CN213970494U

CN213970494U - Silicon rod grinding machine

Info

Publication number: CN213970494U
Application number: CN202022080733.4U
Authority: CN
Inventors: 卢建伟; 李鑫; 钱春军; 曹奇峰; 张峰
Original assignee: Tiantong Rijin Precision Technology Co ltd
Current assignee: Tiantong Rijin Precision Technology Co ltd
Priority date: 2020-09-02
Filing date: 2020-09-21
Publication date: 2021-08-17
Anticipated expiration: 2030-09-21
Also published as: WO2022048192A1; CN114131480B; CN114131480A

Abstract

The application discloses silicon rod grinds machine, including frame, silicon rod transfer device, corase grind device and accurate grinding device, wherein, the frame has silicon rod processing platform, be equipped with first processing position and second processing position on the silicon rod processing platform, silicon rod transfer device is including transporting main part and a plurality of silicon rod anchor clamps and transposition mechanism, utilizes transposition mechanism drive a plurality of silicon rod anchor clamps and the silicon rod of centre gripping to change the position on first processing position and second processing position so that the corase grind device can carry out corase grind operation and accurate grinding device to the silicon rod and can carry out the accurate grinding operation to the silicon rod, makes at same moment corase grind device and accurate grinding device in the silicon rod grinds machine all are in operating condition, can promote grinding efficiency and reduce to grind the operation consuming time, and can promote economic benefits.

Description

Silicon rod grinding machine

Technical Field

The application relates to the technical field of silicon workpiece processing, in particular to a silicon rod grinding machine.

Background

At present, with the importance and the openness of the society on the utilization of green renewable energy sources, the field of photovoltaic solar power generation is more and more valued and developed. In the field of photovoltaic power generation, conventional crystalline silicon solar cells are fabricated on high quality silicon wafers that are cut and subsequently processed by multi-wire saw from a pulled or cast silicon ingot.

In the conventional silicon wafer manufacturing process, taking a single crystal silicon product as an example, the general working procedures may include: firstly, a silicon rod cutting machine is used for cutting the original long silicon rod to form a plurality of sections of short silicon rods; after the truncation is finished, performing the operation of squaring the truncated short silicon rod by using a silicon rod squaring machine to form a single crystal silicon rod; then, processing operations such as surface grinding, chamfering and the like are carried out on each silicon rod, so that the surface of each silicon rod is shaped to meet the corresponding requirements on flatness and dimensional tolerance; and subsequently, slicing the silicon rod to obtain a silicon wafer.

Generally, in the process of grinding and chamfering silicon rods, a single silicon rod is loaded through two processes of rough grinding and finish grinding, then the silicon rod is conveyed and unloaded after the rough grinding and the finish grinding are carried out in sequence, then another silicon rod is loaded, ground (rough grinding and finish grinding) and unloaded, in the common large-batch processing, the silicon rod grinding machine repeats the processing process, the grinding tool of the silicon rod grinding machine has a large amount of time in an idle state, the grinding efficiency is low, and the economic benefit of silicon rod processing is influenced.

Disclosure of Invention

In view of the above-mentioned disadvantages of the related art, the present application aims to disclose a silicon rod grinding machine for solving the problems of low grinding efficiency and the like in the prior art.

To achieve the above and other related objects, the present application discloses a silicon rod grinding machine, including: the base is provided with a silicon rod processing platform; a first processing area and a second processing area are arranged on the silicon rod processing platform; the silicon rod transfer device is arranged on the base and comprises a transfer main body, and a plurality of silicon rod clamps and a transposition mechanism which are arranged on the transfer main body, wherein the transposition mechanism is used for driving the silicon rod clamps and silicon rods clamped by the silicon rod clamps to switch positions on a first processing position and a second processing position; wherein the clamping center lines corresponding to the silicon rod clamps are respectively positioned in the same horizontal height; the rough grinding device is arranged at the first processing position and is used for performing rough grinding operation on the silicon rod clamped by the silicon rod clamp positioned at the first processing position in the silicon rod transfer device; and the fine grinding device is arranged at the second processing position and is used for performing fine grinding operation on the silicon rod clamped by the silicon rod clamp positioned at the second processing position in the silicon rod transfer device.

The application discloses silicon rod grinds machine, including frame, silicon rod transfer device, corase grind device and accurate grinding device, wherein, the frame has silicon rod processing platform, be equipped with first processing position and second processing position on the silicon rod processing platform, silicon rod transfer device is including transporting main part and a plurality of silicon rod anchor clamps and transposition mechanism, utilizes transposition mechanism drive a plurality of silicon rod anchor clamps and the silicon rod of centre gripping to change the position on first processing position and second processing position so that corase grind device can carry out corase grind operation and accurate grinding device to the silicon rod and can carry out the accurate grinding operation to the silicon rod, makes at same moment corase grind device and accurate grinding device in the silicon rod grinds machine all are in operating condition, can promote silicon rod grinding efficiency and reduce to grind the operation consuming time, and can promote economic benefits.

Drawings

The specific features of the invention to which this application relates are set forth in the appended claims. The features and advantages of the invention to which this application relates will be better understood by reference to the exemplary embodiments described in detail below and the accompanying drawings. The drawings are briefly described as follows:

fig. 1a is a schematic view showing the structure of the silicon rod grinder according to the present application in one embodiment.

FIG. 1b is a top view of FIG. 1 a.

Fig. 1c is a schematic view showing a partial configuration of the silicon rod grinding machine shown in fig. 1 a.

Fig. 1d shows a partial structural view of a silicon rod clamp of the silicon rod grinding machine according to the present application in one embodiment.

Fig. 2a is a schematic view showing the structure of the silicon rod grinder according to the present application in one embodiment.

Fig. 2b is a top view of fig. 2 a.

Fig. 2c is a schematic view of the rough grinding apparatus of the silicon rod grinding machine shown in fig. 2a according to an embodiment.

Fig. 3a shows a side view of a chamfering device of the silicon rod grinding machine of the present application in one embodiment.

Fig. 3b shows a side view of a chamfering device of the silicon rod grinding machine of the present application in another embodiment.

Fig. 3c is a schematic structural view of a chamfering apparatus of the silicon rod grinding machine according to the present application in one embodiment.

Fig. 4 is a schematic structural view of a grinding repair device of a silicon rod grinder according to an embodiment of the present invention.

Fig. 5a is a schematic view showing the structure of a silicon rod grinder according to the present application in another embodiment.

Fig. 5b shows a top view of fig. 5 a.

Fig. 6 is a schematic view illustrating a configuration of a silicon rod transfer device according to an embodiment of the present invention.

Fig. 7 is a top view of fig. 6.

Fig. 8 is a schematic view of fig. 7 with the first and second loading members removed.

Fig. 9 is a schematic view showing the silicon rod transfer device according to the present invention after loading a silicon rod.

Fig. 10 is a schematic view showing a structure of a centering adjustment mechanism in the silicon rod transfer device according to the present application.

Fig. 11 shows a partial enlargement of fig. 5 a.

Detailed Description

The following description of the embodiments of the present application is provided for illustrative purposes, and other advantages and capabilities of the present application will become apparent to those skilled in the art from the present disclosure.

In the following description, several embodiments of the present application are described with reference to the accompanying drawings. It is to be understood that other embodiments may be utilized and mechanical composition, structure, and operational changes may be made without departing from the spirit and scope of the present disclosure. The following detailed description is not to be taken in a limiting sense, and the scope of embodiments of the present application is defined only by the claims of the issued patent. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. Spatially relative terms, such as "upper," "lower," "left," "right," "lower," "below," "lower," "above," "upper," and the like, may be used herein to facilitate describing one element or feature's relationship to another element or feature as illustrated in the figures.

Although the terms first, second, etc. may be used herein to describe various elements in some instances, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first silicon rod clamp may be referred to as a second silicon rod clamp, and similarly, a second silicon rod clamp may be referred to as a first silicon rod clamp, without departing from the scope of the various described embodiments. Both the first and the second silicon rod clamp are described in the context of a certain silicon rod clamp, but they are not the same silicon rod clamp unless the context clearly indicates otherwise. Similar considerations apply to the first and second guide structures, the first and second machining locations, the first and second loading members, the first and second transmission assemblies, etc.

Also, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It will be further understood that the terms "comprises," "comprising," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, operations, elements, components, items, species, and/or groups, but do not preclude the presence, or addition of one or more other features, steps, operations, elements, components, species, and/or groups thereof. The terms "or" and/or "as used herein are to be construed as inclusive or meaning any one or any combination. Thus, "A, B or C" or "A, B and/or C" means "any of the following: a; b; c; a and B; a and C; b and C; A. b and C ". An exception to this definition will occur only when a combination of elements, functions, steps or operations are inherently mutually exclusive in some way.

In the processing of silicon materials, silicon wafers put into industrial production can be obtained through a plurality of processes, the original silicon materials are usually long silicon rods and are in cylindrical structures, and a silicon rod cutting machine is used for cutting the long silicon rods to obtain a plurality of sections of short silicon rods; cutting the cut silicon rod sections by a silicon rod cutting machine to form a single crystal silicon rod, wherein the cross section of the obtained single crystal silicon rod is similar to a rectangle (including a similar square); the surface damage of the obtained silicon single crystal rod needs to be removed, chamfering is carried out on the edge angle to eliminate the internal stress, then, the surface grinding and chamfering are carried out on the silicon single crystal rod, so that the surface shaping of the silicon single crystal rod can meet the requirements of corresponding flatness and dimensional tolerance, and the final slicing can be carried out subsequently.

In the process of grinding the silicon single crystal rod, coarse grinding and then fine grinding are needed, grinding is realized by a corresponding coarse grinding tool and a corresponding fine grinding tool respectively, in the traditional working mode, after the single silicon single crystal rod is subjected to coarse grinding in a coarse grinding working area, the silicon single crystal rod is conveyed to a fine grinding working area for fine grinding, after the fine grinding is completed, the processed silicon single crystal rod is conveyed out of the working area, the process is repeatedly operated in a large amount of grinding works, the grinding sequence of the fine grinding and the coarse grinding ensures that the silicon rod grinding machine inevitably has the grinding tool in a waiting state in the operation, for example, the fine grinding tool is in the waiting state when the coarse grinding tool is subjected to coarse grinding, the coarse grinding tool is in the waiting state when the fine grinding tool is subjected to fine grinding, and the time consumed in the grinding process is long.

The application discloses silicon rod grinding machine, including frame, silicon rod transfer device, corase grind device and correct grinding device, wherein, the frame has silicon rod processing platform, be equipped with first processing position and second processing position on the silicon rod processing platform at least, be equipped with corase grind device on first processing position, be equipped with correct grinding device on second processing position, silicon rod transfer device includes transporting the main part and locating a plurality of silicon rod anchor clamps and transposition mechanism on transporting the main part, transposition mechanism is used for driving a plurality of silicon rod anchor clamps and the silicon rod that centre gripping thereof shift position on first processing position and second processing position; wherein the clamping center lines corresponding to the silicon rod clamps are respectively positioned in the same horizontal height; the transposition mechanism is utilized to drive the silicon rod clamps and the silicon rods clamped by the silicon rod clamps to be sequentially transferred to the first processing position and the second processing position so that the coarse grinding device can perform coarse grinding operation on the silicon rods and the fine grinding device can perform fine grinding operation on the silicon rods, the coarse grinding device and the fine grinding device in the silicon rod grinding machine are both in a working state at the same moment, and the silicon rod grinding efficiency is improved.

In the embodiments provided herein, a three-dimensional space defined by a first direction, a second direction, and a third direction is defined for defining the direction and the operation mode between different structures, where the first direction, the second direction, and the third direction are all linear directions and are mutually perpendicular to each other, and a vertical direction, that is, a plumb line direction, a vertical direction, an up-down direction, or a lifting direction may be defined as the third direction. In certain embodiments provided herein (e.g., the embodiment shown in fig. 5a below), the first direction may also be referred to as an X-direction, the second direction may also be referred to as a Y-direction, and the third direction may also be referred to as a Z-direction.

Referring to fig. 1a and 1b, fig. 1a is a schematic view illustrating a structure of a silicon rod grinder according to an embodiment of the present invention, and fig. 1b is a top view illustrating the silicon rod grinder shown in fig. 1 a. As shown in fig. 1a and 1b, the silicon rod grinding machine includes a machine base 1, a silicon rod transfer device 2, a rough grinding device 3, and a finish grinding device 4.

The base 1 serves as a main body part of the silicon rod processing equipment and is used for providing a working platform, and in one example, the size and the weight of the base 1 are large so as to provide a larger mounting surface and firmer overall stability. It should be understood that the machine base 1 may serve as a base for different structures or components for performing machining operations in the silicon rod machining equipment, and the specific structure and shape of the machine base 1 may be changed based on different functional requirements or structural requirements; in some examples, the machine base 1 comprises a fixing structure or a limiting structure, such as a base, a rod body, a column, a frame body, etc., for receiving different components of the silicon rod processing equipment, and the machine base 1 is described herein.

Meanwhile, in some examples, the base may be an integrated base, and in other examples, the base may include a plurality of independent bases.

The silicon rod grinding machine of the present application is used for grinding silicon rods having a quasi-rectangular (including quasi-square) cross section, wherein a plurality of silicon rods may be, for example, single crystal silicon rods or polycrystalline silicon rods, taking single crystal silicon rods as an example, which are obtained by cutting a starting silicon rod through a silicon rod and thereafter squaring the cut silicon rod through a silicon rod squaring device, the starting silicon rod being generally rod-shaped silicon crystal grown from a melt by a czochralski method or a suspension zone melting method.

The base is provided with a silicon rod processing platform, and the silicon rod processing platform is provided with a plurality of processing areas. It should be noted that, in the examples provided in the present application, the processing location is defined by a travel path and a range of the processing device at the processing location, for example, the rough grinding device of the silicon rod grinding machine is disposed at the first processing location, and the range of the first processing location is a range occupied by the rough grinding device in the process of completing the grinding operation; similarly, the second machining zone is the area occupied by the refining apparatus for the completion of the refining operation. Simultaneously, the direction of processing position and the direction of waiting for the position be the long limit direction of this position.

In the embodiment shown in fig. 1a and 1b, the silicon rod processing platform can be configured to conform to the shape of the machine base, and a first processing region and a second processing region are provided thereon.

The silicon rod transfer device is arranged on the base and used for transferring the silicon rod. In the embodiment shown in fig. 1a, the silicon rod transfer device 2 further comprises a transfer body 21, and a plurality of silicon rod clamps 23 and a transposition mechanism (not shown in the drawings) arranged on the transfer body 21.

Wherein, the centre lines corresponding to the silicon rod clamps 23 arranged on the transfer main body 21 are located at the same horizontal height, it should be understood that, in this arrangement, the silicon rod clamped by the silicon rod clamps is in a horizontal state, and correspondingly, the rough grinding device and the fine grinding device are used for grinding the side surfaces of the horizontal silicon rod.

In an embodiment of the application, the silicon rod transfer device is disposed in a central area of the silicon rod processing platform, and the transposition mechanism includes a transposition rotating shaft, and drives the transposition rotating shaft to rotate by a preset angle to drive the silicon rod clamps to perform a conversion action.

In an embodiment of the present application, the transfer body 21 may be disposed in a central region of the silicon rod processing platform, and each side surface of the transfer body 21 may serve as a mounting surface for mounting a plurality of silicon rod clamps 23, as shown in fig. 1a, one silicon rod clamp 23 is mounted on each side surface of the transfer body 21.

The transfer main body 21 is driven by the transposition mechanism to switch the silicon rod clamp 23 arranged on the transfer main body 21 among different processing areas, so that the silicon rod clamped by the silicon rod clamp 23 can be switched among different processing areas, and different processing procedures such as coarse grinding and fine grinding can be completed on the silicon rod; meanwhile, a plurality of silicon rod clamps 23 arranged on the transferring main body 21 can be respectively positioned at different processing positions, and then at the same time, the silicon rods clamped by the different silicon rod clamps 23 are respectively subjected to different processing procedures, so that the coarse grinding device and the fine grinding device in the silicon rod processing equipment are simultaneously in working states, and the processing efficiency is favorably improved.

The transposition mechanism (not shown) can be used as a driving mechanism for the processing position where the silicon rod clamp 23 is switched on the transferring main body 21. In one implementation mode, the transposition mechanism comprises a transposition rotating shaft, and thus, the transposition rotating shaft is driven to rotate by a preset angle, so that the transfer main body 21 and each silicon rod clamp 23 arranged on the transfer main body can be switched at each processing position. In some embodiments, the indexing axis is located at the geometric center of the transferring body 21, and the indexing axis is located in the direction of the plumb line.

The transposition rotating shaft is arranged in the direction of the plumb line, namely, in the transposition process, the height of the silicon rod clamp 23 arranged on the transferring main body 21 is unchanged, and the height of the clamping center line of the corresponding silicon rod clamp 23 is unchanged. Here, the plurality of silicon rod clamps 23 on the transfer body 21 of the silicon rod grinding machine are arranged such that the clamping center lines are located at the same level, and the level of the clamping center lines of the plurality of silicon rod clamps 23 is not changed during the controlled rotation of the transfer body 21, so that when any one of the silicon rod clamps 23 is loaded with a silicon rod, the height of the silicon rod axis line is adjusted to the same predetermined height, that is, the same level where the clamping center lines of the plurality of silicon rod clamps 23 are located, so that the silicon rod axis line and the clamping center line are aligned in the third direction (i.e., the direction of the plumb line).

It should be understood that, the clamping center lines of the plurality of silicon rod clamps described herein are at the same level, and not limited to the same precise height range, in some embodiments, when the height difference of the clamping center lines corresponding to the plurality of silicon rod clamps disposed on the transfer body is within a predetermined range, the clamping center lines of the plurality of silicon rod clamps may be considered to be at the same level.

In other embodiments, the height of the clamping center line corresponding to the silicon rod clamp can be further obtained by the control system of the silicon rod grinding machine, and correspondingly, when any silicon rod clamp is loaded with a silicon rod to be processed, the height of the axis of the silicon rod is adjusted to the horizontal height corresponding to the silicon rod clamp.

The silicon rod clamp is used for clamping two end faces of a silicon rod, correspondingly, the silicon rod clamp is certainly provided with two opposite clamping parts used for contacting a pair of end faces of the silicon rod, and the clamping central line is a connecting line of the two clamping parts corresponding to the centers of two contact surfaces at two ends of the silicon rod; the center of the clamping part is not limited to the geometric center of the contact surface, and can be a certain point on the contact surface which is set artificially; in some embodiments provided herein, the silicon rod clamp may further drive the silicon rod to rotate along a silicon rod axis, in this case, the clamping center line is a rotation axis direction of the clamping portion. Generally, in an actual processing scene, in order to keep the position (or height) of the axis of the silicon rod unchanged when the silicon rod is driven to rotate by the silicon rod clamp, when the silicon rod to be processed is loaded to the silicon rod clamp, the clamping center line of the silicon rod clamp is generally aligned with (i.e. coincides with) the axis of the silicon rod.

The transposition mechanism comprises a transposition rotating shaft, and the transposition rotating shaft is driven to rotate by a preset angle so as to drive the silicon rod clamps to perform conversion action. As described above, the transposition rotating shaft is controlled to rotate by a preset angle so that the transfer body 21 and the silicon rod clamps 23 provided therein are switched at the respective processing locations. Therefore, the transposition mechanism further comprises a transposition driving unit for driving the transposition rotating shaft to rotate.

In some embodiments, the index driving unit may include: the gear comprises a driving gear, a driving source and a driven gear, wherein the driving gear is in shaft connection with the driving source, and the driven gear is meshed with the driving gear and is connected to the transposition rotating shaft. In some embodiments, the index drive unit may include a drive source directly associated with the index shaft. Wherein the power source may be a servo motor, for example.

In practical application, for example, the shift driving unit includes a driving gear, a driving source, and a driven gear, the driving source is used to drive the driving gear to rotate in a forward direction, the driven gear and the related transposition rotating shaft thereof are driven to rotate by a preset angle in a first rotation direction through the meshing of the driving gear and the driven rack, so that the transfer body and each silicon rod clamp arranged on the transfer body are switched from the current processing position to the next processing position or other processing positions, or the driving gear can be driven by the driving source to rotate reversely, the driven gear and the associated transposition rotating shaft are driven to rotate by a preset angle in a second rotating direction through the meshing of the driving gear and the driven rack, so that the transfer body and the respective silicon rod clamps provided therewith are switched from the current processing location to the next preceding processing location or to other preceding processing locations.

Taking the example that two adjacent processing areas (for example, a first processing area and a second processing area) in each processing area are different from each other by 120 degrees, assuming that, in an initial state, a silicon rod is clamped by one silicon rod clamp in the silicon rod transfer device, and the silicon rod clamp and the silicon rod clamped by the silicon rod clamp correspond to the first processing area, the driving source is used to drive the driving gear to rotate counterclockwise, and the driving gear is engaged with the driven rack rail to drive the driven gear and the related transposition rotating shaft to rotate clockwise by a preset angle of 120 degrees, so that the silicon rod clamp and the silicon rod clamped by the silicon rod clamp in the silicon rod transfer device are transposed from the first processing area to the second processing area. Or, in another situation, in an initial state, a silicon rod is clamped by one silicon rod clamp in the silicon rod transfer device, the silicon rod clamp and the silicon rod clamped by the silicon rod clamp correspond to the second processing position, the driving gear is driven by the driving source to rotate clockwise, the driven gear and the related transposition rotating shaft are driven to rotate counterclockwise by a preset angle of 120 degrees through the meshing of the driving gear and the driven rack, and the silicon rod clamp in the silicon rod transfer device and the silicon rod clamped by the silicon rod clamp are transposed to the first processing position from the second processing position. The preset angle is not strictly limited, for example, the preset angle is not strictly limited to 120 °, and in an actual processing scene, the preset angle may allow a certain deviation from 120 °, for example, the preset angle may be 120 ° ± 10 °, and other angles.

In an actual processing scene, in order to avoid error accumulation after multiple transfers of the transfer main body during continuous processing, a clamping center line of the silicon rod clamp is parallel or approximately parallel to a long side direction of a processing location, the preset angle can be determined by the clamping center line direction of the silicon rod at the current processing location and the long side direction of a next processing location, for example, the preset angle is used for enabling the clamping center line of the silicon rod clamp to be parallel or approximately parallel to the long side of the next processing location after the silicon rod clamp is transferred to the next processing location, and the parallel or approximately parallel is, for example, an included angle between the clamping center line of the silicon rod and the long side direction of the processing location is 0-10 °.

