WO2003076141A1 - Effecteur pour transport de feuilles, systeme porteur avec effecteur et systeme de traitement de feuilles - Google Patents

Effecteur pour transport de feuilles, systeme porteur avec effecteur et systeme de traitement de feuilles Download PDF

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Publication number
WO2003076141A1
WO2003076141A1 PCT/JP2003/002819 JP0302819W WO03076141A1 WO 2003076141 A1 WO2003076141 A1 WO 2003076141A1 JP 0302819 W JP0302819 W JP 0302819W WO 03076141 A1 WO03076141 A1 WO 03076141A1
Authority
WO
WIPO (PCT)
Prior art keywords
thin plate
end effector
processing system
transfer
transferring
Prior art date
Application number
PCT/JP2003/002819
Other languages
English (en)
Japanese (ja)
Inventor
Shintaro Yoshioka
Original Assignee
Rorze Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corporation filed Critical Rorze Corporation
Priority to JP2003574394A priority Critical patent/JPWO2003076141A1/ja
Priority to AU2003213448A priority patent/AU2003213448A1/en
Publication of WO2003076141A1 publication Critical patent/WO2003076141A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Definitions

  • the present invention is directed to a woolen yarn on which a thin plate-shaped object that is bent by its own weight is placed and supported when the thin plate-shaped object is transported by using a machine.
  • This is related to the field-shaped end effector (field bot hand), a transport machine equipped with the end effector, and a sheet processing system.
  • the number of glass substrates used in liquid crystal display devices, plasma displays, plasma driving liquids, at devices, etc. has increased with the increase in the size of the display devices themselves.
  • the area has been enlarged to improve production by taking off.
  • the glass substrate has been thinned to reduce its weight, and if it is partially supported in a horizontal state, it will deflect under its own weight, so that it can support the glass substrate.
  • husbands There are various types of husbands.
  • Japanese Patent Application Laid-Open No. Hei 9-19844 discloses that when a glass substrate on which a glass substrate is placed is smaller than the glass substrate, the periphery of the glass substrate is reduced.
  • a vacuum suction port is provided not only at the center but also at the center to prevent the glass substrate from floating at the center of the stage. Methods have been proposed to reduce the sag of the substrate edge.
  • Japanese Patent Application Laid-Open No. Hei 10-97551 discloses that the width of the glass substrate end effector is set to the substrate support pocket inside the glass substrate storage cassette. Large enough not to touch the tip of the Close to the length of one side of the glass substrate, and keep the rubber support knuckle close to the outer edge of the top surface of the wide end effector. A method has also been proposed that is provided near the inner edge to prevent the glass substrate from sagging in the center of the end effector.
  • a carrier that supports a thin plate such as a glass substrate that is bent under its own weight.
  • a plurality of thin plate supporting portions on the end effector are substantially parallel to a plurality of parallel lines on the same plane, and If the distance between the parallel lines is determined so that a large part of the cross-sectional shape of the thin plate in a cross section orthogonal to the direction in which the line extends is bent in the shape of a lid, the slack of the thin plate It has been found that the amount can be greatly reduced, and the present invention has been achieved.
  • the comb-shaped pins of the thin plate support are provided so as to protrude long on both inner sides of the cassette.
  • the distance between the two main parts of the forked end effector, on which the thin plate support is installed must be sufficient. It may not be possible to spread it.
  • the inventor of the present application provided the plurality of thin plate-supporting horizontal projections on the outer side of the main part of the end ejector, whereby the lid mountain was provided. This is because we succeeded in expressing the deflection of the shape and developed a new end effector for transporting thin plates.
  • the plurality of thin plate supporting horizontal projections are formed in the thin plate storage cassette when the end effector moves in the vertical direction in the thin plate storage cassette. Comb-like water on multiple sheet supports
  • the force S is preferably arranged at a position in the longitudinal direction that does not interfere with the flat pins, and the thickness of the horizontal projection is sufficiently reduced as compared with the distance between the horizontal pins. This allows the end effector to move freely within the cassette, and can carry in and out thin sheets with low deflection. I came to be able to do it.
  • the end effector is formed mainly of a highly rigid material such as a carbon fiber reinforced material because it is necessary to place a large and heavy object and transport it promptly. It is more preferable to use pitch carbon fiber, which is the most rigid carbon fiber among carbon fibers.
