WO2007099878A1 - 測定装置、測定方法、試験装置、試験方法、及び電子デバイス - Google Patents
測定装置、測定方法、試験装置、試験方法、及び電子デバイス Download PDFInfo
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- WO2007099878A1 WO2007099878A1 PCT/JP2007/053425 JP2007053425W WO2007099878A1 WO 2007099878 A1 WO2007099878 A1 WO 2007099878A1 JP 2007053425 W JP2007053425 W JP 2007053425W WO 2007099878 A1 WO2007099878 A1 WO 2007099878A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/31708—Analysis of signal quality
- G01R31/31709—Jitter measurements; Jitter generators
Definitions
- Measurement apparatus measurement apparatus, measurement method, test apparatus, test method, and electronic device
- the present invention relates to a measuring apparatus and measuring method for measuring a signal under measurement, a testing apparatus and a testing method for testing a device under test, and an electronic device.
- the present invention relates to a measurement apparatus, a measurement method, a test apparatus, and a test method for measuring jitter of a signal under measurement output from a device under test.
- a test for measuring jitter of a signal under measurement output from the electronic device is known.
- the jitter of the signal under measurement is measured by inputting the signal under measurement into a time interval analyzer, oscilloscope, or the like.
- the jitter can be calculated by measuring the phase error of the edge of the signal under measurement, for example.
- a function test for determining whether or not it matches the expected pattern of the pattern force of a signal under measurement output from the electronic device is known.
- the data pattern of the signal under measurement is detected by comparing the voltage value of the signal under measurement output by the electronic device with a threshold voltage when a predetermined test pattern is input to the electronic device. Then, it is determined whether or not the data pattern force matches the expected value pattern.
- the function test apparatus compares the voltage value of the signal under measurement with a threshold voltage at a set timing. Therefore, by gradually shifting the timing, The edge of the signal under measurement can be detected by detecting the transition timing of the constant signal data pattern. For this reason, it is possible to measure jitter using a function test device using this function.
- the conventional function test apparatus sets the sampling timing at the test rate synchronized with the period of the signal under measurement. Therefore, in order to gradually shift the relative phase of the sampling timing with respect to the signal under measurement within each test rate, it is necessary to set the sampling timing phase for each test rate. For this reason, when performing a jitter test, it was necessary to make complicated timing settings. Also, since the timing is shifted according to the relative phase, the measurement accuracy is not suitable for testing.
- an input signal under measurement includes an amplitude noise component in addition to a timing noise component. For this reason, it is difficult to accurately measure the timing noise of the signal under measurement.
- an object of one aspect of the present invention is to provide a measurement apparatus, a measurement method, a test apparatus, a test method, and an electronic device that can solve the above-described problems.
- a measuring apparatus for measuring a signal under measurement, the voltage value of the signal under measurement at the timing of a strobe signal sequentially applied, A comparator that sequentially compares a given reference voltage value, a strobe timing generator that sequentially generates strobe signals arranged at approximately equal time intervals, a capture memory that stores the comparison result of the comparator, and a comparison result that is stored in the capture memory And a digital signal processing unit for calculating the jitter of the signal under measurement.
- a test apparatus for testing a device under test A measuring apparatus for measuring jitter of a signal under measurement output from the device under test, and a jitter determining unit for determining the quality of the device under test based on the jitter measured by the measuring apparatus.
- a comparator that sequentially compares the voltage value of the signal under measurement with a given reference voltage value
- a strobe timing generator that sequentially generates strobe signals arranged at approximately equal time intervals
- a comparator There is provided a test apparatus having a capture memory for storing a comparison result and a digital signal processing unit for calculating jitter of a signal under measurement based on the comparison result stored in the capture memory.
- a measurement method for measuring a signal under measurement having a predetermined period, and the voltage value of the signal under measurement and the reference given at the timing of the strobe signal given sequentially A comparison stage for sequentially comparing voltage values, a strobe timing generation stage for sequentially generating strobe signals arranged at approximately equal time intervals, a storage stage for storing comparator comparison results, and a comparison result stored by a captcha memory And a digital signal processing step for calculating jitter of the signal under measurement.
- a test method for testing a device under test wherein a measurement stage for measuring jitter of a signal under measurement output from the device under test is measured, and measurement is performed during the measurement stage.
- the strobe timing generation stage that sequentially generates strobe signals arranged at approximately equal time intervals, the storage stage that stores the comparator comparison results, and the comparison results that are stored in the captcha memory And a digital signal processing stage for calculating jitter of the signal under measurement.
- a measuring apparatus that measures a signal under measurement having a predetermined period, and the voltage value of the signal under measurement is given at the timing of the strobe signal given sequentially.
- a comparator that sequentially compares the reference voltage value of 1 and the second reference voltage and outputs a comparison result of 3 values, and a capture that stores the comparison result of the comparator
- a measuring apparatus including a memory and a digital signal processing unit that calculates jitter of a signal under measurement based on a comparison result stored in the cappture memory.
