KR102202218B1 - Elevating type equipment to prepare article for interlayer conveyance - Google Patents

Abstract

Provided is an elevation-type object preparing facility for conveyance between floors capable of reducing object conveying time comprising: a shelf module having a first loading unit formed to support a first object, a second loading unit arranged in a different level to the first loading unit along a height direction and formed to support a second object, and an elevation driving unit formed to elevate the first and second loading units; a horizontal conveying module formed to convey the first and second objects to a loading position along a horizontal direction intersecting with the heightwise direction; and a control module which controls the shelf module and the horizontal conveying module to load the first object on the first loading unit from the horizontal conveying module in the loading position and allows the elevation driving unit to elevate the first and second loading units so that the second object is loaded on the second loading unit from the horizontal conveying module in a state where the second loading unit is positioned in a different level to the horizontal conveying module.

Description

Elevating object preparation facility for interfloor transfer {ELEVATING TYPE EQUIPMENT TO PREPARE ARTICLE FOR INTERLAYER CONVEYANCE}

The present invention relates to an elevating object preparation facility for inter-floor transfer.

In recent years, semiconductor manufacturing technology is developing in the direction of improving the degree of integration, reliability, and processing speed, etc. with the rapid development of information and communication technology. The manufacturing steps of the semiconductor are as follows. First, a silicon wafer used as a semiconductor substrate is fabricated from a silicon single crystal, a processed film is formed on the semiconductor substrate, and then the processed film is formed into patterns having electrical or dielectric properties.

The patterns are formed by selectively or repetitively performing unit processes such as film formation, photo etching, polishing, and ion implantation. In a recent semiconductor manufacturing process that requires a design rule of 0.15 μm or less, the control of process conditions such as pressure and temperature applied to the unit processes must be performed more precisely. To this end, various control devices are being actively developed. In addition, a large number of semiconductor manufacturing apparatuses for mass production are provided in the manufacturing process line. Their operation and control are becoming more automated.

As an example of automation, there is a transfer device including an auto guided vehicle (AGV) for transferring a semiconductor substrate in a work space (bay area) in which devices for performing the manufacturing process are provided. In recent years, overhead transfer (OTT) as well as unmanned transfer trucks are applied to transfer.

In a semiconductor manufacturing facility of the prior art, a cassette is transferred by an automatic transfer device between a stocker storing a cassette on which a plurality of wafers are mounted and a unit processing device in which unit processing of the wafer is performed. The automatic transfer device can sequentially move the cassette between the stocker and the unit process unit according to a program set in an unmanned work space.

However, since the conventional automatic transfer device is configured to transfer only one cassette in sequence, it takes a long time to transfer the cassette. Furthermore, while preparing a cassette for automatic transport, an accident of dropping the cassette may occur.

An object of the present invention is to provide an elevating object preparation facility for inter-floor transport, which can reduce the object transport time by preparing an object in a manner capable of transporting a plurality of objects at once.

Another object of the present invention is to provide an elevating object preparation facility for inter-floor transport that can structurally eliminate the possibility of dropping an object in the process of raising an object for transport preparation.

An elevating object preparation facility for inter-floor transfer according to an aspect of the present invention for realizing the above-described problem includes a first loading unit configured to support a first object, and different from the first loading unit along a height direction. A shelf module having a second loading unit disposed on the level and configured to support a second object, and an elevating drive unit configured to elevate and drive the first loading unit and the second loading unit; A horizontal transport module configured to transport the first object and the second object to a loading position along a horizontal direction crossing the height direction; And controlling the shelf module and the horizontal transfer module, so that the first object is loaded from the horizontal transfer module to the first loading unit at the loading position, and the lift driving unit comprises the first loading unit and the first loading unit. 2 It may include a control module for lifting the loading unit so that the second object is loaded from the horizontal transfer module to the second loading unit while the second loading unit is located at a level corresponding to the horizontal transfer module. .

Here, the elevating drive unit includes a vertical frame disposed along the height direction; A horizontal frame installed on the vertical frame and on which the first loading unit and the second loading unit are installed; And a vertical driving unit for driving the horizontal frame along the vertical frame.

Here, the horizontal frame, a first horizontal frame in which the first loading unit is installed; And a second horizontal frame positioned at a different level from the first horizontal frame and on which the second loading unit is installed.

Here, the lift driving unit may further include a connection frame connecting the first horizontal frame and the second horizontal frame.

