WO2005113142A1 - 光触媒活性薄膜 - Google Patents
光触媒活性薄膜 Download PDFInfo
- Publication number
- WO2005113142A1 WO2005113142A1 PCT/JP2005/009248 JP2005009248W WO2005113142A1 WO 2005113142 A1 WO2005113142 A1 WO 2005113142A1 JP 2005009248 W JP2005009248 W JP 2005009248W WO 2005113142 A1 WO2005113142 A1 WO 2005113142A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thin film
- photocatalytically active
- active thin
- metal
- total
- Prior art date
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- 239000010409 thin film Substances 0.000 title claims abstract description 139
- 229910052751 metal Inorganic materials 0.000 claims abstract description 65
- 239000002184 metal Substances 0.000 claims abstract description 65
- -1 organic acid salts Chemical class 0.000 claims abstract description 64
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 52
- 150000002736 metal compounds Chemical class 0.000 claims abstract description 49
- 150000001875 compounds Chemical class 0.000 claims abstract description 38
- 230000001699 photocatalysis Effects 0.000 claims abstract description 32
- 239000013522 chelant Substances 0.000 claims abstract description 30
- 230000007062 hydrolysis Effects 0.000 claims abstract description 23
- 238000006460 hydrolysis reaction Methods 0.000 claims abstract description 23
- 230000001747 exhibiting effect Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 95
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 52
- 239000010408 film Substances 0.000 claims description 39
- 229920003023 plastic Polymers 0.000 claims description 30
- 239000004033 plastic Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 23
- 239000011941 photocatalyst Substances 0.000 claims description 21
- 229920005989 resin Polymers 0.000 claims description 17
- 239000011347 resin Substances 0.000 claims description 17
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 150000004703 alkoxides Chemical class 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
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- 230000003301 hydrolyzing effect Effects 0.000 claims description 5
- 229920000570 polyether Polymers 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
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- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
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- 239000002612 dispersion medium Substances 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 28
- 239000000203 mixture Substances 0.000 description 20
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- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 15
- 239000002253 acid Substances 0.000 description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
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- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- 229920001577 copolymer Polymers 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 6
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 6
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 5
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- 125000004432 carbon atom Chemical group C* 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 125000000524 functional group Chemical group 0.000 description 5
- 150000007524 organic acids Chemical class 0.000 description 5
- 125000004430 oxygen atom Chemical group O* 0.000 description 5
- 238000006068 polycondensation reaction Methods 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 4
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- HSXKFDGTKKAEHL-UHFFFAOYSA-N tantalum(v) ethoxide Chemical compound [Ta+5].CC[O-].CC[O-].CC[O-].CC[O-].CC[O-] HSXKFDGTKKAEHL-UHFFFAOYSA-N 0.000 description 4
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
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- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
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- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
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- 125000000217 alkyl group Chemical group 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
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- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
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- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000012702 metal oxide precursor Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- LVNAMAOHFNPWJB-UHFFFAOYSA-N methanol;tantalum Chemical compound [Ta].OC.OC.OC.OC.OC LVNAMAOHFNPWJB-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- 229940017219 methyl propionate Drugs 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 125000005487 naphthalate group Chemical group 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- GJYXGIIWJFZCLN-UHFFFAOYSA-N octane-2,4-dione Chemical compound CCCCC(=O)CC(C)=O GJYXGIIWJFZCLN-UHFFFAOYSA-N 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- HFPZCAJZSCWRBC-UHFFFAOYSA-N p-cymene Chemical compound CC(C)C1=CC=C(C)C=C1 HFPZCAJZSCWRBC-UHFFFAOYSA-N 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 1
- UWJJYHHHVWZFEP-UHFFFAOYSA-N pentane-1,1-diol Chemical compound CCCCC(O)O UWJJYHHHVWZFEP-UHFFFAOYSA-N 0.000 description 1
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- TWSRVQVEYJNFKQ-UHFFFAOYSA-N pentyl propanoate Chemical compound CCCCCOC(=O)CC TWSRVQVEYJNFKQ-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- XPGAWFIWCWKDDL-UHFFFAOYSA-N propan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCC[O-].CCC[O-].CCC[O-].CCC[O-] XPGAWFIWCWKDDL-UHFFFAOYSA-N 0.000 description 1
- GVIIRWAJDFKJMJ-UHFFFAOYSA-N propan-2-yl 3-oxobutanoate Chemical compound CC(C)OC(=O)CC(C)=O GVIIRWAJDFKJMJ-UHFFFAOYSA-N 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- DHGFMVMDBNLMKT-UHFFFAOYSA-N propyl 3-oxobutanoate Chemical compound CCCOC(=O)CC(C)=O DHGFMVMDBNLMKT-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229940005657 pyrophosphoric acid Drugs 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- DCKVNWZUADLDEH-UHFFFAOYSA-N sec-butyl acetate Chemical compound CCC(C)OC(C)=O DCKVNWZUADLDEH-UHFFFAOYSA-N 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- AIFMYMZGQVTROK-UHFFFAOYSA-N silicon tetrabromide Chemical compound Br[Si](Br)(Br)Br AIFMYMZGQVTROK-UHFFFAOYSA-N 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- KQFAFFYKLIBKDE-UHFFFAOYSA-M sodium;ethanesulfonate Chemical compound [Na+].CCS([O-])(=O)=O KQFAFFYKLIBKDE-UHFFFAOYSA-M 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 235000011044 succinic acid Nutrition 0.000 description 1
