TWI733141B - Fork type substrate transportation device and method - Google Patents

Abstract

The present invention provides a fork type substrate transportation device and a method thereof, which are mainly composed of a lifting mechanism and a fork set, wherein the lifting mechanism is composed of a lifting rail set and embedded in one of the surfaces of the lifting mechanism and set at The lifting mechanism is composed of a lifting driver at one end of the lifting mechanism. The fork set is composed of a bracket provided with a first fork frame and a second fork frame, and the middle section of the bracket is provided with a fork connection connecting the lifting mechanism At the connection between the bracket, the first fork frame and the second fork frame, there is a fork drive that can pivot the fork frame. When the substrate at the lower layer is transported to the upper layer by the fork assembly After the mechanism, the fork set can be pivoted downward to make the fork set parallel to the lifting mechanism, and then move back down to the lower conveying mechanism.

Description

Fork type substrate transportation device and method

The present invention relates to a fork-type substrate transport device and a method thereof, in particular to a steerable transport device, which can reduce a large amount of displacement time when transferring a substrate, and at the same time, can reduce the time for the transport device to cyclically move.

Generally speaking, a common substrate transportation device usually uses a conveyor line to transfer the substrate to a conveying structure composed of many conveying rollers, and then a robotic arm arranged near the conveying structure moves the substrate to a designated position, or a robotic arm After the substrate is intercepted, the substrate is transported to another group of transmission structure. Although the robot arm can move the substrate horizontally or up and down, it needs to be moved step by step, and the size of the substrate is also different when moving the substrate. Restrictions limit the size of the substrate during transfer, and it takes too much unnecessary time when the robot arm moves, which in turn affects the efficiency of substrate transfer.

Therefore, how to provide a method that can shorten the transportation time and solve the problem that the substrate cannot be effectively transported to the positioning in a short time during the transportation process, and at the same time, the substrate can be transported to the positioning without size limitation. It is still a technology and solution that needs to be overcome. Subject.

The main purpose of the present invention is to solve the problem that the conventional implementation can not effectively reduce the time of substrate transportation, and the transportation of the substrate size is limited.

The secondary objective of the present invention is to provide a fork-type substrate transport device and method thereof. With the arrangement of a lifting mechanism and a fork set or a double fork set, a large amount of displacement time can be reduced when the substrate is transferred. , At the same time, it can also reduce the cycle time of the device.

In order to achieve the above objective, the present invention provides a fork-type substrate transport device, which is composed of a lifting mechanism and a fork set, wherein the lifting mechanism is composed of a lifting rail and a lifting driver, wherein the lifting rail, Is arranged on one side of the lifting mechanism and embedded in the lifting mechanism in a vertical direction from top to bottom; the lifting driver is arranged at one end of the lifting mechanism and provides a power to drive the fork assembly Move; The fork set includes a bracket, a fork connection part facing the lifting mechanism is provided at the middle section of the bracket; a first fork frame is arranged at one end of the bracket and faces toward One side of the fork connection part is arranged; a second fork frame is arranged at the other end of the bracket, and is also arranged toward the side that does not face the fork connection part, and is simultaneously arranged with the first fork frame Corresponding to each other; a fork drive is respectively arranged at the pivotal joints of the bracket and the first fork frame and the second fork frame, and at the same time provides the first fork frame and the second fork frame to change directions One side of the fork connecting part is set in the middle section of the bracket, and the other side is embedded in the lifting rail and moved by the lifting driver.

In an embodiment of the present invention, the lifting rail is internally provided with belts, chains, gears, slide rails, spiral or screw elements or other transmission components that can be driven by the lifting driver to move the fork connection.

In an embodiment of the present invention, the first fork frame and the second fork frame are arranged in parallel with the bracket.

In an embodiment of the present invention, the first fork frame is formed by a plurality of forks arranged side by side.

In an embodiment of the present invention, the second fork frame is formed by a plurality of forks arranged side by side.

In an embodiment of the present invention, the fork driver is capable of simultaneously pivoting the first fork frame and the second fork frame up and down, and causes the first fork frame and the second fork frame to pivot up and down at the same time. The frame is parallel or perpendicular to the lifting mechanism.

Furthermore, in order to achieve the above-mentioned object, the present invention also provides a fork type substrate transportation device, which is composed of a lifting mechanism and a fork set, wherein the lifting mechanism is composed of a lifting rail and a lifting rail. It consists of a lowering drive, wherein the lifting rail is arranged on one of the sides of the lifting mechanism and embedded in the lifting mechanism in a vertical direction from top to bottom; the lifting drive is arranged at one end of the lifting mechanism and provides A power is used to drive the movement of the fork set; the fork set includes a bracket, and a fork connecting portion facing the lifting mechanism is provided at the middle section of the bracket, and is not facing one of the lifting mechanisms A bracket rail embedded in the bracket is provided on the side, and a bracket driver is provided at one end of the bracket; a third fork bracket is connected to one end of a first rotating shaft and is arranged at the middle section of the bracket. The middle of one end; a fourth fork frame, which is connected with one end of a second rotating shaft, and is arranged between the middle section of the frame and the other end, and is arranged parallel to the third fork frame at the same time; The other end of the first rotating shaft and the second rotating shaft, which is not engaged with the third and fourth tines, is embedded in the bracket track, and provides a rotation power to make the second The three tine fork frame and the fourth tine fork frame can rotate 90 degrees; the frame driver is used to drive the first rotating shaft and the second rotating shaft to move in the frame track, and provide a rotation power to make the first The rotating shaft and the second rotating shaft rotate; one side of the fork connecting part is set at the middle section of the bracket, and the other side is embedded in the lifting rail, and can be used in the lifting rail by the lifting Driven by the drive to move.

