TWM528423U - External appearance inspection apparatus and inspection system - Google Patents

Description

Visual inspection device and inspection system Technical field

This creation is an inspection apparatus for quality inspection including visual inspection, and an inspection system including the inspection apparatus.

Background technique

It is widely practiced to apply various coatings (coating films) in the lens in order to impart properties for use. The coating film is applied, for example, in order to impart a specific transmittance to the light incident on the lens surface in the lens.

Next, an inspection of the coating film defect is also included in the lens quality inspection for ensuring the performance of the lens. For example, the presence or absence of the coating film defect is judged based on the slight difference in the reflectance of the coating film defect. In the method of quality inspection, there is a person who uses a reflection illuminator (see Patent Document 1 and Patent Document 2).

Prior technical literature Patent literature

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-163344

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2014-85220

Creative summary

In the above-described conventional quality inspection method, when the surface of the object is a curved surface as shown by a lens, light reflected by the surface is emitted outside the observation field of view. Further, there is a case where the surface of the object cannot be illuminated with the same illumination. For example, there is a case where light glare is observed in the observed object image, or a shadow is generated due to the portion of the observation hole or the groove portion of the reflector that does not reflect light.

In such a case, the entire test object cannot be observed at one time. That is to say, in order to check the entire range necessary for observation, it is necessary to tilt or rotate the object (or change the observation position). Thereby, the time required for the inspection of each test object is inevitably long. In addition, since the glare or the shadow is often included in the obtained image of the object to be observed, it is an obstacle to the observation. Therefore, the inspector or the inspection device is required to determine the height of the abnormality or the range in which the abnormality is specified.

Further, if the inspection is included in the pipeline included in the processing element, it is possible to execute the inclusion of the plurality of objects in parallel. In the quality inspection of the various inspections of the visual inspection, it is possible to plan the quality inspection. However, since the visual inspection of the test object according to the above-described conventional method takes time as described above, it tends to be a bottleneck in the pipeline processing, and the processing amount of the quality inspection is prevented from increasing.

The present invention has been developed in view of such problems, and aims to provide a device for inspecting the appearance of a test object in a shorter time than using a conventional method without reducing the accuracy. Further, the present invention further provides an inspection system that performs a plurality of inspections including visual inspections in parallel with a plurality of objects, and performs inspection of the quality of the inspection object with higher efficiency than conventionally.

In order to achieve the above object, the visual inspection device according to the present invention is an appearance inspection device that inspects the appearance of the test object by using a reflected light image of light reflected from the test object, and is characterized in that it includes a light source unit. a light that is emitted toward the object to be inspected on the opposite side of the observed surface of the test object, and a half mirror positioned on the side of the observed surface of the object to reflect light emitted from the light source portion toward the observed surface And illuminating the light reflected by the observation surface; and the light shielding body is disposed between the light source unit and the object, and all of the light emitted from the light source unit is blocked from being directly incident on the aforementioned Check The light source emitted in the direction of the object, wherein the light source unit is the only light source constituting the light beam reflected by the object, and the emitted light illuminates the surface of the half mirror facing the object with approximately the same illuminance, the half The mirror has no holes or slits in a region where the light emitted from the light source portion is reflected toward the observed surface.

In the visual inspection device having such a configuration, the illuminance of the light that is incident on the observed surface of the test object is as high as the illuminance. Therefore, there is no bright portion depending on the glare of the light source or the like in the image of the object obtained by reflecting the light reflected from the observed surface and then penetrating the half mirror, and there is no dark portion or missing portion or half of the light source. The hole or slit of the mirror is the dark part caused by the cause. Thereby, it is not necessary to observe from a plurality of directions in order to inspect the entire observed surface of the object to be inspected. For this reason, it is possible to carry out inspection of the abnormality of the object according to the reflected light image for a short time and with high precision for the entire observed surface without the need for the height observation capability. According to this configuration, when the object to be inspected is a transparent body, it is possible to prevent light emitted from the light source unit from directly entering the object. As a result, the obtained object image is a light reflected by a half mirror, and is a reflected light image formed by light reflected (scattered) on the surface of the object. Thereby, even if the object to be inspected is a transparent body, it is possible to carry out inspection based on the presence or absence of abnormality in the surface of the object to be inspected by the reflected light image with high accuracy in a short time without an observation capability of height. Further, by preventing the light emitted from the light source portion from passing through the object to be inspected When it is reflected in the imaging unit, the amount of incident light to the imaging unit can be adjusted to an appropriate amount.

Further, the half mirror may have a concave surface that faces the object to be observed. Further, the half mirror may have a dome shape that covers the side of the object to be observed of the object to be observed.

According to this configuration, the half mirror can reflect the light from the light source portion to the observed surface of the object from more directions, and collect the light.

Further, the half mirror may have a characteristic that the transmittance of the light in the wavelength band of 450 nm to 700 nm is approximately the same as the reflectance.

By making the transmittance of the half mirror for the incident light equal to the reflectance, the half mirror can be taken out from the half mirror at the maximum ratio for the incident light, and further reflected by the observed surface and then penetrated half. The light from the mirror. That is to say, in the half mirror having the above characteristics, the proportion of the amount of light that can be transmitted through the half mirror after being reflected by the observed surface covers a wide range in the wavelength band of the visible light, and is maximized for the incident light. The ratio is taken out of the half mirror. Further, since the ratio is substantially constant for any wavelength in this range, there is no unevenness in the wavelength of the extracted light. With this, The influence of the visible light image on the test object by the half mirror can be suppressed in the observation of the test object.

Further, the half mirror having the above-described light transmission (reflection) property may have a laminated film in which a film mainly composed of titanium and a film mainly composed of cerium oxide are laminated on each other in the concave surface.

