CN209682649U - Multi-wire saw equipment and its change groove mechanism - Google Patents

Abstract

The application discloses a kind of multi-wire saw equipment and its changes groove mechanism, the multi-wire saw equipment includes bogey, wire-electrode cutting device, and change groove mechanism, wherein, cutting wheel in wire-electrode cutting device is set on cutting support by installation axle and offers at least two astragal slots, change the paragraph type adjustment structure that groove mechanism includes at least one end in the installation axle of cutting wheel, during changing slot, new wire casing can be adjusted to the winding position where former wire casing by only needing driving paragraph type adjustment structure to carry out paragraph type movement, it entirely changes slot Job Operations simply and can ensure that position adjustment precisely in place, improve operating efficiency.

Description

Multi-wire saw equipment and its change groove mechanism

Technical field

This application involves crystalline silicon processing technique fields, more particularly to a kind of multi-wire saw equipment and its change groove mechanism.

Background technique

When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure for restricting subsequent finished product, thus It is also higher and higher to its job requirements.Currently, multi-wire cutting technology is since with high production efficiency, operating cost is low, operation is smart The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.

Multi-wire cutting technology is the cutting line that runs at high speed as carrier, and mortar particle is driven to be cut.Generally, In multi-wire saw equipment, configured with multiple cutting wheel and guide roller, by cutting line the wire casing of cutting wheel and with cutting It takes turns and is sequentially wound a plurality of cutting line segment on the wire casing of corresponding guide roller, to treat cutter using a plurality of cutting line segment Part is cut.After through a long time use, the wire casing in cutting wheel can generate abrasion, when the cable slot for needing replacing cutting wheel When position (in cutting wheel have multiple wire casings), needing to calibrate the moving distance of cutting wheel, (moving distance needs staff Measure and determine), and under some situations, the position of guide roller is also required to make corresponding adjustment to meet cutting demand, entirely Process is time-consuming and laborious, not only affects production efficiency, but also increases the production cost of enterprise.

Utility model content

In view of the missing of the relevant technologies described above, the purpose of the application is to disclose a kind of multi-wire saw equipment and its changes Groove mechanism, for solving the problems such as cutting line changes many and diverse slot Job Operations, inefficiency in the related technology.

To achieve the above object and other purposes, the first aspect of the application disclose a kind of multi-wire saw equipment, comprising: hold It carries and sets, for carrying crystalline silicon workpiece；Wire-electrode cutting device, including wire cutting support, cutting on the wire cutting support Cut wheel group and guide roller group and cutting line, wherein the cutting line is around in the cutting wheel group each cutting wheel and described Each guide roller in guide roller group and form cutting gauze；The cutting wheel is set on the cutting support by installation axle, At least two astragal slots are offered in the cutting wheel；Groove mechanism is changed, including being set in the installation axle at least paragraph type of one end Adjust structure；Wherein, during changing slot, the installation axle is rotated, the paragraph type adjustment structure is driven to carry out paragraph type shifting It is dynamic, new wire casing is adjusted to the winding position where former wire casing.

Multi-wire saw equipment disclosed in the present application is configured in cutting on line device and changes groove mechanism, this changes groove mechanism and includes At least the paragraph type of one end adjusts structure in the installation axle of cutting wheel, during changing slot, it is only necessary to paragraph type be driven to adjust Structure, which carries out paragraph type movement, to be adjusted new wire casing to the winding position where former wire casing, and slot Job Operations letter is entirely changed List and can ensure that position adjustment precisely in place, improve operating efficiency.

The second aspect of the application disclose it is a kind of change groove mechanism applied to multi-wire saw equipment, state multi-wire saw equipment packet Bogey and wire-electrode cutting device are included, the bogey includes wire cutting support, cutting on the wire cutting support Cut wheel group and guide roller group and cutting line, wherein the cutting line is around in the cutting wheel group each cutting wheel and described Each guide roller in guide roller group and form cutting gauze；The cutting wheel is set on the cutting support by installation axle, At least two astragal slots are offered in the cutting wheel；It is characterized in that, it includes being set in the installation axle that groove mechanism is changed on the side At least the paragraph type of one end adjusts structure；During changing slot, rotate the installation axle, drive the paragraph type adjust structure into Row paragraph type is mobile, and new wire casing is adjusted to the winding position where former wire casing.

It is disclosed in the present application to change groove mechanism applied to multi-wire saw equipment, it is set at least one end of the installation axle of cutting wheel There is paragraph type to adjust structure, during changing slot, it is only necessary to which driving paragraph type adjustment structure to carry out paragraph type movement can will be new Wire casing is adjusted to the winding position where former wire casing, is entirely changed slot Job Operations simply and be can ensure that the adjustment of wire casing slot position is precisely arrived Position, improves operating efficiency.

Detailed description of the invention

Fig. 1 is shown as structural schematic diagram of the application multi-wire saw equipment in a certain embodiment.

Fig. 2 is shown as the application and is equipped with structure of the multi-wire saw equipment of silicon rod transfer device in a certain embodiment showing It is intended to.

Fig. 3 is shown as the structural schematic diagram of silicon rod transfer device in Fig. 2.

Fig. 4 is shown as structural schematic diagram of the silicon rod transfer device in a certain embodiment.

Fig. 5 is shown as the structural schematic diagram of wire-electrode cutting device middle line cutter unit in Fig. 2.

Fig. 6 is shown as be assemblied in same installation axle two cutting wheels and wire casing thereon in some embodiments Schematic cross-section.

Fig. 7 is shown as be assemblied in same installation axle two cutting wheels and wire casing thereon in some embodiments Schematic cross-section.

Fig. 8 is shown as carrying out the status diagram of evolution cutting using the application multi-wire saw equipment.

Fig. 9 is shown as changing schematic diagram of the groove mechanism under a certain visual angle in Fig. 5.

Figure 10 is shown as changing schematic diagram of the groove mechanism under another visual angle.

Figure 11 is shown as changing the enlarged diagram of slot structure in Figure 10.

Figure 12 is shown as schematic diagram of the flaw-piece hoisting mechanism under a certain upward view angle in the application multi-wire saw equipment,

Figure 13 is shown as the schematic top plan view of flaw-piece hoisting mechanism in the application multi-wire saw equipment.

Figure 14 is shown as the status diagram of flaw-piece lift mechanism lifts flaw-piece in the application multi-wire saw equipment.

Figure 15 is shown as structural schematic diagram of the flaw-piece hoisting mechanism in other change case in the application multi-wire saw equipment.

Figure 16 is shown as the status diagram of the flaw-piece lift mechanism lifts flaw-piece in Figure 15.

Figure 17 and Figure 18 is shown as the enlarged diagram of thread-laying mechanism in Figure 13, wherein Figure 17 is shown as thread-laying mechanism and exists The original state schematic diagram for dialling line is not carried out, Figure 18 is shown as thread-laying mechanism in group line status diagram for implementing group line.

Figure 19 is shown as the structural schematic diagram of the clamp assemblies in Fig. 2 in one embodiment.

Figure 20 is shown as structural schematic diagram of the clamp assemblies in Fig. 2 in an another embodiment.

Figure 21 is shown as the status diagram of flaw-piece clamping transshipment acitivity clamping flaw-piece in the application multi-wire saw equipment.

Figure 22 is shown as flaw-piece clamping transshipment acitivity in the application multi-wire saw equipment and draws high flaw-piece disengaging cutting silicon rod Status diagram.

Figure 23 is shown as in the application multi-wire saw equipment flaw-piece clamping transshipment acitivity and flaw-piece is transported to flaw-piece unloading area Status diagram.

Figure 24 is shown as flaw-piece clamping transshipment acitivity in the application multi-wire saw equipment and flaw-piece is transferred in flaw-piece cylinder Status diagram.

Figure 25 is shown as the state being transferred to flaw-piece after the overturning of flaw-piece cylinder in the application multi-wire saw equipment on conveyer belt Schematic diagram.

Figure 26 is shown as structural schematic diagram of the application multi-wire saw equipment in a certain embodiment.

Specific embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

In the following description, with reference to attached drawing, attached drawing describes several embodiments of the application.It should be appreciated that also can be used Other embodiments, and can be carried out without departing substantially from spirit and scope mechanical composition, structure, electrically with And operational change.Following detailed description should not be considered limiting, and the range of embodiments herein Only limited by the claims for the patent announced.Term used herein is merely to describe specific embodiment, and be not It is intended to limit the application.The term of space correlation, for example, "upper", "lower", "left", "right", " following ", " lower section ", " lower part ", " top ", " top " etc. can be used in the text in order to an elements or features and another element or spy shown in explanatory diagram The relationship of sign.

Although term first, second etc. are used to describe various elements herein in some instances, these elements It should not be limited by these terms.These terms are only used to distinguish an element with another element.For example, first turn It can be referred to as the second steering swing to swinging, and similarly, the second steering, which is swung, can be referred to as the first steering swing, and The range of various described embodiments is not departed from.

In relevant multi-wire saw equipment, when the wire casing slot position for needing replacing cutting wheel and implements cutting line and change slot operation When, need to calibrate the moving distance of cutting wheel, and under some situations, the position of guide roller is also required to make corresponding adjustment with full , there is the problems such as changing time-consuming and laborious slot process, inefficiency in foot cutting demand.Therefore, to those skilled in the art, have Necessity discloses a kind of multi-wire saw equipment and its changes groove mechanism, in order to solve technical problem present in the relevant technologies.

The application discloses a kind of multi-wire saw equipment, including bogey and wire-electrode cutting device, wherein cutting on line device In be configured with and change groove mechanism, this changes the paragraph type adjustment structure that groove mechanism includes at least one end in the installation axle of cutting wheel, During changing slot, it is only necessary to which new wire casing can be adjusted to former wire casing institute by driving paragraph type adjustment structure to carry out paragraph type movement Winding position, entirely change slot operation, it is easy to operate and can ensure that position adjustment precisely in place, improves and changes slot operation effect Rate.

It is worth noting that, in certain embodiments, the multi-wire saw equipment in the application may, for example, be squaring silicon bar Equipment, in certain embodiments, the multi-wire saw equipment in the application may, for example, be silicon ingot evolution equipment, in other certain realities It applies in example, the multi-wire saw equipment in the application may, for example, be silicon workpiece intercept unit.

Referring to Fig. 1, being shown as structural schematic diagram of the application multi-wire saw equipment in a certain embodiment.In the implementation In example, the multi-wire saw equipment is squaring silicon bar equipment, the evolution cutting operation for silicon rod.Existing silicon rod is generally justified Column construction carries out evolution cutting to silicon rod by squaring silicon bar equipment, so that silicon rod section after evolution processing is in class rectangle (including class square), and cutting silicon rod is integrally in class cuboid (including class is cube shaped).

By taking silicon single crystal rod as an example, the formation process of silicon single crystal rod can include: first using silicon rod shear to long silicon originally Stick carries out truncation operation to form the short silicon rod of multistage；After the completion of truncation, but use squaring silicon bar machine to the short silicon rod after truncation into Row evolution operation Formation cross-section is in the silicon single crystal rod of class rectangle.Wherein, long silicon rod originally is cut using silicon rod shear Disconnected operation with formed the specific implementation of the short silicon rod of multistage can refer to for example, CN105856445A, CN105946127A, with And the patent publication us such as CN105196433A, it is formed after carrying out evolution operation to the short silicon rod after truncation using squaring silicon bar machine Section then can refer to the patent publication us such as CN105818285A in the specific embodiment of the silicon single crystal rod of class rectangle.But monocrystalline The formation process of silicon rod simultaneously loses and is limited to aforementioned techniques, and in optional example, the formation process of silicon single crystal rod may also include that and first make Long silicon single crystal rod of the evolution operation with Formation cross-section in class rectangle is carried out to long silicon rod originally with total silicon stick excavation machine；Evolution is complete Cheng Hou, and truncation operation is carried out to the long silicon single crystal rod after evolution using silicon rod shear and forms short crystalline silicon rod.Wherein, among the above Evolution operation is carried out to form the specific reality of the long silicon single crystal rod in class rectangle to long silicon rod originally using total silicon stick excavation machine Existing mode can refer to the patent publication us such as example, CN106003443A.

As shown in Figure 1, multi-wire saw equipment disclosed in the present application includes: base 1, bogey and wire-electrode cutting device 3.Bogey is set on base 1, for carrying the silicon rod to be cut 10 erect and placed.Wire-electrode cutting device 3 is set on base 1, Silicon rod to be cut 10 for being carried to bogey carries out evolution cutting.

Base 1 is the main element of multi-wire saw equipment.Preferably, the volume and weight of base 1 are larger, to provide more Big mounting surface and more firm complete machine stable degree.

Bogey is set on base 1, for carrying crystalline silicon workpiece.In the present embodiment, base 1 has a job Platform, the bogey include the silicon rod plummer 21 on workbench and the silicon rod high pressure apparatus corresponding to silicon rod plummer 21 Structure 22.

Silicon rod plummer 21 is used to carry the silicon rod to be cut 10 erect and placed.In the present embodiment, silicon rod plummer 21 For mesa structure, pillow on workbench.Silicon rod 10 to be cut is the silicon rod as made of monocrystalline silicon crisp shape material lifting, generally round Column construction, in practical applications, the silicon rod to be cut 10 of structure cylindrical are that the mode of circular cross-section contact erects placement In on silicon rod plummer 21.Further, the contact surface in silicon rod plummer 21 for contacting with silicon rod has damping, to provide The frictional force that silicon rod can be driven certain.

Bogey can provide the movement at least one direction for silicon rod plummer 21.For example, silicon rod plummer 21 can lead to Y-direction motion is crossed to advance in Y-direction (Y direction as shown in Figure 1).In an implementation, silicon rod plummer 21 is table top The bottom of structure, silicon rod plummer 21 is moved by Y-direction motion on workbench.The Y-direction motion can include: Two parallel sliding rails are layed in workbench (moving towards referring to the X-axis in Fig. 1) and silicon rod in a manner of close to or far from bogey On the two sides of 21 two stabilizer blades of plummer contact；Two slides or sliding block are respectively arranged on two foot bottoms of silicon rod plummer 21 It portion and is adapted to corresponding two parallel sliding rail；Driving device, for driving silicon rod plummer 21.In practical applications, drive is utilized Device (such as common servo motor) is moved to drive silicon rod plummer 21 to advance in Y-direction (from waiting along the sliding rail of laying Area moves to cutting area) or retract (moving to Accreditation Waiting Area from cutting area).

