CN106827274A

CN106827274A - Silicon rod intercept unit and silicon rod method for cutting

Info

Publication number: CN106827274A
Application number: CN201710214806.4A
Authority: CN
Inventors: 卢建伟; 潘雪明
Original assignee: Shanghai Nissin Machine Tool Co Ltd
Current assignee: Zhejiang Ji Ying Precision Machinery Co., Ltd.
Priority date: 2017-04-01
Filing date: 2017-04-01
Publication date: 2017-06-13

Abstract

The application provides a kind of silicon rod intercept unit and silicon rod method for cutting, and the silicon rod intercept unit includes：Work transfer device, MATERIAL CUTTING system and Workpiece tilting device, the silicon rod to be blocked of the first laying state is delivered to using work transfer device blocks station, carry out truncation to form silicon rod intercept by the silicon rod for blocking station is located at by MATERIAL CUTTING system, silicon rod intercept after being blocked by Workpiece tilting device is overturn to the second laying state by the first laying state, so that the silicon rod intercept after to blocking is shifted or inloading part, improve the cutting efficiency of silicon rod and be easy to the transfer of the silicon rod after blocking.

Description

Silicon rod intercept unit and silicon rod method for cutting

Technical field

The application is related to the silicon rod intercept unit and silicon rod of line cutting technology field, more particularly to a kind of application silicon rod to cut Disconnected method.

Background technology

When various semiconductors, photovoltaic device is manufactured, by the semiconductor comprising hard brittle materials such as silicon, sapphire or ceramics Work piece cut operation is the chip of requirement thickness.It is because chip cutting is the important procedure that restricts follow-up finished product thus right Its job requirements also more and more higher.At present, multi-wire cutting technology due to production efficiency it is high, operating cost is low, homework precision High the features such as, it is widely used in the production of the crystal-cut of industry.

Multi-wire cutting technology is crystal-cut technology relatively advanced in the world at present, and its principle is by high-speed motion Diamond wire treat operation crystalline silicon workpiece and carry out cutting and form target product.By taking silicon rod cutting as an example, usually, work substantially Industry operation includes：First silicon rod long originally is carried out blocking operation using shear and form the short silicon rod of multistage, after the completion of blocking, Again using excavation machine to blocking after short silicon rod carry out forming monocrystalline silicon cube after evolution operation, subsequently reuse slicer to silicon Cube finished product carries out section operation, then obtain silicon chip.Wherein, silicon rod is being carried out to block in operation, correlation technique blocks efficiency It is relatively low, and the transfer of the silicon rod after blocking there is also inconvenience.

The content of the invention

Disadvantages in view of the above, the purpose of the application is to disclose a kind of silicon rod intercept unit and silicon rod is blocked Method, the problems such as solving low cutting efficiency present in correlation technique and inconvenient Workpiece transfer.

To achieve the above object and other purposes, the application discloses a kind of silicon rod intercept unit on the one hand, including：Workpiece Conveying device, station is blocked for the silicon rod to be blocked of the first laying state to be delivered to；MATERIAL CUTTING system, including at least Two cutting rollers and line of cut, the line of cut are around at least two cutting rollers to form MATERIAL CUTTING section；Workpiece turning Device, is connected the work transfer device, for that will block after silicon rod overturn to the second laying state by the first laying state.

Silicon rod intercept unit disclosed in the present application, including：Work transfer device, MATERIAL CUTTING system and workpiece turning , be delivered to for the silicon rod to be blocked of the first laying state using work transfer device block station, by MATERIAL CUTTING system by device Uniting will carry out truncation to form silicon rod intercept positioned at the silicon rod blocked at station, the silicon after being blocked by Workpiece tilting device Rod intercept is overturn to the second laying state by the first laying state, so that the silicon rod intercept after to blocking is shifted or inloading part, The cutting efficiency for improving silicon rod and the transfer for being easy to the silicon rod after blocking.

In some embodiments, the work transfer device includes being used to carry silicon rod to be blocked and drive to wait to block The conveying assembly that is axially conveyed of silicon rod and the control assembly for controlling the bearing assembly.

In some embodiments, the work transfer device also includes：Axle center governor motion, for by the silicon rod Axle center is tuned into horizontality.

In some embodiments, the Workpiece tilting device includes：Flip piece, for carrying the silicon rod after blocking and inciting somebody to action The silicon rod is overturn to the second laying state by the first laying state；Locating part, on the flip piece, after to blocking Silicon rod give it is spacing.

In some embodiments, the locating part includes：Lifting seat, liftably on flip piece；Pressing block or Pressboard, on the lifting seat.

In some embodiments, the flip piece is to complete to overturn by switching mechanism, and the switching mechanism includes： Rotating shaft and the motor of the driving axis of rotation.

In some embodiments, the silicon rod intercept unit also includes Workpiece transfer device, for by the silicon after cutting Rod is shifted.

In some embodiments, the Workpiece transfer device includes：Walk guide rail, is layed in and blocks station and target work Between position；Workpiece stage, walks on guide rail located at described, for carry the silicon rod after the blocking of the second laying state and will described in Silicon rod is transferred to aiming station.

In some embodiments, the silicon rod intercept unit also includes inloading part mechanism, is given for the silicon rod after blocking With inloading part.

The application provides a kind of silicon rod method for cutting on the other hand, including：By the silicon to be blocked of the first laying state Rod is delivered to and blocks station；Silicon rod to be blocked to blocking on station carries out blocking operation；Silicon rod after blocking is by turning over Turn to be overturn to the second laying state by the first laying state.

Silicon rod method for cutting disclosed in the present application, including：First the silicon rod to be blocked in the first laying state is carried out Block operation, after will block after silicon rod by upset overturn to the second laying state, for blocking by the first laying state Silicon rod intercept afterwards is shifted or inloading part, is improved the cutting efficiency of silicon rod and is easy to the transfer of the silicon rod after blocking.

Brief description of the drawings

Fig. 1 is schematic perspective view of the application silicon rod intercept equipment in an implementation method under the first visual angle.

Fig. 2 is schematic perspective view of the application silicon rod intercept equipment in an implementation method under the second visual angle.

Fig. 3 is the schematic flow sheet in one embodiment of the application silicon rod intercept method.

The schematic flow sheet in one embodiment of the silicon rod wire cutting method that Fig. 4 is applied by the application.

Fig. 5 to Figure 10 is shape of the silicon rod wire cutting method in execution work piece cut operation process in a certain example in Fig. 4 State schematic diagram.

Specific embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

Refer to Fig. 1 to Figure 10.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., only uses To coordinate the content disclosed in specification, so that those skilled in the art understands and reads, being not limited to the application can The qualifications of implementation, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size It is whole, in the effect for not influenceing the application can be generated and under the purpose to be reached, all should still fall in skill disclosed herein In the range of art content is obtained and can covered.Meanwhile, in this specification it is cited as " on ", D score, "left", "right", " centre " and The term of " one " etc., is merely convenient to understanding for narration, and is not used to limit the enforceable scope of the application, its relativeness It is altered or modified, under without essence change technology contents, when being also considered as the enforceable category of the application.

Fig. 1 and Fig. 2 is referred to, the application silicon rod intercept unit structural representation in one embodiment is shown as, its In, Fig. 1 is schematic perspective view of the application silicon rod intercept unit under the first visual angle, and Fig. 2 exists for the application silicon rod intercept unit Schematic perspective view under first visual angle.The application silicon rod intercept unit can be used for silicon ingot or silicon comprising polysilicon or monocrystalline silicon The semiconductor workpiece of the hard brittle materials such as rod, sapphire, glass or ceramics carries out cutting operation, with cut into close rule structure (or Person says that removal does not meet the part of specification), such as a example by cutting silicon single crystal rod, silicon single crystal rod implementation is blocked operation and is generally comprised To silicon rod long originally block operation to form the short silicon rod of multistage, after the completion of blocking, then to blocking after short silicon rod carry out Following process treatment or transfer or inloading part.In the examples below, we select the cutting operation of siliceous crystalline silicon workpiece Be explained, the crystalline silicon workpiece both can be silicon single crystal rod can also polycrystalline silicon rod, the protection model of the application should be belonged to Enclose.