- BUUPQKDIAURBJP-UHFFFAOYSA-N sulfinic acid Chemical compound OS=O BUUPQKDIAURBJP-UHFFFAOYSA-N 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- JKUYRAMKJLMYLO-UHFFFAOYSA-N tert-butyl 3-oxobutanoate Chemical compound CC(=O)CC(=O)OC(C)(C)C JKUYRAMKJLMYLO-UHFFFAOYSA-N 0.000 description 1
- WMOVHXAZOJBABW-UHFFFAOYSA-N tert-butyl acetate Chemical compound CC(=O)OC(C)(C)C WMOVHXAZOJBABW-UHFFFAOYSA-N 0.000 description 1
- OCXPCSGIIJESOA-UHFFFAOYSA-N tert-butyl-dichloro-phenylsilane Chemical compound CC(C)(C)[Si](Cl)(Cl)C1=CC=CC=C1 OCXPCSGIIJESOA-UHFFFAOYSA-N 0.000 description 1
- GXMNGLIMQIPFEB-UHFFFAOYSA-N tetraethoxygermane Chemical compound CCO[Ge](OCC)(OCC)OCC GXMNGLIMQIPFEB-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- ACOVYJCRYLWRLR-UHFFFAOYSA-N tetramethoxygermane Chemical compound CO[Ge](OC)(OC)OC ACOVYJCRYLWRLR-UHFFFAOYSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- MYWQGROTKMBNKN-UHFFFAOYSA-N tributoxyalumane Chemical compound [Al+3].CCCC[O-].CCCC[O-].CCCC[O-] MYWQGROTKMBNKN-UHFFFAOYSA-N 0.000 description 1
- WEUBQNJHVBMUMD-UHFFFAOYSA-N trichloro(3,3,3-trifluoropropyl)silane Chemical compound FC(F)(F)CC[Si](Cl)(Cl)Cl WEUBQNJHVBMUMD-UHFFFAOYSA-N 0.000 description 1
- OOXSLJBUMMHDKW-UHFFFAOYSA-N trichloro(3-chloropropyl)silane Chemical compound ClCCC[Si](Cl)(Cl)Cl OOXSLJBUMMHDKW-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- 125000000725 trifluoropropyl group Chemical group [H]C([H])(*)C([H])([H])C(F)(F)F 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- UNXRWKVEANCORM-UHFFFAOYSA-N triphosphoric acid Chemical compound OP(O)(=O)OP(O)(=O)OP(O)(O)=O UNXRWKVEANCORM-UHFFFAOYSA-N 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/88—Handling or mounting catalysts
- B01D53/885—Devices in general for catalytic purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/30—Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
- B01J35/39—Photocatalytic properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/80—Type of catalytic reaction
- B01D2255/802—Photocatalytic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/03—Precipitation; Co-precipitation
- B01J37/031—Precipitation
- B01J37/033—Using Hydrolysis
Definitions
- the present invention relates to a photocatalytically active thin film formed on a substrate, which exhibits photocatalytic activity when irradiated with light having a wavelength of 150 to 350 nm.
- TiO 2 titanium oxide
- the photocatalyst absorbs sunlight and the like, activates it, and exhibits the above-mentioned excellent action by oxidizing action.
- a photocatalyst is used by being supported on a substrate.
- a method of supporting a photocatalyst on a substrate a method of forming a thin film containing a photocatalyst (photocatalytically active thin film) on the substrate has attracted attention because of its high practicality.
- a method for forming a photocatalytically active thin film on a substrate a method is generally used in which a photocatalyst precursor composition is applied on a substrate and fired at around 500 ° C.
- Patent Documents 1 and 2 a method of forming using a solution of a photocatalyst precursor composition containing a metal alkoxide or a metal chelate compound
- Patent Document 3 a method of forming a metal alkoxide or a metal chelate compound on a photocatalyst made of a metal oxide
- Patent Document 1 JP-A-2000-144052
- Patent Document 2 JP 2001-254072 A
- Patent Document 3 JP 2003-253157 A
- Patent Documents 1 to 3 it is necessary to apply a solution of the photocatalyst precursor composition to a substrate to form a thin film and then to bake at a high temperature.
- the photocatalyst described in the above document exhibits photocatalytic activity by light having a wavelength longer than 350 nm, and the substrate may be deteriorated by irradiation with light such as sunlight.
- a photocatalytic thin film is directly formed on the substrate surface without using a binder. It was difficult to form.
- Patent Document 4 discloses a photocatalyst body including a substrate and a photocatalyst film formed on the substrate and containing Ti, 0, and C as main components and having a C / O specific force or less. I have. This document also states that the photocatalyst film obtained is made of an amorphous metal compound and can be obtained by heating or firing in a relatively low temperature range (100 to 500 ° C.).
- Patent Document 4 JP 2002-172333 A
- the formation temperature of the photocatalytic film is not sufficiently low enough to prevent the deterioration of the power base, which is a relatively low temperature.
- the photocatalyst film described in this document contains Ti, 0, and C as main components and is considered to be an amorphous metal compound having photocatalytic activity. The structure of the metal compound is not specified.
- the present invention has been made in view of the circumstances of the related art, and is a photocatalytically active thin film formed on a substrate, which can be easily formed, and which is irradiated with light having a wavelength of 150 to 350 nm. Demonstrates photocatalytic activity, and when formed on a plastic substrate, the substrate is hardly degraded even when irradiated with light with a long wavelength of 350 nm or more! ⁇ To provide a photocatalytically active thin film Make it an issue.
- a photocatalytically active thin film formed by using at least one selected from the group consisting of a metal chelate compound, a metal organic acid salt, and a hydrolysis product thereof having two or more as a raw material has a low wavelength of 150 to 350 nm.
- photocatalytic activity is exhibited by irradiation, that this photocatalytically active thin film can be formed by processing at a temperature of less than 100 ° C when formed on a substrate, and that it can be formed directly on a substrate that also has plasticity.
- this photocatalytically active thin film can be formed by processing at a temperature of less than 100 ° C when formed on a substrate, and that it can be formed directly on a substrate that also has plasticity.
- the present invention provides the following photocatalytically active thin films (1) to (18).
- At least one force selected from the group consisting of a chelate compound, a metal organic acid salt, and a partial hydrolysis product thereof is also formed, and exhibits photocatalytic activity when irradiated with light having a wavelength of 150 to 350 nm.