In order to keep erectting the silicon rod to be cut 10 being placed on silicon rod plummer 21 in Y-direction (Y-axis side as shown in Figure 1 To) advance and it is subsequent carry out evolution cutting operation stability, in some embodiments, the silicon rod plummer is additionally provided with Positioning mechanism, the positioning mechanism include the bottom locating piece that 10 bottom of silicon rod to be cut placed is erect for positioning.It is real one In the application of border, the bottom locating piece can be the silicon rod clamper being fixedly arranged on silicon rod plummer 21, which includes bottom Support and the clamping jaw (not shown in the diagram) set on collet periphery, collet are adapted with the silicon rod to be cut 10 that need to be limited, and clamping jaw is It is multiple (in the present embodiment, to need silicon rod being cut into class rectangle section by initial circular cross-section due to being, in this way, Silicon rod is cut into four two parallel cutting planes along silicon rod length direction, and therefore, the quantity of each clamping jaw may be, for example, It four, is extended upward respectively from the bottom of collet).In one case, for the setting of clamping jaw, clamping jaw may be designed as having The elastic clamping jaw and clamping jaw of elasticity are that engagement is connected to the bottom of collet (connecting pin of clamping jaw is provided with fluted disc, the bottom of collet Equipped with the fluted disc adjustable column engaged with fluted disc, design has more piece adjusting tooth on fluted disc adjustable column.Above and below fluted disc adjustable column The folding of the i.e. controllable clamping jaw of movement).In this way, silicon rod 10 to be cut is resisted against bottom when silicon rod 10 to be cut is placed in collet Hold in the palm and ensure that silicon rod 10 and collet to be cut are concentric, at this moment, clamping jaw can well it is clamping live 10 bottom of silicon rod to be cut.Further more, Clamping jaw, which scratches, in order to prevent scratches silicon rod 10 to be cut, the position that clamping jaw contact with silicon rod 10 to be cut for it is round and smooth design or The inner surface that contact with silicon rod in clamping jaw adds cushion.Certainly, silicon rod clamper is only a kind of preferred embodiment, but bottom is fixed Position part is not limited thereto, and in other embodiments, bottom locating piece is also possible to Pneumatic suction cup or coated with binder Bonding connection face should equally have the effect of for silicon rod 10 to be cut being stable on silicon rod plummer 21.

In addition, bogey may also include silicon rod top-pressure mechanism 22, silicon rod top-pressure mechanism 22 can correspond to silicon rod plummer 21, for pressing in the top of silicon rod 10 to be cut.In the present embodiment, silicon rod top-pressure mechanism 22 can be at least one direction It is mobile.It is moved upwards as shown in Figure 1, silicon rod top-pressure mechanism 22 can be realized by one the oneth X to movement mechanism in X.First X is to fortune Motivation structure is set in the X-direction of base 1 (X-direction as shown in Figure 1), is transported in the X direction for the device processed for silicon rod It is dynamic.Silicon rod top-pressure mechanism 22 more may include the press support 221 being slidedly arranged on the first X on movement mechanism and by being movably arranged at Press the top-pressure part on support 221.Press support 221 is movably set to base 1 along Y-direction to movement mechanism by the first X On.

First X is to movement mechanism can include: the first X is to sliding rail, the first X to sliding block and the first X to driving source.Such as Fig. 1 It is shown, the first X to sliding block can by a guide plate be set to press support 221 on and with corresponding first X direction guiding rail 200 Adaptation, the first X to driving source may be, for example, X to motor or X to cylinder etc..In actual application, to make press branch Seat 221 can be realized steadily along X to moving, and double Guide Rail Designs can be used, that is, two the first X direction guiding rails 200 are used, the two First X direction guiding rail 200 is arranged along X to parallel.In this way, can enable press support 221 by the first X to movement mechanism along X to fortune It is dynamic and can guarantee press support 221 in X to motion stabilization degree when movement.

The top-pressure part can include: set on the lifting driving structure 223 pressed on support 221 and be set to lifting driving knot The compact heap 224 of 223 bottom of structure.The elevating movement under the driving of lifting driving structure 223 of compact heap 224.Wherein, lifting is driven Dynamic structure 223 may be, for example, the lifting cylinder with elevating lever, and the elevating lever of lifting cylinder is connected with compact heap 224, in this way, sharp It is flexible to drive compact heap 224 to make elevating movement with lifting cylinder lifting controllable bar.Compact heap 224 and silicon rod 10 to be cut are suitable Match, such as compact heap 224 can be patty briquetting compatible with the sectional dimension of silicon rod 10 to be cut.

It need to supplement, the application multi-wire saw equipment may also include silicon rod transfer device, for turning silicon rod to be cut It is transported to bogey and transports out cutting silicon rod from bogey.

Please refer to Fig. 2 and Fig. 3, wherein Fig. 2 is shown as the application and is equipped with the multi-wire saw equipment of silicon rod transfer device existing Structural schematic diagram in a certain embodiment, Fig. 3 are shown as the structural schematic diagram of silicon rod transfer device 4 in Fig. 2.In conjunction with Fig. 2 and figure 3, the silicon rod transfer device 4 in the application multi-wire saw equipment is adjacent to bogey, comprising: commutation carrier 41 is set to commutation Silicon rod clamper 43 on carrier 41, for driving commutation carrier to make the unidirectional driving mechanism of commutation movement.

The carrier 41 that commutates is the agent set for other kinds component in silicon rod transfer device to be arranged, other kinds component May include mainly silicon rod clamper 43, but is not limited thereto, other component also may be, for example, mechanical structure, electric control system and Numerical control device etc..In the present embodiment, commutation carrier 41 may include pedestal, the upper frame opposite with pedestal and set on pedestal and Supporting framework between upper frame.In addition, the commutation another important function of carrier 41 is through commutation movement to support silicon rod clamper 43 commutation conversion.The carrier 41 that commutates for example can make commutation movement by a unidirectional driving mechanism.It, can using unidirectional driving mechanism Driving commutation carrier 41 makees commutation movement to enable the silicon rod clamper 43 on commutation carrier 41 clamp silicon rod 10 to be cut and will be to be cut It cuts silicon rod 10 and silicon rod plummer 21 corresponding to Accreditation Waiting Area is transported to by loading place, or, the silicon rod that clamping corresponds to Accreditation Waiting Area is held Cutting silicon rod 12 is simultaneously transported to loading place by Accreditation Waiting Area by cutting silicon rod 12 on microscope carrier 21.

In specific implementation, so that commutation carrier 41 realizes that the unidirectional driving mechanism of commutation movement may include rotation axis And rotary electric machine, by installation foundation of the rotation axis axis connection under it, (installation foundation may be, for example, multi-wire cutting to commutation carrier 41 Cut the pedestal of equipment or the workbench of multi-wire saw equipment), the connecting pin in rotation axis for connecting with commutation carrier 41 can Equipped with the installation edge extended out, installation along it is upper it is uniformly distributed have mounting hole, accordingly, the central location of pedestal in the carrier 41 that commutates Place also is provided with mounting hole, and during installation, pedestal is docked with rotation axis in the carrier 41 that commutates, on the mounting hole and rotation axis on pedestal Mounting hole alignment, later, by the additional locking elements such as such as bolt through alignment mounting hole after locked, complete commutation carrier 41 assembly.When implementing divertical motion, then start rotary electric machine, the rotation of driving rotation axis is to drive commutation carrier 41 to rotate Realize commutation movement.Aforementioned driving rotation axis rotation may be designed as one-directional rotation and be also designed to Double-directional rotary, described unidirectionally to turn Dynamic may be, for example, unidirectionally to rotate clockwise or unidirectionally rotate counterclockwise, and the Double-directional rotary then may be, for example, while realize clockwise It rotates and rotates counterclockwise.In addition, the angle of driving rotation axis rotation can be set according to the actual configuration of silicon rod transfer device. Furthermore disc structure, rectangular disk or oval plate, central location and rotation axis connection can be used in the pedestal in the carrier 41 that commutates, But the shape of pedestal is not limited to this, and in other embodiments, other shapes can also be used in pedestal.

It is provided at least one silicon rod clamper 43 on commutation carrier 41, for clamping corresponding silicon rod.In Fig. 2 and Fig. 3 Shown in multi-wire saw equipment, a silicon rod clamper 43, the silicon rod clamper are equipped on a certain mounting surface of commutation carrier 41 43 can be used for clamping round silicon rod (that is, silicon rod to be cut) and silicon cube (that is, cutting silicon rod).In this way, being carried by driving commutation Tool 41 make commutation movement so that commutation carrier 41 on silicon rod clamper 43 converted between loading place and Accreditation Waiting Area it is to be cut to transport It cuts silicon rod and converts between Accreditation Waiting Area and loading place to transport cutting silicon rod.In actual application, commutate carrier 41 Depending on the rotational angle of work commutation movement is the positional relationship between loading place and Accreditation Waiting Area, in some embodiments, Loading place is to be oppositely arranged with Accreditation Waiting Area, and silicon rod transfer device 4 is located between the two, and therefore, the carrier 41 that commutates is by unidirectional driving 180 ° of angle rotations are made in mechanism driving.But it is not limited thereto, in other embodiments, if loading place and Accreditation Waiting Area are in 90 ° of angles Setting, then, commutation carrier 41 make an angle of 90 degrees rotation by the driving of unidirectional driving mechanism.But, it regardless of how says, loading place and waiting For positional relationship between area without specific limitation, their setting sequence and mutual setting angle can still make other changes Change, as long as if ensuring that unnecessary interference will not be generated between each station, in this way, the rotation direction and rotation of commutation carrier 41 Angle can also be adaptively adjusted.

As previously mentioned, the application multi-wire saw equipment can carry out evolution cutting operation to silicon rod, it can will be in cylinder morphology Circle silicon rod be formed as after evolution cutting operation section be in class rectangle silicon cube.Therefore, the silicon rod clamper 43 in the application It can be achieved both to be capable of clamping single-wafer silicon rod or be capable of clamping silicon cube.

Below to silicon rod clamper 43 and being described in detail.

Silicon rod clamper 43 further comprises at least two silicon rod clamping pieces 431, wherein between at least two silicon rod clamping pieces are Every setting.In one embodiment, still cutting silicon rod has been to erect to place to silicon rod either to be cut, therefore, at least two A silicon rod clamping piece 431 is setting up and down.

In specific implementation, any one silicon rod clamping piece 431 is more can include: clamp arm mounting base 433 and at least two Clamp arm 435, wherein clamp arm mounting base 433 is provided on commutation carrier 41, and at least two clamp arm 435 are to be movably arranged at clamp arm peace It fills on seat 433.In an alternative embodiment, clamp arm 435 is two, the two clamp arm 435 are symmetrical set, single clamp arm 435 are equipped with two clip tooths 437 of front and back layout, in this way, the clip tooth 437 (totally four) in two clamp arm 435 may make up a confession Clamp the grasping part of single-wafer silicon rod or silicon cube.Extraly, the adjusting that centers can more be had both using silicon rod clamping piece 431 Effect.Under general scenario, the clamp arm 435 in silicon rod clamping piece 431 is under clamping state, clamping that two clamp arm 435 are constituted The center in space is that the center of cutting silicon rod has coincided with silicon rod to be cut and.Therefore, it is gone when using silicon rod clamping piece 431 When the silicon rod to be cut placed or cutting silicon rod are erect in clamping, two clamp arm 435 in silicon rod clamping piece 431 are shunk, by pressing from both sides Clip tooth 437 in arm 435 is resisted against silicon rod to be cut or cutting silicon rod.Clamp arm 435 shrink and clamping silicon rod to be cut or During cutting silicon rod, silicon rod to be cut or cutting silicon rod are pushed by two clamp arm 435 of both sides and towards clampings The middle section in space is mobile, and up to silicon rod to be cut or cutting silicon rod is pressed from both sides by two clamp arm 435 in silicon rod clamping piece 431 It tightly lives, at this point, the center of silicon rod to be cut or cutting silicon rod can be located at the center of the grasping part of silicon rod clamping piece 431. Certainly, in the clip tooth 437 in clamp arm 435 can also additional buffer unit, clamping silicon rod to be cut for avoiding or cutting The damage to its surface is caused during cutting silicon rod, plays protection silicon rod to be cut or the good result of cutting silicon rod.

To enable two clamp arm 435 in silicon rod clamping piece 431 smooth and being held fixedly different dimensions Silicon rod to be cut or cutting silicon rod, silicon rod clamping piece 431 further include clamp arm driving mechanism 432, for driving two clamp arm 435 Make opening and closing movement.In some embodiments, clamp arm driving mechanism 432 may be, for example, the cylinder with telescopic shaft.For example, belonging to Two clamp arm 435 in silicon rod clamping piece 431 share a cylinder, and the cylinder has two (sets) telescopic shaft, each (set) telescopic shaft is connected with a clamp arm 435, and clamp arm 435 can be slidedly arranged on commutation carrier 41 by a sliding rail, in this way, utilizing institute Stating cylinder can control telescopic shaft flexible to drive clamp arm 435 to slide on the slide rail and realize clamping movement.It can also be for example, being each Clamp arm 435 configures a cylinder, and the telescopic shaft of the cylinder is connected with clamp arm 435, and clamp arm 435 can be slidedly arranged on by a sliding rail and be changed To on carrier 41, in this way, can control telescopic shaft flexible using the cylinder to drive clamp arm 435 to slide on the slide rail and realize clamping Movement.Certainly, in other embodiments, other forms can also be used in the clamp arm driving mechanism.

Just as it is known by a person skilled in the art that be directed to silicon rod, be by long silicon rod originally carry out truncation operation and shape At, it is bound to so that the size difference between silicon rod is totally different, is for the silicon erect under placement status in view of silicon rod clamper 43 Stick (silicon rod to be cut or cutting silicon rod) is clamped, therefore, for silicon rod clamper 43, the influence of aforementioned dimensions difference Mainly just show that the length difference opposite sex of silicon rod is clamped to silicon rod to whether the silicon rod clamping piece 431 in silicon rod clamper 43 can correspond to Secret worry.

To reduce the risk even exempted above-mentioned silicon rod clamping piece 431 and may can not be clamped to silicon rod, silicon rod clamper 43 have different design schemes.

In one implementation, silicon rod clamper 43 uses fixed clamping piece, that is, with vertical side on commutation carrier 41 Silicon rod clamping piece as much as possible is fixedly installed in formula, and, two neighboring silicon rod clamping piece 431 in these silicon rod clamping pieces 431 Settable smaller of spacing, in this way, using these silicon rod clamping pieces 431 can cover all kinds scale lengths silicon rod.For example, if The length of silicon rod is longer, then participates in clamping using silicon rod clamping piece 431 more on commutation carrier 41；If the length of silicon rod compared with It is short, then clamping is participated in using silicon rod clamping piece 431 less on commutation carrier 41, for example, several underlying silicon rods press from both sides Gripping member 431 participates in clamping, and be located above and be higher than those of silicon rod silicon rod clamping piece 431 and be just not involved in.

In other implementations, silicon rod clamper 43 uses movable clamping piece, that is, with vertical side on commutation carrier 41 Silicon rod clamping piece 431 is arranged in formula activity, since silicon rod clamping piece 431 is movable design, therefore, the number of silicon rod clamping piece 431 Amount can be greatly decreased, and generally two or three can meet.In this way, using movable clamping piece can cover all kinds specification it is long The silicon rod of degree.For example, moving the silicon rod clamping piece 431 of activity setting if the length of silicon rod is longer, extend two silicon rod clampings The clamping spacing of part 431；If the length of silicon rod is shorter, the silicon rod clamping piece 431 of activity setting is moved, shortens two silicon rod folders The clamping spacing of gripping member 431.

For the silicon rod clamper 43 of movable silicon rod clamping piece, different change case is also had.With two silicon rod clamping pieces For 431, in a kind of optional embodiment, a silicon rod clamping piece 431 in two silicon rod clamping pieces 431 is movable sets Counting another silicon rod clamping piece 431 then is fixed design, in this way, in actual application being set by the way that movement is movable That silicon rod clamping piece 431 of meter adjusts the clamping spacing between the silicon rod clamping piece 431 of fixed design.It can from above To know, silicon rod (silicon rod is either silicon rod to be cut is also possible to cutting silicon rod) is to erect to place, therefore, no matter silicon rod Scale lengths, the bottom of silicon rod can always be relatively easy to determination, it is thus preferable to, it can be by position in two silicon rod clamping pieces 431 That silicon rod clamping piece 431 in top be designed as it is movable, in this way, need to only adjust top silicon rod clamping piece 431 position It sets.

