WO2007105550A1 - Procede de fusion de verre et verre correspondant - Google Patents

Procede de fusion de verre et verre correspondant Download PDF

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Publication number
WO2007105550A1
WO2007105550A1 PCT/JP2007/054385 JP2007054385W WO2007105550A1 WO 2007105550 A1 WO2007105550 A1 WO 2007105550A1 JP 2007054385 W JP2007054385 W JP 2007054385W WO 2007105550 A1 WO2007105550 A1 WO 2007105550A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass
melting
zirconium
sno
alloy
Prior art date
Application number
PCT/JP2007/054385
Other languages
English (en)
Japanese (ja)
Inventor
Takemi Kikutani
Yoshinori Nishikawa
Nobutoshi Itou
Original Assignee
Nippon Electric Glass Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co., Ltd. filed Critical Nippon Electric Glass Co., Ltd.
Priority to CN2007800016328A priority Critical patent/CN101360688B/zh
Publication of WO2007105550A1 publication Critical patent/WO2007105550A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/42—Details of construction of furnace walls, e.g. to prevent corrosion; Use of materials for furnace walls
    • C03B5/43—Use of materials for furnace walls, e.g. fire-bricks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/12—Silica-free oxide glass compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/12—Silica-free oxide glass compositions
    • C03C3/14—Silica-free oxide glass compositions containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/12—Silica-free oxide glass compositions
    • C03C3/16—Silica-free oxide glass compositions containing phosphorus
    • C03C3/19—Silica-free oxide glass compositions containing phosphorus containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/08—Frit compositions, i.e. in a powdered or comminuted form containing phosphorus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/24—Fusion seal compositions being frit compositions having non-frit additions, i.e. for use as seals between dissimilar materials, e.g. glass and metal; Glass solders

