TWM604967U - Substrate transportation device - Google Patents

Abstract

The present invention discloses an inclined platform for dissipating wet process chemicals on the substrate or the surface of the substrate by an inclination angle and a substrate transfer device prepared therefrom. The present invention provides a substrate transfer device. The substrate transfer device is It includes at least a base and a tilting platform. The main feature is that the tilting platform is set on the base, and an angle is sandwiched between the tilting platform and the base; thereby, the present invention uses The design of the inclined platform on the base can effectively make the liquid remaining on the surface of the wet process slide down along the inclination angle while the substrate is being transferred, so that the substrate will not be caused to the surface due to the residual liquid during the transfer Hazard, it does achieve the advantages of protecting the quality of the transmission substrate.

Description

Substrate transfer device

The present invention relates to an inclined platform and a substrate transfer device, in particular to an inclined platform that uses a platform with an inclined angle to allow the liquid of the wet process on the surface of the substrate to be transferred to dissipate, and the inclined platform prepared by the inclined platform Substrate transfer device.

A common substrate transfer device usually uses a conveyor line to transfer the substrate to a conveying structure composed of a plurality of conveying rollers, and then move the substrate to a designated position by a robotic arm set near the conveying structure, or by After the robotic arm intercepts the substrate, it transfers the substrate to another set of transmission structures. Although the robotic arm can move the substrate horizontally or up and down, it needs to move step by step because of the robot arm. There are also restrictions, which limit the size of the substrate during transfer, and it takes too much unnecessary time when the robot arm moves, which in turn affects the efficiency of substrate transfer; in addition, there are still many etching solutions after the wet process. If the residue remains on the substrate surface, in severe cases, the substrate surface will be over-etched. Therefore, how to solve the disadvantage of the damage caused by the chemical residue on the substrate surface through innovative design is still the development of related industries such as substrate transfer devices. The industry and related researchers need to continue their efforts to overcome and solve the problems.

The reason is that, in view of this, the creator, assisted by his rich professional knowledge and years of practical experience, has improved and created a substrate transfer device, the purpose of which is to provide a platform with a tilt angle to enable the transfer The inclined platform on which the chemical liquid of the wet process on the substrate surface can dissipate and the substrate transfer device prepared by the inclined platform are mainly designed by setting an inclined platform with an inclined angle on the base of the substrate transfer device, which is effective in The substrate is transported while leaving the surface wet The chemical liquid in the process can slide down along the inclined angle, so that the substrate will not be harmful to the surface due to the residue of the chemical liquid during the transfer process, and it does achieve the main advantages of maintaining and improving the quality of the transferred substrate. By.

The second purpose of the present invention is to provide an inclined platform. With the design of the conveying rollers and guide rollers on the inclined platform, the substrate can not be slipped and damaged when it is inclined, so that it can effectively carry the substrate and carry out the transfer operation. Advantage.

Another object of the present invention is to provide another substrate transfer device, which is designed through the first lifting mechanism, traverse mechanism and rotating shaft, whereby the upper and lower substrates can be transferred stably, effectively enabling the first and second The fork assembly rotates horizontally from the tilt and fine-tunes to the relative position and then rises synchronously, which can improve the advantages of large-area substrate transmission.

Another object of the present invention is to provide a substrate transfer device, which is designed through the arrangement of movable rollers, fixed rollers, parallel rails and vertical rails. The movable rollers located in the rails can reduce the amount of substrates during transfer. At the same time, it can also reduce the cycle time of the transportation device. At the same time, the different speeds of the movable roller can effectively turn the movable roller from tilt to horizontal and stabilize the transfer of the upper and lower substrates.

In order to achieve the purpose of the previous disclosure of the present invention, the author proposes a tilting platform, which is suitable for a substrate transfer device. The substrate transfer device includes at least a base. The main feature is that the tilting platform is set on the base and is tilted. An included angle is clamped between the platform and the base.

In an embodiment of this creation, the included angle is between 3 degrees and 10 degrees.

In an embodiment of this creation, the base is composed of two long sides and two short sides.

In an embodiment of the present creation, the inclined platform further includes a plurality of conveying rollers, and each of the conveying rollers is arranged in a configuration of forming the included angle at different heights along the two long sides of the base and arranged in parallel.

In an embodiment of this creation, each of the conveying rollers is provided with a plurality of guide rollers.

In an embodiment of the present invention, the inclined platform transmits at least one substrate through a rotation speed.

In addition, according to the purpose of this creation, the creator proposes a substrate transfer device, which includes at least one inclined platform as described above; at least one first lifting mechanism is arranged on the base and located on one side of the inclined platform Part, the first lifting mechanism includes at least two first lifting rails, and a first lifting driver disposed at one end of the first lifting rail; and at least one traversing mechanism, the traversing mechanism being disposed on the The first lifting mechanism is arranged at 90 degrees in the first lifting rail, and the lateral movement mechanism includes at least one lateral movement track and a lateral movement driver arranged at one end of the lateral movement track; at least one The second lifting mechanism is arranged in the traverse rail of the traverse mechanism and arranged at 90 degrees therewith, and the second lifting mechanism is arranged in parallel with the first lifting mechanism, wherein the first The second lifting mechanism includes at least one second lifting track, and a second lifting driver arranged at one end of the second lifting track; a first fork assembly is arranged on the second lifting mechanism, the first The fork assembly includes a first rotating shaft embedded in the second lifting track of the second lifting mechanism; a second fork assembly is disposed on the traverse mechanism, and the second fork assembly includes a ridge Into the second rotating shaft of the traverse track.