Here, each of the first loading unit and the second loading unit may include a seating portion on which the first object or the second object is seated; And a horizontal driving part configured to move the seating part with respect to the first horizontal frame or the second horizontal frame.

Here, each of the first loading unit and the second loading unit may further include a pivoting driving unit configured to pivot the seating unit about a pivoting axis along the height direction.

Here, the seating unit may include a loading conveyor that is driven to position the first object or the second object loaded from the horizontal transfer module in the center by itself.

Here, the conveying direction is a direction perpendicular to the height direction, and the horizontal conveying module may include a conveying conveyor disposed in parallel with the first loading unit and the second loading unit.

Here, the horizontal transfer module is located in a transfer section, which is a section in which the first and second objects are transferred, and the first object or the second object received at the receiving position is correctly positioned on the horizontal transfer module. A positioning module may be further provided.

An object preparation method for interlayer transport according to another aspect of the present invention includes the steps of transporting a first object and a second object to a loading position using a horizontal transport module; Causing the first object to be loaded from the horizontal transfer module to a first loading unit in the loading position, so that the first loading unit is in a state to support the first object; Elevating the first loading unit supporting the first object and a second loading unit located at a different level from the first loading unit along a height direction using an elevation driving unit; And in a state in which the second loading unit is located at a level corresponding to the horizontal transfer module, the second object is loaded from the horizontal transfer module to the second loading unit at the loading position so that the second loading unit It may include the step of bringing the second object into a state of supporting.

Here, in the loading position, the step of causing the first object to be loaded from the horizontal transfer module to the first loading unit so that the first loading unit is in a state to support the first object, wherein the first object is seated It may further include moving the first object from the loading position to the standby position by horizontally moving the seated portion to be horizontally driven.

Here, in the loading position, the step of causing the first object to be loaded from the horizontal transfer module to the first loading unit so that the first loading unit is in a state to support the first object, wherein the first object is seated It may further include the step of changing the direction in which the first object is directed by turning the seating portion to be centered on a pivoting axis along the height direction using a pivoting drive part.

Here, the step of elevating the first loading unit for supporting the first object and the second loading unit located at a different level from the first loading unit in a height direction using the lift driving unit, the lift driving unit It may include the step of elevating while maintaining the gap between the first loading unit and the second loading unit.

According to the elevating object preparation facility for interfloor conveyance according to the present invention configured as described above, the first loading unit and the second loading unit of the shelf module are each configured to support the first object or the second object, In order to load the first object or the second object into the loading unit and the second loading unit, a horizontal transfer module that transfers the first object and the second object between the receiving position and the loading position is used.The control module includes a horizontal transfer module. 1 After loading the object into the first loading unit, the lifting drive unit of the shelf module is operated, and the first loading unit moves up and down together with the second loading unit while stably supporting the first object. Since the object is loaded into the second loading unit, it is possible to structurally eliminate the risk that the first object will fall and be damaged while the first object is elevated from the height loaded on the first loading unit by the horizontal transfer module.

Further, by arranging the first object and the second object in a double layer along the height direction, the rack master for inter-floor transport can take over and transport two objects at a time. This provides the advantage of being able to drastically shorten the conveyance time for the object.

1 is a conceptual diagram of an elevating object preparation facility 100 for inter-floor transfer according to an embodiment of the present invention.
FIG. 2 is a side view for explaining the structure of the elevating object preparation facility 100 for inter-floor transfer of FIG. 1.
3 is a control block diagram of the elevating object preparation facility 100 for inter-floor transfer of FIG. 1.
4 is a flow chart illustrating a method of preparing an object for interlayer transport according to another embodiment of the present invention.
FIG. 5 is a flow chart for explaining specific details of step S3 of FIG. 4.
6 is a side view sequentially showing an operating state of the preparation facility 100 corresponding to the preparation method of FIGS. 4 and 5.

Hereinafter, an elevating object preparation facility for inter-floor transfer according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present specification, the same/similar reference numerals are assigned to the same/similar configurations even in different embodiments, and the description is replaced with the first description.

1 is a conceptual diagram of an elevating object preparation facility 100 for inter-floor transfer according to an embodiment of the present invention.

Referring to this drawing, the elevating object preparation facility 100 for inter-floor transport is to transport the objects A1 and A2 to prepare them in the standby position WP, and the prepared objects are different by the rack master RM. Can be conveyed in layers. Here, the object is a container for accommodating a wafer, and may be, for example, a FOUP (Front Open Unified Pod). The FOUP has a door that can be opened in the front, so it is a container with directionality. The rack master RM is movable between floors along vertical rails extending over several floors, and is also configured to take over the object by a fork F connected to the articulated arm.

