JP2017166065A - 高純度でsp3結合を含む化学気相成長(CVD)ダイヤモンドコーティングを有するエッジリングのようなプラズマ処理システム用構成部材 - Google Patents
高純度でsp3結合を含む化学気相成長(CVD)ダイヤモンドコーティングを有するエッジリングのようなプラズマ処理システム用構成部材 Download PDFInfo
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Abstract
【解決手段】プラズマ処理システム用のペデスタル20は、基板支持面を有し、基板支持面の周縁の周りに、環状エッジリング80が配置される。環状リング80のプラズマ暴露面上に、化学気相成長(CVD)ダイヤモンドコーティング90が配される。CVDダイヤモンドコーティング90は、sp3結合を含み、sp3結合の純度は、90%よりも高い。
【選択図】図3
Description
本出願は、2016年3月3日に出願された米国仮特許出願第62/303,091号、および2016年3月21日に出願された米国仮特許出願第62/310,993号の利益を主張するものである。上記出願の全開示は、参照により本明細書に組み込まれる。
他の特徴では、ダイヤモンドコーティングにおけるsp3結合の純度は、95%よりも高い。ダイヤモンドコーティングにおけるsp3結合の純度は、99%よりも高い。ダイヤモンドコーティングは、化学気相成長(CVD)を用いて、環状リング上に堆積される。環状リングは、シリコン(Si)、シリコン炭化物(SiC)、および二酸化シリコン(SiO2)、からなる群から選択された材料で構成される。
Claims (20)
- プラズマ処理システム用のペデスタルであって、
基板支持面と、
前記基板支持面の周縁の周りに配置された環状エッジリングと、
前記環状リングのプラズマ暴露面上に配されたダイヤモンドコーティングと、を備え、
前記ダイヤモンドコーティングは、sp3結合を含み、
前記ダイヤモンドコーティングにおける前記sp3結合の純度は、90%よりも高い、ペデスタル。 - 請求項1に記載のペデスタルであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、95%よりも高い、ペデスタル。
- 請求項1に記載のペデスタルであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、99%よりも高い、ペデスタル。
- 請求項1に記載のペデスタルであって、前記ダイヤモンドコーティングは、化学気相成長(CVD)を用いて、前記環状エッジリング上に堆積される、ペデスタル。
- プラズマ処理システムであって、
処理チェンバであって、その中に請求項1に記載のペデスタルが配置されている、処理チェンバと、
前記処理チェンバ内でプラズマを発生させるためのプラズマ源と、を備えるプラズマ処理システム。 - 請求項5に記載のプラズマ処理システムであって、前記プラズマ源は、容量結合プラズマ(CCP)源を有する、プラズマ処理システム。
- 請求項5に記載のプラズマ処理システムであって、前記プラズマ源は、誘導結合プラズマ(ICP)源を有する、プラズマ処理システム。
- プラズマ処理システムであって、
処理チェンバであって、その中に請求項1に記載のペデスタルが配置されている、処理チェンバと、
前記処理チェンバにプラズマを供給するためのリモートプラズマ源と、を備えるプラズマ処理システム。 - プラズマ処理システムであって、
処理チェンバと、
前記処理チェンバへのプラズマの供給と、前記処理チェンバ内でのプラズマの生成と、のうちの一方を行うためのプラズマ源と、
前記処理チェンバ内に配置され、ダイヤモンドコーティングを有する、少なくとも1つの構成部材と、を備え、
前記ダイヤモンドコーティングは、sp3結合を含み、
前記ダイヤモンドコーティングにおける前記sp3結合の純度は、90%よりも高い、プラズマ処理システム。 - 請求項9に記載のプラズマ処理システムであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、95%よりも高い、プラズマ処理システム。
- 請求項9に記載のプラズマ処理システムであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、99%よりも高い、プラズマ処理システム。
- 請求項9に記載のプラズマ処理システムであって、前記ダイヤモンドコーティングは、化学気相成長(CVD)を用いて、前記少なくとも1つの構成部材上に堆積される、プラズマ処理システム。
- 請求項9に記載のプラズマ処理システムであって、前記少なくとも1つの構成部材は、
エッジリングと、
チェンバ壁と、
ガス分配装置と、
ガスインジェクタと、
前記処理チェンバ内への窓と、
ペデスタルの上面と、からなる群から選択される、プラズマ処理システム。 - プラズマ処理システム用のエッジリングであって、
環状リングと、
使用時にプラズマに暴露される前記環状リングの表面上に配されたダイヤモンドコーティングと、を有し、
前記ダイヤモンドコーティングは、sp3結合を含み、
前記ダイヤモンドコーティングにおける前記sp3結合の純度は、90%よりも高い、エッジリング。 - 請求項14に記載のエッジリングであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、95%よりも高い、エッジリング。
- 請求項14に記載のエッジリングであって、前記ダイヤモンドコーティングにおける前記sp3結合の前記純度は、99%よりも高い、エッジリング。
- 請求項14に記載のエッジリングであって、前記ダイヤモンドコーティングは、化学気相成長(CVD)を用いて、前記環状リング上に堆積される、エッジリング。
- 請求項14に記載のエッジリングであって、前記環状リングは、シリコン(Si)、シリコン炭化物(SiC)、および二酸化シリコン(SiO2)、からなる群から選択された材料で構成される、エッジリング。
- 請求項14に記載のエッジリングであって、前記ダイヤモンドコーティングは、1μm〜1mmの厚さを有する、エッジリング。
- 請求項14に記載のエッジリングであって、前記ダイヤモンドコーティングは、100μm〜1mmの厚さを有する、エッジリング。
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Application Number | Priority Date | Filing Date | Title |