In order to achieve the above object, an inspection system in which the present invention is the same is an inspection system that performs inspection of a plurality of objects in parallel, and includes: a susceptor; and a rotation conveyance unit that is rotatable about the susceptor a plurality of holding portions that support the plurality of objects to be held on the turntable at a predetermined interval, and a plurality of holding devices are disposed at a plurality of positions of the susceptor at a predetermined interval, and are arranged in the foregoing Each of the movement traces of the plurality of objects during the rotation of the turntable has an inspection area; and a control device controls the operation of the rotation conveyance unit and the inspection device, and the control device rotates the turntable to a specific angle The rotation transport unit is controlled so that one of the plurality of specimens held in the plurality of holding portions is located in the inspection region of the plurality of inspection devices during the temporary stop of the rotation of the turntable. The plurality of inspection devices are respectively disposed in the inspection area during the temporary stop of the turntable The test object to be inspected, and inspection is different from each other ways, The plurality of inspection apparatuses are controlled, and the first inspection apparatus of one of the plurality of inspection apparatuses is an inspection system of any one of the visual inspection apparatuses.

In the quality inspection by the inspection system having such a configuration, a plurality of objects that are rotationally moved after being held by the holding portion provided in the rotary conveyance unit are sequentially subjected to a plurality of inspections on the rotationally movable rails. Further, these various inspections are performed in parallel for a plurality of objects. Therefore, the quality inspection can be performed efficiently in time. Further, since the object to be inspected is transported along the movement path of the circular shape, the object can be transferred without passing through the unnecessary route, and the quality inspection can be performed efficiently in space. Further, by using any of the above-described visual inspection devices as the first inspection device, it is possible to prevent the procedure of the visual inspection from becoming a bottleneck and reduce the amount of processing of the inspection system.

Further, the plurality of test objects are optical elements each having a light collecting function, and the second inspection device of the other of the plurality of inspection devices includes a light source unit and a sample of the object located in the inspection area. a light-emitting body is emitted toward the object to be inspected on the opposite side of the observation surface; and the light-blocking body is disposed between the light source unit and the object to be inspected, and is closer to the object than the focal point of the object to be detected. When the collected light beam of the parallel light incident on the object to be observed of the object to be observed is cut at a position perpendicular to the central axis of the collected light beam at the aforementioned position The shape of the obtained collected light beam having a substantially uniform cross-sectional shape is such that light emitted from the light source portion is blocked from light emitted in a direction directly irradiated to the object.

According to this configuration, for example, as shown in the lens, it is possible to perform quality inspection of the object to be inspected for the presence or absence of an abnormality in addition to the external appearance by using the inspection system. More specifically, in the second inspection device, dark field observation of the test object can be performed. If the object to be inspected is a lens, the quality inspection of the lens according to the inspection system of the present invention may include formation of foreign matter, flow marks, and the like which are easily found inside the lens, fine lines, and penetration of the lens surface. A procedure used to illuminate or scratch light, or to change an indentation or flaw in the direction of light penetration.

Moreover, even in the second inspection apparatus having such a configuration, it is possible to obtain an object image without a bright portion depending on the light source and a dark portion having a light source or a missing portion. Thereby, it is not necessary to observe from a plurality of directions in order to inspect the entire object. For this reason, it is possible to accurately perform the abnormality of the entire object to be inspected in a short time.

Further, in the present invention, the observed surface is the one side of the object to be inspected, and in the visual inspection device of the same state as the present creation, or the visual inspection device provided in the inspection system of the same state as the present creation, Refers to the observer’s line of sight or replaces it The surface for obtaining the object image on the opposite side of the objective lens of the imaging unit is a term used for convenience, and is not a surface other than the surface (including the side surface and the object lens) The surface on the opposite side of the surface or the inside of the object to be inspected is excluded from the observation object.

With regard to the visual inspection device of the present invention, it is possible to check the appearance of the test object in a shorter time than in the case of using the conventional method without reducing the accuracy. Moreover, with respect to the inspection system of the present creation, various inspections can be performed in parallel with a plurality of objects to be inspected, and the quality inspection of the inspection object can be performed with higher efficiency than conventionally.

10‧‧‧ appearance inspection device

13, 23‧‧‧Light source department

14‧‧‧Half mirror

15, 25‧‧ ‧ sunscreen

16, 32‧‧‧ Keeping Department

160‧‧‧Support

161‧‧‧arm

20‧‧‧ Pedestal

26‧‧‧Mobile Department

200‧‧‧Checked objects

30‧‧‧Rotary Transport Department

31‧‧‧ Turntable

300‧‧‧ drive

51‧‧‧1st inspection device

52‧‧‧Second inspection device

Fig. 1 is a perspective view showing the appearance of an appearance inspection apparatus in the same manner as the present invention.

Fig. 2 is a schematic cross-sectional view showing the appearance inspection apparatus of the same state as the present invention.

Fig. 3 is a schematic cross-sectional view showing a configuration example of a half mirror of the visual inspection device in the same manner as the present invention.

Fig. 4 is a graph showing the light penetration characteristics of the half mirror of the visual inspection device in the same state as the present creation.

(a) and (b) of FIG. 5 are a schematic plan view of a holding portion of the visual inspection device in the same manner as the present invention, and a schematic cross-sectional view of the holding portion in a state in which the object is placed.

Figure 6 is the appearance of the inspection system in the same state as the present creation. Figure.

Fig. 7 is a schematic view showing a rotary transport unit included in the inspection system in the same manner as the present invention.

FIG. 8 is a schematic view showing the positional relationship between the rotary transport unit and the plurality of inspection apparatuses included in the inspection system in the same manner as the present creation.

Figure 9 is a functional block diagram of the inspection system in the same manner as the present creation.

Fig. 10 is a diagram showing parallel processing of an inspection system in accordance with the state of the present creation.

Fig. 11 is a schematic cross-sectional view showing a second inspection device included in the inspection system in the same manner as the present invention.

Form used to implement creation

Hereinafter, the embodiment of the present creation will be described in detail using the drawings. Further, each of the embodiments and the modifications described below are suitable for a specific example of the present invention. The numerical values, the materials, the constituent elements, the arrangement or connection of the constituent elements, the steps in the method, the order of the steps, and the like are all examples, and are not intended to limit the scope of the present invention. Therefore, among the constituent elements in the following embodiments and their modifications, the independent request items not included in the top concept of the present creation are not necessarily necessary components for achieving the above-described problems according to the present creation, and more preferably. Optional inclusion The components are described.

[Embodiment 1]

First, the visual inspection device in the same manner as the present creation will be described with reference to the drawings.

Fig. 1 is an external perspective view of the visual inspection device 10 in the same state as the present invention. FIG. 2 is a schematic cross-sectional view of the visual inspection device 10.

