WO2003102562A1 - Dispositif de macro-illumination - Google Patents

Dispositif de macro-illumination Download PDF

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Publication number
WO2003102562A1
WO2003102562A1 PCT/JP2003/006672 JP0306672W WO03102562A1 WO 2003102562 A1 WO2003102562 A1 WO 2003102562A1 JP 0306672 W JP0306672 W JP 0306672W WO 03102562 A1 WO03102562 A1 WO 03102562A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
illumination
light source
optical fiber
lens
Prior art date
Application number
PCT/JP2003/006672
Other languages
English (en)
Japanese (ja)
Inventor
Kazuhiro Kanzaki
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to JP2004509397A priority Critical patent/JP3973659B2/ja
Priority to KR1020047001014A priority patent/KR100738741B1/ko
Priority to CN038007452A priority patent/CN1537225B/zh
Publication of WO2003102562A1 publication Critical patent/WO2003102562A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06126—Large diffuse sources

Definitions

  • the present invention relates to a macro illumination device which illuminates at the time of macro inspection of an object such as a semiconductor wafer or a glass substrate of a flat panel display (hereinafter referred to as FPD), for example.
  • FPD flat panel display
  • Fig. 16 is a block diagram of Japanese Patent Application No. 2 0 0 2-5 2 1 9 6 1 No. (First basic application No. 2 Japanese Patent Application No. 2 0 0 0-2 5 3 9 2 4 It is a block diagram of the macro illumination device described in August 24).
  • a holder 2 is provided in the inside of the apparatus body 1 which is not known.
  • a glass substrate 3 used for FPD such as L C D is held on the holder 2.
  • This glass substrate 3 has a large F.sub.P D, for example, having a size larger than 1000 mm which can be chamfered four or six.
  • the holder 2 is rotatably supported at its central portion, and can be pivoted or turned in a predetermined angle range around this support portion.
  • a plurality of illumination light systems for example, a total of four illumination light sources 4 in total are provided on the front, rear, left, and right.
  • a plurality of, for example, four reflection mirrors 5 in total at the front, rear, left, and right are arranged at an angle by a predetermined angle corresponding to the illumination light source 4.
  • the divided light collecting optical systems 6 R and 6 F are arranged.
  • the focusing optical systems 6 R and 6 F are arranged in two rows in the front-rear direction of the apparatus main body 1, such as the first and second Fresnel lenses 61 and 62.
  • a plurality of illumination light sources 4 and 8 are respectively disposed above the device body.
  • Each illumination light output from these illumination light sources 4 is reflected by each reflection mirror 5 and enters each of four focusing optical systems 6 R and 6 F.
  • These condensing optical systems 6 R and 6 F form each illumination light into each convergent light 7, and uniformly irradiate the entire area of the large glass substrate 3.
  • the glass substrate 3 is illuminated with each convergent light 7, and scratches, dirt and the like on the surface are visually inspected for macroscopic inspection.
  • the irradiation areas become larger as the glass substrate 3 becomes larger, the light path of the illumination optical system becomes longer. For this reason, it becomes difficult to arrange the illumination optical system in the space of the limited apparatus body 1.
  • each reflection mirror 5 it is necessary to arrange each reflection mirror 5 between each illumination light source 4 and each condensing optical system 6 R, 6 F. For this reason, the area of each reflection mirror 5 can not be increased due to the relationship with the size of the apparatus body 1 or the like.
  • a light source unit that outputs illumination light
  • a converging lens that converges the illumination light output from the light source unit
  • a convergent light from a converging lens are scattered and irradiated onto the object Or, let the convergence light from the convergence lens pass through and illuminate the object.
  • Convergence ⁇ Scattering switching unit and at least at least a light source and convergence lens
  • a macro illumination device comprising: an illumination area moving mechanism for moving an illumination area by scattered light or focused light on an object by moving in a two-dimensional manner.
  • FIG. 1 is an external appearance block diagram of a macroscopic inspection apparatus to which the first embodiment of the macro illumination device according to the present invention is applied.
  • FIG. 2 is a block diagram of the basic concept of the projector according to the present invention.
  • FIG. 3 is a specific block diagram showing a first embodiment of the microphone according to the present invention.
  • FIG. 4 is a configuration diagram of the illumination area moving mechanism in the first embodiment of the macro illumination device according to the present invention, viewed from above.
  • FIG. 5 is a view showing the area of irradiation of a four-cornered glass substrate with respect to the glass substrate according to the first embodiment of the present invention.
  • FIG. 6 is a diagram showing the irradiation area of the laser beam to the glass substrate with six corners in the first embodiment of the lighting device according to the present invention.
  • FIG. 7 is a block diagram of a lighting box in a second embodiment of the macro lighting device according to the present invention.
  • FIG. 8 is a block diagram of a lighting box in a third embodiment of a projector according to the present invention.
  • FIG. 9 is a block diagram of a lighting box in a fourth embodiment of the projector according to the present invention.
  • FIG. 10 is a block diagram of a light source group and a lighting box in a fifth embodiment of the projector according to the present invention.