The elevating object preparation facility 100 for inter-floor transfer may selectively include, specifically, a shelf module 110, a horizontal transfer module 130, and a positioning module 150. In this embodiment, a set of the shelf module 110, the horizontal transfer module 130, and the positioning module 150 is arranged in two. One set of these is to cause the objects (A1, A2) to be put into the rack master (RM), the other set is to allow the objects (A1, A2) to be discharged from the rack master (RM). The rack master RM can take over or take over the objects A1 and A2 from two sets while moving the fork F along a semicircular trajectory.

The shelf module 110 is configured to store the objects A1 and A2 in a state that the fork F of the rack master RM can take over. The shelf module 110 may be positioned corresponding to the standby position WP. The shelf module 110 may store the first object A1 and the second object A2 in a multilayer structure.

The horizontal conveyance module 130 is a device that horizontally conveys the objects A1 and A2 from the receiving position RP to the loading position LP. Thereby, the transfer section of the horizontal transfer module 130 may include a section connecting the receiving location RP and the loading location LP. The horizontal conveyance module 130 can convey the objects A1 and A2 by a plurality of rollers 135 arranged side by side on both sides of the horizontal conveying module 130, for example, when configured as a conveying conveyor. The plurality of rollers 135 may be interlocked with each other by a belt (not shown). The horizontal transfer module 130 may take over objects A1 and A2 descending from the ceiling from an overhead transfer (OTT).

The positioning module 150 is a configuration for positioning an object supplied to the horizontal transfer module 130. To this end, the positioning module 150 is positioned at a receiving position RP located within the transport section of the horizontal transport module 130. Specifically, the positioning module 150 may include a support plate 151 positioned in an empty space between the two rows of rollers 135 of the horizontal transfer module 130. If the positioning module 150 is used, the objects A1 and A2 are not directly down to the horizontal transfer module 130 from an overhead transfer (OTT), and the support plate of the positioning module 150 After being first down to 151, it is transferred to the horizontal transfer module 130 according to the lowering of the support plate 151.

According to this configuration, the horizontal conveyance module 130 takes over the objects A1 and A2 from the take-up position RP and conveys them to the loading position LP. Further, the horizontal transfer module 130 loads the objects A1 and A2 on the shelf module 110 at the loading position LP. Then, the rack master RM takes over the objects A1 and A2 loaded on the shelf module 110, and transports the objects A1 and A2 to a layer different from the floor on which the shelf module 110 is located.

Here, the horizontal transfer module 130 may adjust the timing of moving the plurality of objects A1 and A2 received at the receiving position RP to the receiving position RP. In other words, after the horizontal transfer module 130 loads the objects A1 and A2 on the shelf module 110, the rack master RM takes over the objects A1 and A2. A2) is loaded into the shelf module 110. Time to wait on the elevating object preparation facility 100 for inter-floor transfer compared to the case where the overhead transfer directly lowers the objects A1 and A2 to the horizontal transfer module 130 by the horizontal transfer module 130 Can be eliminated or reduced.

Further, by receiving the object through the positioning module 150 rather than the horizontal transport module 130, the object is also transferred to the shelf module 110 through a series of transport processes in a state in which the posture of the object is accurately aligned. Can be loaded in the correct posture.

A more specific configuration of the elevating object preparation facility 100 for inter-floor transfer will be described with reference to FIGS. 2 to 3.

FIG. 2 is a side view for explaining the structure of the elevating object preparation facility 100 for inter-floor transfer of FIG. 1.

Referring to this drawing, the shelf module 110 may include a first loading unit 111, a second loading unit 115, and an elevating drive unit 121.

The first loading unit 111 is configured to support the first object A1 from the lower side. The second loading unit 115 is configured to support the second object A2 from the lower side. They are located at different levels along the height direction or vertical direction (V). In this embodiment, it is illustrated that the first loading unit 111 is located below the second loading unit 115.

The first loading unit 111 and the second loading unit 115 may have mounting portions 112 and 116, respectively. Objects A1 and A2 are seated on the seating portions 112 and 116. As the seating portions 112 and 116, a loading conveyor may be used, for example. The loading conveyor may be one employing rollers 112a and 116a like the conveyor of the horizontal transfer module 130. Thereby, the loading conveyor is configured to move the objects A1 and A2 loaded thereon from the horizontal conveying module 130 to its center by itself. Further, as the loading conveyor is moved in the horizontal direction (H) as a whole by the horizontal driving parts 113 and 117 (see FIG. 3), the objects A1 and A2 may be located in the standby position WP together with the loading conveyor. . Such a state is illustrated in this figure.

