CN110450042A

CN110450042A - Silicon rod clamping device, silicon rod conversion equipment and silicon rod processing machine

Info

Publication number: CN110450042A
Application number: CN201810411375.5A
Authority: CN
Inventors: 卢建伟; 李鑫
Original assignee: Shanghai Nissin Machine Tool Co Ltd
Current assignee: Shanghai Nissin Machine Tool Co Ltd
Priority date: 2018-05-02
Filing date: 2018-05-02
Publication date: 2019-11-15

Abstract

It includes: the first clamping member being oppositely arranged and the second clamping piece that the application, which discloses a kind of silicon rod clamping device, silicon rod conversion equipment and silicon rod processing machine, the silicon rod clamping device,；Clamping drive mechanism, for driving described at least one of first clamping member and the second clamping piece to move laterally so that first clamping member and the second clamping piece are clamped silicon rod to be processed in a manner of accumbency.The application can be clamped silicon rod to be processed by silicon rod clamping device in the way of accumbency, and grinding operation is carried out to the silicon rod of accumbency by transverse shifting using silicon rod grinding device, it realizes that silicon rod completes grinding operation under accumbency mode, has many advantages, such as that structure is simple, silicon rod holding stability is high, silicon rod grinding device is advanced, and stable and silicon rod grinding efficiency is high.

Description

Silicon rod clamping device, silicon rod conversion equipment and silicon rod processing machine

Technical field

This application involves silicon rod processing technique field, more particularly to a kind of silicon rod clamping device, silicon rod conversion equipment and Silicon rod processing machine.

Background technique

When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure for restricting subsequent finished product, thus It is also higher and higher to its job requirements.Currently, multi-wire cutting technology is since with high production efficiency, operating cost is low, operation is smart The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.

The production process of existing silicon wafer, by taking single crystal silicon product as an example, generally, rough flow chart can include: first make Truncation operation is carried out to form the short silicon rod of multistage to long silicon rod originally with silicon rod shear；After the completion of truncation, and use silicon rod Excavation machine forms silicon single crystal rod after carrying out evolution operation to the short silicon rod after truncation；Each silicon single crystal rod is ground accordingly again Mill operation (such as: round as a ball, flour milling etc.), so that the surface shaping of silicon single crystal rod reaches corresponding flatness and dimensional tolerance is wanted It asks；It is subsequent to reuse slicer slice operation is carried out to silicon single crystal rod, then obtain monocrystalline silicon piece.And by taking polysilicon product as an example, Generally, rough flow chart can include: evolution first is carried out to first grade silicon ingot (large scale silicon ingot) using silicon ingot excavation machine and is added Work is to form time grade silicon ingot (small size silicon ingot)；After evolution, reuse silicon ingot shear to secondary grade silicon ingot carry out truncation plus Work is to form polycrystalline silicon rod；Corresponding grinding operation (such as: flour milling, chamfering, barreling etc.) is carried out to each polycrystalline silicon rod again, is made The surface shaping for obtaining polycrystalline silicon rod reaches corresponding flatness and size tolerance requirements；The subsequent slicer that reuses is to polycrystalline silicon rod Slice operation is carried out, then obtains polysilicon chip.

It is current in the related technology, be mostly that grinding work is carried out to silicon rod using vertical lapping mode using silicon rod processing machine Industry.Generally, silicon rod to be processed is placed on silicon rod plummer in a manner of setting, by the mill in silicon rod grinding device Tool makees elevating movement along the length direction of silicon rod by elevating mechanism to carry out corresponding grinding operation to silicon rod.But, on Stating processing method, there are the following problems: firstly, since silicon rod is placed in a manner of setting, in grinding operation, need seek silicon rod It keeps stablizing, and when silicon rod length is longer, keep stable difficulty that will increase suddenly；In addition, due to Machine Design because Element, it is desirable that the length of silicon rod to be processed too long (if the longer words of silicon rod length, cannot can make the height of complete machine higher and silicon The movement travel of stick grinding device oscilaltion can be longer), to limit the length of machinable silicon rod；Further more, silicon rod is ground Grinding tool in mill apparatus makees elevating movement along the length direction of silicon rod by elevating mechanism, certainly in view of silicon rod grinding device itself Weight is larger, therefore, factor that silicon rod grinding device must overcome it to be self-possessed in elevating movement and ensure the stability of elevating movement.

It is also pointed out that in the related art, each procedures (such as grinding, chamfering, barreling or round as a ball etc.) institute The operation needed is independent arrangement, and corresponding processing unit (plant) is dispersed in different production unit or workshop or workshop not Same production area, the conversion for executing the workpiece of different procedures needs to carry out carrying allotment, and is executing each procedures It may require to carry out pretreatment work before, in this way, process is many and diverse, inefficiency, and easily influence the product of silicon rod processing operation Matter needs more manpowers or transloading equipment, and security risk is big, in addition, the flowing link between the operating equipment of each process is more, The risk that workpiece damage is improved during workpiece transfer, is also easy to produce unqualified caused by nonproductive factors, reduces product Qualification rate and existing processing method brought by unreasonable loss, be the major improvement project that each company faces.

Summary of the invention

In view of the missing of the relevant technologies described above, the purpose of the application is to disclose a kind of silicon rod clamping device, silicon rod Conversion equipment and silicon rod processing machine are asked for solving that silicon rod clamp structure is complicated in the related technology and silicon rod grinding efficiency is low etc. Topic.

The first aspect of the application discloses a kind of silicon rod clamping device, comprising: the first clamping member being oppositely arranged and second Clamping piece；Clamping drive mechanism, for driving at least one of described first clamping member and the second clamping piece to make laterally to move It moves so that first clamping member and the second clamping piece are clamped silicon rod to be processed in a manner of accumbency.

Silicon rod clamping device disclosed in the present application, silicon rod to be processed is clamped in a manner of accumbency, realizes that silicon rod exists Grinding operation is completed under accumbency mode, has many advantages, such as that structure is simple and silicon rod keeps stability high.

The second aspect of the application discloses a kind of silicon rod processing machine, comprising: base has silicon rod processing platform；The silicon Stick processing platform is equipped at least one processing position；Foregoing silicon rod clamping device, for by silicon rod to be processed with cross Sleeping mode is clamped；Silicon rod grinding device, at the processing position of the silicon rod processing platform, for passing through transverse shifting Silicon rod to be clamped in a manner of accumbency to the silicon rod clamping device carries out grinding operation.

Silicon rod processing machine disclosed in the present application, including base, silicon rod clamping device and silicon rod grinding device, wherein can Silicon rod to be processed is clamped in the way of accumbency by silicon rod clamping device, and using silicon rod grinding device by laterally moving It moves and grinding operation is carried out to the silicon rod of accumbency, realize that silicon rod completes grinding operation under accumbency mode, the simple, silicon with structure Stick is kept for the advantages that stability is high, the traveling of silicon rod grinding device is stable and silicon rod grinding efficiency is high.

The third aspect of the application discloses a kind of silicon rod conversion equipment, comprising: conveying ontology；On the conveying ontology An at least silicon rod clamping device, for silicon rod to be processed to be clamped in a manner of accumbency；Driving mechanism is converted, for driving Dynamic conveying ontology rotation is to drive the silicon rod clamping device and its clamped silicon rod to convert between multiple function positions.

Silicon rod conversion equipment disclosed in the present application, can be clamped silicon rod to be processed and can will be described in a manner of accumbency Silicon rod is converted between multiple function positions, is realized that silicon rod sequentially completes multiple tracks grinding operation under accumbency mode, is formed flowing water Line operation has many advantages, such as that structure is simple and silicon rod keeps stability height and silicon rod grinding efficiency high.

The fourth aspect of the application discloses a kind of silicon rod processing machine, comprising: base has silicon rod processing platform；The silicon Stick processing platform is equipped with pretreatment position, the first processing position and the second processing position；Foregoing silicon rod converting means It sets, is set on the silicon rod processing platform, for being clamped silicon rod to be processed in a manner of accumbency and pre-processing it It is converted between position, the first processing position and the second processing position；First silicon rod grinding device is set to the silicon rod and processes First processing position of platform, for carrying out the first grinding operation to the silicon rod；Second silicon rod grinding device is set to the silicon Second processing position of stick processing platform, for carrying out the second grinding operation to the silicon rod after the first grinding operation of completion.

Silicon rod processing machine disclosed in the present application, including base, silicon rod conversion equipment, the first silicon rod grinding device and second Silicon rod grinding device, wherein using silicon rod conversion equipment by silicon rod to be processed clamped in a manner of accumbency and by its It is converted between pretreatment position, the first processing position and the second processing position, and passes through cross using the first silicon rod grinding device The first grinding operation and the second silicon rod grinding device are carried out by transverse shifting come to accumbency to the silicon rod of accumbency to movement Silicon rod carry out the second grinding operation, realize that silicon rod completes corresponding grinding operation under accumbency mode, have that structure is simple, silicon Stick is kept for the advantages that stability is high, the traveling of silicon rod grinding device is stable and silicon rod grinding efficiency is high.

Detailed description of the invention

Fig. 1 is shown as schematic perspective view of the silicon rod processing machine under a certain visual angle in one embodiment of the application.

Fig. 2 is shown as the refinement structural schematic diagram of silicon rod clamping device in Fig. 1.

Fig. 3 is shown as state change schematic diagram of the silicon single crystal rod in circle of contact operation.

Fig. 4 is shown as state change schematic diagram of the silicon single crystal rod in corase grinding operation.

Fig. 5 is shown as status diagram of the silicon single crystal rod in round as a ball operation.

Fig. 6 is shown as status diagram of the silicon single crystal rod in fine grinding operation.

Fig. 7 is shown as state change schematic diagram of the polycrystalline silicon rod in corase grinding operation.

Fig. 8 is shown as status diagram of the polycrystalline silicon rod in chamfering operation.

Fig. 9 is shown as status diagram of the polycrystalline silicon rod in fine grinding operation.

Figure 10 shows that silicon rod processing machine implements the flow diagram that silicon rod processes operation in one embodiment of the application.

Figure 11 is schematic perspective view of the silicon rod processing machine under a certain visual angle in another embodiment of the application.

Figure 12 is the top view of silicon rod processing machine in another embodiment of the application.

Figure 13 is shown as the refinement structural schematic diagram of silicon rod clamping device in Figure 11.

Figure 14 shows that silicon rod processing machine implements the flow diagram that silicon rod processes operation in another embodiment of the application.

Specific embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

In described below, with reference to attached drawing, attached drawing describes several embodiments of the application.It should be appreciated that also can be used Other embodiments, and can be carried out without departing substantially from spirit and scope mechanical composition, structure, electrically with And operational change.Following detailed description should not be considered limiting, and the range of embodiments herein Only limited by the claims for the patent announced.Term used herein is merely to describe specific embodiment, and be not It is intended to limit the application.The term of space correlation, for example, "upper", "lower", "left", "right", " following ", " lower section ", " lower part ", " top ", " top " etc. can be used in the text in order to an elements or features and another element or spy shown in explanatory diagram The relationship of sign.

Although term first, second etc. are used to describe various elements herein in some instances, these elements It should not be limited by these terms.These terms are only used to distinguish an element with another element.For example, first turn It can be referred to as the second steering swing to swinging, and similarly, the second steering, which is swung, can be referred to as the first steering swing, and The range of various described embodiments is not departed from.

In relevant silicon rod grinding operation, there are Machine Design difficulty height, holding silicon rod for existing vertical lapping mode The problems such as stability requirement is high, silicon rod grinding device elevating movement stability requirement is high.Therefore, for those skilled in the art For, it is necessary to a kind of new-type silicon rod processing machine is researched and developed, is asked in order to can solve many technologies in the presence of the relevant technologies Topic.

In view of this, the applicant proposes one by scrap build without being bound by vertical lapping mode in the related technology Kind uses the silicon rod processing machine of horizontal type lapping mode, realizes that silicon rod completes grinding operation under accumbency mode, has structure letter Single, silicon rod is kept for the advantages that stability is high, the traveling of silicon rod grinding device is stable and silicon rod grinding efficiency is high.

Referring to Fig. 1, being shown as stereochemical structure signal of the silicon rod processing machine under a certain visual angle in one embodiment of the application Figure.In the present embodiment, the application silicon rod processing machine is for carrying out grinding operation to silicon rod, and herein, the silicon rod is (class) rectangle silicon rod, either silicon single crystal rod can also should belong to the protection scope of the application with polycrystalline silicon rod.

By taking silicon single crystal rod as an example, the formation process of silicon single crystal rod can include: first using silicon rod shear to long silicon originally Stick carries out truncation operation to form the short silicon rod of multistage；After the completion of truncation, but use squaring silicon bar machine to the short silicon rod after truncation into Row evolution operation Formation cross-section is in the silicon single crystal rod of class rectangle.Wherein, long silicon rod originally is cut using silicon rod shear Disconnected operation with formed the specific implementation of the short silicon rod of multistage can refer to for example, CN105856445A, CN105946127A, with And the patent publication us such as CN105196433A, it is formed after carrying out evolution operation to the short silicon rod after truncation using squaring silicon bar machine Section then can refer to the patent publication us such as CN105818285A in the specific embodiment of the silicon single crystal rod of class rectangle.But monocrystalline The formation process of silicon rod simultaneously loses and is limited to aforementioned techniques, and in optional example, the formation process of silicon single crystal rod may also include that and first make Long silicon single crystal rod of the evolution operation with Formation cross-section in class rectangle is carried out to long silicon rod originally with total silicon stick excavation machine；Evolution is complete Cheng Hou, and truncation operation is carried out to the long silicon single crystal rod after evolution using silicon rod shear and forms short crystalline silicon rod.Wherein, among the above Evolution operation is carried out to form the specific reality of the long silicon single crystal rod in class rectangle to long silicon rod originally using total silicon stick excavation machine Existing mode can refer to the patent publication us such as example, CN106003443A.

By taking polycrystalline silicon rod as an example, the formation process of polycrystalline silicon rod can include: first using silicon ingot excavation machine to first grade silicon ingot or Silicon cube (large scale silicon ingot) carries out evolution processing to form time grade silicon ingot (small size silicon ingot)；After evolution, silicon is reused Ingot shear carries out truncation processing to secondary grade silicon ingot to form polycrystalline silicon rod.Wherein, (big to first grade silicon ingot using silicon ingot excavation machine Size silicon ingot) it carries out evolution processing and can refer to for example, with the specific implementation for forming time grade silicon ingot (small size silicon ingot) The patent publication us such as CN102172997A, CN105216128A, CN105690582A, using silicon ingot shear to secondary grade silicon ingot It carries out truncation processing and can refer to the patent disclosures such as example, CN105196434A text to form the specific implementation of polycrystalline silicon rod It offers.

Either silicon single crystal rod also or polycrystalline silicon rod, must all carry out corresponding following process operation, these it is subsequent plus Work industry may be, for example, flour milling, chamfering, barreling or round as a ball etc., and these following process operations can pass through silicon described herein Stick processing machine is implemented.

As shown in Figure 1, the application silicon rod processing machine includes: base 1, silicon rod clamping device 3, silicon rod grinding device 5.

Silicon rod processing machine in the embodiment of the present application is described in detail below.

Basic components of the base 1 as the application silicon rod processing machine have silicon rod processing platform 11, wherein the silicon rod Processing platform is equipped with processing position.Specifically, in the present embodiment, the silicon rod processing platform is equipped with a processing position.

Silicon rod clamping device 3 be set to silicon rod processing platform 11 processing position at, for by silicon rod 100 to be processed with cross Sleeping mode is clamped.Specific to the present embodiment, silicon rod clamping device 3 is further included: first clamping member 31, the second clamping piece 33, Clamping drive mechanism 35 and rotary drive mechanism (not indicated in figure).

First clamping member 31 and the second clamping piece 33 are oppositely arranged.In the present embodiment, first clamping member 31 and the second folder Gripping member 33 is oppositely arranged in the horizontal direction, wherein first clamping member 31 is located at the inside of processing position, the second clamping piece 33 In the outside of processing position, silicon rod grasping part is formed between first clamping member 31 and the second clamping piece 33.

Clamping drive mechanism 35 is for driving at least one of first clamping member 31 and the second clamping piece 33 to make laterally to move It moves so that first clamping member 31 and the second clamping piece 33 clamp silicon rod 100.In this present embodiment, first clamping member 31 above-mentioned It is movable setting at least one of the second clamping piece 33, so that adjustable grasping part between the two is to be suitable for folder Hold various sizes of silicon rod.In some embodiments, clamping drive mechanism 35 is configured in first clamping member 31 and the second folder On a clamping piece in gripping member 33 and another clamping piece be fixed setting, clamping drive mechanism 35 can drive this clamping Part moves laterally.Such as: first clamping member 31 is to be fixedly installed and be then configured on the second clamping piece 33 and clamp driving machine Structure moves laterally in this way, the second clamping piece 33 can be controlled by clamping drive mechanism 35 close to or far from first clamping member 31. Alternatively, the second clamping piece 33 is to be fixedly installed and be then configured with clamping drive mechanism 35 in first clamping member 31, in this way, first Clamping piece 31 can be controlled by clamping drive mechanism 35 and move laterally close to or far from the second clamping piece 33.In certain embodiment party In formula, corresponding clamping drive mechanism 35, two clamping pieces are each configured in first clamping member 31 and the second clamping piece 33 Clamping drive mechanism 35 can be controlled by move laterally.Transverse shifting in aforementioned be in Fig. 1 along X to moving.

Specific to the present embodiment, in silicon rod clamping device shown in Fig. 1, first clamping member 31, which is fixedly installed on to be located at, to be added On the mounting structure 12 of work area position inside, the second clamping piece 33 passes through connection structure 32 being connected with mounting structure 12 opposite the One clamping piece 31 is arranged, and clamping drive mechanism 35 is configured on the second clamping piece 33, and the second clamping piece 33 is controlled by clamping driving Mechanism 35 and along connection structure 32 towards first clamping member 31 move laterally with reduce and first clamping member 31 clamping between It moves laterally away from or away from first clamping member 31 to increase the clamping spacing with first clamping member 31.In specific implementation, peace Assembling structure 12 may be, for example, the mounting bracket, mounting post or mounting surface of vertical setting.First clamping member 31 may include fixed setting In on mounting structure 12 the first Holding seat and rotation be set on first Holding seat for contacting with silicon rod 100 First clamping part, first clamping part may be, for example, grain-clamping table or clamp column, and by taking grain-clamping table as an example, the grain-clamping table can be such as For circular clamp platform or rectangular grain-clamping table, size is adapted with the sectional dimension of silicon rod 100.Connection structure 32 may be, for example, with The connecting beam that mounting structure 12 connects, the connecting beam are horizontal cross setting.Second clamping piece 33 then may include activity The second Holding seat and rotation in connection structure 32 are set on second Holding seat for contacting with silicon rod 100 The second clamping part, second clamping part may be, for example, grain-clamping table or clamp column.To make the second clamping piece 33 can be along even Binding structure 32 moves laterally, and the walking trough (walking of strip is offered in the connecting beam as connection structure 32 The trend of slot be along X to), the length of the walking trough be with the stroke of 33 transverse shifting of the second clamping piece be adapted.In reality In, a part of the second Holding seat of the second clamping piece 33 passes through the walking trough and along walking trough (the i.e. X To) move laterally.

In actual operation, when carrying out silicon rod clamping, first, it is ensured that between first clamping member 31 and the second clamping piece 33 Retention has enough clamping spacing, if clamping spacing is inadequate, then driving the second clamping piece 33 using clamping drive mechanism 35 It moves laterally away from first clamping member 31 to increase the clamping spacing with first clamping member 31；Silicon rod is delivered in a manner of accumbency The first clamping part being resisted against to pretreatment position and by one of end face of silicon rod in first clamping member 31；It is driven using clamping Motivation structure 35 drives the second clamping piece 33 to move laterally towards first clamping member 31 up to the second clamping of the second clamping piece 33 Portion against silicon rod another end face and pressed again, by the cooperation of the second clamping piece 33 and first clamping member 31, by silicon Stick 100 is held fixedly.In the present embodiment, first clamping member 31 is fixedly installed on mounting structure 12 and clamps second It is configured with clamping drive mechanism 35 on part 33, has structure is simple (only need to be on the second clamping piece 33 configured with clamping driving machine Structure 35), operate conveniently and (drive the second clamping piece 33 to move laterally using clamping drive mechanism 35), firm (the first folder of clamping Inside and mounting structure of the silicon rod that silicon rod 100 is clamped and clamped by gripping member 31 and the second clamping piece 33 adjacent to processing position 12) the advantages that.

