TW200307817A

TW200307817A - Macro illumination apparatus

Info

Publication number: TW200307817A
Application number: TW092114435A
Authority: TW
Inventors: Kazuhiro Kanzaki
Original assignee: Olympus Optical Co
Priority date: 2002-05-31
Filing date: 2003-05-28
Publication date: 2003-12-16
Also published as: JPWO2003102562A1; KR100738741B1; CN1537225A; JP3973659B2; WO2003102562A1; KR20040088454A; CN1537225B; TWI274183B

Abstract

The present invention comprises: a light source (23), a Fresnel lens (24) for converging the illumination light outputted from the light source (23), a liquid crystal diffusing plate (25) for switching between diffusion of illumination light and transmission thereof, an illumination-area movement mechanism (28) moving an illumination box containing an exit end of a fiber (26) and the Fresnel lens (24) in an integrated manner to move a macro illumination area (W) on a face of a glass base plate (3).

Description

200307817200307817

[ 幕行發明所屬之技術領域】 +發：係有關於’例如集體檢查半導體晶片或平面螢以下簡％為「FPD」）之玻璃基板等標的物時，用以執照明的集體照明裝置。【先前技術】圖十/、表示申凊專利2 〇〇 2 — 5 2 1 9 6 1號（首次申請專利編號2000-253924號’首次申請日期2〇〇〇年8月（24)日，未公開）上，所記載之集體照明裝置的構成圖。此未公開之裝[Technical field to which the invention belongs] +: This is a collective lighting device used to perform lighting when a subject such as a glass substrate such as a semiconductor wafer or a flat panel is collectively inspected ("FPD"). [Prior art] Figure 10 /, shows the application patent No. 2000-5 2 1 9 6 1 (the first application patent number 2000-253924 'First application date 2000 August (24), not yet The structure of the collective lighting device described in the publication). This undisclosed outfit

，主體（1々）内’叹有支撐架（h〇lder)(2);此支撐架（2)上，: 是由LCD等FPD所用的玻璃基板(3)所支撐；&玻璃基板⑺ 則^現\尺寸超過例如四倒角、六倒角1 00 0mm大型FPD ;支樓架（)是以得以在中心部自由旋轉的方式進行支撐，並以支芽4為中心’付以在規定角度範圍内進行搖動或反，轉。 ^、裝置主體上方，則設有構成照明光學系之數個各照明光源（4 )(例如：前後左右共4個）；並僅以規定角度，傾斜配f成符合這些照明光源（4)的數個各反射鏡（5)(例如·鈾後左右共4個）。 &些反射鏡（5)的反射光程上，則配置了已進行四分割之各聚^光學系（6R)、（6F);這些聚焦光學系（6R)、 (6F) ’是由第1及第2佛瑞奈凸透鏡（Fresnel lens) (61)、 (62)所構成，且2列併設於裝置主體（1)前後方向上。裝置主體上方，則各配置了數個照明光源（4 )、（ 8);There is a support frame (2) in the main body (1々); on this support frame (2): is supported by the glass substrate (3) used for LCD and other FPD; & glass substrate⑺ Then, the size is larger than, for example, a large FPD with four chamfers and six chamfers; the supporting frame () is supported in a manner that allows it to rotate freely in the center, and the supporting branch 4 is the center. Rotate or reverse within the angle range. ^ Above the main body of the device, there are several illumination light sources (4) constituting the illumination optical system (for example: a total of 4 in front, back, left, and right); and only at a predetermined angle, the f is inclined to match these illumination light sources (4). Several mirrors (5) (for example, 4 left and right after uranium). & The reflection optical paths of these mirrors (5) are provided with four focusing optical systems (6R), (6F); these focusing optical systems (6R), (6F) are The first and second Fresnel lenses (61) and (62) are formed, and two rows are arranged side by side in the front-rear direction of the device body (1). Above the device body, several illumination light sources (4), (8) are each provided;

第5頁 200307817 五、發明說明（2) 由這些照明光源（4 )所輸出的久日刀 ^ M ^ 各知明光，是用各反射鏡（5) 予以反射，再入射到4個各聚隹本風/ 少，κ展、先學糸（6R)、（6F);這歧聚Page 5 200307817 V. Description of the invention (2) The long-lived knives ^ M ^ output by the illumination light sources (4) are reflected by the respective mirrors (5) and then incident on the four respective aggregates Local style / less, κ exhibition, first learning (6R), (6F); this disagreement

焦光學系UIO、（6F〕則將各昭明* 々上 S 一 K 士 "、、听九成形為各會聚光（7 )，以均質的照射大型玻璃基板（3)的所古成a ^ ^ , , |A_ + 的所有領域；玻璃基板（3)則耢由追種方式，接收來自於各合平，，、& 1 _ 分曰來光C 7)的照明，再透過目視方式集體檢查表面上的傷痕與汗垢等。但是’要對例如超過四倒自、丄彳丨& * < ^ W角、六倒角專用i 〇〇〇mm之大型玻璃基板（3)進行集體照明時， n ^ 就兩要用到例如iL4個夂照明光源（4)、及各聚焦光學车ifn · νμ从七 ^ h、、、7U予乐)，此外， (3 )的大型化發展，而擴大各昭射户竹土 …、对項域後，就會拉長昭明弁: 子系的光程；因此，難以將照明光學系配置的妒主體（1)空間内。又丨民的裝置各照明光源（4)及各聚焦光學系（6R)、（6F)之間，必配置各反射鏡（5)，因此各反射鏡（5)的面積，盔穿晋、主體（1 )的大小關係中擴大。 …、攸裝置【内容】丄根據本發明的主要觀點來看在於，提供具備輪出昭光的光源部、及會聚來自於光源部所輸出之照明 =取透鏡、及散射來自於會聚透鏡之會聚光再照射於棹的1 ♦ 二讓來自於會聚透鏡的會聚光通過’以照射於標：合 ♦ ·散射切換部、及至少讓光源與會聚透鏡進行— 二 ::欠元移動，再藉由標的物上的散射光與會聚A :Focal optics UIO, (6F) will shape each Zhao Ming * S 上一一 K 士 ", and Tingjiu to form the convergent light (7), and uniformly illuminate the ancient glass of the large glass substrate (3) a ^ ^,, | A_ + in all areas; the glass substrate (3) is the method of catching the light, receiving the lighting from the Heping, ,, & 1 _ Min Yuelai C 7), and then collectively through the visual way Check for scratches and sweat on the surface. However, 'to collectively illuminate a large glass substrate (3) with more than four rounds, 丄彳丨 & * < ^ W angles, and six rounds for exclusive use of i 〇00mm, n ^ needs to be used For example, iL4 夂 illumination light sources (4), and each focusing optical car ifn · νμ (from 7 ^ h, ,, 7U Yule), in addition, (3) the development of large-scale development, and expand the Zhaosha household bamboo soil ..., After the entry field, Zhao Mingyan: the optical path of the child system is prolonged; therefore, it is difficult to arrange the illumination optical system in the jealous subject (1) space. In addition, the mirrors (5) must be arranged between each illumination light source (4) and each focusing optical system (6R) and (6F) in the device. Therefore, the area of each mirror (5), the helmet is worn, and the main body (1) Expand in the size relationship. .... [Content] 丄 According to the main point of the present invention, it is to provide a light source unit having a revolving light, and to converge the illumination output from the light source unit = take a lens, and scatter the condensed light from the condensing lens. Let ’s irradiate 1 again. ♦ Let the convergent light from the condensing lens pass through to illuminate the target: ♦ • The scattering switching unit, and at least let the light source and the condensing lens perform — II: The under-element moves, and then the target Scattered Light and Convergence A:

月读域之照明領域移動機構的集體照明裝置。 ACollective lighting device for mobile mechanism in the field of moon reading field. A

200307817 五、發明說明（3) 【實施方式】以下將參閱圖式的同時，針對本發明第1實施型態進行說明。圖一表示集體檢查裝置的外觀圖；裝置主體（20)内設有可搖動之支撐架（2 );此支撐架（2 )上是由，例如四倒角或六倒角專用大型玻璃基板（3)所支撐；圖一上的支撐架 (2) ’則被舉高到檢查員端。裝置主體（2 0 )上方，則設有如圖二所示之基本概念的集體照明裝置（2 1 );在框體的照明箱（2 2 )内，則設有光源 (2 3 )，此照明箱（2 2 )可朝xy平面移動；此照明箱（2 2 )的開口部上’則設有用作會聚透鏡之用的佛瑞奈凸透鏡（24); 關於會聚透鏡方面，除了佛瑞奈凸透鏡（24 )以外，也可將大口徑凸透鏡或小口徑凸透鏡，配列成數個矩陣（matrix) 狀，假使此佛瑞奈凸透鏡（24)，具有會聚來自於光源（23) 所輸出之照明光的光學作用，那麼也可只使用一片，或使用成形出2片的平行光束與會聚光束。照明箱（22)下方，則設有用作散射之用的透過型液晶散射板（25);此液晶散射板（25)幾乎與”平面平行的方式所配置而成；此液晶勒於k ( 0 C1 政射板（2 5)可切換，將來自於半透明照明箱（2 2 )所輸出之备雙朵（、 ^ . ^ A ^ r^曰先）所散射的散射光（s),照射於玻璃基板（3)的動作芬站^ Μ # U亩ϋ 及解除透明狀態之會聚光（C)的散射作用’以直接通過合命伞r 、 ^ y, 曰承九Cc)，再照射於玻璃基板（3)的動作。200307817 V. Description of the invention (3) [Embodiment] Hereinafter, the first embodiment of the present invention will be described while referring to the drawings. Figure 1 shows the external view of the collective inspection device; the main body (20) of the device is provided with a support frame (2) that can be shaken; this support frame (2) is made of, for example, a large glass substrate for four chamfers or six chamfers ( 3) Supported; the support frame (2) 'shown in Figure 1 is raised to the inspector's end. Above the main body of the device (20), there is a collective lighting device (2 1) with the basic concept as shown in Figure 2. In the lighting box (2 2) of the frame, there is a light source (2 3). This lighting The box (2 2) can be moved toward the xy plane; the opening of this lighting box (2 2) is provided with a Fresnel convex lens (24) for a converging lens; as for the converging lens, in addition to the Fresnel convex lens In addition to (24), a large-aperture convex lens or a small-aperture convex lens can also be arranged into a plurality of matrix shapes. If the Fresnel convex lens (24) has optics for converging the illumination light output from the light source (23) Function, then you can also use only one piece, or use two parallel beams and convergent beams. Below the lighting box (22), there is a transmissive liquid crystal scattering plate (25) for scattering; the liquid crystal scattering plate (25) is arranged almost parallel to the "plane"; The C1 radiant panel (2 5) is switchable, and it will illuminate the scattered light (s) scattered by the prepared double flower (, ^. ^ A ^ r ^ first) output from the translucent lighting box (2 2). On the glass substrate (3), the action fen station ^ Μ # U U ϋ and the scattering effect of the condensed light (C) that releases the transparent state 'to pass directly through the combined umbrella r, ^ y, said Cheng Jiu Cc), and then irradiate The operation of the glass substrate (3).

