WO2003027652A1 - Dispositif d'inspection de defauts - Google Patents

Dispositif d'inspection de defauts Download PDF

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Publication number
WO2003027652A1
WO2003027652A1 PCT/JP2002/009762 JP0209762W WO03027652A1 WO 2003027652 A1 WO2003027652 A1 WO 2003027652A1 JP 0209762 W JP0209762 W JP 0209762W WO 03027652 A1 WO03027652 A1 WO 03027652A1
Authority
WO
WIPO (PCT)
Prior art keywords
sample
front surface
back surface
defect inspection
entire
Prior art date
Application number
PCT/JP2002/009762
Other languages
English (en)
French (fr)
Other versions
WO2003027652B1 (fr
Inventor
Hiroshi Naiki
Toshihiko Tanaka
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to KR10-2004-7003939A priority Critical patent/KR20040039372A/ko
Priority to JP2003531155A priority patent/JP4157037B2/ja
Publication of WO2003027652A1 publication Critical patent/WO2003027652A1/ja
Publication of WO2003027652B1 publication Critical patent/WO2003027652B1/ja
Priority to US10/801,402 priority patent/US6954268B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
PCT/JP2002/009762 2001-09-21 2002-09-24 Dispositif d'inspection de defauts WO2003027652A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2004-7003939A KR20040039372A (ko) 2001-09-21 2002-09-24 결함 검사 장치
JP2003531155A JP4157037B2 (ja) 2001-09-21 2002-09-24 欠陥検査装置
US10/801,402 US6954268B2 (en) 2001-09-21 2004-03-15 Defect inspection apparatus

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001289963 2001-09-21
JP2001-289963 2001-09-21
JP2002-80836 2002-03-22
JP2002080836 2002-03-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/801,402 Continuation US6954268B2 (en) 2001-09-21 2004-03-15 Defect inspection apparatus

Publications (2)

Publication Number Publication Date
WO2003027652A1 true WO2003027652A1 (fr) 2003-04-03
WO2003027652B1 WO2003027652B1 (fr) 2003-09-25

Family

ID=26622741

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/009762 WO2003027652A1 (fr) 2001-09-21 2002-09-24 Dispositif d'inspection de defauts

Country Status (5)

Country Link
US (1) US6954268B2 (ja)
JP (2) JP4157037B2 (ja)
KR (1) KR20040039372A (ja)
CN (1) CN100370243C (ja)
WO (1) WO2003027652A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004017114A1 (de) * 2004-04-07 2005-11-03 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
WO2006098211A1 (ja) * 2005-03-16 2006-09-21 Shin-Etsu Handotai Co., Ltd. 半導体ウェーハの保持用グリッパー及び保持方法並びに形状測定装置
JP2008131025A (ja) * 2006-11-21 2008-06-05 Nippon Electro Sensari Device Kk ウエーハ裏面検査装置
JP2009014617A (ja) * 2007-07-06 2009-01-22 Olympus Corp 基板外観検査装置
WO2009072389A1 (ja) * 2007-12-03 2009-06-11 Shibaura Mechatronics Corporation 基板表面検査装置及び基板表面検査方法
JP2018059878A (ja) * 2016-10-07 2018-04-12 トピー工業株式会社 圧延材の疵検出システム

