, and the process parameter can be appropriately changed. As a result, the operation of the control device and the processing device can be favorably secured.
• the recipe search is performed by the process information management device having a recipe synchronized with the control device, the CPU load of the control device is not affected. Does not affect the manufacturing process. Recipe information can be searched even when the process information management device and the control device are offline.
• the process parameter information input by the user may be “category name”, “item name”, “parameter name” or other information. This also applies to other embodiments.
• the process parameter information input by the user may be “category name”, “item name”, “parameter name”, and “value”.
• An example of the input screen on the client device 14 in such a case is shown in FIG. Then, using the “category name”, “item name”, “parameter name”, and “value” input in FIG. 10, the recipe information acquisition unit 135 of the process information management device 13 searches and outputs the recipe information. To do.
• the process information management device 13 includes the recipe receiving unit 132 and the recipe storage unit 133, and receives the recipe in the recipe storage unit 131 from the control device 12. At the same time, you can store the recipe in the recipe storage 131 in advance. Other than that The same applies to the embodiments.
• the process information management device 13 receives a change in the process parameter information by means not shown (for example, an update reception unit), and in response to the reception, the recipe information acquisition unit 135 changes the process parameter information.
• Recipe information may be obtained by searching for recipes (recipes that use process parameter information).
• the means (not shown) of the process information management device 13 sends updated process parameters to the control device 12 that stores the recipe information searched by the recipe information acquisition unit 135. You can send the entire information or updated recipe.
• the means (for example, the control device side recipe receiving unit) (not shown) of the control device 12 receives the updated process parameter information or the entire updated recipe, and the means (for example, the control device side) The recipe update unit) overwrites and updates the recipe storage unit 121 on the control device side.
• the process information management device 13 stores communication information (for example, the IP address of the control device 12) for communicating with the control device 12 that originally holds each recipe.
• the updated process parameter information or the entire updated recipe is transmitted to the control device 12 using the communication information. Furthermore, in such a case, when an instruction to change the recipe process parameter information in the recipe storage unit 131 in the user information of the client device 14 in the process information management device 13 is given, the change in the process parameter information has an effect.
• the recipe information acquisition unit 135 of the process information management device 13 acquires the recipe information of the recipe to be obtained, and the output unit 136 may output the recipe information acquired by the recipe information acquisition unit 135. Then, the user of the client device 14 may check the recipe information of the recipe that may be affected by the change of the process parameter information, then input an update permission instruction, and then update the recipe.
• processing device 11 and the control device 12 may be separated from each other with a single force. The same applies to other embodiments.
• the processing in the present embodiment may be realized by software. And this Software can be distributed by software download etc. You can also record and distribute this software on a CD-ROM or other recording medium.
• the software that realizes the process information management apparatus in the present embodiment is the following program. In other words, this program searches the recipe stored in the recording medium using the reception step of receiving process parameter information, which is information about the process parameters included in the recipe, and the process parameter information. And a recipe information acquisition step for acquiring recipe information that is information about the retrieved recipe, and a program for executing an output step for outputting the recipe information acquired in the recipe information acquisition step.
• the process parameter information includes a process parameter name
• a process parameter identified by the process parameter name included in the process parameter information is used. It is preferable to retrieve a recipe from a recording medium and obtain recipe information that is information about the retrieved recipe.
• the process parameter information includes a process parameter name and a value of the process parameter.
• the process parameter information identified by the process parameter name included in the process parameter information is searched from the recording medium. It is preferable to obtain recipe information that is information about the recipe.
• FIG. 11 is a conceptual diagram of the group management system in the present embodiment.
• this group management system there is an inquiry from the control device 12 to which the process parameter information change instruction of the recipe is input to the process information management device 13 about the effect of the change of the process parameter information.
• Recipe information that may affect the change in the process is sent from the process information management device 13 to the control device 12 and output from the control device 12.
• the group management system includes one or more processing devices 11 (processing device 11 (1) to processing device 11 (n)), one or more control devices 112 (control device 112 (1) to control device 112 ( n)), and a process information management device 113.