  • FIG. 11 is a block diagram showing a modification of the fifth embodiment of the macro illumination device according to the present invention.
  • Fig. 12 shows the arrangement of each filter on the rotating plate in a variation of the same device.
  • FIG. 13 is a block diagram showing a modification of the fifth embodiment of the projector according to the present invention.
  • Figure 14 shows the N D filter on the rotating plate in a variation of the same device.
  • FIG. 15 is a block diagram showing a sixth embodiment of the projector according to the present invention.
  • Figure 16 is a block diagram of the conventional lighting system.
  • Figure 1 shows the appearance of the macroscopic examination system.
  • a swingable holder 2 is provided in the device body 20. On this holder 2, for example, a large glass substrate 3 for 4 chamfers and 6 chamfers is held. In Fig. 1, holder 2 is raised by inspector Q side.
  • a light source 2 3 is provided in the illumination box 2 2 which is a housing.
  • This lighting box 2 2 is movable in the xy plane.
  • a Fresnel lens 2 4 is provided as a convergence lens.
  • the convergence lens in addition to Fresnel lenses, large-aperture convex lenses and small-aperture
  • the convex lenses of the lens may be arranged in a matrix.
  • This Fresnel lens 2 4 may be of one type as long as it has an optical action to converge the illumination light output from the light source 2 3, or a two-lens type that forms a collimated luminous flux and a convergent luminous flux. Good.
  • a transmissive liquid crystal scattering plate 2 5 is provided as a scattering means.
  • the liquid crystal scattering plate 25 is disposed substantially parallel to the Xy plane.
  • the liquid crystal scattering plate 25 has an operation of irradiating the glass substrate 3 with the scattered light s in which the convergent light c output from the illumination box 22 is scattered in a semi-transparent state, and in a transparent state. Then, the action of scattering the convergent light c can be released, and the action of transmitting the convergent light c as it is to irradiate the glass substrate 3 can be switched.
  • the liquid crystal scattering plate 2 5 can be switched to either scatter the convergent light c output from the illumination box 2 2 or to pass the convergent light c as it is. .
  • the illumination box 2 2 moves in the X and Y directions in order to irradiate the scattered light s or the convergent light c to the area on the glass substrate 3 where the macro inspection is desired.
  • the top of the glass substrate 3 is macro-illuminated with the scattered light s or the convergent light c, and flaws and dirt on the surface of the glass substrate 3 are visually inspected by the inspector Q for inspection.
  • One or more light sources 2 3 are provided. In the illustrated example, one light source 2 3 is mounted. Light source 2 3 is shown in Figure 1 It is provided at an easily replaceable place in the storage body 20, for example, at the lower part of the rear or front side of the apparatus body 20.
  • the light source 2 3 may be provided with a plurality of the same type, and may be switched to a new spare light source 2 3 when the light source 2 3 in use becomes out of life or becomes unusable. Also, a plurality of light sources 2 3 may be provided, and these light sources 2 3 may be lighted simultaneously. Furthermore, a plurality of light sources 2 3 may be provided, and these light sources 2 3 may be individually selected, or a plurality of types may be simultaneously selected and lit.
  • One end of the optical fiber 2 6 is connected to the light source 2 3, and the other end is connected to the illumination box 2 2.
  • the other end of the optical fiber 2 6 is inserted into the illumination box 2 2.
  • a lens 2 7 is provided at the exit of the other end of the optical fiber 2 6. The part inserted in the lighting box 2 2 of the optical fiber 2 6 is fixed so that the position of the exit does not shift.
  • the illumination area moving mechanism 2 8 has an X Y stage function to move the illumination box 2 2 into the X y plane.
  • An opening 3 0 is formed in the base 2 9.
  • a step 31 is formed at the edge of the opening 30.
  • a liquid crystal scattering plate 25 is provided on the step 31.
  • An opening 3 0 is formed in the base 2 9.
  • Two straight line guides 3 2 and 3 3 are provided parallel to each other in the y direction along opposing sides of the opening 30 of the base 2 9.
  • a Y stage 36 is provided so as to be movable in the y direction via the movable parts 34 and 35, respectively.
  • one straight guide 3 3 Ball screws 3 7 are provided in the row. Both ends of the pole screw 3 7 are rotatably supported by the support portions 3 8 and 3 9. A Y stage 3 6 is connected to the pole screw 3 7 through a screwing support 40.
  • One end of the pole screw 3 7 is connected to the axis of the y-direction motor 4 1.
  • the y-direction motor 4 1 rotates the ball screw 3 7 forward and reverse.
  • a rotary encoder 4 2 is provided on the y-direction motor 4 1 and is used.
  • the rotary encoder 4 2 outputs a pulse signal p y according to the rotation of the y-direction motor 4 1.
  • a quadrilateral opening 4 3 is formed in the Y stage 3 6. At least the length in the X direction of the opening 43 is longer than the length in the X direction of the opening 30 on the base 2 9.
  • Two straight guides 4 4 and 4 5 are provided parallel to each other in the X direction along the two opposing sides of the opening 4 3 of the Y stage 3 6.
  • an X stage 4 8 is movably provided in the X direction via the movable portions 4 6 and 4 7.
  • a Bonore screw 4 9 is provided in parallel to one straight guide 4 4. Both ends of the ball screw 4 9 are rotatably supported by the supports 50 and 5 1.
  • the X stage 4 8 is connected to the pole screw 4 9 through a screwing support 5 2.
