WO2005104111A1 - 共焦点光学系開口位置検出装置、共焦点光学系開口位置制御装置、光ヘッド装置、光情報処理装置および共焦点光学系開口位置検出方法 - Google Patents
共焦点光学系開口位置検出装置、共焦点光学系開口位置制御装置、光ヘッド装置、光情報処理装置および共焦点光学系開口位置検出方法 Download PDFInfo
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- WO2005104111A1 WO2005104111A1 PCT/JP2005/007541 JP2005007541W WO2005104111A1 WO 2005104111 A1 WO2005104111 A1 WO 2005104111A1 JP 2005007541 W JP2005007541 W JP 2005007541W WO 2005104111 A1 WO2005104111 A1 WO 2005104111A1
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- light
- condensing
- opening
- detector
- aperture
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- 230000003287 optical effect Effects 0.000 title claims abstract description 269
- 238000000034 method Methods 0.000 title claims description 16
- 238000001514 detection method Methods 0.000 claims description 38
- 230000010365 information processing Effects 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 13
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 33
- 238000010586 diagram Methods 0.000 description 16
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 201000009310 astigmatism Diseases 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B2007/0003—Recording, reproducing or erasing systems characterised by the structure or type of the carrier
- G11B2007/0009—Recording, reproducing or erasing systems characterised by the structure or type of the carrier for carriers having data stored in three dimensions, e.g. volume storage
- G11B2007/0013—Recording, reproducing or erasing systems characterised by the structure or type of the carrier for carriers having data stored in three dimensions, e.g. volume storage for carriers having multiple discrete layers
Definitions
- Confocal optical system aperture position detection device confocal optical system aperture position control device, optical head device, optical information processing device, and confocal optical system aperture position detection method
- the present invention relates to an optical information processing apparatus for recording, reproducing, and erasing information on an optical medium or a magneto-optical medium such as an optical disk or an optical card, and in particular, an optical recording medium having a plurality of information layers laminated (for example, A confocal optical system suitable for a multilayer optical information processing device using a multilayer optical disk or a multilayer optical card, an optical head device and a multilayer optical information processing device using the same, and an aperture position detection used in the optical information processing device.
- the wavelength of a light source has been shortened and the numerical aperture (hereinafter abbreviated as NA) of an objective lens has been increasing.
- NA numerical aperture
- the light source wavelength was 650 nm and the NA of the objective lens was 0.6
- an optical system with a light source wavelength of 405 nm and an NA of the objective lens of 0.85 has been proposed. I have.
- a multi-layer optical disc in which a number of information layers are superposed at predetermined intervals in the thickness direction of the optical disc will be developed.
- Patent Document 2 discloses a method and apparatus for controlling the position of a pinhole using an image of a pinhole on a light source side and an image of a pinhole on a detector side.
- FIG. 9 is a diagram showing a conventional confocal optical system described in Patent Document 2.
- 1 is the first light source
- 2 is the light source side pinhole
- 3a to 3e are lenses
- 4a to 4c are beam splitters
- 6 is a sample
- 7 is the detector side pinhole.
- 8 is a detector
- 9 is a second light source
- 10 is a position detector
- 11 is control means
- 12 is a two-axis stage.
- the control means 11 controls the biaxial stage 12 so that the position of the image of the pinhole 2 on the light source side on the position detector 10 coincides with the position of the image of the pinhole 7 on the detector side so that the lens 3c is positioned on the optical axis. On the other hand, it is slightly moved in the vertical plane. Thereby, the pinhole 2 on the light source side and the pinhole 7 on the detector side can be in a conjugate relationship.
- the second light source 9, the lens 3d, and the beam splitter 4a are required to form an image of the detector-side pinhole 7, so that the size of the apparatus is increased and cost is reduced. If this leads to an increase! /
- Patent Document 1 Japanese Patent No. 2624255
- Patent Document 2 Japanese Patent No. 2625330
- the present invention solves the above-mentioned conventional problems, and is a small-sized and low-cost confocal optical system opening position detection device, a confocal optical system opening position control device, and an optical head device using the same. And an optical information processing apparatus.
- a confocal optical system aperture position detection apparatus includes a light source, a first light condensing unit that condenses the light emitted from the light source, onto a sample, A second condensing unit for condensing light transmitted through the sample or reflected by the sample, an opening provided at a condensing point of the second condensing unit, and a light passing through the opening. And a detector for receiving light by a plurality of light receiving regions.
- the first light condensing means condenses the light emitted from the light source onto the sample.
- the condensed light passes through the sample, and then passes through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the sample in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- Light passing through the mouth is received by a detector having a plurality of light receiving regions. At this time, since the plurality of light receiving areas individually receive light, the amount of light received for each light receiving area can be calculated.
- the two-dimensional position of the light passing through the aperture can be detected by the light amount balance indicating the amount of light received for each light receiving area. This eliminates the necessity of providing a plurality of light sources, lenses, and the like, so that a small-sized and low-cost confocal optical system aperture position detection device can be realized.
- a confocal optical system aperture position control device comprises: a light source; and a first light condensing means for condensing light emitted from the light source into a sample.
- a second light condensing means for condensing light transmitted through the sample or reflected by the sample; an opening provided at a light condensing point of the second light condensing means;
- a detector for receiving the transmitted light by a plurality of light receiving regions, and an optical member, either the light source or the second focusing means or the aperture, which is perpendicular to a local optical axis associated with the optical member.
- the first light condensing means condenses the light emitted from the light source on the sample.
- the condensed light passes through the sample, and then passes through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the sample in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions. At this time, since the plurality of light receiving areas individually receive light, the amount of light received for each light receiving area can be calculated.