As shown in FIG. 1 , the visual inspection device 10 is an appearance inspection device that inspects the appearance of an object, and includes an imaging unit 11 , a light shielding box 12 , and a light source unit 13 . Further, as shown in FIG. 2, the visual inspection device 10 includes a half mirror 14, a light shielding body (mask) 15, and a holding portion 16.

The object to be inspected by the visual inspection device 10 is indicated by reference numeral 200 in FIG. In addition, although the case where the test object 200 is a collecting lens is illustrated in FIG. 2, the object to be inspected is not limited to the collecting lens. For example, a concave lens (scattering lens), an optical element other than a lens (for example, an optical filter), or an article which imparts certain optical characteristics to a surface by processing such as electroplating may also be an visual inspection device according to the present invention. The appearance of the inspection of the object.

The imaging unit 11 acquires the detected object from the side of the observed surface of the test object 200. The image of the object 200 (image of the object to be inspected). The imaging unit 11 is, for example, a digital camera including the objective lens 110, the lens barrel 111, and the imaging element 112. The object image acquired by the imaging unit 11 is recorded, for example, in a visual inspection device 10 or a memory device (not shown) external to the visual inspection device 10. Alternatively, it may be provided to an analysis such as analysis by an electronic computer communicably connected to the visual inspection device 10.

The light shielding box 12 is provided with an observation hole 120 and an observation hole cover 121. The light-shielding box 12 covers the entire light-shielding box of the half mirror 14 so that light rays from outside the light source unit 13 do not enter the optical system in the visual inspection device 10 of the present invention. A lens barrel 111 including the objective lens 110 of the imaging unit 11 is placed in the observation hole 120 of the light shielding box 12. The observation hole cover 121 is a gap between the lens barrel and the light-shielding box 12 of the imaging unit 11 that is hidden in the observation hole 120, and ensures the light-shielding property of the optical system of the visual inspection device 10.

The light source unit 13 is located on the opposite side of the observed surface of the test object 200, and emits diffused light toward the object 200. For example, the light source unit 13 has a plurality of white LEDs (not shown) as light sources, and the light emitted by the plurality of white LEDs is emitted through a diffusing plate (not shown) to emit diffused light. Further, the light source is not limited to a white LED, and may be, for example, a fluorescent lamp. As another example of the light source unit 13, an organic EL (not shown) having a white light that emits light uniformly can be used as a light source, and a diffuser is not provided. The diffused light that emerges is roughly The same illuminance is applied to the surface of the half mirror 14 to be described later that faces the object 200.

The half mirror 14 is located on the side of the object to be observed of the object 200 and is located between the imaging unit 11 and the object 200, and reflects the light emitted from the light source unit 13 toward the observed surface of the object 200. Further, the half mirror 14 further penetrates the light reflected by the observed surface of the test object 200. Therefore, the imaging unit 11 acquires the light reflected by the observed surface of the test object 200 and the light that the half mirror 14 penetrates to form the object image.

The half mirror 14 may have a flat shape, but may have a shape that faces the concave surface of the object 200 to be observed. By having such a shape, light from the light source portion can be reflected from more directions to the observed surface of the object and collected. In the example shown in FIG. 2, the dome shape which covers the to-be-observed surface of the test object 200 is provided. Further, regardless of the shape of the half mirror 14, the size and the size of the light exit surface of the light source unit 13 must be such that the light reflected by the half mirror 14 is projected toward the observed surface of the entire object, and the light after the fall is further The manner in which the observed surface of the sample is reflected and then enters the observation optical path is appropriately adjusted. Further, it cannot be said that the half mirror 14 is good as long as it is large, and it is possible to appropriately use the small one as long as it can limit the direction in which the light falling on the object to be detected comes. For example, in order to prevent total reflection that may occur inside the object to be inspected, it is considered to limit the projection to The direction in which the light of the object is coming.

FIG. 3 is a schematic cross-sectional view showing a configuration example of the half mirror 14. The half mirror 14 is formed by forming, for example, a material having transparency into a shape having the above-described concave surface, in which a film mainly composed of titanium (dashed line in the drawing) and cerium oxide are mainly formed. A laminated film in which the film of the component (the solid line in the drawing) is laminated to each other. The half mirror 14 having this configuration can partially reflect and partially penetrate the incident light.

In the creator's experiment, the above two kinds of films are uniformly laminated on the entire concave surface in a transparent polycarbonate dome, and the display light penetration (reflection) as shown in FIG. 4 can be obtained. Characteristic half mirror. According to FIG. 4, the half mirror has a characteristic that the transmittance of light at least in the wavelength band of 450 nm to 700 nm is approximately the same as the reflectance (difference within 25%).

The creator modulates the half mirror having such characteristics because the transmittance of the half mirror for the incident light is equal to the reflectance, and the half mirror can be taken out from the half mirror at the maximum ratio for the incident light, The light that is reflected by the observed surface and penetrates the half mirror is further utilized. That is to say, in the half mirror having the above characteristics, the proportion of the amount of light that can be transmitted through the half mirror after being reflected by the observed surface covers a wide range in the wavelength band of the visible light, and the maximum ratio to the incident light is from half. The mirror takes out the light. Further, since the ratio is substantially constant for any wavelength within the range, there is no unevenness in the wavelength of the extracted light. Thereby, in the observation of the test object, the influence of the visible light image on the test object by the transmission half mirror can be suppressed.

In the half mirror 14 provided in the visual inspection device 10 of the present invention, there is no hole or slit for introducing light or passing the observation light path. Thereby, it is possible to achieve the same high-reflection of light toward the observed surface of the test object 200. Further, in the visual inspection device 10 relating to the present invention, although the object to be inspected is observed through the half mirror 14, since the half mirror 14 covers the wavelength band described above, it has the same light transmission (reflection) property, In the observation of the test object, the influence of the visible light image on the test object according to the transmission through the half mirror can be suppressed.

Further, the material and structure of the above-described half mirror 14 are an example, and any material and structure may be used as long as desired light penetration (reflection) characteristics can be obtained.

