WO2005045814A1 - 可変形ミラー、光学ヘッド及び光記録再生装置 - Google Patents
可変形ミラー、光学ヘッド及び光記録再生装置 Download PDFInfo
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- WO2005045814A1 WO2005045814A1 PCT/JP2004/016466 JP2004016466W WO2005045814A1 WO 2005045814 A1 WO2005045814 A1 WO 2005045814A1 JP 2004016466 W JP2004016466 W JP 2004016466W WO 2005045814 A1 WO2005045814 A1 WO 2005045814A1
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- Prior art keywords
- mirror
- reflection
- deformable mirror
- reflection mirror
- base
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1362—Mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Definitions
- the present invention relates to an optical head for recording / reproducing information on / from an optical recording / reproducing medium, and more particularly to an optical head for correcting spherical aberration caused by a change in the thickness of a light transmitting layer of an optical recording / reproducing medium having two recording layers.
- the present invention relates to a deformable mirror for an optical head and an optical head and an optical recording / reproducing apparatus using the same.
- Optical storage media such as read-only optical discs, phase-change optical discs, and magneto-optical discs are widely used to store video information, audio information, computer data, and the like.
- This optical recording / reproducing medium has come to be used as a video recording medium, particularly as a substitute for video tape, and also as a recording medium for high-definition video images.
- Demands for higher recording density and higher capacity for these information recording media are increasing.
- the recording density has been increasing, and the use of small-diameter discs has made it possible to use them in mobile applications such as video cameras.
- Optical heads can be mounted on mobile devices. There is also a demand for miniaturization, low power consumption, and low cost.
- the numerical aperture NA of the objective lens mounted on the optical head is increased, the wavelength ⁇ of the light from the light source is shortened, and the information is collected by the objective lens. It has been practiced to reduce the spot diameter of emitted light and to provide a plurality of recording layers for recording information.
- the numerical aperture NA of the objective lens is 0.45, and the wavelength of the light emitted from the light source is 780 nm, but the recording density and capacity have been increased.
- the numerical aperture NA of the objective lens is 0.6 and the wavelength of light is 65 nm.
- the aberration caused by the inclination of the disc with respect to the optical axis is the shorter the light wavelength
- it is effective to reduce the thickness of the light transmission layer so as to cancel out aberrations in order to obtain a good light spot
- the thickness of the light transmission layer is 1.2 mm in CD, whereas it is 0.6 mm in DVD.
- the distance between the two recording layers is set to 0.055 mm to prevent interlayer crosstalk.
- the thickness of the light transmitting layer for each recording layer is, for example, The difference between the two was 0.6 mm and 0.545 mm, and the difference between the two was kept small, so that the generated spherical aberration was kept within an allowable range.
- NA of the objective lens is now 0.85
- the wavelength of the light is 405 nm
- the thickness of the light transmission layer is about 0.1 mm.
- the distance between the two layers needs to be about 0.025 mm, and the thickness of the light transmission layer for each of the two recording layers is, for example, 0.1 mm. Since it is 0.075 mm, such a spherical aberration caused by the difference in the thickness of the light transmitting layer can no longer be tolerated.
- Japanese Patent Application Laid-Open No. 9-152550 discloses a method of correcting spherical aberration by deforming a tensioned thin film mirror by electrostatic force or the like.
- Japanese Patent Application Laid-Open No. H11-259893 discloses that the collimating lens disposed between a light source and an objective lens is moved so that the spread angle of parallel light incident on the objective lens is increased. It is disclosed that the spherical aberration is corrected by changing the NA on the incident side of the objective lens.
- the collimator lens cannot be placed very close to the objective lens, if the collimator is configured to change the spread angle of the parallel light by moving the evening lens, the efficiency of the laser beam and RIM can be adjusted according to the distance to the objective lens.
- the intensity (the intensity ratio at the edge of the pupil when the MAX point of the intensity of the entrance pupil is 100%) changes greatly, which makes designing the optical system difficult. Disclosure of the invention
- the present invention solves the above-mentioned problems, and provides a deformable mirror having a simple structure for switching spherical aberration according to a difference in the thickness of a light transmitting layer for two recording layers. It is an object of the present invention to provide an optical head and an optical recording / reproducing apparatus which are small in size, low in power consumption, and low in cost so that they can be mounted on equipment.
- the present invention provides a reflection mirror having a reflection surface for reflecting light, at least a part of which is formed of a member having ferromagnetism, and a deformation of the reflection mirror by magnetic force
- the member having ferromagnetism in the reflecting mirror is attracted to bring the reflecting mirror into the deformed state, and the hard magnetic member is magnetized by the magnetizing coil. It is preferable that the reflection mirror be restored to the non-deformed state by degaussing.
- the magnetized member may include a yoke, a magnetized coil, and a sub coil. It is preferable that at least a part of the sub-coil and the yoke are arranged on the back surface of the reflection mirror and on its side.