- an electronic device that outputs a signal under measurement includes an operation circuit that generates the signal under measurement, and a measurement device that measures the signal under measurement.
- FIG. 1 is a diagram showing an example of a configuration of a test apparatus 100 according to an embodiment of the present invention.
- FIG. 2 is a diagram showing an example of a strobe signal generated by a strobe timing generator 30.
- FIG. 3A, FIG. 3B, and FIG. 3C are diagrams showing a configuration example of the comparator 20.
- FIG. 4 is a diagram showing an example of the operation of the measuring apparatus 10 when the comparator 20 shown in FIG. 3A is used.
- FIG. 5A and FIG. 5B are diagrams showing a configuration example of the digital signal processing unit 60.
- FIG. 6A and FIG. 6B are diagrams showing an operation example of the linear phase removal unit 68.
- FIG. 7 shows a comparison between the actual jitter value measured by the conventional jitter measurement method and the actual jitter value measured by the test apparatus 100.
- FIG. 8A and FIG. 8B are diagrams showing a configuration example of the band limiting unit 62.
- FIG. 9 is a diagram illustrating an example of a frequency band that the filter 74 passes.
- FIG. 10 is a diagram showing another example of the configuration of the measuring apparatus 10.
- FIG. 11 is a diagram illustrating an example of operations of the comparator 20 and the strobe timing generator 30.
- FIG. 12 is a diagram showing another example of the configuration of the measuring device 10.
- FIG. 13 is a diagram showing another example of the configuration of the comparator 20.
- FIG. 14 is a diagram illustrating an example of operations of the comparator 20 and the strobe timing generator 30 illustrated in FIG.
- FIG. 15 is a flowchart showing an example of a method for correcting an error in sampling timing.
- FIG. 16 is a flowchart showing an example of a method for correcting an error in sampling timing.
- FIG. 17 is a diagram showing another example of the configuration of the test apparatus 100.
- FIG. 18 is a diagram showing an example of the configuration of an electronic device 400 according to an embodiment of the present invention. Explanation of symbols
- FIG. 1 is a diagram illustrating an example of a configuration of a test apparatus 100 according to an embodiment of the present invention.
- the test apparatus 100 is an apparatus for testing a device under test 200 such as a semiconductor circuit, and includes a measurement apparatus 10 and a determination unit 70.
- the measuring apparatus 10 measures the jitter of the signal under measurement output from the device under test 200.
- the signal under measurement is a signal having a predetermined period.
- the signal under measurement may be a clock signal or a data signal.
- the measuring apparatus 10 may measure the timing jitter of the signal under measurement.
- the determination unit 70 determines pass / fail of the device under test 200 based on the jitter of the signal under measurement measured by the measuring apparatus 10. For example, the determination unit 70 may determine the quality of the device under test 200 based on whether or not the timing jitter amount of the signal under measurement is greater than or equal to a predetermined reference value. The reference value depends on the required specifications of the device under test 200, etc. May be determined.
- the measuring apparatus 10 includes a comparator 20, a strobe timing generator 30, a captcha memory 40, a digital signal conversion unit 50, and a digital signal processing unit 60.
- the comparator 20 sequentially compares the voltage value of the signal under measurement and the given reference voltage value at the timing of the given strobe signal.
- the strobe timing generator 30 sequentially generates strobe signals at approximately equal time intervals.
- the strobe timing generator 30 may sequentially generate strobe signals in synchronization with the period of the signal under measurement.
- the strobe timing generator 30 may sequentially generate strobe signals independently of the period of the signal under measurement.
- the strobe timing generator 30 may sequentially generate strobe signals in synchronization with a period different from the period of the signal under measurement.
- the capture memory 40 stores the comparison result output from the comparator 20.
- the capture memory 40 stores the comparison results sequentially output according to the respective strobe signals of the comparators 20 in alignment with the phase of the corresponding strobe signal.
- the digital signal processor 60 calculates the jitter of the signal under measurement based on the comparison result stored in the captcha memory 40.
- the digital signal processing unit 60 may calculate the jitter of the signal under measurement by, for example, a method described later with reference to FIGS. 5A and 5B. Further, the digital signal processing unit 60 may calculate the jitter of the signal under measurement by another known technique.
- data corresponding to a signal processing method in the digital signal processing unit 60 is input to the digital signal processing unit 60.
- the digital signal processing unit 60 calculates the jitter of the signal under measurement based on the zero-cross point of the signal under measurement
- the digital signal processing unit 60 has an absolute value of amplitude n (where n is It is preferable to input a signal indicating a discrete value in a range smaller than a real number.
- the measuring apparatus 10 in this example converts the comparison result stored in the capsule memory 40 into a digital signal to be input to the digital signal processing unit 60.
