CN212830794U - Inclined platform and substrate conveying device - Google Patents
Inclined platform and substrate conveying device Download PDFInfo
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- CN212830794U CN212830794U CN202020842001.1U CN202020842001U CN212830794U CN 212830794 U CN212830794 U CN 212830794U CN 202020842001 U CN202020842001 U CN 202020842001U CN 212830794 U CN212830794 U CN 212830794U
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Abstract
The utility model discloses a borrow by inclination so that the scattered slope platform of wet-type processing procedure liquid medicine on transmitted base plate or the surface of base plate reaches the base plate transmission device of preparation with it, the utility model provides a base plate transmission device, this base plate transmission device are at least including a base and a slope platform, and it mainly lies in: the inclined platform is arranged on the base, and an included angle is clamped between the inclined platform and the base; therefore, the design of arranging the inclined platform on the base of the substrate transmission device is utilized, so that the liquid medicine of the wet process remained on the surface of the substrate can effectively slide along the inclined angle while the substrate is transmitted, the damage to the surface of the substrate caused by the residual liquid medicine can be avoided during the transmission of the substrate, and the advantages of protecting the quality of the transmitted substrate and the like are really achieved.
Description
Technical Field
The present invention relates to a tilt platform and a substrate transferring apparatus, and more particularly, to a tilt platform and a substrate transferring apparatus using the same, which can dissipate the liquid medicine of wet processes on the surface of a substrate to be transferred by using a platform having an inclination angle.
Background
A conventional substrate transferring apparatus generally transfers a substrate to a transferring structure formed by combining a plurality of transferring rollers by a transferring line, and then moves the substrate to a designated position by a robot arm disposed near the transferring structure, or picks up the substrate by the robot arm and then transfers the substrate to another transferring structure, wherein the robot arm can move the substrate horizontally or vertically, but the robot arm needs to move the substrate step by step, and the size of the substrate is limited when moving the substrate, thereby limiting the size of the substrate when transferring the substrate, and spending too much unnecessary time when moving the robot arm, which in turn affects the efficiency of substrate transferring; in addition, after the wet process, a lot of etching solution remains on the surface of the substrate, and the serious problem of over-etching on the surface of the substrate occurs; therefore, how to solve the problem of the chemical solution remaining on the surface of the substrate causing damage by innovative design is still a problem that developers and related researchers in related industries such as substrate transfer devices are continuously trying to overcome and solve.
SUMMERY OF THE UTILITY MODEL
The present invention relates to a substrate transport apparatus, and more particularly, to a substrate transport apparatus and a substrate transport apparatus having an inclined platform, which can dissipate a liquid chemical of a wet process on a surface of a substrate transported by the inclined platform, wherein the inclined platform is disposed on a base of the substrate transport apparatus, so that the liquid chemical of the wet process remaining on the surface of the substrate can slide down along the inclined angle while transporting the substrate, thereby preventing the substrate from being damaged by the chemical liquid chemical remaining during the transport process, and improving the product quality of the substrate transported.
An object of the present invention is to provide a tilting platform, which can prevent the substrate from being damaged by sliding when tilting by means of the design of the conveying roller and the guide roller on the tilting platform, so that the substrate can be effectively supported and the operation of transmission can be performed.
Another object of the present invention is to provide a substrate conveying apparatus, which is characterized in that the first lifting mechanism, the traversing mechanism and the rotating shaft are arranged in a manner of being able to stably convey the substrate between the upper layer and the lower layer, so that the first and the second tooth fork assemblies are lifted synchronously after being finely adjusted to the relative position by the inclined rotation level, thereby improving the advantages of the substrate conveying operation of large area.
Another object of the present invention is to provide a substrate conveying apparatus, which is characterized in that the movable roller, the fixed roller, the parallel track and the vertical track are disposed in a movable manner in the track, so that the movable roller can be moved in a large amount of displacement time, and the time of the circulating movement of the conveying apparatus can be reduced, and the movable roller can be rotated to a horizontal state by tilting and stably perform the substrate conveying operation of the upper and lower layers at different speeds.
In order to achieve the objective of the present invention, the utility model provides a tilt platform suitable for a substrate transmission device, wherein the substrate transmission device at least comprises a base, and it mainly lies in: the inclined platform is arranged on the base, and an included angle is formed between the inclined platform and the base in a clamping mode.
In one embodiment of the present invention, the included angle is between 3 degrees and 10 degrees.
In one embodiment of the present invention, the base is composed of two long sides and two short sides.
In an embodiment of the present invention, the inclined platform further includes a plurality of conveying rollers, each of which is disposed in parallel along the two long sides of the base at different heights to form the included angle.
In one embodiment of the present invention, each of the conveying rollers is provided with a plurality of guide rollers.
In one embodiment of the present invention, the tilt table transfers at least one substrate by a rotational speed.
