TWI732547B - Inclined platform, substrate transmission device and substrate transmission method - Google Patents

Abstract

The present invention discloses an inclined platform for dissipating wet process chemicals on the surface of a substrate or substrate to be transferred by an inclination angle and a substrate transfer device prepared therefrom. The present invention provides a substrate transfer device, which is a substrate transfer device. It includes at least a base and a tilting platform. The main feature is that the tilting platform is set on the base, and an included angle is sandwiched between the tilting platform and the base; thereby, the present invention uses the The design of the inclined platform is set on the base, which effectively makes the liquid remaining on the surface of the wet process slide down along the inclination angle while the substrate is being transferred, so that the substrate will not be caused to the surface due to the residue of the liquid during the transfer. Hazard, it does achieve the advantages of protecting the quality of the transmission substrate.

Description

Inclined platform, substrate transmission device and substrate transmission method

The present invention relates to a substrate transfer device and a substrate transfer method thereof, in particular to an inclined platform that can dissipate the liquid medicine of the wet process on the surface of the substrate by using a platform with an inclined angle and the inclined platform The prepared substrate transmission device and the substrate transmission method thereof.

A common substrate transfer device usually uses a conveyor line to transfer the substrate to a conveying structure composed of a plurality of conveying rollers, and then move the substrate to a designated position by a robotic arm set near the conveying structure, or by After the robotic arm intercepts the substrate, it transfers the substrate to another group of transmission structure. Although the robotic arm can move the substrate horizontally or up and down, it needs to move step by step because of the robot arm. There are also restrictions, which limit the size of the substrate during transfer, and it takes too much unnecessary time when the robot arm moves, which in turn affects the efficiency of substrate transfer; in addition, there are still many etching solutions after the wet process. If it remains on the substrate surface, in severe cases, it will cause the problem of excessive etching on the substrate surface. Therefore, how to solve the disadvantages of damage caused by the chemical residue on the substrate surface through innovative design is still the development of related industries such as substrate transfer devices. The industry and related researchers need to continue to work hard to overcome and solve the problems.

The reason is that, in view of this, the creator, assisted by his rich professional knowledge and years of practical experience, has improved and invented a tilting platform and a substrate transfer device prepared therefrom. The purpose is to provide a The angled platform is an inclined platform for dissipating the chemical liquid of the wet process on the surface of the substrate to be transferred and the substrate transfer device prepared by the inclined platform is mainly provided by the substrate transfer device base with an inclined angle The design of the inclined platform can effectively make the remaining wet process liquid on the surface of the substrate slide down along the inclination angle while the substrate is being transported, so that the substrate will not be harmful to the surface due to the residue of the chemical liquid during the transfer process. Disadvantages, it does achieve the main advantages such as maintaining and improving the quality of the delivered substrate.

The second purpose of the present invention is to provide a tilting platform. With the design of the conveying rollers and guide rollers on the tilting platform, the substrate can be prevented from slipping and damage when tilted, so that it can effectively carry the substrate and carry out the transfer operation. Advantage.

Another object of the present invention is to provide another substrate transfer device, which can stably carry out the upper and lower substrate transfer actions through the design of the first lifting mechanism, the traverse mechanism and the rotating shaft, and effectively enable the first and second substrates to be transferred. The fork assembly rotates horizontally from the tilt and fine-tunes to the relative position and then rises synchronously, which can improve the advantages of large-area substrate transmission.

Another object of the present invention is to provide another substrate transfer method, which is applied to a fork-type substrate transfer device substrate transfer method, whereby the upper and lower substrate transfer actions can be stably performed, and then through the second lifting mechanism The design of ascending or descending can effectively avoid the advantages of damage caused by the substrate during the transfer process.

Another object of the present invention is to provide a substrate transfer device, which is designed through the arrangement of movable rollers, fixed rollers, parallel rails and vertical rails. The movable rollers located in the rails can reduce the amount of substrates during transfer. At the same time, it can also reduce the cycle time of the transportation device. At the same time, the different speeds of the movable roller can effectively turn the movable roller from tilt to horizontal and stabilize the transfer of the upper and lower substrates.

Another object of the present invention is to provide another substrate transfer method, which is a substrate transfer method of a bar-type substrate transfer device, whereby the upper and lower substrate transfer actions can be stably performed, and the substrate transfer method is arranged on a movable roller. The layout design in the parallel track and the vertical track can reduce a large amount of displacement time when transferring the substrate. At the same time, the different speed of the movable roller can effectively turn the movable roller from tilt to horizontal and stabilize the upper and lower substrates. Advantages such as transmission actions.

In order to achieve the purpose of the present invention, the inventor proposes an inclined platform, which is suitable for a substrate transfer device. The substrate transfer device includes at least a base. The main feature is that the inclined platform is arranged on the base and is inclined. An included angle is clamped between the platform and the base.

In an embodiment of the present invention, the included angle is between 3 degrees and 10 degrees.

In an embodiment of the present invention, the base is composed of two long sides and two short sides.

In an embodiment of the present invention, the inclined platform further includes a plurality of conveying rollers, and each of the conveying rollers is configured to form the included angle at different heights along the two long sides of the base and are arranged in parallel.

In an embodiment of the present invention, each of the conveying rollers is provided with a plurality of guide rollers.

In an embodiment of the present invention, the inclined platform uses a rotation speed to transfer at least one substrate.

