丄 六、發明說明： 【發明所屬之技術領域】 特別係關於一種用 本發明係關於一種基板傳輪系殊 以存取複數基板之基板傳輸系统。 【先前技術】 隨著科技的蓬勃發展及市場的 p ^. ^ m ^ , 、J次量需求’液晶顯示器 已廣泛的應用在現代生活的各種 9 貝織中，其中製程技術的 k升及生產成本的降低是促成液曰 夺，各士 上、* 叹日曰顯示器普及化的主要 因素田中，尤以基板（substrate、λα ^ e)的研究改良與創新突 破具有不可忽略的貢獻。 基板是製作液晶顯示器的關你 口趙μ — τ 的關鍵材料，-般是為-種高 口口質的超溥平板玻璃。在液 时 日日”"員不态大型化的發展趨勢 下，作為载體的基板，1面籍介— 八面積亦在快速增加中；然而，由 =基板在程序處理前、後都必須利用卡仏觀⑹以妥 。儲存，以避免碰撞或損傷，大型基板因佔據的空間較 ^自：、，、;增加了儲存系統的負擔，成為量產大型液晶顯示 盗的阻礙之。 在液晶顯示器的製程中’基板是以放置在具有多層承 载面的卡存，㈣行使㈣切主要分為標準式卡 H (n_al cassette)及線索式卡匣（▲㈣㈣）。標準 式卡g是傳統基板儲存輯用的卡歸式，主要是由多層 相同的基板承載©馳成，因各承載面之間㈣隔一定的 距離’足以使機械手臂伸人其牙叉，故使用標準式卡匡可 137716.5 以隨機之方式對任一承載面取放基板，但是，亦由於各承 載面之間隔要有一定的距離，造成單一卡匣内只旎規劃有 限的承載面數，產生空間利用的浪費。相反的，線索式卡 匣則是將各承載面的間距縮小，藉以提供較大的基板容 .量，但因各機械手臂無法將其牙叉伸入如此緊密的承載面 中間，也就是說’線索式卡匣無法以機械手臂方式隨機取 放基板，造成基板的取放順序有嚴重的限制’而通常只能 利用輸送帶以單一方向存取基板，或需搭配額外增設之可 • 動元件協助存取基板。 由此讦知，目前的基板傳輸系統並無法對基板的存取 提供一個能兼顧可隨機取放又具有較大儲存容量的卡匣 形式’雖然已有部分製程改以線索式卡匣取代標準式卡 匣，以求在生產大型液晶顯示器時能有足夠的倉儲空間， 但依售無法解決線索式卡匣僅能以整個卡匣為單位依序 取放基板所造成耗費玉時的問題，可見線索式卡匡雖有助 ·· 於成本控制，但是仍未盡完善。 .錢於此’如何開發出—種基板傳輸祕，其可用於 ’存取複數基板，並能兼顧儲存容量與存取效率係當前重要 - 的課題之'—。 • 【發明内容】 . 有鑑於上述課題，本發明> Q 、 ^ 之目的為提供一種基板傳輸 糸統及其細作方法，是 存容量與存取效率。乍於存取複數基板，並能兼顧儲 5 1377165 為達上述目的，依據本發明之一種用以存取複數基板 的基板傳輸系統包含一卡匣以及一搬運裝置。卡匣包含一 本體、複數對第一支撐元件以及複數對第二支撐元件。本 體具有相對設置之一第一壁與一第二壁。該等第一支撐元 件的其中任一對是分設於第一壁及第二壁以構成存放基 板之複數第一承載面之其中之一，該等第一支撐元件是沿 與第一承載面垂直之一方向而設置以構成一第一儲存 區，且沿此方向之相鄰兩第一支撐元件具有一第一距離。 該等第二支撐元件的其中任一對是分設於第一壁及第二 壁以構成存放基板之複數第二承載面之其中之一，該等第 二支撐元件是沿與第一承載面垂直之方向而設置以構成 鄰設於第一儲存區之一第二儲存區，且沿此方向之相鄰兩 第二支撐元件具有一第二距離。另外，沿與第一承載面垂 直之方向之相鄰的第一支撐元件與第二支撐元件之間具 有一第三距離，且第三距離是大於第一距離及第二距離。 搬運裝置是鄰設於卡匣，且具有至少一適於伸入卡匣以存 取基板的搬運單元。第一距離與第二距離是分別大於搬運 單元之一上移距離，且上移距離是適於使各基板脫離相對 應之各對第一支撐元件或相對應之各對第二支撐元件支 撐之一向上距離。 另外，’為達上述目的，依據本發明之一種基板傳輸系 統的操作方法是用以取出複數基板，此操作方法包含下列 步驟：提供一卡匣，卡匣具有鄰設的一第一儲存區與一第 二儲存區，第一儲存區具有複數對第一支撐元件以構成存 137716.5BRIEF DESCRIPTION OF THE DRAWINGS [Technical Field] The present invention relates to a substrate transfer system in which a substrate transfer system is used to access a plurality of substrates. [Prior Art] With the rapid development of technology and the market's p ^. ^ m ^ , J quantity demand 'liquid crystal display has been widely used in the modern 9 different kinds of shell weaving, among which the process technology k l and production The reduction of cost is the main factor that contributes to the liquidation of the liquid, and the main factors of the popularization of the monitors and the sighs. The research improvement and innovation breakthrough of the substrate (substrate, λα ^ e) has a non-negligible contribution. The substrate is the key material for making the liquid crystal display, and it is a kind of high-quality translucent flat glass. Under the trend of large-scale liquidation, the substrate as a carrier, the area of one side is also increasing rapidly; however, the substrate must be before and after the program processing. Use the card to view (6) to save. To avoid collision or damage, the large substrate due to the space occupied by:,,,; increase the burden of the storage system, become a hindrance to mass production of large liquid crystal display. In the process of the display, the 'substrate is placed in a card with a multi-layer bearing surface, (4) the exercise (four) is mainly divided into a standard card H (n_al cassette) and a clue card (▲ (four) (four)). The standard card g is a conventional substrate The card type used for storage is mainly composed of multiple layers of the same substrate bearing ©, because the distance between the bearing surfaces (4) is sufficient to make the mechanical arm reach the fork, so the standard type can be used 137716.5 The substrate is taken and placed on any bearing surface in a random manner. However, because there is a certain distance between the bearing surfaces, a limited number of bearing surfaces are planned in a single cassette, resulting in waste of space utilization. Conversely, the clasp is to reduce the spacing of the bearing surfaces to provide a larger substrate capacity, but the mechanical arms cannot extend their forks into the middle of such a tight bearing surface, that is, ' The lead type cassette cannot randomly pick and place the substrate by the robot arm, which causes the substrate to be taken and placed in a serious order. The board can usually be accessed in a single direction by using the conveyor belt, or it can be assisted by an additional movable component. Access to the substrate. It is known that the current substrate transfer system cannot provide a card form that can accommodate random access and has a large storage capacity for the access of the substrate, although some processes have been changed to clue cards.匣Replaces the standard cassette to ensure sufficient storage space when producing large LCD monitors. However, it is not possible to solve the problem that the lead-type cassettes can only be used to sequentially pick up and place the substrates in the order of the entire cassette. The problem is that although the clue-type card is helpful for cost control, it is still not perfect. The money is how to develop a kind of substrate transmission secret, which can be used for 'preservation In view of the above problems, the purpose of the present invention is to provide a substrate transfer system and a plurality of substrates, and both the storage capacity and the access efficiency are both important issues. The fine-grained method is a memory capacity and an access efficiency. The substrate transmission system for accessing a plurality of substrates includes a card according to the present invention. a handling device. The cassette comprises a body, a plurality of pairs of first supporting elements and a plurality of pairs of second supporting elements. The body has oppositely disposed one of the first wall and a second wall. Any one