1335638 九、發明說明： 【發明所屬之技術領域】 ‘ 本發明是有關於一種基板卡匣結構，且特別是有關於 可減少基板卡匣結構搬運過程中受到損傷之情形的基板卡 匣結構。 【先前技術】 現今各家液晶顯示器（LCD)業者，莫不以發展下一世代 面板生產線為其主要目標。目前平面顯示器所使用的基板 材料主要以玻璃基板為主，尺寸愈大之玻璃基板代表可以 為業者帶來高產能、低成本及大尺寸面板顯示器等產業效 益。但大型基板同時亦會對量產技術及設備帶來許多困 難，例如基板之儲放或搬運即係項令業者頭痛的技術瓶頸。 基板之搬運方式例如可盛裝基板於大型基板卡匣 (Cassette)内’再利用自動導引載具（AGV)和起重機於循環 路線中運輸卡匣，以搬運基板，並利用基板插入機（panel Inserter; PI)或機械手臂來取放基板。然而’在基板的搬運 過程中，為了縮短搬運時間和提高產能，運輸基板卡匣的 速度日益加快，因而容易導致基板在卡匣内發生左右偏移 的情开>，尤其係在高速起重機的搬運過程，因此造成基板 有破片的風險，或者，當基板插入機取放基板時，可能造 成刮傷基板的情形，使得整體製程良率下降。 【發明内容】 因此本發明之一方面係在於提供一種基板卡匣結構， 1335638 藉以減少基板在搬運過程中的偏、移情形，避免基板破片或 刮傷。 . 本發明之又一方面係在於提供一種基板卡匣結構，藉 以個別更換後支撐架的後支撐結構。 根據本發明之實施例，本發明之基板卡匣結構至少包 含有框體'複數個侧支撐結構及後支撐架。框體具有置入 口 ’用以供基板由置入口來進行取放。複數個侧支撐結構 係設置於框體的相對兩側’用以承載基板，其中此些側支 撐結構的至少一者設有至少一止滑部，而止滑部的摩擦係 數係實質大於此些側支撐結構的摩擦係數。後支撐架係設 置於框體的一側，並相對於置入口，用以支樓基板。 又，根據本發明之實施例，上述基板卡匣結構的後支 樓架設有複數職支㈣構，而每_此錢支錢構係允 許相對於後支撐架來進行組裝拆卸。 因此，本發明之基板卡匿結構可防止基板在搬運過程 中的偏移情形，進而減少發生基板破片或刮傷的情形，提 升基板搬運速度、產能及製程良率。另外，本發明之基板 卡臣結構的後Μ結構可允賴裝拆卸，因而方便進^個 別更換’避免不必要的人力和成本耗費。 【實施方式】 特徵、優點與實施例 系列實施例來加以說 是用以說明本發明之 為讓本發明之上述和其他目的、 能更明顯易僅，本說明書將特舉出— 明。但值得注意的是，此些實施例只 實施方式’而非用以限定本發明。 1335638 請參照第1圖和第2圖，第· 1圖係繪示依照本發明第 • 一實施例之基板卡匣結構的立·體示意圖，第2圖係繪示依 • 照本發明第一實施例之基板卡匣結構的俯視示意圖。本實 施例之基板卡匣結構100係用以承載基板2〇〇,例如為：液 晶顯示器（Liquid Crystal Display ; LCD)的玻璃基板或塑膠 . 基板。基板卡匣結構1〇〇至少包含有框體110、複數個侧支 撐結構120及後支撐架13〇 ^側支撐結構丨2〇和後支撐架 130係設置於框體Π0中，用以承載和支撐基板2〇〇。 籲 請參照第1圖至第3圖，第3圖係繪示依照本發明第 一實施例之基板卡匣結構的局部側視示意圖。本實施例之 框體110例如為矩形框體，其具有容置空間U1和置入口 112。容置空間111係用以容置基板2〇〇，藉以容置基板2〇〇 於框體110内，再進行基板搬運。置入口 112係用以供基 板200來進出容置空間in，藉以方便基板插入機（panel Inserter ; PI)或機械手臂（未繪示）可由置入口 112來取放基 板200。本實施例之此些側支撐結構12〇係以金屬材料或其 ® 他具有而支撐強度的材料所製成，例如銘或不銹鋼，其分 別設置於框體110的容置空間lu中，且位於框體11〇的 相對兩側，用以承載基板200。在本實施例中，此些側支撐 結構120例如係呈長桿狀，其週期性地排列於框體11〇的 相對兩側’藉以當複數個基板2〇〇容置於基板卡匿結構1〇〇 中時，此些側支撐結構120可支撐於每一此些基板2〇〇的 下方，以承載基板200。其中每一此些側支撐結構12〇設有 防護層121和至少一止滑部122，防護層121係形成於每一 此些側支擇結構120的表面，用以防止側支撑結構12〇到 1335638 傷基板200,防護層121的材料例如為：導電塑膠、聚醚醚 綱（PEEK)、_(PEK)、聚醯亞胺⑹、聚笨硫謎（pps)或聚 醯胺醯亞胺（PAI)。止滑部122係設置於每一此些側支撐結 構120上，並與基板200直接接觸，其中止滑部122係以 可撓性材質所製成，且其摩擦係數係實質大於每一此些側 支撑結構120的摩擦係數，因而可增加此些側支撐結構i 和基板200之間的摩擦情形，藉以減少基板2〇〇在基板卡 匣結構100中的滑動偏移情形。止滑部丨22的材料例如為： 氟素橡膠（VITON.FKM)、矽橡膠（Silicone)或氟素矽膠。在 本實施例中，止滑部122係設置於每一此些側支撐結構12〇 的末端’以減少基板200在搬運過程中的偏移情形。 請參照第3圖和第4圖，第4圖係繪示依照本發明第 一實施例之基板卡匣結構之後支撐結構的立體示意圖。本 實施例之後支撐架130係設置於框體11〇的一側，並相對 於置入口 112,用以進一步支撐基板200,並可減少基板200 的彎折（Bending)情形。後支撐架130設有複數個後支撐結 構131，其中每一此些後支撐結構131可相對於後支撐架 130來進行組裝拆卸。在本實施例中，每一後支撐結構Π1 例如係呈矩形空管結構，藉以提升結構強度。後支撐結構 131係以金屬材質或其他具有高支撐強度的材料所製成，例 如铭或不銹鋼，其橫向排列於後支撐架130上，並對應於 此些側支撐結構120 ’用以進一步支撐於基板200的下方， 以補強側支撐結構的兩側支撐，避免當承載大尺寸基板時 發生基板彎折情形。由於每一後支撐結構131可相對於後 支撐架130來進行組裝拆卸，因此當後支撐架130上的一 1335638 後支樓結構131損壞時’可僅更換損壞的後支撐結構131， 而無需更換整組後支撐架13〇、，因而可節省人力和成本。其 中此些後支撐結構131與後支撐架13〇的組裝方式例如 為：螺合或卡掣組合。另外，每一後支撐結構131亦可設 有防護層132和至少一止滑部133,藉以防止刮傷基板2〇〇 和進一步減少基板2〇〇在搬運過程中的偏移情形。 因此’當基板200容置於基板卡匣結構10〇中來進行 搬運時，可藉由側支撐結構12〇的止滑部122來防止基板 200在搬運過程中的偏移情形，因而本實施例的基板卡匣結 構1〇〇可用以進行高速搬運，而避免基板200因偏移而發 生破片或刮傷的情形，進而提升基板搬運速度、產能及製 程良率。另外，由於後支撐架13〇的後支撐結構131係可 進行組裝拆卸，因而方便進行個別更換，而可節省人力和 成本。 °月參照弟5圖，其搶示依照本發明第二實施例之基板 卡匣結構的局部侧視示意圖。以下僅就本實施例與第一實 施例之相異處進行說明’關於相似處在此不再贅述。相較 於第一實施例’第二實施例之側支撐結構12〇的止滑部 122a係形成於每一此些側支撐結構12〇的上側，並與基板 20〇直接接觸，藉以增加此些側支撐結構12〇和基板2〇〇 之間的摩擦情形，減少基板200在基板卡匣結構1〇〇中的 滑動偏移情形，避免基板200因偏移而發生破片或刮傷的 情形。 请參照第6圖，其繪示依照本發明第三實施例之基板 卡匣結構之後支撐結構的剖面示意圖。以下僅就本實施例 1335638 與第一實施例之相異處進行說明.，關於相似處在此不再贅 述。相較於第一實施例，第三·實施例之後支撐架13〇的每 一後支撐結構131b例如係呈I形結構，藉以提升結構強 度’用以進一步支撐於基板2〇〇,避免當承載基板時發生基 板彎折情形。 • 請參照第7圖和第8圖，其繪示依照本發明第四實施 • 例之基板卡匣結構的俯視示意圖。以下僅就本實施例與第 一貫施例之相異處進行說明’關於相似處在此不再贅述。 • 相較於第一實施例，第四實施例之側支撐結構120的止滑 部122c係設置於部分此些側支撐結構12〇上，而部分此些 侧支撐結構120未設有止滑部122c。舉例而言，止滑部i22c 可在每相隔一側支撐結構12〇來進行設置。或者，止滑部 122c可僅設置於框體110之一側的側支撐結構ι2〇上，藉 以增加此些側支撐結構120和基板2〇〇之間的摩擦情形， 減少基板200在基板卡匣結構100中的滑動偏移情形。 請參照第9圖，其繪示依照本發明第五實施例之基板 • 卡匣結構的正面示意圖。以下僅就本實施例與第一實施例 之相異處進行說明，關於相似處在此不再贅述。相較於第 一實施例，第五實施例之基板200可以雙排或四排等排列 方式來容置於基板卡匣結構100中。以雙排的排列方式為 例，此時，基板卡IE結構100更設有至少一分隔支撐架 140,其設置框體110的容置空間lu中，用以分隔支撐基 板200,藉以增加基板200的容置數量。分隔支撐架14^ 設有複數個支撐結構14卜其位於分隔支撐架14〇的兩側， 並對應於側支撐結構120’藉以當複數個基板2〇〇以雙排的 1335638 方式來谷置於基板卡匣結構1〇〇中時此些側支撐結構 和分隔支料14G的支揮結構⑷可錢於每—此些基板 〇的下方。值得注意的是，此時，分隔支撐架i 4〇的支撐 結構141亦可選擇設置防護層121和止滑部122，藉以防止 刮傷基板200和進一步減少基板2〇〇在搬運過程中的偏移 情形。 請參照第10圖，其繪示依照本發明第六實施例之基板 卡匣結構的局部側視示意圖。以下僅就本實施例與第一實 施例之相異處進行說明，關於相似處在此不再贅述。相較 於第一實施例，第六實施例之之侧支撐結構12〇的止滑部 122d係藉由高摩擦係數材料（其摩擦係數係實質大於侧支 撐結構120的摩擦係數）來形成於此些側支撐結構12〇之至 少一者的表面（例如部分表面或全部表面）上，並與基板2〇〇 直接接觸，藉以增加此些側支撐結構12〇和基板2〇〇之間 的摩擦情形，減少基板200在基板卡匣結構丨〇〇中的滑動 偏移情形，避免基板200因偏移而發生破片或刮傷的情形。 由上述本發明之實施例可知，本發明之基板卡匣結構 可防止基板在搬運過程中的偏移情形，避免基板因偏移而 發生破片或刮傷的情形’因而可應用於進行高速搬運過 程。因此，本發明之基板卡匣結構可提升基板搬運速度、 產能及製程良率。另外，本發明之基板卡匣結構的後支樓 結構可允許組裝拆卸，因而方便進行更換，節省人力和成 本。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 1335638 和範圍内，當可作各種之更動與潤飾，因此本發明之保護 • 範圍當視後附之申請專利範園所界定者為準。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 ， 能更明顯易懂’所附圖式之詳細說明如下·· 第1圖係繪示依照本發明之第一實施例之基板卡匣結 構的立體示意圖。 • 第2圖係繪示依照本發明之第一實施例之基板卡匣結 構的俯視示意圖。 第3圖係繪示依照本發明之第一實施例之基板卡匣結 構的局部侧視示意圖。 第4圖係繪示依照本發明之第一實施例之基板卡匣結 構之後支撐結構的立體示意圖。 第5圖係繪示依照本發明之第二實施例之基板卡匣結 構的局部側視示意圖。 φ 第6圖係繪示依照本發明之第三實施例之基板卡匣結 構之後支撐結構的剖面示意圖。 第7圖係繪示依照本發明之第四實施例之基板卡匣結 構的俯視示意圖。 第8圖係繪示依照本發明之第四實施例之基板卡匣結 構的俯視示意圖。 第9圖係繪示依照本發明之第五實施例之基板卡匣結 構的正面示意圖。 第10圖係繪示依照本發明之第六實施例之基板卡匣結 12 1335638 構的局部側視示意圖。 【主要元件符號說明】 (S ) 100 :基板卡匣結構 110 ： 框體 111 :容置空間 112 ： 置入口 120 :側支撐結構 121 ： 防護層 122、122a ' 122c、122d : 止滑部 130 :後支撐架 • 131、131b :後支撐結構 132 ： 防護層 133 :止滑部 140 ： 分隔支撐架 141 :支撐結構 200 ： 基板 131335638 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a substrate cassette structure, and more particularly to a substrate cassette structure which can reduce the damage during handling of a substrate cassette structure. [Prior Art] Today's liquid crystal display (LCD) companies do not aim to develop next-generation panel production lines. At present, the substrate materials used in flat panel displays are mainly glass substrates, and the larger the size of the glass substrates, the industry can bring high productivity, low cost and large-sized panel displays. However, large-scale substrates also bring many difficulties to mass production technology and equipment. For example, the storage or handling of substrates is a technical bottleneck that causes headaches for operators. The substrate can be transported, for example, by holding the substrate in a large substrate cassette (Cassette) and reusing the automatic guide carrier (AGV) and the crane to transport the cassette in the circulation path to carry the substrate and use the substrate inserter (panel inserter). ; PI) or mechanical arm to pick up and place the substrate. However, in the process of transporting the substrate, in order to shorten the handling time and increase the productivity, the speed of transporting the substrate is increased, which tends to cause the substrate to be displaced left and right in the cassette, especially in the high-speed crane. The handling