JP4408436B2 - Transfer equipment - Google Patents
Transfer equipment Download PDFInfo
- Publication number
- JP4408436B2 JP4408436B2 JP2006113023A JP2006113023A JP4408436B2 JP 4408436 B2 JP4408436 B2 JP 4408436B2 JP 2006113023 A JP2006113023 A JP 2006113023A JP 2006113023 A JP2006113023 A JP 2006113023A JP 4408436 B2 JP4408436 B2 JP 4408436B2
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- tray
- arm
- lifting
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24B—DOMESTIC STOVES OR RANGES FOR SOLID FUELS; IMPLEMENTS FOR USE IN CONNECTION WITH STOVES OR RANGES
- F24B13/00—Details solely applicable to stoves or ranges burning solid fuels
- F24B13/006—Arrangements for cleaning, e.g. soot removal; Ash removal
- F24B13/008—Ash containers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24B—DOMESTIC STOVES OR RANGES FOR SOLID FUELS; IMPLEMENTS FOR USE IN CONNECTION WITH STOVES OR RANGES
- F24B1/00—Stoves or ranges
- F24B1/02—Closed stoves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24B—DOMESTIC STOVES OR RANGES FOR SOLID FUELS; IMPLEMENTS FOR USE IN CONNECTION WITH STOVES OR RANGES
- F24B5/00—Combustion-air or flue-gas circulation in or around stoves or ranges
- F24B5/02—Combustion-air or flue-gas circulation in or around stoves or ranges in or around stoves
- F24B5/021—Combustion-air or flue-gas circulation in or around stoves or ranges in or around stoves combustion-air circulation
- F24B5/023—Supply of primary air for combustion
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- De-Stacking Of Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Description
この発明は移載装置に関し、特にガラス基板を載せる移載装置に関する。 The present invention relates to a transfer device, and more particularly to a transfer device on which a glass substrate is placed.
薄型、低電力消費及び低輻射を特長とした液晶パネルはノートブックパソコンやＰＤＡ（パーソナルデジタルアシスタント）などの携帯型デジタル製品に幅広く利用され、デスクトップパソコン用のＣＲＴモニターに取って代わりつつある。ガラス基板は液晶パネルを構成する重要な素子であり、製作コストのみならず、液晶パネルの歩留まりにも大きく影響する。近年、ガラス基板は液晶パネルの大型化にしたがって大きくなり、第五世代の液晶パネルに用いられるガラス基板は１３００ｍｍ×１５００ｍｍに達し、第六世代は１５００ｍｍ×１８５０ｍｍに達している。 Liquid crystal panels featuring thinness, low power consumption and low radiation are widely used in portable digital products such as notebook personal computers and PDAs (personal digital assistants), and are replacing CRT monitors for desktop personal computers. The glass substrate is an important element constituting the liquid crystal panel and greatly affects not only the manufacturing cost but also the yield of the liquid crystal panel. In recent years, the glass substrate has become larger as the liquid crystal panel becomes larger, and the glass substrate used in the fifth generation liquid crystal panel has reached 1300 mm × 1500 mm, and the sixth generation has reached 1500 mm × 1850 mm.