With reference to Fig. 1 and Fig. 2, the application silicon rod intercept unit is implemented in a silicon rod linear cutting equipment, the silicon rod line Cutting equipment includes：Frame 1, cabling system, diced system 5, wherein, diced system 5 is compound diced system, can be at least real Existing MATERIAL CUTTING and evolution cutting.The application silicon rod intercept equipment includes：Work transfer device, MATERIAL CUTTING system, Yi Jigong Part turning device.

Frame 1 be for setting many silicon rod intercept units work necessary devices, such as mechanical mechanism, electric control system and The carrier of numerical control device.

Cabling system is then provided in frame 1.In the present embodiment, cabling system includes being received via wire storage tube 31 The multiple guide rollers 35 put the line of cut 33 of operation and be oriented to for the carrying out to line of cut 33.Certainly, the cabling system is also May include tensioning wheel of the adjustment tension force of line of cut 33 etc..

The tensioning wheel is used to detect the tension force of line of cut, it is possible to reduce the outage probability of line of cut, reduces consumptive material.Cutting Cut in operation, the effect of line of cut 33 holds the balance, even if but best line of cut, its ductility and abrasion resistance are also limited , that is to say, that line of cut can be tapered in reciprocating motion, until being finally pulled off.Therefore, present silicon rod is blocked and set It is standby typically all to design line of cut tension force compensation mechanism, for making up the ductility during line of cut goes and back running, using tensioning wheel It is a kind of implementation means, its implementation can use (the denomination of invention of Chinese patent 200910199387.7：Diamond wire squaring The tension adjustment mechanism of machine) described in tension adjustment mechanism；Also can be using such as (the invention name of Chinese patent 201210037692.8 Claim：Two-way diamond wire silicon rod shear) described in by wire storage tube will cut line tension absorb mode；Can also be using China (the denomination of invention of patent 201410245524.7：Many silicon rod intercept units and its tension adjustment mechanism) described in real-time sensing lead Draw the tension force of diamond wire between the tension force and traction component and cutting area of line of cut between component and wire storage tube (reel) simultaneously Tension force and the tension force of the diamond wire of cutting area that can be according to the tension value of sensing respectively to the diamond wire on reel be adjusted Whole mode.

Line of cut 33 can be steel wire, it is also possible to be to be embedded on cutting steel wire to be formed by the small grit of diamond etc. Diamond wire, it would however also be possible to employ such as (the denomination of invention of Chinese patent 201620281204.1：Diamond wire and many silicon rod intercept units) Described in diamond wire, i.e. the diamond wire includes：Steel wire, the steel wire is divided into spaced at least two class cutting sections； Plating respectively is located at least two diamond-like rock layers of at least two class cutting sections, and the particle series of each diamond layer is different.

In the specific embodiment for electing diamond wire as, to avoid being wrapped in the diamond wire on wire storage tube because high speed cabling is produced Inevitable friction and cause abrasion, winding of the diamond wire on wire storage tube can be preferably winding of single layer.For Canoe of the diamond wire on wire storage tube, can use (the denomination of invention of Chinese patent 200910197800.6：Diamond wire is blocked The wire storage tube Pai Si mechanisms of machine) described in wire storage tube Pai Si mechanisms.

Guide roller 35 is used to guide line of cut 33, and in specific implementation, guide roller 35 may include laterally to lead Line wheel, longitudinal guide roller and oblique guide roller etc., they can be arranged on according to the cabling mode of line of cut 33 when mounted With effect of realization guiding line of cut 33 on different mounting structures.

Diced system 5 is liftably arranged in frame 1.In the present embodiment, diced system 5 include lifting coil holder 51 with And the multiple cutting rollers on lifting coil holder 51 are arranged on, wherein, lifting coil holder 51 can make elevating movement with respect to frame 1, described Multiple cutting rollers form first and cut roller group and the second cutting roller group.

Fig. 1 and Fig. 2 is referred to, in the present embodiment, the first cutting roller for cutting roller group will be formed and be designated 531, by shape Cutting roller into the second cutting roller group is designated 532, and the line of cut between the first cutting roller group forms MATERIAL CUTTING section 533, the line of cut between the second cutting roller group forms evolution cut length 534, and MATERIAL CUTTING section 533 is used for workpiece (work Part may be, for example, silicon rod) carry out blocking operation, evolution cut length 534 is then used to open workpiece (workpiece may be, for example, silicon rod) Fang Zuoye.In addition, from Fig. 1 and Fig. 2, guide roller 35 can both set and wire storage tube 31 and tensioning wheel are adjacent in frame 1, The cutting roller 531 that is adjacent in the first cutting roller group can be arranged on lifting coil holder 51 and be adjacent in the second cutting roller group Cutting roller 532.In the present embodiment, the MATERIAL CUTTING system in the application silicon rod intercept equipment, then be to include the first cutting At least two cutting rollers 531 and line of cut 33 in roller group, wherein, line of cut 33 is around at least two cutting rollers 531 to be formed MATERIAL CUTTING section 533.

In an alternative embodiment, lifting coil holder 51 can be liftably arranged in frame 1 by an elevating mechanism, described Elevating mechanism may include that the screw body (not shown) driven by lifting motor (not shown), riser guide and lifting are slided The achievable lifting coil holder 51 such as block carries out the mechanism of vertical deviation, wherein, riser guide is vertically arranged in frame 1, and lifting is slided Block is arranged at the back of lifting coil holder 51 and is engaged with riser guide.In lifting motor, (the upgrading motor may be, for example, servo Motor) and the driving of screw mandrel under, be capable of achieving lifting coil holder 51 lifted in frame 1 by riser guide and lifting slider.For liter The mechanism for dropping the vertical deviation of coil holder 1 also see the (denomination of invention of Chinese patent 200910197802.5：With column-type frame Diamond wire cutting machine) in using rotate by motor when drive screw mandrel rotation, by screw mandrel drive it is described lift coil holder or Referred to as cutting roll stand rises or falls.

The application silicon rod intercept unit also includes workbench 2.In the present embodiment, workbench 2 is blocked at least provided with workpiece Station and workpiece evolution station, wherein, blocked in workpiece and work transfer device 4 can be set at station.Work transfer device 4 is used for Workpiece to be blocked is delivered to workpiece with the first laying state and is blocked station.So that workpiece is as silicon rod as an example, workpiece is adopted First laying state refers to silicon rod 90 and uses laterally disposed state, i.e. the axis of silicon rod 90 be the level of state or It is similar to horizontality.Silicon rod 90 can be driven to be conveyed axially along using work transfer device 4.