- the control means controls the driving means based on the light amount balance indicating the amount of light received for each light receiving area.
- the confocal optical system aperture position control device can effectively adjust the position of light passing through the aperture while being small in size and low in cost. .
- an optical head device provides a light source, and the light emitted from the light source is collected on a target information layer of an optical recording medium in which a plurality of information layers are stacked.
- a first condensing unit that emits light; a first driving unit that drives the first condensing unit in a plane perpendicular to an optical axis of light transmitted through the first condensing unit; Reflection from the information layer
- a second driving means for driving an optical member of any one of the light source or the second condensing means or the aperture in a plane perpendicular to a local optical axis associated with the optical member; It is preferable that the apparatus further comprises control means for controlling the second driving means based on the amount of light received for each of the plurality of light receiving regions of the detector.
- the first condensing means condenses the light emitted from the light source on the target information layer of the optical recording medium.
- the first driving means drives the first light condensing means so as to condense light to a desired position in the information layer.
- the condensed light is transmitted through the optical recording medium, and then transmitted through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the optical recording medium in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions.
- the plurality of light receiving regions individually receive light, it is possible to calculate the amount of light received for each light receiving region.
- the two-dimensional position of the light passing through the aperture can be detected by the light amount balance indicating the amount of light received for each light receiving area.
- the control means controls the second drive means based on the light amount balance.
- the control means controls the second driving means so that the amount of light received by the detector in each light receiving area is equal. This makes it possible to adjust the light transmitted through the opening to pass through the center of the opening.
- the optical head device according to the present invention can effectively adjust the position of light passing through the opening while being small in size and low in cost.
- a method for detecting an aperture position of a confocal optical system comprises: a first focusing step of focusing light emitted from a light source on a sample; A second condensing step of condensing light transmitted through or reflected by the sample, and a plurality of light receiving areas for transmitting light passing through an aperture provided at a condensing point position in the second condensing step.
- a position detecting step of detecting a position shift between the light and the opening by detecting a position of a dark portion which is a region having a lower luminance than a peripheral portion by the light detecting step.
- the light emitted from the light source in the first focusing step is focused on a sample such as an optical recording medium.
- a sample such as an optical recording medium.
- the condensed light passes through the sample, it is condensed at the opening position in the second condensing step.
- the light condensed in the first condensing step is reflected in a predetermined direction by the sample, and then condensed on the opening position in the second condensing step.
- the light passing through the aperture is received by a plurality of light receiving areas. In this light detection step, the light that has passed through the aperture is individually received by each of the plurality of light receiving regions, so that the amount of light received for each light receiving region can be calculated.
- the position of the dark part generated on the light receiving area by partially blocking light by the opening is detected by the position detecting step.
- the position of the dark portion is detected based on the light amount balance indicating the amount of light received for each light receiving area. This makes it possible to efficiently detect the two-dimensional position of light passing through the aperture.
- FIG. 1 is a configuration diagram of a confocal optical system aperture position control device according to a first embodiment of the present invention.
- FIG. 2 is a diagram showing positional deviation between an aperture and a condensed spot and an image on a detector according to Embodiment 1 of the present invention.
- FIG. 3 is a diagram in which an aperture and a condensed spot are cut along a cross section including an optical axis in Embodiment 1 of the present invention.
- FIG. 4 is a diagram showing the relationship between the displacement of the aperture in the Z direction and the output of the detector according to Embodiment 1 of the present invention.
- FIG. 5 is a diagram showing positional deviation between an aperture and a condensed spot and an image on a detector according to Embodiment 2 of the present invention.
- FIG. 6 is a configuration diagram of a confocal optical system aperture position control device according to a third embodiment of the present invention.
- FIG. 7 is a configuration diagram of an optical head device according to a fourth embodiment of the present invention.
- FIG. 8 is a configuration diagram of an optical information processing device according to a fifth embodiment of the present invention.
- FIG. 9 is a diagram showing a conventional confocal optical system.
- FIG. 1 is a configuration diagram of a confocal optical system aperture position control device according to Embodiment 1 of the present invention.
- reference numeral 13 denotes a light source, preferably a semiconductor laser.
- Reference numeral 14 denotes a first light collecting means, preferably a lens.
- 15 is a sample.
- Reference numeral 16 denotes a second light collecting means, preferably a lens.
- Reference numeral 17 denotes an opening, which is provided at the position of the light-collecting point of the second light-collecting means 16.
- Reference numeral 18 denotes a detector that detects light passing through the opening 17. As the detector 18, an image sensor such as a photodiode, a CCD, or a CMOS can be used.
- Reference numeral 19 denotes a driving unit that moves the opening 17 in a three-dimensional direction.
- the control means 20 controls the driving means 19 based on the signal from the detector 18.
- Light emitted from the light source 13 is condensed inside the sample 15 by the first condensing means 14.
- the light transmitted through the sample 15 is then focused again by the second focusing means 16 and passes through the opening 17 provided at the focusing point.
- the light that has passed through the opening 17 is detected by a detector 18.
- 21 is a shielding plate
- 22 is a slit provided on the shielding plate 21.
- the shielding plate 21 and the slit 22 form the opening 17.
- Reference numeral 23 denotes a light condensing spot condensed by the second light condensing means 16, and here, only an Airy disk is shown.
- the size of the slit 22 is about one to two times the diameter of the Airy disk of the condensed spot 23 in one direction (up and down direction in the figure), and compared to the converged spot 23 in the other direction (left and right direction in the figure). , It is big enough.
- the detector 18 forms a force with the two light receiving areas 18a and 18b, and a dividing line between the light receiving areas 18a and 18b is provided in parallel with the longitudinal direction of the slit 22.