- the digital signal converter 50 converts each voltage value of the signal under measurement into a digital value in the range whose absolute value is smaller than n (where n is a real number) based on the comparison result stored in the captcha memory. Generate a digital signal.
- the digital signal converter 50 roughly compares the comparison results. Convert it to a digital value between 1 and 1!
- the digital signal converter 50 converts a logical value H into a digital value 1 and outputs a digital signal obtained by converting a logical value L into a digital value 1.
- the digital signal conversion unit 50 converts each comparison result into digital values 1, 0, and ⁇ 1 according to the logical value of each comparison result. .
- FIG. 2 is a diagram showing an example of the strobe signal generated by the strobe timing generator 30. As shown in FIG. In this example, the period of the signal under measurement is assumed to be T. As described above, the stove timing generator 30 sequentially generates stove signals at substantially equal time intervals in synchronization with the period T of the signal under measurement or asynchronously.
- the test apparatus 100 operates every cycle (T0, Tl, ⁇ 2,%) Corresponding to the operation period (test rate) synchronized with the period T of the signal under measurement.
- the strobe timing generator 30 generates a plurality of strobe signals by generating a single strobe signal for each cycle according to the test rate. May be. Further, the strobe timing generator 30 may generate a strobe signal asynchronously with the test rate as shown in (3) of FIG. At this time, the number of the strobe signals generated for each cycle is determined by the cycle in which the strobe timing generator 30 generates the strobe signal and the test rate.
- the strobe timing generator 30 may be an oscillation circuit that operates independently of the operation cycle in the test apparatus 100.
- the period ⁇ of the signal under measurement and the test rate of the test apparatus 100 do not have to coincide with each other.
- the test apparatus 100 also performs a function test described later, it is preferable that the period ⁇ of the signal under measurement coincides with the test rate.
- the strobe timing generator 30 has (1) a strobe signal with a single strobe for each test rate, and (2) a test rate as a strobe signal with strobes arranged at approximately equal time intervals. For each, a strobe signal in which a plurality of strobes are arranged or (3) a strobe signal in which strobes are arranged independently of the test rate may be generated.
- test rate of the test apparatus 100 is equal to the cycle T of the signal under measurement.
- the test rate according to the present invention is necessary, such as the cycle T of the signal under test, when the function test is not performed. Set it independently of the period T.
- FIG. 3A, FIG. 3B, and FIG. 3C are diagrams illustrating a configuration example of the comparator 20.
- the comparator 20 shown in FIG. 3A is supplied with the first reference voltage VOH and the second reference voltage VOL, and outputs a three-value comparison result.
- the comparator 20 determines that the voltage value of the signal under measurement is greater than the first reference voltage VOH, the voltage value of the signal under measurement is less than or equal to the first reference voltage VO H and greater than the second reference voltage VOL.
- a different comparison result is output.
- the comparator 20 includes a first comparator 22-1 and a second comparator 22-2.
- the first comparator 22-1 and the second comparator 22-2 are supplied with the signal under measurement branched.
- a strobe signal indicating substantially the same timing is supplied from the strobe timing generator 30 to the first comparator 22-1 and the second comparator 22-2.
- the first comparator 22-1 compares the voltage value of the signal under measurement with the first reference voltage VOH for each given strobe signal. For example, the first comparator 22-1 outputs a logical value indicating High when the voltage value of the signal under measurement is greater than the first reference voltage VOH, and the voltage value of the signal under measurement is equal to the first reference voltage. Outputs a logic value indicating Low when VOH or less.
- the second comparator 22-2 compares the voltage value of the signal under measurement with the second reference voltage VOL for each given strobe signal. For example, the second comparator 22-2 outputs a logical value indicating High when the voltage value of the signal under measurement is greater than the second reference voltage VOL, and the signal under measurement is output. When the voltage value of the signal is less than or equal to the second reference voltage VOL, a logic value indicating Low is output.
- the digital signal converter 50 converts the respective comparison results (High, High), (Low, High), (Low, Low) into, for example, digital values of 1, 0, and 1 respectively. .
- the comparator 20 shown in FIG. 3B outputs different comparison results depending on whether or not the voltage value of the signal under measurement is larger than a given reference voltage value VT. That is, the comparator 20 in this example outputs a binary comparison result.
- the comparator 20 includes a comparator 22 to which a reference voltage V T and a signal under measurement are input.
- the comparator 22 compares the voltage value of the signal under measurement with the reference voltage value VT according to the strobe signal given from the strobe timing generator 30. For example, when the voltage value of the signal under measurement is greater than the reference voltage value VT, a logic value indicating High is output, and when the voltage value of the signal under measurement is less than or equal to the reference voltage value VT, a logic value indicating Low is output. Output.
- the comparator 20 outputs the logical value output from the comparator 22 as a comparison result.