The elevating drive unit 121 is configured to elevate and drive the first loading unit 111 and the second loading unit 115. Accordingly, the first loading unit 111 may be raised and lowered along the vertical direction V while supporting the first object A1. While the first loading unit 111 is elevated according to the operation of the elevating drive unit 121, the second loading unit 115 may be elevated together with the first loading unit 111.

The elevating driving unit 121 may specifically include horizontal frames 122 and 123, vertical frames 124, and a connection frame (not shown).

The horizontal frames 122 and 123 may be installed in the first stacking unit 111 on the first horizontal frame 122, and similarly, the second stacking unit 115 may be installed in the second horizontal frame 123. Here, the first horizontal frame 122 and the second horizontal frame 123 are each independently installed on the vertical frame 124. Alternatively, while the first horizontal frame 122 is installed on the vertical frame 124, the second horizontal frame 123 may be connected to the first horizontal frame 122 rather than the vertical frame 124. . Regardless of which method, the first horizontal frame 122 and the second horizontal frame 123 are positioned at different levels along the vertical direction (V). In this embodiment, a configuration in which the first horizontal frame 122 is positioned below the second horizontal frame 123 is illustrated.

The connection frame structurally connects the first horizontal frame 122 and the second horizontal frame 123. To this end, the connection frame may be a member that is arranged along the vertical direction V and has both ends connected to the first horizontal frame 122 or the second horizontal frame 123, respectively.

The horizontal conveying module 130 is arranged to convey the objects A1 and A2 along the conveying direction crossing the vertical direction V. Here, the transport direction may be a direction generally along the horizontal direction (H). The horizontal transfer module 130 may be specifically a transfer conveyor. The transfer conveyor may include a base 131 and a roller 135. The base 131 is arranged along the horizontal direction (H), and the rollers 135 may be arranged to be aligned with the rollers 112a and 116a of the first loading unit 111 and the second loading unit 115.

3 is a control block diagram of the elevating object preparation facility 100 for inter-floor transfer of FIG. 1.

Referring to this drawing (and FIGS. 1 to 2), in the shelf module 110, the first loading unit 111 and the second loading unit 115 include horizontal driving parts 113 and 117 and turning driving parts 114 and 118. It may contain more.

The horizontal driving units 113 and 117 are configured to move the loading conveyors 112 and 116 along the horizontal direction H as a seating unit. By the horizontal driving units 113 and 117, the loading conveyors 112 and 116 are moved relative to the horizontal frames 122 and 123. Specifically, the loading conveyors 112 and 116 may be horizontally moved between the points where the objects A1 and A2 are located at the standby position WP at a point close to the loading position LP.

The pivoting drive units 114 and 118 are configured to pivot the loading conveyors 112 and 116 around a pivoting axis along the vertical direction V. These pivoting drives 114 and 118 rotate the objects A1 and A2 together with the loading conveyors 112 and 116, so that the objects A1 and A2 can be directed in a direction different from that in the horizontal transfer module 130 in the shelf module 110. (See Fig. 1).

The horizontal driving units 113 and 117 may be configured by a motor, an LM guide, or the like, and the turning driving units 114 and 118 may be configured by a motor or a rotary bearing. This configuration is not difficult to those skilled in the art, so a detailed description will be omitted.

The elevating driving unit 121 may further have a vertical driving unit 125. The vertical drive unit 125 is configured to drive the horizontal frames 122 and 123 along the vertical direction V. When the horizontal frames 122 and 123 are raised and lowered by the operation of the vertical drive unit 125, the first loading unit 111 and the second loading unit 115 installed therein move between the upper area and the lower area of the horizontal transfer module 130 You will be ascending and descending as much as possible.

The vertical drive unit 125 may be driven to lift only one of the first loading unit 111 and the second loading unit 115. Since the other is connected to any of the above through the connection frame, the first loading unit 111 and the second loading unit 115 can be raised and lowered at the same time. The vertical drive unit 125 may be composed of, for example, a motor and a ball screw, and this is not difficult for a person skilled in the art, so a detailed description thereof will be omitted.

The horizontal transfer module 130 may further include a roller driving unit 137 for driving the roller 135. The roller drive unit 137 may include, for example, a belt connecting a plurality of rollers 135, and a motor and a pulley for rotating the belt.