In fact, the application silicon rod processing machine may also include silicon rod loading attachment, for by silicon rod to be processed load to Predetermined position (such as: the processing position of silicon rod processing platform).In the present embodiment as shown in Figure 1, is loaded and filled using silicon rod It sets, silicon rod to be processed can smoothly be delivered into silicon rod clamping device 3 first clamping member 31 and the second folder in a manner of accumbency In grasping part between gripping member 33, so that first clamping member 31 and the second clamping piece 33 are clamped silicon rod 100.It is practical On, it is filled after being loaded silicon rod 100 to be processed to predetermined position using the silicon rod loading attachment and being clamped by silicon rod Before setting 3 clampings, the operation such as planar smoothness detection and position adjustment can be also carried out to silicon rod 100 to be processed.

Referring to Fig. 2, being shown as the refinement structural schematic diagram of silicon rod clamping device in Fig. 1.As shown in Fig. 2, in the silicon In stick clamping device, clamping drive mechanism 35 is configured on the second clamping piece 33, the clamping drive mechanism 35 further includes: flat Move rack rails 351, driving gear 353 and locking control piece.

Rack rails 351 is translated, is layed in connection structure 32 with landscape mode.In the present embodiment, connection structure 32 can example For example connecting beam, translation rack rails 351 can then be layed in the side of connection structure 32, but be not limited thereto, for example, certain In embodiment, translation rack rails 351 can also be layed in the bottom of connection structure 32.The tooth density translated in rack rails 351 can basis Actual needs and can flexible setting.

Driving gear 353 is engaged with translation rack rails 351 and is linked with the second clamping piece 33.In this present embodiment, sliding tooth Wheel 353 is controlled by a driving power source 355, which can be with the second Holding seat phase in the second clamping piece 33 Even, for example, the driving configuration of power source 355 is on a mounting rack or mounting plate, the mounting rack or mounting plate and second clamp bottom Seat is connected.In this way, driving power source 355 and the second clamping piece 33 are associated, the driving gear 353 on driving power source 355 is then It is meshed with translation rack rails 351.Driving power source 355 in the present embodiment may be, for example, servo motor.

In actual operation, when mobile second clamping piece 33, driving gear 353 is controlled by driving power source 355 and is rotated, Pass through the cooperation of driving gear 353 and translation rack rails 351, so that it may the second clamping piece 33 be driven to make transverse direction along translation rack rails 351 It is mobile.In some embodiments, driving power source 355 may be, for example, driving motor, when the setting of translation rack rails 351 is tied in connection When the right side or top of structure 32, driving gear 353 is controlled by driving motor 355 and is rotated forward, then can drive 33 edge of the second clamping piece Translation rack rails 351 move laterally towards first clamping member 31 to be controlled and be driven by driving motor 355 close to first clamping member 31 Moving gear 353 invert, then can drive the second clamping piece 33 along translation rack rails 351 backwards to first clamping member 31 move laterally with Far from first clamping member 31.In some embodiments, when the left side or bottom of connection structure 32 is arranged in translation rack rails 351 When, driving gear 353 is controlled by driving motor 355 and is inverted, then can drive the second clamping piece 33 along translation rack rails 351 towards the One clamping piece 31 moves laterally to control driving gear 353 by driving motor 355 and rotate forward, then may be used close to first clamping member 31 The second clamping piece 33 is driven to move laterally backwards to first clamping member 31 far from first clamping member 31 along translation rack rails 351.

The locking control piece is used for the second clamping when the second clamping piece 33 moves laterally and is resisted against silicon rod 100 Part 33 is controlled in lock state.In this present embodiment, the locking control piece further includes: braking rack gear 352 and activity setting Braking member 354.

It is similar with translation rack rails 351 to brake rack gear 352, is layed in connection structure 32 with landscape mode, that is, brake tooth Item 352 and translation rack rails 351 be along X to parallel setting.But, for the manipulation and Machine Design of clamping drive mechanism 35 Etc. consider, braking rack gear 352 is staggered with rack rails 351 is translated in order to avoid the two interferes with each other.In the present embodiment, it brakes Rack gear 352 can be layed in the bottom (translation rack rails 351 is layed in the side of connection structure 32) of connection structure 32, in view of it is aforementioned The bottom of connection structure 32 is equipped with walking trough, therefore, may be configured with two braking rack gears 352, this two braking rack gear 352 difference Positioned at the opposite sides of the walking trough.But it is not limited thereto, for example, in some embodiments, braking rack gear 352 can also It is layed in the side of connection structure 32 and can be oppositely arranged with translation rack rails 351, for example, translation rack rails 351 is layed in connection knot The left side (or right side) of structure 32, then, braking rack gear 352 can be layed in the right side (or left side) of connection structure 32. In some embodiments, if translation rack rails 351 is layed in the bottom of connection structure 32, then, braking rack gear 352 can be layed in The side of connection structure 32.The tooth density braked in rack gear 352 can according to actual needs can flexible setting.

Braking member 354 and transversely movable second clamping piece 33 link.In the present embodiment, 354 band of braking member There is a brake power source 356, brake power source 356 can be connected with the second Holding seat in the second clamping piece 33, for example, braking Power source 356 configures on a mounting rack or mounting plate, and the mounting rack or mounting plate are connected with the second Holding seat.Braking member Part 354 is controlled by brake power source 356 and moves to fasten in braking rack gear 352.As for brake power source 356, in certain realities It applies in mode, brake power source 356 may be, for example, oil cylinder, and the oil cylinder is connect by piston rod with braking member 354, the oil Hydraulic energy can be converted into mechanical energy by cylinder, have many advantages, such as that small but power output is big.Certainly, brake power source 356 is not with this It is limited, in some embodiments, brake power source 356 also may be, for example, cylinder, and cylinder has easy to control and at low cost etc. Advantage.Braking member 354 then may be, for example, brake block, and the brake block is strip, and both ends can fasten respectively in setting Two braking rack gears 352.Certainly, the place of fastening corresponding with braking rack gear 352 can add and fasten tooth in the braking member 354, To match with braking rack gear 352, more firm braking effect is realized.By taking oil cylinder as an example, in practical applications, in initial shape Under state, the piston rod of oil cylinder 356 drives braking member 354 to be in contraction state, to the second clamping piece 33 in driving gear 353 Drive under moved laterally along translation rack rails 351 until when being resisted against silicon rod 100, the driving in clamping drive mechanism 35 is dynamic Power source 355 stops operating, at this point, being stretched out by the piston rod of oil cylinder 356 and driving braking member 354 towards braking rack gear 352 Movement is until fastening in braking rack gear 352 and being pressed again, to controlling the second clamping piece 33 in lock state.

Silicon rod to be processed is placed on silicon rod plummer in a manner of setting in the related technology existing, due to Silicon rod dead weight is larger, if the loading end of the end face in silicon rod and silicon rod plummer is enough, then, silicon rod is with vertical cube Formula be placed on silicon rod plummer be it is metastable, can generally not need additional stabilization holding meanss, though need, mentioned The stabilization holding meanss of confession are also relatively simple.But in this application, silicon rod 100 is in a manner of accumbency by first clamping member 31 It is clamped with the second clamping piece 33 and keeps suspended state, silicon rod dead weight is larger, maintains silicon rod to keep horizontal accumbency, this will The aid power for asking first clamping member 31 and the second clamping piece 33 can be provided must the sufficiently large (silicon rod as caused by chucking power 100 will be adapted with the frictional force of the first, second clamping piece 31,33 with the gravity of silicon rod), and first clamping member 31 and the second folder At least one of gripping member 33 be it is mobilizable, in the present embodiment, the second clamping piece 33 be it is mobilizable, therefore, to prevent Silicon rod 100 has an impact the loosening of the horizontal accumbency of its holding in the vertical direction, specifically provides locking control piece, for by the Two clamping pieces 33 are controlled in lock state.Wherein, the locking control piece includes braking rack gear 352 and with brake power source Braking member 354 is fastened using braking member 354 in braking rack gear 352, it can be ensured that the second clamping piece 33 steadilys maintain always In lock state.

First clamping member 31 and the second clamping piece 33 in silicon rod clamping device 3 can also be designed as can be rotated.Therefore, In one clamping piece 31, the first clamping part can be able to realize spinning motion relative to the first Holding seat by first rotating shaft, the In two clamping pieces 33, the second clamping part can be able to realize spinning motion relative to the second Holding seat by the second shaft.Therefore, Silicon rod clamping device 3 further includes rotary drive mechanism, for driving at least one in first clamping member 31 and the second clamping piece 33 Person rotates to drive the silicon rod 100 clamped to rotate, that is, the first clamping part and the second clamping in driving first clamping member 31 At least one of second clamping part in part 33 rotates.

In some embodiments, configured with rotation on a clamping piece in first clamping member 31 and the second clamping piece 33 Driving mechanism using as active rotatable parts and another clamping piece is then as driven rotation component.The rotary drive mechanism can Driving this clamping piece to rotate and taking advantage of a situation again drives another clamping piece to rotate.Such as: in first clamping member 31 wherein It is upper to be configured with rotary drive mechanism, in this way, first clamping member 31 as active rotatable parts and the second clamping piece 33 then as from Turn dynamic component.In actual operation, when needing to rotate silicon rod 100, by the first of rotary drive mechanism driving linkage The first clamping part rotation in clamping piece 31 rubs using the first clamping part, silicon rod 100 and the second clamping part are mutual Power is wiped, takes advantage of a situation and silicon rod 100 (also including the second clamping part) is driven to rotate together, realize work surface or operating area in silicon rod 100 Adjustment, so as to continue to carry out grinding operation to work surface adjusted in silicon rod 100 or operating area, wherein silicon rod 100 Velocity of rotation and rotational angle can be controlled by rotary drive mechanism.Alternatively, being configured on the second clamping piece 33 wherein Have rotary drive mechanism, in this way, by the second clamping piece 33 as active rotatable parts and first clamping member 31 then as from turn Dynamic component.In actual operation, when needing to rotate silicon rod 100, by the second clamping of rotary drive mechanism driving linkage The second clamping part rotation in part 33, using the second clamping part, silicon rod 100 and the mutual frictional force of the first clamping part, It takes advantage of a situation and silicon rod 100 (also including the first clamping part) is driven to rotate together, realize the adjustment of work surface or operating area in silicon rod, from And it can continue to carry out work surface adjusted in silicon rod 100 or operating area grinding operation, wherein the rotation speed of silicon rod 100 Degree and rotational angle can be controlled by rotary drive mechanism.In some embodiments, it is pressed from both sides in first clamping member 31 and second Corresponding rotary drive mechanism is each configured in gripping member 33, the first clamping part and the second clamping piece in first clamping member 31 The second clamping part in 33 rotates under the control of corresponding rotary drive mechanism respectively, and driving silicon rod 100 (also includes first Clamping part) it rotates together, the adjustment of work surface or operating area in silicon rod is realized, after continuing to adjusting in silicon rod 100 Work surface or operating area carry out grinding operation, wherein the velocity of rotation and rotational angle of silicon rod 100 can by rotation drive Mechanism controls, wherein the second clamping part rotation in the first clamping part and the second clamping piece 33 in first clamping member 31 In the process, two rotary drive mechanisms will keep synchronous.Specific to the present embodiment, in Fig. 1 and silicon rod clamping device shown in Fig. 2 In, it is configured with rotary drive mechanism in first clamping member 31 wherein, in this way, by first clamping member 31 as actively rotation Component and the second clamping piece 33 are then used as driven rotation component.In specific implementation, rotary drive mechanism may be, for example, electric rotating Machine.

It should be noted that configuring rotary drive mechanism in first clamping member 31 in the present embodiment silicon rod clamping device (rotary drive mechanism is not configured on the second clamping piece 33) and on the second clamping piece 33 configure clamping drive mechanism 35 (first Clamping drive mechanism 35 is not configured on clamping piece 31) it is only a kind of exemplary illustration, in fact, clamping drive mechanism 35 and rotation Configuration of the driving mechanism in first clamping member 31 and the second clamping piece 33, can flexibly arrange in pairs or groups, and clamping silicon rod can be achieved and turn The technical effect of dynamic silicon rod.But, relative to other configuration modes, Fig. 1 and the present embodiment silicon rod shown in Fig. 2 clamping dress Set, also with structure it is simple, operate conveniently, the advantages that cost is relatively low, easy to maintain.

Silicon rod grinding device 5 is set at the processing position of silicon rod processing platform 11, for what is clamped to silicon rod clamping device 3 Silicon rod to be processed carries out grinding operation.As previously mentioned, can be by silicon rod 100 to be processed with accumbency side by silicon rod clamping device 3 Formula is clamped, and therefore, what the silicon rod 100 that silicon rod grinding device 5 places accumbency carried out grinding operation use is exactly horizontal add Work mode.It should be noted that silicon rod grinding device 5 can have different variations for the silicon rod of different kenels.Such as: if silicon rod 100 be silicon single crystal rod, then silicon rod grinding device 5 is either the circle of contact and corase grinding device are also possible to round as a ball and fine grinding device；If Silicon rod 100 is polycrystalline silicon rod, then silicon rod grinding device 5 is either corase grinding device is also possible to chamfering and fine grinding device.

Silicon rod grinding device 5 is double-side polishing apparatus, and main includes holding seat 51 and at least a pair of of grinding tool 53, wherein holds seat 51 can be moved laterally by the relatively described silicon rod processing platform of a transverse moving mechanism, at least a pair of of grinding tool 53 be arranged oppositely in It holds on seat 51, for being put under the drive for holding 51 transverse shifting of seat to accumbency on the silicon rod clamping device 3 being located at the position of processing district The silicon rod 100 set carries out grinding operation.

Holding seat 51 can be moved laterally by transverse moving mechanism with respect to silicon rod processing platform 11.In the present embodiment, In Be arranged on silicon rod processing platform 11 along X to sliding rail 511, hold sliding slot (sliding slot and the sliding rail 511 that seat 51 opened up by bottom Match) and it pillows on sliding rail 511, wherein the quantity of sliding rail 511 may be, for example, two, the setting and right parallel of two sliding rails 511 Ying Yu holds the opposite sides of seat 51.The transverse moving mechanism may also include laterally driven source, specifically, the laterally driven source It may include horizontal drive motor and drive screw (not showing in the drawings) that the drive screw can be along X to setting.Actually answering In, by the cooperation of horizontal drive motor and drive screw, can drive socket 51 along sliding rail 511 along X to moving laterally.

At least a pair of of grinding tool 53 is arranged oppositely in holding on seat 51.In the silicon rod grinding device 5 of the present embodiment, seat 51 is being held On be provided with a pair of of grinding tool 53, this between grinding tool 53 there are for accommodate silicon rod 100 grinding space.

If silicon rod 100 to be processed is silicon single crystal rod, which is the silicon cube that section is substantially in class rectangle, tool There are four side, the connection faceted pebble in the angle R is formed between two neighboring side, therefore, this can be to positioned at institute to grinding tool 53 It states a pair of of side opposite in the silicon single crystal rod in grinding space or a pair of of connection faceted pebble carries out corresponding grinding operation.If to be added The silicon rod 100 of work is polycrystalline silicon rod, which is then the silicon cube of rectangular in cross-section, and there are four side and four ribs for tool Angle, therefore, this can be to a pair of of side or a pair opposite in the polycrystalline silicon rod being located in the grinding space even to grinding tool 53 It connects corner angle and carries out corresponding grinding operation.Further, each grinding tool 53 further includes grinding wheel 531 and rotary electric machine 533, In, grinding wheel 531 and rotary electric machine 533 are configured on a grinding tool support 535, and grinding wheel 531 is controlled by rotary electric machine 533 and turns Dynamic, grinding tool support 535 can be more movably arranged at by a grinding tool driving and reversing mechanism and be held on seat 51.In the present embodiment, seat 51 is being held Along the slide 537 (or sliding rail) of Y-direction (Y-direction with the X to mutually orthogonal), grinding tool support 535 opened up by bottom for upper setting Sliding slot (sliding slot is matched with slide 537) and pillow on slide 537 (or sliding rail).The grinding tool driving and reversing mechanism can also wrap Advance and retreat driving source is included, for driving grinding tool 53 to move forward and backward along slide 537 or sliding rail.The advance and retreat driving source may include into Motor and drive screw (not showing in the drawings) are moved back, the drive screw can be arranged along Y-direction.In practical applications, by into The cooperation of motor and drive screw is moved back, grinding tool support 535 and grinding wheel 531 thereon and rotary electric machine 533 can be driven along slide 537 (or sliding rails) move laterally along Y-direction, and grinding wheel 531 is enabled to complete the feeding in grinding space.Grinding wheel 531 in grinding tool 53 Frosted particle can according to the grinding operation in different work process and have different granularities.

In practical applications, for silicon rod grinding device 5, each grinding tool 53 can be in the driving lower edge of grinding tool driving and reversing mechanism Y-direction moves laterally to adjust the amount of feeding of 53 medium plain emery wheel of grinding tool, recycles transverse moving mechanism can drive socket 51 and thereon Grinding tool 53 with respect to silicon rod processing platform 11 along X to making transverse movement to carry out to silicon rod 100 clamped by silicon rod clamping device 3 Grinding operation.

The different work process implemented below for different silicon rods is illustrated respectively.

By silicon rod be silicon single crystal rod and implement the circle of contact and corase grinding operation for, at this point, silicon rod grinding device 5 be the circle of contact and Roughly grind device.The circle of contact and corase grinding device include holding seat 51 and at least a pair of of grinding tool 53, wherein holding seat 51 can be by one laterally The relatively described silicon rod processing platform of mobile mechanism along X to moving laterally, each of at least a pair of of grinding tool 53 grinding tool 53 by It controls in a grinding tool driving and reversing mechanism and along X to moving laterally, at least a pair of of grinding tool 53 is arranged oppositely in holding on seat 51, is stayed between the two There is the accommodation space for accommodating silicon rod, therefore, after silicon rod 100 is placed in the accommodation space, at least a pair of of grinding tool 53 In grinding wheel 531 corresponding corase grinding operation can be carried out to opposite a pair of of side in silicon rod 100 or to opposite in silicon rod 100 A pair of connection faceted pebble carries out corresponding circle of contact operation.

About circle of contact operation, generally, positioning adjustment is carried out to silicon rod 100 using silicon rod clamping device 3, is driven using rotation Motivation structure drives at least one of first clamping member 31 and the second clamping piece 33 to rotate to drive 100 turns of silicon rod clamped It is dynamic so that a pair of of connecting edge face in silicon rod 100 corresponds to a pair of of grinding tool 53, by grinding tool 53 to the connection faceted pebble of silicon rod 100 into Row circle of contact operation.The circle of contact operation can for example, carries out positioning adjustment phase to silicon rod 100 with using silicon rod clamping device 3 Cooperation drives the grinding wheel 531 in grinding tool 53 to rotate according to the amount of feeding (grinding wheel in driving grinding tool 53 moves laterally along Y-direction) And drive grinding tool 53 with respect to silicon rod processing platform 11 along X to making transverse movement with real to silicon rod 100 by the grinding wheel 531 in grinding tool 53 Grinding is applied, completion is once slightly cut；Positioning adjustment is carried out to silicon rod 100 again by silicon rod clamping device 3, repeats above-mentioned grinding step Suddenly, first pair of connection faceted pebble and its adjacent domain progress are repeatedly slightly cut and to second pair of connection faceted pebble and its neighbour to realize Near field progress is repeatedly slightly cut, so that the connection between each connection faceted pebble and adjacent side forms preliminary arc and connects.