- Reference numeral 25 denotes a detection light spot, which is a condensing spot 23 spread on the detector 18.
- Reference numeral 26 denotes a dark portion, which is a portion of the detection light spot 23 where the amount of light is lower than that of the surroundings.
- FIG. 2A shows a state in which the condensed spot 23 is shifted downward from the slit 22, and at that time, a dark portion 26 is generated on the light receiving region 18 a side of the detector 18.
- FIG. 1A shows a state in which the condensed spot 23 is shifted downward from the slit 22, and at that time, a dark portion 26 is generated on the light receiving region 18 a side of the detector 18.
- FIG. 2B shows a case where the light condensing spot 23 is located in the middle of the slit 22. At this time, no dark portion occurs in the detection light spot 25.
- FIG. 2C shows a state in which the condensed spot 23 is shifted upward in the slit 22, and at that time, a dark portion 26 is generated on the light receiving region 18 b side of the detector 18. Accordingly, by measuring the light amount balance between the light receiving areas 18a and 18b, the position shift between the condensing spot 23 and the slit 22 and the direction of the position shift can be determined.
- FIG. 3 is a view in which the opening 17 and the condensing spot 23 are cut along a section including the optical axis.
- Reference numeral 27 denotes a wavefront of the light collected by the second light collecting means 16.
- the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.
- the condensed spot 23 is applied to one edge (lower side in the figure) of the slit 22. That is, this figure shows the situation of FIG. 2 (a).
- a diffracted wave called a peripheral wave is generated from the edge where the converging spot 23 hits, and travels like a wavefront 28 (for example, “Pencil of Light”, Masao Tsuruta, New Technology Communication 1988 Published year, pl28). Since the wavefront 27 and the wavefront 28 are out of phase, interference occurs on the detector (not shown), and bright and dark interference fringes occur.
- the area where the light and dark interference fringes occur on the detector is the dark area 26.
- the dark part 26 is an area having a bright and dark interference fringe inside, which is not uniformly darker than the surrounding detection light spot 25.
- a scattered wave different from the wave is further generated and travels like the wavefront 101.
- the method of detecting the aperture position using the scattered waves will be described in detail in Embodiment 2 below.
- the control means 20 measures the light amount balance between the output force light receiving areas 18a and 18b of the detector 18 and detects the positional deviation of the opening 17 in a plane perpendicular to the optical axis. Then, the control means 20 controls the driving means 19 to move the opening 17, thereby preventing the displacement. Furthermore, if the opening 17 is moved in the optical axis direction by the driving means 19, the output from the detector 18 fluctuates. By utilizing the fluctuation of the output, the position of the aperture 17 and the light collecting spot 23 in the optical axis direction can be adjusted.
- FIG. 4 is a diagram showing the relationship between the displacement of the opening 17 in the Z direction and the output P of the detector 18.
- the output is low at the position A1 and high at the position A2.
- a larger amount of light passes through the opening 17 at the position A2 than at the position A1.
- the light-collecting point position of the second light-collecting means 16 is in the direction of A2 from the position of A.
- the opening 17 is swung in the optical axis direction by the driving means 19, thereby detecting and correcting the positional deviation in the optical axis direction between the opening 17 and the condensing point of the second condensing means 16.
- the driving means 19 may be configured to be able to drive in at least one direction, for example, in the direction of B1 force B2, or conversely, in the direction of B2 to B1, instead of swinging the opening 17. Also in this case, it is possible to detect and correct the positional deviation in the optical axis direction between the opening 17 and the converging point of the second converging means 16.
- the driving means 19 for moving the opening 17 in a plane perpendicular to the optical axis a means for mechanically moving the opening 17 such as a voice coil or a mechanical stage may be used.
- the opening 17 may be formed with a liquid crystal shutter, and the opening position may be electronically moved.
- FIG. 5 is a diagram showing an aperture and a detector of the confocal optical system aperture position control device according to the second embodiment of the present invention.
- the confocal optical system aperture position control device of the second embodiment of the present invention is different from the confocal optical system aperture position control device of the first embodiment of the present invention in that the aperture shape and the pattern such as the number of divisions of the light receiving region of the detector are different from each other. Only the differences will be described with reference to FIG. 5, the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.
- reference numeral 29 denotes a pinhole, which is provided on the shielding plate 21.
- the size of the pinhole 29 is about 1 to 2 times the Airy disk diameter of the focal spot 23.
- the detector 18 is divided into four, and includes light receiving areas 18o, 18p, 18q, and 18r.
- FIG. 5 (a) when the converging spot 23 is located at the lower end of the pinhole 29, dark portions are generated in the light receiving regions 18 ⁇ and 18p due to the peripheral waves described with reference to FIG.
- FIG. 5B shows a state in which the condensed spot 23 is concentric with the pinhole 29. At this time, the outputs of the light receiving areas 18o, 18p, 18q, and 18r are the same.
- the detection light spot 25a having a smaller light amount than the detection light spot 25 so as to surround the detection light spot 25.
- the light amount smoothly decreases from the maximum value, but here, for simplicity, only two cross sections 25 and 25a are shown as detection light spots corresponding to the cross section of the light amount.
- the distribution of the light amount is asymmetric, especially at the detection light spot 25a.
- the detection light spot 25a shows an asymmetrical pattern with a skirt extending upward in the figure.
- the detection light spot 25a is directed downward to the lower right of the figure. This is thought to be due to the effect of the scattered light shown in FIG.
- the position of the pattern having an asymmetric light amount is detected by detecting the position shift. It is also possible to detect a displacement.