Furthermore, according to the object of the present invention, the present invention provides a substrate conveying apparatus, at least comprising an inclined platform as described above; the first lifting mechanism is arranged on the base and positioned at one side part of the inclined platform, and at least comprises two first lifting rails and a first lifting driver arranged at one end part of the first lifting rails; the transverse moving mechanism is arranged in the first lifting rail of the first lifting mechanism and is arranged at an angle of 90 degrees with the first lifting rail, and the transverse moving mechanism comprises at least one transverse moving rail and a transverse moving driver arranged at one end part of the transverse moving rail; the second lifting mechanism is arranged in the transverse moving track of the transverse moving mechanism and is arranged at an angle of 90 degrees with the transverse moving track, and the second lifting mechanism is arranged in parallel with the first lifting mechanism, wherein the second lifting mechanism comprises at least one second lifting track and a second lifting driver arranged at one end part of the second lifting track; the first tooth fork assembly is arranged on the second lifting mechanism and comprises a first rotating shaft embedded in the second lifting track of the second lifting mechanism; and the second tooth fork assembly is arranged on the transverse moving mechanism and comprises a second rotating shaft embedded in the transverse moving track.
In an embodiment of the present invention, a transmission assembly of a belt, a chain, a gear, a slide rail, a screw or a screw element may be further disposed in each of the first lifting rail, the traverse rail and the second lifting rail, which is capable of driving a transmission assembly of a fork assembly to move by a lifting driver.
In an embodiment of the present invention, the first fork assembly further includes a first fork frame disposed at one end of the first shaft, and a plurality of first forks disposed perpendicular to the first fork frame, and a plurality of the first forks are disposed side by side with each other.
In an embodiment of the present invention, the second fork assembly further includes a second fork frame disposed at one end of the second shaft, and a plurality of second forks disposed perpendicular to the second fork frame, and a plurality of the second forks are disposed side by side with each other.
In one embodiment of the present invention, the tilt table transfers at least one substrate by a rotational speed.
In one embodiment of the present invention, the first and second fork assemblies abut a substrate.
In one embodiment of the present invention, an upper layer conveying mechanism further receives the substrate against which the first fork assembly and the second fork assembly abut.
In an embodiment of the present invention, two guide rails are further disposed on two sides of the traversing mechanism, and a guide rail is further disposed in each guide rail, and the guide rail can enable the traversing mechanism to be embedded and slide up and down.
In an embodiment of the present invention, the other end of the first shaft of the first fork assembly is provided with a second lifting mechanism.
In an embodiment of the present invention, the other end of the second shaft of the second fork assembly is provided with a second lifting mechanism.
Furthermore, according to the object of the present invention, the present invention provides a substrate transmission method, which is suitable for a substrate transmission device as described above, and at least comprises the following steps: step a: firstly, the first fork component and the second fork component are ready at a preparation position and are parallel to an inclined platform; step b: then, when a substrate is conveyed to the inclined platform through a lower layer conveying mechanism and then is positioned, the first fork assembly and the second fork assembly are lifted upwards and staggered with the inclined platform and then continuously lifted; step c: when the first fork assembly and the second fork assembly are completely far away from the inclined platform; step d: the first fork assembly and the second fork assembly are automatically turned from inclination to horizontal, and one fork assembly is lifted or lowered to the relative position of the other fork assembly through fine adjustment; step e: after the first fork assembly and the second fork assembly are parallel, the first fork assembly and the second fork assembly are conveyed upwards, when the substrate is far away from the conveying direction, the first fork assembly and the second fork assembly rotate vertically at the same time, separate towards two sides and then descend, and the first fork assembly and the second fork assembly descend to the preparation position; and step f: and c, entering a standby state, positioning the substrate after the substrate is conveyed to the inclined platform by the lower layer conveying mechanism, and repeating the steps a to e.
In an embodiment of the present invention, the step d further comprises the step of finely adjusting the relative position of the first fork assembly to the second fork assembly through the second lifting mechanism.
In an embodiment of the present invention, the step d further comprises the step of fine-tuning the second fork assembly to the relative position of the first fork assembly through the second lifting mechanism.
Furthermore, in accordance with the object of the present invention, a substrate transport apparatus is provided, which comprises at least one inclined platform as described above; wherein two short sides of the base are respectively provided with a first supporting wall and a second supporting wall, the first supporting wall and the second supporting wall are connected by at least one rail, the rail comprises two parallel rails and a plurality of vertical rails, and the bottom of the base is provided with a driver; the conveying rollers of the inclined platform are a plurality of fixed rollers which are respectively connected between the first supporting wall and the second supporting wall in an inclined manner and are respectively arranged on two sides of each vertical track and close to the parallel tracks below, and the fixed rollers are arranged in an inclined manner and are mutually parallel to form the inclined platform; and a plurality of movable rollers which are parallel to each other and arranged between the first supporting wall and the second supporting wall, wherein two sides of each movable roller are respectively embedded into the tracks of the first supporting wall and the second supporting wall, and the movable rollers can be simultaneously moved in the tracks.
In one embodiment of the invention, the track is provided with a belt, chain, gear, slide, screw or screw element or other transmission assembly that can be moved by the drive driving the track.
In one embodiment of the present invention, the driver provides a power to make the plurality of movable rollers rotate and drive the movable rollers to move in the track.
In an embodiment of the present invention, a plurality of the fixed rollers and a plurality of the movable rollers are disposed in a crossed manner.
