CN111792328B - Substrate conveying device - Google Patents

Substrate conveying device Download PDF

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Publication number
CN111792328B
CN111792328B CN202010187065.7A CN202010187065A CN111792328B CN 111792328 B CN111792328 B CN 111792328B CN 202010187065 A CN202010187065 A CN 202010187065A CN 111792328 B CN111792328 B CN 111792328B
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China
Prior art keywords
unit
substrate
support
carrier unit
process line
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CN202010187065.7A
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Chinese (zh)
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CN111792328A (en
Inventor
朴庸硕
朴镐胤
朴桓绪
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DMS Co Ltd
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DMS Co Ltd
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Publication of CN111792328A publication Critical patent/CN111792328A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

The present invention relates to a substrate transfer apparatus that can automatically change the posture of a substrate from a horizontal state to an inclined state or from an inclined state to a horizontal state while vertically transferring the substrate. The present invention is characterized by comprising: a first conveying part for conveying the substrate from the first process production line in a horizontal state; a second conveying unit configured to convey a substrate in an inclined state from a second process line arranged at a height lower than the height of the first process line; and a vertical transfer part that vertically transfers a substrate from the first process line to the second process line side or from the second process line to the first process line side, the vertical transfer part including: a carrier unit that carries a carrier substrate in and out of the first transport section or the second transport section; a lifting unit for vertically transferring the conveyor unit; and an inclination converting unit for converting the carrier unit in a horizontal state into an inclined state.

Description

Substrate conveying device
Technical Field
The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of automatically adjusting the inclination of a substrate in transferring the substrate from an upper working space to a lower working space or from the lower working space to the upper working space.
Background
In general, substrates used for displays, semiconductor wafers, LCDs, photomask glasses, and the like are subjected to various processing steps. For example, the treatment process may include unit processes such as etching, stripping, rinsing, drying, and the like.
The unit processes can be performed In a batch by so-called In-Line (In-Line) connection In which the substrate is continuously moved.
As a method of transferring the substrate, a method of transferring the substrate to or from each process line in a horizontal state is used. That is, such a manner may be used: in order to process the substrate, the substrate is transferred in a horizontal state and supplied to a loader on the process line side, or the processed substrate is received from an unloader and transferred to another process line.
In the flushing step in the unit step, the following may be used: the substrate is held in an inclined state so that the contaminants remaining on the surface of the substrate can be smoothly separated and discharged together with the rinse liquid sprayed onto the surface of the substrate.
In this case, according to the related art, a separate tilt conversion driving means configured to change the tilt of the substrate should be added in addition to the horizontal transfer driving means for receiving the substrate in the horizontal state.
Thus, there is a problem in that the entire substrate transfer apparatus becomes complicated and a large installation space is required, and therefore, the size of the entire substrate processing apparatus also increases.
In addition, there is a problem in that since the number of driving devices for transferring the substrate is large, manufacturing costs and maintenance costs of the transfer device increase.
Further, there occurs a problem that the time for processing the substrate as a whole is delayed since the substrate transfer process becomes complicated.
As a prior art document, there is Korean registered patent publication No. 10-0528810 (published on 11/15/2005).
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made to solve the conventional problems, and an object of the present invention is to provide a substrate transfer apparatus which can transfer a substrate to a process line side quickly and stably by including an inclination switching unit which can automatically switch the posture of the substrate from a horizontal state to an inclined state or from the inclined state to the horizontal state while vertically transferring the substrate, can be installed in a narrow space due to a simple structure, and can reduce manufacturing costs and maintenance costs.
Means for solving the problems
In order to achieve the above object of the present invention, a substrate transfer apparatus according to the present invention includes: a first conveying part for conveying the substrate from the first process production line in a horizontal state; a second conveying unit configured to convey a substrate in an inclined state from a second process line arranged at a height lower than the height of the first process line; and a vertical transfer part that vertically transfers a substrate from the first process line to the second process line side or from the second process line to the first process line side, the vertical transfer part including: a carrier unit that carries in a substrate from the first transport unit or the second transport unit, or carries out a substrate to the first transport unit or the second transport unit; a lifting unit vertically conveying the conveyor unit in an area between the substrate carry-in line and the substrate carry-out line of the first conveying part and the second conveying part; and an inclination converting unit which separates one of both sides of the carrier unit connected with the elevating unit from the elevating unit in a process of vertically transferring the carrier unit by the elevating unit, and converts the carrier unit in a horizontal state into an inclined state.
