CN110126109A

CN110126109A - Silicon rod multi-wire saw device and method, silicon rod movement system

Info

Publication number: CN110126109A
Application number: CN201810136989.7A
Authority: CN
Inventors: 卢建伟; 潘雪明
Original assignee: Zhejiang Ji Ying Precision Machinery Co Ltd
Current assignee: Zhejiang Ji Ying Precision Machinery Co Ltd
Priority date: 2018-02-09
Filing date: 2018-02-09
Publication date: 2019-08-16

Abstract

The application discloses a kind of silicon rod multi-wire saw device and method, silicon rod movement system, the silicon rod multi-wire saw equipment includes workbench, silicon rod conversion equipment and wire-electrode cutting device, wherein, it can be by the silicon rod of carrying in Accreditation Waiting Area using silicon rod conversion equipment, it is converted between first cutting area and the second cutting area, the silicon rod to be cut carried using the silicon rod plummer that at least First Line cutter unit in wire-electrode cutting device corresponds to the first cutting area is carried out evolution cutting and carries out chamfering cutting using the silicon rod of evolution that the silicon rod plummer that at least one second wire cutting unit in wire-electrode cutting device corresponds to the second cutting area is carried, so, the quick of silicon rod can be achieved and easily convert, the evolution cutting and chamfering cutting of silicon rod can be completed together, improve the cutting operation efficiency of silicon rod.

Description

Silicon rod multi-wire saw device and method, silicon rod movement system

Technical field

This application involves silicon rod processing technique fields, more particularly to a kind of silicon rod multi-wire saw device and method, silicon rod Movement system.

Background technique

When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure for restricting subsequent finished product, thus It is also higher and higher to its job requirements.Currently, multi-wire cutting technology is since with high production efficiency, operating cost is low, operation is smart The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.

By taking crystalline silicon rod is cut as an example, silicon rod (such as silicon single crystal rod) is usually subjected to evolution by excavation machine, so that Silicon rod is integrally in class rectangle；After evolution, the processing such as flour milling, chamfering, round as a ball and polishing are carried out to silicon rod；Finally, using again Multi-line slicer is sliced the silicon rod after evolution.

In relevant squaring silicon bar cutting operation, silicon rod to be cut is first placed into dropping place in cutting area, utilizes multi-thread silicon Stick cutting equipment carries out evolution cutting to the silicon rod to be cut for being located at cutting area, then, will complete the evolution silicon of evolution cutting Stick, which unloads from cutting area and replaces with new silicon rod to be cut, carries out evolution cutting, and evolution silicon rod is then transported to other equipment (such as silicon rod milling apparatus etc.) carries out subsequent grinding operation.In the process, the feeding of silicon rod to be cut, silicon rod to be cut Evolution cutting, the operations such as blanking of evolution silicon rod be cutting area complete, cause the effect of squaring silicon bar cutting operation Rate is low.

In addition, silicon rod will form flaw-piece after evolution is cut in relevant squaring silicon bar cutting operation, therefore, elder generation is needed The flaw-piece of formation is given into discharging, general flaw-piece discharge way mostly or by operator's manual operations by flaw-piece be detached from Evolution silicon rod and silicon rod multi-wire saw equipment is moved away from out, not only inefficiency, and flaw-piece can be made in the handling process The risk of evolution silicon rod damage is collided and increased with evolution silicon rod.

Summary of the invention

In view of the missing of the relevant technologies described above, the purpose of the application be to disclose a kind of silicon rod multi-wire saw equipment and Method, silicon rod movement system are used for the problems such as solving squaring silicon bar cutting operation inefficiency in the related technology.

To achieve the above object and other purposes, the first aspect of the application disclose a kind of silicon rod multi-wire saw equipment, packet Include: workbench is sequentially equipped with Accreditation Waiting Area, the first cutting area and the second cutting area；Silicon rod conversion equipment is set to the workbench On, comprising: conversion work platform is equipped with multiple silicon rod plummers；Driving mechanism is converted, for driving the conversion work platform to turn Movement is changed to enable the multiple silicon rod plummer convert between Accreditation Waiting Area, the first cutting area and the second cutting area；Wire cutting Device, is equipped with and the corresponding at least First Line cutter unit of first cutting area and corresponding extremely with second cutting area Few one second wire cutting unit；An at least First Line cutter unit be used for in the silicon rod conversion equipment correspond to first The silicon rod to be cut that the silicon rod plummer of cutting area is carried carries out evolution cutting, and at least one second wire cutting unit is used for The silicon rod of evolution carried to the silicon rod plummer for corresponding to the second cutting area in the silicon rod conversion equipment carries out chamfering and cuts It cuts.

Silicon rod multi-wire saw equipment disclosed in the present application includes workbench, silicon rod conversion equipment and wire-electrode cutting device, wherein The silicon rod of carrying can be converted between Accreditation Waiting Area, the first cutting area and the second cutting area, be utilized using silicon rod conversion equipment The silicon rod plummer that an at least First Line cutter unit in wire-electrode cutting device corresponds to the first cutting area is carried to be cut Silicon rod carries out evolution cutting and corresponds to the second cutting area using at least one second wire cutting unit in wire-electrode cutting device The silicon rod of evolution that silicon rod plummer is carried carries out chamfering cutting, so, it can be achieved that silicon rod quick and easily converting, energy The evolution cutting and chamfering cutting for completing silicon rod together, improve the cutting operation efficiency of silicon rod.

In the certain embodiments of the application first aspect, the conversion driving mechanism includes: rotation axis, is connected to institute State conversion work platform；Source of rotational drive is connected with the rotation axis, for driving the rotation axis rotation to drive the conversion Workbench rotation.

In the certain embodiments of the application first aspect, the wire-electrode cutting device includes: wire cutting support, the line It cuts support and is equipped with an at least First Line cutter unit and at least one second wire cutting unit；Elevating mechanism, for driving It states wire cutting support and makees elevating movement.

In the certain embodiments of the application first aspect, the wire-electrode cutting device includes: the first wire cutting support, institute The first wire cutting support is stated equipped with an at least First Line cutter unit；First elevating mechanism, for driving the First Line to cut Cut branch seat makees elevating movement；Second wire cutting support, the second wire cutting support are equipped at least one second wire cutting unit； Second elevating mechanism, for driving the second wire cutting support to make elevating movement.

In the certain embodiments of the application first aspect, the silicon rod multi-wire saw equipment further includes facing set on described The silicon rod handler of silicon rod conversion equipment, comprising: commutation carrier is equipped with work piece holder；Unidirectional driving mechanism, for driving It states commutation carrier and makees commutation movement to enable the work piece holder clamp silicon rod to be cut and transport silicon rod to be cut by loading place To the silicon rod plummer for corresponding to Accreditation Waiting Area, or, clamping corresponds to the silicon rod of chamfering on the silicon rod plummer of Accreditation Waiting Area and will Chamfering silicon rod is transported to loading place by Accreditation Waiting Area.

In the certain embodiments of the application first aspect, the silicon rod multi-wire saw equipment further includes being set to the silicon The flaw-piece jacking mechanism on stick plummer periphery.

In the certain embodiments of the application first aspect, the flaw-piece jacking mechanism includes: movable supporting parts；Locking Control piece, by the movable supporting parts control in locking shape when for being resisted against the bottom of silicon rod to be cut in movable supporting parts State.

In the certain embodiments of the application first aspect, the silicon rod multi-wire saw equipment further includes flaw-piece discharging dress It sets, the flaw-piece for generate to the silicon rod to be cut an at least First Line cutter unit after evolution cutting gives Discharging.

In the certain embodiments of the application first aspect, the flaw-piece device for discharging includes: the mechanism that is staggered, for driving OQ t displacement occurs for dynamic flaw-piece and evolution silicon rod, so that the top of the flaw-piece protrudes from the evolution silicon rod.

In the certain embodiments of the application first aspect, the flaw-piece device for discharging further include: clamping transshipment acitivity, Behind top for clamping the flaw-piece and the flaw-piece is drawn high to be detached from the evolution silicon rod and turn the flaw-piece It is transported to flaw-piece discharge zone.

The second aspect of the application discloses a kind of silicon rod multi-line cutting method, is applied in a silicon rod multi-wire saw equipment, The silicon rod multi-wire saw equipment includes workbench, silicon rod conversion equipment and wire-electrode cutting device, wherein silicon rod conversion equipment includes Conversion work platform with multiple silicon rod plummers and for driving the silicon rod plummer in the conversion work platform to convert The conversion driving mechanism of movement, the wire-electrode cutting device include an at least First Line cutter unit and at least one second wire cutting list Member；The silicon rod multi-line cutting method, which includes the following steps: for silicon rod to be cut to be placed in correspond in conversion work platform, to be waited On an at least silicon rod plummer in area；The conversion work platform is driven to make converting motion with will an at least silicon rod plummer and thereon Silicon rod to be cut converted by Accreditation Waiting Area to the first cutting area；Utilize at least First Line cutter unit pair in wire-electrode cutting device Evolution cutting is carried out corresponding to the silicon rod to be cut on an at least silicon rod plummer for the first cutting area；Drive the conversion work Platform makees converting motion being converted an at least silicon rod plummer and the silicon rod of evolution thereon by the first cutting area to the second cutting Area；Using at least one second wire cutting unit in wire-electrode cutting device at least silicon rod plummer for corresponding to the second cutting area On the silicon rod of evolution carry out chamfering cutting；Drive the conversion work platform make converting motion with will an at least silicon rod plummer and The silicon rod of chamfering thereon is converted by the second cutting area to Accreditation Waiting Area, and the silicon rod of chamfering is given discharging.

Silicon rod multi-line cutting method disclosed in the present application, using silicon rod conversion equipment can by the silicon rod of carrying Accreditation Waiting Area, It converts between first cutting area and the second cutting area, is corresponded to using at least First Line cutter unit in wire-electrode cutting device The silicon rod to be cut that the silicon rod plummer of first cutting area is carried carries out evolution cutting and utilizes in wire-electrode cutting device extremely The silicon rod of evolution that the silicon rod plummer that few one second wire cutting unit corresponds to the second cutting area is carried carries out chamfering cutting, So, it can be achieved that silicon rod quick and easily converting, the evolution cutting and chamfering cutting of silicon rod can be completed together, improves silicon The cutting operation efficiency of stick.

In the certain embodiments of the application second aspect, the conversion work platform is driven to make converting motion by following At least one mode is realized: the conversion work platform being driven to rotate；The conversion work platform is driven to translate.

In the certain embodiments of the application second aspect, the silicon rod multi-line cutting method further includes that jacking is to be cut The step of being formed by flaw-piece after silicon rod progress evolution cutting.

In the certain embodiments of the application second aspect, the silicon rod multi-line cutting method further includes by silicon to be cut The step of flaw-piece that stick formed after evolution cutting gives discharging.

In the certain embodiments of the application second aspect, silicon rod to be cut is carried out to the flaw-piece formed after evolution cutting Following steps are further included in the step of giving discharging: driving the flaw-piece and OQ t displacement occurs for evolution silicon rod, so that The top of the flaw-piece protrudes from the evolution silicon rod.

In the certain embodiments of the application second aspect, silicon rod to be cut is carried out to the flaw-piece formed after evolution cutting Give discharging, further comprises the steps of: the top for clamping the flaw-piece；The flaw-piece is drawn high to be detached from the evolution silicon rod；It will The flaw-piece is transported to flaw-piece discharge zone.

The third aspect of the application discloses a kind of silicon rod movement system applied to silicon rod multi-wire saw equipment, comprising: silicon Stick conversion equipment, comprising: conversion work platform, conversion work platform are equipped with multiple silicon rod plummers；Driving mechanism is converted, for driving It moves the conversion work platform and makees converting motion to enable the multiple silicon rod plummer cut in Accreditation Waiting Area, the first cutting area and second It cuts and is converted between area；Silicon rod handler faces set on the conversion work platform, for silicon rod to be cut to be transported to by loading place Loading place is transported to by the silicon rod plummer for corresponding to Accreditation Waiting Area corresponding to the silicon rod plummer of Accreditation Waiting Area or by chamfering silicon rod.

Silicon rod movement system disclosed in the present application, including silicon rod conversion equipment and silicon rod handler, are converted using silicon rod Device can convert the silicon rod of carrying between Accreditation Waiting Area, the first cutting area and the second cutting area, utilize silicon rod handler The feeding operation of achievable silicon rod to be cut and the discharge operation of chamfering silicon rod, so, it can be achieved that silicon rod it is quick and convenient Ground conversion, improves the cutting evolution operating efficiency of silicon rod.

In the certain embodiments of the application third aspect, the conversion driving mechanism includes: rotation axis, is connected to institute State conversion work platform；Source of rotational drive, for driving the rotation axis rotation to drive the conversion work platform to rotate.

In the certain embodiments of the application third aspect, three silicon rod carryings are uniformly provided on the conversion work platform Platform or four silicon rod plummers.

In the certain embodiments of the application third aspect, the silicon rod handler includes: commutation carrier, is equipped with work Part fixture；Unidirectional driving mechanism, for driving the commutation carrier to make commutation movement to enable the work piece holder clamping to be cut Silicon rod to be cut is simultaneously transported to the silicon rod plummer corresponding to Accreditation Waiting Area by loading place by silicon rod, or, clamping corresponds to Accreditation Waiting Area Silicon rod plummer on the silicon rod of chamfering and chamfering silicon rod is transported to loading place by Accreditation Waiting Area.

In the certain embodiments of the application third aspect, the unidirectional driving mechanism includes: reversing shaft, is connected to institute State commutation carrier；Unidirectional driving source is connected with the reversing shaft, for driving the rotation axis rotation to drive the commutation to carry Tool rotation.

Detailed description of the invention

Fig. 1 is shown as structural schematic diagram of the application silicon rod multi-wire saw equipment in a certain embodiment.

Fig. 2 is shown as the top view of Fig. 1.

Fig. 3 is shown as structural schematic diagram of the application silicon rod multi-wire saw equipment in a certain embodiment.

Fig. 4 is shown as the application and is equipped with knot of the silicon rod multi-wire saw equipment of silicon rod handler in a certain embodiment Structure schematic diagram.

Fig. 5 is shown as the structural schematic diagram of silicon rod handler in Fig. 4.

Fig. 6 is shown as structural schematic diagram of the silicon rod handler in a certain embodiment.

Fig. 7 is shown as flaw-piece jacking mechanism applied to schematic perspective view of the silicon rod plummer in a certain embodiment.

Fig. 8 is shown as the top view that flaw-piece jacking mechanism is applied to silicon rod plummer.

Fig. 9 is shown as top view of the flaw-piece jacking mechanism in a certain embodiment.

Figure 10 is shown as treating using the silicon rod multi-wire saw equipment in Fig. 4 in cutting silicon rod progress evolution cutting process Status diagram.

The state that Figure 11 is shown as treating cutting silicon rod completion evolution cutting using the silicon rod multi-wire saw equipment in Fig. 4 is shown It is intended to.

Figure 12 is shown as the partial structure diagram of flaw-piece hoisting mechanism

Figure 13 is shown as the partial structure diagram for driving flaw-piece to rise displacement using flaw-piece hoisting mechanism.

Figure 14 is shown as the structural schematic diagram of the clamp assemblies in Figure 11 in one embodiment.

Figure 15 is shown as the structural schematic diagram of the clamp assemblies in Figure 11 in another embodiment.

Figure 16 is shown as the application silicon rod multi-wire saw equipment in the structural representation using clamping transshipment acitivity clamping flaw-piece Figure.

Figure 17 is shown as the application silicon rod multi-wire saw equipment and is driving flaw-piece to rise to disengaging using clamping transshipment acitivity The structural schematic diagram of evolution silicon rod.

Figure 18 is shown as the application silicon rod multi-wire saw equipment and is driving flaw-piece to be transported to flaw-piece using clamping transshipment acitivity The structural schematic diagram of discharge zone.

Figure 19 is shown as the flow diagram of the application silicon rod multi-line cutting method.

Figure 20 is shown as the flow diagram of step S14 refinement step in Figure 19.

Specific embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

In described below, with reference to attached drawing, attached drawing describes several embodiments of the application.It should be appreciated that also can be used Other embodiments, and can be carried out without departing substantially from spirit and scope mechanical composition, structure, electrically with And operational change.Following detailed description should not be considered limiting, and the range of embodiments herein Only limited by the claims for the patent announced.Term used herein is merely to describe specific embodiment, and be not It is intended to limit the application.The term of space correlation, for example, "upper", "lower", "left", "right", " following ", " lower section ", " lower part ", " top ", " top " etc. can be used in the text in order to an elements or features and another element or spy shown in explanatory diagram The relationship of sign.

Although term first, second etc. are used to describe various elements herein in some instances, these elements It should not be limited by these terms.These terms are only used to distinguish an element with another element.For example, first turn It can be referred to as the second steering swing to swinging, and similarly, the second steering, which is swung, can be referred to as the first steering swing, and The range of various described embodiments is not departed from.

In relevant squaring silicon bar cutting operation, the problems such as there are the inefficiency of squaring silicon bar cutting operation.Therefore, To those skilled in the art, it is necessary to a kind of silicon rod multi-wire saw equipment and silicon rod multi-line cutting method are researched and developed, so as to In the cutting operation efficiency that can improve squaring silicon bar, the overall cost of squaring silicon bar is reduced.

It should be noted that the application silicon rod multi-wire saw equipment and silicon rod multi-line cutting method can be applied to the evolution of silicon rod In cutting and chamfering cutting operation.The existing generally pylindrical structure of silicon rod, by silicon rod multi-wire saw equipment to silicon rod into The cutting of row evolution, so that silicon rod section after evolution processing is in class rectangle (including class square), and evolution silicon rod is integrally in Class cuboid (including class is cube shaped) leads to including four vertical tangent planes and the fillet surface between two neighboring vertical tangent plane It crosses silicon rod multi-wire saw equipment and chamfering cutting is carried out to evolution silicon rod, in order to carry out subsequent grinding operation to silicon rod.