of the first supporting elements Is disposed on the first wall and the second wall to form one of a plurality of first bearing surfaces of the storage substrate, the first supporting elements are disposed along a direction perpendicular to the first bearing surface to constitute a first a storage area, and adjacent first support members in the direction have a first distance. One of the pair of second supporting members is disposed on the first wall and the second wall to form one of a plurality of second bearing surfaces of the storage substrate, and the second supporting members are along the first bearing surface The vertical direction is arranged to form a second storage area adjacent to one of the first storage areas, and the adjacent two second support elements along the direction have a second distance. Additionally, a third distance is provided between the first support member and the second support member adjacent the direction perpendicular to the first load bearing surface, and the third distance is greater than the first distance and the second distance. The carrying device is adjacent to the cassette and has at least one handling unit adapted to extend into the cassette for accessing the substrate. The first distance and the second distance are respectively greater than a moving distance of the transport unit, and the upward moving distance is adapted to disengage the substrates from the corresponding pairs of the first supporting elements or the corresponding pairs of the second supporting elements. An upward distance. In addition, in order to achieve the above object, an operation method of a substrate transfer system according to the present invention is to take out a plurality of substrates, the operation method comprising the steps of: providing a cassette having a first storage area adjacent thereto and a second storage area having a plurality of pairs of first support elements to constitute a deposit 137716.5
放基板之複數第一承載面，沿與第一承載面垂直之—方^ 之相鄰兩第一支樓元件具有一第一距離，第二儲存i耳有 複數對第二支撐元件以構成存放基板之複數第二承載 面，沿與第一承载面垂直之方向之相鄰兩第二支撐元件具 有一第二距離，而同樣沿此方向之相鄰的第—支樓元件與 第二支樓元件間具有一第三距離，其中，第三距離是大ς 第一距離及第二距離；接著’提供具有至少—搬運單元的 一搬運裝置，並將搬運單元伸入第一儲存區；最後，由搬 運單元依序自第一儲存區之底部至第一儲存區之頂部取 出基板’其中’搬運單元是以分別移動基板一上移距離的 方式，使位於第一儲存區的各基板能脫離相對應之各對第 一支撐元件的支撐，且上移距離是小於該第一距離。 承上所述，在本發明之基板傳輸系統及其操作方法 中，由於相鄰的兩第一支撐元件或第二支撐元件是以較小 的間距設置於卡£本體的壁上，因此可在μ大小的^ 内構成較多絲板承載面，有效提高基板的儲存容量；另 外’在相鄰之第-支撐元件與第二支撐元件間収另外具 有-較大的第三距離，其適於使搬運裝置將其搬運單元; 入。以整體結構觀之，由於第三距離亦可視 與第二儲存區之間距，故本發明的基板傳輸系統在摔作ΐ 搬置隨機挑選儲存區’再針對此儲存區依序 取放^板以―種有彈性的基板取放方式，而不需偏限 於以整個卡g為單位依序取放基板。 與習知技術相較，本發明兼具部分隨機存取基板與較 7 1377165 佳空間利用效率的兩項優點，不僅改善標準式卡匣因為各 基板承載面間距較大所造成存放空間浪費的問題，另外， 也節省線索式卡匣每次取放基板所要耗費的大量時間與 重複作動，有助於控制液晶顯示器的生產成本。除此之 外，本基板傳輸系統之卡匣在;結構上是為一整體，不需附 加任何可動元件以協助搬運裝置取放基板，可減少來自卡 匣外部的落塵機率或因本身元件間摩擦所產生的粉塵 量，在液晶顯示器的製程過程中維持基板表面的較佳狀 況，避免影響成品良率。 【貫施方式】 以下將參照相關圖式，說明本發明較佳實施例之基板 傳輸系統及其操作方法。 請參考圖1A及圖2所示，根據本發明第一較佳實施 例之一種用以存取複數基板A的基板傳輸系統1，其包含 一卡匣11以及一搬運裝置12。卡匣11包含一本體111、 複數對第一支撐元件112以及複數對第二支撐元件113。 本體111具有相對設置之一第一壁111a與一第二壁111b。 該等第一支撐元件112的其中任一對是分設於第一壁111a 及第二壁111b以構成存放基板A之複數第一承載面B之 其中之一，第一支撐元件112是沿與第一承載面B垂直之 一方向C而設置以構成一第一儲存區114，且沿此方向C 之相鄰兩第一支撐元件112具有一第一距離dl。該等第二 支撐元件113的其中任一對是分設於第一壁111a及第二壁 137716.5 lllb以構成存放基板A之複數第二承載面d之其中之一， 第二支撐元件113是沿方向C而設置以構成鄰設於第一儲 存區114之一第二儲存區115，且沿方向c之相鄰兩第二 支撐元件113具有一第二距離d2。此外，沿方向c之相鄰 之第一支撐元件112與第二支撐元件113之間具有一第三 距離d3，且第二距離d3是大於第一距離dl及第二距離 d2。搬運裝置12是鄰設於卡匣丨丨，且具有至少一適於伸 入卡匣11以存取基板A的搬運單元121。第一距離dl與 第二距離d2疋分別大於搬運單元121之一上移距離，且 上移距離是適於使各基板A脫離相對應之各對第一支撐元 件112或相對應之各對第二支撐元件113支撐之一向上距 離。 在本實施例中，基板傳輸系統丨所存取之基板A可包 括玻璃基材、塑膠基材、金屬基材、已填入液晶的對組基 材或其他適合基材。本實施例之基板㈣以玻璃基板為例。 • 輕11是用作於存放基板A，吨供基板A在處理 程序前、後較為妥善的儲存方式’為此，卡匡u是為具 有-本體m、複數第-支撐元件112以及複數第二支樓 元件113而可將基板A收容成積層壯能 肩臂狀怨的一立體結構。卡 匣11之本體111具有一第一壁lu 及一第二壁lllb，其 可使用之材質包括不銹鋼、鋁、JL仙拉—t • 一他穩定性佳之金屬或穩 定性佳之合金’又或者為樹脂（聚醚、 • %蜒酮、聚醚醯亞胺、 聚碳酸酯等）、高性能碳纖維複人 ° 材料（carbon fiber reinforced plastics，CFRP)或其他齟 7 痛人工合成材料。本發 9 1377165 明不限於上述描述，可依貫際需求選擇適當材料。'請炎考 圖1A所示，在本實施例中，第一壁111&與第二壁 可為彼此平行且相同之-對四邊型平板，而第—支撐元件 112與第二支撐元件113是各自成訝地分別設置於第—壁 111a與第二壁uib上；當然，請參考圖ic所示，在本實 施例之另一態樣中，第一壁111a與第二壁ulb亦可為= 行且相同之一對四邊型框架，.四邊型框架包含成對之支撐 條板I分別以縱向方向固定於四邊型框架中的上下框= 上，而第一支撐元件112或第二支撐元件113則是設置於 支撐條板I上。 ' 本發明中第一支撐元件112是以成對之方式分別設置 於第一壁111a與第二壁11113上，且每一對第一支樓元件 112可構成一存放基板A的第一承载面B，在本實施例中， 請參考圖，第—支料件112係為連續長條板狀 結構；然而，在本實施例之另一態樣中，第一支撐元件112 亦可為獨立的桿狀結構（如圖1B與圖1C所示），換言之， 每-對第-支撐元件丨丨2可為多個桿狀結構以構成一存放 基板A的第-承载面B<5第—支撐元件112以使用具有不 易彎曲、抗靜電性、耐磨耗性、高表面硬度、低析出物、 耐高溫性及耐化學性等特性者為佳，不僅可以提升成品的 良率，亦可以延長卡匣U的使用壽命與減少卡匣u的維 修需求，據此，第一支撐元件112可由具有良好強度之不 鏽鋼、鋁、合成樹脂、碳纖維或強化彈性碳纖維所製造， 再者，於第一支撐元件112上可更進一步塗以預定之材 1377165 料，以降低接觸基板A時可能造成的基板A表面劃傷。另 外，請同時參考圖1A所示，各對第一支撐元件112是沿 方向C分別設置於第一壁111a及第二壁111b上，其設置 之方式可為嵌合卡固、螺絲鎖固、熱融或鉚接等方式，或 是第一支撐元件112亦可直接與卡匣11 一體成型。本發明 不限於上述描述，可依實際需求選擇適當的設置方式。 第二支撐元件113亦是以成對之方式分別設置於第一 壁111a與第二壁111b上，且每一對第二支撐元件113可 ® 構成一存放基板A的第二承載面D，由於第二支撐元件113 之結構、製造材料與設置方式皆與第一支撐元件112相 同，於此不再贅述。 請參考圖2所示，卡匣11具有一第一儲存區114及一 第二儲存區115，第一儲存區114是由第一支撐元件112 沿方向C設置而構成，而第二儲存區115則是由第二支撐 元件113沿方向C設置而構成。 φ 在本發明之基板傳輸系統中，第一距離dl與第二距 離d2是大於搬運單元121之一上移距離，其中，上移距 離是適於使各基板A脫離相對應之各對第一支撐元件112 或相對應之各對第二支揸元件Π3支撐所需的一向上距 離；據此，當搬運裝置12以其搬運單元121取出置放於 第一承載面B或第二承載面D中的基板A時，搬運單元 Λ 121可承載並向上移動此基板Α —距離，使此基板Α得不 與原本支撐此基板A的第一支撐元件112或第二支撐元件 113接觸，同時亦不會使得基板A與上方之另一對第一支 11 1377165 撐元件112或第二支撐元件113接觸，將基板A在搬運過 程中接觸面積及可能的刮損程度減到最低’，確保成品良 率〇 請參考圖1A及圖2所示，沿方向C的相鄰兩第一支 撐元件112間具有第一距離dl，而沿方向C的相鄰兩第二 支撐元件113間具有第二距離d2,在本實施例中，第一距 離dl可實質等於第二距離d2,使達到較佳儲存容量分配。 第一距離dl與第二距離d2是大於待搬運裝置12存取的 基板A的厚度，使基板A能在最少實質接觸的情況下置入 或取出於第一承載面B或第二承載面D。 沿方向C之相鄰之第一支撐元件112與第二支撐元件 113之間具有第三距離d3，而第三距離d3必須要大於第 一距離dl及第二距離d2 ;請參考圖2所示，在本實施例 中，由於第一儲存區114與第二儲存區115是分別由第一 支撐元件112與第二支撐元件113所構成，因此，第三距 離d3亦可視為第一儲存區114之底部與第二儲存區115 之頂部的間距，由此可以得知，在本實施例中，第一儲存 區114與第二儲存區115間的距離是分別大於第一承載面 B與第一承載面B間的距離或第二承載面D與第二承載面 D間的距離。 搬運裝置12具有至少一適於伸入卡匣11的搬運單元 121，因此，搬運裝置12可利用搬運單元121承載並移動 基板A，而將基板A分別存放於卡匣11中，或分別由卡 匣11中取出基板A。