Silicon rod clamping piece 431 for the movement for realizing silicon rod clamping piece 431, movable design can be equipped with guiding driving machine Structure.The silicon rod clamping piece 431 of movable design can be driven to move up and down along silicon rod clamper installation part using guiding driving mechanism. In one implementation, guiding driving mechanism can for example, guide rail and guide motor, wherein guide rail is to erect setting, silicon The pedestal of stick clamping piece 431 can be pillowed on guide rail by sliding block, in this way, the position of the silicon rod clamping piece 431 above needing to adjust When setting, moved up and down by guide motor driving silicon rod clamping piece 431 along guide rail.By the silicon rod clamping for controlling movable design Part 431 can adjust the clamping spacing between two silicon rod clamping pieces 431, to carry out to the silicon rod of different size length effective Clamping.

In another optional embodiment, two silicon rod clamping pieces 431 are movable design, in this way, in actual In, their mutual clamping spacing can be adjusted by the movement of two silicon rod clamping pieces 431 of movable design. Since silicon rod clamping piece 431 is movable design, then, at least one silicon rod clamping piece 431 in two silicon rod clamping pieces 431 Guiding driving mechanism need to be set, for driving two silicon rod clamping pieces 431 to move up and down.

In fact, in the case of two silicon rod clamping pieces 431 are movable design, not only using guiding driving mechanism Clamping spacing between adjustable two silicon rod clamping pieces 431 to carry out except effectively clamping the silicon rod of different size length, The purpose that can also realize lifting to the silicon rod of clamping passes through driving after two silicon rod clamping pieces 431 effectively clamp silicon rod Silicon rod clamping piece 431 moves up and down and goes up and down silicon rod.Specifically, still guiding is provided with the silicon rod clamping piece 431 of top to drive For motivation structure, had adjusted and lower section silicon rod firstly, the silicon rod clamping piece 431 of top is moved up and down by guiding driving mechanism Clamping spacing between clamping piece 431；Then, it is driven using the clamp arm driving mechanism in each silicon rod clamping piece 431 corresponding Two clamp arm 435 make clamping movement with smooth and be held fixedly silicon rod；Then, the silicon rod clamping piece 431 of top leads to again It crosses guiding driving mechanism driving and moves upwards, at this point, since frictional force acts on, the silicon rod clamping of the silicon rod and lower section that clamp Part 431 moves upwards therewith together, wherein the silicon rod clamped move upwards utilize be top silicon rod clamping piece 431 with Frictional force effect between silicon rod, silicon rod clamping piece 431 move upwards, and what is utilized is the silicon rod clamping piece 431 of silicon rod and lower section Between frictional force effect, thus realize lifting silicon rod effect.Drive of the silicon rod clamping piece 431 of top in guiding driving mechanism It is also identical process that dynamic lower drive silicon rod and the silicon rod clamping piece 431 of lower section, which move downward, to realize the effect of landing silicon rod Fruit, it will not be described here.

It should be noted that in other change case, the silicon rod clamping piece of lower section e.g. in two silicon rod clamping pieces 431 Guiding driving mechanism, structure, set-up mode and driving working method and the aforementioned top of guiding driving mechanism are set on 431 The guiding driving mechanism of silicon rod clamping piece 431 is similar, for example, by lower section silicon rod clamping piece 431 guiding driving mechanism drive It moves up and down under dynamic and adjusts the clamping spacing between top silicon rod clamping piece 431, and by the silicon rod clamping piece 431 of lower section The silicon rod clamping piece 431 of silicon rod and top is driven the modes such as to move up and down together under the driving of guiding driving mechanism.Again for example Two silicon rod clamping pieces 431 are provided with guiding driving mechanism, then the set-up mode of guiding driving mechanism and driving working method And the motion mode of two silicon rod clamping pieces 431 is self-evident, it will not be described here.

It is moved up and down in the silicon rod clamping piece 431 for movable setting to adapt to the progress of the silicon rod of different size length In the situation of clamping, in addition to silicon rod clamping piece 431 need to be arranged guiding and be driven using movable structure design, silicon rod clamping piece 431 Except motivation structure etc., it certainly will also need to know the scale lengths for the silicon rod for currently needing to clamp.In view of this, more in the application Linear cutting equipment may also include height testing instrument 430, for detecting the height for erectting the silicon rod placed, to set as movable The silicon rod clamping piece 431 set is moved up or is moved down and the foundation of moving distance subsequent.

Correspondingly, in the present embodiment, silicon rod to be cut is shape after evolution cutting operation and other related operations It is generally, long during being formed as silicon cube by silicon rod to be cut at silicon cube (the silicon cube be cutting silicon rod) Degree be it is constant, therefore, using 43 de-clamping of silicon rod clamper be located at the silicon cube at evolution cutting operation station when, silicon rod press from both sides The silicon rod clamping piece 431 of movable setting can no longer need to adjust on tool 43.

In addition, the silicon rod clamper in the application silicon rod transfer device can also have other variations.For example, silicon rod transfer device Silicon rod clamper there are two configurable, the two silicon rod clampers can be respectively arranged at two mounting surfaces opposite in commutation carrier 41 On.And the two silicon rod clampers can be it is identical be also possible to it is different.In the same case, the two silicon rod clampers For clamping round silicon rod and silicon cube.In the case of difference, as shown in figure 4, being shown as silicon rod transfer device in a certain implementation Structural schematic diagram in example, a silicon rod clamper 43 on the carrier 41 that commutates in two silicon rod clampers 43,44 are exclusively used in clamping circle Silicon rod, another silicon rod clamper 44 are exclusively used in clamping silicon cube.

Further more, the silicon rod transfer device 4 in the application more can provide the movement at least one direction.For example, silicon rod turns Shipping unit 4 may include the driving and reversing mechanism along Y-axis setting.In specific implementation, as shown in figure 3, the driving and reversing mechanism can include: into Move back guide rail 902 and advance and retreat motor, wherein advance and retreat guide rail 902 is to be arranged along Y-axis, and the pedestal of commutation carrier 41 can pass through sliding block 904 It pillows on advance and retreat guide rail 902, in this way, being commutated and being carried by the advance and retreat motor driven when needing to adjust the position of commutation carrier 41 Tool 41 is retreated along advance and retreat guide rail 902.It is retreated by control commutation carrier 41 along advance and retreat guide rail 902, can adjust commutation carrier 41 in the position of Y-axis, so that the silicon rod clamper 43 on commutation carrier 41 can correspond to the silicon rod plummer of loading place or wait Silicon rod plummer 21 to area.

Using silicon rod transfer device 4, it can be achieved that handling to silicon rod, that is, can be transported to silicon rod to be cut by loading place Loading place is transported to by the silicon rod plummer for corresponding to Accreditation Waiting Area corresponding to the silicon rod plummer of Accreditation Waiting Area or by cutting silicon rod.

In actual application, the application multi-wire saw equipment may also include the silicon rod measuring device set on Accreditation Waiting Area, use Dimensional measurement is carried out in the cutting silicon rod 12 for treating cutting silicon rod 10 or after evolution is cut, is wanted with determining whether to meet product It asks.On the one hand, silicon rod 10 to be cut is transported to the silicon rod carrying corresponding to Accreditation Waiting Area using silicon rod transfer device 3 by loading place After platform 21 and before carrying out evolution cutting operation, needs to treat cutting silicon rod 10 and carry out dimensional measurement and position measurement, In When necessary, cutting silicon rod 10 can be still treated by silicon rod transfer device 3 carries out position adjustment.On the other hand, it is cut by evolution After operation, it is also desirable to carry out dimensional measurement to cutting silicon rod 12.It, not only can be by to be cut using silicon rod measuring device Silicon rod 10 and the dimensional measurement of cutting silicon rod 12 examine whether silicon rod meets product requirement after evolution cutting operation, The wear condition of wire-electrode cutting device can be obtained indirectly by treating cutting silicon rod 10 and the dimensional measurement of cutting silicon rod 12, So that real-time perfoming is calibrated or is corrected, or even maintenance or replacement.

Wire-electrode cutting device 3 is set on base 1, for carried on silicon rod plummer 21 in silicon rod conversion equipment 2 to Cutting silicon rod 10 carries out evolution cutting.In actual application, wire-electrode cutting device includes that an at least line corresponding with cutting area is cut Cut unit.

In Fig. 1 and multi-wire saw equipment shown in Fig. 2, wire-electrode cutting device 3 includes: liftably to be set on base 1 Wire cutting support 31 and at least wire cutting unit 33 on wire cutting support 31, wherein wire cutting support 31 can lead to It crosses an elevating mechanism and makees elevating movement with respect to base 1, an at least wire cutting unit 33 is corresponding with cutting area and has formation The cutting line 331 of secant net, using an at least wire cutting unit 33 to the silicon rod for corresponding to cutting area in silicon rod conversion equipment 2 The silicon rod to be cut 10 that plummer 21 is carried carries out evolution cutting.

Wire cutting support 31 can be liftably set on the mounting structure of base 1 by an elevating mechanism.In an embodiment party In formula, the elevating mechanism may include having by the achievable wire cutting support 31 such as lifting motor, riser guide and lifting slider Carry out the mechanism of vertical deviation, wherein riser guide is along the mounting structure that Z axis is vertically arranged to base 1, lifting slider setting In wire cutting support 31 back and matched with riser guide, for make wire cutting support 31 can realize stablize lifting in base Double Guide Rail Designs can be used in 1 mounting structure, that is, use two riser guides, the two riser guides are arranged parallel.It is rising It drops under motor (lifting motor may be, for example, servo motor) driving, it can be achieved that wire cutting support 31 is by riser guide and lifting Sliding block makees elevating movement relative to base 1.

Referring to Fig. 5, being shown as the structural schematic diagram of 3 middle line cutter unit 33 of wire-electrode cutting device.In conjunction with Fig. 2 and Fig. 5, line Cutter unit 33 includes at least: the coil holder 333 on wire cutting support 31, multiple cutting wheels 335 on coil holder 333, Multiple guide rollers 337 and the cutting line 331 for being sequentially set around each cutting wheel 335 and each guide roller 33.

Wire cutting unit 33 includes at least eight cutting wheels 335, this at least eight cutting wheel 335, every two cutting wheel group At a cutting wheel group, two cutting wheel groups being oppositely arranged partner cutting wheel group, and therefore, eight cutting wheels 335 can group At at two pairs of cutting wheel groups.Wherein, two cutting wheels 335 belonged in a cutting wheel group can be assemblied in an installation axle 334 On, two installation axles 334 in two cutting wheel groups being oppositely arranged are parallel to each other, two in two adjacent cutting wheel groups Installation axle 334 is mutually perpendicular to.Specifically, wire cutting unit 33 includes two pairs of cutting wheel groups, that is, first pair of cutting wheel group and second To cutting wheel group.First pair of cutting wheel group includes the first cutting wheel group and the second cutting wheel group, is respectively in a left side for coil holder 333 Right two sides, wherein the first cutting wheel group is located at the left side of coil holder 333 and is set to the first peace including the first installation axle and front and back Two cutting wheels 335 on axis are filled, the second cutting wheel group is located at the right side of coil holder 333 and sets including the second installation axle and front and back Two cutting wheels 335 being placed in the second installation axle；Second pair of cutting wheel group includes third cutting wheel group and the 4th cutting Wheel group is respectively in the front and rear sides of coil holder 333, wherein third cutting wheel group is located at the front side of coil holder 333 and installs including third In two cutting wheels 335 in third installation axle, the 4th cutting wheel group is located at the rear side and packet of coil holder 333 for axis and left and right settings The 4th installation axle and left and right settings are included in two cutting wheels 335 in the 4th installation axle.

For each cutting wheel 335, the wire casing that a few (at least two circles) are parallel to each other is laid in cutting wheel 335 336, it can provide cutting line 331 winding.In the prior art, the periphery of cutting wheel 335 is coated with polyurethane material, wire casing 336 mostly It is that fluting is formed on the polyurethane material of 335 periphery of cutting wheel.It can join for the specific implementation of the grooving method of wire casing Examine the patent publication us such as example, CN106738391A.Fig. 6 and Fig. 7 are please referred to, is shown as being assemblied in same installation axle 334 Two cutting wheels 335 and the schematic cross-section of wire casing 336 in different embodiments thereon.In conjunction with Fig. 6 and Fig. 7, assembly It is identical in the layout and structure of the wire casing 336 in two cutting wheels 335 in same installation axle 334.In Fig. 6, each is cut Cut and be laid with five astragal slots 336 being parallel to each other on wheel 335, and the slot pitch of two astragal slot 336 of arbitrary neighborhood be definite value L1 (that is, Each astragal slot 336 is uniformly distributed at equal intervals), the slot pitch of two astragal slot 336 of arbitrary neighborhood may be designed as 2 millimeters or so, for example, 1.8 millimeters to 2.5 millimeters.In Fig. 7, five astragal slots 336 being parallel to each other, each astragal are laid in each cutting wheel 335 Slot 336 is unequal interval laying, and the slot pitch between different astragal slots 336 is non-definite value (for example, L1 and L2).It can by Fig. 6 and Fig. 7 Know, the wire casing 336 laid in cutting wheel 335 may be, for example, V-groove.

In addition, wire cutting unit 33 includes at least eight guide rollers 337, these guide rollers 337 constitute guide roller group. In the present embodiment, guide roller 337 and cutting wheel 335 correspond, and, guide roller 337 is configured at corresponding cutting wheel 335 Top.Cutting line 331 is sequentially around in each cutting wheel 335 and each guide roller 337 and forms cutting gauze, in actual application In, by taking eight cutting wheels 335 and eight guide rollers 337 as an example, cutting line is sequentially around in this eight cutting wheels 335 and (is around in and cuts Cut in wheel 335 in corresponding wire casing 336) and eight guide rollers 337 after four cutting line segments of formation, this four cutting line segment structures At cutting gauze.Specifically, cutting line 331 is formed after being set around two cutting wheels 335 that front and back is arranged in the first cutting wheel group First cutting line segment, formation second is cut after cutting line 331 is set around two cutting wheels 335 that front and back is arranged in the second cutting wheel group Secant section, cutting line 331 form third cutting line after being set around two cutting wheels 335 of left and right settings in third cutting wheel group Section, cutting line 331 form the 4th cutting line segment after being set around two cutting wheels 335 of left and right settings in the 4th cutting wheel group.Such as This, the first cutting line segment, the second cutting line segment, third cutting line segment and the 4th cutting line segment are cooperatively formed in " well " font Cutting gauze.In some embodiments, adjacent two cutting line segments are mutually perpendicular to and two opposite cutting line segment phases It is mutually parallel.Specifically, the first cutting line segment in the first cutting wheel group and the second cutting line segment are parallel to each other, the second cutting wheel group In third cutting line segment and the 4th cutting line segment be parallel to each other, in the first cutting wheel group first cutting line segment and second cutting Line segment cuts line segment with the third in the second cutting wheel group and the 4th cutting line segment is mutually perpendicular to.And it is around in certain in cutting wheel 335 Cutting line part 338 between one wire casing 336 and corresponding guide roller 337 keeps vertical state.