  • the shaft of the X direction motor 5 3 is connected to one end of the pole screw 4 9.
  • a rotary encoder 54 is provided on the X-direction motor 5 3. This rotary encoder 5 4 is for the rotation of the X direction motor 5 3 Outputs the corresponding pulse signal p X.
  • An opening 5 5 is formed in the X stage 4 8.
  • a lighting box 2 2 is provided at the top of the opening 5 5.
  • An operation panel 5 6 is provided on the front side of the device body 20.
  • the operation panel 5 6 includes an operation switch group for setting each lighting mode for the glass substrate 3, an operation switch SW 2 for instructing turning on or off of the light source 2 3, and a liquid Operation switch SW 3 for giving an instruction to switch the crystal scattering plate 25 to either a semitransparent state (scattering convergent light c) or a transparent state (passive convergent light c as it is) .
  • Operation switch group SW i is an automatic scan ASW for automatically scanning the area of macro illumination on a preset glass substrate 3 and the automatic scan A SW of this automatic scan.
  • 4 position switch FSW for positioning, and a position position switch which automatically moves the macro illumination area on the glass substrate 3 to any spot position by assigning it to a plurality of spot positions, for example, nine spot positions. It includes SW, Joystick J S for manual operation of the area of macro illumination on the glass substrate 3, track bone r T B and mouse M.
  • the drive control unit 5 7 is an automatic scan switch ASW of the operation switches on the operation panel 5 6, a stop switch GW, a 4-way switch FSW, and a 9 position switch PSW. , Or Operation of the joystick JS, Truck Bonore TB, Mouse M Outputs each drive control signal to x-direction motor 5 3 and y-direction motor 4 1 according to the instruction.
  • the drive control unit 5 7 is used for each of the rotary encoders 5 4 and 4 when the macro illumination area on the glass substrate 3 instructed by the operation switch group SW is to be subjected to the macro illumination.
  • Each output pulse signal px, py of two powers is counted, and the contour value of these contours, etc.
  • the drive control signals to be moved to the area are output to the X direction motor 53 and the y direction motor 4 1.
  • the drive control unit 5 7 turns on or off the light source 2 3 in response to the instruction operation of the operation switch SW 2 , and the liquid crystal scattering in response to the instruction operation of the operation switch SW 3. It works to switch the plate 25 to either a semi-transparent state (scattering convergent light c) or a transparent state (passing convergent light c as it is).
  • a large glass substrate 3 of, for example, four chamfers shown in FIG. 5 or six chamfers shown in FIG. 6 is held on a holder 2 in the apparatus body 20.
  • the operator Q on the operation panel 5 6 operates the operation switch SW 2 to instruct lighting of the light source 2 3, and the manual operation on the joint JS allows manual operation on the glass substrate 3.
  • these operation instructions are sent to the drive control unit 5 7.
  • the drive control unit 5 7 outputs drive control signals to the X-direction motor 5 3 and the y-direction motor 4 1 in response to the manual operation on the joint JS.
  • the X direction motor 5 One or both of the 3 or y direction motor 4 1 is driven, and in response thereto, the X stage 4 8 moves in the X direction, and the Y stage 3 6 moves in the y direction.
  • the movement of the X stage 4 8 and the Y stage 3 6 causes the illumination box 2 2 to move above the macro illumination area on the glass substrate 3 instructed by the operation of the joint JS. .
  • the light source 2 3 and the light box 2 2 are connected by a flexible bendable optical fiber 2 6. It does not affect movement.
  • an instruction to turn on the light source 2 3 is given by the operation of the operation switch SW 2 on the operation panel 5 6 so that the drive control unit 5 7 turns on the light source 2 3.
  • the illumination light output from the light source 2 3 is transmitted through the optical fiber 2 6 to reach the lens 2 7 in the illumination box 2 2, and is transmitted through the lens 2 7 through the Fresnel lens
  • the effective area of the lens 2 4 is efficiently irradiated.
  • the illumination light irradiated to the Fresnel lens 24 is converged by the Fresnel lens 24, and the convergent light c shown in FIG. It passes through the opening 4 3 of the stage 3 6 and enters the liquid crystal scattering plate 2 5.
  • the drive control unit 5 7 causes the liquid crystal scattering plate 2 to Repeat 5 to make it semitransparent.
  • the liquid crystal scattering plate 2 5 scatters the incident convergent light c. To emit.
  • This scattered light s is irradiated onto the surface of the glass substrate 3 as shown in FIG. In this state, the inspector Q observes the light from the glass substrate 3 and performs the macro inspection on the surface of the glass substrate 3.
  • the drive control unit 5 7 causes the liquid crystal scattering plate 25 to Repeat operation to be transparent.
  • the convergent light c passes through the liquid crystal scattering plate 25 as it is and is irradiated onto the surface of the glass substrate 3.
  • the inspector Q observes the light from the glass substrate 3 and performs mask inspection on the surface of the glass substrate 3.
  • the holder 2 holding the glass substrate 3 is moved in the direction of rising up toward the inspector Q
  • the irradiation angle of the scattered light s or the convergent light c to the glass substrate 3 can be varied. This makes it easy to inspect a defect on the glass substrate 3.
  • W indicates the macro-irradiated area due to the scattered light s.
