JP2009132422A - Tray for storing substrate and method of transporting and storing substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tray for storing a substrate and a method of transporting and storing the substrate which do not require much space for transportation and storage, with which transportation package is reduced in size and cost, which make it difficult for dust or a foreign substance to be attached to the substrate and handle a substrate having a larger or a much larger size. <P>SOLUTION: A substrate tray for placing a substrate within a peripheral frame which is rectangular in plane shape. One pair of facing frame parts includes a folding part for enabling the right and left of the frame to be fold up at the center of the frame parts, and the other pair of facing frame parts includes a plurality of wires or wire ropes for connecting the facing frame part and for placing the substrate thereon. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate storage tray for storing a large or very large glass substrate or the like used for forming a display panel such as a large or very large liquid crystal display device and a method for transporting and storing the substrate.

  A display panel of a liquid crystal display device is usually formed by enclosing a liquid crystal between a pair of glass substrates arranged to face each other. In order to manufacture such a display panel, the glass substrate is transported to a display panel manufacturing factory.

  When transporting this glass substrate to a factory, a glass substrate storage box for storing a plurality of glass substrates is usually used.

  And a glass substrate is used not only for the display panel of a liquid crystal display device but for manufacture of the display panel of various display devices, and in order to transport the glass substrate used for various display panels, a plurality of glass substrates are used. A glass substrate storage box for storing a glass substrate is used.

  Moreover, the glass substrate storage box which stores a glass substrate is used also for conveyance of the semi-finished product of the glass substrate in the state in which the electrode etc. were formed.

  Recently, a glass substrate having a thickness of 0.7 mm or less has been used for various display panels. Furthermore, the glass substrate carried in to the display panel manufacturing factory is increasing in size, and a rectangular glass substrate having a side of 1.3 m or more is also carried into the factory.

  Since such a large and thin glass substrate is easily bent, when a plurality of glass substrates are stored in the glass substrate storage box, each glass substrate is bent during transportation and the adjacent glass substrates come into contact with each other. There is a risk of damage.

  For this reason, it is necessary to arrange | position the glass substrate accommodated in a glass substrate storage box with a suitable space | interval so that it may not contact mutually by bending.

  For example, if a glass substrate with a thickness of 0.7 mm and a side length of 1.3 m or more is supported with a side edge of 20 to 30 mm in width, the deflection at the center of the glass substrate will be 90 mm or more. There is a risk.

  For this reason, it is necessary to hold | maintain glass substrates at intervals of at least 100 mm in a glass substrate storage box.

  Moreover, when taking out a glass substrate from a glass substrate storage box, the glass substrate adsorption | suction hand which has a pair of flat suction pad is normally used. When using such a glass substrate suction hand, it is necessary to insert each suction pad between adjacent glass substrates, and a space for that purpose is also required.

  In addition, each of the flat suction pads has a thickness of about 20 mm. Therefore, there is an interval between adjacent glass substrates so that they do not contact each other even if the glass substrates are bent. It is necessary to leave an interval of about 20 mm for the suction pad to be inserted.

  As described above, the plurality of glass substrates stored in the glass substrate storage box need to have appropriate intervals. For this reason, the number of glass substrates that can be stored in a glass substrate storage box of a predetermined size is reduced.

  As a result, there is a problem that space efficiency, which is the number of glass substrates with respect to the space occupied by the glass substrate storage box, is reduced during transportation and storage.

  On the other hand, space efficiency can be improved to some extent by enlarging the glass substrate storage box and increasing the number of glass substrates that can be stored.

  However, a glass substrate having a side length of 1.3 m or more is as heavy as about 5 kg, and when the number of glass substrates stored in the glass substrate storage box is 20 or more, the worker 1 Some people may not be able to carry it.

  In order to solve such a problem, a substrate tray cassette for storing one glass substrate is disclosed. (For example, refer to Patent Document 1).

  The substrate tray cassette is configured in a lattice shape and has an intricate engagement structure that can be stacked in the vertical direction. In such a substrate tray cassette, a thin and large glass substrate is accommodated without bending.

  For this reason, it is possible to prevent the glass substrate from being damaged during transportation, and it is possible to improve the space efficiency by transporting and storing a large number in the vertical direction.