Definitions

  • the present invention relates to a glass melting method and glass, and in particular, various ceramic packages.
  • Sealing materials used in electronic components and display devices such as ceramic packages and magnetic heads can be sealed at low temperatures so as not to adversely affect elements such as ICs and crystal units, and thermal expansion It is required that the coefficient matches that of the object to be sealed.
  • Patent Document 1 Various composite materials obtained by adding a refractory filler to these glasses have been proposed (for example, see Patent Document 1).
  • PbO _B 0 glass usually has a platinum melting capacity excellent in heat resistance and corrosion resistance.
  • the melting temperature is low, so there is no problem such as breakage of the melting container with less erosion of the platinum melting container after melting.
  • SnO-PO glass is made of platinum as soon as it erodes the platinum melting vessel during melting.
  • Patent Document 1 JP-A-2-229738
  • Patent Document 2 Japanese Patent Laid-Open No. 11 292564
  • Patent Document 3 Japanese Patent Laid-Open No. 2001-48579
  • Patent Document 4 Japanese Patent No. 2628007
  • Patent Document 5 Japanese Patent Publication No. 7_25567
  • Patent Document 6 JP-A-9-235136
  • the technical problem of the present invention is that SnO_P ⁇ which easily corrodes a platinum melting vessel
  • a method of melting glass that can repeatedly melt glass, etc. over a long period of time, and does not cause the glass to denature even if the components of the melting container are eluted into the molten glass during melting. And to provide glass.
  • the glass melting method of the present invention is a glass material prepared The glass is melted in a melting container, and the melting container is made of dinoleconium or a zirconium alloy.
  • the glass melting method of the present invention is characterized by melting in an inert atmosphere or a reducing atmosphere.
  • inert atmosphere refers to a vacuum environment (below ⁇ )
  • rare gas atmosphere such as N, Ar, and He
  • reducing atmosphere refers to oxygen at normal pressure.
  • the glass melting method of the present invention is characterized in that the glass contains 20 to 70 mol% of SnO as a glass composition.
  • the glass melting method of the present invention is characterized in that the glass contains, as a glass composition, mol%, SnO 20-70%, PO 10-50%, BO 0-30%. Attached.
  • the glass melting method of the present invention has a purity of 97% by mass or more of dinoleconium and contains one or more selected from the group of Hf, Fe and Cr as impurities. It is characterized by this.
  • the glass melting method of the present invention is such that the zirconium alloy contains zirconium, Sn,
  • It is characterized by being a Zircaloy alloy containing one or more selected from the group of Fe, Cr and Ni.
  • the method for melting glass according to the present invention is such that the zirconium alloy is a zirconium iron alloy.
  • It is characterized by being either a zirconium copper alloy or a zirconium aluminum alloy.
  • the glass of the present invention is characterized in that it is produced by the glass melting method described above.
  • the glass of the present invention has a glass composition with a ZrO of 100 to 3000 pp in terms of mass.
  • the glass of the present invention has a glass composition, SnO 20 to 70% by mole 0/0, P_ ⁇
  • the glass of the present invention is used for sealing electronic parts or display devices. Characterized by
  • the glass melting method of the present invention is a SnO—PO system glass that easily corrodes the melting vessel.
  • a melting vessel made of zirconia is a glass melting temperature (eg 70
  • a melting vessel made of dinoleconium or dinoleconium alloy has characteristics that make it difficult to devitrify the glass in addition to difficult to separate the glass even if zirconium or the like elutes into the glass during melting. is doing.
  • the effects described below can be enjoyed by leaching dinoleconium and the like into the glass during melting.
  • the glass melting method of the present invention it is preferable to melt in an inert atmosphere or a reducing atmosphere. If zirconium or a zirconium alloy is left in the atmosphere in the melting temperature range (for example, 700 to 1000 ° C.), the surface of zirconium or zirconium alloy is oxidized and its toughness is easily impaired. This tendency is particularly noticeable when the melting temperature is 900 ° C or higher. As a result, the melting container is subject to stress failure when subjected to thermal shock or when the melting container is cooled. If it is melted in an inert atmosphere or a reducing atmosphere, the zirconium-zinoleconium alloy is difficult to oxidize, so the above-mentioned situation in which the melting vessel is difficult to break can be effectively avoided.
  • zirconium or a zirconium alloy is left in the atmosphere in the melting temperature range (for example, 700 to 1000 ° C.), the surface of zirconium or zirconium alloy is oxidized and its toughness is easily impaired
  • the glass melting method of the present invention does not exclude the aspect of melting in the air, but if it is melted in an inert atmosphere or a reducing atmosphere, in addition to the above-mentioned advantages. In addition, since the life of the melting container can be increased, the melting cost can be reduced.