In one embodiment of the present application, the silicon rod clamp comprises: the clamping arms are arranged on the transferring main body and used for clamping two end faces of the silicon rod; the axis of the silicon rod clamped by the pair of clamping arms is consistent with the clamping center line of the pair of clamping arms; and the clamping arm driving mechanism is used for driving at least one clamping arm in the pair of clamping arms to move along the horizontal line so as to adjust the clamping distance between the pair of clamping arms.

The utility model provides an among the silicon rod grinding machine the centre gripping central line of silicon rod anchor clamps all sets up along the horizontal direction, here, the plumb line direction is located in the transposition pivot, works as when the main part of transporting drives silicon rod anchor clamps and rotates along the transposition pivot, the centre gripping central line of silicon rod anchor clamps still follows the horizontal direction (the centre gripping central line of silicon rod anchor clamps is a water flat line promptly), simultaneously, the centre gripping central line and the coincidence of silicon rod axial lead of silicon rod anchor clamps. Generally, when the angle between different processing areas of the silicon rod grinding machine in a working state is a certain value, and a silicon rod clamp is transferred from one processing area to another processing area, the preset angle for rotating the transposition rotating shaft is equal to the angle between the two processing areas. The silicon rod grinding machine has the advantages that the clamped silicon rod is in a horizontal state, and the coarse grinding device and the fine grinding device in the processing area positioned outside the transfer main body can be arranged to be provided with grinding surfaces positioned in a horizontal plane so as to grind the upper side surface and the lower side surface of the horizontal silicon rod; when the silicon rod clamp drives the silicon rod to be converted to any processing position, the silicon rod clamp drives the silicon rod to rotate along a clamping center line (a silicon rod axial lead), so that the upper side surface and the lower side surface of the silicon rod can be adjusted to be in a horizontal state, and in the state, the grinding surface of the grinding device can contact the upper side surface and the lower side surface of the silicon rod and move along the advancing direction of the grinding tool so that the grinding surface covers the upper side surface and the lower side surface of the silicon rod, so that grinding can be completed; under the situation, when the preset angle is different from the difference angle between the two machining areas before and after conversion, the grinding precision cannot be influenced.

Therefore, compared with the silicon rod multi-station processing equipment for grinding the vertical silicon rod, the silicon rod grinding machine can grind the side surface of the silicon rod without accurately positioning the preset angle at which the transfer main body drives the silicon rod clamp to rotate when the silicon rod clamp is driven to switch among a plurality of processing areas; in other words, the transportation main part drives silicon rod anchor clamps pivoted and predetermines the angle and is used for realizing that the silicon rod is switched to another processing position with the contact grinding apparatus, nevertheless does not influence the grinding precision, and the silicon rod grinds machine of this application can save from this to transporting the rotatory accurate positioning structure of main part or operation procedure, so is of value to simplifying equipment and processing technology.

It should be noted that, in the embodiments provided in the present application, the difference between different regions is an angle, for example, the difference between different processing regions or the difference between a processing region and another region, such as a waiting region, is an angle between the long side directions corresponding to the different regions.

As mentioned above, the silicon rod transfer device comprises a plurality of silicon rod clamps. For example, in the embodiment shown in fig. 1a and 1b, a silicon rod holder 23 is mounted on each side of the transfer body 21 in the silicon rod transfer device 2, the silicon rod holder 23 is used for holding a silicon rod, wherein when the silicon rod is held by the silicon rod holder 23, the axis of the held silicon rod is a horizontal line. In the present embodiment, the silicon rod holders 23 have the same specification, and the structure and the operation principle thereof are the same, but the present invention is not limited thereto, and in other embodiments, the silicon rod holders 23 may have different specifications.

With respect to the silicon rod clamps 23, any one of the silicon rod clamps 23 includes a pair of clamp arms and a clamp arm driving mechanism.

Referring to fig. 1c, a schematic diagram of a portion of the silicon rod grinding machine shown in fig. 1a is shown.

As shown in fig. 1c, the pair of clamping arms 231 are disposed opposite to each other along a horizontal line, and are used for clamping two end surfaces of the silicon rod. The silicon rod is a slender structure which is cut, the length direction of the silicon rod is arranged along a horizontal line, and the end faces are sections at two ends in the length direction. In the embodiment shown in fig. 1c, two arms 231 of the pair of arms 231 extend outwardly from a side of the transfer body 21. Wherein, any one of the pair of clamp arms 231 is provided with a clamp portion 232, that is, each clamp arm 231 is provided with a clamp portion 232.

Of course, the specific structure and the arrangement orientation of the silicon rod clamp are not limited to the view shown in fig. 1c, for example, a pair of clamp arms of the silicon rod clamp are arranged along a horizontal line object, and the clamp arms may be arranged in a plumb line direction, or in a horizontal line direction as shown in fig. 1c, it should be understood that the silicon rod clamp may be arranged horizontally with the clamping center line of the silicon rod clamp as a horizontal line.

Referring to fig. 1c, the clamping arm driving mechanism is configured to drive at least one clamping arm 231 of a pair of clamping arms 231 to move along a horizontal line so as to adjust a clamping distance between the pair of clamping arms 231. In the embodiment of fig. 1c, two clamping arms 231 of the pair of clamping arms 231 are oppositely disposed along a horizontal line, and the clamping arm driving mechanism can drive at least one clamping arm 231 of the pair of clamping arms 231 to move along the horizontal line so as to adjust the clamping distance between the oppositely disposed clamping arms 231.

In an embodiment provided herein, as shown in fig. 1c, the clamping arm driving mechanism may include: an opening and closing guide rail 2331 and an opening and closing driving unit (not shown), wherein the opening and closing guide rail 2331 is arranged on the transferring body 21 along a horizontal line and is used for arranging a pair of clamping arms 231, and the opening and closing driving unit is used for driving at least one clamping arm 231 of the pair of clamping arms 231 to move along the opening and closing guide rail.

In certain embodiments, the gripper arm drive mechanism may drive a first gripper arm of the pair of gripper arms closer to a second gripper arm along a horizontal line, decreasing a gripping spacing between the two gripper arms, thereby clamping a silicon rod positioned between the two gripper arms. Correspondingly, the clamping arm driving mechanism can drive a first clamping arm in the pair of clamping arms to move away from a second clamping arm along the horizontal line, and the clamping distance between the two clamping arms is increased, so that the clamped silicon rod is released.

Assuming that a first one of the pair of clamping arms is driven by the clamping arm driving mechanism to move along the horizontal line, and a second one of the pair of clamping arms is fixedly arranged on the transferring body through a clamping arm mounting seat or the like, in one embodiment, the opening and closing driving unit of the clamping arm driving mechanism further comprises: the lead screw is arranged along the horizontal line and is associated with a first clamping arm in the pair of clamping arms, and the driving source is associated with the lead screw and is used for driving the lead screw to rotate so as to enable the associated first clamping arm to move along the horizontal line. For example, when the driving source drives the screw rod to rotate forward, the associated first clamping arm is driven to approach the second clamping arm along the horizontal line, so that the clamping distance between the two clamping arms is reduced, or when the driving source drives the screw rod to rotate reversely, the associated first clamping arm is driven to move away from the second clamping arm along the horizontal line, so that the clamping distance between the two clamping arms is increased. The drive source may be, for example, a servo motor.

Of course, the opening and closing driving unit may still adopt other structures, for example, in a certain other embodiment, the opening and closing driving unit may include: rack, drive gear and driving motor, wherein, the rack along horizontal line setting and with first arm lock in a pair of arm lock is relevant, drive gear is controlled by driving motor and with the rack toothing, so, driving motor drives drive gear rotatory, drives rack and the first arm lock of relevance move along horizontal line. For example, when the driving source drives the driving gear to rotate forward, the first clamping arm associated with the rack is driven to approach towards the second clamping arm along the horizontal line, so that the clamping distance between the two clamping arms is reduced, or when the driving source drives the driving gear to rotate reversely, the first clamping arm associated with the rack is driven to move away from the second clamping arm along the horizontal line, so that the clamping distance between the two clamping arms is increased.

In certain embodiments, the gripper arm drive mechanism may drive two gripper arms of the pair of gripper arms to move toward each other, decreasing the gripping distance between the two gripper arms, thereby clamping the silicon rod between the two gripper arms. Correspondingly, the clamping arm driving mechanism can drive two clamping arms in the pair of clamping arms to move back and forth, so that the clamping distance between the two clamping arms is increased, and the clamped silicon rod is released.

Assuming that both of the pair of clamp arms are driven by the clamp arm driving mechanism to move along the horizontal line, in one embodiment, the opening and closing driving unit in the clamp arm driving mechanism further includes: the bidirectional screw rod is arranged along a horizontal line, the bidirectional screw rod is a left-handed screw rod and a right-handed screw rod, two sections of threads are distributed on the rod body, the rotation directions of the two sections of threads are opposite, namely one section of thread is a left-handed thread, the other section of thread is a right-handed thread, the left-handed thread can be associated with one clamping arm of the pair of clamping arms, the right-handed thread can be associated with the other clamping arm of the pair of clamping arms, and the driving source is associated with the bidirectional screw rod and used for driving the bidirectional screw rod to rotate so that the associated first clamping arm and the associated second clamping arm move in the opposite direction or move in the opposite direction along the horizontal line. For example, the driving source drives the bidirectional screw rod to rotate in a forward direction, so as to drive the associated first and second clamp arms to move in a direction along the horizontal line (i.e., to approach each other) and reduce the clamping distance between the two clamp arms, or the driving source drives the screw rod to rotate in a reverse direction, so as to drive the associated first and second clamp arms to move in a direction away from each other (i.e., to move away from each other) and increase the clamping distance between the two clamp arms. The driving source can be a servo motor, for example, and is located in the middle section of the bidirectional screw rod. Of course, the clamp arm driving mechanism may adopt other structures, for example, in another embodiment, the clamp arm driving mechanism may include: the driving gear is positioned between the pair of racks to be meshed with the pair of racks and controlled by the driving motor, so that the driving motor drives the driving gear to rotate to drive the pair of racks and the associated first clamping arm and second clamping arm to move towards or away from each other along the horizontal line. For example, when the driving source drives the driving gear to rotate in a forward direction, the first and second arms associated with the pair of racks are driven to move in a direction along the horizontal line (i.e., to approach each other) to decrease the clamping distance between the two arms, or when the driving source drives the driving gear to rotate in a reverse direction, the first and second arms associated with the pair of racks are driven to move in a direction away from each other (i.e., to move away from each other) along the horizontal line to increase the clamping distance between the two arms.

In an embodiment of the application, any one of the pair of clamping arms is provided with a clamping portion and a clamping portion rotating mechanism, and the clamping portion rotating mechanism is used for driving the clamping portion and the clamped silicon rod to rotate.

In an embodiment of the present application, the clamping portion of the clamping arm is designed to rotate, as shown in fig. 1d, wherein fig. 1d is a partial structural schematic view of an embodiment of the silicon rod clamp of the present application. In the embodiment shown in fig. 1d, each silicon rod clamp 23 further comprises a clamping part rotating mechanism 234 for driving the clamping part 232 of the clamping arm 231 of the silicon rod clamp 23 to rotate. In one implementation manner of this embodiment, the clamping portion 232 of the clamping arm 231 is driven by the clamping portion rotating mechanism 234 to rotate around the silicon rod axis, and the clamped silicon rod correspondingly rotates around the silicon rod axis. In the actual processing operation, the silicon rod is driven to rotate along the axis by the clamping part rotating mechanism 234, the position relation of the clamped silicon rod relative to the grinding device or the chamfering device can be adjusted to determine the grinding surface or the chamfering surface relative to the silicon rod, the grinding surface and the chamfering required by the silicon rod are arranged on four surfaces in the length direction and edges between the four surfaces, and the clamping arms provided by the application can realize the selection and control of different grinding surfaces and different edges of the silicon rod.

In certain embodiments, the clamping part is a multi-point contact type clamping head, it should be understood that the contact manner between the multi-point contact type clamping head and the end surface of the silicon rod is not limited to point contact, for example, as shown in fig. 1d, the clamping part 232 has a plurality of protrusions 2321 for contacting the end surface of the silicon rod, for example, wherein each protrusion 2321 may be in surface contact with the end surface of the silicon rod. In one embodiment, the projection of the clamping portion may also be connected to the clamping portion body by a spring along the horizontal line, whereby a multi-point floating contact may be formed, so that the silicon rod clamp may adapt to the flatness of the end surface of the silicon rod when clamping the end surface of the silicon rod for clamping the silicon rod. In some examples, the clamping portion of the clamping portion for contacting the end face of the silicon rod may also be connected to the clamping arm by a universal mechanism, such as a universal ball, which clamping portion may thereby be adapted to clamp end faces of silicon rods having different inclinations.

In some embodiments, a pair of clamping portions of the silicon rod clamp are provided as rigid structures for contacting the silicon rod portion, so as to prevent the clamped silicon rod from being disturbed during the cutting operation and the grinding operation to affect the processing precision.

In practical applications, the clamping portion rotating mechanism may include a structure that is rotatably disposed on two clamping portions of the pair of clamping arms, and a driving source for driving at least one of the two rotatable structures to rotate. In certain implementations, the abrasive surface is disposed on a rotatable platform, which may be configured with a custom regular or irregular cross-section. Thus, the clamping part rotating mechanism can be used for driving the platform and the grinding surface on the platform to rotate.

In an embodiment of the present application, the rotatable platform may be provided as a whole hinged with a hinge device having a locking function, and may be rotatable along an axis of a horizontal line. The axis of the rotating shaft is connected to the clamping part rotating mechanism.

In an embodiment of the application, the clamping portion of the clamping arm may be configured as a rotatable circular truncated cone, and a circular plane of the circular truncated cone contacts with the end surface of the silicon rod and keeps relatively stationary with the end surface of the silicon rod after clinging to the end surface of the silicon rod. The silicon rod clamping part further comprises a locking structure, and the clamping arm clamping part is in a locking state when a selected plane is ground. In the switching of different grinding surfaces, the silicon rod clamping part is driven by the clamping part rotating mechanism to rotate along the circle center of the circular truncated cone.

In one implementation, the clamping portion of the clamping arm includes a rotatable circular table and a series of protruding contacts disposed on the circular table, each of the contacts having a contact plane. The circular truncated cone is driven by the clamping part rotating mechanism to rotate, in an implementation mode of the embodiment, the protruding length of the contact is adjustable in the position of a horizontal line, so that the protruding length of the contact can be adjusted according to the end face of the silicon rod when the silicon rod is clamped, and each grinding surface and the end face of the silicon rod are in a tight attaching state. The protruding length is the length of a horizontal line from the circular plane of the circular truncated cone to the contact plane of the contact.

In an embodiment of the present application, the clamping portion of the silicon rod clamp is provided with a pressure sensor to adjust a protruding length of the contact based on the detected pressure state. In general, in the process of clamping a silicon rod, a pair of clamping arms of the first silicon rod clamp are driven by a clamping arm driving mechanism to approach each other along a horizontal line until a grinding surface of the clamping portion contacts with an end surface of the silicon rod to be clamped, and when the clamping portion is provided with a plurality of contacts and a pressure value of partial contact with the end surface of the contacted silicon rod is detected to be less than a set value or a set area, the clamping degree can be changed by adjusting the protruding length of the contacts (generally facing the approach direction of the end surface of the silicon rod); or each clamping portion of the pair of clamping arms of the first silicon rod clamp is provided with a grinding surface, in the process of clamping the silicon rod, the clamping arm driving mechanism drives the end surfaces of the pair of clamping arms facing to the two ends of the silicon rod to approach each other, after the clamping portions contact with the end surfaces of the silicon rod, the clamping degree of the silicon rod is detected by the pressure sensor, and when the set pressure range is reached, the clamping arm driving mechanism controls to stop the opposite movement of the pair of clamping arms.

The clamping part rotating mechanism can be arranged on one clamping arm of the pair of clamping arms so as to drive the clamping parts of the pair of clamping arms and the clamped silicon rod to rotate; or the clamping part rotating mechanism is arranged on each clamping arm of the pair of clamping arms and controls the two clamping parts of the pair of clamping arms to rotate in the same angle and direction in a coordinated motion mode. In some implementations, the drive source in the grip-rotating mechanism may be provided as a drive motor.

Thus, in the embodiment of the present application, the silicon rod clamps configured by using the silicon rod transfer device can clamp the silicon rod in a horizontal manner and can drive the clamped silicon rod to rotate by a predetermined angle by using the axis line as a rotating shaft, wherein the axis line direction of the silicon rod is a horizontal line.

Borrow by two terminal surfaces of silicon rod anchor clamps centre gripping silicon rod, by the transportation main part transports silicon rod anchor clamps to the processing position, corase grind device and accurate grinding device can grind the centre gripping silicon rod of processing position in place. The rough grinding device is arranged at the first processing position and is used for rough grinding operation of the silicon rod at the first processing position of the silicon rod processing platform. And the finish grinding tool is arranged at the second processing position and is used for performing rough grinding operation on the silicon rod at the second processing position of the silicon rod processing platform.

In the actual processing scene, the silicon rod anchor clamps will wait to grind the silicon rod and be horizontal centre gripping, drive the silicon rod anchor clamps by transporting the main part and transport to the first processing position and the second processing position that roughly grind device and accurate grinding device correspond respectively in proper order, can carry out the processing operation to the silicon rod in first processing position and second processing position in proper order.

It should be understood that the shape of the transfer body and the position of the silicon rod clamps on the transfer body determine the angle to be changed by the transfer body when the rough grinding operation (or the finish grinding operation) is to be performed on the next silicon rod after the rough grinding operation (or the finish grinding operation) is performed on the silicon rod by the rough grinding tool (or the finish grinding tool). In order to simplify the equipment layout of the silicon rod grinding machine of the present application and to simplify the transfer process required for the processing device (i.e., the rough grinding device and the finish grinding device) to perform the grinding operation, the present application also provides the following embodiments:

in certain embodiments, the transfer body is equilateral triangular in profile in the horizontal plane.

Taking the example that the transposition mechanism comprises a transposition rotating shaft, the rotating center of the transferring main body can be arranged at the centroid (geometric center) of an equilateral triangle, and for any initial moment, the transferring main body can be overlapped with the position of the initial moment every time the transferring main body rotates 120 degrees in the clockwise direction or the anticlockwise direction.

In some embodiments, in which the profile of the transfer body in the horizontal plane is an equilateral triangle, one silicon rod clamp is disposed outside each side of the triangle of the profile of the transfer body, wherein the clamping centerline of any one silicon rod clamp is parallel to the corresponding side.

In a specific implementation manner, for a silicon rod clamp, the silicon rod clamp is arranged outside one side of the outline of the transfer main body, for example, the silicon rod clamp can be arranged on a horizontal guide rail, a guide groove or a guide pillar outside the triangular side, and the clamping center line of the silicon rod clamp is parallel to the corresponding side.

With this arrangement, when the transfer body is driven by the transposition mechanism to rotate by a preset angle of 120 °, the silicon rod correspondingly processed at the same processing position can be replaced from the silicon rod outside one side of the transfer body to the silicon rod outside the other side of the transfer body, for example, after the rough grinding device at the first processing position performs rough grinding on one single crystal silicon rod, and after the transfer body is driven by the transposition mechanism to rotate by 120 °, the rough grinding device can perform rough grinding on the other single crystal silicon rod. Of course, it should be understood that the predetermined angle is not limited to 120 °, for example, the transferring body may be driven by the shifting mechanism to rotate by an angle of 120 ° ± 10 °, and the same processing region may process the silicon rod held by the silicon rod clamp corresponding to the other side of the transferring body.

It should be understood that in the silicon rod grinding machine of the present application, the transfer body is provided in the central region of the silicon rod processing platform, and the rough grinding device and the fine grinding device are provided outside the relative transfer body. For the realization grinds the side of the silicon rod that is horizontal centre gripping, the mill face of corase grind grinding apparatus is located in the horizontal plane among the grinder, and, in the mill face of finish grind grinding apparatus was located in the horizontal plane, the main part of transporting is after rotating the processing position place in order to switch silicon rod anchor clamps and is located, and the silicon rod by the centre gripping is unchangeable by the horizontal height of the upper and lower two sides of the silicon rod of centre gripping, or, borrow again, the clamping part of silicon rod anchor clamps drives the silicon rod and rotates and can be located the horizontal plane with the face adjustment of treating of silicon rod, consequently need not to drive silicon rod anchor clamps pivoted to transport the main part and predetermine angle accurate positioning and can carry out the grinding to the silicon rod side.

In some embodiments, the long side of the first processing region is at an angle of 60 ° with respect to the extension of the long side of the second processing region, wherein the direction of the long side of the first processing region is the direction of travel of the rough grinding tool in the rough grinding apparatus and the direction of the long side of the second processing region is the direction of travel of the finish grinding tool in the finish grinding apparatus. And the advancing directions of the rough grinding tool and the finish grinding tool respectively correspond to the horizontal direction.

In an actual processing scene, the axis of the silicon rod clamped by the silicon rod clamp in a grinding state is parallel (or approximately parallel) to the long side direction of the processing area, and when the grinding tool moves along the advancing direction, the distance between the grinding tool and the silicon rod is unchanged, so that the grinding operation is favorably carried out, and the equipment is favorably simplified. For this purpose, the angle of the phase difference between the long side of the first processing location and the long side of the second processing location determines the angle at which the transfer body needs to be transferred for transferring the same silicon rod clamp from one processing location to another processing location.

On the other hand, the angles between the silicon rod clamps arranged on the transfer body determine the angle which needs to be changed when the transfer body needs to perform fine grinding on a second silicon rod clamped by another silicon rod clamp after a corresponding process, such as fine grinding operation corresponding to a second processing position, is performed on a first silicon rod clamped by one silicon rod clamp at the same processing position. The included angle between the long edge of the first processing area and the long edge of the second processing area is the same as the included angle between the adjacent silicon rod clamps arranged on the transferring main body, so that after the transferring main body is driven to convert the preset angle, the clamping center line of any silicon rod clamp is parallel or approximately parallel to the long edge of the processing area where the silicon rod clamp is located.