  Moreover, in a limited space, a display substrate storage tray and a display substrate take-out mechanism that efficiently transport and store a large number of display substrates without mutual contact between the display substrates, and for display A method for taking out the substrate is also known (for example, see Patent Document 2).

  In the display substrate storage tray, the display substrate take-out mechanism, and the display substrate take-out method, the glass substrate is placed horizontally on the bottom. And the glass substrate will be in the state surrounded by the frame part provided in the peripheral part of the bottom part so that it might protrude upwards from the upper surface of a bottom part.

  The bottom is provided with a plurality of openings into which support pins for lifting the placed glass substrate are inserted. The frame portion is provided with a positioning portion for positioning another display substrate storage tray stacked on the upper side.

  Furthermore, there is also known a cassette for storing a large glass substrate whose surface has been processed and used for transportation, and which does not reduce the effective area of the glass substrate and does not reduce the number of sheets that can be stored. (For example, refer to Patent Document 3).

  This large glass substrate tray-type cassette is a tray-type cassette consisting of a rectangular bottom, left side edge, right side edge, front notch, and rear notch. A groove is provided.

  And the pressing protrusion part is provided in the bottom lower surface, and the hanging hook part is provided in the outer surface side of the left side edge part and the right side edge part. Furthermore, an engaging part is provided in the upper part, and a side edge part is not provided in the front notch part and the rear notch part.

  There is also known a substrate tray cassette that can cope with an increase in size or size of a substrate (see, for example, Patent Document 3).

  This substrate tray cassette is a grid-like tray-shaped cassette having a basic structure consisting of a peripheral frame forming a rectangular skeleton and a crosspiece spanned between the peripheral frames. The main frame is constituted by the left peripheral frame, the right peripheral frame, and the rear peripheral frame among the peripheral frames. Moreover, a sub-frame is comprised with the front peripheral frame of a surrounding frame, and a crosspiece.

  The main frame is provided with an overhang member that protrudes from the inner side surface of the main frame or the bottom surface of the main frame at a position lower than the upper surface. Resin pins for supporting the substrate from below are projected on the overhanging member and the subframe attached to the main frame.

  Furthermore, the main frame is formed in an intricate engagement structure that allows stacking of trays. A bottom plate can also be provided at the bottom of the grid-like tray.

Prior art documents are shown below.
Japanese Patent Laid-Open No. 10-287382 JP 2004-59116 A JP 2004-75175 A Japanese Patent Laid-Open No. 10-287382

  However, for example, in the substrate tray cassette of Patent Document 1, the glass substrate housed inside is supported by resin pins, and the glass substrate suction hand is placed in the space below the glass substrate supported by the support pins. Each suction pad is configured to be inserted. Thus, there is a problem in that the entire substrate tray cassette is enlarged by providing a space in which the suction pad is inserted below the glass substrate.

  Further, since the substrate tray cassette is formed in a lattice shape, there is a problem in its rigidity, and the number of substrate tray cassettes stacked in the vertical direction may be limited.

  In addition, the substrate trays of Patent Document 1 and other patent documents are horizontal trays, and there is a problem that a large space is required for transportation and storage.

  In addition, the horizontal tray requires a large passage width and passage height even if it is inclined during transportation. In addition, there is a problem that it is difficult to pass through the underpass conveyor. In addition, there is a problem that restrictions on the transport route are increased.

  Moreover, when transporting a large substrate by a horizontal tray, it is necessary to transport by a special vehicle (for example, a trailer). And there is a problem that the cost increases.

  Further, since foamed polyethylene or the like is used for the substrate receiving member, there is a problem that the surface is rough and difficult to clean. Moreover, dust etc. are easy to accumulate. In addition, there is a problem that dust and foreign matters adhere to the substrate.

  The present invention has been made in view of the above-described conventional problems, and the problem is that a large space is not required for online transportation and storage, and the transportation package is reduced in size and cost. It is another object of the present invention to provide a substrate storage tray and a substrate transport and storage method that can be reduced, and that dust and foreign matters are less likely to adhere to the substrate, and that can accommodate a large or very large substrate.