  • SnO_PO glass SnO in the glass composition is acid.
  • the content of SnO is mol%, preferably 20 to 70 o / ⁇ , more preferably f to 20 to 65 o / o , and further (preferably to 30 to 60 o / ⁇ ).
  • zirconium has a purity of 97% by mass or more, preferably 99% by mass or more, and is selected from the group consisting of Hf, Fe and Cr as impurities 1 Species or two or more can be included.
  • Hf, Fe, and Cr are preferably expressed in terms of mass%, and Hf is 3% or less and Fe + Cr is 0.2% or less. If the purity of zirconium is less than 97% by mass, impurity components may be dissolved during melting and the glass may be altered, which is not preferable.
  • the zirconium alloy is a zircaloy (equivalent to ASTM R6080 2 or equivalent to ASTM R60804) in which one or more selected from the group strength of Sn, Fe, Cr and Ni are added. ), Zirconium iron alloys, zirconium copper alloys, and zirconium aluminum alloys are preferred. These zirconium alloys are excellent in corrosion resistance, heat resistance, workability, etc., and can be suitably used as a melting vessel.
  • the power of being 0.05 to 0.3%, Cr of 0.05 to 0.2%, and Ni of 0.02 to 0.1%. Addition of these components can prevent excessive corrosion resistance.
  • the thickness of the melting container is preferably 1 to 5 mm.
  • 3 mm is more preferable. By doing so, it is possible to prevent cracking of the melting container without impairing the workability of the melting container.
  • the melting temperature is 800 to 140.
  • the melting temperature is preferably 800 to 1100 ° C. . Further, if the melting temperature is set to 800 to 1000 ° C, the glass can be appropriately melted. When the melting temperature is high, the valence of Sn changes to divalent power and tetravalent, that is, SnO is oxidized immediately and when the melting temperature is low, unmelted components of the glass raw material tend to remain after melting.
  • the ZrO content in the glass composition is 100 to 100 in terms of mass.
  • the eluted component acts as a reducing agent, and the situation where SnO in the glass composition is oxidized can be suppressed. If the ZrO content is less than lOOppm, the weather resistance and moisture resistance of the glass will be improved.
  • the softening point of the glass will rise and
  • the glass produced by the glass melting method of the present invention has a low melting point property, it is preferably SnO-P- glass.
  • SnO1 P O-based glass has a glass composition and
  • SnO is a component that lowers the melting point of glass. If the SnO content is less than 30%, the viscosity of the glass becomes high, the firing temperature becomes too high, and sealing becomes impossible at a low temperature. If the SnO content exceeds 70%, vitrification becomes difficult. In particular, if there is a large amount of SnO, the glass tends to be devitrified at the time of firing. Therefore, devitrification of the glass at the time of firing is not allowed. In some cases, the SnO content is preferably 60% or less. ,. In addition, if the SnO content is 40% or more, the fluidity of the glass can be improved, and the airtight reliability of electronic parts, etc. Is more preferable.
  • PO is a glass-forming oxide, a component that stabilizes glass, and its content
  • B 2 O is not an essential component but is a glass-forming component and is contained in the glass composition.
  • the content of B 2 O is 0-30%, preferably
  • the SnO_PO glass based on the present invention has a glass composition in addition to the above components.
  • R ⁇ is the total amount of Li ⁇ , Na ⁇ , K ⁇ and / or Cs ⁇
  • ZnO is not an essential component, it is a network-modifying oxide and has a large effect of stabilizing the glass, so it is desirable to contain 4% or more. However, if the ZnO content exceeds 20%, devitrification tends to occur on the glass surface during firing. In addition, when the sealing process is a long time (for example, 1 hour or more), the glass surface tends to be devitrified, specifically in the PDP sealing process. . In such a case, the content of ZnO may be 5 to 15%.
  • MgO is a network-modifying oxide and has an effect of stabilizing the glass. If MgO exceeds 20%, devitrification tends to occur on the glass surface during firing.
  • the MgO content is preferably 0 to 5%.
  • Al 2 O is an intermediate oxide. Al O is not an essential component, but it stabilizes the glass.
  • SiO is a glass-forming oxide. Si ⁇ is not an essential component, but suppresses devitrification
  • the content of Si 2 O is preferably 0 to 10%.
  • R0 is not an essential component, but at least one of the R0 components is 0.
  • the sealing strength with the object to be sealed can be increased.
  • the content of R0 exceeds 20%, the glass tends to devitrify during firing. In firing
  • the content of R ⁇ should be 10% or less.
  • the SnO_PO glass according to the present invention has a glass composition in addition to the above components.
  • the total amount of BaO) or the like can be contained in a total amount of 0 to 35%, preferably 0 to 25%. If the total amount of these components exceeds 35%, the glass composition will be unbalanced, and the glass will be unstable, and the glass will be easily devitrified during molding. In addition, In 2 O or the like can be added to increase the weather resistance and moisture resistance of the glass.