In an embodiment of the present invention, the third fork frame is formed by arranging a plurality of forks side by side.

In an embodiment of the present invention, the fourth fork frame is formed by a plurality of forks arranged side by side.

In an embodiment of the present invention, the third fork frame and the fourth fork frame are rotated by 90 degrees, and the third fork frame and the fourth fork frame can be simultaneously rotated by the bracket driver. The frame moves to both ends of the frame.

In order to achieve the above objective, the present invention provides a fork type substrate transportation method, which is suitable for the fork type substrate transportation device as described above, which at least includes the following steps: Step 1—the substrate is transported to the lower conveyor mechanism by the lower conveyor belt Just positioning, a fork set is located under the lower conveying mechanism on standby; Step 2: The fork set is raised from the bottom to the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate; Step 3: After the fork set carries the substrate and rises to the top, it is level with the upper conveying mechanism Positioning; step four, the upper conveying mechanism is displaced below the substrate and positioned in a staggered manner with the fork frame; step five, after the upper conveying mechanism carries the substrate, the substrate is displaced in a horizontal direction to open the substrate; step six the fork The group is pivoted downward by a fork drive to be parallel to the lifting mechanism, and then moves down to the bottom; in step 7, the fork group is lowered to the bottom, and then pivoted upward by the fork drive, So that the fork set is perpendicular to the lifting mechanism; Step 8 enters the standby state, and the substrate is positioned after being transported from the lower conveyor belt to the lower conveyor mechanism, and steps 1 to 7 are repeated.

In one embodiment of the present invention, a fork-type substrate transportation method is provided, which is suitable for the fork-type substrate transportation device as described above, and at least includes the following steps: Step A: The substrate is transported to by a lower conveyor belt The lower conveying mechanism is positioned, and a fork set is located below the lower conveying mechanism; step B, the fork set is raised from the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate; step C: After the fork set carries the substrate and rises to the top, it is positioned horizontally with the upper conveying mechanism; step D: the upper conveying mechanism is displaced below the substrate, and is positioned in a staggered manner with the fork frame; Step E: The fork set is lowered by the lifting mechanism, while the rotating shaft provides rotation power, so that the fork set can rotate by 90 degrees, and the rotating shaft moves to the two ends of the bracket when the fork set rotates; step F After rotating, the fork set descends to the bottom, and the rotating shaft provides rotation power to make the fork set rotate 90 degrees, so that the fork set is perpendicular to the lifting mechanism and presents a standby state; step G enters the standby state, and the substrate is positioned after being transported by the lower conveyor belt to the lower conveyor mechanism, and steps A to F are repeated.

In order to achieve the above object, the present invention provides a fork type substrate transportation device, which is composed of a lifting mechanism and a double fork group, wherein the lifting mechanism is composed of a lifting rail group and a lifting drive, wherein The lifting rail is set on one side of the lifting mechanism, embedded in the lifting mechanism in the vertical direction from top to bottom, and extending from the top of the lifting rail to both sides and downwards, and then connected to the lifting channel The bottom of the tine fork to form a loop; the lifting driver is arranged at one end of the lifting mechanism to provide power to drive the double fork set to lift; the double fork set is composed of two sets of fork sets. Wherein, each of the fork sets further includes: a bracket, which is formed by assembling a first bracket and a second bracket, and a lifting mechanism facing the first bracket and the second bracket is provided at the junction of the first bracket and the second bracket The fork connection part; a first fork frame, which is arranged in the middle section of the first bracket, and a plurality of fork forks are provided on the side that does not face the fork connection part; a second fork frame, is It is arranged in the middle section of the second bracket, and is also provided with a plurality of forks toward the side that does not face the fork connecting portion, and at the same time, they correspond to each other side by side with the first fork frame; a fork rotating shaft is arranged At the pivotal joints of the bracket, the first fork frame and the second fork frame, the rotation force when the first fork frame and the second fork frame change directions is provided at the same time; the fork connection part, It is composed of a first connecting portion and a second connecting portion, wherein the first connecting portion is engaged with one end of the first bracket facing the second bracket, and the second connecting portion is facing the second bracket. One end of the first bracket is engaged, and the fork connecting portion facing one side of the lifting mechanism is embedded in the lifting rail, and can be moved in the lifting rail by the lifting driver, and is lifted to After the top of the lifting rail, the fork connecting part will be divided into the first connecting part and the second connecting part and move to both sides and descend to the lifting rail At the bottom, the first connecting portion and the second connecting portion are assembled to form the fork connecting portion; wherein, the double fork set is respectively arranged at the top and bottom of the lifting mechanism, and is driven by the lifting driver to move , So that the double prong group circulates and exchanges positions.

