WO2005082998A1 - 含フッ素エラストマー組成物 - Google Patents
含フッ素エラストマー組成物 Download PDFInfo
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- WO2005082998A1 WO2005082998A1 PCT/JP2005/001342 JP2005001342W WO2005082998A1 WO 2005082998 A1 WO2005082998 A1 WO 2005082998A1 JP 2005001342 W JP2005001342 W JP 2005001342W WO 2005082998 A1 WO2005082998 A1 WO 2005082998A1
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- fluorine
- crosslinking
- elastomeric
- plasma
- containing elastomer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/005—Reinforced macromolecular compounds with nanosized materials, e.g. nanoparticles, nanofibres, nanotubes, nanowires, nanorods or nanolayered materials
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
- C08K3/045—Fullerenes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/005—Additives being defined by their particle size in general
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/011—Nanostructured additives
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
Definitions
- the present invention relates to a crosslinkable fluorine-containing elastomer and a fluorine-containing elastomer composition having a carbon allotrope having an average primary particle size of 0.1 ⁇ m or less (excluding amorphous carbon).
- Fluorine-containing elastomers especially perfluoroelastomers mainly composed of tetrafluoroethylene (TFE) units, exhibit excellent chemical resistance, solvent resistance, and heat resistance, and are therefore used in harsh environments. It is widely used.
- TFE tetrafluoroethylene
- Plasma equipment is used in the etching, ashing, and chemical vapor deposition (CVD) processes of semiconductor manufacturing processes.
- elastomeric sealing materials are used for sealing at various connecting and moving parts. These sealing materials, the size of the sealing property alone is miniaturization and substrate wafer Nag, high density (10 12 - 10 1 3 / cm 3) can withstand the harsh plasma treatment conditions of, and very precise processing Is required not to contaminate the required semiconductor. In such etching and ashing processes, high-density O plasma and CF plasma processes are implemented.
- the sealing material includes NF plasma treatment, O plasma treatment and
- alumina and imide-based fillers as stable and stable fillers (see, for example, WO00Z64980 pamphlet and WO01Z32782 pamphlet).
- Alumina is both for O plasma and CF plasma.
- the present invention relates to an NF plasma treatment, an O plasma treatment, and a semiconductor manufacturing process.
- the carbon allotrope having an average primary particle size of 0.1 ⁇ m or less is preferably diamond.
- Fluorine-containing elastomer is preferable Perfluoroelastomer.
- a fluorine-containing elastomer composition for semiconductor manufacturing equipment is preferred.
- the present invention relates to a molded product or a sealing material comprising the fluorine-containing elastomer composition.
- the present invention relates to a filler for a sealing material of a semiconductor manufacturing apparatus having a carbon allotrope (excluding amorphous carbon) having an average primary particle size of 0.1 ⁇ m or less.
- the fluorine-containing elastomer composition of the present invention comprises a fluorine-containing elastomer and an average primary particle. It consists of a carbon allotrope having a diameter of 0.1 ⁇ m or less, and the carbon allotrope excludes amorphous carbon.
- the carbon allotrope used in the present invention is preferably amorphous carbon, diamond-like carbon, carbon black or the like having crystallinity from the viewpoint of plasma resistance. Not included.
- Examples of the carbon allotrope used in the present invention include carbons such as diamond, graphite, fullerene, carbon nanotube, and calvin. Among these, diamond is preferable from the viewpoint of strength of binding force and high stability.
- the electronic states of these carbon allotropes form various hybrid levels (sp, sp2, sp3).
- Diamond is a three-dimensional structure of sp3 hybrid orbitals
- Graphite is a two-dimensional crystal structure of sp2 hybrid orbitals
- Calvin is a one-dimensional structure of sp hybrid orbitals.
- All fullerenes are sp2 hybrid orbital molecules like graphite, but are three-dimensional molecules.
- the structure of the carbon allotrope used in the present invention is preferably a two-dimensional structure or a three-dimensional structure, and more preferably a three-dimensional structure, from the viewpoint of plasma resistance.
- Nanodiamond fine powder manufactured by BEIJING G RISH HITECH CO., LTD.
- the nano diamond has a spherical shape with an average primary particle diameter of 0.004 to 0.008 m and a specific surface area of 390 to 420 m 2 Zg.
- the elemental composition is C (> 90%), 0 (4-6%), N (l-2%), H ( ⁇ 1%).
- the average primary particle size of the carbon allotrope used in the present invention is 0.1 m or less, preferably 0.05 ⁇ m or less, more preferably 0.01 ⁇ m or less. .
- the lower limit value of the average primary particle diameter is not particularly limited, but is preferably 0.001 m or more. If the average primary particle size is larger than 0 .: L m, the particles become a problem particle in the semiconductor manufacturing process, and the yield of the semiconductor tends to decrease. Tend to get worse.
- primary particles refer to particles in a state that cannot be separated any more
- secondary particles refer to particles in which primary particles are aggregated.
- the secondary particles are easily crushed at the time of preparing the composition. If the particle or secondary particle diameter is 0.1 l / zm or less, the secondary particles can be used as they are. However, when the composition is so strong that it cannot be easily crushed and the secondary particle diameter is larger than 0.1 m, the carbon allotrope has an average primary particle diameter of 0.1 m or less. However, it is necessary to grind so that the secondary particle size is 0 .: m or less by grinding.
- a jet mill dry pulverization
- a dispersion medium such as water or an organic solvent
- pressure is applied to the bead mill or liquid, which is jetted from a nozzle and collides against each other (Wet pulverization).
- the shape of the carbon allotrope is not particularly limited, but is preferably granular from the viewpoint of processing and handling properties.
- the carbon allotrope (excluding amorphous carbon) having an average primary particle size of 0.1 m or less used in the present invention can be suitably used as a sealing material filler for semiconductor manufacturing equipment.