In this way, in actual application, when the coil holder 333 in wire cutting unit 33 follows wire cutting support 31 with respect to base When 1 decline, cutting gauze contraposition is formed by by item each on coil holder 333 cutting line segment and is held in the silicon rod plummer 21 of cutting area The silicon rod to be cut 10 carried carries out evolution cutting along silicon rod length direction.

In fact, above-mentioned wire cutting unit 33 can still make other variations, for example, in some embodiments, the line Cutter unit may include four cutting wheels and four guide rollers, this four guide rollers are respectively arranged on the upper of corresponding four cutting wheels Side, this four cutting wheels are combined into a pair of of cutting wheel group, that is, forming a cutting wheel group by two cutting wheels, (the two are cut Cutting wheel can be assemblied in an installation axle), it is partnered cutting wheel group by two cutting wheel groups being oppositely arranged.Each cutting wheel Group includes two cutting wheels being oppositely arranged and the cutting line segment being wound in two cutting wheels, is adhered to separately not in a pair of of cutting wheel group It is parallel to each other with two cutting line segments in cutting wheel group.Spacing between two cutting wheels in each cutting wheel group with to The sectional dimension of cutting silicon rod is corresponding.For example, two cutting wheel components that a pair of of cutting wheel group includes are listed in the left and right of coil holder Two sides, wherein a cutting wheel group includes two cutting wheels that front and back is arranged, and is wound with cutting line segment between two cutting wheels, Another cutting wheel group also includes two cutting wheels that front and back is arranged, and cutting line is sequentially around in four cutting wheels and (is around in cutting wheel In in corresponding wire casing) and four guide rollers form two cutting line segments being parallel to each other, this two cutting line segments compositions later Cut gauze.

In actual application, for the wire cutting unit for including a pair of of cutting wheel group, silicon rod to be cut is opened Square cutting operation just needs evolution cutting step twice, and in the cutting of first time evolution and then secondary adjustment silicon rod to be cut Cutting position.In this way, silicon rod plummer can be set to rotary structure in a certain implementation, and such as: silicon rod plummer It can be realized and be rotated by a rotating mechanism, in this way, driving the rotation of silicon rod plummer by the rotating mechanism, so that it may successfully will Silicon rod to be cut is rotated (such as being rotated by 90 °), so that two cutting line segments in that a pair of of cutting wheel group can be to rotation Silicon rod to be cut after turning carries out second of evolution cutting, completes the evolution cutting of silicon rod to be cut.In addition, aforementioned silicon rod press Compact heap in mechanism can also rotate.

In this way, by setting rotary structure for silicon rod plummer and silicon rod top-pressure mechanism, so that it may successfully will be to be cut It cuts silicon rod and is rotated (such as being rotated by 90 °), so that after two cutting line segments in that a pair of of cutting wheel group can be to rotation Silicon rod to be cut carry out second and cut, complete the evolution of silicon rod to be cut.

In the implementation for setting rotary structure for silicon rod plummer and silicon rod top-pressure mechanism, the silicon rod carrying Platform may be designed as can the compact heap axis in spinning motion and silicon rod top-pressure mechanism turn to be connected to support, therefore, silicon rod plummer or Person's compact heap linkage is in a rotation drive device.In some embodiments, when silicon rod plummer is in linkage with rotation driving When device, by silicon rod plummer as active rotatable parts and compact heap is then used as driven rotation component；In certain embodiments In, when compact heap is in linkage with a rotation drive device, by compact heap silicon rod plummer then conduct as active rotatable parts Driven rotation component.By taking silicon rod plummer is in linkage with a rotation drive device as an example, silicon rod top-pressure mechanism can be with the silicon rod under it Plummer cooperates, and specifically, after silicon rod to be cut setting is placed on rotation silicon rod plummer, is driven by lifting Structure drives compact heap to make descending motion until compact heap presses on the top of silicon rod to be cut along bearing.It is subsequent, it is needing When rotating silicon rod to be cut, is rotated by the silicon rod plummer or compact heap of rotation drive device driving linkage, held using silicon rod Microscope carrier, silicon rod to be cut and the mutual frictional force of compact heap, take advantage of a situation and silicon rod to be cut are driven also to rotate together, realize The adjustment of work surface or operating area in silicon rod to be cut, so that treating work surface adjusted or operation in cutting silicon rod Region carries out processing operation.The velocity of rotation and rotational angle of silicon to be cut can be controlled by rotation drive device.Specific On implementation, rotation drive device then may be, for example, rotating electric machine.

In addition, in some embodiments, wire cutting unit 33 may also include following at least one component: being set to coil holder 333 and/or wire cutting support 31 on straining pulley, for carrying out the tension adjustment of cutting line 331；And on base 1 Line storage tube (line storage tube more may include ureeling barrel and wire winding tube) is used for folding and unfolding cutting line 331.

It should be noted that, it is contemplated that be realize treat cutting silicon rod 10 it is complete cutting and for avoid cut line segment because by The situations such as damage are generated to blocking, technical solution provided by the present application is to the silicon rod plummer for carrying silicon rod 10 to be cut 21 have carried out certain structure design.For example, silicon rod plummer 21 is the mesa structure in rectangular section, in the mesa structure with The size outline of the loading end of silicon rod contact is less than the section for the cutting silicon rod that silicon rod to be cut is formed after evolution is cut, this Sample, the coil holder 333 in wire-electrode cutting device 3 follows wire cutting support 31 to decline with respect to base 1, by each cutting line on coil holder 333 Section is formed by the contraposition of cutting gauze and carries out evolution cutting in the silicon rod to be cut 10 that the silicon rod plummer 21 of cutting area is carried, When cutting gauze reaches the bottom of silicon rod 10 to be cut, it is straight that each item cutting line segment in cutting net can unhinderedly continue decline To silicon rod 10 to be cut is run through, the complete cutting for treating cutting silicon rod 10 is realized.Certainly, the structure of silicon rod plummer 21 not with This is limited, and in some embodiments, silicon rod plummer 21 is the mesa structure of rounded section or rectangular section, the table top knot The size of the loading end contacted in structure with silicon rod is greater than cutting for the cutting silicon rod that silicon rod to be cut is formed after evolution is cut Therefore, on mesa structure face is provided with the wire casing, specifically, mesa structure of allowing corresponding with item cutting line segment each in cutting gauze It is upper to may be provided with and the first cutting line segment, the second cutting line segment, third cutting line segment and the 4th cutting line segment corresponding four Section allows wire casing.It is biggish to provide as allowing the size of wire casing, generally, allow the width of wire casing and depth can be appropriate larger Redundancy, for example, the width of wire casing is allowed to may be, for example, 8 millimeters to 12 millimeters.In this way, the coil holder 333 in wire-electrode cutting device 3 follows Wire cutting support 31 declines with respect to base 1, is formed by cutting gauze contraposition in cutting area by item each on coil holder 333 cutting line segment The silicon rod to be cut 10 that is carried of silicon rod plummer 21 carry out evolution cutting, cutting gauze reaches the bottom of silicon rod 10 to be cut And continue to decline until each item cutting line segment cut in gauze can submerge the corresponding line that allows just through silicon rod 10 to be cut In slot, the complete cutting for treating cutting silicon rod is realized.

It is illustrated by taking multi-wire saw equipment shown in Fig. 2 as an example below.When application multi-wire saw equipment shown in Fig. 2 is come When carrying out evolution cutting operation to silicon rod, operating process can be generally comprised: first with silicon rod transfer device 4 by silicon rod to be cut 10 are placed on the silicon rod plummer 21 of Accreditation Waiting Area.Then, silicon rod plummer 21 is passed through into Y-direction motion in Y-direction Advance, cutting area is moved to from Accreditation Waiting Area, at this point, the wire cutting unit 33 in wire-electrode cutting device 3 is right against the silicon positioned at cutting area Silicon rod to be cut on stick plummer 21.Then, the wire cutting support 31 in wire-electrode cutting device 3 is driven to decline with respect to base 1, by Each item cutting line segment is formed by the contraposition of cutting gauze and carries in the silicon rod of cutting area on 3 middle line cutter unit 33 of wire-electrode cutting device The silicon rod to be cut 10 that platform 21 is carried carries out evolution cutting, until each item cutting line segment in cutting gauze runs through silicon to be cut Stick 10 completes the complete cutting (referring to Fig. 8) for treating cutting silicon rod 10, forms cutting silicon rod 12 and flaw-piece after evolution is cut 13。

The implementation evolution of cutting silicon rod 10, which can be treated, using the multi-wire saw equipment in Fig. 2 is cut to cutting silicon rod 12 With flaw-piece 13.After the long-time service of multi-wire saw equipment, the wire casing 336 that cutting line 331 is wound in cutting wheel 335 can generate mill Damage, influences cutting effect.Therefore, generally, carry out changing slot operation, cutting line is changed and is around in other new wire casings, at this point, just The slot pitch of the wire casing and current wire casing according to new is needed, the moving distance of cutting wheel 335 is adjusted.In the present embodiment, it is also disclosed One kind changing groove mechanism, and the groove mechanism that changes is configured in the installation axle of wire-electrode cutting device, including is set at least one in installation axle The paragraph type at end adjusts structure, during changing slot, is rotatablely installed axis, and driving paragraph type adjustment structure progress paragraph type is mobile, New wire casing is adjusted to the winding position where former wire casing, that completes cutting line changes slot operation.In addition, described change groove mechanism also It may include location structure, the location structure and paragraph type adjustment structure cooperation, for positioning the paragraph type adjustment knot Structure carries out the mobile moving distance of paragraph type, to realize cutting wheel quickly and accurately shift position.

Fig. 9 is please referred to Figure 11, wherein Fig. 9 is shown as changing schematic diagram of the groove mechanism under a certain visual angle, Figure 10 in Fig. 5 It is shown as changing schematic diagram of the groove mechanism under another visual angle, Figure 11 is shown as changing the enlarged diagram of slot structure in Figure 10.In conjunction with Fig. 9 to Figure 11 changes the paragraph type adjustment structure 351 that groove mechanism 35 includes at least one end in installation axle 334.

It is to be located at the step end face of 334 end of installation axle that paragraph type, which adjusts structure 351, step in the step end face The quantity in face is consistent with the online slot number of the cutting wheel, and, the drop between two neighboring step surface corresponds to adjacent two Slot pitch between astragal slot.It is parallel to each other as previously mentioned, being laid in the cutting wheel 335 being configured in the same installation axle 334 Five astragal slots 336, and the slot pitch of two astragal slot 336 of arbitrary neighborhood be definite value L1 (that is, each astragal slot 336 be at equal intervals uniformly Lay), it include five step surfaces in step end face 351 correspondingly therefore, the drop between two neighboring step surface It is consistent with the slot pitch of two adjacent rings wire casing 336.Drop between two neighboring step surface may be designed as 2 millimeters or so, for example, 1.8 millimeters to 2.5 millimeters.Certainly, it above are only exemplary illustration, in some embodiments, if being configured at the same installation Each astragal slot laid in cutting wheel on axis designs for unequal interval, and the slot pitch between different astragal slots 336 is simultaneously non-equal, that , correspondingly, in step end face include the step surface of quantity identical as wire casing circle number in cutting wheel, adjacent step surface it Between drop it is consistent with the slot pitch between wire casing adjacent on corresponding position.For example, between First terrace and second step face Slot pitch between drop and the first wire casing and the second wire casing is consistent, drop and the second line between the second terrace and third step surface Slot pitch between slot and third wire casing is consistent, the drop between third step surface and the 4th step surface and third wire casing and the 4th line Slot pitch between slot is consistent, the slot between drop and the 4th wire casing and the 5th wire casing between the 4th step surface and the 5th step surface Away from consistent.

In addition, in some embodiments, may also include transition knot in step end face 351 between two neighboring step surface Structure, the transition structure may be, for example, by the transition slope surface in the face of stepping to a new level to next step surface.

Location structure 353 is pin, is positioned for the step surface by being resisted against in step end face 351.In In actual application, pin 353 is to be fixedly installed on coil holder 333.When installation axle 334 is fixed on coil holder 333, backstop Pin 353 is resisted against that step surface corresponding with current wire casing in step end face 351.

When needing replacing the wire casing of cutting wheel, cutting line 331 first can be loosened into (such as by line storage tube unwrapping wire), so that Current wire casing 336 is detached from cutting line 331 and cutting wheel 335；Release installation axle 334 (such as unscrew for axis to be fixedly mounted 334 bolt), it is rotatablely installed axis 334, it is mobile until will be right with new wire casing 336 that driving step end face 351 carries out paragraph type The step surface answered moves in place and is resisted against pin 353, so as to adjust new wire casing 336 to original 336 institute of wire casing Winding position；It is subsequent, cutting line 331 is around on new wire casing 336, to complete to change slot operation.With aforementioned middle cutting Wheel 335 is laid with for five astragal slots 336 being parallel to each other, this five astragals slot 336 be referred to as from left to right the first wire casing, Second wire casing, third wire casing, the 4th wire casing and the 5th wire casing, the step end face 351 on 334 end face of installation axle have with Corresponding five step surfaces of five astragal slot 336, this five step surfaces are referred to as First terrace, second step from left to right Face, third step surface, the 4th step surface and the 5th step surface.It is assumed that current cut line 331 be set around in the first wire casing (for Convenient for explanation, the current location of the first wire casing 336 of cutting line winding is known as winding position), cutting line is around in cutting wheel 335 The first wire casing and the cutting wheel above the cutting line part of guide roller keep vertical state, the in step end face 351 One step surface is resisted against pin 353.It now needs by the first wire casing to replace wire casing to the second wire casing, then changing the stream of slot operation Journey can include: line storage tube unwrapping wire can be first passed through, cutting line 331 is loosened, so that in cutting line 331 and cutting wheel 335 currently First wire casing is detached from；The bolt for axis 334 to be fixedly mounted is unscrewed, installation axle 334 is unclamped；It is rotatablely installed axis 334, drives step Formula end face 351 carries out paragraph type movement, step end face 351 is switched to second step face by First terrace, when second When terrace is resisted against pin 353, that is, show installation axle 334 to be moved to the left between First terrace and second step face and fall The distance of difference (drop is consistent with the slot pitch of the second wire casing with the first wire casing), that is to say, that by the second wire casing in cutting wheel 335 The winding position being moved to where original first wire casing；Cutting line 331 is around on the second wire casing；Bolt is tightened to be fixedly mounted Cutting line 331 is tightened in axis 334, line storage tube take-up, to complete to change slot operation.

As it can be seen that groove mechanism is changed using disclosed in the present application, during changing slot, it is only necessary to which the paragraph type in groove mechanism is changed in driving Adjustment structure, which carries out paragraph type movement, to be adjusted new wire casing to the winding position where former wire casing, and slot operation behaviour is entirely changed Make simple and can ensure that the adjustment of wire casing slot position precisely in place, improves operating efficiency.

