JP2017098405A - ハンド部材およびハンド - Google Patents
ハンド部材およびハンド Download PDFInfo
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- JP2017098405A JP2017098405A JP2015228949A JP2015228949A JP2017098405A JP 2017098405 A JP2017098405 A JP 2017098405A JP 2015228949 A JP2015228949 A JP 2015228949A JP 2015228949 A JP2015228949 A JP 2015228949A JP 2017098405 A JP2017098405 A JP 2017098405A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 65
- 230000002093 peripheral effect Effects 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000013459 approach Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
半導体ウェハを移載するロボットアームのハンドを構成するハンド部材であって、
前記ハンド部材は、前記半導体ウェハが載置されるU字形の部材であり、
前記ハンド部材は、その内周縁部及び外周縁部に、前記半導体ウェハを保持する摩擦保持部材が側方から嵌め合わされる嵌合部を備える、
ことを特徴とするハンド部材が提供される。
半導体ウェハを移載するロボットアームのハンドを構成するハンド部材であって、
前記ハンド部材は、前記半導体ウェハが載置され、難削材で構成されるU字形の部材であり、
前記ハンド部材は、その内周縁部及び外周縁部に、前記半導体ウェハを保持する摩擦保持部材が側方から嵌め合わされる嵌合部を備え、
前記嵌合部は、その周囲よりも薄肉の部位であり、
前記嵌合部は、少なくとも三つ形成されている、
ことを特徴とするハンド部材が提供される。
半導体ウェハを移載するロボットアームのハンドであって、
前記半導体ウェハが載置されるU字形のハンド部材と、
前記半導体ウェハを保持する複数の摩擦保持部材と、を備え、
前記ハンド部材は、その内周縁部及び外周縁部に、側方から前記複数の摩擦保持部材が嵌め合わされる嵌合部を備える、
ことを特徴とするハンドが提供される。
摩擦保持部材2および対応する嵌合部16の配置や数は、ハンド部材1の形状や、予想される半導体ウェハの湾曲態様等によって適宜設計可能である。
Claims (13)
- 半導体ウェハを移載するロボットアームのハンドを構成するハンド部材であって、
前記ハンド部材は、前記半導体ウェハが載置されるU字形の部材であり、
前記ハンド部材は、その内周縁部及び外周縁部に、前記半導体ウェハを保持する摩擦保持部材が側方から嵌め合わされる嵌合部を備える、
ことを特徴とするハンド部材。 - 半導体ウェハを移載するロボットアームのハンドを構成するハンド部材であって、
前記ハンド部材は、前記半導体ウェハが載置され、難削材で構成されるU字形の部材であり、
前記ハンド部材は、その内周縁部及び外周縁部に、前記半導体ウェハを保持する摩擦保持部材が側方から嵌め合わされる嵌合部を備え、
前記嵌合部は、その周囲よりも薄肉の部位であり、
前記嵌合部は、少なくとも三つ形成されている、
ことを特徴とするハンド部材。 - 請求項2に記載のハンド部材であって、
前記外周縁部には、前記嵌合部が少なくとも三つ形成され、
前記内周縁部には、前記嵌合部が少なくとも三つ形成されている、
ことを特徴とするハンド部材。 - 請求項2に記載のハンド部材であって、
吸着部を更に備える、
ことを特徴とするハンド部材。 - 半導体ウェハを移載するロボットアームのハンドであって、
前記半導体ウェハが載置されるU字形のハンド部材と、
前記半導体ウェハを保持する複数の摩擦保持部材と、を備え、
前記ハンド部材は、その内周縁部及び外周縁部に、側方から前記複数の摩擦保持部材が嵌め合わされる嵌合部を備える、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記摩擦保持部材は、
上側壁部と、下側壁部と、前記上側壁部と前記下側壁部とを接続する側壁部と、を含み、
前記下側壁部は、前記側壁部側から先端側へ向かって、前記上側壁部に近づくように傾斜して設けられ、
前記嵌合部に、前記上側壁部、前記下側壁部、及び前記側壁部とで囲まれた空間部を嵌め合わせた、
ことを特徴とするハンド。 - 請求項6に記載のハンドであって、
前記摩擦保持部材は、
前記上側壁部の上面に、前記半導体ウェハを保持する摩擦部材を備える、
ことを特徴とするハンド。 - 請求項7に記載のハンドであって、
前記摩擦部材は、前記上側壁部の上面における周縁部を除く部分に設けられる、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記嵌合部は、その周囲よりも薄肉の部位である、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記嵌合部は、少なくとも三つ形成されている、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記ハンド部材の前記外周縁部には、少なくとも三つの前記嵌合部が形成され、
前記ハンド部材の前記内周縁部には、少なくとも三つの前記嵌合部が形成されている、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記ハンド部材を難削材で構成した、
ことを特徴とするハンド。 - 請求項5に記載のハンドであって、
前記ハンド部材に設けられた吸着部を更に備える、
ことを特徴とするハンド。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015228949A JP6594177B2 (ja) | 2015-11-24 | 2015-11-24 | ハンド部材およびハンド |
TW105132912A TWI624899B (zh) | 2015-11-24 | 2016-10-12 | 手部構件及手部 |
US15/337,073 US9776333B2 (en) | 2015-11-24 | 2016-10-28 | Hand member and hand |
KR1020160150069A KR101882903B1 (ko) | 2015-11-24 | 2016-11-11 | 핸드 부재 및 핸드 |
