CN102608098A - Confocal raman spectrometer and treatment method for laser path of confocal raman spectrometer - Google Patents
Confocal raman spectrometer and treatment method for laser path of confocal raman spectrometer Download PDFInfo
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- CN102608098A CN102608098A CN2012100403361A CN201210040336A CN102608098A CN 102608098 A CN102608098 A CN 102608098A CN 2012100403361 A CN2012100403361 A CN 2012100403361A CN 201210040336 A CN201210040336 A CN 201210040336A CN 102608098 A CN102608098 A CN 102608098A
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Abstract
The invention relates to a confocal raman spectrometer and a treatment method for a laser path of the confocal raman spectrometer. The treatment method comprises the steps that: one laser is selected to emit laser light which enters a laser transmission device, the laser light is transmitted to a continuously adjustable laser attenuator by using a group of reflectors in a laser switching device in the laser transmission device, corresponding to the laser, the intensity of the laser light is attenuated, the laser light treated by the continuously adjustable laser attenuator is reflected to an edge light filter switching device, the laser light is reflected by the edge light filter switching device and irradiates a substance to be detected on a substance stage of a microscope device through an objective lens of the microscope device, raman signals, rayleigh scattering light and laser light generated by the substance to be detected after being excited by the laser light are collected by the objective lens of the microscope device and return to the edge light filter switching device; an edge light filter filters out the rayleigh scattering light and the laser light and leaves the raman signals, and finally, the raman signals form a raman spectrum through a signal confocal device and a spectrum detection device.
Description
Technical field
The present invention relates to a kind of Raman spectroscopy, more particularly, relate to the disposal route of laser optical path in a kind of confocal Raman spectra appearance with better monitoring effect and this confocal Raman spectra appearance.
Background technology
Light and matter interaction have various ways, and scattering is wherein a kind of.In light scattering, the scattered light frequency is different with the incident light frequency is called inelastic scattering, also cries Raman scattering.Raman spectrum just is based on a kind of spectral technique of Raman scattering.In Raman spectrum; The difference of frequency is called as Raman shift between scattered light and the incident light; The research Raman shift can obtain the vibration and the rotation information of chemical bond in the molecule; And the vibration information of lattice in the crystal, so Raman spectrum is a kind of spectral technique of important research material microstructure.The equipment that utilizes the Raman scattering technology that microscopic species is studied at present mainly contains the higher relatively confocal Raman spectra appearance that is combined with the confocal microscopy device of sensitivity; Problems such as but present confocal Raman spectra appearance exists the measured matter kind limited, and wavelength band bulky and detected spectrum is narrow.
Summary of the invention
The object of the present invention is to provide the disposal route of a kind of confocal Raman spectra appearance and laser optical path thereof; Utilize this confocal Raman spectra appearance to select different laser according to different material; And select different laser scattered light filter, when widening material scope to be detected, can effectively reduce overall volume.
