WO2004044968A1 - 露光装置、露光方法および半導体装置の製造方法 - Google Patents
露光装置、露光方法および半導体装置の製造方法 Download PDFInfo
- Publication number
- WO2004044968A1 WO2004044968A1 PCT/JP2003/014460 JP0314460W WO2004044968A1 WO 2004044968 A1 WO2004044968 A1 WO 2004044968A1 JP 0314460 W JP0314460 W JP 0314460W WO 2004044968 A1 WO2004044968 A1 WO 2004044968A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mask
- exposure
- pattern
- correction data
- surface shape
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
- G03F7/706—Aberration measurement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03772739A EP1564793A4 (en) | 2002-11-14 | 2003-11-13 | EXPOSURE DEVICE, EXPOSURE METHOD AND SEMICONDUCTOR COMPONENTS MANUFACTURING METHOD |
US10/534,917 US7456031B2 (en) | 2002-11-14 | 2003-11-13 | Exposure device, exposure method, and semiconductor device manufacturing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002331090A JP3791484B2 (ja) | 2002-11-14 | 2002-11-14 | 露光方法および半導体装置の製造方法 |
JP2002-331090 | 2002-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004044968A1 true WO2004044968A1 (ja) | 2004-05-27 |
Family
ID=32310614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2003/014460 WO2004044968A1 (ja) | 2002-11-14 | 2003-11-13 | 露光装置、露光方法および半導体装置の製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7456031B2 (ja) |
EP (1) | EP1564793A4 (ja) |
JP (1) | JP3791484B2 (ja) |
KR (1) | KR20050074552A (ja) |
CN (1) | CN1735959A (ja) |
WO (1) | WO2004044968A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4157486B2 (ja) * | 2004-03-24 | 2008-10-01 | 株式会社東芝 | 描画パターンデータの生成方法及びマスクの描画方法 |
JP4488822B2 (ja) * | 2004-07-27 | 2010-06-23 | 株式会社東芝 | 露光用マスクの製造方法、露光装置、半導体装置の製造方法およびマスクブランクス製品 |
JP4480506B2 (ja) * | 2004-07-30 | 2010-06-16 | 凸版印刷株式会社 | ステンシルマスク及びステンシルマスクブランクス |
JP4506336B2 (ja) * | 2004-07-30 | 2010-07-21 | 凸版印刷株式会社 | ステンシルマスク及びステンシルマスクブランクス |
JP4626365B2 (ja) * | 2005-04-01 | 2011-02-09 | トヨタ自動車株式会社 | ステンシルマスクとその使用方法、並びにステンシルマスク用のイオン注入装置 |
TWI313486B (en) * | 2005-07-28 | 2009-08-11 | Nuflare Technology Inc | Position measurement apparatus and method and writing apparatus and method |
US7554107B2 (en) | 2005-11-04 | 2009-06-30 | Nuflare Technology, Inc. | Writing method and writing apparatus of charged particle beam, positional deviation measuring method, and position measuring apparatus |
DE102006006890A1 (de) * | 2006-02-15 | 2007-08-16 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Prüfstruktur zur Prüfung der Durchbiegung einer Membran eines mikromechanischen Bauelements und entsprechende Prüfstruktur |
KR20090128337A (ko) * | 2008-06-10 | 2009-12-15 | 어플라이드 머티리얼즈 이스라엘 리미티드 | 반복 패턴을 갖는 물체를 평가하는 방법 및 시스템 |
JP5331638B2 (ja) * | 2008-11-04 | 2013-10-30 | Hoya株式会社 | 表示装置製造用フォトマスクの製造方法及び描画装置 |
TWI502623B (zh) * | 2010-01-07 | 2015-10-01 | Hoya Corp | 光罩之製造方法、光罩、及顯示裝置之製造方法 |
JP5683930B2 (ja) * | 2010-01-29 | 2015-03-11 | Hoya株式会社 | マスクブランク用基板、マスクブランク、転写用マスク及び半導体デバイスの製造方法 |
US20120237857A1 (en) * | 2011-03-16 | 2012-09-20 | Nanya Technology Corp. | Photomask and method for forming overlay mark using the same |