In actual applications, work transfer device 4 is included for carrying silicon rod 90 to be blocked and driving silicon to be blocked The conveying assembly that rod 90 is axially conveyed and the control assembly for controlling the bearing assembly.In one embodiment, The conveying assembly can be using conveying belt component, and the transfer tape assemble may include that transmission chain 42 and interval are laid in conveyer chain Multiple load bearing units 44 on bar 42, each load bearing unit 44 can use such as pair of rollers structure, further, each rolling Wheel may include base 41 to structure and be arranged at two rollers 43 of the opposite sides of base 41, and roller 43 is for directly connecing Touch in the silicon rod 90 for carrying.Two rollers 43 can be vertically arranged it is also angled set, in the mode of angled setting, rolling Wheel 43 angled by roller installing plate can be more arranged on base 41.The control assembly then may include the He of drive gear 46 Motor (not shown), drive gear 46 may be placed at the opposite sides of driving chain 42, and drive gear 46 can be with transmission Chain 42 is meshed, in this way, drive gear 46 rotates to drive the driving chain 42 of engagement under the driving of motor Advance, in this way, the silicon rod 90 that load bearing unit 44 is carried on driving chain 42 is with regard to axially carrying out conveying until reach distance symbol Close sets requirement or reach precalculated position.Above-mentioned work transfer device 4 is only an exemplary illustration, is not intended to limit the application Protection domain.For example, also see Chinese patent 201610345643.9. for the work transfer device of the conveying of silicon rod 90 (denomination of invention：Silicon rod shear and method for cutting) it is middle using roll wheel assembly and the electric machine assembly for controlling roll wheel assembly, Roll wheel assembly includes multiple pairs of rollers, and each pair of rollers includes two rollers of two rollers and connection being oppositely arranged Rotary shaft, is rotated, using frictional force between roller and silicon rod, by rolling using the roller in electric machine assembly driving rolls component Wheel is rotated and drives silicon rod to be conveyed vertically to rub.Further, in other embodiments, the conveying assembly can also use example Such as the conveyer belt with larger frictional force, is moved forward using the silicon rod 90 to be blocked on conveyer belt driving conveying belt.As it was previously stated, MATERIAL CUTTING section 533 in diced system 5 is used to that the silicon rod 90 as workpiece to be carried out blocking operation, therefore, MATERIAL CUTTING section 533 is usually to be right against the silicon rod 90 to be blocked that work transfer device 4 is carried, and normally, MATERIAL CUTTING section 533 is to be located at The top of work transfer device 4 and block position corresponding to silicon rod 90 to be blocked.

In addition, work transfer device 4 may also include axle center governor motion (not shown), described axle center governor motion is used for The axle center of silicon rod 90 is tuned into horizontality.For example, also see Chinese patent for the mechanism of the horizontal aligning of silicon rod 90 201610658675.4 (denominations of invention：Workpiece level core-regulating mechanism and horizontal aligning method, workpiece intercept unit) middle use turn Activity supporting point structure, rotating drive mechanism and level detection device, detect Workpiece carrier platform and are carried in level detection device Workpiece axle center be in non-standard state when, you can using rotating drive mechanism drive Workpiece carrier platform around rotating fulcrum knot Structure rotates to adjust the levelness in the axle center of workpiece, it is ensured that the axle center of workpiece is horizontality.

In the present embodiment, the quantity of MATERIAL CUTTING section 533 can be at least one (that is, the first cutting roller in diced system 5 Group include a cutting roller to), as a example by one, then, in diced system 5, be configured with and block mounting bracket 51, blocking peace Two cutting rollers 53 (the two cutting rollers 53 constitute a cutting roller to) that spacing is set on 51 are shelved, two cutting rollers are around in Line of cut between 53 is to form MATERIAL CUTTING section 533.Usually, MATERIAL CUTTING section 533 is right relative to work transfer device 4 Answer position to be and block position, in the present embodiment, can be using such design：By cutting corresponding to MATERIAL CUTTING section 533 Disconnected position is set as the end in work transfer device 4, i.e. the end in work transfer device 4 is (in the following description, This end is thus referred to as truncated end) it is the lower section for being located exactly at MATERIAL CUTTING section 533, in this way, phase in silicon rod 90 to be blocked For the truncated end of work transfer device 4, that part of protrusion will be truncated formation after the cutting of cut length 533 is blocked Silicon rod intercept 91.Certainly, blocking position can not also make other changes, still fall within the protection domain of the application.Furthermore, when blocking The quantity of cut length 533 for it is multiple when (that is, the first cutting roller group include multiple cutting rollers to), then multiple peaces can be provided with Shelve, the spacing of two neighboring mounting bracket is then set to block the length of the silicon rod intercept to be formed, on work transfer device 4 The multiple being then provided with corresponding to each MATERIAL CUTTING section 533 blocks position, so that silicon rod 90 to be blocked on work transfer device 4 Blocked according to preset length.

In addition, work transfer device 4 may also include locating part 45, on workbench 2 or frame 1, blocked for treating Workpiece carry out it is spacing.So that workpiece is silicon rod 90 as an example, locating part 45 more may include：The liftably lifting in frame 1 Seat and pressing block or pressboard on lifting seat.In actual applications, when need on work transfer device 4 waiting cut When disconnected silicon rod 90 carries out spacing, lifted in frame by motor (such as servomotor) or manually operated driving lifting seat 1 simultaneously moves towards silicon rod 90 to be blocked, until pressing block or pressboard can be suppressed in silicon rod 90 with certain press power, it is to avoid The unstable starts such as silicon rod 90 occurs for example to roll, autorotation.Realization for locating part 45 is lifted in the lifting of frame 1 Mechanism then refer to it is foregoing realize the description that lifting coil holder 51 lifts elevating mechanism in frame 1, certainly, due to 45 liters of locating part The purpose dropped in frame 1 is essentially consisted in and is limited in silicon rod 90, and its requirement to precision is the lifting essence for being slightly inferior to lift coil holder 51 Degree requirement, therefore, the realization for locating part 45 lifts the elevating mechanism in frame 1 relatively with bigger structure or component choosing Selecting property.In other embodiments, locating part 45 can also use clamping limb or cuff.

Workbench 2 is additionally provided with workpiece turning station, and the workpiece turning station is to be adjacent to workpiece to block station.Cutting system System 5 also includes Workpiece tilting device 6, the linking work transfer device 4 of Workpiece tilting device 6, for that will block after workpiece by the One laying state is overturn to the second laying state so that the workpiece after blocking in the second laying state is located at workpiece turning work Position.In the present embodiment, still by taking silicon rod as an example, the workpiece that Workpiece tilting device 6 is used for after blocking places shape to workpiece 9 by first State is overturn to the second laying state so that the workpiece after blocking in the second laying state is located at workpiece turning station, specifically Refer to：The silicon rod 90 that Workpiece tilting device 6 is used for after blocking is overturn to vertical laying state by laterally disposed state so that Workpiece after blocking in vertical laying state is located at workpiece turning station.

Therefore, Workpiece tilting device 6 more may include flip piece 61 and locating part 63.After flip piece 61 is blocked for carrying Workpiece is simultaneously overturn to the second laying state the workpiece after described blocking by the first laying state.Locating part 63, turns over located at described Turn on part 61, give for the workpiece after to blocking it is spacing, to ensure the workpiece after blocking when being reversed part 61 and being overturn It is firm.Further：Flip piece 61 more may include：Bearing 611, on workbench 2；Upset loading plate 613, can be by example As rotary shaft is rotationally connected with bearing 611 to make rotary movement relative to bearing 611.Locating part 63 more may include：Liftable Lifting seat of the ground on upset loading plate 613 and pressing block or pressboard on lifting seat.In other embodiment In, locating part 63 can also use clamping limb or cuff.