請參考圖1A所示，在本實施例中， 12 搬，裝置12可為一具有兩個搬運單元121之 而每一搬運12 巧械手臂， 然，搬運支牙又的牙又組，當 微運早7L 121亦可為具有其他數目牙叉之 卜機械手臂在使用上並無特別限制，可為办 臂、常壓機;fei …真i機械手 _手#或其他適於搬運基板A之機，且 合金、高性能碳纖維複合材料或其他具有足夠 、程彈性材料所製成。本發明不限於 ::際需求選擇適當的搬運裝置與其材質。請參=，二 下蔣乐m 卩便機$手打在取少接觸的情況 基板A，申入第一错存區Μ與第二儲存區115之間存取 土 ，牙叉之厚度是可介於第三距離d3與第—距離dl 之間，或介於第三距離d3與第二距離d2之間。 在本實施例中，當各基板A被分別放置於各對第一支 棕轉112或各對第二支撐元件113上時，各對第一支樓 Γ件，ΐ各對第二支撐元件113是以接觸相對應之基板 、抵罪表面Α1以支撐基板A，而當操作本發明之基 反傳輸系統1以存取基板A時，搬運裝置12亦是以接觸 土 之抵靠表面A1以將基板A置入卡匣11或自卡匣 中取出’其乃是為避免已披覆化學塗層或預備予以披覆 化學塗層的基板A之表面A2(即相對抵靠表面Λ1的另一 土）/、其他物件有貫質接觸。在本實施例中所使用的「抵 菲表面」一詞是指基板的兩表面之其中之一，是為未實施 =工、處理或未規劃要予以加工或處理的基板表面，其可 ^供於承載搬運或與其他物件接觸，以避免造成非基板抵 13 1377165 靠表面上的刮傷或顆粒附著，影響成品良率。 以下將參照圖3A、圖3B及圖4說明本發明第二較佳 實施例之基板傳輸系統的卡匣3。 圖3A是為本發明第二較佳實施例之一種基板傳輸系 統之卡匣3的示意圖，圖4則是為圖3A之卡匣3的前視 圖。請參考圖3A及4所示，根據本發明第二較佳實施例 之一種用以存取複數基板E的基板傳輸系統，其包含一卡 匣3以及一搬運裝置（圖中未示）。卡匣3包含一本體31、 複數對第一支撐元件32、複數對第二支撐元件33以及複 數輔助支撐元件39。本體31具有相對設置之一第一壁 311、一第二壁312與一第三壁313,第三壁313是分別與 第一壁311與第二壁312連接。該等第一支撐元件32的 其中任一對是分設於第一壁311及第二壁312以構成存放 基板E之複數第一承載面F之其中之一，該等第一支撐元 件32是沿與第一承載面F垂直之一方向G而設置以構成 一第一儲存區34，且沿方向G的相鄰兩第一支撐元件32 具有一第一距離d4。該等第二支撐元件33的其中任一對 是分設於第一壁311及第二壁312以構成存放基板E之複 數第二承載面Η之其中之一，該等第二支撐元件33是沿 方向G而設置以構成鄰設於第一儲存區34之一第二儲存 區35，且沿方向G之相鄰兩第二支撐元件33具有一第二 距離d5。此外，沿方向G之相鄰之第一支撐元件32與第 二支撐元件33之間具有一第三距離d6，且第三距離d6是 大於第一距離d4及第二距離d5。該等輔助支撐元件39是 14 137716.5 設置於第三壁313上，且盥 共同構成相對應之各第一承载面;=對第一支撐元件32 A- ^ - 矛艰載面F或與相對應之各對第二 W 70件33共同構成相對應之各第二承載面H，該等輔助 件39是沿方向（^而設置於第三壁313。換言之，每 第承載面F可由對應之一對第一支撐元件32與至少 辅，支撐it件39構成；每—第二承載面H可由對應之 =十第一支撐元件33與至少一辅助支撐元件％構成。其Placing a plurality of first bearing surfaces of the substrate, the first two branch members adjacent to the first bearing surface having a first distance, and the second storing i ears having a plurality of second supporting members to constitute the storage a plurality of second bearing surfaces of the substrate having a second distance along adjacent two second supporting members in a direction perpendicular to the first bearing surface, and adjacent first branch members and second branch in the same direction There is a third distance between the components, wherein the third distance is greater than the first distance and the second distance; then 'providing a handling device having at least the handling unit, and extending the handling unit into the first storage area; finally, The substrate is sequentially taken out from the bottom of the first storage area to the top of the first storage area. The 'transporting unit' is configured to move the substrates in the first storage area away from each other. Corresponding to the support of each pair of first support elements, and the upward movement distance is less than the first distance. As described above, in the substrate transfer system of the present invention and the method of operating the same, since the adjacent two first support members or the second support member are disposed on the wall of the card body at a small pitch, The μ size of the inside constitutes more wire bearing surface, which effectively increases the storage capacity of the substrate; in addition, 'the adjacent first-supporting element and the second supporting element have an additional -large third distance, which is suitable for Let the handling device transport the unit; According to the overall structure, since the third distance can also be seen as the distance between the second storage area, the substrate transfer system of the present invention is placed in the randomly selected storage area, and then the board is sequentially taken and placed for the storage area. ―The flexible substrate pick-and-place method does not need to be limited to sequentially picking and placing the substrate in units of the entire card g. Compared with the prior art, the present invention has the advantages of partial random access substrate and better space utilization efficiency than 7 1377165, which not only improves the standard card, but also wastes storage space due to large spacing of the bearing surfaces of the substrates. In addition, it also saves a lot of time and repeated operation of the lead-type card for each time the substrate is taken and lowered, which helps to control the production cost of the liquid crystal display. In addition, the substrate transfer system has a card structure; the structure is a whole, and no movable component is needed to assist the handling device to pick up and place the substrate, thereby reducing the probability of falling dust from the outside of the cassette or the friction between the components themselves. The amount of dust generated maintains the surface condition of the substrate during the manufacturing process of the liquid crystal display to avoid affecting the yield of the finished product. [Complex Mode] Hereinafter, a substrate transfer system and a method of operating the same according to a preferred embodiment of the present invention will be described with reference to the related drawings. Referring to FIG. 1A and FIG. 2, a substrate transfer system 1 for accessing a plurality of substrates A according to a first preferred embodiment of the present invention includes a cassette 11 and a handling device 12. The cassette 11 includes a body 111, a plurality of pairs of first support members 112, and a plurality of pairs of second support members 113. The body 111 has a first wall 111a and a second wall 111b disposed opposite to each other. One of the first support members 112 is disposed on the first wall 111a and the second wall 111b to form one of the plurality of first bearing surfaces B of the storage substrate A. The first support member 112 is along The first bearing surface B is disposed perpendicular to one of the directions C to form a first storage region 114, and the adjacent two first supporting members 112 along the direction C have a first distance d1. One of the