- the digital signal converter 50 converts the comparison results High and Low into digital values of, for example, 1 and ⁇ 1, respectively.
- the comparator 20 shown in FIG. 3C has a plurality of comparators 22. Each comparator 22 is given a different reference voltage VT1, VT2,. In addition, each signal to be measured is branched and input to each comparator 22. Each comparator 22 is supplied with strobe signal power and strobe timing generator 30 having substantially the same timing.
- Each comparator 22 compares the corresponding reference voltage V Tx with the voltage value of the signal under measurement in accordance with the supplied strobe signal.
- the operation of each comparator 22 is the same as that of the comparator 22 shown in FIG.
- Comparator 20 outputs each comparator 22 A combination of logical values is output as a comparison result.
- the comparator 20 in this example is given three or more different reference voltages VT, and the voltage value of the signal under measurement is in any of the voltage ranges defined by the two adjacent reference voltages. Different comparison results are output depending on whether they belong.
- the digital signal converter 50 converts the comparison results in which the logical values output from all the comparators 22 are High into a digital value of 1, and the logical values output from all the comparators 22 are Low.
- the comparison result indicating is converted to a digital value of 1.
- other comparison results are converted into predetermined digital values between 1 and 1 according to their logical values.
- Each reference voltage applied to the comparator 20 described in FIGS. 3A to 3C is preferably variable.
- the measuring device 10 controls each reference voltage based on information on the amplitude level to be measured of the signal under measurement.
- FIG. 4 is a diagram illustrating an example of the operation of the measurement apparatus 10 when the comparator 20 illustrated in FIG. 3A is used.
- a signal under measurement as shown in FIG. 4 is input to the measuring apparatus 10.
- the input signal includes timing noise that is jitter in the time direction and amplitude noise in the amplitude direction. For example, jitter due to timing noise is dominant in the edge portion of the signal under measurement, and amplitude noise is dominant in the stationary portion of the signal under measurement.
- the eye opening degree in the vertical direction of the signal under measurement is reduced by amplitude noise
- the eye opening degree in the horizontal direction is reduced by timing noise.
- the horizontal eye opening of the signal under test is affected only by timing noise.
- amplitude noise also affects the horizontal eye opening.
- the amplitude noise is converted into timing noise with a relatively high probability.
- the measuring apparatus 10 in this example converts the voltage value of the signal under measurement greater than the first reference voltage VOH into a digital value 1, and the voltage value of the signal under measurement is smaller than the second reference voltage VOL. Convert to digital value 1.
- the influence of amplitude noise can be automatically eliminated.
- the voltage value of the signal under measurement that is equal to or lower than the first reference voltage VOH and greater than the second reference voltage VOL is converted into a digital value 0.
- the timing at which the digital value is detected is given only by timing noise. For this reason, the comparator 20 Based on this comparison result, the influence of amplitude noise can be eliminated and timing noise can be measured accurately.
- the strobe signals input to the comparator 20 are arranged at substantially equal intervals independently of the steady period of the signal under measurement. For this reason, it is possible to perform measurement excluding time dependence of timing noise.
- the frequency at which the strobe signal is input to the comparator 20 is preferably greater than the Nyquist frequency. For example, four or more strobe signals may be arranged in each period of the signal under measurement.
- FIGS. 5A and 5B are diagrams illustrating a configuration example of the digital signal processing unit 60.
- FIG. The digital signal processing unit 60 shown in FIG. 5A has a band limiting unit 62 and a phase distortion estimation unit 64.
- the band limiter 62 passes the frequency component to be measured of the digital signal.
- the band limiting unit 62 in this example converts a digital signal into an analysis signal.
- the band limiting unit 62 may generate an analysis signal by generating a Hilpert transform pair.
- the digital signal conversion unit 50 converts the comparison result output from the comparator 20 into a digital signal indicating a digital value of 1, 0, ⁇ 1, for example. For this reason, the digital signal conversion unit 50 can generate a signal corresponding to the digital signal, and can generate, for example, an analysis signal cos (2 ⁇ ft) + jsin (2 ⁇ ft). As described above, the analysis signal is free from the influence of the amplitude noise of the signal under measurement.
- the phase distortion estimation unit 64 calculates the phase noise of the digital signal output from the band limiting unit 62.
- the phase distortion estimation unit 64 in this example has an instantaneous phase estimation unit 66 and a linear phase removal unit 68.
- the instantaneous phase estimation unit 66 generates an instantaneous phase signal indicating the instantaneous phase of the digital signal based on the analysis signal output from the band limiting unit 62.
- the instantaneous phase of the digital signal can be obtained by the arc tangent of the ratio of the real part to the imaginary part of the analysis signal.
- the linear phase removing unit 68 removes the linear component of the instantaneous phase signal and calculates the phase noise of the signal under measurement.