The long edge of the first processing position and the long edge of the second processing position form an included angle of 60 degrees, the outline of the transfer main body on the horizontal plane is in a regular triangle shape, the included angle of 60 degrees is formed between the clamping center line of the silicon rod clamp arranged on the outer side of any one edge and the clamping center line of the silicon rod clamp adjacent to the clamping center line, and after the transposition main body drives the silicon rod clamp to convert a preset angle (for example, 120 degrees), the clamping center line of any silicon rod clamp is parallel or approximately parallel to the long edge of the processing position where the silicon rod clamp is located.

In some embodiments, the silicon rod processing platform is further provided with a waiting location, and in a waiting state, a first edge of the transfer body profile corresponds to the waiting location, a second edge corresponds to the first processing location, and a third edge corresponds to the second processing location.

In this case, the waiting state is a state in which a clamping center line corresponding to a silicon rod clamp on the transfer body is parallel or approximately parallel to a silicon rod loaded at the waiting location, and in this state, a contour edge provided with the silicon rod clamp is regarded as a first edge, a second edge of the contour of the transfer body corresponds to the first processing location, and a third edge corresponds to the second processing location. Therefore, the waiting area can carry out loading or blanking operation on the silicon rod, the first processing area can carry out coarse grinding operation, the second processing area can carry out fine grinding operation, and different processing areas are in working states at the same time; meanwhile, the silicon rod clamp is driven by the transferring main body to be switched at different positions, seamless connection of different grinding processes can be achieved for the same silicon rod, and the processing efficiency of the silicon rod grinding machine is improved.

Meanwhile, the silicon rod grinding machine of the present application may also be changed in other ways, for example, other processing locations may be further disposed on the silicon rod processing platform, and the following embodiments are also provided for this purpose.

In some embodiments, the silicon rod processing platform is further provided with a third processing location; the silicon rod grinding machine further comprises a chamfering device which is arranged at the third processing position and used for chamfering the silicon rod clamped by the silicon rod clamp positioned at the third processing position in the silicon rod transfer device. In some embodiments, when different sides of the cut silicon rod are ground or edges are chamfered by the silicon rod processing apparatus, the silicon rod held by the silicon rod holder is driven to rotate by the holding part rotating mechanism of the silicon rod holder. The silicon rod section is rectangle or quasi-rectangle after cutting usually, when grinding different sides, the ground face switching of grinding the relative silicon rod of grinding apparatus can be realized to certain angle such as 90 degrees of clamping part slewing mechanism control silicon rod rotation, when carrying out the chamfer to different edges, accessible control clamping part rotates certain angle such as 45 degrees, realization such as 135 degrees. Under the condition that the grinding surface that the grinding device provided is the plane, when carrying out the chamfer to the silicon rod, the silicon rod that the clamping part slewing mechanism steerable was held rotates different angles and carries out chamfer realization many times, for example, accomplish the grinding back of a side to the silicon rod, to an edge that this side is adjacent and the edge relative with this edge, accessible rotation certain angle for example 40 °, 45 °, 50 equidistance angle carry out chamfer many times, obtain the silicon rod that passes through more slick and sly at different side junctures. The angles are all rotational angles from the initial position of grinding. The chamfering method can refer to patent publications such as CN108942570A, and the silicon rod is driven to rotate by a certain angle, and the grinding tool is matched with the silicon rod to feed relative to the silicon rod so as to grind the edge of the cut silicon rod. In this example, by controlling the relative movement between the silicon rod clamp and the grinding device, the grinding device can grind and chamfer the cut silicon rod.

In some embodiments, the silicon rod processing apparatus further comprises a chamfering device for grinding the edge of the cut silicon rod. In general, the chamfering work for the silicon rod easily causes a large loss of the grinding tool, and here, the grinding surface and the chamfering of the silicon rod are performed by the grinding whetstone and the chamfering whetstone of the chamfering device, respectively, so that the service life of the grinding whetstone can be increased.

In some embodiments, the third processing location is arranged between the first processing location and the second processing location, and the chamfering device is used for chamfering the roughly ground silicon rod held by the silicon rod clamp located at the third processing location in the silicon rod transfer device; or after the third processing position is arranged at the second processing position, the chamfering device is used for chamfering the finely ground silicon rod clamped by the silicon rod clamp positioned at the third processing position in the silicon rod transfer device.

Referring to fig. 2a and 2b, fig. 2a is a schematic structural view of the silicon rod grinding machine according to an embodiment of the present application, and fig. 2b is a top view of fig. 2 a. As shown in fig. 2a and 2b, the silicon rod grinding machine includes a machine base 1, a silicon rod transfer device 2, a rough grinding device 3, a finish grinding device 4, and a chamfering device 5.

It should be noted that, in the embodiments provided in the present application, in which the silicon rod grinding machine is provided with the chamfering device and the corresponding chamfering device, and in the embodiments, in which only the first processing location and the second processing location are provided in the silicon rod grinding machine, or in the embodiments, in which the first processing location and the second processing location and the waiting location are provided in the silicon rod grinding machine, the base, the silicon rod transfer device, the rough grinding device, and the finish grinding device have similar structures, functions, and processing manners.

For example, in the embodiment shown in fig. 2a and 2b, the machine base 1 is still used as a main body component of the silicon rod processing equipment for providing a working platform. Of course, in this example, the specific structure and shape of the base 1 may be changed based on different functional requirements or structural requirements; the silicon rod processing platform is provided with a third processing area, correspondingly, the base 1 can be rectangular, and three rectangular sides of the base can correspond to the first processing area, the second processing area and the third processing area respectively.

In the exemplary embodiment shown in fig. 2a, 2b, the machine base 1 is of a rectangular overall design, and the silicon rod processing platform is designed to be rectangular in conformity with the shape of the machine base 1. One or more sides of silicon rod processing platform are equipped with the processing position district, for example for first processing position district, second processing position district, and third processing position district, wherein, the third processing position is located between first processing position district and the second processing position district, specifically, first processing position district is located the first side of silicon rod processing platform, the second side of silicon rod processing platform is located to the third processing position district, the second side is adjacent to first side, the third side of silicon rod processing platform is located to the second processing position district, the third side is adjacent to the second side and just to first side, namely, first processing position differs 90 with the third processing position, third processing position differs 90 with the second processing position. In the embodiments of the present application, the corresponding silicon rods may be processed in the first processing region, the third processing region, and the second processing region independently.

The silicon rod transfer device is arranged on the base and used for transferring the silicon rod. In the embodiment shown in fig. 2a and 2b, the silicon rod transfer device 2 further comprises a transfer body 21, and a plurality of silicon rod clamps 23 and an indexing mechanism (not shown in the drawings) arranged on the transfer body 21.

The silicon rod transfer device 2 is intended to transfer a processed silicon rod between the processing locations of the silicon rod processing platform, and therefore, in an embodiment of the present application, the transfer body 21 is disposed in the central region of the silicon rod processing platform, and the transfer body 21 is designed to be rectangular in shape in compliance with the silicon rod processing platform. Each side surface of the rectangular transfer body 21 may serve as a mounting surface for mounting a plurality of silicon rod clamps 23, and as shown in fig. 2a and 2b, one silicon rod clamp 23 is mounted on each of the four side surfaces of the transfer body 21.

In addition, in the embodiment, the silicon rod transferring device 2 may switch the transferring body 21 and each silicon rod clamp 23 disposed therein at each processing location through the transposition mechanism to transfer the silicon rod clamped by each silicon rod clamp 23 to the corresponding processing location for performing the corresponding processing operation. The detailed structure and function of the silicon rod clamp 23 can refer to the embodiment shown in fig. 1a and 1b, and are not described herein again.

Here, the transposition mechanism may be configured to include a transposition rotating shaft, and thus, the transposition rotating shaft is driven to rotate by a preset angle, so that the transfer main body 21 and each silicon rod clamp 23 provided therein may be switched at each processing location. In some embodiments, the indexing axis is located at the geometric center of the transferring body 21, and the indexing axis is located in the direction of the plumb line. The structure of the transposition mechanism and the manner of driving the transfer main body to rotate can refer to the foregoing embodiments, and details are not repeated here.

Of course, in the embodiment where the silicon rod processing platform is provided with the third processing region, when the plurality of processing regions have different positional relationships, the rotation angle of the transfer body driven by the transposition mechanism may be changed accordingly.

Taking the aforementioned example that the difference between two adjacent processing areas in each processing area is 90 °, it is assumed that, in an initial state, a silicon rod is held by one silicon rod clamp in the silicon rod transfer device and the silicon rod held by the silicon rod clamp corresponds to the first processing area, the driving gear is driven by the driving source to rotate counterclockwise, and the driven gear and the associated transposition shaft thereof are driven to rotate clockwise by a preset angle of 90 ° (or 180 °) by the engagement between the driving gear and the driven rack, so that the silicon rod clamp in the silicon rod transfer device and the silicon rod held by the silicon rod clamp are transposed from the first processing area to the third processing area (or the second processing area). Or, in another situation, in an initial state, a silicon rod is clamped by one silicon rod clamp in the silicon rod transfer device, the silicon rod clamp and the silicon rod clamped by the silicon rod clamp correspond to the second processing location, the driving gear is driven by the driving source to rotate clockwise, and the driven gear and the related transposition rotating shaft thereof are driven to rotate counterclockwise by a preset angle of 90 degrees (or 180 degrees) through the meshing between the driving gear and the driven rack, so that the silicon rod clamp and the silicon rod clamped by the silicon rod transfer device are transposed from the second processing location to the third processing location (or the first processing location). The preset angle is not strictly limited, and may be, for example, 90 ° (or 180 °) or may be, in an actual processing scenario, deviated from 90 ° (or 180 °), for example, 90 ° ± 10 ° (or 180 ° ± 10 °), or other angles.

For a feasible structure and implementation manner of the rough grinding device and the finish grinding device, a silicon rod grinding machine provided with a first processing area, a second processing area and a third processing area is taken as an example for description. Of course, the finish grinding device and the rough grinding device can also be used for the silicon rod grinding machine which is only provided with the first processing area and the second processing area.

In an embodiment, such as the embodiment shown in fig. 2a, 2b, the rough grinding device 3 comprises: a rough grinding attachment structure 31, at least one pair of rough grinding stones 33, a rough grinding stone advancing and retreating mechanism 35, and a rough grinding stone traveling mechanism 37.

The rough grinding mounting structure 31 is disposed on the base and corresponds to the first processing area, and is used for disposing at least one pair of rough grinding tools 33. In the embodiment shown in fig. 2a and 2b, the rough grinding mounting structure 31 is disposed at the edge of the silicon rod processing platform of the machine base 1, and is used for arranging at least one pair of rough grinding tools 33. The rough grinding installation structure 31 may be, for example, an installation structure plate, an installation beam, or an installation frame constructed by multiple components. Taking the rough grinding installation structure 31 as an example of an installation structure plate, the installation structure plate is a rectangular structure plate in a regular shape, and has a certain height and a certain length, wherein the height of the installation structure plate can ensure that at least one pair of rough grinding tools 33 can be arranged, and the length of the installation structure plate at least needs to ensure that the length of the installation structure plate can cover the silicon rod to be subjected to rough grinding, for example, the length of the installation structure plate corresponds to the length of the first processing area. The side of the mounting structure plate facing the first machining area serves as a mounting surface for mounting at least one pair of rough grinding tools 33. The length of the first processing zone bit is the span along the long side direction of the first processing zone bit, and the long side direction of the first processing zone bit is the advancing direction of the rough grinding tool.

The pair of rough grinding tools are disposed on the rough grinding mounting structure, and specifically, the pair of rough grinding tools are disposed on a mounting side of the rough grinding mounting structure in a direction opposite to a plumb line, such that the grinding surfaces of the pair of rough grinding tools are located in opposite horizontal planes, that is, the grinding surfaces of two rough grinding tools of the pair of rough grinding tools are located in a first horizontal plane and a second horizontal plane respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the plumb line. In the embodiment shown in fig. 2a and 2b, the pair of rough grinding tools 33 are disposed on the rough grinding mounting structure 31 through a rough grinding tool support.

With respect to the rough grinding tool, in certain implementations, the rough grinding tool includes a rough grinding wheel and a rotary motor coupled to the rough grinding wheel. The rough grinding wheels have certain granularity and roughness, two opposite rough grinding wheels in the at least one pair of rough grinding tools are respectively provided for two symmetrical grinding surfaces of the clamped silicon rod, and in certain embodiments, the rough grinding wheels are circular and have a hollow middle. The rough grinding wheel is formed by consolidating abrasive particles and a bonding agent, and the surface with the abrasive particle part is formed to be in contact rotation with the surface of the silicon rod to be ground. The rough grinding wheel has certain abrasive particle size and abrasive particle density, and meanwhile, the rough grinding wheel is provided with air holes. The abrasive of the rough grinding wheel can be set into abrasive grains with hardness higher than that of silicon materials, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride and the like according to the requirement of grinding the silicon rod. The rotating motor is connected with the rough grinding wheel through a rotating shaft and used for driving the rough grinding wheel to rotate at a preset rotating speed.

The rough grinding tool advancing and retreating mechanism is used for driving at least one rough grinding tool in the at least one pair of rough grinding tools to move up and down along the direction of a plumb line, and the direction of the plumb line is vertical to the horizontal plane. The rough grinding tool advancing and retreating mechanism controls at least one rough grinding tool in the at least one pair of rough grinding tools to move up and down along the direction of the plumb line, so that the relative distance between two rough grinding tools in the at least one pair of rough grinding tools in the direction of the plumb line is adjusted, and the feeding amount in the grinding process is controlled, namely the grinding amount is determined. In addition, when the silicon rod clamp in the silicon rod transfer device clamps the silicon rod, the at least one pair of rough grinding tools moves up and down along the plumb line direction under the control of the rough grinding tool advancing and retreating mechanism.

In an embodiment of the present application, the rough grinding tool advancing and retreating mechanism includes: the advance and retreat guide rail is arranged on the rough grinding installation structure along the direction of the plumb line and used for arranging the at least one pair of rough grinding tools; and the advance and retreat driving unit is used for driving at least one rough grinding tool in the at least one pair of rough grinding tools to move along the advance and retreat guide rail.

For example, each pair of rough grinding stones is provided with a rough grinding stone advancing and retreating mechanism. In one embodiment, the rough grinding tool advancing and retreating mechanism comprises an advancing and retreating guide rail and an advancing and retreating driving unit. Referring to fig. 2a, fig. 2b and fig. 2c, fig. 2c is a schematic structural view of a rough grinding apparatus of the silicon rod grinding machine shown in fig. 2a in an embodiment. The rough grinding tool advancing and retreating mechanism 35 includes an advancing and retreating guide rail 351 and an advancing and retreating driving unit 352, wherein the advancing and retreating guide rail 351 is arranged on the first mounting side of the rough grinding tool support along the plumb line direction, and the bottom of the rough grinding tool 33 is provided with a guide groove structure or a guide block structure which is matched with the advancing and retreating guide rail 351 and is along the plumb line direction. The advancing/retreating drive unit 352 may further include, for example, a ball screw provided along the advancing/retreating guide rail 351, and a drive motor coupled to the drive motor in association with the corresponding rough grinding stone 33.

In an embodiment of the present application, one of the at least one pair of rough grinding tools is provided with a ball screw disposed in the direction of the plumb line and associated with the one rough grinding tool, and a drive motor. In this manner, the ball screw is driven by the driving motor to rotate in a forward direction so that the one rough grinding stone associated with the ball screw moves toward the other rough grinding stone disposed oppositely along the advance and retreat guide rail to reduce the grinding pitch (or adjust the feed amount of grinding) between the two rough grinding stones, or the ball screw is driven by the driving motor to rotate in a reverse direction so that the one rough grinding stone associated with the ball screw moves away from the other rough grinding stone disposed oppositely along the advance and retreat guide rail to increase the grinding pitch between the two rough grinding stones.

In an embodiment of the present application, each of the at least one pair of rough grinding tools is configured with a ball screw and a drive motor, the ball screw being disposed along the direction of the plumb line and associated with the rough grinding tool for each rough grinding tool. In this manner, the ball screw is driven by the driving motor to rotate in a forward direction so that the one rough grinding stone associated with the ball screw moves toward the other rough grinding stone disposed oppositely along the advance and retreat guide rail to reduce the grinding pitch (or adjust the feed amount of grinding) between the two rough grinding stones, or the ball screw is driven by the driving motor to rotate in a reverse direction so that the one rough grinding stone associated with the ball screw moves away from the other rough grinding stone disposed oppositely along the advance and retreat guide rail to increase the grinding pitch between the two rough grinding stones.

In an embodiment of the present application, two rough grinding tools of the at least one pair of rough grinding tools share a ball screw and a driving motor, the ball screw may be, for example, a bidirectional screw, the bidirectional screw is disposed along the direction of the plumb line, two threads with opposite turning directions are disposed on a shaft of the bidirectional screw, the two threads are respectively associated with the two rough grinding tools, and the driving motor is associated with the bidirectional screw, and drives the bidirectional screw to rotate by using the driving motor, so that the two rough grinding tools associated with the bidirectional screw move toward or away from each other along the advance and retreat guide rail based on a certain synergistic relationship. For example, when the driving motor drives the bidirectional screw rod to rotate forward, the two associated rough grinding tools are driven to move towards each other along the plumb line (i.e., to approach each other), so as to reduce the grinding distance between the two rough grinding tools (or to adjust the feeding amount of grinding), or when the driving motor drives the screw rod to rotate reversely, the two associated rough grinding tools are driven to move back from each other along the plumb line (i.e., to move away from each other), so as to increase the grinding distance between the two rough grinding tools.

The rough grinding tool travelling mechanism is used for driving the at least one pair of rough grinding tools to move along the horizontal line.

In one embodiment of the present application, the rough grinding tool travel mechanism comprises: the traveling guide rail is arranged on the rough grinding installation structure along a horizontal line and is used for arranging the at least one pair of rough grinding tools; and the travelling driving unit is used for driving the at least one pair of rough grinding tools to move along the travelling guide rail.

In one embodiment, the rough grinding tool travel mechanism includes a travel guide and a travel drive unit. In the embodiment shown in fig. 2a, 2b, 2c, the rough grinding tool travel mechanism 37 includes a travel guide 371 and a travel drive unit 372, wherein the travel guide 371 is disposed on a mounting side of the rough grinding mounting structure 31 along a horizontal line for providing a rough grinding tool holder configured with at least one pair of rough grinding tools 33, and a second mounting side of the rough grinding tool holder is provided with a guide groove structure or guide block structure along a horizontal line cooperating with the travel guide 371. The travel driving unit 372 may further include, for example, a ball screw disposed along the travel guide 371 and coupled to the corresponding rough grinder holder and at least one pair of rough grinders 33 thereon and coupled to the driving motor. The ball screw is driven by the driving motor to rotate forward so that the rough grinding tool support associated with the ball screw and the at least one pair of rough grinding tools 33 thereon move along the traveling guide rail from the first end of the first processing location to the second end of the first processing location, or the ball screw is driven by the driving motor to rotate forward so that the rough grinding tool support associated with the ball screw and the at least one pair of rough grinding tools 33 thereon move along the traveling guide rail 371 from the second end of the first processing location to the first end of the first processing location.

When the rough grinding tool is used for carrying out rough grinding operation on the silicon rod positioned at the first processing position, a rough grinding tool driving and reversing mechanism of the rough grinding tool drives the rough grinding tool of the at least one pair of rough grinding tools to move along the direction of the plumb line so as to determine the grinding feeding amount of the rough grinding tool and the silicon rod grinding surface, a rough grinding tool travelling mechanism drives the at least one pair of rough grinding tools to move along the horizontal line until the silicon rod passes through completely, if necessary, the rough grinding tool travelling mechanism can drive the at least one pair of rough grinding tools to move back and forth along the horizontal line so as to ensure that the silicon rod is fully ground in the length direction, and meanwhile, the rough grinding tool driving and reversing mechanism drives the at least one pair of rough grinding tools oppositely arranged to move along the plumb line so as to determine the grinding feeding amount of the rough grinding tool and the silicon rod grinding surface. In the embodiment shown in fig. 2a and 2b, at least one pair of rough grinding tools 33 of the rough grinding device 3 are disposed opposite to each other along the direction of the plumb line, and the grinding surfaces of the at least one pair of rough grinding tools 33 are located in opposite horizontal planes perpendicular to the plumb line, so that when the silicon rod is ground, at least one rough grinding tool 33 of the at least one pair of rough grinding tools 33 is driven by the rough grinding tool advancing and retreating mechanism 35 to move up and down along the direction of the plumb line to adjust the feeding amount, thereby grinding the upper and lower side surfaces of the silicon rod along the direction of the plumb line.

In an embodiment of the application, the rough grinding device may further include a cooling device to cool the at least one pair of rough grinding tools, so as to reduce damage to a surface layer of the silicon rod during grinding, and improve grinding efficiency and service life of the rough grinding wheel. In one implementation manner of this embodiment, the cooling device includes a cooling water pipe, a diversion trench, and a diversion hole. In some embodiments, the outer circumference of the rough grinding wheel is provided with a protective cover for placing cooling water into the rotating motor of the rough grinding wheel. One end of the cooling water pipe is connected with a cooling water source, the other end of the cooling water pipe is connected to the surface of a protective cover of the rough grinding wheel, the diversion groove is arranged on the protective cover and serves as a contact point of the protective cover and the cooling water pipe, and the diversion hole is formed in the cooling groove. The cooling device coolant can be common cooling water, the cooling water pipe is connected with a cooling water source, the cooling water pumped by the cooling water pipe is guided to the guide groove and the guide hole on the surface of the rough grinding wheel and is guided to the grinding surface of the rough grinding wheel and the ground silicon rod to be cooled, and the cooling water which is used for rotating the guide hole by the rough grinding wheel during grinding of the rough grinding wheel enters the rough grinding wheel for sufficient cooling through the centrifugal action.

It should be understood that the rough grinding device in the above embodiments can be used in a silicon rod grinder having a first processing region and a second processing region, and can also be used in a silicon rod grinder having a first processing region, a second processing region and a third processing region. In certain embodiments, for example, for a silicon rod grinding machine provided with a first processing region and a second processing region (e.g., a silicon rod grinding machine as shown in fig. 1 a), the rough grinding device can realize grinding and rough chamfering of the silicon rod. The corase grind mounting structure is located by means of a displacement mechanism frame 1, wherein, displacement mechanism includes: the first linear guide rail is arranged on the machine base 1 along the width direction of the first processing position, and the width direction of the first processing position is orthogonal to the horizontal line direction of the traveling movement of the rough grinding tool; and the driving source drives the rough grinding mounting structure to move along the first linear guide rail. The driving source is, for example, an air cylinder, a hydraulic pump, or a traveling motor.