The light blocking body 15 is disposed between the light source unit 13 and the test object 200, and shields light emitted from the light source unit 13 in a direction directly irradiated to the object 200. The size, shape, light blocking property, and position of the light shielding body 15 are all achieved for this purpose, and as long as the diffused light emitted from the light source unit 13 is not hindered The half mirror 14 is not particularly limited. For example, it may be a black colored portion that is printed on a resin sheet having high transparency disposed under the test object 200. Alternatively, the bottom surface of the support portion 160 to be described later may have the light shielding body 15 (in this case, the support portion 160 does not have the exposure hole 1601). When the object to be inspected is a transparent body such as a lens, by providing the light blocking body 15 in this manner, it is possible to prevent light emitted from the light source portion from directly entering the object to be inspected. As a result, the obtained object image is an image in which light reflected by the half mirror is reflected (scattered) by the surface of the object, and is not incident on the object directly from the light source. The influence of light. Thereby, even if the object to be inspected is a transparent body, it is possible to carry out the inspection based on the abnormality of the surface of the object to be reflected by the reflected light image with a high accuracy without a high degree of observation capability. Further, by preventing the light emitted from the light source unit from entering the imaging unit 11 through the object, the amount of incident light to the imaging unit 11 can be adjusted to an appropriate amount. Moreover, when the test object is a non-transparent body, the light-shielding body 15 may not be provided.

FIG. 5( a ) is a schematic plan view of the holding portion 16 . The holding portion 16 includes a support portion 160 , a plurality of arm portions 161 , a stage 162 , and a plurality of arm length adjusting portions 163 .

Fig. 5 (b) is a schematic cross-sectional view showing a section A-A of the holding portion 16 shown in a schematic plan view. In the schematic cross-sectional view, the state in which the test object 200 is placed on the support portion 160 is displayed.

The support portion 160 has a support base 1600 that supports the test object 200 and a circular shape exposure hole 1601 that exposes the optical surface of the test object 200 supported by the support table 1600.

The plurality of arms 161 are separately connected to the support portion 160 and the stage 162, and the support portion 160 is supported on the XY plane as shown in FIG.

The arm length adjusting portion 163 fixes the arm portion 161 so as to adjust the protruding length of the arm portion 161 with respect to the stage 162, and connects the arm length adjusting portion 163 and the stage 162. For example, the arm portion 161 may be screwed into the arm length adjusting portion 163. By adjusting the length of the plurality of arm portions 161, the support portion 160 (the exposure hole 1601) can be moved in the XY plane shown in FIG. Further, the mechanism for adjusting the protruding length of the arm portion 161 of the arm length adjusting portion 163 may be arbitrarily provided when such positional adjustment is necessary. For example, it is considered that the position of the support portion 160 must be adjusted for the inspection area of the visual inspection device 10. If the adjustment is unnecessary, each arm portion 161 has a protruding length with a fixed length for the platform, and the position of the support portion 160 with respect to the platform 162 may be fixed.

Further, the support portion 160 and the arm portion 161 are opposed to each other by the traveling of the half mirror 14 which does not interfere with the diffused light emitted from the light source unit 13 and the light of the object from the half mirror 14 toward the object 200. It is preferable that the size and shape of the falling object of the sample 200 are good. Figure 2 and Figure 5 The presenter is an illustration of this configuration.

For example, the support portion 160 shown in Figs. 2 and 5 has a cylindrical shape having a conical recess on the upper surface. There is an exposure hole 1601 on the bottom surface of the recess. The exposure hole 1601 is a circular hole having a diameter necessary for exposing the optical portion of the collecting lens of the test object 200, and is penetrated to the bottom surface of the column. A wide surface necessary for placing the flange portion of the collecting lens is provided in the periphery of the exposure hole 1601. As shown in this example, by making the concave portion conical, the projection of the light from the half mirror 14 toward the object 200 on the bottom surface of the concave portion against the object 200 is not hindered.

Further, the shape and the number of the arm portions 161 are such that the diffused light emitted from the light source unit 13 reaches the surface of the half mirror 14 facing the object 200 as much as possible, and the area is small in plan view. The number is small, preferably. Therefore, the shape and the number of the arm portions 161 as a whole are adjusted so as to ensure stable rigidity of the support portion 160 and to prevent the diffused light from being interfered as much as possible. However, when the position adjustment of the support portion 160 on the XY plane described above is necessary, the arm portion 161 and the arm length adjustment portion 163 are paired and have at least three or more sets (in the case of the four groups shown in FIG. 5, for example) ).

Next, the movement of the visual inspection device 10 in the observation based on the test object 200 of the visual inspection device 10 having the above configuration For explanation. In the same description as described above, the case of the collecting lens in which the object to be inspected 200 is a transparent body is taken as an example. Further, the half mirror 14 is configured to have the characteristics shown in the above embodiments.

The test object 200 is placed on the concave portion of the support portion 160 and disposed in the inspection region of the visual inspection device 10. At this time, the entire observed surface (the upper surface in FIG. 2) of the test object 200 and the optical portion on the side opposite to the observation surface in the exposure hole 1601 are exposed. Further, the optical portion of the test object 200 exposed in the exposure hole 1601 faces the light blocking body 15.

The light source unit 13 is an outgoing light. The following four patterns are roughly distinguished in the outgoing light travel route.

(the traveling route 1) is blocked by the light shielding body 15, the support portion 160, or the arm portion 161.

The (travel route 2) arrives, is incident on the half mirror 14, and penetrates the half mirror 14.

The (travel route 3) reaches the half mirror 14, is reflected, and is projected onto the object 200.

(Traffic Route 4) The light of the above (traveling route 3) is further reflected by the object 200, and arrives and enters the half mirror 14, And penetrating the half mirror 14.

Further, there is no light that is incident on the test object 200 directly after being emitted from the light source unit 13 and penetrating the test object 200.

Among them, according to the above characteristics of the half mirror 14, the amount of light of the traveling path of the traveling path 2 and the amount of light of the traveling path of the traveling path 3 are approximately coincident in the wavelength band of 450 nm to 700 nm. Further, in the case where the reflectance is 50%, the light that travels through the half mirror 14 for the light traveling on the traveling path 4 is about half of the light that is reflected to the object 200 and then reaches the half mirror 14. .