In actual applications, still by taking silicon rod 90 as an example, when needing using 6 pairs of silicon being carried on after blocking of Workpiece tilting device When rod intercept 91 carries out rotary movement, first, by motor (such as servomotor) or manually operated driving locating part 63 In lifting seat lift in upset loading plate 613 and towards the movement of silicon rod intercept 91 after blocking until compacting in locating part 63 Block or pressboard can be suppressed in silicon rod intercept 91 with certain press power；Then, by motor (such as servomotor) or It is manually operated drive upset loading plate 613 and the relative seat 611 of locating part 63 make rotary movement (for example, upset loading plate 613 by Horizontality is overturn to vertical state) so that the silicon rod intercept 91 carried on upset loading plate 613 is driven by laterally disposed state Upset is to vertical laying state and is vertically positioned at workpiece turning station；Subsequently, by motor (such as servomotor) Or the manually operated lifting seat and pressing block driven in locating part 63 or pressboard lift the silicon in bearing 611 and after blocking Rod intercept 91 is discharging silicon rod intercept 91.For locating part 63 realization lift in upset loading plate 613 elevating mechanism then may be used The description that locating part 45 lifts the elevating mechanism in frame 1 is realized with reference to foregoing, be will not be repeated here.Drive upset loading plate 613 make rotary movement, then rotated using motor (such as servomotor) or manually operated driving rotary shaft, by rotary shaft Rotate to drive upset loading plate 613 to make rotary movement.

The application silicon rod intercept unit is also provided with Workpiece transfer device, at least for workpiece to be turned from workpiece turning station Deliver to workpiece positional stations.

As shown in Fig. 2 in the present embodiment, on workbench 2, Workpiece transfer device 7 is further included Workpiece transfer device 7 X direction guiding rails 71, Y-direction guide rail 73 and the workpiece stage 75 that can be advanced on the X direction guiding rails 71 or Y-direction guide rail 73.In one kind In alternative embodiment, for Workpiece transfer device 7, X direction guiding rails 71 are fixed and are layed on workbench 2, and Y-direction guide rail 73 is slided and set On X direction guiding rails 71, workpiece stage 75 is slidedly arranged on Y-direction guide rail 73, and workpiece stage 75 is led by X direction guiding rails 71 and Y-direction Rail 73 and make planar movement in workbench 2.More specifically, X direction guiding rails are fixed being layed on workbench 2, the lower section of X direction guiding rails 71 It is provided with pillow platform 72.Y-direction guide rail 73 is slidedly arranged on X direction guiding rails 71, and Y-direction guide rail 73 is disposed on slide 74, and the bottom of slide 74 sets There is the sliding block 741 coordinated with X direction guiding rails 71.Workpiece stage 75 is slidedly arranged on Y-direction guide rail 73, and the bottom of workpiece stage 75 is provided with The sliding block 751 coordinated with Y-direction guide rail 73.Workpiece stage 75 makees plane by X direction guiding rails 71 and Y-direction guide rail 73 in workbench 2 It is mobile, more specifically refer to：Slide 74 and Y-direction guide rail 73 and workpiece stage 75 are realized along X direction guiding rails 71 to shift mechanism by X Mobile, work microscope carrier 75 is to realize being moved along Y-direction guide rail 73 by Y-direction shift mechanism.X is to shift mechanism in a kind of optional reality Applying example includes：Motor, gear and tooth bar, the tooth bar can be laid along X direction guiding rails 71, and the gear is arranged at The bottom of slide 74 and engaged with the tooth bar, drive the pinion rotation can be with the edge of slide 74 with this by the motor X direction guiding rails 71 to move.X includes to shift mechanism in another alternative embodiment：Motor and screw mandrel, the screw mandrel can Laid along X direction guiding rails 71, the motor can drive leading screw to rotate, driven by screw mandrel rotation slide 74 along X to Guide rail 71 is moved.Y-direction shift mechanism includes in a kind of alternative embodiment：Motor, gear and tooth bar, the tooth bar Can be laid along Y-direction guide rail 73, the gear is arranged at the bottom of workpiece stage 75 and is engaged with the tooth bar, by the driving The motor driving pinion rotation can be moved with workpiece stage 75 with this along Y-direction guide rail.Y-direction shift mechanism can in another kind Selecting embodiment includes：Motor and screw mandrel, the screw mandrel can be laid along Y-direction guide rail 73, and the motor can drive Leading screw rotates, and drives workpiece stage 75 to be moved along Y-direction guide rail 73 by screw mandrel rotation.In actual applications, above-mentioned X is to shifting Position mechanism and Y-direction shift mechanism can flexibly arrange in pairs or groups and use.

Workpiece transfer device 7 can still make other changes, and in another alternative embodiment, Y-direction guide rail 73 is fixed and is layed in On workbench 2, X direction guiding rails 71 are slidedly arranged on Y-direction guide rail 73, and workpiece stage 75 is slidedly arranged on X direction guiding rails 71, workpiece stage 75 make planar movement by Y-direction guide rail 73 and X direction guiding rails 71 in workbench 2.More specifically, Y-direction guide rail is fixed is layed in work Make on platform 2, the lower section of X direction guiding rails 71 is provided with pillow platform 72.X direction guiding rails 71 are slidedly arranged on Y-direction guide rail 73, and X direction guiding rails 71 are disposed on On slide 74, the bottom of slide 74 is provided with the sliding block 741 coordinated with Y-direction guide rail 73.Workpiece stage 75 be slidedly arranged on X direction guiding rails 71 it On, the bottom of workpiece stage 75 is provided with the sliding block 751 coordinated with X direction guiding rails 71.

In actual applications, when needing the silicon rod intercept 91 after blocking from workpiece turning work using Workpiece transfer device 7 When position transfers to workpiece evolution station, first, the vertical silicon rod intercept 91 placed is positioned at workpiece using Workpiece transfer device 7 On microscope carrier 75；Then, according to the position of workpiece evolution station, using motor (such as servomotor) or manually operated driving Workpiece stage 75 makees planar movement until being moved to workpiece evolution station by X direction guiding rails and Y-direction guide rail 73 in workbench 2.

The diced system 5 shown in Fig. 2 is referred to again, and diced system 5 corresponds to the workpiece evolution station of workbench 2. So that workpiece is the silicon rod intercept 91 that completion is blocked as an example, the lifting coil holder 51 in diced system 5, the formation on lifting coil holder 51 The cutting roller 532 of the second cutting roller group and the evolution cut length 534 being around between the second cutting roller group are located at workpiece evolution work The top of position.The second cutting roller group on lifting coil holder 51 may include at least one cutting roller pair, usually, actually should In, the quantity of cutting roller pair is at least a pair (two) or two to (four) in the second cutting roller group.

Specifically, in a kind of optional implementation, the second cutting roller group includes a pair of cutting rollers pair, the pair of cutting roller To two cutting rollers pair including being oppositely arranged, the two cutting rollers are (or front and rear to being respectively in the left and right sides of lifting coil holder 51 Both sides), the first cutting roller is wound with the to two cutting rollers 532 being set including front and rear (or left and right) between two cutting rollers 532 One evolution cut length 534, the second cutting roller is to two cutting rollers 532 including front and rear (or left and right) setting, two cutting rollers 532 Between be wound with the second evolution cut length 534, the first evolution cut length 534 and the second evolution cut length 534 is parallel sets.

In another alternative embodiment, the second cutting roller group includes two pairs of cutting rollers pair, i.e. the first pair of cutting roller pair and Second pair of cutting roller pair.First pair of cutting roller is to including the first cutting roller pair and the second cutting roller pair, being respectively in advance decline line The left and right sides of frame 51, the first cutting roller is wound with to two cutting rollers 532 including front and rear setting between two cutting rollers 532 First evolution cut length 534, the second cutting roller to also include before and after set two cutting rollers 532, between two cutting rollers 532 It is wound with the second evolution cut length 534, the first evolution cut length 534 and the parallel setting of the second evolution cut length 534.Described second pair Cutting roller is to including the 3rd cutting roller pair and the 4th cutting roller pair, being respectively in the front and rear both sides of lifting coil holder 51, the 3rd cutting roller To two cutting rollers 532 set including left and right, the 3rd evolution cut length 534, the 4th cutting are wound between two cutting rollers 532 Roller is wound with the 4th evolution cut length 534, the 3rd to also including two cutting rollers 532 that left and right is set between two cutting rollers 532 The parallel setting of 534 and the 4th evolution cut length of evolution cut length 534.So, the first evolution cut length of the first cutting roller centering 534th, in the second evolution cut length 534 and the 3rd evolution cut length 534, the 4th evolution cut length 534 of the second cutting roller centering Two evolution cut length of arbitrary neighborhood be mutually perpendicular to, the part that four evolution cut length 534 are drawn a circle to approve constitutes rectangular shape.