By taking silicon single crystal rod as an example, the formation process of silicon single crystal rod can include: first using silicon rod shear to long silicon originally Stick carries out truncation operation to form the short silicon rod of multistage；After the completion of truncation, but use squaring silicon bar machine to the short silicon rod after truncation into Row evolution operation Formation cross-section is in the silicon single crystal rod of class rectangle.Wherein, long silicon rod originally is cut using silicon rod shear Disconnected operation with formed the specific implementation of the short silicon rod of multistage can refer to for example, CN105856445A, CN105946127A, with And the patent publication us such as CN105196433A, it is formed after carrying out evolution operation to the short silicon rod after truncation using squaring silicon bar machine Section then can refer to the patent publication us such as CN105818285A in the specific embodiment of the silicon single crystal rod of class rectangle.But monocrystalline The formation process of silicon rod simultaneously loses and is limited to aforementioned techniques, and in optional example, the formation process of silicon single crystal rod may also include that and first make Long silicon single crystal rod of the evolution operation with Formation cross-section in class rectangle is carried out to long silicon rod originally with total silicon stick excavation machine；Evolution is complete Cheng Hou, and truncation operation is carried out to the long silicon single crystal rod after evolution using silicon rod shear and forms short crystalline silicon rod.Wherein, among the above Evolution operation is carried out to form the specific reality of the long silicon single crystal rod in class rectangle to long silicon rod originally using total silicon stick excavation machine Existing mode can refer to the patent publication us such as example, CN106003443A.

Please refer to Fig. 1 and Fig. 2, wherein Fig. 1 is shown as knot of the application silicon rod multi-wire saw equipment in a certain embodiment Structure schematic diagram, Fig. 2 are shown as the top view of Fig. 1.In Fig. 1 and embodiment illustrated in fig. 2, the silicon rod multi-wire saw equipment packet It includes: base 1, silicon rod conversion equipment 2 and wire-electrode cutting device 3.

Base 1 is the main element of silicon rod multi-wire saw equipment.Preferably, the volume and weight of base 1 are larger, to mention For bigger mounting surface and more firm complete machine stable degree.In actual application, base 1 is equipped with workbench 11, described Accreditation Waiting Area, the first cutting area and the second cutting area are sequentially equipped on workbench 11.It is assumed herein that according to Accreditation Waiting Area, first The trend of the sequence of cutting area and the second cutting area is forward direction, then, the trend of the sequence opposite with the forward direction is inverse To.

Silicon rod conversion equipment 2 is set on workbench 11, for carrying silicon rod and converting to the silicon rod enforcing location of carrying.? In actual application, silicon rod conversion equipment 2 is further included: conversion work platform 21 and conversion driving mechanism (not showing in the drawings), Wherein, conversion work platform 21 is equipped with multiple silicon rod plummers 211, and the conversion driving mechanism is for driving the conversion work Platform makees converting motion to enable the multiple silicon rod plummer convert between Accreditation Waiting Area, the first cutting area and the second cutting area. Particularly, silicon rod plummer 211 there are three setting on Fig. 1 and conversion work platform 21 shown in Fig. 2, can correspond to workbench 11 Accreditation Waiting Area, the first cutting area and the second cutting area.Specifically, when one of them in three silicon rod plummers 211 is corresponding When Accreditation Waiting Area, remaining other two then correspond respectively to the first cutting area and the second cutting area.

For carrying silicon rod, (silicon rod can be silicon rod to be cut, evolution silicon rod or fallen silicon rod plummer 211 Angle silicon rod), therefore, the structure of silicon rod plummer 211 can be identical, but is not limited thereto, and in other embodiments, silicon rod is held Different structures can also be used in microscope carrier 211.By taking the structure of silicon rod plummer 211 is identical as an example, the substantially platform of silicon rod plummer 211 Face structure pillows on conversion work platform 21.In addition, in silicon rod plummer 211 for the loading end that is contacted with silicon rod can provide compared with Big damping, to provide the frictional force that silicon rod can be driven certain.

The conversion driving mechanism is for driving conversion work platform 21 to make converting motion to enable the silicon on conversion work platform 21 Stick plummer 211 is converted between Accreditation Waiting Area, the first cutting area and the second cutting area.

In Fig. 1 and embodiment shown in Fig. 2, the conversion driving mechanism may be, for example, rotating mechanism, the rotating machine Structure includes rotation axis and source of rotational drive.The rotation axis is set on workbench 11 and is connected to conversion work platform 21.Described turn Dynamic driving source is connected with the rotation axis, for driving the rotation axis rotation to drive conversion work platform 21 to rotate.In reality Application in, motor (such as: ordinary motor or servo motor etc.) can be used in the source of rotational drive.As shown in Figure 1, described turn The installation site for changing the rotation axis in driving mechanism is located at the middle section of conversion work platform 21, and silicon rod plummer 211 distinguishes position In the opposite sides of the shaft.The shape of conversion work platform 21 may be, for example, rectangle, regular polygon, ellipse or circle Deng, but be not limited thereto, in fact, the shape of conversion work platform 21 can then have other variations, that is, the shape of conversion work platform 21 Shape can also be asymmetric design, it might even be possible to be the irregular shape for meeting product design specifications.Certainly, driving conversion work is realized Making the rotating mechanism that platform 21 rotates can also be used other implementations.For example, in other implementations, the rotating mechanism In the mode of fluted disc rotation a fluted disc is arranged in the bottom of conversion work platform 21, in machine in the mode that fluted disc rotation can also be used One rotate gear that is meshed with the fluted disc of setting on seat 1, it is (such as electric that the rotate gear is controlled by a source of rotational drive Machine).In actual application, the rotate gear is driven to rotate by the source of rotational drive, the rotate gear rotation is with band The dynamic fluted disc rotation being meshed, to realize the rotation of conversion work platform 21.

The rotating mechanism is utilized as a result, and conversion work platform 21 can be driven to rotate.In Fig. 1 and embodiment shown in Fig. 2 In, Accreditation Waiting Area, the first cutting area and the second cutting area on workbench 11 are to be uniformly arranged, that is, Accreditation Waiting Area, the first cutting area And second cutting area be between any two hexagonal angle lay, correspondingly, three silicon rod plummers 211 on conversion work platform 21 It is uniformly distributed, that is, three silicon rod plummers 211 on conversion work platform 21 are laid in hexagonal angle between any two.When using institute When stating rotating mechanism, single actuations conversion work platform 21 rotates 120 °, then the silicon rod plummer 211 on conversion work platform 21 just turns Shifting to next position, that is, the silicon rod plummer 211 of original corresponding Accreditation Waiting Area is corresponding with the first cutting area after single conversion, The silicon rod plummer 211 of original corresponding first cutting area is corresponding with the second cutting area after single conversion, and original corresponding second cuts The silicon rod plummer 211 for cutting area is corresponding with Accreditation Waiting Area after single conversion.

Therefore, using the rotating mechanism, conversion work platform 21 can be driven to rotate to enable silicon rod plummer 211 wait It is converted between area, the first cutting area and the second cutting area.Please continue to refer to Fig. 1 and Fig. 2, in corresponding embodiment, conversion Three silicon rod plummers 211 on workbench 21 relative to rotation axis in the rotating mechanism in being uniformly arranged, therefore, Yu Shiji Application in, driving conversion work platform 21 make converting motion single operation refer specifically to using the rotating mechanism driving turn The platform 21 that changes jobs rotate 120 ° can be realized on conversion work platform 21 silicon rod plummer 211 Accreditation Waiting Area, the first cutting area and It is converted between second cutting area.

In view of the rotating mechanism rotator inertia and cause in rotation error and the silicon rod multi-wire saw equipment The cables such as the power supply line or signal wire of laying will not drive those cables excessively to wind because of the inordinate rotation of silicon rod conversion equipment 2 Those cables are in turn resulted in around disconnected.In a specific embodiment, technical solution provided by the present application considers to silicon rod conversion equipment 2 Maximum rotation angle limited, i.e., enabling silicon rod conversion equipment 2 realize silicon rod plummer 211 Accreditation Waiting Area, first cutting May include following two situation during being converted between area and the second cutting area:

The first situation is that the rotational angle range of conversion work platform 21 is ± 240 °, in particular to makes conversion work platform 21 return to original position after 120 ° and 240 ° primary of backwards rotation by rotating forward twice.In specific implementation, by described turn Dynamic driving source drives the rotation axis to rotate forward 120 ° for the first time, first silicon rod plummer 211 of original corresponding Accreditation Waiting Area It is corresponding with the first cutting area after first time forward conversion, second silicon rod plummer 211 warp of original corresponding second cutting area Corresponding with Accreditation Waiting Area after first time forward conversion, the third silicon rod plummer 211 of original corresponding first cutting area is through for the first time It is corresponding with the second cutting area after forward conversion；The rotation axis is driven to rotate forward 120 ° for the second time by the source of rotational drive, First silicon rod plummer 211 of original corresponding first cutting area is corresponding with the second cutting area after second of forward conversion, former Second silicon rod plummer 211 for first corresponding to Accreditation Waiting Area is corresponding with the first cutting area after second of forward conversion, original corresponding The third silicon rod plummer 211 of second cutting area is corresponding with Accreditation Waiting Area after second of forward conversion；By the rotate driving 240 ° of rotation axis backwards rotation described in the single actuations of source, first silicon rod plummer 211 of original corresponding second cutting area is through list Corresponding with Accreditation Waiting Area after secondary reverse transformation, second silicon rod plummer 211 of original corresponding first cutting area inversely turns through single Corresponding with the second cutting area after changing, originally the third silicon rod plummer 211 of correspondence Accreditation Waiting Area was after single reverse transformation with the One cutting area is corresponding.This kind of situation bring beneficial effect further includes, and can be the internal structure of entire silicon rod Multi-position processing machine Design provides more flexible design space, such as, it may be considered that in the second cutting area to other structures are arranged between Accreditation Waiting Area The case where part is without regard to hindering the rotation of silicon rod conversion equipment.

Second situation is that the rotation angle range of the silicon rod conversion equipment is ± 360 °, in particular to makes to convert work Making platform 21,360 ° of counter-rotating (or rotating in the forward direction) can be released again with returning to original position after rotating in the forward direction 360 ° of (or counter-rotating) Put the cable (if if having cable) wound during single direction rotation.

In short, above two rotating manner may achieve essentially identical effect, but the setting of silicon rod conversion equipment not with This is limited, as long as the silicon rod that can allow to carry out processing operation can be smooth, steady and expeditiously completes every processing operation, then The conversion regime (such as rotation direction and rotational angle etc.) of silicon rod conversion equipment can make other variations.

Certainly, if not considering risk that above-mentioned cable is excessively wound or can be by the rotator inertia institute of the rotating mechanism If caused rotation error is controlled, the silicon rod conversion equipment can also continue to use this unidirectional unlimited rotary mode.

Herein, think separately to remark additionally, in other alternative embodiments, if silicon rod multi-wire saw equipment is additionally arranged Other corresponding silicon rod apparatus for work, then the number of the silicon rod plummer on function position and conversion work platform on workbench Amount and its positional relationship are both needed to be adjusted accordingly, subsequent, are being added using silicon rod multi-wire saw equipment to silicon rod to be processed During the industry that works, a predetermined angle is rotated to realize that silicon rod is converted in each function position using silicon rod conversion equipment Also corresponding adjustment is had.

In Fig. 1 and embodiment shown in Fig. 2, the conversion driving mechanism utilizes rotating machine using rotating mechanism Structure can drive conversion work platform 21 to rotate to enable the silicon rod plummer 211 on conversion work platform 21 in Accreditation Waiting Area, the first cutting It converts, but is not limited thereto between area and the second cutting area, for example, in other embodiments, the conversion driving mechanism Translation mechanism can also be used, conversion work platform 21 can be driven to translate to enable on conversion work platform 21 using the translation mechanism Silicon rod plummer 211 is converted between Accreditation Waiting Area, the first cutting area and the second cutting area.Fig. 3 specifically is seen, is shown as this Apply for structural schematic diagram of the silicon rod multi-wire saw equipment in a certain embodiment.In an embodiment shown in Fig. 3, the application silicon Driving mechanism is converted provided by stick multi-wire saw equipment as translation mechanism.As shown in figure 3, the translation mechanism can include: flat Move guide rail, sliding block and driven in translation source, wherein the translating rails are layed on the workbench of base 1 (referring in Fig. 3 X-axis trend), the sliding block is set to the bottom of conversion work platform 21 ' and is adapted to corresponding translating rails, the driven in translation source For driving conversion work platform 21 ' to be translated along the translating rails.In actual application, to make conversion work platform 21 ' can be achieved stably translational in the workbench of base 1, and double Guide Rail Designs can be used, that is, two translating rails are used, the two Translating rails are arranged parallel.In addition, the driven in translation source can further comprise translation lead screw and translation motor, wherein described Translation lead screw along X-axis move towards setting (such as the translation lead screw is between two translating rails) and with conversion work platform 21 ' Connection, the translation motor (translation motor may be, for example, servo motor) is connect with the translation lead screw.In this way, by institute It states translation motor (translation motor may be, for example, servo motor) and drives the lead screw rotation, so that conversion work platform can be realized 21 ' translated along translating rails with enable the silicon rod plummer 211 on conversion work platform 21 ' Accreditation Waiting Area, the first cutting area with And second convert between cutting area.

In addition, in silicon rod multi-wire saw equipment shown in Fig. 3, on the workbench of base 1, it is located at intermediate region and is equipped with the One cutting area and the second cutting area, the first cutting area and the second cutting area are along X axis left and right settings, in the first cutting area and second The left and right sides that cutting area is moved towards along X-axis can be respectively equipped with Accreditation Waiting Area.In this way, it can be achieved that conversion work in actual application Make the flexible conversion between Accreditation Waiting Area, the first cutting area and the second cutting area of the silicon rod plummer 211 on platform 21 '.For example, as schemed Shown in 3, conversion work platform 21 ' is in rectangle, is equipped at least three silicon rod plummers 211 along X axis on conversion work platform 21 ', In this way, when two silicon rod plummers 211 therein respectively correspond, the first cutting area carries out evolution cutting and the second cutting area carries out When chamfering is cut, at least one other silicon rod plummer 211 are then corresponding left side Accreditation Waiting Area or right side Accreditation Waiting Area, when completing certain After one of cutting operation, translated using translation mechanism driving conversion work platform 21 ' to enable the silicon on conversion work platform 21 ' Stick plummer 211 is converted between Accreditation Waiting Area, the first cutting area and the second cutting area.

The silicon rod plummer 211 on conversion work platform 21 in the application silicon rod multi-wire saw equipment is for carrying silicon rod (silicon rod can be silicon rod to be cut, evolution silicon rod or chamfering silicon rod), the silicon rod can erect mode and put In on silicon rod plummer 211.Generally, due to the silicon rod dead weight is larger, end face and silicon in the silicon rod If 211 loading end of stick plummer is enough, then, the silicon rod is placed on silicon rod plummer 211 in a manner of erectting or phase To stable.

Silicon rod conversion equipment disclosed in the present application, including the conversion work platform with multiple silicon rod plummers and for driving The conversion driving mechanism that the conversion work platform makees converting motion is moved, it is corresponding in conversion work platform to wait within the same period The feeding operation and the discharge operation of evolution silicon rod that the silicon rod plummer 211 in area carries out new silicon rod to be cut, conversion work Silicon rod to be cut in platform on the silicon rod plummer 211 of corresponding first cutting area carries out evolution cutting operation, in conversion work platform The silicon rod of evolution on the silicon rod plummer 211 of corresponding second cutting area carries out chamfering cutting operation, and feeding, the evolution of silicon rod are cut Cut, chamfering cutting and discharging carry out at different corresponding positions, for example, the operations such as the feeding of silicon rod and discharging need not be the One cutting area or the second cutting area carry out improving the cutting operation efficiency of silicon rod to occupy the resource of cutting area.Pass through institute again Stating conversion driving mechanism drives the conversion work platform to make a converting motion, and each silicon rod plummer is replaced, in this way, The quick of silicon rod can be achieved and easily convert, improve the cutting operation efficiency of silicon rod.

Certainly, for silicon rod to be cut, extended meeting thereafter carries out corresponding cutting operation by wire-electrode cutting device 3, therefore, Further, for the stability for the silicon rod to be cut for keeping setting to be placed on silicon rod plummer 211, in certain embodiment party In formula, can also it be equipped on silicon rod plummer 211 positioning mechanism (not showing in the drawings), the positioning mechanism is included at least for fixed The bottom locating piece for the silicon rod bottom to be cut placed is erect in position, preferably, the bottom locating piece can in a practical application To be the silicon rod clamper being fixedly arranged on silicon rod plummer 211, which may include collet and the clamping jaw set on collet periphery, Collet is adapted with the silicon rod to be cut that need to be limited, and clamping jaw is multiple (generally, due to be needed silicon rod by initial circle Section is cut into class rectangle section, puts down in this way, silicon rod is cut into four two parallel cuttings along silicon rod length direction Face, therefore, the quantity of each clamping jaw are preferably four, are extended upward respectively from the bottom of collet).In one case, right In the setting of clamping jaw, clamping jaw may be designed as flexible elastic clamping jaw and clamping jaw is the bottom (clamping jaw that engagement is connected to collet Connecting pin be provided with fluted disc, the bottom of collet is equipped with fluted disc adjustable column engage with fluted disc, designed on fluted disc adjustable column have it is more Save adjusting tooth.Pass through the folding of the i.e. controllable clamping jaw of the up and down motion of fluted disc adjustable column).In this way, when silicon rod to be cut is placed in When collet, silicon rod to be cut is resisted against collet and ensures that silicon rod to be cut and collet are concentric, at this moment, clamping jaw can well it is clamping live Silicon rod bottom to be cut.Further more, clamping jaw scratches scuffing silicon rod to be cut, the position that clamping jaw is contacted with silicon rod to be cut in order to prevent Cushion is added for round and smooth design or the inner surface that contact with silicon rod in clamping jaw.Certainly, silicon rod clamper be only it is a kind of compared with Good embodiment, but bottom locating piece is not limited thereto, in other embodiments, bottom locating piece be also possible to Pneumatic suction cup or Person is coated with the bonding connection face of binder, should equally have the effect of for silicon rod to be cut being stable on silicon rod plummer 211.