Additionally, according to the objectives of the present invention, the present invention provides a substrate transmission method, which is suitable for a substrate transmission device as described above, and at least comprises the following steps: step A: firstly, a plurality of movable rollers are standby to a preparation position and are parallel to a plurality of fixed rollers of the inclined platform; and B: then, after a substrate is transmitted to the inclined platform through a lower layer conveying mechanism and is positioned, the plurality of movable rollers lift upwards and cross the plurality of fixed rollers of the inclined platform, and then continuously lift; and C: when the movable rollers are completely far away from the inclined platform, the movable rollers can slightly adjust the inclination of each movable roller to be horizontal at different speeds; step D: after the movable rollers are parallel, the movable rollers are vertically lifted upwards to the top points of the vertical rails by virtue of the vertical rails, and after the movable rollers are lifted to the top points, the movable rollers provide power through the driver and rotate by themselves; step E: when the substrate is moved out through an upper layer conveying mechanism, the plurality of movable rollers transversely move to the vertical rail at the most lateral side through the upper parallel rails, vertically descend to the bottom point of the vertical rail through the vertical rail, and transversely move to the standby preparation position through the lower parallel rails; and step F: and E, entering a standby state, positioning the substrate when the substrate is conveyed to the inclined platform by the lower layer conveying mechanism, and repeating the steps A to E.
Therefore, the utility model discloses a slope platform and base plate transmission device mainly borrow the design of setting up the slope platform that has inclination on base plate transmission device's base, effectively make the liquid medicine of its remaining wet-type processing procedure in the base plate transmission can be along the inclination landing to make the base plate can not cause the shortcoming of harm to its surface because of remaining of chemistry liquid medicine in transmission process, reach really and keep and promote main advantages such as the product quality of the base plate that transmits.
Drawings
FIG. 1: the utility model discloses a whole device perspective view of a preferred embodiment of the substrate transmission device;
FIG. 2: the utility model discloses the whole device section of a preferred embodiment of the substrate transmission device;
FIG. 3: the substrate placing schematic diagram of the substrate conveying device according to one preferred embodiment of the present invention;
FIG. 4: the substrate conveying apparatus of the present invention is a schematic diagram of the apparatus operation of a preferred embodiment;
FIG. 5: the utility model discloses a schematic diagram of a staggered inclined platform of a tooth fork component in a preferred embodiment of the substrate transmission device;
FIG. 6: the substrate and the tooth fork assembly of the substrate conveying device of the present invention in one preferred embodiment are schematically shown in the drawing;
FIG. 7: the utility model discloses a horizontal lifting schematic diagram of a tooth fork component of a preferred embodiment of the substrate transmission device;
FIG. 8: the utility model discloses a tooth fork assembly bearing substrate lifting to the top point schematic diagram of a preferred embodiment of the substrate transmission device;
FIG. 9: the upper layer conveying mechanism of the substrate conveying device of the utility model in a preferred embodiment is close to the schematic diagram;
FIG. 10: the utility model discloses a tooth fork component autorotation action schematic diagram of a preferred embodiment of the substrate transmission device;
FIG. 11: the utility model discloses a whole device perspective view of two preferred embodiments of the substrate transmission device;
FIG. 12: the utility model discloses a whole device section view of two preferred embodiments of the substrate transmission device;
FIG. 13: the substrate conveying device of the present invention is schematically illustrated with the movable roller of two preferred embodiments in the ready position;
FIG. 14: the action schematic diagram of the movable roller of the substrate conveying device in the two preferred embodiments of the present invention is from inclining to horizontal;
FIG. 15: the cross-sectional view of the other viewing angle of the movable roller lifting in the two preferred embodiments of the substrate conveying device of the present invention is schematically shown;
FIG. 16: the utility model discloses a flow chart of a preferred embodiment of the substrate transmission method; and
FIG. 17: the present invention discloses a flow chart of two preferred embodiments of a substrate transmission method.
Description of the figure numbers:
10 tilting platform
11 long side
12 short side
13 conveying roller
131 guide roller
20 substrate conveying device
21: base
211 first support wall
212 second supporting wall
213 track
2131 parallel tracks
2132 vertical track
214 actuator
22 first lifting mechanism
221 first lifting rail
222 first Up-Down drive
23 transverse moving mechanism
231 transverse moving track
232 transverse moving driver
24: second lifting mechanism
241: second lifting rail
242 second Up-Down drive
25 first tooth fork assembly
251 first rotating shaft
252 first tooth fork frame
2521 first tooth fork
26 second yoke assembly
261 second rotating shaft
262 second tooth fork frame
2621 second fork
27 guide rail
271 guide rail
30, fixed roller
40 movable roller
3: substrate
4: upper conveying mechanism
5 lower layer conveying mechanism
S10 substrate transfer method
S11-S16, step a-step f
S20 substrate transfer method
S21-S26, step A-step F
And theta is the included angle.
Detailed Description
First, please refer to fig. 1 and fig. 2, which are a perspective view and a cross-sectional view of an overall apparatus of a preferred embodiment of the substrate transferring apparatus of the present invention, wherein the inclined platform 10 of the present invention is suitable for the substrate transferring apparatus 20, wherein the substrate transferring apparatus 20 at least includes a base 21, and mainly comprises: the inclined platform 10 is disposed on the base 21, and an included angle θ is formed between the inclined platform 10 and the base 21, wherein the included angle θ is between 3 degrees and 10 degrees, and preferably 5 degrees, that is, the inclined platform 10 is erected on the upper surface of the base 21 by a plurality of conveying rollers 13 with different heights, so that the long side 11 on the left side of the inclined platform 10 is higher than the long side 11 on the right side, and the included angle θ is formed between the upper surface of the inclined platform 10 and the upper surface of the base 21, wherein the inclined platform 10 can transmit at least one substrate 3 (as shown in fig. 3) by a rotation speed, the substrate 3 is placed on the upper surface of the inclined platform 10 by using the long side 11 on the left side of the inclined platform 10 as a feeding port (not shown in the drawing), since the previous process of the substrate 3 is a wet process using a large amount of liquid medicine, when the substrate 3 is placed on the inclined platform 10, the inclined platform 10 has an inclined included angle θ that allows the chemical solution on the substrate 3 to slide toward the right long side 11 of the inclined platform 10, so as to effectively prevent the chemical solution of the wet process from remaining on the upper surface of the substrate 3 and further causing damage to the substrate 3, such as: over-etching, etc.