ガラス基板の大型化に伴って液晶パネルの製作には種々の工程が追加され、工程が複雑になるにしたがって、これらの工程において、ガラス基板を載せる台（ホルダー）はガラス基板の運搬に関して重要な役割を果たしている。液晶パネルを組み立てるのに、好ましくは２つの種類の基板ホルダーが一般的に利用されている。ガラス基板を取り出すためには、ノーマルカセット型とワイヤーカセット型のホルダーが利用されている。図１を参照する。図１は従来のノーマルカセットを表す説明図である。図１によれば、ノーマルカセットはケース１２と複数の積載板１４からなり、積載板１４にはガラス基板１８を支える垂直に設けられた複数のピン１６が設けられる。ガラス基板１８を運搬するとき、ロボットアーム２０をピン１６の間隙に差し込んでガラス基板１８を取り出すのが一般的である。ノーマルカセットはガラス基板１８を自由に取り出すことに長所を有する。しかし、ロボットアーム２０を差し込むためには、ガラス基板１８と対応する積載板１４の間隔距離をロボットアーム２０より大きくしなければならないから、カセットの保存可能な空間とガラス基板の数量は限られている。 As the size of the glass substrate is increased, various processes are added to the production of the liquid crystal panel, and as the process becomes complicated, in these processes, a table (holder) on which the glass substrate is placed is important for transporting the glass substrate. Playing a role. Two types of substrate holders are typically used to assemble the liquid crystal panel. In order to take out the glass substrate, normal cassette type and wire cassette type holders are used. Please refer to FIG. FIG. 1 is an explanatory view showing a conventional normal cassette. According to FIG. 1, the normal cassette includes a case 12 and a plurality of stacking plates 14, and the stacking plates 14 are provided with a plurality of vertical pins 16 that support a glass substrate 18. When transporting the glass substrate 18, the robot arm 20 is generally inserted into the gap between the pins 16 and the glass substrate 18 is taken out. The normal cassette has an advantage in that the glass substrate 18 can be taken out freely. However, since the distance between the glass substrate 18 and the loading plate 14 corresponding to the glass substrate 18 must be larger than the robot arm 20 in order to insert the robot arm 20, the space in which the cassette can be stored and the number of glass substrates are limited. Yes.
図２を参照する。図２は従来のワイヤーカセットを表す説明図である。図２によれば、ワイヤーカセットはケース２２と複数のワイヤー２４からなる。ワイヤーカセット型は、複数の搬送ベルト２８をワイヤーカセットに入れてガラス基板２６を次々と取り出すことを特徴とする。ノーマルカセットと比べて、ワイヤーカセットはガラス基板２６を積載するワイヤー２４の間隙が小さいので、ケース２２を小型化し、ケース２２のガラス基板２６保存可能枚数を多くすることに長所を有する。しかし、ワイヤーカセット型は複数の搬送ベルト２８をワイヤーカセットに入れてガラス基板２６を順次に取り出すため、下から上までガラス基板２６を順次に取り出すことしかできず、図１のノーマルカセット型のようにロボットアーム２０でガラス基板１８を自由に取り出すことができない。また、収納したり取り出したりする速度が非常に遅くなる。
したがって、保存空間を大きくするとともに、ガラス基板を自由に取り出せるようにすることは開発上重要な課題となっている。
Please refer to FIG. FIG. 2 is an explanatory view showing a conventional wire cassette. According to FIG. 2, the wire cassette includes a case 22 and a plurality of wires 24. The wire cassette type is characterized in that a plurality of conveyor belts 28 are put in a wire cassette and the glass substrate 26 is taken out one after another. Compared to the normal cassette, the wire cassette has a small gap between the wires 24 on which the glass substrate 26 is loaded, and thus has an advantage in reducing the size of the case 22 and increasing the number of glass substrates 26 that can be stored in the case 22. However, in the wire cassette type, the plurality of conveyor belts 28 are put in the wire cassette and the glass substrate 26 is sequentially taken out. Therefore, only the glass substrate 26 can be taken out sequentially from the bottom to the top, as in the normal cassette type of FIG. Further, the glass substrate 18 cannot be taken out freely by the robot arm 20. Also, the speed of storing and taking out becomes very slow.
Therefore, increasing the storage space and allowing the glass substrate to be taken out freely are important development issues.
この発明は前述の問題を解決するための移載装置を提供することを課題とする。 This invention makes it a subject to provide the transfer apparatus for solving the above-mentioned problem.