It need to supplement, the application silicon rod multi-wire saw equipment may also include silicon rod handler, for carrying out to silicon rod Handling operation.Specifically, the feeding operation of silicon rod to be cut is completed using silicon rod handler and cutting silicon rod is completed Discharge operation.Please refer to Fig. 4 and Fig. 5, wherein Fig. 4 is corresponding with Fig. 1, is shown as the application and is equipped with silicon rod handler Structural schematic diagram of the silicon rod multi-wire saw equipment in a certain embodiment, Fig. 5 are shown as the structure of silicon rod handler 4 in Fig. 4 Schematic diagram.In conjunction with Fig. 4 to Fig. 5, the silicon rod handler 4 in the application silicon rod multi-wire saw equipment is adjacent to silicon rod conversion equipment 2, comprising: commutation carrier 41 is equipped with silicon rod clamper 43；Unidirectional driving mechanism, for driving commutation carrier to make commutation movement.

The carrier 41 that commutates is the agent set for other kinds component in silicon rod handler to be arranged, other kinds component May include mainly silicon rod clamper 43, but is not limited thereto, other component also may be, for example, mechanical structure, electric control system and Numerical control device etc..In the present embodiment, commutation carrier 41 may include pedestal, the upper frame opposite with pedestal and set on pedestal and Supporting framework between upper frame.In addition, the commutation another important function of carrier 41 is through commutation movement to support silicon rod clamper 43 commutation conversion.The carrier 41 that commutates for example can make commutation movement by a unidirectional driving mechanism.Utilize the unidirectional driving machine Structure, can drive commutation carrier 41 make commutation movement with enable commutation carrier 41 on silicon rod clamper 43 clamp silicon rod 10 to be cut and will Silicon rod 10 to be cut is transported to an at least silicon rod plummer 211 or an at least silicon rod plummer corresponding to Accreditation Waiting Area by loading place 211, or, an at least silicon rod plummer 211 or the chamfering silicon on an at least silicon rod plummer 211 that clamping corresponds to Accreditation Waiting Area Chamfering silicon rod 14 is simultaneously transported to loading place by Accreditation Waiting Area by stick 14.

In specific implementation, so that commutation carrier 41 realizes that the unidirectional driving mechanism of commutation movement may include rotation axis And rotary electric machine, by installation foundation of the rotation axis axis connection under it, (installation foundation may be, for example, multi-wire cutting to commutation carrier 41 Cut the pedestal of equipment or the workbench of multi-wire saw equipment), the connecting pin in rotation axis for connecting with commutation carrier 41 can Equipped with the installation edge extended out, the installation along it is upper it is uniformly distributed have mounting hole, accordingly, the center of pedestal in the carrier 41 that commutates Mounting hole also is provided at position, during installation, pedestal is docked with rotation axis in the carrier 41 that commutates, mounting hole and rotation on pedestal Mounting hole alignment on axis is locked after the mounting hole of alignment by additional locking elements such as such as bolts later, completes commutation The assembly of carrier 41.When implementing divertical motion, then start rotary electric machine, the rotation of driving rotation axis is to drive commutation carrier 41 to make Commutation movement is realized in rotation.Aforementioned driving rotation axis rotation may be designed as one-directional rotation and be also designed to Double-directional rotary, the list It may be, for example, unidirectionally to rotate clockwise or unidirectionally rotate counterclockwise to rotation, the Double-directional rotary then may be, for example, while realize suitable Hour hands are rotated and are rotated counterclockwise.In addition, driving rotation axis rotation angle can according to the actual configuration of silicon rod handler and Setting.Furthermore disc structure, rectangular disk or oval plate, central location and rotation axis can be used in the pedestal in the carrier 41 that commutates Connection, but the shape of pedestal is not limited to this, and in other embodiments, other shapes can also be used in pedestal.

It is provided at least one silicon rod clamper 43 on commutation carrier 41, for clamping corresponding silicon rod.In Fig. 4 and Fig. 5 Shown in silicon rod multi-wire saw equipment, a silicon rod clamper 43, the silicon rod are equipped on a certain mounting surface of commutation carrier 41 Fixture 43 can be used for clamping round silicon rod (that is, silicon rod to be cut) and silicon cube (that is, chamfering silicon rod).In this way, being changed by driving Make commutation movement to carrier 41, so that the silicon rod clamper 43 on commutation carrier 41 is converted between loading place and Accreditation Waiting Area to transport Silicon rod to be cut and between Accreditation Waiting Area and loading place conversion to transport chamfering silicon rod.In actual application, commutation is carried Depending on the rotational angle of 41 work commutation movement of tool is the positional relationship between loading place and Accreditation Waiting Area, in a kind of embodiment In, the loading place is to be oppositely arranged with the Accreditation Waiting Area, and silicon rod handler 4 is located between the two, and therefore, commutate carrier 41 180 ° of angle rotations are made by the driving of unidirectional driving mechanism.But be not limited thereto, in other embodiments, if the loading place with The Accreditation Waiting Area is in 90 ° of angle settings, then, commutation carrier 41 makees an angle of 90 degrees rotation by the driving of unidirectional driving mechanism.But, no matter why It says, the positional relationship between loading place and Accreditation Waiting Area is without specific limitation, their setting sequence and mutual setting Angle can still make other variations, as long as if ensuring that unnecessary interference will not be generated between each station, in this way, commutation carrier 41 rotation direction and rotational angle can also be adaptively adjusted.

As previously mentioned, the application silicon rod multi-wire saw equipment can carry out evolution cutting operation to silicon rod, it can will be in cylindrical body The circle silicon rod of form is formed as the silicon cube that section is in class rectangle after evolution cutting operation.Therefore, the silicon rod folder in the application Tool 43, which can be realized, to be both capable of clamping single-wafer silicon rod or had been capable of clamping silicon cube.

Below to silicon rod clamper 43 and being described in detail.

Silicon rod clamper 43 further comprises at least two silicon rod clamping pieces 431, wherein between at least two silicon rod clamping pieces are Every setting.In one embodiment, still chamfering silicon rod has been to erect to place to silicon rod either to be cut, therefore, at least two A silicon rod clamping piece 431 is setting up and down.

In specific implementation, any one silicon rod clamping piece 431 is more can include: clamp arm mounting base 433 and at least two Clamp arm 435, wherein clamp arm mounting base 433 is provided on commutation carrier 41, and at least two clamp arm 435 are to be movably arranged at clamp arm peace It fills on seat 433.In an alternative embodiment, clamp arm 435 is two, the two clamp arm 435 are symmetrical set, single clamp arm 435 are equipped with two clip tooths 437 of front and back layout, in this way, the clip tooth 437 (totally four) in two clamp arm 435 may make up a confession Clamp the grasping part of single-wafer silicon rod or silicon cube.Extraly, the adjusting that centers can more be had both using silicon rod clamping piece 431 Effect.Under general scenario, the clamp arm 435 in silicon rod clamping piece 431 is under clamping state, clamping that two clamp arm 435 are constituted The center in space is that the center of chamfering silicon rod has coincided with silicon rod to be cut and.Therefore, it is gone when using silicon rod clamping piece 431 When the silicon rod to be cut placed or chamfering silicon rod are erect in clamping, two clamp arm 435 in silicon rod clamping piece 431 are shunk, by pressing from both sides Clip tooth 437 in arm 435 is resisted against silicon rod to be cut or chamfering silicon rod.Clamp arm 435 shrink and clamping silicon rod to be cut or During chamfering silicon rod, silicon rod to be cut or chamfering silicon rod are pushed by two clamp arm 435 of both sides and towards clampings The middle section in space is mobile, and up to silicon rod to be cut or chamfering silicon rod is pressed from both sides by two clamp arm 435 in silicon rod clamping piece 431 It tightly lives, at this point, silicon rod to be cut or the center of chamfering silicon rod can be located at the center of the grasping part of silicon rod clamping piece 431. Certainly, in the clip tooth 437 in clamp arm 435 can also additional buffer unit, clamping silicon rod to be cut for avoiding or falling The damage to its surface is caused during the silicon rod of angle, plays protection silicon rod to be cut or the good result of chamfering silicon rod.

To enable two clamp arm 435 in silicon rod clamping piece 431 smooth and being held fixedly different dimensions Silicon rod to be cut or chamfering silicon rod, silicon rod clamping piece 431 further include clamp arm driving mechanism, for driving two clamp arm 435 to make Opening and closing movement.In one embodiment, the clamp arm driving mechanism may be, for example, the cylinder with telescopic shaft.For example, belonging to Two clamp arm 435 in silicon rod clamping piece 431 share a cylinder 432, and the cylinder has two (sets) telescopic shaft, each A (set) telescopic shaft is connected with a clamp arm 435, and clamp arm 435 can be slidedly arranged on commutation carrier 41 by a sliding rail, in this way, utilizing The cylinder can control the telescopic shaft flexible to drive clamp arm 435 to slide on the sliding rail and realize clamping movement.It can also example Such as, a cylinder is configured for each clamp arm 435, the telescopic shaft of the cylinder is connected with clamp arm 435, and clamp arm 435 can pass through one Sliding rail is slidedly arranged on commutation carrier 41, in this way, can control the telescopic shaft flexible to drive clamp arm 435 in institute using the cylinder It states sliding on sliding rail and realizes clamping movement.Certainly, in other embodiments, other shapes can also be used in the clamp arm driving mechanism Formula.

Just as it is known by a person skilled in the art that be directed to silicon rod, be by long silicon rod originally carry out truncation operation and shape At, it is bound to so that the size difference between silicon rod is totally different, is for the silicon erect under placement status in view of silicon rod clamper 43 Stick (silicon rod to be cut or chamfering silicon rod) is clamped, therefore, for silicon rod clamper 43, the influence of aforementioned dimensions difference Mainly just show that the length difference opposite sex of silicon rod is clamped to silicon rod to whether the silicon rod clamping piece 431 in silicon rod clamper 43 can correspond to Secret worry.

To reduce the risk even exempted above-mentioned silicon rod clamping piece 431 and may can not be clamped to silicon rod, silicon rod clamper 43 have different design schemes.

In one implementation, silicon rod clamper 43 uses fixed clamping piece, that is, with vertical side on commutation carrier 41 Silicon rod clamping piece as much as possible is fixedly installed in formula, and, two neighboring silicon rod clamping piece 431 in these silicon rod clamping pieces 431 Settable smaller of spacing, in this way, using these silicon rod clamping pieces 431 can cover all kinds scale lengths silicon rod.For example, if The length of silicon rod is longer, then participates in clamping using silicon rod clamping piece 431 more on commutation carrier 41；If the length of silicon rod compared with It is short, then clamping is participated in using silicon rod clamping piece 431 less on commutation carrier 41, for example, several underlying silicon rods press from both sides Gripping member 431 participates in clamping, and be located above and be higher than those of silicon rod silicon rod clamping piece 431 and be just not involved in.

In other implementations, silicon rod clamper 43 uses movable clamping piece, that is, with vertical side on commutation carrier 41 Silicon rod clamping piece 431 is arranged in formula activity, since silicon rod clamping piece 431 is movable design, therefore, the number of silicon rod clamping piece 431 Amount can be greatly decreased, and generally two or three can meet.In this way, using movable clamping piece can cover all kinds specification it is long The silicon rod of degree.For example, moving the silicon rod clamping piece 431 of activity setting if the length of silicon rod is longer, extend two silicon rod clampings The clamping spacing of part 431；If the length of silicon rod is shorter, the silicon rod clamping piece 431 of activity setting is moved, shortens two silicon rod folders The clamping spacing of gripping member 431.

For the silicon rod clamper 43 of movable silicon rod clamping piece, different change case is also had.With two silicon rod clamping pieces For 431, in a kind of optional embodiment, a silicon rod clamping piece 431 in two silicon rod clamping pieces 431 is movable sets Counting another silicon rod clamping piece 431 then is fixed design, in this way, in actual application being set by the way that movement is movable That silicon rod clamping piece 431 of meter adjusts the clamping spacing between the silicon rod clamping piece 431 of fixed design.It can from above Know, silicon rod (silicon rod is either silicon rod to be cut is also possible to evolution silicon rod) is to erect to place, therefore, no matter silicon rod Scale lengths, the bottom of the silicon rod can always be relatively easy to it is determining, it is thus preferable to, can be by two silicon rod clamping pieces That silicon rod clamping piece 431 being located above in 431 be designed as it is movable, in this way, need to only adjust top silicon rod clamping piece 431 position.

Silicon rod clamping piece 431 for the movement for realizing silicon rod clamping piece 431, the movable design can be equipped with guiding driving Mechanism.The silicon rod clamping piece 431 of movable design can be driven along about 131 silicon rod clamper installation part using guiding driving mechanism It is mobile.In one implementation, guiding driving mechanism can for example, guide rail and guide motor, wherein guide rail is to erect to set It sets, the pedestal of silicon rod clamping piece 431 can be pillowed on the guide rail by sliding block, in this way, the silicon rod clamping above needing to adjust When the position of part 431, moved up and down by guide motor driving silicon rod clamping piece 431 along guide rail.By controlling movable design Silicon rod clamping piece 431, can adjust two silicon rod clamping pieces 431 between clamping spacing, thus to the silicon of different size length Stick is effectively clamped.

In another optional embodiment, two silicon rod clamping pieces 431 are movable design, in this way, in actual In, their mutual clamping spacing can be adjusted by the movement of two silicon rod clamping pieces 431 of movable design. Since silicon rod clamping piece 431 is movable design, then, at least one silicon rod clamping piece 431 in two silicon rod clamping pieces 431 Guiding driving mechanism need to be set, for driving two silicon rod clamping pieces 431 to move up and down.

In fact, in the case of two silicon rod clamping pieces 431 are movable design, not only using guiding driving mechanism Clamping spacing between adjustable two silicon rod clamping pieces 431 to carry out except effectively clamping the silicon rod of different size length, The purpose that can also realize lifting to the silicon rod of clamping passes through driving after two silicon rod clamping pieces 431 effectively clamp silicon rod Silicon rod clamping piece 431 moves up and down and goes up and down silicon rod.Specifically, still guiding is provided with the silicon rod clamping piece 431 of top to drive For motivation structure, had adjusted and lower section silicon rod firstly, the silicon rod clamping piece 431 of top is moved up and down by guiding driving mechanism Clamping spacing between clamping piece 431；Then, it is driven using the clamp arm driving mechanism in each silicon rod clamping piece 431 corresponding Two clamp arm 134 make clamping movement with smooth and be held fixedly silicon rod；Then, the silicon rod clamping piece 431 of top leads to again It crosses guiding driving mechanism driving and moves upwards, at this point, since frictional force acts on, the silicon rod clamping of the silicon rod and lower section that clamp Part 431 moves upwards therewith together, wherein the silicon rod clamped move upwards utilize be top silicon rod clamping piece 431 with Frictional force effect between silicon rod, silicon rod clamping piece 431 move upwards, and what is utilized is the silicon rod clamping piece 431 of silicon rod and lower section Between frictional force effect, thus realize lifting silicon rod effect.Drive of the silicon rod clamping piece 431 of top in guiding driving mechanism It is also identical process that dynamic lower drive silicon rod and the silicon rod clamping piece 431 of lower section, which move downward, to realize the effect of landing silicon rod Fruit, it will not be described here.

It should be noted that in other change case, the silicon rod clamping piece of lower section e.g. in two silicon rod clamping pieces 431 Guiding driving mechanism, structure, set-up mode and driving working method and the aforementioned top of guiding driving mechanism are set on 431 The guiding driving mechanism of silicon rod clamping piece 431 is similar, for example, by lower section silicon rod clamping piece 431 guiding driving mechanism drive It moves up and down under dynamic and adjusts the clamping spacing between top silicon rod clamping piece 431, and by the silicon rod clamping piece 431 of lower section The silicon rod clamping piece 431 of silicon rod and top is driven the modes such as to move up and down together under the driving of guiding driving mechanism.Again for example Two silicon rod clamping pieces 431 are provided with guiding driving mechanism, then the set-up mode of guiding driving mechanism and driving working method And the motion mode of two silicon rod clamping pieces 431 is self-evident, it will not be described here.

It is moved up and down in the silicon rod clamping piece 431 for movable setting to adapt to the progress of the silicon rod of different size length In the situation of clamping, in addition to silicon rod clamping piece 431 need to be arranged guiding and be driven using movable structure design, silicon rod clamping piece 431 Except motivation structure etc., it certainly will also need to know the scale lengths for the silicon rod for currently needing to clamp.In view of this, the silicon in the application Stick multi-wire saw equipment may also include height testing instrument 430, for detecting the height for erectting the silicon rod placed, thus as activity The silicon rod clamping piece 431 of formula setting is moved up or is moved down and the foundation of moving distance subsequent.