process causes a risk of fragmentation of the substrate, or when the substrate insertion machine picks up the substrate, the substrate may be scratched, resulting in a decrease in overall process yield. SUMMARY OF THE INVENTION Therefore, an aspect of the present invention is to provide a substrate cassette structure, and 1335638 is used to reduce the deviation and displacement of the substrate during transportation, and to avoid fragmentation or scratching of the substrate. Yet another aspect of the present invention is to provide a substrate cassette structure by which the rear support structure of the rear support frame is individually replaced. According to an embodiment of the present invention, the substrate cassette structure of the present invention includes at least a plurality of side support structures and a rear support frame. The frame has an insertion opening </ </ RTI> for the substrate to be accessed by the inlet. The plurality of side support structures are disposed on opposite sides of the frame for carrying the substrate, wherein at least one of the side support structures is provided with at least one anti-slip portion, and the friction coefficient of the anti-slip portion is substantially larger than the The coefficient of friction of the side support structure. The rear support frame is disposed on one side of the frame and is opposite to the inlet for supporting the floor substrate. Further, according to an embodiment of the present invention, the rear support frame of the substrate cassette structure is provided with a plurality of posts (four) structures, and each of the money structure allows assembly and disassembly with respect to the rear support frame. Therefore, the substrate seizing structure of the present invention can prevent the substrate from being displaced during transportation, thereby reducing the occurrence of fragmentation or scratching of the substrate, and improving the substrate handling speed, productivity, and process yield. In addition, the rear sill structure of the substrate of the present invention allows the detachment of the structure, thereby facilitating replacement, and avoiding unnecessary labor and cost. The present invention has been described with reference to a series of embodiments to explain the above and other objects of the present invention. It is to be noted, however, that the embodiments are merely illustrative and are not intended to limit the invention. 1335638 Referring to FIG. 1 and FIG. 2, FIG. 1 is a schematic view showing a structure of a substrate cassette according to a first embodiment of the present invention, and FIG. 2 is a first embodiment of the present invention. A schematic top view of the substrate cassette structure of the embodiment. The substrate cassette structure 100 of the present embodiment is used to carry the substrate 2, for example, a liquid crystal display (LCD) glass substrate or a plastic substrate. The substrate cassette structure 1 includes at least a frame body 110, a plurality of side support structures 120, and a rear support frame 13, and the side support structure 丨2〇 and the rear support frame 130 are disposed in the frame Π0 for carrying Support substrate 2〇〇. Referring to Figures 1 to 3, FIG. 3 is a partial side elevational view showing the substrate