  • the macro irradiated area W is, for example, chamfered by the manual operation of the joint JS by the inspector Q. Move in the order of area 3 a to 3 a 6 .
  • the glass substrate 3 flowing to the L CD manufacturing line can be arbitrarily extracted and can be performed on this glass substrate 3.
  • the macro irradiation area W is not limited to move in order of each chamfered area 3 a to 3 a 4 of the 4 chamfered glass substrate 3, for example. You can move to any chamfered area, for example, chamfered area 3 a, and inspect only the chamfered area you want to inspect.
  • the sizes of the four chamfers and the six chamfers of the glass substrates 3 are different. This ensures that the size of the edge region 3 a ⁇ 3 a 4 is the glass substrate 3 of Ri taken four surfaces, also large Ri by the size of each edge region 3 a ⁇ 3 a 6 on the glass substrate 3 of 6 chamfered .
  • the size of the macro-irradiated area is larger than the size of each chamfered area 3 a to 3 a 4 in the largest 4-round glass substrate 3, the 4-chamfered area and the 6-chamfered area For each chamfered area 3 ai to 3 a 4 , 3 a to 3 a 6 of each glass substrate 3 of It is possible to irradiate the laser beam irradiation area W.
  • the size of one chamfered area 3 a is smaller than that of the 4-chamfered glass substrate 3. Therefore, as shown in FIG. 6, for example, when the macro irradiated area W is moved to the approximate center of the chamfered area 3 ai, the macro illumination light is also irradiated to the lower beveled area 3 a 4. There is a case. In this case, if the macro illumination light is illuminated on the entire surface of the 6 chamfered areas 3a to be focused on, the macro inspection will not be affected.
  • the scan path for automatically scanning the macro illumination light on the glass substrate 3 is preset for each of the four-chamfered and six-chamfered glass substrates 3.
  • the chamfered areas 3 ai to 3 a 6 are in the order.
  • each chamfering area 3 a to 3 a 4 (3 & 1 to 3 & 6 ) to which the macro-irradiation area W is moved is the size of each glass substrate 3 of 4 chamfers or 6 chamfers. It can be determined by the information of 4 chamfers or 6 chamfers.
  • the laser irradiation area W moves in the order of each chamfer area 3 ai to 3 a 4 with respect to the 4-chamfered glass substrate 3.
  • move in order of each chamfered area 3a to 3a 6 It is preferable to set the positions of each chamfered area 3 ai to 3 a 4 (3 ai to 3 a 6 >) by setting each of four or six position pieces to be usable.
  • the 9 position accuracy PSW when operating the 9 position accuracy PSW, operate the position accuracy corresponding to each chamfered area for which a macroscopic inspection is desired on the 4-chamfered or 6-chamfered glass substrate 3.
  • the macro-irradiated area W can be automatically moved to the desired chamfered area only by itself.
  • the position switch PSW conforms to the chamfer of the glass substrate 3. For example, in the case of 4 chamfers, 4 positions of 2 ⁇ 2 are used. In the case of 6 chamfers, 2 positions of 6 positions of 2 ⁇ 3 are used. You may use a touch.
  • the movement of the laser irradiation region W with respect to the glass substrate 3 can be applied not only to the scattered light s but also to the convergent light c.
  • the illumination area moving mechanism 2 8 for moving the illumination box 2 2 for emitting the macro illumination light in the xy direction has two axes in the x direction and y direction. Can simplify the configuration.
  • Mac because a small-sized macro illumination optical system that irradiates each chamfered area 3 a to 3 a 4 or 3 ai to 3 a 6 of a large-sized glass substrate 3 is adopted, Mac has a wide range of irradiation as in the prior art.
  • the illumination light path can be shortened compared to the illumination optical system, and the reflection mirror used conventionally can be eliminated. This makes it possible to miniaturize the entire macro illumination system.
  • the macro illumination light has a convergence lens 14 Do.
  • the laser light illumination area W is continuously moved along the scanning path at a low speed on the glass substrate 3. it can.
  • the light source 2 3 can be moved stepwise between each chamfered area 3 & 1 to 3 a 4 (3 & 1 to 3 a 6 ) while the light source 2 is operated. Ru.
  • the macro irradiation region W moves in the X direction, one X direction, y direction or one y direction with respect to each glass substrate 3 of 4 chamfers or 6 chamfers. Do. As a result, by operating the four-directional switch FSW, the laser irradiation region W is subjected to macro inspection on the glass substrate 3 in any of the optional chamfered regions 3 ai to 3 a 4 (S a S ae). It can move.
  • the position switch PSW divides the surface of the glass substrate 3 into a plurality of areas, and assigns position switches to these area positions.
  • a 3 x 3 9 position switch PSW is used, and it corresponds to 4 chamfers or 6 chamfers. Since it only passes through the lens 2 4) and the liquid crystal scattering plate 2 5, the illuminance of the macro illumination light on the glass substrate 3 can be increased. This makes it easy to detect defects on the glass substrate 3 and provides appropriate illumination for macro inspection.
  • the light source 23 and the drive control unit 5 7 are provided on the lower part of the rear side or front side of the device body 20, particularly on the front side of the device body 20, maintenance by the inspector Q can be facilitated. .
  • the auto scan switch ASW of the operation switch group S When inspecting the glass substrate 3 at the macro opening, the auto scan switch ASW of the operation switch group S, the position of the position switch PSW according to the operation instruction of the macro illumination area W on the glass substrate 3 Auto scan, joint stand JS, track ball TB, 4-directional switch FSW manual operation to open an area on the beveled area on any chamfer you want to inspect You can move W.