- the fluorine-containing elastomer composition of the present invention includes, as a filler, an inorganic metal compound filler and Z or an organic polymer compound filler in addition to the carbon allotrope having an average primary particle size of 0.1 m or less. It can be included.
- Examples of the inorganic metal compound filler include metal oxides such as silica and glass, titanium oxide, and aluminum oxide; metals such as barium sulfate, calcium sulfate, and aluminum sulfate. Examples thereof include sulfates; metal carbonates such as calcium carbonate; metal carbides such as silicon carbide; metal nitrides such as silicon nitride and aluminum nitride.
- organic polymer compound fillers include imide-based fillers having an imide structure such as polyimide, polyamideimide, and polyetherimide; polyarylate, polysulfone, polyethersulfone, polyphenylene sulfide, polyetheretherketone, polyether Examples include organic fillers made of engineering plastics such as oxybenzoate.
- the fluorine-containing elastomer that can be suitably used in the present invention is not particularly limited as long as it is conventionally used for a sealing material, particularly for a sealing material of a semiconductor manufacturing apparatus.
- the fluorine-containing elastomer include fluororubber (a), thermoplastic fluororubber (b), and rubber compositions having these fluororubber strengths.
- fluororubber (a) examples include non-perfluorofluororubber ( a -1) and perfluorofluororubber ( a- 2).
- thermoplastic fluororubber (b) As the thermoplastic fluororubber (b),
- It consists of an elastomeric fluoropolymer chain segment and a non-elastomeric fluoropolymer chain segment.
- Elastomeric one fluorine-containing polymer chain segment and 90 mol 0/0 or more respective constituent units of non-elastomeric one fluorine-containing polymer chain segment is a par Haroo reflex in the fluorine-containing multi-segmented polymer (b-1),
- Non-perfluorofluorororubber ( a -1) includes bi-lidene fluoride (VdF) fluororubber, tetrafluoroethylene (TFE) Z propylene fluororubber, tetrafluoroethylene (TFE ) Z-propylene Z-vinylidene fluoride (VdF) fluororubber, ethylene / hexafluoroethylene (HFP) fluororubber, ethylene Z-hexafluoropropylene (HFP) Z vinylidene fluoride ( VdF) fluorine rubber, ethylene Z hexafluoropropylene (HFP) Z tetrafluoroethylene (TFE) fluorine rubber, fluorosilicone fluorine rubber, or fluorophosphazene fluorine rubber You can give them each They can be used alone or in any combination within a range without impairing the effects of the present invention.
- bi - The isopropylidene fluoride-based fluororubber, bi - and isopropylidene fluoride 45- 85 mole 0/0, bi - isopropylidene fluoride and copolymerizable least one other monomer 55- 15
- it refers to a fluorine-containing copolymer comprising 50-80 mol% of bi-lidene fluoride and 50-20 mol% of at least one other monomer copolymerizable with bi-lidene fluoride.
- the at least one other monomer copolymerizable with bi-lidene fluoride includes, for example, tetrafluoroethylene (TFE), black trifluoroethylene (CTFE), trifluoroethylene, Contains xafluoropropylene (HFP), trifluoropropylene, tetrafluoropropylene, pentafluoropropylene, trifluorobutene, tetrafluoroisobutene, perfluoro (alkyl butyl ether) (PAVE), fluorinated butyl, etc.
- Non-fluorine monomers such as fluorine monomer, ethylene, propylene, and alkyl butyl ether are listed. These can be used alone or in any combination. Of these, tetrafluoroethylene, hexafluoropropylene, and perfluoro (alkyl butyl ether) are preferred! /.
- Specific rubbers include VdF-HFP rubber, VdF-HFP-TFE rubber, VdF-CTF E rubber, VdF-CTFE-TFE rubber, and the like.
- Examples of the monomer that gives a crosslinking site include perfluoro (6, 6-dihydro-6-iodo 3-o-io) described in JP-B-5-63482 and JP-A-7-316234.
- Iodine-containing monomers such as hexer-1 hexene) and perphnoreo mouth (5-iodo-3 oxar 1 pentene), bromine-containing monomers described in JP-A-4-505341, JP-A-4-505345
- JP-A-5-500070 such as a cyano group-containing monomer, a carboxyl group-containing monomer, and an alkoxycarbonyl group-containing monomer. I can get lost.
- non-perfluorofluorororubbers (a-1) can be produced by a conventional method.
- the perfluoro fluororubber ( a -2) includes tetrafluoroethylene Z perfluoro (alkyl vinyl ether) z monomers having a cross-linking site.
- the monomer that gives the crosslinking site is preferably 0-5 mol%, based on the total amount of tetrafluoroethylene and perfluoro (alkyl butyl ether), 0-2 mol%. Is more preferable.
- the composition is out of the range, the properties as a rubber elastic body are lost, and the properties tend to be close to those of greaves.
- perfluoro alkyl butyl ether
- perfluoro mouth methyl butyl ether
- perfluoro propyl butyl ether
- Examples of monomers that give a crosslinking site include bi-lidene fluoride, general formula (1):
- R 1 is a fluoroalkylene group, perfluoroalkyle f
- R 1 is H or CH
- X 2 represents an iodine or bromine-containing monomer represented by general formula (2):
- n is an integer of 1 to 3
- X 3 is a cyano group, a carboxyl group, an alkoxycarbonyl group, or a bromine atom.
- the elastomeric fluorine-containing polymer chain segment imparts flexibility to the polymer and has a glass transition point of 25 ° C or lower, preferably 0 ° C or lower.