• FIG. 12 is a block diagram of the group management system in the present embodiment. In FIG. 12, the processing device 11 is omitted.
• the control device 112 includes a control device-side recipe storage unit 121, a recipe transmission unit 122, a control unit 123, a change reception unit 1121, a recipe change unit 1122, a process parameter information acquisition unit 1123, a process parameter information transmission unit 1124, A recipe information receiving unit 1125 and a recipe information output unit 1126 are provided.
• the process information management apparatus 113 includes a recipe storage unit 131, a recipe reception unit 132, a recipe storage unit 133, a process parameter information reception unit 1131, a recipe information acquisition unit 1132, and a recipe information transmission unit 1133.
• the change receiving unit 1121 receives a process parameter change instruction in the recipe. More specifically, the change receiving unit 1121 receives a change instruction that is an instruction to change process parameter information that is information about process parameters in the recipe.
• the change instruction includes, for example, a process parameter name and a value after change.
• the change instruction input means may be anything such as a numeric keypad, keyboard, mouse or menu screen.
• the change accepting unit 1121 can be realized by a device driver of an input means such as a numeric keypad or a keyboard, menu screen control software, or the like.
• the recipe changing unit 1122 changes the recipe in the control device side recipe storage unit 121 in accordance with the process parameter change instruction received by the change receiving unit 1121.
• the recipe changing unit 1122 changes the value of the process parameter identified by the process parameter name included in the change instruction received by the change receiving unit 1121 to the value included in the change instruction.
• the recipe change unit 1122 can usually be realized by an MPU, a memory, or the like.
• the processing procedure of the recipe changing unit 1122 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
• the process parameter information acquisition unit 1123 acquires process parameter information that is information about the process parameter to be changed.
• Process parameter information is, for example, Only process parameter names.
• the process parameter information is, for example, a process parameter name and value.
• the process parameter information includes, for example, a category name, an item name, and a process parameter name. Further, the process parameter information includes, for example, a category name, an item name, a process parameter name, and a value.
• the process parameter information acquisition unit 1123 can usually be realized by an MPU, a memory, or the like.
• the processing procedure of the process parameter information acquisition unit 1123 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
• the process parameter information transmission unit 1124 transmits the process parameter information acquired by the process parameter information acquisition unit 1123 to the process information management apparatus 113.
• the process parameter information transmission unit 1124 sends the process parameter information to the process information management device 113 before the recipe change unit 1122 changes the recipe after the change reception unit 1121 receives an instruction to change the process parameter in the recipe. It is preferable to transmit.
• the process parameter information transmission unit 1124 is usually realized by a wireless or wired communication means, but may be realized by a broadcast means.
• the recipe information receiving unit 1125 receives the recipe information, which is the information about the recipe that can be affected by the change of the process parameter with respect to the process parameter information. Received from the management device 113.
• the recipe information receiving unit 1125 is normally realized by a wireless or wired communication means, but may be realized by a means for receiving a broadcast.
• Recipe information output unit 1126 outputs the recipe information received by recipe information receiving unit 1125.
• output is a concept including display on a display, printing on a printer, sound output, transmission to an external device, storage on a recording medium, and the like.
• the recipe information output unit 1126 may or may not include an output device such as a display or a speaker.
• the recipe information output unit 1126 can be realized by output device driver software, or output device driver software and an output device.
• the process parameter information receiving unit 1131 receives process parameter information from the control device 112.
• the process parameter information receiving unit 1131 can also be realized by means of receiving power broadcast or wired communication means for which a wireless communication means is suitable.
• the recipe information acquisition unit 1132 uses the process parameter information received by the process parameter information reception unit 1131 to search for one or more recipes in the recipe storage unit 131, and the process parameter information affects the process parameter information.
• the recipe information acquisition unit 1132 searches the recipe storage unit 131 for a recipe that uses the process parameter identified by the process parameter name included in the process parameter information, and recipe information that is information about the searched recipe. To get.