Confocal Raman spectra appearance among the present invention includes laser instrument; Laser transmission apparatus; Microscope equipment; The edge switching device of optical fiber; Video and light path switching device; Confocal device of signal and spectrum detection device; The laser that said laser instrument sends gets into the object lens of said microscope equipment after the transmission of said laser transmission apparatus; Directly directive is placed on the measured matter on the said microscope equipment objective table; The Raman signal that measured matter produces after by laser excitation; Said edge switching device of optical fiber is collected and transferred to Rayleigh scattering light and laser through the object lens of microscope equipment; Only there is Raman signal to form Raman spectrum behind filtering Rayleigh scattering light and the laser through confocal device of signal and spectrum detection device
Parallel up and down three groups of laser instruments, i.e. first laser instrument, second laser instrument and the 3rd laser instrument of being provided with of a side in said confocal Raman spectra appearance; Said laser transmission apparatus includes the laser switching device shifter and is provided with light barrier with the front end that is positioned at said three laser instruments; On light barrier, offer three light holes corresponding with said three laser instruments respectively and laser that three laser instruments are sent passes; The light hole place is equipped with the laser rays wave filter of corresponding three laser instruments respectively; Be provided with the laser switching device shifter at said light barrier opposite side, this laser switching device shifter comprises: three are separately fixed at first reflective mirror that can the laser that three laser instruments send be reflected by fixed angle on the shell holder of confocal Raman spectra appearance; Be provided with corresponding with three first reflective mirrors is used for three second reflective mirrors that the first reflective mirror laser light reflected is reflected vertically upward; The 3rd reflective mirror of three said second reflective mirror laser light reflected is accepted in three groups of general being used to of laser instrument that above three second reflective mirrors, are provided with; On the shell holder that is arranged on the confocal Raman spectra appearance that two second reflective mirrors corresponding with first laser instrument, second laser instrument can move back and forth through Electric Machine Control in these three second reflective mirrors; Second reflective mirror corresponding with the 3rd laser instrument then directly is fixed on the shell holder, and in addition the shell holder of said confocal Raman spectra appearance is provided with and is used to receive laser that external laser sends and the 4th reflective mirror that reflexes to said the 3rd reflective mirror;
Transfer to continuous adjustable laser attenuating device through said the 3rd reflective mirror laser light reflected; This continuous adjustable laser attenuating device is an eyeglass by the direct continuous decay that drives of stepper motor; Said laser pass said continuous adjustable laser attenuating device after the 5th reflective mirror with laser-bounce to edge switching device of optical fiber, the laser further edge optical filter in the edge switching device of optical fiber reflexes to the object lens of said microscope equipment;
Laser shines the measured matter that is placed on the said microscope equipment objective table through the object lens of said microscope equipment; Said edge switching device of optical fiber is collected and be back to Raman signal, Rayleigh scattering light and the laser that measured matter produces after by laser excitation through the object lens of microscope equipment; Said edge switching device of optical fiber includes the quadra that laterally arranges more than four; Said four quadras are fixedly connected and are integral; Mode through slide block, slide rail is fixed on the shell holder of said confocal Raman spectra appearance; In said each quadra, be arranged with one or two edge optical filter, the slide block that connects said quadra is driven by an independent motor.
Identical with the structure of said first laser instrument, two second reflective mirrors that second laser instrument is corresponding; All with the form fix of slide block, slide rail on said light barrier; And be equipped with independent motor, and wherein said slide block is connected fixing with said second reflective mirror, and said slide rail directly is fixed on the said light barrier; Said slide block is provided with tooth bar, this tooth bar with by said motor-driven gearing mesh.
The shell holder that said laser switching device shifter is located at said confocal Raman spectra appearance is used to be provided with in the casing of said laser instrument front end; This casing is square; Said three first reflective mirrors and said three second reflective mirrors are separately fixed on the relative two side of said casing; Below the second corresponding reflective mirror of said second laser instrument, be provided with and be used to accept laser that the laser instrument outside the said confocal Raman spectra appearance sends and the 4th reflective mirror that reflexes to said the 3rd reflective mirror; Being connected to of the shell holder of the 4th reflective mirror and said confocal Raman spectra appearance can be done parallel mobile connection and fix, and said the 4th reflective mirror on said casing, and is equipped with independent motor with the form fix of slide block, slide rail; Wherein said slide block is connected fixing with said the 4th reflective mirror; Said slide rail directly is fixed on the said casing, and said slide block is provided with tooth bar, this tooth bar with by said motor-driven gearing mesh.
Said three laser instruments are separately fixed on the support, and said support further is fixed on the shell holder of said confocal Raman spectra appearance.
Said edge optical filter is replaced by the trap optical filter.
Between said microscope equipment and said edge switching device of optical fiber, be provided with said video and light path switching device; The sidewall of the shell holder of said confocal Raman spectra appearance is provided with a LED white light illumination device simultaneously, and this LED white light illumination device is connected with said video and light path switching device through light guide optical fiber.