In a specific example, circle of contact operation further comprises: first with using silicon rod clamping device 3 to silicon rod 100 into Row positioning adjustment；Initially, when silicon rod clamping device 3 clamps silicon rod 100, the side of silicon rod 100 corresponds to the circle of contact and thick A pair of of grinding tool 33 in mill apparatus therefore can be for example including by carrying out positioning adjustment to silicon rod 100 using silicon rod clamping device 3 Positive (or reverse) 45 ° of the rotation of silicon rod 100 is driven, so that first pair of connecting edge face in silicon rod 100 corresponds to the circle of contact and corase grinding A pair of of grinding tool 53 in device enables grinding tool 53 make traverse feed along Y-direction according to the amount of feeding, and the grinding wheel 531 in rotating grinding tool 53 is simultaneously Driving grinding tool 53 along X to make transverse movement with by the grinding wheel 531 in grinding tool 53 in silicon rod 100 first pair of connection faceted pebble progress It slightly cuts for the first time；Silicon rod 100 is driven to rotate forward 5 ° by silicon rod clamping device 3, the grinding wheel 531 in rotating grinding tool 53 simultaneously drives mill Tool 53 along X to make transverse movement with by the grinding wheel 531 in grinding tool 53 in silicon rod 100 first pair of connection faceted pebble carry out for the second time Slightly cut；Silicon rod 100 is driven to rotate forward 80 ° by silicon rod clamping device 3, so that second in silicon rod 100 pair connecting edge face is corresponding A pair of of grinding tool 53 in the circle of contact and corase grinding device, grinding wheel 531 in rotating grinding tool 53 simultaneously drive grinding tool 53 along X to making laterally fortune It moves slightly cut for the first time to second pair of connection faceted pebble in silicon rod 100 by the grinding wheel 531 in grinding tool 53；It is clamped and is filled by silicon rod Set 3 drive silicon rods 100 and rotate forward 5 °, the grinding wheel 531 in rotating grinding tool 53 and drive grinding tool 53 along X to make transverse movement with by Grinding wheel 531 in grinding tool 53 slightly cuts second pair of connection faceted pebble in silicon rod 100 for the second time；By 3 band of silicon rod clamping device Dynamic silicon rod 100 rotates forward 5 °, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by grinding tool Grinding wheel 531 in 53 carries out third time to second pair of connection faceted pebble in silicon rod 100 and slightly cuts；Silicon is driven by silicon rod clamping device 3 Stick 100 rotates forward 80 °, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by grinding tool 53 Grinding wheel 531 in silicon rod 100 first pair of connection faceted pebble carry out third time slightly cut.Silicon single crystal rod as silicon rod 100 is implemented For details, reference can be made to Fig. 3, Fig. 3 to be shown as state change signal of the silicon single crystal rod in circle of contact operation for the state of above-mentioned circle of contact operation Figure.

It should be strongly noted that driving silicon rod 100 to rotate respective corners by silicon rod clamping device 3 in aforementioned circle of contact operation Degree, such as: silicon rod clamping device 3 drives silicon rod 100 to rotate forward 5 °, is not unique implementation, in other optional realities It applies in example, is suitable for adjusting the angle, for example, 3 ° to 7 °, including 3 °, 4 °, 5 °, 6 °, 7 ° or other angles, correspondingly, by silicon rod Angle is then adaptively adjusted in the case where clamping device 3 drives silicon rod 100 to rotate forward 80 °.Following table one is please referred to, table one is shown as The sample situation of rotational angle each numerical value within the scope of 3 ° to 7 °.

Table one

Above-mentioned circle of contact operation process is only the embodiment in circle of contact operation, but is not limited thereto, such as: first with silicon Stick clamping device 3 drives silicon rod 100 to rotate forward 40 °, so that first in silicon rod 100 pair connecting edge face is corresponding to the circle of contact and slightly A pair of of grinding tool 53 in mill apparatus, grinding wheel 531 in rotating grinding tool 53 simultaneously drive grinding tool 53 along X to making transverse movement by grinding tool Grinding wheel 531 in 53 slightly cut for the first time to first pair of connection faceted pebble in silicon rod 100；Silicon is driven by silicon rod clamping device 3 Stick 100 rotates forward 5 °, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by grinding tool 53 Grinding wheel 531 slightly to be cut for the second time to first pair of connection faceted pebble in silicon rod 100；Silicon rod is driven by silicon rod clamping device 3 100 rotate forward 5 °, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by grinding tool 53 Grinding wheel 531 is slightly cut with carrying out third time to first pair of connection faceted pebble in silicon rod 100；Silicon rod 100 is driven by silicon rod clamping device 3 80 ° are rotated forward, the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by the sand in grinding tool 53 Second pair of connection faceted pebble in 531 pairs of silicon rods 100 is taken turns slightly cut for the first time；Drive silicon rod 100 positive by silicon rod clamping device 3 5 ° of rotation, grinding wheel 531 in rotating grinding tool 53 simultaneously drive grinding tool 53 along X to making transverse movement by the grinding wheel 531 in grinding tool 53 Second pair of connection faceted pebble in silicon rod 100 is slightly cut for the second time；Silicon rod 100 is driven to rotate forward by silicon rod clamping device 3 5 °, grinding wheel 531 in rotating grinding tool 53 and drive grinding tool 53 along X to make transverse movement with by the grinding wheel 531 in grinding tool 53 to silicon Second pair of connection faceted pebble in stick 100 carries out third time and slightly cuts.

After completing circle of contact operation, positioning adjustment is carried out to silicon single crystal rod by silicon rod clamping device 3, so that in silicon single crystal rod A pair of of side correspond to a pair of of grinding tool 33, corase grinding operation is carried out by side of the grinding tool 33 to silicon single crystal rod.

Corase grinding operation further comprises: positioning adjustment is carried out to silicon rod 100 first with using silicon rod clamping device 3, so that The first opposite side face in silicon rod 100 corresponds to the circle of contact and roughly grinds a pair of of grinding tool 53 in device, enables grinding tool 53 according to the amount of feeding along Y To making traverse feed, the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by the sand in grinding tool 53 It roughly grinds the first pair of side taken turns in 531 pairs of silicon rods 100；Silicon rod 100 positive (or reverse) is driven to turn by silicon rod clamping device 3 It is 90 ° dynamic, so that the second opposite side face in silicon rod 100 corresponds to the circle of contact and roughly grinds a pair of of grinding tool 53 in device, rotating grinding tool 53 In grinding wheel 531 and drive grinding tool 53 along X to make transverse movement with by the grinding wheel 531 in grinding tool 53 to second in silicon rod 100 Side is roughly ground.Wherein, the corase grinding operation of any pair of side can for example, provides an amount of feeding, drives a pair of of grinding tool Grinding wheel 531 in 53 is along X to a pair of of side by having ground silicon rod 100 since transverse shifting inside outside；A pair of of grinding wheel 531 is ground to After 100 innermost end of silicon rod (for example, the innermost end of silicon rod 100 can be known as bottom) and stopping after silicon rod 100 is passed through, then is increased Add an amount of feeding, drives a pair of of grinding wheel along X to a pair of of the side for grinding silicon rod 100 by interior transverse shifting outward；A pair of of grinding wheel After 531 outermost ends (for example, the outermost end of silicon rod 100 can be known as top) for being ground to silicon rod 100 and pass through silicon rod 100 it After stop, continuing growing an amount of feeding, drive a pair of of grinding wheel 531 along X to by transverse shifting grinds silicon rod 100 inside outside；Such as This, grinding increases the amount of feeding, and it is reversed to grind, increase the amount of feeding, grinding, can be by a pair of silicon rod 100 after being repeated several times Side is ground to preset size.Silicon single crystal rod as silicon rod 100 implements the state of above-mentioned corase grinding operation, and for details, reference can be made to figures 4, Fig. 4 are shown as state change schematic diagram of the silicon single crystal rod in corase grinding operation.

By taking silicon single crystal rod implements round as a ball and fine grinding operation as an example, at this point, silicon rod grinding device 5 is round as a ball and fine grinding dress It sets.Carrying out round as a ball and fine grinding operation to silicon single crystal rod by round as a ball and fine grinding device can generally comprise: round as a ball operation and fine grinding operation.

Described round as a ball and fine grinding device includes holding seat 51 and at least a pair of of grinding tool 53, wherein holding seat 51 can be by one laterally The relatively described silicon rod processing platform of mobile mechanism along X to moving laterally, each of at least a pair of of grinding tool 53 grinding tool 53 by It controls in a grinding tool driving and reversing mechanism and along X to moving laterally, at least a pair of of grinding tool 53 is arranged oppositely in holding on seat 51, is stayed between the two There is the accommodation space for accommodating silicon rod, therefore, after silicon rod 100 is placed in the accommodation space, in a pair of of grinding tool 53 Grinding wheel 531 can carry out corresponding round as a ball and fine grinding operation to silicon rod 100.Wherein, described round as a ball and fine grinding device medium plain emery wheel The granularity of frosted particle is less than the circle of contact and roughly grinds the granularity of the frosted particle of device medium plain emery wheel.

Round as a ball operation further comprises: being positioned and is rotated silicon rod 100 to silicon rod 100 using silicon rod clamping device 3, enable Grinding tool 53 makees traverse feed along Y-direction according to the amount of feeding, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 lateral to making along X Movement is round as a ball grind by each connection faceted pebble of the grinding wheel 531 in grinding tool 53 to silicon rod 100, so that the company of silicon rod 100 It connects faceted pebble and is ground to preset size and whole rounding, that is, connection faceted pebble and side rounding off.Monocrystalline as silicon rod 100 The state that silicon rod implements above-mentioned round as a ball operation is shown as state of the silicon single crystal rod in round as a ball operation for details, reference can be made to Fig. 5, Fig. 5 and shows It is intended to.

Fine grinding operation further comprises: by carrying out positioning adjustment to silicon rod 100 using silicon rod clamping device 3, so that silicon rod The first opposite side face in 100 corresponds to a pair of of grinding tool 53 in round as a ball and fine grinding device 4, enable grinding tool 53 it is opposite hold seat 51 according into Along Y-direction make traverse feed to amount, the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 along X to making transverse movement by grinding tool Grinding wheel 531 in 53 refines first pair of side in silicon rod 100；Drive silicon rod 100 positive by silicon rod clamping device 3 (or reverse) 90 ° of rotation, so that the second opposite side face in silicon rod 100 corresponds to a pair of of grinding tool 53 in round as a ball and fine grinding device 4, The second grinding wheel 44 in rotating grinding tool 53 and drive grinding tool 53 along X to make transverse movement with by the grinding wheel 531 in grinding tool 53 to silicon It refines second pair of side in stick 100.Wherein, the fine grinding operation of any pair of side can for example, an amount of feeding is provided, Drive grinding wheel 531 in a pair of of grinding tool 53 along X to a pair of of side by having ground silicon rod 100 since transverse shifting inside outside；It is a pair of Grinding wheel 531 is ground to after 100 innermost end of silicon rod (for example, the innermost end of silicon rod 100 can be known as bottom) and passes through silicon rod 100 Stop later, be further added by an amount of feeding, drives a pair of of grinding wheel along X to a pair for grinding silicon rod 100 by interior transverse shifting outward Side；A pair of of grinding wheel 531 is ground to after the outermost end (for example, the outermost end of silicon rod 100 can be known as top) of silicon rod 100 simultaneously Stop after the silicon rod 100, continue growing an amount of feeding, drives a pair of of grinding wheel 531 along X to by transverse shifting is ground inside outside Grind silicon rod 100；In this way, grinding, increases the amount of feeding, and it is reversed to grind, increase the amount of feeding, grinding, can be by silicon after being repeated several times A pair of of side of stick 100 is ground to preset size.Silicon single crystal rod as silicon rod 100 implements the state tool of above-mentioned fine grinding operation Body can be found in Fig. 6, and Fig. 6 is shown as status diagram of the silicon single crystal rod in fine grinding operation.

By taking polycrystalline silicon rod implements corase grinding operation as an example, at this point, silicon rod grinding device 5 is to roughly grind device.

The corase grinding device includes holding seat 51 and at least a pair of of grinding tool 53, wherein holding seat 51 can be by a transverse shifting machine For the relatively described silicon rod processing platform of structure along X to moving laterally, each of at least a pair of of grinding tool 53 grinding tool 53 is controlled by one Grinding tool driving and reversing mechanism and along X to moving laterally, at least a pair of of grinding tool 53 is arranged oppositely in holding on seat 51, and there are for holding between the two Receive the accommodation space of silicon rod, therefore, the grinding wheel 531 after silicon rod 100 is placed in the accommodation space, in a pair of of grinding tool 53 Corresponding corase grinding operation can be carried out to a pair of of side of silicon rod 100.

Carrying out corase grinding operation to polycrystalline silicon rod by corase grinding device can generally comprise: first with silicon rod clamping device 3 to polycrystalline Silicon rod carries out positioning adjustment, so that the first opposite side face of polycrystalline silicon rod 100 corresponds to a pair of of grinding tool 53 in corase grinding device 5；It enables Grinding tool 53 makees traverse feed along Y-direction according to the amount of feeding, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 33 lateral to making along X Movement is to roughly grind first pair of side in silicon rod 100 by the grinding wheel 531 in grinding tool 53；It is driven by silicon rod clamping device 3 Positive (or reverse) 90 ° of the rotation of silicon rod 100, so that the second opposite side face in silicon rod 100 corresponds to the opposite grinding in corase grinding device 5 Tool 53, grinding wheel 531 in rotating grinding tool 53 simultaneously drive grinding tool 53 along X to making transverse movement with right by the grinding wheel 531 in grinding tool 53 It roughly grinds second pair of side in silicon rod 100.Wherein, the corase grinding operation of any pair of side can for example, provides a feeding Amount drives grinding wheel 531 in a pair of of grinding tool 53 along X to a pair of of side by having ground silicon rod 100 since transverse shifting inside outside；One Grinding wheel 531 is ground to after 100 innermost end of silicon rod (for example, the innermost end of silicon rod 100 can be known as bottom) and passes through silicon rod Stop after 100, be further added by an amount of feeding, a pair of of grinding wheel is driven to grind the one of silicon rod 100 to by interior transverse shifting outward along X To side；A pair of of grinding wheel 531 is ground to after the outermost end (for example, the outermost end of silicon rod 100 can be known as top) of silicon rod 100 And pass through and stop after silicon rod 100, continue growing an amount of feeding, drive a pair of of grinding wheel 531 along X to by outside inside transverse shifting Lai Grind silicon rod 100；It is reversed to grind in this way, grinding, increases the amount of feeding, increase the amount of feeding, grinding can will after being repeated several times A pair of of side of silicon rod 100 is ground to preset size.Polycrystalline silicon rod as silicon rod 100 implements the state of above-mentioned corase grinding operation For details, reference can be made to Fig. 7, Fig. 7 to be shown as state change schematic diagram of the polycrystalline silicon rod in corase grinding operation.

By taking polycrystalline silicon rod implements chamfering and fine grinding operation as an example, at this point, silicon rod grinding device 5 is chamfering and fine grinding dress It sets.Carrying out chamfering and fine grinding operation to silicon single crystal rod by chamfering and fine grinding device can generally comprise: chamfering operation and fine grinding operation.

The chamfering and fine grinding device include holding seat 51 and at least a pair of of grinding tool 53, wherein holding seat 51 can be by one laterally The relatively described silicon rod processing platform of mobile mechanism along X to moving laterally, each of at least a pair of of grinding tool 53 grinding tool 53 by It controls in a grinding tool driving and reversing mechanism and along X to moving laterally, at least a pair of of grinding tool 53 is arranged oppositely in holding on seat 51, is stayed between the two There is the accommodation space for accommodating silicon rod, therefore, after silicon rod 100 is placed in the accommodation space, in a pair of of grinding tool 53 Grinding wheel 531 can carry out corresponding chamfering operation to a pair of of corner angle opposite in silicon rod 100 or to a pair opposite in silicon rod 100 Side carries out corresponding fine grinding operation.Wherein, the granularity of the frosted particle of the chamfering and fine grinding device medium plain emery wheel is less than The granularity of the frosted particle of the corase grinding device medium plain emery wheel.

Chamfering operation further comprises: carrying out positioning adjustment, such as band to silicon rod 100 using using silicon rod clamping device 3 Dynamic silicon rod 100 rotates 45 °, so that first pair of corner angle in silicon rod 100 correspond to a pair of of grinding tool in chamfering and fine grinding device 5 53, enabling grinding tool 53, holding seat 51 makees traverse feed along Y-direction according to the amount of feeding relatively, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives mill Tool 53 is along X to making transverse movement to be ground by first pair corner angle of the grinding wheel 531 in grinding tool 53 to silicon rod 100, so that silicon First pair of corner angle of stick 100 form fillet surface through grinding；Silicon rod 100 positive (or reverse) is driven to turn by silicon rod clamping device 3 It is 90 ° dynamic, so that second pair of corner angle in silicon rod 100 correspond to a pair of of grinding tool 53 in chamfering and fine grinding device 5, rotating grinding tool 53 In grinding wheel 531 and drive grinding tool 53 along X to making transverse movement with second pair by the grinding wheel 531 in grinding tool 53 to silicon rod 100 Corner angle are ground, so that second pair of corner angle of silicon rod 100 form fillet surface through grinding.Polycrystalline silicon rod as silicon rod 100 The state for implementing above-mentioned chamfering operation is shown as state of the polycrystalline silicon rod in chamfering operation for details, reference can be made to Fig. 8, Fig. 8 and illustrates Figure.

Fine grinding operation further comprises: by carrying out positioning adjustment to silicon rod 100 using silicon rod clamping device 3, such as driving Silicon rod 100 rotates 45 °, so that the first opposite side face in silicon rod 100 corresponds to a pair of of grinding tool 53 in chamfering and fine grinding device 5, Enabling grinding tool 53, holding seat 51 makees traverse feed along Y-direction according to the amount of feeding relatively, and the grinding wheel 531 in rotating grinding tool 53 simultaneously drives grinding tool 53 Along X to making transverse movement to be refined by first pair side of the grinding wheel 531 in grinding tool 53 to silicon rod 100；It is clamped by silicon rod Device 3 drives positive (or reverse) 90 ° of the rotation of silicon rod 100, so that the second opposite side face in silicon rod 100 corresponds to chamfering and fine grinding A pair of of grinding tool 53 in device 5, grinding wheel 531 in rotating grinding tool 53 simultaneously drive grinding tool 53 along X to making transverse movement by grinding tool Grinding wheel 531 in 53 refines second pair of side of silicon rod 100.Wherein, the fine grinding operation of any pair of side can be wrapped for example It includes: an amount of feeding is provided, drive grinding wheel 531 in a pair of of grinding tool 53 along X to by having ground silicon rod 100 since transverse shifting inside outside A pair of of side；A pair of of grinding wheel 531 be ground to 100 innermost end of silicon rod (for example, the innermost end of silicon rod 100 can be known as bottom) it Afterwards and stopping after silicon rod 100 is passed through, is further added by an amount of feeding, a pair of of grinding wheel is driven to grind along X to by interior transverse shifting outward Grind a pair of of side of silicon rod 100；A pair of of grinding wheel 531 is ground to the outermost end of silicon rod 100 (for example, can be by the outermost end of silicon rod 100 Referred to as top) stop later and after silicon rod 100, an amount of feeding is continued growing, drives a pair of grinding wheel 531 along X to by outer Transverse shifting grinds silicon rod 100 inside；In this way, grinding, increases the amount of feeding, and reversed to grind, the increase amount of feeding, grinding, repeatedly After for several times, a pair of of side of silicon rod 100 can be ground to preset size.On polycrystalline silicon rod as silicon rod 100 is implemented The state for stating fine grinding operation is shown as polycrystalline silicon rod for details, reference can be made to Fig. 9, Fig. 9 and is refining the status diagram in operation.

It should be noted that above are only exemplary illustration, it is not intended to limit the protection scope of the application, for example, in needle To as the second silicon rod grinding device the chamfering of chamfering and fine grinding device and the processing job description of fine grinding device in, be first to hold The chamfering operation of polycrystalline silicon rod of having gone performs the fine grinding operation of polycrystalline silicon rod again, but is not limited thereto, in other embodiment party In formula, first carry out executed after the fine grinding operation of polycrystalline silicon rod again polycrystalline silicon rod chamfering operation be also it is feasible, still should belong to this The protection scope of application.