• the recipe information acquisition unit 1132 uses, for example, a process parameter identified by the process parameter name included in the process parameter information, and the process parameter information reception unit 113 1 receives the value of the process parameter.
• a recipe having a predetermined relationship with a value included in the process parameter information is searched from the recipe storage unit 131, and recipe information which is information about the searched recipe is acquired.
• the recipe information acquisition unit 1132 can usually be realized by an MPU, a memory, or the like.
• the processing procedure of the recipe information acquisition unit 1132 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
• the search process of the recipe information acquisition unit 1132 is the same as that of the recipe information acquisition unit 135.
• the recipe information transmission unit 1133 transmits the recipe information acquired by the recipe information acquisition unit 1132 to the control device 112.
• the recipe information transmission unit 1133 is usually realized by a wireless or wired communication means, but may be realized by a broadcasting means.
• the recipe transmission unit 122 of the control device 112 detects that the control device 112 and the process information management device 113 are connected, or responds to a request from the process information management device 113 to control device side recipe storage unit 121.
• the recipe is read out and transmitted to the process information management device 113.
• the control unit 123 of the control device 112 reads the recipe in the control device side recipe storage unit 121 and controls the processing device 11 according to the recipe.
• the processing apparatus 11 executes a process for the substrate to be processed in accordance with an instruction from the control apparatus 112.
• the value of the process parameter may be changed.
• the processing of the control device 112 will be described using the flowchart of FIG.
• Step S 1301 The change receiving unit 1121 determines whether or not an instruction to change process parameters in the recipe has been received. If a change instruction is accepted, the process proceeds to step S1302, and if a change instruction is not accepted, the process returns to step S1301.
• Step S 1302 The process parameter information acquisition unit 1123 acquires process parameter information, which is information about the process parameter to be changed, in response to the change instruction received in step S 1301.
• Step S 1303 The process parameter information transmission unit 1124 transmits the process parameter information acquired in step S 1302 to the process information management apparatus 113.
• the recipe information receiving unit 1125 is a recipe that is information about a recipe that can be affected by the change of the process parameter to the process parameter information in response to the transmission of the process parameter information in Step S1303. It is determined whether or not information is received from the process information management device 113. If recipe information is received, the process goes to step S 1305, and if recipe information is not received, the process returns to step S 1304.
• Recipe information output unit 1126 outputs the recipe information received in step S 1304.
• Step S 1306 It is determined whether a means (not shown) has received an instruction to change the recipe information. If a recipe information change permission instruction is accepted, the process proceeds to step S1307. If a recipe information change permission instruction is not accepted, the process ends.
• Step S130-7 Recipe changing unit 1122 changes the recipe in control device-side recipe storage unit 121 in response to the process parameter change instruction received in step S1301.
• recipe change unit 1122 changes a process parameter
• recipe information that may be affected by the change is received from process information management device 113 and output. May be. In such a case, it is preferable to be able to cancel the change.
• Step S1401 The process parameter information receiving unit 1131 determines whether or not the process parameter information has been received from the control device 112. If the process parameter information is received, the process goes to step S404. If the process parameter information is not received, the process returns to step S401.
• Recipe information acquisition section 1132 adds the recipe information acquired in step S412 to a memory or the like.
• the recipe information includes information of two or more locations.
• Figure 11 shows a conceptual diagram of the group management system.
• the process information management device 113 receives recipes from two or more control devices 112, and the recipe storage unit 131 stores a large number of recipes as shown in FIG.
• a search is made from the storage unit 131 to obtain a recipe name and a location (here, step number) having the process parameter information.
• Figure 16 shows an example of recipe information that is a set of the acquired recipe name and step number.
• recipe information transmission unit 1133 transmits the recipe information of FIG. 16 to control device 112.
• the recipe information receiving unit 1125 of the control device 112 receives the recipe information of Fig. 16.
• the recipe information output unit 1126 outputs the recipe information of FIG. 16, as shown in FIG. In FIG. 17, the recipe information output unit 1126 outputs only the recipe name in the recipe information. However, the recipe information output unit 1126 may also output a step number. Further, a detailed output instruction from the user may be received, and the step number and / or the contents of the step corresponding to the recipe name indicated by the detailed output instruction may be output.