cassette structure in accordance with the first embodiment of the present invention. The frame body 110 of the present embodiment is, for example, a rectangular frame body having an accommodation space U1 and a storage opening 112. The accommodating space 111 is for accommodating the substrate 2, and the accommodating substrate 2 is placed in the housing 110, and the substrate is transported. The inlet 112 is provided for the substrate 200 to enter and exit the accommodating space in, so that the substrate inserter (PI) or the robot arm (not shown) can be used to access the substrate 200 by the inlet 112. The side support structures 12 of the present embodiment are made of a metal material or a material thereof which has a supporting strength, such as an inscription or a stainless steel, which are respectively disposed in the accommodating space lu of the frame 110 and located at The opposite sides of the frame 11 用以 are used to carry the substrate 200. In this embodiment, the side support structures 120 are, for example, in the form of long rods, which are periodically arranged on opposite sides of the frame 11 ' to enable a plurality of substrates 2 to be placed in the substrate hiding structure 1 During the middle, the side support structures 120 can be supported under each of the substrates 2 to carry the substrate 200. Each of the side support structures 12 is provided with a protective layer 121 and at least one anti-slip portion 122. The protective layer 121 is formed on the surface of each of the side supporting structures 120 to prevent the side supporting structure 12 from reaching. 1335638 Injury substrate 200, the material of the protective layer 121 is, for example, conductive plastic, polyether ether (PEEK), _ (PEK), polyimine (6), polystyrene (pps) or polyamidimide ( PAI). The anti-slip portion 122 is disposed on each of the side support structures 120 and is in direct contact with the substrate 200. The anti-slip portion 122 is made of a flexible material, and the friction coefficient is substantially greater than each of the blocks. The coefficient of friction of the side support structure 120 can thereby increase the friction between the side support structures i and the substrate 200, thereby reducing the sliding displacement of the substrate 2 in the substrate cassette structure 100. The material of the anti-slip portion 22 is, for example, fluorocarbon rubber (VITON.FKM), silicone rubber (Silicone) or fluorosilicone rubber. In the present embodiment, the anti-slip portion 122 is disposed at the end of each of the side support structures 12A to reduce the offset of the substrate 200 during handling. Referring to Figures 3 and 4, Figure 4 is a perspective view showing the support structure after the substrate cassette structure according to the first embodiment of the present invention. After the embodiment, the support frame 130 is disposed on one side of the frame 11 , and opposite to the inlet 112 for further supporting the substrate 200, and the bending of the substrate 200 can be reduced. The rear support frame 130 is provided with a plurality of rear support structures 131, wherein each of the rear support structures 131 can be assembled and disassembled relative to the rear support frame 130. In the present embodiment, each