In an embodiment of the present invention, the lifting rail is internally provided with belts, chains, gears, sliding rails, spiral or screw elements or other transmission components that can drive the fork connection part to move by the lifting driver.

In an embodiment of the present invention, the first fork frame and the second fork frame are arranged in parallel with the bracket.

In an embodiment of the present invention, the first fork frame is formed by a plurality of forks arranged side by side.

In an embodiment of the present invention, the second fork frame is formed by a plurality of forks arranged side by side.

In an embodiment of the present invention, the fork rotating shaft is capable of rotating the first fork frame and the second fork frame by 90 degrees at the same time, and the first fork frame is simultaneously rotated by the fork drive And the second fork frame moves to the two ends of the bracket.

A fork type substrate transportation method. The present invention also provides a fork type substrate transportation method, which is suitable for the fork type substrate transportation device as described above, and at least includes the following steps: Step 1-The substrate is transported by a lower conveyor belt When it reaches the lower conveying mechanism, it is positioned. A pair of fork sets are respectively located below the lower conveying mechanism and under the upper conveying mechanism. Step 2 The fork set located below the lower conveying mechanism is raised from the bottom by a lifting mechanism. And cross-positioned with the lower conveying mechanism to carry the substrate, and at the same time the fork set located below the upper conveying mechanism moves to both sides and rotates at the same time by 90 degrees to make the fork set parallel to the lifting mechanism; step 3 is located at the The fork set of the lower conveying mechanism carries the substrate and rises to the top, and is positioned horizontally with the upper conveying mechanism. At the same time, the fork sets located on both sides of the lifting mechanism and close to the top are respectively Lower the lifting rails on both sides to the bottom, and then rotate 90 degrees to return to the vertical to the lifting mechanism, so that the fork set of the lower layer is located under the lower conveying mechanism and waits for the substrate to be transported by the lower conveying belt to the The lower conveying mechanism is positioned; step 4, the upper conveying mechanism is displaced below the substrate, and is positioned in a staggered manner with the fork frame; step 5 the fork set located under the upper conveying mechanism is moved to both sides and rotated 90 at the same time At the same time, the fork set located below the lower conveying mechanism is raised from the bottom by a lifting mechanism, and positioned across the lower conveying mechanism to carry the substrate; step 6 is located on both sides of the lifting mechanism and close to the top The fork sets were lowered to the bottom from the lifting rails on both sides, and then rotated 90 degrees to be perpendicular to the lifting mechanism, so that the lower fork set was located under the lower conveying mechanism on standby and at the same time on the lower conveying mechanism. The fork set carries the substrate and rises to the top, and is positioned horizontally with the upper conveying mechanism; step 7 repeat step 1 to step 6.

(10, 50): Lifting mechanism

(110, 510): Lifting track

(120, 520): Lifting drive

(20, 600): Fork set

(210, 610): bracket

(211): bracket rail

(611): first bracket

(612):Second bracket

(212, 670): bracket drive

(220, 620): Fork connection

(621): first connection part

(622): second connecting part

(230, 630): the first fork frame

(240, 640): the second fork frame

(250, 650): Fork drive

(260):The third fork

(261): first rotation axis

(270):Fourth fork frame

(271): second rotation axis

(30): Conveying mechanism

(31): Conveyor belt

(40): Substrate

(60): Double fork set

(660): Fork Rotation Axis

(S710)~(S780): Step 1 to Step 8

(S810)~(S870): Step A to Step G

(S1010)~(S1070): Step 1 to Step 7

Figure 1: A schematic diagram of the fork-type substrate transport device of the present invention.

Figure 2: The pivoting schematic diagram of the fork type substrate transport device of the present invention.

Figure 3: A schematic diagram of another fork of the fork type substrate transport device of the present invention.

Figure 4: A top view of another fork of the fork type substrate transport device of the present invention.

Figure 5: A schematic diagram of another fork rotation of the fork type substrate transport device of the present invention.

Figure 6: A schematic diagram of another fork movement of the fork type substrate transport device of the present invention.

Figure 7: A flowchart of an embodiment of the fork-type substrate transportation method of the present invention.

Figure 8: A schematic diagram of another fork process of the fork type substrate transport device and method of the present invention.

Figure 9: A schematic diagram of the double fork of the fork type substrate transport device and method of the present invention.

Fig. 10: The double fork flow chart of the fork type substrate transportation device and method of the present invention.

Figure 11: A schematic top view of the fork-type substrate transport device and method of the present invention.

Figures 12A to 12D: schematic diagrams of embodiments of the fork-type substrate transport device and method of the present invention.