- Photocatalytically active thin film is also formed, and exhibits photocatalytic activity when irradiated with light having a wavelength of 150 to 350 nm.
- a metal compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups on a substrate, a metal chelate compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups, or a metal organic acid A solution for forming a photocatalytically active thin film containing at least one selected from the group consisting of salts and these hydrolysis products is applied, and the resulting coating film of the solution is heated at a temperature of less than 100 ° C.
- the substrate is a plastic substrate having at least one force selected from the group consisting of polyimide resin, polyester resin, epoxy resin and polyether resin.
- the solution for forming a photocatalytically active thin film is coated on a plastic substrate, and the obtained coating film of the solution is heated at a temperature lower than the softening point of the substrate and lower than 100 ° C.
- the partial hydrolysis product is a metal compound having a total of 2 or more of the hydrolyzable group and Z or a hydroxyl group, a metal chelate compound having a total of 2 or more of a hydrolyzable group and Z or a hydroxyl group, Or a metal organic acid salt, a metal compound having a total of 2 or more of the above hydrolyzable group and Z or hydroxyl group, a metal chelate compound having a total of 2 or more of the hydrolyzable group and Z or hydroxyl group, or a metal organic acid salt 1 (1) to (5) V, wherein the photocatalytically active thin film is a product obtained by hydrolysis using not more than 2 moles of water with respect to moles.
- the metal chelate compound having two or more hydrolyzable groups and Z or hydroxyl groups in total is a chelate compound of the hydrolyzate of a metal compound having two or more hydrolyzable groups and Z or hydroxyl groups in total.
- a metal compound having a total of 2 or more hydrolyzable groups and Z or hydroxyl groups a metal chelate compound having a total of 2 or more hydrolyzable groups and Z or hydroxyl groups, and a metal of a metal organic acid salt (1) to (8) characterized in that silicon, germanium, tin, lead, titanium, zirconium, aluminum, indium, tantalum, tungsten and zinc are also selected from the group consisting of: , A photocatalytically active thin film.
- the average particle size of the dispersing medium in the solution for forming a photocatalytic thin film comprising at least one selected from the group consisting of at least one selected from the group consisting of at least one selected from the group consisting of: (2) to (9) Thin film.
- the partial force of light irradiation changes from water repellency to hydrophilicity with a contact angle of water of 20 ° or less (1) )-(11) Any of the photocatalytically active thin films.
- a photocatalytically active thin film that exhibits photocatalytic activity when irradiated with light having a wavelength of 250 to 310 nm.
- the photocatalytically active thin film of the present invention has an unprecedented property of exhibiting excellent photocatalytic activity when irradiated with light having a low wavelength of 250 to 350 nm. Therefore, the photocatalytically active thin film of the present invention does not need to be exposed to light having a wavelength higher than 350 nm (such as visible light). The adhesion between the film and the photocatalytically active thin film does not decrease.
- the photocatalytically active thin film of the present invention can be formed by a low-temperature heat treatment at a temperature lower than 100 ° C., it is not necessary to limit the substrate used to prevent damage to the substrate by the heat treatment to a heat-resistant substrate. Therefore, a lightweight and easy-to-process plastic substrate can be suitably used as the substrate.
- the photocatalytically active thin film of the present invention has good adhesiveness, it can be easily formed directly on a substrate such as plastic, and does not deteriorate for a long time.
- FIG. 1 is a view showing an element distribution in a depth direction of ESCA of a photocatalytically active thin film (C-1) in Example 1.
- FIG. 2 is a chart of a photocatalytically active thin film (C1) in Example 1 measured with an X-ray diffractometer.
- the photocatalytically active thin film of the present invention is a photocatalytically active thin film formed on a substrate, comprising a metal compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups, a hydrolyzable group and Z or hydroxyl groups in total.
- a metal chelate compound, a metal organic acid salt, and a hydrolyzate thereof having at least one selected from the group consisting of at least one selected from the group consisting of a metal chelate compound, a metal organic acid salt, and a photocatalytic activity when irradiated with light having a wavelength of 250 to 350 nm.
- the substrate used in the present invention is not particularly limited as long as it can support the photocatalytically active thin film of the present invention, and it may be transparent, translucent, or opaque. It may be.
- the material constituting the base is not particularly limited, and includes, for example, at least one material selected from the group consisting of metal, ceramic, glass, and plastic. Among them, a glass substrate made of glass such as soda-lime glass, borosilicate glass, and lead silicate glass; a plastic substrate made of plastic is preferable, and a plastic substrate is more preferable.
- the resin constituting the plastic substrate examples include polyimide resins such as polyamide imide, polyether imide, polyimide and polyamino bismaleimide; and polyester resins such as polyethylene terephthalate and polyethylene 2,6 naphthalate.
- Epoxy resins such as phenolic epoxy resin, alcoholic epoxy resin, glycidyl ether type epoxy resin, glycidylamine type epoxy resin; polyether ether ketone, polyether ketone, polyether-tolyl, polyether sulfone Polyether resins such as phenolic cellulose acetate, phenolic diacetate, nitrosenololose, etc .; Polystyrene resins such as polystyrene and syndiotactic polystyrene; ethylene, propylene Polyolefin resins such as homopolymers or copolymers of olefins such as len and butene; cycloolefin resins such as norbornene resins; polyamide resins such as nylon 6, nylon 12, and copolymerized nylon; ethylene Polybutyl alcohol-based resin such as polybutyl alcohol copolymer; ethylene tetrafluoride ethylene copolymer, polytetrafluo
- a resin composition comprising an acrylic compound having a radically reactive unsaturated compound; a resin composition comprising the acrylic compound and a mercapto compound having a thiol group
- a resin composition dissolved in water; a mixture thereof; and the like can be used as a base material.
- one or more of these resins laminated by means such as lamination and coating can be used as a substrate.
- a plastic substrate having at least one kind of force selected from a group consisting of a polyimide resin, a polyester resin, an epoxy resin and a polyether resin is particularly preferable.