In addition, in accordance with the purpose of the present invention, the inventor proposes a substrate transfer device, which includes at least one inclined platform as described above; at least one first lifting mechanism is arranged on the base and located on one side of the inclined platform Part, the first lifting mechanism includes at least two first lifting rails, and a first lifting driver disposed at one end of the first lifting rail; and at least one traverse mechanism, the traversing mechanism is disposed on the The first lifting mechanism of the first lifting mechanism is arranged at 90 degrees in and with the first lifting track, and the lateral movement mechanism includes at least one lateral movement track and a lateral movement driver arranged at one end of the lateral movement track; at least one A second lifting mechanism, the second lifting mechanism is arranged in the lateral movement track of the lateral movement mechanism and arranged at 90 degrees, and the second lifting mechanism is arranged in parallel with the first lifting mechanism, wherein the second lifting mechanism is arranged in parallel with the first lifting mechanism. The second lifting mechanism includes at least one second lifting track, and a second lifting driver arranged at one end of the second lifting track; a first fork assembly is arranged on the second lifting mechanism, the first The fork assembly includes a first rotating shaft embedded in the second lifting track of the second lifting mechanism; a second fork assembly is disposed on the traverse mechanism, and the second fork assembly includes a ridge Into the second rotating shaft of the traverse track.

In an embodiment of the present invention, wherein the first lifting rail, the traverse rail, and the second lifting rail can be further provided with a belt, a chain, a gear, a slide rail, a screw or a screw element in each of the transmission components, It is a transmission component that can drive the fork component to move by a lifting driver.

In an embodiment of the present invention, the first fork assembly further includes a first fork frame arranged at one end of the first rotating shaft, and a plurality of first fork frames arranged perpendicular to the first fork frame , And a plurality of the first forks are arranged side by side with each other.

In an embodiment of the present invention, the second fork assembly further includes a second fork frame arranged at one end of the second rotating shaft, and a plurality of second fork frames arranged perpendicularly to the second fork frame , And a plurality of the second forks are arranged side by side with each other.

In an embodiment of the present invention, the inclined platform uses a rotation speed to transfer at least one substrate.

In an embodiment of the present invention, the first fork assembly and the second fork assembly are abutted against the base plate.

In an embodiment of the present invention, an upper conveying mechanism further receives the substrate against the first fork assembly and the second fork assembly.

In an embodiment of the present invention, two guide rails are further provided on both sides of the traverse mechanism, and each of the guide rails is further provided with a guide rail track, which enables the traverse mechanism to enter and move up and down. .

In an embodiment of the present invention, a second lifting mechanism is provided at the other end of the first rotating shaft of the first fork assembly.

In an embodiment of the present invention, a second lifting mechanism is provided at the other end of the second rotating shaft of the second fork assembly.

In addition, according to the purpose of the present invention, the inventor further proposes a substrate transfer method suitable for a substrate transfer device as described above, which at least includes the following steps: Step a: First, a first fork assembly and a second fork The assembly is on standby in a ready position and is parallel to an inclined platform; step b: continue, when a substrate is transferred to the inclined platform through a lower-level conveying mechanism and positioned, then the first fork assembly and the second fork assembly The components are lifted up and staggered with the inclined platform before continuing to rise; Step c: Wait until the first fork assembly and the second fork assembly are completely away from the inclined platform; Step d: The first fork assembly and the inclined platform The second fork assembly rotates from tilt to level, and at the same time, one fork assembly is raised or lowered to the relative position of the other fork assembly through fine adjustment; step e: wait for the first fork assembly and the second fork assembly to be parallel Then, after the first fork assembly and the second fork assembly are transferred upwards, when the substrate is transferred away, the first fork assembly and the second fork assembly rotate to be vertical at the same time, and separate to both sides After descending again, the first tine assembly and the second tine assembly are lowered to the preparation position; and step f: enter the standby state, wait for the substrate to be transferred to the inclined platform by the lower conveying mechanism, and then position, repeat the steps a to step e.

In an embodiment of the present invention, the step d further includes that the first fork assembly is finely lowered to the relative position of the second fork assembly through the second lifting mechanism.

In an embodiment of the present invention, the step d further includes that the second fork assembly is raised to the relative position of the first fork assembly through the fine adjustment of the second lifting mechanism.

Furthermore, in accordance with the purpose of the present invention, the inventor further proposes a substrate transfer device, which includes at least an inclined platform as described above; wherein the second and the short sides of the base are respectively provided with a first support wall and a first support wall. Two supporting walls, the first supporting wall and the second supporting wall are connected by at least one rail, the rail includes two parallel rails and a plurality of vertical rails, and the bottom of the base is provided with a driver; the inclined platform The conveying roller system is a plurality of fixed rollers, and the plurality of fixed roller systems are connected obliquely between the first support wall and the second support wall, and are respectively parallel to the two sides of each of the vertical rails and close to the bottom. Track, in which the fixed rollers are inclined and arranged parallel to each other to form the inclined platform; and a plurality of movable rollers are parallel to each other and arranged between the first support wall and the second support wall, and the movable rollers The two side parts are respectively embedded in the track of the first support wall and the second support wall, and the movable rollers can be moved in the track at the same time.

In an embodiment of the present invention, the track system is provided with belts, chains, gears, sliding rails, screw or screw elements, or other transmission components that can be driven by the driver to move the track.

In one embodiment of the present invention, the driver system provides a power to make the plurality of movable rollers rotate by themselves, and at the same time drive the movable rollers to move in the track.

In an embodiment of the present invention, a plurality of the fixed rollers and a plurality of the movable rollers are intersected.

In addition, according to the purpose of the present invention, the inventor further proposes a substrate transfer method suitable for a substrate transfer device as described above, which includes at least the following steps: Step A: First, a plurality of movable rollers are in standby positions, and Parallel to the plurality of fixed rollers of the inclined platform; Step B: Continue, when a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, then the plurality of movable rollers are lifted upwards to stagger the plurality of the inclined platform After fixing the rollers, continue to ascend; Step C: Wait for a plurality of the movable rollers to carry and lift the substrate at the same time. When the plurality of movable rollers are completely away from the inclined platform, the plurality of movable rollers will move at different speeds at the same time. Fine-tune each of the movable rollers from inclination to horizontal; Step D: After the movable rollers are parallel, then use a plurality of vertical rails to rise vertically to the apex of each vertical rail. After each of the movable rollers rises to the apex, The plurality of movable rollers are powered by the driver and rotate by themselves; Step E: After the substrate is moved out through an upper conveying mechanism, the plurality of movable rollers are laterally displaced to the outermost vertical track through the upper parallel track, and The vertical rail descends vertically to the bottom point of the vertical rail, and moves laterally to the standby ready position through the parallel rail below; and Step F: enters the standby state, waits for the substrate to be transported by the lower conveying mechanism to the inclined platform to be positioned, Repeat step A to step E.