この発明による移載装置は、所定トレイを含んだ積み重なった複数のトレイと、所定トレイの上方のトレイを第一高度に持ち上げる少なくとも１本の第一昇降アームと、所定トレイを第二高度に持ち上げる少なくとも１本の第二昇降アームを有する昇降装置とを含む。 The transfer apparatus according to the present invention includes a plurality of stacked trays including a predetermined tray, at least one first lifting arm that lifts a tray above the predetermined tray to a first height, and lifts the predetermined tray to a second height. And a lifting device having at least one second lifting arm.
この発明は第一昇降アームで所定トレイの上方のトレイを第一高度に持ち上げ、第二昇降アームで所定トレイを第二高度に持ち上げ、更に回転アームで所定トレイに載せられるガラス基板を持ち上げ、トレイ同士を分離することによってガラス基板の収納空間を節約するとともに、ロボットアームがガラス基板を自由に取り出せるための十分な空間を提供する。移載装置は小さい収納空間を有するため、ガラス基板の変形量を抑制すると同時に、ロボットアームでガラス基板を取り出す速度と効率を向上させることができる。 In the present invention, the first lifting arm lifts the tray above the predetermined tray to the first height, the second lifting arm lifts the predetermined tray to the second height, and the rotating arm lifts the glass substrate placed on the predetermined tray. The space between the glass substrates is saved by separating them from each other, and sufficient space is provided for the robot arm to freely take out the glass substrates. Since the transfer device has a small storage space, the deformation amount of the glass substrate can be suppressed, and at the same time, the speed and efficiency of taking out the glass substrate by the robot arm can be improved.
かかる装置の特徴を詳述するために、具体的な実施例を挙げ、図を参照して以下に説明する。
図３から図６を参照する。図３から図６はこの発明による移載装置３０でガラス基板を移載することを表す説明図である。
図３によれば、この発明による移載装置３０は積み重なった複数のトレイ３４と昇降装置３６を有する。複数のトレイ３４のうち一枚は所定トレイ３８とされ、トレイ３４ごとに１枚のガラス基板４８が載せてある。昇降装置３６はトレイ３４の両側に設けられる少なくとも１本の第一昇降アーム４０と少なくとも１本の第二昇降アーム４２を有する。動作環境、装置の性質、ユーザーの要求などにしたがい、トレイ３４の両側に第一昇降アーム４０と第二昇降アーム４２をそれぞれ２〜４本を設けることも可能である。各トレイ３４の底部には孔（非表示）が開けられ、両側には突き出ている縁部４６が設けられている。第一昇降アーム４０と第二昇降アーム４２は縁部４６からガラス基板を持ち上げる。昇降装置３６は更に、両昇降アーム４０、４２を駆動する駆動装置(非表示)を有する。
In order to describe the characteristics of such a device in detail, a specific example will be given and described below with reference to the drawings.
Please refer to FIG. 3 to FIG. 3 to 6 are explanatory views showing that the glass substrate is transferred by the transfer device 30 according to the present invention.
According to FIG. 3, the transfer device 30 according to the present invention has a plurality of stacked trays 34 and a lifting device 36. One of the plurality of trays 34 is a predetermined tray 38, and one glass substrate 48 is placed on each tray 34. The lifting device 36 has at least one first lifting arm 40 and at least one second lifting arm 42 provided on both sides of the tray 34. Depending on the operating environment, the nature of the device, the user's requirements, etc., it is also possible to provide two to four first lifting arms 40 and two second lifting arms 42 on both sides of the tray 34, respectively. A hole (not shown) is formed at the bottom of each tray 34, and protruding edges 46 are provided on both sides. The first lifting arm 40 and the second lifting arm 42 lift the glass substrate from the edge 46. The elevating device 36 further has a driving device (not shown) for driving both elevating arms 40 and 42.