Certainly, the groove mechanism that changes can still make other variations.In some embodiments, the paragraph type adjustment structure is The step-like recesses being located in the installation axle, the quantity and the online slot number of the cutting wheel of step groove in the step-like recesses Measure it is consistent, and, drop between two neighboring step groove corresponds to the slot pitch between two adjacent rings wire casing.The location structure For fastening screw, positioned for the step groove by snapping into the step-like recesses.

In the related art, silicon rod 10 to be cut will form flaw-piece after evolution is cut, general for the unloading of flaw-piece Flaw-piece unloading manner is detached from cutting silicon rod and is moved away from out multi-thread mostly or by operator's manual operations by flaw-piece Cutting equipment, not only inefficiency, and flaw-piece can be made to collide with cutting silicon rod in the handling process and increase and cut Cut the risk of silicon rod damage.In view of this, the application multi-wire saw equipment further includes flaw-piece discharge mechanism, for filling wire cutting It sets 3 and treats the flaw-piece that is formed after cutting silicon rod 10 carries out evolution cutting and unloaded.

The flaw-piece discharge mechanism is set on base 1, including flaw-piece hoisting mechanism and thread-laying mechanism.

Flaw-piece hoisting mechanism for promote flaw-piece so that flaw-piece relatively cutting silicon rod make rise displacement so that the top of flaw-piece Portion protrudes from cutting silicon rod.

Please refer to Figure 12 and Figure 13, wherein Figure 12 is shown as in the application multi-wire saw equipment flaw-piece hoisting mechanism at certain Schematic diagram under one upward view angle, Figure 13 are shown as the schematic top plan view of flaw-piece hoisting mechanism in the application multi-wire saw equipment.

By earlier figures 1 and Fig. 2 it is found that shape after eight cutting wheels that cutting line 331 is sequentially set around in wire cutting unit 33 At four cutting line segments, this four cutting line segments constitute cutting gauze, and (as shown in Figure 12 and Figure 13, cutting line segment is denoted as 332).Using the application multi-wire saw equipment, silicon rod 10 to be cut is cut into four two-by-two in parallel along silicon rod length direction Cutting planes and formed four camber line flaw-pieces 13, therefore, the quantity of flaw-piece hoisting mechanism 5 may be, for example, four, right two-by-two To the opposite sides for being set to coil holder 333 in wire cutting unit 33, lifting can be realized with coil holder 333.Certainly, variable at other In the embodiment of change, if including that (this pair of of cutting wheel group includes two be oppositely arranged to a pair of of cutting wheel group in wire cutting unit 33 A cutting wheel group forms two cutting line segments), then, the quantity of flaw-piece hoisting mechanism 5 may be, for example, two, be arranged oppositely in The opposite sides of coil holder 333 in wire cutting unit 33.

In specific implementation, flaw-piece hoisting mechanism 5 may include the jacking part 51 of scalable movement, specifically, jack part 51 It is controlled be extended movement after hold the bottom of flaw-piece 13.As shown in figure 12, jacking part 51 may be, for example, a supporting plate, the supporting plate Rear end is controlled by an extensible member 53 and makees stretching motion.Extensible member 53 may be, for example, the cylinder with telescopic rod, wherein institute Stating telescopic rod can be connect by connection structure with jacking part 51, and the cylinder can drive telescopic rod to drive jacking part 51 to stretch Movement.Here, jacking part 51 includes the stretching routine for jacking the contractile motion and jacking part 51 of part 51 as stretching motion, wherein The contractile motion of jacking part 51 refers to being shunk by the cylinder driving telescopic rod as extensible member 53 to drive jacking part 51 remote From flaw-piece 13, the stretching routine for jacking part 51 is referred to by the cylinder driving telescopic rod stretching, extension as extensible member 53 to drive top Part 51 is risen close to flaw-piece 13.Certainly, other implementations can also be used in aforementioned extensible member 53, for example, the extensible member It may be, for example, the servo motor with lead screw, the lead screw is connected with the jacking part, as described in the driving of the servo motor Lead screw is rotated to drive the connected jacking part to make stretching motion, for example, driving the lead screw to rotate forward drives the top It rises part to make contractile motion and drive the lead screw backwards rotation that the jacking part is driven to be extended movement, alternatively, driving the silk Thick stick, which rotates forward, to be driven the jacking part to be extended movement and drives the lead screw backwards rotation that the jacking part is driven to shrink Movement.

In actual application, in the initial state, the telescopic rod drives jacking part 51 to be in contraction state；Wire cutting Support 31 and wire cutting unit 33 thereon are driven opposite base 1 to decline so that each on coil holder 333 in wire cutting unit 33 Item cutting line segment 332 is formed by the contraposition of cutting gauze and carries out evolution cutting in the silicon rod to be cut 10 of cutting area, until cutting Cutting line segment 332 in gauze runs through silicon rod 10 to be cut, and that completes to treat cutting silicon rod 10 cuts completely and formed flaw-piece 13, At this point, flaw-piece hoisting mechanism 5 has followed wire cutting unit 33 to drop to bottom；The cylinder drives the telescopic rod stretching, extension with band Dynamic jacking part 51 is close to flaw-piece 13 until holding the bottom of flaw-piece 13；It is subsequent, wire cutting support 31 and wire cutting unit thereon 33 are driven opposite base 1 to rise, and flaw-piece hoisting mechanism 5 follows wire cutting unit 33 to rise, and flaw-piece 13 is driven to cut relatively Silicon rod 12 occurs to rise displacement, so that the top of flaw-piece 13 protrudes from silicon rod 12 (referring to Figure 14) to be cut, when the top of flaw-piece 13 When part satisfaction setting condition is protruded compared to silicon rod 12 to be cut in portion, then wire cutting unit 33 can control to stop rising.In this way, Subsequent, what the top of flaw-piece 13 can be used as being grabbed puts forth effort position, so that flaw-piece 13 is easier to be crawled.

Certainly, flaw-piece hoisting mechanism 5 can still make other variations.For example, in some embodiments, as shown in figure 15, Flaw-piece hoisting mechanism 5 includes jacking part 51 and extensible member 53, wherein jacking part 51 more may include abutment plate and supporting plate.Institute The bottom for stating abutment plate from the supporting plate extends upward, and further, the abutment plate can be more the arc with flaw-piece 13 The compatible arc panel in surface can come into full contact with, institute when the abutment plate is resisted against flaw-piece 13 with the curved surfaces of flaw-piece 13 The position that abutment plate is contacted with flaw-piece 13 is stated to be round and smooth design or to have the interior table contacted with flaw-piece 13 in the abutment plate Cushion is added in face.The supporting plate lives the bottom of flaw-piece 13 for support, and further, the supporting plate more can be and flaw-piece 13 bottom surface is adapted cambered plate.In other embodiments, convex block can be also added as the string side of the cambered plate of supporting plate, with can Increase the contact area with the bottom surface of flaw-piece 13.Extensible member 53 may be, for example, the cylinder with telescopic rod, wherein described flexible Bar can be connect by connection structure with the supporting plate in jacking part 51, and the cylinder can drive the telescopic rod to drive top It rises part 51 and makees stretching motion.In actual application, in the initial state, the telescopic rod drives jacking part 51 to be in contraction-like State；Opposite base 1 is driven to decline for wire cutting unit 33 so that each cutting line segment institute on coil holder 333 in wire cutting unit 33 The cutting gauze contraposition of formation carries out evolution cutting in the silicon rod to be cut 10 of cutting area, until the cutting gauze is through to be cut Cut silicon rod 10, that completes to treat cutting silicon rod 10 cuts completely and formed flaw-piece 13, at this point, flaw-piece hoisting mechanism 5 has followed line Cutter unit 33 drops to bottom；The cylinder drives the telescopic rod stretching, extension to drive jacking part 51 close to flaw-piece 13 until top Rise part 51 in abutment plate contacted with flaw-piece 13 and realize against；Subsequent, wire cutting unit 33 is driven opposite base 1 to rise, Flaw-piece hoisting mechanism 5 follows wire cutting unit 33 to rise, and driving flaw-piece 13, cutting silicon rod 12 has occurred to rise displacement relatively, so that The top of flaw-piece 13 protrudes from silicon rod 12 (referring to Figure 16 and Figure 14) to be cut, when the top of flaw-piece 13 is compared to silicon rod to be cut When 12 protrusion parts meet setting condition, then wire cutting unit 33 can control to stop rising.

In some embodiments, the flaw-piece hoisting mechanism may include adsorption piece and the adsorption piece driven to make flexible fortune Dynamic extensible member, the adsorption piece are controlled by the extensible member and are resisted against flaw-piece and adsorb flaw-piece.The adsorption piece It more may include abutment plate and absorptive element.The abutment plate may be, for example, arc compatible with the curved surfaces of the flaw-piece Plate can come into full contact with when the abutment plate is resisted against the flaw-piece with the curved surfaces of the flaw-piece.The absorptive element can For example, vacuum chuck, multiple vacuum chucks can be laid on the contact surface that contact with the flaw-piece in the abutment plate.Institute Stating extensible member may be, for example, the cylinder with telescopic rod or the servo motor with lead screw, be with the cylinder with telescopic rod Example, the telescopic rod can be connect by connection structure with the abutment plate in the jacking part, and the cylinder can drive described flexible Bar is shunk to drive the abutment plate far from the flaw-piece, the cylinder can drive telescopic rod stretching, extension with drive it is described against Plate adsorbs the flaw-piece by the absorptive element close to the flaw-piece and after the abutment plate is contacted with the flaw-piece.Afterwards Continuous, the wire cutting unit is driven the relatively described base to rise, and the flaw-piece hoisting mechanism follows wire cutting unit to rise, benefit The relatively described cutting silicon rod of flaw-piece can be driven to occur to rise displacement with adsorption capacity, so that protruding from the top of the flaw-piece described Cutting silicon rod.

It, can cutting silicon rod 12 have been made relatively by the flaw-piece 13 formed after cutting evolution operation using flaw-piece hoisting mechanism 5 Rise displacement, so that the top of flaw-piece 13 protrudes from cutting silicon rod 12.Significantly, since flaw-piece hoisting mechanism 5 is It is set to wire cutting support 31, is by driving wire cutting when needing to promote flaw-piece 13 using flaw-piece hoisting mechanism 5 therefore Support 31 and wire cutting unit 33 thereon make ascending motion and flaw-piece hoisting mechanism 5 are driven to be promoted again, therefore, wire cutting unit Cutting line segment 332 in 33 will also rise.So, the cutting line segment 332 of cutting gauze is formed in uphill process, it be along it Cutting path when preceding cutting operation returns.Generally, in some cases, cutting line itself has certain amount of deflection, cutting Line segment 332 declines state when being cut in silicon rod to be cut to be completed cutting operation with cutting line segment 332 and runs through to be cut It cuts the state after silicon rod to be likely to be different, therefore, when increase line cutter unit 33, it is desirable that the cutting in cutting gauze Line segment 332 returns along former cutting path and can ensure that will not interfere with cutting silicon rod 12 has larger difficulty.In reality In, cutting line segment 332 in gauze is cut in ascending motion and when preparing around cutting silicon rod 12, it is likely that will receive The interference of 12 corner of cutting silicon rod causes to generate damage to cutting silicon rod, for example, cutting silicon rod 12 is in cutting line segment Occurs chipping etc. under 332 interference.

To avoid the above problem or other similar problem, the flaw-piece discharge mechanism in the application separately includes and flaw-piece elevator The thread-laying mechanism of structure cooperation.Figure 12 and Figure 13 are please referred to, thread-laying mechanism 9 is used to stir 332 court of cutting line segment in cutting gauze It expands and is interfered to avoid cutting line segment 332 with cutting silicon rod outward.Due to the first cutting line segment, the second cutting line Section, third cutting line segment and the 4th cutting line segment cooperatively form the cutting gauze in " well " font, therefore, thread-laying mechanism 9 Quantity be it is corresponding with the quantity of flaw-piece hoisting mechanism 5, for example, the quantity of thread-laying mechanism 9 be four, be arranged oppositely two-by-two.When So, in other transformable embodiments, if including that (this pair of of cutting wheel group includes a pair of of cutting wheel group in wire cutting unit 33 Two cutting wheel groups being oppositely arranged form two cutting line segments), then, the quantity of thread-laying mechanism 9 may be, for example, two, with Flaw-piece hoisting mechanism 5 is consistent and to be arranged oppositely.

Figure 17 and Figure 18 are please referred to, the enlarged diagram of thread-laying mechanism in Figure 13 is shown as.In conjunction with Figure 17 and Figure 18, line is dialled Mechanism 9 includes: actuator 91 and group line component 93.

Actuator 91 is set to jacking part 51 or adsorption piece (if the flaw-piece hoisting mechanism is using adsorption piece) and follows Jacking part 51 or adsorption piece make stretching motion.

Line component 93 is dialled to be controlled by actuator 91 and stir the cutting in cutting gauze when actuator 91 is extended movement Line segment 332 is expanded towards outside.In the present embodiment, the opposite sides for jacking part 51 has parallel arrangement of two cuttings line segment 332, therefore, the line component 93 of dialling in the flaw-piece hoisting mechanism 5 being correspondingly arranged with jacking part 51 is two, is respectively arranged at driving The opposite sides of part 91 is simultaneously corresponding with two cutting line segments 332.Dialling line component 93 further includes: to keep joining with actuator 91 Dynamic is connected to group line piece 933 by control 931 by control 931 and by driving member 932.

In some embodiments, actuator 91 includes being set on jacking part 51 or adsorption piece and along stretching motion direction Push rod 911 and pull rod 913 is arranged in front and back, wherein has a push-and-pull space between push rod 911 and pull rod 913.932 pivot of driving member It is connected to wire cutting support 31 (or coil holder 333) and has a first end and a second end, driving member 932 may be, for example, swinging structure or angle Plate.By taking swinging structure as an example, there are two swing arms for the swinging structure tool, and the connecting pin of two swing arms is i.e. as being articulated in line The pivot end of support 31 (or coil holder 333) is cut, the free end of two swing arms is i.e. respectively as first end and second end.With gusset For, the apex angle of the gusset is as the pivot end for being articulated in wire cutting support 31 (or coil holder 333), and the two of the gusset A base angle is respectively as first end and second end.It is the first end set on the swinging structure as driving member 932 by control 931 It is described to be positioned in the push-and-pull space between push rod 911 and pull rod 913 by control lever by control lever.Dialling line piece 933 is set on as biography The second end of the swinging structure of moving part 932 dials line bar.

When the thread-laying mechanism 9 in application aforementioned structure is implemented to dial line, push rod 911 and pull rod 913 are followed in actuator 91 Jacking part 51 or adsorption piece be extended movement, by push rod 911 therein push as by control 931 by control lever, as biography The swinging structure of moving part 932 is swung under the action of by control lever with pivot end, is driven as group line bar direction for dialling line piece 933 Movement outside, by dialling the corresponding cutting line segment 332 of line bar conflict and expanding it towards outside, so that by thread-laying mechanism 9 The spacing between cutting line segment 332 that two stirred are oppositely arranged expands.It is subsequent, i.e., it is mentioned using flaw-piece hoisting mechanism 5 Flaw-piece is risen, due to having pushed cutting line segment 332 aside using thread-laying mechanism 9, in this way, during promoting flaw-piece, so that it may avoid cutting Each item cutting line segment 332 cut in net is interfered with cutting silicon rod 12.After completing the promotion of flaw-piece, in actuator 91 Push rod 911 and pull rod 913 are followed by jacking part 51 or adsorption piece makees contractile motion, are pulled by pull rod 913 therein as controlled Part 931 by control lever, the swinging structure as driving member 932 is swung under the action of by control lever with pivot end, drive conduct That dials line piece 933 dials line bar towards medial motion, dials line bar and is detached from corresponding cutting line segment 332, and cutting line segment 332 is replied, So that the spacing between two cutting line segments 332 being oppositely arranged restores to the original state.Figure 17 and Figure 18 are please referred to, is respectively indicated as dialling Line mechanism 9 is in group line status diagram that the original state schematic diagram for dialling line is not carried out and implements group line.