Specifically, in the foregoing, can both include a pair of cutting rollers to (left and right in the second cutting roller group Set or front and rear setting) two pairs of cutting rollers can also be included to (first pair of cutting roller pair that left and right is set and front and rear setting Second pair of cutting roller to), but, for a pair of cutting rollers pair and two pairs of cutting rollers for, the structure of workpiece stage 75 can be slightly There is difference.Especially, for a pair of cutting rollers pair, silicon rod intercept 91 is carried out into evolution and is accomplished by cutting twice step, and After cutting for the first time, the cutting position of silicon rod intercept 91 is adjusted again.

In a preferred embodiment, workpiece stage 75 can be set to rotary structure, in this way, can successfully by silicon rod Intercept 91 is rotated (be for example rotated by 90 °), so that a pair of the two of cutting roller centering evolution cut length 534 can be to rotation Silicon rod intercept 91 after turning carries out second cutting, completes the evolution of silicon rod intercept 91.In contrast, two pairs of cutting rollers pair are configured The second cutting roller group of (four cutting rollers to) is than a pair of cutting rollers of configuration to the second cutting roller group of (two cutting rollers to) Evolution it is in hgher efficiency, and, two pairs of cutting rollers of configuration can be with the first cutting roller to the second cutting roller group of (four cutting rollers to) Assemble it is right more preferably, it is only necessary to lifting coil holder 51 in diced system 5 performs single lifting action and can complete (utilize first simultaneously Cutting roller group) block operation and (cutting roller group using second) evolution operation.

It is also pointed out that, in diced system 5, the first cutting roller group and the second cutting roller group are configured at lifting coil holder 51, the setting height of the MATERIAL CUTTING section 533 in the first cutting roller group cuts setting for the evolution cut length 534 in roller group with second Putting height will coordinate, i.e. must ensure：Lifting coil holder 51 declines movement, the MATERIAL CUTTING in the first cutting roller group relative to frame 1 Section 533 by silicon rod 90 to be blocked it is completely cut off in the case of can ensure that the evolution cut length 534 in the second cutting roller group declines To the bottom of the silicon rod intercept 91 for treating evolution completing evolution (alternatively：Under evolution cut length 534 in second cutting roller group It is down to the MATERIAL CUTTING section that the bottom of the silicon rod intercept 91 for treating evolution completes to be can ensure that in the first cutting roller group in the case of evolution 533 is completely cut off by silicon rod 90 to be blocked), therefore, in a kind of alternative embodiment, the MATERIAL CUTTING in the first cutting roller group Section 533 is to be located at same level highly with the evolution cut length 534 in the second cutting roller group.Certainly, above are only a kind of example Property explanation, as long as can realize that lifting coil holder 51 in diced system 5 performs single lifting action and completion (can utilize first simultaneously Cutting roller group) block operation and (cutting roller group using second) evolution operation, then first cut the MATERIAL CUTTING section 533 in roller group It is not limited thereto with the evolution cut length 534 in the second cutting roller group.

To cause to can ensure that workpiece will not be moved in workpiece and evolution operation process is transferred by Workpiece transfer device 7 Or topple over, in the present embodiment, Workpiece transfer device 7 also includes the workpiece positioning structure 76 in workpiece stage 75.

As previously described, on the one hand, so that workpiece is the silicon rod intercept 91 after the completion of blocking as an example, silicon rod intercept 91 is by workpiece Turning device is vertical laying state by the upset of horizontal positioned state, and under vertical laying state, silicon rod intercept 91 is carried out Level transfers and easily topples；On the other hand, at workpiece evolution station, erected by the evolution cut length 534 pairs in diced system 5 Evolution operation is carried out to the silicon rod intercept 91 under laying state, in evolution operation, the silicon rod intercept 91 in vertical placement is being opened Easily toppled in the presence of square cut length 534.Thus, workpiece positioning structure 76 may be, for example, silicon rod clamper, the silicon rod clamper Including collet, by strong fix after being placed for confession silicon rod intercept 91.In fact, workpiece positioning structure 76 except above-mentioned collet it Outward, some clamping jaws (not shown) separately can be set in the periphery of the collet.

In the present embodiment, due in follow-up evolution operation, being needed silicon rod intercept 91 by initial circular cross-section It is cut into class rectangle section, i.e. silicon rod intercept 91 is cut out into four parallel two-by-two cuttings along silicon rod axial direction and is put down Face.

In view of this, in the present embodiment, collet has four support valves (redundancy seam is offered between two neighboring support valve), The collet can offer a plurality of redundancy seam, and these redundancy sewers have at least following effect：The position of these redundancies seam is correspondence Each bar evolution cut length 534 in diced system 5, when evolution operation is carried out, by evolution cut length 534 in lifting coil holder 51 Drive under enter silicon rod intercept 91 and along silicon rod intercept 91 axial direction cutting silicon rod intercept 91 until from corresponding redundancy Stitch through the end of rear arrival silicon rod intercept 91, so as to class rectangle be formed after can the rim charge of silicon rod intercept 91 be cut down completely Squaring silicon bar body 92.Correspondingly, the quantity of the clamping jaw is preferably four (in the present embodiment, due to being needed silicon Rod intercept 91 is cut into class rectangle section by initial circular cross-section, in this way, by silicon rod intercept 91 along silicon rod length direction Four cutting planes parallel two-by-two are cut out, therefore, the quantity of each clamping jaw can be four), they are respectively from the bottom of collet Portion extends upward.

In one case, for the setting of clamping jaw, clamping jaw may be designed as having resilient elastic clamping jaw and clamping jaw is to nibble Conjunction is connected to the bottom of collet, and (connection end of clamping jaw is provided with fluted disc, and the bottom of collet is provided with fluted disc engage with fluted disc and adjusts Post, is designed with more piece regulation tooth on fluted disc adjustable column.By the folding of the i.e. controllable clamping jaw of the up and down motion of fluted disc adjustable column). In this way, when silicon rod intercept 91 is placed in collet, silicon rod intercept 91 is resisted against collet and ensures that silicon rod intercept 91 is concentric with collet, At this moment, clamping jaw can well it is clamping live the bottom of silicon rod intercept 91.Further, in order to prevent clamping jaw from scratching scuffing silicon rod intercept 91, folder Pawl and the position that silicon rod intercept 91 is contacted are that round and smooth design or the inner surface that to be contacted with silicon rod in clamping jaw set up cushion pad. Certainly, silicon rod clamper is only a kind of preferred embodiment, but bottom keeper is not limited thereto, in other embodiments, bottom Keeper can also be Pneumatic suction cup or be coated with the bonding connection face of binding agent should equally have and consolidate silicon rod intercept 91 Effect on work microscope carrier 75.