Thereby, the inclined platform of the present invention, the substrate transfer device and the substrate transfer method prepared therefrom are mainly designed by arranging an inclined platform with an inclination angle on the base of the substrate transfer device, which effectively enables the substrate to be transferred at the same time. The liquid remaining in the wet process on the surface can slide down along the oblique angle, so that the substrate will not be harmful to the surface due to the residue of the chemical liquid during the transfer process, and it is indeed possible to maintain and upgrade the transferred substrate product Main advantages such as quality.

In order to help your examiners understand the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail with the accompanying drawings and in the form of embodiment expressions. The drawings used therein are as follows: The subject matter is only for the purpose of illustration and auxiliary description, and may not be the true proportions and precise configuration after the implementation of the invention. Therefore, it should not be interpreted in terms of the proportions and configuration relationships of the accompanying drawings, and should not limit the scope of rights of the invention in actual implementation. Hexian stated.

First, please refer to Figures 1 and 2, which are a perspective view of the overall device and a cross-sectional view of the overall device of a preferred embodiment of the substrate transfer device of the present invention, wherein the tilting platform (10) of the present invention is suitable for the substrate The transmission device (20), wherein the substrate transmission device (20) at least includes a base (21), and the main feature is that the inclined platform (10) is arranged on the base (21), and the inclined platform (10) There is an included angle (θ) between (10) and the base (21), wherein the included angle (θ) is between 3 degrees and 10 degrees, and the best one is 5 degrees, that is, the The inclined platform (10) is erected on the upper surface of the base (21) by a plurality of conveying rollers (13) of unequal height, so that the long side (11) on the left side of the inclined platform (10) is higher than that on the right side. Long side (11), and the upper surface of the inclined platform (10) and the upper surface of the base (21) sandwich the included angle (θ), wherein the inclined platform (10) can be transmitted by a rotational speed At least one substrate (3) (as shown in Figure 3), the substrate (3) is placed on the inclined platform (10) from the long side (11) on the left side of the inclined platform (10) as the feed inlet (not shown in the figure) ) On the upper surface, since a process on the substrate (3) is a wet process that uses a large amount of chemical liquid, when the substrate (3) is placed on the inclined platform (10), the inclined platform (10) has The inclination angle (θ) allows the liquid medicine on the substrate (3) to slide down toward the long side (11) of the right side of the inclined platform (10), effectively preventing the liquid medicine from the wet process from remaining on the substrate (3) The upper surface further causes damage to the substrate (3), such as over-etching and other shortcomings.

Each of the conveying rollers (13) is provided with a plurality of guide rollers (131), according to which, the substrate (3) is carried through the guide rollers (131), so that the guide rollers (131) can make the substrate (3) tilt It will not cause slipping damage, so that it can effectively carry the substrate and carry out the advantages of the transfer operation.

In addition, please refer to Figures 1 and 2 again. The substrate transfer device (20) of the present invention is composed of at least a base (21), a tilting platform (10), and a first lifting mechanism ( 22), a traverse mechanism (23), a second lifting mechanism (24), a first fork assembly (25) and a second fork assembly (26) are combined, the substrate transfer device (20) The main purpose of) is to transfer the substrate (3) from the previous wet process to the back-end process equipment.

A first lifting mechanism (22) is arranged side by side on the base (21) and located on a side of the inclined platform (10), and the first lifting mechanism (22) includes two first lifting rails (221). ), and a first lifting driver (222) disposed at one end of the first lifting rail (221), wherein the first lifting rail (221) is disposed on one side of the first lifting mechanism (22) , And embedded in the first lifting mechanism (22) in a vertical direction from top to bottom, and the first lifting driver (222) is arranged at one end of the lifting mechanism (22), for example: top or bottom Wait for one of them, but not limited to this. The first lifting driver (222) is mainly used to provide a power to drive the vertical movement of the traverse mechanism (23); in addition, the first lifting rail (221) The internal system of) can be further provided with a transmission assembly of belts, chains, gears, slide rails, spirals or screw elements, or can be driven by the first lifting drive (222) to drive the traverse mechanism (23) to move.

At least one traversing mechanism (23), the traversing mechanism (23) is arranged in the first lifting rail (221) of the first lifting mechanism (22) and arranged at 90 degrees therewith, and the traversing mechanism ( 23) The system includes at least one traverse rail (231), and a traverse drive (232) arranged at one end of the traverse rail (231); in addition, the internal system of the traverse mechanism (23) can be The transmission assembly is further provided with belts, chains, gears, slide rails, spiral or screw elements.

At least one second lifting mechanism (24), the second lifting mechanism (24) is arranged in the lateral movement rail (231) of the lateral movement mechanism (23) and arranged at 90 degrees with the second lifting mechanism (23), and the second lifting mechanism (24) is arranged in parallel with the first lifting mechanism (22), wherein the second lifting mechanism (24) includes at least one second lifting rail (241), and a second lifting rail (241) arranged on the second lifting rail (241). ) One end of the second lifting drive (242).