of the rear support structures Π1 is, for example, a rectangular hollow tube structure, thereby enhancing the structural strength. The rear support structure 131 is made of a metal material or other material having high supporting strength, such as inscription or stainless steel, which is laterally arranged on the rear support frame 130 and corresponding to the side support structures 120' for further support. Below the substrate 200, both sides of the reinforcing side support structure are supported to avoid the occurrence of substrate bending when carrying a large-sized substrate. Since each rear support structure 131 can be assembled and disassembled relative to the rear support frame 130, when a 1335638 rear support structure 131 on the rear support frame 130 is damaged, only the damaged rear support structure 131 can be replaced without replacement. The entire rear support frame is 13 ,, thus saving manpower and cost. The assembly manner of the rear support structure 131 and the rear support frame 13 is, for example, a screwing or snapping combination. In addition, each of the rear support structures 131 may be provided with a protective layer 132 and at least one anti-slip portion 133, thereby preventing the substrate 2 from being scratched and further reducing the offset of the substrate 2 during handling. Therefore, when the substrate 200 is accommodated in the substrate cassette structure 10 for carrying, the offset of the substrate 200 during the handling can be prevented by the anti-slip portion 122 of the side support structure 12, thus the embodiment The substrate cassette structure 1 can be used for high-speed conveyance, and the substrate 200 can be prevented from being fragmented or scratched due to the offset, thereby improving the substrate transport speed, productivity, and process yield. In addition, since the rear support structure 131 of the rear support frame 13 can be assembled and disassembled, individual replacement is facilitated, and labor and cost can be saved. Referring to Figure 5, a partial side view of the substrate cassette structure in accordance with the second embodiment of the present invention is shown. In the following, only the differences between the embodiment and the first embodiment will be described. The details of the similarities will not be described herein. The anti-slip portion 122a of the side support structure 12A of the second embodiment is formed on the upper side of each of the side support structures 12A, and is in direct contact with the substrate 20A, thereby increasing the number The friction between the side support structure 12A and the substrate 2〇〇 reduces the sliding deviation of the substrate 200 in the substrate cassette structure 1,, and avoids the situation in which the substrate 200 is fragmented or scratched due to the offset. Referring to FIG. 6, a cross-sectional view of a support structure after a substrate cassette structure according to a third embodiment of the present invention is shown. Only the differences between the first embodiment 1335638 and the first embodiment will be described below. The similarities will not be described herein. Compared with the first embodiment, each of the rear support structures 131b of the support frame 13A after the third embodiment is, for