Among the above-described traveling paths, among the light rays of the traveling route of the traveling route 2 and the light of the traveling route of the traveling route 4, that is, among the light rays that have passed through the half mirror 14, the incident lens 110 incident on the imaging portion 11 is incident. The image is imaged on the imaging element 112. In particular, the light of the travel route 4 is imaged as the image of the object to be inspected 200 for inspection and observation.

In the visual inspection device 10 having the above configuration, the illuminance of the illuminance that is incident on the observed surface of the test object 200 is high. Therefore, in the image of the object to be detected obtained by the light reflected from the observed surface and then penetrating the half mirror 14, there is no bright portion depending on the glare of the light source, and there is no dark portion or missing portion of the light source. The hole or slit of the minute or half mirror 14 is a dark portion of the cause. Thereby, it is not necessary to observe from a plurality of directions in order to inspect the entire observed surface of the test object 200. For this reason, it is possible to perform an inspection of the abnormality of the appearance of the entire observed surface of the test object 200 for the entire observed surface with a short time accuracy without requiring a high degree of observation capability. In particular, in the case where the test object 200 is a transparent body as described above, unless it is sufficiently seen from the side of the observed surface, the opposite side surface including the observed surface can be visually inspected by using one test object. .

As described above, although the visual inspection device 10 is taken as an example to describe the visual inspection device in the same manner as the present creation, the present creation is not limited thereto. For example, the features shown below may be different from the above description.

(1) Instead of using the observation by the imaging unit 11, the image of the object to be inspected may be observed by visual observation by the operator. Further, the image of the object to be inspected can be enlarged by an enlargement inspection machine such as a stereoscopic microscope, either by observation using the imaging unit 11 or by visual observation by an operator.

(2) Instead of the rod-shaped arm portion 161, the support portion 160 and the stage 162 may be connected by using a transparent body plate or the like. As long as the support portion 160 is stabilized, the diffused light emitted from the light source portion 13 can be configured to reach the half mirror with sufficient illuminance and identity.

(3) The shape of the observed surface of the test object is not limited to the convex surface described above and illustrated. Planar, concave, or free-form surfaces are acceptable. The same applies to the surface other than the observed surface when the test object is a transparent body.

(4) When the object to be inspected is a lens, it is not limited to the single lens described above and illustrated. The object to be inspected may be a combined lens.

(5) The configuration of the light source unit and the half mirror is a configuration example that contributes to the inspection based on the general appearance (appearance that can be perceived by human vision). In practical use, if only light of a specific wavelength band is a problem, it is also possible to use light that emits only the specific wavelength band as a light source. Moreover, as a half mirror, it is also possible to reflect or penetrate light that can only reflect or penetrate the specific wavelength band, so that both the light source and the half mirror can only reflect or penetrate the specific wavelength band. Light can also be.

(6) The light to be inspected is not limited to visible light. For example, consider using infrared or ultraviolet light to check the condition of a coating film that can only penetrate visible light. In this case, the light source unit, the half mirror, and the imaging unit use those corresponding to such infrared rays or ultraviolet rays.

(7) For the shape of the half mirror, the so-called "concave surface" is not only The dome-shaped surface described above and illustrated may have a higher curvature or a lower surface. Further, not only the curved surface, but also a cone or a polyhedron, etc., is included in the technical scope of the present invention as long as the light emitted from the light source unit is reflected toward the observed surface of the object.

(8) In the above, the light source unit 13 transmits the light into the diffused light through the diffusing plate. This is to improve the uniformity of the light that is reflected by the half mirror 14 and reflected onto the object 200. According to such a configuration, it is possible to obtain an image of the object to be inspected which is more suitable for inspection because the unevenness of the illumination light is not caused. However, the light emitted from the light source unit 13 is not limited to the diffused light. For example, instead of using a diffusing plate, it is also possible to arrange a plurality of LED light sources in mutually different positions by using a half mirror having substantially the same illuminance as the entire surface on which the viewing is faced.

(9) It is preferable that the imaging unit 11 and the light-shielding box 12 have a configuration capable of ensuring light shielding of the optical system as a whole, and the configuration is not limited to the case including the observation hole cover 121. For example, the light shielding box 12 may be provided with an adapter for attaching the imaging unit 11, and the lens barrel of the imaging unit 11 may be integrally assembled with the light shielding box 12. Further, the half mirror 14 may be assembled together with the light shielding box.

(10) The support portion 160 is detachable. For example, the support portion 160 may be replaced by the size or shape of the test object 200.

(11) The object to be inspected may be placed on the light source unit 13 or the light shielding body 15 without using the holding unit 16.

(12) The viewpoint position of the inspection object 200 is not limited to being directly above the object to be detected of the imaging unit 11 in Fig. 2 . It is also necessary to observe the object to be inspected from the side or the oblique direction as necessary, and it is also possible to observe from a plurality of directions at the same time.

[Embodiment 2]

In the above description, an appearance inspection device having a configuration in which the time for shortening the appearance and the accuracy is maintained or improved can be described as an embodiment of the present invention.

However, the quality inspection of industrial products and the like is not only an appearance but also an internal inspection. Therefore, it is possible to plan the quality inspection of a plurality of types of inspections including the visual inspection for a plurality of objects in parallel by the pipeline processing including the inspections as the processing elements, thereby improving the efficiency of the quality inspection. Hereinafter, an inspection system capable of performing such quality inspection will be described as an embodiment of the present invention.

(summary of the structure of the inspection system)

Fig. 6 is a perspective view showing the appearance of the inspection system 100 in the same manner as the present creation.

The inspection system 100 is an inspection system that performs a plurality of inspections of the inspection object, and includes a base 20 and a rotary conveyance unit 30 that includes a circular turntable 31 that is rotatably coupled to the base 20, and is provided by the turntable 31. a plurality of holding portions 32 that support and hold a plurality of objects along the outer circumference of the turntable 31 at specific intervals; a plurality of inspection devices 50, which are disposed at a plurality of positions of the base 20, and when the aforementioned turntable 31 rotates Each of the plurality of objects has a test area on the movement track thereof, and a control device 60 that controls the operations of the rotation conveyance unit 30 and the inspection device 50. The control device 60 overlaps the temporary stop of the turntable 31 with the rotation of the specific angle, and resets the plurality of inspection devices held by the plurality of holding portions 16 during the temporary stop of the turntable 31. The rotation transport unit 30 is controlled in a manner of the inspection area. Further, the control device 60 further controls the plurality of inspection devices by performing inspection of the inspection objects in the inspection area while the plurality of inspection apparatuses 50 are temporarily stopped during the temporary stop of the turntable 31, and is different from each other. 50. Among them, the first inspection device 51 of one of the plurality of inspection devices 50 is the visual inspection device 10 described in the first embodiment.