second supporting members 113 is disposed on the first wall 111a and the second wall 137716.5 111b to form one of the plurality of second bearing surfaces d of the storage substrate A. The second supporting member 113 is along The direction C is arranged to form a second storage area 115 adjacent to the first storage area 114, and the adjacent two second support elements 113 in the direction c have a second distance d2. Further, a third distance d3 is formed between the adjacent first support member 112 and the second support member 113 in the direction c, and the second distance d3 is greater than the first distance d1 and the second distance d2. The carrying device 12 is disposed adjacent to the cassette and has at least one handling unit 121 adapted to extend into the cassette 11 to access the substrate A. The first distance d1 and the second distance d2疋 are respectively greater than a moving distance of the transport unit 121, and the upward moving distance is suitable for each substrate A to be detached from the corresponding pair of first supporting elements 112 or corresponding pairs. The two support members 113 support one of the upward distances. In this embodiment, the substrate A accessed by the substrate transfer system can include a glass substrate, a plastic substrate, a metal substrate, a pair of substrates filled with liquid crystal, or other suitable substrate. The substrate (4) of this embodiment is exemplified by a glass substrate. • Light 11 is used to store the substrate A, and the substrate A is stored in a proper manner before and after the processing procedure. To this end, the cassette u has a body m, a plurality of first support members 112, and a second The branch member 113 can accommodate the substrate A in a three-dimensional structure in which a stack of strong shoulders and grievances is formed. The body 111 of the cassette 11 has a first wall lu and a second wall 111b, and the materials that can be used include stainless steel, aluminum, JL, and a metal of good stability or an alloy of good stability. Resin (polyether, • fluorenone, polyether phthalimide, polycarbonate, etc.), high-performance carbon fiber reinforced plastics (CFRP) or other 龃7 pain synthetic materials. The present invention is not limited to the above description, and suitable materials can be selected according to the needs of the present invention. As shown in FIG. 1A, in the present embodiment, the first wall 111& and the second wall may be parallel to each other and the same to the quadrilateral type flat plate, and the first support member 112 and the second support member 113 are Each of the first wall 111a and the second wall ulb may be provided in the first wall 111a and the second wall uib. = row and same one of the four-sided frame, the four-sided frame comprises a pair of support strips I respectively fixed in the longitudinal direction to the upper and lower frames = in the quadrilateral frame, and the first support element 112 or the second support element 113 is placed on the support strip I. In the present invention, the first supporting members 112 are respectively disposed on the first wall 111a and the second wall 11113 in a pair, and each pair of the first branch members 112 can constitute a first bearing surface of the storage substrate A. B, in this embodiment, referring to the figure, the first support member 112 is a continuous elongated plate-like structure; however, in another aspect of the embodiment, the first support member 112 may also be independent. The rod-like structure (as shown in FIG. 1B and FIG. 1C), in other words, each of the pair of first support members 丨丨2 may have a plurality of rod-like structures to constitute a first bearing surface B<5 first support of the storage substrate A The component 112 preferably has characteristics such as difficulty in bending, antistatic property, abrasion resistance, high surface hardness, low precipitate, high temperature resistance, and chemical resistance, and can not only improve the yield of the finished product, but also extend the card. The service life of the 匣U and the maintenance requirement of the reduction ,u, according to which the first support member 112 can be made of stainless steel, aluminum, synthetic resin, carbon fiber or reinforced elastic carbon fiber having good strength, and further, the first support member 112 can be further coated with the predetermined materials 1377165 material to reduce the surface scratch of the substrate A which may be caused when contacting the substrate A. In addition, as shown in FIG. 1A, the first pair of first supporting members 112 are respectively disposed on the first wall 111a and the second wall 111b along the direction C, and the manner of the first supporting members 112 can be set to be engaged and screwed. The method of hot melt or riveting, or the first support member 112 can also be integrally formed with the cassette 11 . The present invention is not limited to the above description, and an appropriate setting manner can be selected according to actual needs. The second supporting members 113 are also disposed on the first wall 111a and the second wall 111b in a paired manner, and each pair of the second supporting members 113 can constitute a second bearing surface D of the storage substrate A, The structure, manufacturing material and arrangement of the second supporting member 113 are the same as those of the first supporting member 112, and details are not described herein again. Referring to FIG. 2, the cassette 11 has a first storage area 114 and a second storage area 115. The first storage area 114 is formed by the first support member 112 disposed along the