Certainly, the application silicon rod processing machine may also include other devices.For example, in one embodiment, the application silicon rod adds Work machine may include flatness detector, for carrying out planar smoothness detection to the silicon rod 100 after completion grinding operation.In reality In the operation of border, when carrying out planar smoothness detection, the tested surface is determined according to the relative distance value of each test point Flatness is then by determining the difference in these relative distance values measured between maxima and minima, if described Difference is less than standard value or falls into critical field, then shows that the flatness of the tested surface meets specification.Utilize flatness Detector, on the one hand, can by the planar smoothness to silicon rod 100 detect examine silicon rod after each processing operation whether Meet product requirement, with the effect of each processing operation of determination；On the other hand, it is detected by the planar smoothness to silicon rod 100, Also the wear condition of processing component in each processing unit (plant) can be obtained indirectly, so that real-time perfoming is calibrated or is corrected, or even dimension It repairs or replaces.

In one embodiment, the application silicon rod processing machine may also include silicon rod discharge mechanism, for that will complete grinding operation Silicon rod later is unloaded from the processing position of silicon rod processing platform.Certainly, dress is loaded corresponding to the silicon rod mentioned in aforementioned It sets, the silicon rod discharge mechanism and the silicon rod loading attachment can be independent two devices, implement silicon rod unloading respectively and make Industry and silicon rod loading operation, but be not limited thereto, the silicon rod discharge mechanism and the silicon rod loading attachment are also possible to close Two implement silicon rod unloading operation and silicon rod loading operation by a device (device can be described as silicon rod handler) for one.

From the foregoing, it will be observed that the application silicon rod processing machine, including base, silicon rod clamping device and silicon rod grinding device, wherein Silicon rod to be processed is clamped in a manner of accumbency using silicon rod clamping device, and passes through transverse direction using silicon rod grinding device It is mobile that grinding operation is carried out to the silicon rod of accumbency, realize that silicon rod completes grinding operation under accumbency mode, simple with structure, Silicon rod is kept for the advantages that stability is high, the traveling of silicon rod grinding device is stable and silicon rod grinding efficiency is high.

Referring to Fig. 10, silicon rod processing machine implements the process signal of silicon rod processing operation in display one embodiment of the application Figure.As shown in Figure 10, the process for implementing silicon rod processing operation can comprise the following steps that

Step S11 loads silicon rod to be processed to the processing position of silicon rod processing platform in a manner of accumbency.In this reality It applies in example, in step s 11, silicon rod to be processed is loaded in a manner of accumbency to can specifically wrap at the processing position of processing platform It includes: silicon rod to be processed can smoothly be delivered into silicon rod clamping device 3 first clamping member 31 and the second folder in a manner of accumbency In grasping part between gripping member 33.In fact, in step s 11, also planar smoothness inspection can be carried out to silicon rod to be processed The operation such as survey and position adjustment.

Step S13 is clamped the silicon rod being located at processing position in a manner of accumbency.In the present embodiment, in step In S13, silicon rod is clamped using silicon rod clamping device.The silicon rod clamping device may include the first clamping being oppositely arranged Part and the second clamping piece, and it is upper configured with clamping driving machine at least one of described first clamping member and the second clamping piece Structure.In practical applications, one in corresponding first clamping member and the second clamping piece is driven to make by the clamping drive mechanism Transverse shifting or first clamping member and the second clamping piece move laterally jointly, by between them accumbency mode place Silicon rod is clamped.

Step S15 carries out corresponding grinding operation to the silicon rod clamped.In the present embodiment, in step S15, benefit Grinding operation is carried out to by the silicon rod of silicon rod gripping apparatus grips with silicon rod grinding device.The silicon rod grinding device may include holding Seat and object are set at least a pair of of the grinding tool held on seat.In practical applications, it is required according to grinding operation, first by silicon rod Clamping device carries out positioning adjustment to silicon rod, then drives grinding tool to make traverse feed according to the amount of feeding by silicon rod grinding device, with Afterwards again by silicon rod grinding device driving grinding tool along the length direction of silicon rod make transverse movement with by the grinding wheel in grinding tool to silicon rod Carry out grinding operation.According to the characteristic of silicon rod, the structure of the silicon rod grinding device and its corresponding grinding operation content also can It is variant.

If the silicon rod is silicon single crystal rod, the silicon rod grinding device 5 is either the circle of contact and corase grinding device can also be with It is round as a ball and fine grinding device, wherein the circle of contact and corase grinding device are used to carry out silicon single crystal rod the circle of contact and corase grinding operation, described Round as a ball and fine grinding device is used to carry out silicon single crystal rod round as a ball and fine grinding operation.If the silicon rod is polycrystalline silicon rod, silicon rod is ground Mill apparatus is either corase grinding device is also possible to chamfering and fine grinding device, wherein the corase grinding device is used for polycrystalline silicon rod Corase grinding operation is carried out, the chamfering and fine grinding device are used to carry out polycrystalline silicon rod chamfering and fine grinding operation.As for for difference Silicon rod performed by specific grinding operation see detailed description above, details are not described herein.

In the process of above-mentioned implementation silicon rod processing operation, silicon rod to be processed can be clamped in a manner of accumbency and to cross Sleeping silicon rod carries out grinding operation, realizes that silicon rod completes grinding operation under accumbency mode, and there is silicon rod to keep stability height, silicon The advantages that traveling of stick grinding device is stable and silicon rod grinding efficiency is high.

Please refer to Figure 11 and Figure 12, wherein Figure 11 is silicon rod processing machine in another embodiment of the application under a certain visual angle Schematic perspective view, Figure 12 be another embodiment of the application in silicon rod processing machine top view.In the present embodiment, this Shen Please silicon rod processing machine be for silicon rod carry out grinding operation, herein, the silicon rod be (class) rectangle silicon rod, either Silicon single crystal rod can also should belong to the protection scope of the application with polycrystalline silicon rod.

Either silicon single crystal rod also or polycrystalline silicon rod, can all carry out accordingly being, for example, flour milling, chamfering, barreling or round as a ball Deng processing operation, and these processing operations can be implemented by silicon rod processing machine described herein.

In conjunction with Figure 11 and Figure 12, the application silicon rod processing machine includes: base 2, silicon rod conversion equipment 4, the grinding of the first silicon rod Device 6 and the second silicon rod grinding device 8.

Basic components of the base 2 as the application silicon rod processing machine have silicon rod processing platform 21, wherein the silicon rod Processing platform can process the specific job content of operation according to silicon rod and be equipped with multiple function positions.Specifically, in the present embodiment In, the silicon rod processing platform can include at least pretreatment position, the first processing position and the second processing position.

Silicon rod conversion equipment 4 be set to the silicon rod processing platform centered region, for by silicon rod 200 to be processed with cross Sleeping mode is clamped and is processed its pretreatment position on silicon rod processing platform 21, the first processing position and second It is converted between position.4 rotary setting of silicon rod conversion equipment is on silicon rod processing platform 21, in the present embodiment, silicon rod converting means Setting 4 includes: conveying ontology 41；Silicon rod clamping device 43 on conveying ontology 41, for giving silicon rod in a manner of accumbency Clamping；Driving mechanism is converted, for driving the conveying rotation of ontology 41 to drive silicon rod clamping device 43 and its clamped silicon rod 200 conversion processing positions.

As previously mentioned, the silicon rod processing platform in the present embodiment includes pretreatment position, the first processing position, Yi Ji Two processing positions, in some embodiments, the quantity for conveying the silicon rod clamping device 43 on ontology 41 may be configured as one, benefit With conveying ontology 41, this silicon rod clamping device 43 and its clamped silicon rod 200 are being pre-processed into position, the first processing district Position and the second processing position conversion.In some embodiments, to improve silicon rod processing efficiency, the silicon on ontology 41 is conveyed The quantity of stick clamping device 43 is settable multiple, each silicon rod clamping device 43 can clamp at least one silicon rod.For example, defeated The quantity for sending the silicon rod clamping device 43 on ontology 41 is three, to add with pretreatment position, the first processing position and second These function positions of work area position are adapted.Further, these three silicon rod clamping devices 43 angle set between any two It is consistent with the angular distribution of three function positions between any two.In this way, as the corresponding Mr. Yu of some silicon rod clamping device 43 When one function position, inevitably, other two silicon rod clamping devices 43 are also corresponding with other two function positions respectively. In this way, in continuous productive process, any moment, when being clamped with a silicon rod on each silicon rod clamping device 43 and silicon rod clamps When device 43 is corresponding with function position, then these silicon rods, which are located at corresponding a certain function position, executes corresponding add Work industry, such as: the silicon rod positioned at pretreatment position can carry out pre-treatment job, and the silicon rod positioned at the first processing position can carry out First grinding operation, the silicon rod positioned at the second processing position can carry out the second grinding operation.In a kind of optional embodiment, institute State the pretreatment position on silicon rod processing platform, the first processing position and the second processing position is in 120 ° of distributions between any two, Therefore, correspondingly, three silicon rod clamping devices 43 on ontology 51 are conveyed between any two also in 120 ° of distributions.In this implementation In example, conveying ontology 51 can in disk form or circular ring shape.Certainly, the quantity of silicon rod clamping device 43 can be subject to according to actual needs Change and be not limited thereto, for example, the function position that the quantity of silicon rod clamping device 43 can be arranged according to silicon rod processing platform Quantity depending on.For example, if the silicon rod processing platform is set there are four function position, it is two neighboring in four function positions In 90 ° of distributions between function position, then, silicon rod conversion equipment 4 can configure four silicon rod clamping devices, four silicon rods clamping Also in 90 ° of distributions between two neighboring silicon rod clamping device in device.

Conveying ontology 41 is controllable by the driving of conversion driving mechanism and rotates, and the rotation by conveying ontology 41 is realized The silicon rod clamping device 43 on ontology 41 and the silicon rod 200 as clamped by silicon rod clamping device 43 are conveyed in different function positions Between converted.As previously mentioned, pretreatment position, the first processing position and the second processing position are in 120 ° between any two Distribution, three silicon rod clamping devices 43 between any two also in 120 ° of distributions, the rotational angle range of silicon rod conversion equipment 4 is ± 240°.It is assumed that being defined according to the trend of the sequence of the pretreatment position, the first processing position and the second processing position When for forward direction, in some embodiments, silicon rod conversion equipment 4 is enabled to rotate a certain predetermined angle (such as rotating forward 120 °), The silicon rod clamping device 43 and its clamped silicon rod 200 being initially positioned on pretreatment position can be transformed by pre-processing position First processing position, the silicon rod clamping device 43 being initially positioned on the first processing position and its clamped silicon rod 200 can be by First processing position is transformed into the second processing position, the silicon rod clamping device 43 that is initially positioned on the second processing position and its folded The silicon rod 200 held can be transformed into pretreatment position by the second processing position.In some embodiments, silicon rod conversion equipment is enabled The 4 a certain predetermined angles (such as rotating forward 120 ° or 240 ° of backwards rotation) of rotation, the silicon being initially positioned on the second processing position Stick clamping device 43 and its clamped silicon rod 200 can be transformed into pretreatment position by the second processing position, be initially positioned at the Silicon rod clamping device 43 and its clamped silicon rod 200 on one processing position can be transformed into second by the first processing position and add Work area position, the silicon rod clamping device 43 and its clamped silicon rod 200 being initially positioned on pretreatment position can be by pretreating zones Position is transformed into the first processing position.

In specific implementation, in one embodiment, the conversion driving mechanism can further comprise: conversion tooth band, Set on the side of conveying ontology 41；Driving motor and the connection driving motor and the linkage knot driven by the driving motor Structure, on the silicon rod processing platform of base 2, the linkage structure includes the rotate gear being meshed with the conversion tooth band. In this way, the rotate gear the driving motor driving under drive conveying ontology 41 rotation with drive silicon rod clamping device 43 and The conversion of silicon rod 200 clamped by it is completed to convey to other function position.In another embodiment, the conversion driving machine Structure can further comprise: rotation axis and the rotary electric machine of driving rotation axis rotation, wherein conveying ontology 41 is turned by rotation axis It is dynamic to be connected on base 2.In this way, being rotated using rotation axis described in the motor driven to drive conveying ontology 41 and silicon thereon Stick clamping device 43 and silicon rod 200 are completed to convert in functional areas interdigit.Specifically, the driving motor may be, for example, servo electricity Machine.

Silicon rod clamping device 43 is set on conveying ontology 41 by a mounting structure 42, for by silicon rod 200 to be processed It is clamped in a manner of accumbency.Specific to the present embodiment, mounting structure 42 may be, for example, set on 41 central area of conveying ontology The mounting rack or installation column in domain, multiple silicon rod clamping devices 43 are uniformly arranged on the mounting rack or installation column.It is any A silicon rod clamping device 43 further includes: first clamping member 431, the second clamping piece 433, clamping drive mechanism 435 and rotation are driven Motivation structure (does not indicate) in figure.

First clamping member 431 and the second clamping piece 433 are oppositely arranged.In the present embodiment, first clamping member 431 and second Clamping piece 433 is oppositely arranged in the horizontal direction, wherein first clamping member 431 is located at the inside of conveying ontology 41, the second clamping Part 433 is located at the outside of conveying ontology 41, and silicon rod grasping part is formed between first clamping member 431 and the second clamping piece 433.

Clamping drive mechanism 435 is for driving at least one of first clamping member 431 and the second clamping piece 433 to make laterally Move so that first clamping member 431 and the second clamping piece 433 clamp silicon rod 200.In this present embodiment, the first clamping above-mentioned At least one of part 431 and the second clamping piece 433 are movable setting, so that adjustable grasping part between the two is with suitable For clamping various sizes of silicon rod.In some embodiments, clamping drive mechanism 435 is configured in first clamping member 431 With on a clamping piece in the second clamping piece 433 and another clamping piece is fixed setting, clamping drive mechanism 435 can drive This clamping piece moves laterally.Such as: first clamping member 431 is to be fixedly installed and then configure on the second clamping piece 433 There is clamping drive mechanism, moves laterally in this way, the second clamping piece 433 can be controlled by clamping drive mechanism 435 with close or remote From first clamping member 431.Alternatively, the second clamping piece 433 is to be fixedly installed and then drive configured with clamping in first clamping member 431 Motivation structure 435 moves laterally in this way, first clamping member 431 can be controlled by clamping drive mechanism 435 close to or far from second Clamping piece 433.In some embodiments, corresponding folder is each configured on first clamping member 431 and the second clamping piece 433 Tight driving mechanism 435, two clamping pieces can be controlled by clamping drive mechanism 435 and move laterally.

Specific to the present embodiment, in the silicon rod clamping device shown in Figure 11 and Figure 12, first clamping member 431 is fixedly installed In on the mounting structure 42 for being located at conveying ontology 41 inside, the second clamping piece 433 passes through the connection knot that is connected with mounting structure 42 Structure 432 and opposite first clamping member 431 is arranged, clamping drive mechanism 435, the second clamping piece are configured on the second clamping piece 433 433 be controlled by clamping drive mechanism 435 and move laterally along connection structure 432 towards first clamping member 431 with reduce with The clamping spacing of first clamping member 431 moves laterally away from first clamping member 431 to increase the folder with first clamping member 431 Hold spacing.In specific implementation, mounting structure 42 may be, for example, the mounting bracket, mounting post or mounting surface of vertical setting.First Clamping piece 431 may include that the first Holding seat being fixedly installed on mounting structure 42 and rotation are set to first Holding seat On with the first clamping part for being contacted with silicon rod 200, first clamping part may be, for example, grain-clamping table or clamp column, with clamping For platform, the grain-clamping table may be, for example, circular clamp platform or rectangular grain-clamping table, and size and the sectional dimension of silicon rod 200 are mutually fitted Match.Connection structure 432 may be, for example, the connecting beam connecting with mounting structure 42, and the connecting beam is horizontal cross setting. Second clamping piece 433 then may include that the second Holding seat being movably arranged in connection structure 432 and rotation are set to second folder It holds with the second clamping part for being contacted with silicon rod 200 on pedestal, second clamping part may be, for example, grain-clamping table or clamp column. To make the second clamping piece 433 that can move laterally along connection structure 432, in the connecting beam as connection structure 432 The walking trough of strip is offered, the length of the walking trough is adapted with the stroke of 433 transverse shifting of the second clamping piece.In In practical application, a part of the second Holding seat of the second clamping piece 433 passes through the walking trough and along the walking trough It moves laterally.

In actual operation, when carrying out silicon rod clamping, first, it is ensured that first clamping member 431 and the second clamping piece 433 it Between retain have enough clamping spacing, if clamping spacing it is inadequate, then using clamping drive mechanism 435 drive the second clamping piece 433 move laterally away from first clamping member 431 to increase the clamping spacing with first clamping member 431；By silicon rod with accumbency side Formula delivers to pretreatment position and one of end face of silicon rod is resisted against to the first clamping part in first clamping member 431；Benefit The second clamping piece 433 is driven to move laterally towards first clamping member 431 until the second clamping piece with clamping drive mechanism 435 433 the second clamping part is resisted against another end face of silicon rod, by the cooperation of the second clamping piece 433 and first clamping member 431, Silicon rod 200 is held fixedly.In the present embodiment, first clamping member 431 is fixedly installed on mounting structure 42 and It is configured with clamping drive mechanism 435 on two clamping pieces 433, has structure is simple (only need to be on the second clamping piece 433 configured with folder Tight driving mechanism 435), operate conveniently and (drive the second clamping piece 433 to move laterally using clamping drive mechanism 435), clamping Firm (silicon rod that silicon rod 200 is clamped and clamped by first clamping member 431 and the second clamping piece 433 is adjacent to mounting structure 42) The advantages that.

Figure 13 is please referred to, the refinement structural schematic diagram of silicon rod clamping device in Figure 11 is shown as.As shown in figure 13, described In silicon rod clamping device, clamping drive mechanism 435 is configured on the second clamping piece 433, the clamping drive mechanism 435 more wraps It includes: translation rack rails 4351, driving gear 4353 and locking control piece.

Rack rails 4351 is translated, is layed in connection structure 432 with landscape mode.In the present embodiment, connection structure 432 can For example, connecting beam, translation rack rails 4351 can then be layed in the side of connection structure 432, but be not limited thereto, for example, In In certain embodiments, translation rack rails 4351 can also be layed in the bottom of connection structure 432.Translate the tooth density in rack rails 4351 It can according to actual needs can flexible setting.

Driving gear 4353 is engaged with translation rack rails 4351 and is linked with the second clamping piece 433.In this present embodiment, it drives Gear 4353 is controlled by a driving power source 4355, which can clamp with second in the second clamping piece 433 Pedestal is connected, for example, driving power source 4355 configures the mounting rack or mounting plate and second on a mounting rack or mounting plate Holding seat is connected.In this way, driving power source 4355 and the second clamping piece 433 are associated, the driving on power source 4355 is driven Gear 4353 is then meshed with translation rack rails 4351.Driving power source 4355 in the present embodiment may be, for example, driving motor.

In actual operation, when mobile second clamping piece 433, by 4353 turns of gear of driving of the control of driving power source 4355 It is dynamic, pass through the cooperation of driving gear 4353 and translation rack rails 4351, so that it may drive the second clamping piece 433 along translation rack rails 4351 It moves laterally.In some embodiments, when the right side or top of connection structure 432 is arranged in translation rack rails 4351, Driving gear 4353 is controlled by driving motor 4355 to rotate forward, then the second clamping piece 433 can be driven along translation 4351 direction of rack rails First clamping member 431 moves laterally so that it is anti-to control driving gear 4353 by driving motor 4355 close to first clamping member 431 Turn, then the second clamping piece 433 can be driven to move laterally backwards to first clamping member 431 far from first along translation rack rails 4351 Clamping piece 431.In some embodiments, when the left side or bottom of connection structure 432 is arranged in translation rack rails 4351, by The control driving gear 4353 of driving motor 4355 inverts, then can drive the second clamping piece 433 along translation rack rails 4351 towards the One clamping piece 431 moves laterally to control driving gear 4353 by driving motor 4355 and rotate forward close to first clamping member 431, The second clamping piece 433 can be then driven to move laterally backwards to first clamping member 431 far from the first folder along translation rack rails 4351 Gripping member 431.