- the linear phase removal unit 68 may calculate a linear component of the instantaneous phase signal based on the period of the signal under measurement, or may calculate a line formation that approximates the instantaneous phase signal with a straight line.
- the linear component is an instantaneous phase of the signal under measurement when it is assumed that the signal under measurement has no jitter in the time direction. Also measure the average period of the signal under measurement. The linear component may be calculated based on the period. The difference between the instantaneous phase signal and the linear component indicates the phase noise of the signal under measurement at each timing.
- the digital signal processing unit 60 shown in FIG. 5B includes a band limiting unit 62 and a phase distortion estimation unit 64.
- the band limiting unit 62 passes the frequency component to be measured of the digital signal.
- the phase distortion estimation unit 64 includes a zero-cross timing estimation unit 72 and a linear phase removal unit 68.
- the close cross timing estimation unit 72 estimates the zero cross timing sequence of the signal under measurement based on the digital signal output from the band limiting unit 62. For example, the zero-cross timing sequence is data sequentially indicating the timing at which the digital signal indicates the digital value 0.
- the linear phase removal unit 68 removes the linear component of the zero cross timing sequence and calculates the phase noise of the signal under measurement.
- the linear component can be calculated by the same method as the linear phase removal unit 68 shown in FIG. 5A.
- FIGS. 6A and 6B are diagrams showing an operation example of the linear phase removing unit 68.
- Figure 6A shows the instantaneous phase of a digital signal with the horizontal axis representing time t and the vertical axis representing instantaneous phase ⁇ (t).
- the phase error of the digital signal can be obtained by obtaining the difference between the instantaneous phase and its linear component.
- FIG. 6B is a plot of the respective zero cross timings with the horizontal axis representing time t and the vertical axis representing zero cross timing.
- FIG. 7 shows a comparison between the actual jitter value measured by the conventional jitter measurement method and the actual jitter value measured by the test apparatus 100.
- the signal under measurement is converted into a digital signal by an 8-bit ADC, and jitter is measured in the same manner as the digital signal processing unit 60.
- the test apparatus 100 measures jitter using a comparator 20 that outputs a ternary digital signal.
- the test apparatus 100 has a simpler configuration than the conventional method, and the difference from the conventional method is 4% for both the measured signal with less noise and the measured signal with more noise. The following measurements can be made.
- FIGS. 8A and 8B are diagrams showing a configuration example of the band limiting unit 62.
- Bandwidth in this example The limiting unit 62 is used in the digital signal processing unit 60 shown in FIG. 5A.
- the band limiting unit 62 shown in FIG. 8A has a filter 74 and a Hilbert transformation 76.
- the filter 74 receives the digital signal output from the digital signal converter 50 and passes the frequency component to be measured.
- the Hilbert transformer 76 performs a Hilbert transform on the digital signal output from the filter 74.
- the Hilbert variant generates a signal that is 90 degrees behind the phase of the digital signal.
- the band limiting unit 62 outputs an analysis signal in which the digital signal output from the filter 74 is a real part and the signal output from the Hilbert transformer 76 is an imaginary part.
- the band limiting unit 62 shown in FIG. 8B includes a filter 74, a mixer 78, and a mixer 82.
- the filter 74 is the same as the filter 74 shown in FIG.
- the mixer 78 and the mixer 82 divide and receive the digital signal output from the filter 74 and output it after quadrature modulation. For example, a carrier signal having a phase difference of 90 degrees is input to the mixer 78 and the mixer 82, and the digital signal and the carrier signal are multiplied and output.
- the band limiting unit 62 outputs an analysis signal in which the digital signal output from the mixer 78 is a real part and the digital signal output from the mixer 82 is an imaginary part.
- an analysis signal having a frequency component to be measured of the signal under measurement can be generated.
- the filter 74 may pass the frequency component of the V ⁇ frequency band including the carrier frequency of the signal under measurement that passes the component around the carrier frequency of the signal under measurement, among the frequency components of the signal under measurement. ! ⁇ .
- FIG. 9 is a diagram illustrating an example of a frequency band that the filter 74 passes.
- the filter 74 passes the band not including the carrier frequency among the frequency components of the signal under measurement.
- the carrier frequency component of the signal under measurement is not a noise component but has a larger energy than other frequency components. For this reason, if the carrier frequency component is not removed, a measurement range and an arithmetic processing range that can measure the energy of the carrier frequency are required despite the unnecessary components in noise measurement. For this reason, it is not possible to ensure a sufficient resolution with respect to a noise component having a minute energy with respect to a carrier frequency component, and to measure the noise component with high accuracy, without being able to ensure sufficient resolution.
- the measuring apparatus 10 in this example removes the carrier frequency component of the signal under measurement. Since the noise component to be measured is extracted and processed, the noise component can be accurately measured.
- the filter 74 preferably also removes harmonic components of the carrier frequency component.