- the switching device comprises: a permanent magnet; a first position at which a magnetic force acts on the reflection mirror; and a second position further away from the ferromagnetic member than the first position. It is also possible to adopt a configuration having a movable mechanism for moving between them.
- the movable mechanism moves the permanent magnet at the second position to the first position, thereby attracting the member having ferromagnetism, bringing the reflection mirror into the deformed state, and moving to the first position. It is preferable that the reflection mirror be restored to a non-deformed state by moving a certain permanent magnet to the second position.
- a movable portion that supports the permanent magnet; a fixed portion that rotatably supports the movable portion; and a rotating operation that moves the movable portion between the first position and the second position.
- a driving unit that drives the driving unit.
- the drive section preferably includes a yoke for attracting the permanent magnet at the second position, a drive coil mounted on the yoke, and a drive magnet.
- the reflection mirror may include a base made of a glass plate, and the member having ferromagnetism may be provided on at least a part of the base.
- the reflection mirror may have a configuration in which a base material having ferromagnetism is used as a base material.
- the member having ferromagnetism preferably forms a part of a magnetic circuit together with the yoke.
- the reflection surface is constituted by a reflection coat formed on the surface of the substrate.
- the reflection coat is preferably made of a dielectric multilayer film.
- the reflection coat may be provided on both surfaces of the base material, respectively. Further, the reflection coat is provided on one surface of the base material, and the other surface of the base material is provided with a counter coat having a coefficient of thermal expansion equivalent to that of the reflection coat. Is also good.
- the member having ferromagnetism may be made of a hard magnetic material.
- the base is provided with a concave portion that is depressed in the deformation direction of the reflection mirror, the reflection mirror is held so as to cover the concave portion of the base, and the switching device is provided. It is preferable that, when it is deformed by, it is configured to be kept in the deformed state by contacting the concave portion.
- the reflection mirror is formed in a substantially elliptical shape
- the concave portion of the base is formed in a substantially elliptical shape corresponding to the shape of the reflection mirror.
- the holding member may be configured to press the reflection mirror against the base with a spring force.
- the holding member includes a base assembled to the base, a plate spring extending from the base, and a holding frame joined to the plate spring and pressing the reflection mirror.
- the holding member may be made of a volatile adhesive.
- the present invention relates to an optical head configured to focus light on an optical information recording medium, comprising: an objective lens for condensing light on the optical information recording medium; and an objective for driving the objective lens.
- the variable mirror may be an optical head that is provided to reflect the light emitted from the light source toward the objective lens.
- the deformable mirror is provided in a space below the objective lens actuator.
- the present invention relates to an optical recording / reproducing apparatus that focuses light on an optical recording / reproducing medium provided with two recording layers and performs at least one of information recording on the optical recording / reproducing medium and reading of recorded information, Switching the state of the reflection mirror to the optical head;
- the optical recording / reproducing apparatus may include a power supply unit for supplying power for replacement.
- the deformable mirror sets the reflecting mirror to a planar mirror and converges on the second recording layer near the light incident surface.
- the reflection mirror is deformed into a concave mirror in which the reflection surface becomes concave.
- the power supply unit applies a pulsed voltage only when switching the state of the reflection mirror.
- a deformable mirror that corrects spherical aberration with a simple configuration can be realized, and a small-sized optical head and optical recording / reproducing apparatus with low power consumption can be realized.
- the deformable mirror of the present invention it is possible to provide a deformable mirror capable of correcting spherical aberration due to a difference in the thickness of the light transmission layer of a two-layer disc with a simple configuration at a low cost, and to provide a small optical head. Can be realized.
- FIG. 1 is a diagram schematically showing a configuration of an optical head according to Embodiment 1 of the present invention.
- FIG. 2 is a side view showing a state where light is focused on the first recording layer of the two-layer optical disc in the optical head.
- FIG. 3 is a side view showing a state where light is focused on the second recording layer of the two-layer optical disc in the optical head.
- FIG. 4 is a perspective view showing an entire configuration of a deformable mirror provided in the optical head.
- FIG. 5 is a sectional view of the deformable mirror.
- FIG. 6 is a perspective view showing the deformable mirror disassembled for each component.
- FIG. 7 is an explanatory diagram for explaining the operation of the sub coil.
- FIG. 8 is a diagram showing a positional relationship between a two-axis actuator and a deformable mirror.
- FIG. 9 is a cross-sectional view showing another example in which the elastic support member according to the first embodiment of the present invention is made of an adhesive.
- FIG. 10 is a perspective view showing a second embodiment of the deformable mirror of the present invention.
- FIG. 11 is an exploded perspective view showing the deformable mirror for each component.
- FIG. 12 is a side sectional view showing the internal structure of the deformable mirror.
- FIG. 13 is a cross-sectional view taken along line XX of FIG. ⁇ Fig. 14 is a view showing a state in which the movable part is located above the deformable mirror.