The transport rollers 13 are provided with a plurality of guide rollers 131, so that the guide rollers 131 can support the substrate 3 through the guide rollers 131, so that the substrate 3 can not slide and be damaged when inclined, and the substrate can be effectively supported and transported.
In addition, referring to fig. 1 and fig. 2 again, the substrate transferring apparatus 20 of the present invention is formed by at least combining the base 21, the inclined platform 10, a first lifting mechanism 22, a traversing mechanism 23, a second lifting mechanism 24, a first fork assembly 25 and a second fork assembly 26, and the substrate transferring apparatus 20 is mainly used for transferring the substrate 3 from a previous wet process to a rear-end processing apparatus.
A first lifting mechanism 22 is disposed on the base 21 in parallel and located at a side portion of the inclined platform 10, the first lifting mechanism 22 includes two first lifting rails 221, and a first lifting driver 222 disposed at an end portion of the first lifting rails 221, wherein the first lifting rails 221 are disposed on one side of the first lifting mechanism 22 and embedded in the first lifting mechanism 22 in a vertical direction from top to bottom, and the first lifting driver 222 is disposed at an end portion of the lifting mechanism 22, for example: the first lifting driver 222 mainly provides a power to drive the transverse moving mechanism 23 to move vertically; in addition, the first lifting rail 221 may further be provided with a transmission assembly of a belt, a chain, a gear, a slide rail, a screw or a screw element inside, or can drive the traverse mechanism 23 to move by means of the first lifting driver 222.
At least one traverse mechanism 23, the traverse mechanism 23 is disposed in the first lifting rail 221 of the first lifting mechanism 22 and forms an angle of 90 degrees with the first lifting rail, and the traverse mechanism 23 comprises at least one traverse rail 231 and a traverse driver 232 disposed at one end of the traverse rail 231; in addition, the inside of the traversing mechanism 23 can be further provided with a driving component of a belt, a chain, a gear, a slide rail, a screw or a screw element.
At least one second lifting mechanism 24, the second lifting mechanism 24 is disposed in the traverse rail 231 of the traverse mechanism 23 and disposed at 90 degrees, and the second lifting mechanism 24 is disposed in parallel with the first lifting mechanism 22, wherein the second lifting mechanism 24 includes at least one second lifting rail 241 and a second lifting driver 242 disposed at an end of the second lifting rail 241.
A first fork assembly 25 disposed on the second lifting mechanism 24, wherein the first fork assembly 25 includes a first rotating shaft 251 embedded in the second lifting rail 241 of the second lifting mechanism 24; a second fork assembly 26 disposed on the traversing mechanism 23, wherein the second fork assembly 26 includes a second shaft 261 embedded in the traversing track 231; the first fork assembly 25 further includes a first fork 252 disposed at one end of the first shaft 251, and a plurality of first forks 2521 disposed perpendicularly to the first fork 252, wherein the plurality of first forks 2521 are formed by being arranged in parallel; the second fork assembly 26 further includes a second fork 262 disposed at one end of the second shaft 261, and a plurality of second forks 2621 disposed perpendicular to the second fork 262, wherein the plurality of second forks 2621 are formed in parallel, and different numbers of the first forks and the second forks can be arranged according to the size of the substrate 3.
Wherein two guide rails 27 are further disposed on two sides of the traversing mechanism 23, a guide rail 271 is further disposed in each guide rail 27, and the guide rail 271 can enable the traversing mechanism 23 to be embedded and slide up and down; the design of guide rail and guide rail track can be seen through in view of the above for the guide sideslip mechanism moves towards the advantage of correct direction, can effectively avoid the skew.
In addition, the substrate transfer apparatus 20 of one preferred embodiment of the present invention transfers the substrate 3 from the previous wet process to the next process as follows.
1. Please refer to fig. 3, which is a schematic diagram illustrating a substrate placing method of a preferred embodiment of the substrate transferring apparatus of the present invention, wherein the substrate 3 enters the inclined platform 10 from a feeding port of a long side 11 of the inclined platform 10, and the inclined platform 10 transfers the substrate 3 to the right side by a rotation speed, wherein when the inclined platform 10 transfers the substrate 3 to a positioning position, the first fork assembly and the second fork assembly are lifted upwards from the bottom by the first lifting mechanism 22.
2. Fig. 4 is a schematic view illustrating the operation of the substrate transferring apparatus according to a preferred embodiment of the present invention, wherein when the substrate transferring apparatus 20 starts to be started, the first fork assembly 25 and the second fork assembly 26 are located at the lower end of the first lifting mechanism 22 to stand by, and the first fork assembly 25 and the second fork assembly 26 are also located below the inclined platform 10.