The surface of said LED white light illumination device is provided with a square lighttight housing; Be provided with the joint that is used for said light guide optical fiber plug in the centre of said housing; The other end of said light guide optical fiber connects said video and light path switching device; Said microscope equipment is provided with the Halogen lamp LED white light transmission illuminator that can regulate brightness below objective table, in the middle of the objective table of said microscope equipment, be provided with the through hole that the light that supplies said Halogen lamp LED white light transmission illuminator passes through.
Said continuous adjustable laser attenuating device includes the rounded periphery framework; Be embedded with the continuous adjustable laser decay of whole piece eyeglass in the centre of this rounded periphery framework; Be provided with in the continuous centre of adjustable laser decay eyeglass and be connected the through hole of fixing with stepper motor; Surface at said rounded periphery framework is provided with identification point, is provided with simultaneously the U type optoelectronic switch of the position that is used to detect said identification point in said rounded periphery framework one side.
Among the present invention in the confocal Raman spectra appearance disposal route of laser optical path include following steps:
1) selects one of them laser instrument to send laser, get into laser transmission apparatus;
2) select one group of corresponding in the laser switching device shifter of laser transmission apparatus reflective mirror with the extremely continuous adjustable laser attenuating device of Laser Transmission, the intensity of laser is made attenuation processing, obtain to detect the required laser intensity of measured object with said laser instrument;
3) will be through laser-bounce to the edge switching device of optical fiber after said continuous adjustable laser attenuating device is handled, the one group edge optical filter corresponding with said laser instrument reflects laser in the selection edge switching device of optical fiber;
4) Laser Transmission after the reflection of edge switching device of optical fiber shines the measured matter that is placed on the said microscope equipment objective table through the object lens of microscope equipment; Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser are collected and are back to said edge switching device of optical fiber through the object lens of microscope equipment, and the confocal device of Raman signal entering signal is only arranged behind edge optical filter filtering Rayleigh scattering light and the laser;
5) by spectrum detection device Raman signal is formed spectrum at last.
Also include measured matter on the said microscope equipment objective table is carried out the step that video camera is regulated.
Confocal Raman spectra appearance among the present invention is by means of the setting of many group laser instruments; And the setting of laser switching device shifter and edge switching device of optical fiber; Can select different laser according to different measured matters; Widen spectral detection wavelength band and detection material scope, and passed through the setting of LED white light illumination device, the overall volume of effectively having reduced spectrometer.
Description of drawings
Fig. 1 is the schematic perspective view one of confocal Raman spectra appearance among the present invention;
Fig. 2 is the schematic perspective view two of confocal Raman spectra appearance among the present invention, and the laser instrument and the laser transmission apparatus of spectrometer has been shown among this figure;
Fig. 3 is the schematic perspective view three of confocal Raman spectra appearance among the present invention, and the continuous adjustable laser attenuating device of spectrometer has been shown among this figure;
Fig. 4 is the enlarged diagram of edge switching device of optical fiber among the present invention;
The enlarged diagram that Fig. 5 is fixedly connected for second reflective mirror among the present invention;
Fig. 6 is the enlarged diagram of continuous adjustable laser attenuating device among the present invention.
Embodiment
To combine accompanying drawing that the specific embodiment among the present invention is done further explain below.
As shown in Figure 1; Confocal Raman spectra appearance among the present invention includes laser instrument, laser transmission apparatus, continuous adjustable laser attenuating device, video and light path switching device, microscope equipment, edge switching device of optical fiber, the confocal device of signal and spectrum detection device, wherein:
Laser instrument includes up and down parallel first laser instrument 10, second laser instrument 11 and the 3rd laser instrument 12 that is provided with; What these three laser instruments were arranged side by side is fixed on the support 2; And support 2 further is fixed on the shell holder 1 of confocal Raman spectra appearance; These three laser instruments all are fixedly mounted on a side of the shell holder 1 of confocal Raman spectra appearance; Combine back three laser instruments to be closed in one independently in the casing with shell body, as shown in Figure 1, also can be that wherein two second laser instruments 11 and the 3rd laser instrument 12 is closed in one independently in the casing; As long as make three laser instruments can independently send parallel three beams of laser; What the present invention selected for use is three kinds of red lasers commonly used, green (light) laser and infrared light laser instrument, certainly not as limit, can install and fix the different laser device according to the demand of spectrometer for the kind of laser instrument.