図４によれば、所定トレイ３８に載せられるガラス基板４８を取り出すとき、まず第一昇降アーム４０で所定トレイ３８の上方のトレイ３４を第一高度に持ち上げ、続いて図５に示されるように、第二昇降アーム４２で所定トレイ３８を第二高度に持ち上げる。第一高度は第二高度より大きい。第一高度と第二高度の差は５０〜４００ｍｍである。 According to FIG. 4, when the glass substrate 48 placed on the predetermined tray 38 is taken out, the first lifting arm 40 first lifts the tray 34 above the predetermined tray 38 to the first height, and then, as shown in FIG. Then, the second elevating arm 42 lifts the predetermined tray 38 to the second altitude. The first altitude is greater than the second altitude. The difference between the first altitude and the second altitude is 50 to 400 mm.
図６によれば、樹脂か金属製の複数のピン５０は垂直に回転アーム４４に設けられている。続いて、昇降装置３６の回転アーム４４を水平に回転し、ピン５０をトレイ３８底部の孔にあわせ、更に回転アーム４４を上方に移動させ、ピン５０で所定トレイ３８に載せられるガラス基板４８を第一高度と第二高度の中間である第三高度に持ち上げる。続いてガラス基板４８を取り出すためのロボットアーム５２をピン５０の間隙に差し込み、所定トレイ３８に載せられるガラス基板４８を移載装置３０から取り出す。 According to FIG. 6, a plurality of pins 50 made of resin or metal are vertically provided on the rotating arm 44. Subsequently, the rotary arm 44 of the elevating device 36 is rotated horizontally, the pin 50 is aligned with the hole at the bottom of the tray 38, the rotary arm 44 is further moved upward, and the glass substrate 48 placed on the predetermined tray 38 with the pin 50 is mounted. Lift to the third altitude, which is between the first altitude and the second altitude. Subsequently, a robot arm 52 for taking out the glass substrate 48 is inserted into the gap between the pins 50, and the glass substrate 48 placed on the predetermined tray 38 is taken out from the transfer device 30.
前述の通り、この発明は第一ロボットアームで所定トレイの上方のトレイを第一高度に持ち上げ、更に第二ロボットアームで所定トレイを第二高度に持ち上げ、最後に回転アームで所定トレイに乗せられるガラス基板を持ち上げる。言い換えれば、ガラス基板を取り出すとき、この発明は移載装置の昇降装置でトレイ同士を分離してから、トレイに載せられるガラス基板を持ち上げる。このように、ロボットアームがガラス基板を自由かつ安全に取り出すための十分な空間が提供され、最終的にガラス基板の収納空間を節約できる。 As described above, according to the present invention, the first robot arm lifts the tray above the predetermined tray to the first altitude, the second robot arm lifts the predetermined tray to the second altitude, and finally the rotating arm can place it on the predetermined tray. Lift the glass substrate. In other words, when taking out the glass substrate, the present invention lifts the glass substrate placed on the tray after separating the trays by the lifting device of the transfer device. In this way, a sufficient space for the robot arm to take out the glass substrate freely and safely is provided, and finally the storage space for the glass substrate can be saved.
図７と図８を参照する。図７は回転アームの回転前の移載装置を表す説明図であり、図８は回転アームの回転後の移載装置を表す説明図である。図７と図８によれば、この発明による移載装置３０は積み重なった複数のトレイ３４（２枚のみ表示）と昇降装置３６を有する。複数のトレイ３４のうち一枚は所定トレイ３８とされ、昇降装置３６は少なくとも１本の第一昇降アーム４０と少なくとも１本の第二昇降アーム４２を有する。第一昇降アーム４０は所定トレイ３８の上方のトレイ３４を第一高度に持ち上げるものであり、第二昇降アーム４２は所定トレイ３８を第二高度に持ち上げるものである。 Please refer to FIG. 7 and FIG. FIG. 7 is an explanatory diagram illustrating the transfer device before the rotation of the rotation arm, and FIG. 8 is an explanatory diagram illustrating the transfer device after the rotation of the rotation arm. 7 and 8, the transfer device 30 according to the present invention has a plurality of stacked trays 34 (only two are displayed) and a lifting device 36. One of the plurality of trays 34 is a predetermined tray 38, and the lifting device 36 has at least one first lifting arm 40 and at least one second lifting arm 42. The first lifting arm 40 lifts the tray 34 above the predetermined tray 38 to the first height, and the second lifting arm 42 lifts the predetermined tray 38 to the second height.