3. Fig. 5 is a schematic view of the staggered inclined platform of the fork assembly of the substrate conveying apparatus according to a preferred embodiment of the present invention, wherein when the substrate 3 is transported by a lower layer conveying mechanism and is not marked on the inclined platform 10 for positioning, the first fork assembly 25 and the second fork assembly 26 are lifted upwards and staggered with the inclined platform 10 and then continuously lifted.
4. Please refer to fig. 6, which is a schematic diagram illustrating the substrate moving of the substrate transferring apparatus according to a preferred embodiment of the present invention, when the first fork assembly 25 and the second fork assembly 26 are lifted upwards and interlaced with the inclined platform 10, and then continuously lifted, the first fork assembly 25 and the second fork assembly 26 are completely away from the inclined platform 10; wherein the substrate 3 is inclined due to the inclined design of the conveying rollers 13 of the inclined platform 10; wherein the other end of the first shaft 251 of the first fork assembly 25 is provided with the second lifting mechanism 24; when the first tooth fork assembly 25 and the second tooth fork assembly 26 are completely away from the inclined platform 10, the first tooth fork assembly 25 and the second tooth fork assembly 26 are automatically turned from inclined to horizontal at the same time, so that the first tooth fork assembly 25 and the second tooth fork assembly 26 can be horizontally supported, the substrate 3 can move towards the direction away from the inclined platform 10 in a horizontal state, and the first tooth fork assembly 25 is finely adjusted through the second lifting mechanism 24 and lowered to the relative position of the second tooth fork assembly 26 at the same time, but the invention is not limited thereto. In another embodiment of the present invention (not shown), the other end of the second shaft of the second fork assembly is provided with the second lifting mechanism, so that the second fork assembly is finely lifted to the relative position of the first fork assembly through the second lifting mechanism; therefore, the substrate can be stably conveyed in the upper and lower layers.
5. Fig. 7 is a schematic view of the horizontal lifting of the fork assembly of the substrate transporting apparatus according to a preferred embodiment of the present invention, wherein after the first fork assembly 25 and the second fork assembly 26 are finely adjusted to the relative positions, the first fork assembly 25 and the second fork assembly 26 continuously lift the substrate horizontally upwards.
6. Referring to fig. 8, in order to illustrate the substrate supporting fork assembly of the substrate transferring apparatus according to a preferred embodiment of the present invention lifting the substrate to the top, the first fork assembly 25 and the second fork assembly 26 are upwardly transferred to the top of the first lifting mechanism 22 to wait for an upper layer conveying mechanism to receive the substrate.
8. Please refer to fig. 9, which is a schematic diagram of the proximity of the upper layer conveying mechanism of the substrate conveying apparatus according to a preferred embodiment of the present invention, wherein the substrate 3 is still disposed on the first fork assembly 25 and the second fork assembly 26 in a horizontal state, and the upper layer conveying mechanism 4 is used to take the substrate 3 away from each of the fork assemblies in a sucking manner to continue the next process.
9. Referring to fig. 10, it is a schematic diagram of the rotation of the fork assembly of the substrate transfer apparatus according to the preferred embodiment of the present invention, when the substrate 3 is transferred and kept away, the first fork assembly 25 and the second fork assembly 26 rotate vertically at the same time, and descend after separating to both sides, and the first fork assembly 25 and the second fork assembly 26 descend to the preparation position below the inclined platform 10.
Accordingly, the substrate transfer device is provided, through the design of the first lifting mechanism, the transverse moving mechanism and the rotating shaft, the substrate transfer operation of the upper layer and the lower layer can be stably carried out, the first tooth fork assembly and the second tooth fork assembly are effectively enabled to be horizontally rotated from the inclined state and to be finely adjusted to the relative positions and then synchronously lifted, and accordingly the advantages of large-area substrate transfer operation and the like can be improved.
In addition, please refer to fig. 11 and 12, which are a perspective view and a cross-sectional view of the substrate transfer apparatus according to two preferred embodiments of the present invention, wherein the substrate transfer apparatus 20 of the present invention is composed of at least one base 21, one inclined platform 10, a plurality of fixed rollers 30 and a plurality of movable rollers 40, and the substrate transfer apparatus 20 is mainly used to transfer the substrate 3 from a previous wet process to a rear process equipment.
A first supporting wall 211 and a second supporting wall 212 are respectively disposed on two sides of the base 21, the first supporting wall 211 and the second supporting wall 212 are connected by at least one rail 213, wherein the rail 213 is provided with a belt, a chain, a gear, a slide rail, a screw or screw element or other transmission components capable of driving the rail 213 to move by the driver 214, and the rail 213 includes two parallel rails 2131 and a plurality of vertical rails 2132, wherein the two parallel rails 2131 are embedded into the first supporting wall 211 and the second supporting wall 212 in an up-down parallel manner and correspond to each other; in addition, a powered driver 214 is disposed at the bottom of the base 21.
The inclined platform 10 is disposed at an end of the base 21, wherein an included angle θ is formed between the inclined platform 10 and the base 21.
The fixed rollers 30 are respectively connected to the first supporting wall 211 and the second supporting wall 212, and are respectively disposed on two sides of each of the vertical rails 2132 and close to the lower parallel rails 2131, and the height of each of the fixed rollers 30 disposed on the first supporting wall 211 and the second supporting wall 212 is between the height of the vertical rails 2132, wherein the fixed rollers 30 are disposed in an inclined manner and parallel to each other to form the inclined platform 10.