Each component of the inspection system 100 will be described in more detail.

Each of the above-described constituent elements of the inspection system 100 is disposed in the susceptor 20. The positional relationship with respect to the constituent elements is described in the following Bright.

The turntable 31 provided in the rotary transport unit 30 intermittently rotates at a constant angle in accordance with control by a control device 60 to be described later. The turntable 31 can be realized, for example, using an indexing table. Each of the holding portions 32 has the same configuration as the holding portion 16 of the visual inspection device 10 described in the first embodiment. In other words, each of the holding portions 32 includes the support portion 160, the plurality of arm portions 161, the stage 162, and the plurality of arm length adjusting portions 163 shown in FIG. 5. However, in the second embodiment, the stage 162 and the turntable 31 are integrally formed, whereby the holding portion 32 can be considered to be supported on the turntable 31. Therefore, by rotating the turntable 31, the entire rotary transport unit 30 including the holding portion 32 can be rotated, and by stopping the turntable 31, the entire rotary transport unit 30 including the holding portion 32 can be stopped. The object to be inspected is placed on the support portion 160, and is conveyed so as to draw a circular trajectory along with the rotation of the rotary transport unit 30 (the turntable 31).

Further, in the present embodiment, the shape of the turntable 31 is circular, but this is an illustrative shape used for the description. The turntable provided in the inspection system of the present invention is not limited to a circular structure. When the rotation of the conveyance unit 30 is performed, the rigidity necessary for stably holding the object to be held in each of the holding portions 32 can be obtained, and any shape can be used. For example, a polygon or a shape composed of a combination of a polygon and a circle may also be used. Further, even if it is not the plate-like structure exemplified in the present embodiment, the rotation shaft (not shown) is protected from each other. The holding portion 32 may extend radially, and may be connected to a structure in which such a bar or a tube is combined, and the structure may further include a reinforcing member. In this case, a lightweight rotating transport unit can be obtained as compared with the case of using the turntable on the board.

In the arrangement of the holding unit 32 in the rotary transport unit 30, a case where the rotational transport unit 30 includes four holding units 32 will be described as an example.

FIG. 7 is a schematic view showing a plan view of the rotary transport unit 30 (viewing the XY plane from the Z-axis direction in FIG. 6). The four holding portions 32 are disposed on the inner side of the circular turntable 31 at equal intervals along the outer circumference of the circular turntable 31 in the plan view of the rotary transport unit 30. In other words, in the plan view of the rotary conveyance unit 30, the four holding portions 32 are placed at equal distances from the rotation center point 35 of the rotary conveyance unit 30, and are disposed at equal intervals. In this case, by setting the primary rotation angle (index angle) of the rotary conveyance unit 30 to 90 degrees, the positions of the four support portions 160 when the rotary conveyance unit 30 is temporarily stopped can always be maintained. Further, the distance between the rotation center point 35 of the rotary conveyance unit 30 and each of the support portions 160 may be adjusted to be equidistant by using the arm length adjustment unit 163.

For the plurality of inspection devices 50, two inspection devices of the first inspection device 51 and the second inspection device 52 will be described as an example.

The first inspection device 51 is the visual inspection device 10 described in the first embodiment. In other words, the first inspection device 51 is an appearance inspection device that inspects the appearance of the inspection object, and includes an imaging unit 11, a light shielding box 12, a light source unit 13, a half mirror 14, a light blocking body 15, and a holding unit 16. However, in the second embodiment, the holding portion 32 included in the rotary transport unit 30 corresponds to the holding portion 16. In the first inspection device 51, the rotation conveyance unit 30 (the holding portion 32) is located between the light-shielding box 12 and the light source unit 13, and has a configuration in which the plurality of holding portions 32 are sequentially replaced by the rotation of the rotation conveyance unit 30. The first inspection device 51 is different from the visual inspection device 10 of the first embodiment in this point. In addition, in order to prevent the light from directly entering the object to be inspected from the rotation transport unit 30, the light-shielding box 12, and the light source unit 13 in order to prevent the effect of the configuration of the visual inspection device 10 from being broken, The way the gap enters, adjusts the positional relationship. By using the first inspection device 51 having this configuration as one of the plurality of inspection devices, the step of preventing the appearance inspection becomes a bottleneck and the amount of processing of the inspection system 100 is reduced.

The second inspection device 52 performs an inspection different from the inspection performed by the first inspection device 51. For example, when the test object is a resin lens, for example, the inside of the lens relating to the presence or absence of bubbles, foreign matter, flow marks, fine lines, and the like, and the dirt or scratches that block the light passing through the lens surface, and the change An example of inspection of a recess or a scratch of the direction of the light transmission line. For such a second inspection Set 52, elaborated after using specific examples.

The positional relationship between the two inspection devices 50 and the rotary conveyance unit 30 and the positional relationship of the inspection devices 50 will be described. FIG. 8 is a schematic plan view showing a positional relationship between the two inspection devices 50 and the rotary conveyance unit 30 at the time of temporary suspension. The double line rectangle in the figure represents the inspection device 50. Each of the inspection devices 50 has an inspection area (an area in which the inspection target object is stored at the time of inspection). The dotted circle in the figure indicates the inspection area. The inspection area 510 is an inspection area of the first inspection apparatus 51, and the inspection area 520 is an inspection area of the second inspection apparatus 52. Moreover, the circular shape with the arrow direction in the figure is a movement locus which shows the object according to the rotation of the rotation conveyance part 30. The positioning is performed such that the respective inspection areas of the inspection apparatuses 50 are located on the movement locus of the object to be inspected. In addition, when the test object held by one of the holding portions 32 is located in the inspection region of the first inspection device 51, the inspection device 50 is placed on the other object to be held in the other of the holding portions 32. 2 Positioning is performed in a manner in which the inspection device 52 is in the inspection area.