Control piece is locked to be used for the second clamping piece when the second clamping piece 433 moves laterally and is resisted against silicon rod 200 433 controls are in lock state.In this present embodiment, the locking control piece further includes: braking rack gear 4352 and activity setting Braking member 4354.

It is similar with translation rack rails 4351 to brake rack gear 4352, is layed in connection structure 432 with landscape mode.But, Manipulation and Machine Design etc. for clamping drive mechanism 435 are considered, will braking rack gear 4352 and translation rack rails 4351 It is staggered in order to avoid the two interferes with each other.In the present embodiment, braking rack gear 4352 can be layed in the bottom (translation of connection structure 432 Rack rails 4351 is layed in the side of connection structure 432), it is equipped with walking trough in view of the aforementioned bottom in connection structure 432, therefore, It may be configured with two braking rack gears 4352, this two braking rack gears 4352 are located at the opposite sides of the walking trough.But simultaneously It is not limited, for example, in some embodiments, braking rack gear 4352 can also be layed in the side of connection structure 432 and can It is oppositely arranged with translation rack rails 4351, for example, translation rack rails 4351 is layed in the left side (or right side) of connection structure 432, So, braking rack gear 4352 can be layed in the right side (or left side) of connection structure 432.In some embodiments, if it is flat The bottom that rack rails 4351 is layed in connection structure 432 is moved, then, braking rack gear 4352 can be layed in the side of connection structure 432. The tooth density braked in rack gear 4352 can according to actual needs can flexible setting.

Braking member 4354 and transversely movable second clamping piece 433 link.In the present embodiment, braking member 4354 With a brake power source 4356, brake power source 4356 can be connected with the second Holding seat in the second clamping piece 433, example Such as, the configuration of brake power source 4356 is on a mounting rack or mounting plate, the mounting rack or mounting plate and the second Holding seat phase Even.Braking member 4354 is controlled by brake power source 4356 and moves to fasten in braking rack gear 4352.As for brake power source 4356, in some embodiments, brake power source 4356 may be, for example, oil cylinder, and the oil cylinder passes through piston rod and braking member Hydraulic energy can be converted into mechanical energy by 4354 connections, the oil cylinder, have many advantages, such as that small but power output is big.Certainly, braking is dynamic Power source 4356 is not limited thereto, and in some embodiments, brake power source 4356 also may be, for example, cylinder, and cylinder has control The advantages that system is convenient and at low cost.Braking member 4354 then may be, for example, brake block, and the brake block is strip, and both ends can Two braking rack gears 4352 in setting are fastened respectively.Certainly, corresponding with braking rack gear 4352 in the braking member 4354 The place of fastening can add and fasten tooth, to match with braking rack gear 4352, realize more firm braking effect.By taking oil cylinder as an example, In actual operation, in the initial state, the piston rod of oil cylinder 4356 drives braking member 4354 to be in contraction state, to Two clamping pieces 433 move laterally along translation rack rails 4351 until being resisted against silicon rod 200 under the drive of driving gear 4353 When, the driving power source 4355 in clamping drive mechanism 435 stops operating, at this point, being stretched out by the piston rod of oil cylinder 4356 and band Braking member 4354 is moved towards the movement of braking rack gear 4352 until fastening in braking rack gear 4352 and being pressed again, thus will Second clamping piece 433 is controlled in lock state.

Silicon rod to be processed is placed on silicon rod plummer in a manner of setting in the related technology existing, due to Silicon rod dead weight is larger, if the loading end of the end face in silicon rod and silicon rod plummer is enough, then, silicon rod is with vertical cube Formula be placed on silicon rod plummer be it is metastable, can generally not need additional stabilization holding meanss, though need, mentioned The stabilization holding meanss of confession are also relatively simple.But in this application, silicon rod 200 is in a manner of accumbency by first clamping member 431 It is clamped with the second clamping piece 433 and keeps suspended state, silicon rod dead weight is larger, maintains silicon rod to keep horizontal accumbency, this is just It is required that the aid power that first clamping member 431 and the second clamping piece 433 can be provided must the sufficiently large (silicon as caused by chucking power Stick 200 will be adapted with the frictional force of the first, second clamping piece 431,433 with the gravity of silicon rod), and 431 He of first clamping member At least one of second clamping piece 433 be it is mobilizable, in the present embodiment, the second clamping piece 433 be it is mobilizable, because This specifically provides locking control to prevent silicon rod 200 from having an impact the loosening of the horizontal accumbency of its holding in the vertical direction Part, for controlling the second clamping piece 433 in lock state.Wherein, locking control piece includes braking rack gear 4352 and with system The braking member 4354 of dynamic power source is fastened using braking member 4354 in braking rack gear 4352, it can be ensured that the second clamping piece 433 Always it is firmly held in lock state.

First clamping member 431 and the second clamping piece 433 in silicon rod clamping device 43 can also be designed as can be rotated.Therefore, In first clamping member 431, the first clamping part can be able to realize spinning motion relative to the first Holding seat by first rotating shaft, In the second clamping piece 433, the second clamping part can be able to realize spinning motion relative to the second Holding seat by the second shaft. Therefore, silicon rod clamping device 43 further includes rotary drive mechanism, for driving in first clamping member 431 and the second clamping piece 433 At least one rotate with drive clamp silicon rod 200 rotate, that is, driving first clamping member 431 in the first clamping part with And second at least one of the second clamping part in clamping piece 433 rotates.

In some embodiments, configured with rotation on a clamping piece in first clamping member 431 and the second clamping piece 433 Turn driving mechanism using as active rotatable parts and another clamping piece is then as driven rotation component.The rotary drive mechanism This clamping piece can be driven, which to rotate, and taken advantage of a situation again drives another clamping piece to rotate.Such as: in first clamping member wherein On 431 be configured with rotary drive mechanism, in this way, first clamping member 431 as active rotatable parts and the second clamping piece 433 is then made For driven rotation component.In actual operation, when needing to rotate silicon rod 200, by rotary drive mechanism driving linkage The first clamping part rotation in first clamping member 431, it is mutual using the first clamping part, silicon rod 200 and the second clamping part Frictional force, take advantage of a situation and silicon rod 200 (also include the second clamping part) driven to rotate together, realize work surface or operation in silicon rod 200 The adjustment in region, so as to continue to carry out grinding operation to work surface adjusted in silicon rod 200 or operating area, wherein silicon The velocity of rotation and rotational angle of stick 200 can be controlled by rotary drive mechanism.Alternatively, in the second clamping piece 433 wherein It is upper to be configured with rotary drive mechanism, in this way, by the second clamping piece 433 as active rotatable parts and first clamping member 431 is then made For driven rotation component.In actual operation, when needing to rotate silicon rod 200, by rotary drive mechanism driving linkage The second clamping part rotation in second clamping piece 433, it is mutual using the second clamping part, silicon rod 200 and the first clamping part Frictional force, take advantage of a situation and silicon rod 200 (also include the first clamping part) driven to rotate together, realize work surface or operating area in silicon rod Adjustment, so as to continue to carry out grinding operation to work surface adjusted in silicon rod 200 or operating area, wherein silicon rod 200 Velocity of rotation and rotational angle can be controlled by rotary drive mechanism.In some embodiments, in first clamping member 431 With corresponding rotary drive mechanism is each configured on the second clamping piece 433, the first clamping part in first clamping member 431 and The second clamping part in second clamping piece 433 rotates under the control of corresponding rotary drive mechanism respectively, drives silicon rod 200 (also including the first clamping part) rotates together, the adjustment of work surface or operating area in silicon rod is realized, so as to continue to silicon rod Work surface adjusted or operating area carry out grinding operation in 200, wherein the velocity of rotation and rotational angle of silicon rod 200 It can be controlled by rotary drive mechanism, wherein in the first clamping part and the second clamping piece 433 in first clamping member 431 In second clamping part rotation process, two rotary drive mechanisms will keep synchronous.Specific to the present embodiment, in Figure 11 to Figure 13 institute It is configured with rotary drive mechanism in first clamping member 431 wherein, in this way, by the first folder in the silicon rod clamping device shown Gripping member 431 is used as active rotatable parts and the second clamping piece 433 is then used as driven rotation component.In specific implementation, rotation is driven Motivation structure may be, for example, rotating electric machine.

It should be noted that configuring rotary drive mechanism in first clamping member 431 in the present embodiment silicon rod clamping device (rotary drive mechanism is not configured on the second clamping piece 433) and on the second clamping piece 433 configure 435 (In of clamping drive mechanism Clamping drive mechanism 435 is not configured in first clamping member 431) it is only a kind of exemplary illustration, in fact, clamping drive mechanism 435 and configuration of the rotary drive mechanism in first clamping member 431 and the second clamping piece 433, it can flexibly arrange in pairs or groups, folder can be achieved It holds silicon rod and rotates the technical effect of silicon rod.But, relative to other configuration modes, the present embodiment shown in Figure 11 to Figure 13 Silicon rod clamping device, also with structure it is simple, operate conveniently, the advantages that cost is relatively low, easy to maintain.

The application silicon rod processing machine may also include silicon rod handler, corresponding to the pretreating zone on silicon rod processing platform 21 Position, for loading silicon rod 200 to be processed to pretreatment position and adding the silicon rod after completion grinding operation from silicon rod It is unloaded on the pretreatment position of work platform.Using silicon rod handler, can by silicon rod 200 to be processed in a manner of accumbency smoothly The first clamping member 431 and the second clamping piece 433 of delivery into that silicon rod clamping device 43 corresponding with pretreatment position Between grasping part in, so that first clamping member 431 and the second clamping piece 433 are clamped silicon rod 200.Such as Figure 11 and figure In the present embodiment shown in 12, silicon rod handler 7 may be, for example, three-dimensional transfer device, the three-dimensional transfer device can include: First direction transfer mechanism, second direction transfer mechanism and third direction transfer mechanism.As shown in figure 11, for ease of description, The first direction is denoted as R1 axis, the second direction is denoted as P1 axis, the third direction is denoted as Z axis, In, P1 axis and R1 axis are perpendicular, and Z axis and the plane being made of P1 axis and R1 axis are perpendicular.

The third direction shift mechanism further includes: pedestal 71 and third direction shift mechanism are shifted by third direction Mechanism can provide displacement of the pedestal 71 in third direction (such as Z-direction).Third direction shift mechanism may include third party Direction guiding rail 711, third sliding block 712 and third direction driving source (not showing in the drawings).

Third direction guide rail 711 is laid on base 2 along third direction.Third sliding block 712 be then set on pedestal 71 and It is matched with third direction guide rail 711.For the stability for shifting pedestal 71 along third direction, can be configured on base 2 Two third direction guide rails 711, the two third direction guide rails 711 are located at the opposite sides of pedestal 71.The third party It then may include third direction rack rails, third driving gear and third driving motor to driving source, wherein the third direction Rack rails is laid on base 2 along third direction, third driving gear engaged with the third direction rack rails and with pedestal 71 Linkage, the third driving motor is for driving the third driving gear.Specifically, the third direction rack rails may be, for example, At least one rack gear with certain length.In this way, in actual operation, the third can be driven by the third driving motor The rotation of sliding tooth wheel drives rotation of the gear on the third direction rack rails by the third, while cooperating third direction Guide rail 711 and third sliding block 712, can drive pedestal 71 to shift along third direction.For example, being controlled by the third driving motor Third driving gear rotates forward (or reversion), and pedestal 71 can be driven to make to rise displacement along third direction, alternatively, by described the Three driving motors control the third driving gear reversion (or rotating forward), and pedestal 71 can be driven to make decline along third direction and moved Position.In actual operation, (shift control refers to for shift control instruction of the third driving motor reception from a controller Displacement numerical value or parameter relevant to displacement numerical value are included at least in order) and instructed according to the shift control to drive third to turn Moving gear is rotated such that pedestal 71 is shifted along third direction rack rails, meanwhile, the third direction guide rail 711 as auxiliary equipment With third sliding block 712, third sliding block 712 may make to slide along third direction guide rail 711, to realize that pedestal 71 can be along the Three directions steadily shift.In addition, third direction guide rail 711, third sliding block 712 in above-mentioned third direction shift mechanism, described The setting of third direction rack rails, third driving gear in third direction driving source can still make other variations, for example, third direction Guide rail 711 can be set to pedestal 71 on and third sliding block 712 be set to base 2 on, the third direction rack rails be set to pedestal 71 on and The third driving gear is set on base 2.Further more, above-mentioned third direction driving source is only one to illustrate, but be not intended to The application is limited, for example, in some embodiments, the third direction driving source can include: ball-screw and servo motor, Ball-screw has the characteristics that high-precision, invertibity and efficient, in this way, passing through the cooperation of servo motor and ball-screw, mentions Precision of the high-base 71 in third party's upward displacement.

The second direction shift mechanism further includes: movable platform 73 and second direction shift mechanism pass through second direction Shift mechanism can provide displacement of the movable platform 73 in second direction (such as P1 axis direction).Second direction shift mechanism can wrap Include second direction guide rail 731, the second sliding block 732 and second direction driving source (not showing in the drawings).

Second direction guide rail 731 is laid in a second direction on pedestal 71.Second sliding block 732 is then set to movable platform 73 Bottom and matched with second direction guide rail 731.It, can be for the stability for shifting movable platform 73 along second direction Two second direction guide rails 731 are configured on pedestal 71, the two second direction guide rails 731 are located at opposite the two of pedestal 71 Side.The second direction driving source then may include that second direction rack rails 733, second drives gear 734 and the second driving electricity Machine, wherein the second direction rack rails 733 is laid in a second direction on pedestal 71, the second driving gear 734 and described second Direction rack rails 733 is engaged and is linked with movable platform 73, and second driving motor is for driving the second driving gear 734.Tool Body, the second direction rack rails 733 may be, for example, at least one rack gear with certain length.In this way, in actual operation, The second driving gear 734 can be driven to rotate by second driving motor, by the second driving gear 734 in the second direction Rotation on rack rails 733, while cooperating second direction guide rail 731 and the second sliding block 732, movable platform 73 can be driven along second Direction displacement.For example, rotating forward (or reversion) by second driving motor control the second driving gear 734, activity can be driven flat Platform 73 makees shifted left along second direction, alternatively, by second driving motor control second driving gear 734 reversion (or Rotate forward), movable platform 73 can be driven to make right shift along second direction.In actual operation, second driving motor connects Receive from a controller shift control instruction (included at least in the shift control instruction displacement numerical value or with displacement numerical value phase The parameter of pass) and according to the shift control instruct drive the second driving gear 734 be rotated such that movable platform 73 along Second direction rack rails 733 shifts, meanwhile, as the second direction guide rail 731 and the second sliding block 732 of auxiliary equipment, it may make the Two sliding blocks 732 slide along second direction guide rail 731, to realize that movable platform 73 can steadily be shifted along second direction.Separately Outside, the second direction guide rail 731 in above-mentioned second direction shift mechanism, the second sliding block 732, in the second direction driving source Second direction rack rails 733, second drives the setting of gear 734 that can still make other variations, for example, second direction guide rail 731 can be set In in movable platform 73 and the second sliding block 732 be set to pedestal 71 on, the second direction rack rails 733 be set to movable platform 73 on and Second driving gear 734 is set on pedestal 71.Further more, above-mentioned second direction driving source is only one to illustrate, but be not intended to The application is limited, for example, in some embodiments, the second direction driving source can include: ball-screw and servo motor, Ball-screw has the characteristics that high-precision, invertibity and efficient, in this way, passing through the cooperation of servo motor and ball-screw, mentions The precision that high movable platform 73 shifts in a second direction.

The first direction shift mechanism further includes: silicon rod microscope carrier 75 and first direction shift mechanism pass through first direction Shift mechanism can provide displacement of the silicon rod microscope carrier 75 in a first direction in (such as R1 axis direction).

For carrying silicon rod 200, shape and size can be adapted silicon rod microscope carrier 75 with silicon rod 200, for example, rectangular-shaped. In addition, the lateral margin of silicon rod microscope carrier 75 can be equipped with position limiting structure 76, for limit carried silicon rod 200 the left and right sides (such as In P1 axis direction) movement.In some embodiments, position limiting structure 76 may be, for example, stopper posts or stop block.

First direction shift mechanism may include first direction guide rail 751, the first sliding block 752 and first direction driving source (not showing in the drawings).

First direction guide rail 751 is laid in movable platform 73 along first direction.First sliding block 752 is then set to silicon rod load It the bottom of platform 75 and is matched with first direction guide rail 751.For the stability for shifting silicon rod microscope carrier 75 along a first direction, Two first direction guide rails 751 can be configured in movable platform 73, the two first direction guide rails 751 are located at movable platform 73 opposite sides.The first direction driving source then may include first direction rack rails, the first driving gear and the first driving Motor, wherein the first direction rack rails is laid in movable platform 73 along first direction, it is described first driving gear with it is described First direction rack rails is engaged and is linked with silicon rod microscope carrier 75, and first driving motor is for driving the first driving gear. Specifically, the first direction rack rails may be, for example, at least one rack gear with certain length.In this way, in actual operation, The first sliding tooth wheel can be driven to rotate by first driving motor, by the first driving gear in the first party Rotation on rack rails, while cooperating first direction guide rail 751 and the first sliding block 752, silicon rod microscope carrier 75 can be driven along first Direction displacement.For example, rotating forward (or reversion) by first driving motor control the first driving gear, silicon rod can be driven to carry Platform 75 makees inwardly displaced (that is, towards middle section displacement of conveying ontology 41) along a first direction, alternatively, being driven by described first First driving gear reversion (or rotating forward) described in dynamic motor control, can drive silicon rod microscope carrier 75 to make to shift outward along a first direction (that is, away from middle section displacement of conveying ontology 41).In actual operation, first driving motor is received from a control The shift control instruction (displacement numerical value or parameter relevant to displacement numerical value are included at least in the shift control instruction) of device is simultaneously It is instructed according to the shift control to drive the first rotate gear to be rotated such that rack rails moves silicon rod microscope carrier 75 along a first direction Position, meanwhile, as the first direction guide rail 751 and the first sliding block 752 of auxiliary equipment, it may make the first sliding block 752 along first Traversing guide 751 slides, to realize that silicon rod microscope carrier 75 can be shifted steadily along a first direction.In addition, above-mentioned first direction moves First direction guide rail 751, the first sliding block 752, the first direction rack rails in the first direction driving source, first in the mechanism of position The setting of driving gear can still make other variations, for example, first direction guide rail 751 can be set on silicon rod microscope carrier 75 and the first sliding block 752 are set in movable platform 73, and the first direction rack rails is set on silicon rod microscope carrier 75 and the first driving gear is set to and lives On moving platform 73.Further more, above-mentioned first direction driving source is only one to illustrate, but be not intended to limit the application, for example, In In one alternative embodiment, the first direction driving source can include: ball-screw and servo motor, ball-screw have high-precision Degree, invertibity and efficient feature improve silicon rod microscope carrier 75 the in this way, pass through the cooperation of servo motor and ball-screw The precision of one side's upward displacement.

When by above-mentioned silicon rod handler 7 for loading silicon rod 200 to be processed to the application for pre-processing position In, silicon rod microscope carrier 75 is located at initial position (such as: the outside of base 2), and silicon rod 200 to be processed is placed in a manner of accumbency On silicon rod microscope carrier 75, pass through matching for first direction shift mechanism, second direction shift mechanism and third direction shift mechanism It closes, silicon rod 200 to be processed can be loaded to pretreatment position to and be located at first clamping member 431 and the of silicon rod clamping device 43 It is formed by silicon rod grasping part between two clamping pieces 433.First direction shift mechanism, second direction shift mechanism and The cooperation of third direction shift mechanism is specific can include: activity using third direction shift mechanism driving pedestal 71 and thereon is flat Platform 73 and silicon rod microscope carrier 75 are shifted along third direction, silicon rod using second direction shift mechanism driving movable platform 73 and thereon Microscope carrier 75 shifts in a second direction, is shifted using third direction shift mechanism driving silicon rod microscope carrier 75 along third direction.