The movable rollers 40 and the fixed rollers 30 are parallel to each other and disposed between the first supporting wall 211 and the second supporting wall 212, and two ends of the movable roller 40 are respectively embedded in the tracks 213 of the first supporting wall 211 and the second supporting wall 212, so as to simultaneously move the movable rollers 40 in the tracks 213.
That is, in the base 21, the parallel rail 2131 and the vertical rail 2132 are connected to form a rail 213 having a loop, the fixed rollers 30 are arranged in an inclined and mutually parallel manner and are disposed between the vertical rails 2132 to form the inclined platform 10, so that the movable roller 40 forms an included angle θ with the base 21, the movable rollers 40 are respectively disposed to be embedded in the rail 213 and are disposed to intersect with the fixed rollers 30, and are also arranged in an inclined and mutually parallel manner to form another support frame surface, and the movable rollers 40 can move along the rail 213 by the power provided by the driver 214.
Accordingly, the bar-type substrate transfer apparatus is provided, which can stably perform substrate transfer operations of upper and lower layers, and can reduce a large amount of displacement time when transferring substrates by virtue of the arrangement design in which the movable rollers are disposed in the parallel rails and the vertical rails, and can effectively make the movable rollers horizontally turn from inclined to horizontal and stably perform substrate transfer operations of upper and lower layers by virtue of different speeds of the movable rollers.
In addition, the substrate transfer apparatus 20 of the two preferred embodiments of the present invention transfers the substrate 3 from the previous wet process to the next process in the following manner.
1. Referring to fig. 11, after the substrate 3 enters the inclined platen 10 from the feeding port on the left side of the inclined platen 10, the movable rollers 40 are lifted up in the vertical tracks 2132 of the tracks 213 by the power provided by the driver 214, so that the inclined platen 10 carries the substrate 3.
2. Please refer to fig. 12, which is a schematic diagram illustrating the movement of movable rollers according to two preferred embodiments of the substrate transporting apparatus of the present invention, wherein the plurality of fixed rollers 30 of the inclined platform 10 are inclined from top to bottom, and the plurality of movable rollers 40 initially disposed below each fixed roller 30 are disposed in parallel in the track 213, but not limited thereto; when the substrate 3 is positioned, each movable roller 40 is moved to a standby position.
3. Please refer to fig. 13, which is a schematic diagram of the movable roller in the standby position according to two preferred embodiments of the substrate transporting apparatus of the present invention, when each movable roller 40 moves to the standby position to be standby, the movable roller 40 is standby in the standby position to be inclined or horizontal, in an embodiment of the present invention, each movable roller 40 and each fixed roller 30 are inclined and arranged in parallel, but not limited thereto; in another embodiment of the present invention, each of the movable rollers 40 and each of the fixed rollers 30 form the included angle θ.
4. Please refer to fig. 14, which is a schematic diagram illustrating the operation of the movable roller from tilting to horizontal according to two preferred embodiments of the substrate conveying apparatus of the present invention, when the movable roller 40 on the left side crosses the fixed roller 30 and contacts the substrate 3, the movable roller stops immediately, and waits for the movable roller 40 on the right side to contact the substrate 3, and then waits for all the movable rollers 40 to contact the substrate 3, even if the movable rollers 40 are finely adjusted from tilting to horizontal, the substrate 3 is lifted together; subsequently, each of the movable rollers 40 lifts the substrate 3 to move upward away from the inclined platform 10, wherein after the movable rollers 40 contact the substrate 3, the substrate 3 is carried at the same speed, so that the substrate 3 can move horizontally away from the inclined platform 10.
5. Please refer to fig. 15, which is another schematic cross-sectional view of the movable roller lifting in two preferred embodiments of the substrate transporting device of the present invention, wherein the substrate 3 is transported to the inclined platform 10 formed by a plurality of fixed rollers 30 by a lower layer transporting mechanism 5, a plurality of movable rollers 40 are first arranged in the lower layer parallel rail 2131 below the inclined platform 10 to be lifted in standby mode, after the substrate 3 is positioned, as shown in fig. 5, the plurality of movable rollers 40 are lifted in the rail 213 by the power provided by the driver 214 to support the substrate 3 to the upper layer parallel rail 2131, when the substrate 3 is completely moved to the upper layer transporting mechanism 4, the lower layer transporting mechanism 5 transports the substrate 3 to the inclined platform 10, and the plurality of movable rollers 40 are moved horizontally to the most lateral vertical rail 2132 along the parallel rail 2131, and then sequentially descending to the lower parallel rails 2131 and setting the ready position for standby, and finally, after the substrate 3 is positioned, the plurality of movable rollers 40 ascend again to support the substrate 3 to the upper parallel rails 2131 to form a cycle.
Therefore, through the configuration design of the movable roller, the fixed roller, the parallel track and the vertical track, the movable roller which can move in the track can reduce a large amount of displacement time when transferring the substrate, and can reduce the time of the cyclic movement of the conveying device, and simultaneously can effectively enable the movable roller to be changed from an inclined state to a horizontal state and stably carry out the substrate transmission action of the upper layer and the lower layer through different speeds of the movable roller.
Further, please refer to fig. 16, which is a flowchart illustrating a preferred embodiment of a substrate transferring method according to the present invention, which is suitable for a preferred embodiment of a substrate transferring apparatus, and a substrate transferring method S10, which is suitable for a substrate transferring apparatus 20 as shown in fig. 1 to 11, and at least includes the following steps.