CN201611052096.1A CN106783715B (zh) | 2015-11-24 | 2016-11-24 | 手构件和手 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015228949A JP6594177B2 (ja) | 2015-11-24 | 2015-11-24 | ハンド部材およびハンド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017098405A true JP2017098405A (ja) | 2017-06-01 |
JP6594177B2 JP6594177B2 (ja) | 2019-10-23 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015228949A Active JP6594177B2 (ja) | 2015-11-24 | 2015-11-24 | ハンド部材およびハンド |
Country Status (5)
Country | Link |
---|---|
US (1) | US9776333B2 (ja) |
JP (1) | JP6594177B2 (ja) |
KR (1) | KR101882903B1 (ja) |
CN (1) | CN106783715B (ja) |
TW (1) | TWI624899B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116945214A (zh) * | 2023-09-20 | 2023-10-27 | 万向钱潮股份公司 | 一种机器人手指装置 |
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USD805044S1 (en) * | 2015-10-30 | 2017-12-12 | Hirata Corporation | Adhesive sheet for substrate |
US10283393B1 (en) | 2017-11-08 | 2019-05-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method |
TWI758595B (zh) * | 2018-03-31 | 2022-03-21 | 日商平田機工股份有限公司 | 腔室構造 |
WO2019226453A1 (en) * | 2018-05-22 | 2019-11-28 | Ii-Vi Delaware, Inc. | Wafer fixture for testing and transport |
CN109407359A (zh) * | 2018-10-29 | 2019-03-01 | 武汉华星光电技术有限公司 | 机械手 |
US11148696B2 (en) | 2018-12-27 | 2021-10-19 | Toyota Research Institute, Inc. | Assistive robots including assemblies for accommodating obstacles and methods for using the same |
US11597098B2 (en) | 2018-12-27 | 2023-03-07 | Toyota Research Institute, Inc. | Assistive robot systems for container lifting |
US11505017B2 (en) | 2018-12-27 | 2022-11-22 | Toyota Research Institute, Inc. | Devices including deployable hitch assemblies and autonomous engagement systems incorporating the same |
US11827500B2 (en) | 2018-12-27 | 2023-11-28 | Toyota Research Institute, Inc. | Assistive robot systems for transporting containers |
JP1665227S (ja) * | 2019-11-28 | 2020-08-03 | ||
US20220063113A1 (en) * | 2020-08-26 | 2022-03-03 | WaferPath, Inc. | Protective cap for a robot end effector |
CN112018024A (zh) * | 2020-09-11 | 2020-12-01 | 北京北方华创微电子装备有限公司 | 机械手 |
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2015
- 2015-11-24 JP JP2015228949A patent/JP6594177B2/ja active Active
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2016
- 2016-10-12 TW TW105132912A patent/TWI624899B/zh active
- 2016-10-28 US US15/337,073 patent/US9776333B2/en active Active
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- 2016-11-24 CN CN201611052096.1A patent/CN106783715B/zh active Active
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KR20170060575A (ko) | 2017-06-01 |
TW201729327A (zh) | 2017-08-16 |
US20170144313A1 (en) | 2017-05-25 |
KR101882903B1 (ko) | 2018-07-27 |
CN106783715A (zh) | 2017-05-31 |
JP6594177B2 (ja) | 2019-10-23 |
US9776333B2 (en) | 2017-10-03 |
TWI624899B (zh) | 2018-05-21 |
CN106783715B (zh) | 2019-09-03 |
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