In an embodiment of the present creation, wherein the first lifting rail, the traverse rail and the second lifting rail can be further provided with belts, chains, gears, slide rails, spiral or screw elements in each of the transmission components, It is a transmission component that can be driven by a lifting driver to move the fork component.

In an embodiment of the present creation, the first fork assembly further includes a first fork frame arranged at one end of the first shaft, and a plurality of first fork frames arranged perpendicular to the first fork frame , And a plurality of the first forks are arranged side by side.

In an embodiment of the present invention, the second fork assembly further includes a second fork frame arranged at one end of the second rotating shaft, and a plurality of second fork frames arranged perpendicularly to the second fork frame , And a plurality of the second forks are arranged side by side.

In an embodiment of the present invention, the inclined platform transmits at least one substrate through a rotation speed.

In an embodiment of the present invention, the first fork assembly and the second fork assembly abut the base plate.

In an embodiment of the present invention, an upper conveying mechanism further receives the substrate against the first fork assembly and the second fork assembly.

In an embodiment of the present invention, two guide rails are further provided on both sides of the traverse mechanism, and each of the guide rails is further provided with a guide rail track, which enables the traverse mechanism to enter and move up and down. .

In an embodiment of the present invention, a second lifting mechanism is provided at the other end of the first rotating shaft of the first fork assembly.

In an embodiment of the present invention, a second lifting mechanism is provided at the other end of the second rotating shaft of the second fork assembly.

In addition, according to the purpose of this creation, the author proposes a substrate transfer method suitable for a substrate transfer device as described above, which at least includes the following steps: Step a: First, the first fork assembly and the second fork The assembly is on standby in a ready position and is parallel to an inclined platform; step b: continue, when a substrate is transferred to the inclined platform through the lower layer conveying mechanism and positioned, then the first fork assembly and the second fork assembly The components are lifted up and staggered with the inclined platform before continuing to rise; Step c: Wait until the first fork assembly and the second fork assembly are completely away from the inclined platform; Step d: The first fork assembly and the inclined platform The second fork assembly rotates from tilt to level, and at the same time, one fork assembly rises or falls to the relative position of the other fork assembly through fine adjustment; Step e: Wait until the first fork assembly and the second fork assembly are parallel Then, after the first fork assembly and the second fork assembly are transferred upward, when the substrate is transferred away, the first fork assembly and the second fork assembly rotate to be vertical at the same time, and separate to both sides After lowering, the first fork assembly and the second fork assembly are lowered to the preparation position; and step f:, In the standby state, the substrate is positioned after being transferred to the inclined platform by the lower conveying mechanism, and step a to step e are repeated.

In an embodiment of the present invention, the step d further includes that the first fork assembly is finely lowered to the relative position of the second fork assembly through the second lifting mechanism.

In an embodiment of the present invention, the step d further includes that the second fork assembly is raised to the relative position of the first fork assembly through the second lifting mechanism.

Furthermore, according to the purpose of this creation, the creator also proposes a substrate transfer device, which at least includes an inclined platform as described above; wherein the second and the short sides of the base are respectively provided with a first supporting wall and a second Two supporting walls, the first supporting wall and the second supporting wall are connected by at least one rail, the rail includes two parallel rails and a plurality of vertical rails, and the bottom of the base is provided with a driver; the inclined platform The conveying roller system is a plurality of fixed rollers, and the plurality of fixed roller systems are connected obliquely between the first support wall and the second support wall, and are respectively parallel to the two sides of each of the vertical rails and close to the bottom Track, in which the fixed rollers are inclined and arranged parallel to each other to form the inclined platform; and a plurality of movable rollers are parallel to each other and arranged between the first support wall and the second support wall, and the movable rollers The two side parts are respectively embedded in the track of the first support wall and the second support wall, and the movable rollers can be moved in the track at the same time.

In an embodiment of the present invention, the track system is provided with belts, chains, gears, slide rails, spiral or screw elements, or other transmission components that can be driven by a driver to move the track.

In an embodiment of the present creation, the driver provides a power to make the plurality of movable rollers rotate by themselves, and at the same time drive the movable rollers to move in the track.

In an embodiment of this creation, a plurality of the fixed rollers and a plurality of the movable rollers are arranged in a cross.

In addition, according to the purpose of this creation, the creator further proposes a substrate transfer method suitable for a substrate transfer device as described above, which at least includes the following steps: Step A: First, plural A movable roller stands by at the ready position, and is parallel to the plurality of fixed rollers of the inclined platform; Step B: Continue, when a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, then the plurality of movable rollers move up After raising the plurality of fixed rollers staggered on the inclined platform, continue to rise; Step C: Wait for the plurality of movable rollers to carry and raise the substrate at the same time, and when the plurality of movable rollers are completely far away from the inclined platform, the plurality of movable rollers The rollers will then fine-tune each movable roller from inclination to horizontal at different speeds; Step D: After the movable rollers are parallel, then use a plurality of vertical rails to rise vertically to the vertex of each vertical rail. After each of the movable rollers rises to the apex, the plurality of movable rollers is powered by the driver and rotates by itself; Step E: After the substrate is removed through an upper conveying mechanism, the plurality of movable rollers are laterally displaced through the upper parallel track The outermost vertical rail, descend from the vertical rail to the bottom point of the vertical rail, and move across the parallel rail below to the standby ready position; and Step F: enter the standby state, and wait for the substrate to be transported from the lower layer The mechanism is transferred to the inclined platform and then positioned, and steps A to E are repeated.