The horizontal line direction of the travel movement of the rough grinding tool is the long side direction (also referred to as the length direction) of the first processing area. The rough grinding device mounting structure can move along the first linear guide rail, so that a rough grinding tool arranged on the rough grinding device mounting structure is driven to move along the width direction of the first processing area, and the distance between the rough grinding tool and the axis of the silicon rod in the width direction of the first processing area can be adjusted.

As mentioned above, the abrasive surface of the rough grinding tool is generally circular. In a work scene, when the corase grind grinding apparatus is used for realizing the coarse chamfer, the drive source can drive corase grind mounting structure and locate the corase grind grinding apparatus on it and remove to the position of the edge of adjustment silicon rod for the corase grind grinding apparatus, in order to confirm the contact chord length of silicon rod edge and corase grind grinding apparatus abrasive surface, through increasing the contact length of silicon rod edge and corase grind grinding apparatus, can effectively improve coarse chamfer efficiency and reduce the wearing and tearing of corase grind grinding apparatus.

The fine grinding device is used for performing fine grinding operation on the silicon rod at the second processing position of the silicon rod processing platform. In the embodiment shown in fig. 2a, 2b, the refining apparatus 4 comprises: a finish mounting structure 41, at least one pair of finish grinders 43, a finish grinder advancing and retreating mechanism 45, and a finish grinder advancing mechanism 47.

In an embodiment of the application, the refining apparatus comprises: the fine grinding mounting structure is arranged on the base and corresponds to the second machining area; at least one pair of finish grinding tools disposed on the finish grinding mounting structure; wherein the grinding surfaces of the at least one pair of finish grinding tools are arranged in parallel and opposite to each other; a finish grinder advancing and retreating mechanism for driving at least one finish grinder of the at least one pair of finish grinders to move in a plumb line direction, wherein the plumb line direction is perpendicular to the grinding surface; and a finish grinding tool travel mechanism for driving the at least one pair of finish grinding tools to move along a horizontal line.

The accurate grinding mounting structure is arranged on the base and corresponds to the second machining area for arranging at least one pair of accurate grinding tools. In the embodiment shown in fig. 2a, 2b, a finish grinding mounting structure 41 is provided at the edge of the silicon rod processing platform of the machine base 1 for providing at least one pair of finish grinding tools 43. Wherein the fine grinding mounting structure 41 may for example be a mounting structure plate, a mounting beam, or a mounting frame built up from a plurality of parts, etc. Taking the lapping mounting structure 41 as an example of a mounting structure plate, the mounting structure plate is a rectangular structure plate with a regular shape, and has a certain height and length, wherein the height of the mounting structure plate can ensure that at least one pair of lapping tools 43 can be arranged, and the length of the mounting structure plate at least ensures that the length of the mounting structure plate can cover the silicon rod to be lapped, for example, the length of the mounting structure plate corresponds to the length of the second processing area. The side of the mounting structure plate facing the second machining zone serves as a mounting surface for the arrangement of at least one pair of refiner abrasive tools 43. And the length of the second processing zone bit is the span along the long side direction of the second processing zone bit, and the long side direction of the second processing zone bit is the advancing direction of the finish grinding tool.

The at least one pair of finish grinding tools are arranged on the finish grinding mounting structure; wherein the grinding surfaces of the at least one pair of finish grinding tools are arranged in parallel and opposite to each other.

The at least one pair of finish grinding tools is disposed on the finish mounting structure, and in particular, the at least one pair of finish grinding tools is disposed opposite a mounting side on the finish mounting structure in a direction along the plumb line such that the grinding surfaces of the at least one pair of finish grinding tools are located in opposing horizontal planes, i.e., the grinding surfaces of two of the at least one pair of finish grinding tools are located in a first horizontal plane and a second horizontal plane, respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the plumb line. In the embodiment shown in fig. 2a, 2b, the pair of refiner abrasive tools 43 is arranged on the refiner mounting structure 41 by a refiner abrasive tool holder.

With respect to the finish grinding tool, in certain implementations, the finish grinding tool includes a finish grinding wheel and a rotating motor coupled to the finish grinding wheel. The lapping grinding wheels have a granularity and a roughness, two lapping grinding wheels oppositely arranged in the at least one pair of lapping grinding tools are respectively provided for two grinding surfaces which are symmetrical to the clamped silicon rod, and in certain embodiments, the lapping grinding wheels are circular and have a hollow middle. The fine grinding wheel is formed by consolidating abrasive particles and a bonding agent, and a surface with an abrasive particle part is formed to rotate in a contact manner with the surface of the silicon rod to be ground. The fine grinding wheel has certain abrasive particle size and abrasive particle density, and meanwhile, the fine grinding wheel is provided with air holes. The abrasive of the fine grinding wheel can be set into abrasive grains with hardness higher than that of silicon materials, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride and the like according to the requirement of grinding a silicon rod. The rotating motor is connected with the fine grinding wheel through a rotating shaft and is used for driving the fine grinding wheel to rotate at a preset rotating speed.

The finish grinding tool advancing and retreating mechanism is used for driving at least one finish grinding tool in the pair of finish grinding tools to move along a plumb line direction, wherein the plumb line direction is perpendicular to the grinding surface.

The finish grinding tool advancing and retreating mechanism is used for driving at least one finish grinding tool in the pair of finish grinding tools to move up and down along a plumb line direction, wherein the plumb line direction is vertical to the horizontal plane (namely the grinding surfaces of the two finish grinding tools). The fine grinding tool advancing and retreating mechanism controls at least one fine grinding tool in the at least one pair of fine grinding tools to move up and down along the direction of the plumb line, so that the relative distance between two fine grinding tools in the at least one pair of fine grinding tools in the direction of the plumb line is adjusted, and the feeding amount in the grinding process is controlled, namely the grinding amount is determined. In addition, when the silicon rod is clamped by the silicon rod clamp in the silicon rod transfer device, the at least one pair of finish grinding tools moves up and down along the direction of the plumb line under the control of the advance and retreat mechanism of the finish grinding tools.

In one embodiment of the present application, the finish grinding tool advancing and retreating mechanism includes: the advancing and retreating guide rail is arranged on the fine grinding mounting structure along the direction of the plumb line and is used for arranging the at least one pair of fine grinding tools; and an advancing and retreating driving unit for driving at least one of the pair of lapping grinding tools to move along the advancing and retreating guide rail.

For example, each pair of the grindstones is provided with a grindstone advancing and retreating mechanism. In one embodiment, the finish grinder advancing and retreating mechanism includes an advancing and retreating guide rail and an advancing and retreating driving unit. In the embodiment as shown in fig. 2a, 2b, the refiner stone advancing and retreating mechanism 45 comprises an advancing and retreating guide rail provided on the first mounting side of the refiner stone holder in the direction of the plumb line, and an advancing and retreating driving unit (not shown in the drawings), and the bottom of the refiner stone 43 is provided with a guide groove structure or guide block structure in the direction of the plumb line in cooperation with the advancing and retreating guide rail. The advancing and retreating drive unit may further include, for example, a ball screw provided along the advancing and retreating guide rail, and a drive motor coupled to the ball screw in association with the corresponding finish grinding stone.

In an embodiment of the present application, one of the at least one pair of grinders is provided with a ball screw disposed in the direction of the plumb line and associated with the one grinder, and a drive motor. In this manner, the ball screw is driven by the driving motor to rotate in the forward direction so that the one of the grindstones associated with the ball screw moves toward the other of the grindstones disposed oppositely along the advancing-retreating guide rail to reduce the grinding interval between the two grindstones (or to adjust the feed amount of grinding), or the ball screw is driven by the driving motor to rotate in the reverse direction so that the one of the grindstones associated with the ball screw moves away from the other of the grindstones disposed oppositely along the advancing-retreating guide rail to increase the grinding interval between the two grindstones.

In an embodiment of the application, each of the at least one pair of finish grinders is provided with a ball screw arranged in the direction of the plumb line and associated with the finish grinder, and a drive motor. In this manner, the ball screw is driven by the driving motor to rotate in the forward direction so that the one of the grindstones associated with the ball screw moves toward the other of the grindstones disposed oppositely along the advancing-retreating guide rail to reduce the grinding interval between the two grindstones (or to adjust the feed amount of grinding), or the ball screw is driven by the driving motor to rotate in the reverse direction so that the one of the grindstones associated with the ball screw moves away from the other of the grindstones disposed oppositely along the advancing-retreating guide rail to increase the grinding interval between the two grindstones.

In an embodiment of the present application, two finish grinders of the at least one pair of finish grinders share a ball screw and a driving motor, the ball screw may be, for example, a bidirectional screw, the bidirectional screw is disposed along a direction of a plumb line, two sections of threads with opposite turning directions are disposed on a rod body of the bidirectional screw, the two sections of threads are respectively associated with the two finish grinders, and the driving motor is associated with the bidirectional screw, and the bidirectional screw is driven by the driving motor to rotate, so that the two finish grinders associated with the bidirectional screw move in opposite directions or back to back along the advance and retreat guide rail based on a certain synergistic relationship. For example, a drive motor driving a bidirectional screw rod to rotate in a forward direction drives the associated two lapping grinders to move toward each other along the plumb line (i.e., toward each other) to decrease the grinding gap between the two lapping grinders (or to adjust the feed amount of grinding), or the drive motor driving the screw rod to rotate in a reverse direction drives the associated two lapping grinders to move away from each other along the plumb line (i.e., away from each other) to increase the grinding gap between the two lapping grinders.

In one embodiment of the present application, the finish grinding tool travel mechanism includes: the travelling guide rail is arranged on the fine grinding mounting structure along a horizontal line and is used for arranging the at least one pair of fine grinding tools; and a travel driving unit for driving the at least one pair of finish grinding stones to move along the travel guide rail.

The finish grinding tool travel mechanism is configured to drive the at least one pair of finish grinding tools to move along a horizontal line. In one embodiment, the grindstone travel mechanism includes a travel guide and a travel drive unit. In the embodiment shown in fig. 2a, 2b, the finish grinding tool travel mechanism 47 comprises a travel guide provided on the mounting side of the finish mounting structure 41 in a horizontal line direction for providing a finish grinding tool holder provided with at least one pair of finish grinding tools, and a travel drive unit (not shown in the drawings), the second mounting side of the finish grinding tool holder being provided with a guide groove structure or guide block structure in a horizontal line cooperating with the travel guide. The travel drive unit may further comprise, for example, a ball screw provided along the travel guide rail, the ball screw being associated with the respective grinder support and at least one pair of grinders 43 thereon and being coupled to the drive motor. The ball screw is driven by the drive motor in a forward direction to move the grinder support associated with the ball screw and the at least one pair of grinders 43 thereon from the first end of the second processing zone to the second end of the second processing zone along the travel rail, or the ball screw is driven by the drive motor in a forward direction to move the grinder support associated with the ball screw and the at least one pair of grinders 43 thereon from the second end of the second processing zone to the first end of the second processing zone along the travel rail.

When the finish grinding tool is used for carrying out finish grinding operation on the silicon rod positioned at the second processing position, the finish grinding tool driving and reversing mechanism of the finish grinding tool drives the finish grinding tool in the at least one pair of finish grinding tools to move along the direction of the plumbum line so as to determine the feeding amount of grinding of the finish grinding tool and the silicon rod grinding surface, the finish grinding tool advancing mechanism drives the at least one pair of finish grinding tools to move along the horizontal line until the whole silicon rod is completely penetrated, if necessary, the finish grinding tool advancing mechanism can drive the at least one pair of finish grinding tools to reciprocate along the horizontal line so as to ensure that the silicon rod is fully ground in the length direction, and meanwhile, the finish grinding tool driving and reversing mechanism drives the at least one pair of finish grinding tools oppositely arranged to move along the plumbum line so as to determine the feeding amount of grinding of the finish grinding tool and the silicon rod grinding surface. In the embodiment shown in fig. 2a and 2b, at least one pair of lapping tools of the pair of lapping tools are arranged to face each other in the direction of the plumb line, and the grinding surfaces of the at least one pair of lapping tools are located in opposite horizontal planes perpendicular to the plumb line, and when the silicon rod is ground, the feed amount is adjusted by driving at least one lapping tool of the at least one pair of lapping tools to move up and down in the direction of the plumb line by a lapping tool advancing and retracting mechanism, so as to grind the upper and lower side surfaces of the silicon rod in the direction of the plumb line.

In an embodiment of the application, the finish grinding device may further include a cooling device to cool the at least one pair of finish grinding tools, so as to reduce damage to a surface layer of the silicon rod during grinding, and improve grinding efficiency and service life of the finish grinding wheel. In one implementation manner of this embodiment, the cooling device includes a cooling water pipe, a diversion trench, and a diversion hole. In some embodiments, the outer circumferential edge of the refiner wheel is provided with a protective shield for a rotating motor that places cooling water into the refiner wheel. One end of the cooling water pipe is connected with a cooling water source, the other end of the cooling water pipe is connected to the surface of a protective cover of the fine grinding wheel, the diversion groove is arranged on the protective cover and serves as a contact point of the protective cover and the cooling water pipe, and the diversion hole is formed in the cooling groove. The coolant of the cooling device can be common cooling water, the cooling water pipe is connected with a cooling water source, the cooling water pumped by the cooling water pipe reaches the diversion groove and the diversion hole on the surface of the fine grinding wheel and is guided to the grinding surface of the fine grinding wheel and the ground silicon rod for cooling, and the cooling water which rotates the diversion hole by means of the fine grinding wheel enters the fine grinding wheel for sufficient cooling under the centrifugal action during the grinding of the fine grinding wheel.

It should be understood that the refining apparatus in the above embodiments can be used in a silicon rod grinding machine provided with a first processing location and a second processing location, and can also be used in a silicon rod grinding machine provided with a first processing location, a second processing location and a third processing location. In certain embodiments, for example, for a silicon rod grinding machine provided with a first processing region and a second processing region (for example, a silicon rod grinding machine as shown in fig. 1 a), the refining device can realize grinding and fine chamfering of the silicon rod. The fine grinding mounting structure is arranged on the base by means of a displacement mechanism, wherein the displacement mechanism comprises: the second linear guide rail is arranged on the base along the width direction of the second machining position, and the width direction of the second machining position is orthogonal to the horizontal line direction of the advancing movement of the fine grinding tool; and the driving source drives the fine grinding mounting structure to move along the second linear guide rail. The driving source is, for example, an air cylinder, a hydraulic pump, or a traveling motor.

The horizontal line direction in which the grindstone travels, i.e., the long-side direction (also referred to as the length direction) of the second processing zone. The fine grinding device mounting structure can move along the second linear guide rail, so that the fine grinding tool arranged on the fine grinding device mounting structure is driven to move along the width direction of the second machining region, and the distance between the fine grinding tool and the axis of the silicon rod in the width direction of the second machining region can be adjusted.

As mentioned above, the abrasive surface of a refiner abrasive tool is typically in the form of a ring. In a working scenario, when the finish grinding apparatus is used for realizing fine chamfering, the driving source can drive the finish grinding mounting structure and the finish grinding apparatus arranged thereon to move so as to adjust the position of the edge of the silicon rod relative to the finish grinding apparatus, thereby determining the contact chord length of the edge of the silicon rod and the grinding surface of the finish grinding apparatus, and by increasing the contact length of the edge of the silicon rod and the finish grinding apparatus, the efficiency of fine chamfering can be effectively improved and the abrasion of the finish grinding apparatus can be reduced.

Compared with a grinding device for grinding the vertical silicon rod, the grinding tool needs to be lifted to cover the side surface of the silicon rod during grinding operation, and a lifting driving mechanism and a supporting structure need to be configured for the grinding tool, so that the equipment space occupied by the grinding tool is often larger; meanwhile, the height of the center of gravity of the grinding tool is in a changing state in the grinding process, so that a certain stability problem may exist. Here, the silicon rod grinding machine of this application provides the realization that will grind the grinding surface of grinding apparatus and locate the horizontal plane, and the silicon rod grinding machine that this application provided is in grinding the operation, and the grinder (promptly grind the device and the correct grinding device) moves along the direction of travel, and its focus height is unchangeable, then is favorable to guaranteeing to grind the stability of operation, simultaneously, under this setting, the grinder can be provided with frame is integrative, is favorable to increasing the structural rigidity promptly.

In the embodiment where the silicon rod grinding machine of the present application further includes the rough grinding device, the finish grinding device, and the chamfering device, the rough grinding device, the finish grinding device, and the chamfering device are respectively provided at the corresponding machining locations. In an embodiment of the application, the rough grinding device is disposed in a first processing area, the fine grinding device is disposed in a second processing area, and the chamfering device is disposed in a third processing area, wherein the third processing area is disposed between the first processing area and the second processing area. Specifically, the rough grinding device is located at a first location for rough grinding operation of the silicon rod at the first location, the chamfering device is located at a third location for chamfering operation of the silicon rod after rough grinding at the third location, and the fine grinding device is located at a second location for fine grinding operation of the silicon rod after chamfering at the second location. Particularly, the silicon rod transfer device can clamp the silicon rods by the silicon rod clamps and transfer the clamped silicon rods to the plurality of processing areas, for example, the silicon rods clamped by the silicon rod clamps are sequentially transferred to the first processing area, the third processing area and the second processing area according to the process of the processing operation. Thus, in a certain state, the silicon rod clamps in the silicon rod transfer device clamp the silicon rod and are controlled to drive the silicon rod clamps and the silicon rod switching positions clamped by the silicon rod clamps, for example, one silicon rod clamp and the silicon rod to be roughly ground clamped by the silicon rod clamp are switched to a first processing position, the other silicon rod clamp and the silicon rod to be chamfered clamped by the silicon rod clamp are switched to a third processing position, the other silicon rod clamp and the silicon rod to be accurately ground clamped by the silicon rod clamp are switched to a second processing position, therefore, the rough grinding device positioned in the first processing position can perform rough grinding operation on the silicon rod to be roughly ground, the chamfering device positioned in the third processing position can perform chamfering operation on the silicon rod to be chamfered, and the accurate grinding device positioned in the second processing position can perform accurate grinding operation on the silicon rod to be accurately ground.

The specific structure of the rough grinding device and the fine grinding device and the manner of grinding the silicon rod can be referred to the previous embodiment; it should be understood that when the positions of the first processing area and the second processing area are changed, the traveling direction of the rough grinding tool still conforms to the long side direction of the first processing area, and the traveling direction of the finish grinding tool still conforms to the long side direction of the second processing area. The structure, arrangement and operation of the rough grinding installation structure, the rough grinding tool, the advancing and retreating mechanism of the rough grinding tool, and the advancing mechanism of the rough grinding tool in the rough grinding device can all refer to the foregoing embodiments, and the finish grinding device is similar and will not be described herein again.

The chamfering device is used for chamfering the silicon rod clamped by the silicon rod clamp positioned at the third processing position in the silicon rod transfer device. In the embodiment as shown in fig. 2a and 2b, the third processing region is located between the first processing region and the second processing region, and therefore, the chamfering device 5 is used for chamfering the roughly ground silicon rod held by the silicon rod clamp located at the third processing region in the silicon rod transfer device.

In the embodiment shown in fig. 2a, 2b, the chamfering device 5 comprises: a chamfering attachment structure 51, at least one pair of chamfering grinders 53, a chamfering grinder advancing and retreating mechanism 55, and a chamfering grinder advancing mechanism 57.

The chamfering installation structure is arranged on the base and corresponds to the third machining area and is used for arranging at least one pair of chamfering grinding tools. In the embodiment shown in fig. 2a and 2b, a chamfering mounting structure 51 is provided at the edge of the silicon rod processing platform of the machine base 1 for providing at least one pair of chamfering grinders 53. The chamfer mounting structure 51 may be, for example, a mounting structure plate, a mounting beam, or a mounting frame constructed from multiple components. Taking the chamfer mounting structure 51 as an example of a mounting structure plate, the mounting structure plate is a rectangular structure plate in a regular shape, and has a certain height and length, wherein the height of the mounting structure plate can ensure that at least one pair of chamfer grinding tools 53 can be arranged, and the length of the mounting structure plate at least needs to ensure that the length of the mounting structure plate can cover the silicon rod to be chamfered, for example, the length of the mounting structure plate corresponds to the length of the third processing area. The side of the mounting structure plate facing the third machining region serves as a mounting surface for mounting at least one pair of chamfering grinders 53.

The at least one pair of chamfer grinding tools is disposed on the chamfer mounting structure, and specifically, the at least one pair of chamfer grinding tools is disposed opposite to a mounting side on the chamfer mounting structure along a plumb line direction, such that the grinding surfaces of the at least one pair of chamfer grinding tools are disposed in opposite horizontal planes, i.e., the grinding surfaces of two of the at least one pair of chamfer grinding tools are disposed in a first horizontal plane and a second horizontal plane, respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the plumb line. In the embodiment shown in fig. 2a, the pair of chamfer grinders 53 are mounted to the chamfer mounting structure 51 by a chamfer grinder mount.

With respect to the chamfer grinder, in certain implementations, the chamfer grinder includes a chamfer grinding wheel and a rotating motor coupled to the chamfer grinding wheel. The chamfering grinding wheels have certain granularity and roughness, two chamfering grinding wheels oppositely arranged in the at least one pair of chamfering grinding tools are respectively provided for two symmetrical grinding surfaces of the clamped silicon rod, and in certain embodiments, the chamfering grinding wheels are circular. Since the chamfering tool is used to chamfer the edge of the silicon rod, the edge of the silicon rod is smaller than the side surface of the silicon rod, and therefore, the size of the chamfering wheel as the chamfering tool is smaller than the size of the rough grinding wheel as the rough grinding tool (or the finish grinding wheel as the finish grinding tool). The chamfering grinding wheel is formed by consolidating abrasive particles and a binding agent, and the surface with the abrasive particle part is formed to be in contact rotation with the surface of the silicon rod to be ground. The chamfering grinding wheel has certain abrasive grain size and abrasive grain density, and meanwhile, the chamfering grinding wheel is provided with air holes. The grinding material of the chamfering grinding wheel can be set into abrasive particles with hardness larger than that of silicon materials, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride and the like according to the requirement of grinding the silicon rod. The rotating motor is connected with the chamfering grinding wheel through a rotating shaft and is used for driving the chamfering grinding wheel to rotate at a preset rotating speed.