Correspondingly, in the present embodiment, silicon rod to be cut is shape after evolution cutting operation and chamfering cutting operation It is generally, long during being formed as silicon cube by silicon rod to be cut at silicon cube (the silicon cube be chamfering silicon rod) Degree be it is constant, therefore, when being located at chamfering silicon rod using 43 de-clamping of silicon rod clamper, movable setting on silicon rod clamper 43 Silicon rod clamping piece 431 can no longer need to adjust.

In addition, the silicon rod clamper in the application silicon rod handler can also have other variations.For example, silicon rod handler Silicon rod clamper there are two configurable, the two silicon rod clampers can be respectively arranged at two mounting surfaces opposite in commutation carrier 41 On.And the two silicon rod clampers can be it is identical be also possible to it is different.In the same case, the two silicon rod clampers For clamping round silicon rod and silicon cube.In the case of difference, as shown in fig. 6, two silicon rod clampers 43,44 on commutation carrier 41 In a silicon rod clamper 43 for clamping round silicon rod, another silicon rod clamper 44 is for clamping silicon cube.

Further more, as shown in Figure 4 and Figure 5, in silicon rod handler, also providing the mobile mechanism at least one direction.Example Such as, the mobile mechanism may include the driving and reversing mechanism along Y-axis setting, the driving and reversing mechanism can include: advance and retreat guide rail 902 and advance and retreat Motor, wherein advance and retreat guide rail 902 is to be arranged along Y-axis, and the pedestal of commutation carrier 41 can pillow advance and retreat guide rail 902 by sliding block 904 On, in this way, when needing to adjust the position of commutation carrier 41, by advance and retreat motor driven commutation carrier 41 along advance and retreat guide rail 902 retreat.It is retreated by control commutation carrier 41 along advance and retreat guide rail 902, can adjust commutation carrier 41 in the position of Y-axis, from And the silicon rod clamper 43 on commutation carrier 41 is enabled to correspond to the silicon rod plummer 100 of loading place or the silicon rod carrying of Accreditation Waiting Area Platform 211.

Further more, if it is necessary, may also include the translation mechanism along X-axis setting, being changed for providing in silicon rod handler It is translated to carrier 41 along X-axis.In actual application, the translation mechanism can include: translating rails and translation motor (do not exist Shown in schema), wherein the translating rails are to be arranged along X-axis, and the pedestal of commutation carrier 41 can be pillowed described flat by sliding block It moves on guide rail, in this way, driving commutation carrier 41 along institute by the translation motor when needing to adjust the position of commutation carrier 41 Translating rails are stated to translate.By control commutation carrier 41 along the translating rails translate, can adjust commutation carrier 41 in X The position of axis.

Using silicon rod handler 3, it can be achieved that handling to silicon rod, that is, can be transported to silicon rod to be cut by loading place Loading place is transported to by the silicon rod plummer for corresponding to Accreditation Waiting Area corresponding to the silicon rod plummer of Accreditation Waiting Area or by chamfering silicon rod.

Silicon rod handler 3 and silicon rod conversion equipment 2 constitute silicon rod movement system, can will be held using silicon rod conversion equipment The silicon rod of load is converted between Accreditation Waiting Area, the first cutting area and the second cutting area, achievable to be cut using silicon rod handler The feeding operation for cutting silicon rod and the discharge operation of chamfering silicon rod improve so, it can be achieved that silicon rod quick and easily converting The cutting evolution operating efficiency of silicon rod.

In actual application, the application squaring silicon bar equipment may also include the silicon rod measuring device set on Accreditation Waiting Area, use Dimensional measurement is carried out in the silicon rod of chamfering 14 for treating cutting silicon rod 10 or after chamfering is cut, is wanted with determining whether to meet product It asks.On the one hand, silicon rod 10 to be cut is transported to the silicon rod carrying corresponding to Accreditation Waiting Area using silicon rod handler 3 by loading place After platform 211 and before carrying out evolution cutting operation, needs to treat cutting silicon rod 10 and carry out dimensional measurement and position measurement, When necessary, cutting silicon rod 10 can be still treated by silicon rod handler 3 carries out position adjustment.On the other hand, it is cut by chamfering After operation, it is also desirable to carry out dimensional measurement to chamfering silicon rod 14.It, not only can be by to be cut using silicon rod measuring device Silicon rod 10 and the dimensional measurement of chamfering silicon rod 14 come examine silicon rod after evolution cutting operation and chamfering cutting operation whether Meet product requirement, can also obtain indirectly wire cutting by treating cutting silicon rod 10 and the dimensional measurement of chamfering silicon rod 14 The wear condition of device, so that real-time perfoming is calibrated or is corrected, or even maintenance or replacement.

Wire-electrode cutting device 3 is set on base 1, for carried on silicon rod plummer 211 in silicon rod conversion equipment 2 to Cutting silicon rod 10 carries out evolution cutting and chamfering cutting.In actual application, the wire-electrode cutting device includes and the first cutting The corresponding at least First Line cutter unit in area and at least one second wire cutting unit corresponding with the second cutting area, wherein institute An at least First Line cutter unit is stated for being carried to the silicon rod plummer for corresponding to the first cutting area in silicon rod conversion equipment Silicon rod to be cut carry out evolution cutting, at least one second wire cutting unit is used for corresponding to the in silicon rod conversion equipment The silicon rod of evolution that the silicon rod plummer of two cutting areas is carried carries out chamfering cutting.

In Fig. 1 and silicon rod multi-wire saw equipment shown in Fig. 4, wire-electrode cutting device 3 includes: liftably to be set to base 1 On wire cutting support 31 and an at least First Line cutter unit 33 and at least one second line on wire cutting support 31 Cutter unit 35, wherein wire cutting support 31 can make elevating movement, at least one first with respect to base 1 by an elevating mechanism Wire cutting unit 33 is corresponding with the first cutting area and has the first cutting line 331 for forming the first cutting gauze, using extremely A few First Line cutter unit 33 carries the silicon rod plummer 211 for corresponding to the first cutting area in silicon rod conversion equipment 2 Silicon rod 10 to be cut carries out evolution cutting, and at least one second wire cutting unit 35 is corresponding with the second cutting area and has formation the Second cutting line 351 of two cutting gauzes, using at least one second wire cutting unit 35 to corresponding in silicon rod conversion equipment 2 The silicon rod of evolution 12 that the silicon rod plummer 211 of second cutting area is carried carries out chamfering cutting.As previously mentioned, in Fig. 1 and Fig. 4 Shown in silicon rod multi-wire saw equipment, set that there are three silicon rod plummers 211 on conversion work platform 21, therefore, wire-electrode cutting device 3 It just include a First Line cutter unit 33 and a second wire cutting unit 35.

Wire cutting support 31 can be liftably set on the mounting structure 13 of base 1 by an elevating mechanism.Implement one In mode, the elevating mechanism may include having by the achievable wire cutting support such as lifting motor, riser guide and lifting slider 31 carry out the mechanism of vertical deviation, wherein riser guide is along the mounting structure 13 that Z axis is vertically arranged to base 1, the lifting Sliding block is set to the back of wire cutting support 31 and matches with riser guide, rises to make wire cutting support 31 that can realize to stablize The mounting structure 13 in base 1 is dropped, double Guide Rail Designs can be used, that is, uses two riser guides, the two riser guides are parallel Setting.The lifting motor (lifting motor may be, for example, servo motor) driving under, it can be achieved that wire cutting support 31 by Riser guide and the lifting slider make elevating movement relative to base 1.

First Line cutter unit 33 includes at least: the first coil holder 333 on wire cutting support 31 is set to the first coil holder Multiple first cutting wheels 335 on 333 and the first cutting line 331 for being sequentially set around each first cutting wheel 335.

In actual application, First Line cutter unit 33 includes at least eight first cutting wheels 335, this at least eight the One cutting wheel 335 is combined into two pairs of cutting wheel groups, that is, a cutting wheel group is formed by two cutting wheels, by two cutting wheels Group partners cutting wheel group.In actual application, First Line cutter unit 33 includes two pairs of cutting wheel groups, that is, first pair Cutting wheel group and second pair of cutting wheel group.First pair of cutting wheel group includes the first cutting wheel group and the second cutting wheel group, is divided It is listed in the left and right sides of the first coil holder 333, wherein the first cutting wheel group is located at the left side of the first coil holder 333 and sets including front and back Two the first cutting wheels 335 set, the second cutting wheel group are located at the right side of the first coil holder 333 and two including front and back setting the One cutting wheel 335；Second pair of cutting wheel group includes third cutting wheel group and the 4th cutting wheel group, is respectively in the first coil holder 333 front and rear sides, wherein third cutting wheel group is located at the front side of the first coil holder 333 and two first including left and right settings Cutting wheel 335, the 4th cutting wheel group are located at the rear side of the first coil holder 333 and two the first cutting wheels 335 including left and right settings.

First cutting line 331 forms after being sequentially set around each first cutting wheel 335 in First Line cutter unit 33 One cutting line net.In actual application, the first cutting line 331 is sequentially set around eight in First Line cutter unit 33 Four cutting line segments are formed after cutting wheel, this four cutting line segments constitute the first cutting gauze.In actual application, first is cut Secant 331, which is set around in the first cutting wheel group after two the first cutting wheels 335 of front and back setting, forms the first cutting line segment, and first Cutting line 331 forms the second cutting line segment after being set around two the first cutting wheels 335 that front and back is arranged in the second cutting wheel group, the One cutting line 331 forms third cutting line segment after being set around two the first cutting wheels 335 of left and right settings in third cutting wheel group, First cutting line 331 forms the 4th cutting line after being set around two the first cutting wheels 335 of left and right settings in the 4th cutting wheel group Section.In this way, the first cutting line segment, the second cutting line segment, third cutting line segment and the 4th cutting line segment are cooperatively formed in " well " First cutting gauze of font.In some embodiments, adjacent two cutting line segments are mutually perpendicular to and opposite two are cut Secant section is parallel to each other.Specifically, the first cutting line segment in the first cutting wheel group and the second cutting line segment are parallel to each other, and second In cutting wheel group third cutting line segment and the 4th cutting line segment be parallel to each other, in the first cutting wheel group first cutting line segment and Second cutting line segment cuts line segment with the third in the second cutting wheel group and the 4th cutting line segment is mutually perpendicular to.

In this way, in actual application, when the first coil holder 333 in First Line cutter unit 33 follows wire cutting support 31 When opposite base 1 declines, the contraposition of the first cutting gauze is formed by the first cutting by cutting line segment each on the first coil holder 333 The silicon rod to be cut 10 that the silicon rod plummer 211 in area is carried carries out evolution cutting along silicon rod length direction.

In fact, above-mentioned First Line cutter unit 33 can still make other variations, for example, in one embodiment, institute Stating First Line cutter unit may include four cutting wheels, this four cutting wheels are combined into a pair of of cutting wheel group, that is, are cut by two Wheel one cutting wheel group of composition is cut, is partnered cutting wheel group by two cutting wheel groups.Each cutting wheel group includes opposite sets Two cutting wheels set and the cutting line segment being wound in two cutting wheels adhere to the different cutting wheels separately in a pair of of cutting wheel group Two cutting line segments in group are parallel to each other.Spacing between two cutting wheels and silicon rod to be cut in each cutting wheel group Sectional dimension it is corresponding.For example, two cutting wheel components that the pair of cutting wheel group includes are listed in the left and right sides of coil holder, Wherein, a cutting wheel group includes two cutting wheels that front and back is arranged, and is wound with cutting line segment between two cutting wheels, another Cutting wheel group also includes two cutting wheels that front and back is arranged, and is wound with cutting line segment, two cutting line segments between two cutting wheels It is parallel to each other.

In actual application, for a pair of of cutting wheel group, silicon rod to be cut progress evolution cutting operation is just needed Evolution cutting step twice, and in the cutting of first time evolution and then the cutting position of secondary adjustment silicon rod to be cut.In this way, In a certain implementation mode, silicon rod plummer can be set to rotary structure, such as: silicon rod plummer can pass through a rotation Mechanism realizes rotation, in this way, driving the silicon rod plummer rotation by the rotating mechanism, so that it may successfully by silicon to be cut Stick is rotated (such as being rotated by 90 °) so that two cutting line segments in that a pair of of cutting wheel group can to it is postrotational to Cutting silicon rod carries out second of evolution cutting, completes the evolution cutting of silicon rod to be cut.

In addition, in some embodiments, First Line cutter unit 33 may also include following at least one component: be set to Guide roller on first coil holder 333 and/or wire cutting support 31, for realizing the guiding of the first cutting line 331；Set on First Line Straining pulley on frame 333 and/or wire cutting support 31, for carrying out the tension adjustment of the first cutting line 331；And it is set to machine Line storage tube (line storage tube more may include ureeling barrel and wire winding tube) on seat 1 is used for the first cutting line of folding and unfolding 331.

It should be noted that, it is contemplated that be realize treat cutting silicon rod 10 it is complete cutting and be avoid cutting line because by Stop and generate the situations such as damage, technical solution provided by the present application is to the silicon rod plummer for carrying silicon rod 10 to be cut 211 have carried out certain structure design.For example, silicon rod plummer 211 is the mesa structure in rectangular section, the mesa structure In the size outline of loading end that is contacted with silicon rod be less than cutting for the silicon rod of evolution that silicon rod to be cut is formed after evolution is cut Face, in this way, the first coil holder 333 in wire-electrode cutting device 3 follows wire cutting support 31 to decline with respect to base 1, by the first coil holder 333 Upper each cutting line segment be formed by the contraposition of the first cutting gauze carried in the silicon rod plummer 211 of the first cutting area it is to be cut It cuts silicon rod 10 and carries out evolution cutting, when the first cutting gauze reaches the bottom of silicon rod 10 to be cut, first cutting line Net can unhinderedly continue decline until through silicon rod 10 to be cut, realize the complete cutting for treating cutting silicon rod 10.Certainly, The structure of silicon rod plummer 211 is not limited thereto, in some embodiments, silicon rod plummer 211 be rounded section or The size of the mesa structure of rectangular section, the loading end contacted in the mesa structure with silicon rod is greater than silicon rod to be cut through opening Therefore the section of the silicon rod of evolution formed after side's cutting is provided on the mesa structure and cuts in gauze with described first The cutting groove that each cutting line segment matches specifically, on the mesa structure may be provided with and the first cutting line segment, second Cut line segment, third cutting line segment and the corresponding four sections of cutting grooves of the 4th cutting line segment.In this way, in wire-electrode cutting device 3 One coil holder 333 follows wire cutting support 31 to decline with respect to base 1, is formed by the by cutting line segment each on the first coil holder 333 The silicon rod to be cut 10 that one cutting line net carries the silicon rod plummer 211 for being located at the first cutting area carries out evolution cutting, institute The first cutting gauze is stated to reach the bottom of silicon rod 10 to be cut and continue decline until running through silicon rod 10 to be cut, each cutting line Section can be submerged just in corresponding cutting groove, realize the complete cutting for treating cutting silicon rod.

As described above, silicon rod plummer 211 is the mesa structure in rectangular section, contacted in the mesa structure with silicon rod The size outline of loading end be less than the section of the silicon rod of evolution that silicon rod to be cut is formed after evolution is cut, in this way, can be true The the first cutting gauze protected in First Line cutter unit 33 unhinderedly holds the silicon rod plummer 211 for being located at the first cutting area The silicon rod to be cut 10 carried carries out evolution cutting.But, such design also brings a problem simultaneously: cutting wait be located at first Cutting the flaw-piece that after silicon rod to be cut on the silicon rod plummer 211 in area completes evolution cutting operation, is formed after being cut may be because It does not support accordingly and exists and the risks such as fall or topple.Therefore, the application silicon rod multi-wire saw equipment may also include Flaw-piece jacking mechanism is formed by flaw-piece after carrying out evolution cutting for jacking silicon rod to be cut.

As shown in Figure 1 and Figure 4, flaw-piece jacking mechanism 5 disclosed in the present application is set to the periphery of silicon rod plummer 211.Such as Preceding described, the first cutting gauze in First Line cutter unit 33 is in " well " font, therefore, by the in First Line cutter unit 33 The silicon rod to be cut 10 that one cutting line net carries the silicon rod plummer 211 for being located at the first cutting area carries out meeting after evolution cutting Form four arched flaw-pieces.It therefore, is being in the silicon rod plummer 211 of rectangular section mesa structure in actual application Four side of periphery at be correspondingly provided with a flaw-piece jacking mechanism 5 respectively, with the corresponding flaw-piece of jacking.It is public by the application institute The flaw-piece jacking mechanism 5 opened, can jacking live through First Line cutter unit 33 treat cutting silicon rod carry out evolution cutting operation after shape At flaw-piece, avoid flaw-piece that relative displacement occurs with evolution silicon rod, prevent the first cutting line in First Line cutter unit 33 Net is in the presence of chipping when being pierced by silicon rod 10 to be cut, and can avoid flaw-piece and fall and topple etc. and evolution silicon Phenomena such as stick is damaged because being touched by flaw-piece.