At this time, in the substrate transfer apparatus according to the present invention, the vertical transfer part may include: a first vertical transfer unit that vertically lowers a substrate from the first process line to the second process line side; and a second vertical transfer unit that vertically raises the substrate from the second process line to the first process line side.
Further, in the substrate transfer apparatus according to the present invention, the carrier unit may include: a base member; a transfer member on which a substrate is mounted and coupled to a rotation shaft rotatably provided on the base member; and a carrier driving unit provided on the base member and configured to rotate the rotary shaft.
In the substrate transfer apparatus according to the present invention, the carrier unit may further include a stopper member provided on the base member and contacting the substrate transferred to the carrier unit side to determine a position of the substrate.
Further, in the substrate transfer apparatus according to the present invention, the elevating unit may include: a vertical frame; a moving block movably disposed along the vertical frame, supporting the carrier unit; and a vertical transmission driving part combined with the moving block and vertically moving the moving block along the vertical frame.
Further, in the substrate conveying apparatus according to the present invention, the moving block may include a first moving block that supports one end of the carrier unit and a second moving block that supports the other end of the carrier unit.
At this time, the tilt converting unit according to the present invention may include: a hinge connecting portion rotatably connecting the first moving block and the conveyor unit; a horizontal support portion coupled to the second moving block, supporting the carrier unit in a horizontal state; and an inclined support portion that is brought into contact with the carrier unit to be moved, thereby separating the carrier unit from the horizontal support portion and rotating the carrier unit around the hinge connection portion.
Further, in the substrate transport apparatus according to the present invention, a positioning groove portion formed concavely may be provided at any one of the horizontal support portion and the opposing contact portion of the carrier unit, and a positioning protrusion portion formed protrudingly corresponding to the positioning groove portion may be provided at the remaining other portion.
Further, in the substrate transport apparatus according to the present invention, a magnetic body for enhancing a contact force of the horizontal support portion and the carrier unit may be provided also at an opposing contact portion of the horizontal support portion and the carrier unit.
Further, in the substrate transport apparatus according to the present invention, an impact prevention member for preventing an impact when the horizontal support portion and the carrier unit come into contact may be provided also at an opposing contact portion of the horizontal support portion or the carrier unit.
Further, in the substrate transport apparatus according to the present invention, an inclined support portion that is contact-supported on the inclined support portion may be provided at a lower portion of the carrier unit, and an inclined support surface that keeps the carrier unit horizontal in a state of being inclined-adjusted may be provided on the inclined support portion.
Further, in the substrate transfer apparatus according to the present invention, the inclined support portion may include: a support frame for tilt support; a support block for inclined support, which is combined with the upper end part of the support frame for inclined support; and a support roller for inclined support rotatably coupled to an upper end of the support block for inclined support, and contacting a lower end of the carrier unit.
At this time, the supporting block for supporting an inclination according to the present invention may include: a first support block for inclined support coupled to the support frame for inclined support; and a second support block for inclined support coupled to the support roller for inclined support, wherein the support block for inclined support may include a fastening mechanism for height adjustment, and the fastening mechanism for height adjustment may connect the first support block for inclined support and the second support block for inclined support such that the support block for inclined support has a variable height.
Drawings
Fig. 1 is a schematic view for explaining a substrate transfer apparatus according to the present invention.
Fig. 2 is a view for explaining a vertical transfer part of the substrate transfer apparatus according to the present invention, showing a horizontal state in which the vertical transfer part is juxtaposed to the first transfer part.
Fig. 3 is a view for explaining a vertical transfer part of the substrate transfer apparatus according to the present invention, showing a state of the vertical transfer part in a descending state.
Fig. 4 is a view for explaining a vertical transfer part of the substrate transfer apparatus according to the present invention, showing a state in which the vertical transfer part is tilt-adjusted side by side with a second transfer part.
Fig. 5 is a view for explaining a hinge connection portion of a tilt conversion unit according to the present invention.
Fig. 6 is a view for explaining a horizontal support portion and an inclined support portion of the inclination conversion unit maintaining a horizontal state according to the present invention.
Fig. 7 is a view for explaining a horizontal support portion and an inclined support portion of the inclination conversion unit maintaining an inclined state according to the present invention.
Detailed Description
Hereinafter, a description will be given with reference to the drawings of preferred embodiments of the present invention which can embody the problems to be solved. In describing the present embodiment, the same names and the same reference numerals are used for the same structures, and additional description thereof will be omitted.
Fig. 1 is a diagram for explaining a substrate transfer apparatus according to the present invention.
The substrate transfer apparatus according to the present invention includes a first transfer part 100, a second transfer part 200, and a vertical transfer part 300.