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200540939A (en) * 2004-04-22 2005-12-16 Olympus Corp Defect inspection device and substrate manufacturing system using the same
WO2006046236A1 (en) * 2004-10-26 2006-05-04 May High-Tech Solutions, Ltd. Method and apparatus for residue detection on a polished wafer
GB0424417D0 (en) * 2004-11-03 2004-12-08 Univ Heriot Watt 3D surface and reflectance function recovery using scanned illumination
FR2877593B1 (fr) * 2004-11-10 2008-05-02 Vai Clecim Soc Par Actions Sim Procede et dispositif d'inspection d'une bande laminee
DE102004054565A1 (de) * 2004-11-11 2005-12-01 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe
US7590279B2 (en) 2004-12-24 2009-09-15 Saki Corporation Appearance inspection apparatus for inspecting inspection piece
KR100684454B1 (ko) * 2005-04-26 2007-02-22 아주하이텍(주) 자동 광학 검사 시스템 및 방법
US7315361B2 (en) * 2005-04-29 2008-01-01 Gsi Group Corporation System and method for inspecting wafers in a laser marking system
TWI278910B (en) * 2005-08-09 2007-04-11 Powerchip Semiconductor Corp System and method for wafer visual inspection
US7889347B2 (en) * 2005-11-21 2011-02-15 Plexera Llc Surface plasmon resonance spectrometer with an actuator driven angle scanning mechanism
US7463358B2 (en) 2005-12-06 2008-12-09 Lumera Corporation Highly stable surface plasmon resonance plates, microarrays, and methods
JP4831607B2 (ja) * 2006-03-31 2011-12-07 Ｈｏｙａ株式会社 パターン欠陥検査方法及びフォトマスクの製造方法
JP4914761B2 (ja) * 2007-05-16 2012-04-11 オリンパス株式会社 外観検査装置
DE202007019013U1 (de) 2007-11-01 2010-04-29 Zimmermann & Schilp Handhabungstechnik Gmbh Vorrichtungen zur Inspektion und Bestrahlung von flächigen Materialien
US8004669B1 (en) 2007-12-18 2011-08-23 Plexera Llc SPR apparatus with a high performance fluid delivery system
KR100912651B1 (ko) * 2007-12-21 2009-08-17 주식회사 앤비젼 자동 영상 검사 장치
FR2931295B1 (fr) * 2008-05-13 2010-08-20 Altatech Semiconductor Dispositif et procede d'inspection de plaquettes semi-conductrices
US8111899B2 (en) * 2008-07-10 2012-02-07 Hui-Hsiung Lee Substrate-check equipment
BRPI0818748A2 (pt) * 2008-10-17 2015-06-16 Mitsubishi Hitachi Metals Dispositivo e método de inspeção para inspecionar uma superfície dianteira e uma superfície traseira de um material em tira laminado por uma máquina de laminação
WO2011155294A1 (ja) * 2010-06-09 2011-12-15 シャープ株式会社 基板処理装置、基板搬送装置および打痕検出装置
DE102011050024A1 (de) * 2011-04-29 2012-10-31 Hamilton Bonaduz Ag Analysevorrichtung für eine berührungslose Analyse der Ausformung eines transparenten Körpers und Verfahren zur Durchführung der berührungslosen Analyse
KR101324015B1 (ko) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 유리기판 표면 불량 검사 장치 및 검사 방법
JP2013083491A (ja) * 2011-10-06 2013-05-09 Yatomi Atsuko 半導体ウェハの表面検査システム
US9939386B2 (en) * 2012-04-12 2018-04-10 KLA—Tencor Corporation Systems and methods for sample inspection and review
DE102012111651A1 (de) * 2012-11-30 2014-06-05 Bundesdruckerei Gmbh Verfahren und Vorrichtung zum Prüfen der Vollständigkeit eines Auftrags von einer transparenten Schicht eines Mediums auf einem Trägermaterial
JP5825268B2 (ja) * 2013-01-21 2015-12-02 東京エレクトロン株式会社 基板検査装置
KR101485425B1 (ko) * 2013-09-04 2015-01-22 주식회사 엠티엠 커버 글라스 분석 장치
KR101505498B1 (ko) * 2013-09-16 2015-03-24 주식회사 엠티엠 커버 글라스 분석 장치
CN103489809B (zh) * 2013-09-22 2016-08-10 上海华力微电子有限公司 晶圆表面颗粒物的缺陷检测系统及其工作方法
KR102161160B1 (ko) 2013-10-31 2020-09-29 삼성전자주식회사 기판의 표면 검사 방법 및 이를 수행하기 위한 장치
CN103543162B (zh) * 2013-11-05 2015-11-04 中国矿业大学 一种半导体片材的表面缺陷及厚度检测方法及装置
JP6339849B2 (ja) * 2014-04-23 2018-06-06 株式会社サキコーポレーション 検査装置
JP6296499B2 (ja) * 2014-08-11 2018-03-20 株式会社 東京ウエルズ 透明基板の外観検査装置および外観検査方法
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
CN104458763A (zh) * 2014-12-12 2015-03-25 元亮科技有限公司 广视野表面缺陷检测装置
CN104949992A (zh) * 2015-05-19 2015-09-30 东莞市威力固电路板设备有限公司 印刷电路板自动光学检测系统及其印刷电路板载物台
US10458925B2 (en) 2015-07-24 2019-10-29 Corning Incorporated Apparatus and methods for inspecting bodies having a plurality of channels
JP6436883B2 (ja) * 2015-09-11 2018-12-12 東芝メモリ株式会社 欠陥検査方法及び欠陥検査装置
CN105258654B (zh) * 2015-10-29 2018-04-20 江苏吉星新材料有限公司 一种非接触式高精密晶片面型测量仪器及其测量计算方法
CN105702597B (zh) * 2016-02-05 2019-03-19 东方晶源微电子科技（北京）有限公司 多工作台或多腔体检测系统
TWI689721B (zh) * 2017-02-17 2020-04-01 特銓股份有限公司 基於利用光學技術掃描透明板材表面污染之方法及其系統
JP6411599B1 (ja) * 2017-08-24 2018-10-24 Ckd株式会社 ブリスター包装機
CN109425619B (zh) * 2017-08-31 2021-12-28 深圳中科飞测科技股份有限公司 光学测量系统及方法
JP2019045330A (ja) * 2017-09-04 2019-03-22 日本電産コパル株式会社 外観検査装置及び製品製造システム
CN108037130B (zh) * 2017-12-01 2020-10-16 深圳市科陆电子科技股份有限公司 电芯的极耳缺陷自动检测方法及自动检测装置
TW201930826A (zh) * 2017-12-26 2019-08-01 日商索尼股份有限公司 外觀檢查裝置、外觀檢查方法、程式及工件之製造方法
WO2019216031A1 (ja) * 2018-05-07 2019-11-14 日本碍子株式会社 セラミックス体の欠陥検査装置および欠陥検査方法
IL310215A (en) * 2018-06-13 2024-03-01 Asml Netherlands Bv Metrological device
CN110715942A (zh) * 2018-07-11 2020-01-21 皓琪科技股份有限公司 电路板自动检测方法及系统
JP2020056704A (ja) * 2018-10-03 2020-04-09 株式会社玉川製作所 振動試料型磁力計用自動試料交換装置
CN109297991B (zh) * 2018-11-26 2019-12-17 深圳市麓邦技术有限公司 一种玻璃表面缺陷检测系统及方法
CN109444157A (zh) * 2018-12-25 2019-03-08 苏州凡目视觉科技有限公司 一种划痕检测装置与方法
WO2020152865A1 (ja) * 2019-01-25 2020-07-30 タカノ株式会社 画像検査装置
JP7326972B2 (ja) * 2019-07-30 2023-08-16 株式会社リコー 表面特性評価方法、表面特性評価装置、及び表面特性評価プログラム
CN110455811B (zh) * 2019-08-27 2022-04-01 通威太阳能（合肥）有限公司 一种能够检测电池片背场缺陷的设备及其调试方法