200307817 五、發明說明（4) 若屬於這種集體照明裝置（2 1 )，那麼液晶散射板（2 5 ) 便可以切換成，讓來自於照明箱（2 2，）所輸出之會聚光（c)進行散射，或直接通過會聚光（c)。照明箱（22)為了讓散射光（s)或會聚光（c)，照射於在玻璃基板（3)上以執行集體檢查的領域，因而移動到xy方向；因此便藉由玻璃基板（3 )上的散射光（s)，或會聚光（c) 進行集體照明，讓檢查貝（Q)得以用目視方式，對玻璃基板 (3)表面上的傷痕與汙垢等進行集體檢查。200307817 V. Description of the invention (4) If it belongs to this collective lighting device (2 1), then the liquid crystal scattering plate (2 5) can be switched to let the convergent light output from the lighting box (2 2,) ) To scatter, or directly through convergent light (c). In order to allow the scattered light (s) or condensed light (c) to illuminate the area on the glass substrate (3) to perform the collective inspection, the lighting box (22) moves to the xy direction; therefore, the glass substrate (3) is used. The scattered light (s) or condensed light (c) is used for collective illumination, so that the inspection shell (Q) can visually inspect collectively the flaws and dirt on the surface of the glass substrate (3).

接下來，將參閱圖三及圖四的同時，說明集體照明裝置（21)的具體構成方式；再者，同於圖二的部份因標有相同符號，因而省略詳細說明。. 光源（2 3 )是由1個乃至數個所設置而成；本圖式例屬於’搭載1個光源（23)的例子；光源（23)被設置於，容易在圖一所示之裝置主體（20)上進行交換的位置，例如設置於裝置主體（20)的後端或前端下方。再者’光源（2 3 )具備數個同種類物品，當使用中的光源（23)壽命已盡或無法再使用時，也可切換成全新的備用光源（23);此外，在具備數個光源（23)下，也可同時點亮這些光源（23);而且在具備數種光源（23)系統後，也可個別選擇這些光源（23)，或同時選擇數個種類以進行點燈。卜光纖（26)的一端則連接光源（23)，另一端則連接照明相（22)，光纖（26)的另一端則被插入於照明箱（22)内丨光纖（2 6 )的另一端射出口，則讯 · 則叹有透鏡C 2 7 )，被插入於照明箱（22)内的光纖（26)部份，目,,丈伯她4丄山7 則以不偏離射出口位置的方式Next, referring to Fig. 3 and Fig. 4, the specific structure of the collective lighting device (21) will be described; furthermore, the same parts as those in Fig. 2 are marked with the same symbols, so detailed explanations are omitted. The light source (2 3) is provided by one or even several; the illustration of this figure belongs to the example of 'carrying one light source (23); the light source (23) is arranged in the main body of the device shown in FIG. 1 easily. The position to be exchanged on (20) is, for example, provided below the rear end or front end of the device body (20). Furthermore, the light source (2 3) has several items of the same type. When the light source (23) in use has reached the end of its life or can no longer be used, it can also be switched to a new standby light source (23). Under the light source (23), these light sources (23) can also be lighted at the same time; and after having several light source (23) systems, these light sources (23) can also be selected individually, or several types can be selected for lighting at the same time. One end of the optical fiber (26) is connected to the light source (23), the other end is connected to the lighting phase (22), and the other end of the optical fiber (26) is inserted into the lighting box (22). The other end of the optical fiber (2 6) The exit port, then the message · There is a lens C 2 7), which is inserted into the optical fiber (26) part in the lighting box (22), and the camera does not deviate from the exit port position. the way

200307817 五、發明說明（5) 以進行固定。照明領域移動機構（28)，面移動的xy載物^、則禪有議妝明箱（22)朝xy平口（stage)功能；在基座成開口部（30);此間口 | HDaSe)(Z9)上則形 /3η · ι：μ ^ ^.〇 χ 1 σΡ(30)的邊鈿上，則形成出段差，又差（3 1 )上則設有液晶散射板（2 5 )。基1(29)上則形成出開口部（3〇) ; 2條線性滑執】U1 e 32)、（33)，則沿著基座（29)開口部（30)的對向各互為平行的方式被設置於y向；這些線性滑執（32)、此外，基座（2 9 )上則設有對一方線性滑軌（3 3)呈平行的滾珠螺桿（37);滾珠螺桿（37)的兩端，則透過各支撐部、38)、（39)以進行自由旋轉支撐；此滾珠螺桿（37)，是透過螺合支撐部（40)以連結γ載物台（36)。滾珠螺桿（3 7)的一端，被連結於y向馬達（4丨）軸；此y 向馬達（41) ’負責正轉與逆轉滾珠螺桿（3 7);此y向馬達 (41)上則設有旋轉編碼器（r〇tary enc〇der)(42);此旋轉編碼器（42)則依據y向馬達（41)的旋轉，以輸出脈衝信號 P” · Y載物台（3 6 )上則形成出四邊形開口部（4 3 );此開口部 (43)的X向長度，至少長於基座（29)上開口部（30)的X向長度。 2條線性滑軌（4 4 )、（ 4 5 )，是沿著γ載物台（3 6 )開口部 (4 3 )的對向2邊，以互為平行的方式被設置於X向；這些線200307817 V. Description of the invention (5) for fixing. Lighting field moving mechanism (28), surface moving xy carrier ^, Zezen has a makeup makeup box (22) facing the xy flat mouth (stage) function; an opening (30) is formed in the base; here the mouth | HDaSe) ( Z9) upper shape / 3η · ι: μ ^ ^. Χ 1 σP (30), a step difference is formed, and a difference (3 1) is provided with a liquid crystal scattering plate (2 5). The openings (30) are formed on the base 1 (29); 2 linear slides] U1 e 32), (33), and the opposite directions of the opening (30) of the base (29) are each other The parallel manner is set in the y direction; in addition, these linear sliders (32) and a base (2 9) are provided with a ball screw (37) parallel to a linear slide rail (33); a ball screw ( Both ends of 37) are freely supported through each of the support portions, 38), and (39); this ball screw (37) is connected to the γ stage (36) through the screwed support portion (40). One end of the ball screw (37) is connected to the shaft of the y-direction motor (4 丨); this y-direction motor (41) is responsible for the forward and reverse rotation of the ball screw (37); the y-direction motor (41) is A rotary encoder (42) is provided; this rotary encoder (42) outputs a pulse signal P "according to the rotation of the y-direction motor (41) · Y stage (3 6) A quadrangular opening (4 3) is formed on the top; the X-direction length of this opening (43) is at least longer than the X-direction length of the opening (30) on the base (29). 2 linear slides (4 4) , (4 5) are arranged in the X direction in parallel to each other along the two opposite sides of the opening (4 3) of the γ stage (3 6); these lines

第9頁 200307817 五、發明說明（6) 性滑轨（44)、（45)上，則透過各滑動部（46)、（47)，讓乂載物台（4 8 )以鳥，由移動的方式而被設置於χ向。此外，Y載物台（3 6)上，則以平行方式對一端的線性滑執設置線性滑軌（49);線性滑執（49)的兩端部，是透過各支撐部（50)、（51)以自由旋轉的方式受到支撐；該線性滑執（49)上，是透過螺合支撐部（52)以連結χ載物台（48);線性滑軌（49)的另一端，被連結於x向馬達（53)軸；此X向馬達（53)上，則設有旋轉編碼器（54);此旋轉編碼器（54)則依據χ向馬達（5 3 )的旋轉，以輸出脈衝信號ρχ。 X載物台（48)上則形成出開口部（55);此開口部（55)的上則設有照明箱（2 2 )。裝置主體（2 0 )的w端，則設有操作面板（5 6 );此操作面板（56)則備有，用於針對玻璃基板（3)設定各照明模式的 ^開關群SW1、及用以指示光源（23)點燈或熄燈之操作開、及指示讓液晶散射板(25)切換成半透明狀態(散 Ss;聚光C)或透明狀態（直接通過會聚光(C))之操作開關 ί ，板（3)上之集體照明領域的自動掃描開關Asw、及用以停 ^動掃描機構之停止開關GW、用以讓集體照明領域朝π 關FSW 向、—X向、Υ向、”向）進行掃描移動之4向開個點位（t玻璃基板（3)上的集體照明領域，分割成例如9 ml Τ' P〇siti〇n) * 及用於在玻璃基板（3)上，以手動操作集體照明領Page 9 200307817 V. Description of the invention (6) On the slide rails (44) and (45), the carriage (4 8) is moved by birds through the sliding parts (46) and (47). The mode is set in the χ direction. In addition, on the Y stage (36), a linear slide rail (49) is provided for the linear slide at one end in a parallel manner; the two ends of the linear slide (49) pass through the support portions (50), (51) is supported in a freely rotating manner; the linear slide (49) is connected to the χ stage (48) through a screwed support (52); the other end of the linear slide (49) is It is connected to the axis of the x-direction motor (53); the X-direction motor (53) is provided with a rotary encoder (54); the rotary encoder (54) is based on the rotation of the x-direction motor (53) to output Pulse signal ρχ. An opening (55) is formed on the X stage (48); a lighting box (2 2) is provided on the opening (55). The w end of the device body (20) is provided with an operation panel (56). This operation panel (56) is provided with a switch group SW1, which is used to set each lighting mode for the glass substrate (3), and Operate by instructing the light source (23) to turn on or off, and instruct the liquid crystal diffuser (25) to switch to a translucent state (scatter Ss; condensing C) or a transparent state (directly through converging light (C)) Switch ί, the automatic scanning switch Asw in the field of collective lighting on the plate (3), and the stop switch GW for stopping the scanning mechanism, for turning the field of collective lighting toward the direction FSW, -X, Υ, "Direction" is used for scanning movement in 4 directions (collective lighting area on the glass substrate (3), divided into, for example, 9 ml Τ 'P〇siti〇n) * and used on the glass substrate (3) To manually operate the collective lighting collar