- FIG. 10 is a diagram illustrating another example of the configuration of the measurement apparatus 10.
- the measuring apparatus 10 further includes a filter 75 in addition to the configuration of the measuring apparatus 10 described in relation to FIG.
- the filter 75 shown in FIG. 10 may have the same function as the filter 74 shown in FIG.
- the other components have the same or similar functions and configurations as the components described with the same reference numerals in FIG.
- the filter 75 in this example receives the signal under measurement output from the device under test 200, passes the frequency component to be measured, and inputs it to the comparator 20.
- FIG. 11 is a diagram illustrating an example of operations of the comparator 20 and the strobe timing generator 30.
- the measuring apparatus 10 repeatedly receives the signals under measurement, and measures each of the signals under measurement by shifting the phase of the strobe signal, so that it is equivalently an integer multiple of the strobe signal generation frequency. Measure the measurement signal.
- the measuring apparatus 10 receives the same signal under measurement twice (signal under measurement A and signal B under measurement).
- the strobe timing generator 30 For the signal under measurement A, the strobe timing generator 30 generates a strobe signal A arranged at substantially equal time intervals in synchronization (or asynchronously) with the period or test rate of the signal under measurement. To do.
- the strobe timing generator 30 generates a strobe signal input to the comparator 20 based on the phase of the trigger signal synchronized with the signal under measurement. For example, the strobe timing generator 30 starts outputting the strobe signal A after a predetermined offset time has elapsed with reference to a trigger signal having a predetermined phase with respect to the signal under measurement A.
- the strobe timing generator 30 similarly uses the trigger signal as a reference, and after a predetermined offset time has elapsed, the strobe signal B Start output.
- the strobe signal B is arranged at the same time interval as the strobe signal A.
- the phase of the trigger signal serving as the reference of the signal under measurement A and the phase of the trigger signal serving as the reference of the signal under measurement B are substantially the same, and each strobe of the strobe signal A and the strobe signal B The probe interval is also the same.
- the offset of the strobe signal A with respect to the trigger signal and the offset of the strobe signal B with respect to the trigger signal may be different by about half of the strobe interval. That is, when the strobe signal A and the strobe signal B are superimposed, the strobe signal A and the strobe signal B are alternately arranged at substantially equal intervals.
- the strobe timing generator 30 may include, for example, an oscillation circuit that generates a strobe signal in which strobes are arranged at predetermined time intervals, and a delay circuit that delays the output of the oscillation circuit.
- the oscillation circuit sequentially generates a strobe signal A and a strobe signal B. Then, the delay circuit sequentially delays each strobe signal in accordance with the offset that each strobe signal should have.
- the strobe signal A and the strobe signal B have been described, but in another example, the strobe timing generator 30 sequentially generates more strobe signals. Also good. By sequentially changing the offsets of these strobe signals, the equivalent time can be measured at a higher frequency.
- FIG. 12 is a diagram showing another example of the configuration of the measuring apparatus 10.
- the measurement apparatus 10 in this example further includes a clock regenerator 25 in addition to the configuration of the measurement apparatus 10 described with reference to FIG.
- the other configuration is the same as that of the measurement apparatus 10 described in relation to FIGS. 1 to 11, and thus the description thereof is omitted.
- the clock regenerator 25 generates a regenerated clock synchronized with the signal under measurement based on the signal under measurement, and inputs the regenerated clock as a trigger signal to the strobe timing generator 30.
- the generation start timing of the strobe signal A and the strobe signal B described in FIG. 11 can be controlled, and the strobe signal A and the strobe signal B having a predetermined phase difference can be generated.
- FIG. 13 is a diagram illustrating another example of the configuration of the comparator 20.
- the measurement apparatus 10 in this example has two comparators (20-1, 20-2, hereinafter collectively referred to as 20). Each comparator 20 is identical to the comparator 20 described in FIG. 3A. In addition, the same first reference voltage VOH and second reference voltage VOL are applied to each comparator 20. Each comparator 20 branches the signal under measurement. Entered.
- the measuring apparatus 10 may further include an input unit 90 that branches the signal under measurement and inputs the signal under measurement to each comparator 20 in parallel.
- the strobe timing generator 30 inputs strobe signals having different phases to the respective comparators. For example, the strobe signal A shown in FIG.
- FIG. 14 is a diagram illustrating an example of operations of the comparator 20 and the strobe timing generator 30 illustrated in FIG. As described above, the strobe timing generator 30 generates the strobe signals A (l, 2, 3,... And the strobe signal B (A, B, C,%) And inputs them to the respective comparators 20.
- the capture memory 40 stores the comparison results of the two comparators 20 in alignment with the phase of the corresponding stove signal. For example, the capture memory 40 stores the comparison results corresponding to strobe 1, strobe A, strobe 2, and strobe... Shown in FIG. In such a case, since the strobe signal A and the strobe signal B are generated at the same time, it is not necessary to generate each strobe signal based on the trigger signal.