In fact, in addition to foregoing collet and some clamping jaws, the workpiece positioning structure may also include top and compress Part, the top for compressing silicon rod intercept 91.In this embodiment, top compressing member is arranged on lifting coil holder 51, it may include：It is living The dynamic bearing for setting and the compact heap for being arranged at the bearing bottom, the bearing are driven by a drive device and lived up and down Dynamic, the compact heap is adapted to (for example, compact heap can be adapted with the sectional dimension of silicon rod intercept 91 with silicon rod intercept 91 Patty briquetting or the elastic press with certain deformation quantity).The driving of the bearing device driven and downwards activity, So that being pressed on the top of silicon rod intercept 91 under the compact heap of the bearing bottom.

Setting and application note for foregoing clamping jaw and top compressing member, see Chinese patent 201610345677.8 The associated description of (squaring silicon bar machine).

So, by the mutual cooperation of the collet in the workpiece positioning structure and some clamping jaws and top compressing member, can Silicon rod intercept 91 to be cut is stable on work microscope carrier 75, it is ensured that stabilization of the silicon rod intercept 91 in evolution cutting operation The flatness of property and cut surface.

Workbench 2 is additionally provided with workpiece positional stations, and the workpiece positional stations are to be located at the workpiece turning station and institute State between workpiece evolution station, and, the workpiece positional stations are to be adjacent to Workpiece transfer device 7 and positioned at Workpiece transfer device On the 7 transfer paths for transferring workpiece.Workpiece alignment mechanism 8 is provided with the workpiece positional stations, for carrying out evolution work Workpiece before industry carries out position correction.

As shown in Fig. 2 in the present embodiment, workpiece alignment mechanism 8 includes that support 81 and the calibration on support 81 are adjusted One integral piece 83.Calibration adjustment part 83 may be, for example, a pair of clamping limbs or multipair clamping limb, it is any to clamping limb in two clamping limbs Support 81 is movably arranged at, so, the two clamping limbs are realized (clamping start) close to each other by relative to the activity of support 81 With mutually deviate from (opening start), wherein, two clamping limbs are to be symmetrical arranged and the symmetrical centre of two clamping limbs is a mark True centric point.Cushion pad can be set up on the relative inner arm face (that is, with the clamping face of absorption surface) of a pair of clamping limbs (for example to lead to Cross the mode such as paste), to avoid producing damage with workpiece directly contact.

In actual applications, it is by Workpiece transfer when being calibrated so that workpiece is the silicon rod intercept 91 for treating evolution as an example The silicon rod intercept 91 that workpiece stage 75 will carry in device 7 is transferred by X direction guiding rails 71 and Y-direction guide rail from workpiece turning station To workpiece positional stations, now, acted by making clamping as the fixture of calibration adjustment part 83 in workpiece alignment mechanism 8, in clamping The adjustment position of silicon rod intercept 91 is driven under start (because silicon rod intercept 91 is dropping place in workpiece stage 75, and workpiece stage 75 neatly can move on X direction guiding rails 71 and Y-direction guide rail 73, therefore, under the promotion of fixture, workpiece stage 75 and thereon Silicon rod intercept 91 can swimmingly complete position adjustment), until so that the axle center of silicon rod intercept 91 correspond to center for standard point (due to Silicon rod intercept 91 is substantially cylindrical, thus when the last symmetrically clamping of the fixture as calibration adjustment part 83 in silicon rod intercept 91 it Afterwards, can ensure that substantially can realize the purpose that centers), complete calibration operation.After calibration operation is completed, as calibration adjustment part 83 fixture makees expansion action to discharge silicon rod intercept 91, and the silicon rod intercept 91 that workpiece stage 75 will carry passes through X direction guiding rails 71 and Y-direction guide rail transfer to workpiece evolution station from workpiece positional stations.

Workbench 2 is additionally provided with inloading part station, and the inloading part station is to be adjacent to Workpiece transfer device 7 and positioned at Workpiece transfer Device 7 is transferred on the transfer path of workpiece.Be provided with inloading part mechanism 9 at the inloading part station, for complete evolution operation it Workpiece afterwards carries out discharging.

As shown in Fig. 2 in the present embodiment, inloading part mechanism 9 may include：Casing, the mechanical-stretching for being movably connected on casing Arm (Z axis that mechanical-stretching arm can be vertically stretch up and down), the stripper for being arranged at mechanical-stretching arm end, can using stripper The workpiece of discharging is treated in crawl.Stripper may be, for example, adsorption element, and the end of stripper has vacuum suction chamber or sucker, accordingly Adsorb after discharging workpiece (for example, after the workpiece of discharging be through the squaring silicon bar body 92 after evolution, then it is, true in stripper One of side of the empty adsorbent chamber just to squaring silicon bar body 92 simultaneously adsorbs squaring silicon bar body 92 accordingly).

The structure of foregoing inloading part mechanism, set-up mode and its operation shape are not limited thereto, in other embodiments, Inloading part mechanism can still make other changes, for example, inloading part mechanism can use manipulator, the manipulator to be unloaded for grabbing workpiece Materials and parts can be holder, the holder include a pair can opening and closing clamping limb, this pair of clamping limbs it is controlled and make opening and closing action, And workpiece is clamped when closing up and workpiece is discharged when opening.Further, the form of the holder can be grabbed according to required The type and dimensions of the workpiece for taking and have different changes.Preferably, in the relative inner arm face of a pair of clamping limbs (that is, with work The clamping face of part contact) on can set up cushion pad modes such as (such as by) pasting, to avoid being produced with workpiece directly contact Damage.

Silicon rod intercept unit disclosed in the present application, including：Frame, cabling system and diced system, and the diced system The first cutting roller group and the second cutting roller group are further included, wherein, the line of cut between the first cutting roller group forms MATERIAL CUTTING Section, the line of cut between the second cutting roller group forms evolution cut length, the MATERIAL CUTTING section and second in the first cutting roller group Cutting roller group in evolution cut length can simultaneously operation, in this way, can be complete in certain single silicon rod intercept unit that takes up room Into the multiple working procedure operation at least including blocking operation and evolution operation, the floor space of implement is saved, reduce work Sequence, improves the efficiency of procedures, reduces cost and reduces error, improves the yield rate of workpiece.

A kind of silicon rod method for cutting of disclosure, for carrying out blocking operation to corresponding workpiece.Fig. 3 is referred to, its Show the schematic flow sheet in one embodiment of the application silicon rod method for cutting.As shown in figure 3, the application silicon rod side of blocking Method comprises the following steps：

Step S11, the silicon rod to be blocked of the first laying state is delivered to and blocks station.In the present embodiment, by The silicon rod to be blocked of one laying state is delivered to and blocks station to be completed by work transfer device, and work transfer device will The silicon rod to be blocked placed with the first laying state is conveyed and the mobile predetermined distance according to product specification so that silicon rod Block position and can after movement be located exactly at the lower section of the MATERIAL CUTTING section in silicon rod intercept unit in MATERIAL CUTTING system, it is complete Into the conveying of silicon rod.

Step S13, the silicon rod to be blocked to blocking on station carries out blocking operation.In the present embodiment, to blocking work Silicon rod to be blocked on position carries out blocking operation, then moved down and corresponding to silicon by the MATERIAL CUTTING section in MATERIAL CUTTING system The position of blocking of rod carries out cutting until completely cut off to form silicon rod intercept.

Step S15, the silicon rod after blocking is overturn to the second laying state by upset by the first laying state.In this reality Apply in example, it is complete by Workpiece tilting device that the silicon rod intercept after blocking is overturn to the second laying state by the first laying state Into, including：Using Workpiece tilting device, can by silicon rod intercept by laterally disposed State Transferring be vertical laying state.

Fig. 4 is referred to, which show silicon rod wire cutting method schematic flow sheet in one embodiment.As shown in figure 4, silicon Rod wire cutting method comprises the following steps：

Step S101, the workpiece to be blocked placed with the first laying state is conveyed, and is treated to completing conveying The workpiece for blocking is blocked, and forms the first workpiece.