direction C, and the second storage area 115 is formed. This is formed by the second support member 113 being disposed in the direction C. φ In the substrate transport system of the present invention, the first distance d1 and the second distance d2 are greater than a moving distance of the transport unit 121, wherein the upward shifting distance is adapted to separate the substrates A from the corresponding pairs of the first The support member 112 or the corresponding pair of second support members Π3 support an upward distance required; accordingly, when the transport device 12 is taken out by the transport unit 121, it is placed on the first bearing surface B or the second bearing surface D. In the case of the substrate A, the handling unit Λ 121 can carry and move the substrate Α-distance so that the substrate does not contact the first supporting member 112 or the second supporting member 113 that originally supports the substrate A, and does not The substrate A is brought into contact with the other pair of first 11 1377165 support members 112 or the second support member 113 above, which minimizes the contact area and possible scratching degree of the substrate A during transportation to ensure the yield of the finished product. Referring to FIG. 1A and FIG. 2, a first distance d1 between adjacent two first supporting members 112 in the direction C and a second distance d2 between adjacent two second supporting members 113 in the direction C, In this embodiment, the first distance d l can be substantially equal to the second distance d2 to achieve a better storage capacity allocation. The first distance d1 and the second distance d2 are greater than the thickness of the substrate A accessed by the device to be transported 12, so that the substrate A can be placed in or taken out on the first bearing surface B or the second bearing surface D with minimal physical contact. . A third distance d3 between the adjacent first support member 112 and the second support member 113 in the direction C, and the third distance d3 must be greater than the first distance d1 and the second distance d2; please refer to FIG. In this embodiment, since the first storage area 114 and the second storage area 115 are respectively formed by the first supporting component 112 and the second supporting component 113, the third distance d3 can also be regarded as the first storage area 114. The distance between the bottom of the second storage area 115 and the top of the second storage area 115, it can be seen that, in this embodiment, the distance between the first storage area 114 and the second storage area 115 is greater than the first bearing surface B and the first The distance between the bearing surfaces B or the distance between the second bearing surface D and the second bearing surface D. The transport device 12 has at least one transport unit 121 adapted to extend into the cassette 11. Therefore, the transport device 12 can carry and move the substrate A by the transport unit 121, and store the substrates A in the cassette 11 respectively, or respectively by the card. The substrate A was taken out from the crucible 11. Referring to FIG. 1A, in the embodiment, the device 12 can be a device having two handling units 121 and each carrying 12 arms, and then the teeth are moved and set. The early morning 7L 121 can also be used for the mechanical arm with other numbers of dental forks. There is no special restriction on the use of the arm. It can be an arm or a normal press; fei ... true i manipulator _ hand # or other suitable for transporting the substrate A Machines, alloys, high-performance carbon fiber composites or other materials with sufficient and flexible materials. The present invention is not limited to the selection of an appropriate handling device and its material. Please refer to =, the second Jiang Le m 卩 机 machine $ hand in the case of taking less contact with the substrate A, the first error storage area Μ and the second storage area 115 to access the soil, the thickness of the fork can be between The third distance d3 is between the first distance d1 or between the third distance d3 and the second distance d2. In this embodiment, when each of the substrates A is placed on each of the first pair of brown turns 112 or each pair of the second supporting members 113, each pair of first branch members, each pair of second supporting members 113 The substrate A is contacted with the corresponding substrate to support the substrate A. When the substrate back-transport system 1 of the present invention is operated to access the substrate A, the carrier device 12 is also abutting against the surface A1 to contact the substrate. A is placed in the cassette 11 or removed from the cassette 'is to avoid the surface A2 of the substrate A that has been coated with the chemical coating or is intended to be coated with the chemical coating (ie, another soil that is relatively against the surface Λ1) /, other objects have a quality contact. The term "fibrous surface" as used in this embodiment refers to one of the two surfaces of the substrate, which is the surface of the substrate that is not processed, processed, or otherwise planned to be processed or processed. Carrying or handling with other objects to avoid scratches or particle adhesion on the surface of the non-substrate against 13 1377165, affecting the yield of the finished product. The cassette 3 of the substrate transfer system of the second preferred embodiment of the present invention will now be described with reference to Figs. 3A, 3B and 4. Fig. 3A is a schematic view showing a cassette 3 of a substrate transfer system according to a second preferred embodiment