A first fork assembly (25) is arranged on the second lifting mechanism (24), and the first fork assembly (25) includes a second lifting mechanism embedded in the second lifting mechanism (24) The first rotating shaft (251) of the track (241); a second fork assembly (26) is arranged on the traverse mechanism (23), and the second fork assembly (26) includes an embedment in the transverse The second rotating shaft (261) of the moving track (231); the first fork assembly (25) further includes a first fork frame (252) arranged at one end of the first rotating shaft (251), and a plurality of roots and The first fork frame (252) has a first fork (2521) vertically arranged, and a plurality of the first forks (2521) are arranged side by side; the second fork assembly (26) is more It includes a second fork frame (262) arranged at one end of the second rotating shaft (261), and a plurality of second fork frames (2621) arranged perpendicularly to the second fork frame (262), and a plurality of the The second forks (2621) are arranged side by side with each other, and the number of the first forks and the second forks can be arranged according to the size of the base plate (3).

Two guide rails (27) are further provided on both sides of the traverse mechanism (23). Each guide rail (27) is further provided with a guide rail (271), and the guide rail (271) can enable the traverse mechanism ( 23) Entrap and move up and down; accordingly, the design of the guide rail and the guide rail track can be used to guide the lateral movement mechanism to the correct direction, which can effectively avoid the advantage of deviation.

In addition, the substrate transport device (20) of a preferred embodiment of the present invention transports the substrate (3) from the previous wet process to the next process as follows:

1. Please also refer to Figure 3, which is a schematic diagram of substrate placement of a preferred embodiment of the substrate transfer device of the present invention, in which the substrate (3) is formed by the long side (11) of the inclined platform (10) The inlet enters the inclined platform (10), and the inclined platform (10) transfers the substrate (3) to the right by a rotating speed, wherein when the inclined platform (10) transfers the substrate (3) to the positioning The first fork assembly and the second fork assembly are raised upward from the bottom by the first lifting mechanism (22).

2. Please also refer to Figure 4, which is a schematic diagram of the start of device operation of a preferred embodiment of the substrate transfer device of the present invention. When the substrate transfer device (20) starts to start, the first fork assembly ( 25) and the second fork assembly (26) are located at the lower end of the first lifting mechanism (22), and the first fork assembly (25) and the second fork assembly (26) are also located at the Below the inclined platform (10).

3. Please also refer to Figure 5, which is a schematic diagram of the staggered tilting platform of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention. Mark) to the inclined platform (10) to be positioned, then the first fork assembly (25) and the second fork assembly (26) are lifted up and staggered with the inclined platform (10) before continuing rise.

4. Please also refer to Figure 6, which is a schematic diagram of substrate movement of a preferred embodiment of the substrate transfer device of the present invention. When the first fork assembly (25) and the second fork assembly (26) move toward It is lifted up and interlaced with the inclined platform (10) and then continues to rise, so that the first fork assembly (25) and the second fork assembly (26) are completely away from the inclined platform (10); wherein, due to the inclined platform (10) The conveying roller (13) is designed to be inclined, resulting in the substrate (3) being inclined; wherein the second end of the first rotating shaft (251) of the first fork assembly (25) is provided with the second Lifting mechanism (24); when the first fork assembly (25) and the second fork assembly (26) are completely away from the inclined platform (10), the first fork assembly (25) and the second fork assembly At the same time, the fork assembly (26) rotates from inclination to horizontal, so that the first fork assembly (25) and the second fork assembly (26) can be carried horizontally, so that the base plate (3) can be horizontally oriented away from the The tilting platform (10) moves in the direction, and at the same time the first fork assembly (25) is fine-tuned down to the relative position of the second fork assembly (26) through the second lifting mechanism (24), but the present invention does not Limited by this. In another embodiment of the present invention (not shown in the figure), the second lifting mechanism is provided at the other end of the second rotating shaft of the second fork assembly, so that the second fork assembly passes through the second lifting mechanism The fine adjustment rises to the relative position of the first fork assembly; accordingly, the substrate can be stabilized for upper and lower layer transfer operations.

5. Please also refer to Figure 7, which is a schematic diagram of the horizontal lifting of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention, in which the first fork assembly (25) and the second fork assembly ( 26) After fine adjustment to the relative position, the first fork assembly (25) and the second fork assembly (26) continuously lift the substrate horizontally and upwards.

6. Please also refer to Figure 8, which is a schematic diagram of the fork assembly carrying substrate raised to the apex of a preferred embodiment of the substrate transfer device of the present invention, the first fork assembly (25) and the second fork assembly The assembly (26) is transferred upwards to the top of the first lifting mechanism (22) to wait for an upper conveying mechanism to receive it.

8. Please also refer to Fig. 9, which is a schematic diagram of the upper conveying mechanism of a preferred embodiment of the substrate transfer device of the present invention, in which the substrate (3) is still horizontally arranged on the first fork assembly (25) and the second fork assembly (26), and the upper conveying mechanism (4) will take the substrate (3) away from each fork assembly by suction to continue the next process.

9. Please also refer to Figure 10, which is a schematic diagram of the rotation of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention. When the substrate (3) is transferred away, the first fork assembly (25) ) And the second fork assembly (26) rotate to be vertical at the same time, separate to the two sides and then descend, and the first fork assembly (25) and the second fork assembly (26) are lowered to the inclined The ready position under the platform (10).

Accordingly, a substrate transfer device is provided, which is designed through the first lifting mechanism, traverse mechanism, and rotating shaft, so as to stably carry out the substrate transfer action of the upper and lower layers, and effectively make the first and second fork components be tilted The rotation level is adjusted to the relative position and then rises synchronously, which can improve the advantages of large-area substrate transmission.

In addition, please refer to Figures 11 and 12, which are a perspective view of the overall device and a cross-sectional view of the overall device of two preferred embodiments of the substrate transfer device of the present invention. The substrate transfer device (20) of the present invention is composed of at least one The base (21), a tilting platform (10), a plurality of fixed rollers (30) and a plurality of movable rollers (40) are combined. The main purpose of the substrate transmission device (20) is to use the substrate ( 3) From the previous wet process to the back-end process equipment.