In the present embodiment, it is complete by work transfer device workpiece to be blocked to be carried out into conveying with the first laying state Into, the workpiece to be blocked placed with the first laying state is conveyed and moved according to product specification by work transfer device Dynamic predetermined distance so that workpiece blocks position and can after movement be located exactly at blocking for the first cutting roller group in linear cutting equipment The lower section of cut length, completes the conveying of workpiece.Subsequently, the workpiece to be blocked for completing conveying is blocked, is then by first The MATERIAL CUTTING section of cutting roller group is moved down and the position of blocking corresponding to workpiece carries out cutting until completely cut off to form first Workpiece.

So that workpiece is as silicon rod as an example, in step S101, silicon rod is given defeated in laterally disposed state by work transfer device Send so that the position of blocking of silicon rod is located at the side of work transfer device with positioned at the MATERIAL CUTTING section 533 of the first cutting roller group Lower section, decline first cut roller group, by first cutting roller group in MATERIAL CUTTING section the silicon rod as workpiece is cut, That section for getting off is blocked just to be formed as the silicon rod intercept of the first workpiece.

Step S103, the first workpiece is transferred and is placed with the second laying state.

In the present embodiment, the first workpiece is transferred and is placed with the second laying state, including：By the first work Part is converted to the second laying state by the first laying state；First workpiece is transferred.First workpiece is placed into shape by first State is converted to the second laying state to be completed by Workpiece tilting device, and it is the silicon rod after blocking to accept foregoing first workpiece Intercept, using Workpiece tilting device, will can be placed by laterally disposed State Transferring as the silicon rod intercept of the first workpiece for vertical State.First workpiece is transferred, is completed by Workpiece transfer device, using Workpiece transfer device, may be such that vertical The silicon rod intercept as the first workpiece of placement is moved in the horizontal plane.Herein, Workpiece transfer device transfers the first workpiece and refers to Be that the silicon rod intercept 91 in vertical laying state is transferred into workpiece evolution station.Certainly, in actual applications, using workpiece Grass-hopper also includes as the silicon rod intercept of the first workpiece in advance before silicon rod intercept 91 is transferred into station evolution station 91 transfer to workpiece positional stations, and at workpiece positional stations, the silicon rod intercept 91 for treating evolution by workpiece alignment mechanism is carried out Position correction so that the axle center of silicon rod intercept 91 corresponds to center for standard point.

Step S105, the first workpiece to being placed with the second laying state carries out evolution, while to completing conveying again Workpiece to be blocked is blocked again, forms second workpiece.

In the present embodiment, it is by the second cutting roller group that evolution is carried out to the first workpiece placed with the second laying state Evolution cut length move down and evolution carried out to the first workpiece, it is by the first cutting roller to treat the workpiece for blocking and blocked again The MATERIAL CUTTING section of group is moved down and the position of blocking corresponding to workpiece carries out cutting until completely cut off to form second workpiece.The One cutting roller group and its MATERIAL CUTTING section are configured at a lifting coil holder with the second cutting roller group and its evolution cut length, therefore, The first cutting roller group and its MATERIAL CUTTING section can be simultaneously driven to carry out cutting operation and the by driving the lifting of lifting coil holder Two cutting roller groups and its evolution cut length carry out evolution operation.

So that workpiece is as silicon rod as an example, in step S105, the silicon as the first workpiece of workpiece evolution station is transferred to Rod intercept is moved down and corresponding to the evolution of silicon rod intercept under vertical laying state by the evolution cut length in the second cutting roller group Position carries out cutting and forms squaring silicon bar body to complete evolution up to dropping to silicon rod intercept bottom, meanwhile, conveyed through workpiece It is then to be moved down by the MATERIAL CUTTING section in the first cutting roller group and cutting corresponding to silicon rod that device conveys silicon rod to be blocked again Disconnected position carries out cutting until completely cut off to form another silicon rod intercept as second workpiece.

Subsequently, the first workpiece that evolution is completed can be given inloading part.In the present embodiment, so that workpiece is as silicon rod as an example, will The first workpiece that evolution is completed gives inloading part, including：The first workpiece (that is, squaring silicon bar body) that evolution is completed is by workpiece evolution Station transfers to inloading part station, and at inloading part station, the first workpiece (that is, squaring silicon bar body) that inloading part mechanism completes evolution gives With discharging.

From above-mentioned each step, above-mentioned silicon rod wire cutting method, first treat the workpiece for blocking block operation with Form the first station；The first workpiece after blocking again gives transfer carries out evolution operation, at the same time, workpiece to be blocked is entered Row blocks operation to form second workpiece again, in this way, can realize being carried out while blocking operation and evolution operation, and for same For one workpiece, evolution operation is carried out follow-up by block after operation, realize the seamless company of multiple procedures It is continuous, operation is reduced, the efficiency of procedures is improved, reduce cost and reduce error, improve the yield rate of workpiece.

Below in conjunction with Fig. 5 to Figure 10, work piece cut operation is performed in a certain example to the application silicon rod intercept unit and is entered Row is described in detail.In this example, following setting is first made：It (both can be that silicon single crystal rod can also be that workpiece 90 is chosen as silicon rod Polycrystalline silicon rod), the cutting operation that silicon rod 90 is made is included and blocks operation and evolution operation, and initial silicon rod 90 is in cylinder, It first carries out carrying out evolution operation again after blocking operation.The silicon rod intercept unit for being used, including frame, cabling system and cut System is cut, wherein, diced system is liftably arranged in frame, including is lifted coil holder and be arranged on many on lifting coil holder Individual cutting roller, multiple cutting rollers form first and cut roller group and the second cutting roller group, the line of cut between the first cutting roller group MATERIAL CUTTING section (in this example, MATERIAL CUTTING Duan Weiyi bars) is formed, the line of cut between the second cutting roller group forms evolution Cut length (in this example, evolution cut length is four, and two evolution cut length of arbitrary neighborhood are mutually perpendicular to).

First, silicon rod 90 to be blocked is conveyed with laterally disposed state using work transfer device 4 so that silicon rod 90 position of blocking reaches specified location (specified location may be, for example, the truncated end of work transfer device 4), the first cutting roller Position is blocked in the surface that MATERIAL CUTTING section 533 in group is located at specified location be right against silicon rod 90.Now, in silicon rod 90 That part (extended meeting forms the part of silicon rod intercept after i.e.) for protruding from the truncated end of work transfer device 4 is by workpiece turning 613 supports of upset loading plate in device 6.The state of silicon rod intercept unit for details, reference can be made to Fig. 5 after implementation aforesaid operations.

Then, the lifting coil holder 51 in diced system 5 declines relative to frame 1 and moves, the first cutting on lifting coil holder 51 The position of blocking that roller group and its MATERIAL CUTTING section 533 correspond to silicon rod 90 carries out cutting up to completely cut off, is truncated what is got off That section for protruding from work transfer device 4 just forms the first silicon rod intercept 91.In fact, block the process of operation In, the locating part 45 on work transfer device 4 is suppressed in the main part of silicon rod 90 on work transfer device 4, and work Locating part 63 on part turning device 6 is suppressed in the ledge of silicon rod 90 on Workpiece tilting device 6, so, is being cut When disconnected cutting operation is implemented, the protuberance of silicon rod 90 in the main part of silicon rod 90 and Workpiece tilting device 6 on work transfer device 4 Dividing to stabilize.The state of silicon rod intercept unit for details, reference can be made to Fig. 6 after implementation aforesaid operations.