- the light quantity in the light receiving areas 18q and 18r is larger than the light quantity in the light receiving areas 18 ⁇ and 18p. Further, the light amounts of the light receiving regions 18 ⁇ and 18p and the light receiving regions 18q and 18r are equal.
- the converging spot 23 is shifted downward with respect to the opening 17.
- FIG. 6 is a configuration diagram of a confocal optical system aperture position control device according to Embodiment 3 of the present invention. 6, the same components as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.
- reference numeral 30 denotes a beam splitter.
- Reference numeral 31 denotes a parallel plate, which is made of, for example, an optically polished glass plate.
- Reference numeral 19 denotes a driving means for rotating the parallel plate 31 about the X axis or the Y axis, or about the X axis and the Y axis.
- the light emitted from the light source 13 passes through the beam splitter 30 and is focused inside the sample 15 by the first focusing means 14.
- the light reflected by the sample 15 passes through the first focusing means 14 again, is reflected by the beam splitter 30 and is focused on the aperture 17. That is, in the third embodiment, the first light collecting means and the second light collecting means are the same. Then, the light passing through the opening 17 enters the detector 18.
- the focal point moves in the Y axis direction.
- Point position Moves in the X-axis direction.
- the driving unit 19 controlled by the control unit 20 rotates the parallel flat plate 31, whereby the position of the aperture 17 and the position of the condensing point can be aligned.
- the detection of the displacement is the same as that described in the first or second embodiment, and thus the description is omitted.
- the position of the focal point is finely moved using the parallel flat plate 31.
- the position of the focal point of the light reflected by the mirror can be finely moved by rotating the mirror. It is.
- FIG. 7 is a configuration diagram of an optical head device according to Embodiment 4 of the present invention. 7, the same components as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.
- reference numeral 32 denotes a collimator, which converts light emitted from the light source 13 into parallel light. 33 and 34 are beam splitters.
- Reference numeral 14 denotes an objective lens as one mode of the first light collecting means.
- Reference numeral 35 denotes a multilayer optical disk, which is a multilayer optical recording medium in which a plurality of information layers are stacked. The multilayer optical disk 35 is rotated by driving means (not shown).
- Reference numeral 36 denotes a driving unit that moves the first condensing unit (objective lens) 14 in the optical axis direction and in a plane perpendicular to the optical axis direction.
- a voice coil actuator or the like is preferably used as the driving means 36.
- Reference numeral 37 denotes second focusing means for focusing light from the beam splitter 34 onto the opening 17.
- a detector 39 detects a servo signal from the multilayer optical disc 35.
- Numeral 38 denotes a toric lens, which focuses the light from the beam splitter 33 on the detector 39 as light having astigmatism.
- Reference numeral 40 denotes a low-nos filter (LPF), which passes low-frequency components of the signal of the detector 18.
- LPF low-nos filter
- Reference numeral 41 denotes a Hinos filter (HPF), which passes high-frequency components of the signal from the detector 18.
- Reference numeral 42 denotes a driving unit that drives the opening 17 in the optical axis direction and in a direction perpendicular to the optical axis.
- the signal detected by the detector 18 is separated into a low-frequency component of less than approximately 1 MHz and a high-frequency component of approximately 1 MHz or more by the low-pass filter 40 and the high-pass filter 41 and input to the control means 20.
- the signal detected by the detector 18 is a high-frequency component of approximately 1 MHz or more, which is a signal from a pit recorded on the multilayer optical disc 35, and a low-frequency component of approximately less than 1 MHz due to a positional shift between the aperture 17 and the focused spot.
- the control means 20 controls the driving means 42 based on the signal passed through the low-pass filter 40 to move the opening 17, so that the position of the condensed spot and the opening 17 can be adjusted.
- a signal recorded on the multilayer optical disc 35 can be reproduced from the signal that has passed through the high-pass filter 41. Further, a tracking signal is generated from the signal passed through the high-pass filter 41 in the control means 20 by a phase difference method, which is a known tracking error signal detection method. Then, the control means 20 controls the driving means 36 on the basis of this signal to perform positioning of the multilayer optical disc 35 and the first light condensing means 14 in the track direction.
- the control means 20 generates a focus error signal by the astigmatic difference method, and controls the driving means 36 based on this signal to control the position of the multilayer optical disc 35 and the first light condensing means 14 in the optical axis direction. Perform alignment.
- the focus servo is performed on a desired information layer of the multilayer optical disc 35.
- a tracking servo to record and reproduce information.
- the use of the opening 17 removes reflected light from portions other than the desired information layer of the multilayer optical disc 35, thereby enabling reproduction without interlayer crosstalk.
- the detection of the tracking error signal and the detection of the signal of the displacement of the opening 17 are both possible by the detector 18, so that the effect of reducing the number of components can be obtained.
- FIG. 8 is a configuration diagram of an optical information processing apparatus according to Embodiment 5 of the present invention.
- reference numeral 43 denotes the optical head device described in the fourth embodiment of the invention
- reference numeral 44 denotes a multilayer optical recording medium, which is an optical disk in which a plurality of information layers are stacked.
- Reference numeral 45 denotes a motor as a drive mechanism of the optical disk 44, which supports and rotates the optical disk 44.
- Reference numeral 46 denotes a circuit board, which controls a focus servo drive mechanism (not shown), a tracking servo drive mechanism (not shown), and these drive mechanisms to read, write, or erase information. Electrical circuit.
- Reference numeral 47 denotes a connection portion for a power supply or an external power supply, and supplies a voltage to the power circuit board 46, the driving mechanism of the optical head device 43, the motor 45, and the condenser lens driving device. It should be noted that there is no problem even if a connection terminal for a power supply or an external power supply is provided in each drive circuit.
- the optical disk 44 is rotated by a motor 45.