The two sides of the base (21) are respectively provided with a first support wall (211) and a second support wall (212), the first support wall (211) and the second support wall (212) are connected by Connected by at least one track (213), wherein the track (213) is equipped with belts, chains, gears, slide rails, spiral or screw elements or other transmissions that can be driven by the driver (214) to move the track (213) Components, and the rail (213) includes two parallel rails (2131) and a plurality of vertical rails (2132), wherein the two parallel rails (2131) are respectively embedded into the first support wall (211) in a parallel manner up and down. ) And the second supporting wall (212) and corresponding to each other; in addition, a driver (214) capable of providing power is provided at the bottom of the base (21).

The inclined platform (10) is arranged at an end of the base (21), wherein an included angle (θ) is sandwiched between the inclined platform (10) and the base (21).

The fixed rollers (30) are respectively connected to the first supporting wall (211) and the second supporting wall (212), and are respectively located on the two sides of each of the vertical rails (2132) and close to the parallel rails (2131) below. ), and each of the fixed rollers (30) is arranged on the first supporting wall (211) and the second supporting wall (212) at a height between the heights of the vertical rails (2132), where the The fixed rollers (30) are inclined and arranged parallel to each other to form the inclined platform (10).

The movable rollers (40) and the fixed rollers (30) are parallel to each other and are arranged between the first support wall (211) and the second support wall (212), and two of the movable rollers (40) The ends are respectively embedded in the track (213) of the first support wall (211) and the second support wall (212), and the movable rollers (40) can be moved in the track (213) at the same time.

That is to say, in the base (21), the parallel rail (2131) and the vertical rail (2132) are assembled to form a rail (213) with a loop, and the fixed rollers (30) are Are arranged in an inclined and parallel manner, and are arranged between the vertical rails (2132) to form the inclined platform (10), so that the movable roller (40) and the base (21) form an angle (θ), and the The movable rollers (40) are respectively arranged in the track (213) and intersected with the fixed rollers (30). They are also arranged in an oblique and parallel manner to form another supporting frame surface. The movable roller (40) can be moved along the track (213) by the power provided by the driver (214).

Accordingly, a bar-type substrate transfer device is provided, which can stably carry out the transfer action of the upper and lower substrates, and through the arrangement design of the movable roller set in the parallel track and the vertical track, according to this, when the substrate is transferred It can reduce a large amount of displacement time, and at the same time, through the different speeds of the movable roller, the movable roller can be effectively turned from tilt to horizontal and stable transfer of the upper and lower substrates.

In addition, the method of the substrate transport device (20) of the second preferred embodiment of the present invention to transport the substrate (3) from the previous wet process to the next process is as follows:

1. Please refer to Figure 11 together. When the substrate (3) enters the inclined platform (10) from the inlet on the left side of the inclined platform (10), the movable rollers (40) borrow The power provided by the driver (214) simultaneously rises in the vertical rail (2132) of the rail (213), so that the inclined platform (10) carries the substrate (3).

2. Please also refer to Figure 12, which is a schematic diagram of the movable roller movement of the second preferred embodiment of the substrate transfer device of the present invention, in which the plurality of fixed rollers (30) of the inclined platform (10) are the upper left The lower right tilted state, and the plurality of movable rollers (40) initially arranged under each of the fixed rollers (30) are arranged in parallel in the track (213), but not limited to this; when After the substrate (3) is positioned, each of the movable rollers (40) will move to a ready position and stand by.

3. Please also refer to Figure 13, which is a schematic diagram of the movable roller in the standby position of the second preferred embodiment of the substrate transfer device of the present invention. When each movable roller (40) moves to the standby position and stands by, the movable roller ( 40) The standby system at the ready position is inclined or horizontal. In one embodiment of the present invention, each of the movable rollers (40) and each of the fixed rollers (30) are inclined and arranged parallel to each other, but not This is a limitation; in another embodiment of the present invention, each of the movable rollers (40) and each of the fixed rollers (30) form the angle (θ).

4. Please also refer to Figure 14, which is a schematic diagram of the movement of the movable roller from tilting to horizontal in the second preferred embodiment of the substrate transfer device of the present invention. When the movable roller (40) on the left side is staggered with the fixed roller (30) ) And touch the substrate (3), stop immediately, and wait for the movable roller (40) on the right side to contact the substrate (3), then wait for all the movable rollers (40) to contact the substrate (3), even if After each of the movable rollers (40) is quickly adjusted from the inclined state to the horizontal state, the substrate (3) is raised together; then, each of the movable rollers (40) lifts the substrate (3) away from the inclined platform ( 10), when the movable rollers (40) contact the substrate (3), they will carry the substrate (3) at the same speed, so that the substrate (3) can face away from the inclined platform (10) in a horizontal manner. ) In the direction of movement.

5. Please also refer to Fig. 15, which is a schematic cross-sectional view of the movable roller of the second preferred embodiment of the substrate transfer device of the present invention, where the substrate (3) is lifted by a lower layer transfer mechanism ( 5) Transfer to an inclined platform (10) formed by a plurality of fixed rollers (30), and a plurality of movable rollers (40) are first located in the lower parallel track (2131) under the inclined platform (10), waiting to rise. After the substrate (3) is positioned, please refer to Figure 5. The plurality of movable rollers (40) are simultaneously raised in the rail (213) by the power provided by the drive (214) to carry the substrate (3). ) To the upper parallel track (2131), when the substrate (3) is completely moved to the upper conveying mechanism (4), the lower conveying mechanism (5) transfers the substrate (3) to the inclined platform (10), and at the same time, the Multiple movable rollers (40) move horizontally along the parallel track (2131) to the outermost vertical track (2132), and then descend to the lower parallel track (2131) in sequence, and set a ready position for standby. Finally, wait After the substrate (3) is positioned, the plurality of movable rollers (40) rise again to carry the substrate (3) to the upper parallel rail (2131) to form a circular motion.

According to this, through the arrangement design of movable roller, fixed roller, parallel track and vertical track, the movable roller located in the track can reduce a large amount of displacement time when transferring the substrate, and at the same time, it can also reduce the circulation movement of the transportation device. At the same time, through the different speeds of the movable roller, it can effectively turn the movable roller from tilt to horizontal and stabilize the transfer of the upper and lower substrates.