In fact, in some embodiments, the application silicon rod processing machine may also include flatness detector, in benefit After silicon rod 200 to be processed is loaded to predetermined position with silicon rod handler 7 and by 43 clamping of silicon rod clamping device It is preceding that the operation such as planar smoothness detection and position adjustment is carried out to silicon rod 200 to be processed.

First silicon rod grinding device 6 is set to the first processing position of silicon rod processing platform 21, for carrying out the to silicon rod 200 One grinding operation.Second silicon rod grinding device 8 is set to the second processing position of silicon rod processing platform 21, is used for by the first silicon Silicon rod 200 after first grinding operation of stick grinding device 6 carries out the second grinding operation.In the present embodiment, as previously mentioned, it is logical The silicon rod clamping device 43 crossed on silicon rod conversion equipment 4 can be clamped silicon rod 200 to be processed in a manner of accumbency, therefore, First silicon rod grinding device 6 and the second silicon rod grinding device 8 are exactly to what the silicon rod 200 that accumbency is placed carried out grinding operation use Horizontal processing method.In addition, the first silicon rod grinding device 6 and the second silicon rod grinding device 8 are double-side polishing apparatus, it can be to silicon rod 200 two opposite grinding parts carry out grinding operation.

Specifically, for the silicon rod of different kenels, the first silicon rod grinding device 6 and the second silicon rod grinding device 8 also have different variation combination examples.Such as: if silicon rod 200 is silicon single crystal rod, the first silicon rod grinding device 6, which can be, to be cut Circle and corase grinding device and the second silicon rod grinding device 8 can be round as a ball and fine grinding device；If silicon rod 200 is polycrystalline silicon rod, the One silicon rod grinding device 6 can be corase grinding device and the second silicon rod grinding device can be chamfering and fine grinding device.Certainly, at certain In a little embodiments, between the pretreatment position and first processing position and described second process position with it is described Pretreatment can also add protective door between position, for the pretreatment position and described first to be processed position and described second Processing position is isolated, to play the role of protecting silicon rod, silicon rod is avoided to be contaminated or damage.

Above-mentioned first silicon rod grinding device 6 and the second silicon rod grinding device 8 are described in detail respectively below.

First silicon rod grinding device 6 mainly holds seat 61 and at least a pair of first grinding tool 63 including first, wherein first holds seat 61 can be moved laterally by the first transverse moving mechanism with respect to silicon rod processing platform 21, and at least a pair of first grinding tool, 63 opposite direction is set It is placed in first to hold on seat 61, the silicon rod being located at the first processing position is pressed from both sides under the drive for holding 61 transverse shifting of seat first It holds the silicon rod 200 that accumbency is placed on device 43 and carries out grinding operation.For ease of description, the first silicon rod grinding device 6 is directed to, by the One to hold hand designations that seat 61 moves laterally be R2 axis, and the transverse direction perpendicular with R2 axis is denoted as P2, will with by P2 The perpendicular hand designations of the plane that axis and R2 axis are constituted are Z axis.

First, which holds seat 61, to be moved laterally by the first transverse moving mechanism with respect to silicon rod processing platform 21.In this implementation In example, be arranged on silicon rod processing platform 21 along R2 to sliding rail 611, first to hold the sliding slot that seat 61 is opened up by bottom (described Sliding slot is matched with sliding rail 611) and pillow on sliding rail 611, wherein the quantity of sliding rail 611 may be, for example, two, two sliding rails 611 parallel settings and the opposite sides for holding seat 61 corresponding to first.First transverse moving mechanism may also include laterally driven Source, specifically, the laterally driven source may include horizontal drive motor and drive screw (not showing in the drawings), the transmission Screw rod can be along R2 to setting.In practical applications, by the cooperation of horizontal drive motor and drive screw, first can be driven to hold seat 61 along sliding rail 611 along R2 to moving laterally.

At least a pair of first grinding tool 63 is arranged oppositely to be held on seat 61 in first.In the first silicon rod grinding device of the present embodiment It in 6, is held first and is provided with a pair of first grinding tool 63 on seat 61, there are for accommodating silicon rod 200 between this pair of first grinding tool 63 Grinding space.If silicon rod 200 to be processed is silicon single crystal rod, which is the silicon side that section is substantially in class rectangle Body, tool are formed with the connection faceted pebble in the angle R there are four side between two neighboring side, therefore, this at least a pair of first grinding tool 63 can grind accordingly opposite a pair of of side or a pair of of connection faceted pebble in the silicon single crystal rod being located in the grinding space Grind operation.If silicon rod 200 to be processed is polycrystalline silicon rod, which is the silicon cube of rectangular in cross-section, and there are four tools Side and four corner angle, therefore, this at least a pair of first grinding tool 63 can be to phases in the polycrystalline silicon rod being located in the grinding space Pair a pair of of side or a pair of of connection corner angle carry out corresponding grinding operation.

Further, each first grinding tool 63 further includes grinding wheel 631 and rotary electric machine 633, wherein 631 He of grinding wheel Rotary electric machine 633 is configured on the first grinding tool support 635, and grinding wheel 631 is controlled by rotary electric machine 633 and rotates, the first grinding tool Support 635 more can be movably arranged at first by the first grinding tool driving and reversing mechanism and hold on seat 61.In the present embodiment, seat is held first Slide 637 (or sliding rail) along P2 to (P2 to the R2 to mutually orthogonal) is set on 61, and the first grinding tool support 635 passes through Sliding slot (sliding slot is matched with slide 637 or sliding rail) that bottom opens up and pillow on slide 637 (or sliding rail).Described first Grinding tool driving and reversing mechanism may also include advance and retreat driving source, for driving the first grinding tool 63 to move forward and backward along slide 637 or sliding rail. The advance and retreat driving source may include advance and retreat motor and drive screw (not showing in the drawings), and the drive screw can be along P2 to setting It sets.In practical applications, by the cooperation of advance and retreat motor and drive screw, the first grinding tool support 635 and sand thereon can be driven Wheel 631 and rotary electric machine 633 along slide 637 (or sliding rail) along P2 to moving laterally, enable grinding wheel 631 complete grinding sky Between feeding.

In practical applications, for the first silicon rod grinding device 6, each first grinding tool 63 can be in the first grinding tool advance and retreat machine The first transverse shifting machine is recycled to moving laterally to adjust the amount of feeding of 63 medium plain emery wheel of the first grinding tool along P2 under the driving of structure Structure can drive first to hold seat 61 and the opposite silicon rod processing platform 21 of the first grinding tool 63 thereon along R2 to making transverse movement to silicon Silicon rod 200 clamped by stick clamping device 43 carries out the first grinding operation.

Second silicon rod grinding device 8 mainly holds seat 81 and at least a pair of second grinding tool 83 including second, wherein second holds seat 81 can be moved laterally by the second transverse moving mechanism with respect to silicon rod processing platform 21, and at least a pair of second grinding tool, 83 opposite direction is set It is placed in second to hold on seat 81, the silicon rod being located at the second processing position is pressed from both sides under the drive for holding 81 transverse shifting of seat second It holds the silicon rod 200 that accumbency is placed on device 43 and carries out grinding operation.For ease of description, the second silicon rod grinding device 8 is directed to, by the One to hold hand designations that seat 81 moves laterally be R3 axis, and the transverse direction perpendicular with R3 axis is denoted as P3, will with by P3 The perpendicular hand designations of the plane that axis and R3 axis are constituted are Z axis.

Second, which holds seat 81, to be moved laterally by the second transverse moving mechanism with respect to silicon rod processing platform 21.In this implementation In example, be arranged on silicon rod processing platform 21 along R3 to sliding rail 811, second to hold the sliding slot that seat 81 is opened up by bottom (described Sliding slot is matched with sliding rail 811) and pillow on sliding rail 811, wherein the quantity of sliding rail 811 may be, for example, two, two sliding rails 811 parallel settings and the opposite sides for holding seat 81 corresponding to second.Second transverse moving mechanism may also include laterally driven Source, specifically, the laterally driven source may include horizontal drive motor and drive screw (not showing in the drawings), the transmission Screw rod can be along R3 to setting.In practical applications, by the cooperation of horizontal drive motor and drive screw, second can be driven to hold seat 81 along sliding rail 811 along R3 to moving laterally.

At least a pair of second grinding tool 83 is arranged oppositely to be held on seat 81 in second.In the second silicon rod grinding device of the present embodiment It in 8, is held second and is provided with a pair of second grinding tool 83 on seat 81, there are for accommodating silicon rod 200 between this pair of second grinding tool 83 Grinding space.If silicon rod 200 to be processed is silicon single crystal rod, which is the silicon side that section is substantially in class rectangle Body, tool are formed with the connection faceted pebble in the angle R there are four side between two neighboring side, therefore, this at least a pair of second grinding tool 83 can grind accordingly opposite a pair of of side or a pair of of connection faceted pebble in the silicon single crystal rod being located in the grinding space Grind operation.If silicon rod 200 to be processed is polycrystalline silicon rod, which is the silicon cube of rectangular in cross-section, and there are four tools Side and four corner angle, therefore, this at least a pair of second grinding tool 83 can be to phases in the polycrystalline silicon rod being located in the grinding space Pair a pair of of side or a pair of of connection corner angle carry out corresponding grinding operation.

Further, each second grinding tool 83 further includes grinding wheel 831 and rotary electric machine 833, wherein 831 He of grinding wheel Rotary electric machine 833 is configured on the second grinding tool support 835, and grinding wheel 831 is controlled by rotary electric machine 833 and rotates, the second grinding tool Support 835 more can be movably arranged at second by the second grinding tool driving and reversing mechanism and hold on seat 81.In the present embodiment, seat is held second Slide 837 (or sliding rail) along P3 to (P3 to the R3 to mutually orthogonal) is set on 81, and the second grinding tool support 835 passes through Sliding slot (sliding slot is matched with slide 837 or sliding rail) that bottom opens up and pillow on slide 837 (or sliding rail).Described second Grinding tool driving and reversing mechanism may also include advance and retreat driving source, for driving the second grinding tool 83 to move forward and backward along slide 837 or sliding rail. The advance and retreat driving source may include advance and retreat motor and drive screw (not showing in the drawings), and the drive screw can be along P3 to setting It sets.In practical applications, by the cooperation of advance and retreat motor and drive screw, the second grinding tool support 835 and sand thereon can be driven Wheel 831 and rotary electric machine 833 along slide 837 (or sliding rail) along P3 to moving laterally, enable grinding wheel 831 complete grinding sky Between feeding.Wherein, the granularity of the frosted particle of 8 medium plain emery wheel 831 of the second silicon rod grinding device is less than the grinding of the first silicon rod The granularity of the frosted particle of 6 medium plain emery wheel 631 of device.

In practical applications, for the second silicon rod grinding device 8, each second grinding tool 83 can be in the second grinding tool advance and retreat machine The second transverse shifting machine is recycled to moving laterally to adjust the amount of feeding of 83 medium plain emery wheel of the second grinding tool along P3 under the driving of structure Structure can drive second to hold seat 81 and the opposite silicon rod processing platform 21 of the second grinding tool 83 thereon along R3 to making transverse movement to silicon Silicon rod 200 clamped by stick clamping device 43 carries out the second grinding operation.

It is illustrated so that silicon rod 100 is silicon single crystal rod as an example below, in the case of silicon rod 100 is silicon single crystal rod, first Silicon rod grinding device 6 is the circle of contact and corase grinding device, and the second silicon rod grinding device 8 is round as a ball and fine grinding device.

Carrying out the circle of contact and corase grinding operation to silicon single crystal rod by the circle of contact and corase grinding device 6 can generally comprise: circle of contact operation and thick Grind operation.

In practical applications, silicon single crystal rod 200 is transferred to the of silicon rod processing platform 21 first with silicon rod conversion equipment 4 One processing position specifically drives conveying ontology 41 in silicon rod conversion equipment 4 to rotate, drives silicon rod clamping device 43 and its institute The silicon single crystal rod 200 of clamping is converted by pre-processing position to the first processing position, so that list clamped by silicon rod clamping device 43 Crystalline silicon rod 200 corresponds to the circle of contact and corase grinding device 6.At least a pair of of the grinding wheel 631 for driving the circle of contact and roughly grinding in device 6 can be to monocrystalline Opposite a pair of of side carries out corresponding corase grinding operation or to a pair of of connection faceted pebble opposite in silicon single crystal rod 200 in silicon rod 200 Carry out corresponding circle of contact operation.

About circle of contact operation, generally, positioning adjustment is carried out to silicon single crystal rod 200 using silicon rod clamping device 43, utilized Rotary drive mechanism drives at least one of first clamping member 431 and the second clamping piece 433 to rotate to drive the list clamped Crystalline silicon rod 200 rotates, so that a pair of of connecting edge face in silicon single crystal rod 200 corresponds to a pair of first grinding tool 63, by the first grinding tool The connection faceted pebble of 63 pairs of silicon single crystal rods 200 carries out circle of contact operation.The circle of contact operation can for example, fills with using silicon rod clamping It sets 43 pairs of silicon single crystal rods 200 and carries out positioning adjustment and match, (grinding wheel in the first grinding tool 63 of driving is along P2 to work according to the amount of feeding Transverse shifting), it drives the grinding wheel 631 in the first grinding tool 63 to rotate and drives the opposite silicon rod processing platform 21 of the first grinding tool 63 along R2 To transverse movement is made to implement to grind to silicon single crystal rod 200 by the grinding wheel 631 in the first grinding tool 63, completion is once slightly cut；By silicon Stick clamping device 43 carries out positioning adjustment to silicon single crystal rod 200 again, repeats above-mentioned grinding steps, to realize to first pair of company It connects faceted pebble and its adjacent domain repeatedly slightly cut and repeatedly slightly cut to second pair of connection faceted pebble and its adjacent domain progress, make It obtains the connection between each connection faceted pebble and adjacent side and forms preliminary arc connection.

In a specific example, circle of contact operation further comprises: first with silicon rod clamping device 43 to silicon single crystal rod 200 into Row positioning adjustment；Initially, when silicon rod clamping device 43 clamps silicon single crystal rod 200, the side of silicon single crystal rod 200 is corresponded to A pair of of grinding tool 33 in the circle of contact and corase grinding device 6, therefore, by being positioned using silicon rod clamping device 43 to silicon single crystal rod 200 Adjustment can be for example including positive (or reverse) 45 ° of the rotation of silicon single crystal rod 200 be driven, so that first pair of company in silicon single crystal rod 200 Faceted pebble is connect corresponding to the circle of contact and roughly grinds the first grinding tool of a pair 63 in device 6, enable the first grinding tool 63 according to the amount of feeding along P2 to work Traverse feed, rotate the first grinding tool 63 in grinding wheel 631 and drive the first grinding tool 63 along R2 to make transverse movement with by first mill Grinding wheel 631 in tool 63 slightly cut for the first time to first pair of connection faceted pebble in silicon single crystal rod 200；By silicon rod clamping device 43 It drives silicon single crystal rod 200 to rotate forward 5 °, rotate the grinding wheel 631 in the first grinding tool 63 and drives the first grinding tool 63 horizontal to making along R2 To movement slightly to be cut for the second time by the grinding wheel 631 in the first grinding tool 63 to first pair of connection faceted pebble in silicon single crystal rod 200； Silicon single crystal rod 200 is driven to rotate forward 80 ° by silicon rod clamping device 43, so that second in silicon single crystal rod 200 pair connects faceted pebble Corresponding to the first grinding tool of a pair 63 in the circle of contact and corase grinding device 6, rotates the grinding wheel 631 in the first grinding tool 63 and drive the first mill Tool 63 along R2 to make transverse movement with by the grinding wheel 631 in the first grinding tool 63 to second pair of connection faceted pebble in silicon single crystal rod 200 Slightly cut for the first time；It drives silicon single crystal rod 200 to rotate forward 5 ° by silicon rod clamping device 43, rotates the sand in the first grinding tool 63 Wheel 631 and drive the first grinding tool 63 along R2 to make transverse movement with by the grinding wheel 631 in the first grinding tool 63 in silicon single crystal rod 200 Second pair of connection faceted pebble slightly cut for the second time；Silicon single crystal rod 200 is driven to rotate forward 5 ° by silicon rod clamping device 43, rotation Grinding wheel 631 in first grinding tool 63 simultaneously drives the first grinding tool 63 along R2 to making transverse movement by the grinding wheel in the first grinding tool 63 Second pair of connection faceted pebble in 631 pairs of silicon single crystal rods 200 carries out third time and slightly cuts；Silicon single crystal rod is driven by silicon rod clamping device 43 200 rotate forward 80 °, rotate the grinding wheel 631 in the first grinding tool 63 and drive the first grinding tool 63 along R2 to make transverse movement with by Grinding wheel 631 in first grinding tool 63 carries out third time to first pair of connection faceted pebble in silicon single crystal rod 200 and slightly cuts.As monocrystalline silicon The state that the silicon single crystal rod of stick 200 implements above-mentioned circle of contact operation is shown as silicon single crystal rod for details, reference can be made to Fig. 3, Fig. 3 and makees in the circle of contact State change schematic diagram in industry.

It should be strongly noted that driving silicon single crystal rod 200 to rotate phase by silicon rod clamping device 43 in aforementioned circle of contact operation Angle is answered, such as: silicon rod clamping device 43 drives silicon single crystal rod 200 to rotate forward 5 °, is not unique implementation, at it It in his alternative embodiment, is suitable for adjusting the angle, for example, 3 ° to 7 °, including 3 °, 4 °, 5 °, 6 °, 7 ° or other angles, accordingly Ground, by silicon rod clamping device 43 drive silicon single crystal rod 200 rotate forward 80 ° the case where angle is then adaptively adjusted.Before please referring to Table one in text, table one are shown as the sample situation of rotational angle each numerical value within the scope of 3 ° to 7 °.

Above-mentioned circle of contact operation process is only the embodiment in circle of contact operation, but is not limited thereto, such as: first with silicon Stick clamping device 43 drives silicon single crystal rod 200 to rotate forward 40 °, so that first in silicon single crystal rod 200 pair connecting edge face is corresponding The first grinding tool of a pair 63 in the circle of contact and corase grinding device 6, rotates the grinding wheel 631 in the first grinding tool 63 and drives the first grinding tool 63 Along R2 to make transverse movement with by the grinding wheel 631 in the first grinding tool 63 in silicon single crystal rod 200 first pair of connection faceted pebble carry out It slightly cuts for the first time；It drives silicon single crystal rod 200 to rotate forward 5 ° by silicon rod clamping device 43, rotates the grinding wheel in the first grinding tool 63 631 and drive the first grinding tool 63 along R2 to make transverse movement with by the grinding wheel 631 in the first grinding tool 63 in silicon single crystal rod 200 First pair of connection faceted pebble slightly cut for the second time；Silicon single crystal rod 200 is driven to rotate forward 5 ° by silicon rod clamping device 43, rotation Grinding wheel 631 in first grinding tool 63 simultaneously drives the first grinding tool 63 along R2 to making transverse movement by the grinding wheel in the first grinding tool 63 631 are slightly cut with carrying out third time to first pair of connection faceted pebble in silicon single crystal rod 200；Monocrystalline silicon is driven by silicon rod clamping device 43 Stick 200 rotates forward 80 °, rotate the grinding wheel 631 in the first grinding tool 63 and drive the first grinding tool 63 along R2 to make transverse movement with Second pair of connection faceted pebble in silicon single crystal rod 200 slightly cut for the first time by the grinding wheel 631 in the first grinding tool 63；It is pressed from both sides by silicon rod Holding device 43 drives silicon single crystal rod 200 to rotate forward 5 °, rotates the grinding wheel 631 in the first grinding tool 63 and drives 63 edge of the first grinding tool R2 is to making transverse movement to carry out the to second pair of connection faceted pebble in silicon single crystal rod 200 by the grinding wheel 631 in the first grinding tool 63 It is secondary slightly to cut；It drives silicon single crystal rod 200 to rotate forward 5 ° by silicon rod clamping device 43, rotates the grinding wheel 631 in the first grinding tool 63 And drive the first grinding tool 63 along R2 to make transverse movement with by the grinding wheel 631 in the first grinding tool 63 to the in silicon single crystal rod 200 Two pairs of connection faceted pebbles carry out third time and slightly cut.