  • WO and MoO are each preferably 0 to 20%, particularly preferably 0 to 10%.
  • NbO and TiO are each 0 to 15%, particularly preferably 0 to 10%.
  • the CuO and MnO contents are preferably 0 to 10%, particularly 0 to 5%, respectively. If these components exceed 10%, the glass tends to become unstable.
  • the total content of R'O is preferably 0 to 15%, particularly preferably 0 to 5%.
  • R'O is 15
  • the glass tends to be unstable.
  • O can be used for the purpose of obtaining high weather resistance and moisture resistance.
  • O content In O content
  • the content is preferably 0-5%. If the In O content is more than 5%, In ⁇ is expensive Since this is a raw material, the cost of the glass raw material will rise.
  • PbO is not substantially contained in the glass composition.
  • substantially no PbO refers to the case where the content of PbO in the glass composition is 100 Oppm or less.
  • the glass of the present invention as a glass composition, in mol 0/0, Sn_ ⁇ 20 to 70%, PO 10.about.5
  • the glass is glass
  • the power it is more preferable to have the power to contain 300-1000ppm S especially preferred. In this way, the weather resistance and moisture resistance of the glass can be improved. ZrO content is 10
  • It can be introduced into the glass composition by melting using a glass melting container or the like.
  • the glass of the present invention can be suitably produced by the above glass melting method.
  • SnO—PO glass having 270-380. It has a glass transition temperature of C, about 400-60
  • SnO—PO glass having such characteristics matches the thermal expansion coefficient of the object to be sealed.
  • Glass powder it can be used alone as a sealing material.
  • Thermal expansion coefficient of the composite material it is important to lower rather designed about 5 ⁇ 30 X 10- 7 / ° C with respect to the article to be sealed. In this way, the stress applied to the sealing layer can be set to the compression (compression) side to prevent destruction of the sealing layer. In this case, what is necessary is just to prepare so that it may become 45-95 volume% of glass powder, and 5-55 volume% of refractory filler powder.
  • Fluorescent display tube VFD
  • field emission display FED
  • PDP cathode
  • thermal expansion coefficient of the sealing material it is preferable to adjust the thermal expansion coefficient of the sealing material to about 60: 100 X 10 _7 / ° C.
  • refractory filler powders such as willemite ceramic, ⁇ -eucryptite, lead titanate ceramic, cordierite, tin oxide solid solution, zircon ceramic, mullite, quartz glass, alumina, etc. as refractory filler May be added.
  • refractory filler powder can be added to improve mechanical strength. From an environmental point of view, it is preferable that the refractory filler powder does not substantially contain PbO.
  • Tables 1 and 2 show examples (No .:! To 9) of the present invention, and Table 3 shows comparative examples (Nos. 10 to 12).
  • Zircaloy 4 ASTM G ra de e R60804 equivalent
  • Zircaloy 4 ASTM G ra d e R6 O 8 O 4 equivalent
  • the molten glass in the melting vessel was poured out between a pair of rotating rollers, and a film-like glass sample was prepared while rapidly cooling the molten glass with one rotating roller.
  • the formed film-like glass is pulverized with a ball mill and then passed through a sieve with a mesh size of 105 xm. About 10 / m glass powder was obtained.
  • the molten glass in the melting container was poured out into a carbon mold, and a plate-like glass sample was produced.
  • the glass transition point was determined by differential thermal analysis (DTA), and the thermal expansion coefficient was determined by a push rod thermal expansion measurement (TMA) apparatus.
  • DTA differential thermal analysis
  • TMA push rod thermal expansion measurement
  • the flow diameter was evaluated by the following flow button test.
  • the formed glassy glass was pulverized by a ball mill and then passed through a sieve having an aperture of 105 am to obtain a glass powder having an average particle size of about 10 ⁇ m.
  • a powder having a mass corresponding to the true specific gravity of the obtained glass powder was weighed and pressed into a button shape having a diameter of 20 mm using a mold to obtain a button-shaped powder formed body.
  • this powder compact was placed on a window glass and then fired in the atmosphere shown in the table.
  • the temperature was increased to a firing temperature of 450 ° C. at a rate of 10 ° C./minute, held at 450 ° C. for 10 minutes, and then cooled to room temperature at 10 ° C./minute.
  • the diameter of the button after firing was measured with a digital caliper.
  • the diameter of this button should be at least 20 mm when used as a sealing material.
  • the glass melting method and glass of the present invention include various ceramic packages, sealing of electronic components such as a magnetic head, sealing of various display devices, PDP partition walls, and double metal thermos. Suitable for container sealing and various optical glasses.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)