- perfluoroolefin constituting 90 mol% or more of the structural unit include tetrafluoroethylene, black trifluoroethylene, hexafluoropropylene, general formula (3):
- Examples of structural units other than perhaloolefin which constitute the elastomeric fluorine-containing polymer chain segment include, for example, vinylidene fluoride, trifluoroethylene, trifluoropropylene, tetrafluoropropylene, and pentafluoroolefin.
- fluorine-containing monomers such as propylene, trifnoleolobutene, tetrafluoroisobutene, and fluorinated butyl
- non-fluorine monomers such as ethylene, propylene, and alkyl butyl ether! ,.
- elastomeric fluorine-containing polymer chain segment include an elastomeric polymer chain made of a monomer that provides a tetrafluoroethylene Z perfluoro (alkyl butyl ether) Z crosslinking site.
- the composition of tetrafluoroethylene z perfluoro (alkyl butyl ether) is 50-85Z50-15 mol%, and the monomers that give the crosslinking sites are tetrafluoroethylene and perfluoro (alkyl butyl ether).
- the content is preferably 0-5 mol% based on the total amount.
- Examples of the monomer that gives a crosslinking site include monomers represented by general formula (1) and general formula (2), and these may be used alone or in any combination. It can be used together.
- Non-era The path one Haroorefuin constituting 90 mole 0/0 or more Sutoma fluorine-containing polymer chain segment structural units, for example, tetrafurfuryl O b ethylene, black hole triflumizole Ruo Roe Chile down, Pafuruoro (alkyl Bulle ether), to hexa Fluoropropylene, general formula (4)
- r is an integer of 1 to 10
- X 4 is a fluorine atom or a chlorine atom
- perhaloolefins such as perfluoro-2-butene
- the structural unit other than perhaloolefin which constitutes the non-elastomeric fluoropolymer chain segment is the same as the structural unit other than perhaloolefin which constitutes the elastomeric fluoropolymer chain segment. can give.
- non-elastomeric fluorine-containing polymer chain segments include tetrafluoroethylene 85-100 mol%, and general formula (5):
- R 3 is R 4 or —OR 4
- R 4 is a perfluoroalkyl group having 1 to 5 carbon atoms ffff
- the non-elastomeric polymer chain consisting of 0 to 15 mol% of the compound represented by
- the fluorine-containing multi-segmented polymer (b-l) is composed of an elastomeric fluorine-containing polymer chain segment 50-95% by weight and a non-elastomeric fluorine-containing polymer chain segment 5-
- the elastomeric fluorine-containing polymer chain segment in this case may be the same as described for the fluorine-containing multi-segmented polymer (b-l).
- the structural unit of the non-elastomeric fluorine-containing polymer chain segment includes bi-lidene fluoride, fluorinated buluyl, trifluoroethylene, and general formula (6):
- X 5 is a hydrogen atom or a fluorine atom, s is an integer of 1 to 10
- monomers such as ethylene, propylene, vinyl chloride, butyl ether, carboxylic acid vinyl ester, and acrylic acid that can be copolymerized with these monomers are also used as copolymerization components. It is possible to be.
- the fluorine-containing multi-segment polymer (b-2) may be composed of one fluoropolymer Kusarise segment 50 to 95 weight 0/0 and a non-elastomeric one fluorine-containing polymer chain segment 5- 50 wt% elastomer Preferred.
- the elastomeric fluorine-containing polymer chain segment in the fluorine-containing multi-segment polymer (b-3) is a polymer chain having a glass transition point of 25 ° C or lower, preferably 0 ° C or lower.
- elastomeric one fluorine-containing polymer chain segment comprises 90 mole 0/0 less than par Haroo reflex in the structural unit.
- the structural unit other than perhaloolefin in this case include the same structural units as those of the fluorine-containing multi-segmented polymer (bl) other than perhaloolefin.
- the non-elastomeric fluorine-containing polymer single-chain segment in the fluorine-containing multi-segmented polymer (b-3) is a non-elastomer in the fluorine-containing multi-segmented polymer (b-1) or (b-2) described above. It may be the same as the monofluoropolymer chain segment. In particular, it may be the same as the non-elastomeric fluoropolymer chain segment in (b-2).
- the fluorine-containing multi-segment polymer (b-3) is an elastomeric one fluorine-containing polymer chain segment 40- 95 weight 0/0 and a non-elastomeric one fluorine-containing polymer chain segment 5-
- thermoplastic fluororubber (b) is a fluorine-containing multi-segment polymer in which an elastomeric fluorine-containing polymer chain segment and a non-elastomeric fluorine-containing polymer chain segment are bonded in the form of a block graft in one molecule. It is important that
- the crystal melting point of the non-elastomeric fluoropolymer chain segment of the obtained thermoplastic fluororubber (b) is preferably 150 ° C or higher from the viewpoint of heat resistance. More preferred to be ° C! /.
- thermoplastic fluororubber (b) various types of well-known fluoropolymers can be obtained by connecting the elastomeric segment and the non-elastomeric segment in the form of a block graft to form a fluorine-containing multi-segmented polymer.
- the method for producing block-type fluorine-containing multi-segmented polymers disclosed in Japanese Patent Publication No. 58-4728 and other publications the method for producing block-type fluorine-containing multi-segmented polymers disclosed in Japanese Patent Publication No. 58-4728 and other publications.
- the production method of a graft-type fluorine-containing multi-segmented polymer disclosed in Japanese Patent Application Publication No. 2-334324 can be preferably used.
- the above elastomeric fluoropolymer and non-elastomericity can be obtained by combining an elastomeric segment and a non-elastomeric segment with a block or a draft to form a multi-segmented polymer.
- Heat resistance and mechanical properties are improved compared to those obtained by simply mixing a fluoropolymer.
- a known iodine transfer polymerization method can be given as a method for producing a fluorororubber.