In actual application, Fig. 7 and Fig. 8 are separately seen, wherein Fig. 7 is shown as flaw-piece jacking mechanism 5 applied to silicon rod Schematic perspective view of the plummer 211 in a certain embodiment, Fig. 8 are shown as flaw-piece jacking mechanism 5 and carry applied to silicon rod The top view of platform 211.In conjunction with Fig. 7 and Fig. 8, flaw-piece jacking mechanism 5 may include movable supporting parts 51 and locking control piece 53, In, movable supporting parts 51 more may include the mobile base for being movably connected on the wherein one side of silicon rod plummer 211, by the work The jacking portion and the power generation structure that the jacking portion moves up and down is provided that dynamic pedestal upwardly extends.In certain realization sides In formula, the mobile base may be, for example, planar panel structure compatible with the side of silicon rod plummer 211, but not as Limit, the mobile base also may be, for example, Curved plate structure or other are abnormally-structured.The jacking portion is by the mobile base At least two mandrils upwardly extended, but be not limited thereto, the jacking portion also may be, for example, upward by the mobile base The top plate or top pillar of extension.It may include two stabilizer blades and difference being set at the mobile base that the power, which generates structure then, Two springs of two stabilizer blades are sheathed on, but are not limited thereto, the power, which generates structure, can also be used such as torsional spring, elastic slice Etc. structures.Using the elastic force of the spring, it may make that the stabilizer blade and the connected mandril can be relative to silicon rod plummers 211 It moves up and down.Control piece 53 is locked to be used for activity support when movable supporting parts 51 are resisted against the bottom of silicon rod 10 to be cut Part 51 is controlled in lock state.In some implementations, locking control piece 53 then may be, for example, electromagnetic lock.In this way, activity is held The working mechanism of supporting piece 51 can include: in the initial state, the mandril convex dew under the action of the stabilizer blade and the spring In the loading end of silicon rod plummer 211, when being put silicon rod 10 to be cut, the mandril is by silicon rod 10 to be cut Compacting after overcome the elastic force of the spring and move downward until being placed in silicon rod plummer 211 completely in silicon rod 10 to be cut Loading end on, at this point, as locking control piece 53 electromagnetic lock is powered and pass through electricity magnetisation principle generation strong magnetic force tightly Ground adsorbs the mobile base in movable supporting parts 51, to controlling the mandril in lock state.When the first wire cutting list Correspond to the progress of silicon rod to be cut 10 that the silicon rod plummer 211 of the first cutting area is carried in first 33 pairs of silicon rod conversion equipments 2 When evolution is cut, movable supporting parts 51 under being in the lock state can jacking live corresponding flaw-piece 13, can effectively prevent first The first cutting gauze in wire cutting unit 33 is in the presence of chipping when being pierced by silicon rod 10 to be cut, and can avoid flaw-piece 13 It falls and topples etc. and phenomena such as evolution silicon rod 12 is damaged because being touched by flaw-piece.

Certainly, above-mentioned flaw-piece jacking mechanism 5 can still make other variations, for example, in some embodiments, such as Fig. 9 institute Show, flaw-piece jacking mechanism 5 may also set up in silicon rod plummer 211 between two neighboring side.Flaw-piece jacking mechanism 5 may include Movable supporting parts 52 and locking control piece 54, wherein movable supporting parts 52 more may include being movably connected on silicon rod plummer 211 Wherein the mobile base of one side, the jacking portion that is upwardly extended by the mobile base and the jacking portion is provided transports up and down Dynamic power generates structure.In some implementations, the mobile base may be, for example, adjacent two with silicon rod plummer 211 The compatible folded structure of angle or curved panel structure that a side is constituted.The jacking portion is upward by the mobile base At least two mandrils extended, described two mandrils correspond respectively to two neighboring side.The power generates structure and can then wrap Include two stabilizer blades being set at the mobile base and two springs for being sheathed on two stabilizer blades respectively, described two brackets point It Dui Yingyu not two neighboring side.Using the elastic force of the spring, it may make the stabilizer blade that can make relative to silicon rod plummer 211 It moves up and down.Control piece 54 is locked to be used for movable supporting parts 52 when movable supporting parts 52 are resisted against the bottom of silicon rod to be cut Control is in lock state.In some implementations, locking control piece 54 then may be, for example, electromagnetic lock.

It is illustrated by taking silicon rod multi-wire saw equipment shown in Fig. 4 as an example below.When using silicon rod multi-wire cutting shown in Fig. 4 When cutting equipment and to carry out evolution cutting operation to silicon rod, operating process can be generally comprised: will be to first with silicon rod handler 4 Cutting silicon rod 10 is placed in conversion work platform 21 on the silicon rod plummer 211 of Accreditation Waiting Area, at this point, flaw-piece jacking mechanism 5 In locking control piece 53 movable supporting parts 51 are controlled in lock state so that 51 support of movable supporting parts silicon rod to be cut 10 bottom peripheral edge.Then, driving conversion work platform 21 makees converting motion, so that being initially positioned at the silicon rod plummer of Accreditation Waiting Area 211 conversions are to the first cutting area, at this point, the First Line cutter unit 33 in wire-electrode cutting device 3 is right against positioned at the first cutting area Silicon rod plummer 211 on silicon rod to be cut.Herein, driving conversion work platform 21 makees converting motion, refers to that driving turns The platform 21 that changes jobs rotates (such as rotating forward 120 °).Then, drive the wire cutting support 31 in wire-electrode cutting device 3 with respect to machine Seat 1 declines, and is formed by the contraposition of the first cutting gauze by cutting line segment each on First Line cutter unit 33 in wire-electrode cutting device 3 Evolution cutting (referring to Figure 10) is carried out in the silicon rod to be cut 10 that the silicon rod plummer 211 of the first cutting area is carried, until institute The first cutting gauze is stated through silicon rod 10 to be cut, the complete cutting (referring to Figure 11) for treating cutting silicon rod 10 is completed, through evolution Evolution silicon rod 12 and flaw-piece 13 are formed after cutting, by means of flaw-piece jacking mechanism 5 can jacking live silicon rod to be cut 10 by evolution Flaw-piece 13 is formed by after cutting.

In the related art, silicon rod 10 to be cut will form flaw-piece after evolution is cut, general for the discharging of flaw-piece Flaw-piece discharge way in evolution silicon rod and is moved away from out silicon rod mostly or by operator's manual operations by flaw-piece disengaging Multi-wire saw equipment, not only inefficiency, and flaw-piece can be made to collide and increase with evolution silicon rod in the handling process The risk of evolution silicon rod damage.In view of this, the application silicon rod multi-wire saw equipment further includes flaw-piece device for discharging, being used for will Wire-electrode cutting device 3 treats the flaw-piece 13 that cutting silicon rod 10 formed after evolution cutting and gives discharging.

In actual application, the flaw-piece device for discharging includes the mechanism that is staggered, for driving flaw-piece and evolution silicon rod OQ t displacement occurs so that the top of the flaw-piece protrudes from the evolution silicon rod, so, it can be achieved that the flaw-piece with The silicon rod of evolution mutually staggers, so that the flaw-piece is easier to be crawled, it is subsequent will to be carried out after flaw-piece crawl Discharging.

In one implementation, the mechanism that is staggered may be, for example, flaw-piece hoisting mechanism, for promoted the flaw-piece with Its relatively described evolution silicon rod is set to make to rise displacement, so that the top of the flaw-piece protrudes from the evolution silicon rod.It please join Figure 12 is read, the partial structure diagram of flaw-piece hoisting mechanism is shown as.Referring to figs. 4 and 12, flaw-piece hoisting mechanism 6 is to set It sets on the first coil holder 333 of cutting on line device 3, can realize lifting with First Line cutter unit 33.

In actual application, need silicon rod being cut into class rectangle section by initial circular cross-section due to being, in this way, Silicon rod 10 to be cut is cut into four two parallel cutting planes along silicon rod length direction and forms four arcs Line flaw-piece, therefore, the quantity of flaw-piece hoisting mechanism 6 are preferably four, are arranged oppositely in First Line cutter unit 33 two-by-two The opposite sides of one coil holder 333.

In specific implementation, flaw-piece hoisting mechanism 6 may include that jacking part 61 and driving jacking part 61 make stretching for stretching motion Contracting component 63, jacking part 61 are controlled by extensible member 63 and are resisted against flaw-piece 13 and hold the bottom end of flaw-piece 13.

Jacking part 61 more may include abutment plate and supporting plate.The bottom of the abutment plate from the supporting plate upwardly extends Out, further, the abutment plate more can be arc panel compatible with the curved surfaces of flaw-piece 13, when the abutment plate against It when flaw-piece 13, can be come into full contact with the curved surfaces of flaw-piece 13, the position that the abutment plate is contacted with flaw-piece 13 is round and smooth sets Meter will have the inner surface contacted with flaw-piece 13 to add cushion in the abutment plate.The supporting plate lives side for support The bottom of skin 13, further, the supporting plate more can be to be adapted cambered plate with the bottom surface of flaw-piece 13.In other embodiments In, the string side of the cambered plate as supporting plate can also add convex block, can increase the contact area with the bottom surface of flaw-piece 13.

Extensible member 63 may be, for example, the cylinder with telescopic rod, wherein the telescopic rod can pass through connection structure and top The supporting plate connection in part 61 is risen, the cylinder can drive the telescopic rod to drive jacking part 61 to make stretching motion.This In, jacking part 61 includes the stretching routine for jacking the contractile motion and jacking part of part as stretching motion, wherein the receipts of jacking part 61 Contracting movement refers specifically to the cylinder and drives the telescopic rod to shrink to drive jacking part 61 far from flaw-piece 13, jacks stretching for part Exhibition movement refers specifically to the cylinder and drives the telescopic rod stretching, extension to drive jacking part 61 close to flaw-piece 13.Certainly, aforementioned Other implementations can also be used in extensible member 63, for example, the extensible member also may be, for example, the servo motor with lead screw, The lead screw is connected with the jacking part, is rotated by the driving lead screw of the servo motor to drive the connected jacking Part makees stretching motion, drives the jacking part to make contractile motion and the driving lead screw for example, the lead screw is driven to rotate forward Backwards rotation drives the jacking part to be extended movement, drives the jacking part to stretch alternatively, the lead screw is driven to rotate forward Exhibition moves and drives the lead screw backwards rotation that the jacking part is driven to make contractile motion.

In actual application, in the initial state, the telescopic rod drives jacking part 61 to be in contraction state；First Line Opposite base 1 is driven to decline for cutter unit 33 so that each cutting line on the first coil holder 333 in First Line cutter unit 33 Section is formed by the contraposition of the first cutting gauze and carries out evolution cutting in the silicon rod to be cut 10 of the first cutting area, until described first It cuts gauze and runs through silicon rod 10 to be cut, cutting completely and forming flaw-piece 13 for cutting silicon rod 10 is treated in completion, at this point, flaw-piece mentions Rising mechanism 6 has followed First Line cutter unit 33 to drop to bottom；The cylinder drives the telescopic rod stretching, extension to drive jacking Part 61 close to flaw-piece 13 until jacking part 61 in abutment plate contacted with flaw-piece 13 and realize against；It is subsequent, the first wire cutting list Member 33 is driven opposite base 1 to rise, and flaw-piece hoisting mechanism 6 follows First Line cutter unit 33 to rise, and drives flaw-piece 13 opposite Evolution silicon rod 12 occurs to rise displacement, so that the top of flaw-piece 13 protrudes from cutting silicon rod 12 (referring to Figure 13), works as flaw-piece When part satisfaction setting condition is protruded compared to evolution silicon rod 12 in 13 top, then First Line cutter unit 33 can control to stop Rise.In this way, subsequent, what the top of flaw-piece 13 can be used as being grabbed puts forth effort position, so that flaw-piece 13 is easier to be crawled.

It should be noted that as previously mentioned, utilizing institute's shape after the silicon rod progress evolution cutting to be cut of flaw-piece jacking mechanism jacking At flaw-piece, and when utilizing flaw-piece lift mechanism lifts flaw-piece 13, the jacking part 61 in flaw-piece hoisting mechanism 6 is to be resisted against flaw-piece 13 and the bottom end of flaw-piece 13 is held, therefore, in actual application, when the jacking part 61 in flaw-piece hoisting mechanism 6 is resisted against side Skin 13 simultaneously holds the bottom end of flaw-piece 13 and flaw-piece hoisting mechanism 6 follows First Line cutter unit 33 to rise to drive flaw-piece 13 opposite The locking control piece 53 just work to being in the lock state when evolution silicon rod 12 occurs to rise displacement, in flaw-piece jacking mechanism 5 Dynamic supporting parts 51 are unlocked.

In some embodiments, the flaw-piece hoisting mechanism may include adsorption piece and the adsorption piece driven to make flexible fortune Dynamic extensible member, the adsorption piece are controlled by the extensible member and are resisted against flaw-piece and adsorb flaw-piece.The adsorption piece It more may include abutment plate and absorptive element.The abutment plate may be, for example, arc compatible with the curved surfaces of the flaw-piece Plate can come into full contact with when the abutment plate is resisted against the flaw-piece with the curved surfaces of the flaw-piece.The absorptive element can For example, vacuum chuck, multiple vacuum chucks can be laid on the contact surface that contact with the flaw-piece in the abutment plate.Institute Stating extensible member may be, for example, the cylinder with telescopic rod or the servo motor with lead screw, be with the cylinder with telescopic rod Example, the telescopic rod can be connect by connection structure with the abutment plate in the jacking part, and the cylinder can drive described flexible Bar is shunk to drive the abutment plate far from the flaw-piece, the cylinder can drive telescopic rod stretching, extension with drive it is described against Plate adsorbs the flaw-piece by the absorptive element close to the flaw-piece and after the abutment plate is contacted with the flaw-piece.Afterwards Continuous, the First Line cutter unit is driven the relatively described base to rise, and the flaw-piece hoisting mechanism follows the first wire cutting list Member rises, and the relatively described evolution silicon rod of flaw-piece can be driven to occur to rise displacement using adsorption capacity, so that the top of the flaw-piece Protrude from the evolution silicon rod.

In other embodiments, the mechanism that is staggered may be, for example, silicon rod sink mechanism, for settle evolution silicon rod with It is set to make sedimentation deformation with respect to flaw-piece, so that the top of the flaw-piece protrudes from the evolution silicon rod.In actual application, To realize, evolution silicon rod has been settled, and the silicon rod plummer for carrying the evolution silicon rod designs for lift, the silicon rod Sink mechanism can be located at the lower section of the silicon rod plummer, and in specific implementation, the silicon rod sink mechanism can be for example including band There is the lifting motor of lifting column, the lifting column is controlled by the motor and makees elevating movement.Specifically, the lifting motor drives The lifting column decline is moved, then the silicon rod plummer can be driven to decline, in this way, the silicon rod of evolution sedimentation is (at this point, each The flaw-piece then keeps stablizing under the jacking of corresponding flaw-piece jacking mechanism) so that the top of the silicon rod of evolution The recessed top in the flaw-piece, that is, the top of the flaw-piece protrudes from the evolution silicon rod.

Using the mechanism that is staggered, flaw-piece 13 and evolution silicon rod 12 can be mutually staggered, be conducive to subsequent carry out flaw-piece 13 Discharging.In one embodiment, in flaw-piece 13 and after evolution silicon rod 12 mutually staggers, since the top of flaw-piece 13 is protruded In evolution silicon rod 12, the top and bottom end of flaw-piece 13 provide impetus, at this point, manually or can be adopted by operator Flaw-piece 13 is grabbed with corresponding auxiliary device and flaw-piece 13 is given into discharging.But in this embodiment, although utilizing the machine of being staggered Structure provides more preferably handgrip by flaw-piece 13 and after evolution silicon rod 12 mutually staggers, for flaw-piece 13, is conducive to its discharge operation, But in general, the efficiency of discharge operation is whole still relatively low, is not avoided that flaw-piece 13 in the handling process and evolution still Silicon rod 12 collides and increases the risk that evolution silicon rod 12 damages.

In view of the above situation, flaw-piece device for discharging provided by the application silicon rod multi-wire saw equipment may also include that clamping Transshipment acitivity, for separating flaw-piece and evolution silicon rod and the flaw-piece of separation being given discharging.By taking Figure 11 as an example, silicon rod is more The flaw-piece device for discharging of linear cutting equipment further includes having clamping transshipment acitivity 7, draws high side behind the top for clamping flaw-piece 13 Skin 13 is to be detached from evolution silicon rod 12 and flaw-piece 13 is transported to flaw-piece discharge zone.In actual application, clamping transhipment Mechanism 7 further includes: Z-direction movement mechanism, Y-direction motion and on the Z-direction movement mechanism and the Y-direction motion The flaw-piece clamping device of traveling, wherein the Z-direction movement mechanism can provide the flaw-piece clamping device and move along Z-direction, the Y It can provide the flaw-piece clamping device to movement mechanism to move along Y-direction.As shown in figure 11, clamping transshipment acitivity 7 includes a slide 71, Z-direction movement mechanism is equipped on slide 71, flaw-piece clamping device 73 is moved using Z-direction movement mechanism along Z-direction, in base 1 Lay Y-direction motion on mounting structure 13, slide 71 and flaw-piece clamping device 73 thereon are using Y-direction motion along Y-direction Movement.

Z-direction movement mechanism is more can include: Z-direction guide rail, sliding block and Z-direction driving source (not showing in the drawings), wherein The Z-direction guide rail is layed on slide 71, and the sliding block is set on flaw-piece clamping device 73 and fits with the corresponding Z-direction guide rail Match, the Z-direction driving source may be, for example, Z-direction lifting motor or Z-direction lifting cylinder etc..In actual application, to make flaw-piece Clamping device 73 can realize stable elevating movement in slide 71, double Guide Rail Designs can be used, that is, use two Z-direction guide rails, this two A Z-direction guide rail is arranged parallel along Z-direction.In this way, making Z-direction along Z-direction guide rail by Z-direction driving source driving flaw-piece clamping device 73 Elevating movement.