  • the inventor of the present application installs the end effector as a part on a thin plate transporting port having an ordinary computer, thereby With the computer as the trajectory calculation means and the drive means, the thin plate which is bent by its own weight does not come into contact with the inner surface of the large cassette or other glass substrates.
  • a thin plate processing system that controls the trajectory of the end effector so that it can be transported and placed at the intended location, and thus variously processes and processes large thin plates. .
  • rubber-made tips and plastics are provided not only on the upper surface of the horizontal projection for supporting the thin plate, but also at places where end effectors are required.
  • Either one or both of the above-mentioned nodes may be arranged as the thin plate supporting portion. Further, by arranging a plurality of vacuum suction ports, the thin plate may be fixed by suction to an end effector.
  • the transfer device on which the end ejector of the present invention is mounted is the robot described above. It is not limited to robots, but can be applied to all machines that transport thin sheets that are flexed by their own weight, such as articulated robots, arm transporters, and conveyor-type transporters. And can be done.
  • the end effector of the present invention normally mounts a thin plate while keeping it horizontal, but during transportation, the thin plate is prevented from being blown by the wind.
  • the thin plate according to the present invention is not limited to a glass substrate for a liquid crystal display, but also a plastic substrate, a glass substrate for a plasma display, and a glass for a plasma drive liquid crystal display.
  • FIG. 1 is a perspective view showing a chemical processing system for a liquid crystal display panel as an example of a thin plate processing system of the present invention.
  • FIG. 2 is a vertical sectional view showing a state in which (a) and (b) respectively support the glass substrate horizontally by the end effector of the embodiment of the present invention.
  • C is a vertical cross-sectional view of a case where a glass substrate is supported by a conventional end effector in which a distance between two main parts of the effector is narrow.
  • D is that the distance between the two main parts of the effector is narrow, and the glass substrate is supported by the part closer to the base of the conventional end effector shown in FIG. It is a vertical sectional view in the case of having performed.
  • FIG. 3 is a plan view showing the end effector of one embodiment of the present invention inserted into a cassette containing a glass substrate.
  • FIG. 4 is a plan view showing another embodiment of the present invention.
  • the end effector of one embodiment is FIG. 3 is a plan view showing a state in which a cassette containing a glass substrate is inserted.
  • FIG. 5 is a plan view showing a state in which an end effector of still another embodiment of the present invention is inserted into a cassette containing a glass substrate.
  • FIG. 6 is a plan view showing a state in which an end effector of still another embodiment of the present invention is inserted into a cassette containing a glass substrate.
  • FIG. 7 is a plan view showing an example of a conventional end effector. Best Embodiment for Implementing the Invention
  • FIG. 1 shows a chemical treatment system for a liquid crystal substrate as an example of the thin plate cassette system of the present invention.
  • the robot-type transfer machine 2 having the end effector 1 mounted on the arm 21 as a hand is a thin plate.
  • a glass substrate is taken out from the cassette 5 and put into the processing device 4.
  • the robot-type transfer device 2 takes out the glass substrate 6 from the cassette device 4 and returns it to the cassette 5, whereupon the cassette is removed.
  • FIGS. 2 (a) and 2 (b) show that the glass substrate 6 is horizontally moved by an end effector 1 according to an embodiment of the present invention described later.
  • FIG. 4 is a vertical cross-sectional view showing a supported state, in which the glass substrate 6 bends in a low lid-like shape, and both the height differences ha and hb are small.
  • Fig. 2 (c) shows the case where the glass substrate 6 is supported by the conventional end effector 1 in which the distance between the two main parts of the effector is narrow.
  • FIG. 4 is a vertical cross-sectional view, in which the glass substrate 6 has a mountain-like shape, and both sides hang down, and the height difference hc is large.
  • FIG. 4 is a vertical cross-sectional view of the case where the glass substrate 6 is supported. Also in this case, the glass substrate 6 has a mountain shape, and both sides hang down, and the height difference hd becomes large.
  • FIG. 3 shows an end effector 1 having a horizontal projection 12 according to an embodiment of the thin plate transfer end effector of the present invention.
  • FIG. 4 is a plan view showing a state where the glass substrate is inserted below the glass substrate.
  • Each of the two effector main portions 11 is formed into a substantially rectangular elongated shape, and five horizontal projections 12 are provided on the outer portions of the effector main portions 11 respectively.