  • the auto scan switch ASW of the operation switch group S When inspecting the glass substrate 3 at the macro opening, the auto scan switch ASW of the operation switch group S, the position of the position switch PSW according to the operation instruction of the macro illumination area W on the glass substrate 3 Auto scan, joint stand JS, track ball TB, 4-directional switch FSW manual operation to open an area on the beveled area on any chamfer you want to inspect You can move W.
  • the liquid crystal scattering plate 25 is in a semitransparent state and the convergent light c is scattered or in a transparent state, the convergent light c is switched as it is. By irradiating the scattered light s or the convergent light c and performing the macro inspection, the defect on the glass substrate 3 can be reliably detected.
  • the flare lens 2 4 may be designed to be placed at another position instead of being provided to the illumination box 2 2.
  • the lens 2 7 at the tip of the light fiber 2 6 may have been removed.
  • Illumination region moving mechanism 2 8 for moving the illumination box 2 2 X y direction may be the configuration with other linear Akuchiyueta such re linear motors.
  • Convergent lenses (Flennel lens 2 4) prepare multiple ones with different illumination angles. Then, these convergent lenses are exchanged according to the size of the glass substrate 3 and the size of the chamfered area. Thus, the size of the illumination area W can be appropriately changed in accordance with the size of the glass substrate 3 and the size of the chamfered area.
  • Fig. 7 is a block diagram of the illumination box 2 2 in the inspection apparatus for the mouth of a mouth.
  • a liquid crystal scattering plate 25 is physically provided below the Fresnel lens 24 in the illumination box 22.
  • scattering from the illumination box 2 2 can be performed by switching between scattering of the convergent light c or switching of the convergent light c as it is, for the liquid crystal scattering plate 25. It can emit light s or convergent light c.
  • liquid crystal scattering plate 25 smaller than the large liquid crystal scattering plate 25 used in the first embodiment can be used, so that the entire apparatus can be reduced in weight and size. become.
  • This downflow DF is the opening 5 of X stage 4 8 5 5 power Y It flows on the glass substrate 3 surface through the opening 3 4 of stage 3 6 and the opening 3 0 of base 2 9. This makes it possible to remove dust and the like on the three sides of the glass substrate.
  • a white translucent scattering plate may be provided so as to be able to be separated from the light path of the convergent light c emitted from the illumination box 22.
  • Figure 8 is a block diagram of the lighting box 2 2 in the macro inspection system.
  • a zoom lens 60 is provided at the exit of the other end of the optical fiber 2 6.
  • the other end of the optical pin 2 6 is provided on the rack and pinion 6 1 as an up and down mechanism.
  • This rack 6 1 moves the other end of the optical fiber 2 6 up and down in the z direction.
  • the zoom lens 60 narrows the radiation angle of the illumination light as the other end of the optical fiber 2 6 is moved upward by the rack and pinion 6 1, and the other end of the optical fino 2 6 is Increase the radiation angle 0 of the illumination light as you move it downward. This makes it possible to adjust the size of the illumination area W irradiated onto the glass substrate 3.
  • FIG 9 is a block diagram of the lighting box 2 2 in the macro inspection system.
  • a evacuation space 7 0 is formed in the illumination box 2 2.
  • a sliding movement mechanism 7 2 is provided between the inside of the evacuation space 70 and the optical path of the illumination light emitted from the emission port of the optical fiber 2 6. This slide type moving mechanism 7 2 brings the filter 7 1 into and out of the light path of the illumination light.
  • This filter 7 1 is, for example, a color filter or an N D filter.
  • the filter 7 1 is inserted into the light path in the lighting box 2 2 as necessary.
  • the illumination light on the glass substrate 3 is given a desired color by the color filter or is reduced by the N D filter.
  • the filter 7 1 may be a combination of convex lenses and concave lenses of various lenses, and a combination of these convex lenses and concave lenses.
  • a liquid crystal scattering plate 25 may be integrally provided in the illumination box 22 so that the scattered light s or the convergent light c can be emitted from the illumination box 22.
  • a desired color can be added to the scattered light s or the convergent light c by the color filter, or the light can be reduced by the ND finetor.
  • Figure 10 is a block diagram of the light source group and the illumination box 2 2 in the macroscopic examination device.
  • Two light sources 2 3-1 and 2 3-2 as light source groups are the same type or different types from each other.
  • each light source of the same kind 2 3 – 1 and 2 3 – 2 is used.
  • the branched optical fiber 2 6 — 1 includes two branched light fibers 2 6 a and 2 6 b connected to two light sources 2 3 ⁇ 1 and 2 3 ⁇ 2 respectively. It consists of an optical fiber 2 6 c composed of Gifu Fino 2 6 a and 2 6 b and a force.
  • One of these light sources 2 3-1 and 2 3-2 lights up, or both of them light up simultaneously.
  • a rotating body 7 2 is provided in the illumination box 22.
  • a plurality of filters 7 1 or various lenses and holes are provided concentrically on the rotary body 7 2.
  • Each filter 7 1 is, for example, a color filter / reflector or an N D filter.
  • the rotating body 7 2 is provided to the motor 7 3.
  • the rotating body 72 is driven by the motor 73, and the optical path of the illumination light emitted from the output port of the optical fiber 26c through the filters 71 and various lenses and holes. Selectively insert and remove.