- the perhaloolefin and, if necessary, a monomer that provides a curing site are stirred under pressure in an aqueous medium in the presence of an iodine compound, preferably a diiodine compound, substantially in the absence of oxygen.
- an iodine compound preferably a diiodine compound, substantially in the absence of oxygen.
- a method of carrying out emulsion polymerization in the presence of a radical initiator can be mentioned.
- the diiodine compound to be used for example,
- R 2 is a saturated or unsaturated fluorohydrocarbon group having 1 to 16 carbon atoms. Alternatively, it is a cyclofluorocarbon group or a hydrocarbon group having 1 to 13 carbon atoms, which contains an oxygen atom, and is obtained by the presence of a compound represented by The iodine or bromine introduced in this way functions as a crosslinking point.
- Examples of the compound represented by the formula (7) include 1,3-Jodoperfluoropropane, 1,3-Jodo 2-clo-perfluoropropane, 1,4-Jodoperfluoro.
- the fluororubber total weight preferably to be 0.5 0001- 5 weight 0/0 device arbitrary preferred that even if a fluorine-containing elastomer one force thermoplastic fluorine rubber (b) is also 0.5 0001- 5 weight 0/0.
- the radical polymerization initiator used in the present invention may be the same as that conventionally used for the polymerization of a fluorine-containing elastomer.
- These initiators include organic and inorganic peroxides and azo compounds.
- Typical initiators include persulfates, peroxidative power carbonates, peroxyesters, and the like.
- Preferred initiators include ammonium persulfate (APS). APS can be used alone or in combination with a reducing agent such as sulfite or sulfite.
- the polymerization pressure can be varied within a wide range. In general, it is in the range of 0.5-5 MPa. The higher the polymerization pressure, the higher the polymerization rate. Therefore, from the viewpoint of improving productivity, the polymerization pressure is preferably 0.8 MPa or more.
- the number average molecular weight is flexible to the entire fluorine-containing multi-segment polymer obtained.
- a force S of 5,000 to 750,000 is preferable, and a force S of 20,000 to 400,000 is preferable.
- the terminal portion of the elastomeric segment thus obtained is a perhalo type, and has an iodine atom that serves as a starting point for block copolymerization of the non-elastomeric segment.
- block copolymerization of the non-elastomeric fluorinated polymer chain segment to the elastomeric fluorinated polymer chain segment is carried out following the emulsion polymerization of the elastomeric fluorinated polymer chain segment. This can be done by changing to a non-elastomeric fluoropolymer chain segment.
- the number average molecular weight of the resulting non-elastomeric segment is from 1,000 to 1,200,000 forces, preferably from ⁇ 3,000 to 600,000.
- thermoplastic fluororubber (b) is a polymer molecule in which non-elastomeric fluoropolymer chain segments are bonded to both sides of an elastomeric fluoropolymer chain segment, and an elastomeric fluoropolymer chain.
- Non-elastomeric fluorine-containing polymer chain segments are bonded to one side of the segment, and polymer molecules containing only elastomeric segments, such as non-elastomeric segments, are It is not more than 20% by weight, preferably not more than 10% by weight, based on the total amount of segments and polymer molecules in the multi-element segmented polymer.
- a composition comprising the fluororubber (a) and the thermoplastic fluororubber (b) as described above can also be used.
- the first fluororubber composition comprising the non-perfluorofluorororubber ( a -1) and the fluorine-containing multi-segment polymer (bl) is a non-perfluorofluorocarbon rubber obtained as described above.
- (a-1) and the fluorine-containing multi-segmented polymer (b-1) can be obtained by mixing in an arbitrary ratio by mixing in a dispenser state or by dry blending with an open roll or the like.
- an additive such as an internal mold release agent can be appropriately blended within a range not impairing the effects of the present invention.
- a crosslinking agent can also be blended according to the type of crosslinking method described later.
- a second fluororubber composition comprising a non-perfluorofluorororubber ( a -1) and a fluorine-containing multi-segment polymer (b-2), perfluorinated rubber (a-2) and a fluorine-containing multisegment
- a third fluororubber composition comprising a fluorinated polymer (b-3), a fourth fluororubber composition comprising a perfluorofluororubber ( a -2) and a fluorinated multi-segmented polymer (b-2)
- the fifth fluororubber composition that is effective with the perfluorofluororubber ( a -2) and the fluorine-containing multi-segmented polymer (b-1) is obtained in the same manner as the first fluororubber composition. It is done.
- the additives described above can be appropriately blended within a range without impairing the effects of the present invention, and a crosslinking agent can also be blended depending on the type of crosslinking method described later.
- the fifth fluororubber composition In order to crosslink, at least one rubber must be cross-linked by introducing a cross-linking site that enables peroxide cross-linking.
- a fluorororubber in which an iodine atom or a bromine atom is introduced at the end of the polymer is preferable as the fluororubber into which a crosslinking site is introduced.
- This fluororubber can be produced by the iodine transfer polymerization method.
- the amount of the compound represented by the general formula (7) may be 0.0001 to 5% by weight of the total weight of the obtained fluororubber, and 0.01 to 1% by weight. Preferably there is.
- a small amount of a monomer that gives a crosslinking site is copolymerized. There is a way to do it.
- the monomer that gives a crosslinking site include the same monomers as described above.
- fluorine-containing silicone elastomer can also be used, and examples thereof include fluorosilicone rubber.
- the fluorine-containing elastomer it is preferable to use a perfluoroelastomer having a heat resistant point as the fluorine-containing elastomer.
- the per full O b elastomeric one among the constitutional units, it refers to the 90 mole 0/0 or consisting par full O b monomer.