In this way, the inclined platform and substrate transfer device of this invention are mainly designed by arranging an inclined platform with an inclination angle on the base of the substrate transfer device, which effectively leaves the wet process chemicals on the surface while transferring the substrate. It can slide down along the oblique angle, so that the substrate will not be harmful to its surface due to the residue of the chemical liquid during the transfer process, and it does achieve the main advantages of maintaining and improving the quality of the transferred substrate.

(10): Tilting platform

(11): Long side

(12): Short side

(13): Conveying roller

(131): Guide roller

(20): Substrate transfer device

(21): Pedestal

(211): The first support wall

(212): second support wall

(213): Orbit

(2131): Parallel orbit

(2132): vertical track

(214): drive

(22): The first lifting mechanism

(221): The first lifting track

(222): First Lifting Drive

(23): Transverse mechanism

(231): Transverse Track

(232): traverse drive

(24): The second lifting mechanism

(241): second lifting track

(242): second lift drive

(25): The first fork assembly

(251): first shaft

(252): The first fork

(2521): The first fork

(26): The second fork assembly

(261): second shaft

(262): The second fork

(2621): The second fork

(27): Rail

(271): Rail track

(30): Fixed roller

(40): Movable scroll wheel

(3): Substrate

(4): Upper conveying mechanism

(5): Lower conveyor mechanism

(S10): Substrate transfer method

(S11)~(S16): Step a~Step f

(S20): Substrate transfer method

(S21)~(S26): Step A~Step F

(θ): included angle

Figure 1: A perspective view of the entire device of a preferred embodiment of the creative substrate transfer device; Figure 2: A cross-sectional view of the entire device of a preferred embodiment of the creative substrate transfer device; Figure 3: The entire device of the creative substrate transfer device A schematic diagram of substrate placement in a preferred embodiment; Figure 4: a schematic diagram of the start of device operation of a preferred embodiment of the creative substrate transfer device; Figure 5: A schematic diagram of the staggered tilting platform of the fork assembly of a preferred embodiment of the creative substrate transfer device; Figure 6: The schematic diagram of the substrate and the fork assembly of a preferred embodiment of the creative substrate transfer device; seventh Figure: A schematic diagram of the fork assembly horizontal lifting of a preferred embodiment of the creative substrate transfer device; Figure 8: A schematic diagram of the fork assembly carrying substrate raised to the apex of a preferred embodiment of the creative substrate transfer device; Figure 9 : A schematic diagram of the upper layer conveying mechanism approaching in a preferred embodiment of the creative substrate transfer device; Figure 10: A schematic diagram of the rotation of the fork assembly of a preferred embodiment of the creative substrate transfer device; Figure 11: The creative substrate transfer The overall device perspective view of the second preferred embodiment of the device; Figure 12: the cross-sectional view of the overall device of the second preferred embodiment of the creative substrate transfer device; Figure 13: the movable roller of the second preferred embodiment of the creative substrate transfer device Schematic diagram of the ready position; Figure 14: The movable roller of the second preferred embodiment of the creative substrate transfer device moves from tilt to horizontal; Figure 15: The movable roller of the second preferred embodiment of the creative substrate transfer device lifts Another perspective cross-sectional schematic diagram; Figure 16: a flowchart of a preferred embodiment of the creative substrate transfer method; and Figure 17: a flowchart of the second preferred embodiment of the creative substrate transfer method.

In order to help your examiners understand the technical features, content and advantages of this creation and the effects that can be achieved, this creation is accompanied by drawings and detailed descriptions in the form of embodiments are as follows, and the drawings used therein are: The subject matter is only for the purpose of illustration and auxiliary manual, not necessarily after the implementation of this creation The true proportions and precise configuration should not be interpreted in terms of the proportion and configuration relationship of the attached drawings, and should not limit the scope of rights of the creation in actual implementation, and shall be stated first.

First of all, please refer to Figures 1 and 2, which are a perspective view of the overall device and a cross-sectional view of the overall device of a preferred embodiment of the creative substrate transfer device. The tilting platform (10) of this creation is suitable for the substrate The transmission device (20), wherein the substrate transmission device (20) includes at least a base (21), and the main feature is that the inclined platform (10) is arranged on the base (21), and the inclined platform (10) There is an included angle (θ) between (10) and the base (21), wherein the included angle (θ) is between 3 degrees and 10 degrees, and the best one is 5 degrees, that is, the The inclined platform (10) is erected on the upper surface of the base (21) by a plurality of conveying rollers (13) of unequal height, so that the long side (11) on the left side of the inclined platform (10) is higher than that on the right side. Long side (11), and the upper surface of the inclined platform (10) and the upper surface of the base (21) sandwich the angle (θ), wherein the inclined platform (10) can be transmitted by a rotation speed At least one substrate (3) (as shown in Figure 3), the substrate (3) is placed on the inclined platform (10) from the long side (11) on the left side of the inclined platform (10) as the feed inlet (not shown in the figure) ) On the upper surface, since a process on the substrate (3) is a wet process that uses a large amount of chemical solution, when the substrate (3) is placed on the inclined platform (10), the inclined platform (10) has The inclination angle (θ) allows the liquid medicine on the substrate (3) to slide toward the long side (11) of the right side of the inclined platform (10), effectively preventing the liquid medicine from the wet process from remaining on the substrate (3) The upper surface further causes damage to the substrate (3), such as over-etching.