example, in an I-shaped structure, thereby improving the structural strength 'for further supporting on the substrate 2〇〇, avoiding being carried. The substrate is bent when the substrate is formed. • Referring to Figures 7 and 8, there is shown a top plan view of a substrate cassette structure in accordance with a fourth embodiment of the present invention. In the following, only the differences between the present embodiment and the first embodiment will be described. The description of the similarities will not be repeated here. Compared with the first embodiment, the anti-slip portion 122c of the side support structure 120 of the fourth embodiment is disposed on a portion of the side support structures 12, and some of the side support structures 120 are not provided with the anti-slip portion. 122c. For example, the anti-slip portion i22c can be disposed on each side of the support structure 12〇. Alternatively, the anti-slip portion 122c may be disposed only on the side support structure ι2〇 on one side of the frame 110, thereby increasing the friction between the side support structures 120 and the substrate 2〇〇, and reducing the substrate 200 on the substrate. The sliding offset situation in structure 100. Referring to FIG. 9, a front view of a substrate/cassette structure according to a fifth embodiment of the present invention is shown. In the following, only the differences between the embodiment and the first embodiment will be described, and the details are not described herein again. Compared with the first embodiment, the substrate 200 of the fifth embodiment can be accommodated in the substrate cassette structure 100 in a double row or a four row arrangement. For example, the substrate card IE structure 100 is further provided with at least one partition support frame 140, which is disposed in the accommodating space lu of the frame body 110 for separating the support substrate 200, thereby increasing the substrate 200. The number of accommodations. The partition support frame 14^ is provided with a plurality of support structures 14 on both sides of the partition support frame 14A, and corresponding to the side support structure 120' so that when a plurality of substrates 2 are placed in a double row of 1335638 The side support structure and the support structure (4) separating the support 14G can be used under each of the substrate cassettes when the substrate is in the cassette structure. It should be noted that, at this time, the support structure 141 separating the support frames 1-4 may also be provided with the protective layer 121 and the anti-slip portion 122, thereby preventing the substrate 200 from being scratched and further reducing the deviation of the substrate 2 during handling. Move the situation. Referring to FIG. 10, a partial side elevational view of a substrate cassette structure in accordance with a sixth embodiment of the present invention is shown. In the following, only the differences between the embodiment and the first embodiment will be described, and the similarities will not be described herein. Compared with the first embodiment, the anti-slip portion 122d of the side support structure 12A of the sixth embodiment is formed by a high friction coefficient material whose friction coefficient is substantially larger