The chamfering grinding tool advancing and retreating mechanism is used for driving at least one chamfering grinding tool in the at least one pair of chamfering grinding tools to move up and down along the direction of a plumb line, and the direction of the plumb line is perpendicular to the horizontal plane. The chamfering tool advancing and retreating mechanism controls at least one chamfering tool in the at least one pair of chamfering tools to move up and down along the direction of the plumb line, so that the relative distance between the two chamfering tools in the at least one pair of chamfering tools in the direction of the plumb line is adjusted, and the feeding amount in the grinding process is controlled, namely the grinding amount is determined. In addition, when the silicon rod is clamped by the silicon rod clamp in the silicon rod transfer device, the at least one pair of chamfering grinders move up and down along the plumb line direction under the control of the chamfering grinders advancing and retreating mechanism.

In an embodiment of the present application, the chamfer grinder advancing and retreating mechanism includes: the advance and retreat guide rails are arranged on the chamfer mounting structure along the direction of the plumb line and used for arranging the at least one pair of chamfer grinding tools; and a forward and backward driving unit for driving at least one chamfered grinder of the at least one pair of chamfered grinders to move along the forward and backward guide rail.

For example, each pair of the chamfering grinders is provided with a chamfering grinder advancing and retreating mechanism. In one embodiment, the chamfering tool advancing and retreating mechanism comprises an advancing and retreating guide rail and an advancing and retreating driving unit. In the embodiment as shown in fig. 2a and 2b, the advancing and retreating mechanism of the chamfering tool includes an advancing and retreating guide rail provided on the first mounting side of the chamfering tool holder in the plumb line direction and an advancing and retreating driving unit (not shown in the drawings), and the bottom of the chamfering tool 53 is provided with a guide groove structure or guide block structure in the plumb line direction cooperating with the advancing and retreating guide rail. The advancing and retreating drive unit may further include, for example, a ball screw provided along the advancing and retreating guide rail, and a drive motor coupled to the ball screw in association with the corresponding chamfering grinder.

In an embodiment of the present application, one chamfering tool of the at least one pair of chamfering tools is provided with a ball screw disposed in a perpendicular direction and associated with the one chamfering tool, and a driving motor. In this manner, the ball screw is driven by the driving motor to rotate in a forward direction so that the one chamfering tool associated with the ball screw moves toward the other chamfering tool disposed oppositely along the advance and retreat guide rail to reduce the grinding interval between the two chamfering tools (or adjust the feed amount of grinding), or the ball screw is driven by the driving motor to rotate in a reverse direction so that the one chamfering tool associated with the ball screw moves away from the other chamfering tool disposed oppositely along the advance and retreat guide rail to increase the grinding interval between the two chamfering tools.

In an embodiment of the application, each of the at least one pair of chamfering grinders is provided with a ball screw provided in a direction of a plumb line and associated with the chamfering grinder, and a drive motor. In this manner, the ball screw is driven by the driving motor to rotate in a forward direction so that the one chamfering tool associated with the ball screw moves toward the other chamfering tool disposed oppositely along the advance and retreat guide rail to reduce the grinding interval between the two chamfering tools (or adjust the feed amount of grinding), or the ball screw is driven by the driving motor to rotate in a reverse direction so that the one chamfering tool associated with the ball screw moves away from the other chamfering tool disposed oppositely along the advance and retreat guide rail to increase the grinding interval between the two chamfering tools.

In an embodiment of the application, two chamfering tools of the at least one pair of chamfering tools share a ball screw and a driving motor, the ball screw may be, for example, a bidirectional screw, the bidirectional screw is disposed along a plumb line direction, two sections of threads with opposite turning directions are disposed on a shaft of the bidirectional screw, the two sections of threads are respectively associated with the two chamfering tools, the driving motor is associated with the bidirectional screw, and the driving motor drives the bidirectional screw to rotate, so that the two chamfering tools associated with the bidirectional screw move in opposite directions or move back and forth along the advance and retreat guide rails based on a certain synergistic relationship. For example, when the driving motor drives the bidirectional screw rod to rotate forward, the two associated chamfering grinding tools are driven to move towards each other along the plumb line (i.e., to approach each other), so as to reduce the grinding distance between the two chamfering grinding tools (or to adjust the feeding amount of grinding), or when the driving motor drives the screw rod to rotate reversely, the two associated chamfering grinding tools are driven to move back and forth along the plumb line (i.e., to move away from each other), so as to increase the grinding distance between the two chamfering grinding tools.

The chamfering tool advancing mechanism is used for driving the at least one pair of chamfering tools to move along the horizontal line.

In an embodiment of the present application, the chamfer grinder advancing mechanism includes: the traveling guide rail is arranged on the chamfer mounting structure along a horizontal line and is used for arranging the at least one pair of chamfer grinding tools; and a travel driving unit for driving the at least one pair of chamfering grinding tools to move along the travel guide rail.

In an embodiment, the chamfer grinder travel mechanism includes a travel guide rail and a travel drive unit. In the embodiment shown in fig. 2a, 2b, the chamfering tool advancing mechanism includes an advancing guide provided on a mounting side of a chamfering mounting structure 51 in a horizontal line direction for providing a chamfering tool holder configured with at least one pair of chamfering tools, and an advancing driving unit (not shown in the drawings), and a second mounting side of the chamfering tool holder is provided with a guide groove structure or a guide block structure in a horizontal line cooperating with the advancing guide. The travel driving unit may further include, for example, a ball screw provided along the travel guide rail, and a driving motor coupled to the ball screw in association with the corresponding chamfering tool holder and at least one pair of chamfering tools 53 thereon and coupled to the driving motor. And driving the ball screw to rotate positively by using the driving motor so that the chamfering tool support associated with the ball screw and the at least one pair of chamfering tools 53 thereon move along the traveling guide rail from the first end of the third processing position to the second end of the third processing position, or driving the ball screw to rotate positively so that the chamfering tool support associated with the ball screw and the at least one pair of chamfering tools 53 thereon move along the traveling guide rail from the second end of the third processing position to the first end of the third processing position.

When the chamfering grinding tool is used for chamfering the silicon rod at the third processing position, the chamfering grinding tool advancing and retreating mechanism of the chamfering grinding tool drives the chamfering grinding tool in at least one pair of chamfering grinding tools to move along the direction of the plumb line so as to determine the feeding amount of the grinding of the chamfering grinding tool and the silicon rod edge, the chamfering grinding tool advancing mechanism drives the chamfering grinding tool to move along the horizontal line until the silicon rod passes through the whole silicon rod, if necessary, the chamfering grinding tool advancing mechanism can also drive the chamfering grinding tool to move back and forth along the horizontal line so as to ensure that the silicon rod is fully ground in the length direction, and in cooperation with the grinding tool advancing and retreating mechanism, the clamping part rotating mechanism in the silicon rod clamp drives the clamping part to rotate so as to drive the clamped silicon rod to rotate by a deflection angle, and the chamfering grinding tool advancing and retreating mechanism drives at least one pair of chamfering grinding tools which are oppositely arranged to move in the direction of the plumb line, so as to determine the feeding amount of the grinding of the chamfering grinding tool and the silicon rod edge. For example, in the embodiment shown in fig. 2a and 2b, at least one pair of chamfering grinders 53 of the chamfering device 5 are disposed to face each other in the direction of the plumb line, and the grinding surfaces of the at least one pair of chamfering grinders 53 are located in opposite horizontal planes perpendicular to the plumb line, and when the silicon rod is ground, the feeding amount is adjusted by driving at least one chamfering grinder 53 of the at least one pair of chamfering grinders 53 to move up and down in the direction of the plumb line by the chamfering grinder advancing and retracting mechanism 55, so as to grind the upper and lower edges of the silicon rod in the direction of the plumb line.

Usually, the chamfer grinding apparatus personally submits the annular emery wheel for grinding, the chamfer grinding apparatus can grind the silicon rod edge by different chord limit, it should be understood, the chamfer grinding apparatus can move along the long limit direction in third processing position under the drive of chamfer grinding apparatus advancing mechanism, through control the chamfer grinding apparatus is in the position of the width direction in third processing position can make the silicon rod edge correspond to the different chord limit of chamfer grinding apparatus. And the width direction of the third processing area is orthogonal to the advancing direction of the chamfering grinding tool and is positioned in a horizontal plane.

In some embodiments, the grinding wheel of the chamfering tool may be preset for achieving the chamfered chord edge, whereby the relative position of the chamfering device to the clamping center line of the silicon rod clamp may be predetermined when mounting the chamfering device to the chamfering mounting structure, so that the contact length of the silicon rod edge with the grinding wheel in the chamfering operation may be controlled in advance.

In an embodiment of the present application, two grinders of the pair of chamfering grinders are disposed in a staggered manner in a width direction of a third processing region, wherein the width direction of the third processing region is a horizontal line direction orthogonal to a traveling direction of the chamfering grinders.

Referring to fig. 3a, a side view of the chamfering apparatus of the silicon rod grinding machine of the present application in one embodiment is shown.

As shown in fig. 3a, a pair of chamfering grinders 53 of the chamfering apparatus are alternately arranged in the width direction of the third processing region (the direction of the arrow shown in the lower part of fig. 3 a), and opposite edges of the silicon rod may be respectively brought into contact with the upper and lower chamfering grinders 53 as viewed in fig. 3a, and the edges of the silicon rod may be brought into contact with the chord edges of the chamfering grinders 53 to obtain a large contact length. Under the arrangement, the silicon rod edge which can be contacted by the chamfering grinding tool 53 is longer, so that the chamfering efficiency can be effectively improved; at the same time, the wear life of the chamfer grinder 53 can be extended.

Of course, in other embodiments, a pair of chamfering tools of the chamfering apparatus may be aligned in the width direction of the third processing location, in the embodiment shown in fig. 3b, wherein fig. 3b shows a side view of the chamfering apparatus of the silicon rod grinder of the present application in a further embodiment. As shown, the pair of chamfering grinders 53 of the chamfering apparatus are aligned in the width direction of the third processing region (arrow direction shown in fig. 3b lower side), so that the contact length of the pair of opposing edges (upper and lower edges in the drawing) of the silicon rod with the grinding surfaces of the pair of chamfering grinders 53 is the same, and a longer contact length of the silicon rod edge with the chamfering grinders 53 can be achieved.

It should be understood that, after a silicon single crystal rod having a circular cross section is cut to form a silicon rod having a rectangular or quasi-rectangular cross section, the silicon rod is subjected to lateral grinding and edge chamfering, and the edge chamfering may be rounding. The inventor of the present application finds that, for a common cut silicon rod with a side length of about 210mm, the subsequent processes usually need to be performed are grinding and chamfering, and for a common cut silicon rod with a side length of about 158mm, the subsequent processes usually need to be performed are grinding and rounding. To this, the chamfer device that this application provided is adapted to different technology demands, can be used to carry out the chamfer, also can be used to carry out the rounding.

In some embodiments, a pair of chamfering grinding tools of the chamfering device may be respectively provided with a rough chamfering grinding tool and a fine chamfering grinding tool to respectively perform rough chamfering and fine chamfering on the edge of the silicon rod. Here, the rough chamfering tool and the fine chamfering tool may be provided as chamfering wheels having different grain sizes, or grain densities, for example.

In some implementations, for the order that the silicon rod edge contacts the coarse chamfering grinding tool and the fine chamfering grinding tool in the order of first contacting the coarse chamfering grinding tool for coarse chamfering (or coarse rounding), and then contacts the fine chamfering grinding tool for fine chamfering (or fine rounding), the present application further provides embodiments in which the fine chamfering grinding tool and the coarse chamfering grinding tool are staggered in the horizontal line direction in which the chamfering grinding tool moves forward.

Referring to fig. 3c, a schematic structural view of a chamfering apparatus of a silicon rod grinding machine according to an embodiment of the present invention is shown.

As shown in fig. 3c, the chamfering tool 53 is moved by the chamfering tool advancing mechanism 57 along a horizontal line in the direction of an arrow pointing to the right above fig. 3 c. The upper side of the chamfering grinding tool 53 is a rough chamfering grinding tool, the lower side of the chamfering grinding tool is a fine chamfering grinding tool, and the rough chamfering grinding tool is in contact with the silicon rod relative to the fine chamfering grinding tool in advance in the horizontal line moving direction, so that the edge of the silicon rod can be driven by the silicon rod clamp to rotate after being subjected to rough chamfering (or rough rounding) through the rough chamfering grinding tool and then is in contact with the fine chamfering grinding tool to perform fine chamfering (or fine rounding). So, the chamfering device of the silicon rod grinding machine of this application can realize thick chamfer and the smart chamfer and thick rounding and the smart rounding of silicon rod edge.

Taking a processing scene that the chamfering device performs rounding on a silicon rod as an example, under the view of fig. 3c, the chamfering grinding tool 53 moves along the advancing direction, meanwhile, the silicon rod is driven by the clamping part rotating mechanism of the silicon rod clamp to keep a rotating (or rotating) state along the axis of the silicon rod, the arrow direction marked above the fig. 3c is taken as the positive direction of the advancing direction of the chamfering grinding tool 53, the rough chamfering grinding tool is arranged before the fine chamfering grinding tool, the edge of the silicon rod in a rotating state contacts the rough chamfering grinding tool firstly to realize rough rounding, and the rotating state is kept until the edge contacts the fine chamfering grinding tool to realize fine rounding. Meanwhile, the rough chamfering grinding tool and the fine chamfering grinding tool are moved by the driving of the chamfering grinding tool advancing mechanism 57, so as to cover the edge length of the silicon rod to complete the rounding.

It should be understood that fig. 3c is only an example of the positional relationship between the fine and rough chamfering tools in the chamfering apparatus, for example, in other implementations, the fine chamfering tool may be disposed above and the rough chamfering tool below, and only when the chamfering apparatus is moved in the traveling direction driven by the chamfering tool traveling mechanism in the operating state, the silicon rod edge contacts the rough chamfering tool first and then contacts the fine chamfering tool.

In a specific implementation, at least one of the rough chamfering tool and the fine chamfering tool may be configured with a displacement mechanism along a traveling direction of the chamfering tool to adjust a staggered distance of the rough chamfering tool and the fine chamfering tool in the traveling direction.

In an embodiment of the application, the chamfering device may further include a cooling device to cool the at least one pair of chamfering grinding tools, reduce damage to a surface layer of the silicon rod during grinding, and improve grinding efficiency and service life of the chamfering grinding wheel. In one implementation manner of this embodiment, the cooling device includes a cooling water pipe, a diversion trench, and a diversion hole. In some embodiments, the outer circumferential edge of the chamfering wheel is provided with a shield for placing a rotating motor for cooling water to enter the chamfering wheel. One end of the cooling water pipe is connected with a cooling water source, the other end of the cooling water pipe is connected to the surface of the protective cover of the chamfering grinding wheel, the diversion groove is arranged on the protective cover and serves as a contact point of the protective cover and the cooling water pipe, and the diversion hole is formed in the cooling groove. The cooling device coolant can be common cooling water, the cooling water pipe is connected with a cooling water source, the cooling water pumped by the cooling water pipe reaches the diversion trench and the diversion hole on the surface of the chamfering grinding wheel and is guided to the direct chamfering grinding wheel and the edge of the ground silicon rod for cooling, and the cooling water which is used for rotating the diversion hole of the chamfering grinding wheel in the grinding of the chamfering grinding wheel enters the chamfering grinding wheel for sufficient cooling through the centrifugal action.

In other embodiments, the third processing location corresponding to the chamfering device is located after the first processing location and the second processing location, so that the chamfering device is used for chamfering the finely ground silicon rod held by the silicon rod clamp located at the third processing location in the silicon rod transfer device.

Under this configuration, for the chamfering device, reference may be specifically made to the related description of the chamfering device shown in fig. 2a to 3c, which is not repeated herein.

Here, the application provides silicon rod processing platform is equipped with the silicon rod that first processing position was processed position, second and third processing position and grinds the machine, first processing position, second processing position and third processing position correspond to corase grind device, correct grinding device and chamfer device respectively. The chamfering device is used for chamfering the silicon rod at the third processing position, so that the abrasion of a rough grinding tool and a finish grinding tool caused by the execution of chamfering can be effectively avoided, meanwhile, the invention finds that the time occupied by the chamfering process in actual production is longer, compared with the traditional chamfering mode by the rough grinding tool or the finish grinding tool, the silicon rod grinding machine is provided with the third processing position, a plurality of silicon rod clamps are arranged on a transfer main body of the silicon rod grinding machine, and in a processing state, the silicon rod clamps correspond to the processing positions one by one, so that the silicon rod grinding machine can simultaneously carry out rough grinding, finish grinding and chamfering operations, the production efficiency is improved, in addition, the silicon rod grinding machine enables the processing time required by rough grinding, finish grinding and chamfering to be more evenly distributed at the processing positions which are not interfered with each other, and the waiting time for the matching processing of different processing devices is reduced, reducing and grinding time consuming, further promoting machining efficiency.

Moreover, after the silicon rod clamped by the silicon rod clamp completes a corresponding processing procedure such as rough grinding in one processing position, the transferring main body is driven to transfer to another processing position so as to carry out subsequent processing procedures such as accurate grinding or chamfering, and the connection among the procedures is facilitated to be simplified.

In an embodiment of the present application, at least one of the silicon rod clamps of the silicon rod transfer device may further be provided with a grinding repair device for grinding the corresponding grinding tool, i.e., grinding the rough grinding tool of the corresponding rough grinding device, grinding the finish grinding tool of the corresponding finish grinding device, or grinding the rough grinding tool of the corresponding rough grinding device and the finish grinding tool of the finish grinding device. By utilizing the grinding repair device, the grinding tool is ground and repaired, so that the grinding tool can achieve required precision after being used for grinding the silicon rod.

Fig. 4 is a schematic structural diagram of a polishing repair apparatus according to an embodiment of the present disclosure. In one implementation, the grinding repair device includes a mounting body 241 and at least one grinding portion 242, the mounting body 241 may be disposed on the silicon rod clamp 23, and the at least one grinding portion 242 is disposed on the mounting body 241 for grinding the corresponding at least one grinding tool. For example, a thinning portion 242 is respectively disposed on two opposite sides of the mounting body 241. Taking the grinding repair device for grinding the finish grinding tools in the finish grinding device as an example, the finish grinding device comprises a pair of finish grinding tools, the pair of finish grinding tools arranged oppositely is moved to the outer side of the grinding portion 242 along the direction of the plumb line, the silicon rod clamp is driven to move along the horizontal line so that the two repair portions 242 on the two sides of the mounting body 241 reciprocate along the horizontal line, and in this state, the pair of finish grinding tools in the finish grinding device can be made to approach the grinding portion 242 to contact the surface of the grinding portion 242 in an opposite direction (for example, along the direction of the plumb line) so as to realize grinding repair.

The thinning may be, for example, an oilstone. Here, the oilstone is, for example, diamond oilstone, boron carbide oilstone, fine-ground oilstone, general oilstone, or the like. The oilstone may effect a modification of the surface of the grinding tool contacted by the oilstone by virtue of the particle size of the surface. In the coping process, the surface of the oilstone contacts the grinding tool, the surface of the grinding tool is trimmed to be uniform granularity, and the flatness and the verticality of the plane of the grinding tool are improved.

The silicon rod grinding machine disclosed herein may also have other variations, for example, in some embodiments, the silicon rod processing platform is further provided with a waiting location, and thus, the silicon rod transfer device is also provided with a corresponding silicon rod clamp, and the silicon rod clamp corresponding to the waiting location may be used to load the single crystal silicon rod so as to perform subsequent grinding operations. In the embodiment as shown in fig. 2a and 2b, the shape of the silicon rod processing platform conforming to the base 1 is designed to be rectangular, and therefore, in the embodiment of the present application, four sides of the silicon rod processing platform are respectively provided with a waiting location, a first processing location, a third processing location, and a second processing location, and correspondingly, four silicon rod clamps 23 are configured on the silicon rod transfer device 2, the number of the silicon rod clamps 23 is matched with that of the locations where the silicon rod processing platform is configured, so that, in a certain state, when a certain silicon rod clamp 23 in the silicon rod transfer device 2 is directly facing to a certain location in the silicon rod processing platform, other silicon rod clamps 23 in the silicon rod transfer device 2 are also directly facing to other locations of the silicon rod processing platform. For example, when the first silicon rod clamp in the silicon rod transfer device 2 is currently facing the second processing location in the silicon rod processing platform, the second silicon rod clamp, the third silicon rod clamp and the fourth silicon rod clamp in the silicon rod transfer device 2 are also respectively facing the third processing location, the first processing location and the waiting location in the silicon rod processing platform.

When the silicon rod grinding machine in the embodiment shown in fig. 2a and 2b is used for silicon rod processing, the silicon rod to be ground can be held by the silicon rod clamps in the silicon rod transfer device and each silicon rod clamp and the silicon rod clamped by the silicon rod clamp can be driven to the corresponding processing position, for example, the silicon rod to be ground can be clamped by the silicon rod clamp positioned at the waiting position in the silicon rod transfer device, the silicon rod clamped by the silicon rod clamp 23 positioned at the first processing position in the silicon rod transfer device 2 can be roughly ground by the rough grinding device 3, the roughly ground silicon rod clamped by the silicon rod clamp 23 positioned at the third processing position in the silicon rod transfer device 2 can be chamfered by the chamfering device 5, and the chamfered silicon rod clamped by the silicon rod clamp 23 positioned at the second processing position in the silicon rod transfer device 2 can be finely ground by the fine grinding device 4, therefore, each processing device comprising the rough grinding device 3, the chamfering device 5 and the fine grinding device 4 can simultaneously perform corresponding processing operations (such as rough grinding operation, chamfering operation and fine grinding operation) on the silicon rod on the corresponding processing position, so that the silicon rod grinding efficiency can be improved, and the time consumption of the grinding operation can be reduced. Meanwhile, in subsequent operations, the silicon rod transfer device may continue to drive the silicon rod clamps and the silicon rods clamped by the silicon rod clamps to be switched from the original processing position to the next processing position, so that the processing device at the next processing position performs the next processing operation on the silicon rods, that is, the silicon rod transfer device rotates by a preset angle (the preset angle may be 90 degrees, for example) to drive each silicon rod clamp to be switched from the original processing position to the next processing position, for example, the silicon rod clamp originally located at the second processing position and the silicon rods clamped by the silicon rod clamp originally located at the second processing position are switched to a waiting position to unload the silicon rods after fine grinding and reload new silicon rods to be ground, the silicon rod clamp originally located at the third processing position and the silicon rods clamped by the silicon rod clamp originally located at the third processing position are switched to the second processing position to enable the fine grinding device to perform the fine grinding operation on the silicon rods after chamfering, and the silicon rod clamp originally located at the first processing position and the silicon rod clamp clamped by the silicon rod clamp are switched to the third processing position to enable the chamfering device to perform the rough grinding operation The silicon rod is chamfered, and the silicon rod clamp which is originally positioned at the waiting position and the silicon rod clamped by the silicon rod clamp are switched to the first position so that the rough grinding device performs rough grinding operation on the silicon rod to be ground. So, through each silicon rod transfer device drive each silicon rod anchor clamps in proper order conversion in each processing position and can carry out corresponding processing operation to the silicon rod in the corresponding processing position for each processingequipment, form the silicon rod and accomplish each processing operation with the assembly line mode, compare in correlation technique, promoted silicon rod grinding efficiency.