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US201662303091P | 2016-03-03 | 2016-03-03 | |
US62/303,091 | 2016-03-03 | ||
US201662310993P | 2016-03-21 | 2016-03-21 | |
US62/310,993 | 2016-03-21 | ||
US15/428,744 | 2017-02-09 | ||
US15/428,744 US11008655B2 (en) | 2016-03-03 | 2017-02-09 | Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems |
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JP2021034566A (ja) * | 2019-08-23 | 2021-03-01 | 東京エレクトロン株式会社 | エッジリング、プラズマ処理装置及びエッジリングの製造方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10784091B2 (en) | 2017-09-29 | 2020-09-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Process and related device for removing by-product on semiconductor processing chamber sidewalls |
US11538713B2 (en) * | 2017-12-05 | 2022-12-27 | Lam Research Corporation | System and method for edge ring wear compensation |
CN109994351B (zh) * | 2018-01-02 | 2021-07-13 | 台湾积体电路制造股份有限公司 | 离子布植机及离子布植机腔室的制造方法 |
WO2019177837A1 (en) * | 2018-03-13 | 2019-09-19 | Applied Materials, Inc | Support ring with plasma spray coating |
US11515128B2 (en) * | 2018-08-28 | 2022-11-29 | Lam Research Corporation | Confinement ring with extended life |
KR102305539B1 (ko) * | 2019-04-16 | 2021-09-27 | 주식회사 티씨케이 | SiC 엣지 링 |
CN112899662A (zh) * | 2019-12-04 | 2021-06-04 | 江苏菲沃泰纳米科技股份有限公司 | Dlc制备装置和制备方法 |
CN112853482B (zh) * | 2020-12-31 | 2022-09-27 | 武汉大学深圳研究院 | 一种微波等离子体-磁控溅射复合气相沉积原位制备100面金刚石的方法及设备 |
CN114318287B (zh) * | 2021-12-23 | 2023-11-03 | 深圳技术大学 | 金刚石自支撑膜的制备方法和金刚石自支撑膜 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03118872A (ja) * | 1989-09-29 | 1991-05-21 | Nordson Corp | 粉体被覆システム |
JPH1096082A (ja) * | 1996-06-14 | 1998-04-14 | Applied Materials Inc | 基板処理システム構成部材の寿命を延ばす炭素ベース膜の使用 |
JP2003513434A (ja) * | 1999-08-16 | 2003-04-08 | アプライド マテリアルズ インコーポレイテッド | プラズマリアクターにおけるダイヤモンドがコーティングされたパーツ |
WO2005082998A1 (ja) * | 2004-02-26 | 2005-09-09 | Daikin Industries, Ltd. | 含フッ素エラストマー組成物 |
US20070208427A1 (en) * | 2006-03-06 | 2007-09-06 | Davidson Marc G | Prosthesis for joint replacement |
JP2009516920A (ja) * | 2005-11-22 | 2009-04-23 | アプライド マテリアルズ インコーポレイテッド | 誘電体膜を洗浄するための装置及び方法 |
US20130313785A1 (en) * | 2010-12-17 | 2013-11-28 | Eagleburgmann Germany Gmbh & Co. Kg | Low-friction seal ring with inexpensive diamond coating |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5190823A (en) * | 1989-07-31 | 1993-03-02 | General Electric Company | Method for improving adhesion of synthetic diamond coatings to substrates |
US6605352B1 (en) * | 2000-01-06 | 2003-08-12 | Saint-Gobain Ceramics & Plastics, Inc. | Corrosion and erosion resistant thin film diamond coating and applications therefor |
US6537429B2 (en) * | 2000-12-29 | 2003-03-25 | Lam Research Corporation | Diamond coatings on reactor wall and method of manufacturing thereof |
JP4028274B2 (ja) * | 2002-03-26 | 2007-12-26 | 住友大阪セメント株式会社 | 耐食性材料 |