- These substrates may be provided with a waterproof layer containing a polychlorinated bilidene-based polymer for the purpose of improving so-called dimensional stability, or a thin film of an organic or Z or inorganic compound for the purpose of a gas barrier.
- a waterproof layer containing a polychlorinated bilidene-based polymer for the purpose of improving so-called dimensional stability, or a thin film of an organic or Z or inorganic compound for the purpose of a gas barrier.
- the organic compound include polyvinyl alcohol and a polyethylene butyl alcohol copolymer.
- the inorganic compound include silicic acid, alumina, talc, vermiculite, kaolinite, mica, synthetic mica, and the like.
- the substrate used in the present invention includes various organic additives for other functions. Z or an inorganic additive may be added.
- the size and shape of the substrate are not particularly limited, and any of a flat plate, a three-dimensional object, a film, and the like can be used, but a film-like substrate is preferable. Painted articles can also be used as substrates.
- the plastic substrate is preferably in the form of a film.
- the film-shaped substrate may be an unstretched film or a stretched film.
- the film-shaped plastic substrate can be manufactured by a conventionally known method.
- a resin that is a material and is melted by an extruder, extruded by an annular die or a T die, and quenched can be manufactured to produce a substantially amorphous, unoriented, unstretched substrate.
- the unstretched substrate may be drawn in a flow direction (vertical axis) of the substrate by a known method such as uniaxial stretching, tenter-type sequential biaxial stretching, tenter-type simultaneous biaxial stretching, or tubular simultaneous biaxial stretching.
- a stretched substrate is manufactured by stretching in a direction (horizontal axis) perpendicular to the flow direction of the substrate.
- the stretching ratio is preferably 2 to 10 times in the longitudinal axis direction and the lateral axis direction, which can be appropriately selected according to the resin used as the base material.
- the thickness of the film-shaped plastic substrate is not particularly limited, but is usually 1 to
- It is 1000 ⁇ m, preferably 3 to 500 ⁇ m.
- the photocatalytically active thin film of the present invention is formed on the above-mentioned substrate, and comprises (i) a metal compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups; A metal chelate compound having a total of at least two of a functional group and Z or a hydroxyl group, (iii) a metal organic acid salt, and (iv) at least one selected from the group consisting of the hydrolysis products of the above (i) to (iii). Be formed.
- the metal compound having two or more hydrolyzable groups and Z or hydroxyl groups in total used in the present invention is particularly limited as long as it is a metal compound having two or more hydrolyzable groups and Z or hydroxyl groups in total.
- the hydrolyzable group refers to a functional group capable of hydrolyzing upon contact with water or a functional group capable of forming a bond with a metal atom via an oxygen atom in the presence of water. Examples include a halogen atom, an amino group, an alkoxy group, an ester group, a carboxy group, a phosphoryl group, an isocyanate group, a cyano group, and an epoxy group.
- a compound represented by formula (II) can be preferably exemplified.
- M represents a metal atom, preferably a metal atom belonging to Groups 13 to 15 of the periodic table. More specifically, silicon, germanium, tin, lead, titanium, zirconium, aluminum, indium, tantalum, tungsten, and zinc are selected. At least one kind can be exemplified. Among them, at least one selected from the group consisting of titanium and tantalum is more preferable.
- R represents a hydrogen atom or an organic group having a hydrolyzable group capable of forming a bond with a metal atom via an oxygen atom.
- organic group examples include an alkyl group, an alkyl group, and an aromatic group.
- the carbon number of R is not particularly limited, but is usually 1 to 20, preferably 1 to 12.
- R examples include alkyl groups such as a methyl group, an ethyl group, and a propyl group; a chloromethyl group, a chloroethyl group, a chloropropyl group, a bromopropyl group, a bromooctyl group, and a trifluoropropyl group.
- Alkyl halide groups such as glycidoxypropyl group and epoxycyclohexylethyl group; aminoalkyl groups such as aminopropyl group and aminobutyl group; alkenyl groups such as butyl group and aryl group; acrylic (Meth) acryloxyalkyl groups such as oxypropyl group and methacryloxypropyl group; aralkyl groups such as benzyl group; aromatic groups such as phenyl group and naphthyl group.
- X represents a hydrolyzable group or a hydroxyl group bonded to M.
- alkoxy groups having 1 to 12 carbon atoms such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, etc .
- the compound represented by the above formula (I) is a compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups in the molecule. Specifically, in the formula (I), a compound in which b is 2 or more; a compound in which b is 1 and R having a hydrolyzable group is 1 or more; b is 0; And R having 2 or more having a functional group.
- Specific examples of the compound represented by the above formula (I) include methyltrimethoxysilane, methyltriethoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, propyltrimethoxysilane, and propynoletriethoxysilane.
- titanium alkoxides such as tetrapropoxytitanium and tetrabutoxytitanium
- Zirconium alkoxides such as tetrapropoxy zirconium and tetrabutoxy zirconium;
- Tantalum alkoxides such as pentamethoxy tantalum, pentaethoxy tantalum, pentabutoxy tantalum;
- Germanium alkoxides such as tetramethoxygermanium and tetraethoxygermanium;
- Aluminum alkoxides such as triethoxyaluminum, tripropoxyaluminum and tributoxyaluminum;
- Aminosilanes such as tetrakis (getylamino) silane
- silane compounds such as butylmethylbis (methylethylketoximine) silane; [0043] 3,3,3-trifluoropropyldimethoxyhydroxysilane, 3,3,3-trifluoropropinolemethoxydihydroxysilane, Hydroxysilane such as noreethoxydihydroxysilane; and the like.
- metal alkoxides such as silane alkoxide, germanium alkoxide, titanium alkoxide, zirconium alkoxide and tantalum alkoxide are preferable.
- titanium alkoxide and tantalum alkoxide are more preferred, and tetrapropoxytitanium and pentaethoxytantalum are more preferred.