In order to solve the above problems, the invention according to claim 1 of the present invention provides:
A tray for mounting a substrate in a frame of a peripheral frame made of a rectangular frame in a planar shape, and one opposing frame is a bent portion where the left and right sides of the frame can be bent upward at the center position of the frame,
The other opposing frame connects the opposing frames, and a plurality of wires or wire ropes on which the substrate is placed,
A tray for storing substrates, comprising:

Next, the invention according to claim 2 of the present invention is as follows.
2. The substrate storage tray according to claim 1, wherein outer surfaces of the plurality of wires or wire ropes are coated with plastic or rubber.

Next, the invention according to claim 2 of the present invention is as follows.
A substrate is placed on the substrate storage tray according to claim 1, and one opposing frame is bent upward, and the placed substrate is bent and transported and stored. A substrate transport and storage method characterized by the above.

  Since the substrate storage tray and the substrate transport and storage method of the present invention have the above-described configuration, offline transport and storage can be performed in a small space.

  Further, the substrate storage tray of the present invention can reduce the substrate transport package. And cost, such as transportation, can be reduced.

  Furthermore, the substrate storage tray of the present invention does not use a substrate receiving member such as foamed polyethylene. For this reason, garbage does not accumulate. Furthermore, since the receiving part of the substrate is in line contact, the adhesion of dust and foreign matter to the substrate can be minimized.

  The substrate storage tray of the present invention does not use a substrate receiving member such as foamed polyethylene. Since there are few cleaning parts, work can be done efficiently.

  Further, the substrate storage tray of the present invention is not limited by the transfer route such as the elevated transfer conveyor.

  Moreover, by using a wire or a wire rope, dust etc. are hard to collect and cleaning is also easy.

  When the tray is not used, space can be saved by removing the wire or wire rope and folding it in half.

A substrate storage tray and a substrate transport and storage method according to the present invention will be described below in detail according to embodiments with reference to the drawings.

  FIG. 1 is a perspective view showing an outline of an embodiment of a substrate storage tray of the present invention.

  As shown in FIG. 1, the substrate storage tray (10) according to the present invention has a peripheral frame formed of a rectangular frame. The peripheral frame is formed of one opposing frame (1) and the other opposing frame (2).

  The one opposing frame (1) is provided with a bent portion (7) at the center position of the frame where the left and right sides of the frame (1) can be bent upward.

  Moreover, the wire or wire rope (3) which connects the flame | frame (2) which opposes by the wire attachment part (20) is constructed by the other opposing frame (2).

  The wire attachment part (20) of the wire or wire rope (3) has a wire attachment adjustment screw (5) to which the tip of the wire or wire rope (3) is fixed as shown in FIG. It is worn.

  Then, in order to stop the screwed wire attachment adjusting screw (5) at a predetermined position, a nut (23) is provided via a flat washer (21) and a spring washer (22) in the outer direction of the frame (2). (24) is provided in the double (double nut). Then, the tension of the wire or wire rope (3) is adjusted by the nuts (23) and (24).

  For example, when the tension of the wire or the wire rope (3) is strongly tensioned, the outer nut (24) is loosened (turned in the direction opposite to the clock hand). Next, the inner nut (23) is tightened (turned in the direction in which the clock hand rotates). Then, when the wire or wire rope (3) becomes a predetermined tension, the inner nut (23) is not moved, and the outer nut (24) is tightened (turned in the direction in which the hands of the watch turn).

  Although not shown in the drawing, the wire or wire rope (3) can be stretched by providing a compression spring or the like on the outside of the wire attachment adjusting screw (5) between the flat washer (21) and the inner nut (23). It can always be kept constant. And when providing a compression spring etc., it replaces with a spring washer (22) and a flat washer (21) is used.

  The wire attachment portion (20) is a wire or wire rope (3) when the left and right sides of the frame (1) are bent upward at the center position of one opposing frame (1) of the substrate storage tray (10). Will bend. For this reason, a resin wire guide (4) is embedded in the frame (2) so that the wire or the wire rope (3) is not damaged.

  Examples of the resin wire guide (4) include, for example, polyesters such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polybutylene terephthalate (PBT), and polyolefins such as polypropylene (PP) and polystyrene (PS). Polyamide (PA) such as nylon-6, nylon-66, polycarbonate (PC), polyacrylonitrile (PAN), polyimide (PI), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), polyvinyl alcohol (PVA) In addition, a molded product or a cut product of a resin such as ethylene-vinyl alcohol copolymer (EVOH), polyether sulfone (PES), or polymethyl methacrylate (PMMA) can be used.