of the present invention, and Fig. 4 is a front view of the cassette 3 of Fig. 3A. Referring to Figures 3A and 4, a substrate transport system for accessing a plurality of substrates E includes a cassette 3 and a handling device (not shown) in accordance with a second preferred embodiment of the present invention. The cassette 3 includes a body 31, a plurality of pairs of first support members 32, a plurality of pairs of second support members 33, and a plurality of auxiliary support members 39. The body 31 has a first wall 311, a second wall 312 and a third wall 313 disposed opposite to each other. The third wall 313 is connected to the first wall 311 and the second wall 312, respectively. One of the first support members 32 is disposed on the first wall 311 and the second wall 312 to form one of the plurality of first bearing surfaces F of the storage substrate E. The first support members 32 are The first storage region 34 is disposed along a direction G perpendicular to the first bearing surface F, and the adjacent two first support members 32 in the direction G have a first distance d4. One of the pair of second supporting members 33 is disposed on the first wall 311 and the second wall 312 to form one of a plurality of second bearing surfaces of the substrate E, and the second supporting members 33 are The second storage area 35 is disposed adjacent to the first storage area 34, and the adjacent two second support elements 33 along the direction G have a second distance d5. Further, a third distance d6 is formed between the adjacent first support member 32 and the second support member 33 in the direction G, and the third distance d6 is greater than the first distance d4 and the second distance d5. The auxiliary supporting members 39 are 14 137716.5 disposed on the third wall 313, and the 盥 together constitute the corresponding first bearing surfaces; = the first supporting member 32 A-^ - the sturdy surface F or the corresponding Each of the pair of second W 70 members 33 together constitutes a corresponding second bearing surface H, and the auxiliary members 39 are disposed in the third wall 313 in the direction (in other words, each of the first bearing surfaces F can be corresponding to one of them) The first support element 32 and at least the auxiliary support member 39 are formed; each of the second bearing surfaces H may be composed of a corresponding one of the ten first support elements 33 and at least one auxiliary support element %.
中母—第-承載面F或每-第二承載面⑽用的輔助支撐 兀件39的數目並不限於圖式所示，可依實際需求調整， 乂避免基板因中央支撐力較小而彎曲。搬運裝置（圖中未 示）是鄰設於卡S 3，且具有一至少適於伸入卡匡3以存 取基板E的搬運單元。第一距離d4與第二距離d5是分別 大於搬運單元之一上移距離，且上移距離是適於使各基板 E脫难相對應之各對第一支擇元件32或相對應之各對第 二支撐元件33支撐之一向上距離。 本貫施例之基板傳輸系統之卡匣適用於提供大尺寸 的基板足夠強度的支撐，避免因為基板E在第一承載面F 或第一承載面Η上時由於左右兩端與中間部位受力不均勹 而產生曲折或變形。 在本實施例中’基板傳輸系統所存取的基板Ε、複數 對第一支撐元件32以及複數對第二支撐元件33皆與本發 明第一較佳實施例中所揭示之基板傳輸系統丨所存取的基 板A、複數對第一支撐元件112以及複數對第二支撐元件 113相同（如圖1所示）’於此不再贅述。 15 1377165 請參考圖3A所示，在本實施例中，卡匣3是和本發 明第一較佳實施例中所揭示之卡匣11相似但其本體31而 更具有一第三壁313,其材質可與第一壁312與第二壁313 相同，再者，請參考圖4所示，第三壁313可為一四邊型 平板’其長寬比例則可依照欲存放基板E的長寬比例及欲 使用的基板E承載面數量進行規劃，然而第三壁313可為 與第一壁311及第二壁312不同的形狀或結構；當然，在 本實施例的另一態樣中，第三壁313亦可為一四邊型框架 (如圖3B所示），惟本發明不限於上述描述，可依實際需 求選擇適當的第三壁結構或形狀。本發明之第三壁313與 第一壁311及第二壁312連接之方式可為螺絲鎖固、插入 嵌合、藉由其他元件連結固定或一體成型，第三壁313並 以此與第一壁311及第二壁312組成一截面為门字形立體 結構的本體31 (如圖3A與圖3B所示）。當然，本體亦可 具有一上蓋以及一底板，以與第一壁311、第二壁312及 第三壁313組成具有一開口的箱體，然其並非為限制性， 可依實際需求調整。 請參考圖3A所示，在本實施例中，辅助支撐元件39 是沿方向G而設置於第三壁313並相對應之第一支撐元件 32共同構成相對應之第一承載面F或與相對應之第二支撐 元件33共同構成相對應之第二承載面H。輔助支撐元件 39可由良好強度之不鏽鋼、鋁、合成樹脂、碳纖維、強化 彈性碳纖維或其他適當材料所製造，並如同使用第一支撐 元件32及第二支撐元件33，要考量不易彎曲、抗靜電性、 16 137716.5 耐磨耗性、高表面硬度、低析出物、耐高溫性及耐化學性 等特性’再者，辅助支撐元件39上邛更進一步塗以預定 之材料，以降低接觸基板E時可能造成的基板E表面劃 傷。另外，在本實施例中，輔助支撐元件39是為連續長 條狀，而其長度是必須依據待存放之基板E的大小，考量 是否能提供足夠之支撐力，而必須使基板E在置放於第一 承载面F或第二承載面η上時不會因為本身之重量下壓而The number of auxiliary support members 39 for the mid-mother-bearing surface F or the per-second bearing surface (10) is not limited to that shown in the drawings, and can be adjusted according to actual needs, so that the substrate is prevented from being bent due to the small central supporting force. . A handling device (not shown) is adjacent to the card S 3 and has a handling unit at least adapted to extend into the cassette 3 for accessing the substrate E. The first distance d4 and the second distance d5 are respectively greater than one of the upward movement distances of the transport unit, and the upward movement distance is a pair of first selection elements 32 or corresponding pairs corresponding to each substrate E being difficult to remove. The second support element 33 supports one of the upward distances. The card substrate of the present embodiment is suitable for providing a support of a large-sized substrate with sufficient strength to avoid stress on the left and right ends and the intermediate portion when the substrate E is on the first bearing surface F or the first bearing surface. Unevenness produces twists and turns. In the present embodiment, the substrate 存取 accessed by the substrate transfer system, the plurality of pairs of the first support member 32, and the plurality of pairs of the second support member 33 are combined with the substrate transfer system disclosed in the first preferred embodiment of the present invention. The accessed substrate A, the plurality of pairs of the first support member 112, and the plurality of pairs of the second support member 113 are identical (as shown in FIG. 1) and will not be described herein. 