The positioning module 150 may have an elevating driving unit 155 for elevating and driving the support plate 151 (see FIG. 1 ). When the lifting drive unit 155 descends to a level lower than the roller 135, the objects A1 and A2 are seated on the roller 135 of the horizontal conveyance module 130.

The control module 170 is a configuration for controlling the lathe module 110, the horizontal transfer module 130, and the positioning module 150. For example, the control module 170 controls the operation of the loading conveyors 112 and 116, the horizontal driving units 113 and 117, and the turning driving units 114 and 118 in the shelf module 110.

The memory 190 is a device that stores specific control information, such as operation times of the loading conveyors 112 and 116, and a control program. Information and the like stored in the memory 190 are referred to for operation of the control module 170.

Now, a method for preparing an object for inter-floor transport using the elevating object preparation facility 100 for inter-floor transport will be described with reference to FIGS. 4 to 6.

First, FIG. 4 is a flow chart illustrating a method of preparing an object for interlayer transport according to another embodiment of the present invention.

Referring to this drawing (and FIGS. 1 to 3), the method of preparing an object for interlayer transport may start from the step S1 of transporting the objects A1 and A2 to the loading position LP. To this end, the control module 170 allows the horizontal transfer module 130 to take over the objects A1 and A2 at the receiving position RP and transport them to the loading position LP. Specifically, the control module 170 operates the roller drive unit 137 of the horizontal transfer module 130.

At the loading position LP, the first object A1 is loaded into the first loading unit 111 (S3). To this end, the level along the vertical direction V of the first loading unit 111 corresponds to the level of the horizontal transfer module 130. The control module 170 drives the rollers 135 of the horizontal conveyance module 130 so that the first object A1 is transferred to the first loading unit 111. Thereby, the first loading unit 111 supports the lower portion of the first object A1 to stably support it.

In this state, the first loading unit 111 and the second loading unit 115 are elevated, specifically, lowered (S5). To this end, the control module 170 operates the vertical drive unit 125 of the lift drive unit 121 so that the first loading unit 111 descends to the state that supports the first object A1. Since the first object A1 descends with its lower portion stably supported by the first loading unit 111, the risk of falling during the descending process is structurally eliminated. When the first loading unit 111 descends, the second loading unit 115 also descends with it. Accordingly, the level along the vertical direction V of the second loading unit 115 is in a state corresponding to the level of the horizontal conveyance module 130.

After the first loading unit 111 and the second loading unit 115 are lowered, the second object A2 is loaded on the second loading unit 115 (S7). To this end, the control module 170 operates the roller 135 of the horizontal transfer module 130 so that the second object A2 is transferred to the second loading unit 115 at the loading position LP and loaded thereon. do. Thereby, the second loading unit 115 is also in a state in which the second object A2 is stably supported.

In the state in which the objects A1 and A2 are arranged in a double layer, the rack master RM can take over them at the same time and transfer them to another floor.

FIG. 5 is a flow chart for explaining specific details of step S3 of FIG. 4.

Referring to this drawing, the first loading unit 111 takes over the first object A1 (S11). In this process, the control module 170 may operate the loading conveyor 112, specifically the roller 112a, so that the first object A1 is located at the center of the loading conveyor 112. This allows the first object A1 to be supported more stably by the loading conveyor 112.

Next, the control module 170 may move the first object A1 to the standby position WP (S13). To this end, the control module 170 operates the horizontal drive unit 113 so that the loading conveyor 112 is positioned in the horizontal direction H while loading the first object A1.

Furthermore, the control module 170 may rotate the first object A1 (S15). Accordingly, the first object (A1) is rotated in a state aligned with the fork (F) of the rack master (RM). To this end, the control module 170 operates the turning drive unit 114 to turn the loading conveyor 112 itself on which the first object A1 is seated.

Through these processes, the first object A1 may be adjusted to a position and direction suitable for the rack master RM to take over in the first loading unit 111. Furthermore, this process can be applied not only to the first object A1 but also to the second object A2.

6 is a side view sequentially showing an operating state of the preparation facility 100 corresponding to the preparation method of FIGS. 4 and 5.

Referring to this drawing (and FIGS. 1 to 5), as in FIG. 6(a), the first loading conveyor 112 is close to the loading position LP, and the horizontal transfer module 130 and generally one transfer To form a line. In this state, the first object A1 is handed over to the loading conveyor 112 via the horizontal conveying module 130.