Then, the first silicon rod intercept 91 after being blocked using Workpiece tilting device 6 is overturn so that the first silicon rod cuts Section 91 is by the upset of laterally disposed state is for vertical laying state and dropping place is located at workpiece turning station in Workpiece transfer device Workpiece stage 75 on.In fact, the first silicon rod intercept 91 after it will be blocked using Workpiece tilting device 6 carries out upset Before, silicon rod 90 to be blocked is retracted a certain distance with laterally disposed state using using work transfer device 4 also, this In rollback be away from Workpiece tilting device 6 the direction of the first silicon rod intercept 91 movement so that on work transfer device 4 Silicon rod 90 and Workpiece tilting device 6 on the first silicon rod intercept 91 at a distance of a safe distance.Under safe distance, workpiece turning The first silicon rod intercept 91 after device 6 will be blocked again can avoid the first silicon rod intercept 91 and remaining silicon rod 91 when being overturn Collide with.The state of silicon rod intercept unit for details, reference can be made to Fig. 7 after implementation aforesaid operations.

Then, using the workpiece stage 75 in Workpiece transfer device by X direction guiding rails 71 and Y-direction guide rail 73 by the first silicon Rod intercept 91 is moved to workpiece positional stations, is entered by 8 pairs of the first silicon rod intercepts 91 of workpiece alignment mechanism of workpiece positional stations Row position correction so that the axes alignment of the first silicon rod intercept 91 is in center for standard point.Position is carried out in the first silicon rod intercept 91 During calibration, the work transfer device 4 blocked at station positioned at workpiece then continue by remaining silicon rod 90 to be blocked with Laterally disposed state is conveyed so that second of silicon rod 90 blocks position and reach specified location.Implement silicon after aforesaid operations The state of rod intercept unit for details, reference can be made to Fig. 8.

Then, will have been calibrated by X direction guiding rails 71 and Y-direction guide rail 73 using the workpiece stage 75 in Workpiece transfer device Workpiece evolution station is moved into rear first silicon rod intercept 91.

Then, the lifting coil holder 51 in diced system 5 declines relative to frame 1 and moves, wherein, on lifting coil holder 51 first The position of blocking that cutting roller group and its MATERIAL CUTTING section 533 correspond to silicon rod 90 carries out cutting up to completely cut off, is truncated down That section for protruding from work transfer device 4 for coming just forms the second silicon rod intercept, meanwhile, the second cutting on lifting coil holder 51 Roller group and its correspondence of evolution cut length 534 enter the first silicon rod intercept 91 and along the axial direction cutting the of the first silicon rod intercept 91 One silicon rod intercept 91 until reach the bottom of the first silicon rod intercept 91, so as to the rim charge of the first silicon rod intercept 91 can be cut completely The first squaring silicon bar body 92 of class rectangle is formed after lower.As can be seen here, in this step, lifting coil holder 51 performs single lifting and moves Make to complete (cut roller group using first) to block operation and (cutting roller group using second) evolution operation simultaneously.Implement above-mentioned The state of silicon rod intercept unit for details, reference can be made to Fig. 9 after operation.

Then, will have been calibrated by X direction guiding rails 71 and Y-direction guide rail 73 using the workpiece stage 75 in Workpiece transfer device Inloading part station is moved into rear first squaring silicon bar body 92, the first silicon for evolution being completed by the inloading part mechanism positioned at inloading part station Rod evolution body 92 gives discharging.The state of silicon rod intercept unit for details, reference can be made to Figure 10 after implementation aforesaid operations.

Then, the workpiece stage 75 in Workpiece transfer device is moved to workpiece and is turned over by X direction guiding rails 71 and Y-direction guide rail 73 Switching stations, the second silicon rod intercept 93 after being blocked using Workpiece tilting device 6 is overturn so that the second silicon rod intercept 93 by Workpiece of the laterally disposed state upset for vertical laying state and dropping place in Workpiece transfer device at workpiece turning station On microscope carrier 75.The step process and its subsequent step such as the work flow of foregoing first silicon rod intercept 91, herein no longer Repeat.

From the foregoing, it will be observed that silicon rod wire cutting method is in silicon rod intercept cutting operation and evolution cutting operation is applied to, first exist Workpiece blocks station and laterally disposed silicon rod to be blocked is carried out blocking operation to form the first silicon rod intercept；After blocking First silicon rod intercept is placed and the first silicon rod intercept is transferred into work under vertical laying state by laterally disposed upset for vertical Part evolution station；Evolution operation is carried out in workpiece evolution station to vertical the first silicon rod intercept placed to be opened to form the first silicon rod Cube, at the same time, is blocked operation to form the second silicon rod intercept again by silicon rod to be blocked；Subsequently, by after evolution The first squaring silicon bar body transferred and carried out inloading part.In this way, in single operation, you can realize silicon rod block operation and Carried out while evolution operation, improve the efficiency of silicon rod procedures.In addition, for same silicon rod, being blocked Evolution operation subsequently can be directly being carried out after operation, realize the seamless continuous of multiple procedures, reduce operation, reduced Cost and reduce error, improve the yield rate of silicon rod.

The principle and its effect of above-described embodiment only illustrative the application, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, modifications and changes are carried out to above-described embodiment.Cause This, those of ordinary skill in the art is complete with institute under technological thought without departing from spirit disclosed herein such as Into all equivalent modifications or change, should be covered by claims hereof.

Claims

1. a kind of silicon rod intercept unit, it is characterised in that including：

Work transfer device, station is blocked for the silicon rod to be blocked of the first laying state to be delivered to；

MATERIAL CUTTING system, including at least two cutting rollers and line of cut, the line of cut are around at least two cutting rollers To form MATERIAL CUTTING section；And

Workpiece tilting device, is connected the work transfer device, for that will block after silicon rod by the first laying state overturn to Second laying state.

2. silicon rod intercept unit according to claim 1, it is characterised in that the work transfer device is included for carrying Silicon rod to be blocked and the conveying assembly that drives silicon rod to be blocked axially to be conveyed and for controlling the carrying group The control assembly of part.

3. silicon rod intercept unit according to claim 2, it is characterised in that the work transfer device also includes：Axle center Governor motion, for the axle center of the silicon rod to be tuned into horizontality.

4. silicon rod intercept unit according to claim 2, it is characterised in that the Workpiece tilting device includes：

Flip piece, for carrying the silicon rod after blocking and the silicon rod being overturn to the second laying state by the first laying state； And

Locating part, on the flip piece, gives spacing for the silicon rod after to blocking.

5. silicon rod intercept unit according to claim 4, it is characterised in that the locating part includes：

Lifting seat, liftably on flip piece；And

Pressing block or pressboard, on the lifting seat.

6. silicon rod intercept unit according to claim 4, it is characterised in that the flip piece is completed by switching mechanism Upset, the switching mechanism includes：Rotating shaft and the motor of the driving axis of rotation.

7. silicon rod intercept unit according to claim 1, it is characterised in that also including Workpiece transfer device, for that will cut Silicon rod after cutting is shifted.

8. silicon rod intercept unit according to claim 7, it is characterised in that the Workpiece transfer device includes：

Walk guide rail, is layed in and blocks between station and aiming station；And

Workpiece stage, walks on guide rail located at described, for carrying the silicon rod after the blocking of the second laying state and by the silicon Rod is transferred to aiming station.

9. silicon rod intercept unit according to claim 1, it is characterised in that also including inloading part mechanism, for it will block after Silicon rod give inloading part.

10. a kind of silicon rod method for cutting, it is characterised in that including：

The silicon rod to be blocked of the first laying state is delivered to and blocks station；

Silicon rod to be blocked to blocking on station carries out blocking operation；And

Silicon rod after blocking is overturn to the second laying state by upset by the first laying state.