After completing circle of contact operation, positioning adjustment is carried out to silicon single crystal rod by silicon rod clamping device 43, so that silicon single crystal rod In a pair of of side correspond to a pair of of grinding tool 33, corase grinding operation is carried out by side of the grinding tool 33 to silicon single crystal rod.

Corase grinding operation further comprises: positioning adjustment is carried out to silicon single crystal rod 200 first with silicon rod clamping device 43, so that The first opposite side face in silicon single crystal rod 200 corresponds to the circle of contact and roughly grinds the first grinding tool of a pair 63 in device 6, enables the first grinding tool 63 According to the amount of feeding along P1 to traverse feed is made, rotates the grinding wheel 631 in the first grinding tool 63 and drive the first grinding tool 63 along R2 to work Transverse movement is to roughly grind first pair of side in silicon single crystal rod 200 by the grinding wheel 631 in the first grinding tool 63；It is pressed from both sides by silicon rod It holds device 43 and drives positive (or reverse) 90 ° of the rotation of silicon single crystal rod 200, so that the second opposite side face in silicon single crystal rod 200 is corresponding The first grinding tool of a pair 63 in the circle of contact and corase grinding device 6, rotates the grinding wheel 631 in the first grinding tool 63 and drives the first grinding tool 63 Along R2 to making transverse movement to be roughly ground by the grinding wheel 631 in the first grinding tool 63 to second pair of side in silicon single crystal rod 200. Wherein, the corase grinding operation of any pair of side can for example, provides an amount of feeding, drives the grinding wheel in a pair of first grinding tool 63 631 along R2 to a pair of of side by having ground silicon single crystal rod 200 since transverse shifting inside outside；A pair of of grinding wheel 631 is ground to monocrystalline After 200 innermost end of silicon rod (for example, the innermost end of silicon single crystal rod 200 can be known as bottom) and after silicon single crystal rod 200 Stop, being further added by an amount of feeding, drives a pair of of grinding wheel along R2 to a pair for grinding silicon single crystal rod 200 by interior transverse shifting outward Side；A pair of of grinding wheel 631 is ground to the outermost end of silicon single crystal rod 200 (for example, can be known as pushing up by the outermost end of silicon single crystal rod 200 Portion) after and pass through and stop after silicon single crystal rod 200, continue growing an amount of feeding, drive a pair of of grinding wheel 631 along R2 to from it is outer toward Interior transverse shifting grinds silicon single crystal rod 200；In this way, grinding, increases the amount of feeding, and reversed to grind, the increase amount of feeding, grinding, instead After plural time, a pair of of side of silicon single crystal rod 200 can be ground to preset size.Monocrystalline as silicon single crystal rod 200 The state that silicon rod implements above-mentioned corase grinding operation is shown as state of the silicon single crystal rod in corase grinding operation for details, reference can be made to Fig. 4, Fig. 4 and becomes Change schematic diagram.

For round as a ball and fine grinding device, carrying out round as a ball and fine grinding operation to silicon single crystal rod by round as a ball and fine grinding device can be substantially It include: round as a ball operation and fine grinding operation.The granularity of round as a ball and 8 medium plain emery wheel 831 of fine grinding device frosted particle is less than the circle of contact And the granularity of the frosted particle of corase grinding 6 medium plain emery wheel 631 of device.

In practical applications, silicon single crystal rod 200 is transferred to the of silicon rod processing platform 21 first with silicon rod conversion equipment 4 Two processing positions specifically drive conveying ontology 41 in silicon rod conversion equipment 4 to rotate, drive silicon rod clamping device 43 and its institute The silicon single crystal rod 200 of clamping is converted to the second processing position by the first processing position and (meanwhile using silicon rod conversion equipment 4, goes back band It is dynamic to be initially positioned at silicon rod clamping device 43 and its clamped silicon single crystal rod 200 at pretreatment position and converted by pretreatment position To the first processing position) so that silicon single crystal rod 200 clamped by silicon rod clamping device 43 corresponds to round as a ball and fine grinding device 8.It drives At least a pair of of the grinding wheel 831 moved in round as a ball and fine grinding device 8 can carry out accordingly a pair of of side opposite in silicon single crystal rod 200 It refines operation or corresponding round as a ball operation is carried out to a pair of of connection faceted pebble opposite in silicon single crystal rod 200.

Round as a ball operation further comprises: being positioned using silicon rod clamping device 43 to silicon single crystal rod 200 and rotates monocrystalline Silicon rod 200, enable in round as a ball and fine grinding device 8 second grinding tool 83 according to the amount of feeding along P3 to traverse feed is made, rotate the second grinding tool Grinding wheel 831 in 83 and drive the second grinding tool 83 along R3 to make transverse movement with by the grinding wheel 831 in the second grinding tool 83 to monocrystalline Each connection faceted pebble of silicon rod 200 grind it is round as a ball so that the connection faceted pebble of silicon single crystal rod 200 is ground to preset size simultaneously Whole rounding, that is, connection faceted pebble and side rounding off.The state that silicon single crystal rod 200 implements above-mentioned round as a ball operation can specifically join See that Fig. 5, Fig. 5 are shown as status diagram of the silicon single crystal rod in round as a ball operation.

Fine grinding operation further comprises: by carrying out positioning adjustment to silicon single crystal rod 200 using silicon rod clamping device 43, so that The first opposite side face in silicon single crystal rod 200 corresponds to the second grinding tool of a pair 83 in round as a ball and fine grinding device 4, enables the second grinding tool 83 Relatively second, which holds seat 81, simultaneously drives second to traverse feed, the grinding wheel 831 in the second grinding tool 83 of rotation is made along P3 according to the amount of feeding Grinding tool 83 along R3 to make transverse movement with by the grinding wheel 831 in the second grinding tool 83 to first pair of side in silicon single crystal rod 200 into Row fine grinding；Positive (or reverse) 90 ° of the rotation of silicon single crystal rod 200 is driven by silicon rod clamping device 43, so that in silicon single crystal rod 200 Second opposite side face corresponds to the second grinding tool of a pair 83 in round as a ball and fine grinding device 4, rotates the second grinding wheel in the second grinding tool 83 44 and drive the second grinding tool 83 along R3 to make transverse movement with by the grinding wheel 831 in the second grinding tool 83 in silicon single crystal rod 200 It refines second pair of side.Wherein, the fine grinding operation of any pair of side can for example, provides an amount of feeding, driving is a pair of Grinding wheel 831 in second grinding tool 83 is along R3 to a pair of of side by having ground silicon single crystal rod 200 since transverse shifting inside outside；It is a pair of Grinding wheel 831 is ground to after 200 innermost end of silicon single crystal rod (for example, the innermost end of silicon single crystal rod 200 can be known as bottom) and wears It crosses silicon single crystal rod 200 to stop later, is further added by an amount of feeding, a pair of of grinding wheel is driven to grind along R3 to by interior transverse shifting outward A pair of of side of silicon single crystal rod 200；A pair of of grinding wheel 831 is ground to the outermost end of silicon single crystal rod 200 (for example, can be by silicon single crystal rod 200 outermost end is known as top) stop later and after silicon single crystal rod 200, an amount of feeding is continued growing, a pair of sand is driven Wheel 831 is along R3 to by transverse shifting grinds silicon single crystal rod 200 inside outside；In this way, grinding, increases the amount of feeding, and it is reversed to grind, increase Add the amount of feeding, grinds, after being repeated several times, a pair of of side of silicon single crystal rod 200 can be ground to preset size.As list The silicon single crystal rod of crystalline silicon rod 200 implements the state of above-mentioned fine grinding operation, and for details, reference can be made to Fig. 6, Fig. 6 to be shown as silicon single crystal rod in essence Grind the status diagram in operation.

It is illustrated so that silicon rod 100 is polycrystalline silicon rod as an example below, in the case of silicon rod 100 is polycrystalline silicon rod, first Silicon rod grinding device 6 is corase grinding device, and the second silicon rod grinding device 8 is chamfering and fine grinding device.

Carrying out corase grinding operation to polycrystalline silicon rod by corase grinding device can generally comprise:

Polycrystalline silicon rod 200 is transferred to the first processing position of silicon rod processing platform 21, tool first with silicon rod conversion equipment 4 Body, it drives conveying ontology 41 in silicon rod conversion equipment 4 to rotate, drives silicon rod clamping device 43 and its clamped polycrystalline silicon rod 200 are converted by pre-processing position to the first processing position, so that polycrystalline silicon rod 200 clamped by silicon rod clamping device 43 corresponds to Roughly grind device 6.At least a pair of of grinding wheel 631 in driving corase grinding device 6 can carry out a pair of of side opposite in polycrystalline silicon rod 200 Corresponding corase grinding operation.

Positioning adjustment generally is carried out to polycrystalline silicon rod 200 using silicon rod clamping device 43 about corase grinding operation, so that First opposite side face of polycrystalline silicon rod 200 corresponds to the first grinding tool of a pair 63 in corase grinding device 6；Enable the first grinding tool 63 according to feeding Amount, to traverse feed is made, rotates the grinding wheel 631 in the first grinding tool 63 and drives the first grinding tool 63 along R2 to making transverse movement along P2 To be roughly ground by the grinding wheel 631 in the first grinding tool 63 to first pair of side in polycrystalline silicon rod 200；By silicon rod clamping device 43 Positive (or reverse) 90 ° of the rotation of polycrystalline silicon rod 200 is driven, so that the second opposite side face in polycrystalline silicon rod 200 corresponds to corase grinding dress The first grinding tool of a pair 63 in 6 is set, the grinding wheel 631 in the first grinding tool 63 is rotated and the first grinding tool 63 is driven laterally to transport along R2 to work It moves to be roughly ground by the grinding wheel 631 in the first grinding tool 63 to second pair of side in polycrystalline silicon rod 200.Wherein, any opposite side The corase grinding operation in face can for example, an amount of feeding is provided, drive grinding wheel 631 in a pair of first grinding tool 63 along R2 to from it is outer toward A pair of of side of polycrystalline silicon rod 200 has been ground since interior transverse shifting；A pair of of grinding wheel 631 is ground to 200 innermost end (example of polycrystalline silicon rod Such as, the innermost end of polycrystalline silicon rod 200 can be known as bottom) stop later and after silicon rod 200, it is further added by an amount of feeding, Drive a pair of of grinding wheel 631 along R2 to a pair of of the side for grinding polycrystalline silicon rod 200 by interior transverse shifting outward；A pair of of grinding wheel 631 It is ground to after the outermost end (for example, the outermost end of silicon rod 200 can be known as top) of polycrystalline silicon rod 200 and passes through polycrystalline silicon rod Stop after 200, continue growing an amount of feeding, drives a pair of of grinding wheel 631 along R2 to by transverse shifting grinds polycrystalline inside outside Silicon rod 200；In this way, grinding, increases the amount of feeding, and it is reversed to grind, increase the amount of feeding, grinding, can be by polycrystalline after being repeated several times A pair of of side of silicon rod 200 is ground to preset size.Polycrystalline silicon rod 200 implement the state of above-mentioned corase grinding operation for details, reference can be made to Fig. 7, Fig. 7 are shown as state change schematic diagram of the polycrystalline silicon rod in corase grinding operation.

For chamfering and fine grinding device, by chamfering and fine grinding device carries out chamfering to polycrystalline silicon rod and fine grinding operation can be substantially It include: chamfering operation and fine grinding operation.The granularity of the frosted particle of 8 medium plain emery wheel 831 of chamfering and fine grinding device is less than corase grinding The granularity of the frosted particle of 6 medium plain emery wheel 631 of device.

In practical applications, polycrystalline silicon rod 200 is transferred to the of silicon rod processing platform 21 first with silicon rod conversion equipment 4 Two processing positions specifically drive conveying ontology 41 in silicon rod conversion equipment 4 to rotate, drive silicon rod clamping device 43 and its institute The polycrystalline silicon rod 200 of clamping is converted to the second processing position by the first processing position and (meanwhile using silicon rod conversion equipment 4, goes back band It is dynamic to be initially positioned at silicon rod clamping device 43 and its clamped polycrystalline silicon rod 200 at pretreatment position and converted by pretreatment position To the first processing position) so that polycrystalline silicon rod 200 clamped by silicon rod clamping device 43 corresponds to chamfering and fine grinding device 8.It drives At least a pair of of the grinding wheel 831 moved in round as a ball and fine grinding device 8 can carry out accordingly a pair of of side opposite in polycrystalline silicon rod 200 It refines operation or corresponding chamfering operation is carried out to a pair of of connection faceted pebble opposite in polycrystalline silicon rod 200.

Chamfering operation further comprises: carrying out positioning adjustment, example to polycrystalline silicon rod 200 using using silicon rod clamping device 43 Polycrystalline silicon rod 200 is such as driven to rotate 45 °, so that first pair of corner angle in polycrystalline silicon rod 200 correspond in chamfering and fine grinding device 8 The second grinding tool of a pair 83, enable the second grinding tool 83 opposite second hold seat 81 according to the amount of feeding along P3 to making traverse feed, rotation the Grinding wheel 831 in two grinding tools 83 simultaneously drives the second grinding tool 83 along R3 to making transverse movement by the grinding wheel 831 in the second grinding tool 83 First pair of corner angle of polycrystalline silicon rod 200 are ground, so that first pair of corner angle of polycrystalline silicon rod 200 form chamfering through grinding Face；Positive (or reverse) 90 ° of the rotation of polycrystalline silicon rod 200 is driven by silicon rod clamping device 43, so that second in polycrystalline silicon rod 200 The second grinding tool of a pair 83 in chamfering and fine grinding device 8 is corresponded to corner angle, rotate the grinding wheel 831 in the second grinding tool 83 and is driven Second grinding tool 83 is along R3 to making transverse movement with second pair of corner angle by the grinding wheel 831 in the second grinding tool 83 to polycrystalline silicon rod 200 It is ground, so that second pair of corner angle of polycrystalline silicon rod 200 form fillet surface through grinding.In this way, polycrystalline silicon rod implementation is above-mentioned For details, reference can be made to Fig. 8, Fig. 8 to be shown as status diagram of the polycrystalline silicon rod in chamfering operation for the state of chamfering operation.

Fine grinding operation further comprises: by carrying out positioning adjustment to polycrystalline silicon rod 200 using silicon rod clamping device 43, such as Polycrystalline silicon rod 200 is driven to rotate 45 °, so that the first opposite side face in polycrystalline silicon rod 200 corresponds in chamfering and fine grinding device 8 A pair of second grinding tool 83, enable the second grinding tool 83 opposite second hold seat 81 according to the amount of feeding along P3 to making traverse feed, rotation second Grinding wheel 831 in grinding tool 83 simultaneously drives the second grinding tool 83 along R3 to making transverse movement with right by the grinding wheel 831 in the second grinding tool 83 It refines first pair of side of polycrystalline silicon rod 200；Polycrystalline silicon rod 200 positive (or reverse) is driven to turn by silicon rod clamping device 43 It is 90 ° dynamic, so that the second opposite side face in polycrystalline silicon rod 200 corresponds to the second grinding tool of a pair 83 in chamfering and fine grinding device 8, rotation Turn the grinding wheel 831 in the second grinding tool 83 and drives the second grinding tool 83 along R3 to making transverse movement by the grinding wheel in the second grinding tool 83 It refines second pair of side of 831 pairs of polycrystalline silicon rods 200.Wherein, the fine grinding operation of any pair of side can for example, provides One amount of feeding drives grinding wheel 831 in a pair of second grinding tool 83 along R3 to by having ground polycrystalline silicon rod since transverse shifting inside outside 200 a pair of of side；A pair of of grinding wheel 831 is ground to 200 innermost end of polycrystalline silicon rod (for example, can be by the innermost end of polycrystalline silicon rod 200 Referred to as bottom) stop later and after polycrystalline silicon rod 200, it is further added by an amount of feeding, drives a pair of grinding wheel along R3 to by interior Transverse shifting grinds a pair of of side of polycrystalline silicon rod 200 outward；A pair of of grinding wheel 831 is ground to the outermost end of polycrystalline silicon rod 200 Stop after (for example, the outermost end of polycrystalline silicon rod 200 can be known as top) and after polycrystalline silicon rod 200, continues growing One amount of feeding drives a pair of of grinding wheel 831 along R3 to by transverse shifting grinds polycrystalline silicon rod 200 inside outside；In this way, grinding, increases Add the amount of feeding, it is reversed to grind, increase the amount of feeding, grinding after being repeated several times, can grind a pair of of side of polycrystalline silicon rod 200 It is milled to preset size.Polycrystalline silicon rod as polycrystalline silicon rod 200 implements the state of above-mentioned fine grinding operation for details, reference can be made to Fig. 9, Fig. 9 is shown as status diagram of the polycrystalline silicon rod in fine grinding operation.

It should be noted that above are only exemplary illustration, it is not intended to limit the protection scope of the application, for example, in needle To in the processing job description of chamfering and fine grinding device as the second silicon rod processing unit (plant), be first carried out polycrystalline silicon rod fall Angle operation performs the fine grinding operation of polycrystalline silicon rod again, but is not limited thereto, and in other embodiments, first carries out polysilicon Executed again after the fine grinding operation of stick polycrystalline silicon rod chamfering operation be also it is feasible, still should belong to the protection scope of the application.

In addition, in some embodiments, the silicon rod processing platform in the application silicon rod processing machine can be divided into four function Energy position, then, the silicon rod processing machine may also include third processing unit (plant), set on the third processing district of silicon rod processing platform Position processes operation for carrying out third to silicon rod.In this way, in one embodiment, pretreatment position, the first processing position, second Process position and third processing district it is adjacent two-by-two between in 90 ° of distributions, the rotation of the silicon rod conversion equipment in silicon rod processing machine Angular range is ± 270 °.

In one embodiment, the third processing unit (plant) may be, for example, silicon rod burnishing device, and the silicon rod burnishing device can For carrying out polishing operation to silicon rod.

For silicon rod burnishing device, generally, silicon rod is through the first silicon rod processing unit (plant) and the second silicon rod processing unit (plant) After processing operation, the surface of silicon rod can still have the out-of-flatnesses such as a little recess, protrusions, corresponding therefore, it is necessary to carry out to silicon rod Polishing operation obtain the effect of high flat degree and smooth finish surface to improve the surface of silicon rod.Silicon rod burnishing device is main Including holding seat and at least a pair of of polishing unit, at least a pair of of polishing unit is arranged oppositely in holding on seat, for adding to positioned at third The silicon rod on silicon rod conversion equipment at the position of work area carries out polishing operation.

Further, each polishing unit further includes polishing hairbrush and driving motor, wherein polishing hairbrush and driving Motor is configured on a support, and the polishing hairbrush is controlled by driving motor and actuation (such as rotation), and the support more may be used One is movably arranged at by a driving and reversing mechanism to hold on seat.

In the case of silicon rod is silicon single crystal rod, carrying out polishing operation to silicon single crystal rod by silicon rod burnishing device can be wrapped It includes: the third that silicon single crystal rod transfers to silicon rod processing platform being processed into position first with silicon rod conversion equipment, is clamped and is filled by silicon rod It sets and the silicon single crystal rod of clamping is rotated, at this point, the polishing hairbrush rotation at least a pair of of polishing unit of driving, and by polishing Hairbrush polishes the connection faceted pebble of silicon single crystal rod, wherein the spacing between polishing hairbrush at least a pair of of polishing unit It is the spacing being less than between two diagonal connection faceted pebbles；Then, silicon single crystal rod is positioned by silicon rod clamping device Adjustment, so that the first opposite side face of silicon single crystal rod corresponds at least a pair of of polishing unit, by the throwing at least a pair of of polishing unit Light hairbrush polishes first pair of side of silicon single crystal rod；Then, positioning tune is carried out to silicon single crystal rod by silicon rod clamping device It is whole, so that the second opposite side face of silicon single crystal rod corresponds at least a pair of of polishing unit, by the polishing at least a pair of of polishing unit Hairbrush polishes second pair of side of silicon single crystal rod.