- the optical head device 43 sends a signal corresponding to the positional relationship with the optical disc 44 to the circuit board 46.
- the circuit board 46 performs an operation based on this signal, and outputs a signal for finely moving the optical head device 43 or the condenser lens in the optical head device 43.
- the optical head device 43 or a focusing lens in the optical head device 43 performs focus servo and tracking control on the optical disk 44 under the control of the circuit board 46, reads information from the optical disk 44, Or write or erase.
- the optical information processing device configured using the optical head device according to the embodiment of the present invention has good reproduction performance with small interlayer crosstalk and is not easily affected by changes in ambient temperature. It has the following advantages. (Summary of Embodiment)
- the confocal optical system aperture position detecting device comprises: a light source; a first light condensing means for condensing light emitted from the light source onto a sample; A second condensing means for condensing the light transmitted through the light or the light reflected by the sample, an opening provided at a condensing point of the second condensing means, and a light passing through the opening. And a detector for receiving light by a plurality of light receiving regions.
- the first condensing unit condenses the light emitted from the light source on the sample.
- the condensed light passes through the sample, and then passes through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the sample in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions. At this time, since the plurality of light receiving areas individually receive light, the amount of light received for each light receiving area can be calculated.
- the two-dimensional position of the light passing through the aperture can be detected by the light amount balance indicating the amount of light received for each light receiving area. This eliminates the necessity of providing a plurality of light sources, lenses, and the like, thereby realizing a small-sized and low-cost confocal optical system aperture position detection device.
- the confocal optical system aperture position detecting device is a confocal optical system aperture position detecting device (1), wherein the light receiving area of the detector indicates a two-dimensional position of light passing through the aperture. It is preferable to be split into detectable! / ,.
- a case where the light receiving area is divided into two in the vertical direction and two in the horizontal direction so as to pass through the center of the light receiving area that is, a case in which the light receiving area is divided into four in total. If the upper two light receiving areas receive the same amount of light, the lower two light receiving areas receive the same amount of light, respectively. If the upper two light receiving areas receive the same amount of light, the lower two light receiving areas receive the same amount of light. If it is larger than the amount of light, it can be understood that the light passing through the opening is shifted vertically downward with respect to the center of the opening.
- the light receiving quantity in the other three light receiving areas where the light receiving quantity in the upper right light receiving area is the smallest is larger than the light receiving quantity and is equal to each other. It can be seen that the emitted light is shifted to the upper right with respect to the center of the opening due to the direction of travel of the light.
- the plurality of light receiving regions of the detector are not limited to the above-described four divisions but are divided into at least three or more divisions, the two-dimensional position of light passing through the aperture can be detected.
- the way of division is not limited to the above, and the direction of division may be any direction.
- the plurality of light receiving regions of the detector need not be equally divided so that their areas are equal. In this case, that is, when the areas of the plurality of light receiving regions are different, for example, by multiplying the received light amount by a coefficient corresponding to the area of the light receiving region, the same effect as in the case of equally dividing the light receiving region can be obtained. .
- the confocal optical system opening position detecting device is a confocal optical system opening position detecting device (2), wherein the opening is a pinhole, and the detector has a four-divided light receiving area. It is preferred that
- the light receiving area of the detector is composed of one area
- the light receiving area is divided into two in the vertical direction and two in the horizontal direction so as to pass through the center of the light receiving area, that is, divided into four in total.
- the way of dividing into four is not limited to the above, and the dividing direction may be any direction other than vertical and horizontal.
- the sizes of the divided light receiving regions may be different from each other.
- the confocal optical system aperture position detecting device is a displacement of the confocal optical system aperture position detecting device (1) to (3), and the material of the aperture is a good electrical conductor. It is preferable that there is.
- the light passing through the aperture is composed of a wave that passes through the edge and a diffracted wave called a peripheral wave. And with the passing waves
- the peripheral wave reaches the same region, for example, on the detector, interference causes bright and dark interference fringes, and the region becomes a dark portion having lower luminance than the surroundings.
- the material of the opening is a good electrical conductor, this peripheral wave can be efficiently generated, and it becomes easy to observe the dark part. Thereby, for example, the difference in the amount of light detected by the detector becomes clear, so that the relative displacement between the opening and the light passing through the opening can be effectively detected.
- the good electrical conductor is not limited to a metal, but may be a semiconductor or the like.
- the confocal optical system aperture position detecting device is any one of the confocal optical system aperture position detecting devices (1) to (4), wherein the first condensing means and the second It is preferable that the condensing means is the same.
- the first condensing unit condenses the light emitted from the light source on the sample. Then, the condensed light is reflected by the sample, and then passes through the first condensing means again to be condensed at the opening position. That is, since the first light condensing means also functions as the second light condensing means, it is possible to reduce the number of parts and reduce the size, and also to suppress the manufacturing cost.
- the confocal optical system aperture position control device comprises: a light source; a first light condensing means for condensing light emitted from the light source onto a sample; A second condensing means for condensing the light transmitted through the light or the light reflected by the sample, an opening provided at a condensing point of the second condensing means, and a light passing through the opening.
- a detector that receives light through a plurality of light receiving regions and an optical member having any one of the light source, the second condensing means, and the aperture are driven in a plane perpendicular to a local optical axis attached to the optical member. It is preferable to include a driving unit and a control unit that controls the driving unit based on the amount of light received for each of a plurality of light receiving regions of the detector.
- the first condensing unit condenses the light emitted from the light source on the sample.
- the condensed light passes through the sample, and then passes through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the sample in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions. At this time, since the plurality of light receiving areas individually receive light, the amount of light received for each light receiving area is calculated. Can.