Step a (S11): first, the first fork assembly and the second fork assembly are in standby state in a ready position and are parallel to an inclined platform.
Step b (S12): and then, after a substrate is transmitted to the inclined platform through a lower layer conveying mechanism and is positioned, the first fork assembly and the second fork assembly are lifted upwards and staggered with the inclined platform and then continuously lifted.
Step c (S13): when the first fork assembly and the second fork assembly are completely far away from the inclined platform.
Step d (S14): the first and second prong elements are tilted from horizontal to horizontal while one prong element is raised or lowered to the relative position of the other through fine adjustment.
Step e (S15): after the first fork assembly and the second fork assembly are parallel, the first fork assembly and the second fork assembly are upwards transmitted, when the substrate is far away from the substrate transmission, the first fork assembly and the second fork assembly rotate vertically at the same time and descend after being separated towards two sides, and the first fork assembly and the second fork assembly descend to the preparation position.
Step f (S16): and c, entering a standby state, positioning the substrate after the substrate is conveyed to the inclined platform by the lower layer conveying mechanism, and repeating the steps a to e.
In an embodiment of the present invention, the step d (S14) further includes the first fork assembly being finely adjusted to be lowered to the relative position of the second fork assembly through the second lifting mechanism.
In another embodiment of the present invention, the step d (S14) further comprises fine tuning the second fork assembly to the relative position of the first fork assembly via the second lifting mechanism.
Therefore, the substrate conveying method suitable for the forked substrate conveying device is provided, the substrate conveying action of the upper layer and the lower layer can be stably carried out, and the defect caused by damage in the substrate conveying process can be effectively avoided through the design that the second lifting mechanism ascends or descends.
In addition, please refer to fig. 17, which is a flowchart illustrating two preferred embodiments of the substrate transferring method according to the present invention, which is applicable to two preferred embodiments of the substrate transferring apparatus, and a substrate transferring method S20 applicable to the substrate transferring apparatus 20 as shown in fig. 12 to 16, which at least includes the following steps.
Step a (S21): first, a plurality of movable rollers are in standby at a standby position and are parallel to a plurality of fixed rollers of the inclined platform.
Step B (S22): then, after a substrate is transported to the inclined platform through a lower layer conveying mechanism and is positioned, the plurality of movable rollers lift upwards to stagger the plurality of fixed rollers of the inclined platform, and then continuously lift.
Step C (S23): when the movable rollers are completely far away from the inclined platform, the movable rollers can slightly adjust the inclination of each movable roller to be horizontal at different speeds.
Step D (S24): after the movable rollers are parallel, the movable rollers are vertically lifted to the top point of each vertical rail by the aid of the vertical rails, and after the movable rollers are lifted to the top point, the movable rollers provide power through the driver and rotate by themselves.
Step E (S25): when the substrate is moved out through an upper layer conveying mechanism, the plurality of movable rollers transversely move to the vertical rail at the most lateral side through the upper parallel rails, vertically descend to the bottom point of the vertical rail through the vertical rail, and transversely move to the standby preparation position through the lower parallel rails.
Step F (S26): entering a standby state, positioning the substrate after the substrate is transferred to the inclined platform by the lower layer conveying mechanism, and repeating the steps A (S21) to E (S25).
In an embodiment of the present invention, the step C (S23) further includes lowering each of the movable rollers from the fine tilt adjustment to the horizontal at different speeds.
In another embodiment of the present invention, the step C (S23) further comprises a step of raising each movable roller from a fine tilt to a horizontal position at different speeds.
Accordingly, there is provided a substrate transfer method using a bar-type substrate transfer apparatus, which can stably transfer substrates between upper and lower stages, and which has advantages in that a large amount of displacement time can be reduced when transferring substrates, and the movable rollers can be effectively turned from an inclined state to a horizontal state and stably transfer substrates between upper and lower stages at different speeds of the movable rollers by arranging the movable rollers in parallel rails and vertical rails.
As can be seen from the above description, the present invention has the following advantages compared with the prior art and the product.
The utility model discloses a base plate transmission device of slope platform and preparation with mainly borrow the design by setting up the slope platform that has inclination on base plate transmission device's base, effectively make the liquid medicine of its remaining wet-type processing procedure in the base plate transmission can be along the inclination landing to make the base plate can not cause the shortcoming of harm to its surface because of remaining of chemistry liquid medicine in transmission process, reach really and promote main advantages such as the product quality of the base plate that transmits.
Claims (18)
1. A tilt table for a substrate transfer device (20), wherein the substrate transfer device (20) comprises a base (21), characterized in that: the inclined platform (10) is arranged on the base (21), and an included angle theta is formed between the inclined platform (10) and the base (21).
2. The tilt platform of claim 1, wherein the angle θ is between 3 degrees and 10 degrees.
3. Tilting platform according to claim 2, characterized in that the base (21) is formed by two long sides (11) and two short sides (12).
4. The tilting platform according to claim 3, comprising a plurality of conveyor rollers (13), wherein each conveyor roller (13) is disposed in parallel along the two long sides (11) of the base (21) at different heights to form the included angle θ.
5. Tilting platform according to claim 4, characterized in that each transport roller (13) is provided with a plurality of guide rollers (131).