The first transfer unit 100 may be disposed on the first process line 110. That is, the first transfer unit 100 receives the substrate G transferred from the one-side carry-in unit and can horizontally transfer the substrate G from one side of the first process line 110 to the other side.
At this time, the first transfer part 100 may transfer the substrate G in a state of maintaining the substrate G in a horizontal state.
The first conveying section 100 may include a plurality of conveying rollers that maintain a horizontal state, and may be constituted by a horizontally arranged conveyer, for example.
In this way, the substrate G transferred from one side of the first process line 110 to the other side by the first transfer part 100 can perform various processing operations.
The second transfer unit 200 may be disposed on the second process line 210. That is, the second transfer unit 200 may receive the substrate G from the one-side carry-in unit and transfer the substrate G from one side of the second process line 210 to the other side.
At this time, the second transfer part 200 may transfer the substrate G while maintaining the substrate G inclined at a constant angle.
The second conveyance section 200 may include a plurality of conveyance rollers inclined at a constant angle, and may be constituted by, for example, a conveyor arranged obliquely.
In this way, various processing operations can be performed by the substrate G transferred from one side of the second process line 210 to the other side by the second transfer part 200. For example, a rinsing process may be performed.
In addition, the first process line 110 and the second process line 210 may be disposed at different heights from each other. For example, the first process line 110 may be disposed at an upper portion, and the second process line 210 may be disposed at a height lower than that of the first process line 110.
The vertical transfer part 300 connects the first process line 110 and the second process line 210, and may transfer the substrate G from the first process line 110 to the second process line 210 side or may transfer the substrate G from the second process line 210 to the first process line 110 side.
Further, the vertical transfer part 300 may include a first vertical transfer part vertically lowering the substrate G from the first process line 110 to the second process line 210 side, and a second vertical transfer part vertically raising the substrate G from the second process line 210 to the first process line 110 side.
As shown in fig. 1 (a), the substrate G may be first processed at the first process line 110 disposed at the upper portion, then transferred to the lower portion by the vertical transfer portion 300, then processed at the second process line 210 at the second process line, and then carried out after the above steps.
Further, referring to (a) of fig. 1, the substrate G may be first primarily processed at the second process line 210 disposed at the lower portion, then transferred to the upper portion by the vertical transfer portion 300, then secondarily processed at the first process line 110, and then carried out after the above steps.
As shown in fig. 1 (b), the substrate G may be first processed in the first process line 110 disposed at the upper portion, then transferred to the lower portion by the first vertical transfer unit 300, then processed secondarily in the second process line 210, then transferred to the upper portion by the second vertical transfer unit 300 ″ and then carried out.
Hereinafter, the vertical transfer part 300, which is a main characteristic part of the present invention, will be described in detail.
Fig. 2 to 4 are diagrams for explaining a vertical transfer part 300 of a substrate transfer apparatus according to the present invention, fig. 2 is a diagram showing a state in which the vertical transfer part 300 is maintained in a horizontal state side by side with a first transfer part 100, fig. 3 is a diagram showing a state in which the vertical transfer part 300 is in a descent, and fig. 4 is a diagram showing a state in which the vertical transfer part 300 is maintained in an inclination adjustment side by side with a second transfer part 200.
As described above, the vertical transfer part 300 according to the present invention may carry in the substrate G from the first transfer part 100 or the second transfer part 200, and may carry out the substrate G to the first transfer part 100 or the second transfer part 200 side.
Further, the vertical transfer part 300 according to the present invention may vertically transfer the substrate G from the first process line 110 having a height difference to the second process line 210 side or from the second process line 210 to the first process line 110 side.
Further, the vertical transfer part 300 according to the present invention may convert the posture of the substrate G maintained in the horizontal state into the inclined state and may convert the posture of the substrate G maintained in the inclined state into the horizontal state in the process of vertically transferring the substrate G from the first process line 110 to the second process line 210 side or from the second process line 210 to the first process line 110 side.
Accordingly, the vertical transfer part 300 may include a carrier unit 310, a lifting unit 330, and an inclination conversion unit 350.
Hereinafter, only a process of transferring the substrate G from the first transfer part 100 to the second transfer part 200 will be described in detail.
The carrier unit 310 may carry in the substrate G from the first conveyance part 100, and may carry out the substrate G to the second conveyance part 200 side.
Thus, the carrier unit 310 may comprise: a base member 311; a plurality of rotation shafts rotatably provided on the base member 311; a plurality of transfer members 313 coupled to the rotation shaft so as to be interlocked, on which the substrate G is placed; and a carrier driving unit 315 provided on the base member 311 and rotating the rotation shaft.