In order to help your examiners understand the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail with the accompanying drawings and in the form of embodiment expressions. The drawings used therein are as follows: The subject matter is only for the purpose of illustration and auxiliary description, and may not be the true proportions and precise configuration after the implementation of the invention. Therefore, it should not be interpreted in terms of the proportions and configuration relationships of the accompanying drawings, and should not limit the scope of rights of the invention in actual implementation. Hexian stated.

First of all, please refer to Figures 1 and 2, which are schematic diagrams and pivotal schematic diagrams of the fork-type substrate transport device of the present invention, which is mainly composed of a lifting mechanism (10) and a fork group (20). For the composition, please refer to Figure 1. The fork-type substrate transport device can be implemented separately according to requirements, or two (two groups) fork-type (as shown) substrate transport devices are arranged corresponding to each other, wherein the lifting mechanism ( 10), is composed of a lifting rail (110) and a lifting driver (120), wherein the lifting rail (110) is arranged on one of the sides of the lifting mechanism (10), and in a vertical direction from top to bottom Embedded in the lifting mechanism (10); the lifting driver (120) is arranged at one end of the lifting mechanism (10), such as the top or bottom, but not limited to this, and is mainly used to provide a power to drive the The movement of the fork set (20); the fork set (20) includes a bracket (210), and a fork connecting portion (220) facing the lifting mechanism (10) is provided at the middle section of the bracket (210) ); A first fork frame (230), which is attached to one end of the bracket (210), and is set toward the side that does not face the fork connecting portion (220); a second fork frame (240) , Is arranged at the other end of the bracket (210), and is also arranged toward a side that does not face the fork connecting portion (220), and at the same time corresponds to the first fork frame (230); a fork drive (250) are respectively arranged at the pivot joints of the bracket (210) and the first fork frame (230) and the second fork frame (240), and at the same time provide the first fork frame (230) and The second fork frame (240) becomes The power to pivot when changing directions, the fork drive (250) can make the first fork frame (230) and the second fork frame (240) and the lifting mechanism (10) parallel by pivoting (Please also refer to Figure 2) or vertical; one side of the fork connecting portion (220) is set at the middle section of the bracket (210), and the other side is embedded in the lifting rail (110) Inside, and moved by the lifting drive (120), where the lifting rail (110) is equipped with belts, chains, gears, slide rails, spiral or screw elements or other elements that can be lifted by the lifting drive (110). (120) A transmission assembly that drives the fork connecting part (220) to move. The first fork frame (230) and the second fork frame (240) are arranged in parallel with the bracket (210), and at the same time, the The first fork frame (230) and the second fork frame (240) are both formed by a plurality of forks arranged side by side, and different numbers of forks can be arranged according to the size of the substrate.

In addition, please refer to FIGS. 3 to 6, which are another schematic diagram, top view, rotation schematic diagram, and movement schematic diagram of the fork-type substrate transport device of the present invention. For the fork set (20), please refer to As shown in Figure 3, the bracket (210) can be further included, and a fork connecting portion (250) facing the lifting mechanism (10) is provided at the middle section of the bracket (210), and is not facing the lifting mechanism (10) One side is provided with a bracket rail (211) embedded in the bracket (210), and one end of the bracket (210) is provided with a bracket driver (212); a third fork bracket (260), It is connected with one end of a first rotating shaft (261), and is arranged between the middle section and one end of the bracket (210); a fourth fork frame (270) is connected with a second rotating shaft (271) ) Is joined with one end, and is arranged between the middle section of the bracket (210) and the other end, and at the same time is arranged parallel to the third fork frame (260); the first rotation shaft (261) and the second The rotating shaft (271), the other end of which is not engaged with the third fork frame (260) and the fourth fork frame (270) is embedded in the bracket rail (211), and provides a rotation power to make The third fork frame (260) and the fourth fork frame (270) can rotate by 90 degrees; the frame driver (212) is used to provide a rotation power to enable the first rotating shaft (261) and the first rotating shaft (261) to rotate by 90 degrees. The two rotating shafts (271) rotate and drive the first rotating shaft (261) and the second rotating shaft (271) to move in the bracket rail (211); one side of the fork connecting portion (220) is set At the middle section of the bracket (210), the other side is embedded in the lifting rail (110), and can be moved in the lifting rail (110) driven by the lifting driver (120). Wherein, the third fork frame (260) and the fourth fork frame (261) are formed by a plurality of forks arranged side by side, and the third fork frame (260) and the fourth fork frame Frame (261), tied to rotation At 90 degrees, the third fork frame (260) and the fourth fork frame (270) can be moved to the two ends of the frame (210) by the frame driver (212) at the same time.