- the amount of carbon allotrope having an average primary particle size of 0.1 ⁇ m or less is preferably 1 to 50 weights per 100 parts by weight of the fluorine-containing elastomer. Parts, more preferably 3-20 parts by weight. Average primary particle size 0 .: Lm or less of carbon allotrope compounding power Fluorine-containing elastomer If less than 1 part by weight with respect to 100 parts by weight, almost no effect as a filler can be expected, exceeding 50 parts by weight When the fluorine-containing elastomer composition of the present invention is used as a sealing material, it is not preferable.
- the fluorine-containing elastomer composition of the present invention can be blended with a crosslinking agent, if necessary.
- the crosslinking agent to be blended in the fluorine-containing elastomer composition of the present invention may be appropriately selected depending on the type of the crosslinkable group (cure site) of the fluorine-containing elastomer.
- the crosslinkable basic iodine atom of the fluorine-containing elastomer is preferred, the peroxide crosslinking system is preferred.
- the crosslinkable group of the fluorine-containing elastomer is -tolyl, the triazine crosslinking system,
- the crosslinkable group of the fluorine-containing elastomer in which the oxazole crosslinking system, the imidazole crosslinking system, and the thiazole crosslinking system are preferable is a carboxyl or alkoxycarbol, the oxazole crosslinking system, the imidazole crosslinking system, and the thiazole crosslinking system are preferable.
- the fluorine-containing elastomer When the fluorine-containing elastomer does not have a crosslinkable group, it is preferably carried out by radiation crosslinking. Furthermore, in the case of a vinylidene-based fluorine-containing elastomer, a polyol crosslinking system and a polyamine crosslinking system can also be preferably used.
- the crosslinking agent used for peroxide crosslinking may be an organic peroxide compound that can easily generate a peroxide radical in the presence of heat or a redox system.
- organic peroxide compound that can easily generate a peroxide radical in the presence of heat or a redox system.
- dialkyl type preferred is a dialkyl type.
- 2,5-dimethyl-2,5-di (t-butylperoxy) hexane is particularly preferred.
- the type and amount of organic peroxide are selected in consideration of the amount of active O—O—, decomposition temperature, and the like.
- any compound having a reactive activity with respect to peroxy radicals and polymer radicals can be used.
- CH any compound having a reactive activity with respect to peroxy radicals and polymer radicals.
- triallyl cyanurate triallyl isocyanurate (TAI C)
- TAI C triallyl isocyanurate
- triacryl formal, triallyl trimellitate N, N '— n phthalene bismaleimide, dipropargyl terephthalate, dia Ryl phthalate, tetraallyl terephthalate amide, triallyl phosphate, bismaleimide, fluorinated triallyl isocyanurate (1, 3, 5-tris (2, 3, 3-trifluoro-2 probe) — 1, 3,5-triazine-2,4,6-trione), tris (diallylamine) -S-triazine, triallyl phosphite, N, N-diallylacrylamide 1,6 dibidodecafluor hexane.
- crosslinking agent used for polyol crosslinking examples include polyhydric alcohol compounds such as bisphenol A and bisphenol AF.
- Crosslinkers used for polyamine crosslinking include polyvalent compounds such as hexamethylenediamine amine rubamate, N, N, -dicinnamylidene 1,6 xanthamine, 4,4'bis (aminocyclohexyl) methancarbamate. Examples include amine compounds.
- crosslinking agent used for triazine crosslinking examples include organic tin compounds such as tetraphenyltin and triphenyltin.
- crosslinking agent used in the oxazole crosslinking system, imidazole crosslinking system, and thiazole crosslinking system examples include, for example, the general formula (8):
- R 4 and R 5 is NH
- NHR 6 NH OH or — SH The other is NHR 6 NH OH or — SH, and R 6 is a hydrogen atom, a fluorine atom or
- Monovalent organic group preferably R 4 is —NH and R 5 is —NHR 6 ).
- Suaminomino-crosslinking agent bisaminophenol crosslinking agent, bisaminothiophene crosslinking agent, general formula (9):
- a compound having a plurality of 3 amino-4-hydroxyphenol groups or 3 amino-4 mercaptophenyl groups or a compound represented by the general formula (12):
- R 5 is the same as the above), specifically, for example, 2, 2 bis (3 amino-4-hydroxyphenol) hexafluoropropane (generic name: bis (aminophenol)) AF), 2,2 bis (3 amino-4 mercaptophenol) hexafluoropropane, tetraaminobenzene, bis 3,4-diaminophenyl methane, bis 3,4-diaminophenyl ether, 2, 2 bis ( 3,4-diaminophenol) hexafluoropropane, 2,2-bis [3 amino-4- (N-phenolamino) hexafluoropropane, and the like.
- the amount of the crosslinking agent is usually 0.05 to 10 parts by weight, preferably 115 parts by weight, per 100 parts by weight of the fluorine-containing elastomer.
- the amount is less than 0.05 parts by weight, the fluorine-containing elastomer tends to be not sufficiently crosslinked, and when it exceeds 10 parts by weight, the physical properties of the crosslinked product tend to be deteriorated.
- a crosslinking aid When a crosslinking aid is used, its amount is usually 0.1-10 parts by weight, preferably 0.5-5 parts by weight, per 100 parts by weight of the fluorine-containing elastomer.
- the content of the crosslinking aid is less than 0.1 parts by weight, the fluorine-containing elastomer tends to be not sufficiently crosslinked, and when it exceeds 10 parts by weight, the elongation of the crosslinked product tends to decrease.
- the same compound as the crosslinking aid used in the peroxide crosslinking may be blended as a radiation crosslinking compounding agent.
- 0.1 to 10 parts by weight is preferred per 100 parts by weight of polymer, and 0.3 to 5 parts by weight is particularly preferred.