  • each end effector main part 11 On the surface of each end effector main part 11, five synthetic rubber pads 14, five resin pads, three 15 pads, vacuum suction P 1 Attach two sensors 3 to the base of each effector main part 11 to detect the force set 5 and the glass substrate 6 17 ( In this example, one reflective sensor was mounted.
  • the horizontal projections 12 should not interfere with each other even at the same height as the comb-like support pins 51 of the substrate support in the cassette 5.
  • a small horizontal projection 12 was added, but as in the other embodiment shown in FIG. It may extend long along the main part 11 of the connector. Further, as shown in FIG. 5, even if the horizontal projection 12 protrudes long from the main part 11 of the efuector, as in the other embodiment, the comb-like support pin Five
  • the glass substrate 6 is formed as a lid as shown in FIG. 2 (a). What is necessary is just to adjust the space of the effector main part 11 1 so that it may become.
  • the state in which the glass substrate 6 is placed on the two main elements 11 arranged in parallel with each other on the same plane and bends in a mountain-like shape according to experiments is shown in FIG. It is preferable to observe and measure by using a method.
  • the specific example of the embodiment shown in FIG. 3 may be obtained by calculating by material dynamics calculation using a combi- ter.
  • the end effector 1 for storing the glass substrate 6 in the socket 5 was designed and manufactured with the following dimensions.
  • the material is pitch-based carbon fiber composite material.
  • Frontage 1 1 2 6 mm x height 90.0 mm x depth 1 3 0 0 mm
  • Comb-shaped pins 24 pins with a length of 23 mm x width 15 mm x height 14 mm
  • Substrate support 11 sets are vertically arranged on both horizontal inner surface and inner depth surface. ⁇ Glass substrate for liquid crystal display>
  • Effector main part 1 1 width 54 mm x thickness 1 O mm x length 1
  • Horizontal projection 1 2 width 3 O mm x length 28 mm x thickness 5 mm,
  • Figure 3 shows the location. Synthetic rubber Pas head 1 4, synthetic ⁇ fat made Pas head i 5, the Oh Ru adsorption Pas head 1 3 vacuum suction port is disposed, the sensor 1 7 d full E Selector Selector root portion was or installed.
  • the gas becomes as shown in FIG. 2 (b).
  • the glass substrate 6 was bent in the shape of a lid, and the height difference hb between the top and the bottom was 4.3 mm.
  • the deflection of the end effector 1 itself is 3.1 mm, which is 7.5 mm in total, and 22 mm between the upper and lower pins 51 of the cassette 5.
  • the glass substrate 6 could be carried in and out without any trouble in the gap.
  • an end effector 1 was manufactured in the same manner as in the above-mentioned embodiment except that no horizontal projection was provided. Therefore, only the interval between the parallel lines where the pads 14 on the outer side of the main part 11 of the effector are arranged was reduced to 552 mm.
  • the same glass substrate 6 as in the above embodiment is placed at the center of the end effector 1, the glass substrate 6 is formed in a mountain-like shape as shown in FIG. 2 (c).
  • the height difference hc between the top and bottom of the deflection was 39 mm, and the deflection of the end effector 1 itself was 3.8 mm. Therefore, it was not possible to carry in and out of cassette 5 which is 22 mm between the upper and lower pins 51.
  • the use of the end effector of this example reduces the deflection of the glass substrate 6. It was reduced to about 9 times from mm to 4.3 mm.
  • the present invention has been described based on the illustrated examples. However, the present invention is not limited to the above-described examples, and can be appropriately changed within the scope of the claims. Potential for industrial use
  • the liquid crystal display is bent by its own weight when placed on the end effector.
  • the thin plate held by the end effector according to the present invention is not limited to a glass substrate for a liquid crystal display, but may be any thin plate-shaped object such as a glass substrate for a plasma display.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Cette invention concerne un effecteur pour transport de feuilles qui permet de résoudre le problème lié au fait qu'une cassette est difficilement transportable dans la mesure où une feuille telle qu'un substrat en verre de grande taille pour affichage à cristaux liquides plie sous son propre poids lorsqu'il est placé horizontalement sur l'effecteur à fourche du robot. Des pièces de maintien sont disposées sur l'effecteur sur une pluralité de lignes parallèles. Ces pièces de maintient comportent des parties horizontales en saillie au niveau des bords extérieurs de l'effecteur, ce qui augmente la distance entre les lignes parallèles, fait se soulever doublement la pièce dont la flexion totale se trouve ainsi réduite.
PCT/JP2003/002819 2002-03-12 2003-03-10 Effecteur pour transport de feuilles, systeme porteur avec effecteur et systeme de traitement de feuilles WO2003076141A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003574394A JPWO2003076141A1 (ja) 2002-03-12 2003-03-10 薄板搬送用エンドエフェクタ及びこれを備えた搬送機並びに薄板加工システム
AU2003213448A AU2003213448A1 (en) 2002-03-12 2003-03-10 End effecter for carrying sheet, carrier having the end effecter, and sheet processing system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002/67637 2002-03-12
JP2002067637 2002-03-12