The conveyer driving part 315 may be controlled to act together when the first transfer part 100 or the second transfer part 200 operates.
That is, in a state where the carrier unit 310 is disposed at the same height as the first conveyance unit 100, when the carrier driving unit 315 operates together with the first conveyance unit 100, the substrate G is carried from the first conveyance unit 100 to the conveyance member 313 side of the carrier unit 310.
Further, in a state where the carrier unit 310 is arranged at the same height as the second conveyance part 200, when the carrier driving part 315 operates together with the second conveyance part 200, the substrate G is carried out from the carrier unit 310 to the second conveyance part 200 side.
In the carrier unit 310 according to the embodiment, two rotation shafts and the conveying member 313 are arranged adjacent to each other in the width direction of the substrate G to be conveyed. A carrier driving portion 315 for rotating the rotation shaft and the transfer member 313 is coupled to both sides of the base member 311.
Further, the carrier unit 310 may comprise a stop member 317. The stopper member 317 is provided on the base member 311 and limits the movement of the substrate G.
A stopper member 317 may be provided on the base member 311 to contact the front end of the substrate G transferred to the carrier unit 310 side. Thus, the stopper 317 may determine the position of the substrate G placed on the upper portion of the transfer member 313.
That is, during the substrate G carried into the carrier unit 310 from the first transfer portion 100 is transferred along the upper portion of the transfer member 313, the front end of the substrate G is supported in contact with the stopper member 317 while being restricted from moving to be fixed in position.
At the moment when the substrate G comes into contact with the stopper 317, it is recognized that the substrate G is carried into the correct position. The conveyor driving section 315 may stop the operation. Therefore, the stopper member 317 may be further provided with a sensing sensor that senses whether or not the substrate G is in contact.
Further, a horizontal support portion 3110 and an inclined support portion 3112 may be provided at a lower portion side of the base member 311.
The horizontal support portion 3110 is a portion supported in contact with a horizontal support portion 353 described later, and the inclined support portion 3112 is a portion supported in contact with an inclined support portion 355 described later.
The lift unit 330 may vertically transfer the carrier unit 310 in a region between the substrate carry-in line IL and the substrate carry-out line OL of the first and second transfer portions 100 and 200.
Such a lifting unit 330 may include a vertical frame 331, a moving block 333, and a vertical transfer driving part 335.
The vertical frame 331 is vertically disposed long so that the first process line 110 and the second process line 210 can be connected. The vertical frame 331 may be provided in plurality along a peripheral portion of the carrier unit 310, so that the carrier unit 310 including the substrate G may be stably supported.
Although not shown, a guide rail that guides the movement in the vertical direction of a moving block 333 described later may be provided on the vertical frame 331.
Further, the vertical frame 331 includes a first vertical frame 331a and a second vertical frame 331 b.
The first vertical frame 331a is disposed adjacent to one end of the carrier unit 310, and the second vertical frame 331b is disposed adjacent to the other end of the carrier unit 310.
The first and second vertical frames 331a and 331b may be respectively equipped in plurality according to the size of the conveyer unit 310.
The moving block 333 is provided so as to be movable in the vertical direction along the vertical frame 331, connects the vertical frame 331 and the carrier unit 310, and is capable of supporting the carrier unit 310 from the vertical frame 331.
Further, a guide part coupled with the guide rail of the vertical frame 331 so as to be slidable may be provided on the moving block 333.
Further, the moving block 333 includes a first moving block 333a and a second moving block 333 b.
The first moving block 333a may be connected to the first vertical frame 331a, and the second moving block 333b may be connected to the second vertical frame 331 b.
That is, the first moving block 333a is provided on the first vertical frame 331a, supporting one side end portion of the carrier unit 310; the second moving block 333b is provided on the second vertical frame 331b, supporting the other side end portion of the carrier unit 310.
The first moving block 333a and the second moving block 333b may be provided in plural numbers according to the size of the carrier unit 310.
The vertical transfer driving part 335 is connected to the moving block 333, and may provide a driving force for vertically moving the moving block 333 along the vertical frame 331.
The vertical transfer driving part 335 may simultaneously raise or lower a first moving block 333a provided on the first vertical frame 331a and a second moving block 333b provided on the second vertical frame 331 b.
Hereinafter, only a process of transmitting the driving force of the vertical transmission driving part 335 to the first moving block 333a will be described.
According to the illustrated embodiment, the driving shaft 336 of the vertical transfer driving part 335 is rotatably connected to the lower end portion of the first vertical frame 331 a.