- the metal compound having two or more hydrolyzable groups and Z or hydroxyl groups used in the present invention need not be a monomolecular compound represented by the compound represented by the formula (I).
- the compound represented by formula (I) or the like may be a hydrolyzed polycondensate (completely hydrolyzed polycondensate or partially hydrolyzed polycondensate) obtained by the same method or the like.
- the hydrolyzed condensate refers to the hydrolyzed condensate in a state before the metal oxide state.
- Metal chelate compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups is preferably a hydrolyzable group. It is not particularly limited as long as it has two or more functional groups and Z or a hydroxyl group in total, and is bonded to the metal chelate conjugate. Among them, a chelate conjugate of a hydrolysis product of a metal compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups (completely hydrolyzed product or partially hydrolyzed product) is preferable.
- Examples of the chelate compound used include j8-ketoesters such as methyl acetoacetate, ethyl acetoacetate, n-propyl acetoacetate, isopropyl acetoacetate, n-butyl acetoacetate, sec-butyl acetoacetate and t-butyl acetoacetate; acetyl; J8-diketo such as acetone, hexane 2,4 dione, heptane 2,4 dione, heptane 3,5 dione, octane 2,4 dione, nonane-1,2,4 dione, 5-methyl-hexane-1,2,4 dione And the like.
- j8-ketoesters such as methyl acetoacetate, ethyl acetoacetate, n-propyl acetoacetate, isopropyl acetoacetate, n-butyl acetoacetate, sec-butyl ace
- the metal chelate compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups is, for example, a metal compound having a total of two or more hydrolyzable groups and Z or hydroxyl groups, and a predetermined amount of the chelate conjugate. Can be obtained by adding and stirring. The resulting metal cleave product can be isolated, but it is better to be directly subjected to the next hydrolysis and polycondensation reaction.
- the metal organic acid salt used in the present invention is a salt obtained from a metal ion and an organic acid.
- Metals include titanium, zirconium, aluminum, silicon, germanium, and aluminum. , Tin, tantalum, zinc, tungsten, lead and other group powers.
- organic acid examples include carboxylic acids such as acetic acid, oxalic acid, tartaric acid, and benzoic acid; sulfur-containing organic acids such as sulfonic acid, sulfinic acid, and thiophenol; phenolic conjugates; Organic compounds exhibiting acidity such as compounds; aromatic sulfonamides;
- the hydrolysis product used in the present invention is not more than 2 moles with respect to 1 mole of at least one selected from the group force that also has the ⁇ to (m) force (hereinafter, these are collectively referred to as “metal compounds or the like”). Is a product hydrolyzed using water.
- the hydrolysis product may be a complete hydrolysis product or a partial hydrolysis product.
- the photocatalytically active thin film of the present invention is prepared by adding 2 mol or less of water to 1 mol of the metal compound or the like and subjecting it to hydrolysis and polycondensation to form a solution containing a metal oxide precursor (hereinafter, referred to as a solution). , which is also referred to as a “composition for forming a photocatalytically active thin film”), is applied on a substrate, and the obtained coating film is heated at a temperature of less than 100 ° C. .
- Examples of the water used for preparing the composition for forming a photocatalytically active thin film include general tap water, distilled water, and ion-exchanged water. Of these, the use of distilled water or ion-exchanged water is preferred, and the use of ion-exchanged water having an electric conductivity of 2 sZcm or less is particularly preferred.
- the amount of water to be added is less than 2 in a molar ratio with respect to the total number of moles of the hydrolyzable groups in the metal compound or the like, and it is preferable to add water of 1Z2 or more and less than 2 in a divided manner. . If it is less than 1Z2, hydrolysis and polycondensation do not proceed uniformly, and the metal compound and the like remain unreacted, so that a homogeneous and dense film cannot be formed. If the number is 2 or more, in the course of hydrolysis and polycondensation, gelation or agglomeration of particles cannot form a uniform and dense film.
- the organic solvent used for diluting water is one that has no reactivity with the metal compound and has a freezing point below the temperature at which the metal compound does not react with water and hydrolyze, that is, solidification. Those having a point of 0 ° C or less, particularly -10 ° C or less, are preferred.
- Examples of the organic solvent used include methanol, ethanol, propanol, butanol, and pen. Tanole, hexanol, heptanol, octanol, nonanol, benzyl alcohol, methylcyclohexanol, ethanediol, propanediol, butanediol, pentanediol, hexylene glycol, octylene glycol, hexanetriol, 3, 5, Alcohols such as 5-trimethyl-11-hexanol; butyl formate, ethyl formate, methyl acetate, ethyl acetate, propyl acetate, butyl acetate, pentyl acetate, hexyl acetate, benzyl acetate, 3-methoxybutyl acetate, 2-acetate Esters such as butyl butyl acetate, 2-ethylhexy
- alcohols such as butanol, pentanol, hexanol and trimethylhexanol; and ethyl acetate, propyl acetate and butyl acetate.
- Esters such as pentane, hexane, xylene and the like;
- the mixing ratio of water and the organic solvent is such that the amount of water is preferably 1 to 50 parts by weight, more preferably 1 to 30 parts by weight, and still more preferably 1 to 15 parts by weight with respect to 100 parts by weight of the organic solvent. In the amount is there. If the proportion of water used exceeds 50 parts by weight, the resulting particles may be agglomerated.
- 1,2-bis- ( 2-ethylethyl xyloxycarbol) 1 Use a surfactant such as sodium ethanesulfonate or polyoxyethylene (6) phenol ether, or stir uniformly or use ultrasonic treatment. Preferably, they are dispersed.
- a solvent used for the solution of the metal compound or the like a solvent which does not coagulate at a low temperature and has a high solubility in water is preferable. Specifically, it is preferable to use a lower alcohol-based solvent, an ether-based solvent, or the like, in which the same organic solvents as those listed for diluting the water to be added can be used.
- the organic solvent can be used alone or as a mixture of two or more.