Please refer to Figure 7, the flow chart of the fork-type substrate transportation method of the present invention is a fork-type substrate transportation method, which includes: step one (S710): the substrate is transported to the lower conveying mechanism by the lower conveyor belt For positioning, a fork set is located below the lower conveying mechanism and stands by; step 2 (S720) the fork set is raised from the bottom to the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate; step 3 ( S730) After the fork set carries the substrate and rises to the top, it is positioned horizontally with the upper conveying mechanism; step 4 (S740) the upper conveying mechanism is displaced below the substrate and positioned in a staggered manner with the fork rack; step 5. (S750) After the upper conveying mechanism carries the substrate, the substrate is displaced in a horizontal direction to open the substrate; step 6 (S760) the fork set is pivoted downward by a fork drive to be parallel to the lifting mechanism, Move down to the bottom; Step 7 (S770) After the fork set is lowered to the bottom, the fork drive is then pivoted upward to make the fork set perpendicular to the lifting mechanism; Step 8 (S780) In the standby state, the substrate is positioned after being transported by the lower conveyor belt to the lower conveyor mechanism, and step one (S710) to step seven (S770) are repeated.

In addition, please refer to Figure 8 again, which is a schematic diagram of another fork process of the fork type substrate transportation method of the present invention, wherein the transportation method may alternatively be: Step A (S810) A substrate is transported by a lower conveyor belt Position the lower conveying mechanism, and a fork set is located under the lower conveying mechanism on standby; Step B (S820) The fork set is raised from the bottom to the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate; Step C (S830) After the fork set carries the substrate and rises to the top , Is positioned horizontally with the upper conveying mechanism; step D (S840) the upper conveying mechanism is displaced below the substrate and positioned in a staggered manner with the fork frame; step E (S850) the fork set is lowered by the lifting mechanism, At the same time, the rotating shaft provides rotation power, so that the fork set can rotate 90 degrees, and the rotating shaft moves to the two ends of the bracket when the fork set rotates; step F (S860) the fork set descends to the At the bottom, the rotating shaft provides rotational power to enable the fork set to rotate 90 degrees, so that the fork set is perpendicular to the lifting mechanism and presents a standby state; step G (S870) enters the standby state, and waits for the The substrate is transported by the lower conveyor belt to the lower conveyor mechanism and then positioned, and steps A (S810) to F (S860) are repeated.

Furthermore, please refer to Fig. 9, which is a schematic diagram of the double fork of the fork-type substrate transport device and method of the present invention. In an embodiment of the present invention, the fork-type substrate transport device consists of a lifting mechanism ( 50), a pair of fork sets (60), wherein the lifting mechanism (50) is composed of a lifting rail (510) and a lifting driver (520), wherein the lifting rail (510) is set at One side of the lifting mechanism (50) is embedded in the lifting mechanism (50) in the vertical direction from top to bottom, and extends from the top of the lifting rail (510) to both sides and downwards, and then connects to the The bottom of the lifting channel (510) to form a loop; the lifting driver (520) is arranged at one end of the lifting mechanism (50), such as the top or the bottom, but not limited to this, mainly to provide The power to drive the double fork set (60) up and down; the double fork set (60) is composed of two sets of fork sets (600), each of the fork sets (600) includes: a bracket (610), is composed of a first bracket (611) and a second bracket (612) assembled, and at the junction of the first bracket (611) and the second bracket (612) is provided with a lift facing the The fork connecting part (620) of the mechanism (50); a first fork frame (630) is attached to the The middle section of the first bracket (611) is provided with a plurality of forks toward the side that does not face the fork connecting portion (620); a second fork frame (640) is arranged on the second bracket (612) ) In the middle section, and is also provided with a plurality of forks toward the side that does not face the fork connecting portion (620), and at the same time, they correspond to each other side by side with the first fork frame (630); a fork rotating shaft (660) ), is set at the pivotal joints of the bracket (610), the first fork frame (630) and the second fork frame (640), and at the same time, the first tooth is provided by a fork drive (650) The rotation force when the fork frame (630) and the second fork frame (640) change directions, so that the first fork frame (630) and the second fork frame (640) can rotate 90 degrees at the same time. The first fork frame (630) and the second fork frame (640) are moved to the two ends of the frame (610) by the bracket driver (670); the fork connection part (620) is connected by A first connecting portion (621) and a second connecting portion (622) are combined, wherein the first connecting portion (621) is connected to an end of the first bracket (611) facing the second bracket (612) , The second connecting portion (622) is connected to an end of the second bracket (612) facing the first bracket (611), and the fork connecting portion (620) facing the side of the lifting mechanism (50) is embedded In the lifting rail (510), and in the lifting rail (510) driven by the lifting driver (520) to move, and after lifting to the top of the lifting rail (510), the fork is connected The part (620) will be divided into the first connecting part (621) and the second connecting part (622) and move to both sides and descend to the bottom of the lifting rail (510), the first connecting part (621) and the second connecting part (622) The second connecting portion (622) is then assembled to form the fork connecting portion (620); wherein the double fork set (60) is respectively arranged at the top and bottom of the lifting mechanism (50), and is driven by the lifting driver (520) is driven and moved, so that the two sets of fork sets (600) cyclically exchange positions.

Wherein, the lifting rail (510) is internally provided with belts, chains, gears, sliding rails, screw or screw elements or other transmission components which can be driven by the lifting driver to move the fork connection part. The first fork frame (630) and the second fork frame (640) are arranged in parallel with the bracket (610), and each is formed by a plurality of forks arranged side by side.