  • the respective illumination lights emitted from the two light sources 2 3 1 and 2 3 2 are combined by the branched optical fiber 2 6 1 1 and emitted from the emission port. Ru.
  • This illumination light is
  • the convergent light (Fernel lens 2 4) forms convergent light c and enters the liquid crystal scattering plate 25. Then, the convergent light c is irradiated on the surface of the glass substrate 3 as the scattered light s or the convergent light c by the liquid crystal scattering plate 25.
  • the brightness on the three glass substrates at this time can be made bright by using two light sources 2 3 1 1 2 3 2.
  • one of the two light sources 2 3 1 and 2 3 2 may be turned on, and if it reaches the end of its life, it may be switched to the other new light source.
  • the filter 7 1 is inserted into the light path in the illumination box 2 2 as required by the rotational drive of the motor 7 3. As a result, the illumination light on the glass substrate 3 is given a desired color by the color filter or is reduced by the ND filter.
  • a convex lens, a concave lens, or a combination of these convex lenses and concave lenses may be inserted among various lenses.
  • the illumination light emitted from each of the two light sources 23-1 and 23-2 is combined with the branched light fino 2 6-1 and illuminated.
  • the brightness on the three glass substrates can be made brighter.
  • an ND filter is inserted in the illumination box 22 to control the brightness on the glass substrate 3 surface, the brightness can be efficiently adjusted to match the macro inspection of the glass substrate 3.
  • Adjustment of the brightness on the surface of the glass substrate 3 may be performed by lighting one or both of the two light sources 2 3 1 1 and 2 3 2.
  • two light sources 2 3-1 and 2 3-2 are usually provided by lighting one of the light sources 2 3-1 or 2 3-2. If this light source 2 3-1 or 2 3-2 fails, the other light source 2 3-2 or 2 3-1 can be turned on and backed up.
  • the fifth embodiment may be modified as follows.
  • a rotating plate 7 4 is provided on the rotating shaft of the motor 7 3.
  • a plurality of filters 7 5 to 7 8 are provided on the rotary plate 7 4 as shown in FIG.
  • Each of these filters 75 to 78 is, for example, a color filter (red, blue, orange, etc.).
  • color filters may not be provided on all the rotary plates 74.
  • one place may be provided with nothing, and may be provided with an opening, or another font such as an ND finoletor may be provided.
  • another rotating plate 7 9 may be provided facing the rotating plate 7 4. The rotating plate 7 9 may be connected to the motor 80 for rotation.
  • one rotary plate 74 is provided with color filters 75 to 78 such as red, blue, orange, etc.
  • the other rotary plate 79 is an ND filter 8 1 shown in FIG.
  • the N D filter 8 1 the N D value (0% to 100%) changes continuously along the circumferential direction.
  • the light source 2 3 is not limited to two, plurality May be.
  • Figure 15 shows the configuration of the macro illumination system.
  • An opening 9 1 is formed at the bottom of the lighting box 90.
  • a flare lens 2 4 is provided in the opening 9 1.
  • a liquid crystal scattering plate 25 is provided below the Fresnel lens 24.
  • the liquid crystal scattering plate 2 5 may be integrally provided in the illumination box 90 or may be provided in the illumination area moving mechanism 2 8 shown in FIG.
  • a reflective mirror 92 is provided at an angle.
  • a first light source box 93 is formed on the side of the lighting box 90.
  • the first light source box 93 is formed with the opening facing the reflection mirror 92 side.
  • a Na lamp is provided as a first light source 94.
  • a second light source box 95 is provided integrally with the lighting box 90 adjacent to the lighting box 90.
  • a halogen lamp is provided as a second light source 96.
  • Respective rotary plates 74 and 79 are provided on the optical path of the illumination light emitted from the second light source 96.
  • the rotary plate 7 4 is provided with a plurality of filters 7 5 to 7 8 such as red, blue and orange.
  • the rotary plate 7 9 is provided with an N D filter 8 1 for writing.
  • a light fino 2 6 is connected between the second light source box 9 5 and the lighting box 9 0.
  • This optical fiber 2 6 is a second light source 9
  • the illumination light emitted from 6 is transmitted to the illumination box 90 and emitted toward the reflective mirror 92 side in this illumination box 90.
  • the illumination light emitted from the halogen lamp passes through each of the filters 7 5 to 7 8 and the ND filter 8 1 to be transmitted as a light source. It enters No. 2 6.
  • the illumination light transmitted through the optical fiber 1 26 is emitted through the lens 2 7, is reflected by the reflection mirror 2 2, and is transmitted through the lens 2 4 and the liquid crystal scattering plate 2 5. It is illuminated on the glass substrate 3.
  • the illumination light emitted from the first light source 94 and the illumination light emitted from the second light source 96 have different wavelengths.
  • the defect portion detected by the illumination by the Na lamp and the illumination by the lamp lamp are detected.
  • the target defect can be detected by turning on the Na lamp or the halogen lamp depending on the type of defect.
  • the illumination light emitted from the halogen lamp can be colored as desired by the filters 7 5 to 7 8 and can be reduced by the N D filter 8 1.
  • the length of the optical fiber 26 can be shortened.
  • the present invention relates to a semiconductor wafer, LCDs and Purazumade Lee spray Nono-zero value Norre of any hula Tsu door Bruno,. It can be used for macro illumination when performing macro inspection of the glass substrate of the nell display.