- FIG. 1 A first figure.
- FIG. 15 is a sectional view showing a third embodiment of the deformable mirror of the present invention.
- FIG. 16 is a diagram schematically showing a configuration of an optical recording / reproducing device according to the fourth embodiment of the present invention.
- FIG. 1 is a schematic diagram showing a configuration of an optical head according to Embodiment 1 of the present invention.
- the optical head 100 is composed of a laser light source 1, a polarizing beam splitter 2, a collimating lens 3, a 1-Z 4-wave plate 4, and a reflection mirror 5. It has a deformable mirror 15, an objective lens 6, a condenser lens 8, and a photodetector 9.
- the laser light source 1 emits a laser beam.
- the polarizing beam splitter 2 transmits a laser beam incident from one side and reflects a laser beam incident from the other side.
- the 1 Z 4 wave plate 4 changes the polarization direction of light.
- the reflection mirror 5 deflects the optical axis direction.
- the objective lens 6 focuses the laser beam on the information recording surface of the two-layer optical disc 20.
- the condensing lens 8 condenses the reflected light from the two-layer optical disc 20 on the light receiving section of the photodetector 9.
- the laser beam emitted from the laser beam source 1 passes through the polarization beam splitter 2, is shaped into a parallel beam by the collimator lens 3, and passes through the 1Z4 wave plate 4 to reflect the laser beam.
- the direction is turned 90 degrees at 5 and the light is focused at the objective lens 6 to focus on the information recording surface of the double-layer optical disc 20.
- the reflected light of the laser beam reflected from the information recording surface of the double-layer optical disc 20 is divided into an objective lens 6, a reflection mirror 5, a quarter-wave plate 4, a collimating lens 3, and a polarizing beam splitter. 2 passes in this order and forms an image on the photodetector 9 via the condenser lens 8.
- the objective lens 6 is mounted on a two-axis actuator 7 and performs a focus servo operation and a tracking servo operation on the two-layer optical disc 20 based on a servo signal obtained from the photodetector 9.
- FIG. 2 is a side view showing a state where light is focused on the first recording layer 21 of the two-layer optical disc 20
- FIG. 3 is a side view showing a state where light is focused on the second recording layer 22 of the two-layer optical disc 20. It is.
- the two-layer optical disc 20 has a first recording layer 21 provided on a surface of a substrate 23, a second recording layer 22 provided on the surface of the first recording layer 21 with an intermediate layer 24 interposed therebetween, and a surface of the second recording layer 22. And a cover layer 25 is further laminated thereon.
- the thickness of the light transmitting layer is set to 0.1 mm in order to suppress the aberration caused by the inclination of the disk with respect to the optical axis to the same level as DVD.
- the thickness of the cover layer 25 is the thickness of the light transmitting layer, so that a cover layer 25 of 0.1 mm is provided.
- the thickness of the intermediate layer 24 is 0.025 mm
- the thickness of the cover layer 25 is 0.075 mm. That is, when condensing light on the first recording layer 21, the thickness t 1 of the light transmitting layer is 0.1 mm.
- the deformable mirror 15 has a reflection mirror 5.
- the reflection mirror 5 is a thin plate-shaped mirror.
- a glass substrate having a thickness of about 0.1 mm is used as a base material 5b, and a reflection coat is applied to the surface of the base material 5b.
- the surface of the reflection coat is a reflection surface for reflecting light.
- the substrate 5b is set to have a thickness or the like so that the laser beam is not disturbed by reflection in a natural state where no external force is applied, good flatness can be maintained, and the substrate 5b can be deformed by a predetermined force.
- the thickness of the glass substrate is set between 0.05 mm and 0.2 mm, flatness can be maintained as long as no external force acts, and Deformation necessary for aberration correction can be performed within the allowable stress.
- the reflection mirror 5 is not deformed only by its own weight. Therefore, unlike the mirror formed by the thin film, the reflection mirror 5 does not need to continuously apply tension to maintain the flatness.
- a dielectric multilayer film is used as a reflection coat.
- the number of layers of the dielectric multilayer film and the type of dielectric can be appropriately selected according to the wavelength of light, the reflectance, and the like.
- the base material of the mirror and the coating film have different coefficients of thermal expansion, when the base material is thin, the warpage of the reflective mirror becomes a problem.
- the reflection mirror 5 is arranged so as to cover the concave portion 11 a formed in the base 11.
- the outer periphery of the reflection mirror 5 is held by the flexible member 12 so as not to fall off.
- the reflection mirror 5 is provided with a magnetic member 5a having ferromagnetism.
- the magnetic member 5a is provided at the center of the back surface of the base member 5b.
- the method of providing the magnetic member 5a includes a method of bonding a magnetic stainless steel sheet or a silicon steel sheet, a method of forming a magnetic film such as an iron-based oxide by a sputtering method and a vacuum evaporation method, and a method of applying a magnetic powder. There are methods.