Referring to fig. 5a and 5b, fig. 5a is a schematic structural view of a silicon rod grinding machine according to another embodiment of the present application, and fig. 5b is a top view of fig. 5 a. As shown in fig. 5a and 5b, the silicon rod grinding machine includes a silicon rod transfer device 2, a rough grinding device 3, a finish grinding device 4, a chamfering device 5, and a silicon rod transfer device 6.

Of course, the waiting area and the silicon rod transfer device may also be disposed in the silicon rod grinding machine provided in the embodiment shown in fig. 1a to 2b, wherein the structure of the silicon rod transfer device and the manner of implementing feeding and discharging of silicon rods are similar, and therefore, the following description is provided with reference to the silicon rod grinding machine in the embodiment shown in fig. 5a and 5 b.

The waiting area is used for waiting for the follow-up area for carrying out grinding operation after loading the silicon rod to be ground and waiting for the follow-up area for unloading the silicon rod after grinding, and the silicon rod grinding machine further comprises a silicon rod transfer device corresponding to the waiting area for improving the work efficiency of unloading the silicon rod of the silicon rod loading machine.

The silicon rod transfer device is used for loading the silicon rod to be ground to a waiting position or unloading the processed silicon rod from the waiting position.

It should be understood that in embodiments in which the silicon rod processing platform is provided with a waiting location, a corresponding silicon rod clamp may be provided on the silicon rod transfer device. With this arrangement, the silicon rod transfer device 2 is intended to transfer the silicon rods to be processed and the silicon rods to be processed between the respective processing and waiting locations of the silicon rod processing platform.

Similarly, in the present embodiment, the silicon rod transferring device 2 may switch the transferring main body 21 and each silicon rod clamp 23 disposed thereon at each processing location through the transposition mechanism to transfer the silicon rod clamped by each silicon rod clamp 23 to the corresponding processing location for performing the corresponding processing operation.

In some embodiments, the transposition mechanism comprises a transposition rotating shaft, so that driving the transposition rotating shaft to rotate by a preset angle can enable the transfer body 21 and each silicon rod clamp 23 arranged on the transfer body to be switched at each processing position. In some embodiments, the indexing axis is located at the geometric center of the transfer body 21, and the indexing axis is located in the direction of the plumb line, i.e., the Z-axis in fig. 5 a. After the transposition rotating shaft is controlled, the transposition rotating shaft rotates by a preset angle so that the transferring main body 21 and each silicon rod clamp 23 arranged on the transferring main body are switched between each processing zone and each waiting zone. Here, the specific structure and operation of the transposition mechanism can refer to the foregoing embodiments, and details are not repeated here.

When the silicon rod clamp is transferred to the waiting location, the silicon rod transfer device can unload the processed silicon rod or load the silicon rod to be ground to the silicon rod clamp.

Taking a silicon rod grinding machine as an example, the silicon rod grinding machine is provided with a rough grinding device positioned at a first processing position and a fine grinding device positioned at a second processing position, so that the silicon rod transferring device is used for loading the silicon rod to be ground to a waiting position for subsequent rough grinding operation of the silicon rod by the rough grinding device at the first processing position, or unloading the silicon rod which is positioned on the waiting position and is already finely ground by the fine grinding device at the second processing position.

In an embodiment of this application, the silicon rod grinding machine that this application discloses still can be equipped with loading and unloading position location on silicon rod processing platform, silicon rod transfer device is located between loading and unloading position location and the waiting position location for the silicon rod that will wait to grind loads to waiting position location from loading and unloading position location and is right for follow-up corase grind device by first processing position location the silicon rod carries out the corase grind operation, perhaps, is used for transferring to loading and unloading position location the silicon rod that is located on waiting position location after the accurate grinding device that is located second processing position location department accurate grinding.

In an embodiment of the present application, the silicon rod transfer device 6 may be used to perform the silicon rod centering operation before the silicon rod loaded to the waiting area is ground, in addition to the silicon rod loading and unloading at the waiting area. The centering operation is specifically to enable the axis of the silicon rod and the clamping center line of the silicon rod clamp in the silicon rod transfer device to be on the same straight line.

Referring to fig. 6 to 9, a schematic structural view of a silicon rod transfer device according to an embodiment of the present invention is shown. As described above, in the present application, the silicon rod transfer device 6 may move the silicon rod to be ground (see the silicon rod in fig. 5a and 5 b) from the loading and unloading section to the first processing section or the second processing section and may enable the silicon rod 101 to complete the centering operation before the grinding operation. Referring to fig. 6 to 9, the silicon rod transfer device 6 includes: silicon rod material loading bearing structure, centering adjustment mechanism and feed actuating mechanism.

The silicon rod loading and carrying structure comprises a carrying base, a first loading part and a second loading part, wherein the first loading part and the second loading part are oppositely arranged along the loading and unloading direction.

The silicon rod feeding and bearing structure is used for bearing a silicon rod to be ground. In one embodiment of the present application, the silicon rod loading support structure is used for supporting a silicon rod to be ground. The silicon rod loading and carrying structure comprises a carrying base 612 and a first loading part 611 and a second loading part 613 which are oppositely arranged along a traveling direction, wherein the first loading part 611 and the second loading part 613 are matched for carrying a silicon rod to be ground, and the first loading part 611 and the second loading part 613 can relatively move relative to the carrying base 612, so that the first loading part 611 and the second loading part 613 and the silicon rod carried by the first loading part 611 and the second loading part 613 can relatively move relative to the carrying base 612. In other embodiments, the silicon rod loading support structure may be a plate-shaped structure, for example, a rectangular support plate, on which pillow strips may be disposed, and in order to protect the supported silicon rods, the pillow strips may be made of a flexible material, which may be rubber, acrylic, plastic, or the like, for example. In this embodiment, the direction of travel may be referred to as a first direction, i.e., the X-axis direction in fig. 5 a.

With respect to the first loading part 611 and the second loading part 613, it is used to carry silicon rods to be ground. In some embodiments, the loading portions of the first loading part 611 and the second loading part 613 for loading the silicon rods are substantially plate-shaped structures, and the first loading part 611 and the second loading part 613 further include a stop plate (strip) protruding from the plate-shaped structures, and a pillow bar may be disposed on the plate-shaped structures, and the pillow bar may be made of a flexible material, such as rubber, acrylic, plastic, etc., in order to protect the loaded silicon rods.

According to the silicon rod transfer device disclosed by the application, through the centering adjustment structure, the position of the silicon rod carried by the silicon rod loading and carrying structure can be adjusted, so that the axis of the silicon rod corresponds to the preset central line.

As mentioned above, the centering operation specifically refers to that the axis of the silicon rod is aligned with the clamping center line of the silicon rod clamp in the silicon rod transfer device, that is, the axis of the silicon rod coincides with the clamping center line of the silicon rod clamp in the silicon rod transfer device. In one embodiment, the silicon rod transfer device is provided with a transfer device for transferring the silicon rod, wherein the transfer device is provided with a transfer device for transferring the silicon rod, and the transfer device is provided with a transfer device for transferring the silicon rod. In another implementation, the silicon rod clamps in the silicon rod transfer device are different, and the clamping center lines of the silicon rod clamps are not identical in the direction of the plumb line.

In an embodiment of the application, the centering adjustment mechanism includes a vertical lifting mechanism for driving the silicon rod loading and carrying structure and the silicon rod carried thereby to move vertically so that the axis of the silicon rod is aligned with a predetermined center line in the direction of the plumb line, and the predetermined center line corresponds to the clamping center line of each first silicon rod clamp in the silicon rod transfer device.

In practical applications, taking one of the silicon rod clamps (in the following description, this silicon rod clamp is referred to as a first silicon rod clamp) as an example, a clamping center line of the first silicon rod clamp may be determined in advance, and a predetermined center line may be determined based on the clamping center line of the first silicon rod clamp, wherein the predetermined center line is the same as (i.e., is in height with) the clamping center line of the first silicon rod clamp in the direction of the plumb line. Therefore, the centering adjustment mechanism for adjusting the position of the silicon rod to be ground so that the axis line thereof corresponds to the predetermined center line is for adjusting the position of the silicon rod to be ground in the direction of the plumb line so that the axis line thereof coincides with the predetermined center line in the direction of the plumb line.

Regarding the centering adjustment mechanism, in an embodiment of the present application, the centering adjustment mechanism includes a vertical lifting mechanism for driving the silicon rod loading bearing structure and the silicon rod carried by the silicon rod loading bearing structure to perform a vertical lifting movement relative to each other so that an axis of the silicon rod is aligned with a predetermined center line in a direction of a plumb line. Fig. 10 is a schematic structural view of a centering adjustment mechanism in the silicon rod transfer device according to the present application. As shown in fig. 10, the vertical lifting as the centering adjustment mechanism further includes: a vertical elevating guide 621 and a vertical elevating driving unit 623.

The vertical lifting guide 621 may be disposed on the supporting base 612 of the silicon rod loading supporting structure along the direction of the plumb line, and specifically, in an embodiment of the present application, the silicon rod transferring device further includes a mounting structure 620, and the vertical lifting guide 621 is disposed on the mounting structure 620 and passes through the supporting base 612 of the silicon rod loading supporting structure. To ensure the stability of the silicon rod loading structure along the vertical lifting/lowering guides 621, the number of the vertical lifting/lowering guides 621 may be plural, for example, in the embodiment shown in fig. 10, four vertical lifting/lowering guides 621 are provided, which correspond to four corners of the loading base 612 (in this embodiment, the loading base 612 is rectangular) in the silicon rod loading/loading structure. Of course, the vertical lifting guide rods may be in other numbers, for example, three, five, six, or more, taking three as an example, three vertical lifting guide rods may be arranged in an isosceles triangle manner, taking five as an example, five vertical lifting guide rods may be additionally provided in the central region on the basis of the layout of the four vertical lifting guide rods, and the like.

The vertical lifting driving unit 623 is used for driving the silicon rod loading bearing structure to move up and down along the vertical lifting guide rod. In the above-mentioned vertical lifting driving unit 623, the driving motor 6231 and the screw rod assembly 6233 driven by the driving motor 6231 are included, the driving motor may be disposed on the mounting structure 620, and the screw rod assembly 6233 is connected to the driving motor 6231 and the bearing base 612 in the silicon rod loading bearing structure. When the vertical lifting driving unit 623 is used, the driving motor drives the connected screw rod assembly 6233 to rotate in the forward direction, so as to drive the silicon rod loading bearing structure to move upwards along the vertical lifting guide rod 621, or the driving motor drives the connected screw rod assembly 6233 to rotate in the reverse direction, so as to drive the silicon rod loading bearing structure to move downwards along the vertical lifting guide rod 621.

Of course, the vertical lifting driving unit is not limited to the structure shown in fig. 10, and in other embodiments, the vertical lifting driving unit may still be changed in other ways, for example, in an embodiment, the vertical lifting driving unit may also include a driving motor and a rack-and-pinion transmission assembly driven by the driving motor, wherein the rack-and-pinion transmission assembly may include a driving gear and a lifting rack, the driving motor may be disposed on the mounting structure, the lifting rack is disposed along the direction of the plumb line and connected to the bearing base 612 of the silicon rod loading bearing structure, and the driving gear is engaged with the lifting rack and controlled by the driving motor. When the vertical lifting driving unit is used, the driving motor drives the driving gear to rotate forward, so as to drive the lifting rack and the silicon rod loading bearing structure connected with the lifting rack to do lifting action along the vertical lifting guide rod 621, or the driving motor drives the driving gear to rotate reversely, so as to drive the lifting rack and the silicon rod loading bearing structure connected with the lifting rack to do descending action along the vertical lifting guide rod 621.

In an embodiment of the present application, the vertical lifting driving unit further includes an auxiliary lifting assembly, for cooperating with the vertical lifting driving unit.

In addition, in the embodiment shown in fig. 10, the vertical lifting driving unit 623 may further include an auxiliary lifting assembly, which further includes a cylinder and a lifting rod connected to the cylinder, wherein the cylinder may be disposed on the mounting structure 620, and the lifting rod is connected to the cylinder and is associated with the supporting base 612 in the silicon rod loading supporting structure. The association of the lifting mandril with the bearing base 612 in the silicon rod loading bearing structure can be achieved in a variety of ways, for example, in one way the lifting mandril is connected with the bearing base 612, in another way the lifting mandril is in contact with the bearing base 612. Thus, when the vertical lifting driving unit 623 is used, the adjusted auxiliary lifting assembly can assist the supporting base 612 to move up and down along the vertical lifting guide 621, so as to ensure the stability of the lifting movement of the supporting base 612.

In the present application, by using the aforementioned vertical lifting mechanism as the centering adjustment mechanism, the silicon rod supported by the silicon rod loading support structure is driven to vertically lift and move, so that the axis of the silicon rod is aligned with a predetermined center line in the direction of the plumb line, wherein the predetermined center line can be obtained according to the clamping center of the silicon rod clamp, and generally, the predetermined center line is determined because the clamping center of the silicon rod clamp is determined. In this way, when the vertical lifting mechanism is used, in order to ensure a lifting value of the silicon rod carried by the driving silicon rod loading and carrying structure to perform a lifting action in the direction of the plumb line, a dimension of the silicon rod currently in the direction of the plumb line or a height difference of a clamping center of the silicon rod and the silicon rod clamp in the direction of the plumb line needs to be determined. Therefore, in an embodiment of the present application, the centering adjustment mechanism further includes a height detector for detecting position information of an axis of the silicon rod carried by the silicon rod loading and carrying structure in the direction of the plumb line.

In an embodiment of the application, the silicon rod loading and carrying structure includes a carrying base and a first loading part and a second loading part which are oppositely arranged along a loading and unloading direction. The silicon rod transfer device further comprises a first centering adjusting mechanism which is used for changing the position of the silicon rod in the feeding and discharging direction by adjusting the first loading part and the second loading part so that the axis of the silicon rod corresponds to the center line of the silicon rod feeding and bearing structure in the feeding and discharging direction. In this embodiment, the feeding and discharging direction can be referred to as a first direction, i.e., an X-axis direction in fig. 5 a.

In an embodiment of the present application, the first centering adjustment mechanism includes: the folding device comprises an opening and closing slide rail and an opening and closing driving unit, wherein the opening and closing driving unit can be used for driving a first loading part and a second loading part to move oppositely along the opening and closing slide rail so as to execute an opening action or move oppositely along the opening and closing slide rail so as to execute an opening action.

Referring to fig. 7 and 8, the carrying base 612 is provided with two opening and closing slide rails 630, wherein the opening and closing slide rails 630 may be, for example, two, the two opening and closing slide rails 630 are arranged in parallel, that is, the two opening and closing slide rails 630 are arranged along a feeding and discharging direction (the feeding and discharging direction is a first direction, that is, an X-axis direction in fig. 5 a) and are respectively arranged at two opposite ends of the carrying base 612 along a second direction (that is, a Y-axis direction in fig. 5 a), and correspondingly, the bottoms of the first loading component 611 and the second loading component 613 are both provided with a guide groove structure or a guide block structure matched with the opening and closing slide rails 630.

The opening and closing driving unit is used for driving the first loading part and the second loading part to move oppositely along the opening and closing slide rail so as to execute the closing action or move oppositely along the opening and closing slide rail so as to execute the opening action. As shown in fig. 8, the opening and closing driving unit includes: a rotary plate 631, a first transmission assembly 633, a second transmission assembly 635, a first push-pull member 637, and a second push-pull member 639.

The rotary disc is arranged on the bearing base through a rotary shaft. In the embodiment shown in fig. 8, the rotation disc 631 is disposed in the central region of the bearing base 612 through a rotation axis, for example, the rotation axis of the rotation disc 631 is located at the geometric center of the bearing base 612. The shape of the turntable 631 is designed to be circular, but not limited thereto, and the shape of the turntable 631 may also be designed to be square, regular polygon or other customized shapes.

The first transmission assembly is associated with the carrying base and the turntable, and the second transmission assembly is associated with the carrying base and the turntable. In the embodiment shown in fig. 8, first transmission assembly 633 and second transmission assembly 635 are disposed in a central symmetrical arrangement with respect to turntable 631, wherein first transmission assembly 633 is associated with carrier base 612 and turntable 631, and second transmission assembly 635 is associated with carrier base 612 and turntable 631.

Regarding the first transmission assembly, in an implementation manner, the first transmission assembly further includes a first cylinder, a cylinder body of the first cylinder is connected to the bearing base, and a piston rod of the first cylinder is connected to the turntable. As shown in fig. 8, the first transmission assembly 633 comprises a first cylinder, the cylinder side of the first cylinder is connected to the bearing base 612 through a mounting member, wherein the mounting member can be fixed on the bearing base 612 through a bolt, for example, the first cylinder is coupled to the mounting member so as to obtain a certain degree of freedom of rotation, and the piston rod of the first cylinder is coupled to the turntable 631.

Similarly, regarding the second transmission assembly, in an implementation manner, the second transmission assembly further includes a second cylinder, a cylinder of the second cylinder is connected with the bearing base, and a piston rod of the second cylinder is connected to the turntable. As shown in fig. 8, the second transmission assembly 635 includes a second cylinder, the cylinder side of which is connected to the supporting base 612 through a mounting member, wherein the mounting member can be fixed on the supporting base 612 by bolts, for example, and the second cylinder is coupled to the mounting member to obtain a certain degree of freedom of rotation, and the piston rod of the second cylinder is coupled to the rotary plate 631.

The first push-pull member is associated with the turntable and the first loading member, and the second push-pull member is associated with the turntable and the second loading member.

In the embodiment shown in fig. 8, the first push-pull member 637 and the second push-pull member 639 are arranged centrosymmetrically with respect to the rotary plate 631, wherein the first push-pull member 637 is associated with the rotary plate 631 and the first loading member 611, and the second push-pull member 639 is associated with the rotary plate 631 and the second loading member 613.

Regarding the first push-pull member, in an implementation manner, the first push-pull member 637 is a first link, a first end of the first link 637 is coupled to the rotation plate 631, and a second end of the first link 637 is coupled to the first loading member 611, for example, a shaft joint may be provided at the second end of the first link 637, and a shaft connection hole corresponding to the shaft joint may be provided at the bottom of the first loading member 611.

In one embodiment, the second push-pull member 639 is a second link, a first end of the second link 639 is coupled to the rotation plate 631, and a second end of the second link 639 is coupled to the second loading member 613, and for example, a coupling may be provided at the second end of the second link 639, and a coupling hole corresponding to the coupling may be provided at the bottom of the second loading member 613.

Thus, when the opening and closing driving unit disclosed in the foregoing embodiment is used, when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate in the forward direction, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move in opposite directions along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate reversely, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move back to back along the opening and closing slide rail.

As shown in fig. 8, when the open/close driving unit disclosed in the foregoing embodiment is utilized, one of the driving assemblies may be designed as a driving type, the first driving assembly 633 is taken as an example, the first cylinder in the first driving assembly 633 is designed as a control cylinder, the first cylinder is taken as an example of a control cylinder, after the first cylinder is controlled, the piston rod of the first cylinder is ejected, the driving turntable 631 rotates clockwise, the clockwise rotating turntable 631 drives the piston rod of the second cylinder to extend, the clockwise rotating turntable 631 drives the first link 637 and the second link 639 thereon to rotate clockwise (the first link 637 is coupled to the shaft contact of the turntable 631 and the shaft contact of the second link 639 is coupled to the turntable 631 when rotating clockwise, the first link 637 and the second link 639 respectively drive the corresponding first loading part 611 and the corresponding second loading part to open/close along the central line 613 in the second direction), and the first link 637 and the second link 639 respectively drive the corresponding first loading part 611 and second loading part to open/close along the central line 613 The sliding rails 630 are moved toward each other to perform a closing operation, resulting in a state shown in fig. 9. Correspondingly, after the first cylinder is controlled, the piston rod of the first cylinder retracts, the driving turntable 631 rotates counterclockwise, the counterclockwise rotating turntable 631 drives the piston rod of the second cylinder to retract, in addition, the counterclockwise rotating turntable 631 drives the first link 637 and the second link 639 thereon to perform counterclockwise twisting (the shaft joint of the first link 637 and the shaft joint of the second link 639 and the shaft joint of the turntable 631 are corresponding to a center line in the second direction away from the silicon rod loading structure when being twisted clockwise), and the first link 637 and the second link 639 respectively drive the corresponding first loading part 611 and second loading part 613 to move back and forth along the opening and closing slide rail 630 to perform an opening action.

In the embodiment shown in fig. 8, the opening and closing driving unit in the first centering adjustment mechanism includes: the rotary plate 631, the first transmission assembly 633, the second transmission assembly 635, the first push-pull member 637, and the second push-pull member 639, but not limited thereto, and in other embodiments, the opening/closing driving unit in the first centering adjustment mechanism may be modified.