The number of wires or wire ropes (3) installed on the other opposing frame (2) is placed on the size of the substrate storage tray (10) or on the substrate storage tray (10). Depending on the substrate (6) and the like, the number to be installed as appropriate and the thickness (wire diameter) of the wire or wire rope (3) are selected.

  Moreover, the wire of a wire or a wire rope (3) uses the well-known metal wire of a circular cross section, for example, iron, copper, stainless steel, etc. which were pulled to the drawing die. Further, in the case of a heavy substrate in which a wire rope must be used, a well-known wire rope such as ordinary or rung can be used in the same manner as the wire.

  The outer surface of the wire or wire rope (3) is covered with plastic or rubber (8), (9), etc. as shown in FIGS. 4 (a), 4 (b) or 5 (a), 5 (b). ing. As the plastic resin (8) and (9) to be coated, thermoplastic resins such as low density polyethylene, medium density polyethylene, high density polyethylene, linear low density polyethylene, polypropylene, ethylene-vinyl acetate copolymer, Ionomer resin, ethylene-acrylic acid copolymer, ethylene-ethyl acrylate copolymer, ethylene-methacrylic acid copolymer, ethylene-methyl methacrylate copolymer, ethylene-propylene copolymer, methylpentene polymer, polybutene polymer , Polyolefin resins such as polyethylene or polypropylene modified with unsaturated carboxylic acids such as acrylic acid, methacrylic acid, maleic acid, maleic anhydride, fumaric acid, itaconic acid, polyvinyl acetate resins, poly ( Meta) Acu Le resin, known resins such as polyvinyl-based resin is used. In addition, carbon may be kneaded into these resins to give electrical conductivity to prevent static electricity. Examples of the rubber include synthetic rubbers such as nitrile rubber, styrene rubber, high styrene rubber, acrylo rubber, isobutylene rubber, chloroprene rubber, polysulfide rubber, silicon rubber, polyester rubber, polyether rubber, and polyethylene rubber. However, it is not particularly limited to synthetic rubber, and may be natural rubber.

  The wire is not particularly limited to a known metal wire, and is made of a resin by a substrate (6) or the like placed on the wire, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), poly Polyester such as butylene terephthalate (PBT), polyolefin such as polypropylene (PP) and polystyrene (PS), polyamide (PA) such as nylon-6 and nylon-66, polycarbonate (PC), polyacrylonitrile (PAN), polyimide (PI) ), Polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), polyvinyl alcohol (PVA), ethylene-vinyl alcohol copolymer (EVOH), polyether sulfone (PES), polymethyl methacrylate (PMMA), polyester Terusuketon (PEEK) and the like can also be used a resin wire.

  Moreover, the cross-sectional shape which coat | covers the outer surface of a wire or a wire rope (3) with resin etc. does not need to be circular as shown to Fig.4 (a) (b). For example, the cross-sectional shape as shown in FIGS. 5A and 5B may be triangular.

  The material of one opposing frame (1) and the other opposing frame (2) forming the peripheral frame of the substrate storage tray (10) is, for example, a general structural rolled steel, structural carbon steel, forging It may be a metal, a cast material, a malleable cast or a metal such as aluminum, aluminum alloy, nickel steel, nickel chrome steel, nickel alloy, or a plastic resin, and is not particularly limited.

Examples of the plastic resin include polyesters such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polybutylene terephthalate (PBT), polyolefins such as polypropylene (PP) and polystyrene (PS), nylon-6, and nylon-66. Such as polyamide (PA), polycarbonate (PC), polyacrylonitrile (PAN), polyimide (PI), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), polyvinyl alcohol (PVA), ethylene-vinyl alcohol copolymer (EVOH), polyether sulfone (PES), polymethyl methacrylate (PMMA) and the like.

  Next, FIG. 2 is a perspective view showing an outline of an embodiment in which the substrate storage tray of the present invention is bent upward.

  In the substrate storage tray (10) of the present invention, the substrate (6) is placed on a wire or wire rope (3) installed on the substrate storage tray (10). Then, when transporting or storing, the left and right sides of the frame (1) are bent upward at the bent portion (7) provided at the center position of one opposing frame (1).