The control device 60 controls the rotary transport unit 30 (the turntable 31). This control can be realized by controlling the drive device 60 to be communicably connected to a drive device (not shown) that rotationally drives the rotary transport unit 30. Moreover, the control device 60 may further be communicably connected to each of the inspection devices 50, and may be rotated by the control of the control device 60. During the temporary stop of the transfer unit 30, the inspection device 50 performs an operation for inspection. For example, the first inspection device 51 performs photographing of the object to be inspected by the imaging unit 11.

The control by the rotation transport unit 30 of the control device 60 will be described in further detail.

The control device 60 is controlled such that the temporary stop of the rotary transport unit 30 (the turntable 31) and the specific angular rotation overlap each other. In the temporary stop of the turntable 31, the rotation angle (stop position) of the rotary transport unit 30 is controlled such that one of the objects held in the holding unit 32 is positioned in the inspection area of the plurality of inspection apparatuses 50.

Such a control device 60, for example, comprises software, implemented by a dedicated or general purpose or a combination of such computer systems. FIG. 9 is a functional block diagram of the inspection system 100. As shown in FIG. 9, the control device 60 can be controlled by among the components of the inspection system 100. In the example shown in the figure, the drive device 300, the first inspection device 51, and the second inspection device 52 are shown. The communication connection performs transmission of each component by a control command, data reception from each component, and the like.

Further, the position of the control device 60 may be any position that can be communicated with each component of the control target. example It can also be located under the base 20. Further, it is also possible to use each component of the remote control object in any place.

(Check the system's action)

Next, the operation of the inspection system 100 will be described. In the example, the inspection of the four objects 200 to 203 according to the inspection system 100 having the above-described configuration will be described with reference to FIG. 8 . Each test object was inspected in the following order.

(Step 1) Mounting of the object to be rotated by the transport unit 30

(Step 2) Inspection of the object to be inspected according to the first inspection device 51

(Step 3) Inspection of the object to be inspected according to the second inspection device 52

(Step 4) Discharge of the test object from the rotary transport unit 30

In the initial state, it is set such that the object to be inspected is not placed on the rotary transport unit 30.

First, in a state in which the rotary transport unit 30 is stopped, the object 200 is placed on the closest support unit 160 at a position indicated by "IN" in FIG. 8 (subject 200, step 1).

Next, the rotary transport unit 30 is temporarily stopped by rotating 90 degrees in the counterclockwise direction. By this rotation, the test object 200 is transported into the inspection area 510. During the temporary stop, the test object 200 is inspected by the first inspection device 51 in the inspection region 510 (subject 200, step 2). Similarly, during the temporary stop, the test object 201 is placed on the closest support portion 160 at the "in" position (subject 201, step 1).

Next, the rotary transport unit 30 is again rotated 90 degrees in the counterclockwise direction and then temporarily stopped. By this rotation, the object to be inspected 200 is transported into the inspection area 520, and the object 201 is transported into the inspection area 510. During the temporary stop, the test object 200 is inspected by the second inspection device 52 in the inspection region 520 (subject 200, step 3), and the test object 201 is in the inspection region 510 according to the first inspection device. 51 is inspected (subject 201, step 2). In the temporary stop, the test object 202 is placed on the closest support portion 160 at the "in" position (subject 202, step 1).

Next, the rotary transport unit 30 is again rotated 90 degrees in the counterclockwise direction and then temporarily stopped. By this rotation, the test object 200 is transported to the position indicated by "OUT" in FIG. 8, and the object 201 is transported into the inspection area 520. Further, the object 202 is transported into the inspection region 510 by the rotation. During the temporary stop, the test object 200 is taken out from the support portion 160 (subject 200, step 4). In addition, during the temporary stop, the test object 201 is inspected by the second inspection device 52 (subject 201, step 3), and the test object 202 is inspected by the first inspection device 51 in the inspection region 510 ( Test object 202, step 2). During the temporary stop, the test object 203 is placed on the closest support at the "in" position. Part 160 (subject 203, step 1).

After that, the sample 201 is transported to the "out" position and then discharged (subject 201, step 4). In the inspection area 520, the inspection object 520 is inspected by the second inspection device 52 (subject 202, step 3), and is transported to the "out" position, and then discharged (subject 202, step 4). The test object 203 is inspected by the first inspection device 51 in the inspection region 510 (subject 203, step 2), and is inspected by the second inspection device 52 in the inspection region 520 (subject 203, step 3) ), and it is transported to the "out" position and discharged (subject 203, step 4). Each test object only ends one step during the temporary stop of one time. FIG. 10 is a diagram illustrating a situation in which the above steps are performed in parallel according to the inspection system 100.

In the quality inspection by the inspection system 100 having the above configuration, the plurality of objects to be rotated and held by the holding unit 32 provided in the rotary conveyance unit 30 are trajectories of the respective rotational movements. Accept multiple checks in sequence. Further, these plurality of inspections are performed in parallel for a plurality of objects. Therefore, the quality check can be performed efficiently in time. Further, since the object is transported along the circular movement trajectory, the object is transferred without passing through the unnecessary route, and the quality inspection can be performed efficiently in space.

[Modification of Embodiment 2]

As for the object to be inspected, it is necessary to check the internal state as part of the quality inspection. For example, as shown in the lens, in the quality inspection of the light-transmitting optical element, in addition to the inspection based on the surface coating of the visual inspection device, it is necessary to carry out the object related to the presence or absence of bubbles, foreign matter, flow marks, fine lines, and the like. Internal inspection, inspection of the surface of the lens to cover the dirt or scratches that penetrate the light, changes in the direction of the light penetration, or scratches. In the following, the second inspection device 52 included in the inspection system 100 is an example of a device for performing internal inspection of the inspection object.

FIG. 11 is a schematic cross-sectional view showing an example of the second inspection device 52 that the inspection system 100 can include when the sample is an optical element having a light collecting function.

As shown in FIG. 11, the second inspection apparatus 51 of the other of the plurality of inspection apparatuses 50 included in the inspection system 100 is located on the opposite side of the observed surface of the inspection object in the inspection area, and includes: The light source unit 23 that emits light; and the light-shielding body 25 that blocks the light that is emitted toward the object directly in the direction of the light emitted from the light source unit 23 is blocked. The light blocking body 25 is disposed between the light source unit 23 and the object, and is closer to the object than the focus of the object. Further, the light-blocking body 25 has a light-collecting beam which is parallel to the central axis of the collected light beam at the position described above, and the collected light beam which is incident on the object to be observed from the side of the object to be observed. The cross-sectional shape of the collected light beam obtained when the surface is cut is approximately the same shape.