For example, in some embodiments, the opening and closing driving unit includes: two-way lead screw and driving source, wherein, two-way lead screw sets up along last unloading direction, just, two-way lead screw's both ends respectively with first loading part and second loading part threaded connection, the driving source with two-way lead screw is connected for the drive two-way lead screw rotates so that first loading part and second loading part move in opposite directions or carry on the back the body and move along last unloading direction. When the opening and closing driving unit disclosed in the embodiment is used, the driving source is made to drive the bidirectional screw rod to rotate in the forward direction, so that the first loading part and the second loading part move in opposite directions along the opening and closing slide rail (the opening and closing slide rail is arranged along the feeding and discharging direction) to perform the closing action, or the driving source is made to drive the bidirectional screw rod to rotate in the reverse direction, so that the first loading part and the second loading part move in opposite directions along the opening and closing slide rail (the opening and closing slide rail is arranged along the feeding and discharging direction) to perform the opening action.

For example, in some embodiments, the opening and closing driving unit includes: the first rack and the second rack are arranged along the feeding and discharging direction, the first rack is connected with the first loading part, and the second rack is connected with the second loading part; the driving gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack; and the driving source is used for driving the driving gear to rotate so as to drive the first loading part connected with the first rack and the second loading part connected with the second rack to move in opposite directions or move back to back in the feeding and discharging direction. When the opening and closing drive unit disclosed by the embodiment is used, the drive source is enabled to drive the drive gear to rotate in the forward direction, the first loading part connected with the first rack and the second loading part connected with the second rack move in opposite directions along the opening and closing slide rail (the opening and closing slide rail is arranged along the feeding and discharging direction) through the meshing of the drive gear and the first rack and the second rack so as to execute the closing action, or the drive source is enabled to drive the drive gear to rotate in the reverse direction, and the first loading part connected with the first rack and the second loading part connected with the second rack move in opposite directions along the opening and closing slide rail (the opening and closing slide rail is arranged along the feeding and discharging direction) so as to execute the opening action.

In view of the above, by using the first centering adjustment unit, the position of the silicon rod in the feeding and discharging direction is changed by adjusting the first loading part and the second loading part, so that the axis of the silicon rod corresponds to the center line of the silicon rod feeding and carrying structure in the feeding and discharging direction.

Still other variations of the silicon rod transfer device of the present application are possible. For example, in some embodiments, the silicon rod transfer device may further include a second centering adjustment mechanism for positioning the silicon rod in a centering region of the silicon rod loading bearing structure in the clamping direction by adjusting a position of the silicon rod carried by the silicon rod loading bearing structure in the clamping direction, wherein the clamping direction is perpendicular to the loading and unloading direction.

In an embodiment of the present application, the second centering adjustment mechanism includes: the support is arranged on the silicon rod processing platform; the sliding rail is arranged on the bracket along the clamping direction; the two ejection pieces are arranged on the sliding rail and are respectively and oppositely arranged at two sides of the bracket; and the ejection driving unit is used for driving the two ejection pieces to move oppositely or back to back along the slide rail.

Please refer to fig. 11, which is a partial enlarged view of fig. 5 a. Referring to fig. 5a and 11, the silicon rod transfer device may further include a second centering adjustment mechanism, and the second centering adjustment mechanism may include: the clamping device comprises a bracket 641, a sliding rail 643 arranged on the bracket 641, two pushing pieces 645 which are oppositely arranged on two sides of the bracket 641 and can relatively move on the sliding rail 643, and a pushing driving unit, wherein the sliding rail 643 is arranged along a clamping direction (i.e. a Y-axis direction in fig. 5 a), the two pushing pieces 645 are arranged on the sliding rail 643 and are respectively oppositely arranged on two sides of the bracket 641, and the pushing driving unit further comprises a bidirectional screw rod and a driving source, wherein the bidirectional screw rod is arranged along the clamping direction, two pushing pieces are respectively screwed at two ends, and the driving source is connected with the bidirectional screw rod and is used for driving the bidirectional screw rod to rotate so that the two pushing pieces move towards or away from each other along the clamping direction. In using the second centering adjustment mechanism disclosed in the embodiment, the driving source is made to drive the bidirectional screw to rotate forward so that the two pushing pieces 645 move toward each other along the slide rail 643 (the slide rail 643 is arranged in the gripping direction) to perform the closing action, or the driving source is made to drive the bidirectional screw to rotate backward so that the two pushing pieces 645 move away from each other along the slide rail 643 (the slide rail 643 is arranged in the gripping direction) to perform the opening action. The control source may be, for example, a servo motor.

As can be seen from the above, the second centering adjustment unit is used to push the position of the silicon rod supported on the silicon rod loading support structure in the clamping direction by the two pushing members 645, so that the silicon rod is adjusted to the centering region of the silicon rod loading support structure.

As mentioned above, the centering adjustment mechanism further includes a height detector for detecting position information of the axis of the silicon rod carried by the silicon rod loading and carrying structure in the direction of the plumb line. Referring to fig. 5a, 5b and 11, in the embodiment of the present application, the centering adjustment mechanism includes a height detector 625, the height detector 625 is disposed on the second centering adjustment unit, as shown in fig. 10, the height detector 625 is disposed on a slide 643 of the second centering adjustment unit, and can be controlled by a control source (e.g., a servo motor) to perform movement along the plumb line direction and the clamping direction and/or the loading and unloading direction. In an implementation, the height detector 625 may be, for example, a contact sensor or a range sensor. In the case of a contact sensor, the contact sensor has a probe head for contacting a side surface of the silicon rod, for example the top surface of the silicon rod. In some embodiments, the probe of the contact sensor may further include a retractable spring, and when the probe contacts the silicon rod, the retractable spring may be driven to retract, so as to protect the probe and prevent the probe from being damaged by image touch or pressing.

When using the height detector, taking the height detector 625 moving in the clamping direction (along the sliding rail 643) and the height detector as a touch sensor as an example: moving the silicon rod loading and carrying structure and the silicon rod carried by the silicon rod loading and carrying structure to the lower part of the sliding rail 643 in the second centering adjusting unit along the loading and unloading direction, and driving the height detector 625 to descend along the plumb line direction until the top surface of the silicon rod is touched, so as to finish the detection of a detection point; the driving height detector 625 rises along the plumb line direction to retract, the driving height detector 625 moves along the clamping direction by a preset length, the driving height detector 625 descends along the plumb line direction until the driving height detector touches the top surface of the silicon rod, and the detection of the next detection point is completed, wherein the next detection point and the previous detection point are in the clamping direction; thus, the detection of a plurality of detection points on the same straight line (one row) can be completed by continuing the steps. Of course, the silicon rod may also be detected by a plurality of detection points, for example, after the detection of the plurality of detection points in one row is completed, the silicon rod loading and carrying structure and the silicon rod carried by the silicon rod loading and carrying structure are moved by a preset offset distance along the loading and unloading direction, and the detection of the plurality of detection points in the next row is completed according to the above manner.

Therefore, by using the height detector, the height of the silicon rod can be obtained by performing multi-point detection on the top surface of the silicon rod, and then the position information of the axis of the silicon rod in the direction of the plumb line can be obtained, so that the centering adjusting mechanism can be used for adjustment in the follow-up process.

The feeding driving mechanism is used for driving the silicon rod loading bearing structure and the silicon rod borne by the silicon rod loading bearing structure to move from the loading and unloading zone to the waiting zone along the loading and unloading direction.

In the embodiment shown in fig. 5a and 11, the feeding driving mechanism is disposed below the silicon rod loading and carrying mechanism, and comprises: the silicon rod feeding device comprises a feeding guide rod 651 and a feeding driving unit 653, wherein the feeding guide rod 651 is arranged along the feeding and discharging direction and is used for arranging the silicon rod feeding bearing structure, as shown in fig. 10, the feeding guide rod 651 spans the machine base along the feeding and discharging direction and penetrates through the mounting structure 620, so that the mounting structure 620 and the silicon rod feeding structure thereon are arranged on the feeding guide rail 651. The feeding driving unit is used for driving the silicon rod loading bearing structure to move along the feeding guide rod, and in one implementation manner, as shown in an embodiment shown in fig. 10, the feeding driving unit comprises: the driving motor 6531 and the screw rod assembly 6533 which is arranged along the loading and unloading direction and is driven by the driving motor may be arranged at one end of the screw rod assembly 6533, and the screw rod assembly 6533 is controlled by the driving motor 6531 and is screwed with the mounting structure 620. Thus, when the feeding driving mechanism is used, the driving motor 6531 drives the screw rod assembly 6533 to rotate in the forward direction, and then the silicon rod loading bearing structure connected with the screw rod assembly 6533 is driven to move towards the waiting area along the feeding guide rod 651 (along the feeding and discharging direction), or the driving motor 6531 drives the screw rod assembly 6533 to rotate in the reverse direction, and then the silicon rod loading bearing structure connected with the screw rod assembly 6533 is driven to move towards the loading and unloading area along the feeding guide rod 651 (along the feeding and discharging direction), so that the silicon rod loaded by the silicon rod loading bearing structure is transferred between the loading and unloading area and the waiting area.

In practical applications, when the silicon rod transfer device is used, the specific operation process may substantially include: the silicon rod loading and bearing structure is positioned at the initial position of the loading and unloading position, and the silicon rod to be ground is placed on the first loading part and the second loading part of the silicon rod loading and bearing structure; driving the first loading part and the second loading part to move oppositely along the feeding and discharging direction by using the first centering adjusting mechanism, so that the axis of the silicon rod is aligned with the center line of the silicon rod feeding bearing structure along the feeding and discharging direction; the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rods borne by the silicon rod feeding bearing structure to move to the second centering adjusting mechanism along the feeding and discharging direction; adjusting the position of the silicon rod in the clamping direction by using a second centering adjusting mechanism to enable the silicon rod to be positioned in a centering area of the silicon rod feeding bearing structure in the clamping direction, and in addition, carrying out multi-point detection on the silicon rod by using a height detector to obtain position information of the axis of the silicon rod in the direction of the plumb line; a feeding driving mechanism is utilized to drive the silicon rod feeding bearing structure and the silicon rods borne by the silicon rod feeding bearing structure to move along the feeding and discharging direction so as to retreat to an initial position; determining the difference value of the axis of the silicon rod in the direction of the plumb line and the position information of the clamping center line of the silicon rod clamp at the waiting position to be moved in the direction of the plumb line, and driving the silicon rod loading and bearing structure and the silicon rod carried by the silicon rod loading and bearing structure to perform lifting action along the direction of the plumb line by using the vertical lifting mechanism so as to align the axis of the silicon rod with the clamping center line of the silicon rod clamp at the waiting position in the direction of the plumb line; and driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move to a waiting position along the feeding and discharging direction by using the feeding driving mechanism so as to enable the silicon rod clamp at the waiting position to clamp the silicon rod.

Here, the silicon rod transfer device disclosed in the present application includes a silicon rod loading and carrying structure, a centering adjustment mechanism, and a feeding driving mechanism, and can implement centering operation of a silicon rod during loading work for transferring the silicon rod to be ground from a loading area to at least one processing area corresponding to at least one silicon rod processing device, so that an axis of the silicon rod and a center line of the corresponding at least one silicon rod processing device are on the same straight line.

The silicon rod transfer device disclosed herein may still be subject to other variations, for example, in some embodiments, the silicon rod transfer device may further include a silicon rod blanking support structure for supporting a silicon rod to be blanked. The silicon rod blanking bearing structure comprises an unloading part, and the unloading part is arranged on the bearing base or one of the first loading part and the second loading part. In the embodiment shown in fig. 6, the carrying part of the unloading means 66 for carrying the silicon rods is substantially a plate-like structure, on which a pillow strip can be arranged, which can be made of a flexible material, such as rubber, acrylic, plastic, etc., in order to protect the carried silicon rods.

In the embodiment shown in fig. 6, the number of the unloading unit 66 is one, and the unloading unit is fixedly disposed on the first loading unit 611 or the second loading unit 613 of the silicon rod loading support structure. In this way, when the silicon rod transfer device is used to load the silicon rod, the loading unit to which the unloading unit 66 is not fixed (the second loading unit 613 corresponds to the waiting area to be loaded if the unloading unit 66 is fixed to the first loading unit 611; and the first loading unit 611 corresponds to the waiting area to be loaded if the unloading unit 66 is fixed to the second loading unit 613) corresponds to the waiting area to be loaded, so that the unloading unit 66 does not interfere with the silicon rod holder at the waiting area. On the other hand, when the silicon rod transfer device is used to discharge the silicon rod, the loading unit to which the unloading unit 66 is not fixed is associated with the waiting area to be discharged (the second loading unit 613 is associated with the waiting area to be discharged when the unloading unit 66 is fixed to the first loading unit 611; and the first loading unit 611 is associated with the waiting area to be discharged when the unloading unit 66 is fixed to the second loading unit 613).

In view of this, when the unloading unit 66 is one and is fixedly mounted on the first loading unit 611 or the second loading unit 613 of the silicon rod loading structure, the silicon rod transfer device further includes a reversing mechanism for driving the silicon rod loading structure and the silicon rod unloading structure to exchange positions. In the embodiment shown in fig. 5a, the reversing mechanism comprises a reversing rotating shaft arranged in the direction of the plumb line, and the reversing rotating shaft is driven to rotate by a preset angle (the preset angle is 180 degrees, for example) so that the silicon rod loading bearing structure and the silicon rod unloading bearing structure exchange positions. In one implementation, the reversing mechanism further includes a reversing drive unit for driving the reversing rotating shaft to rotate, and the reversing drive unit includes: the driving gear is coupled to the driving source; and the driven gear is meshed with the driving gear and is connected to the reversing rotating shaft.

Here, the silicon rod grinding machine disclosed in the present application includes a machine base, a silicon rod transfer device, a rough grinding device, a chamfering device, a fine grinding device, and a silicon rod transfer device, wherein the machine base has a silicon rod processing platform, the silicon rod processing platform is provided with a waiting position, a first processing position, a third processing position, and a second processing position, the silicon rod transfer device includes a transfer main body, a plurality of silicon rod clamps and a transposition mechanism, the transposition mechanism is utilized to drive the silicon rod clamps and the silicon rod clamped thereby to switch positions on each processing position so that the rough grinding device can perform rough grinding operation on the silicon rod, the chamfering device can perform chamfering operation on the silicon rod, and the fine grinding device can perform fine grinding operation on the silicon rod, so that the rough grinding device, the chamfering device, and the fine grinding device in the silicon rod grinding machine are all in working states at the same time, the silicon rod grinding efficiency can be improved, and the grinding operation can be reduced, and can improve economic benefits.

When the silicon rod grinding machine in the embodiment shown in fig. 5a and 5b is used for silicon rod processing, the specific process may be roughly as follows:

the first silicon rod is placed in the silicon rod transfer device 6 located at the loading and unloading location.

The first silicon rod is transferred to the waiting location by the silicon rod transfer device 6, and the first silicon rod is held by the silicon rod holder at the waiting location to complete loading. Wherein, the axis of the first silicon rod and the clamping center line of the silicon rod clamp are on the same straight line.

The silicon rod transfer device 2 is rotated by a preset angle to drive each silicon rod clamp 23 and the silicon rod clamped by the silicon rod clamp to reach the corresponding processing position. For example, the silicon rod gripper located in situ at the waiting location and the first silicon rod gripped thereby can be transferred by the silicon rod transfer device 2 by a clockwise rotation of 90 ° to the first processing location.

The first silicon rod held by the silicon rod clamp 23 located at the first processing location in the silicon rod transfer device 2 is roughly ground by the rough grinding device 3. Meanwhile, the second silicon rod is transferred to the waiting location by the silicon rod transfer device, and the silicon rod clamp at the waiting location clamps the second silicon rod to complete loading.

After the first silicon rod finishes the rough grinding operation, the silicon rod transfer device 2 rotates by a preset angle to drive each silicon rod clamp and the silicon rod clamped by the silicon rod clamp to reach the corresponding processing position. For example, a further 90 ° clockwise rotation by the silicon rod transfer device 2 can be carried out in order to transfer the silicon rod clamp 23 located in situ at the first processing location and the first silicon rod clamped thereby to the third processing location and to transfer the silicon rod clamp 23 located in situ at the waiting location and the second silicon rod clamped thereby to the first processing location.

Chamfering operation is performed on the first silicon rod after rough grinding, which is held by the silicon rod clamp 23 located at the third processing location in the silicon rod transfer device 2, by the chamfering device 5, meanwhile, rough grinding operation is performed on the second silicon rod, which is held by the silicon rod clamp 23 located at the first processing location in the silicon rod transfer device 2, by the rough grinding device 3, and the third silicon rod is transferred to a waiting location by the silicon rod transfer device, and the third silicon rod is held by the silicon rod clamp at the waiting location to complete loading.

After the chamfering operation of the first silicon rod is completed, the silicon rod transfer device 2 rotates by a preset angle to drive each silicon rod clamp 23 and the silicon rod clamped by the silicon rod clamp to reach the corresponding processing position. For example, the silicon rod transfer device 2 may continue to rotate clockwise by 90 ° to transfer the silicon rod clamp located in situ at the third processing location and the first silicon rod clamped thereby to the second processing location, to transfer the silicon rod clamp located in situ at the first processing location and the second silicon rod clamped thereby to the third processing location, and to transfer the silicon rod clamp located in situ at the waiting location and the third silicon rod clamped thereby to the first processing location.

The first silicon rod after being clamped and chamfered by the silicon rod clamp 23 positioned at the second processing position in the silicon rod transfer device 2 is accurately ground and chamfered by the accurate grinding device 4, meanwhile, the second silicon rod after being roughly ground and clamped by the silicon rod clamp 23 positioned at the third processing position in the silicon rod transfer device 2 is chamfered by the chamfering device 5, the third silicon rod clamped by the silicon rod clamp 23 positioned at the first processing position in the silicon rod transfer device 2 is roughly ground and chamfered by the rough grinding device 3, and the fourth silicon rod is transferred to the waiting position by the silicon rod transfer device, and the fourth silicon rod is clamped by the silicon rod clamp at the waiting position to finish loading.

After the first silicon rod is finished with the fine grinding operation, the silicon rod transfer device 2 rotates by a preset angle to drive each silicon rod clamp 23 and the silicon rod clamped by the silicon rod clamp to reach the corresponding processing position. For example, the silicon rod transfer device may be rotated by 270 ° counterclockwise (or, further rotated by 90 ° clockwise) to transfer the silicon rod clamp originally located at the second processing location and the first silicon rod clamped thereby to the waiting location, to transfer the silicon rod clamp originally located at the third processing location and the second silicon rod clamped thereby to the second processing location, to transfer the silicon rod clamp originally located at the first processing location and the third silicon rod clamped thereby to the third processing location, and to transfer the silicon rod clamp originally located at the waiting location and the fourth silicon rod clamped thereby to the first processing location.

The silicon rod transferring device 6 transfers the first silicon rod after fine grinding from the waiting position to the loading and unloading position to complete unloading, load the fifth silicon rod and transfer the fifth silicon rod to the waiting position, and the silicon rod clamp at the waiting position clamps the fifth silicon rod to complete loading. Meanwhile, the second silicon rod after chamfering held by the silicon rod clamp 23 located at the second processing position in the silicon rod transfer device 2 is finely ground by the fine grinding device 4, the third silicon rod after rough grinding held by the silicon rod clamp 23 located at the third processing position in the silicon rod transfer device 2 is chamfered by the chamfering device 5, and the fourth silicon rod held by the silicon rod clamp 23 located at the first processing position in the silicon rod transfer device 2 is roughly ground by the rough grinding device 3.

In an embodiment of the silicon rod grinding machine having a first processing location corresponding to the rough grinding device, a second processing location corresponding to the finish grinding device, and a third processing location corresponding to the chamfering device, in order to simplify the layout of the silicon rod grinding machine of the present application, and to simplify the transfer process required for the processing devices (i.e., the rough grinding device, the finish grinding device, and the chamfering device) to perform the grinding operation, the present application further provides the following embodiments:

in certain embodiments, the transport body has a rectangular profile in the horizontal plane. Meanwhile, in some embodiments, the rectangle may also be a square.

In one embodiment of the present application, the transfer body 21 is disposed in a central region of the silicon rod processing platform, and the transfer body 21 is designed to be rectangular in conformity with the shape of the silicon rod processing platform. Each side surface of the rectangular transfer body 21 may be used as a mounting surface for mounting a plurality of silicon rod clamps 23, and as shown in fig. 5a and 5b, one silicon rod clamp 23 is mounted on each of the four side surfaces of the transfer body 21.

In the embodiment shown in fig. 5a and 5b, the shape of the silicon rod processing platform conforming to the base 1 is designed to be rectangular, and therefore, in the embodiment of the present application, four sides of the silicon rod processing platform are respectively provided with a waiting location, a first processing location, a third processing location, and a second processing location, and correspondingly, four silicon rod clamps 23 are configured on the silicon rod transfer device 2, the number of the silicon rod clamps 23 is matched with that of the locations where the silicon rod processing platform is configured, so that, in a certain state, when a certain silicon rod clamp 23 in the silicon rod transfer device 2 is directly facing to a certain location in the silicon rod processing platform, other silicon rod clamps 23 in the silicon rod transfer device 2 are also directly facing to other locations of the silicon rod processing platform. That is, when the first silicon rod clamp in the silicon rod transfer device 2 is directly opposite to the second processing location in the silicon rod processing platform, the second silicon rod clamp, the third silicon rod clamp and the fourth silicon rod clamp in the silicon rod transfer device 2 are also respectively directly opposite to the third processing location, the first processing location and the waiting location in the silicon rod processing platform.

In an embodiment that the outline of the transfer body in the horizontal plane is set to be a rectangle, taking the case that the transposition mechanism includes a transposition rotating shaft as an example, the rotation center of the transfer body may be set at the centroid (i.e., the geometric center) of the rectangle, and for any initial time, every time the transfer body rotates 90 ° in the same direction, for example, clockwise, the directions of the four sides of the rectangle correspond to the directions of the four sides corresponding to the initial time before rotation, and the correspondence is that the directions of the rectangular sides are one-to-one parallel or collinear with the directions of the rectangular sides before rotation. When the outline of the transferring main body in the horizontal plane is set to be square, the transferring main body can be overlapped with the initial moment position every time the transferring main body rotates 90 degrees along the clockwise direction or the anticlockwise direction at any initial moment.

In some implementations, a silicon rod clamp is disposed on an outer side of each side of the rectangle of the transfer body profile, wherein a clamping center line of any one of the silicon rod clamps is parallel to the corresponding rectangle side.