Abstract

Un dispositif de macro-illumination comprend une source de lumière (23), une lentille de Fresnel (24) destinée à faire converger la lumière d'illumination en sortie de la source de lumière (23), une plaque de diffusion (25) à cristaux liquides destinée à commuter entre la diffusion d'une lumière d'illumination et sa transmission, un mécanisme (28) de mouvement de zone d'illumination déplaçant une boîte d'illumination (22) contenant une extrémité de sortie en fibre de verre (26) ainsi que la lentille de Fresnel (24) d'une manière intégrée, afin de déplacer une zone de macro-illumination (W) sur une face d'une plaque de base en verre (3).
PCT/JP2003/006672 2002-05-31 2003-05-28 Dispositif de macro-illumination WO2003102562A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004509397A JP3973659B2 (ja) 2002-05-31 2003-05-28 マクロ照明装置
KR1020047001014A KR100738741B1 (ko) 2002-05-31 2003-05-28 마크로 조명 장치
CN038007452A CN1537225B (zh) 2002-05-31 2003-05-28 宏观照明装置

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Application Number Priority Date Filing Date Title
JP2002160491 2002-05-31
JP2002-160491 2002-05-31

Publications (1)

Publication Number Publication Date
WO2003102562A1 true WO2003102562A1 (fr) 2003-12-11