Certainly, thread-laying mechanism 9 can still have other variations.In some embodiments, the thread-laying mechanism includes dialling line Part and for drive dial line piece translation driving source.For example, described group of line piece is laterally setting (that is, along direction of installation axle) Ejection block or ejector plate, the driving source are the cylinder or motor on the inside of ejection block or ejector plate.Utilize cylinder or motor Ejection block or ejector plate can be driven to make stretching motion along the direction of installation axle, when implementing to dial line, can be driven by cylinder or motor Ejection block or ejector plate are extended along the direction of installation axle to be moved, and by ejection block or the corresponding cutting line segment of ejector plate ejection and is made It is expanded towards outside.In some embodiments, the thread-laying mechanism includes dialling line piece and rotary electric machine, utilizes rotary electric machine Line piece is dialled by driving member driving to swing along an arc path.The driving member is the support for being rotationally connected with rotary electric machine Bar, described group of line piece are group line bar connecting with the support rod.When implementing to dial line, support rod is driven by rotary electric machine and is dialled Line bar is swung with an arc path, by dialling the corresponding cutting line segment of line bar conflict and expanding it towards outside.

It, can cutting silicon rod 12 be promoted so that the top of flaw-piece 13 is protruded relatively by flaw-piece 13 using flaw-piece hoisting mechanism 5 In cutting silicon rod 12, the top and bottom of flaw-piece 13 provide impetus, at this point, manually or can be adopted by operator Flaw-piece 13 is grabbed with corresponding auxiliary device and is unloaded flaw-piece 13.But, even so, flaw-piece hoisting mechanism 5 is utilized By flaw-piece 13 and after cutting silicon rod 12 mutually staggers, more preferably handgrip is provided for flaw-piece 13, is conducive to its unloading operation, but In general, the efficiency of unloading operation is whole still relatively low, is not avoided that flaw-piece 13 in the handling process still and has cut silicon Stick 12 collides and increases the risk that cutting silicon rod 12 damages.

In view of the above situation, flaw-piece discharge mechanism provided by the application multi-wire saw equipment may also include that flaw-piece clamps Transshipment acitivity, for separating flaw-piece and cutting silicon rod and being unloaded isolated flaw-piece.By taking Fig. 2 as an example, squaring silicon bar is set Standby flaw-piece discharge mechanism further includes having flaw-piece to clamp transshipment acitivity 6, draws high flaw-piece 13 behind the top for clamping flaw-piece 13 To be detached from silicon rod 12 to be cut and flaw-piece 13 be transported to flaw-piece unloading area.In actual application, flaw-piece clamping transhipment Mechanism 6 further includes: Z-direction movement mechanism, the 2nd X are to movement mechanism and in Z-direction movement mechanism and the 2nd X on movement mechanism The flaw-piece clamping device 63 of traveling, wherein the Z-direction movement mechanism can provide flaw-piece clamping device 63 and move along Z-direction, and described Two X can provide flaw-piece clamping device 63 along X to moving to movement mechanism.As shown in Fig. 2, flaw-piece clamping transshipment acitivity 6 includes one Slide 61 is equipped with Z-direction movement mechanism on slide 61, and flaw-piece clamping device 63 is moved using Z-direction movement mechanism along Z-direction, in machine The 2nd X is laid on the mounting structure of seat 1 to movement mechanism, slide 61 and flaw-piece clamping device 63 thereon are using the 2nd X to fortune Motivation structure is along X to moving.

The Z-direction movement mechanism is more can include: Z-direction guide rail, Z-direction sliding block and Z-direction driving source.As shown in Fig. 2, Z-direction is led Rail 300 is layed on slide 61, and the Z-direction sliding block is set on flaw-piece clamping device 63 and is adapted to corresponding Z-direction guide rail 300, The Z-direction driving source may be, for example, Z-direction lifting motor or Z-direction lifting cylinder etc..In actual application, to clamp flaw-piece Mechanism 63 can realize stable elevating movement in slide 61, double Guide Rail Designs can be used, that is, use two Z-direction guide rails 300, this two A Z-direction guide rail 300 is arranged parallel along Z-direction.In this way, being made by Z-direction driving source driving flaw-piece clamping device 63 along Z-direction guide rail Z-direction elevating movement.

2nd X to movement mechanism more can include: the 2nd X direction guiding rail, the 2nd X are to sliding block and the 2nd X to driving Source.As shown in Fig. 2, the 2nd X direction guiding rail 200 is layed on the mounting structure of base 1, the 2nd X is set to slide 61 to sliding block It is upper and be adapted to corresponding 2nd X direction guiding rail 200, the 2nd X to driving source may be, for example, X to motor or X to cylinder etc..In In actual application, to realize slide 61 can steadily along X to moving, double Guide Rail Designs can be used, that is, using two the Two X direction guiding rails 200, the two the 2nd X direction guiding rails 200 are arranged along X to parallel.It is slided in this way, being driven from the 2nd X to driving source Seat 61 and flaw-piece clamping device 63 thereon make X to moving along the 2nd X direction guiding rail 200.It should be noted that in Fig. 2, it is described Twoth X direction guiding rail 200 of 2nd X into movement mechanism is the first X direction guiding rail with the first X above-mentioned into movement mechanism 200 are combined into one, but are not limited thereto, in other embodiments, the 2nd X direction guiding rail and the first X direction guiding rail Guide rail structure can be independent.

Flaw-piece clamping device 63 is more can include: the lifting driving structure 62 and be set to lifting driving structure that activity is arranged The clamp assemblies 64 of 62 bottoms, clamp assemblies 64 are adapted to flaw-piece 13, for clamping each flaw-piece 13.It should be noted that In Z-direction, on the one hand, lifting driving structure 62 itself is connected by a mounting base with the sliding block in Z-direction movement mechanism, so as to So that lifting driving structure 62 is driven and elevating movement by Z-direction driving source.On the other hand, inside for flaw-piece clamping device 63, Going up and down driving structure 62 may be, for example, the lifting cylinder with elevating lever, and the elevating lever is connected with clamp assemblies 64, in this way, sharp It is flexible to drive clamp assemblies 64 to make elevating movement with lifting cylinder lifting controllable bar.

Figure 19 is please referred to, the structural schematic diagram of clamp assemblies 64 in one embodiment being shown as in Fig. 2.In conjunction with Fig. 2 With shown in Figure 19, clamp assemblies 64 further comprise: holder body 642 and multiple clamping pieces set on 642 periphery of holder body 744。

Holder body 642 is for being insinuated into the space that multiple flaw-pieces 13 are surrounded.In actual application, clamp assemblies The clamp bracket connecting with lifting driving structure 62 is additionally provided on 64, centre is provided with holder body 642 in clamp bracket, For being insinuated into the space that multiple flaw-pieces are surrounded.Due to being to need silicon rod being cut into class rectangle by initial circular cross-section Section (cutting the cutting gauze that line segment is formed by four in wire cutting unit 33 is in " well " font), silicon rod to be cut is cut through evolution Four flaw-pieces 13 are formed after cutting operation, in this way, the space surrounded by four flaw-pieces 13 that holder body 642 probes into also is rectangle Space, therefore, holder body 642 may be, for example, the rectangle pylon that section is rectangle.

Further, on the top of holder body 642, (the silicon rod plummer 21 that the top direction is located at cutting area) is gone back It can be equipped with and probe into structure 646.The structure for probeing into structure 646 may be, for example, polygon terrace with edge, can also rotary table, taper or hemisphere Deng, generally speaking, the size outline for probeing into structure 646 is less than holder body 642 itself, and, probeing into structure 646 more can be with clamping Main body 642 seamlessly transits.In this way, in actual application, probeed into using probeing into structure 646 and can be more advantageous to holder body 642 It is protruded from into each flaw-piece 13 being lifted in the space that the top of silicon rod 12 to be cut is surrounded, not only may make clamping group Part 64 can adapt in the silicon rod of different product specification, also can avoid because holder body 642 is not adapted to space collide it is convex The top of flaw-piece out and cause clast and it is subsequent cleaning etc. problems.

Clamping piece 644 is set to the periphery of holder body 642, is formed between clamping piece 644 and holder body 642 for gripper edge The grasping part of skin 13.Clamping piece 644 may be, for example, clamping jaw corresponding with flaw-piece 13, due to being needed silicon rod by initial circle Tee section is cut into class rectangle section, in this way, silicon rod to be cut will form four arched flaw-pieces after evolution cutting operation, Therefore, the quantity of clamping jaw is four corresponding.The position that the clamping jaw is contacted with flaw-piece 13 is to be adapted to the curved surfaces of flaw-piece 13 Arcuate structure, therefore, the clamping jaw may be, for example, curved splint.But be not limited thereto, for example, clamping jaw also may be, for example, with Parallel arrangement of at least two clamp bar of vertical mode, it will not be described here.It should be noted that as previously mentioned, in certain embodiment party In formula, in the wire cutting unit 33 of cutting on line device 3, including a pair of of cutting wheel group, using a pair of of cutting wheel group to be cut Silicon rod carries out evolution operation and needs to be implemented evolution cutting step twice, and in this embodiment, the quantity of clamping piece then can example For example two, the two clamping pieces are oppositely arranged.First time evolution cutting step is executed, two flaw-pieces are formed, is pressed from both sides using two Gripping member formed on corresponding position two flaw-pieces are clamped and again by Z-direction movement mechanism and the 2nd X to movement mechanism by side Skin is transferred away；The cutting position (such as being rotated by 90 °) of silicon rod to be cut is adjusted again；Execute second of evolution cutting step Suddenly, two flaw-pieces are formed, clamped formed on corresponding position two flaw-pieces using two clamping pieces and are moved again by Z-direction Mechanism and the 2nd X are transferred away flaw-piece to movement mechanism.

Clamping piece 644 may be, for example, movable design, and it is close or remote with opposite holder body 642 to can be carried out opening and closing movement From adjusting its grasping part between holder body 642.In addition, clamp assemblies 64 can also configure for each clamping piece 644 One opening and closing driving mechanism, the opening and closing driving mechanism is set in clamp bracket and is connected with corresponding clamping piece 644, for driving Dynamic clamping piece 644 makees opening and closing movement, with flaw-piece 13 corresponding with the cooperation clamping of holder body 642.The opening and closing driving mechanism can For example, have the cylinder 654 of telescopic rod 653, wherein telescopic rod 653 can be connect by connection structure with clamping piece 644, cylinder 654 can drive telescopic rod 653 to drive clamping piece 644 to make stretching motion.Here, it includes clamping that clamping piece 644, which makees stretching motion, The contractile motion of part and the stretching routine of clamping piece, wherein it is flexible that the contractile motion of clamping piece refers specifically to the driving of cylinder 654 Bar 653 is shunk to drive clamping piece 644 close to holder body 642, reduces the clamping between clamping piece 644 and holder body 642 Space, the stretching routine of clamping piece refer specifically to cylinder 654 and drive the stretching, extension of telescopic rod 653 to drive clamping piece 644 far from folder Main body 642 is held, the grasping part between clamping piece 644 and holder body 642 is increased.To make clamping piece 644 that can realize stabilization It stretches in holder body 642, double rod type design can be used, that is, use two telescopic rods, the two telescopic rods 653 are arranged parallel. Certainly, other implementations can also be used in aforementioned opening and closing driving mechanism, for example, the opening and closing driving mechanism also may be, for example, to have The servo motor of lead screw, the lead screw are connected with the clamping piece, connected to drive by the driving lead screw rotation of servo motor Clamping piece makees stretching motion, drives clamping piece to make contractile motion and driving lead screw backwards rotation for example, driving lead screw rotates forward It drives clamping piece to be extended movement, drives clamping piece to be extended movement alternatively, driving lead screw rotates forward and drive lead screw reverse Rotation drives clamping piece to make contractile motion.

Figure 20 is please referred to, the structural schematic diagram of clamp assemblies 64 in another embodiment being shown as in Fig. 2.In conjunction with figure Shown in 2 and Figure 20, clamp assemblies 64 further comprise: holder body 641 and multiple clamping pieces set on 641 periphery of holder body 643。

Holder body 641 is for being insinuated into the space that multiple flaw-pieces 13 are surrounded.In actual application, clamp assemblies The clamp bracket connecting with lifting driving structure 62 is additionally provided on 64, centre is provided with holder body 641 in clamp bracket, For being insinuated into the space that multiple flaw-pieces are surrounded.Holder body 641 may be, for example, the rectangle pylon that section is rectangle.

Further, on the top of holder body 641, (top is towards positioned at cutting area silicon rod plummer 21) may be used also Equipped with probeing into structure 645.The structure for probeing into structure 645 may be, for example, polygon terrace with edge, can also rotary table, taper or hemisphere etc., Generally speaking, the size outline for probeing into structure 645 is less than holder body 641 itself, and, probeing into structure 645 can more lead with clamping Body 641 seamlessly transits.

Clamping piece 643 is set to the periphery of holder body 641, is formed between clamping piece 643 and holder body 641 for gripper edge The grasping part of skin 13.Clamping piece 643 may be, for example, clamping jaw corresponding with flaw-piece 13, due to being needed silicon rod by initial circle Tee section is cut into class rectangle section, in this way, silicon rod to be cut will form four arched flaw-pieces after evolution cutting operation, Therefore, the quantity of clamping jaw is four corresponding.The position that the clamping jaw is contacted with flaw-piece 13 is to be adapted to the curved surfaces of flaw-piece 13 Arcuate structure, therefore, the clamping jaw may be, for example, curved splint.But be not limited thereto, for example, clamping jaw also may be, for example, with Parallel arrangement of at least two clamp bar of vertical mode, it will not be described here.It should be noted that as previously mentioned, in certain embodiment party In formula, in the wire cutting unit 33 of cutting on line device 3, including a pair of of cutting wheel group, using a pair of of cutting wheel group to be cut Silicon rod carries out evolution operation and needs to be implemented evolution cutting step twice, and in this embodiment, the quantity of clamping piece then can example For example two, the two clamping pieces are oppositely arranged.First time evolution cutting step is executed, two flaw-pieces are formed, is pressed from both sides using two Gripping member formed on corresponding position two flaw-pieces are clamped and again by Z-direction movement mechanism and the 2nd X to movement mechanism by side Skin is transferred away；The cutting position (such as being rotated by 90 °) of silicon rod to be cut is adjusted again；Execute second of evolution cutting step Suddenly, two flaw-pieces are formed, clamped formed on corresponding position two flaw-pieces using two clamping pieces and are moved again by Z-direction Mechanism and the 2nd X are transferred away flaw-piece to movement mechanism.

Clamping piece 643 may be, for example, movable design, and it is close or remote with opposite holder body 641 to can be carried out opening and closing movement From adjusting its grasping part between holder body 641.