JP6412317B2 (ja) * | 2013-04-24 | 2018-10-24 | キヤノン株式会社 | インプリント方法、インプリント装置および物品の製造方法 |
CN104281747B (zh) * | 2014-09-29 | 2018-01-30 | 京东方科技集团股份有限公司 | 一种精细掩膜板张网过程分析方法 |
US10168621B2 (en) * | 2014-11-24 | 2019-01-01 | Asml Netherlands B.V. | Radiation beam apparatus |
JP6837633B2 (ja) * | 2019-03-19 | 2021-03-03 | 学校法人近畿大学 | 露光装置および露光方法 |
JP2022157836A (ja) * | 2021-03-31 | 2022-10-14 | 株式会社ジャパンディスプレイ | 蒸着マスクユニットの製造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0618220A (ja) * | 1992-07-03 | 1994-01-25 | Nikon Corp | パターン位置測定装置 |
JPH08203817A (ja) * | 1995-01-31 | 1996-08-09 | Nippon Telegr & Teleph Corp <Ntt> | X線マスクの作製方法 |
US5831272A (en) * | 1997-10-21 | 1998-11-03 | Utsumi; Takao | Low energy electron beam lithography |
JP2002270496A (ja) * | 2001-03-14 | 2002-09-20 | Sony Corp | マスクおよびその製造方法と半導体装置の製造方法 |
WO2003083913A1 (fr) * | 2002-03-28 | 2003-10-09 | Sony Corporation | Procede de correction d'un dessin de masque, procede de fabrication d'un dispositif semi-conducteur, procede de fabrication d'un masque et masque |
JP2003318084A (ja) * | 2002-04-22 | 2003-11-07 | Sony Corp | マスクパターン補正方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3892565B2 (ja) * | 1997-02-28 | 2007-03-14 | 株式会社東芝 | パターン形成方法 |
JPH11265842A (ja) * | 1998-03-17 | 1999-09-28 | Nikon Corp | 荷電粒子線露光装置 |
JP2001351854A (ja) * | 1999-10-19 | 2001-12-21 | Nikon Corp | パターン転写型荷電粒子線露光装置、パターン転写型荷電粒子線露光方法及び半導体素子の製造方法 |
JP4046012B2 (ja) * | 2003-05-29 | 2008-02-13 | ソニー株式会社 | マスク歪データの生成方法、露光方法および半導体装置の製造方法 |
-
2002
- 2002-11-14 JP JP2002331090A patent/JP3791484B2/ja not_active Expired - Fee Related
-
2003
- 2003-11-13 CN CNA2003801085257A patent/CN1735959A/zh active Pending
- 2003-11-13 EP EP03772739A patent/EP1564793A4/en not_active Withdrawn
- 2003-11-13 KR KR1020057008110A patent/KR20050074552A/ko not_active Application Discontinuation
- 2003-11-13 US US10/534,917 patent/US7456031B2/en not_active Expired - Fee Related
- 2003-11-13 WO PCT/JP2003/014460 patent/WO2004044968A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0618220A (ja) * | 1992-07-03 | 1994-01-25 | Nikon Corp | パターン位置測定装置 |
JPH08203817A (ja) * | 1995-01-31 | 1996-08-09 | Nippon Telegr & Teleph Corp <Ntt> | X線マスクの作製方法 |
US5831272A (en) * | 1997-10-21 | 1998-11-03 | Utsumi; Takao | Low energy electron beam lithography |
JP2002270496A (ja) * | 2001-03-14 | 2002-09-20 | Sony Corp | マスクおよびその製造方法と半導体装置の製造方法 |
WO2003083913A1 (fr) * | 2002-03-28 | 2003-10-09 | Sony Corporation | Procede de correction d'un dessin de masque, procede de fabrication d'un dispositif semi-conducteur, procede de fabrication d'un masque et masque |
JP2003318084A (ja) * | 2002-04-22 | 2003-11-07 | Sony Corp | マスクパターン補正方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1564793A4 * |
Also Published As
Publication number | Publication date |
---|---|
US20060151710A1 (en) | 2006-07-13 |
JP2004165500A (ja) | 2004-06-10 |
KR20050074552A (ko) | 2005-07-18 |
JP3791484B2 (ja) | 2006-06-28 |
EP1564793A4 (en) | 2010-01-13 |
CN1735959A (zh) | 2006-02-15 |
US7456031B2 (en) | 2008-11-25 |
EP1564793A1 (en) | 2005-08-17 |
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