A power converting part 337 for accelerating or decelerating or converting a direction of rotation of the driving shaft 336 is provided at a lower end portion of the first vertical frame 331 a.
The driving force converted by the power conversion part 337 moves the first moving block 333a up and down by the power transmission part.
Although not shown, a ball screw system may be applied to the power transmission portion. That is, the power transmission portion may include a screw member and a nut block. The screw member is disposed vertically along the first vertical frame 331a, is connected to the power converting portion 337, and rotates, and is engaged with the first moving block 333a and screwed thereto.
In addition, unlike the illustrated embodiment, the vertical transfer driving part 335 may be provided on the first moving block 333 a. In this case, the power transmission unit may employ a rack and pinion system.
In this way, the vertical transmission driving unit 335 and the power transmission unit are not particularly limited, and may be designed to be changed from known types.
Fig. 5 to 7 are views for explaining the tilt converting unit 350 of the vertical conveying part 300 according to the present invention, fig. 5 is a view showing the hinge connecting part 351 of the tilt converting unit 350 maintained in a horizontal state, fig. 6 is a view showing the horizontal supporting part 353 and the inclined supporting part 355 of the tilt converting unit 350 maintained in a horizontal state, and fig. 7 is a view showing the horizontal supporting part 353 and the inclined supporting part 355 of the tilt converting unit 350 maintained in an inclined state.
The tilt converting unit 350 according to the present invention may convert the carrier unit 310 maintained in the horizontal state into the tilted state by separating one of both side ends of the carrier unit 310 connected to the elevating unit 330 from the elevating unit 330 in the vertical transfer of the carrier unit 310 by the elevating unit 330.
Accordingly, the inclination conversion unit 350 may include a hinge connection part 351, a horizontal support part 353, and an inclination support part 355.
Referring to fig. 5, the hinge connection portion 351 connects the first moving block 333a and one end of the carrier unit 310, and enables the carrier unit 310 to rotate with respect to the first moving block 333 a.
The hinge connection part 351 may include: a first hinge connection part 3510 coupled to the first moving block 333 a; a second hinge connection part 3512 coupled to one end of the carrier unit 310 opposite to the first hinge connection part 3510; and a hinge portion 3514 rotatably connecting the first hinge connection part 3510 and the second hinge connection part 3512.
In this way, the carrier unit 310 can rotate with respect to the first moving block 333a about the hinge portion 3514 of the hinge connecting portion 351.
Referring to fig. 6 and 7, the horizontal support portion 353 is coupled to the second moving block 333b to support one end of the carrier unit 310 and can support the carrier unit 310 rotating centering on the hinge connection portion 3514 in a horizontal state.
That is, the horizontal support portion 3110 provided in the base member 311 of the carrier unit 310 is supported in contact with the horizontal support portion 353.
Further, although not shown, a positioning groove portion formed concavely is provided at any one of contact portions of the horizontal support portion 353 and the horizontal support portion 3110 which are opposed to each other, and a positioning protrusion portion formed protrudingly in correspondence with the positioning groove portion is provided at the remaining other portion.
As a result, at the moment when the carrier unit 310 is supported on the horizontal support portion 353, the correct position of the carrier unit 310 placed on the horizontal support portion 353 by the positioning groove portion and the positioning protrusion portion can be secured, and in the course of the elevation of the carrier unit 310 supported on the horizontal support portion 353, the stable elevation of the carrier unit 310 can be achieved.
Further, a magnetic body may be provided at a contact portion of the horizontal support portion 353 and the horizontal support portion 3110 which face each other.
That is, the contact force between the horizontal support portion 353 and the horizontal support portion 3110 is increased by the magnetic force of the magnetic body, so that the carrier unit 310 during the lifting can be lifted stably without shaking.
Further, an impact prevention member for preventing an impact at the time of contact of the horizontal support portion 353 and the horizontal support portion 3110 may be further provided at the opposite contact portion of the horizontal support portion 353 or the horizontal support portion 3110. The impact prevention member may be a pad having elasticity such as polyurethane or the like.
The inclined support portion 355 is disposed at a height corresponding to the second transfer portion 200, and can separate the carrier unit 310 from the horizontal support portion 353 as contacting the lowered carrier unit 310.
As a result, the descending carrier unit 310 rotates about the hinge portion 3514 of the hinge connecting portion 351 due to the reaction force of the inclined support portion 355.
Such an inclined support portion 355 may include: a support frame 3550 for tilt support; a support block 3552 for tilt support coupled to an upper portion of the support frame 3550 for tilt support; and an inclined supporting roller 3554 rotatably coupled to an upper end of the inclined supporting support block 3552 and contacting a lower end of the carrier unit 310.