Furthermore, please refer to FIG. 16, which is a flowchart of a preferred embodiment of a substrate transfer method of the present invention, which is suitable for a preferred embodiment of a substrate transfer device, and provides a substrate transfer method (S10) , Suitable for a substrate transfer device (20) as described in Figures 1 to 11, which at least includes the following steps:

Step a (S11): First, the first fork assembly and the second fork assembly stand by in a preparation position and are parallel to an inclined platform;

Step b (S12): Continuing, when a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, the first fork assembly and the second fork assembly are lifted up and staggered with the inclined platform Continue to rise afterwards;

Step c (S13): Wait until the first fork assembly and the second fork assembly are completely away from the inclined platform;

Step d (S14): The first fork assembly and the second fork assembly rotate from tilt to level, and at the same time, one fork assembly is raised or lowered to the relative position of the other fork assembly through fine adjustment;

Step e (S15): After the first fork assembly and the second fork assembly are parallel, after the first fork assembly and the second fork assembly are transferred upward, when the substrate is transferred away, the first fork assembly The fork assembly and the second fork assembly rotate to be vertical at the same time, separate to the two sides and then descend, the first fork assembly and the second fork assembly are lowered to the preparation position; and

Step f (S16): enter the standby state, and position the substrate after being transferred to the inclined platform by the lower conveying mechanism, and repeat step a to step e.

In an embodiment of the present invention, the step d (S14) further includes that the first fork assembly is finely lowered to the relative position of the second fork assembly through the second lifting mechanism.

In another embodiment of the present invention, the step d (S14) further includes that the second fork assembly is raised to the relative position of the first fork assembly by fine adjustment of the second lifting mechanism.

Accordingly, a substrate transfer method using a fork-type substrate transfer device is provided, whereby the upper and lower substrate transfer actions can be stably performed, and the design of raising or lowering through the second lifting mechanism can be effectively performed accordingly. It avoids the advantages of damage caused by the substrate transfer process.

In addition, please refer to FIG. 18 again, which is a flowchart of the second preferred embodiment of the substrate transfer method of the present invention, which is suitable for the second preferred embodiment of the substrate transfer device, and provides a substrate transfer method (S20) , Suitable for a substrate transfer device (20) as described in Figures 12 to 16, which at least includes the following steps:

Step A (S21): First, a plurality of movable rollers are in the standby position to stand by, and are parallel to the plurality of fixed rollers of the inclined platform;

Step B (S22): Continuing, when a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, the movable rollers are lifted upwards to stagger the fixed rollers of the inclined platform, and then continue to rise ；

Step C (S23): Wait for the plurality of movable rollers to carry and lift the substrate at the same time. When the plurality of movable rollers are completely far away from the inclined platform, the plurality of movable rollers will move at different speeds at the same time. Fine-tune from tilt to level;

Step D (S24): After the movable rollers are parallel, the plurality of vertical rails are raised vertically to the apex of each vertical rail. After the movable rollers rise to the apex, the plurality of movable rollers are provided by the driver Power and self-rotation;

Step E (S25): After the substrate is removed through an upper conveying mechanism, the plurality of movable rollers are laterally displaced to the outermost vertical rail through the upper parallel rail, and fall vertically from the vertical rail to the bottom point of the vertical rail , And move horizontally to the standby position through the parallel track below; and

Step F (S26): enter the standby state, and position the substrate after being transferred to the inclined platform by the lower conveying mechanism, and repeat step A (S21) to step E (S25).

In an embodiment of the present invention, the step C (S23) further includes a plurality of the movable roller trains at different speeds to lower each of the movable rollers from the tilt fine adjustment to the horizontal.

In another embodiment of the present invention, the step C (S23) further includes a plurality of the movable roller trains at different speeds to raise each of the movable rollers from the tilt fine adjustment to the level.

Accordingly, there is provided a substrate transfer method suitable for a bar-type substrate transfer device, which can stably carry out the transfer action of the upper and lower substrates, and is arranged in the parallel track and the vertical track through the movable roller. According to this It can reduce a large amount of displacement time when transferring substrates, and at the same time, it can effectively turn the movable roller from tilt to horizontal through the different speeds of the movable roller and stabilize the transfer of the upper and lower substrates.

As can be seen from the above implementation description, compared with the prior art and products, the present invention has the following advantages:

1. The tilting platform of the present invention and the substrate transfer device prepared therewith are mainly designed by arranging a tilting platform with a tilt angle on the base of the substrate transfer device, which effectively leaves the wet process on the surface while transferring the substrate The liquid medicine can slide down along the inclination angle, so that the substrate will not be harmful to the surface due to the residue of the chemical liquid during the transfer process, and it does achieve the main advantages of maintaining and improving the quality of the transferred substrate.

In summary, the inclined platform and substrate transfer device of the present invention can indeed achieve the expected use effect through the above-disclosed embodiments, and the present invention has not been disclosed before the application, since it is in full compliance with the patent law. Regulations and requirements. If you file an application for a patent for invention in accordance with the law, you are kindly requested to review and grant a quasi-patent, it will be more virtuous.

However, the above-mentioned illustrations and descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Anyone familiar with the art will do other things based on the characteristic scope of the present invention. Equivalent changes or modifications should be regarded as not departing from the design scope of the present invention.