15 1377165 Referring to FIG. 3A, in the present embodiment, the cassette 3 is similar to the cassette 11 disclosed in the first preferred embodiment of the present invention, but has a body 31 and a third wall 313. The material may be the same as the first wall 312 and the second wall 313. Further, please refer to FIG. 4, the third wall 313 may be a quadrilateral flat plate. The aspect ratio may be according to the length and width of the substrate E to be stored. The ratio and the number of substrate E bearing faces to be used are planned, but the third wall 313 may have a different shape or structure than the first wall 311 and the second wall 312; of course, in another aspect of the embodiment, The three walls 313 can also be a quadrilateral frame (as shown in FIG. 3B), but the invention is not limited to the above description, and an appropriate third wall structure or shape can be selected according to actual needs. The third wall 313 of the present invention is connected to the first wall 311 and the second wall 312 in a manner of screw locking, insertion fitting, joint fixing or integral molding by other elements, and the third wall 313 and the first wall The wall 311 and the second wall 312 constitute a body 31 having a gate-shaped three-dimensional structure (as shown in Figs. 3A and 3B). Of course, the main body can also have an upper cover and a bottom plate to form a box having an opening with the first wall 311, the second wall 312 and the third wall 313. However, it is not limited and can be adjusted according to actual needs. Referring to FIG. 3A, in the embodiment, the auxiliary supporting member 39 is disposed on the third wall 313 along the direction G and the corresponding first supporting member 32 together constitutes a corresponding first bearing surface F or phase. Corresponding second support elements 33 together form a corresponding second bearing surface H. The auxiliary support member 39 can be made of stainless steel, aluminum, synthetic resin, carbon fiber, reinforced elastic carbon fiber or other suitable material of good strength, and as with the first support member 32 and the second support member 33, it is considered that the bending and antistatic properties are not easy. 16 137716.5 Abrasion resistance, high surface hardness, low precipitates, high temperature resistance and chemical resistance. Further, the auxiliary support member 39 is further coated with a predetermined material to reduce the possibility of contacting the substrate E. The surface of the substrate E is scratched. In addition, in the embodiment, the auxiliary supporting member 39 is in the form of a continuous strip, and the length thereof must be based on the size of the substrate E to be stored, and whether the supporting force can be provided, and the substrate E must be placed. When the first bearing surface F or the second bearing surface η is not pressed by its own weight
產生變形彎曲。另外，輔助支撐元件39是設置於第三壁 313上’其設置之方式可為嵌合卡固、螺絲鎖固、熱融或 柳接等方式，或是辅助支撐元件39亦可直接與卡匣3 — 體成型。本發明不限於上述描述，可依實際需求選擇適當 的設置方式。 °月參考圖4所示，在本實施例中，辅助支撐元件39 亦=藉由接觸基板Ε之抵靠表面Ε1以支撐基板Ε，其中， 抵罪表面Ε1即為各基板Ε被分別放置於各對第一支撐元 或各對第二支撐元件33上時，第—支撐S件32或 撐元件33用以接觸並支持基板㈣—基板Ε表面。 祇*表面與前述概念㈣，於此不再贅述。 =下將參照圖5㈣本發明較佳實施例之—種基板傳 板:、由作方法，此操作方法是用於取出儲存的複數基 述之夷板2作方法中所使用之卡W及搬縣置皆與前 土板傳輸系統之卡匣1 i (戋卡 相似，於此不再贅述。（1卡®3)以及搬運裝置12 凊參考圖5所示，依據本發明較佳實施例之基板傳輸 17 系統的操作方法，係包 係提供-卡牛趣 夂驟 至父驟813。步驟S11 搬運# w ，^ Sl2係提供具有至少—搬運單元的_ 搬運裂置’並將搬運單 Μ早兀的 搬運單元依序自第一二伸二了二區;步驟S13係由 取出基板。 " 弟儲存區之頂部 置依序自傳輪纟⑽操作方法+，使用搬運裝 板的方r之底部至第—儲存區之頂部取出基 =ir搬運單元先分別移動基板-上移距離，使各 i出ir 各對第—支撐元件支撐，料卡匡前側 一 —而/主心的疋，上移距離要小於相鄰兩第一支撐 兀件間的第-距離，以避免當搬運單元以取出基板為目的 而向上移動基板時，基板會接制其上的第—支撐元件， 產生無β月的碰撞或到傷。 在本實施例中，當實施本發明之基板傳輸系統的操作 方法之步驟S3前，第一支撐元件的其中任一對是以接觸 基板的一抵靠表面以支撐基板，使基板能處於一穩定的狀 悲’其中’抵靠表面是指基板具有之未實施加工、處理或 未規劃要予以加工或處理的一表面，其可提供承載或搬運 使用’以避免其他物件接觸非基板抵靠表面可能造成的表 面到傷或顆粒附著，再者’於實施本發明之基板傳輸系統 的操作方法之步驟S3時，搬運單元亦是以接觸基板的抵 靠表面以取出基板。另外，在本實施例中，搬運單元是以 真空吸附或靜電吸附基板的方式承載與移動基板，可加強 基板位於搬運單元上時的穩定性，以避免基板在搬運的過 18 程中產生位移、晃動、不穩甚至由搬運單元上墜落，惟本 發明不限於上述描述’可依實際需求選擇適當的承载基板 的機制。此處是以取出第一儲存區的基板為例，而取出第 二儲存區的基板之概念與上述原理相近，於此不再寶迷。 综上所述，依據本發明之基板傳輸系統及其操作方法 是以一緊密的距離間隔設置相鄰的第一支撐元件或第一 支撐元件，故可使單一卡匣内具有較多的基板承载面，從 而提高卡匣的基板儲存容量；另外，在相鄰之儲存區與儲 存區間則是搭配設置一較大的第三距離，其適於使搬運事 置將其搬運單元伸入，以快速完成此儲存區内的基板疒 取；據此，本基板傳輸系統可提供先隨機選取儲存區，子 對儲存區内之各承載面依序取放基板的基板取放方式，盼 改善使用標準式卡匣所造成卡匣内内部空間浪費的； 題，還可突破現行線索式卡匣嚴重受限的基板存取方弋 有助於節省倉儲空間或工時，降低液晶顯示器的生1成 =。另外’本基板傳輸系統料需在卡g結構上附加 可動元件來協助搬運裝絲絲板，避免_ =可動元件磨擦所產生出__落基板表面上，= 战απ良率。 、曰 以上所述僅為舉例性，而非為限制 本發明之精神與範•，而對其進行之等 7未脫離Deformation and bending. In addition, the auxiliary supporting member 39 is disposed on the third wall 313. The manner of the auxiliary supporting member 39 can be set in a manner of fitting, screwing, hot-melting or splicing, or the auxiliary supporting member 39 can be directly engaged with the card. 3 — Body molding. The present invention is not limited to the above description, and an appropriate setting manner can be selected according to actual needs. Referring to FIG. 4, in the present embodiment, the auxiliary supporting member 39 also supports the substrate 藉 by contacting the substrate Ε1 against the surface Ε1, wherein the surface Ε1 is placed on each substrate Ε For the first support element or each pair of second support members 33, the first support S member 32 or the support member 33 is used to contact and support the substrate (four) - the substrate surface. Only * surface and the aforementioned concept (4), which will not be repeated here. Referring to FIG. 5 (d), a substrate transfer board according to a preferred embodiment of the present invention is used as a method for taking out a card and a moving card used in a method for storing a plurality of stored substrates. The county is similar to the card 1i of the front earthboard transport system (the Leica is similar, and will not be described here. (1 card®3) and the handling device 12, as shown in FIG. 5, in accordance with a preferred embodiment of the present invention. The operation method of the substrate transmission 17 system is provided by the package system to the parent step 813. Step S11 