200307817 五、發明說明（7) 域之操縱桿（joy stick)JS、執跡 Μ。軌跡球（track ball )ΤΒ、滑鼠驅動控制部（57)則依據操作面 SW1的自動掃描開關ASW、停止之操作開關群開關PSW、操縱桿JS、執跡球TB\产/ 4向開關FSW、9定位向馬達(53)及y向馬達⑷)各輸出：：控制:作虎指^而對x 破璃基板（3)的集體照明領域時，吓相不之 ^ ^(54)'(42^200307817 V. Description of the invention (7) Joystick JS in domain and track Μ. The track ball (TB) and the mouse drive control unit (57) are based on the automatic scanning switch ASW of the operating surface SW1, the stop operation switch group switch PSW, the joystick JS, the track ball TB \ produced / 4-way switch FSW , 9 positioning motor (53) and y motor ⑷) each output :: control: when the tiger is pointing at the collective lighting field of x broken glass substrate (3), it is intimidating ^ ^ (54) '( 42 ^

:中"現有玻璃基板(3)上的集體照明領對:：J 的各驅動控制信號。輪出刼作心示集體照明領域此外，驅動控制部（57)則依據操關作，讓光源（23)點燈或嫁燈，A价械p 乂㈣2的心不# )或透明狀態（直接通過會(讓會聚光.散射以下，將說明上述所構成之裝置動作。裝置主體（20)内的支樓架（2)，用以支撐例如圖五所示之四，角:或圖六所示之六倒角大型玻璃基板（3)。 _藉由刼作操作面板（56)的檢查員（q)操作開關SW2，以 ^不光源（23)亮燈，且透過手動操作操縱 =板⑺上之集體照明領域後，這些操作指示便會被送玻至驅動控制部（5 7 )。第11頁 200307817 五、發明說明（8) 這些驅動控制部（57)，則依據手動操作操縱桿：§，而達（53)及7向馬達（41)輸出各驅動控制。信號；藉由 =二、驅動x向馬達（53)及y向馬達（41)後，X載物台（^) 便移動到χ向，Y載物台（36)則移動到y向。透過移動這些X載物台（48)、及Y載物台（36)的照明箱 2 2 則έ移動到透過操作操縱桿J S，而指示玻璃基板（3) 上的集體照明領域的上方。當移動此照明箱（22)時，光源（23)與照明箱（22)之間，會透過自由柔軟彎曲的光纖（26)而影響照明箱（22)的移動。 ' 由於操作操作面板（56)的操作開關SW2，會指示光源 (23)亮燈，因此驅動控制部（57)則點亮光源（23);由光源 (2 3 )所輸出之照明光，則傳送至光纖（2 6 )，以到達照明 (22)内的透鏡（27)，再透過此透鏡（27) ’以有效照射佛奈凸透鏡（24)的有效面積。照射於佛瑞奈凸透鏡（24)的照明光，是藉由該佛凸透鏡（24)所會聚，圖二的會聚光（c)則通過χ載物台（4f 的開口部（55)、及Y載物台（36)的開口部（43)，再入晶散射板（25)。 1 ^ ，在此，當檢查員（Q)對操作面板（56)的操作開關SW3下達，讓會聚光（c)進行散射的切換指示後，驅動控制部（5 7 便執行讓液晶散射板（2 5 )改為半透明狀態的動作。液晶散射板（25)，散射已射入的會聚光（c)後則進出；如圖二所示，此散射光（s)會被照射於玻璃基板（3)表 200307817 五、發明說明（9) "-— 面上；在這種狀態下，檢查員（Q)則觀察來自於玻璃基板 (3)的光源，以執行玻璃基板（3)表面的集體檢查。土另一方面’當檢查員（q)對操作面板（56)的^作開關 SW3下達，直接通過會聚光（c)的切換指示後，驅動控制邙 (57)便執行讓液晶散射板（25)改為透明狀態的動作7 ° 會聚光（c)則直接通過液晶散射板（25)，再照射於玻璃基板（3)表面；在這種狀態下，檢查員（q)則觀察來自於玻璃基板（3)的光源，以執行玻璃基板（3)表面的集體檢杳。此外，對玻璃基板（3)照射散射光（s)或會聚光（^)一以° 行集體檢查時，只要將支撐玻璃基板（3)的支撐架（2)朝檢查員（Q )舉起的方向進行務動，即可改變對玻璃基柘σ 照射散射光（s )或會聚光（c)的角度；如此一來，就 * 檢查玻璃基板（3 )的缺陷部。谷易以下將說明，如圖五所示手動操作操縱桿以、轨减 TB，對四倒角的玻璃基板（3)執行集體檢查，或如圖五所’ 示，對六倒角的玻璃基板（3)執行集體檢查。再者，這此。式上的W是指，藉由散射光（s)執行集體照射的領域。—圖如圖五所示，集體檢查四倒角的玻璃基板（3)時檢查員（Q)手動操作操縱桿JS，以移動與驅動χ載物台、甶 (48)、及γ載物台（36)再移動照明箱（22)，並依序將^ 射領域w移動到例如各倒角領域（3al)〜（3a4);此時了則π 動操作操縱桿JS，以便於讓集體照射領域…的中心位j = 合各倒角領域（3 a 1)〜（3 a 4)的中心位置。付如圖六所示，集體檢查六倒角的玻璃基板（3)時，則由: Medium " The collective lighting on the existing glass substrate (3) leads to the driving control signals of :: J. In addition, the drive control unit (57) lights the light source (23) or marries the light according to the operation, and the light source (23) lights up or is in a transparent state (direct). The following will explain the operation of the device constituted by the meeting (Let's converge light. Scatter.) The supporting structure (2) in the device main body (20) is used to support, for example, the four corners shown in Fig. 5 or the angle: Shown 6 chamfering large glass substrate (3). _ By operating the switch SW2 by the inspector (q) of the operation panel (56), the light source (23) is turned on, and it is operated by manual operation = board ⑺ After the above field of collective lighting, these operation instructions will be sent to the drive control unit (5 7). Page 11 200307817 V. Description of the invention (8) These drive control units (57), based on manual operation of the joystick: §, and (53) and 7 motors (41) output each drive control. Signals; by = = 2, driving the x-direction motor (53) and y-direction motor (41), the X stage (^) will then When moving to the χ direction, the Y stage (36) moves to the y direction. By moving these X stages (48), and the lighting box 2 of the Y stage (36), 2 Move to the top of the collective lighting area on the glass substrate (3) by operating the joystick JS. When this lighting box (22) is moved, between the light source (23) and the lighting box (22), The movement of the lighting box (22) is affected by the free and flexible bending of the optical fiber (26). 'Since the operation switch SW2 of the operation panel (56) is used to instruct the light source (23) to light up, the drive control unit (57) points The bright light source (23); the illuminating light output by the light source (2 3) is transmitted to the optical fiber (2 6) to reach the lens (27) in the illumination (22), and then passes through this lens (27) 'to effectively The effective area of the Fresnel convex lens (24) is irradiated. The illumination light irradiated on the Fresnel convex lens (24) is focused by the Fossil convex lens (24), and the condensed light (c) in FIG. (The opening (55) of 4f and the opening (43) of the Y stage (36) are re-entered into the crystal diffusion plate (25). 1 ^ Here, when the inspector (Q) touches the operation panel (56 ) The operation switch SW3 is issued to instruct the convergence light (c) to switch the scattering, and then the drive control unit (5 7 executes the operation of the liquid crystal diffusion panel (2 5) The operation is changed to a semi-transparent state. The liquid crystal scattering plate (25) scatters the converged light (c) that has been incident, and then enters and exits; as shown in FIG. 2, this scattered light (s) is irradiated on the glass substrate ( 3) Table 200307817 V. Description of the invention (9) "---; In this state, the inspector (Q) observes the light source from the glass substrate (3) to execute the surface of the glass substrate (3) Collective inspection. On the other hand, when the inspector (q) issues a switch SW3 to the operation panel (56) and directly passes the convergent light (c) switching instruction, the drive control unit (57) executes the liquid crystal scattering When the plate (25) is changed to a transparent state, the 7 ° convergence light (c) passes directly through the liquid crystal scattering plate (25), and then irradiates the surface of the glass substrate (3); in this state, the inspector (q) observes The light source from the glass substrate (3) performs collective inspection of the surface of the glass substrate (3). In addition, when the glass substrate (3) is irradiated with scattered light (s) or condensed light (^) for collective inspection at °, as long as the support frame (2) supporting the glass substrate (3) is raised toward the inspector (Q) You can change the angle of irradiating the scattered light (s) or the condensed light (c) on the glass substrate 柘 σ by doing some work; in this way, * inspect the defective part of the glass substrate (3). Gu Yi will explain below that, as shown in Figure 5, manually operate the joystick to reduce the TB, perform collective inspection on the four-beveled glass substrate (3), or as shown in Figure 5, on the six-beveled glass substrate ( 3) Perform a collective inspection. Moreover, here and there. W in the formula refers to an area where collective irradiation is performed by scattered light (s). —As shown in Figure 5, when the four beveled glass substrates (3) are collectively inspected, the inspector (Q) manually operates the joystick JS to move and drive the χ stage, 甶 (48), and γ stage. (36) Move the lighting box (22), and sequentially move the shot area w to, for example, each of the chamfered areas (3al) to (3a4); at this time, the joystick JS is operated to facilitate collective irradiation. The central position of the area ... j = the center position of each chamfered area (3 a 1) ~ (3 a 4). As shown in Figure 6, when collectively inspecting the six chamfered glass substrates (3),