- a fluorine-containing elastomer composition containing a fluorine-containing elastomer and a carbon allotrope is molded into a desired shape, and then has high energy sufficient to penetrate into the molded product. Irradiate with ionizing radiation such as X-ray, ⁇ -ray, j8-ray, ⁇ -ray, electron beam, proton beam, deuteron beam, ultraviolet ray.
- ionizing radiation such as X-ray, ⁇ -ray, j8-ray, ⁇ -ray, electron beam, proton beam, deuteron beam, ultraviolet ray.
- the irradiation atmosphere in this case may be in the presence of air, nitrogen, argon, or helium, or in a vacuum, but from the viewpoint of preventing oxidation deterioration of the surface of the molded article, it is oxygen-free, particularly nitrogen that is an inert gas, The presence of argon or helium is preferred. Furthermore, it is particularly preferred to be under vacuum.
- an organic pigment can be mixed with the fluorine-containing elastomer composition of the present invention, if necessary.
- organic pigments isoindolinone-based, quinacridone-based, diketopyrrolopyrrole-based, and anthraquinone-based pigments are preferable because they are excellent in heat resistance and chemical resistance and have little influence on the properties of the molded product.
- organic pigments isoindolinone-based, quinacridone-based, diketopyrrolopyrrole-based, and anthraquinone-based pigments are preferable because they are excellent in heat resistance and chemical resistance and have little influence on the properties of the molded product.
- the present invention can be achieved by adding them to the fluorine-containing elastomer composition.
- This fluorine-containing elastomer composition can give a molded product in which weight loss due to decomposition is small and particles are not generated.
- the addition amount of the organic pigment is not particularly limited, and may be added to the extent that the effects of the present invention are not impaired.
- the fluorine-containing elastomer composition of the present invention includes a fluorine-containing elastomer and a carbon allotrope, and, if necessary, each of the above components such as an inorganic metal compound filler and Z or an organic polymer compound filler, a crosslinking agent, etc.
- the fluorine-containing elastomer composition of the present invention is useful as a molding material for various molded articles or as a coating material for various elastomeric molded articles.
- the fluorine-containing elastomer composition of the present invention is used for molded products for plasma processing in semiconductor manufacturing processes.
- a method of obtaining a preform using the fluorine-containing elastomer composition of the present invention is a method of heat-compressing in a normal mold, a method of press-fitting into a heated mold, an extruder Can be carried out by a known method such as an extrusion method.
- extruded products such as hoses and electric wires
- the shape can be maintained after extrusion, so that a preform that has been extruded without using a crosslinking agent can be used as it is.
- it is a mold product such as an O-ring and it is difficult to maintain the shape after release in an uncrosslinked state, use a pre-crosslinked preform with a crosslinking agent. Implementation is possible.
- oxazole crosslinking is performed using a crosslinking agent such as bisaminophenol, it can be performed under the usual crosslinking conditions of a fluorine-containing elastomer. For example, by placing in a mold and holding under pressure at 120-250 ° C for 1 to 60 minutes to perform press crosslinking, followed by holding in a 120-320 ° C furnace for 0-48 hours Oven cross-linking By performing the step, a crosslinked product can be obtained. Further, bis (aminophenol) AF or the like may be added to a known elastomer crosslinking method, for example, polyamine crosslinking, polyol crosslinking, or peroxide crosslinking, and the crosslinking may be performed in combination.
- a crosslinking agent such as bisaminophenol
- X-rays, ⁇ rays, j8 rays, X-rays, electron beams, proton beams, deuteron beams, ultraviolet rays, etc. are used as the crosslinking source.
- the irradiation dose may be 0.1-50 Mrad.
- the irradiation temperature may be 20-100 ° C.
- the irradiation atmosphere may be in the presence of air, nitrogen, argon, helium or in vacuum, but from the viewpoint of preventing oxidative degradation of the surface of the molded product, it is oxygen-free, especially nitrogen, argon, which are inert gases, It is preferable to be in the presence of helium, and it is particularly preferable to be in a vacuum.
- the fluorine-containing elastomer is also a silicone-based elastomer having a high heat resistance. Etc. are preferably used.
- the molded product and the coated molded product of the present invention are useful as various molded products in various fields. Among them, in particular, specifically, they can be used by being incorporated in the following semiconductor manufacturing apparatus.
- Plasma etching equipment Reactive ion etching equipment Reactive ion beam etching equipment Sputter etching equipment
- Soxhlet extraction cleaning equipment High temperature high pressure extraction cleaning equipment Microwave extraction cleaning equipment Supercritical extraction cleaning equipment
- the molded product of the present invention is particularly suitable for NF plasma treatment, O plasma treatment, and fluorine plasma treatment.
- Excellent performance as a sealing material for equipment that performs plasma processing such as chemical processing, such as CVD equipment, plasma etching equipment, reactive ion etching equipment, ashing equipment, or excimer laser exposure equipment.
- plasma processing such as chemical processing, such as CVD equipment, plasma etching equipment, reactive ion etching equipment, ashing equipment, or excimer laser exposure equipment.
- Fluorine-containing elastomer perfluoroelastomer containing iodine as a cross-linking group (Daikin Perfume GA-105, manufactured by Daikin Industries, Ltd.)) 2 parts by weight of triallyl isocyanurate (TAIC), 2,5-Dimethyl-2,5-Di (t-butylperoxy) hexane (Nippon Yushi Co., Ltd., Perhexa 2.5B) 1 part by weight, Nanodiamond (BEIJING GRISH HITECH CO., LTD., Average 1 Next particle size 4 to 8 nm, specific surface area 390-42 OmVg) 15 parts by weight were mixed and kneaded with an open roll to prepare a crosslinkable fluorine-containing elastomer composition.