- the control means controls the light amount variation indicating the amount of light received for each light receiving area. To control the driving means.
- the control means drives, for example, only the opening to the upper right in a plane perpendicular to the local optical axis associated with the opening, and controls the light to pass through the center of the opening.
- the driving means may be a light source or a second condensing means which is not an aperture which is an optical member and which is another optical member in a plane perpendicular to a local optical axis associated with each optical member. May be configured to be driven.
- the local optical axis attached to the optical member refers to the optical axis of light immediately after being emitted from the light source if it is a light source. In the case of an aperture or a second light condensing means, it indicates the optical axis of light passing or transmitting through the optical component.
- the confocal optical system aperture position control device can effectively adjust the position of light passing through the aperture while being small in size and low in cost. It becomes possible.
- the confocal optical system aperture position control device is a confocal optical system aperture position control device (6), wherein the drive unit is a first drive unit, and the light source or the second collection unit is used as the first drive unit.
- a second driving unit for driving any one of the optical unit and the optical member of the opening in a direction parallel to a local optical axis associated with the optical member;
- the first and second driving means are controlled based on the amount of light received for each of the plurality of light receiving regions.
- the driving unit controls the first driving unit to move the aperture or the light source or the second condensing unit perpendicular to the local optical axis attached to the optical member. While driving in the plane, the second driving means is controlled to drive the aperture or the light source or the second light condensing means in a local optical axis direction associated with the optical member. This allows opening and opening Position adjustment with the light passing through can be effectively performed. At this time, the control means may swing the aperture, the light source, or the second light condensing means in a predetermined one direction instead of, for example, driving in one direction.
- the confocal optical system aperture position control device comprises: a light source; a first light condensing means for condensing light emitted from the light source onto a sample; A second condensing means for condensing the light transmitted through the light or the light reflected by the sample, an opening provided at a condensing point of the second condensing means, and a light passing through the opening.
- a detector that receives light through a plurality of light receiving regions, a parallel plate provided between the second light-collecting unit and the opening, and the parallel plate is inclined with respect to an optical axis of light transmitted through the parallel plate. It is preferable to include a driving unit for controlling the driving unit, and a control unit for controlling the driving unit based on the amount of light received for each of the plurality of light receiving regions of the detector.
- the first condensing unit condenses the light emitted from the light source on the sample.
- the condensed light passes through the sample, and then passes through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the sample in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions. At this time, since the plurality of light receiving areas individually receive light, the amount of light received for each light receiving area can be calculated.
- the control means controls the driving means based on the light amount balance indicating the amount of light received for each light receiving area.
- the control means rotates the parallel plate by a predetermined angle around, for example, a vertical axis passing through the center of the parallel plate and a horizontal axis passing through the center of the parallel plate.
- the aperture of the confocal optical system is not required.
- the position control device is small and inexpensive, it can effectively adjust the position of light passing through the aperture.
- the confocal optical system aperture position control device is any of the confocal optical system aperture position control devices (6) to (8), wherein the first condensing means and the second It is preferable that the condensing means is the same.
- the first condensing unit condenses the light emitted from the light source on the sample. Then, the condensed light is reflected by the sample, and then passes through the first condensing means again to be condensed at the opening position. That is, since the first light condensing means also functions as the second light condensing means, it is possible to reduce the number of parts and reduce the size, and also to suppress the manufacturing cost.
- the light emitted from the light source and the light emitted from the light source are focused on the target information layer of the optical recording medium in which a plurality of information layers are stacked.
- First condensing means, first driving means for driving the first condensing means in a plane perpendicular to the optical axis of the light transmitted through the first condensing means, and the target information A second condensing means for condensing reflected light or transmitted light from the layer, an opening provided at a condensing point position of the second condensing means, and a plurality of light receiving means for receiving light passing through the opening.
- a detector for receiving light by an area, and a second driving means for driving an optical member of the light source or the second condensing means or the aperture in a plane perpendicular to a local optical axis associated with the optical member.
- Driving means, and a control means for controlling the second driving means based on the amount of light received for each of a plurality of light receiving areas of the detector. When, it is preferable to provide.
- the first condensing unit condenses the light emitted from the light source on the target information layer of the optical recording medium.
- the first driving means drives the first light condensing means so as to condense light to a desired position in the information layer.
- the condensed light is transmitted through the optical recording medium, and then transmitted through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the optical recording medium in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions.
- the plurality of light receiving regions individually receive light, it is possible to calculate the amount of light received for each light receiving region.
- This receiving The two-dimensional position of the light passing through the aperture can be detected by the light amount balance indicating the amount of light received for each light area.
- the control means controls the second driving means based on the light amount balance.
- the control means controls the second driving means so that the amount of light received by the detector in each light receiving area is equal. This makes it possible to adjust the light transmitted through the opening to pass through the center of the opening.
- the optical head device according to the present invention can effectively adjust the position of light passing through the opening while being small in size and low in cost.
- the light emitted from the light source and the light emitted from the light source are focused on the target information layer of the optical recording medium in which a plurality of information layers are stacked.
- First condensing means, first driving means for driving the first condensing means in a plane perpendicular to the optical axis of the light transmitted through the first condensing means, and the target information A second condensing means for condensing reflected light or transmitted light from the layer, an opening provided at a condensing point position of the second condensing means, and a plurality of light receiving means for receiving light passing through the opening.
- a detector that receives light through a region, a parallel flat plate provided between the second light collector and the opening, and a parallel plate that is inclined with respect to an optical axis of light transmitted through the parallel flat plate.
- the first light condensing means condenses the light emitted from the light source on the target information layer of the optical recording medium.
- the first driving means drives the first light condensing means so as to condense light to a desired position in the information layer.