6. A substrate conveying device is characterized by at least comprising:
-an inclined platform (10) according to any one of claims 1 to 5;
at least one first lifting mechanism (22) arranged on the base (21) and positioned at one side part of the inclined platform (10), wherein the first lifting mechanism (22) at least comprises two first lifting rails (221) and a first lifting driver (222) arranged at one end part of the first lifting rails (221); and
at least one transverse moving mechanism (23), wherein the transverse moving mechanism (23) is arranged in the first lifting rail (221) of the first lifting mechanism (22) and forms an angle of 90 degrees with the first lifting rail, and the transverse moving mechanism (23) comprises at least one transverse moving rail (231) and a transverse moving driver (232) arranged at one end part of the transverse moving rail (231);
at least one second lifting mechanism (24), the second lifting mechanism (24) is arranged in the traverse rail (231) of the traverse mechanism (23) and forms an angle of 90 degrees with the traverse rail, and the second lifting mechanism (24) is arranged in parallel with the first lifting mechanism (22), wherein the second lifting mechanism (24) comprises at least one second lifting rail (241) and a second lifting driver (242) arranged at one end part of the second lifting rail (241);
a first fork assembly (25) disposed on the second lifting mechanism (24), the first fork assembly (25) including a first shaft (251) embedded in the second lifting track (241) of the second lifting mechanism (24);
a second tooth fork component (26) arranged on the transverse moving mechanism (23), wherein the second tooth fork component (26) comprises a second rotating shaft (261) embedded in the transverse moving track (231).
7. The substrate transport apparatus according to claim 6, wherein the first elevation rail (221), the traverse rail (231), and the second elevation rail (241) are each provided therein with a transmission assembly of a belt, a chain, a gear, a slide, a screw, or a screw element.
8. The substrate transport apparatus according to claim 6, wherein the first fork assembly (25) comprises a first fork (252) disposed at one end of the first shaft (251), and a plurality of first forks (2521) disposed perpendicular to the first fork (252), and a plurality of first forks (2521) are arranged in parallel with each other.
9. The substrate transport apparatus according to claim 6 or 8, wherein the second fork assembly (26) comprises a second fork frame (262) disposed at one end of the second shaft (261), and a plurality of second forks (2621) disposed perpendicular to the second fork frame (262), and the plurality of second forks (2621) are arranged in parallel with each other.
10. The substrate transport apparatus according to claim 9, wherein the tilting stage (10) transports at least one substrate (3) by means of a rotational speed.
11. The substrate transport apparatus according to claim 10, wherein the substrate (3) against which the first fork assembly (25) and the second fork assembly (26) abut is received by an upper layer transfer mechanism (4).
12. The substrate transport apparatus according to claim 10, wherein two guide rails (27) are provided on both sides of the traverse mechanism (23), and a guide rail (271) is provided in each guide rail (27), and the guide rail (271) enables the traverse mechanism (23) to be inserted and to slide up and down.
13. The substrate transport apparatus according to claim 9, wherein the second elevating mechanism (24) is provided at the other end of the first shaft (251) of the first fork assembly (25).
14. The substrate transport apparatus according to claim 9, wherein the second elevating mechanism (24) is provided at the other end of the second shaft (261) of the second fork assembly (26).
15. A substrate conveying device is characterized by at least comprising:
-an inclined platform (10) according to claim 4 or 5;
wherein two short sides (12) of the base (21) are respectively provided with a first supporting wall (211) and a second supporting wall (212), the first supporting wall (211) and the second supporting wall (212) are connected by at least one rail (213), the rail (213) comprises two parallel rails (2131) and a plurality of vertical rails (2132), and the bottom of the base (21) is provided with a driver (214);
the conveying roller (13) of the inclined platform (10) is a plurality of fixed rollers (30), the fixed rollers (30) are respectively connected between the first supporting wall (211) and the second supporting wall (212) in an inclined manner and are respectively arranged on two sides of each vertical rail (2132) and close to a lower parallel rail (2131), and the fixed rollers (30) are inclined and arranged in parallel to each other to form the inclined platform (10); and
a plurality of movable rollers (40) parallel to each other and disposed between the first supporting wall (211) and the second supporting wall (212), wherein two sides of the movable rollers (40) are embedded in the tracks (213) of the first supporting wall (211) and the second supporting wall (212), respectively, and the movable rollers (40) can be moved in the tracks (213) simultaneously.
16. The substrate transport apparatus according to claim 15, wherein the track (213) is provided with a belt, chain, gear, slide, screw or screw element drive assembly.
17. The substrate transport apparatus according to claim 15, wherein the driver (214) provides a power to rotate the plurality of movable rollers (40) and drive the movable rollers (40) to move in the track (213).
18. The substrate transport apparatus according to claim 15, wherein the plurality of fixed rollers (30) and the plurality of movable rollers (40) are disposed to intersect.
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|---|---|---|---|
| CN202020842001.1U CN212830794U (en) | 2020-05-19 | 2020-05-19 | Inclined platform and substrate conveying device |
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| CN202020842001.1U CN212830794U (en) | 2020-05-19 | 2020-05-19 | Inclined platform and substrate conveying device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113682715A (en) * | 2020-05-19 | 2021-11-23 | 亚智科技股份有限公司 | Inclined platform, substrate transmission device and substrate transmission method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113682715A (en) * | 2020-05-19 | 2021-11-23 | 亚智科技股份有限公司 | Inclined platform, substrate transmission device and substrate transmission method |
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