Abstract

Le problème à résoudre dans le cadre de la présente invention consiste à proposer un procédé de fusion de verre permettant une fusion répétée et sur une longue période de verres SnO-P2O5, lesquels verres étant capables de corroder un récipient de fusion fait à partir de platine, et entraînant peu de détérioration du verre avec les constituants d'un récipient de fusion même si les constituants de celui-ci pénètrent dans le verre en fusion au cours de l'étape de fusion ; et le verre correspondant. La solution proposée est un procédé de fusion de verre consistant à faire fondre un lot de matière première de verre dans un récipient de fusion, caractérisé en ce que le récipient de fusion est un récipient fait à partir de zirconium ou d'un alliage de zirconium.
PCT/JP2007/054385 2006-03-13 2007-03-07 Procede de fusion de verre et verre correspondant WO2007105550A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2007800016328A CN101360688B (zh) 2006-03-13 2007-03-07 玻璃的熔融方法和玻璃

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-066861 2006-03-13
JP2006066861 2006-03-13
JP2007-045579 2007-02-26
JP2007045579A JP5170817B2 (ja) 2006-03-13 2007-02-26 ガラスの溶融方法

Publications (1)

Publication Number Publication Date
WO2007105550A1 true WO2007105550A1 (fr) 2007-09-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/054385 WO2007105550A1 (fr) 2006-03-13 2007-03-07 Procede de fusion de verre et verre correspondant

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JP (1) JP5170817B2 (fr)
KR (1) KR100984753B1 (fr)
CN (1) CN101360688B (fr)
WO (1) WO2007105550A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012193065A (ja) * 2011-03-16 2012-10-11 Nippon Electric Glass Co Ltd 光学ガラス
EP2947054A1 (fr) * 2014-05-22 2015-11-25 Heraeus Quarzglas GmbH & Co. KG Composant, notamment destiné à être utilisé dans un procédé d'étirage en creuset pour verre à quartz et procédé de fabrication d'un tel composant

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5354447B2 (ja) * 2008-08-13 2013-11-27 日本電気硝子株式会社 色素増感型太陽電池用ガラス組成物および色素増感型太陽電池用材料
CN104936916A (zh) * 2013-04-04 2015-09-23 日本电气硝子株式会社 光学玻璃
JP6489414B2 (ja) * 2014-12-16 2019-03-27 日本電気硝子株式会社 ガラスの製造方法
JP5979455B2 (ja) * 2015-06-16 2016-08-24 日本電気硝子株式会社 光学ガラス
JP7121337B2 (ja) * 2018-07-05 2022-08-18 日本電気硝子株式会社 ガラス材の製造方法及びガラス材
JP7205043B2 (ja) 2019-10-15 2023-01-17 Ｙｅｊガラス株式会社 低融性スズリン酸塩系ガラスフリット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788037A (en) * 1980-11-14 1982-06-01 Toshiba Corp Discharging apparatus for molten glass from glass melting furnace
JP2001010843A (ja) * 1999-04-30 2001-01-16 Ohara Inc 結晶性低融点ガラスおよび封着用組成物
JP2003246629A (ja) * 2002-02-26 2003-09-02 Olympus Optical Co Ltd 光学素子成形用金型の製造方法及び光学素子成形用金型

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2777882B1 (fr) * 1998-04-22 2000-07-21 Produits Refractaires Nouveaux materiaux frittes produits a partir de zircon et de zircone
FR2832403B1 (fr) * 2001-11-20 2004-07-23 Saint Gobain Ct Recherches Composition refractaire non faconnee, destinee notamment a la realisation de soles d'un four de verrerie
JP4446283B2 (ja) * 2002-11-29 2010-04-07 日本電気硝子株式会社 ガラス溶融炉
TWI272257B (en) * 2002-11-29 2007-02-01 Nippon Electric Glass Co Glass smelting furnace and manufacturing method of glass

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788037A (en) * 1980-11-14 1982-06-01 Toshiba Corp Discharging apparatus for molten glass from glass melting furnace
JP2001010843A (ja) * 1999-04-30 2001-01-16 Ohara Inc 結晶性低融点ガラスおよび封着用組成物
JP2003246629A (ja) * 2002-02-26 2003-09-02 Olympus Optical Co Ltd 光学素子成形用金型の製造方法及び光学素子成形用金型

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012193065A (ja) * 2011-03-16 2012-10-11 Nippon Electric Glass Co Ltd 光学ガラス
EP2947054A1 (fr) * 2014-05-22 2015-11-25 Heraeus Quarzglas GmbH & Co. KG Composant, notamment destiné à être utilisé dans un procédé d'étirage en creuset pour verre à quartz et procédé de fabrication d'un tel composant
US9938635B2 (en) 2014-05-22 2018-04-10 Heraeus Quarzglas Gmbh & Co. Kg Method for producing a component, particularly for use in a crucible pulling method for quartz glass

Also Published As

Publication number Publication date
CN101360688B (zh) 2012-03-28
KR100984753B1 (ko) 2010-10-01
JP2007277076A (ja) 2007-10-25
JP5170817B2 (ja) 2013-03-27
KR20080047624A (ko) 2008-05-29
CN101360688A (zh) 2009-02-04

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