• the user checks the output in FIG. 17 and presses the “Do not change” button the recipe is not changed.
• the user when changing the process parameter information, the user can easily and reliably confirm the validity of the change. As a result, it is possible to prevent the recipe from being inadvertently corrected and adversely affecting production.
• the recipe change unit 1122 of one control device 112 changes the process parameter information or the recipe
• the process parameter information or recipe may be transmitted to the process information management apparatus 113.
• a means (for example, a change information receiving unit) (not shown) of the process information management apparatus 113 receives the changed process parameter information or recipe from the control apparatus 112, and a means (for example, not shown) of the process information management apparatus 113 (for example, , Server-side recipe update unit) may update the process parameter information or the recipe. .
• the recipe information acquisition unit 1132 acquires recipe information of the recipe that is affected by the update of the process parameter, and a means (for example, an update recipe transmission unit) (not shown) corresponds to the recipe information.
• the updated process parameters or recipe may be transmitted to the control device 112 (except for the control device 112 that originally changed the recipe information).
• the one or more control devices 112 may receive and store process parameters or recipes and update the recipes.
• the software that realizes the control device is the following program.
• this program uses a recipe stored in a recording medium to control a processing apparatus and execute a predetermined process on a substrate to be processed, and change process parameters in the recipe.
• a change acceptance step for accepting an instruction
• a recipe change step for changing the recipe of the recording medium in accordance with the change instruction accepted in the change acceptance step, and a process parameter that is information about the process parameter to be changed
• a process parameter information acquisition step for acquiring information
• a process parameter information transmission step for transmitting the process parameter information acquired in the process parameter information acquisition step to a process information management device, and transmission of the process parameter information.
• the process parameters Recipe information receiving step for receiving recipe information from the process information management device and recipe information received in the recipe information receiving step is output.
• the program for executing the recipe information output step to be executed.
• process parameter information transmission step after receiving an instruction to change the process parameter in the recipe in the change receiving step, before changing the recipe in the recipe changing step, process parameter information Is preferably transmitted to the process information management apparatus.
• the software that realizes the process information management apparatus is the following program. That is, the program includes a process parameter information receiving step for receiving process parameter information from the control device, and the program.
• the process parameter information received in the process parameter information reception step is used to search for one or more recipes on the recording medium, and recipe information that is information about recipes that can be affected by changes in the process parameters relative to the process parameter information.
• a recipe information acquisition step for acquiring the recipe information and a recipe information transmission step for transmitting the recipe information acquired in the recipe information acquisition step to the control device.
• the process parameter information includes a process parameter name
• a process parameter identified by the process parameter name included in the process parameter information is used. It is preferable to retrieve a recipe from a recording medium and obtain recipe information that is information about the retrieved recipe.
• the process parameter information includes a process parameter name and a value of the process parameter.
• the process parameter information identified by the process parameter name included in the process parameter information is searched from the recording medium. It is preferable to obtain recipe information that is information about the recipe.
• each process may be realized by centralized processing by a single device (system) or distributedly processed by a plurality of devices. It is realized by doing that.
• the computer for executing the program may be singular or plural. That is, centralized processing or distributed processing may be performed.
• the two or more communication means existing in one apparatus may be an object. Needless to say, it may be realized by a single medium.
• the group management system according to the present invention has an effect that one or more recipes that can be affected by the change of the process parameter can be easily known, and includes a semiconductor manufacturing apparatus and a liquid crystal panel manufacturing apparatus. It is useful as a group management system for manufacturing equipment.
• FIG. 2 is a diagram showing an example of the same semiconductor wafer manufacturing apparatus
• FIG. 4 is a flowchart for explaining the operation of the process information management apparatus.
• FIG. 11 Conceptual diagram of group management system in embodiment 2.
• FIG. 13 is a flowchart for explaining the operation of the control apparatus.
• FIG. 14 is a flowchart for explaining the operation of the process information management apparatus.

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