than the friction coefficient of the side support structure 120. The surface (for example, a part of the surface or the entire surface) of at least one of the side support structures 12 is directly in contact with the substrate 2〇〇, thereby increasing the friction between the side support structures 12〇 and the substrate 2〇〇 The sliding displacement of the substrate 200 in the substrate cassette structure 减少 is reduced, and the substrate 200 is prevented from being fragmented or scratched due to the offset. According to the embodiment of the present invention, the substrate cassette structure of the present invention can prevent the substrate from being displaced during the handling process, and avoid the situation that the substrate is fragmented or scratched due to the offset, and thus can be applied to the high-speed handling process. . Therefore, the substrate cassette structure of the present invention can improve the substrate handling speed, productivity, and process yield. In addition, the rear pillar structure of the substrate cassette structure of the present invention allows assembly and disassembly, thereby facilitating replacement, saving manpower and cost. Although the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and any skilled person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Protection of the invention • The scope is subject to the definition of the patent application park attached. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; A perspective view of a substrate cassette structure of an embodiment. Fig. 2 is a top plan view showing the structure of the substrate cassette in accordance with the first embodiment of the present invention. Figure 3 is a partial side elevational view showing the structure of the substrate cassette in accordance with the first embodiment of the present invention. Fig. 4 is a perspective view showing the support structure after the substrate cassette structure according to the first embodiment of the present invention. Figure 5 is a partial side elevational view showing the structure of a substrate cassette in accordance with a second embodiment of the present invention. Fig. 6 is a schematic cross-sectional view showing the support structure after the substrate cassette structure according to the third embodiment of the present invention. Fig. 7 is a schematic plan view showing a structure of a substrate cassette according to a fourth embodiment of the present invention. Figure 8 is a top plan view showing a structure of a substrate cassette according to a fourth embodiment of the present invention. Figure 9 is a front elevational view showing the structure of a substrate cassette in accordance with a fifth embodiment of the present invention. Figure 10 is a partial side elevational view showing the structure of a substrate card 12 12 1335638 in accordance with a sixth embodiment of the present invention. [Main component symbol description] (S) 100: substrate cassette structure 110: frame 111: accommodation space 112: inlet 120: side support structure 121: protective layer 122, 122a '122c, 122d: anti-slip portion 130: Rear support frame • 131, 131b: rear support structure 132: protective layer 133: anti-slip portion 140: separation support frame 141: support structure 200: substrate 13