The support frame 3550 for tilt support may be provided on the bottom surface, or may be provided on the vertical frame 331.
Further, although not shown, the support frame 3550 for tilt support may be provided on the bottom or the vertical frame 331 movably in the vertical direction. That is, the height of the inclined support 355 may be varied according to the inclination of the second conveying unit 200 disposed on the second process line 210.
The supporting block 3552 for inclined support may include: a first support block 3552a for tilt support coupled to the support frame 3550 for tilt support; and a second supporting block 3552b for tilt support coupled to the supporting roller 3554 for tilt support.
At this time, the first and second inclination supporting support blocks 3552a and 3552b may be coupled by a fastening mechanism for height adjustment.
As the fastening mechanism for height adjustment, the first and second support blocks 3552a and 3552b may be screwed to each other.
Further, as the fastening mechanism for height adjustment, either one of the first support block 3552a for tilt support and the second support block 3552b for tilt support may be an air cylinder, and the other may be an air cylinder rod.
By configuring the inclined support block 3552 equipped with the fastening mechanism for height adjustment in this way, the height of the inclined support portion 355 can be finely adjusted and varied according to the inclination of the second conveying unit 200.
The tilt support roller 3554 may contact the tilt support portion 3112 provided on the base member 311 of the carrier unit 310.
The inclined support portion 3112 may be provided with an inclined support surface 3112 a.
The inclined support surface 3112a can be kept horizontal in a state where the inclination adjustment of the carrier unit 310 is completed. For example, the inclined support surface 3112a may be formed to have an inclination corresponding to that of the second transfer part 200.
In the case where the inclined support surface 3112a is not provided, the inclined support portion 3112 contacts the inclined support roller 3554 at an inclined position in a state where the inclination conversion of the carrier unit 310 is completed. Thus, the load applied to the inclined supporting support rollers 3554 by the conveyor unit 310 cannot accurately act in the vertical direction (vertical direction). Therefore, the tilt-adjusted carrier unit 310 cannot be stably supported.
In contrast, in the case where the inclined support surface 3112a according to the present invention is provided, the inclined support surface 3112a is kept horizontal at the upper front end of the supporting roller 3554 for inclined support in a state where the inclination change of the carrier unit 310 is completed. Thereby, the load applied to the inclined supporting support rollers 3554 by the conveyor unit 310 can be accurately aligned with the vertical direction (vertical direction). Therefore, the tilt supporting support roller 3554 can stably support the tilt-adjusted carrier unit 310.
In addition, although not shown, a guide groove portion formed concavely may be provided at any one portion of the inclined support surface 3112a of the inclined support portion 3112 and the outer circumferential surface of the support roller 3554 for inclined support, and a guide protrusion portion formed protrudingly corresponding to the guide groove portion may be provided at the remaining other portion.
Accordingly, the inclined support roller 3554 can stably guide and support the inclined support portion 3112 that is displaced in the horizontal direction in accordance with the change of the inclination of the carrier unit 310.
Further, an impact prevention member for preventing an impact at the time of contact may be provided on an outer circumferential surface of the support roller 3554 for inclined support or an inclined support surface 3112a of the inclined support portion 3112.
Hereinafter, an operation process of the vertical transfer part of the substrate transfer apparatus according to the present invention will be described.
As an example, the following procedure is explained: the substrate G in the horizontal state is carried in from the first transfer unit 100, vertically lowered, and then carried out to the second transfer unit 200 side in the state of being adjusted in inclination.
First, as shown in fig. 2, in order to carry in the substrate G from the first transfer unit 100, the carrier unit 310 maintains the height of the substrate carry-in line IL aligned with the first transfer unit 100.
At this time, one end of the carrier unit 310 is supported by the first moving block 333a and the hinge connection portion 351, and the other end is supported by the horizontal support portion 353 coupled to the second moving block 333b, thereby maintaining a horizontal state.
At this time, the carrier unit 310 may be in a state of operating together with the first transfer part 100. That is, the transfer member driving part 315 may rotate in the same direction as the first transfer part 100 to carry in the substrate G transferred by the first transfer part 100.
Thereafter, when the substrate G is carried in from the first transfer portion 100 to the upper portion of the carrier unit 310, the front end of the carried-in substrate G is contact-supported on the stopper member 317, and the carrying-in is completed. Thus, at the moment when the substrate G comes into contact with the stopper 317, the carrier unit 310 recognizes that the substrate G is carried into the correct position, and the operation of the transfer member driving unit 315 can be stopped.