Laser transmission apparatus includes the laser switching device shifter and is provided with light barrier 3 with the front end that is positioned at three laser instruments; On light barrier 3, offer three light holes 4 that the laser that three laser instruments are sent passed with three laser instruments respectively; And the laser rays wave filter of corresponding different wave length laser instrument is installed at light hole 4 places, the laser that three laser instruments send gets into the laser switching device shifter after through the laser rays wave filter in the light hole 4.As shown in Figure 2; The laser switching device shifter includes three first reflective mirrors 6 on the shell holder 1 that is separately fixed at the confocal Raman spectra appearance, and is parallel arrangement setting up and down, these three first reflective mirrors, 6 respectively corresponding three laser instrument settings; Can the laser that three laser instruments send be reflected by fixed angle; Concrete angle is by artificial adjustment, and this is to realize easily for a person skilled in the art, no longer specifies.As shown in Figure 2; Be provided with corresponding with three first reflective mirrors 6 is used for second reflective mirror 100,110,120 that first reflective mirror, 6 laser light reflected are reflected vertically upward; Be arranged on movably on the shell holder 1 of confocal Raman spectra appearance with first laser instrument 10, second laser instrument, 11 corresponding two second reflective mirrors 100,110 that are positioned at the top in three second reflective mirrors, and directly be fixed on the shell holder 1 of confocal Raman spectra appearance with the 3rd laser instrument 12 second corresponding reflective mirrors 120.Two second reflective mirrors 100,110 corresponding with first laser instrument 10, second laser instrument 11 all with the form fix of slide block 8, slide rail 9 on light barrier 3, like Fig. 2 and shown in Figure 5, be example with second reflective mirror 100; Slide block 8 is connected fixing with second reflective mirror 100; Slide rail 9 directly is fixed on the light barrier 3, and slide block 8 is provided with tooth bar 22, this tooth bar 22 and the gear that is driven by motor 20 23 engagements; Promptly when motor 20 rotates, can drive be provided with tooth bar 22 slide block 8 along slide rail 9 move left and right.Because two second reflective mirrors 100,110 are driven by different motor 20 respectively, therefore can control respectively according to demand and move to desired location.Detailed process is following; When using first laser instrument 10; Independently controlled by Control Software, the laser that first laser instrument 10 is sent directly passes first reflective mirror 6 of laser rays wave filter to the top of light hole 4, laser to the second reflective mirror 100 after first reflective mirror, 6 reflections of the top; The laser vertical of after 100 reflections of second reflective mirror, first laser instrument 10 being sent transfers to the 3rd reflective mirror 7, and laser is done further transmission.The shell holder 1 of confocal Raman spectra appearance be positioned at three second reflective mirrors 100,110,120 above be provided with the 3rd reflective mirror 7 that can accept the laser that three second reflective mirrors 100,110,120 transmit respectively.When needing to use second laser instrument 11; Independently control by Control Software; The laser that second laser instrument 11 is sent directly passes the laser rays wave filter of light hole 4 to first reflective mirror 6 that is positioned at the centre position; Laser to the second reflective mirror 110 after first reflective mirror, 6 reflections in centre position, Laser Transmission to the three reflective mirrors 7 that after 110 reflections of second reflective mirror, second laser instrument 11 sent again further transmit laser.At this moment, with second reflective mirror 110 move to can reflector laser desired location, simultaneously second reflective mirror 100 is moved to the position that does not influence the transmission of second reflective mirror, 110 reflector lasers.When using the 3rd laser instrument 12; Identical with the use of above-mentioned laser instrument; Each laser instrument is all by independent Control Software control; And open by independent switch, the laser rays wave filter that the laser that the 3rd laser instrument 12 is sent directly passes light hole 4 is to first reflective mirror 6 that is positioned at lower position, laser to the second reflective mirror 120 after first reflective mirror 6 of below reflects; Laser Transmission to the three reflective mirrors 7 that after 120 reflections of second reflective mirror, the 3rd laser instrument 12 sent further transmit laser.Respectively control position that second reflective mirror 100,110 all move to do not influence second reflective mirror 120 reflector lasers transmission by control system this moment.That is to say; For different measured matters; Can select to use various lasers; And owing to use the different laser device, then select any one group of reflective mirror in the laser switching device shifter of laser transmission apparatus with Laser Transmission to the three reflective mirrors 7, again by the 3rd reflective mirror 7 with selected Laser Transmission to laser attenuation device.
