KR100738741B1 - 마크로 조명 장치 - Google Patents
마크로 조명 장치 Download PDFInfo
- Publication number
- KR100738741B1 KR100738741B1 KR1020047001014A KR20047001014A KR100738741B1 KR 100738741 B1 KR100738741 B1 KR 100738741B1 KR 1020047001014 A KR1020047001014 A KR 1020047001014A KR 20047001014 A KR20047001014 A KR 20047001014A KR 100738741 B1 KR100738741 B1 KR 100738741B1
- Authority
- KR
- South Korea
- Prior art keywords
- light
- substrate
- illumination
- glass substrate
- lighting box
- Prior art date
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06126—Large diffuse sources
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2002-00160491 | 2002-05-31 | ||
JP2002160491 | 2002-05-31 | ||
PCT/JP2003/006672 WO2003102562A1 (fr) | 2002-05-31 | 2003-05-28 | Dispositif de macro-illumination |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040088454A KR20040088454A (ko) | 2004-10-16 |
KR100738741B1 true KR100738741B1 (ko) | 2007-07-12 |
Family
ID=29706548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020047001014A KR100738741B1 (ko) | 2002-05-31 | 2003-05-28 | 마크로 조명 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3973659B2 (fr) |
KR (1) | KR100738741B1 (fr) |
CN (1) | CN1537225B (fr) |
TW (1) | TWI274183B (fr) |
WO (1) | WO2003102562A1 (fr) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100739343B1 (ko) * | 2004-11-29 | 2007-07-16 | 주식회사 디이엔티 | 평판 표시패널 검사장치 |
JP4626976B2 (ja) * | 2005-01-14 | 2011-02-09 | 株式会社日立ハイテクノロジーズ | 基板検査装置及び基板検査方法 |
JP4655644B2 (ja) * | 2005-01-26 | 2011-03-23 | 凸版印刷株式会社 | 周期性パターンのムラ検査装置 |
JP4633499B2 (ja) * | 2005-02-28 | 2011-02-16 | オリンパス株式会社 | 外観検査装置及び外観検査方法 |
JP2006349576A (ja) * | 2005-06-17 | 2006-12-28 | Moritex Corp | 反射光及び透過光による目視検査用照明装置 |
GB2437544A (en) * | 2006-04-28 | 2007-10-31 | Gary M Holloway | Inspection device for optically complex surfaces |
JP2010261848A (ja) * | 2009-05-08 | 2010-11-18 | Konica Minolta Holdings Inc | 電子表示媒体の評価方法 |
JP2010261847A (ja) * | 2009-05-08 | 2010-11-18 | Konica Minolta Holdings Inc | 電子表示媒体評価システム |
JP5250842B2 (ja) * | 2009-05-08 | 2013-07-31 | コニカミノルタ株式会社 | 電子表示媒体の評価方法 |
JP5178789B2 (ja) * | 2010-08-04 | 2013-04-10 | 株式会社日立ハイテクノロジーズ | 基板検査装置及び基板検査方法 |
JP6401438B2 (ja) * | 2013-08-08 | 2018-10-10 | 住友化学株式会社 | 欠陥検査装置及び光学表示デバイスの生産システム |
CN104390174B (zh) * | 2014-10-16 | 2017-03-08 | 北京凌云光技术有限责任公司 | 光源装置及使用该装置的tft‑lcd检测系统 |
CN105334230A (zh) * | 2015-11-26 | 2016-02-17 | 凌云光技术集团有限责任公司 | 用于高纵深比pcb板孔缺陷检测的光源装置 |
US9958267B2 (en) | 2015-12-21 | 2018-05-01 | Industrial Technology Research Institute | Apparatus and method for dual mode depth measurement |
CN106504653A (zh) * | 2016-12-31 | 2017-03-15 | 重庆市光利医疗科技有限公司 | 一种显示装置 |
CN106680289A (zh) * | 2017-01-25 | 2017-05-17 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板宏观检查系统 |
CN107504451B (zh) * | 2017-07-05 | 2020-05-22 | 西安理工大学 | 一种无源自然光全向采集装置及采集方法 |
CN109100901B (zh) * | 2018-10-15 | 2024-04-16 | 苏州精濑光电有限公司 | 一种宏观检查机的上灯箱 |
CN109724999A (zh) * | 2018-12-26 | 2019-05-07 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板检测装置 |
JP7327144B2 (ja) * | 2019-12-18 | 2023-08-16 | トヨタ紡織株式会社 | 繊維構造体の検査装置及び検査方法 |
KR102292547B1 (ko) * | 2020-04-10 | 2021-08-20 | 코그넥스코오포레이션 | 가변 확산판을 이용한 광학 시스템 |
CN111752003A (zh) * | 2020-07-29 | 2020-10-09 | 中国人民解放军陆军装甲兵学院 | 一种集成成像三维显示系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05232040A (ja) * | 1992-02-19 | 1993-09-07 | Olympus Optical Co Ltd | 外観検査用投光装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05281147A (ja) * | 1992-03-30 | 1993-10-29 | Nagase & Co Ltd | カラーフィルターの検査方法、装置及びそれに使用する光源 |
TW313626B (fr) * | 1995-03-31 | 1997-08-21 | Lintec Corp | |
JP4576006B2 (ja) * | 1998-09-21 | 2010-11-04 | オリンパス株式会社 | 外観検査用投光装置 |
-
2003
- 2003-05-28 WO PCT/JP2003/006672 patent/WO2003102562A1/fr active Application Filing
- 2003-05-28 JP JP2004509397A patent/JP3973659B2/ja not_active Expired - Fee Related
- 2003-05-28 CN CN038007452A patent/CN1537225B/zh not_active Expired - Fee Related
- 2003-05-28 TW TW092114435A patent/TWI274183B/zh not_active IP Right Cessation
- 2003-05-28 KR KR1020047001014A patent/KR100738741B1/ko not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05232040A (ja) * | 1992-02-19 | 1993-09-07 | Olympus Optical Co Ltd | 外観検査用投光装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20040088454A (ko) | 2004-10-16 |
TWI274183B (en) | 2007-02-21 |
JP3973659B2 (ja) | 2007-09-12 |
CN1537225B (zh) | 2010-05-12 |
CN1537225A (zh) | 2004-10-13 |
JPWO2003102562A1 (ja) | 2005-09-29 |
WO2003102562A1 (fr) | 2003-12-11 |
TW200307817A (en) | 2003-12-16 |
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