- the amount of the organic solvent used is preferably 10 to 5,000 parts by weight, more preferably 100 to 3,000 parts by weight, based on 100 parts by weight of the metal compound and the like.
- the fine particles grow in a bonded state, making it difficult to control the particle size.
- the content exceeds 5,000,000 parts by weight, the solution may be too dilute to produce fine particles.
- the content of the metal compound in the solution containing the metal compound used in the present invention is not particularly limited, but is preferably in the range of 0.1 to 30% by weight in order to produce a dense thin film. Better.
- the temperature at which the metal compound or the like is hydrolyzed and polycondensed is usually 100 ° C to + 200 ° C, preferably -80 ° C to + 150 ° C.
- the temperature at which the metal compound or the like undergoes hydrolysis and polycondensation can be changed stepwise. For example, the temperature of a solution of a metal compound or the like is cooled to 80 ° C to -20 ° C, and water (or a mixture of water and an organic solvent) at 10 ° C to + 20 ° C is slowly added dropwise with stirring.
- a method may be adopted in which the temperature of the reaction solution is gradually increased to the boiling point of the solvent in a stepwise manner to complete the hydrolysis-condensation reaction. it can. Further, the dropping of water (or a mixture of water and an organic solvent) can be divided into a plurality of times, and the dropping temperature of water (or a mixture of water and an organic solvent) can be set to different temperatures. Further, after hydrolyzing the metal compound and the like, the reaction solution is treated with a suitable base. May be used for neutralization.
- the time for hydrolyzing and polycondensing a metal compound or the like is usually from several minutes to several tens of hours.
- the composition for forming a photocatalytically active thin film obtained as described above is transparent, is a particulate matter having an average particle size in the range of 1 to 10 nm, and a monodisperse dispersoid is aggregated in an organic solvent. It can be dissolved or evenly dispersed. That is, the metal compound or the like is a dispersoid having a metal oxygen bond, which is stably dispersed in the organic solvent without aggregation.
- Examples of the acid to be added include mineral acids such as hydrochloric acid, nitric acid, boric acid, and hydrofluoric acid, acetic acid, formic acid, oxalic acid, carbonic acid, trifluoroacetic acid, p-toluenesulfonic acid, methanesulfonic acid and the like.
- Examples of the base include triethanolamine, triethylamine, 1,8 diazabicyclo [5.4.0] -7-decene, ammonia, dimethylformamide, phosphine and the like.
- the dispersion stabilizer is an agent having an effect of stably dispersing a dispersoid in a dispersion medium, such as an anticoagulant such as a deflocculant, a protective colloid, or a surfactant.
- polycarboxylic acids such as glycolic acid, gluconic acid, lactic acid, tartaric acid, citric acid, malic acid, and succinic acid; hydroxycarboxylic acids; phosphoric acids such as pyrophosphoric acid and tripolyphosphoric acid; acetylacetone, methyl acetoacetate; Ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, sec-butyl acetate, t-butyl acetate, 2,4 hexanedione, 2,4 heptanedione, 3,5 heptanedione, 2,4 octane Polydentate conjugates having strong chelating ability for metal atoms such as dione, 2,4-nonanedione, 5-methyl-hexanedione; Sulpers 3000, 9000, 17000, 20000, 240 00 ), Disperbyk— 161, one
- Patent Document 5 JP-A-9-208438
- Patent Document 6 JP-A-2000-53421
- the solution obtained above can be used as it is as a composition for forming a photocatalytically active thin film, or it can be diluted with an appropriate solvent, or after distilling off the solvent, dissolving another solvent.
- the photocatalytically active thin film can be formed by applying or spraying the obtained composition for forming a photocatalytically active thin film on a substrate, followed by drying.
- the method for applying or spraying the composition for forming a photocatalytically active thin film on a substrate is not particularly limited as long as it can be applied smoothly.
- a dipping method, a spin-coating method, a Meyaba method, a brushing method, etc. may be mentioned.
- the dating method is preferred.
- the temperature at which the coating film of the obtained composition for forming a photocatalytically active thin film is heated and dried is usually 300 ° C or less, preferably less than 100 ° C.
- the temperature is preferably lower than the softening point of the plastic substrate used and lower than 100 ° C.
- the heating time depends on the heating temperature, the type of the composition and the like, but is usually from several minutes to several tens of hours.
- the photocatalytically active thin film of the present invention can be formed at a low temperature of less than 100 ° C, a plastic substrate can be suitably used as a substrate which is not restricted by the heat resistant temperature of the substrate to be used. Further, thermal deterioration of the substrate and the photocatalytically active thin film itself can be prevented.
- a conventionally known photocatalyst layer having an anatase-type titanium oxide has poor adhesiveness to a plastic substrate and may deteriorate the substrate. Therefore, an adhesive is provided between the plastic substrate and the photocatalyst layer. Although it was necessary to provide an underlayer such as a layer, the photocatalytically active thin film of the present invention has good adhesion to a plastic substrate and is less likely to degrade the substrate. Therefore, a photocatalytically active thin film can be formed directly on the surface of a plastic substrate.
- the thickness of the obtained photocatalytically active thin film is preferably 50 nm or less, more preferably 40 nm or less, and particularly preferably l to 20 nm.
- the formed photocatalytically active thin film preferably contains an organic substance.
- the organic substance is, for example, an alkoxide group when a metal alkoxide is used as the metal compound or the like.
- the content ratio of carbon atoms in the formed photocatalytically active thin film is preferably 2 to 40% by weight.
- Such a photocatalytically active thin film can exhibit photocatalytic activity with a small amount of irradiation light.
- the content ratio of carbon atoms, titanium atoms, oxygen atoms, and the like contained in the photocatalytically active thin film can be determined by, for example, measuring with an X-ray photoelectron analyzer (ESCA).
- ESA X-ray photoelectron analyzer
- the photocatalytically active thin film of the present invention obtained as described above exhibits excellent photocatalytic activity when irradiated with light having a wavelength of 150 to 350 nm, preferably 250 to 310 nm.