- a switching device 10 is provided. And the driving circuit 1 When the switching device 10 is energized by 01, a magnetic attraction force F is generated, and the reflecting mirror 15 is deformed so that the reflecting surface becomes concave. If the suction force F is eliminated, the reflection mirror-5 is restored to the original flat mirror. For example, when a suction force of 0.098 to 0.147 N (10 to L5 gf) is generated for a glass mirror having a thickness of 0.1 mm, a vertex (reflection mirror 5) is generated. Deformation with a displacement of about 4 m is obtained.
- the optical system of the optical head according to the present embodiment focuses on the first recording layer 21 in a non-deformed state where the reflection mirror 15 has a flat plate shape. It is designed so that a good light spot can be obtained through the light transmitting layer.
- the focus signal is offset, the objective lens 6 is once lowered, and then the 22.
- the focus pull-in operation is performed again to 2.
- a driving force is generated in the switching device 10 by the drive circuit 101 to deform the reflection mirror 5 into a concave shape, thereby converting the parallel light incident on the objective lens 6 into convergent light.
- the spherical aberration due to the difference in the thickness of the light transmitting layer is corrected.
- the degree to which the parallel light is converged is determined by deforming the reflecting mirror 15 by a predetermined amount of deformation according to the difference in the thickness of the light transmitting layer (the thickness of the intermediate layer 24).
- the amount of deformation of the reflecting mirror 5 is regulated by the concave portion 11 a of the base 11. Then, the reflecting mirror 15 is brought into contact with the recessed portion 11a, and a sufficient amount of suction force F is applied to maintain the same, so that a constant deformation amount is maintained.
- the amount of deformation of the reflecting mirror 5 is a value corresponding to the depth of the concave portion 11a.
- the depth of the concave portion 11a is optically determined by the difference in the thickness of the light transmitting layer, the NA of the objective lens 6, and the like. Further, it is necessary to accurately form a step of about several m constituting the recessed portion 11a with an error of ⁇ 10%.
- the surface of the base 11 supporting the reflection mirror 15 is mirror-finished.
- a method of forming a step a method of forming a step by shaving off the area of the recessed portion 11a by etching or the like, or conversely, a method of building up the outer peripheral portion of the base 11 by electroless nickel plating or the like.
- steps while the recessed portion 1 1a is formed on a flat mirror surface,
- the reflection mirror 15 When the reflection mirror 15 is deformed so that the reflection surface becomes concave, the portion located on the outer peripheral side of the concave portion 11 a is displaced away from the base 11. At this time, since the outer periphery of the reflection mirror 5 is elastically held by the elastic member 12, the reflection mirror 5 is naturally deformed into a curved surface, and the entire mirror becomes concave.
- the outer peripheral portion of the reflection mirror 15 is fixedly fixed to the base 11, the outer peripheral portion will not be displaced, and in this case, the area deformed into a concave shape will be small. This requires a relatively larger mirror.
- the outer end of the reflecting mirror 5 is supported by the elastic member 12 so as to be displaceable with respect to the base 11, a compact reflecting mirror 5 can be obtained. . Further, as compared with the case where the outer peripheral portion is fixedly fixed to the base 11, a predetermined amount of deformation can be obtained with a smaller suction force, and the stress generated in the reflection mirror 15 can be suppressed to be small.
- the outer peripheral portion of the reflection mirror 15 be elastically held by the elastic member 12.
- FIG. 4 is a perspective view showing a configuration of the deformable mirror 15 of the present invention
- FIG. 5 is a sectional view thereof
- FIG. 6 is an exploded perspective view.
- the reflection mirror 5 is installed on the base 11 so as to cover the recessed portion: Lla, and is held by the elastic support member 12.
- a magnetic member 5a having ferromagnetism is provided on the back surface of the reflection mirror 5.
- the deformable mirror 15 includes a base 11, a holding member 12 supported by the base 11, and a reflection surface which is sexually held by the holding member 12 and reflects light. And a switching device 10 for switching the reflection mirror 15 between a deformed state and a non-deformed state.
- the circular laser beam enters the reflecting mirror 5 from a direction of 45 degrees, is turned 90 degrees, is reflected in the direction of the arrow B, and is disposed thereabove.
- the cross section of the beam incident on the reflection mirror 5 has an elliptical shape, and accordingly, the reflection mirror 5 has an elliptical shape.
- the base 11 includes a horizontally long block-shaped main body 11 b whose upper surface is inclined with respect to the bottom surface, and the recess 11 a formed in the main body 11 b.
- the recess 11 a is provided at the center of the upper surface of the main body 11 b.
- the recessed portion 11a is formed in an elliptical shape as described above, and is formed so as to have a constant depth over the entirety. This elliptical shape is such that it is circular when viewed from the side.
- a through-hole 11c penetrating the upper surface and the back surface is formed.