各トレイ３４の両側には突き出ている縁部４６が少なくとも１個設けられ、第一昇降アーム４０と第二昇降アーム４２は縁部４６を支持してガラス基板を持ち上げる。移載装置３０は更に回転アーム４４と、回転アーム４４に垂直に設けられる複数のピン５０を有する。第二昇降アーム４２で所定トレイ３８を持ち上げた後、回転アーム４４は図７に示される収納状態から所定トレイ３８の下方に水平回転して、図８のようにピン５０を所定トレイ３８底部の孔にあわせる。続いて回転アーム４４を上方に移動させ、ピン５０で所定トレイ３８に載せられるガラス基板（非表示）を持ち上げ、更にガラス基板４８を取り出すためのロボットアーム（非表示）をピン５０の間隙に差し込み、所定トレイ３８から持ち上げられたガラス基板を移載装置３０から取り出す。 At least one protruding edge 46 is provided on both sides of each tray 34, and the first lifting arm 40 and the second lifting arm 42 support the edge 46 and lift the glass substrate. The transfer device 30 further includes a rotating arm 44 and a plurality of pins 50 provided perpendicular to the rotating arm 44. After the predetermined tray 38 is lifted by the second elevating arm 42, the rotary arm 44 rotates horizontally below the predetermined tray 38 from the stored state shown in FIG. Align with the hole. Subsequently, the rotary arm 44 is moved upward, the glass substrate (not shown) placed on the predetermined tray 38 is lifted by the pins 50, and a robot arm (not shown) for taking out the glass substrate 48 is further inserted into the gap of the pins 50. Then, the glass substrate lifted from the predetermined tray 38 is taken out from the transfer device 30.
以上はこの発明に好ましい実施例であって、この発明の実施の範囲を限定するものではない。よって、当業者のなし得る修正、もしくは変更であって、この発明の精神の下においてなされ、この発明に対して均等の効果を有するものは、いずれもこの発明の特許請求の範囲に属するものとする。 The above is a preferred embodiment of the present invention and does not limit the scope of the present invention. Therefore, any modifications or changes that can be made by those skilled in the art, which are made within the spirit of the present invention and have an equivalent effect on the present invention, shall belong to the scope of the claims of the present invention. To do.
この発明は第一昇降アームで所定トレイの上方のトレイを第一高度に持ち上げ、第二昇降アームで所定トレイを第二高度に持ち上げ、更に回転アームで所定トレイに載せられるガラス基板を持ち上げ、トレイ同士を分離することによってガラス基板の収納空間を節約するとともに、ロボットアームがガラス基板を自由に取り出せるための十分な空間を提供する。移載装置は小さい収納空間を有するため、ガラス基板の変形量を抑制すると同時に、ロボットアームでガラス基板を取り出す速度と効率を向上させることができる。 In the present invention, the first lifting arm lifts the tray above the predetermined tray to the first height, the second lifting arm lifts the predetermined tray to the second height, and the rotating arm lifts the glass substrate placed on the predetermined tray. The space between the glass substrates is saved by separating them from each other, and sufficient space is provided for the robot arm to freely take out the glass substrates. Since the transfer device has a small storage space, the deformation amount of the glass substrate can be suppressed, and at the same time, the speed and efficiency of taking out the glass substrate by the robot arm can be improved.