- the condensed light is transmitted through the optical recording medium, and then transmitted through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the optical recording medium in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions.
- the control means controls the second driving means based on the light amount balance, and transmits the parallel flat plate through the parallel flat plate such that the light amounts received by the detectors in the respective light receiving regions become equal. Incline with respect to the optical axis of light. This makes it possible to adjust the light transmitted through the opening to pass through the center of the opening.
- the optical head device according to the present invention can effectively adjust the position of light passing through the opening while being small in size and low in cost.
- the optical head device is an optical head device (10) or (11), wherein the control means controls the first driving means in addition to the second driving means.
- the first driving means is controlled based on a high-frequency signal from the detector
- the second driving means is controlled based on a low-frequency signal from the detector.
- the detector outputs a high-frequency signal and a low-frequency signal.
- the high-frequency signal is mainly a signal from a pit recorded on the optical recording medium
- the low-frequency signal is a signal mainly due to a positional shift between the opening and light passing through the opening. Therefore, the control means controls the first driving means based on the high-frequency signal from the detector, and causes the positioning in the track direction to be performed by, for example, a phase difference method. Further, the control means is configured to perform the control based on the low frequency signal from the detector.
- the optical head device controls the second driving means to align the opening with the light passing through the opening.
- the optical head device by selectively using the high-frequency signal and the low-frequency signal, the optical head device according to the present invention is small in size and low in cost, and is capable of adjusting the position of the light incident on the optical recording medium and the light passing through the opening. Can be efficiently adjusted.
- the light emitted from the light source and the light emitted from the light source are focused on the target information layer of the optical recording medium in which a plurality of information layers are stacked.
- First condensing means, first driving means for driving the first condensing means in a plane perpendicular to the optical axis of the light transmitted through the first condensing means, and the target information A second condensing means for condensing reflected light or transmitted light from the layer, an opening provided at a condensing point position of the second condensing means, and a plurality of light receiving means for receiving light passing through the opening.
- the apparatus further comprises a moving unit, and a control unit that controls the second and third driving units based on the amount of light received for each of the plurality of light receiving regions of the detector.
- the first condensing unit condenses the light emitted from the light source on the target information layer of the optical recording medium.
- the first driving means drives the first light condensing means so as to condense light to a desired position in the information layer.
- the condensed light is transmitted through the optical recording medium, and then transmitted through the second condensing means, and is condensed at the opening position.
- the light condensed by the first light condensing means is reflected by the optical recording medium in a predetermined direction, and then transmitted through the second light condensing means and condensed at the opening position.
- the light passing through the aperture is received by a detector having a plurality of light receiving regions.
- the plurality of light receiving regions individually receive light, it is possible to calculate the amount of light received for each light receiving region.
- the two-dimensional position of the light passing through the aperture can be detected by the light amount balance indicating the amount of light received for each light receiving area.
- the control means controls the second driving means based on the light quantity balance, and adjusts the position of the second light collecting means or the aperture so that the light quantity received by the detector in each light receiving area becomes equal.
- the light is driven in a plane perpendicular to each local optical axis.
- the control means controls, for example, the third driving means so that the amount of light received by the detector is maximized, and makes either the second light collecting means or the aperture parallel to the respective local optical axes. Drive in different directions. This makes it possible to adjust the light transmitted through the opening to pass through the center of the opening.
- the optical head device according to the present invention can effectively adjust the position of light passing through the opening while being small in size and low in cost.
- the optical head device is an optical head device (13), wherein the control means controls the first driving means in addition to the second and third driving means. Controlling the first driving means based on a high-frequency signal from the detector, and controlling the second and third driving means based on a low-frequency signal from the detector. I do.
- the detector outputs a high-frequency signal and a low-frequency signal.
- the high-frequency signal is mainly a signal from a pit recorded on the optical recording medium
- the low-frequency signal is a signal mainly due to a positional shift between the opening and light passing through the opening. Therefore, the control means
- the first driving means is controlled on the basis of the high-frequency signal, and the positioning in the track direction is performed by, for example, a phase difference method.
- the control means controls the second and third driving means based on the low-frequency signal from the detector, and controls the position of the opening and the light passing through the opening in directions perpendicular and parallel to the optical axis. Make adjustments.
- the optical head device is small in size and low in cost, and is capable of adjusting the position of the light incident on the optical recording medium and controlling the light passing through the opening. Position adjustment can be performed efficiently.
- the optical head device is any of the optical head devices (10) to (14), wherein the opening is a pinhole, and the detector has a four-divided light receiving area. preferable.
- the light receiving area of the detector is composed of one area, if the magnitude of the shift of the light passing through the pinhole from the center of the pinhole is equal, the light is received regardless of the direction of the shift. Since the light amounts are equal, the direction of the shift cannot be detected. Therefore, for example, the light receiving area is divided into two in the vertical direction and two in the horizontal direction so as to pass through the center of the light receiving area, that is, divided into four in total. In this case, it is possible to detect the two-dimensional position of light passing through the pinhole, which balances the amount of light received by the four light receiving regions. Also, the way of dividing into four is not limited to the above, and the dividing direction may be any direction other than vertical and horizontal. Furthermore, as long as the two-dimensional position of the light passing through the pinhole can be detected from the balance of the light amounts, the sizes of the divided light receiving regions may be different from each other.
- the optical head device is any one of the optical head devices (10) to (15), and it is preferable that the first light collecting means and the second light collecting means are the same. .
- the first condensing unit condenses the light emitted from the light source on the optical recording medium. Then, the condensed light is reflected by the optical recording medium, passes through the first condensing means again, and is condensed at the opening position.