(10): Tilting platform (11): Long side (12): Short side (13): Conveying roller (131): Guide roller (20): Substrate transfer device (21): Pedestal (211): The first support wall (212): The second support wall (213): Orbit (2131): Parallel orbit (2132): vertical track (214): drive (22): The first lifting mechanism (221): The first lifting track (222): First Lifting Drive (23): Transverse mechanism (231): traverse track (232): traverse drive (24): The second lifting mechanism (241):Second Lifting Track (242): Second lift drive (25): The first fork assembly (251): first shaft (252): The first fork (2521): The first fork (26): The second fork assembly (261): second shaft (262):Second Fork (2621): The second fork (27): Rail (271): Rail track (30): Fixed roller (40): Movable scroll wheel (3): Substrate (4): Upper conveying mechanism (5): Lower conveying mechanism (S10): Substrate transfer method (S11)~(S16): Step a~Step f (S20): Substrate transfer method (S21)~(S26): Step A~Step F (θ): included angle

Figure 1: A perspective view of the overall device of a preferred embodiment of the substrate transfer device of the present invention; Figure 2: A cross-sectional view of the overall device of a preferred embodiment of the substrate transfer device of the present invention; Figure 3: A schematic diagram of substrate placement in a preferred embodiment of the substrate transfer device of the present invention; Figure 4: A schematic diagram of the start of device operation of a preferred embodiment of the substrate transfer device of the present invention; Figure 5: A schematic diagram of the staggered tilting platform of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention; Figure 6: a schematic diagram of the action of the substrate and fork assembly of a preferred embodiment of the substrate transfer device of the present invention; Fig. 7: A schematic diagram of the horizontal lifting of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention; Fig. 8: A schematic diagram of a preferred embodiment of the substrate transfer device of the present invention with the fork assembly carrying substrate raised to the apex; Figure 9: A schematic diagram of an approaching upper layer transport mechanism of a preferred embodiment of the substrate transport device of the present invention; Figure 10: a schematic diagram of the rotation of the fork assembly of a preferred embodiment of the substrate transfer device of the present invention; Figure 11: A three-dimensional view of the overall device of the second preferred embodiment of the substrate transfer device of the present invention; Figure 12: A cross-sectional view of the overall device of the second preferred embodiment of the substrate transfer device of the present invention; Figure 13: A schematic diagram of the movable roller in the ready position of the second preferred embodiment of the substrate transfer device of the present invention; Figure 14: A schematic diagram of the action of the movable roller of the second preferred embodiment of the substrate transfer device of the present invention from tilting to horizontal; Figure 15: Another perspective cross-sectional schematic view of the movable roller lifting of the second preferred embodiment of the substrate transfer device of the present invention; Figure 16: A flowchart of a preferred embodiment of the substrate transfer method of the present invention; and Figure 17: A flowchart of the second preferred embodiment of the substrate transfer method of the present invention.

(10): Tilting platform

(11): Long side

(12): Short side

(13): Conveying roller

(131): Guide roller

(20): Substrate transfer device

(21): Pedestal

(22): The first lifting mechanism

(221): The first lifting track

(222): First Lifting Drive

(23): Transverse mechanism

(231): traverse track

(232): traverse drive

(24): The second lifting mechanism

(241):Second Lifting Track

(242): Second lift drive

(25): The first fork assembly

(251): first shaft

(252): The first fork

(2521): The first fork

(26): The second fork assembly

(261): second shaft

(262):Second Fork

(2621): The second fork

(27): Rail

Claims (23)