- the through hole 11 c is configured to have a size such that the magnetic member 5 a of the reflection mirror 15 can be immersed.
- cutouts 11 d are formed at both ends in the length direction of the main body 11 b. That is, notches 11 d are provided on both sides of the recess 11 a. Each of the notches l id is formed in a rectangular cross section, and has a size capable of accommodating a sub-coil 10 d to be described later.
- the elastic support member 12 is a member formed by pressing a thin metal plate, and has a base portion 12c, a plate spring portion 12a, and a holding frame portion 12b formed integrally.
- the elastic support member 12 can be formed of, for example, spring steel or stainless steel.
- the base 12c is formed in a rectangular frame shape to be assembled to the main body 11b of the base 11, and has claws 12d for sandwiching the main body 11b from both sides.
- the elastic support member 12 is engaged with the base 11.
- the leaf spring portions 12a extend inward from the four corners of the base portion 12c.
- the leaf spring portion 12a is elastically deformable in the plate thickness direction.
- the holding frame portion 12b is formed in an elliptical circumferential shape along the outer peripheral portion of the reflection mirror 5, and connects the front end portion (inner end portion) of each leaf spring portion 12a. I have.
- the claw 12 d engages with the main body 11 b to position the base 12 c of the elastic support member 12. You. Then, in this state, the leaf spring portion 12a is slightly bent, and the holding frame portion 12b presses and holds the reflection mirror 5.
- the deformable mirror 15 includes a switching device 10 for switching the reflection mirror 5 between a deformed state and a non-deformed state.
- the switching device 10 includes a hard magnetic member 10 a and a magnetized member 1. 0 f.
- the hard magnetic member 10 a is a member made of a hard magnetic material having a strong coercive force, and is incorporated in the base 11.
- the hard magnetic member 10a is arranged on the back side of the through hole 11c of the base 11 so that the tip thereof faces the magnetic member 5a.
- the magnetized member 10f has a yoke 10b fixed to the hard magnetic member 10a and a magnetized coil 10c wound around the hard magnetic member 10a.
- the hard magnetic member 10a retains the magnetic field even when the magnetizing coil 10c is not energized, applies a predetermined magnetic flux density, and attracts the magnetic member 5a.
- the magnetic member 5a is sucked until the back surface of the reflective mirror 5 contacts the concave portion 11a of the base 11, and the reflective mirror 5 is in a deformed state in contact with the concave portion 11a. .
- the reflecting mirror 5 is maintained in a curved surface shape having a concave reflecting surface and a constant deformation amount.
- a voltage pulse sufficient to generate a necessary magnetic field is applied to the magnetizing coil 10c.
- the displacement of the magnetic member 5a is on the order of a few microseconds.
- the yoke 10b is extended on both sides of the base 11, and the extended portions 10e of the yoke 10b are provided with sub-coils 10d, respectively.
- FIG. 7 shows the positional relationship between the sub-coils 10d.
- the magnetizing coil 10c generates a magnetic field in the direction of the magnetic field HI during magnetization, for example, while the subcoil 10d wound around the yoke extension 10e is Conducted to generate a magnetic field in the direction of H2. That is, the magnetic field H generated by the magnetized coil 10 c is
- the space where the sub-coil 10d is arranged corresponds to the lower side of the two-axis actuator 7 of the objective lens 6 provided thereabove. For this reason, if the deformable mirror 15 is configured so that the sub-coil 10d is substantially equal to the width of the two-axis actuator 7, the optical head does not increase in size.
- the two-axis actuator 7 which is an objective lens actuator, has a fixed part 7d and a suspension mounted on the fixed part 7d. It has an objective lens holder 7a movably connected via a wire 7b, and a magnetic circuit 7c for applying a driving force to the objective lens holder 7a.
- the objective lens 6 is held by an objective lens holder 7a.
- the magnetic circuit 7c is disposed on each side of the objective lens holder 7a in the optical axis direction of the laser beam 102, and the sub-coils 10d are arranged in a direction orthogonal to the direction.
- the hard magnetic member 10a is used to attract the magnetic member 5a of the reflection mirror 5, so that the magnetized coil 1 is used only during magnetization or demagnetization.
- the reflection mirror 15 can be switched between the deformed state and the non-deformed state simply by supplying a current to 0 c. Therefore, power consumption can be reduced, and the device can be suitably used for mopile devices.
- a concave portion 11a is provided in the base 11 provided on the back side of the reflective mirror 5, and the reflective mirror 5 is brought into contact with the concave portion 11a so that the reflective mirror 5 is formed. Since the deformation is regulated, the amount of deformation of the reflection mirror 15 can be accurately maintained with a simple configuration.
- the reflection mirror 5 is formed in an elliptical shape, it is suitable for disposing the reflection mirror 5 immediately near the objective lens.
- the deformable mirror 15 is assembled by fitting the elastic support member 12 for spring-supporting the reflective mirror 5 into the base 11, the deformable mirror 15 is Excellent assemblability.