The light source unit 23 has the same configuration as the light source unit 13 of the first embodiment.

The light-shielding body 25 may be realized by, for example, printing a black colored portion on a resin-made sheet having high transparency disposed under the test object 200. However, by arranging the shape and the position as described above, the light emitted from the light source unit 23 is incident on the object only from the outside of the light shielding body 25. Thereby, the second inspection device 52 can perform dark field observation of the test object. In the dark field observation, it is easy to find a small or bright color (or a relatively high light transmittance) inside the object of the lens, such as a foreign matter, a flow mark, or the like, and an abnormality such as a molding defect or a fine line which is low in comparison with a normal portion. Therefore, as shown in the lens, as long as the inspection system 100 is used, it is possible to perform quality inspection of the plurality of objects in parallel in addition to the fact that the appearance must be investigated for the presence or absence of the abnormality.

Even in the second inspection apparatus having such a configuration, it is possible to obtain an image of the object to be inspected without a bright portion depending on the light source or a dark portion caused by a dark portion or a missing portion of the light source. Thereby, it is not necessary to observe from a plurality of directions in order to inspect the entire object. For this reason, it is possible to accurately determine the presence or absence of an abnormality of the entire object in a short time with high accuracy. Therefore, it is possible to prevent the second inspection device 52 according to the second inspection device 52. The inspection process becomes a bottleneck and the throughput of the inspection system 100 is reduced.

In the above description, the case where the test object 200 is an optical element having a light collecting function is described. However, the test object 200 is not limited to a so-called convex lens. When the test object 200 is a concave lens, a convex lens that cancels the diffusion of the light passing through the concave lens and further converges can be provided on the surface side of the test object 200 opposed to the light shielding body 25 The inspection of the concave lens according to the above dark field observation is performed. Not only a concave lens but also a combined lens. In addition, even if the test object 200 is an optical element (for example, an optical filter) that does not have a light collecting function, the light that penetrates the test object 200 is disposed on the side of the light source unit as viewed from the object 200. The light-shielding body of the size and shape shown above can be inspected according to the dark field observation.

Industrial availability

This creation can be applied to an appearance inspection device, and can also be applied to an inspection system including the inspection device, and is an inspection system that performs various inspections.

10‧‧‧ appearance inspection device

11‧‧‧Photography Department

110‧‧‧object lens

111‧‧‧Mirror tube

112‧‧‧Photographing components

120‧‧‧ observation hole

121‧‧‧ observation hole cover

13‧‧‧Light source

14‧‧‧Half mirror

15‧‧‧ Shielding body

16‧‧‧ Keeping Department

200‧‧‧Checked objects

Claims (7)

An appearance inspection device which is a visual inspection device that inspects the appearance of the test object by using a reflected light image of the light reflected from the test object, and is characterized in that the light source portion is located opposite to the observed surface of the test object. a light that emits light toward the object; the half mirror is located on the observed surface of the object, and reflects light emitted from the light source portion toward the observed surface, and causes light reflected on the observed surface to pass through And a light-shielding body disposed between the light source unit and the object to be detected, and illuminating light emitted from the light source unit in a direction directly irradiated to the object to be inspected, the light source unit a light source constituting the light beam that reflects the light image, and the light emitted from the light reflecting portion of the half mirror that faces the object is irradiated with the light having the same illuminance, and the half mirror is emitted from the light source unit. The light does not have holes or slits in the area reflected by the observed surface. The visual inspection device according to claim 1, wherein the half mirror has a concave surface facing the object to be observed. The visual inspection device of claim 1 or 2, wherein The half mirror has a dome shape that covers the side of the object to be observed of the object to be observed. The visual inspection device according to claim 1 or 2, wherein the half mirror has a characteristic that the transmittance of light at least in the wavelength band of 450 nm to 700 nm is approximately coincident with the reflectance. The visual inspection device according to claim 2, wherein a laminated film in which a film mainly composed of titanium and a film containing cerium oxide as a main component are laminated is formed in the concave surface. An inspection system that is an inspection system that performs inspection of a plurality of objects in parallel, and includes: a susceptor; and a rotation transport unit that includes a turntable that is rotatably coupled to the susceptor and supported by the turntable; And a plurality of holding portions that hold the plurality of objects in the rotating disk at a predetermined interval; the plurality of inspection devices are disposed at a plurality of positions of the susceptor, and the movement trajectories of the plurality of objects to be detected when the turntable rotates Each of the upper surface has an inspection area; and a control device controls the operation of the rotary conveyance unit and the inspection device, wherein the control device overlaps the temporary stop of the turntable and the specific angular rotation, and the vehicle is temporarily stopped during the temporary stop of the turntable To maintain separate retention in the aforementioned The control unit of the plurality of inspection apparatuses is located in the inspection area of the plurality of inspection apparatuses, and controls the rotation conveyance unit so that the plurality of inspection apparatuses are respectively located in the inspection area during the temporary stop of the turntable The plurality of inspection apparatuses are controlled by the inspection of the inspection object, and the inspection apparatus is different from each other, and the first inspection apparatus of one of the plurality of inspection apparatuses is the one described in any one of claims 1 to 5. Visual inspection device. The inspection system according to claim 6, wherein each of the plurality of objects to be detected is an optical element having a light collecting function, and the second inspection device of the other of the plurality of inspection devices includes a light source unit located in the inspection On the opposite side of the observed surface of the test object, the light is emitted toward the test object; and the light-blocking body is disposed between the light source unit and the test object, and is closer to the aforementioned target than the focal length of the test object. The position of the sample is such that the collected light beam that is incident on the object to be detected from the side of the object to be observed from the side of the object to be observed is cut at a position perpendicular to the central axis of the collected light beam. The obtained collected light beam has a shape in which the cross-sectional shape of the collected light beam is approximately uniform, and the light emitted from the light source portion blocks light that is emitted in a direction directly irradiated to the object.