11

第13頁 200307817 五、發明說明（10) =員(Q)手動操作操縱桿JS ’以依序將集體照射領域w，移動到例如各倒角領域（3al)〜（3a6) 〇一產錄t ί ί作廷些操縱桿凡的集體檢查時，則任意在1(：1)生體檢香。袠出玻璃基板（3)，再對這些玻璃基板（3)執行集价手動操作這些操縱桿JS時，集體照射領域？則不侷限於依序移動到，例如四倒角玻璃基板（3)的各倒角領域（3ai) (3 a 4 )，也可讓欲集體檢查的任意倒角領域，只移動到例如倒角領域（3al)，而僅集體檢查欲執行檢查的倒角領域。Page 13 200307817 V. Description of the invention (10) = member (Q) manually operates the joystick JS 'to sequentially move the collective irradiation area w to, for example, each chamfered area (3al) ~ (3a6) 〇一产录 t ί ί For the collective inspection of these joysticks, arbitrarily check the incense at 1 (: 1). When the glass substrates (3) are scooped out and collective operations are performed on these glass substrates (3) manually, these joysticks JS collectively irradiate the area? It is not limited to sequentially moving to, for example, the chamfered areas (3ai) (3a 4) of the four chamfered glass substrate (3), but also any chamfered areas that are to be collectively inspected, and only moved to, for example, chamfering Area (3al), and only the chamfered area to be inspected is collectively inspected.

再者，如圖五及圖六所示，四倒角及六倒角之各玻璃：基板（3)的尺寸不同；因此，·四倒角之各玻璃基板上的各倒角領域（3al)〜（3a4)尺寸，也大於六倒角之各玻璃基板（3)上的各倒角領域（3al)〜（3a6)尺寸。此日守’倘若集體照射領域W的尺寸，大於四倒角玻璃基板（3 )上的农大各倒角領域（3 a 1)〜（3 a 4)尺寸，那麼即可對四倒角及六倒角各玻璃基板（3)上的各倒考領域（3 a 1)〜 (3a4)、（3al)〜（3a6)，照射集體照射領域w。Furthermore, as shown in Fig. 5 and Fig. 6, each glass with four chamfers and six chamfers: The size of the substrate (3) is different; therefore, each chamfered area (3al) on each glass substrate with four chamfers The size of (3a4) is also larger than the size of each of the chamfered areas (3al) to (3a6) on each glass substrate (3) with six chamfers. On this date, if the size of the collective irradiation area W is larger than the size of each of the chamfered areas (3 a 1) to (3 a 4) on the four-chamfered glass substrate (3), then the four beveled and six Each of the inverted test areas (3a1) to (3a4), (3al) to (3a6) on each glass substrate (3) is chamfered, and the collective irradiation area w is irradiated.

相較於四倒角之各玻璃基板（3)，六倒角之各玻璃基板 (3 )的1個倒角領域3 a的尺寸較小，因此如圖六所示，例如將集體照射領域W，移動到倒角領域（3a 1)的中心時，有時候集體照明羌也會照射到下面的倒角領域（3a4 )·，此時，只要將集體照明光全面照射六倒角領域（3al )，便不影響集體檢查。接下來，將針對操作開關群SW1之自動掃描開關ASW的Compared to the four chamfered glass substrates (3), the six chamfered glass substrates (3) have a smaller chamfered area 3a, so as shown in FIG. 6, for example, collectively irradiate the area W When moving to the center of the chamfered area (3a 1), sometimes the collective illumination 羌 will also illuminate the lower chamfered area (3a4). At this time, as long as the collective illumination light is fully irradiated to the six chamfered area (3al) , It will not affect the collective inspection. Next, for the automatic scanning switch ASW of the operation switch group SW1,

第14頁 200307817 五、發明說明（11) 操作進行說明事先對四倒角$六倒角的各玻璃基板（3)，設定照明光自動掃描玻績’基板（3)上的掃描路線；舉例來說了對四倒角玻璃基板（3)執行自動掃描的路線依序為，如圖五所示的各倒角領域（3al)〜（3a4)，對六倒角玻璃基板（3)執行自广二描靜為’如圖六所示的各倒角領域(3d ) 〜（3a6)，迫些自動掃描路線，可任意變更設定。 m I者=動集體照射領域界之各倒角領域(3al)〜（…）二V板：尺十的中心位置’可取決於四倒角或六倒角各玻璃基，（3)尺寸、及四倒角或六倒角的資訊。換口之田檢查員（Q)操作自動掃描開關ASW後，則讓 ί 身!,二角玻璃基板(3)的領域w，依序移動到各倒角 J ( a4)，集體照射六倒角玻璃基板（3)的領域 W，則依序移動到各倒角領域（3al)〜（3a6)。U的料日士 ΐΐϊ描此集體照射領刻後’可點亮光源（23)的同 i續=明玻璃基板3領域[沿著掃描路徑，以低速 (3alW3[a6m移動於各倒角領域（糾〜在自動掃描中，當择作g广、行此操作時會停止自動dQ)麵作停”，後，在執上述操縱桿JS執行手動操^”要在此狀態下’就可藉由接下來，將針對操作4向開關FSW進行說明。 200307817 五、發明說明（12) 操作4向開關FSW後，集體照射四倒角、六倒角各玻璃基板（3)的領域W :則朝X向、_χ向、y向、—y向移動；如此一來，便可藉由操作4向開關FSW，.讓集體照射領域…，任意移動到欲集體檢查玻璃基板（3)的各倒角領域（3al)〜（3a4) (3al)〜3a6 〇接下來，將針對操作定位開關PWS進行說明。操作定位開關PWS，是將玻璃基板（3)表面分割成數個領域’再為這些領域位置配置定位開關；再者，圖式例則 ^用3 X 3的9定位開關PSW，最好依據四倒角、六倒角，設疋T使用的4個或6個各定位開關，以配置各倒角領域（3 a 1 _ 〜（3a4)((3al)〜（3a6))位置。只要操作九定位開關PSff，例如在四倒角或六倒角玻璃二板（3 )上，只要對欲執行集體照明的各倒角領域操作定位汗關’便可讓集體照射領域w自動移動關PSW配合玻璃基板⑻的倒角，那麼若屬於四倒角時，也定位開關’若屬於六倒角時，也可採用2x3 射#(再、者夕\移動集體照射玻璃基板（3)的領域W時，除了散对九以）之外，以可適用於會聚光（C)。箱0=1第1實施型態得知’讓射出集體照明光的照明基板的夂/ f相^早，此外，因採用照射大型玻璃基板（3)的各倒角領域（3ai)〜（3a6)、〜小型集體照明弁風会鉍lL . ^Udal )) (3a6)的予系、，充，□此與照射傳統寬廣範圍的集體 200307817 五、發明說明（13) 照明光學系統相較之下，可縮短照明光程，不須用到傳統的反射鏡；如此一來，便可將整個集體照明裝置做成小型化。 “，因不須使用傳統反射鏡，因此也不須要用於衰減集體照明光照度的光學要素，而且也不發生像差問題；換言之，集體照明光只要通過會聚透鏡（佛瑞奈凸透鏡24 )與液晶散射板（2 5 )，便可提高玻璃基板（3)上的集體照明光照度；如此一來，便可輕鬆檢測出玻璃基板（3)上的缺陷部，而得以獲得最佳的集體檢查照明效果。此外’只要將光源（2 3 )及驅動控制部（5 7 )，設置於裝置主體（2 0 )的後側或前側下方，尤其是設置於裝置主體 (20)的前側，便可讓檢查員（q)輕鬆進行維修。集體檢查玻璃基板（3)時，則依據操作開關群sw 1的自動掃描開關ASW、定位開關PSW的操作指示，以自動掃描玻璃基板（3)上的集體照明領域W，或者手動操作操縱桿JS、軌跡球TB、4向開關FSW，便可在欲執行集體檢查的任意各倒角領域上，移動集體照明領域W ;如此一來，例如在^ 生產線上，只要選擇發生缺陷部頻度較高的領域，便可執行集體檢查，以提昇選擇集體檢查領域的自由度。因屬於讓液晶散射板（2 5 )呈半透明狀態、讓會聚光（c )呈散射或透明狀態、直接通過會聚光（c)的切換動作，因此可^ 由對玻璃基板（3)照射散射光（s)、或會聚光（c)的集體檢^ 方式’確實檢測出玻璃基板（3 )上的缺陷部。再者’上述第1實施型態也可執行以下的變形；舉例來說，Page 14 200307817 V. Description of the invention (11) Operation description For each glass substrate (3) with four chamfers and six chamfers, set the scanning route on the substrate (3) for automatic scanning of the glass with illumination light; It is said that the course of performing automatic scanning on the four chamfered glass substrate (3) is sequentially, as shown in each chamfered area (3al) ~ (3a4) shown in FIG. The second description is as shown in each of the chamfered areas (3d) to (3a6) shown in Fig. 6, forcing some automatic scanning routes, and the settings can be arbitrarily changed. m I = each chamfered area (3al) ~ (...) of the collective collective irradiation field boundary V plate: the center position of the ruler 'may depend on the glass base of the four chamfered or six chamfered, (3) the size, And information on four or six chamfers. After the inspector (Q) of the mouth changed the automatic scanning switch ASW, the body w, the area w of the two-cornered glass substrate (3) was sequentially moved to each chamfer J (a4), and the six chamfers were collectively irradiated. The area W of the glass substrate (3) is sequentially moved to each of the chamfered areas (3al) to (3a6). After the collective irradiation, the material can be used to describe the same light source (23) that can illuminate the light source (23). The area is followed by the glass substrate. [Along the scanning path, move at low speed (3alW3 [a6m in each chamfered area ( Correction ~ In automatic scanning, when you select g, you will stop the automatic dQ) when the operation is performed, and then perform the manual operation by executing the above-mentioned joystick JS "" In this state, you can use the Next, the 4-way switch FSW will be described. 200307817 V. Description of the invention (12) After the 4-way switch FSW is operated, the areas of the glass substrates (3) with four chamfers and six chamfers are collectively irradiated W: toward X Direction, _χ direction, y direction, and -y direction; in this way, by operating the 4-way switch FSW, the collective irradiation area can be moved to any chamfered area of the glass substrate (3) to be inspected collectively. (3al) ~ (3a4) (3al) ~ 3a6 〇 Next, the operation of the positioning switch PWS will be described. The operation of the positioning switch PWS is to divide the surface of the glass substrate (3) into several areas, and then configure the positioning for these areas. Switch; moreover, the schematic example ^ use 3 X 3 9 positioning switch PSW, it is best to follow Four chamfers and six chamfers, set 4 or 6 positioning switches used by 疋 T to configure each chamfer area (3 a 1 _ ~ (3a4) ((3al) ~ (3a6)) position. Just operate Nine positioning switch PSff, for example, on the four chamfered or six chamfered glass second plate (3), as long as the positioning sweat switch is operated on each chamfered area where collective lighting is to be performed, the collective irradiation area w can be automatically moved off with PSW coordination The chamfer of the glass substrate 那么, if it belongs to the four chamfers, the switch is also located. If it belongs to the six chamfers, you can also use 2x3 shot # (再、者夕 \ moving collective irradiation of the area of the glass substrate (3) W In addition to the scattered light beam, it is applicable to converging light (C). The first implementation form of the box 0 = 1 knows that the 基板 / f phase of the lighting substrate that emits collective lighting light is earlier, and Because the chamfered areas (3ai) ~ (3a6) and ~ small collective lighting 弁 bismuth lL. ^ Udal)) (3a6) are used to irradiate large glass substrates (3), this is related to irradiation Traditional wide-range collective 200307817 V. Description of the invention (13) Compared with the illumination optical system, the light path of the illumination can be shortened. Into a conventional reflecting mirror; Thus, the entire collective illumination apparatus can be made compact. "Because there is no need to use traditional mirrors, there is no need to use optical elements to attenuate the light intensity of collective illumination, and no aberration problems occur; in other words, the collective illumination light only needs to pass through the condensing lens (Frenne lens 24) and the liquid crystal. The diffuser plate (2 5) can increase the collective illumination illuminance on the glass substrate (3); in this way, the defective part on the glass substrate (3) can be easily detected and the best collective inspection lighting effect can be obtained In addition, 'As long as the light source (2 3) and the drive control unit (57) are arranged on the rear side or under the front side of the device body (20), especially on the front side of the device body (20), inspection can be performed. The operator (q) can easily perform maintenance. When collectively inspecting the glass substrate (3), according to the operation instructions of the automatic scanning switch ASW and positioning switch PSW of the operation switch group sw 1, the collective lighting area on the glass substrate (3) is automatically scanned. W, or manually operating the joystick JS, trackball TB, 4-way switch FSW, you can move the collective lighting field W in any of the chamfered areas to perform collective inspection; so, for example, On the ^ production line, as long as the area where the defect part is frequently occurred is selected, collective inspection can be performed to increase the freedom of selecting the collective inspection area. Because it belongs to the liquid crystal diffuser plate (2 5) is made translucent, and the light is focused (C) It is in a scattering or transparent state and directly passes the switching action of the condensed light (c). Therefore, a collective inspection method of irradiating the glass substrate (3) with scattered light (s) or condensed light (c) can be used. Defective parts on the glass substrate (3) were detected. Furthermore, the above-mentioned first embodiment can also be modified as follows; for example,