Y-direction motion is more can include: Y-direction guide rail 907, sliding block 909 and Y-direction driving source (not showing in the drawings), Wherein, Y-direction guide rail 907 is layed on the mounting structure 13 of base 1, sliding block 909 be set to slide 71 on and with corresponding Y-direction guide rail 907 adaptations, the Y-direction driving source may be, for example, Y-direction motor or Y-direction cylinder etc..In actual application, to make slide 71 can It realizes and stablizes Y-direction movement in mounting structure 13, double Guide Rail Designs can be used, that is, use two Y-direction guide rails, the two Y-direction guide rails 907 are arranged parallel along Y-direction.In this way, flaw-piece clamping device 73 by Y-direction driving source driving slide 71 and thereon is along Y-direction Guide rail makees Y-direction movement.

Flaw-piece clamping device 73 is more can include: the lifting driving structure 72 and be set to lifting driving structure that activity is arranged The clamp assemblies 74 of 72 bottoms, clamp assemblies 74 are adapted to flaw-piece 13, for clamping each flaw-piece 13.It should be noted that In Z-direction, on the one hand, lifting driving structure 72 itself is connected by a mounting base with the sliding block in Z-direction movement mechanism, so as to So that lifting driving structure 72 is driven and elevating movement by Z-direction driving source.On the other hand, inside for flaw-piece clamping device 73, Going up and down driving structure 72 may be, for example, the lifting cylinder with elevating lever, and the elevating lever is connected with clamp assemblies 74, in this way, sharp It can control the elevating lever flexible to drive clamp assemblies 74 to make elevating movement with the lifting cylinder.

Figure 14 is please referred to, the structural schematic diagram of clamp assemblies 74 in one embodiment being shown as in Figure 11.In conjunction with figure Shown in 11 and Figure 14, clamp assemblies 74 further comprise: holder body 741 and multiple clampings set on 741 periphery of holder body Part 743.

Holder body 741 is for being insinuated into the space that multiple flaw-pieces 13 are surrounded.In actual application, clamp assemblies The clamp bracket connecting with lifting driving structure 72 is additionally provided on 74, centre is provided with holder body 741 in clamp bracket, For being insinuated into the space that multiple flaw-pieces are surrounded.Holder body 741 may be, for example, the rectangle pylon that section is rectangle.

Further, on the top of holder body 741, (the top direction is located at the silicon rod plummer of the first cutting area 211) it can also be equipped with and probe into structure 745.The structure for probeing into structure 745 may be, for example, polygon terrace with edge, can also rotary table, taper or Hemisphere etc., generally speaking, the size outline for probeing into structure 745 are less than holder body 741 itself, and, probeing into structure 745 more can be with Holder body 741 seamlessly transits.

Clamping piece 743 is set to the periphery of holder body 741, is formed between clamping piece 743 and holder body 741 for gripper edge The grasping part of skin 13.Clamping piece 743 may be, for example, clamping jaw corresponding with flaw-piece 13, due to being needed silicon rod by initial circle Tee section is cut into class rectangle section, in this way, silicon rod to be cut will form four arched flaw-pieces after evolution cutting operation, Therefore, the quantity of clamping jaw is four corresponding.The position that the clamping jaw is contacted with flaw-piece 13 is to be adapted to the curved surfaces of flaw-piece 13 Arcuate structure, therefore, the clamping jaw may be, for example, curved splint.But it is not limited thereto, for example, the clamping jaw can also be such as For at least two clamp bar parallel arrangement of in a manner of vertical, it will not be described here.It should be noted that as previously mentioned, in certain realities It applies in mode, in the wire cutting unit xx of cutting on line device xx, including a pair of of cutting wheel group, utilize the pair of cutting wheel group It treats cutting silicon rod progress evolution operation and needs to be implemented evolution cutting step twice, in this embodiment, the clamping piece Quantity then may be, for example, two, the two clamping pieces are oppositely arranged.First time evolution cutting step is executed, two sides are formed Skin is clamped formed on corresponding position two flaw-pieces using two clamping pieces and again by the Z-direction movement mechanism and institute It states the 2nd X and is transferred away the flaw-piece to movement mechanism；The cutting position for adjusting silicon rod to be cut again (such as rotates 90°)；Second of evolution cutting step is executed, two flaw-pieces are formed, using two clamping pieces by formed on corresponding position two Flaw-piece clamps and is again transferred away the flaw-piece to movement mechanism by the Z-direction movement mechanism and the 2nd X.

Clamping piece 743 may be, for example, movable design, and it is close or remote with opposite holder body 741 to can be carried out opening and closing movement From adjusting its grasping part between holder body 741.

With continued reference to Figure 14, clamping piece 743 is connected in holder body 741 or clamp bracket by a connection structure axis, institute It states and is additionally provided with pressure-bearing portion 751 in connection structure.It is driven in addition, clamp assemblies 74 also configure an opening and closing for each clamping piece 743 Motivation structure, the opening and closing driving mechanism is for driving clamping piece 743 to make opening and closing movement.The opening and closing driving mechanism may be, for example, band There is the cylinder of telescopic rod, wherein the end of the telescopic rod is equipped with the press section 752 cooperated with pressure-bearing portion 751, press section 752 It is inconsistent with pressure-bearing portion 751.The cylinder can drive the telescopic rod to drive the press section to make stretching motion, pass through pressing The cooperation in portion 752 and pressure-bearing portion 751 drives clamping piece 743 to carry out opening and closing movement.Specifically: in the initial state, clamping piece 743 be expansion state outwardly.752 actuation of press section when the cylinder drives telescopic rod stretching, extension, on the telescopic rod In the pressure-bearing portion 751 on clamping piece 743, turns (that is, inside contracting) toward 741 axis of holder body after the compression of clamping piece 743, reduce folder Grasping part between gripping member 743 and holder body 741.When the cylinder drives the telescopic rod to shrink, the telescopic rod On press section release action in the pressing force in the pressure-bearing portion 751 on clamping piece 743, clamping piece 743 is away from holder body 741 Axis turns to increase the grasping part between clamping piece 743 and holder body 741 to return back to original state.And 751 He of compression zone Compatible wedge surface structure can be used in press section 752, to realize that clamping piece 743 can steadily and swimmingly make opening and closing movement.

Figure 15 is please referred to, the structural schematic diagram of clamp assemblies 74 in another embodiment being shown as in Figure 11.In conjunction with Shown in Figure 11 and Figure 15, clamp assemblies 74 further comprise: holder body 742 and multiple folders set on 742 periphery of holder body Gripping member 744.

Holder body 742 is for being insinuated into the space that multiple flaw-pieces 13 are surrounded.In actual application, clamp assemblies The clamp bracket connecting with lifting driving structure 72 is additionally provided on 74, centre is provided with holder body 742 in clamp bracket, For being insinuated into the space that multiple flaw-pieces are surrounded.Due to being to need silicon rod being cut into class rectangle by initial circular cross-section Section (the first cutting gauze in First Line cutter unit 33 is in " well " font), silicon rod to be cut shape after evolution cutting operation At four flaw-pieces 13, in this way, the space surrounded by four flaw-pieces 13 that holder body 742 probes into also is rectangular space, therefore, Holder body 742 may be, for example, the rectangle pylon that section is rectangle.

Further, on the top of holder body 742, (the top direction is located at the silicon rod plummer of the first cutting area 211) it can also be equipped with and probe into structure 746.The structure for probeing into structure 746 may be, for example, polygon terrace with edge, can also rotary table, taper or Hemisphere etc., generally speaking, the size outline for probeing into structure 746 are less than holder body 742 itself, and, probeing into structure 746 more can be with Holder body 742 seamlessly transits.In this way, holder body 742 can be more advantageous to using structure 746 is probeed into actual application It is insinuated into and is protruded from each flaw-piece 13 being lifted in the space that the top of evolution silicon rod 12 is surrounded, not only may make folder Holding component 74 can adapt in the silicon rod of different product specification, also can avoid colliding due to holder body 742 is not adapted to space The problems such as clast and subsequent cleaning are caused to the top of the flaw-piece of protrusion.

Clamping piece 744 is set to the periphery of holder body 742, is formed between clamping piece 744 and holder body 742 for gripper edge The grasping part of skin 13.Clamping piece 744 may be, for example, clamping jaw corresponding with flaw-piece 13, due to being needed silicon rod by initial circle Tee section is cut into class rectangle section, in this way, silicon rod to be cut will form four arched flaw-pieces after evolution cutting operation, Therefore, the quantity of clamping jaw is four corresponding.The position that the clamping jaw is contacted with flaw-piece 13 is to be adapted to the curved surfaces of flaw-piece 13 Arcuate structure, therefore, the clamping jaw may be, for example, curved splint.But be not limited thereto, for example, clamping jaw also may be, for example, with Parallel arrangement of at least two clamp bar of vertical mode, it will not be described here.It should be noted that as previously mentioned, in certain embodiment party In formula, in the wire cutting unit xx of cutting on line device xx, including a pair of of cutting wheel group, it is treated using the pair of cutting wheel group Cutting silicon rod carries out evolution operation and needs to be implemented evolution cutting step twice, in this embodiment, the number of the clamping piece Amount then may be, for example, two, the two clamping pieces are oppositely arranged.First time evolution cutting step is executed, two flaw-pieces are formed, benefit Formed on corresponding position two flaw-pieces are clamped with two clamping pieces and again by the Z-direction movement mechanism and described second X is transferred away the flaw-piece to movement mechanism；The cutting position (such as being rotated by 90 °) of silicon rod to be cut is adjusted again； Second of evolution cutting step is executed, two flaw-pieces are formed, using two clamping pieces by formed on corresponding position two flaw-pieces It clamps and is again transferred away the flaw-piece to movement mechanism by the Z-direction movement mechanism and the 2nd X.

Clamping piece 744 may be, for example, movable design, and it is close or remote with opposite holder body 742 to can be carried out opening and closing movement From adjusting its grasping part between holder body 742.In addition, clamp assemblies 74 can also configure for each clamping piece 744 One opening and closing driving mechanism, the opening and closing driving mechanism are set in the clamp bracket and are connected with corresponding clamping piece 744, use Make opening and closing movement in driving clamping piece 532, with flaw-piece 13 corresponding with the cooperation clamping of holder body 531.The opening and closing driving machine Structure may be, for example, the cylinder 754 with telescopic rod 753, wherein and telescopic rod 753 can be connect by connection structure with clamping piece 744, Cylinder 754 can drive telescopic rod 753 to drive clamping piece 744 to make stretching motion.Here, clamping piece 744 includes as stretching motion The contractile motion of clamping piece and the stretching routine of clamping piece, wherein the contractile motion of clamping piece refers specifically to the driving of cylinder 754 Telescopic rod 753 is shunk to drive clamping piece 744 close to holder body 742, is reduced between clamping piece 744 and holder body 742 Grasping part, the stretching routine of clamping piece refer specifically to cylinder 754 and drive the stretching, extension of telescopic rod 753 to drive clamping piece 744 remote From holder body 742, increase the grasping part between clamping piece 744 and holder body 742.To realize clamping piece 744 can Stabilization is stretched in holder body 742, and double rod type design can be used, that is, uses two telescopic rods, the two telescopic rods 753 are parallel Setting.Certainly, other implementations can also be used in aforementioned opening and closing driving mechanism, for example, the opening and closing driving mechanism can also be such as For the servo motor with lead screw, the lead screw is connected with the clamping piece, is turned by the driving of the servo motor lead screw The dynamic clamping piece connected with drive makees stretching motion, drives the clamping piece to make for example, the lead screw is driven to rotate forward Contractile motion and the driving lead screw backwards rotation drive the clamping piece to be extended movement, alternatively, driving the lead screw positive Rotation drives the clamping piece to be extended movement and drives the lead screw backwards rotation that the clamping piece is driven to make contractile motion.

Certainly, clamp assemblies 74 can still have other variations.For example, in one embodiment, the clamp assemblies can Include: first clamping member and the second clamping piece, is formed between described first clamping member and second clamping piece for described in clamping The grasping part of flaw-piece.Wherein, the second clamping piece is located inside, and corresponding to the cut surface of flaw-piece, first clamping member is located at outside, Outer surface corresponding to flaw-piece.In the present embodiment, due to being to need silicon rod being cut into class square by initial circular cross-section Tee section, in this way, silicon rod to be cut is cut into four two parallel camber line flaw-pieces along silicon rod length direction, therefore, Described first clamping member and the quantity of second clamping piece are four, and, described first clamping member may be, for example, with it is described The curved splint of the curved surfaces adaptation of flaw-piece.In addition, the clamp assemblies may also include driving device, for driving described One clamping piece and/or the second clamping piece make opening and closing movement.Specifically, in one case, the second folder in the clamp assemblies Gripping member can be for fixed design and first clamping member is movable design, and therefore, the clamp assemblies further include the first driving dress Set, for driving described first clamping member to make opening and closing movement towards second clamping piece direction, with second clamping piece With cooperation clamping movement.In another scenario, first clamping member in the clamp assemblies can for it is fixed design and second Clamping piece is movable design, and therefore, the clamp assemblies further include the second driving device, for driving second clamping piece Make opening and closing movement towards first clamping member direction, to match cooperation clamping movement with described first clamping member.In another feelings Under shape, first clamping member and the second clamping piece in the clamp assemblies are movable design, and therefore, the clamp assemblies are also Including corresponding to the first driving device of first clamping member and corresponding to the second driving device of the second clamping piece, wherein described For driving described first clamping member to make opening and closing movement towards second clamping piece direction, described second drives first driving device Dynamic device is for driving second clamping piece to make opening and closing movement towards first clamping member direction, so that first clamping Part and the second clamping piece are with cooperation clamping movement.

Using clamping transshipment acitivity disclosed in the present application, flaw-piece can will be formed by through evolution cutting operation and clamp post-tensioning It rises flaw-piece (referring to Figure 16), until the position of the bottom end of the flaw-piece is higher than the top of the evolution silicon rod, so that institute It states flaw-piece and is detached from described evolution silicon rod (referring to Figure 17), then will be disengaged from being transported to flaw-piece discharge zone in the flaw-piece of evolution silicon rod (referring to Figure 18), in this way, completing to carry out the flaw-piece after evolution discharging, entire discharge process automation is realized, is operated conveniently, is mentioned High operating efficiency.

It should be noted that being transported during being transported the flaw-piece using clamping transshipment acitivity, such as using clamping In the case of the flaw-piece is transported out the first cutting area and will not hamper evolution silicon rod or First Line cutter unit by mechanism, The i.e. controllable First Line cutter unit originally suspended continues to rise until initial position is returned back to, in case squaring silicon bar next time Cutting operation.

In the foregoing, flaw-piece clamping device 73 can be driven by Z-direction driving source makees Z-direction elevating movement along Z-direction guide rail, and, Holder body 741 (742) in flaw-piece clamping device 73 adapts to the silicon rod of different product specification.Therefore, in this application, may be used Flaw-piece clamping device 73 is doubled as into silicon rod top-pressure mechanism, for pressing when carrying out evolution cutting operation in corresponding silicon to be cut The top of stick 10, so that it is guaranteed that the stability of silicon rod to be cut 10.In actual application, when carrying out evolution cutting, by Z-direction Flaw-piece clamping device 73 is driven along Z-direction guide rail to make descending motion for driving source so that holder body in flaw-piece clamping device 73 741 (742) are pressed in the top of silicon rod 10 to be cut, then drive the wire cutting support 31 in wire-electrode cutting device 3 with respect under base 1 Drop, by each cutting line segment is formed by the first cutting gauze and treats cutting silicon rod 10 on first coil holder 333 in wire-electrode cutting device 3 Carry out evolution cutting.Certainly, silicon rod top-pressure mechanism can also be separately configured in silicon rod multi-wire saw equipment, for example, the silicon rod presses Mechanism may include the lifting driving structure of activity setting and the compact heap for being set to the lifting driving structure bottom, the pressure The elevating movement under the driving of the lifting driving structure of tight block.Wherein, the lifting driving structure may be, for example, with liter The lifting cylinder of bar drops, and the elevating lever of the lifting cylinder is connected with the compact heap.In this way, controllable using the lifting cylinder It is flexible to drive the compact heap to make elevating movement to make the elevating lever.The compact heap is adapted to silicon rod to be cut, for example, institute Stating compact heap can be patty briquetting compatible with the sectional dimension of silicon rod to be cut.

In actual application, the flaw-piece device for discharging more may include flaw-piece structure for conveying, be set to flaw-piece discharge zone, use It is conveyed in the flaw-piece to come will be transported through clamping transshipment acitivity 7.In one implementation, the flaw-piece structure for conveying can For example, conveyer belt.In actual operation, flaw-piece 13 is transferred to flaw-piece discharging by the first cutting area by clamping transshipment acitivity 7 Area, clamp the clamp assemblies 74 in transshipment acitivity 7 unclamp using by the release of flaw-piece 13 to as on the conveyer belt of flaw-piece structure for conveying, Flaw-piece is transferred out by the conveyer belt.

Certainly, it will be formed by flaw-piece through evolution cutting operation give discharging and be not limited thereto.For example, in other implementations In mode, the flaw-piece device for discharging may include flaw-piece cylinder and flaw-piece structure for conveying, wherein the flaw-piece structure for conveying can be such as For conveyer belt, the flaw-piece cylinder is adjacent to the starting point of the conveyer belt (for example, the flaw-piece cylinder is located at rising for the conveyer belt The side at beginning or top etc. located immediately at the starting point of the conveyer belt).Wherein, the bung hole of the flaw-piece cylinder can design compared with Greatly or it is in horn mouth, is placed in without barrier convenient for flaw-piece, and, the height of the bucket arm of the flaw-piece cylinder is also higher, it can be ensured that merging Flaw-piece will not topple.In actual application, the flaw-piece cylinder more can be to may be reversed design, by overturning the side Skin cylinder, so that each flaw-piece in the flaw-piece cylinder is swimmingly transferred on the conveyer belt.For example, the bottom of the flaw-piece cylinder Equipped with turnover driving mechanism, the turnover driving mechanism may include returning face plate, shaft and overturning driving source (such as overturning motor or Tumble cylinder etc.).In this way, after being transferred to flaw-piece in the flaw-piece cylinder by the first cutting area by the clamping transshipment acitivity, institute Stating the overturning of flaw-piece cylinder drives the flaw-piece in cylinder to be transferred on the conveyer belt, is transferred out flaw-piece by the conveyer belt.In addition, In other embodiments, the flaw-piece device for discharging can also only include flaw-piece cylinder, and the flaw-piece cylinder is set to flaw-piece discharge zone.Such as This can be by operator by side after being transferred to flaw-piece in the flaw-piece cylinder by the first cutting area by the clamping transshipment acitivity Skin takes out out of described flaw-piece cylinder.