Thereafter, as shown in fig. 3, the lifting unit 330 is operated to vertically lower the carrier unit 310 toward the second transfer unit 200.
In detail, as the vertical transfer driving part 335 is operated, the first moving block 333a descends on the first vertical frame 331a, and at the same time, the second moving block 333b descends on the second vertical frame 331 b.
Therefore, the carrier unit 310, one end of which is supported on the first moving block 333a and the other end of which is supported on the second moving block 333b, is lowered while being maintained horizontally.
In this way, the one-side lower end portion of the carrier unit 310 that is descending while being kept horizontal is contact-supported on the inclined support portion 355. At the same time, the carrier unit 310 is separated from the horizontal support portion 353.
That is, as shown in fig. 4, since the first and second moving blocks 333a and 333b supporting both end portions of the conveyer unit 310 continue to descend, one side of the conveyer unit 310 coupled to the first moving block 333a and the hinge connection portion 351 continues to descend, and the other side of the conveyer unit 310 supported on the inclined support portion 355 maintains a constant height.
As a result, since the first and second moving blocks 333a and 333b are continuously lowered by the elevation unit 330, the carrier unit 310 rotates around the hinge portion 3514 of the hinge connection portion 351, and the inclination gradually increases.
Then, the elevating unit 330 stops operating at the moment when the carrier unit 310 coincides with the substrate carrying-out line OL aligned with the second transfer unit 200.
In this way, while the operation of the lifting unit 330 is stopped, one end of the carrier unit 310 is connected to the first moving block 333a and the hinge connection portion 351, and the other end is held in a tilt-adjusted state supported by the tilt support portion 355.
In addition, the carrier driving part 315 disposed at the hinge connection part 351 side may enter the left area of the first vertical frame 331a in the process of the tilt adjustment of the carrier unit 310. Here, in order that the carrier driving part 315 and the first vertical frame 331a do not interfere with each other, it is preferable to arrange them at positions that are not on the same line when viewed in a plane but are shifted from each other.
Next, as described above, the substrate G placed on the tilt-adjusted carrier unit 310 maintains the height of the substrate carry-out line OL juxtaposed with the second transfer portion 200.
Thereafter, the carrier unit 310 moves the transfer member driving unit 315 in the same direction as the second transfer unit 200 to carry out the substrate G to the second transfer unit 200 side.
After the substrate G is carried out to the second transfer unit 200 side, the elevating unit 330 is operated in the reverse direction, and the carrier unit 310 is again raised to the first transfer unit 100 side.
In the process of raising the carrier unit 310, in contrast to the lowering operation of the carrier unit 310, the tilted carrier unit 310 is raised and the tilt is shifted to the horizontal state, and the horizontal state is maintained at the height of the substrate carry-in line IL aligned with the first transfer unit 100.
The carrier unit 310 may repeatedly supply the substrate G carried in from the first transfer unit 100 to the second transfer unit 200 side while repeating the above-described operation.
As described above, the substrate transfer apparatus according to the present invention automatically converts the posture of the carrier unit 310 into the horizontal or inclined state by the inclination conversion unit 350 in the vertical transfer of the carrier unit 310 by the elevation unit 330, so that the waiting time, the transfer time, and the process time of the substrate G can be greatly reduced.
Further, the substrate transfer apparatus according to the present invention can simplify the structure of the vertical transfer part 300, enable the arrangement even in a narrow space, and greatly reduce the manufacturing and maintenance costs since the vertical transfer of the substrate G and the inclination of the substrate G can be simultaneously adjusted by one driving source.
As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings, but those skilled in the art can make various modifications or changes to the present invention without departing from the spirit and scope of the invention as set forth in the claims.

Claims (11)

1. A substrate transfer apparatus, comprising:
a first conveying part for conveying the substrate from the first process production line in a horizontal state;
a second conveying unit for conveying the substrate in an inclined state from a second process line arranged at a lower height than the first process line; and
a vertical transfer section that vertically transfers a substrate from the first process line to the second process line side or from the second process line to the first process line side,
the vertical transfer part includes:
a carrier unit that carries in a substrate from the first transport unit or the second transport unit, or carries out a substrate to the first transport unit or the second transport unit;
a lifting unit including a first moving block supporting one end of the conveyer unit and a second moving block supporting the other end of the conveyer unit, the conveyer unit being vertically conveyed in an area between the substrate carry-in line and the substrate carry-out line of the first conveying portion and the second conveying portion; and
an inclination converting unit separating one of both sides of the carrier unit connected to the elevating unit from the elevating unit in a process of vertically transferring the carrier unit by the elevating unit, converting the carrier unit in a horizontal state into an inclined state,
the tilt conversion unit includes: a hinge connecting portion rotatably connecting the first moving block and one end of the carrier unit; a horizontal support portion coupled to the second moving block, and supporting the other end of the carrier unit in a horizontal state; and an inclined support portion which is brought into contact with the carrier unit vertically conveyed by the lifting unit, and which separates the other end of the carrier unit from the horizontal support portion, thereby rotating the carrier unit around the hinge connection portion.