Clamping piece 643 is connected in holder body 641 or clamp bracket by a connection structure axis, another in the connection structure Equipped with pressure-bearing portion 651.In addition, clamp assemblies 64 also configure an opening and closing driving mechanism, the opening and closing for each clamping piece 643 Driving mechanism is for driving clamping piece 643 to make opening and closing movement.The opening and closing driving mechanism may be, for example, the cylinder with telescopic rod, Wherein, the end of the telescopic rod is equipped with the press section 652 cooperated with pressure-bearing portion 651, and press section 652 offsets with pressure-bearing portion 651 Touching.The cylinder can drive the telescopic rod to drive the press section to make stretching motion, pass through press section 652 and pressure-bearing portion 651 cooperation drives clamping piece 643 to carry out opening and closing movement.Specifically: in the initial state, clamping piece 643 is to expand outwardly State.When the cylinder drives telescopic rod stretching, extension, 652 actuation of press section on the telescopic rod is on clamping piece 643 Pressure-bearing portion 651, clamping piece 643 be pressurized after toward 641 axis of holder body turn (that is, inside contracting), reduce clamping piece 643 and clamping Grasping part between main body 641.Press section release when the cylinder drives the telescopic rod to shrink, on the telescopic rod The pressing force in the pressure-bearing portion 651 on clamping piece 643 is acted on, clamping piece 643 is away from 641 axis of holder body and turns to return back to just Beginning state increases the grasping part between clamping piece 643 and holder body 641.And pressure-bearing portion 651 and press section 652 can be used Compatible wedge surface structure, to realize that clamping piece 643 can steadily and swimmingly make opening and closing movement.

Certainly, clamp assemblies 64 can still have other variations.For example, in some embodiments, the clamp assemblies can Include: first clamping member and the second clamping piece, is formed between described first clamping member and second clamping piece for clamping flaw-piece Grasping part.Wherein, the second clamping piece is located inside, and corresponding to the cut surface of flaw-piece, first clamping member is located at outside, corresponding In the outer surface of flaw-piece.In the present embodiment, due to being to need silicon rod being cut into class rectangle by initial circular cross-section to cut Face, in this way, silicon rod to be cut is cut into four two parallel camber line flaw-pieces, therefore, first along silicon rod length direction The quantity of clamping piece and the second clamping piece is four, and, described first clamping member may be, for example, suitable with the curved surfaces of flaw-piece The curved splint matched.In addition, the clamp assemblies may also include driving device, for driving first clamping member and/or the second folder Gripping member makees opening and closing movement.Specifically, in one case, the second clamping piece in the clamp assemblies can for it is fixed design and First clamping member is movable design, and therefore, the clamp assemblies further include first driving device, for driving first clamping member Make opening and closing movement towards the second clamping piece direction, to match cooperation clamping movement with the second clamping piece.In another scenario, described First clamping member in clamp assemblies can be for fixed design and the second clamping piece is movable design, therefore, the clamping group Part further includes the second driving device, for driving the second clamping piece towards first clamping member direction to make opening and closing movement, with first Clamping piece is with cooperation clamping movement.In a yet another situation, first clamping member in the clamp assemblies and the second clamping piece are equal For movable design, therefore, the clamp assemblies further include the first driving device corresponding to first clamping member and correspond to the Second driving device of two clamping pieces, wherein the first driving device is for driving first clamping member towards the second clamping piece Opening and closing movement is made in direction, and second driving device is moved for driving the second clamping piece to make opening and closing towards first clamping member direction Make, so that first clamping member and the second clamping piece are with cooperation clamping movement.

Transshipment acitivity 6 is clamped using flaw-piece disclosed in the present application, flaw-piece 13 can will be formed by through evolution cutting operation and is pressed from both sides Flaw-piece 13 (referring to fig. 2 1) is drawn high after handling, until the position of the bottom of flaw-piece 13 is higher than the top of cutting silicon rod 12, thus So that flaw-piece 13 is detached from cutting silicon rod 12 (referring to fig. 2 2), then will be disengaged from being transported to flaw-piece in the flaw-piece 13 of cutting silicon rod 12 It unloads area (referring to fig. 2 3), in this way, completing to unload the flaw-piece after evolution, entire uninstall process automation is realized, operation It is convenient, improve operating efficiency.

It should be noted that being clamped during being transported flaw-piece using flaw-piece clamping transshipment acitivity, such as using flaw-piece It is in the case of flaw-piece is transported out cutting area and will not hamper cutting silicon rod or wire cutting unit by transshipment acitivity, i.e., controllable The wire cutting unit originally suspended continues to rise until initial position is returned back to, in case squaring silicon bar cutting operation next time.

Please continue to refer to Fig. 2, the flaw-piece discharge mechanism more may include flaw-piece structure for conveying 7, is set to flaw-piece and unloads area, uses It is conveyed in the flaw-piece to come will be transported through flaw-piece clamping transshipment acitivity 6.In one implementation, flaw-piece structure for conveying 7 It may be, for example, conveyer belt.In actual operation, flaw-piece 13 is transferred to flaw-piece unloading by cutting area by flaw-piece clamping transshipment acitivity 6 Area, flaw-piece clamp the clamp assemblies 64 in transshipment acitivity 6 and unclamp discharging flaw-piece 13 to the conveying as flaw-piece structure for conveying 7 It takes, is transferred out flaw-piece by conveyer belt.

Certainly, flaw-piece will be formed by through evolution cutting operation and be unloaded be not limited thereto.For example, as shown in Fig. 2, The flaw-piece discharge mechanism may include flaw-piece cylinder 8 and flaw-piece structure for conveying 7, wherein flaw-piece structure for conveying 7 may be, for example, conveying Band, flaw-piece cylinder 8 be adjacent to conveyer belt starting point (for example, flaw-piece cylinder 8 be located at the starting point of conveyer belt side or located immediately at The top etc. of the starting point of conveyer belt).In addition, the bung hole of flaw-piece cylinder 8 can design larger or be in horn mouth, convenient for flaw-piece 13 without barrier It is placed in hindering, and, the height of the bucket arm of flaw-piece cylinder 8 is also higher, it can be ensured that the flaw-piece 13 of merging will not topple.In reality Application in, flaw-piece cylinder 8 more can for may be reversed design, by overturn flaw-piece cylinder 8 so that each flaw-piece 13 in flaw-piece cylinder 8 is suitable Freely it is transferred on conveyer belt.For example, the bottom of flaw-piece cylinder 8 is equipped with turnover driving mechanism, the turnover driving mechanism may include Returning face plate, shaft and overturning driving source (such as overturning motor or tumble cylinder etc.).In this way, will by flaw-piece clamping transshipment acitivity 6 After flaw-piece 13 is transferred in flaw-piece cylinder 8 by cutting area (referring to fig. 2 4), the overturning of flaw-piece cylinder 8 drives the flaw-piece 13 in cylinder to be transferred to work On conveyer belt for flaw-piece conveying device 7 (referring to fig. 2 5), flaw-piece 13 is transferred out by conveyer belt 7.In addition, in other implementations In mode, the flaw-piece discharge mechanism can also only include flaw-piece cylinder, and flaw-piece cylinder is set to flaw-piece and unloads area.In this way, being clamped by flaw-piece After flaw-piece is transferred in flaw-piece cylinder by transshipment acitivity by cutting area, flaw-piece can be taken out out of flaw-piece cylinder by operator.

Need to supplement, in the application multi-wire saw equipment, may also include silicon rod cleaning device, can be set to base on and At Accreditation Waiting Area, for carrying out and cleaning to cutting silicon rod 12.For silicon rod cleaning device, generally, silicon to be cut Stick 10 is formed cutting silicon rod 12 after evolution cutting operation, the cutting clast generated during evolution cutting operation can adhere to In 12 surface of cutting silicon rod, therefore, it is necessary to carry out necessary cleaning to cutting silicon rod 12.Generally, the silicon rod cleaning Equipment includes cleanninfg brushes and the cleaning solution flusher with cleanninfg brushes cooperation, in cleaning, by cleaning solution flusher Cleaning solution (for example, pure water) is sprayed against cutting silicon rod 12, meanwhile, cleanninfg brushes (such as rotary brush is driven by motor Head) cutting silicon rod 12 are acted on, complete washing and cleaning operation.

Multi-wire saw equipment disclosed in the present application is configured in cutting on line device and changes groove mechanism, this changes groove mechanism and includes At least the paragraph type of one end adjusts structure in the installation axle of cutting wheel, during changing slot, it is only necessary to paragraph type be driven to adjust Structure, which carries out paragraph type movement, to be adjusted new wire casing to the winding position where former wire casing, and slot Job Operations letter is entirely changed List and can ensure that position adjustment precisely in place, improve operating efficiency.

In addition, multi-wire saw equipment disclosed in the present application also flaw-piece discharge mechanism, the flaw-piece discharge mechanism further include side Skin hoisting mechanism and thread-laying mechanism, wherein the silicon rod to be cut that the bogey is carried using the wire-electrode cutting device Evolution cutting is carried out, by the cutting line segment in cutting gauze through the silicon rod to be cut to form cutting silicon rod and flaw-piece, In flaw-piece unloading, the cutting line segment in cutting gauze is stirred first with thread-laying mechanism and is expanded towards outside, flaw-piece is recycled to mention Mechanism lifts flaw-piece is risen, steadily mentioning for flaw-piece can be realized in the case of ensuring to cut line segment and not interfering with cutting silicon rod It rises, in this way, the efficiency of the evolution cutting operation of silicon rod not only can be improved, gives after promotion can not be more hindered to the flaw-piece after evolution Unloading, operates conveniently, improves overall operation efficiency.

Figure 26 is please referred to, structural schematic diagram of the application multi-wire saw equipment in a certain embodiment is shown as.In the reality It applies in example, the multi-wire saw equipment is silicon ingot evolution equipment, the evolution cutting operation for silicon ingot.Existing silicon ingot is generally Large-sized rectangular silicon square carries out evolution cutting to silicon ingot by silicon ingot evolution equipment, so that silicon ingot shape after evolution processing At the silicon cube of multiple cuboids.It is secondary to be formed that evolution processing is carried out to first grade silicon ingot (large scale silicon ingot) using silicon ingot excavation machine The specific implementation of grade silicon ingot (small size silicon ingot) can refer to for example, CN102172997A, CN105216128A, The patent publication us such as CN105690582A.

As shown in figure 26, multi-wire saw equipment disclosed in the present application includes: pedestal 2, bogey 23 and wire cutting dress Set 24.Bogey 23 is set on pedestal 2, for carrying silicon ingot 20 to be cut.Wire-electrode cutting device 24 is set on pedestal 2, is used for The silicon ingot to be cut 20 carried to bogey carries out evolution cutting.

Main element of the pedestal 2 as silicon ingot evolution equipment, preferably, the volume and weight of pedestal 2 are larger, to provide Bigger mounting surface and more firm complete machine stable degree.Bogey 23, wire-electrode cutting device 24 are set on pedestal 2, wherein are held It carries and sets 23 and be movably arranged on pedestal 2, wire-electrode cutting device 24 is fixedly installed on one end of pedestal 2.Certainly, wire-electrode cutting device 24 is still It can make other variations, for example, wire-electrode cutting device 24 is movable to be set on pedestal 2 in other some embodiments.

Bogey 23 is for carrying silicon ingot 20 to be cut and being slidedly arranged on pedestal 2.Bogey 23 includes carrying support 231 and the silicon ingot plummer 233 on carrying support 231, a plurality of linear slit that allows is equipped on silicon ingot plummer 233 parallel.Yu Shi In the application on border, bogey 23 can by but be not limited to following manner and be slidedly arranged on pedestal 2, as shown in figure 26, pedestal 2 On be relatively set with a pair of of sliding rail, bogey 23 is slidedly arranged on sliding rail, and the opposite cunning respectively that is installed in 23 bottom of bogey is set The bottom end of support frame on a pair of of sliding rail, support frame as described above is slidedly arranged on sliding rail.In this way, a driver can be passed through (such as common servo motor) come drive bogey 23 along laying sliding rail advance (moving to cutting area from Accreditation Waiting Area) or It retracts (moving to Accreditation Waiting Area from cutting area).

Wire-electrode cutting device 24 is set on pedestal 2, and the silicon ingot to be cut 20 for being carried to bogey 23 carries out evolution Cutting.In actual application, a wire-electrode cutting device at least wire cutting unit.

In the multi-wire saw equipment shown in Figure 26, wire-electrode cutting device 24 includes wire cutting support 241 and cuts set on line An at least wire cutting unit 242 on cut branch seat 241, wherein wire cutting support 241 is fixed on pedestal 2, and at least a line is cut It is corresponding with cutting area and have and form the cutting line of secant net to cut unit 242, using an at least wire cutting unit 242 to cutting Cut the progress evolution cutting of silicon ingot to be cut 20 that the bogey 23 in area is carried.

Wire cutting unit 242 includes at least: coil holder 243 on wire cutting support 241, more on coil holder 243 A cutting wheel 244, multiple guide rollers and the cutting line for being sequentially set around each cutting wheel 244.In the present embodiment, coil holder Two rows cutting wheel group is provided on 243, each row's cutting wheel group includes multiple cutting wheels 244, belongs to row cutting Multiple cutting wheels 244 in wheel group are assemblied in an installation axle 245 in a manner of ground to be alternatively arranged.In addition, in same position, upper row A cutting wheel 244 in cutting wheel group and a cutting wheel 244 in corresponding lower row's cutting wheel group partner cutting wheel. It is therefore, more than the two rows cutting wheel group set up on coil holder 243 that the lower corresponding mode of cutting wheel forms multipair cutting wheel.

For each cutting wheel 244, the line that a few (at least two circles) are parallel to each other is laid in cutting wheel 244 Slot can provide cutting line winding.In the prior art, the periphery of cutting wheel 244 is coated with polyurethane material mostly, in cutting wheel 244 Wire casing can be formed through fluting on the polyurethane material of periphery.It can refer to for example, for the specific implementation of the grooving method of wire casing The patent publication us such as CN106738391A.The multiple cutting wheels 244 being assemblied in same installation axle 334, in each cutting A few wire casings laid on wheel 244 are parallel to each other, and each astragal slot is that laying at equal intervals or non-gap are laid, two adjacent rings wire casing Slot pitch may be designed as 2 millimeters or so, for example, 1.8 millimeters to 2.5 millimeters.Wire casing as cutting wheel 244 and thereon is in different realities Applying structure in mode can refer to earlier figures 6 and Fig. 7 and its corresponding verbal description, and details are not described herein.It is laid in cutting wheel 244 There are five astragal slots being parallel to each other.

Cutting line is sequentially around in after a certain wire casing of each cutting wheel 244, in the cutting wheel up and down of every a pair of of cutting wheel A cutting line segment 246 is formed between 244, to form a plurality of cutting line segment 246 setting up and down on coil holder 243, and more Item cutting line segment 246 is parallel to each other and allows linear slit to correspond with a plurality of on bogey 23.In this way, this plurality of cutting line segment 246 i.e. composition cutting gauze.