  When the left and right sides of one opposing frame (1) are folded upward and the angle inside the folded frame (1) reaches 90 °, the base material (6) is placed in a normal state. However, the space is reduced by about 30%.

  FIG. 6 is a schematic view showing the schematic front of another embodiment of the substrate storage tray of the present invention.

  As shown in FIG. 6, the substrate storage tray (30) of the present invention is a wire or wire rope (3) installed on the substrate storage tray (30) in the same manner as the substrate storage tray (10) shown in FIG. A substrate (6) is placed thereon.

  And the board | substrate storage tray (30) in which the pantograph mechanism is formed is lifted, and the left and right ends of the frame (1) from the bent portion (7) provided at the center position of one opposing frame (1). Is lifted upward.

  In addition, the substrate storage tray (30) is provided with pinned pins (31) at both left and right ends of one opposing frame (1). One end of each of the right arm (32) and the left arm (33) is engaged with the pin (31) with a hook in a rotatable state.

  The other ends of the right arm (32) and the left arm (33) engaged with the pin (31) with the hook can be rotated by the arm bearing shaft (34) provided on the lifting plate (35). It is moored in the state. The left and right ends of one opposing frame (1) and the right arm (32) and the left arm (33) engaged with the lifting plate (35) form a pantograph mechanism that forms a substantially parallelogram. It is possible to easily lift the left and right ends of the opposing frame (1) upward.

  When the angle C inside the frame (1) when the left and right ends of one opposing frame (1) are lifted upward is 90 °, the horizontal length is reduced by about 30%. For this reason, the space for carrying or storing is reduced.

  In this case, the angle restriction may be performed at either the root of the right arm (32), the left arm (33), or the bent portion (7).

The material of the right arm (32) and the left arm (33) is, for example, a general rolled steel material, a structural carbon steel material, a forged material, a cast material, a malleable casting or aluminum, an aluminum alloy, nickel steel, nickel chrome steel. , Metals such as nickel alloys, carbon fiber reinforced plastics (
CFRP), a laminate of metal and CFRP, a plastic resin, or the like may be used, and is not particularly limited.

  Examples of the plastic resin include polyesters such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polybutylene terephthalate (PBT), polyolefins such as polypropylene (PP) and polystyrene (PS), nylon-6, nylon- Polyamide (PA) such as 66, polycarbonate (PC), polyacrylonitrile (PAN), polyimide (PI), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), polyvinyl alcohol (PVA), ethylene-vinyl alcohol copolymer Examples include coalescence (EVOH), polyether sulfone (PES), polymethyl methacrylate (PMMA), and the like.

  Next, FIG. 7 is a perspective view showing an outline of one embodiment for conveying the substrate storage tray of the present invention.

  As shown in FIG. 7, the substrate (6) placed on the wire or wire rope (3) of the substrate storage tray (10) is bent and transferred to a predetermined place or the like by the transfer carriage (40). The

  The transport carriage (40) is formed of a base (42), a frame (41), a support (43), an arm (40) and a double arm (40). A plurality of wheels (46) are provided on the bottom surface of the base (42).

  When the substrate storage tray (10) of the substrate (6) placed on the wire or the wire rope (3) is transported by the transport carriage (40), one side of the substrate storage tray (10) is opposed. The left and right ends of the frame (1) to be supported are supported by the arm (44) and the double arm (45) that are attached to the column (43) in a rotatable state.

  The substrate storage tray (10) supported by the arm (44) and the double arm (45) is different in the length of the arm (44) and the double arm (45) supported as shown in FIG. Therefore, the left side of one opposing frame (1) of the substrate storage tray (10) can be transported in a shape close to the horizontal state and the right side close to the vertical state. When transporting, the transport carriage (40) is transported in a state where one passage width is wide and the other passage width is narrow.

  Naturally, by making the lengths of the arm (44) and the double arm (45) the same, the heights in the left and right tip directions of the one opposing frame (1) of the substrate storage tray (10) can be set to the transport carriage ( 40) It is formed in the same state as above.

  And when conveying with a conveyance trolley | bogie (40), the passage width of a conveyance trolley | bogie (40) may be the same width on either side. Further, by making the lengths of the arm (44) and the double arm (45) the same, it is possible to rotate the support (43) around the shaft.