- the first light condensing means also functions as the second light condensing means, it is possible to reduce the number of components and reduce the size and to reduce the manufacturing cost.
- the optical information processing apparatus includes an optical head device according to any one of (10) to (16) and a drive mechanism for driving the optical recording medium. And having Is preferred. According to this configuration, it is possible to realize an optical information processing apparatus in which the interlayer crosstalk is small and the reproduction performance is good, and the optical information processing apparatus is hardly affected by changes in the ambient temperature.
- the method of detecting the aperture position of the confocal optical system includes the first light-collecting step of condensing the light emitted from the light source on the sample, and transmitting the light transmitted through the sample.
- a light detecting step and a light-receiving region which is generated by blocking a part of the light when the light condensed in the second light-condensing step passes through the opening, compared to a peripheral portion in the light-receiving region; It is preferable that the method further includes a position detection step of detecting a position shift between the light and the opening by detecting a position of a dark portion which is an area with low luminance in the light detection step.
- the light emitted from the light source in the first focusing step is focused on a sample such as an optical recording medium. After the condensed light passes through the sample, it is condensed at the opening position in the second condensing step.
- the light condensed in the first condensing step is reflected in a predetermined direction by the sample, and then condensed on the opening position in the second condensing step.
- the light passing through the aperture is received by a plurality of light receiving areas. In this light detection step, the light that has passed through the aperture is individually received by each of the plurality of light receiving regions, so that the amount of light received for each light receiving region can be calculated.
- the position of the dark part generated on the light receiving area by partially blocking light by the opening is detected by the position detecting step.
- the position of the dark portion is detected based on the light amount balance indicating the amount of light received for each light receiving area. This makes it possible to efficiently detect the two-dimensional position of light passing through the aperture.
- the method of detecting the aperture position of the confocal optical system includes the first light-collecting step of condensing light emitted from the light source on the sample, and transmitting the light transmitted through the sample.
- the method further includes a position detection step of detecting a position shift between the light and the opening by detecting the light in the output step.
- the light emitted from the light source in the first focusing step is focused on a sample such as an optical recording medium. After the condensed light passes through the sample, it is condensed at the opening position in the second condensing step.
- the light condensed in the first condensing step is reflected in a predetermined direction by the sample, and then condensed on the opening position in the second condensing step.
- the light passing through the aperture is received by a plurality of light receiving areas. In this light detection step, the light that has passed through the aperture is individually received by each of the plurality of light receiving regions, so that the amount of light received for each light receiving region can be calculated.
- the position of the asymmetrical pattern of the amount of light generated by the light being scattered by the opening is detected by the position detecting step.
- the position of the dark part is detected based on the light amount balance indicating the amount of light received for each light receiving area. This makes it possible to efficiently detect the two-dimensional position of light passing through the aperture.
- the confocal optical system aperture position detection device and confocal optical system aperture position control device according to the present invention can suppress displacement of the aperture position due to a change in ambient temperature, and can be used for optical systems such as biological microscopes and industrial microscopes. Useful as
- the optical head device or the optical information processing device according to the present invention is useful as a storage drive for a computer or a video drive.
Abstract
Description
Claims
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US10/595,995 US7764589B2 (en) | 2004-04-21 | 2005-04-20 | Confocal optical system aperture detector that measures a light quantity balance of light received to detect a position displacement, and a confocal optical system aperture position controller, an optical head and a position detecting method performing the same |
JP2006519500A JP4850703B2 (ja) | 2004-04-21 | 2005-04-20 | 共焦点光学系開口位置制御装置、光ヘッド装置および光情報処理装置 |
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2005
- 2005-04-20 CN CNB2005800015523A patent/CN100452199C/zh not_active Expired - Fee Related
- 2005-04-20 US US10/595,995 patent/US7764589B2/en not_active Expired - Fee Related
- 2005-04-20 JP JP2006519500A patent/JP4850703B2/ja not_active Expired - Fee Related
- 2005-04-20 WO PCT/JP2005/007541 patent/WO2005104111A1/ja active Application Filing
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007114371A1 (ja) * | 2006-03-31 | 2007-10-11 | Pioneer Corporation | 光ピックアップ及び情報機器 |
WO2007114372A1 (ja) * | 2006-03-31 | 2007-10-11 | Pioneer Corporation | 光ピックアップ及び情報機器 |
JP4695688B2 (ja) * | 2006-03-31 | 2011-06-08 | パイオニア株式会社 | 光ピックアップ及び情報機器 |
WO2008023652A1 (en) * | 2006-08-22 | 2008-02-28 | Ricoh Company, Ltd. | Optical system, optical pickup apparatus, and optical disk apparatus for extracting signal beams |
JP2008305442A (ja) * | 2006-08-22 | 2008-12-18 | Ricoh Co Ltd | 抽出光学系、光ピックアップ及び光ディスク装置 |
US8064316B2 (en) | 2006-08-22 | 2011-11-22 | Ricoh Company, Ltd. | Optical system, optical pickup apparatus, and optical disc apparatus for extracting signal beams |
JP4434300B1 (ja) * | 2008-10-24 | 2010-03-17 | Tdk株式会社 | 光ヘッド装置及び光記録再生システム |
JP2010102796A (ja) * | 2008-10-24 | 2010-05-06 | Tdk Corp | 光ヘッド装置及び光記録再生システム |
Also Published As
Publication number | Publication date |
---|---|
US20080316898A1 (en) | 2008-12-25 |
US7764589B2 (en) | 2010-07-27 |
JP4850703B2 (ja) | 2012-01-11 |
CN1906678A (zh) | 2007-01-31 |
JPWO2005104111A1 (ja) | 2008-03-13 |
CN100452199C (zh) | 2009-01-14 |
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