Referring to FIG. 6(b), the first loading conveyor 112 moves horizontally so that the first object A1 is positioned at the standby position WP. In this state, the first loading unit 111 descends while supporting the first object A1. At this time, not only the first loading unit 111 but also the second loading unit 115 is lowered at the same time. Unlike the above, in the state in which the first loading unit 111 is lowered, the first loading conveyor 112 may be horizontally moved.

During this descent, the first loading unit 111 and the second loading unit 115 can maintain their initial set interval as it is. This means that the setting interval suitable for the rack master RM to take over the objects A1 and A2 is maintained.

Referring to FIG. 6(c), the second object A2 is now handed over to the second loading conveyor 116. To this end, in the previous step, the second loading conveyor 116 is close to the loading position LP and forms a state in which a horizontal transfer module 130 and a generally one transfer line are formed.

Referring to FIG. 6(d), the second loading conveyor 116 moves so that the second object A2 is located at the standby position WP. As a result, the two objects A1 and A2 are arranged in a double layer and are prepared in a state suitable for the rack master RM to take over.

The elevating object preparation facility for inter-floor transport as described above is not limited to the configuration and operation method of the embodiments described above. The above embodiments may be configured so that all or a part of each of the embodiments may be selectively combined and various modifications may be made.

100: elevating object preparation facility for interfloor transfer
110: shelf module 111: first loading unit
112: first loading conveyor 115: second loading unit
116: second loading conveyor 121: elevating drive unit
130: horizontal conveying module 135: roller
150: positioning module 151: support plate
170: control module

Claims (13)

A first loading unit configured to support a first object, a second loading unit disposed at a level different from that of the first loading unit along a height direction and configured to support a second object, the first loading unit and the A lift drive unit configured to drive a second loading unit up and down, wherein the rack master can take at least one of the first object loaded in the first loading unit and the second object loaded in the second loading unit. Shelf module to be prepared; A horizontal transport module configured to transport the first object and the second object to a loading position along a horizontal direction crossing the height direction; And controlling the shelf module and the horizontal transfer module, so that the first object is loaded from the horizontal transfer module to the first loading unit at the loading position, and the lift driving unit comprises the first loading unit and the first loading unit. 2 It includes a control module for lifting the loading unit so that the second object is loaded into the second loading unit from the horizontal transfer module while the second loading unit is located at a level corresponding to the horizontal transfer module,
The elevating drive unit may include a vertical frame disposed along the height direction; A horizontal frame installed on the vertical frame and on which the first loading unit and the second loading unit are installed; And a vertical driving unit for driving the horizontal frame along the vertical frame so that the first loading unit and the second loading unit move between an upper area and a lower area of the horizontal transfer module,
The horizontal frame includes: a first horizontal frame on which the first loading unit is installed; And a second horizontal frame positioned at a different level from the first horizontal frame and on which the second loading unit is installed,
The elevating drive unit connects the first horizontal frame and the second horizontal frame so that a set distance between the first loading unit and the second loading unit is maintained, so that the fork of the rack master is connected to the first object and An elevating object preparation facility for inter-floor transport, further comprising a connection frame for preventing an obstacle to occur in taking at least one of the second objects.
delete delete delete The method of claim 1,
Each of the first loading unit and the second loading unit,
A seating portion on which the first object or the second object is seated; And
An elevating object preparation facility for inter-floor conveyance comprising a horizontal driving unit configured to move the seating portion relative to the first horizontal frame or the second horizontal frame.
The method of claim 5,
Each of the first loading unit and the second loading unit,
An elevating object preparation facility for inter-floor conveyance further comprising a pivoting drive unit configured to pivot the seating unit around a pivoting axis along the height direction.
The method of claim 5,
The seating part,
An elevating object preparation facility for inter-floor transfer, comprising a loading conveyor driven to position the first object or the second object loaded from the horizontal transfer module in the center of itself.
The method of claim 1,
The conveying direction is,
Is a direction perpendicular to the height direction,
The horizontal transfer module,
An elevating object preparation facility for inter-floor transfer, comprising a transfer conveyor disposed in parallel with the first loading unit and the second loading unit.
The method of claim 1,
Position determination in which the horizontal transfer module is located in a transfer section, which is a section in which the first and second objects are transferred, and the first object or the second object received at the receiving position is correctly positioned on the horizontal transfer module An elevating object preparation facility for inter-floor conveyance further comprising a module.
delete delete delete delete

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