１２、２２ ケース
１４ 積載板
１６、５０ ピン
１８、２６、４８ ガラス基板
２０、５２ ロボットアーム
２４ ワイヤー
２８ 搬送ベルト
３０ 移載装置
３４ トレイ
３６ 昇降装置
３８ 所定トレイ
４０ 第一昇降アーム
４２ 第二昇降アーム
４４ 回転アーム
４６ 縁部
12, 22 Case 14 Loading plate 16, 50 Pin 18, 26, 48 Glass substrate 20, 52 Robot arm 24 Wire 28 Transport belt 30 Transfer device 34 Tray 36 Lifting device 38 Predetermined tray 40 First lifting arm 42 Second lifting arm 42 44 Rotating arm 46 Edge
Claims (7)
上記所定トレイの上方のトレイを第一高度に持ち上げる第一昇降アームと上記所定トレイを第二高度に持ち上げる第二昇降アームとを有する昇降装置と、
上記第二昇降アームで持ち上げた所定トレイの下に回り込むように構成された回転アームとを含み、
上記回転アームには垂直に複数のピンが設けられ、
上記回転アームを更に上方へ移動させ上記ピンにより上記ガラス基板を第三高度に持ち上げるようにしたことを特徴とする移載装置。 A plurality of stacked trays including a predetermined tray for placing a glass substrate;
A lifting device having a first lifting arm that lifts the tray above the predetermined tray to a first height and a second lifting arm that lifts the predetermined tray to a second height;
A rotating arm configured to go under a predetermined tray lifted by the second lifting arm,
The rotating arm is provided with a plurality of pins vertically,
A transfer apparatus characterized in that the rotating arm is further moved upward to lift the glass substrate to a third height by the pin .
The transfer device according to claim 1, wherein a difference between the first altitude and the second altitude is 50 to 400 mm.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095102696A TWI269772B (en) | 2006-01-24 | 2006-01-24 | Apparatus for loading and unloading workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007197214A JP2007197214A (en) | 2007-08-09 |
| JP4408436B2 true JP4408436B2 (en) | 2010-02-03 |
Family
ID=38318457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006113023A Active JP4408436B2 (en) | 2006-01-24 | 2006-04-17 | Transfer equipment |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4408436B2 (en) |
| KR (1) | KR100729656B1 (en) |
| TW (1) | TWI269772B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100571998C (en) * | 2008-08-27 | 2009-12-23 | 福建华冠光电有限公司 | Method for disassembling LCD display panel |
| TWI461341B (en) * | 2009-03-30 | 2014-11-21 | Ihi Corp | Running car system |
| CN106252265A (en) * | 2016-09-25 | 2016-12-21 | 东莞市联洲知识产权运营管理有限公司 | A kind of transition apparatus of integrated antenna package line |
| JP6870517B2 (en) | 2017-07-20 | 2021-05-12 | 株式会社ダイフク | Transport vehicle and transport equipment |
| CN107686005B (en) * | 2017-09-20 | 2023-09-22 | 广东金弘达自动化科技股份有限公司 | Automatic code scanning and taking equipment for key caps |
| DE202019101792U1 (en) * | 2018-07-04 | 2019-10-14 | Murata Machinery, Ltd. | opening device |
| CN109436763A (en) * | 2018-12-21 | 2019-03-08 | 深圳市标谱半导体科技有限公司 | High speed transfer arranges mechanism |
| JP7156547B2 (en) * | 2019-09-02 | 2022-10-19 | 村田機械株式会社 | Wafer delivery device, wafer storage container, and wafer storage system |
| WO2021046264A2 (en) * | 2019-09-03 | 2021-03-11 | DWFritz Automation, Inc. | Tray exchange and dispositioning systems, methods, and apparatuses |
| CN112520427B (en) * | 2020-11-09 | 2023-03-28 | 宁波阅荷思山智能科技有限公司 | Magnetic control type precise anti-abrasion card feeding device |
| CN115611016B (en) * | 2022-09-29 | 2023-08-22 | 金鹏装配式建筑有限公司 | Prefabricated component intelligent storage yard |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244983A (en) * | 1975-10-06 | 1977-04-08 | Ekutasu Syst Kk | Three dimentional conveying equipment |
| JP3493725B2 (en) * | 1994-05-24 | 2004-02-03 | 株式会社ニコン | Exposure equipment |
| JPH0663506U (en) * | 1993-02-17 | 1994-09-09 | 新日本製鐵株式会社 | Tower type automated warehouse |
| JPH0715743U (en) * | 1993-08-12 | 1995-03-17 | 株式会社ヤマザキ電機 | Continuous heat treatment equipment for glass substrates |