200307817 五、發明說明（14) 也可不將佛瑞奈凸於其他位置；此外執行拆卸式設計。讓照明箱（2 2 ) 也可用線性馬達等會聚透鏡（佛瑞奈角；而且這些會聚域的大小進行更換小、倒角領域的大接下來，將參閱圖再者，圖三及圖四詳細說明。圖七屬於集體明箱（2 2 )上則在佛散射板（25)。透鏡（24)設置於照明箱（22)，而是設置，也可對光纖（2 6:)的前端部透鏡（2 7)，移動到xy向的照明領域移動機構（28)，其他直接驅動傳動裝置予以構成。凸透鏡(24))則備有數個不同的照射透鏡是依據玻璃基板（3)的大小、倒角領 :如此一來，便可配合玻璃基板（3)的大小，適當改變集體照明領域W的大小。式的同時，說明本發明之第2實施型態；：的相同部份皆標有相同符號，因而省略檢查裝置上的照明箱（22)構成圖；此照瑞奈凸透鏡（24)下方，一體設置了液晶如屬這種照明箱（2 2 )的構成方式，那麼便可藉由散射液晶散射板（2 5 )的會聚光（c)、或直接通過會聚光（c)的切換動作，而得以從照明箱（22)射出散射光（3)或會聚光 (c) 〇此相較於上述第丨實施型態所用的大型液晶散射板 (25)，若使用小型液晶散射板，便可將整個裝置做成輕薄短小。由於是在照明箱（44)上一體設置液晶散射板（25)，因此可從裝置主體（2〇)的上方，流動溢流（d〇wn n〇w)DF ;這200307817 V. Description of the invention (14) It is not necessary to emboss the Fresnel in other positions; in addition, the disassembly design is implemented. Let the lighting box (2 2) also use a linear motor and other converging lenses (Frène angle; and the size of these convergence areas can be changed to be small, and the chamfered area is large.) Next, please refer to Figure 3, Figure 3 and Figure 4 for details. Note: Figure 7 belongs to the collective bright box (2 2) and the Buddha diffuser plate (25). The lens (24) is set in the lighting box (22), but it can also be set to the front end of the optical fiber (2 6 :). The lens (2 7) is moved to the lighting field moving mechanism (28) in the xy direction, and other direct drive transmission devices are configured. The convex lens (24)) is provided with several different irradiation lenses based on the size of the glass substrate (3), Chamfered collar: In this way, the size of the collective lighting area W can be appropriately changed in accordance with the size of the glass substrate (3). At the same time, the second embodiment of the present invention will be described; the same parts of: are marked with the same symbols, so the structural diagram of the lighting box (22) on the inspection device is omitted; this photo is under the Reina convex lens (24), integrated If the liquid crystal is provided with such a structure of the lighting box (2 2), the condensed light (c) of the liquid crystal scattering plate (2 5) can be diffused, or the condensed light (c) can be directly switched. The scattered light (3) or condensed light (c) can be emitted from the lighting box (22). Compared with the large liquid crystal scattering plate (25) used in the above-mentioned embodiment, if a small liquid crystal scattering plate is used, The whole device is made thin and short. Since the liquid crystal scattering plate (25) is integrally provided on the lighting box (44), the overflow (d0wn n0w) DF can be flowed from above the device body (20);

第18頁 200307817Page 18 200307817

五、發明說明（15) 種溢流DF，會從X載物台（48)開口部（55)，通過γ (36)開口部（43)、基座（29)開口部（30)，而流到玻璃&板 (3)的表面上；如此一來’便可減少玻璃基板（3)表面的塵再者，上述第2實施型態也可進行以下的變形；舉例來說，也可從照明箱（44)所射出的會聚光（c)的光程，設置拆卸式白色半透明散射板，以取代液晶散射板（2 5 )。接下來’將參閱圖式的同時，說明本發明第3實施型態；再5. Description of the invention (15) The overflow DF will pass from the X stage (48) opening (55), through the γ (36) opening (43), the base (29) opening (30), and It flows onto the surface of the glass & plate (3); in this way, the dust on the surface of the glass substrate (3) can be reduced. Furthermore, the above-mentioned second embodiment can also be modified as follows; The light path of the convergent light (c) emitted from the lighting box (44) is provided with a detachable white translucent scattering plate to replace the liquid crystal scattering plate (2 5). Next, while referring to the drawings, the third embodiment of the present invention will be described;

者，同於圖七的部份皆標有相同符號，因而省略詳細說明。圖八屬於集體檢查裝置上的照明箱（2 2 )的構成圖；光纖（26)的其他端射出口上，則設有可變焦距透鏡（2〇〇111 1 e n s ) ( 6 0 );此外，光纖（2 6 )的其他端，則被設置於發揮上下機構功能的機架副齒輪（rack pini〇n)(61a)上；此機架副齒輪（61 a)會讓光纖（26)的其他端朝z向上下移動。In addition, the same parts as those in Fig. 7 are marked with the same symbols, and detailed explanations are omitted. Figure 8 belongs to the composition diagram of the lighting box (2 2) on the collective inspection device; the other end-firing exit of the optical fiber (26) is provided with a variable focal length lens (200111 1 ens) (60); , The other end of the optical fiber (2 6) is set on a rack pinion (61a) that plays the function of an upper and lower mechanism; the rack pinion (61 a) will make the optical fiber (26) The other end moves up and down towards z.