Transportation #w, ^ Sl2 provides the _ handling cracking with at least the handling unit and the handling order is early The transport unit of the cymbal is sequentially extended from the first two to the second area; the step S13 is to take out the substrate. " The top of the storage area is placed in the order of the self-propelled rim (10) operation method +, using the bottom of the square of the loading plate to The top of the first storage area is taken out. The ir transport unit moves the substrate-upward distance first, so that each of the i-ir ir pairs of the first support member supports the front side of the material 匡, and the main 疋, the upward distance To be smaller than the first distance between two adjacent first support members to avoid handling When the unit moves the substrate upward for the purpose of taking out the substrate, the substrate will be connected to the first support member thereon, resulting in no-beta collision or damage. In the present embodiment, the operation of the substrate transfer system of the present invention is implemented. Before step S3 of the method, any one of the first supporting members is to contact the abutting surface of the substrate to support the substrate, so that the substrate can be in a stable state, wherein the abutting surface means that the substrate has not been implemented. Processing, processing, or unplanning a surface to be processed or treated that provides for carrying or handling [to avoid contact of other objects with non-substrate abutment surfaces that may result in surface-to-injury or particle adhesion, and in addition to implementing the present invention In the step S3 of the operation method of the substrate transfer system, the transport unit also takes the abutting surface of the contact substrate to take out the substrate. In addition, in the embodiment, the transport unit carries and moves by vacuum adsorption or electrostatic adsorption of the substrate. The substrate can strengthen the stability of the substrate when it is placed on the handling unit to avoid displacement, shaking, or Even if it is dropped by the handling unit, the present invention is not limited to the above description 'the mechanism for selecting an appropriate carrier substrate according to actual needs. Here, taking the substrate of the first storage area as an example, and taking out the substrate of the second storage area. The concept is similar to the above principle, and is no longer obscured. In summary, the substrate transfer system and the method of operating the same according to the present invention are to arrange adjacent first support members or first support members at a close distance. Therefore, a plurality of substrate carrying surfaces can be provided in a single cassette, thereby increasing the storage capacity of the substrate of the cassette; and, in the adjacent storage area and the storage area, a larger third distance is matched, which is suitable for The carrying unit is inserted into the carrying unit to quickly complete the substrate picking in the storage area; accordingly, the substrate transporting system can provide a random selection of the storage area, and the sub-pairs of the carrying areas in the storage area are sequentially taken. The substrate is placed on the substrate, and the internal space of the cassette caused by the use of the standard cassette is improved. The problem can also break through the existing clues. Fang Yi helps save storage space or time and reduce the liquid crystal display 1 as raw =. In addition, the substrate transfer system material needs to add a movable component to the card g structure to assist in carrying the wire pack, so as to avoid the _=movable component friction generated on the surface of the substrate, the battle απ yield. The above description is for illustrative purposes only and is not intended to limit the spirit and scope of the present invention.
應包含於後附之申請專利範圍中。,夕3邊更，均 【圖式簡單說明J 1377165 統之為本發較”施例之1基板傳輸系 圖1B係為圖1A之卡匣的示意圖； 圖1C係為目^之卡匿之另一態樣的示意圖； 圖2係為圖1A之卡匣的前視圖； 統之發明第二較佳實施例之-種基板傳輸系 統之==:=實施例"基板傳輪系 圖4係為圖3A之卡匣的前視圖；以及 圖5係為本發明較佳實施例之一種基板傳輸系統 作方法之步驟流程圖。 ’、 【主要元件符號說明】 1 :基板傳輸系統 11、3 :卡匣 in、31 :本體 鲁It should be included in the scope of the patent application attached. 3, the other side of the eve, the [simplified diagram of the description of J 1377165 is the same as the first embodiment of the substrate transmission system 1B is a schematic diagram of the card of Figure 1A; Figure 1C is the card of the 2 is a front view of the cassette of FIG. 1A; the second preferred embodiment of the invention is a substrate transfer system ==:=example "substrate transfer systemFig.4 3 is a front view of the cassette of FIG. 3A; and FIG. 5 is a flow chart of steps of a method for performing a substrate transfer system according to a preferred embodiment of the present invention. ', [Description of main components] 1 : substrate transfer system 11 , 3 : 卡匣in, 31: Ontology Lu
Hla、311 :第一壁Hla, 311: the first wall
Ulb、312 :第二壁 112' 32:第一支撐元件 U3、33 :第二支撐元件 114、 34 :第一儲存區 - 115、 35 :第二儲存區 . 12 :搬運裝置 20 1377165 121 :搬運單元 dl、d4 :第一距離 d2、d5 :第二距離 d3、d6 :第三距離 313 :第三壁 39 :辅助支撐元件 A、 E :基板Ulb, 312: second wall 112' 32: first support element U3, 33: second support element 114, 34: first storage area - 115, 35: second storage area. 12: handling device 20 1377165 121: handling Units d1, d4: first distance d2, d5: second distance d3, d6: third distance 313: third wall 39: auxiliary support elements A, E: substrate
Al、E1 :抵靠表面 A2 :表面 B、 F :第一承載面 C、 G :方向 D、 Η :第二承載面 I :支撐條板 S11〜S13 :步驟Al, E1: abutting surface A2: surface B, F: first bearing surface C, G: direction D, Η: second bearing surface I: support strip S11~S13: steps