Wherein, when the connection faceted pebble to silicon single crystal rod polishes: silicon single crystal rod is being rotating always, polishes hairbrush Always it being rotating, a pair of polishing hairbrush continues inwardly, to polish next section of each connection faceted pebble of silicon single crystal rod, until It is polished to the bottom of silicon single crystal rod, completes the connection faceted pebble polishing of silicon single crystal rod single；Drive again a pair of of polishing hairbrush from it is interior outward Movement is continued each connection faceted pebble for polishing silicon single crystal rod by polishing hairbrush；In this way, after being repeated several times, it can be by monocrystalline silicon Each connection faceted pebble of stick is polished to the effect of high flat degree and smooth finish surface；When the side to silicon single crystal rod polishes, The polishing of any pair of side can for example, silicon single crystal rod is remained stationary by silicon rod gripping apparatus grips, provides an amount of feeding, is driven Polishing hairbrush in dynamic a pair of of polishing unit polishes a pair of of side of silicon single crystal rod from outer inward movement；A pair of polishing hairbrush is thrown A pair of of polishing hairbrush is driven after light to silicon single crystal rod bottom and after silicon single crystal rod again from interior outward movment to polish list Crystalline silicon rod；In this way, each side of silicon single crystal rod can be polished to the effect of high flat degree and smooth finish surface after being repeated several times Fruit.

In addition, as seen from the above description, in an alternative embodiment, the throwing that silicon rod burnishing device carries out silicon single crystal rod Light processes operation using the process of first connection faceted pebble polishing trailing flank polishing, but is not limited thereto, real in other changes It applies in example, connection faceted pebble is thrown after first side polishing can also be used in the polishing operation that silicon rod burnishing device carries out silicon single crystal rod The process of light answers technical effect having the same.

In the case of silicon rod is polycrystalline silicon rod, carrying out polishing operation to polycrystalline silicon rod by silicon rod burnishing device can be wrapped It includes: the third that polycrystalline silicon rod transfers to silicon rod processing platform being processed into position first with silicon rod conversion equipment, is clamped and is filled by silicon rod It sets and positioning adjustment is carried out to polycrystalline silicon rod, so that the first opposite side face of polycrystalline silicon rod corresponds at least a pair of of polishing unit, by extremely Polishing hairbrush in few a pair of of polishing unit polishes first pair of side of polycrystalline silicon rod；Then, by silicon rod clamping device Positioning adjustment is carried out to polycrystalline silicon rod, so that the second opposite side face of polycrystalline silicon rod corresponds at least a pair of of polishing unit, by least Polishing hairbrush in a pair of polishing unit polishes second pair of side of polycrystalline silicon rod.Wherein, the polishing of any pair of side It can for example, polycrystalline silicon rod is motionless by the positioning of silicon rod clamping device, provides an amount of feeding, at least a pair of of polishing unit of driving In polishing hairbrush come a pair of of side of polishing polycrystalline silicon stick from outer inward movement；At least a pair of of polishing hairbrush is polished to polysilicon At least a pair of of polishing hairbrush is driven to carry out polishing polycrystalline silicon stick from interior outward movment after stick bottom and after polycrystalline silicon rod again； In this way, each side of polycrystalline silicon rod can be polished to the effect of high flat degree and smooth finish surface after being repeated several times.

Further, in an alternative embodiment, in addition to each side to polycrystalline silicon rod carries out polishing operation Except, can also polishing operation be carried out to each fillet surface of polycrystalline silicon rod.When carrying out polishing operation to fillet surface, Positioning adjustment first is carried out to polycrystalline silicon rod by silicon rod clamping device, so that first pair of fillet surface of polycrystalline silicon rod corresponds at least one To polishing unit, first pair of side of polycrystalline silicon rod is polished by the polishing hairbrush at least a pair of of polishing unit；Then, Positioning adjustment is carried out to polycrystalline silicon rod by silicon rod clamping device, so that the second opposite side face of polycrystalline silicon rod corresponds at least a pair of throw Light unit polishes second pair of side of polycrystalline silicon rod by the polishing hairbrush at least a pair of of polishing unit.To diagonal plane The specific operation process polished can be found in the aforementioned process description polished to side, and details are not described herein.

Certainly, the application silicon rod processing machine may also include other devices.For example, in one embodiment, the application silicon rod adds Work machine may include flatness detector, for carrying out planar smoothness detection to the silicon rod after completion grinding operation.In reality In operation, when carrying out planar smoothness detection, the flat of the tested surface is determined according to the relative distance value of each test point Whole degree is determined by the difference between maxima and minima in these relative distance values for will measuring, if the difference Value is less than standard value or falls into critical field, then shows that the flatness of the tested surface meets specification.It is examined using flatness Survey instrument, on the one hand, can detect by the planar smoothness to silicon rod to examine whether silicon rod meets after each processing operation Product requirement, with the effect of each processing operation of determination；On the other hand, detected by planar smoothness to silicon rod, also can between The wear condition of processing component in each processing unit (plant) is obtained to obtain, so that real-time perfoming is calibrated or is corrected, or even maintenance or more It changes.

From the foregoing, it will be observed that the application silicon rod processing machine, including base, silicon rod clamping device, the first silicon rod grinding device and Second silicon rod grinding device, wherein clamped silicon rod to be processed in a manner of accumbency using silicon rod clamping device, and benefit The first grinding operation is carried out to the silicon rod of accumbency by transverse shifting with the first silicon rod grinding device and the second silicon rod is ground Device carries out the second grinding operation to the silicon rod of accumbency by transverse shifting, realizes that silicon rod is completed accordingly under accumbency mode Grinding operation, with structure, simple, silicon rod keeps high stability, silicon rod grinding device traveling stabilization and silicon rod grinding efficiency The advantages that high.

It include pretreatment position, the first processing district meanwhile for silicon rod grinding operation, in the application silicon rod processing machine Position and the second processing position, in this way, silicon rod can execute to orderly and seamless connection loading pretreatment, (be ground by the first silicon rod Mill apparatus) the first grinding operation and (passing through the second silicon rod grinding device) second grinding operation, multiple manufacturing procedures can be one It is completed in a silicon rod processing machine, improves the globality and production efficiency of silicon rod grinding operation conscientiously, it is ensured that product grinding is made The quality of industry.In addition, multiple silicon rods can execute corresponding grinding operation, respective independence and phase on different processing positions simultaneously It is mutually noiseless, the grinding operation of assembly line is formed, the efficiency of silicon rod grinding operation is greatly improved.

Figure 14 is please referred to, the process for showing that silicon rod processing machine implements silicon rod processing operation in another embodiment of the application is illustrated Figure.The silicon rod processing machine includes base, silicon rod conversion equipment, the first silicon rod grinding device and the second silicon rod grinding device, Wherein, the silicon rod processing platform on base includes at least pretreatment position, the first processing position and the second processing position, the One silicon rod grinding device corresponds to the first processing position, and the second silicon rod grinding device corresponds to the second processing position, silicon rod conversion Device is set to the centered region of silicon rod processing platform, has the silicon rod clamping device for laterally clamping silicon rod.In following example In, it is assumed that silicon rod conversion equipment has three silicon corresponding with pretreatment position, the first processing position and the second processing position Stick clamping device, pretreatment position, the first processing position and the second processing position on the silicon rod processing platform two-by-two it Between in 120 ° of distributions, three silicon rod clamping devices on the silicon rod conversion equipment are between any two also in 120 ° of distributions.And it is false If the trend according to the sequence of the pretreatment position, the first processing position and the second processing position is defined as forward direction.

As shown in figure 14, the process for implementing silicon rod processing operation can comprise the following steps that

Step S21 pre-processes the first silicon rod.In the step s 21, to the first silicon rod carry out pretreatment include: by Silicon rod to be processed is smoothly delivered in a manner of accumbency to the pretreatment position of processing platform, and is in silicon rod in pretreating zone In grasping part in silicon rod clamping device at position between first clamping member and the second clamping piece；It drives in silicon rod clamping device At least one of first clamping member and the second clamping piece move laterally, by the silicon rod that accumbency mode is placed between them It is clamped.In actual operation, by silicon rod to be processed, smoothly delivery to pretreatment position can pass through one in a manner of accumbency Silicon rod handler is completed.In addition, before using silicon rod gripping apparatus grips silicon rod also coplanar flat can be carried out to silicon rod The operation such as degree detection and position adjustment.

Step S23 carries out the first grinding operation to the first silicon rod and pre-processes to the second silicon rod.In step S23, First grinding operation is carried out to the first silicon rod and the second silicon rod is pre-processed, is specifically included: silicon rod conversion equipment being enabled to rotate First predetermined angle (such as rotating forward 120 °) is converted with that will complete pretreated first silicon rod by pre-processing position to first Process position；It enables the first silicon rod grinding device carry out first to the first silicon rod clamped in a manner of accumbency on the first processing position to grind Operation is ground, in this stage, the second silicon rod to be processed is loaded into pretreatment position and is pre-processed, by the second silicon rod by position Silicon rod clamping device at pretreatment position is clamped in a manner of accumbency.By step S23, to conversion to the first processing district First silicon rod of position carries out the first grinding operation, meanwhile, complete loading and the pretreatment of the second silicon rod.

Step S25 carries out the second grinding operation to the first silicon rod, carries out the first grinding operation to the second silicon rod and to the Three silicon rods are pre-processed.In step s 25, the second grinding operation is carried out to the first silicon rod, the second silicon rod progress first is ground Mill and pre-processes third silicon rod operation, specifically includes: silicon rod conversion equipment being enabled to rotate the second predetermined angle (such as just To 120 °) it is converted so that the first silicon rod of the first grinding operation will be completed by the first processing position to the second processing position and will be complete It is converted by pre-processing position to the first processing position at pretreated second silicon rod；The second silicon rod grinding device is enabled to process to second The first silicon rod on position carries out the second grinding operation, in this stage, enables the first silicon rod grinding device on the first processing position The second silicon rod carry out the first grinding operation and third silicon rod to be processed be loaded into pretreatment position and pre-processing. By step S105, the second grinding operation is carried out to the first silicon rod of conversion to the second processing position, to conversion to the first processing Second silicon rod of position carries out the first grinding operation, meanwhile, complete loading and the pretreatment of third silicon rod.

Step S27, the first silicon rod is unloaded, to the second silicon rod carry out the second grinding operation and to third silicon rod into The first grinding operation of row.In step s 27, the first silicon rod is unloaded, to the second silicon rod carry out the second grinding operation and First grinding operation is carried out to third silicon rod, is specifically included: enabling silicon rod conversion equipment rotation third predetermined angle (such as reverse 240 ° or 120 ° positive) with will complete the first silicon rod of the second grinding operation by the second processing position convert to pre-process position with And the second silicon rod for completing the first grinding operation is converted by the first processing position to the second processing position and will complete to pre-process Third silicon rod by pre-process position convert to first processing position；Enable silicon rod handler that will pre-process the first silicon on position Stick carries out unloading and the 4th silicon rod to be processed is loaded into pretreatment position and to the be located at the pretreatment position Four silicon rods are pre-processed, and in this stage, the second silicon rod grinding device are enabled to carry out the to the second silicon rod on the second processing position Two grinding operations and the third silicon rod for enabling the first silicon rod grinding device process on position to first carry out the first grinding operation.It is logical Step S107 is crossed, is unloaded after the first silicon rod for completing the second grinding operation is converted to pretreatment position, to conversion to the Second silicon rod of two processing positions carries out the second grinding operation, carries out first to the third silicon rod of conversion to the first processing position and grinds Operation is ground, meanwhile, loading and the pretreatment of the 4th silicon rod are completed, each processing position executes in good order corresponding processing and makees Industry.

In practical applications, specifically, for the silicon rod of different kenels, by the first silicon rod grinding device to silicon Stick carries out the first grinding operation and also has different variations to silicon rod the second grinding operation of progress by the second silicon rod grinding device Combine example.Such as: if silicon rod is silicon single crystal rod, the first silicon rod grinding device is the circle of contact and corase grinding device, for carrying out to silicon rod The circle of contact and corase grinding operation, the second silicon rod grinding device are round as a ball and fine grinding device, for carrying out round as a ball and fine grinding operation to silicon rod. If silicon rod is polycrystalline silicon rod, the first silicon rod grinding device is corase grinding device, and for carrying out corase grinding operation to silicon rod, the second silicon rod is ground Mill apparatus is chamfering and fine grinding device, for carrying out chamfering and fine grinding operation to silicon rod.As for for performed by different silicon rods Specific grinding operation see detailed description above, details are not described herein.

In the process of above-mentioned implementation silicon rod processing operation, silicon rod to be processed can be clamped in a manner of accumbency and to cross Sleeping silicon rod sequentially carries out the first grinding operation and the second grinding operation, realizes that silicon rod is sequentially completed multiple tracks under accumbency mode and added Work industry, has many advantages, such as that silicon rod keeps high stability, silicon rod grinding device traveling stabilization and silicon rod grinding efficiency high.

Meanwhile passing through above-mentioned each step, it can be seen that Each performs its own functions for the processing unit (plant) on each processing position, Ge Gejia Tooling set between orderly and seamlessly shifted and automate realize silicon rod processing multiple procedures, formed assembly line make Industry improves the quality of production efficiency and product processing operation.

The principles and effects of the application are only illustrated in above-described embodiment, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, carry out modifications and changes to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technical idea such as At all equivalent modifications or change, should be covered by claims hereof.

Claims

1. a kind of silicon rod clamping device characterized by comprising

The first clamping member being oppositely arranged and the second clamping piece；And

Clamping drive mechanism, for drive described at least one of first clamping member and the second clamping piece to move laterally with So that first clamping member and the second clamping piece are clamped silicon rod to be processed in a manner of accumbency.

2. silicon rod clamping device according to claim 1, which is characterized in that the clamping drive mechanism includes:

Translate rack rails；

Driving gear with driving power source, the driving gear are engaged with the translation rack rails and are clamped with described first The linkage of at least one of part and the second clamping piece.

3. silicon rod clamping device according to claim 2, which is characterized in that the clamping drive mechanism further include: locking Control piece, for moving laterally at least one of described first clamping member and the second clamping piece and being resisted against the silicon At least one of described first clamping member and the second clamping piece are controlled in lock state when stick.

4. silicon rod clamping device according to claim 3, which is characterized in that the locking control piece includes:

Brake rack gear；And

Braking member with brake power source links at least one of described first clamping member and the second clamping piece； The braking member is controlled by the brake power source and moves to fasten in the braking rack gear.

5. silicon rod clamping device according to claim 4, which is characterized in that the braking rack gear and the translating rack are simultaneously Row setting.

6. silicon rod clamping device according to claim 4, which is characterized in that the brake power source is oil cylinder, the oil Cylinder is connect by piston rod with the braking member.

7. silicon rod clamping device according to claim 4, which is characterized in that the brake power source is cylinder, the gas Cylinder is connect by piston rod with the braking member.

8. silicon rod clamping device according to claim 4, which is characterized in that in the braking member with the braking rack gear The corresponding place of fastening is equipped with and fastens tooth.

9. silicon rod clamping device according to claim 1, which is characterized in that further include: rotary drive mechanism, for driving At least one of described first clamping member and the second clamping piece rotate to drive the silicon rod clamped rotation.

10. silicon rod clamping device according to claim 9, which is characterized in that described first clamping member includes the first clamping Pedestal and rotation be set to first Holding seat on the first clamping part, second clamping piece include the second Holding seat and Rotation is set to the second clamping part on second Holding seat, and the rotary drive mechanism is for driving described first clamping member In the first clamping part and second clamping piece at least one of the second clamping part rotate.

11. a kind of silicon rod processing machine characterized by comprising

Base has silicon rod processing platform；The silicon rod processing platform is equipped at least one processing position；

Silicon rod clamping device as described in any one of claims 1 to 10, for giving silicon rod to be processed in a manner of accumbency With clamping；And

Silicon rod grinding device, at the processing position of the silicon rod processing platform, for by transverse shifting come to the silicon The silicon rod that stick clamping device is clamped in a manner of accumbency carries out grinding operation.

12. silicon rod processing machine according to claim 11, which is characterized in that the silicon rod grinding device includes:

Seat is held, is moved laterally by the relatively described silicon rod processing platform of a transverse moving mechanism；

Be arranged oppositely at least a pair of of the grinding tool held on seat, under the drive for holding a transverse shifting to being located at plus Silicon rod clamped by silicon rod clamping device at the position of work area carries out grinding operation.

13. silicon rod processing machine according to claim 12, which is characterized in that the grinding tool passes through a grinding tool driving and reversing mechanism It is movably arranged at described hold on seat.

14. silicon rod processing machine according to claim 11, which is characterized in that further include silicon rod handler, for will be to The silicon rod of processing loads to processing position and unloads the silicon rod after completion grinding operation from processing position.

15. a kind of silicon rod conversion equipment characterized by comprising

Convey ontology；

On the conveying ontology, at least silicon rod clamping device as described in any one of claims 1 to 10, being used for will Silicon rod to be processed is clamped in a manner of accumbency；And

Driving mechanism is converted, for driving conveying ontology rotation to drive the silicon rod clamping device and its clamped silicon rod to exist It is converted between multiple function positions.

16. a kind of silicon rod processing machine characterized by comprising

Base has silicon rod processing platform；The silicon rod processing platform be equipped with pretreatment position, first processing position and Second processing position；

Silicon rod conversion equipment as claimed in claim 15, is set on the silicon rod processing platform, for by silicon rod to be processed It is clamped in a manner of accumbency and is converted it between pretreatment position, the first processing position and the second processing position；

First silicon rod grinding device, first set on the silicon rod processing platform processes position, for carrying out the to the silicon rod One grinding operation；And

Second silicon rod grinding device, second set on the silicon rod processing platform processes position, makees for grinding to completion first Silicon rod after industry carries out the second grinding operation.

17. silicon rod processing machine according to claim 16, which is characterized in that the first silicon rod grinding device includes:

First holds seat, is moved laterally by the relatively described silicon rod processing platform of the first transverse moving mechanism；

It is arranged oppositely and holds at least a pair of first grinding tool on seat in described first, for holding the band of a transverse shifting described first First grinding operation is carried out to silicon rod clamped by the silicon rod clamping device being located at the first processing position under dynamic.

18. silicon rod processing machine according to claim 17, which is characterized in that first grinding tool is retreated by the first grinding tool Mechanism and be movably arranged at described first and hold on seat.

19. silicon rod processing machine according to claim 16, which is characterized in that the second silicon rod grinding device includes:

Second holds seat, is moved laterally by the relatively described silicon rod processing platform of the second transverse moving mechanism；

It is arranged oppositely and holds at least a pair of second grinding tool on seat in described second, for holding the band of a transverse shifting described second Second grinding operation is carried out to silicon rod clamped by the silicon rod clamping device being located at the second processing position under dynamic.

20. silicon rod processing machine according to claim 19, which is characterized in that second grinding tool is retreated by the second grinding tool Mechanism and be movably arranged at described second and hold on seat.

21. silicon rod processing machine according to claim 16, which is characterized in that further include silicon rod handler, for will be to The silicon rod of processing loads the pretreatment to pretreatment position and by the silicon rod after completion grinding operation from silicon rod processing platform It is unloaded on position.

22. silicon rod processing machine according to claim 16, which is characterized in that the pretreating zone on the silicon rod processing platform Position, the first processing position and the second processing position are in 120 ° of distributions, the rotational angle of the silicon rod conversion equipment between any two Range is ± 240 °.

23. silicon rod processing machine according to claim 16, which is characterized in that further include third processing unit (plant), be set to described The third of silicon rod processing platform processes position；Pretreatment position on the silicon rod processing platform, the first processing position, second plus Work area position and third processing district it is adjacent two-by-two between in 90 ° of distributions, the rotational angle range of the silicon rod conversion equipment is ± 270°。