可變焦距透鏡（60)則藉由機架副齒輪（61a)，讓光纖（26)的其他端上方移動，而縮窄照明光的放射角Θ，讓光纖（2 6 ) 的其他端下方移動，則會擴大照明光的放射角0 ;如此一來，便可調節照射於玻璃基板（3 )上之集體照明領域w的大小0 換言之，可讓集體照明領域W的大小，配合四倒角或六倒角等玻璃基板（3)各倒角領域（3ai)〜（3a4)或（3al )〜 ((3 a 6 ))的大小。接下來，將參閱圖式的同時，說明本發明之第4實施型態；The varifocal lens (60) moves the other end of the optical fiber (26) by the rack sub-gear (61a), and narrows the radiation angle Θ of the illumination light to move the other end of the optical fiber (2 6). , The radiation angle 0 of the illumination light will be enlarged; in this way, the size of the collective lighting area w irradiated on the glass substrate (3) can be adjusted. In other words, the size of the collective lighting area W can be adjusted with four chamfers or The size of each chamfered area of the glass substrate (3) such as six chamfers (3ai) ~ (3a4) or (3al) ~ ((3 a6)). Next, a fourth embodiment of the present invention will be described while referring to the drawings;

第19頁 200307817Page 19 200307817

它者，圖三及圖四的相同部份皆標有相同符號，因而省略詳細說明。圖九表示集體檢查裴置上的照^箱（22)構成圖；此照明箱（22)上有形成出退壁空間（7〇);在來自於此退壁空間 (7 0 )内、與光纖（2 6)的射出口所射出的照明光光程上之間，則設有滑動式移動機構（72);此滑動式移動機構 (72)，會讓濾鏡（71)出入於照明光的光程上；此濾鏡（71) 則屬於例如濾色鏡或N D濾鏡。如屬於這種構成方式，那麼當來自於照明箱（22)之佛瑞奈凸透鏡（24)所射出的會聚光（(：），入射到液晶散射板： (25)後，便從液晶散射板（25)，直接將散射合 (c)照射於玻璃基板（3)的表面上。曰此時，則視其需要在照明箱（22)内的光程上插入濾鏡 (71);如此一來，玻璃基板（3)表面上的照明光，便會逸過滤色鏡而實施欲執行的著色，或藉由〇濾鏡以衰減光θ源。此外’；慮鏡（71)也可插入各種透鏡類的凸透鏡戋或插入組合的凸透鏡與凹透鏡。 “凹透鏡再者，上述第4實施型態也可進行以下的變形；也可在照明箱（22)上一體設置液晶散射板（25)，、以射出7來自於照Otherwise, the same parts in Figures 3 and 4 are marked with the same symbols, and detailed descriptions are omitted. Figure 9 shows the composition diagram of the photo box (22) placed on the collective inspection by Pei; this lighting box (22) has a retreat space (70); in this retreat space (7 0), and A sliding type moving mechanism (72) is provided between the upper and lower optical paths of the illumination light emitted from the optical fiber (26), and the sliding type moving mechanism (72) allows the filter (71) to enter and exit the lighting light. In the optical path of the lens; this filter (71) belongs to, for example, a color filter or an ND filter. If it belongs to this configuration method, when the condensed light ((:) emitted from the Fresnel convex lens (24) from the lighting box (22) enters the liquid crystal scattering plate: (25), it will pass from the liquid crystal scattering plate. (25), directly irradiate the scattering compound (c) on the surface of the glass substrate (3). At this time, if necessary, insert a filter (71) on the optical path in the lighting box (22); In the future, the illumination light on the surface of the glass substrate (3) will be filtered by the color filter to implement the coloring to be performed, or the 0 filter will be used to attenuate the light source θ. In addition, the mirror (71) can also be inserted into various A convex lens of a lens type or a combination of a convex lens and a concave lens is inserted. "Concave lenses can also be deformed as described below in the fourth embodiment; a liquid crystal diffuser plate (25) can also be integrated on the lighting box (22), Take shot 7 from the photo

明箱（22)的散射光（s)與會聚光（c);此時，便可透過滤S 鏡對散射光或會聚光（c)實施欲執行的著色，或藉由ND滤鏡以衰減光源。曰 “ 接下來，將參閱圖式的同時，說明本發明之第5實施型態，再者，圖三及圖四的相同部份皆標有相同符號，因而The scattered light (s) and convergent light (c) of the bright box (22); at this time, the S-filter can be used to implement the coloring of the scattered light or the condensed light (c), or attenuate by the ND filter. light source. "Next, referring to the drawings, the fifth embodiment of the present invention will be described. Moreover, the same parts in Figs. 3 and 4 are marked with the same symbols, so

第20頁 200307817 五、發明說明（17) 省略詳細說明。圖十表示集體檢查裝置上的光源群、及照明箱（22)構成圖；光源群的2個光源（23 — D、（23-2)，彼此屬於同種類或不同種類；在此則使用同種類的光源（23 —υ、（23_2)。 =些光源（23-1 )、（23-2)與照明箱（22)之間，設有分歧型光纖（26)-1 ;這種分歧型光纖（26—υ是由各連接於2個光源 (23-1)、（23-2)的各分歧光纖（26a)、（26b)、及合成這些分歧光纖（26a)、（26b)的光纖（26c)所構成。一這些光源（23-1)、（23-2)的其中一項會亮燈，或同時點梵二項。照明箱（22)内則設有旋轉·體（72);此旋轉體（72)則在同心圓上設有數個濾鏡（71)、或各種透鏡類與空孔；各濾鏡（71 )則為例如濾色鏡或n D濾鏡。旋轉體（72)上則設有馬達（73);旋轉體（72)則藉由驅動馬達（7 3 )，而在來自於光纖（2 6 )射出口所射出的照明光光程上’選擇性的裝卸濾、鏡（71 )或各種透鏡類與空孔。若屬於這種構成方式，那麼便會依據分歧型光纖 (26-1)，而從射出口射出來自於2個光源（Μ」）、（23一幻所射出的各照明光；這種照明光會透過會聚透鏡（佛瑞奈凸透鏡2 4 )，而形成會聚光（c)，再射入液晶散射板（2 5 );接下來’會水光（c)則措由液晶散射板（2 5 )，直接讓散射光 (s )或會聚光（c )照射於玻璃基板（3 )的表面上。此時’玻璃基板（3)表面上的亮度，可透過採用2種光源（2 3 -1 )、（ 2 3 - 2)以增強亮度；此外，會讓2個光源 200307817Page 20 200307817 V. Description of the invention (17) Detailed description is omitted. Figure 10 shows the composition of the light source group and the lighting box (22) on the collective inspection device; the two light sources (23-D, (23-2) of the light source group) belong to the same type or different types; here, the same Kinds of light sources (23 —υ, (23_2). = Between the light sources (23-1), (23-2) and the lighting box (22), a branched fiber (26) -1 is provided; this branched type The optical fiber (26-υ) is a branch fiber (26a) and (26b) each connected to two light sources (23-1) and (23-2), and an optical fiber that combines these branch fibers (26a) and (26b). (26c). One of these light sources (23-1) and (23-2) will light up or point to Vatican. Simultaneously, there is a rotating body (72) inside the lighting box (22). This rotating body (72) is provided with several filters (71), or various lenses and holes on concentric circles; each filter (71) is, for example, a color filter or an n D filter. The rotating body (72) A motor (73) is provided on the upper side; a rotating body (72) is driven by a drive motor (7 3), and is used to selectively install and remove filters on the optical path of the illumination light emitted from the optical fiber (2 6) exit port. Mirror (71) or various lenses If it belongs to this structure, then according to the branched fiber (26-1), the illumination light from the two light sources (M ") and (23) will be emitted from the exit; The illuminating light will pass through the condensing lens (Frène convex lens 2 4) to form condensed light (c), and then enter the liquid crystal scattering plate (2 5). Next, the convergent water light (c) is taken by the liquid crystal scattering plate ( 2 5), the scattered light (s) or condensed light (c) is directly irradiated on the surface of the glass substrate (3). At this time, the brightness on the surface of the glass substrate (3) can be transmitted through the use of 2 light sources (2 3 -1), (2 3-2) to enhance brightness; in addition, it will make 2 light sources 200307817

^2 3 1 ) : ( 2 3 一 2 )的其中一項亮燈成其他新光源。當哥命已盡時也可切換^ 2 3 1): One of (2 3 1 2) lights up to become another new light source. You can switch when brother is dead

昭明動馬達(73)，以視其需要將渡鏡⑺)插入 m:的光程上；如此—來，玻璃基板( =以=過渡色鏡對以實施欲執行的著色，或藉由源。此外，切插入各種透鏡類的凸透鏡或凹透鏡^或插入組合的凸透鏡與凹透鏡。Zhaoming moves the motor (73) to insert the crossing mirror 渡) on the optical path of m: as it is; in this way, the glass substrate (=== transition color mirror pair to implement the coloring to be performed, or by source. In addition, convex lenses or concave lenses of various types of lenses may be inserted, or a combination of convex lenses and concave lenses may be inserted.

上述第5只施型態屬於，將來自於2種光源（2 3 -1 )、 (23-2)所射出的各照明光，藉由分歧型光纖（26 —丨）以送至照明箱（22)，因此可提昇玻璃基板（3)面上的亮度；此外，只要在照明箱（22)内插入ND濾鏡，以控制玻璃基板（3)面上的亮度’便可有效配合玻璃基板（3)的集體檢查，以調整亮度；調整玻璃基板（3)表面上的亮度時，也可讓2個光源 (23 -1)、（23 - 2)其中亮一個燈，或同時亮燈。、再者，因設有2個光源（23 -1)、（23-2)，因此也可使用通常都呈點亮狀態的光源（23-1)或（23-2)，然而當此光源 (2 3-1)或（23-2)故障時，則採用點亮其他光源（23-2)或 (23-1)的備用方法。The above-mentioned fifth application type belongs to sending each illumination light from two kinds of light sources (2 3 -1) and (23-2) to a lighting box through a branched optical fiber (26 — 丨) ( 22), so the brightness on the surface of the glass substrate (3) can be improved; in addition, as long as the ND filter is inserted in the lighting box (22) to control the brightness on the surface of the glass substrate (3), it can effectively match the glass substrate ( 3) Collective inspection to adjust the brightness; when adjusting the brightness on the surface of the glass substrate (3), one of the two light sources (23 -1) and (23-2) can be turned on, or both can be turned on at the same time. Furthermore, since two light sources (23-1) and (23-2) are provided, a light source (23-1) or (23-2) that is normally lit can also be used. However, when this light source (2 3-1) or (23-2) In the event of failure, a backup method of lighting other light sources (23-2) or (23-1) is adopted.