Each of the conveying rollers (13) is provided with a plurality of guide rollers (131), according to which, the substrate (3) is carried through the guide roller (131), so that the guide roller (131) can make the substrate (3) tilt It is the advantage of not causing slipping damage, so that it can effectively carry the substrate and carry out the transfer operation.

In addition, please refer to Figures 1 and 2 again. The substrate transfer device (20) of the present invention is composed of at least a base (21), a tilt platform (10), and a first lifting mechanism ( 22), a combination of a traverse mechanism (23), a second lifting mechanism (24), a first fork assembly (25) and a second fork assembly (26) As a result, the main purpose of the substrate transfer device (20) is to transfer the substrate (3) from the previous wet process to the back-end process equipment.

A first lifting mechanism (22) is arranged side by side on the base (21) and located on a side of the inclined platform (10), and the first lifting mechanism (22) includes two first lifting rails (221) ), and a first lifting driver (222) disposed at one end of the first lifting rail (221), wherein the first lifting rail (221) is disposed on one side of the first lifting mechanism (22) , And embedded in the first lifting mechanism (22) in a vertical direction from top to bottom, and the first lifting driver (222) is arranged at an end of the lifting mechanism (22), for example: top or bottom Wait for one of them, but not limited to this. The first lifting driver (222) is mainly used to provide a power to drive the vertical movement of the traverse mechanism (23); in addition, the first lifting rail (221 The internal system of) can be further provided with a transmission assembly of belts, chains, gears, slide rails, spirals or screw elements, or can be driven by the first lifting drive (222) to move the traverse mechanism (23).

At least one traverse mechanism (23), the traverse mechanism (23) is arranged in the first lifting rail (221) of the first lifting mechanism (22) and arranged at 90 degrees with the traverse mechanism ( 23) The system includes at least one traverse rail (231), and a traverse drive (232) arranged at one end of the traverse rail (231); in addition, the internal system of the traverse mechanism (23) can be The transmission assembly is further provided with belts, chains, gears, slide rails, spiral or screw elements.

At least one second lifting mechanism (24), the second lifting mechanism (24) is arranged in the lateral moving track (231) of the lateral moving mechanism (23) and arranged at 90 degrees with the second lifting mechanism (23), and the second lifting mechanism (24) is arranged in parallel with the first lifting mechanism (22), wherein the second lifting mechanism (24) includes at least one second lifting rail (241), and a second lifting rail (241) ) One end of the second lifting drive (242).

A first fork assembly (25) is arranged on the second lifting mechanism (24), and the first fork assembly (25) includes a second lifting mechanism embedded in the second lifting mechanism (24) The first rotating shaft (251) of the track (241); a second fork assembly (26), which is arranged on the traverse mechanism (23), the second fork assembly (26) includes a second shaft (261) embedded in the traverse rail (231); the first fork assembly (25) further includes a first shaft (251) arranged at one end of the first shaft (251) A fork frame (252), and a plurality of first forks (2521) arranged perpendicular to the first fork frame (252), and a plurality of the first forks (2521) are arranged side by side; The second fork assembly (26) further includes a second fork frame (262) arranged at one end of the second rotating shaft (261), and a plurality of second fork frames (262) arranged perpendicularly to the second fork frame (262). Two tines (2621), and a plurality of the second tines (2621) are arranged side by side, and can be arranged according to the size of the substrate (3) to arrange different first tines and second tines Quantity.

Two guide rails (27) are further provided on both sides of the traverse mechanism (23). Each guide rail (27) is further provided with a guide rail (271), and the guide rail (271) enables the traverse mechanism ( 23) Entrap and move up and down; accordingly, the design of the guide rail and the guide rail track can be used to guide the transverse movement mechanism to the correct direction, which can effectively avoid the advantage of deviation.

In addition, the substrate transport device (20) of a preferred embodiment of the present invention transports the substrate (3) from the previous wet process to the next process as follows:

1. Please also refer to Figure 3, which is a schematic diagram of substrate placement of a preferred embodiment of the creative substrate transfer device, in which the substrate (3) is formed by the long side (11) of the inclined platform (10) The inlet enters the inclined platform (10), and the inclined platform (10) transfers the substrate (3) to the right by a rotating speed, wherein when the inclined platform (10) transfers the substrate (3) to the positioning The first fork component and the second fork component are raised upward from the bottom by the first lifting mechanism (22).

2. Please also refer to Figure 4, which is a schematic diagram of the start of the device operation of a preferred embodiment of the substrate transfer device for creation, wherein when the substrate transfer device (20) starts to start, the first fork assembly ( 25) and the second fork assembly (26) are located at the lower end of the first lifting mechanism (22) on standby, and the first fork assembly (25) and the second fork assembly (26) are also located at the Below the inclined platform (10).

3. Please also refer to Figure 5, which is a schematic diagram of the staggered tilting platform of the fork assembly of one of the preferred embodiments of the creative substrate transfer device, in which, when the substrate (3) is transferred through the lower transfer mechanism After being transferred (not shown in the figure) to the inclined platform (10) and positioned, the first fork assembly (25) and the second fork assembly (26) will be lifted up and connected with the inclined platform (10) Continue to rise after staggering.