  Next, FIG. 8 is a perspective view showing an outline of an embodiment for storing the substrate storage tray of the present invention.

  As shown in FIG. 8, the substrate (6) is placed on the wire or wire rope (3) installed on the substrate storage tray (10) of the present invention, and the central position of one opposing frame (1) The frame (1) is loaded in a predetermined storage case in a state in which the left and right sides of the frame (1) are bent upward by the bent portion (7) provided in the frame.

  The size of the storage case (50) is such that the substrate storage tray (10) has an outer peripheral dimension in which the left and right sides of one opposing frame (1) are folded upward as described above. Then, the substrate storage tray (10) is loaded and stored in the storage case (50) without being in contact with the substrates mounted on the wire or wire rope (3) and stored.

  In addition to the storage case (50), although not shown in the drawing, the substrate storage tray (10) can be stacked on a tray having a flat tray with a V-shaped cross section formed on the flat tray. .

  Further, although loading is not shown in the figure, for example, as shown in FIG. 8, the leg of the storage case (50) is raised, and the frame (41) of the transport carriage (40) as shown in FIG. Provide for up and down movement. Then, the frame (41) is raised, the base (42) is inserted into the bottom (50) of the storage case (50), and the frame (41) is lowered at a predetermined position for loading.

  The substrate storage tray (10) is loaded at a predetermined position in the storage case (50), and at the same time, the substrate storage tray (10) is supported and the support of the arm (40) and the double arm (40) is released. Then, since the substrate storage tray (10) is folded and stored in the storage case (50), the storage space is reduced by about 30% as described above.

It is a perspective view which shows the outline of one Example of the tray for a board | substrate storage of this invention. It is a perspective view showing the outline of one example of the state where the tray for substrate storage of the present invention was bent up. It is the schematic which shows the outline of the wire attachment part of the tray for board | substrate storage of this invention. (A), (b) is the cross-sectional schematic which shows the cross section of one Example of the wire or wire rope used for the board | substrate storage tray of this invention, (a) is the cross-sectional schematic of a wire, (b ) Is a schematic cross-sectional view of a wire rope. (A), (b) is a schematic cross-sectional view showing a cross-section of another embodiment of the wire or wire rope used in the substrate storage tray of the present invention, (a) is a schematic cross-sectional view of the wire, (B) is the cross-sectional schematic of a wire rope. It is the schematic for demonstrating the outline of the conventional line light guide. It is the schematic which shows the outline of other one Example of the board | substrate storage tray of this invention. It is a perspective view which shows the outline of one Example in which the tray for board | substrate storage of this invention is conveyed. It is a perspective view which shows the outline of one Example in which the tray for board | substrate storage of this invention is stored.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... One frame 2 ... The other frame 3 ... Wire or wire rope 4 ... Wire guide 5 ... Wire attachment adjustment screw 6 ... Board | substrate 7 ... Bending part 8 ... Coating resin 9 ... Coating resin 10 ... Substrate accommodation tray 20 ... Wire Mounting part 21 ... Flat washer 22 ... Spring washer 23 ... Nut 24 ... Nut 30 ... Substrate for storing board 31 ... Pin with pin 32 ... Right arm 33 ... Left arm 34 ... Arm receiving shaft 35 ... Lifting plate 40 ... Conveying carriage 41 ... Frame 42 ... Base 43 ... Post 44 ... Arm 45 ... Double arm 46 ... Wheel 50 ... Storage case 51 ... Leg 52 ... Bottom

Claims (3)

A tray for mounting a substrate in a frame of a peripheral frame made of a rectangular frame in a planar shape, and one opposing frame is a bent portion where the left and right sides of the frame can be bent upward at the center position of the frame,
The other opposing frame connects the opposing frames, and a plurality of wires or wire ropes on which the substrate is placed,
A substrate storage tray comprising:   2. The substrate storage tray according to claim 1, wherein outer surfaces of the plurality of wires or wire ropes are covered with plastic or rubber.   A substrate is placed on the substrate storage tray according to claim 1, and one opposing frame is bent upward, and the placed substrate is bent and transported and stored. A substrate transport and storage method characterized by the above.

Images