Be used to be provided with in the casing of laser instrument front end because laser transmission apparatus is located at the shell holder of confocal Raman spectra appearance; This casing is square; And three first reflective mirrors 6 and three second reflective mirrors 100,110,120 are separately fixed on the relative two side of casing; As shown in Figure 2; Be positioned on the casing shell holder 1 second reflective mirror 110 below to be provided with the structure of connected mode and second reflective mirror 100 of the 4th reflective mirror 21, the four reflective mirrors 21 and the shell holder 1 of confocal Raman spectrometer identical, and drive by independent motor; Laser-bounce to the three reflective mirrors 7 that the laser instrument that utilizes the 4th reflective mirror 21 that confocal Raman spectra appearance of the present invention is set separately sends; When promptly three laser instruments being equipped with of confocal Raman spectra appearance also are not enough to use in the present invention, can be by means of the laser instrument of outside, the laser that external laser is sent reflexes to the 3rd reflective mirror 7 through the 4th reflective mirror 21; It is just identical with the laser instrument that confocal Raman spectrometer itself is equipped with to reflex to the 3rd reflective mirror 7 backs, and also control the position that second reflective mirror 100,110 all moves to does not influence the transmission of the 4th reflective mirror 21 reflector lasers respectively by control system this moment.For this reason, can select different laser according to the difference of measured matter.
Get into continuous adjustable laser attenuating device behind the 3rd reflective mirror 7 of laser in laser transmission apparatus; Like Fig. 3 and shown in Figure 6; The adjustable laser attenuating device includes a rounded periphery framework 203 continuously; Be embedded the continuous adjustable laser decay eyeglass 202 of whole piece in the centre of rounded periphery framework 203; Be provided with a through hole 201 in the middle of the adjustable laser decay eyeglass 202 continuously, this through hole 201 can be connected through web member with the output shaft of stepper motor to be fixed, and under the driving of stepper motor, can drive continuous adjustable laser decay eyeglass 202 and rotate; Thereby can select to use eyeglass 202 optional positions that laser is carried out attenuation processing; Be provided with identification point 206 on the surface of rounded periphery framework 203, be provided with U type optoelectronic switch 204, on said U type optoelectronic switch 204, be provided with the detecting device (not shown) that is used for sensing identification point 206 in rounded periphery framework 203 1 sides.Can confirm the reference position of eyeglass 202 to come the accurately position of rotation of the said decay eyeglass 202 of control through stepper motor on this basis through identification point 206 and U type optoelectronic switch 204.Utilize this continuous adjustable laser attenuating device to make attenuation processing to laser according to demand, and because the continuously use of adjustable laser attenuating device, decay setting range that can expansion of laser light enlarges the range of choice of measured matter.
As shown in Figure 3; Laser passes continuous adjustable laser attenuating device after the 5th reflective mirror 50 reflexes to edge switching device of optical fiber 60; Laser is further reflexed to the object lens 704 of microscope equipment 70 by edge switching device of optical fiber 60; Microscope equipment 70 is a microscope, and concrete structure and principle of work are no longer detailed.Microscope equipment 70 is provided with the objective table 701 that is used to place measured matter below object lens 704; The centre of this objective table 701 offers through hole 702; Corresponding position is provided with the Halogen lamp LED white light transmission illuminator 703 that can regulate brightness below this through hole 702 simultaneously; When transparent measured matter is detected, can throw light on to measured matter from the measured matter below.And can regulate the brightness of this Halogen lamp LED white light transmission illuminator 703 as required, thereby can shoot the photo of multiple different-effect.Because the control of Halogen lamp LED white light transmission illuminator 703 brightness and unlatching and closed control are to realize easily for a person skilled in the art, therefore no longer detailed description.