4. Please also refer to Figure 6, which is a schematic diagram of substrate movement of a preferred embodiment of the creative substrate transfer device. When the first fork assembly (25) and the second fork assembly (26) move toward Lift up and interlace with the inclined platform (10) and then continue to rise, so that the first fork assembly (25) and the second fork assembly (26) are completely away from the inclined platform (10); (10) The conveying roller (13) is designed to be inclined, resulting in the substrate (3) being inclined; wherein the second end of the first rotating shaft (251) of the first fork assembly (25) is provided with the second Lifting mechanism (24); when the first fork assembly (25) and the second fork assembly (26) are completely away from the inclined platform (10), the first fork assembly (25) and the second fork assembly The fork assembly (26) simultaneously rotates from tilt to horizontal, so that the first fork assembly (25) and the second fork assembly (26) can be carried horizontally, so that the base plate (3) can be horizontally oriented away from the The tilting platform (10) moves in the direction, and at the same time the first fork assembly (25) is fine-tuned down to the relative position of the second fork assembly (26) through the second lifting mechanism (24), but this creation does not Limit this. In another embodiment of the invention (not shown in the figure), the second lifting mechanism is provided at the other end of the second rotating shaft of the second fork assembly, so that the second fork assembly passes through the second lifting mechanism The fine adjustment rises to the relative position of the first fork assembly; accordingly, the substrate can be stabilized for upper and lower layer transfer operations.

5. Please also refer to Figure 7, which is a schematic diagram of the horizontal lifting of the fork assembly of a preferred embodiment of the creative substrate transfer device, in which the first fork assembly (25) and the second fork assembly ( 26) After fine adjustment to the relative position, the first fork assembly (25) and the second fork assembly (26) continuously lift the substrate horizontally and upward.

6. Please also refer to Figure 8, which is a schematic diagram of the fork assembly carrying substrate raised to the apex of a preferred embodiment of the creative substrate transfer device, the first fork assembly (25) and the second fork assembly The assembly (26) is transferred upward to the top of the first lifting mechanism (22) to wait for an upper conveying mechanism to receive it.

8. Please also refer to Fig. 9, which is an approaching schematic diagram of the upper layer conveying mechanism of a preferred embodiment of the creative substrate transfer device, in which the substrate (3) is still horizontally arranged on the first fork assembly (25) and the second fork assembly (26), and wait for the upper conveying mechanism (4) to take the substrate (3) away from each fork assembly to continue the next manufacturing process.

9. Please also refer to Figure 10, which is a schematic diagram of the rotation of the fork assembly of a preferred embodiment of the substrate transmission device for this creation. When the substrate (3) is transferred away, the first fork assembly (25 ) And the second fork assembly (26) rotate to be vertical at the same time, separate to the two sides and then descend, and the first fork assembly (25) and the second fork assembly (26) are lowered to the inclined The ready position under the platform (10).

Accordingly, a substrate transfer device is provided, which is designed through the first lifting mechanism, the lateral movement mechanism and the rotating shaft, whereby the upper and lower substrate transfer actions can be carried out stably, and the first and second fork components can be effectively tilted The rotation level is adjusted to the relative position and then rises synchronously, which can improve the advantages of large-area substrate transmission.

In addition, please refer to Figures 11 and 12, which are a perspective view of the overall device and a cross-sectional view of the overall device of the second preferred embodiment of the creative substrate transfer device. The substrate transfer device (20) of the present creation is composed of at least one The base (21), a tilting platform (10), a plurality of fixed rollers (30) and a plurality of movable rollers (40) are combined. The main purpose of the substrate transmission device (20) is to use the substrate ( 3) From the previous wet process to the back-end process equipment.

The two sides of the base (21) are respectively provided with a first support wall (211) and a second support wall (212), the first support wall (211) and the second support wall (212) are connected by Connected by at least one rail (213), wherein the rail (213) is equipped with belts, chains, gears, slide rails, spiral or screw elements or other transmissions that can be driven by the driver (214) to move the rail (213) Component, and the rail (213) includes two parallel rails (2131) and a plurality of vertical rails (2132), wherein the two parallel rails (2131) are respectively embedded into the first supporting wall (211 ) And the second supporting wall (212), and correspond to each other; in addition, the bottom of the base (21) is provided with a driver (214) that can provide power.

The inclined platform (10) is arranged at one end of the base (21), wherein an included angle (θ) is sandwiched between the inclined platform (10) and the base (21).

The fixed rollers (30) are respectively connected to the first supporting wall (211) and the second supporting wall (212), and are respectively located on the two sides of the vertical rails (2132) and close to the parallel rails (2131) below. ), and each of the fixed rollers (30) is arranged on the first supporting wall (211) and the second supporting wall (212) at a height between the heights of the vertical rails (2132), where the The fixed rollers (30) are inclined and arranged parallel to each other to form the inclined platform (10).

The movable rollers (40) and the fixed rollers (30) are parallel to each other and are arranged between the first support wall (211) and the second support wall (212), and two of the movable rollers (40) The ends are respectively embedded in the rails (213) of the first supporting wall (211) and the second supporting wall (212), and the movable rollers (40) can be moved in the rail (213) at the same time.