- TAIC triallyl isocyanurate
- 2,5-Dimethyl-2,5-Di (t-butylperoxy) hexane Nippon Yushi Co., Ltd., Per
- This fluorine-containing elastomer composition was subjected to crosslinking by pressing at 160 ° C for 7 minutes, and further subjected to oven crosslinking in an oven at 180 ° C for 4 hours to obtain an O-ring (P-24) and A test sample of a sheet (120 mm ⁇ 150 mm ⁇ 2 mm thickness) was prepared. The vulcanizability of this composition and the weight loss upon plasma irradiation of the test sample were measured by the following methods. The results are shown in Table 1.
- TIC Triallyl isocyanurate
- Kneading method Roll kneading
- the resulting molded article was subjected to plasma irradiation treatment under the following conditions, and the weight before and after irradiation was measured to examine the change in weight.
- SiO etching rate NF ZAr 500SSCM, pressure 5 Torr, temperature 100 ° C
- the etching rate of SiO is 1590
- Plasma irradiation equipment used ICP high density plasma equipment (Samco International)
- Example 2 The same procedure as in Example 1 was performed except that the nanodiamond was changed to fullerene (C60: average primary particle diameter (molecular diameter) of about 0.001 and average secondary particle diameter of about 50 nm (0.05 m)).
- C60 average primary particle diameter (molecular diameter) of about 0.001 and average secondary particle diameter of about 50 nm (0.05 m)).
- Example 1 The same procedure as in Example 1 was performed except that the nanodiamond was changed to carbon black (N-990 manufactured by Cancarb).
- the test sample was measured for vulcanizability, normal test, and weight loss upon plasma irradiation by the following method. The results are shown in Table 1.
- Example 1 The same operation as in Example 1 was performed except that nanodiamond was changed to 0-alumina (AKP-G008, manufactured by Sumitomo Chemical Co., Ltd.) having a primary particle size of 0.015 m.
- the test sample was measured for vulcanizability, normal test, and weight loss during plasma irradiation by the following method. The results are shown in Table 1.
- composition containing carbon black as a filler (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma, and also a composition containing ⁇ alumina (Comparative Example 1) was irradiated with O plasma and CF plasma,
- a carbon allotrope having an average primary particle size of 0.1 ⁇ m or less in a fluorine-containing elastomer.
- NF PLAZ used in the semiconductor manufacturing process by blending (excluding amorphous carbon)
- a change in the amount can be reduced, and the plasma resistance can be remarkably improved.
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Abstract
Description
Claims
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US10/585,067 US20090023852A1 (en) | 2004-02-26 | 2005-01-31 | Fluorine-containing elastomer composition |
EP05709505A EP1719801A4 (en) | 2004-02-26 | 2005-01-31 | FLUOR ELASTOMER COMPOSITION |
JP2006510382A JP4600393B2 (ja) | 2004-02-26 | 2005-01-31 | 含フッ素エラストマー組成物 |
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JP2004-051767 | 2004-02-26 | ||
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WO2005082998A1 true WO2005082998A1 (ja) | 2005-09-09 |
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US (1) | US20090023852A1 (ja) |
EP (1) | EP1719801A4 (ja) |
JP (1) | JP4600393B2 (ja) |
KR (1) | KR100782663B1 (ja) |
TW (1) | TW200536882A (ja) |
WO (1) | WO2005082998A1 (ja) |
Cited By (9)
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JP2008001894A (ja) * | 2006-05-26 | 2008-01-10 | Daikin Ind Ltd | 耐プラズマ性に優れた含フッ素エラストマー組成物およびそれからなるシール材 |
JP2011080058A (ja) * | 2009-09-14 | 2011-04-21 | Ideal Star Inc | フッ化ビニリデンと、トリフルオロエチレン又はテトラフルオロチレンとの共重合体とフラーレンとの混合膜及びその製造方法 |
WO2014027620A1 (ja) * | 2012-08-15 | 2014-02-20 | ダイキン工業株式会社 | フッ素化ナノダイヤモンドを含むフッ素樹脂組成物 |
JP2016079358A (ja) * | 2014-10-22 | 2016-05-16 | 昭和電工株式会社 | 含フッ素エラストマー組成物、その成形品及び該成形品が組み込まれた装置 |
WO2016104604A1 (ja) * | 2014-12-26 | 2016-06-30 | 昭和電工株式会社 | 含フッ素エラストマー組成物、成形品、シール材及び装置 |
JP2017166065A (ja) * | 2016-03-03 | 2017-09-21 | ラム リサーチ コーポレーションLam Research Corporation | 高純度でsp3結合を含む化学気相成長(CVD)ダイヤモンドコーティングを有するエッジリングのようなプラズマ処理システム用構成部材 |
KR20200042920A (ko) * | 2017-10-18 | 2020-04-24 | 다이킨 고교 가부시키가이샤 | 가교성 엘라스토머 조성물 및 불소 고무 성형품 |
JP2020089864A (ja) * | 2018-12-07 | 2020-06-11 | 株式会社ダイセル | ナノダイヤモンドの製造方法及びナノダイヤモンド |