Please refer to Fig. 10, which is a double fork flow chart of the fork type substrate transportation device and method of the present invention, which at least includes the following steps: Step 1 (S1010) A substrate is transported by the lower conveyor belt to the lower conveying mechanism and then positioned, the two fork sets of a double fork set are located under the lower conveying mechanism and under the upper conveying mechanism on standby; Step 2 (S1020) The fork set located under the lower conveying mechanism is raised from the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate. At the same time, the other fork set located under the upper conveying mechanism is directed towards Move on both sides and rotate 90 degrees at the same time to make the fork set parallel to the lifting mechanism; Step 3 (S1030) The fork set in the lower conveying mechanism carries the substrate and rises to the top, and is positioned horizontally with the upper conveying mechanism , At the same time, the other fork set located on both sides of the lifting mechanism and close to the top descends from the lifting rails on both sides to the bottom, and then rotates 90 degrees to return to the vertical to the lifting mechanism, so that the lower fork set It is located below the lower conveying mechanism, and is positioned after the substrate is transported from the lower conveying belt to the lower conveying mechanism; step 4 (S1040) the upper conveying mechanism is displaced below the substrate and positioned in a staggered manner with the fork rack Step 5 (S1050) The fork set located under the upper conveying mechanism moves to both sides and rotates 90 degrees at the same time, while the other set of forks located below the lower conveying mechanism rises from the bottom by a lifting mechanism Rise, and cross-position with the lower conveying mechanism to carry the substrate; step 6 (S1060) the fork sets located on both sides of the lifting mechanism and near the top are lowered to the bottom from the lifting rails on both sides, and then rotated 90 degrees to return To be perpendicular to the lifting mechanism, the lower tine set is located below the lower conveying mechanism, and at the same time, another tine set of the lower conveying mechanism carries the substrate and rises to the top, level with the upper conveying mechanism Positioning; Step 7 (S1070) Repeat step 1 (S1010) to step 6 (S1060).

Please refer to FIG. 11, a schematic top view of the fork type substrate transport device and method of the present invention. As can be seen from the figure, the fork set (20) and the conveying mechanism (30, 32) of the present invention are arranged in a staggered positioning manner. It is arranged to prevent the fork set (20) and the conveying mechanism (30, 32) from colliding with each other when the lifting mechanism (10) rises.

Furthermore, please refer to Figures 12A to 12D, which are schematic diagrams of embodiments of the fork type substrate transport device and method of the present invention. When the substrate (40) is transported to the lower conveyor mechanism ( 30) When it is positioned, the fork set (20) is located under the lower conveying mechanism (30), and the fork set (20) is raised from the bottom by a lifting mechanism (10) (please refer to Figure 12A) , And alternately positioned with the lower conveying mechanism (30) to carry the substrate (40), the fork set (20) carrying the substrate (40) rises upwards, at this time the lower conveying mechanism (30) is separated from the substrate (40) ) (Please refer to Figure 12B). When the fork set (20) is raised to the top, it is positioned horizontally with the upper conveying mechanism (32), and the upper conveying mechanism (32) is displaced into the bottom of the substrate (40) and interacts with it. The fork racks are positioned in a staggered manner. The fork set (20) is pivoted downward by a fork drive (250) to be parallel to the lifting mechanism (10), and then moves down to the bottom (see page 12C), after the upper conveying mechanism (32) carries the substrate (40), the substrate (40) is moved horizontally to open the substrate (40) (please refer to Figure 12D), and the fork set (20) is lowered to the bottom Then, the fork drive (250) is pivoted upward so that the fork set (20) is perpendicular to the lifting mechanism (10) to complete a transportation process.

Therefore, in summary, the fork-type substrate transport device can be executed separately according to requirements, or two sets of fork-type substrate transport devices are arranged corresponding to each other, that is, the fork-type substrate transport device can perform substrates separately For transportation, whether the above-mentioned lifting mechanism is combined with a single fork set to transport the substrate, or the above-mentioned lifting mechanism is combined with the double fork set to transport the substrate, or the substrate is transported in a corresponding arrangement, the Either the lifting mechanism is matched with a single fork set to transport the substrate, or the lifting mechanism mentioned above is matched with the double fork set to transport the substrate, both can be configured according to requirements.

As can be seen from the above implementation description, compared with the prior art and products, the present invention has the following advantages:

1. The fork type substrate transportation device and method of the present invention can change the direction of fork forks and the number of forks according to requirements.

2. The fork type substrate transportation device and method of the present invention can move the fork group to make the substrate move up and down quickly and accurately.

3. The fork type substrate transport device and method of the present invention can be operated simultaneously by double forks, Improve the transmission efficiency and shorten the cycle time of the fork.

Specifically, the present invention utilizes the changeable direction and number of fork forks, and can be freely matched according to requirements. At the same time, it has a track that can move up and down, so that the substrate can be transported with high efficiency and can effectively shorten the transport time. The effect of.