- the irradiation light source used is not particularly limited as long as it can emit light having a wavelength of 150 to 350 nm.
- incandescent lamps such as halogen lamps; fluorescent lamps, germicidal lamps, black lights, chemical lamps and the like Low-pressure discharge lamps; high-pressure discharge lamps such as mercury lamps, metal halide lamps, and high-pressure sodium lamps; and the like.
- the photocatalytically active thin film of the present invention exhibits photocatalytic activity by irradiation with light having a wavelength of 150 to 350 nm, and decomposes and Z or removes organic substances in contact with the thin film.
- the partial force of the light irradiation changes from water repellency to hydrophilicity with a water contact angle of 20 ° or less.
- the irradiation light amount required for the photocatalytically active thin film of the present invention to change to water repellency and hydrophilicity is 40 jZcm 2 or less, preferably 5 jZcm 2 or less, more preferably 0.1 to 5 jZcm 2 .
- the photocatalytically active thin film of the present invention exhibits good photocatalytic activity with low wavelength light and with a small amount of irradiation light.
- the photocatalytically active thin film of the present invention can suitably use a plastic substrate that is lightweight and easy to process, and can exhibit good photocatalytic activity with low wavelength light and with a small amount of irradiation light.
- a photosensitive substrate When a thin film composed of an organometallic compound or the like is formed on the photocatalytically active thin film of the present invention, a photosensitive substrate can be obtained. By irradiating a predetermined portion of the photosensitive substrate with light and decomposing and Z- or removing the organometallic compound in the light-irradiated portion, it can be formed simply and in a short time by a conventional photolithography technique. Fine patterning similar to the performed pattern is possible.
- the photocatalytically active thin film of the present invention is formed on a plastic substrate such as polyester.
- A-1 Tetraisopropoxytitanium (manufactured by Nippon Soda Co., Ltd., solid content based on oxides: 28.2% by weight) was diluted with ethanol, and ethyl acetate acetate (manufactured by Wako Pure Chemical Industries, special grade) was added dropwise. After dripping deionized water diluted with ethanol, it was hydrolyzed as titanium oxide solids 1 wt 0/0 solution (A- 1) was prepared. The molar ratio of tetraisopropoxytitanium: acetoethyl acetate: ion-exchanged water in this solution was 1: 2: 1.
- A—2 Tetraisopropoxytitanium (manufactured by Nippon Soda Co., Ltd., solid content of 28.2% by weight based on acid), diluted with ethanol, and acetyl acetone (special grade reagent, manufactured by Wako Pure Chemical Industries, Ltd.) was added dropwise. After reacting at 80 ° C for 1 hour, the mixture was cooled to room temperature, ion-exchanged water diluted with ethanol was added dropwise and hydrolyzed to prepare a solution (A-2) having a solid content of 1% by weight in terms of titanium oxide. The molar ratio of tetraisopropoxytitanium: acetylacetone: ion-exchanged water in the solution was 1: 2: 4.
- Ethyl acetate Z ethanol 50Z50 (Weight ratio) 1.72 g of pentaethoxytantalum (manufactured by Kojundo Chemical Laboratory Co., Ltd.) is dissolved in 47.7 g of a mixed solvent, and acetyl acetate (Wako Pure Chemical Industries, Ltd.) is dissolved at room temperature. 0.84 g was dropped. After reacting at room temperature for 1 hour, 9.74 g of ion-exchanged water diluted with 40 g of the above-mentioned ethyl acetate Z ethanol was added dropwise, hydrolyzed, and reacted at room temperature for 24 hours. 3) was prepared. Of this solution The molar ratio of pentaethoxy tantalum: acetylacetylacetone: ion-exchanged water is 1: 2.5: 128.
- AH-1 (Comparative Example): A solution of titanium tetraisopropoxy titanium ⁇ manufactured by Nippon Soda Co., Ltd., solid content in terms of oxide: 28, 2% by weight> diluted with ethanol to obtain a 1% by weight solid content in terms of titanium oxide. (H-1) was prepared.
- Polyester sheet made by Toray clay, trade name: Lumilar
- each substrate was washed with ethanol and dried.
- each of the photocatalytically active thin film forming solutions (A-1), (A-2), (A-3) and (AH-1) prepared above was applied to Mayer Par. And dried at 60 ° C for 10 minutes to obtain photocatalytically active thin films (C-1 to C-9, CH-1).
- the particle size in the solution was measured with HPPS manufactured by Malvern Instruments Ltd.
- the appearance of the thin film was observed by measuring the haze ratio and visually observing it.
- Transparency was evaluated as “ ⁇ ” when the change in haze ratio was less than 0.5% and no film spots, and “X” when the change in haze rate was 0.5% or more and there was film spots.
- the distribution of the elements in the thin film in the depth direction was measured using an XPS apparatus (Quntum2000, manufactured by Alpac Fine Earth).
- the film was shaved at 0.25 minute intervals by lkV by argon sputtering, and the contents of carbon, oxygen and titanium atoms in the film were measured by an X-ray photoelectron analyzer (ESCA).
- the content ratio (%) of carbon atoms was determined by the formula: concentration of carbon element Z (concentration of carbon element + concentration of oxygen element + concentration of titanium element) x 100.
- the oxygen atom content ratio (%) was determined by the formula: concentration of oxygen element Z (concentration of carbon element + concentration of oxygen element + concentration of titanium element) x 100.
- the content ratio (%) of titanium atoms was determined by the formula: concentration of titanium element Z (concentration of carbon element + concentration of oxygen element + concentration of titanium element) x 100.
- UV1 germicidal lamp (GL-15, manufactured by Toshiba Corporation; ultraviolet light with a wavelength of 254 nm), irradiation amount 4 mWZc
- UV2 Black light (Toshiba Corporation, FL15BLB; ultraviolet light with a wavelength of 365 nm), irradiation light amount 2 mW, cm
- the photocatalytically active thin films (C1) to (C8) were each irradiated with ultraviolet rays using the lamps described above, and the change in surface wettability was evaluated by measuring the contact angle of water. Ultraviolet irradiation energy was calculated until the contact angle of water became 10 ° or less.