- FIG. 9 shows another embodiment of the elastic support member 12.
- the elastic support member 12 is made of an adhesive that has elasticity even after solidification.
- the flexible support member 12 elastically holds the outer peripheral portion of the reflection mirror 15 and can perform the same operation as the above-described configuration.
- it is desirable that the adhesive is uniformly applied over the entire outer periphery of the reflection mirror 15 so that deformation unevenness of the reflection mirror 15 does not occur.
- an adhesive composed of an ultraviolet curable resin containing modified acryl as a main component can be used.
- a material that forms a soft cured product is preferable.
- three pounds 308B manufactured by Slyem can be used.
- the magnetic member 5a is provided on the reflection mirror 5, but a hard magnetic material may be provided on the reflection mirror instead.
- FIG. 10 is a perspective view showing a second embodiment of the deformable mirror 1.5 of the present invention
- FIG. 11 is an exploded perspective view showing each constituent member.
- the configurations of the reflection mirror 5, the base 11, and the elastic support member 12 are the same as those in the first embodiment.
- the base 11 has a shaft groove 1 lb formed therein.
- the base 11 is rotatably supported by the shaft groove 11 b.
- the movable part 30 is incorporated.
- the movable section 30 includes a movable section base 33, a drive block 34, and a drive magnet 35.
- the movable base 33 has a large rectangular recess 33b formed in the center.
- a rotating shaft 33a is provided on each side of the movable portion base 33.
- the rotating shaft 33 a extends in a direction parallel to the upper surface of the base 11 at a position shifted from the through hole 11 c formed on the upper surface of the base 11. 3a is inserted into the shaft groove 1 lb.
- the movable portion base 33 is rotatable around a rotation shaft 33a. That is, the movable portion base 33 is rotatably supported by the base 11.
- the drive yoke 34 and the drive magnet 35 are fixed to the ends of the arms located on both sides of the rectangular recess 33b. These are rotating portions that rotate around the rotating shaft 33 a of the movable portion base 33.
- a permanent magnet 31 and a rotating yoke 32 are provided in the rectangular recess 33b.
- the permanent magnet 31 is fixed to a rotating section yoke 32, and the rotating section yoke 32 is attached to a movable section base 33. Therefore, the permanent magnet 31 is supported by the movable base 33, and the permanent magnet 31 and the rotating yoke 32 are integrated with the movable base 33 to form the rotating shaft 33. It is possible to move around a.
- a fixed yoke 37 is provided below the base 11.
- the fixed yoke 37 includes a bottom 37 d, a support protrusion 37 a connected to the bottom 37 d, an upright portion 37 b rising from both ends of the bottom 37 d, and a bottom 37 and a projection 37c standing from the back side of d.
- the support protrusion 37a sandwiches the rotation shaft 33a between the support protrusion 37a and the shaft groove 11b, and supports the rotation shaft 33a from below.
- a drive coil 36 is attached to each of the upright portions 37b.
- the protrusion 37c extends upward from the lower end of the base 11 along the rear surface.
- FIG. 12 is a cross-sectional side view showing the internal structure of the second embodiment
- FIG. 13 is a cross-sectional plan view taken along line XX of FIG.
- the permanent magnet 31 when the movable portion 30 is in the horizontal state, the permanent magnet 31 is in the second position. In this second position, the permanent magnet 31 is located on the side of the rotating shaft 33a, and in this state, the permanent magnet 31 is fixed to the yoke more than the magnetic member 5a on the back of the reflecting mirror 5. It is located near the protrusion 3 7c. The permanent magnet 31 is attracted to the projection 37c of the fixed yoke 37, so that the magnetic member 5a is not attracted by the permanent magnet 31.
- the drive magnets 35 provided on both sides of the movable part 30 are respectively disposed between the drive yoke 34 and the upright part 37 b of the fixed yoke 37. I have. Then, a drive coil 3.6 is arranged in the magnetic gap where the gap magnetic flux B is generated. Thus, when the drive coil 36 is energized, the current i acts on the magnetic flux B to generate an upward drive force F.
- FIG. 14 is a side cross-sectional view showing a state where the movable portion 30 is located above.
- the permanent magnet 31 approaches the magnetic member 5 a on the back of the reflection mirror 5. Then, the permanent magnet 31 is attracted to the magnetic member 5a by an attractive force, so that the movable part hook 32 is held in a state where it is in contact with the inner surface of the base 11 and the first position. Become. In this first position, the permanent magnet 31 is located just behind the magnetic member 5 a of the reflection mirror 5.
- the magnetic member 5a is attracted in the direction of the permanent magnet 31 by the attraction force, whereby the reflecting mirror 5 is deformed into a concave shape.
- the amount of deformation is regulated by the fact that the back surface of the reflection mirror 15 abuts the depression 11 a of the base 11.