上述第5實施型態也可執行以下的變形。如圖Η--所示，馬達（7 3)的旋轉軸上，設有旋轉板 (74 );此旋轉板（74)上則設有，如圖十二所示的數個濾鏡 (75)〜（78);這些濾鏡（75)〜（78)分別為濾色鏡（紅、藍、橙色等）；再者，也可不在所有旋轉板（7 4 )上設置滤色鏡，例如也可不在任何1處予以設置，而形成出開口狀The fifth embodiment described above may be modified as follows. As shown in Figure Η--, the rotating shaft of the motor (7 3) is provided with a rotating plate (74); this rotating plate (74) is provided with a number of filters (75) as shown in FIG. ) ~ (78); These filters (75) ~ (78) are color filters (red, blue, orange, etc.); furthermore, it is not necessary to set color filters on all rotating plates (7 4), for example Installed at any position to form an opening

第22頁 200307817 五、發明說明（19) 或設置ND濾鏡等其他濾鏡。此外’如圖十三所示，旋轉板（7 4 )上也可以面對面方 - j·，式設置其他旋轉板（79);此旋轉板（79)也可連接馬達（8〇) 再予以旋轉；此時，一端的旋轉板（74 )上，則設有紅，藍、撥色等濾色鏡（75)〜（78)，其他旋轉板（79)上則設置如圖十四所示的ND濾鏡（81 );此ND濾鏡（81)則沿著圓周方式，連續變化ND值（〇%〜100%)。只要屬於這種構成方式，便可選擇性的組合各濾色鏡 (75)〜（78)與ND濾鏡（81)的ND值；另外，對照明箱（22) — 體設置佛瑞奈凸透鏡（24)及液晶散射板（25)，同時也可讓擁有紅、藍、橙色等濾色鏡（75)〜（78)、或各ND值的ND濾鏡（81 )呈現一體化；而且，光源（23)並不侷限於2個，也可設置數個。接下來，將參閱圖式的同時，說明本發明之第6實施型態。 . 圖十五表示集體照明裝置的構成圖；照明箱（9 0 )下方則形成出開口部（9 1 );此開口部（9 1 )則設有佛瑞奈凸透鏡；接下來，此佛瑞奈凸透鏡（24)下方，則設有液晶散射板（25);此液晶散射板（25)，也可一體設置照明箱（90)，並可如圖三所示設置於照明領域移動機構（28 )上。照明箱（90)内，則傾斜設置了反射鏡（92)。照明箱（9 0 )的側面上，則形成出第1光源箱（9 3 );此第 1光源箱（9 3 )，則朝向反射鏡（9 2 )形成出開口部；此第1光源箱（93)内，則設有用作第1光源（94)之用的例如Na燈等。Page 22 200307817 V. Description of the invention (19) or setting other filters such as ND filter. In addition, as shown in Fig. 13, the rotating plate (7 4) can also face to face-j ·, and other rotating plates (79) can be arranged; this rotating plate (79) can also be connected to the motor (80) and then rotated. ; At this time, the rotating plate (74) at one end is provided with red, blue, and color filters (75) to (78), and the other rotating plate (79) is provided with an ND filter as shown in FIG. Mirror (81); this ND filter (81) continuously changes the ND value (0% to 100%) along the circumference. As long as it belongs to this structure, the ND values of each of the color filters (75) to (78) and the ND filter (81) can be selectively combined; in addition, a Fresnel convex lens (24) is provided to the lighting box (22). ) And liquid crystal scattering plate (25), and can also have red, blue, orange and other color filters (75) ~ (78), or ND filters (81) of each ND value integrated; and, the light source (23) The number is not limited to two, and a plurality may be provided. Next, a sixth embodiment of the present invention will be described while referring to the drawings. Figure 15 shows the composition of the collective lighting device; an opening (9 1) is formed below the lighting box (90); this opening (9 1) is provided with a Fresnel convex lens; next, this Fury Below the nano-convex lens (24), a liquid crystal diffuser (25) is provided; the liquid crystal diffuser (25) can also be integrated with a lighting box (90), and can be installed in the lighting field moving mechanism (28) as shown in Figure 3. )on. Inside the lighting box (90), a reflecting mirror (92) is arranged obliquely. On the side of the lighting box (90), a first light source box (93) is formed; the first light source box (93) forms an opening toward the reflector (92); this first light source box Inside (93), for example, a Na lamp is used as the first light source (94).

第23頁 200307817 五、發明說明（20) '~ 此外，鄰接照明箱（90)的第2光源箱（95)，則被—體設置於照明箱（9 0 )内；此第2光源箱（9 5 )内，則設有用作第2 $源、 (96)之用的例如i素燈等；由此第2光源（96)所放射明光的光程上，則設有各旋轉板（74)、（79);旋轉板（74^上則設有紅、藍、橙色等數個濾鏡（75)〜（78);旋轉板（79) 上則設有ND濾鏡（81 )。第2光源箱（9 5 )與照明箱（9 0 )之間，則連接了光、纖 (26);此光纖（26)會將第2光源（96)所放射的照明光傳送至照明箱（90)，再朝此照明箱（90)内之反射鏡（92)進行放射。只要屬於這種構成方式’那麼當點亮第1光源（9 4 )的N a 燈後，從此Na燈所放射的照明光，則在反射鏡（9 2 )上進行反射’再透過佛瑞奈凸透鏡（2 4 )、液晶散射板（2 5 )，照射於玻璃基板（3 )上。 f 點亮第2光源（9 6 )的鹵素燈後，從此鹵素燈所放射的照明光，便透過各濾鏡（75)〜（78)及ND濾鏡（81)射入光纖 (2 6 );傳送此光纖（2 6 )内的照明光，則通過透鏡（2 7)進行，射出，並在反射鏡（92)上進行反射，再透過佛瑞奈凸透鏡 (2 4 )、液晶散射板（2 5 )，照射於玻璃基板（3)上。由第1光源（9 4)所放射的照明光、及第2光源（9 6 )所放射之照明光之間的波長不同；若對玻璃基板（3 )照射這些照明光後，便可透過Na燈的照明及鹵素燈的照明，進行缺陷部的集體檢查；換言之，只要依據缺陷部的種類，點亮Na 燈或鹵素燈，便可檢測出標的缺陷部。Page 23 200307817 V. Description of the invention (20) '~ In addition, the second light source box (95) adjacent to the lighting box (90) is provided in the lighting box (90); this second light source box ( 9 5), there are provided for example the second $ source, (96), such as i prime lamp, etc .; the light path radiated by the second light source (96) is provided with each rotating plate (74 ), (79); Rotary plate (74 ^ is provided with red, blue, orange and other filters (75) ~ (78); Rotary plate (79) is provided with ND filter (81). 2 between the light source box (95) and the lighting box (90), the light and fiber (26) are connected; this optical fiber (26) transmits the illumination light emitted by the second light source (96) to the lighting box ( 90), and then radiate toward the reflector (92) in the lighting box (90). As long as it belongs to this configuration mode, then when the Na light of the first light source (9 4) is turned on, the Na light is emitted from this Na light. The illuminating light is reflected on the reflector (9 2), and then transmitted through the Fresnel lens (2 4) and the liquid crystal diffusion plate (2 5), and irradiates the glass substrate (3). F Lights the second light source (9 6) after the halogen lamp The illumination light transmitted through the filters (75) to (78) and the ND filter (81) enters the optical fiber (2 6); when the illumination light in the optical fiber (2 6) is transmitted, it passes through the lens (2 7) Then, it is emitted, reflected on a reflector (92), and then irradiated on a glass substrate (3) through a Fresnel convex lens (2 4) and a liquid crystal diffusion plate (2 5). A first light source (9 4 ) And the light emitted from the second light source (96) have different wavelengths; if the glass substrate (3) is irradiated with these illumination lights, it can pass through the illumination of the Na lamp and the halogen lamp. Illumination, collective inspection of defective parts; in other words, as long as the Na lamp or halogen lamp is lit according to the type of defective part, the target defective part can be detected.

第24頁 200307817 五、發明說明（21) - 從鹵素燈所放射的照明光，則透過各濾鏡（75 )〜（Ί 進行欲執行的著色，或藉由ND濾鏡（81)以衰減光源。此外’在鄰接照明箱（90)之處設有第2光源箱（95)，因以縮短光纖（2 6 )的長度。【運用於產業上的可能性】將本發明可用於，集體檢查半導體晶片、液晶螢幕、水鸯幕等平面螢幕之玻璃基板的集體照明之用。Page 24 200307817 V. Description of the invention (21)-The illuminating light emitted from the halogen lamp is transmitted through each filter (75) ~ (Ί to perform the coloring to be performed, or the ND filter (81) is used to attenuate the light source In addition, a second light source box (95) is provided adjacent to the lighting box (90) to shorten the length of the optical fiber (2 6). [Application possibility in industry] The present invention can be used for collective inspection For collective lighting of glass substrates such as semiconductor wafers, LCD screens, and water screens.

200307817200307817

【圖式之簡單說明】圖一係本發明適用檢¥步詈的；木本照明裝置的第一實施例形態集体檢置裝置的外觀構成圖。圖二係本發明集休日g 圖三係表示本發明隹、置的基本概念構成圖。 Θ $体照明裝置的第一實施例具體構成圖0 圖四係有關本發明集体照明裝置的第一實施例形態的照明領域移動機構的上視圖。[Brief description of the drawings] FIG. 1 is an external configuration diagram of the collective inspection device of the first embodiment of the woody lighting device according to the present invention. Fig. 2 is a collection day of the present invention. Fig. 3 is a diagram showing the basic concept of the present invention. The specific structure of the first embodiment of the Θ $ body lighting device Fig. 0 is a top view of a moving mechanism in the field of illumination of the first embodiment of the collective lighting device of the present invention.

圖五係有關本發明集体照明裝置的第一實施例形態的四倒 ^角玻璃基板相對於集照明鎖域的表示圖。圖/、係有關本發明集体照明裝置的第一實施例形態的六倒角的玻璃基板相對於集照明鎖域的表示圖。圖七係有關本發明集体照明裝置的第二實施例形態的照明箱的構成圖。 ^ 、圖八係有關本發明集体照明裝置的第三實施例形態的照明箱的構成圖。 ^ 圖九係有關本發明集体照明裝置的第四實施例形態的照明箱的構成圖。FIG. 5 is a representation diagram of a four-beveled glass substrate with respect to a collective lighting lock area according to the first embodiment of the collective lighting device of the present invention. Fig. 1 is a diagram showing the six chamfered glass substrates of the collective lighting device according to the first embodiment of the present invention with respect to the lock area of the collective lighting. Fig. 7 is a structural diagram of a lighting box according to a second embodiment of the collective lighting device of the present invention. ^, FIG. 8 is a structural diagram of a lighting box according to a third embodiment of the collective lighting device of the present invention. ^ Fig. 9 is a structural diagram of a lighting box according to a fourth embodiment of the collective lighting device of the present invention.