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JPS6242039A (ja) * 1985-08-19 1987-02-24 Toshiba Corp 表面検査装置
JPH04304651A (ja) * 1991-04-01 1992-10-28 Sumitomo Electric Ind Ltd 半導体ウエハ搬送装置
JPH0564760U (ja) * 1992-01-22 1993-08-27 東京航空計器株式会社 円盤状物品の保持装置
JPH08125004A (ja) * 1994-10-27 1996-05-17 Sony Corp ウエハホルダ及びこれを使用したウエハ目視検査装置
JPH11219990A (ja) * 1998-01-30 1999-08-10 Mitsubishi Materials Silicon Corp 半導体ウェーハの検査方法およびその装置
JP2000090206A (ja) * 1998-09-11 2000-03-31 Tokin Corp シート外観検査装置

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JPH09281054A (ja) * 1996-04-11 1997-10-31 Matsushita Electric Ind Co Ltd ディスク表面検査方法とその装置
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Publication number Priority date Publication date Assignee Title
JPS6242039A (ja) * 1985-08-19 1987-02-24 Toshiba Corp 表面検査装置
JPH04304651A (ja) * 1991-04-01 1992-10-28 Sumitomo Electric Ind Ltd 半導体ウエハ搬送装置
JPH0564760U (ja) * 1992-01-22 1993-08-27 東京航空計器株式会社 円盤状物品の保持装置
JPH08125004A (ja) * 1994-10-27 1996-05-17 Sony Corp ウエハホルダ及びこれを使用したウエハ目視検査装置
JPH11219990A (ja) * 1998-01-30 1999-08-10 Mitsubishi Materials Silicon Corp 半導体ウェーハの検査方法およびその装置
JP2000090206A (ja) * 1998-09-11 2000-03-31 Tokin Corp シート外観検査装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004017114A1 (de) * 2004-04-07 2005-11-03 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
US7400392B2 (en) 2004-04-07 2008-07-15 Integrated Dynamics Engineering Gmbh Apparatus for handling of a disklike member, especially for handling of a wafer
DE102004017114B4 (de) * 2004-04-07 2012-03-15 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
WO2006098211A1 (ja) * 2005-03-16 2006-09-21 Shin-Etsu Handotai Co., Ltd. 半導体ウェーハの保持用グリッパー及び保持方法並びに形状測定装置
JP2006261271A (ja) * 2005-03-16 2006-09-28 Shin Etsu Handotai Co Ltd 半導体ウェーハの保持用グリッパー及び保持方法並びに形状測定装置
US7779554B2 (en) 2005-03-16 2010-08-24 Shin-Etsu Handotai Co., Ltd. Holding gripper and holding method for semiconductor wafer and shape measuring apparatus
JP4671724B2 (ja) * 2005-03-16 2011-04-20 信越半導体株式会社 半導体ウェーハの保持用グリッパー及び保持方法並びに形状測定装置
JP2008131025A (ja) * 2006-11-21 2008-06-05 Nippon Electro Sensari Device Kk ウエーハ裏面検査装置
JP2009014617A (ja) * 2007-07-06 2009-01-22 Olympus Corp 基板外観検査装置
WO2009072389A1 (ja) * 2007-12-03 2009-06-11 Shibaura Mechatronics Corporation 基板表面検査装置及び基板表面検査方法
KR101140989B1 (ko) 2007-12-03 2012-05-02 시바우라 메카트로닉스 가부시키가이샤 기판 표면 검사 장치 및 기판 표면 검사 방법
JP2018059878A (ja) * 2016-10-07 2018-04-12 トピー工業株式会社 圧延材の疵検出システム

Also Published As

Publication number Publication date
JP2008203280A (ja) 2008-09-04
US20040174518A1 (en) 2004-09-09
JPWO2003027652A1 (ja) 2005-01-06
CN1556920A (zh) 2004-12-22
JP4157037B2 (ja) 2008-09-24
WO2003027652B1 (fr) 2003-09-25
KR20040039372A (ko) 2004-05-10
US6954268B2 (en) 2005-10-11
CN100370243C (zh) 2008-02-20

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