- UV Table 1 summarizes the contact angle before irradiation, the UV irradiation lamp (UV light), and the amount of irradiation necessary for hydrophilization.
- the obtained photocatalytically active thin film had good film appearance and adhesion, and the irradiation light amount required for hydrophilization was 1.27 j / cm 2 .
- the contact angle before UV irradiation of 62.5 ° is 8.8 at irradiation time of 3 minutes.
- the metal compounds in the solutions A-1 and A-2 were polymerized by hydrolytic condensation to form nanoparticles of 2.3 and 3.8 nm. Both solutions for forming the photocatalytically active thin film were transparent and contained agglomerated particles.
- FIG. 1 shows the results of elemental analysis in the depth direction by XPS of the film obtained by irradiating the film of Example 2 with ultraviolet rays and hydrophilizing the film to a water contact angle of 10 ° or less.
- the horizontal axis indicates the depth of surface force (nm)
- the vertical axis indicates the atomic content ratio (%).
- Cls indicates the content of carbon atoms
- O Is indicates the content of oxygen atoms
- Ti2p indicates the content of titanium atoms.
- the belly contained about 10 to 40% of carbon, and the carbon element was inclined in the depth direction.
- the carbon in the film remained unchanged even after it was irradiated with ultraviolet rays and became hydrophilic.
- the extraordinarily large amount of carbon near the surface is considered to be due to organic contaminants attached before the start of measurement.
- the power to be done was different. Only the surface layer appears to exhibit photocatalytic activity.
- the photocatalytically active thin film of Example 1 was measured with an X-ray diffractometer.
- Figure 2 shows the measured chart.
- FIG. 2 shows that the photocatalytically active thin film of Example 1 was amorphous.
- the photocatalytically active thin film of the present invention has the property of exhibiting excellent photocatalytic activity when irradiated with light having a low wavelength of 250 to 350 nm. Therefore, the photocatalytically active thin film of the present invention does not need to be exposed to light having a wavelength higher than 350 nm (visible light, etc.). There is no decrease in the adhesiveness between the film and the photocatalytically active thin film.
- the photocatalytically active thin film of the present invention can be formed by a low-temperature heat treatment at a temperature lower than 100 ° C., it is not necessary to limit the substrate used to prevent damage to the substrate by the heat treatment to a heat-resistant substrate. Therefore, a lightweight and easy-to-process plastic substrate can be suitably used as the substrate. Further, since the photocatalytically active thin film of the present invention has good adhesiveness, it can be easily formed directly on a substrate such as plastic, and does not deteriorate for a long time.
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WO2006088079A1 (ja) * | 2005-02-18 | 2006-08-24 | Nippon Soda Co., Ltd. | 有機無機複合体 |
JP2007237065A (ja) * | 2006-03-08 | 2007-09-20 | Miyoshi Oil & Fat Co Ltd | 光触媒活性を有する抗菌剤及び抗菌処理方法 |
US8637613B2 (en) | 2006-08-09 | 2014-01-28 | Wacker Chemie Ag | Self-dispersible silicone copolymers and method for the production and use thereof |
WO2019188835A1 (ja) * | 2018-03-29 | 2019-10-03 | 東レ株式会社 | ポリメタロキサン、組成物、硬化膜、部材、電子部品、繊維、セラミックス成型用結着剤、硬化膜の製造方法、および繊維の製造方法 |
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WO2006088079A1 (ja) * | 2005-02-18 | 2006-08-24 | Nippon Soda Co., Ltd. | 有機無機複合体 |
JPWO2006088079A1 (ja) * | 2005-02-18 | 2008-07-03 | 日本曹達株式会社 | 有機無機複合体 |
KR100922093B1 (ko) | 2005-02-18 | 2009-10-16 | 닛뽕소다 가부시키가이샤 | 유기 무기 복합체 |
US7709552B2 (en) | 2005-02-18 | 2010-05-04 | Nippon Soda Co., Ltd. | Organic/inorganic composite |
JP2007237065A (ja) * | 2006-03-08 | 2007-09-20 | Miyoshi Oil & Fat Co Ltd | 光触媒活性を有する抗菌剤及び抗菌処理方法 |
US8637613B2 (en) | 2006-08-09 | 2014-01-28 | Wacker Chemie Ag | Self-dispersible silicone copolymers and method for the production and use thereof |
WO2019188835A1 (ja) * | 2018-03-29 | 2019-10-03 | 東レ株式会社 | ポリメタロキサン、組成物、硬化膜、部材、電子部品、繊維、セラミックス成型用結着剤、硬化膜の製造方法、および繊維の製造方法 |
CN111886280A (zh) * | 2018-03-29 | 2020-11-03 | 东丽株式会社 | 聚金属氧烷、组合物、固化膜、构件、电子部件、纤维、陶瓷成型用粘合剂、固化膜的制造方法和纤维的制造方法 |
JPWO2019188835A1 (ja) * | 2018-03-29 | 2021-03-11 | 東レ株式会社 | ポリメタロキサン、組成物、硬化膜、部材、電子部品、繊維、セラミックス成型用結着剤、硬化膜の製造方法、および繊維の製造方法 |
CN111886280B (zh) * | 2018-03-29 | 2022-04-26 | 东丽株式会社 | 聚金属氧烷、组合物、固化膜、构件、电子部件、纤维、陶瓷成型用粘合剂、固化膜的制造方法和纤维的制造方法 |
JP7334619B2 (ja) | 2018-03-29 | 2023-08-29 | 東レ株式会社 | ポリメタロキサン、組成物、硬化膜、部材、電子部品、繊維、セラミックス成型用結着剤、硬化膜の製造方法、および繊維の製造方法 |
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