That is, in the base (21), the parallel rail (2131) and the vertical rail (2132) are assembled to form a rail (213) with a loop, and the fixed rollers (30) are They are arranged in an inclined and parallel manner, and are arranged between the vertical rails (2132) to form the inclined platform (10), so that the movable roller (40) and the base (21) form an angle (θ), and the The movable rollers (40) are respectively arranged in the track (213) and intersected with the fixed rollers (30). They are also arranged in an oblique and parallel manner to form another supporting frame surface. The movable roller (40) is movable along the track (213) by the power provided by the driver (214).

Accordingly, a bar-type substrate transfer device is provided, which can stably carry out the transfer action of the upper and lower substrates, and through the arrangement design of the movable roller set in the parallel track and the vertical track, according to this, when the substrate is transferred It can reduce a large amount of displacement time, and at the same time, through the different speeds of the movable roller, it can effectively turn the movable roller from an inclination to a level and stabilize the transfer of the upper and lower substrates.

In addition, the method of the substrate transfer device (20) of the second preferred embodiment of the present invention to transport the substrate (3) from the previous wet process to the next process is as follows:

1. Please also refer to Figure 11, where when the substrate (3) enters the inclined platform (10) from the inlet on the left side of the inclined platform (10), the movable rollers (40) borrow The power provided by the driver (214) simultaneously rises in the vertical rail (2132) of the rail (213), so that the inclined platform (10) carries the substrate (3).

2. Please also refer to Figure 12, which is a schematic diagram of the movable roller movement of the second preferred embodiment of the creative substrate transfer device, in which the plurality of fixed rollers (30) of the inclined platform (10) are on the upper left The lower right tilted state, and the plurality of movable rollers (40) initially arranged under each of the fixed rollers (30) are arranged in parallel in the track (213), but not limited to this; After the substrate (3) is positioned, each of the movable rollers (40) will move to a ready position and stand by.

3. Please also refer to Figure 13, which is a schematic diagram of the movable roller in the ready position of the second preferred embodiment of the creative substrate transfer device. When each movable roller (40) moves to the standby position, the movable roller ( 40) The standby system at the ready position is inclined or horizontal. In an embodiment of this creation, each of the movable rollers (40) and each of the fixed rollers (30) are inclined and arranged parallel to each other, but not This is a limitation; in another embodiment of this creation, each of the movable rollers (40) and each of the fixed rollers (30) form the angle (θ) setting.

4. Please also refer to Figure 14, which is a schematic diagram of the movement of the movable roller from tilting to horizontal in the second preferred embodiment of the creative substrate transfer device. When the movable roller (40) on the left side intersects the fixed roller (30) ) And touch the substrate (3), stop immediately, and at the same time wait for the movable roller (40) on the right side to contact the substrate (3), and then wait for all the movable rollers (40) to contact the substrate (3), even if After the movable rollers (40) are quickly and finely adjusted from the inclined state to the horizontal state, the substrate (3) is lifted together; successively, each of the movable rollers (40) lifts the substrate (3) away from the inclined platform ( 10) ascending in the direction, where these movable After the roller (40) contacts the substrate (3), the substrate (3) is carried at the same speed, so that the substrate (3) can move in a horizontal state away from the inclined platform (10).

5. Please also refer to Fig. 15, which is a schematic cross-sectional view of the movable rollers of the second preferred embodiment of the creative substrate transfer device ascending from another perspective, in which the substrate (3) is transported by a lower layer transport mechanism ( 5) Transfer to the inclined platform (10) formed by a plurality of fixed rollers (30), and a plurality of movable rollers (40) are first located in the lower parallel track (2131) under the inclined platform (10), waiting to rise. After the substrate (3) is positioned, please refer to Figure 5. The plurality of movable rollers (40) are simultaneously raised in the rail (213) by the power provided by the drive (214) to carry the substrate (3). ) To the upper parallel track (2131), when the substrate (3) is completely moved to the upper conveying mechanism (4), the lower conveying mechanism (5) transfers the substrate (3) to the inclined platform (10), and the A plurality of movable rollers (40) move horizontally along the parallel track (2131) to the outermost vertical track (2132), and then descend to the lower parallel track (2131) in sequence, and set a ready position for standby. Finally, wait After the substrate (3) is positioned, the plurality of movable rollers (40) rise again to carry the substrate (3) to the upper parallel rail (2131) to form a circular motion.

According to this, through the arrangement design of movable roller, fixed roller, parallel track and vertical track, the movable roller located in the track can reduce a large amount of displacement time when transferring the substrate, and at the same time, it can also reduce the circulation movement of the transportation device. At the same time, through the different speeds of the movable roller, it can effectively turn the movable roller from tilt to horizontal and stabilize the transfer of the upper and lower substrates.

Furthermore, please refer to Fig. 16, which is a flowchart of a preferred embodiment of a substrate transfer method for creating a substrate, which is suitable for a preferred embodiment of a substrate transfer device, and provides a substrate transfer method (S10) , Suitable for a substrate transfer device (20) as described in Figures 1 to 11, which at least includes the following steps: Step a (S11): First, the first fork assembly and the second fork assembly stand by in a preparation position and are parallel to an inclined platform; Step b (S12): Continuing, after a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, the first fork assembly and the second fork assembly are lifted up and staggered with the inclined platform Then continue to rise; step c (S13): wait until the first fork assembly and the second fork assembly are completely away from the inclined platform; step d (S14): the first fork assembly and the second fork assembly From tilting and rotating to horizontal, at the same time one of the fork components is raised or lowered to the relative position of the other fork assembly through fine adjustment; Step e (S15): After the first fork assembly and the second fork assembly are parallel, After the first fork assembly and the second fork assembly are transferred upward, when the substrate is transferred away, the first fork assembly and the second fork assembly rotate to be vertical at the same time, and are separated to both sides. When descending, the first tine assembly and the second tine assembly are lowered to the preparation position; and step f (S16): enter the standby state, wait for the substrate to be transferred to the inclined platform by the lower conveying mechanism and position, repeat the steps a to step e.

