TWI344170B - - Google Patents

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Publication number
TWI344170B
TWI344170B TW096115072A TW96115072A TWI344170B TW I344170 B TWI344170 B TW I344170B TW 096115072 A TW096115072 A TW 096115072A TW 96115072 A TW96115072 A TW 96115072A TW I344170 B TWI344170 B TW I344170B
Authority
TW
Taiwan
Prior art keywords
information
recipe
process parameter
unit
parameter
Prior art date
Application number
TW096115072A
Other languages
English (en)
Chinese (zh)
Other versions
TW200816267A (en
Inventor
Tomoko Yamamoto
Minoru Obata
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200816267A publication Critical patent/TW200816267A/zh
Application granted granted Critical
Publication of TWI344170B publication Critical patent/TWI344170B/zh

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Economics (AREA)
  • Strategic Management (AREA)
  • Manufacturing & Machinery (AREA)
  • General Business, Economics & Management (AREA)
  • Tourism & Hospitality (AREA)
  • Theoretical Computer Science (AREA)
  • Marketing (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Game Theory and Decision Science (AREA)
  • Educational Administration (AREA)
  • Development Economics (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • General Factory Administration (AREA)
TW096115072A 2006-04-27 2007-04-27 Group control system, process information management apparatus, control device, and program TW200816267A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006122770A JP5062806B2 (ja) 2006-04-27 2006-04-27 群管理システム、プロセス情報管理装置、制御装置、およびプログラム

Publications (2)

Publication Number Publication Date
TW200816267A TW200816267A (en) 2008-04-01
TWI344170B true TWI344170B (ko) 2011-06-21

Family

ID=38655411

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096115072A TW200816267A (en) 2006-04-27 2007-04-27 Group control system, process information management apparatus, control device, and program

Country Status (4)

Country Link
JP (1) JP5062806B2 (ko)
KR (1) KR100997413B1 (ko)
TW (1) TW200816267A (ko)
WO (1) WO2007125885A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8392136B2 (en) * 2010-07-09 2013-03-05 Kla-Tencor Corporation In-place management of semiconductor equipment recipes
JP6222810B2 (ja) * 2012-07-17 2017-11-01 株式会社日立国際電気 管理装置、基板処理装置、基板処理システム、基板処理装置のファイル管理方法及びファイル転送方法
JP6220871B2 (ja) * 2013-05-22 2017-10-25 株式会社日立国際電気 管理装置、基板処理システム、装置情報更新方法、及び装置情報更新プログラム
GB2586102B (en) 2014-04-14 2021-05-05 Advanced Reactor Concepts LLC Ceramic nuclear fuel dispersed in a metallic alloy matrix
KR102476974B1 (ko) * 2019-03-20 2022-12-14 가부시키가이샤 코쿠사이 엘렉트릭 레시피 작성 방법, 반도체 장치의 제조 방법, 기판 처리 장치 및 레시피 작성 프로그램
JP7185671B2 (ja) * 2020-09-23 2022-12-07 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168703A (ja) * 1987-01-07 1988-07-12 Yokogawa Electric Corp 半導体拡散炉制御装置
JP3282677B2 (ja) * 1992-03-30 2002-05-20 株式会社日立国際電気 半導体製造装置の制御方法及び半導体製造装置
JP3447067B2 (ja) * 1992-04-30 2003-09-16 松下電器産業株式会社 プロセスフロー作成方法
JP2780702B2 (ja) * 1996-05-30 1998-07-30 日本電気株式会社 生産制御システムおよび生産制御方法
JPH11232338A (ja) * 1998-02-17 1999-08-27 Toshiba Corp プロセスフロー作成装置、プロセスフロー作成方法、及び、プロセスフロー作成プログラムを記録したコンピュータ読み取り可能な記録媒体
JP2003162314A (ja) * 2001-11-27 2003-06-06 Mitsubishi Electric Corp 生産管理方法、生産管理システム、および半導体ｉｃ
JP2005250909A (ja) * 2004-03-04 2005-09-15 Fujitsu Ltd 整合性維持システム
JP4664630B2 (ja) * 2004-07-22 2011-04-06 株式会社東芝 半導体装置の製造装置に対する自動レシピ作成装置及び作成方法

Also Published As

Publication number Publication date
TW200816267A (en) 2008-04-01
KR20080066677A (ko) 2008-07-16
KR100997413B1 (ko) 2010-11-30
JP2007294773A (ja) 2007-11-08
JP5062806B2 (ja) 2012-10-31
WO2007125885A1 (ja) 2007-11-08

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