In this way, in actual application, when bogey 23 is relatively moved with wire-electrode cutting device 24 (for example, holding It carries and sets 23 towards the movement of wire-electrode cutting device 24, wire-electrode cutting device 24 is mobile towards bogey 23, alternatively, 23 He of bogey Wire-electrode cutting device 24 moves towards), cutting gauze pair is formed by by item each on coil holder 243 in wire-electrode cutting device 24 cutting line segment The silicon ingot to be cut 20 that bogey 23 is carried carries out evolution cutting.When being held using wire-electrode cutting device 24 to bogey 23 When the silicon ingot to be cut 20 carried carries out evolution cutting, driving bogey 23 is with silicon ingot 20 to be cut towards wire-electrode cutting device 24 Mobile, cutting line segment 246 in wire-electrode cutting device 24 can be along allowing linear slit to enter and cut to be cut in bogey 23 Silicon ingot 20, cutting line segment 246 is always positioned at when cutting silicon ingot 20 to be cut to be allowed in linear slit.

After the long-time service of multi-wire saw equipment, the wire casing that cutting line is wound in cutting wheel 244 can generate abrasion, influence Cutting effect.Therefore, generally, carry out changing slot operation, cutting line is changed and is around in other new wire casings, at this time, it is necessary to root According to the slot pitch of new wire casing and current wire casing, the moving distance of cutting wheel 244 is adjusted.In the present embodiment, one kind is also disclosed Groove mechanism is changed, the groove mechanism that changes is configured in the installation axle of wire-electrode cutting device, including being set in installation axle at least section of one end Formula adjustment structure is fallen, during changing slot, is rotatablely installed axis, driving paragraph type adjustment structure progress paragraph type is mobile, will be new Wire casing is adjusted to the winding position where former wire casing, and that completes cutting line changes slot operation.In addition, the groove mechanism that changes may also include Location structure, the location structure and paragraph type adjustment structure cooperation, carry out for positioning the paragraph type adjustment structure The mobile moving distance of paragraph type, to realize cutting wheel quickly and accurately shift position.

It can refer to earlier figures 9 to Figure 11 about the structure for changing groove mechanism, the groove mechanism that changes includes being set to installation axle At least the paragraph type of one end adjusts structure in 245.

The paragraph type adjustment structure is to be located at the step end face of installation shaft end, step surface in the step end face Quantity it is consistent with the online slot number of the cutting wheel, and, drop between two neighboring step surface corresponds to two adjacent rings Slot pitch between wire casing.It is parallel to each other as previously mentioned, being laid in the cutting wheel 244 being configured in the same installation axle 245 Five astragal slots, and the slot pitch of two astragal slot of arbitrary neighborhood is definite value L1 (that is, each astragal slot is uniformly distributed at equal intervals), therefore, It correspondingly, include five step surfaces in step end face, drop and two adjacent rings wire casing between two neighboring step surface Slot pitch it is consistent.Drop between two neighboring step surface may be designed as 2 millimeters or so, for example, 1.8 millimeters to 2.5 millimeters.When So, it above are only exemplary illustration, in some embodiments, if laid in the cutting wheel being configured in the same installation axle Each astragal slot designs for unequal interval, and the slot pitch between different astragal slots 336 is simultaneously non-equal, then, correspondingly, step It include the step surface of quantity identical as wire casing circle number in cutting wheel in end face, on the drop and corresponding position between adjacent step surface Slot pitch between adjacent wire casing is consistent.For example, drop and the first wire casing and second between First terrace and second step face Slot pitch between wire casing is consistent, the slot between drop and the second wire casing and third wire casing between the second terrace and third step surface Away from consistent, the slot pitch between drop and third wire casing and the 4th wire casing between third step surface and the 4th step surface is consistent, and The slot pitch between drop and the 4th wire casing and the 5th wire casing between four step surfaces and the 5th step surface is consistent.

In addition, in some embodiments, may also include transition structure between two neighboring step surface in step end face, The transition structure may be, for example, by the transition slope surface in the face of stepping to a new level to next step surface.

Location structure is pin, is positioned for the step surface by being resisted against in step end face.In actual In, pin is to be fixedly installed on coil holder 243.When installation axle 245 is fixed on coil holder 243, pin be against That step surface corresponding with current wire casing in step end face.

When needing replacing the wire casing of cutting wheel, cutting line first can be loosened into (such as by line storage tube unwrapping wire), so that cutting Current wire casing is detached from secant and cutting wheel 244；It unclamps installation axle 245 and (such as unscrews spiral shell for axis 245 to be fixedly mounted Bolt), it is rotatablely installed axis 245, it is mobile until step surface corresponding with new wire casing is moved that driving step end face carries out paragraph type It moves in place and is resisted against pin, so as to adjust new wire casing to the winding position where original wire casing；It is subsequent, it will cut Secant is around on new wire casing, to complete to change slot operation.Five astragal slots being parallel to each other are laid with aforementioned middle cutting wheel 244 For, this five astragals slot is referred to as the first wire casing, the second wire casing, third wire casing, the 4th wire casing and the 5th from left to right Wire casing, the step end face on 245 end face of installation axle have five step surfaces corresponding with five astragal slots, this five step surfaces from From left to right is referred to as First terrace, second step face, third step surface, the 4th step surface and the 5th step surface.It is false If current cut line is set around in the first wire casing (for purposes of illustration only, the current location of the first wire casing of cutting line winding is known as Winding position), the cutting line part of the first wire casing and the guide roller above the cutting wheel that cutting line is around in cutting wheel 244 is kept Vertical state, the First terrace in step end face are resisted against pin.It now needs by the first wire casing to replace wire casing to Two wire casings, then changing the process of slot operation can include: line storage tube unwrapping wire can be first passed through, cutting line is loosened so that cutting line with The first current wire casing is detached from cutting wheel 244；The bolt for axis 245 to be fixedly mounted is unscrewed, installation axle 245 is unclamped；Rotation Installation axle 245, driving step end face carry out paragraph type movement, step end face are switched to second step by First terrace Face, when second step face is resisted against pin, that is, show that installation axle 245 has been moved to the left First terrace and second step The distance of drop between face (drop is consistent with the slot pitch of the second wire casing with the first wire casing), that is to say, that will be in cutting wheel 244 Second wire casing is moved to the winding position where original first wire casing；Cutting line is around on the second wire casing；Bolt is tightened with solid Determine installation axle 245, cutting line is tightened in line storage tube take-up, to complete to change slot operation.

As it can be seen that groove mechanism is changed using disclosed in the present application, during changing slot, it is only necessary to which the paragraph type in groove mechanism is changed in driving Adjustment structure, which carries out paragraph type movement, to be adjusted new wire casing to the winding position where former wire casing, and slot operation behaviour is entirely changed Make simple and can ensure that the adjustment of wire casing slot position precisely in place, improves operating efficiency.

Certainly, the groove mechanism that changes can still make other variations.In some embodiments, the paragraph type adjustment structure is The step-like recesses being located in the installation axle, the quantity and the online slot number of the cutting wheel of step groove in the step-like recesses Measure it is consistent, and, drop between two neighboring step groove corresponds to the slot pitch between two adjacent rings wire casing.The location structure For fastening screw, positioned for the step groove by snapping into the step-like recesses.

In actual application, using the multi-wire saw equipment in the present embodiment, silicon ingot to be cut progress evolution is cut It cuts operation and just needs evolution cutting step twice, and in the cutting of first time evolution and then the cutting of secondary adjustment silicon ingot to be cut Position.In this way, in the present embodiment, the application multi-wire saw equipment is also provided with set on pedestal 2 and is located at silicon ingot plummer 233 The lift rotating equipment of lower section.Lift rotating equipment 25 includes: mounting 251, the lifting by elevating mechanism on mounting 251 Bracket (not showing in the drawings), the swivel plate 253 on lifting support and the mandril on swivel plate 253 255, Herein, the elevating mechanism includes the multiple lifting columns (not showing in the drawings) being set between mounting 251 and lifting support, The lifting column, which can be, to be connected and is controlled by it with a lifting cylinder, and the operating by controlling the lifting cylinder controls lifting The inside in pedestal 2 or mounting 251 can be set in the lifting of column, the lifting cylinder.Mandril 255 is installed on swivel plate 253, It is allowed in linear slit in order to enable mandril 255 is able to enter when lift rotating equipment 25 rises, the sectional dimension of mandril 255 is less than Equal to allowing the width of linear slit, while in order to enable silicon ingot 20 to be cut can be lifted off silicon ingot plummer 233, mandril by mandril 255 255 length is greater than the thickness of silicon ingot plummer 233.In practical applications, when lift rotating equipment 25 rises, i.e. lifting column When rising, drive mandril 255 along allowing linear slit up to jack silicon ingot 20 to be cut, the length of mandril 255 is greater than silicon ingot plummer 233 thickness, so that silicon ingot to be cut 20 is detached from silicon ingot plummer 233 under the jacking of mandril 255；At this point, silicon ingot is held Microscope carrier 233 retracts, and then, driving lift rotating equipment 25 rotates, when lift rotating equipment rotates, i.e., when swivel plate 253 rotates, Under the action of frictional force between mandril 255 and silicon ingot to be cut 20, mandril 255 drives one cutting of the rotation of silicon ingot 20 to be cut Angle, the cutting angle include at least 90 ° or 270 °.It should be noted that silicon ingot 20 to be cut mandril 255 jacking After lower disengaging silicon ingot plummer 233, and before the rotation of lift rotating equipment 25, control silicon ingot plummer 233 is backwards to line Frame 243 slides to the right and detaches between silicon ingot 20 to be cut and lift rotating equipment 25, only silicon ingot plummer 233 to Cutting silicon ingot 20 and lift rotating equipment 25 between detach after, swivel plate 253 can rotate, and by mandril 255 drive to It cuts silicon ingot 20 and rotates a cutting angle.

In this way, utilizing lift rotating equipment 25, so that it may successfully silicon ingot to be cut is rotated (such as be rotated by 90 ° or 270 °), cutting gauze is formed by by item each on coil holder 243 in wire-electrode cutting device 24 cutting line segment, bogey 23 is carried Silicon ingot to be cut 20 carry out second of evolution cutting, complete the evolution of silicon ingot to be cut.

Multi-wire saw equipment disclosed in the present application is configured in cutting on line device and changes groove mechanism, this changes groove mechanism and includes At least the paragraph type of one end adjusts structure in the installation axle of cutting wheel, during changing slot, it is only necessary to paragraph type be driven to adjust Structure, which carries out paragraph type movement, to be adjusted new wire casing to the winding position where former wire casing, and slot Job Operations letter is entirely changed List and can ensure that position adjustment precisely in place, improve operating efficiency.

The principles and effects of the application are only illustrated in above-described embodiment, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, carry out modifications and changes to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technical idea such as At all equivalent modifications or change, should be covered by claims hereof.

Claims (16)

1. a kind of multi-wire saw equipment characterized by comprising

Bogey, for carrying crystalline silicon workpiece；

Wire-electrode cutting device including wire cutting support, the cutting wheel group on the wire cutting support and guide roller group and is cut Secant, wherein the cutting line be around in the cutting wheel group each guide roller in each cutting wheel and the guide roller group and Form cutting gauze；The cutting wheel is set on the cutting support by installation axle, is offered at least in the cutting wheel Two astragal slots；And

Groove mechanism is changed, the paragraph type of one end adjusts structure including being set in the installation axle at least；

Wherein, during changing slot, the installation axle is rotated, the paragraph type adjustment structure is driven to carry out paragraph type movement, it will New wire casing is adjusted to the winding position where former wire casing.

2. multi-wire saw equipment according to claim 1, which is characterized in that the groove mechanism that changes further includes location structure, The location structure and paragraph type adjustment structure cooperation, it is mobile for positioning the paragraph type adjustment structure progress paragraph type Moving distance.

3. multi-wire saw equipment according to claim 2, which is characterized in that the paragraph type adjustment structure is described to be located at The step end face of shaft end is installed, the quantity and the online slot number phase one of the cutting wheel of step surface in the step end face It causes, and, the drop between two neighboring step surface corresponds to the slot pitch between two adjacent rings wire casing；The location structure is backstop Pin, is positioned for the step surface by being resisted against in the step end face.

4. multi-wire saw equipment according to claim 3, which is characterized in that two neighboring step in the step end face Drop between face is 1.8 millimeters to 2.5 millimeters.

5. multi-wire saw equipment according to claim 3, which is characterized in that two neighboring step in the step end face It further include transition structure between face.

6. multi-wire saw equipment according to claim 2, which is characterized in that the paragraph type adjustment structure is described to be located at Step-like recesses in installation axle, the quantity and the online slot number phase one of the cutting wheel of step groove in the step-like recesses It causes, and, the drop between two neighboring step groove corresponds to the slot pitch between two adjacent rings wire casing；The location structure is positioning Bolt is positioned for the step groove by snapping into the step-like recesses.

7. multi-wire saw equipment according to claim 6, which is characterized in that two neighboring step in the step-like recesses Drop between slot is 1.8 millimeters to 2.5 millimeters.

8. multi-wire saw equipment according to claim 7, which is characterized in that two neighboring step in the step-like recesses It further include transition structure between slot.

9. a kind of groove mechanism that changes applied to multi-wire saw equipment, the multi-wire saw equipment includes that bogey and line are cut Cut device, the bogey include wire cutting support, the cutting wheel group on the wire cutting support and guide roller group, with And cutting line, wherein the cutting line is around in the cutting wheel group each conducting wire in each cutting wheel and the guide roller group It takes turns and forms cutting gauze；The cutting wheel is set on the cutting support by installation axle, is offered in the cutting wheel At least two astragal slots；It is characterized in that, described change the paragraph type adjustment that groove mechanism includes at least one end in the installation axle Structure；During changing slot, the installation axle is rotated, the paragraph type adjustment structure is driven to carry out paragraph type movement, it will be new Wire casing is adjusted to the winding position where former wire casing.

10. according to claim 9 change groove mechanism, which is characterized in that the groove mechanism that changes further includes location structure, described Location structure and paragraph type adjustment structure cooperation carry out the mobile shifting of paragraph type for positioning the paragraph type adjustment structure Dynamic distance.

11. according to claim 10 change groove mechanism, which is characterized in that the paragraph type adjustment structure is to be located at the peace The step end face of shaft end is filled, the quantity and the online slot number phase one of the cutting wheel of step surface in the step end face It causes, and, the drop between two neighboring step surface corresponds to the slot pitch between two adjacent rings wire casing；The location structure is backstop Pin, is positioned for the step surface by being resisted against in the step end face.

12. according to claim 11 change groove mechanism, which is characterized in that two neighboring step surface in the step end face Between drop be 1.8 millimeters to 2.5 millimeters.

13. according to claim 11 change groove mechanism, which is characterized in that two neighboring step surface in the step end face Between further include transition structure.

14. according to claim 10 change groove mechanism, which is characterized in that the paragraph type adjustment structure is to be located at the peace The step-like recesses in axis are filled, the quantity of step groove is consistent with the online slot number of the cutting wheel in the step-like recesses, And the drop between two neighboring step groove corresponds to the slot pitch between two adjacent rings wire casing；The location structure is that positioning is inserted Pin, is positioned for the step groove by snapping into the step-like recesses.

15. according to claim 14 change groove mechanism, which is characterized in that two neighboring step groove in the step-like recesses Between drop be 1.8 millimeters to 2.5 millimeters.

16. according to claim 14 change groove mechanism, which is characterized in that two neighboring step groove in the step-like recesses Between further include transition structure.