2. The substrate transport apparatus according to claim 1, wherein the vertical transport section comprises:
a first vertical transfer unit that vertically lowers a substrate from the first process line to the second process line side; and
and a second vertical transfer unit that vertically raises the substrate from the second process line to the first process line.
3. The substrate transport apparatus according to claim 1, wherein the carrier unit includes:
a base member;
a transfer member on which a substrate is mounted and coupled to a rotation shaft rotatably provided on the base member; and
and a carrier driving unit provided on the base member and configured to rotate the rotary shaft.
4. The substrate transport apparatus according to claim 3, wherein the carrier unit further includes a stopper member provided on the base member to come into contact with the substrate transported to the carrier unit side to determine a position of the substrate.
5. The substrate transport apparatus according to claim 1, wherein the lifting unit further comprises:
a vertical frame; and
and a vertical transfer driving part coupled to the moving block movably disposed along the vertical frame, and vertically moving the moving block along the vertical frame.
6. The substrate transport apparatus according to claim 1, wherein a positioning groove portion formed concavely is provided at any one of the horizontal support portion and an opposing contact portion of the carrier unit, and a positioning protrusion portion formed protrudingly corresponding to the positioning groove portion is provided at the remaining other portion.
7. The substrate transport apparatus according to claim 1, wherein a magnetic body for enhancing a contact force of the horizontal support portion and the carrier unit is provided at an opposing contact portion of the horizontal support portion and the carrier unit.
8. The substrate transport apparatus according to claim 1, wherein an impact prevention member for preventing an impact when the horizontal support portion and the carrier unit come into contact is provided at an opposite contact portion of the horizontal support portion or the carrier unit.
9. The substrate transport apparatus according to claim 1, wherein an inclined support portion that is contact-supported on the inclined support portion is provided at a lower portion of the carrier unit, and an inclined support surface that keeps the carrier unit horizontal in a state of being obliquely adjusted is provided on the inclined support portion.
10. The substrate transport apparatus according to claim 1, wherein the inclined support portion includes:
a support frame for tilt support;
a support block for inclined support, which is combined with the upper end part of the support frame for inclined support; and
and an inclined support roller rotatably coupled to an upper end of the inclined support block and contacting a lower end of the conveyor unit.
11. The substrate transport apparatus of claim 10, wherein the inclined support block comprises:
a first support block for inclined support coupled to the support frame for inclined support; and
a second support block for inclined support, which is combined with the support roll for inclined support,
the support block for inclined support further includes a fastening mechanism for height adjustment that connects the first support block for inclined support and the second support block for inclined support so that the support block for inclined support has a variable height.
CN202010187065.7A 2019-04-05 2020-03-17 Substrate conveying device Active CN111792328B (en)

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Citations (3)

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Publication number Priority date Publication date Assignee Title
CN101859723A (en) * 2009-04-01 2010-10-13 东京毅力科创株式会社 Method for replacing plural substrates and substrate processing device
CN106104788A (en) * 2014-03-25 2016-11-09 川崎重工业株式会社 Substrate theta alignment device, substrate theta alignment method and substrate transfer method
CN109132552A (en) * 2018-10-10 2019-01-04 东旭集团有限公司 Transmission transition apparatus for glass substrate

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Publication number Priority date Publication date Assignee Title
KR100528810B1 (en) 2004-05-19 2005-11-15 주식회사 디엠에스 Apparatus for transferring works
KR100899363B1 (en) * 2008-07-11 2009-05-26 주식회사 인아텍 Apparatus for tilting substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859723A (en) * 2009-04-01 2010-10-13 东京毅力科创株式会社 Method for replacing plural substrates and substrate processing device
CN106104788A (en) * 2014-03-25 2016-11-09 川崎重工业株式会社 Substrate theta alignment device, substrate theta alignment method and substrate transfer method
CN109132552A (en) * 2018-10-10 2019-01-04 东旭集团有限公司 Transmission transition apparatus for glass substrate

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