In a specific implementation manner, for a silicon rod clamp, the silicon rod clamp is arranged on one outer side of the outline of the transfer main body, for example, the silicon rod clamp can be arranged on a horizontal guide rail, a guide groove or a guide pillar on the outer side of the rectangular side, and the clamping center line of the silicon rod clamp is parallel to the corresponding side.

Under this arrangement, when the transfer body is driven by the transposition mechanism to rotate by a preset angle, such as 90 ° (or 180 °), the silicon rod correspondingly processed at the same processing location can be replaced from the silicon rod outside one side of the transfer body to the silicon rod outside the other side, for example, after the rough grinding device at the first processing location performs rough grinding on one single crystal silicon rod, and after the transfer body is driven by the transposition mechanism to rotate by 90 °, the rough grinding device can perform rough grinding on the other single crystal silicon rod. Of course, it should be understood that the predetermined angle is not limited to 90 °, for example, the predetermined angle is not limited to 90 ° (or 180 °), and in an actual processing scenario, the predetermined angle may be allowed to deviate from 90 ° (or 180 °), for example, the predetermined angle may be 90 ° ± 10 ° (or 180 ° ± 10 °), and other angles, and the same processing region may process the silicon rod held by the silicon rod clamp corresponding to the other side of the transfer body.

It should be understood that, in the silicon rod grinding machine of the present example, the transfer body is provided in the central region of the silicon rod processing platform, and the rough grinding means, the fine grinding means, and the chamfering means are provided outside the opposite transfer body. For the realization grinds the side of the silicon rod that is horizontal centre gripping, the mill face of corase grind grinding apparatus is located in the horizontal plane among the grinder, in the mill face of finish grind grinding apparatus is located in the horizontal plane, and, in the chamfer device the mill face of chamfer grinding apparatus is located in the horizontal plane, the transportation main part is rotating in order to switch the processing position back that silicon rod anchor clamps were located, and the silicon rod by the centre gripping is unchangeable by the horizontal height of the upper and lower two sides of the silicon rod of centre gripping, or, borrow again, the clamping part of silicon rod anchor clamps drives the silicon rod and rotates and can be adjusted the mill face of treating of silicon rod for being located in the horizontal plane, consequently need not to drive silicon rod anchor clamps pivoted to transport the main part and predetermine angle accurate positioning and can carry out the grinding to the silicon rod side.

In some embodiments, the silicon rod processing platform is further provided with a waiting zone, and the long sides of the first processing zone, the second processing zone and the third processing zone correspond to the four sides of the rectangle in parallel; the long edge of the first processing position is the advancing direction of a coarse grinding tool in the coarse grinding device, the long edge of the second processing position is the advancing direction of a fine grinding tool in the fine grinding device, the long edge of the third processing position is the advancing direction of a chamfer grinding tool in the chamfer device, and the long edge of the waiting position is the axis direction of the silicon rod borne by the waiting position.

In an actual processing scene, the axis of the silicon rod clamped by the silicon rod clamp in a grinding state is parallel (or approximately parallel) to the long edge direction of a processing area, and when the grinding tool or the chamfering tool moves along the advancing direction, the distance between the grinding tool and the silicon rod is unchanged, so that the grinding or chamfering operation is facilitated, and the equipment is simplified. For this reason, this application order the long limit in first processing position, the long limit in second processing position, the long limit in third processing position and the long limit of waiting for the position with four limits parallel correspondences of the rectangle of transporting the main part profile, then locate when transporting the centre gripping central line that silicon rod anchor clamps on one side correspond and arbitrary processing position or the long limit of waiting for the position in the main part is parallel, the centre gripping central line that the silicon rod anchor clamps on other three rectangle sides correspond in the main part also is parallel with the long limit of processing position or waiting for the position in place. Meanwhile, when the silicon rod clamp arranged on the transferring main body rotates along with the transferring main body by a preset angle, so that after a processing position corresponding to the silicon rod clamp is changed, the clamping center line of the silicon rod clamp is parallel to the long edge of the processing position located after the silicon rod clamp rotates, and other silicon rod clamps arranged on the transferring main body are also adjusted to be parallel to the long edge of the processing position located by the clamping center line.

In some embodiments, in the waiting state, a first side of the rectangle of the outline of the main body corresponds to the waiting area, a second side corresponds to the first processing area, a third side corresponds to the second processing area, and a fourth side corresponds to the third processing area.

In this case, the waiting state is a state in which silicon rods loaded at a waiting location of a clamping center line corresponding to a silicon rod clamp on the transfer body are parallel or nearly parallel, in which a profile side provided with the silicon rod clamp is regarded as a first side, a second side of the profile of the transfer body corresponds to the first processing location, a third side corresponds to the second processing location, and a fourth side corresponds to the third processing location. Therefore, the waiting area can carry out loading or blanking operation on the silicon rod, the first processing area can carry out coarse grinding operation, the second processing area can carry out fine grinding operation, the third processing area can carry out chamfering operation, and different processing areas are in working states at the same time; meanwhile, the silicon rod clamp is driven by the transferring main body to be switched at different positions, seamless connection of different grinding processes can be achieved for the same silicon rod, and the processing efficiency of the silicon rod grinding machine is improved.

The above embodiments are merely illustrative of the principles and utilities of the present application and are not intended to limit the application. Any person skilled in the art can modify or change the above-described embodiments without departing from the spirit and scope of the present application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of the present application.

Claims

1. A silicon rod grinding machine characterized by comprising:

the base is provided with a silicon rod processing platform; a first processing area and a second processing area are arranged on the silicon rod processing platform;

the silicon rod transfer device is arranged on the base and comprises a transfer main body, and a plurality of silicon rod clamps and a transposition mechanism which are arranged on the transfer main body, wherein the transposition mechanism is used for driving the silicon rod clamps and silicon rods clamped by the silicon rod clamps to switch positions on a first processing position and a second processing position; wherein the clamping center lines corresponding to the silicon rod clamps are respectively positioned in the same horizontal height;

the rough grinding device is arranged at the first processing position and is used for performing rough grinding operation on the silicon rod clamped by the silicon rod clamp positioned at the first processing position in the silicon rod transfer device; and

and the fine grinding device is arranged at the second processing position and is used for performing fine grinding operation on the silicon rod clamped by the silicon rod clamp positioned at the second processing position in the silicon rod transfer device.

2. The silicon rod grinding machine as claimed in claim 1, wherein the silicon rod transfer device is disposed in a central region of the silicon rod processing platform, and the indexing mechanism comprises an indexing shaft, and the indexing shaft is driven to rotate by a preset angle to drive the silicon rod clamps to perform a switching action.

3. The silicon rod grinding machine as set forth in claim 2, wherein the transposition mechanism further comprises a transposition driving unit for driving the transposition rotating shaft to rotate, the transposition driving unit comprising:

the driving gear is coupled to the driving source; and

and the driven gear is meshed with the driving gear and is connected to the transposition rotating shaft.

4. The silicon rod grinder as set forth in claim 1, wherein the silicon rod clamp comprises:

the clamping arms are arranged on the transferring main body and used for clamping two end faces of the silicon rod; the axis of the silicon rod clamped by the pair of clamping arms is consistent with the clamping center line of the pair of clamping arms; and

the clamping arm driving mechanism is used for driving at least one clamping arm in the pair of clamping arms to move along a horizontal line so as to adjust the clamping distance between the pair of clamping arms.

5. The silicon rod grinding machine as recited in claim 4, wherein each of the pair of clamp arms is provided with a clamping portion and a clamping portion rotating mechanism for driving the clamping portion and the silicon rod to be clamped to rotate.

6. The silicon rod grinding machine as claimed in claim 4, characterized in that the clamping arm drive mechanism comprises:

the opening and closing guide rail is arranged on the transferring main body along a horizontal line and is used for arranging a pair of clamping arms; and

and the opening and closing driving unit is used for driving at least one clamping arm in the pair of clamping arms to move along the opening and closing guide rail.

7. The silicon rod grinding machine as claimed in claim 1, characterized in that the rough grinding device comprises:

the rough grinding mounting structure is arranged on the base and corresponds to the first machining area;

at least one pair of rough grinding tools arranged on the rough grinding mounting structure; wherein the grinding surfaces of the at least one pair of rough grinding tools are parallel and oppositely arranged;

the rough grinding tool advancing and retreating mechanism is used for driving at least one rough grinding tool in the at least one pair of rough grinding tools to move along a plumb line direction, wherein the plumb line direction is perpendicular to the grinding surface; and

and the rough grinding tool travelling mechanism is used for driving the at least one pair of rough grinding tools to move along the horizontal line.

8. The silicon rod grinding machine as set forth in claim 7, wherein the rough grinding tool advancing and retreating mechanism comprises:

the advance and retreat guide rail is arranged on the rough grinding installation structure along the direction of the plumb line and used for arranging the at least one pair of rough grinding tools; and

and the advance and retreat driving unit is used for driving at least one rough grinding tool in the at least one pair of rough grinding tools to move along the advance and retreat guide rail.

9. The silicon rod grinding machine as set forth in claim 7, wherein the rough grinding tool travel mechanism comprises:

the traveling guide rail is arranged on the rough grinding installation structure along a horizontal line and is used for arranging the at least one pair of rough grinding tools; and

and the travelling driving unit is used for driving the at least one pair of rough grinding tools to move along the travelling guide rail.

10. The silicon rod grinding machine as claimed in claim 7, wherein the rough grinding mounting structure is provided to the machine base by means of a displacement mechanism, wherein the displacement mechanism comprises:

the first linear guide rail is arranged on the base along the width direction of the first processing position, wherein the width direction of the first processing position is orthogonal to the horizontal line direction of the traveling movement of the rough grinding tool;

and the driving source drives the rough grinding mounting structure to move along the first linear guide rail.

11. The silicon rod grinding mill as claimed in claim 1, characterized in that the fine grinding device comprises:

the fine grinding mounting structure is arranged on the base and corresponds to the second machining area;

at least one pair of finish grinding tools disposed on the finish grinding mounting structure; wherein the grinding surfaces of the at least one pair of finish grinding tools are arranged in parallel and opposite to each other;

a finish grinder advancing and retreating mechanism for driving at least one finish grinder of the at least one pair of finish grinders to move in a plumb line direction, wherein the plumb line direction is perpendicular to the grinding surface; and

a finish grinding tool travel mechanism for driving the at least one pair of finish grinding tools to move along a horizontal line.

12. The silicon rod mill of claim 11, wherein the finish grinding tool advancing and retreating mechanism comprises:

the advancing and retreating guide rail is arranged on the fine grinding mounting structure along the direction of the plumb line and is used for arranging the at least one pair of fine grinding tools; and

and the advancing and retreating driving unit is used for driving at least one of the pair of the fine grinding tools to move along the advancing and retreating guide rail.

13. The silicon rod grinder of claim 11, wherein the finish grinder travel mechanism comprises:

the travelling guide rail is arranged on the fine grinding mounting structure along a horizontal line and is used for arranging the at least one pair of fine grinding tools; and

a travel driving unit for driving the at least one pair of finish grinding stones to move along the travel guide rail.

14. The silicon rod grinding machine of claim 11, wherein the fine grinding mounting structure is provided to the machine base by a displacement mechanism, wherein the displacement mechanism comprises:

the second linear guide rail is arranged on the base along the width direction of the second machining position, and the width direction of the second machining position is orthogonal to the horizontal line direction of the advancing movement of the fine grinding tool;

and the driving source drives the fine grinding mounting structure to move along the second linear guide rail.

15. The silicon rod grinding machine as claimed in claim 1, characterized in that the silicon rod processing platform is also provided with a third processing location; the silicon rod grinding machine further comprises a chamfering device arranged at the third location and used for chamfering the silicon rod clamped by the silicon rod clamp positioned at the third processing location in the silicon rod transfer device.

16. The silicon rod grinding machine as recited in claim 15, wherein the third processing location is located between the first processing location and the second processing location, and the chamfering device is configured to perform chamfering operation on the coarsely ground silicon rod held by the silicon rod clamp located at the third processing location in the silicon rod transfer device; or after the third processing position is arranged at the second processing position, the chamfering device is used for chamfering the finely ground silicon rod clamped by the silicon rod clamp positioned at the third processing position in the silicon rod transfer device.

17. The silicon rod grinding machine as recited in claim 15, wherein the chamfering apparatus comprises:

the chamfer mounting structure is arranged on the base and corresponds to the third machining position;

at least one pair of chamfer grinding tools arranged on the chamfer mounting structure; wherein the grinding surfaces of the at least one pair of chamfer grinding tools are parallel and are oppositely arranged;

the chamfering grinding tool advancing and retreating mechanism is used for driving at least one chamfering grinding tool in the at least one pair of chamfering grinding tools to move along a plumb line direction, wherein the plumb line direction is perpendicular to the grinding surface; and

and the chamfering tool advancing mechanism is used for driving the at least one pair of chamfering tools to advance and move along the horizontal line.

18. The silicon rod grinder of claim 17, wherein the chamfer grinder advancing and retreating mechanism comprises:

the advance and retreat guide rails are arranged on the chamfer mounting structure along the direction of the plumb line and used for arranging the at least one pair of chamfer grinding tools; and

and the advancing and retreating driving unit is used for driving at least one chamfering grinding tool in the pair of chamfering grinding tools to move along the advancing and retreating guide rail.

19. The silicon rod grinder of claim 17, wherein the chamfer grinder travel mechanism comprises:

the traveling guide rail is arranged on the chamfer mounting structure along a horizontal line and is used for arranging the at least one pair of chamfer grinding tools; and

and the travelling driving unit is used for driving the at least one pair of chamfering grinding tools to move along the travelling guide rail.

20. The silicon rod grinder of claim 17, wherein two grinders of the pair of chamfering grinders are a fine chamfering grinder and a rough chamfering grinder, respectively.

21. The silicon rod grinder of claim 20, wherein the fine chamfer grinders and the coarse chamfer grinders are staggered in a horizontal direction of travel of the chamfer grinders.

22. The silicon rod mill of claim 20, wherein two of the pair of chamfered grinders are staggered in a width direction of a third processing zone, wherein the width direction of the third processing zone is a horizontal line direction orthogonal to the traveling movement of the chamfered grinders.

23. The silicon rod mill as set forth in claim 15, wherein the transfer body is rectangular in profile in a horizontal plane.

24. The silicon rod grinding machine as claimed in claim 23, wherein a silicon rod clamp is provided on the outside of each side of the rectangle of the transfer body contour, wherein the clamping center line of any one of the silicon rod clamps is parallel to the corresponding rectangle side.

25. The silicon rod grinding machine as recited in claim 23, wherein the silicon rod processing platform is further provided with a waiting location, and the long sides of the first processing location, the second processing location, and the third processing location correspond to the four sides of the rectangle in parallel; the long edge of the first processing position is the advancing direction of a coarse grinding tool in the coarse grinding device, the long edge of the second processing position is the advancing direction of a fine grinding tool in the fine grinding device, the long edge of the third processing position is the advancing direction of a chamfer grinding tool in the chamfer device, and the long edge of the waiting position is the axis direction of the silicon rod borne by the waiting position.

26. The silicon rod grinding machine as recited in claim 25, wherein in the waiting state, a first side of the rectangle of the contour of the transfer body corresponds to the waiting location, a second side corresponds to the first processing location, a third side corresponds to the second processing location, and a fourth side corresponds to the third processing location.

27. The silicon rod grinding machine as claimed in claim 1, characterized in that the silicon rod processing platform is further provided with a waiting location; the silicon rod grinding machine further comprises a silicon rod transfer device for loading the silicon rod to be ground to the waiting location or unloading the processed silicon rod from the waiting location.

28. The silicon rod grinding machine as claimed in claim 27, wherein the silicon rod transfer device comprises:

the silicon rod feeding and bearing structure is used for bearing a silicon rod to be ground;

a centering adjustment mechanism for adjusting the position of the silicon rod so that the axis of the silicon rod corresponds to a predetermined center line; and

and the feeding driving mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod borne by the silicon rod feeding bearing structure to move to a waiting position along the feeding and discharging direction.

29. The silicon rod grinding machine as claimed in claim 28, wherein the centering adjustment mechanism comprises a vertical lifting mechanism for driving the silicon rod loading support structure and the silicon rod carried thereby to move vertically up and down so that the axis of the silicon rod is aligned with a predetermined center line in the direction of the center of gravity line, the predetermined center line corresponding to the holding center line of each first silicon rod holder in the silicon rod transfer device.

30. The silicon rod grinder of claim 29, wherein the vertical lift mechanism comprises:

the vertical lifting guide rod is used for arranging the silicon rod feeding and bearing structure; and

and the vertical lifting driving unit is used for driving the silicon rod feeding bearing structure to move up and down along the vertical lifting guide rod.

31. The silicon rod grinder of claim 30, wherein the vertical elevation drive unit further comprises an auxiliary elevation assembly for cooperating with the vertical elevation drive unit.

32. The silicon rod grinding machine as claimed in claim 28, wherein the centering adjustment mechanism further comprises a height detector for detecting a silicon rod to obtain information on the position of the axis line of the silicon rod in the direction of the plumb line.

33. The silicon rod grinder of claim 32, wherein the height detector is a contact sensor or a distance measuring sensor.

34. The silicon rod grinder of claim 28, wherein the feed drive mechanism comprises:

the feeding guide rods are arranged along the feeding and discharging direction and are used for arranging the silicon rod feeding and bearing structure; and

and the feeding driving unit is used for driving the silicon rod feeding bearing structure to move along the feeding guide rod.

35. The silicon rod grinder as set forth in claim 28, wherein the silicon rod loading bearing structure comprises a bearing base and first and second loading members disposed opposite to each other in a loading and unloading direction.

36. The silicon rod grinding machine as recited in claim 35, further comprising a first centering adjustment mechanism for changing a position of a silicon rod in an up-down direction by adjusting the first loading part and the second loading part such that an axial center line of the silicon rod corresponds to a center line of the silicon rod loading carrier structure in the up-down direction.

37. The silicon rod grinding machine of claim 36, wherein the first centering adjustment mechanism comprises:

the opening and closing slide rail is arranged on the bearing base along the feeding and discharging direction and is used for arranging a first loading part and a second loading part; and

the opening and closing driving unit is used for driving the first loading part and the second loading part to move oppositely along the opening and closing slide rail so as to execute the closing action or move oppositely along the opening and closing slide rail so as to execute the opening action.

38. The silicon rod grinding machine as claimed in claim 37, wherein the opening and closing drive unit comprises:

the turntable is arranged in the central area of the bearing base through a rotating shaft;

a first drive assembly associated with the load base and the turntable and a second drive assembly associated with the load base and the turntable;

a first push-pull member associated with the turntable and the first loading member and a second push-pull member associated with the turntable and the second loading member;

when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate in the forward direction, the turntable drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move oppositely along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the rotary disc to rotate reversely, the rotary disc drives the first loading part associated with the first push-pull part and the second loading part associated with the second push-pull part to move back and forth along the opening and closing slide rail.

39. The silicon rod grinder as set forth in claim 38, wherein the first push-pull member is a first link, a first end of the first link is coupled to the rotating disc, a second end of the first link is coupled to the first loading member, the second push-pull member is a second link, a first end of the second link is coupled to the rotating disc, and a second end of the second link is coupled to the second loading member.

40. The silicon rod grinder of claim 38, wherein the first transmission assembly comprises a first cylinder, a cylinder of the first cylinder being connected to the carrying base, a piston rod of the first cylinder being coupled to the turntable, and the second transmission assembly comprises a second cylinder, a cylinder of the second cylinder being connected to the carrying base, a piston rod of the second cylinder being coupled to the turntable.

41. The silicon rod grinding machine as claimed in claim 28, further comprising a second centering adjustment mechanism for positioning a silicon rod carried by a silicon rod loading bearing structure in a centering region of the silicon rod loading bearing structure in a clamping direction by adjusting the position of the silicon rod in the clamping direction, wherein the clamping direction is perpendicular to the loading and unloading direction.

42. The silicon rod grinder of claim 41, wherein the second centering adjustment mechanism comprises:

the support is arranged on the silicon rod processing platform;

the sliding rail is arranged on the bracket along the clamping direction;

the two ejection pieces are arranged on the sliding rail and are respectively and oppositely arranged at two sides of the bracket; and

and the ejection driving unit is used for driving the two ejection pieces to move oppositely or back to back along the slide rail.

43. The silicon rod grinding machine as claimed in claim 35, wherein the silicon rod transfer device further comprises: and the silicon rod blanking bearing structure is used for bearing the silicon rod to be blanked.

44. The silicon rod grinding machine as claimed in claim 43, wherein the silicon rod blanking carrying arrangement comprises an unloading member provided at the carrying base or at one of the first loading member and the second loading member.

45. The silicon rod grinding machine as claimed in claim 44, wherein the silicon rod transfer device further comprises: and the reversing mechanism is used for driving the silicon rod feeding bearing structure and the silicon rod blanking bearing structure to interchange positions.

46. The silicon rod grinding machine as claimed in claim 45, wherein the reversing mechanism comprises a reversing spindle disposed in the direction of the plumb line, the reversing spindle being driven to rotate by a preset angle so that the silicon rod loading bearing arrangement and the silicon rod unloading bearing arrangement interchange positions.

47. The silicon rod grinding mill as claimed in claim 46, wherein the reversing mechanism further comprises a reversing drive unit for driving a reversing spindle in rotation.

48. The silicon rod grinding machine as recited in claim 1, wherein the transfer body has an equilateral triangular profile in the horizontal plane.

49. The silicon rod grinder as set forth in claim 48, wherein one silicon rod clamp is provided outside each side of the triangle of the transfer body profile, wherein the clamping centerline of any one silicon rod clamp is parallel to the corresponding side.

50. The silicon rod mill of claim 48, wherein the long side of the first processing zone is at an angle of 60 ° to the extension of the long side of the second processing zone, wherein the direction of the long side of the first processing zone is the direction of travel of the rough grinding tool in the rough grinding apparatus and the direction of the long side of the second processing zone is the direction of travel of the finish grinding tool in the finish grinding apparatus.

51. The silicon rod grinding machine as recited in claim 50, wherein the silicon rod processing platform is further provided with a waiting location, and in the waiting state, a first side of the transfer body profile corresponds to the waiting location, a second side corresponds to the first processing location, and a third side corresponds to the second processing location.