Second wire cutting unit 35 includes at least: the second coil holder 353 on wire cutting support 31 is set to the second coil holder Multiple second cutting wheels 355 on 353 and the second cutting line 351 for being sequentially set around each second cutting wheel 355.

In actual application, the second wire cutting unit 35 includes at least eight second cutting wheels 355, this at least eight the Two cutting wheels 355 are combined into two pairs of cutting wheel groups, that is, a cutting wheel group are formed by two cutting wheels, by two cutting wheels Group partners cutting wheel group.In actual application, the second wire cutting unit 35 includes two pairs of cutting wheel groups, that is, first pair Cutting wheel group and second pair of cutting wheel group.First pair of cutting wheel group includes the first cutting wheel group and the second cutting wheel group, is divided It is listed in the left and right sides of the second coil holder 353, wherein the first cutting wheel group is located at the left side of the second coil holder 353 and sets including front and back Two the second cutting wheels 355 set, the second cutting wheel group are located at the right side of the second coil holder 353 and two including front and back setting the Two cutting wheels 355；Second pair of cutting wheel group includes third cutting wheel group and the 4th cutting wheel group, is respectively in the second coil holder 353 front and rear sides, wherein third cutting wheel group is located at the front side of the second coil holder 353 and two second including left and right settings Cutting wheel 355, the 4th cutting wheel group are located at the rear side of the second coil holder 353 and two the second cutting wheels 355 including left and right settings.

Second cutting line 351 forms after being sequentially set around each second cutting wheel 355 in the second wire cutting unit 35 Two cutting gauzes.In actual application, the second cutting line 351 is sequentially set around eight in the second wire cutting unit 35 Four cutting line segments are formed after cutting wheel, this four cutting line segments constitute the second cutting gauze.In actual application, second is cut Secant 351, which is set around in the first cutting wheel group after two the second cutting wheels 355 of front and back setting, forms the first cutting line segment, and second Cutting line 351 forms the second cutting line segment after being set around two the second cutting wheels 355 that front and back is arranged in the second cutting wheel group, the Two cutting lines 351 form third cutting line segment after being set around two the second cutting wheels 355 of left and right settings in third cutting wheel group, Second cutting line 351 forms the 4th cutting line after being set around two the second cutting wheels 355 of left and right settings in the 4th cutting wheel group Section, wherein this four cutting line segments correspond respectively to four chamferings of evolution silicon rod 12.In this way, the first cutting line segment, second Cutting line segment, third cutting line segment and the 4th cutting line segment cooperatively form the second cutting gauze in " well " font.Certain In embodiment, two adjacent cutting line segments are mutually perpendicular to and two opposite cutting line segments are parallel to each other.Specifically, first The first cutting line segment and the second cutting line segment in cutting wheel group are parallel to each other, third in the second cutting wheel group cutting line segment and 4th cutting line segment is parallel to each other, the first cutting line segment and the second cutting line segment and the second cutting wheel group in the first cutting wheel group In third cutting line segment and the 4th cutting line segment be mutually perpendicular to.

In this way, in actual application, when the second coil holder 353 in the second wire cutting unit 35 follows wire cutting support 31 When opposite base 1 declines, the contraposition of the second cutting gauze is formed by the second cutting by cutting line segment each on the second coil holder 353 The silicon rod of evolution 12 that the silicon rod plummer 211 in area is carried carries out evolution cutting along silicon rod length direction.

In addition, in some embodiments, the second wire cutting unit 35 may also include following at least one component: be set to Guide roller on second coil holder 353 and/or wire cutting support 31, for realizing the guiding of the second cutting line 351；Set on the second line Straining pulley on frame 353 and/or wire cutting support 31, for carrying out the tension adjustment of the second cutting line 351；And it is set to machine Line storage tube (line storage tube more may include ureeling barrel and wire winding tube) on seat 1 is used for the second cutting line of folding and unfolding 351.

The first cutting line 331 and the second line for the application silicon rod multi-wire saw equipment, in First Line cutter unit 33 The second cutting line 351 in cutter unit 35 can use same root cutting line, that is, You Yigen cutting line is sequentially around in First Line Each first cutting wheel 335 in cutter unit 33 is sequentially around in the second wire cutting unit 35 again after forming the first cutting gauze Each second cutting wheel 355 formed second cutting gauze.But it is not limited thereto, in other implementations, First Line is cut Cutting the second cutting line 351 in the first cutting line 331 and the second wire cutting unit 35 in unit 33 is two cutting lines, In, a cutting line as the first cutting line 331 is sequentially around in each first cutting wheel 335 in First Line cutter unit 33 The first cutting gauze is formed, another cutting line as the second cutting line 351 is sequentially around in the second wire cutting unit 35 Each second cutting wheel 355 forms the second cutting gauze.

It is illustrated by taking silicon rod multi-wire saw equipment shown in Fig. 4 as an example below.When using silicon rod multi-wire cutting shown in Fig. 4 Cut equipment come to silicon rod carry out chamfering cutting operation when, operating process can generally comprise: driving conversion work platform 21 convert Movement, so that the silicon rod plummer 211 for being initially positioned at the first cutting area is converted to the second cutting area, at this point, in wire-electrode cutting device 3 The second wire cutting unit 35 be right against the silicon rod of evolution 12 on the silicon rod plummer 211 of the second cutting area.Herein, Driving conversion work platform 21 makees converting motion, refers to that driving conversion work platform 21 rotates (such as rotating forward 120 °).It connects , drive the wire cutting support 31 in wire-electrode cutting device 3 to decline with respect to base 1, by the second wire cutting unit in wire-electrode cutting device 3 Each cutting line segment is formed by the contraposition of the second cutting gauze and is carried in the silicon rod plummer 211 of the second cutting area on 35 Evolution silicon rod 12 carries out chamfering cutting (referring to Figure 10), until the second cutting gauze is through evolution silicon rod 12, completion pair The chamfering of evolution silicon rod 12 cuts (referring to Figure 11), and chamfering silicon rod 14 and chamfering flaw-piece are formed after evolution is cut.

In fact, above-mentioned second wire cutting unit 35 can still make other variations, for example, in one embodiment, institute Stating the second wire cutting unit may include four cutting wheels, this four cutting wheels are combined into a pair of of cutting wheel group, that is, are cut by two Wheel one cutting wheel group of composition is cut, is partnered cutting wheel group by two cutting wheel groups.Each cutting wheel group includes opposite sets Two cutting wheels set and the cutting line segment being wound in two cutting wheels adhere to the different cutting wheels separately in a pair of of cutting wheel group Two cutting line segments in group are parallel to each other.The spacing and evolution silicon rod between two cutting wheels in each cutting wheel group Sectional dimension it is corresponding.For example, two cutting wheel components that the pair of cutting wheel group includes are listed in the left and right sides of coil holder, Wherein, a cutting wheel group includes two cutting wheels that front and back is arranged, and is wound with cutting line segment between two cutting wheels, another Cutting wheel group also includes two cutting wheels that front and back is arranged, and is wound with cutting line segment, two cutting line segments between two cutting wheels It is parallel to each other, the two cutting line segments correspond respectively to two chamferings of evolution silicon rod.

In actual application, for a pair of of cutting wheel group, the progress chamfering cutting operation of evolution silicon rod is just needed Chamfering cutting step twice, and in the cutting of first time chamfering and then the secondary cutting position for adjusting evolution silicon rod.In this way, In a certain implementation mode, silicon rod plummer can be set to rotary structure, such as: silicon rod plummer can pass through a rotation Mechanism realizes rotation, in this way, driving the silicon rod plummer rotation by the rotating mechanism, so that it may successfully by evolution silicon Stick is rotated (such as being rotated by 90 °) so that two cutting line segments in that a pair of of cutting wheel group can to it is postrotational Evolution silicon rod carries out second of chamfering cutting, completes the chamfering cutting of evolution silicon rod.

It should be noted that First Line in wire-electrode cutting device 3 is cut in aforementioned silicon rod multi-wire saw equipment shown in Fig. 4 It cuts unit 33 and the second wire cutting unit 35 is to share a wire cutting support 31, which passes through an elevating mechanism It drives First Line cutter unit 33 simultaneously and the second wire cutting unit 35 makees elevating movement so that First Line cutter unit 33 is right The silicon rod to be cut of first cutting area carries out evolution cutting operation and the second wire cutting unit 35 to the evolution of the second cutting area Silicon rod carries out chamfering cutting operation.But the wire-electrode cutting device is not limited thereto, for example, in a certain implementation, it is described First Line cutter unit and the second wire cutting unit are discrete self-contained unit, that is, the wire-electrode cutting device can include: the One wire cutting support, the first wire cutting support are equipped with an at least First Line cutter unit；First elevating mechanism, for driving It moves the first wire cutting support and makees elevating movement；Second wire cutting support, the second wire cutting support are equipped at least one Second wire cutting unit；Second elevating mechanism, for driving the second wire cutting support to make elevating movement.In this way, described One wire cutting unit and the second wire cutting unit can independent operating, there is bigger operating flexibility.

And wire-electrode cutting device disclosed in the present application, included by First Line cutter unit and the second wire cutting unit Quantity be also possible to it is multiple, for example, the wire-electrode cutting device may include two the first wire cutting lists in a certain implementation Member and two the second wire cutting units, two First Line cutter units can carry out two silicon rods to be cut in the first cutting area Evolution cutting operation, two the second wire cutting unit can evolution silicon rod carries out chamfering cutting work to two in the second cutting area Industry.Two First Line cutter units and two the second wire cutting units can share a wire cutting support, alternatively, two First Lines Cutter unit shares one the second wire cutting support of a first wire cutting support and two the second wire cutting units shareds, or Person, each First Line cutter unit is configured with a first wire cutting support and each second wire cutting unit is configured with one A second wire cutting support.

Need to supplement, in the application squaring silicon bar equipment, may also include silicon rod cleaning device, can be set to base on and At Accreditation Waiting Area, for carrying out and cleaning to evolution silicon rod 12.For silicon rod cleaning device, generally, silicon to be cut Stick 10 is formed evolution silicon rod 12 after evolution cutting operation, the cutting clast generated during evolution cutting operation can adhere to In 12 surface of evolution silicon rod, therefore, it is necessary to carry out necessary cleaning to evolution silicon rod 12.Generally, the silicon rod cleaning Equipment includes cleanninfg brushes and the cleaning solution flusher with cleanninfg brushes cooperation, in cleaning, by the cleaning solution Flusher sprays cleaning solution (for example, pure water) against evolution silicon rod 12, meanwhile, cleanninfg brushes are driven by motor (preferably Rotary brush-head) evolution silicon rod 12 is acted on, complete washing and cleaning operation.

Silicon rod multi-wire saw equipment disclosed in the present application, including workbench, silicon rod conversion equipment and wire-electrode cutting device, In, the silicon rod of carrying can be converted between Accreditation Waiting Area, the first cutting area and the second cutting area using silicon rod conversion equipment, benefit It is carried with the silicon rod plummer that at least First Line cutter unit in wire-electrode cutting device corresponds to the first cutting area to be cut Silicon rod is cut to carry out evolution cutting and correspond to the second cutting area using at least one second wire cutting unit in wire-electrode cutting device The silicon rod of evolution that is carried of silicon rod plummer carry out chamfering cutting, so, it can be achieved that silicon rod quick and easily converting, The evolution cutting and chamfering cutting that can complete silicon rod together, improve the cutting operation efficiency of silicon rod.

In addition, being driven by flaw-piece device for discharging provided by silicon rod multi-wire saw equipment using the mechanism therein that is staggered OQ t displacement occurs for flaw-piece and evolution silicon rod, so that the top of the flaw-piece protrudes from the evolution silicon rod, then benefit It will be formed by after flaw-piece clamps through evolution cutting operation with clamping transshipment acitivity and draw high flaw-piece to disengage it from evolution Silicon rod, then will be disengaged from being transported to flaw-piece discharge zone in the flaw-piece of evolution silicon rod, in this way, completing to unload the flaw-piece after evolution Material, entire discharge process automation is realized, is operated conveniently, is improved operating efficiency.

Disclosed herein as well is a kind of silicon rod multi-line cutting methods, for cutting to silicon rod progress evolution cutting operation and chamfering Cut operation.The silicon rod multi-line cutting method is applied to a silicon rod multi-wire cutting and cuts off in standby, the silicon rod multi-wire saw equipment packet Include workbench, silicon rod conversion equipment and wire-electrode cutting device, wherein silicon rod conversion equipment includes having turning for multiple silicon rod plummers Change jobs platform and for driving the silicon rod plummer in the conversion work platform to make the conversion driving mechanism of converting motion, described Wire-electrode cutting device includes an at least First Line cutter unit and at least one second wire cutting unit.

Figure 19 is please referred to, the flow diagram of the application silicon rod multi-line cutting method is shown as.As shown in figure 19, the silicon Stick multi-line cutting method the following steps are included:

Silicon rod to be cut is placed in at least silicon rod plummer for corresponding to Accreditation Waiting Area in conversion work platform by step S11 On.

In actual application, the silicon rod conversion equipment in the silicon rod multi-wire saw equipment is further included: conversion work platform With conversion driving mechanism, wherein the conversion work platform is equipped with multiple silicon rod plummers, and the conversion driving mechanism is for driving The turn platform that changes jobs makees converting motion to enable the multiple silicon rod plummer in Accreditation Waiting Area, the first cutting area and the second cutting area Between convert.

In step s 11, at least silicon rod that silicon rod to be cut is placed in conversion work platform corresponding to Accreditation Waiting Area is held It can be realized using silicon rod handler on microscope carrier.The silicon rod handler can include: commutation carrier is set on commutation carrier Silicon rod clamper, for drive commutation carrier make commutation movement unidirectional driving mechanism.Tool in relation to the silicon rod handler Body structure, which can be found in, to be described above, and it will not be described here.In the feeding for implementing silicon rod to be cut using the silicon rod handler When operation, first by clamping silicon rod to be cut in the silicon rod clamper of loading place, after as described in unidirectional driving mechanism driving The carrier that commutates makees commutation movement, and the silicon rod clamper is converted from loading place to Accreditation Waiting Area, silicon rod to be cut is discharged, will be to be cut Silicon rod is placed on the silicon rod plummer in Accreditation Waiting Area.

It should be noted that the application silicon rod multi-wire saw equipment also provides flaw-piece jacking mechanism, the flaw-piece jacking mechanism Set on the periphery of an at least silicon rod plummer, the flaw-piece jacking mechanism is further included: movable supporting parts and locking control piece. Therefore, when in step s 11, when silicon rod to be cut is placed on the silicon rod plummer in Accreditation Waiting Area, at silicon rod plummer Flaw-piece jacking mechanism in locking control piece movable supporting parts are controlled in lock state so that movable supporting parts support to The bottom peripheral edge of cutting silicon rod.

Step S12, driving conversion work platform make converting motion with by an at least silicon rod plummer and silicon to be cut thereon Stick is converted by Accreditation Waiting Area to the first cutting area.

As previously mentioned, the silicon rod conversion equipment further includes conversion work platform and conversion driving mechanism, the conversion is utilized Driving mechanism conversion work platform can be driven to make converting motion with enable an at least silicon rod plummer Accreditation Waiting Area, the first cutting area and It is converted between second cutting area.

In some embodiments, the conversion driving mechanism may be, for example, rotating mechanism.It, can using the rotating mechanism Drive the conversion work platform to rotate with enable the silicon rod plummer Accreditation Waiting Area, the first cutting area and the second cutting area it Between convert.In some embodiments, the conversion driving mechanism may be, for example, translation mechanism.It, can using the translation mechanism Drive the conversion work platform to translate with enable the silicon rod plummer Accreditation Waiting Area, the first cutting area and the second cutting area it Between convert.

By step S12, silicon rod to be cut can be converted by Accreditation Waiting Area to the first cutting area.

Step S13, using at least First Line cutter unit in wire-electrode cutting device to correspond to the first cutting area extremely Silicon rod to be cut on a few silicon rod plummer carries out evolution cutting.

In actual application, the wire-electrode cutting device include: liftably be set to base on wire cutting support and An at least First Line cutter unit and at least one second wire cutting unit on wire cutting support, wherein the First Line Cutter unit corresponds to the first cutting area, and the second wire cutting unit corresponds to the second cutting area.The First Line is cut Cut unit to include at least: the first coil holder on the wire cutting support, multiple first on first coil holder cut Cut wheel and the first cutting line, wherein first cutting line is sequentially set around each first cutting wheel and is formed multiple Cut line segment, multiple the first cutting of cutting line segment composition gauzes.The second wire cutting unit includes at least: cutting set on the line The second coil holder on cut branch seat, multiple second cutting wheels on second coil holder and the second cutting line, wherein institute It states the second cutting line to be sequentially set around each second cutting wheel and form multiple cutting line segments, multiple cutting line segments composition the Two cutting gauzes.