In an embodiment of the present invention, the step d (S14) further includes that the first fork assembly is finely lowered to the relative position of the second fork assembly through the second lifting mechanism.

In another embodiment of the present invention, the step d (S14) further includes that the second fork assembly is raised to the relative position of the first fork assembly by fine adjustment of the second lifting mechanism.

Accordingly, a substrate transfer method using a fork-type substrate transfer device is provided, whereby the upper and lower substrate transfer actions can be stably performed, and the design of raising or lowering through the second lifting mechanism can be effectively performed accordingly. It avoids the advantages of damage caused by the substrate transmission process.

In addition, please refer to Figure 18 again, which is a flow chart of the second preferred embodiment of the creation of a substrate transfer method, which is suitable for the second preferred embodiment of a substrate transfer device, and provides a substrate transfer method (S20) , Suitable for a substrate transfer device (20) as described in Figures 12 to 16, which at least includes the following steps: Step A (S21): First, a plurality of movable rollers are in standby position and are parallel to the plurality of fixed rollers of the inclined platform; Step B (S22): Continue, when a substrate is transferred to the inclined platform through the lower layer conveying mechanism After positioning, the plurality of movable rollers are lifted upwards after the plurality of fixed rollers staggered the inclined platform, and then continue to rise; Step C (S23): Wait for the plurality of movable rollers to carry and lift the substrate at the same time. After each of the movable rollers is completely away from the tilting platform, a plurality of the movable rollers will be adjusted at different speeds from inclination to level; Step D (S24): After the movable rollers are parallel, then A plurality of vertical rails are vertically raised to the apex of each vertical rail. After each of the movable rollers rises to the apex, the plurality of movable rollers are powered by the driver and rotate by themselves; Step E (S25): When the substrate After being removed by an upper conveying mechanism, the plurality of movable rollers move laterally through the upper parallel track to the outermost vertical track, and drop vertically from the vertical track to the bottom point of the vertical track, and move laterally through the lower parallel track To the standby preparation position; and step F (S26): enter the standby state, wait for the substrate to be transferred to the inclined platform by the lower conveying mechanism, and then position, repeat step A (S21) to step E (S25).

In an embodiment of the present creation, the step C (S23) further includes a plurality of the movable roller trains at different speeds to lower each of the movable rollers from the tilt fine adjustment to the horizontal.

In another embodiment of the present creation, the step C (S23) further includes a plurality of the movable roller trains at different speeds to raise each of the movable rollers from the tilt fine adjustment to the level.

Accordingly, there is provided a substrate transfer method suitable for a bar-type substrate transfer device, which can stably carry out the transfer action of the upper and lower substrates, and is arranged in the parallel track and the vertical track through the movable roller. According to this It can reduce a lot of displacement time when transferring the substrate, and At the same time, the different speeds of the movable roller can be used to effectively turn the movable roller from an inclination to a horizontal position and stabilize the transfer of the upper and lower substrates.

It can be seen from the above implementation description that compared with the prior art and products, this creation has the following advantages: 1. The tilting platform of this creation and the substrate transfer device prepared thereon are mainly based on the substrate transfer device The design of an inclined platform with an inclined angle is installed on the seat, which effectively makes the liquid remaining on the surface of the wet process slide down along the inclined angle while the substrate is being transferred, so that the substrate will not be caused by the residue of the chemical liquid during the transfer process The disadvantage of causing harm to its surface does achieve the main advantages of maintaining and improving the quality of the transferred substrate.

In summary, the tilting platform and substrate transfer device of this creation can indeed achieve the expected use effect through the embodiments disclosed above, and this creation has not been disclosed before the application, since it is in full compliance with the patent law Regulations and requirements. If you file an application for a new type patent in accordance with the law, you are kindly requested to review it and grant a quasi-patent.

However, the above-mentioned illustrations and descriptions are only the preferred embodiments of this creation, and are not intended to limit the scope of protection of this creation. For those who are familiar with the art, the characteristics of the creation based on the scope of this creation, and others Equivalent changes or modifications should be regarded as not departing from the design scope of this creation.

(10): Tilting platform

(11): Long side

(12): Short side

(13): Conveying roller

(131): Guide roller

(20): Substrate transfer device

(21): Pedestal

(22): The first lifting mechanism

(221): The first lifting track

(222): First Lifting Drive

(23): Transverse mechanism

(231): Transverse Track

(232): traverse drive

(24): The second lifting mechanism

(241): second lifting track

(242): second lift drive

(25): The first fork assembly

(251): first shaft

(252): The first fork

(2521): The first fork

(26): The second fork assembly

(261): second shaft

(262): The second fork

(2621): The second fork

(27): Rail

Claims (17)