As depicted in figs. 1 and 2; Be provided with video and light path switching device 80 on the edge of between switching device of optical fiber 60 and the microscope equipment 70; This video and light path switching device 80 are positioned at the top of microscope equipment 70; Place in the casing of a sealing and since the shooting process in need throw light on to measured matter, the confocal Raman spectra appearance among the present invention be positioned on the shell holder 1 of confocal Raman spectra appearance the laser instrument installation position above be provided with a LED white light illumination device 800; This LED white light illumination device 800 is transported to video and light path switching device 80 through light guide optical fiber 801 with light source; The surface of LED white light illumination device 800 is provided with a square lighttight housing 802, is provided with the joint 803 that is used for light guide optical fiber 801 plugs in the centre of housing 802, and the other end of light guide optical fiber 801 connects video and light path switching device 80.So; All light that LED white light illumination device 800 is sent can enter to video and light path switching device 80 through light guide optical fiber 801; The time utilize the beam splitter in video and the light path switching device 80 that the LED white light source is transferred to the object lens of microscope equipment 70 in shooting, measured matter is thrown light on from the top of measured matter, and when laser detection; Utilize beam splitter that the LED white light source is removed; Do not influence the transmission of laser, LED white light illumination device 800 is little with respect to the volume of incandescent lamp, and brightness is high.
The direct directive of laser that gets into microscope equipment 70 object lens 704 is placed on the measured matter on microscope equipment 70 objective tables 701; Edge switching device of optical fiber 60 is collected and be back to Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser through the object lens 704 of microscope equipment 70; As shown in Figure 4; This edge switching device of optical fiber 60 includes the quadra 600 that laterally arranges more than four (be example with four quadras among the present invention, but not as limit, can make corresponding changes according to the increase of laser instrument); And all quadras 600 link into an integrated entity, and can make same moved further.All quadras 600 that link into an integrated entity are fixed on the shell holder 1 of confocal Raman spectra appearance with the mode of slide block, slide rail, and the quadra 600 that wherein links into an integrated entity is connected fixing with slide block, and slide rail directly is fixed on the shell holder 1 of confocal Raman spectra appearance; Integrally formed tooth bar 601 on the slide block; This tooth bar 601 and gearing mesh, this gear drives (not shown) by an independent motor, and is promptly can driving sliding block under the control of control circuit parallel mobile; And do parallelly can to move by driven in synchronism quadra 600 when mobile when slide block; Owing in each quadra 600, be arranged with one or two edge optical filter 602, this edge optical filter 602 can be substituted by the trap filter disc, and the different wave length of each edge optical filter ability filtering laser; Therefore; When detecting different materials, can select the edge optical filter 602 of multiple various combination according to demand, remove the laser of unwanted wave band.
By only having Raman signal finally to form Raman spectrum behind edge switching device of optical fiber 60 filtering Rayleigh scattering lights and the laser through confocal device and spectrum detection device.Can be used for material is analyzed and researched.Confocal Raman spectra appearance among the present invention utilizes said structure that laser optical path is done special processing, and concrete disposal route includes following steps:
1) select one of them laser instrument to send laser according to measured matter, independently controlled by the control knob that is located at confocal Raman spectra appearance surface of shell, the laser that sends gets into laser transmission apparatus;
2) select one group of corresponding in the laser switching device shifter of laser transmission apparatus reflective mirror with the extremely continuous adjustable laser attenuating device of Laser Transmission, the intensity of laser is made attenuation processing, obtain to detect the required respective strengths of measured matter with said laser instrument;
3) will be through laser-bounce to the edge switching device of optical fiber after said continuous adjustable laser attenuating device is handled, by the edge switching device of optical fiber further with the object lens of laser-bounce to microscope equipment;
4) laser radiation in the entering microscope equipment object lens is to the measured matter that is placed on the said microscope equipment objective table; Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser are collected and are back to said edge switching device of optical fiber through the object lens of microscope equipment, only have Raman signal finally to form Raman spectrum through confocal device of signal and spectrum detection device behind edge optical filter filtering Rayleigh scattering light and the laser.