In step s 13, drive the wire cutting support in wire-electrode cutting device with respect to base decline, by wire-electrode cutting device the The first cutting gauze contraposition in one cutter unit is carried out in the silicon rod to be cut that the silicon rod plummer of the first cutting area is carried Evolution cutting completes the evolution cutting for treating cutting silicon rod until the first cutting gauze runs through silicon rod to be cut.

At this point, by means of flaw-piece jacking mechanism, can jacking live after silicon rod to be cut is cut by evolution to be formed by flaw-piece.

The flaw-piece that silicon rod to be cut formed after evolution cutting is given discharging by step S14.

Figure 20 is please referred to, the flow diagram of step S14 refinement step is shown as.As shown in figure 20, step S14 is into one Step can comprise the following steps that

Step S141, drives flaw-piece and OQ t displacement occurs for evolution silicon rod, so that the top of flaw-piece protrudes from Evolution silicon rod.

In actual application, the silicon rod multi-wire saw equipment provides flaw-piece device for discharging, the flaw-piece device for discharging In include being staggered mechanism, for driving flaw-piece and evolution silicon rod occurs OQ t and is displaced, so that the top of the flaw-piece is convex For the evolution silicon rod, so, it can be achieved that the flaw-piece is mutually staggered with the silicon rod of evolution, so that the flaw-piece is more It is easy to be crawled, it is subsequent will to carry out discharging after flaw-piece crawl.

In certain embodiments, the mechanism that is staggered may be, for example, flaw-piece hoisting mechanism, for promoting the flaw-piece so that Its relatively described evolution silicon rod is made to rise displacement, so that the top of the flaw-piece protrudes from the evolution silicon rod.The side Skin hoisting mechanism is arranged on the coil holder of cutting on line device, can realize lifting with First Line cutter unit.In a kind of realization In mode, the flaw-piece hoisting mechanism may include jacking part and driving the extensible member for jacking part and making stretching motion, described Jacking part is controlled by the extensible member and is resisted against the flaw-piece and holds the bottom end of the flaw-piece.In another implementation In, the flaw-piece hoisting mechanism may include the extensible member that adsorption piece and the driving adsorption piece make stretching motion, the absorption Part is controlled by the extensible member and is resisted against flaw-piece and adsorbs flaw-piece.

It should be noted that when utilizing flaw-piece described in flaw-piece lift mechanism lifts so that on its relatively described work of evolution silicon rod When raise-position moves, the locking control piece in flaw-piece jacking mechanism just unlocks the movable supporting parts being in the lock state.And when Using flaw-piece described in flaw-piece lift mechanism lifts and the top of the flaw-piece is made to protrude part compared to the silicon rod of evolution When meeting setting condition, then First Line cutter unit can control to stop rising.

In certain embodiments, the mechanism that is staggered may be, for example, silicon rod sink mechanism, for settle evolution silicon rod with It is set to make sedimentation deformation with respect to flaw-piece, so that the top of the flaw-piece protrudes from the evolution silicon rod.In specific implementation, institute The motor can be controlled by and go up and down for example including the lifting motor for having lifting column, the lifting column by stating silicon rod sink mechanism Movement.In this way, the lifting motor drives the lifting column decline, then the silicon rod plummer can be driven to decline, so that described The recessed top in the flaw-piece in the top of evolution silicon rod, that is, the top of the flaw-piece protrudes from the evolution silicon rod.

Step S143 clamps the top of flaw-piece.

In actual application, the flaw-piece device for discharging may also include clamping transshipment acitivity, for separating flaw-piece and The flaw-piece of separation is simultaneously given discharging by evolution silicon rod.In some embodiments, the clamping transshipment acitivity further includes: Z To movement mechanism, Y-direction motion and the flaw-piece clamping advanced on the Z-direction movement mechanism and the Y-direction motion Mechanism, wherein the flaw-piece clamping device is more can include: by the lifting driving structure of Z-direction movement mechanism activity setting with And the clamp assemblies of the lifting driving structure bottom are set to, the lifting driving structure can also drive the clamp assemblies to make Elevating movement, the clamp assemblies are for clamping each flaw-piece.

In step S143, by controlling flaw-piece clamping device, the top of each flaw-piece can be clamped.

Step S145 draws high flaw-piece to be detached from evolution silicon rod.

In step S143, by controlling flaw-piece clamping device, so that the clamp assemblies in the flaw-piece clamping device press from both sides Handle the top of each flaw-piece.In step S145, the flaw-piece clamping device is provided with side by the Z-direction movement mechanism Skin rises along Z-direction, until the position of the bottom end of the flaw-piece is higher than the top of the evolution silicon rod, so that the flaw-piece It is detached from the evolution silicon rod.

Flaw-piece is transported to flaw-piece discharge zone by step S147.

In step S147, the flaw-piece clamping device is provided by the Y-direction motion and is moved with flaw-piece along Y-direction The flaw-piece is transferred to flaw-piece discharge zone.

It should be noted that when in step S147, (as long as the flaw-piece is transported out during the flaw-piece is transported First cutting area and in the case of ensuring that the flaw-piece will not hamper evolution silicon rod or First Line cutter unit), i.e., controllably The First Line cutter unit originally suspended is made to continue to rise until initial position is returned back to, in case squaring silicon bar cutting next time is made Industry.

In some embodiments, the flaw-piece device for discharging more may include flaw-piece structure for conveying, be set to flaw-piece discharge zone, For the flaw-piece to come through the clamping transshipment acitivity transhipment to be conveyed.In specific implementation, the flaw-piece structure for conveying It may be, for example, conveyer belt.In this way, in actual operation, the flaw-piece discharge process can include: mentioned by the Y-direction motion It is moved with flaw-piece along Y-direction for the flaw-piece clamping device and is moved to flaw-piece discharge zone, discharged in the flaw-piece clamping device Clamp assemblies discharge flaw-piece to the conveyer belt.

In some embodiments, the flaw-piece device for discharging more may include flaw-piece cylinder, flaw-piece discharge zone is set to, for receiving It sets and the flaw-piece to come is transported by the clamping transshipment acitivity.In this way, in actual operation, the flaw-piece discharge process can include: It is moved with flaw-piece along Y-direction by the Y-direction motion offer flaw-piece clamping device and is moved to flaw-piece discharge zone, discharged Flaw-piece is placed in the flaw-piece cylinder by the clamp assemblies in the flaw-piece clamping device.

In some embodiments, the flaw-piece device for discharging more may include flaw-piece cylinder and flaw-piece structure for conveying, wherein institute Stating flaw-piece cylinder can be to may be reversed design, and the flaw-piece structure for conveying may be, for example, conveyer belt.In this way, in actual operation, it is described Flaw-piece discharge process can include: provide the flaw-piece clamping device by the Y-direction motion and moved with flaw-piece along Y-direction The clamp assemblies discharged in the flaw-piece clamping device to flaw-piece discharge zone are moved, flaw-piece is placed in the flaw-piece cylinder；The side The overturning of skin cylinder drives the flaw-piece in cylinder to be transferred on the conveyer belt, is transferred out flaw-piece by the conveyer belt.

Continue back at Figure 19, step S15, driving conversion work platform make converting motion with will an at least silicon rod plummer and its On the silicon rod of evolution converted by the first cutting area to the second cutting area.

Step S15 is similar with abovementioned steps S12, and it will not be described here.

By step S15, evolution silicon rod can be converted by the first cutting area to the second cutting area.In fact, pass through step S15 can also be converted new silicon rod to be cut to the first cutting area by Accreditation Waiting Area.

Step S16, using at least one second wire cutting unit in wire-electrode cutting device to correspond to the second cutting area extremely The silicon rod of evolution on a few silicon rod plummer carries out chamfering cutting.

In step s 16, drive the wire cutting support in wire-electrode cutting device with respect to base decline, by wire-electrode cutting device the The second cutting gauze contraposition in two cutter units is carried out in the silicon rod of evolution that the silicon rod plummer of the second cutting area is carried Chamfering cutting, until the second cutting gauze through evolution silicon rod, completes the chamfering cutting for treating cutting silicon rod.

On the other hand, meanwhile, the wire cutting support phase in wire-electrode cutting device is driven in the first cutting area by step S16 Base is declined, is held by the first cutting gauze contraposition in wire-electrode cutting device in the first cutter unit in the silicon rod of the first cutting area The silicon rod to be cut progress evolution cutting that microscope carrier is carried, until institute first states cutting gauze through silicon rod to be cut, completion pair The evolution of silicon rod to be cut is cut.

Step S17, driving conversion work platform make converting motion with by an at least silicon rod plummer and chamfering silicon thereon Stick is converted by the second cutting area to Accreditation Waiting Area.

Conversion work platform is driven to make converting motion in step S17 similar with abovementioned steps S12 and step S15, herein not It gives and repeating.

By step S17, chamfering silicon rod can be converted by the second cutting area to Accreditation Waiting Area.Meanwhile by step S17, The silicon rod of evolution for being initially positioned at the first cutting area can also be converted to the second cutting area, and, Accreditation Waiting Area will be initially positioned at Silicon rod to be cut is converted to the first cutting area.

The silicon rod of chamfering for being located at Accreditation Waiting Area is given discharging by step S18.

In step S18, blanking operation is implemented to the silicon rod of evolution for being located at Accreditation Waiting Area using the silicon rod handler. When implementing blanking operation, first by clamping silicon rod to be cut in the silicon rod clamper of Accreditation Waiting Area, after by the unidirectional driving machine Structure drives the commutation carrier to make commutation movement, and the silicon rod clamper is converted from Accreditation Waiting Area to loading place, evolution silicon is discharged Evolution silicon rod is placed in loading place by stick, subsequent to carry out blanking to the silicon rod of evolution in loading place.

S11 to S18 through the above steps, the evolution cutting operation and chamfering cutting operation of achievable silicon rod.

The principles and effects of the application are only illustrated in above-described embodiment, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, carry out modifications and changes to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technical idea such as At all equivalent modifications or change, should be covered by claims hereof.

Claims

1. a kind of silicon rod multi-wire saw equipment characterized by comprising

Workbench is sequentially equipped with Accreditation Waiting Area, the first cutting area and the second cutting area；

Silicon rod conversion equipment is set on the workbench, comprising: conversion work platform is equipped with multiple silicon rod plummers；Conversion driving Mechanism, for driving the conversion work platform to make converting motion to enable the multiple silicon rod plummer in Accreditation Waiting Area, the first cutting It is converted between area and the second cutting area；And

Wire-electrode cutting device is equipped with an at least First Line cutter unit corresponding with first cutting area and cuts with described second The corresponding at least one second wire cutting unit in area；An at least First Line cutter unit is used for in the silicon rod conversion equipment The silicon rod to be cut that silicon rod plummer corresponding to the first cutting area is carried carries out evolution cutting, and at least one second line is cut Cut evolution silicon rod of the unit for being carried to the silicon rod plummer for corresponding to the second cutting area in the silicon rod conversion equipment Carry out chamfering cutting.

2. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that the conversion driving mechanism includes:

Rotation axis is connected to the conversion work platform；And

Source of rotational drive is connected with the rotation axis, for driving the rotation axis rotation to drive the conversion work platform to turn It is dynamic.

3. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that the wire-electrode cutting device includes:

Wire cutting support, the wire cutting support are equipped with an at least First Line cutter unit and at least one second wire cutting list Member；And

Elevating mechanism, for driving the wire cutting support to make elevating movement.

4. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that the wire-electrode cutting device includes:

First wire cutting support, the first wire cutting support are equipped with an at least First Line cutter unit；

First elevating mechanism, for driving the first wire cutting support to make elevating movement；

Second wire cutting support, the second wire cutting support are equipped at least one second wire cutting unit；And

Second elevating mechanism, for driving the second wire cutting support to make elevating movement.

5. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that further include facing to convert set on the silicon rod The silicon rod handler of device, comprising:

Commutate carrier, is equipped with work piece holder；And

Unidirectional driving mechanism, for driving the commutation carrier to make commutation movement to enable the work piece holder clamp silicon rod to be cut And silicon rod to be cut is transported to the silicon rod plummer corresponding to Accreditation Waiting Area by loading place, or, clamping corresponds to the silicon of Accreditation Waiting Area Chamfering silicon rod is simultaneously transported to loading place by Accreditation Waiting Area by the silicon rod of chamfering on stick plummer.

6. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that further include being set to the silicon rod plummer The flaw-piece jacking mechanism on periphery.

7. silicon rod multi-wire saw equipment according to claim 6, which is characterized in that the flaw-piece jacking mechanism includes:

Movable supporting parts；And

Control piece being locked, the movable supporting parts control existing when for being resisted against the bottom of silicon rod to be cut in movable supporting parts Lock state.

8. silicon rod multi-wire saw equipment according to claim 1, which is characterized in that further include flaw-piece device for discharging, be used for The flaw-piece that an at least First Line cutter unit generate after evolution cutting to the silicon rod to be cut is given into discharging.

9. silicon rod multi-wire saw equipment according to claim 8, which is characterized in that the flaw-piece device for discharging includes: mistake Opening mechanism, for driving flaw-piece and OQ t displacement occurs for evolution silicon rod so that the top of the flaw-piece protrude from it is described Evolution silicon rod.

10. silicon rod multi-wire saw equipment according to claim 9, which is characterized in that the flaw-piece device for discharging further include: Clamp transshipment acitivity, behind the top for clamping the flaw-piece and draw high the flaw-piece be detached from the evolution silicon rod and The flaw-piece is transported to flaw-piece discharge zone.

11. a kind of silicon rod multi-line cutting method cuts off in standby, the silicon rod multi-wire saw equipment packet applied to a silicon rod multi-wire cutting Include workbench, silicon rod conversion equipment and wire-electrode cutting device, wherein silicon rod conversion equipment includes having turning for multiple silicon rod plummers Change jobs platform and for driving the silicon rod plummer in the conversion work platform to make the conversion driving mechanism of converting motion, described Wire-electrode cutting device includes an at least First Line cutter unit and at least one second wire cutting unit；It is characterized in that, the silicon rod Multi-line cutting method includes the following steps:

Silicon rod to be cut is placed in conversion work platform corresponding on an at least silicon rod plummer for Accreditation Waiting Area；

Drive the conversion work platform make converting motion with by an at least silicon rod plummer and silicon rod to be cut thereon by waiting It converts to the first cutting area in area；

At least silicon rod for corresponding to the first cutting area is carried using at least First Line cutter unit in wire-electrode cutting device Silicon rod to be cut on platform carries out evolution cutting；

Drive the conversion work platform make converting motion with by an at least silicon rod plummer and the silicon rod of evolution thereon by first Cutting area is converted to the second cutting area；

At least silicon rod for corresponding to the second cutting area is carried using at least one second wire cutting unit in wire-electrode cutting device The silicon rod of evolution on platform carries out chamfering cutting；And

Drive the conversion work platform make converting motion with by an at least silicon rod plummer and the silicon rod of chamfering thereon by second Cutting area is converted to Accreditation Waiting Area, and the silicon rod of chamfering is given discharging.

12. silicon rod multi-line cutting method according to claim 11, which is characterized in that the conversion work platform is driven to turn Movement is changed to realize by way of following at least one:

The conversion work platform is driven to rotate；And

The conversion work platform is driven to translate.

13. silicon rod multi-line cutting method according to claim 11, which is characterized in that further include jacking silicon rod to be cut into The step of being formed by flaw-piece after the cutting of row evolution.

14. silicon rod multi-line cutting method according to claim 11, which is characterized in that further include carrying out silicon rod to be cut The step of flaw-piece formed after evolution cutting gives discharging.

15. silicon rod multi-line cutting method according to claim 14, which is characterized in that cut silicon rod to be cut progress evolution Following steps are further included in the step of flaw-piece formed after cutting gives discharging: driving the flaw-piece and evolution silicon rod occurs relatively Lifting displacement, so that the top of the flaw-piece protrudes from the evolution silicon rod.

16. silicon rod multi-line cutting method according to claim 15, which is characterized in that cut silicon rod to be cut progress evolution The flaw-piece formed after cutting gives discharging, further comprises the steps of:

Clamp the top of the flaw-piece；

The flaw-piece is drawn high to be detached from the evolution silicon rod；And

The flaw-piece is transported to flaw-piece discharge zone.

17. a kind of silicon rod movement system is applied in silicon rod multi-wire saw equipment, which is characterized in that the silicon rod movement system Include:

Silicon rod conversion equipment, comprising: conversion work platform, conversion work platform are equipped with multiple silicon rod plummers；Driving mechanism is converted, For driving the conversion work platform to make converting motion with enable the multiple silicon rod plummer Accreditation Waiting Area, the first cutting area and It is converted between second cutting area；And

Silicon rod handler, faces set on the conversion work platform, for by silicon rod to be cut by loading place be transported to corresponding to etc. Loading place is transported to by the silicon rod plummer for corresponding to Accreditation Waiting Area to the silicon rod plummer in area or by chamfering silicon rod.

18. silicon rod movement system according to claim 17, which is characterized in that the conversion driving mechanism includes:

Rotation axis is connected to the conversion work platform；And

Source of rotational drive, for driving the rotation axis rotation to drive the conversion work platform to rotate.

19. silicon rod movement system according to claim 17, which is characterized in that be uniformly provided with three on the conversion work platform A silicon rod plummer or four silicon rod plummers.

20. silicon rod movement system according to claim 17, which is characterized in that the silicon rod handler includes:

Commutate carrier, is equipped with work piece holder；And

21. silicon rod movement system according to claim 20, which is characterized in that the unidirectional driving mechanism includes:

Reversing shaft is connected to the commutation carrier；And

Unidirectional driving source is connected with the reversing shaft, for driving the rotation axis rotation to drive the commutation carrier to rotate.