A substrate transmission device includes at least: a base (21); an inclined platform (10) arranged on the base (21), and between the inclined platform (10) and the base (21) An included angle (θ) is set in the clamp, wherein the base (21) is composed of two long sides (11) and two short sides (12); wherein the inclined platform (10) further includes a plurality of conveying rollers (13) , Each of the conveying rollers (13) is arranged along the two long sides (11) of the base (21) to form the included angle (θ) at different heights and arranged in parallel; at least one first lifting mechanism (22), Is arranged on the base (21) and located on a side of the inclined platform (10), the first lifting mechanism (22) includes at least two first lifting rails (221), and a A first lifting driver (222) at one end of a lifting rail (221); and at least one traverse mechanism (23), the traverse mechanism (23) is arranged on the first lifting mechanism (22) The lifting rail (221) is arranged at 90 degrees with it, and the traverse mechanism (23) includes at least one traverse rail (231) and a traverse provided at one end of the traverse rail (231) Driver (232); at least one second lifting mechanism (24), the second lifting mechanism (24) is arranged in the traverse rail (231) of the traverse mechanism (23) and arranged at 90 degrees with it, and The second lifting mechanism (24) is arranged in parallel with the first lifting mechanism (22), wherein the second lifting mechanism (24) includes at least one second lifting rail (241), and a The second lifting driver (242) at one end of the two lifting rails (241); a first fork assembly (25) is arranged on the second lifting mechanism (24), the first fork assembly (25) is Comprising a first rotating shaft (251) embedded in the second lifting rail (241) of the second lifting mechanism (24); A second fork assembly (26) is arranged on the traverse mechanism (23), and the second fork assembly (26) includes a second rotating shaft (261) embedded in the traverse rail (231) . The substrate transfer device according to claim 1, wherein the included angle (θ) is between 3 degrees and 10 degrees. The substrate transport device according to claim 2, wherein each of the conveying rollers (13) is provided with a plurality of guide rollers (131). The substrate transmission device according to claim 1, wherein the first lifting rail (221), the traverse rail (231) and the second lifting rail (241) are each further provided with a belt, a chain, a gear, and a slide Transmission components of rail, screw or screw elements. According to the substrate transmission device of claim 1, the first fork assembly (25) further includes a first fork frame (252) disposed at one end of the first rotating shaft (251), and a plurality of roots and the first fork frame (252) A fork frame (252) has a first fork (2521) vertically arranged, and a plurality of the first forks (2521) are arranged side by side. According to the substrate transmission device of claim 1 or 5, the second fork assembly (26) further includes a second fork frame (262) arranged at one end of the second shaft (261), and a plurality of The second forks (2621) are vertically arranged on the second fork frame (262), and a plurality of the second forks (2621) are arranged side by side. The substrate transmission device according to claim 6, wherein the inclined platform (10) transmits at least one substrate (3) by a rotation speed. The substrate transmission device according to claim 7, wherein an upper conveying mechanism (4) further receives the substrate (3) against the first fork assembly (25) and the second fork assembly (26). The substrate transmission device according to claim 7, wherein two guide rails (27) are further provided on both sides of the traverse mechanism (23), and each guide rail (27) is further provided with a guide rail (271), the guide rail The rail (271) enables the traverse mechanism (23) to enter and move up and down. The substrate transmission device according to claim 6, wherein the second lifting mechanism (24) is provided at the other end of the first rotating shaft (251) of the first fork assembly (25). The substrate transmission device according to claim 6, wherein the second lifting mechanism (24) is provided at the other end of the second rotating shaft (261) of the second fork assembly (26). A substrate transmission device includes at least: a base (21); an inclined platform (10) arranged on the base (21), and between the inclined platform (10) and the base (21) An included angle (θ) is set in the clamp, wherein the base (21) is composed of two long sides (11) and two short sides (12); wherein the inclined platform (10) further includes a plurality of conveying rollers (13) , Each of the conveying rollers (13) is configured to form the included angle (θ) at different heights along the two long sides (11) of the base (21) and are arranged in parallel; wherein the second of the base (21) The short side (12) is provided with a first supporting wall (211) and a second supporting wall (212) respectively, and the first supporting wall (211) and the second supporting wall (212) are connected by at least one rail ( 213) connection, the track (213) includes two parallel tracks (2131) and a plurality of vertical tracks (2132), and the bottom of the base (21) is provided with a driver (214); the inclined platform (10) The conveying roller (13) is a plurality of fixed rollers (30), and a plurality of the fixed rollers (30) are connected obliquely between the first support wall (211) and the second support wall (212), and respectively On the two sides of each of the vertical rails (2132) and close to the lower parallel rails (2131), the fixed rollers (30) are inclined and arranged parallel to each other to form the inclined platform (10); and A plurality of movable rollers (40) are parallel to each other and are arranged between the first support wall (211) and the second support wall (212), and the two sides of the movable roller (40) are respectively embedded in The first supporting wall (211) and the second supporting wall (212) are in the rail (213), and the movable rollers (40) can be moved in the rail (213) at the same time. The substrate transfer device according to claim 12, wherein the included angle (θ) is between 3 degrees and 10 degrees. The substrate transport device according to claim 13, wherein each of the conveying rollers (13) is provided with a plurality of guide rollers (131). The substrate transmission device according to claim 12 or 14, wherein the track (213) is a transmission assembly provided with belts, chains, gears, sliding rails, spirals or screw elements. The substrate transmission device according to claim 12 or 14, wherein the driver (214) provides a power to make the plurality of movable rollers (40) self-rotate and simultaneously drive the movable rollers (40) on the track (213) Move within. The substrate transfer device according to claim 12 or 14, wherein a plurality of the fixed rollers (30) and a plurality of the movable rollers (40) are arranged in a cross.

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