- the strobe group in which the strobe signal A and the strobe signal B are superimposed may be arranged at approximately equal time intervals.
- the strobe timing generator 30 may include a circuit that generates the strobe signal A and a circuit that generates the strobe signal B by delaying the strobe signal A.
- the force described in the example having two comparators 20 may be provided in the other examples. In this case, it is possible to perform measurement at a higher frequency by making the offset of the strobe signal input to each comparator 20 different.
- FIG. 15 and FIG. 16 are flowcharts showing an example of a method for correcting the sampling timing error.
- the correction may be performed by the digital signal processing unit 60.
- the ideal phase difference calculation step S300 the ideal value of the phase difference of the sampling timing of each data series sampled according to each strobe signal is calculated. For example, the phase difference is given by 2 ⁇ (A tZT), where At is the ideal value of the offset difference of each strobe signal and T is the average period of the signal under measurement.
- a reference spectrum calculation step S302 an arbitrary data series is selected from a plurality of data series as a reference, and the spectrum of the data series is calculated.
- the spectrum can be obtained by fast Fourier transform of the data series.
- a comparison spectrum calculation step S304 a data series different from the reference data series is selected, and the spectrum of the data series is calculated.
- the spectrum can be obtained by fast Fourier transform of the data series.
- a cross spectrum between the spectrum of the reference data series and the spectrum of the comparison target data series is calculated.
- the cross spectrum can be obtained by complex multiplication of the complex conjugate spectrum of the spectrum of the reference data series and the spectrum of the comparison target data series.
- phase difference calculation step S306 the phase difference between the reference data series and the comparison target data series is calculated.
- the phase difference can be calculated based on the cross spectrum calculated in S306. That is, it indicates the phase difference between the phase component force reference data series of the cross spectrum and the comparison target data series.
- phase difference is calculated using the cross spectrum of the two data series, but the phase difference may be calculated by other methods.
- the phase difference may be calculated based on the cross-correlation of the spectrum of two data series.
- phase differences it is determined whether or not phase differences have been calculated for all comparison target data series. If there is a data series for which the phase difference from the reference data series is not calculated, the processing from S304 to S306 is repeated for the data series.
- the measurement error is calculated based on the phase differences of the respective comparison target data series. to correct. For example, each data series is corrected based on the difference between the phase difference of each comparison target data series and the ideal phase difference obtained in S300.
- FIG. 16 is a flowchart showing an example of processing in the error correction stage S312.
- the timing error calculation step S314 the sampling timing error of the comparison target data series is calculated based on the phase difference between the reference data series and the comparison target data series.
- the timing error can be calculated based on the ideal phase difference.
- comparison step S316 it is determined whether or not the timing error is greater than a predetermined reference value. If the timing error is less than the reference value, the corresponding data series is not corrected, and the process proceeds to S320. If the timing error is larger than the reference value, the corresponding data series is corrected in the correction step S318. For example, the data series may be corrected by shifting the phase of the spectrum of the data series based on the timing error.
- timing errors it is determined whether timing errors have been corrected for all data series. If there is a data series for which the timing error is not corrected, the processes from S314 to S318 are repeated for the data series.
- a data series with corrected timing errors is generated in the data series generation step S322. For example, it is possible to obtain a data series in which the timing error is corrected by performing inverse fast Fourier transform on the spectrum of each data series in which the timing error is corrected.
- the respective data series are aligned.
- each data is aligned according to the sampling timing of each data.
- FIG. 17 is a diagram showing another example of the configuration of the test apparatus 100.
- the test apparatus 100 in this example further includes a function of performing a function test of the device under test 200 in addition to the function of performing a jitter test performed by the test apparatus 100 described with reference to FIGS.
- test apparatus 100 in this example is further provided with a pattern generator 65 and a pattern comparison unit 55 in addition to the configuration of the test apparatus 100 described with reference to FIGS.
- the determination unit 70 includes a logic determination unit 75 and a jitter determination unit 77.
- the other components have the same or similar functions and configurations as the components described with the same reference numerals in FIGS.
- the non-turn generator 65 inputs a test signal having a predetermined data pattern to the device under test 200 when performing a function test of the device under test.
- the comparator 20 detects the data pattern of the signal under measurement by comparing the voltage value of the signal under measurement output from the device under test 200 with a predetermined reference voltage at the timing of the given strobe signal.
- the strobe timing generator 30 when the strobe timing generator 30 performs a force function test for generating a strobe signal, the strobe timing generator 30 generates a strobe signal according to a test rate synchronized with the period of the signal under measurement. Is generated. For example, the strobe timing generator 30 generates one strobe signal at substantially the center timing of each test rate. Thereby, the comparator 20 detects the data value in each cycle of the signal under measurement.