圖十係有關本發明集体照明裝置的第五實施例形態的光源群及照明箱的構成圖。、圖十一係有關本發明集体照明裝置的第五實施例形態的變形實施例構成圖。圖十二係有關本發明集体照明裝置的第五變形實施例回轉板上各濾鏡的配置表示圖。Fig. 10 is a structural diagram of a light source group and a lighting box according to a fifth embodiment of the collective lighting device of the present invention. Fig. 11 is a structural diagram of a modified embodiment of the fifth embodiment of the collective lighting device of the present invention. Fig. 12 is a diagram showing the arrangement of filters on a rotary plate of a fifth modified embodiment of the collective lighting device of the present invention.

第26頁 200307817 圖式簡單說明圖十三係有關本發明集体照明裝置的第五實施例形態的變形實施例構成圖。圖十四係有關本發明集体照明裝置的第五變形實施例回轉板上的N D濾鏡表示圖。圖十五係有關本發明集体照明裝置的第六實施例形態的構成圖。圖十六係有關習用集体照明裝置的構成圖。【符號之說明】 1 ...............•主體 2 ...............•支撐架 3 ................玻璃基板 4 ...............光源 5 ...............•反射鏡 6 ..............··.聚焦光學系 7 ...............•會聚光 8 ................ 光源 20 ............·· ·裝置主體 21 ...............•集體照明裝置 22 ...............•照明箱 2 3...............•光源 23- 1....... 光源 2 3-2..........光源 24..............•凸透鏡Page 26 200307817 Brief description of the drawings Fig. 13 is a structural diagram of a modified embodiment of the fifth embodiment of the collective lighting device of the present invention. Fig. 14 is a view showing a ND filter on a rotary plate of a fifth modified embodiment of the collective lighting device of the present invention. Fig. 15 is a configuration diagram of a sixth embodiment of the collective lighting device of the present invention. Figure 16 is a block diagram of a conventional collective lighting device. [Explanation of Symbols] 1 ............... • Main body 2 ............... • Support frame 3 ....... ......... glass substrate 4 ............... light source 5 ............... reflector 6 .. ............ · Focus optics 7 ............... • Converging light 8 ............ .... Light source 20 .................. Device body 21 ............... Collective lighting device 22 ...... ......... • Lighting box 2 3 ............... • Light source 23- 1 ....... Light source 2 3-2 ... ... light source 24 .............. • convex lens

第27頁 200307817 圖式簡單說明 2 5...............•液晶散射板 2 6................光纖 27...............•透鏡 2 8...............•移動機構 29 ...............•基座 30 ............••開口部 31……···……·段差 3 2................線性滑執 3 3 ................ 線性滑軌Page 27 200307817 Schematic description 2 5 ......... Liquid crystal diffuser 2 6 ...... Optical fiber 27. .............. • Lens 2 8 .................. • Moving mechanism 29 ............. .. • Base 30 ............ •• Opening 31 …………………… Step 3 2 ...... Linear Slide 3 3 ...... Linear Slide

34...............滑動部 3 5 ............... 滑動部 36 ................ Υ載物台 37 ...............•滾珠螺桿 38 ............... 支撐部 39 ............... 支撐部 40 ..............螺合支撐部 41 ...............· Υ向馬達 4 2................旋轉編碼器 - · ' - ： -…34 ............ Sliding section 3 5 ............... Sliding section 36 ............ .... Ballast stage 37 ............... • Ball screw 38 ............... Support part 39 .... ........... support part 40 .............. screwing support part 41 ............... Υ Directional motor 4 2 ...... Rotary encoder-· '-: -...

43 ...............•四邊形開口部 44 ...............線性滑軌 4 5................線性滑軌 4 6................滑動部 47 ....... 滑動部 48 .........…….X載物台43 ............... Quadrilateral opening 44 ............... Linear slide 4 5 ......... ........ Linear slide 4 6 ...... Sliding section 47 ....... Sliding section 48 ......... ....... X stage

第28頁 200307817 圖式簡單說明 49.............·線性滑執 5 0..............支撐部 51 ............... 支撐部 52 ................螺合支撐部 53 ................X向馬達 54 ...............旋轉編碼器 55 ............... 開口部 5 6................操作面板 5 7...............•驅動控制部 GO..............可變焦距透鏡 61a. ··、.···..機架副齒部 61···.........••凸透鏡 62............... 凸透鏡 70 ..............退壁空間 71 ................濾鏡 7 2...............•移動機構 73................驅動馬達 74………··· ···旋轉板Page 28 200307817 Schematic description 49 ............. Linear slide 5 0 .............. support 51 ... ..... Supporting section 52 ... Screwing support section 53 ... X-direction motor 54 ............... rotary encoder 55 ............... opening 5 6 ........ ........ Operation panel 5 7 .................. • Drive control section GO .............. Variable focal length lens 61a ................................................... .............. Retreat Space 71 ... Filter 7 2 ............ ... • Movement mechanism 73 ...... Drive motor 74 ......... Rotating plate

I 75…··..........·濾色鏡 7 6...............•濾色鏡 77 ............... 濾色鏡 78 ................ 濾色鏡 79 ............... 旋轉板 80 ............••馬達I 75… .............. Color filter 7 6 .................. Color filter 77 ............. .. Color filter 78... Color filter 79 ............... Rotary plate 80 .......... ..••motor

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Claims

200307817 The scope of the patent application is a collective lighting device, which is special in that: a light tracer with output illumination light β; the convergence of the illumination light is far away: radiation = the light source is converged before the light source unit turns out, and then irradiated; = = The aforementioned switching of the mirror: 2 'the convergence and scattering lens on the aforementioned subject, and then moving forward the moving light source and the aforementioned convergence on the illumination field moving mechanism in the mobile lighting field. Object 2: · y: collective lighting device described in item 1 of the patent scope, issued and prepared:: 2: source: for the light source that emits the aforementioned illumination light, and the far-end light, set the aforementioned condensing lens, and then borrow f The aforementioned two-two lens emitted from the fiber-optic emitting end of the end converges the former. 05 <Month ..., ..., Mingxian's shooting frame is its feature. 3. Collective lighting as described in item 1 of the scope of the patent application. The light source section has several of the aforementioned light sources, and can be selected by%. m light up or replace it with special features. 4. The collective illumination light source unit described in item 丨 of the scope of the patent application has the feature of the aforementioned color light or ND filter on the optical path of the aforementioned illumination light. . Or have 4 filters

Page 31 200307817 VI. 5. The patent application for the group photo as described in item 丨 of the scope of patent application '~~ The light source 4 疋 is a light source that emits the aforementioned illumination light, ^' wherein the above-mentioned your% light exit box " Take the aforementioned frame and perform 2;-and the optical fiber of Nanguang that is emitted from the XY object moved by the aforementioned person, and when the optical source is connected to the aforementioned W light source " and another focusing lens is set, and then The aforementioned converging and # fiber-exporting worms with the same illumination light emitted from the same fiber exit end converge the aforementioned moving mechanism in the lighting field to allow the aforesaid frame to perform a 2a 'body and the aforementioned platform to be characterized by Ding Renfan Rescue ^ 6 · If the light source unit is the aforementioned illuminating variable focal length lens emitted by the emission, ^ the aforementioned outgoing frame body, and the light exit port, the upper focal length lens can be moved up and down, To change. 3 The collective light according to item 1 above, the light source of the illumination light, the optical fiber, and the illumination light provided at the emitting end connected to the optical fiber, and through the aforementioned frame, the optical fiber can be moved forward and downward according to the above mechanism. The bright device for emitting the aforementioned illumination light, wherein the transmitting angle of the optical fiber exiting end of the light source and the aforementioned optical fiber exiting the wheat focal length lens for transmitting the aforementioned photo of the frame, the bright end mechanism, and the radiation angle of the optical fiber exiting end are Its characteristics

The collective lighting device as described in item 丨 of the patent application, wherein the aforementioned light unit owns a plurality of light sources that emit each illumination light and the aforementioned illumination lights emitted in cooperation with the aforementioned plurality of light sources to transmit branched optical fibers and At the same time as the aforementioned optical fiber emitting end, the aforementioned condensing lens is set, and the aforementioned illumination emitted by the aforementioned optical fiber emitting end is converged by the converging lens'

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Light 'is characterized by a frame that emits light. One

9 · 10 · As for the collective lighting device described in item 1 of the scope of the patent application, the Fuyi Jiuxingzheng shooting switching unit belongs to the switching of the aforementioned illumination light for scattering or the transmission-type liquid crystal scattering through the aforementioned illumination light function Θ Go away. Shuangmaqi special collective lighting device as described in the scope of patent application No. 5, 6 or 7 'wherein the aforementioned frame is provided on the frame to allow scattering from the above-mentioned convergence, meaning to diffuse, or directly from One of the aforementioned condensing lenses; I. 1J describes a condensing transmissive liquid crystal scattering plate as its characteristic. For example, the collective lighting device described in item 1 of the patent scope, wherein the above-mentioned convergence and scattering switching section belongs to a person who can attach and detach a diffusion plate to the optical path of the aforementioned illumination light as its characteristic.

11. The collective lighting device as described in item 1 of the patent scope, wherein the light source ^ has a first light source for outputting illumination light, a light source for converging the first light source, a convergence lens for moonlight, and the first The light source and the above-mentioned first frame, the second light source that turns out the illumination light, and the second frame that is adjacently installed on the first and second frames and houses the second light source, and the setting = just described Between the first and second frames, the knowledge and light output by the second light source are transmitted to the optical fiber in the first frame; the first frame 'converges the first through the converging lens. From the light source

200307817 6. Scope of patent application: The illumination light described above is emitted again, or the illumination light of the second light source is its characteristic. Finding the Difference 12. The collective lighting device described in item 11 of the scope of patent application, wherein the aforementioned first and second light sources will output the aforementioned illumination lights with different wavelengths as complex features. ^ " 13 ^ Declared the collective lighting device described in the first item of the patent scope, which includes the above-mentioned subject, a mechanism for automatically moving the aforementioned lighting field, the position of the aforementioned lighting field, or by manually using The detail panel for operating instructions is its characteristic. .