- the movable portion 30 is attracted by the magnetic member 5a when facing upward and is attracted by the protrusion 37c when facing downward, and the posture is maintained in each state.
- the energization of the drive coil 36 need only be performed while the position of the movable part is being changed.
- the movable portion 30 is configured to move between the first position and the second position by rotating, the configuration for switching between the two positions is a simple configuration. It is possible to realize.
- the drive coil 36 and the fixed yoke 37 are provided on both sides of the reflection mirror 15 similarly to the first embodiment, and the two-axis actuator of the objective lens 6 disposed above the reflection mirror 15 is provided. It falls at the bottom of evening 7. For this reason, if the deformable mirror 15 is configured to have the same width as the width of the two-axis actuator 7, the size of the optical head will not be increased.
- the movable section 30 including the permanent magnet 31 is configured to rotate, but is not limited to this.
- the movable part is perpendicular to the reflection mirror 5. The translation may be performed in a straight direction or in the surface direction of the reflection mirror 5. Even in this case, since the distance between the permanent magnet 31 and the magnetic member 5a on the back of the reflection mirror 5 changes, the same effect can be obtained.
- FIG. 15 is a sectional view showing a third embodiment of the deformable mirror 15 of the present invention.
- the magnetic member 5a is provided over the entire back surface of the base member 5b constituting the reflection mirror 5, and the suction force is applied to the whole.
- the concave portion 11 a of the base 11 is formed in a concave curved shape in accordance with the deformation of the reflection mirror 15. In such a configuration, the suction area is larger than when the magnetic member 5a is provided only in the central portion of the reflection mirror 5, so that even if the same gap magnetic flux density is given, a larger suction force as a whole is obtained. Can be obtained.
- the reflecting mirror 5 is deformed following the curved surface shape of the concave portion 11a, processing for forming the curved surface of the concave portion 11a requires accuracy, but aberration correction needs to be performed more accurately. In addition, it can be deformed with high precision.
- the switching device 10 has the same configuration as that of the first embodiment. However, the configuration is not limited to this, and the switching device 10 may have the same configuration as that of the second embodiment. It is.
- the reflection mirror 5 ' is configured such that the base material 5b made of a glass substrate is coated with a reflection coating.
- the base material of the reflection mirror 5 itself may be formed of a ferromagnetic material. is there.
- 0.294 to 0.392 N (30 to 40 gf The deformation that the displacement of the vertex is about 4 is obtained by the suction force of).
- the reflection coat also serves as a protective coating for the base material and eliminates the need for steps such as bonding and vapor deposition, the deformable mirror 15 can be manufactured at low cost.
- the reflection mirror 5 can be made hard to break, there is an effect that handling is easier than that of a glass substrate.
- the switching device is provided on both sides of the reflection mirror 15 in each case, but may be provided on only one side.
- FIG. 16 schematically illustrates an optical recording / reproducing apparatus according to a fourth embodiment of the present invention.
- the optical recording / reproducing apparatus includes the optical head 100 according to the first embodiment, a rotation driving mechanism 42, a power supply unit 44, a light receiving device 53, a reproducing device 47, a tracking unit, And a focus servo mechanism 49.
- the optical head 100 may be configured in the second or third embodiment.
- the rotation drive mechanism 42 includes a motor (not shown), and rotates the optical disk 20 mounted on the shaft.
- the power supply unit 44 supplies power to the optical head 100, the rotation drive mechanism 42, and the like.
- the power supply unit 44 is configured to apply a pulse-like voltage to the switching device 10 of the optical head 100.
- the light receiving device 53 generates a reproduction signal, a tracking error signal, and a focus error signal based on the reflected light branched by the optical head 40.
- the reproduction device 47 reproduces information recorded on the optical disc 20 based on the reproduction signal. If the information is, for example, video information and audio information, the information is converted into a video signal and an audio signal.
- the tracking support mechanism 48 controls the optical head 40 to compensate for the tracking error based on the tracking error signal.
- the focus servo mechanism 49 controls the optical head 20 based on the focus error signal so as to compensate for the focus error.
- the present optical recording / reproducing apparatus uses an optical recording / reproducing medium 20 having two recording layers, and when converging light onto the first recording layer 21 far from the light incident surface, the reflecting mirror 15 is a plane mirror. age When the light is focused on the second recording layer 22 near the light incident surface (see FIG. 2), the reflection mirror 5 is deformed into a concave shape by the switching device (see FIG. 3). At this time, a pulse-like voltage is applied only when the shape of the reflection mirror 5 is changed, so that the shape of the reflection mirror 5 changes as described above. Industrial applicability
- the present invention includes a deformable reflection mirror, a deformable mirror that switches the reflection mirror between a deformed state and a non-deformed state, and includes a deformable mirror that corrects spherical aberration. It is useful as an optical head for recording / reproducing to / from a double-layer disc and an optical recording / reproducing device.