The disposal route of laser optical path also includes measured matter on the said microscope equipment objective table is carried out the step that video camera is regulated in the confocal Raman spectra appearance of the present invention.
Claims (10)
1. confocal Raman spectra appearance; Include laser instrument, laser transmission apparatus, microscope equipment, edge switching device of optical fiber, video and light path switching device, the confocal device of signal and spectrum detection device; The laser that said laser instrument sends gets into the object lens of said microscope equipment after the transmission of said laser transmission apparatus; Directly directive is placed on the measured matter on the said microscope equipment objective table; Said edge switching device of optical fiber is collected and transferred to Raman signal, Rayleigh scattering light and the laser that measured matter produces after by laser excitation through the object lens of microscope equipment; Only there is Raman signal to form Raman spectrum behind filtering Rayleigh scattering light and the laser, it is characterized in that through confocal device of signal and spectrum detection device
Parallel up and down three groups of laser instruments, i.e. first laser instrument, second laser instrument and the 3rd laser instrument of being provided with of a side in said confocal Raman spectra appearance; Said laser transmission apparatus includes the laser switching device shifter and is provided with light barrier with the front end that is positioned at said three laser instruments; On light barrier, offer three light holes corresponding with said three laser instruments respectively and laser that three laser instruments are sent passes; The light hole place is equipped with the laser rays wave filter of corresponding three laser instruments respectively; Be provided with the laser switching device shifter at said light barrier opposite side, this laser switching device shifter comprises: three are separately fixed at first reflective mirror that can the laser that three laser instruments send be reflected by fixed angle on the shell holder of confocal Raman spectra appearance; Be provided with corresponding with three first reflective mirrors is used for three second reflective mirrors that the first reflective mirror laser light reflected is reflected vertically upward; The 3rd reflective mirror of three said second reflective mirror laser light reflected is accepted in three groups of general being used to of laser instrument that above three second reflective mirrors, are provided with; On the shell holder that is arranged on the confocal Raman spectra appearance that two second reflective mirrors corresponding with first laser instrument, second laser instrument can move back and forth through Electric Machine Control in these three second reflective mirrors; Second reflective mirror corresponding with the 3rd laser instrument then directly is fixed on the shell holder, and in addition the shell holder of said confocal Raman spectra appearance is provided with and is used to receive laser that external laser sends and the 4th reflective mirror that reflexes to said the 3rd reflective mirror;
Transfer to continuous adjustable laser attenuating device through said the 3rd reflective mirror laser light reflected; This continuous adjustable laser attenuating device is an eyeglass by the direct continuous decay that drives of stepper motor; Said laser pass said continuous adjustable laser attenuating device after the 5th reflective mirror with laser-bounce to edge switching device of optical fiber, the laser further edge optical filter in the edge switching device of optical fiber reflexes to the object lens of said microscope equipment;
Laser shines the measured matter that is placed on the said microscope equipment objective table through the object lens of said microscope equipment; Said edge switching device of optical fiber is collected and be back to Raman signal, Rayleigh scattering light and the laser that measured matter produces after by laser excitation through the object lens of microscope equipment; Said edge switching device of optical fiber includes the quadra that laterally arranges more than four; Said four quadras are fixedly connected and are integral; Mode through slide block, slide rail is fixed on the shell holder of said confocal Raman spectra appearance; In said each quadra, be arranged with one or two edge optical filter, the slide block that connects said quadra is driven by an independent motor.
2. confocal Raman spectra appearance according to claim 1 is characterized in that, and is identical with the structure of said first laser instrument, two second reflective mirrors that second laser instrument is corresponding; All with the form fix of slide block, slide rail on said light barrier; And be equipped with independent motor, and wherein said slide block is connected fixing with said second reflective mirror, and said slide rail directly is fixed on the said light barrier; Said slide block is provided with tooth bar, this tooth bar with by said motor-driven gearing mesh.