WO2023189547A1 (ja) * | 2022-03-31 | 2023-10-05 | ダイキン工業株式会社 | 組成物、架橋物およびシール材 |
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US20090038858A1 (en) * | 2007-08-06 | 2009-02-12 | Smith International, Inc. | Use of nanosized particulates and fibers in elastomer seals for improved performance metrics for roller cone bits |
US8192817B2 (en) * | 2009-05-06 | 2012-06-05 | Xerox Corporation | VITON fuser member containing fluorinated nano diamonds |
JP2011086920A (ja) * | 2009-10-14 | 2011-04-28 | Greene Tweed Of Delaware Inc | プラズマ耐性に優れた処理装置 |
KR20220054832A (ko) * | 2019-08-26 | 2022-05-03 | 그린, 트위드 테크놀로지스, 인코포레이티드 | 마이크로다이아몬드를 포함하는 불소 함유 엘라스토머 조성물 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004051937A (ja) * | 2002-05-31 | 2004-02-19 | Univ Nihon | 高分子複合材料及びその製造方法 |
JP2004124086A (ja) * | 2002-09-13 | 2004-04-22 | Osaka Gas Co Ltd | ナノスケールカーボンを含有する樹脂組成物、導電性ないし制電性樹脂成形体、導電性ないし制電性樹脂コーティング組成物及び帯電防止膜及びこれらの製造法 |
JP2004256592A (ja) * | 2003-02-24 | 2004-09-16 | Toshiba Corp | 複合粒子、複合部材、複合皮膜およびそれらの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4503171A (en) * | 1984-01-11 | 1985-03-05 | E. I. Du Pont De Nemours And Company | Graphite reinforced perfluoroelastomer |
US5482695A (en) * | 1991-07-03 | 1996-01-09 | Anatoly Mikhailovich Staver | Carbon composition production process |
US5444116A (en) * | 1993-07-14 | 1995-08-22 | Greene, Tweed & Co. | Perfluoroelastomeric compositions and seals having improved chemical resistance and methods of making the same |
EP1288263A4 (en) * | 2000-05-09 | 2003-07-02 | Daikin Ind Ltd | POLYMER COMPOSITION WITH INCORPORATED CLEAN FILLER |
US20030122318A1 (en) * | 2000-05-25 | 2003-07-03 | Tomihiko Yanagiguchi | Seal ring |
EP1414894B1 (en) * | 2001-08-06 | 2012-06-13 | Showa Denko K.K. | Conductive curable resin composition and separator for fuel cell |
JP4245310B2 (ja) * | 2001-08-30 | 2009-03-25 | 忠正 藤村 | 分散安定性に優れたダイヤモンド懸濁水性液、このダイヤモンドを含む金属膜及びその製造物 |
JP4005058B2 (ja) * | 2003-07-23 | 2007-11-07 | 日信工業株式会社 | 炭素繊維複合材料及びその製造方法、炭素繊維複合成形品及びその製造方法 |
JP2005088767A (ja) * | 2003-09-18 | 2005-04-07 | Fuiisa Kk | ワイパーブレード及びその製造方法並びにワイパー |
-
2005
- 2005-01-31 KR KR1020067019732A patent/KR100782663B1/ko active IP Right Grant
- 2005-01-31 US US10/585,067 patent/US20090023852A1/en not_active Abandoned
- 2005-01-31 WO PCT/JP2005/001342 patent/WO2005082998A1/ja active Application Filing
- 2005-01-31 JP JP2006510382A patent/JP4600393B2/ja not_active Expired - Fee Related
- 2005-01-31 EP EP05709505A patent/EP1719801A4/en not_active Withdrawn
- 2005-02-16 TW TW094104533A patent/TW200536882A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004051937A (ja) * | 2002-05-31 | 2004-02-19 | Univ Nihon | 高分子複合材料及びその製造方法 |
JP2004124086A (ja) * | 2002-09-13 | 2004-04-22 | Osaka Gas Co Ltd | ナノスケールカーボンを含有する樹脂組成物、導電性ないし制電性樹脂成形体、導電性ないし制電性樹脂コーティング組成物及び帯電防止膜及びこれらの製造法 |
JP2004256592A (ja) * | 2003-02-24 | 2004-09-16 | Toshiba Corp | 複合粒子、複合部材、複合皮膜およびそれらの製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1719801A4 * |
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JP2008001894A (ja) * | 2006-05-26 | 2008-01-10 | Daikin Ind Ltd | 耐プラズマ性に優れた含フッ素エラストマー組成物およびそれからなるシール材 |
JP2011080058A (ja) * | 2009-09-14 | 2011-04-21 | Ideal Star Inc | フッ化ビニリデンと、トリフルオロエチレン又はテトラフルオロチレンとの共重合体とフラーレンとの混合膜及びその製造方法 |
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WO2016104604A1 (ja) * | 2014-12-26 | 2016-06-30 | 昭和電工株式会社 | 含フッ素エラストマー組成物、成形品、シール材及び装置 |
JP2017166065A (ja) * | 2016-03-03 | 2017-09-21 | ラム リサーチ コーポレーションLam Research Corporation | 高純度でsp3結合を含む化学気相成長(CVD)ダイヤモンドコーティングを有するエッジリングのようなプラズマ処理システム用構成部材 |
CN113506719A (zh) * | 2016-03-03 | 2021-10-15 | 朗姆研究公司 | 包括具有高纯sp3键的cvd金刚石涂层的边缘环之类的部件 |
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KR20200042920A (ko) * | 2017-10-18 | 2020-04-24 | 다이킨 고교 가부시키가이샤 | 가교성 엘라스토머 조성물 및 불소 고무 성형품 |
KR102240635B1 (ko) * | 2017-10-18 | 2021-04-15 | 다이킨 고교 가부시키가이샤 | 가교성 엘라스토머 조성물 및 불소 고무 성형품 |
US11753523B2 (en) | 2017-10-18 | 2023-09-12 | Daikin Industries, Ltd. | Crosslinkable elastomer composition and fluororubber molded article |
JP2020089864A (ja) * | 2018-12-07 | 2020-06-11 | 株式会社ダイセル | ナノダイヤモンドの製造方法及びナノダイヤモンド |
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US20090023852A1 (en) | 2009-01-22 |
JP4600393B2 (ja) | 2010-12-15 |
KR20060114721A (ko) | 2006-11-07 |
EP1719801A4 (en) | 2008-09-24 |
EP1719801A1 (en) | 2006-11-08 |
JPWO2005082998A1 (ja) | 2007-11-15 |
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