- the strobe timing generator 30 may generate a strobe signal independent of the test rate.
- the strobe timing generator 30 includes, for example, an oscillation circuit that generates a strobe signal.
- the strobe timing generator 30 controls the operation of the oscillation circuit according to a test rate. The operation of the oscillation circuit need not be controlled by the test rate.
- the strobe timing generator 30 may include a first oscillation circuit that generates a strobe signal when performing a function test, and a second oscillation circuit that generates a strobe signal when performing a jitter test. In this case, the operation of the first oscillation circuit is controlled by the test rate, and the second oscillation circuit operates independently of the test rate.
- the pattern comparison unit 55 compares whether or not the data pattern of the signal under measurement determined by the comparison result stored in the captcha memory 40 matches a predetermined expected value pattern. To do.
- the expected value pattern should be generated by the pattern generator 65 based on the data pattern of the test signal.
- the logic judgment unit 75 Judge the quality of Vice 200.
- the digital signal conversion unit 50, the digital signal processing unit, and the determination unit 70 may be a computer in which software is incorporated.
- the test apparatus 100 can also perform a jitter test without adding hardware using a conventional test apparatus for function tests. Therefore, the device under test 200 can be tested at a low cost.
- FIG. 18 is a diagram showing an example of the configuration of the electronic device 400 according to the embodiment of the present invention.
- the electronic device 400 includes an operation circuit 410 that generates a signal under measurement and the measurement apparatus 10.
- the electronic device 400 may include a configuration of the operating circuit 410 and a part of the measuring apparatus 10 inside a package such as resin or ceramic.
- the operation circuit 410 operates in accordance with, for example, a signal input from the outside, and outputs a signal under measurement to the outside.
- the measuring apparatus 10 measures the signal under measurement output from the operation circuit 410.
- the measuring apparatus 10 may have the same configuration as the measuring apparatus 10 described in relation to FIGS.
- the measurement apparatus 10 may include a comparator 20 and a captcha memory 40.
- the comparator 20 is provided with the strobe signal described in relation to FIGS.
- the strobe signal may be generated inside the electronic device 400 provided by an external device.
- the electronic device 400 When generating a strobe signal inside the electronic device 400, the electronic device 400 preferably further includes a strobe timing generator 30. As described with reference to FIGS. 1 to 16, the capture memory 40 stores measurement results obtained by measuring the signal under measurement at a high frequency equivalently.
- the jitter of the electronic device 400 can be calculated with high accuracy by reading the comparison result stored in the capture memory 40.
- the external device can reduce the cost of the device because it is not necessary to measure the signal under measurement at high speed.
- a jitter test of a device under test can be performed at low cost.
- timing noise can be measured separately from amplitude noise, timing jitter can be measured accurately.
- measurement can be performed at a speed higher than the maximum frequency of the strobe signal that can be generated by the strobe timing generator.
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- Nonlinear Science (AREA)
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- Tests Of Electronic Circuits (AREA)
- Measurement Of Current Or Voltage (AREA)
Abstract
Description
Claims
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DE112007000506T DE112007000506T5 (de) | 2006-02-27 | 2007-02-23 | Messvorrichtung, Messverfahren, Prüfvorrichtung, Prüfverfahren und elektronische Vorrichtung |
JP2008502754A JP5008654B2 (ja) | 2006-02-27 | 2007-02-23 | 測定装置、測定方法、試験装置、試験方法、及び電子デバイス |
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US11/362,536 | 2006-02-27 | ||
US11/362,536 US7398169B2 (en) | 2006-02-27 | 2006-02-27 | Measuring apparatus, measuring method, testing apparatus, testing method, and electronics device |
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PCT/JP2007/053425 WO2007099878A1 (ja) | 2006-02-27 | 2007-02-23 | 測定装置、測定方法、試験装置、試験方法、及び電子デバイス |
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US (1) | US7398169B2 (ja) |
JP (1) | JP5008654B2 (ja) |
DE (1) | DE112007000506T5 (ja) |
TW (1) | TW200734653A (ja) |
WO (1) | WO2007099878A1 (ja) |
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JP2011154009A (ja) * | 2010-01-28 | 2011-08-11 | Advantest Corp | 試験装置、測定装置および電子デバイス |
KR20130129067A (ko) * | 2012-05-18 | 2013-11-27 | 주식회사 케이티 | M2m 시스템에서 선택적으로 보안성 있는 시간 동기화를 위한 방법 및 장치 |
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US7398169B2 (en) | 2008-07-08 |
TW200734653A (en) | 2007-09-16 |
DE112007000506T5 (de) | 2008-12-18 |
US20070203659A1 (en) | 2007-08-30 |
JPWO2007099878A1 (ja) | 2009-07-16 |
JP5008654B2 (ja) | 2012-08-22 |
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