3. confocal Raman spectra appearance according to claim 2; It is characterized in that; The shell holder that said laser switching device shifter is located at said confocal Raman spectra appearance is used to be provided with in the casing of said laser instrument front end; This casing is square; Said three first reflective mirrors and said three second reflective mirrors are separately fixed on the relative two side of said casing, below the second corresponding reflective mirror of said second laser instrument, are provided with to be used to accept laser that the laser instrument outside the said confocal Raman spectra appearance sends and the 4th reflective mirror that reflexes to said the 3rd reflective mirror, and being connected to of the shell holder of the 4th reflective mirror and said confocal Raman spectra appearance can be done parallel mobile connection and fix; Said the 4th reflective mirror with the form fix of slide block, slide rail on said casing; And be equipped with independent motor, and wherein said slide block is connected fixing with said the 4th reflective mirror, and said slide rail directly is fixed on the said casing; Said slide block is provided with tooth bar, this tooth bar with by said motor-driven gearing mesh.
4. confocal Raman spectra appearance according to claim 1 is characterized in that, said three laser instruments are separately fixed on the support, and said support further is fixed on the shell holder of said confocal Raman spectra appearance.
5. confocal Raman spectra appearance according to claim 1 is characterized in that, said edge optical filter is replaced by the trap optical filter.
6. confocal Raman spectra appearance according to claim 1; It is characterized in that; Between said microscope equipment and said edge switching device of optical fiber, be provided with said video and light path switching device; The sidewall of the shell holder of said confocal Raman spectra appearance is provided with a LED white light illumination device simultaneously, and this LED white light illumination device is connected with said video and light path switching device through light guide optical fiber.
7. confocal Raman spectra appearance according to claim 6; It is characterized in that; The surface of said LED white light illumination device is provided with a square lighttight housing; Be provided with the joint that is used for said light guide optical fiber plug in the centre of said housing; The other end of said light guide optical fiber connects said video and light path switching device, and said microscope equipment is provided with the Halogen lamp LED white light transmission illuminator that can regulate brightness below objective table, in the middle of the objective table of said microscope equipment, is provided with the through hole that the light that supplies said Halogen lamp LED white light transmission illuminator passes through.
8. confocal Raman spectra appearance according to claim 1; It is characterized in that; Said continuous adjustable laser attenuating device includes the rounded periphery framework; Be embedded with the continuous adjustable laser decay of whole piece eyeglass in the centre of this rounded periphery framework; Be provided with stepper motor in the continuous centre of adjustable laser decay eyeglass and be connected fixing through hole, be provided with identification point on the surface of said rounded periphery framework, the while is provided with the U type optoelectronic switch of the position that is used to detect said identification point in said rounded periphery framework one side.
9. the disposal route of laser optical path in the confocal Raman spectra appearance is characterized in that, includes following steps:
1) selects one of them laser instrument to send laser, get into laser transmission apparatus;
2) select one group of corresponding in the laser switching device shifter of laser transmission apparatus reflective mirror with the extremely continuous adjustable laser attenuating device of Laser Transmission, the intensity of laser is made attenuation processing, obtain to detect the required laser intensity of measured object with said laser instrument;
3) will be through laser-bounce to the edge switching device of optical fiber after said continuous adjustable laser attenuating device is handled, the one group edge optical filter corresponding with said laser instrument reflects laser in the selection edge switching device of optical fiber;
4) Laser Transmission after the reflection of edge switching device of optical fiber shines the measured matter that is placed on the said microscope equipment objective table through the object lens of microscope equipment; Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser are collected and are back to said edge switching device of optical fiber through the object lens of microscope equipment, and the confocal device of Raman signal entering signal is only arranged behind edge optical filter filtering Rayleigh scattering light and the laser;
5) by spectrum detection device Raman signal is formed spectrum at last.
10. the disposal route of laser optical path is characterized in that in the burnt Raman spectrometer according to claim 9, also includes measured matter on the said microscope equipment objective table is carried out the step that video camera is regulated.
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