In summary, the fork-type substrate transport device and method of the present invention can indeed achieve the expected use effect through the embodiments disclosed above, and the present invention has not been disclosed before the application, and it has been fully compliant with The provisions and requirements of the Patent Law. If you file an application for a patent for invention in accordance with the law, you are kindly requested to review it and grant a quasi-patent, it will be more virtuous.

However, the above-mentioned illustrations and descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Anyone familiar with the art will do other things based on the characteristic scope of the present invention. Equivalent changes or modifications should be regarded as not departing from the design scope of the present invention.

(10): Lifting mechanism

(110): Lifting track

(120): Lifting drive

(20): Fork set

(210): Bracket

(220): Fork connection

(230): The first fork frame

(240):Second fork frame

(250): Fork drive

Claims (14)

A fork type substrate transportation device is composed of a lifting mechanism (10) and at least one fork set (20), wherein: the lifting mechanism (10) is composed of a lifting rail (110) and a lifting driver ( 120), wherein: the lifting rail (110) is embedded in one surface of the lifting mechanism (10) in a vertical direction from top to bottom; the lifting driver (120) is arranged on the lifting mechanism (10) One end is used to provide power to drive the fork set (20) to lift; the fork set (20) includes: a bracket (210) attached to the middle section of the bracket (210) with a lifting mechanism facing the (10) The fork connecting portion (220); a first fork frame (230) is attached to one end of the bracket (210) and is set toward the side that does not face the fork connecting portion (220) ; A second fork frame (240) is set at the other end of the bracket (210), and is also set toward the side that does not face the fork connecting portion (220), and at the same time with the first fork frame (230) Corresponding to each other; a fork drive (250) is arranged at the pivotal joints of the bracket (210) and the first fork frame (230) and the second fork frame (240), and provides the The power when the first fork frame (230) and the second fork frame (240) change directions; one side of the fork connecting portion (220) is set at the middle section of the bracket (210), and the other One side is embedded in the lifting rail (110), and can be moved in the lifting rail (110) driven by the lifting driver (120). For example, the fork type substrate transportation device described in the scope of the patent application, wherein the lifting rail (110) is equipped with belts, chains, gears, sliding rails, spiral or screw elements or other elements that can be lifted by the lifting rail (110). The drive (120) drives the transmission assembly of the fork connecting part (220) to move. In the fork-type substrate transport device described in item 1 of the scope of patent application, the first fork frame (230) and the second fork frame (240) are arranged in parallel with the bracket (210). The fork type substrate transport device described in the first item of the scope of patent application, wherein the first fork frame (230) is formed by a plurality of forks arranged side by side. The fork type substrate transport device described in the first item of the scope of patent application, wherein the second fork frame (240) is formed by a plurality of forks arranged side by side. The fork-type substrate transport device described in the first item of the scope of patent application, wherein the fork driver (250) enables the first fork frame (230) and the second fork frame (240) to go up and down at the same time Pivot so that the first fork frame (230) and the second fork frame (240) are parallel or perpendicular to the lifting mechanism (10). A fork type substrate transportation method is suitable for the fork type substrate transportation device as described in any one of items 1 to 6 of the scope of the patent application, which at least includes the following steps: step one (S710): substrate borrowing It is positioned after being transported by the lower conveyor belt to the lower conveying mechanism. A fork set is located below the lower conveying mechanism and stands by; Step 2 (S720) The fork set is raised from the bottom by a lifting mechanism and crosses the lower conveying mechanism. Positioning to carry the substrate; step three (S730) the fork set carrying the substrate is raised to the top, and is positioned horizontally with the upper conveying mechanism; step four (S740) the upper conveying mechanism is displaced into the bottom of the substrate, and is in contact with the The first fork frame and the second fork frame are positioned in a staggered manner; step 5 (S750), after the upper conveying mechanism carries the substrate, moves the substrate in a horizontal direction; step 6 (S760) the fork assembly borrows A fork drive is pivoted downwards to be parallel to the lifting mechanism and then moves downwards to the bottom; Step 7 (S770) After the fork set is lowered to the bottom, the fork drive is then pivoted upward so that the fork set is perpendicular to the lifting mechanism; Step 8 (S780) enters the standby state and waits for the base plate After being transported by the lower conveyor belt to the lower conveyor mechanism, the positioning is performed, and step one (S710) to step seven (S770) are repeated. A fork type substrate transportation device is composed of a lifting mechanism (50) and a double fork set (60), wherein: the lifting mechanism (50) is composed of a lifting rail (510) and a lifting driver ( 520), wherein: the lifting rail (510) is arranged on one side of the lifting mechanism (50), and is embedded in the lifting mechanism (50) in the vertical direction from top to bottom, and is formed by the lifting rail ( The top of 510) extends to both sides and downwards, and then connects to the bottom of the lifting rail (510) to form a loop; the lifting driver (520) is arranged at one end of the lifting mechanism (50), and In order to provide the power to drive the double fork set (60) up and down; the double fork set (60) is composed of two sets of fork sets (600), and each of the fork sets (600) includes: A