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Head (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/561,926 US8238223B2 (en) | 2003-11-06 | 2004-10-29 | Deformable mirror, optical head, and optical recording and playback device |
JP2005515326A JPWO2005045814A1 (ja) | 2003-11-06 | 2004-10-29 | 可変形ミラー、光学ヘッド及び光記録再生装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003376857 | 2003-11-06 | ||
JP2003-376857 | 2003-11-06 |
Publications (1)
Publication Number | Publication Date |
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WO2005045814A1 true WO2005045814A1 (ja) | 2005-05-19 |
Family
ID=34567118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2004/016466 WO2005045814A1 (ja) | 2003-11-06 | 2004-10-29 | 可変形ミラー、光学ヘッド及び光記録再生装置 |
Country Status (4)
Country | Link |
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US (1) | US8238223B2 (ja) |
JP (1) | JPWO2005045814A1 (ja) |
CN (2) | CN100369138C (ja) |
WO (1) | WO2005045814A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008039861A (ja) * | 2006-08-01 | 2008-02-21 | Seiko Epson Corp | 光学デバイス |
JP2008310925A (ja) * | 2007-06-18 | 2008-12-25 | Sony Corp | 変形可能ミラー装置、光ピックアップ、光学ドライブ装置 |
JP2015519736A (ja) * | 2012-04-27 | 2015-07-09 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 磁歪材料を含む光学素子 |
CN114647126A (zh) * | 2020-12-17 | 2022-06-21 | 日本电产三协株式会社 | 带抖动修正功能的光学单元 |
Families Citing this family (10)
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WO2005024809A2 (en) * | 2003-09-04 | 2005-03-17 | Matsushita Electric Industrial Co., Ltd. | Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up |
JP4442505B2 (ja) * | 2004-07-30 | 2010-03-31 | ソニー株式会社 | 変形可能ミラー装置、変形ミラー板 |
JP2008117476A (ja) * | 2006-11-06 | 2008-05-22 | Funai Electric Co Ltd | 光ピックアップ装置 |
CN102063913B (zh) * | 2009-11-12 | 2013-12-18 | 日立民用电子株式会社 | 变形镜致动器和光盘装置 |
JP6808381B2 (ja) * | 2016-07-07 | 2021-01-06 | キヤノン株式会社 | 保持装置、投影光学系、露光装置、および物品製造方法 |
KR102046473B1 (ko) * | 2017-03-08 | 2019-11-19 | 삼성전기주식회사 | 손떨림 보정 반사모듈 및 이를 포함하는 카메라 모듈 |
CN109407258A (zh) * | 2017-08-17 | 2019-03-01 | 信泰光学(深圳)有限公司 | 镜头装置 |
US10365473B1 (en) | 2018-04-06 | 2019-07-30 | King Fahd University Of Petroleum And Minerals | Electro-magnetic actuation rotational adaptive mirror |
JP6519033B1 (ja) * | 2018-07-03 | 2019-05-29 | Dolphin株式会社 | 物体検出装置、物体検出方法、および物体検出装置の設計方法 |
CN108810386A (zh) * | 2018-08-02 | 2018-11-13 | Oppo广东移动通信有限公司 | 摄像头模组、摄像头组件和电子装置 |
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- 2004-10-29 JP JP2005515326A patent/JPWO2005045814A1/ja active Pending
- 2004-10-29 US US10/561,926 patent/US8238223B2/en not_active Expired - Fee Related
- 2004-10-29 CN CNB200480011998XA patent/CN100369138C/zh not_active Expired - Fee Related
- 2004-10-29 CN CN200810004038A patent/CN100594399C/zh not_active Expired - Fee Related
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JPH09259459A (ja) * | 1996-03-19 | 1997-10-03 | Denso Corp | 光学ヘッド |
JP2003067969A (ja) * | 2001-08-27 | 2003-03-07 | Olympus Optical Co Ltd | 光ピックアップ |
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JP2008310925A (ja) * | 2007-06-18 | 2008-12-25 | Sony Corp | 変形可能ミラー装置、光ピックアップ、光学ドライブ装置 |
JP2015519736A (ja) * | 2012-04-27 | 2015-07-09 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 磁歪材料を含む光学素子 |
CN114647126A (zh) * | 2020-12-17 | 2022-06-21 | 日本电产三协株式会社 | 带抖动修正功能的光学单元 |
CN114647126B (zh) * | 2020-12-17 | 2023-07-21 | 日本电产三协株式会社 | 带抖动修正功能的光学单元 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2005045814A1 (ja) | 2007-05-24 |
CN100369138C (zh) | 2008-02-13 |
CN101231389A (zh) | 2008-07-30 |
US8238223B2 (en) | 2012-08-07 |
CN100594399C (zh) | 2010-03-17 |
US20070097836A1 (en) | 2007-05-03 |
CN1784724A (zh) | 2006-06-07 |
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