| JP2000329819A (en) * | 1999-05-17 | 2000-11-30 | Advantest Corp | Test device and test method of electronic part substrate |
| JP4270434B2 (en) * | 2002-11-29 | 2009-06-03 | シャープ株式会社 | Substrate transfer device, substrate removal method, and substrate storage method |
| JP4003882B2 (en) * | 2003-09-26 | 2007-11-07 | シャープ株式会社 | Substrate transfer system |
| JP2005142443A (en) * | 2003-11-07 | 2005-06-02 | Yaskawa Electric Corp | Cassette device and thin substrate transfer system |
| JP2005311038A (en) * | 2004-04-21 | 2005-11-04 | Shinko Electric Co Ltd | Pallet cassette and carrying in/out device for glass-shaped plate |
-
2006
- 2006-01-24 TW TW095102696A patent/TWI269772B/en active
- 2006-03-30 KR KR1020060028960A patent/KR100729656B1/en active IP Right Grant
- 2006-04-17 JP JP2006113023A patent/JP4408436B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007197214A (en) | 2007-08-09 |
| TWI269772B (en) | 2007-01-01 |
| TW200728177A (en) | 2007-08-01 |
| KR100729656B1 (en) | 2007-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4408436B2 (en) | Transfer equipment | |
| JP6049971B2 (en) | Robot equipped with end effector and operation method thereof | |
| TWI381981B (en) | Container, carriage and method for resetting the container | |
| JP5490639B2 (en) | Substrate processing apparatus and substrate transfer method | |
| JP6685213B2 (en) | Substrate aligning device, substrate processing device, substrate arranging device, substrate aligning method, substrate processing method and substrate arranging method | |
| TWI653704B (en) | Posture changing device | |
| JP2007039157A (en) | Conveying device, vacuum treatment device and conveying method | |
| JP2009049232A (en) | Substrate processing equipment | |
| JP2006036365A (en) | Cassette for containing glass substrate | |
| US8845262B2 (en) | Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program | |
| JP4941627B2 (en) | Work storage device | |
| JP2005317826A (en) | Vertical housing type cassette and substrate housing system comprising it | |
| KR20050038134A (en) | Glass substrate stocking system | |
| US20060245848A1 (en) | Substrate cassette | |
| US20070114111A1 (en) | Cassette and mechanical arm and process apparutus | |
| TWI719532B (en) | Substrate arrangement apparatus and substrate arrangement method | |
| JP4440032B2 (en) | Substrate transfer device for sequential substrate cassette | |
| JP2009147283A (en) | Apparatus for transferring substrate | |
| JP4257784B2 (en) | Thin plate supply apparatus and thin plate supply method using the same | |
| JP2007053203A (en) | Substrate processing apparatus and substrate transferring method | |
| TWI355041B (en) | Self-weight adjusting structure | |
| KR20070117868A (en) | A cassette loader and a stocker including the same | |
| JP2008122477A (en) | Test substrate and method for checking operation upon carrying in/out substrate to cassette or production device by using the test substrate | |
| JPH10245123A (en) | Substrate holding mechanism, substrate conveying device, and substrate processing device | |
| JPH0995386A (en) | Glass base board transferring cassette |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090511 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090721 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090817 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090918 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091015 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091109 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4408436 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121120 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121120 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131120 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |