JP2016038374A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device which can offer various different test modes to a test sample.SOLUTION: The light source device includes a first light source unit, at least one second light source unit, a spectroscopic unit appropriately moving to a first position and a second position, and an inspection unit. When the spectroscopic unit moves to the first position, the first light source unit emits a first light flux, the spectroscopic unit causes at least part of the first light flux to travel to the test sample, and the at least part of the first light flux is reflected by the test sample as first sample light flux traveling to the detection module. When the spectroscopic unit moves to the second position, the second light source unit emits the second light flux, the second light flux is emitted to the test sample, and the second light flux is reflected by the test sample as second sample light flux traveling to the detection module.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical apparatus, and more particularly to a light source device.

  With the development of science and technology, the demand for precision and quality of electric parts in people's electric products is increasing. Currently, for example, a quality test of a printed circuit board is an important issue in an electrical component of an electrical product. Due to the mounting of different light sources, at the time of manufacturing various printed circuit boards, in order to perform good tests on the structure of each layer at each stage of the manufacturing process, for example, the metal wiring inside the printed circuit board and the solder mask layer Good testing and screening for completeness is possible.

  However, conventionally used methods are often tested by producing dedicated optical test jigs for various printed circuit boards, various electrical components, or other precision components. For the manufacture of certain printed circuit boards, different optical test jigs are required due to the requirement of different light sources, and the production of these jigs often leads to high manufacturing costs. Optical test jigs that cannot be used repeatedly are often wasted.

JP 2009-271058 A

  An object of the present invention is to provide a light source device capable of providing a plurality of types of test modes for a test sample.

  In order to solve these problems, the present invention has the following configuration.

  The present invention provides a light source device including a first light source unit, at least one second light source unit, a spectroscopic unit, and an inspection module. The spectroscopic unit is suitable for moving to the first position and the second position. When the spectroscopic unit moves to the first position, the first light source unit emits a first light beam, and the spectroscopic unit advances at least a part of the first light beam to a test sample. The at least part of the first light flux is reflected as a first sample light flux that travels to the detection module in the test sample. When the spectroscopic unit is moved to the second position, the second light source unit emits a second light beam, the second light beam is emitted to the test sample, and the second light beam is the test sample and the inspection module. Is reflected as a second sample light beam traveling forward.

  In one embodiment of the present invention, when the spectroscopic unit is moved to the second position, the second light flux travels to the test sample via the spectroscopic unit, and the second sample light flux is spectroscopic. Proceed to the test module through the side of the unit.

  In one embodiment of the invention, the spectroscopic unit advances at least a portion of the first sample beam from the test sample to the detection module.

  In one embodiment of the present invention, the at least part of the first light beam from the first light source unit is reflected by the spectroscopic unit to the test sample, and at least part of the first light beam from the test sample. One sample beam passes through the spectroscopic unit and proceeds to the test module.

  In one embodiment of the present invention, the first light source unit includes a plurality of light emitting units of different colors, and the first light flux is constituted by light emitted by some of the light emitting units.

  In one embodiment of the present invention, the first light source unit further includes a diffusion unit, and the diffusion unit is disposed on a path of light emitted by the light emitting unit.

  In one embodiment of the present invention, the first light source unit is fixed to a first trajectory group, and the first trajectory group is suitable for adjusting the direction in which the first light flux is incident on the test sample, The two light source units are fixed to a second track group, and the second track group is suitable for adjusting an incident angle at which the second light beam enters the test sample.

  In one embodiment of the present invention, the light source device further includes a third light source unit. When the spectroscopic unit is moved to the first position, the third light source unit emits a third light flux, the third light flux travels to the test sample via the spectroscopic unit, and the third light flux Is reflected by the test sample as a third sample beam traveling to the detection module.

  In one embodiment of the present invention, when the spectroscopic unit moves to the first position, the second light source unit does not emit a light beam, and when the spectroscopic unit moves to the second position, The one light source unit and the third light source unit do not emit a light beam.

  In one embodiment of the present invention, the third light source unit is fixed to a third trajectory group, and the third trajectory group is suitable for adjusting an incident angle at which the third light flux is incident on the test sample.

  In one embodiment of the present invention, the third light source unit further includes a diffusing unit and a lens, the diffusing unit and the lens are respectively disposed on a traveling path of the third light flux, and the third light source unit is It is a line light source.

  In one embodiment of the present invention, the second light flux and the third light flux are incident on the test sample with different incident angles.

  In one embodiment of the present invention, the first light source unit is a surface light source, and the second light source is a line light source.

  In one embodiment of the present invention, there are a plurality of the second light source units, and these second light source units are an ultraviolet light source, an infrared light source or a combination thereof.

  In one embodiment of the invention, the test sample is a printed circuit board.

  In one embodiment of the present invention, the detection module includes a test lens and a light receiving component. The plurality of first light fluxes and the at least second light flux after being reflected by the test sample pass through the test lens and then travel to the light receiving component.

  In one embodiment of the present invention, the second light source unit includes a diffusion unit, and the diffusion unit is disposed on a traveling path of the second light flux.

  In one embodiment of the present invention, the light source device further includes a driving unit having one end connected to the spectroscopic unit, and the driving unit drives the spectroscopic unit to the first position and the second position. Suitable for letting

  In one embodiment of the invention, the light source device further comprises an actuation unit and a control unit. The operating unit is connected to the other end of the driving unit. The control unit is electrically connected to the operating unit, the first light source unit, and the second light source unit. The control unit controls the operation unit to cause the operation unit to move the position of the spectroscopic unit by the drive unit and to control the switches of the first light source unit and the second light source unit.

  In one embodiment of the invention, the operating unit moves the spectroscopic unit by pushing or pulling the other end of the drive unit.

  In one embodiment of the present invention, when the operating unit pushes or pulls the drive unit, the drive unit rotates about a fulcrum.

  In one embodiment of the present invention, the spectroscopic unit is connected to a spectroscopic trajectory group, and the spectroscopic trajectory group moves the spectroscopic unit between the first position and the second position along a path.

  In one embodiment of the present invention, when the spectroscopic unit moves to the first position, the second light source unit does not emit a light beam, and when the spectroscopic unit moves to the second position, The light source unit does not emit a light beam.

  Based on the above description, the light source device provided in the embodiment of the present invention can provide test light beams of different test modes to the test sample by the spectroscopic unit moving to a plurality of positions. Due to the design of this spectroscopic unit, the luminous flux provided by the light source device has a higher degree of freedom, and the test can be performed by providing an appropriate luminous flux for various defects of the test sample.

It is a block diagram of the optical device in the Example of this invention. It is a three-dimensional view of the light source device in the Example of this invention. It is a local three-dimensional view of the light source device in the Example of this invention. It is a local three-dimensional view of the light source device in the Example of this invention. It is a top view of the light source device in this invention. It is a top view of the light source device in this invention. It is a block diagram of the light source device in the Example of this invention. It is a block diagram of the light source device in the Example of this invention. It is a block diagram of the surface light source in the Example of this invention. It is a block diagram of the surface light source in the Example of this invention. It is a block diagram of the line light source in the Example of this invention. It is a block diagram of the line light source in the Example of this invention.

  FIG. 1 is a configuration diagram of an optical device according to an embodiment of the present invention. FIG. 2A is a three-dimensional view of a light source device in an embodiment of the present invention. 2B and 2C are local three-dimensional views of the light source device in the embodiment of the present invention. 2D and 2E are plan views of the light source device according to the present invention. 3A and 3B are configuration diagrams of a light source device according to an embodiment of the present invention. In addition, in order to clarify the light source device provided by the embodiment of the present invention, some of the above-described drawings are not illustrated in FIG. These are used for explaining the optical motion system of the light source device in the embodiment of the present invention, and are not limited to these structures and arrangement systems. Referring to FIGS. 1, 3A, and 3B, in an embodiment of the present invention, the light source device 100 includes a first light source unit 110, a second light source unit 120, a spectroscopic unit 140, and a detection module 150. The spectroscopic unit 140 is suitable for moving to the first position and the second position. Specifically, FIG. 3A is a configuration diagram when the spectroscopic unit 140 in the present embodiment is moved to the first position. When the spectroscopic unit 140 is moved to the first position, the first light source unit 110 is the first light flux. L1 is emitted, and the spectroscopic unit 140 advances at least a part of the first light beam L1 to the test sample 50. The test sample 50 reflects at least a part of the first light beam L1 as the first sample light beam S1 traveling to the detection module 150. FIG. 3B is a configuration diagram when the spectroscopic unit 140 in the present embodiment is moved to the second position. When the spectroscopic unit 140 is moved to the second position, the second light source unit 120 emits the second light flux L2, The second light beam L2 is emitted to the test sample 50 (that is, the second light beam L2 does not pass through the spectroscopic unit 140), the test sample 50 reflects the second light beam L2 as the second sample light beam S2, and the second sample light beam S2 is Proceed to the detection module 150. (That is, the second sample light beam S2 does not pass through the spectroscopic unit 140).

  Specifically, referring to FIG. 1, FIG. 2A, FIG. 2B, and FIG. 3A, FIG. 2B of these shows the second light source unit 120 omitted, and in the embodiment of the present invention, When the unit 140 is located at the first position, the spectroscopic unit 140 is located on the traveling path of the first light beam L1 provided by the first light source unit 110, and the second light source unit 120 does not emit the light beam, and thus A part of the first light beam L1 is reflected by the test sample 50, and the detection module 150 can detect the first sample light beam S1 from the test sample 50. In the present embodiment, the spectroscopic unit 140 is, for example, a beam splitter that reflects part of the light beam and transmits part of the light beam, and is, for example, a transflective mirror.

  Referring to FIGS. 1 and 3B, in the embodiment of the present invention, when the above-described spectroscopic unit 140 is located at the second position, the first light source unit 110 does not emit a light beam and the second light source unit emits light. The two light beams L2 travel to the test sample 50 through the spectroscopic unit 140, and the second sample light beams S2 travel to the detection module 150 through the spectroscopic unit 140. That is, in this embodiment, when the spectroscopic unit 140 is positioned at the second position, the spectroscopic unit 140 is out of the travel path of the second light beam L2 and the travel path of the second sample light beam S2 provided by the second light source unit 120. . For this reason, the light source device 100 provided in the embodiment of the present invention provides different light fluxes on the test sample 50 by the movement of the spectroscopic unit 140 and provides different test effects to meet different test requirements. Provides different test modes and the test light flux that it applies to.

  Specifically, referring to FIGS. 1, 2A, 2B, 3A, and 3B, in an embodiment of the present invention, the light source device 100 further includes a third light source unit 130, and the third light source unit is a third light source unit. A light beam L3 is emitted. When the spectroscopic unit 140 moves to the first position, the third light beam L3 travels to the test sample 50 via the spectroscopic unit 140, and the test sample 50 travels the third light beam L3 to the detection module 150. Reflected as a light beam S3. 3A, when the spectroscopic unit 140 moves to the first position, the first light beam L1 emitted from some of the first light source units 110 and the third light beam L3 emitted from the third light source unit 130 are , Both can proceed to the test sample 50, the second light source unit 120 does not emit a light beam, and the detection module 150 irradiates the test sample 50 with the first light beam L1 and the third light beam L3. An image can be acquired. Referring to FIG. 3B, when the spectroscopic unit 140 moves to the second position, neither the first light source unit 110 nor the third light source unit 130 emits a light beam, and the second light beam L2 emitted by the second light source unit 120. Is emitted to the test sample 50. By mounting the above-described spectroscopic unit 140 and these light source units, the light source device 100 in the embodiment of the present invention can appropriately provide an optimal test light beam.

  Specifically, referring to FIG. 1, FIG. 3A, and FIG. 3B, in an embodiment of the present invention, the first light source unit 110 includes a plurality of light emitting units 112 of different colors, and the first light flux L1 is a part of the first light flux L1. The light emitted from the light emitting units 112 is constituted by light. The second light source unit 120 is a plurality of second light source units 120, and these second light source units 120 are an ultraviolet light source, an infrared light source, or a combination thereof. The third light source unit 130 includes a plurality of light emitting units 132.

  4A and 4B are configuration diagrams of a surface light source in an embodiment of the present invention. Referring to FIGS. 3A, 4A and 4B, in detail, in the embodiment of the present invention, the first light source unit 110 is a surface light source constituted by the light emitting units 112, and the first light source unit 110 is further The diffusing unit 114 is disposed on the traveling path of the luminous flux emitted by the light emitting units 112, and the luminous flux emitted by the light emitting units 112 emits at least red, green, blue, and white visible rays. These different color lights are mixed into the first light beam L1 by the diffusion unit 114. The diffusing unit 114 is, for example, an optical diffusing plate, which can mix the light beams, and can uniformly irradiate the test sample 50 with the first light beam L1, and the diffused first light beam L1 is at a plurality of angles. As the image travels, the image irradiated by the first light beam L1 is not easily influenced by the structure on the surface irradiated by the first light beam L1, and the surface of the test sample 50 irradiated and covered by the first light beam L1 is further smoothed. Can appear. In this embodiment, the first light source 110 is further electrically connected to other members by including a contact 115 (see FIG. 4B), and other components are also connected to the contact 115, so that the first light source unit 110 is connected. Control.

  5A and 5B are configuration diagrams of the line light source in the embodiment of the present invention. Referring to FIGS. 3A, 5A and 5B, in detail, in the embodiment of the present invention, the third light source unit 130 is a linear light source constituted by these light emitting units 132, and the third light source unit 130 is further A lens 136 and a diffusing unit 134, both of which are disposed on a traveling path of a light beam emitted by the light emitting unit 132, and the light emitted by the light emitting member 132 includes at least red, green, and blue visible rays; These different colors of light are first focused through the lens 136, and again mixed with the third light beam L3 through the diffusion unit 134. Since the third light emitting unit 130 is a line light source, the third light beam L3 can be incident on the test sample 50 with a predetermined incident angle, and further, the surface of the test sample 50 can be uniformly irradiated and covered. In cooperation with the first light beam L1, the third light beam L3 can perform a good test on the test sample 50 because a predetermined ridge or structure on the surface is shaded. In the present embodiment, the third light source unit 130 further includes a contact 135 (see FIG. 5B), and is electrically connected to other members, and the other members are connected to the contact 135 to thereby connect the third light source unit. 130 is controlled.

  Referring to FIGS. 3B, 5A, and 5B, in detail, in the embodiment of the present invention, these second light source units 120 constitute a line light source, which is similar to the third light source unit 130. Since they are arranged, the arrangement positions of the lens and the diffusing unit described later directly correspond to the contents of the third light source unit 130 described above. In the present embodiment, the second light source unit 120 further includes a lens and a diffusing unit, both of which are arranged on the traveling path of the light beam emitted by the second light source unit 120, and the second light source unit 120 is The emitted light is first focused through the lens and again mixed with the second light flux L2 through the diffusion unit. Since the second light emitting unit 120 is a linear light source, the second light beam L2 is incident on the test sample 50 with a predetermined incident angle, and the second light beam L2 having a predetermined wavelength is incident on a predetermined layer in the test sample 50. A good test can be performed.

  Specifically, referring to FIG. 3B, FIG. 5A, and FIG. 5B, the second light beam L2 in the embodiment of the present invention is, for example, ultraviolet light, and the transmittance of the test sample 50 is relatively low. Suitable for testing the outermost layer of More specifically, the test sample 50 in the embodiment of the present invention is, for example, a printed circuit board, and ultraviolet rays are suitable for testing the outermost solder mask layer of the printed circuit board, but are not limited thereto. is not. In other embodiments, the second light source unit 120 is, for example, an infrared light source, and the infrared light it emits is suitable for passing through the test sample 50, so that, for example, when testing a printed circuit board, the second light source unit 120 is used. The infrared rays emitted by the unit 120 are suitable for testing the metal conductive layer through the solder mask layer. In another embodiment, the second light source unit 120 may further include an infrared light source and an ultraviolet light source at the same time, which can adjust a desired light flux type based on a required test purpose. In this embodiment, the second light source unit 120 is further electrically connected to other members by including contacts, and the other members control the second light source unit 120 by connecting to the contacts.

  Referring to FIGS. 3A and 3B, in the embodiment of the present invention, the test sample 50 can be further placed on the stage 60, and the stage 60 moves along the direction d1. For this reason, when the above-mentioned second light beam L2 irradiates the test sample 50, the test pattern on the upper surface of the entire test sample 50 is formed by the movement of the stage 60 in the second sample light beam to be inspected by the detection module 150. On the other hand, in the present embodiment, the second light beam L2 is incident on the test sample 50 with an incident angle of about 23 degrees, for example, and the third light beam L3 is incident on the test sample 50 with an incident angle of about 55 degrees, for example. Incident.

  Referring to FIGS. 1, 2A, 2B, and 3A, in an embodiment of the present invention, the first light source unit 110 is fixed to a first track group (not shown), and the first track group is a first track group. It is suitable for adjustment in the direction in which the light beam L1 enters the test sample 50. The second light source unit 120 is fixed to the second trajectory group 128. The second trajectory group 128 is suitable for adjusting the incident angle at which the second light beam L2 is incident on the test sample 50. The third light source unit 130 is The third track group 138 is fixed to the third track group 138, and is suitable for adjusting the incident angle at which the third light beam L3 enters the test sample 50. Specifically, the second light beam L2 and the third light beam L3 are incident on the test sample 50 with different incident angles, but the present invention is not limited to this. In this embodiment, these trajectory groups can be adjusted based on different test samples 50, so that good test luminous flux can be provided for different test samples.

  Specifically, referring to FIGS. 2B and 3A, in an embodiment of the present invention, the spectroscopic unit 140 advances at least a portion of the first sample light beam S <b> 1 from the test sample 50 to the detection module 150. That is, in the present embodiment, when the spectroscopic unit 140 is located at the first position, a part of the first light beam L1 can be reflected by the test sample 50, and at the same time, one of the first sample light beams S1 from the test sample 50 can be reflected. Permeate the part. When the spectroscopic unit 140 is located at the second position, the spectroscopic unit 140 leaves the traveling path of the second light beam L2, irradiates the test sample 50 to the second light beam L2, and simultaneously causes the second sample light beam S2 to travel to the test module 150.

  In the embodiment of the present invention, the above-described spectroscopic unit 140 can be manually moved between the first position and the second position, for example, but the present invention is not limited to this. 2B and 2C, in the embodiment of the present invention, the light source device 100 further includes a driving unit 160, which has one end 161 connected to the spectroscopic unit 140 and is driven. The unit 160 is suitable for driving the spectroscopic unit 140 to the first position and the second position. More specifically, in an embodiment of the present invention, the light source device 100 further includes an actuation unit 170 and a control unit 180 (see also FIGS. 3A and 3B). The operation unit 170 is connected to the other end 163 of the drive unit 160. The control unit 180 is electrically connected to the operation unit 170, the first light source unit 110 and the second light source unit 120. When the control unit 180 controls the operation unit 170, the position of the spectroscopic unit 140 is moved to the operation unit 170 by the drive unit 160, and the control unit 180 also controls the switches of the first light source unit 110 and the second light source unit. . More specifically, in this embodiment, the control unit 180 is electrically connected to the third light source unit 130, and the control unit 180 can control the switch of the third light source unit.

  In detail, referring to FIGS. 2B and 2C, in the embodiment of the present invention, the operation unit 170 moves the spectroscopic unit 140 by pushing or pulling the end 163 of the drive unit 160, and the operation unit 170 is driven. When the unit 160 is pushed or pulled, the drive unit 160 rotates about the fulcrum 162 as the center of rotation. That is, the drive unit 160 is fixed by, for example, the fulcrum 162, and the spectroscopic unit 140 is moved to the drive unit 160 by, for example, the “lever principle” by pushing and pulling the operation unit 170. Furthermore, in this embodiment, the spectroscopic unit 140 is connected to a spectroscopic trajectory group (not shown), and the spectroscopic trajectory group moves the spectroscopic unit 140 between the first position and the second position along the path. That is, it can be said that the operation unit 170 moves the spectroscopic unit 140 along the spectroscopic trajectory group by pushing or pulling the drive unit 160. Specifically, in this embodiment, the operation unit 170 is, for example, a pneumatic cylinder or a pneumatic device, and pushes other members by filling or discharging gas.

  Referring to FIG. 1, in the embodiment of the present invention, the detection module 150 includes a test lens and a light receiving component (not shown). A part of the first sample light beam S1 and a part of the second sample light beam S2 after being reflected by the test sample 50 pass through the test lens and then reach the light receiving component. In other words, in this embodiment, the detection module 150 is, for example, a charge-coupled device (Charger-Coupled Device, CCD) including a test lens, but is not limited thereto.

  Meanwhile, referring to FIGS. 1 to 2E, in the embodiment of the present invention, the second light emitting unit 120 and the third light emitting unit 130 include heat radiation blocks 121 and 131 and heat radiation fans 123 and 133, respectively. You may make it give 120 and the 3rd light emission unit 130 a still more favorable light emission function.

  As described above, the light source device provided by the embodiment of the present invention provides different test modes for the test sample by the first light source unit, the second light source unit, and the spectroscopic unit movable to a plurality of positions. The test mode is, for example, a test beam having different wavelengths and different incident angles. Due to the design of these types of spectroscopic units, the luminous flux provided by the light source device can have a higher degree of freedom, for example, the wavelength and the incident angle of the test luminous flux can be adjusted according to the sample and requirements, together with the test Inspection can be performed by providing an appropriate luminous flux for various defects in the sample. In addition, since light beams of a plurality of wavelengths and incident systems with different angles can be provided, the light source device provided by the embodiment of the present invention is applied to various different test samples, and thus is newly applied to different test samples. There is no need to make a special inspection jig.

  Although the present invention has been described by way of examples, the present invention is not limited thereto, and modifications and additions are permitted without departing from the spirit and scope of the present invention by those skilled in the art. The protection scope of the present invention extends to the equivalent scope of the present invention.

  The light source devices of the embodiments of the present invention can be widely applied to test various different test samples.

d1 direction L1 first light beam L2 second light beam L3 third light beam S1 first sample light beam S2 second sample light beam S3 third sample light beam 50 test sample 60 stage 100 light source device 110 first light source unit 112 light emission unit 114 diffusion unit 115 contact 120 second light source unit 121 heat dissipation block 123 heat dissipation fan 128 second track group 130 third light source unit 131 heat dissipation block 132 light emitting unit 133 heat dissipation fan 134 diffusion unit 135 contact 136 lens 138 third track group 140 spectroscopic unit 150 detection module 160 drive Unit 161, 163 End 162 Support point 170 Actuation unit 180 Control unit

Claims (23)

A first light source unit;
At least one second light source unit;
A spectroscopic unit suitable for moving to a first position and a second position;
Including inspection module,
When the spectroscopic unit is moved to the first position, the first light source unit emits a first light beam, the spectroscopic unit advances at least a part of the first light beam to a test sample, and the at least a part of the first light beam unit. One light beam is reflected by the test sample as a first sample light beam traveling to the detection module, and when the spectroscopic unit moves to the second position, the second light source unit emits a second light beam, A second light beam is emitted to the test sample, and the second light beam is reflected by the test sample as a second sample light beam traveling to the detection module;
A light source device characterized by that. When the spectroscopic unit is moved to the second position, the second light beam travels to the test sample via the spectroscopic unit, and the second sample light beam passes to the test module via the spectroscopic unit. proceed,
The light source device according to claim 1. The spectroscopic unit advances at least a portion of the first sample beam from the test sample to the detection module;
The light source device according to claim 1, wherein the light source device is a light source device. The at least a part of the first light beam from the first light source unit is reflected by the spectroscopic unit to the test sample, and at least a part of the first sample light beam from the test sample passes through the spectroscopic unit. Pass through to the test module,
The light source device according to claim 1, wherein the light source device is a light source device. The first light source unit includes a plurality of light emitting units of different colors, and the first light flux is constituted by light emitted by some of the light emitting units.
The light source device according to claim 1, wherein the light source device is a light source device. The first light source unit further includes a diffusion unit, and the diffusion unit is disposed on a path of light emitted from the light emitting unit.
The light source device according to claim 5. The first light source unit is fixed to a first trajectory group, the first trajectory group is suitable for adjusting a direction in which the first light beam is incident on the test sample, and the second light source unit is a second trajectory group. Fixed, and the second trajectory group is suitable for adjusting an incident angle at which the second light flux is incident on the test sample,
The light source device according to claim 1, wherein the light source device is a light source device. A third light source unit;
When the spectroscopic unit is moved to the first position, the third light source unit emits a third light flux, the third light flux travels to the test sample via the spectroscopic unit, and the third light flux Is reflected by the test sample as a third sample beam traveling to the detection module,
The light source device according to claim 1, wherein the light source device is a light source device. When the spectroscopic unit moves to the first position, the second light source unit does not emit a light beam, and when the spectroscopic unit moves to the second position, the first light source unit and the third light source unit are Does not emit luminous flux,
The light source device according to claim 8. The third light source unit is fixed to a third trajectory group, and the third trajectory group is suitable for adjusting an incident angle at which the third light flux enters the test sample;
The light source device according to claim 8, wherein the light source device is a light source device. The third light source unit further includes a diffusing unit and a lens, the diffusing unit and the lens are respectively disposed on a traveling path of the third light beam, and the third light source unit is a linear light source.
The light source device according to claim 8, wherein the light source device is a light source device. The second light flux and the third light flux are incident on the test sample with different angles of incidence;
The light source device according to claim 8, wherein the light source device is a light source device. The first light source unit is a surface light source, and the second light source is a line light source.
The light source device according to claim 1, wherein the light source device is a light source device. There are a plurality of the second light source units, and these second light source units are an ultraviolet light source, an infrared light source or a combination thereof.
The light source unit according to claim 1, wherein the light source unit is a light source unit. The test sample is a printed circuit board;
The light source device according to claim 1, wherein the light source device is a light source device. The detection module includes:
A test lens,
Including light receiving parts,
The plurality of first light fluxes and the at least second light flux after being reflected by the test sample reach the light receiving component after passing through the test lens,
The light source device according to claim 1, wherein the light source device is a light source device. The second light source unit includes a diffusion unit, and the diffusion unit is disposed on a traveling path of the second light flux.
The light source device according to claim 1, wherein the light source device is a light source device. A driving unit having one end connected to the spectroscopic unit;
The drive unit is suitable for driving the spectroscopic unit to the first position and the second position.
The light source device according to claim 1, wherein the light source device is a light source device. An actuation unit connected to the other end of the drive unit;
While electrically connected to the operating unit, the first light source unit, and the second light source unit and controlling the operating unit, the operating unit moves the position of the spectroscopic unit by the driving unit. A control unit for controlling a switch of the first light source unit and the second light source unit;
The light source device according to claim 18, further comprising: The actuating unit moves the spectroscopic unit by pushing or pulling the other end of the drive unit;
The light source device according to claim 19. When the actuating unit pushes or pulls the driving unit, the driving unit rotates around a fulcrum,
21. The light source device according to claim 19 or 20, wherein: The spectroscopic unit is connected to a spectroscopic trajectory group, and the spectroscopic trajectory group moves the spectroscopic unit between the first position and the second position along a path;
The light source device according to claim 1, wherein the light source device is a light source device. When the spectroscopic unit moves to the first position, the second light source unit does not emit a light beam, and when the spectroscopic unit moves to the second position, the first light source unit does not emit a light beam.
The light source device according to claim 1, wherein the light source device is a light source device.

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