Publications (1)

Publication Number Publication Date
WO2003076141A1 true WO2003076141A1 (fr) 2003-09-18

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PCT/JP2003/002819 WO2003076141A1 (fr) 2002-03-12 2003-03-10 Effecteur pour transport de feuilles, systeme porteur avec effecteur et systeme de traitement de feuilles

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JP (1) JPWO2003076141A1 (fr)
AU (1) AU2003213448A1 (fr)
WO (1) WO2003076141A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017098405A (ja) * 2015-11-24 2017-06-01 平田機工株式会社 ハンド部材およびハンド

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09155777A (ja) * 1995-12-12 1997-06-17 Sankyo Seiki Mfg Co Ltd ワーク保持位置検出機構
JPH11106044A (ja) * 1997-10-08 1999-04-20 Mitsubishi Electric Corp 基板搬送装置および基板搬送方法
JP3073229U (ja) * 2000-05-12 2000-11-14 株式会社三協製作所 搬送装置用ロボットハンド
JP2001044259A (ja) * 1999-07-30 2001-02-16 Fujikura Rubber Ltd 半導体搬送腕
JP2001054890A (ja) * 1999-08-16 2001-02-27 Nikon Corp 基板搬送装置及び基板処理装置
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
JP2003062786A (ja) * 2001-08-24 2003-03-05 Komatsu Ltd ロボットハンド

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09155777A (ja) * 1995-12-12 1997-06-17 Sankyo Seiki Mfg Co Ltd ワーク保持位置検出機構
JPH11106044A (ja) * 1997-10-08 1999-04-20 Mitsubishi Electric Corp 基板搬送装置および基板搬送方法
JP2001044259A (ja) * 1999-07-30 2001-02-16 Fujikura Rubber Ltd 半導体搬送腕
JP2001054890A (ja) * 1999-08-16 2001-02-27 Nikon Corp 基板搬送装置及び基板処理装置
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
JP3073229U (ja) * 2000-05-12 2000-11-14 株式会社三協製作所 搬送装置用ロボットハンド
JP2003062786A (ja) * 2001-08-24 2003-03-05 Komatsu Ltd ロボットハンド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017098405A (ja) * 2015-11-24 2017-06-01 平田機工株式会社 ハンド部材およびハンド

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JPWO2003076141A1 (ja) 2005-07-07
AU2003213448A1 (en) 2003-09-22

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