bracket (610) is formed by assembling a first bracket (611) and a second bracket (612), and at the junction of the first bracket (611) and the second bracket (612), there is a facing The fork connecting portion (620) of the lifting mechanism (50); a first fork frame (630) is arranged in the middle section of the first bracket (611) and facing the fork connecting portion (620) A plurality of forks are provided on one side; a second fork frame (640) is arranged in the middle section of the second bracket (612), and is also arranged toward one side that does not face the fork connecting portion (620) There are a plurality of forks, and they correspond to each other side by side with the first fork frame (630) at the same time; A fork rotating shaft (660) is arranged at the pivotal connection between the bracket (610) and the first fork frame (630) and the second fork frame (640), and at the same time provides the first fork frame (630) Rotational force when changing direction with the second fork frame (640); the fork connection part (620) is composed of a first connection part (621) and a second connection part (622) The first connecting portion (621) is engaged with one end of the first bracket (611) facing the second bracket (612), and the second connecting portion (622) is facing the second bracket (612). One end of the first bracket (611) is connected, and the fork connecting portion (620) facing the side of the lifting mechanism (50) is embedded in the lifting rail (510), and can be mounted on the lifting rail (510) The inside is moved by the lifting driver (520), and after being lifted to the top of the lifting rail (510), the fork connecting portion (620) will be divided into the first connecting portion (621) and the second connecting portion (621) The part (622) moves to both sides and descends to the bottom of the lifting rail (510). The first connecting part (621) and the second connecting part (622) are then assembled to form the fork connecting part (620) ; Among them, the two sets of fork sets (600) are respectively arranged at the top and bottom of the lifting mechanism (50), and are driven by the lifting drive (520) to move, so that the two sets of fork sets (600) Cycle and swap positions. For example, the fork-type substrate transportation device described in item 8 of the scope of patent application, wherein the lifting rail (510) is equipped with belts, chains, gears, sliding rails, spiral or screw elements or other elements that can be lifted by (520) A transmission assembly that drives the fork connection part (620) to move. In the fork-type substrate transport device described in item 8 of the scope of patent application, the first fork frame (630) and the second fork frame (640) are arranged in parallel with the bracket (610). The fork-type substrate transport device described in item 8 of the scope of patent application, wherein the first fork frame (630) is formed by a plurality of forks arranged side by side. The fork-type substrate transport device described in item 8 of the scope of patent application, wherein the second fork frame (640) is formed by a plurality of forks arranged side by side. For the fork-type substrate transport device described in item 8 of the scope of patent application, the fork rotating shaft (660) is capable of making the first fork frame (630) and the fork frame (630) and the fork frame (630) through a fork drive (650). Second fork The frame (640) rotates 90 degrees at the same time, and at the same time, the first fork frame (630) and the second fork frame (640) are moved to the two ends of the frame (610) by the frame driver (670). A fork type substrate transportation method is suitable for the fork type substrate transportation device as described in any one of the 8th to 13th items of the scope of patent application, which at least includes the following steps: Step 1 (S1010): substrate borrowing It is positioned after being transported by the lower conveyor belt to the lower conveying mechanism. The two fork sets of a double fork set are located under the lower conveying mechanism and under the upper conveying mechanism. Step 2 (S1020) is located under the lower conveying mechanism. The fork set is raised from the bottom to the bottom by a lifting mechanism, and is positioned across the lower conveying mechanism to carry the substrate. At the same time, the other fork set located under the upper conveying mechanism moves to both sides and rotates 90 degrees at the same time. , Make the fork set parallel to the lifting mechanism; step 3 (S1030) the fork set located in the lower conveying mechanism lifts the substrate up to the top, and is positioned horizontally with the upper conveying mechanism, and is located on both sides of the lifting mechanism at the same time And the other fork set close to the top descends from the lifting rails on both sides to the bottom, and then rotates 90 degrees to return to be perpendicular to the lifting mechanism, so that the lower fork set is located under the lower conveying mechanism on standby, After the substrate is transported by the lower conveyor belt to the lower conveying mechanism, it is positioned; step 4 (S1040) the upper conveying mechanism is displaced below the substrate, and is combined with the first fork rack and the second fork of the fork set. The fork racks are positioned in a staggered manner; step 5 (S1050) the fork set located under the upper conveying mechanism moves to both sides and rotates at the same time by 90 degrees, while the other fork set located under the lower conveying mechanism uses a The lifting mechanism rises from the bottom to the bottom and is positioned across the lower conveying mechanism to carry the substrate; step 6 (S1060) the fork sets located on both sides of the lifting mechanism and close to the top are lowered from the lifting rails on both sides to the bottom, And then rotate 00 degrees to return to be perpendicular to the lifting mechanism, so that the lower teeth The fork group is located under the lower conveying mechanism, and at the same time, the other fork group of the lower conveying mechanism carries the substrate and rises to the top, and is positioned horizontally with the upper conveying mechanism; step 7 (S1070) repeats step 1 (S1010) Go to step 6 (S1060).

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