An inclined platform is suitable for a substrate transfer device (20), wherein the substrate transfer device (20) includes at least a base (21), and the main feature is that the inclined platform (10) is arranged on the base (21), and an included angle (θ) is interposed between the inclined platform (10) and the base (21); wherein the included angle (θ) is between 3 degrees and 10 degrees. The inclined platform according to claim 1, wherein the base (21) is composed of two long sides (11) and two short sides (12). The inclined platform as described in claim 2, further comprising a plurality of conveying rollers (13), each of the conveying rollers (13) forms the included angle at different heights along the two long sides (11) of the base (21) (θ) configuration and parallel setup. The inclined platform according to claim 3, wherein each of the conveying rollers (13) is provided with a plurality of guide rollers (131). A substrate transmission device at least includes: an inclined platform (10) as described in any one of claims 1 to 4; at least one first lifting mechanism (22) arranged on the base (21) And located on a side of the inclined platform (10), the first lifting mechanism (22) includes at least two first lifting rails (221), and a first lifting rail (221) arranged at one end of the first lifting rail (221) A first lifting driver (222); and at least one traverse mechanism (23), the traverse mechanism (23) is arranged in the first lifting rail (221) of the first lifting mechanism (22) and is 90 Degree configuration, and the traverse mechanism (23) includes at least one traverse rail (231), and a traverse drive (232) arranged at one end of the traverse rail (231); at least one second lift Mechanism (24), the second lifting mechanism (24) is arranged in the lateral movement rail (231) of the lateral movement mechanism (23) and arranged at 90 degrees, and the second lifting mechanism (24) is connected to The first The lifting mechanism (22) is arranged in parallel, wherein the second lifting mechanism (24) includes at least one second lifting rail (241), and a second lifting rail (241) arranged at one end of the second lifting rail (241) Driver (242); a first fork assembly (25) is set on the second lifting mechanism (24), the first fork assembly (25) includes an embedded in the second lifting mechanism (24) The first rotating shaft (251) of the second lifting rail (241); a second fork assembly (26) is arranged on the traverse mechanism (23), and the second fork assembly (26) includes a It is embedded in the second rotating shaft (261) of the traverse rail (231). The substrate transmission device according to claim 5, wherein the first lifting rail (221), the traverse rail (231) and the second lifting rail (241) are each further provided with a belt, a chain, a gear, and a slide. Transmission components of rails, spirals or screw elements. According to the substrate transmission device of claim 5, the first fork assembly (25) further includes a first fork frame (252) disposed at one end of the first rotating shaft (251), and a plurality of roots and the first fork frame (252) A fork frame (252) has a first fork (2521) vertically arranged, and a plurality of the first forks (2521) are arranged side by side with each other. According to the substrate transmission device of claim 5 or 7, the second fork assembly (26) further includes a second fork frame (262) arranged at one end of the second rotating shaft (261), and a plurality of The second forks (2621) are vertically arranged on the second fork frame (262), and a plurality of the second forks (2621) are arranged side by side with each other. The substrate transmission device according to claim 8, wherein the inclined platform (10) transmits at least one substrate (3) by a rotation speed. The substrate transmission device according to claim 9, wherein an upper conveying mechanism (4) further receives the substrate (3) against the first fork assembly (25) and the second fork assembly (26). The substrate transmission device according to claim 9, wherein two guide rails (27) are further provided on both sides of the traverse mechanism (23), and each guide rail (27) is further provided with a guide rail (271), the guide rail The rail (271) enables the traverse mechanism (23) to enter and move up and down. The substrate transmission device according to claim 8, wherein the second lifting mechanism (24) is provided at the other end of the first rotating shaft (251) of the first fork assembly (25). The substrate transmission device according to claim 8, wherein the second lifting mechanism (24) is provided at the other end of the second rotating shaft (261) of the second fork assembly (26). A substrate transmission method, suitable for a substrate transmission device (20) according to any one of claims 5 to 13, which at least includes the following steps: Step a (S11): First, a first fork assembly and a second fork The fork assembly is on standby in a ready position and is parallel to an inclined platform; step b (S12): continue, when a substrate is transferred to the inclined platform through the lower-level conveying mechanism and positioned, then the first fork assembly and the The second fork assembly is lifted up and interlaced with the inclined platform before continuing to rise; Step c (S13): Wait until the first fork assembly and the second fork assembly are completely away from the inclined platform; Step d (S14 ): The first fork assembly and the second fork assembly rotate from tilt to level, and at the same time, one fork assembly rises or drops to the relative position of the other fork assembly through fine adjustment; step e (S15): wait for the After the first fork assembly and the second fork assembly are parallel, after the first fork assembly and the second fork assembly are transferred upward, when the substrate is transferred away, the first fork assembly and the second fork assembly The fork assembly rotates to be vertical at the same time, separates to both sides and then descends, the first fork assembly and the second fork assembly are lowered to the preparation position; and Step f (S16): enter the standby state, and position the substrate after being transferred to the inclined platform by the lower conveying mechanism, and repeat step a to step e. The substrate transmission method according to claim 14, wherein the step d (S14) further includes that the first fork assembly is finely lowered to the relative position of the second fork assembly through the second lifting mechanism. The substrate transmission method according to claim 14, wherein the step d (S14) further includes that the second fork assembly is raised to the relative position of the first fork assembly through the fine adjustment of the second lifting mechanism. A substrate transmission device at least includes: an inclined platform (10) as described in any one of claims 1 to 4; wherein the two short sides (12) of the base (21) are respectively provided with a first A supporting wall (211) and a second supporting wall (212), the first supporting wall (211) and the second supporting wall (212) are connected by at least one rail (213), the rail (213) is It includes two parallel rails (2131) and a plurality of vertical rails (2132), and the bottom of the base (21) is provided with a driver (214); the conveying roller (13) of the inclined platform (10) is a plurality of The fixed rollers (30), a plurality of the fixed rollers (30) are connected obliquely between the first support wall (211) and the second support wall (212), and are respectively on the vertical rails (2132) Parallel rails (2131) on two sides and close to the bottom, wherein the fixed rollers (30) are inclined and arranged parallel to each other to form the inclined platform (10); and a plurality of movable rollers (40) are parallel to each other and arranged on Between the first supporting wall (211) and the second supporting wall (212), and the two sides of the movable roller (40) are respectively embedded in the first supporting wall (211) and the second supporting wall (212) in the track (213), and the movable rollers (40) can be moved in the track (213) at the same time. The substrate transmission device according to claim 17, wherein the track (213) is a transmission assembly provided with a belt, a chain, a gear, a slide rail, a screw or a screw element. The substrate transmission device according to claim 17, wherein the driver (214) provides a power to make the plurality of movable rollers (40) rotate by themselves, and simultaneously drives the movable rollers (40) on the track (213) ) To move within. The substrate transfer device according to claim 17, wherein a plurality of the fixed rollers (30) and a plurality of the movable rollers (40) are arranged in a cross. A substrate transfer method, suitable for a substrate transfer device (20) according to any one of claims 17 to 20, which at least includes the following steps: Step A (S21): First, a plurality of movable rollers are in standby positions, And parallel to the plurality of fixed rollers of the inclined platform; Step B (S22): continue, when a substrate is transferred to the inclined platform through the lower layer conveying mechanism and positioned, then the plurality of movable rollers are lifted up to stagger the inclined platform After the plurality of the fixed rollers, continue to rise; Step C (S23): Wait for the plurality of the movable rollers to simultaneously carry and lift the substrate, and when the plurality of the movable rollers are completely away from the inclined platform, the plurality of the movable rollers is At different speeds, each of the movable rollers will be fine-tuned from inclination to horizontal at the same time; Step D (S24): After the movable rollers are parallel, then a plurality of vertical rails are raised vertically to the vertex of each vertical rail, After each of the movable rollers rises to the apex, the plurality of movable rollers are powered by the driver and rotate by themselves; Step E (S25): When the substrate is removed through an upper conveying mechanism, the plurality of movable rollers pass through the upper parallel The track is displaced laterally to the outermost vertical track, descends vertically from the vertical track to the bottom point of the vertical track, and moves laterally through the lower parallel track to the standby position; and Step F (S26): enter the standby state, and position the substrate after being transferred to the inclined platform by the lower conveying mechanism, and repeat step A (S21) to step E (S25). The substrate transfer method according to claim 21, wherein the step C (S23) further includes a plurality of the movable rollers at different speeds, and at the same time, the movable rollers are lowered from the tilt fine adjustment to the horizontal. The substrate transfer method according to claim 21, wherein the step C (S23) further includes a plurality of the movable roller systems at different speeds, and at the same time, each of the movable rollers is raised from the tilt fine adjustment to the level.

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