US7247348B2 (en) * | 2004-02-25 | 2007-07-24 | Honeywell International, Inc. | Method for manufacturing a erosion preventative diamond-like coating for a turbine engine compressor blade |
US20090029067A1 (en) * | 2007-06-28 | 2009-01-29 | Sciamanna Steven F | Method for producing amorphous carbon coatings on external surfaces using diamondoid precursors |
US7629031B2 (en) * | 2007-07-13 | 2009-12-08 | Sub-One Technology, Inc. | Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films |
JP2009123795A (ja) * | 2007-11-13 | 2009-06-04 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
US9059678B2 (en) | 2011-04-28 | 2015-06-16 | Lam Research Corporation | TCCT match circuit for plasma etch chambers |
US10242848B2 (en) * | 2014-12-12 | 2019-03-26 | Lam Research Corporation | Carrier ring structure and chamber systems including the same |
-
2017
- 2017-02-09 US US15/428,744 patent/US11008655B2/en active Active
- 2017-03-02 TW TW110128839A patent/TWI793701B/zh active
- 2017-03-02 TW TW106106790A patent/TWI737686B/zh active
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- 2017-03-03 CN CN202110539388.2A patent/CN113506719A/zh active Pending
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-
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- 2022-03-08 KR KR1020220029212A patent/KR102556603B1/ko active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03118872A (ja) * | 1989-09-29 | 1991-05-21 | Nordson Corp | 粉体被覆システム |
JPH1096082A (ja) * | 1996-06-14 | 1998-04-14 | Applied Materials Inc | 基板処理システム構成部材の寿命を延ばす炭素ベース膜の使用 |
JP2003513434A (ja) * | 1999-08-16 | 2003-04-08 | アプライド マテリアルズ インコーポレイテッド | プラズマリアクターにおけるダイヤモンドがコーティングされたパーツ |
WO2005082998A1 (ja) * | 2004-02-26 | 2005-09-09 | Daikin Industries, Ltd. | 含フッ素エラストマー組成物 |
JP2009516920A (ja) * | 2005-11-22 | 2009-04-23 | アプライド マテリアルズ インコーポレイテッド | 誘電体膜を洗浄するための装置及び方法 |
US20070208427A1 (en) * | 2006-03-06 | 2007-09-06 | Davidson Marc G | Prosthesis for joint replacement |
US20130313785A1 (en) * | 2010-12-17 | 2013-11-28 | Eagleburgmann Germany Gmbh & Co. Kg | Low-friction seal ring with inexpensive diamond coating |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021034566A (ja) * | 2019-08-23 | 2021-03-01 | 東京エレクトロン株式会社 | エッジリング、プラズマ処理装置及びエッジリングの製造方法 |
JP7412923B2 (ja) | 2019-08-23 | 2024-01-15 | 東京エレクトロン株式会社 | エッジリング、プラズマ処理装置及びエッジリングの製造方法 |
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KR20170103689A (ko) | 2017-09-13 |
TW201800596A (zh) | 2018-01-01 |
SG10201701713TA (en) | 2017-10-30 |
US20170253974A1 (en) | 2017-09-07 |
US11008655B2 (en) | 2021-05-18 |
TWI737686B (zh) | 2021-09-01 |
SG10202008553TA (en) | 2020-10-29 |
CN113506719A (zh) | 2021-10-15 |
CN107393797A (zh) | 2017-11-24 |
KR20220036924A (ko) | 2022-03-23 |
TW202217038A (zh) | 2022-05-01 |
CN107393797B (zh) | 2021-06-08 |
KR102556603B1 (ko) | 2023-07-17 |
TWI793701B (zh) | 2023-02-21 |
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