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JP (1) JP3973659B2 (fr)
KR (1) KR100738741B1 (fr)
CN (1) CN1537225B (fr)
TW (1) TWI274183B (fr)
WO (1) WO2003102562A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194755A (ja) * 2005-01-14 2006-07-27 Hitachi High-Tech Electronics Engineering Co Ltd 基板検査装置及び基板検査方法
JP2006208084A (ja) * 2005-01-26 2006-08-10 Toppan Printing Co Ltd 周期性パターンのムラ検査装置
JP2006234721A (ja) * 2005-02-28 2006-09-07 Olympus Corp 外観検査装置及び外観検査方法
JP2006349576A (ja) * 2005-06-17 2006-12-28 Moritex Corp 反射光及び透過光による目視検査用照明装置
GB2437544A (en) * 2006-04-28 2007-10-31 Gary M Holloway Inspection device for optically complex surfaces
JP2010261849A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体の評価方法
JP2010261847A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体評価システム
JP2010261848A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体の評価方法
JP2011017708A (ja) * 2010-08-04 2011-01-27 Hitachi High-Technologies Corp 基板検査装置及び基板検査方法
JP2015034744A (ja) * 2013-08-08 2015-02-19 住友化学株式会社 欠陥検査装置及び光学表示デバイスの生産システム
JP2021096193A (ja) * 2019-12-18 2021-06-24 トヨタ紡織株式会社 繊維構造体の検査装置及び検査方法
JP7399906B2 (ja) 2020-04-10 2023-12-18 コグネックス・コーポレイション 可変拡散板を利用した光学システム

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05232040A (ja) * 1992-02-19 1993-09-07 Olympus Optical Co Ltd 外観検査用投光装置
JPH05281147A (ja) * 1992-03-30 1993-10-29 Nagase & Co Ltd カラーフィルターの検査方法、装置及びそれに使用する光源
JPH08327554A (ja) * 1995-03-31 1996-12-13 Lintec Corp 照明装置
JP2000097864A (ja) * 1998-09-21 2000-04-07 Olympus Optical Co Ltd 外観検査用投光装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW313626B (fr) * 1995-03-31 1997-08-21 Lintec Corp

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05232040A (ja) * 1992-02-19 1993-09-07 Olympus Optical Co Ltd 外観検査用投光装置
JPH05281147A (ja) * 1992-03-30 1993-10-29 Nagase & Co Ltd カラーフィルターの検査方法、装置及びそれに使用する光源
JPH08327554A (ja) * 1995-03-31 1996-12-13 Lintec Corp 照明装置
JP2000097864A (ja) * 1998-09-21 2000-04-07 Olympus Optical Co Ltd 外観検査用投光装置

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194755A (ja) * 2005-01-14 2006-07-27 Hitachi High-Tech Electronics Engineering Co Ltd 基板検査装置及び基板検査方法
JP4626976B2 (ja) * 2005-01-14 2011-02-09 株式会社日立ハイテクノロジーズ 基板検査装置及び基板検査方法
JP4655644B2 (ja) * 2005-01-26 2011-03-23 凸版印刷株式会社 周期性パターンのムラ検査装置
JP2006208084A (ja) * 2005-01-26 2006-08-10 Toppan Printing Co Ltd 周期性パターンのムラ検査装置
JP2006234721A (ja) * 2005-02-28 2006-09-07 Olympus Corp 外観検査装置及び外観検査方法
JP4633499B2 (ja) * 2005-02-28 2011-02-16 オリンパス株式会社 外観検査装置及び外観検査方法
JP2006349576A (ja) * 2005-06-17 2006-12-28 Moritex Corp 反射光及び透過光による目視検査用照明装置
GB2437544A (en) * 2006-04-28 2007-10-31 Gary M Holloway Inspection device for optically complex surfaces
JP2010261849A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体の評価方法
JP2010261847A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体評価システム
JP2010261848A (ja) * 2009-05-08 2010-11-18 Konica Minolta Holdings Inc 電子表示媒体の評価方法
JP2011017708A (ja) * 2010-08-04 2011-01-27 Hitachi High-Technologies Corp 基板検査装置及び基板検査方法
JP2015034744A (ja) * 2013-08-08 2015-02-19 住友化学株式会社 欠陥検査装置及び光学表示デバイスの生産システム
JP2021096193A (ja) * 2019-12-18 2021-06-24 トヨタ紡織株式会社 繊維構造体の検査装置及び検査方法
JP7327144B2 (ja) 2019-12-18 2023-08-16 トヨタ紡織株式会社 繊維構造体の検査装置及び検査方法
JP7399906B2 (ja) 2020-04-10 2023-12-18 コグネックス・コーポレイション 可変拡散板を利用した光学システム

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CN1537225B (zh) 2010-05-12
TWI274183B (en) 2007-02-21
TW200307817A (en) 2003-12-16
JPWO2003102562A1 (ja) 2005-09-29
KR100738741B1 (ko) 2007-07-12
JP3973659B2 (ja) 2007-09-12
KR20040088454A (ko) 2004-10-16
CN1537225A (zh) 2004-10-13

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