WO1999060188A2 - Verfahren zur galvanischen verkupferung von substraten - Google Patents
Verfahren zur galvanischen verkupferung von substraten Download PDFInfo
- Publication number
- WO1999060188A2 WO1999060188A2 PCT/EP1999/003321 EP9903321W WO9960188A2 WO 1999060188 A2 WO1999060188 A2 WO 1999060188A2 EP 9903321 W EP9903321 W EP 9903321W WO 9960188 A2 WO9960188 A2 WO 9960188A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- copper
- carbonate
- ions
- substrates
- precipitation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
Definitions
- the present invention relates to a process for the galvanic copper plating of substrates using insoluble anodes in acidic copper baths and separate supply of the used copper ions.
- insoluble anodes especially in horizontal continuous systems, for the metallization of printed circuit boards, requires a continuous feeding of copper ions into the process solution from outside, since the dissolution of copper anodes in the process electrolyte is not necessary.
- organic electrolyte additives which are responsible for the physical properties of the copper layer to be deposited and their distribution over the workpiece, must also be tracked.
- EP 0 667 923 describes a process for the electrolytic coating of, for example, steel with copper using insoluble anodes, for example platinum or iridium oxide, from a copper pyrophosphate electrolyte.
- the necessary tracking of the copper ions is done by adding copper hydroxide.
- the pyrophosphate electrolyte operates in the alkaline pH range is preferred, while for the metallization of printed circuit boards sulfuric acid electrolytes are preferred.
- the object of the present invention was now to design a preferably sulfuric acid copper electrolyte which is suitable for the use of insoluble anodes - especially in continuous systems - for direct current and / or pulse reverse plating deposition, without the additive organic being severely impaired or to an increased degradation of this organic matter or the increased formation of by-products. Furthermore, the metal ions should be tracked in such a way that additional disruptive changes in the process organics are avoided. The management of the entire electrolysis system including process organics and copper ion regeneration should be cost-effective, resource-saving and environmentally friendly, without having to accept technical quality disadvantages. Diaphragms and auxiliary electrolytes should continue to be dispensed with.
- This object is achieved in that, without diaphragms and auxiliary electrolytes, the majority of the copper ions are supplied directly in the form of copper carbonate and / or basic copper carbonate in a separate tank which is bypassed to the working electrolyte, the released gaseous CO 2 in is separated from the separate tank.
- Copper baths are preferably used which contain, as organic component, polymers which are produced by polymerizing bifunctional propane derivatives with one or more unsaturated alcohols having 3 to 10 carbon atoms and one or more double and / or triple bonds.
- the problem of tracking the electrodeposited copper ions occurs in the form of the addition of copper salts.
- the addition of copper (II) sulfate or pure copper (II) hydroxide is forbidden since in the first case an excessive accumulation of sulfate ions in the electrolyte could not be avoided and in the second case neutralization processes would impair efficiency.
- the copper salts are therefore dissolved in a separate tank, which is led to the working electrolyte in the bypass.
- the container is equipped with an agitator and heating to make the solution process as quick and economical as possible.
- the very good temperature resistance of the additive according to EP 0 137 397 means that during the solution process at elevated temperature there is practically no reduction in the electrochemical Activity occurs.
- the feed into the process electrolyte is preferably carried out via a pump system with a filtration unit. In this way, disturbances in the electrolysis process can be completely avoided.
- used copper etching solutions are recycled in an environmentally friendly manner and converted into copper carbonate by adding, for example, sodium carbonate.
- Such copper etching solutions usually contain copper ions and mineral acids, for example hydrochloric acid, sulfuric acid etc., and, if appropriate, oxidizing agents and stabilizing substances. These etching solutions can now be collected. Anode residues or printed circuit board waste can also be dissolved in the solution by blowing in air. The solutions are transferred to a second tank via activated carbon filters, for example. This solution is then adjusted to a pH below the precipitation pH of Cu (OH) 2 using, for example, sodium hydroxide solution or other suitable alkali solutions.
- H 2 S0 4 150 to 300 g / 1 200 to 250
- the parameters mentioned relate primarily to operation in a horizontal cycle. All platers according to the state of the art can be used.
- the copper precipitates produced by the process according to the invention are fine crystalline, silky-matt, almost free of internal stresses, ductile and have a high tensile strength. They are smooth and therefore free of roughness or pores.
- the industry-standard quality tests e.g. according to MIL SPEC 55 110
- the electrolyte has an excellent even metal distribution over the surface and a very good scattering capacity e.g. in the holes of printed circuit boards.
- the deposition quality from the electrolyte was in all cases in accordance with the technical requirements.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Optical Integrated Circuits (AREA)
- ing And Chemical Polishing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims
Priority Applications (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99952102A EP1080252B1 (de) | 1998-05-16 | 1999-05-14 | Verfahren zur galvanischen verkupferung von substraten |
HU0102016A HUP0102016A3 (en) | 1998-05-16 | 1999-05-14 | Method for copperplating substrates |
DK99952102T DK1080252T3 (da) | 1998-05-16 | 1999-05-14 | Fremgangsmåde til elektrolytisk kobberplettering af substrater |
ROA200001121A RO119838B1 (ro) | 1998-05-16 | 1999-05-14 | Procedeu pentru placarea galvanică, cu cupru, a substraturilor |
AT99952102T ATE221930T1 (de) | 1998-05-16 | 1999-05-14 | Verfahren zur galvanischen verkupferung von substraten |
US09/674,509 US6576111B1 (en) | 1998-05-16 | 1999-05-14 | Process for the copper plating of substrates |
CA002331750A CA2331750A1 (en) | 1998-05-16 | 1999-05-14 | Method for electro copperplating substrates |
DE59902276T DE59902276D1 (de) | 1998-05-16 | 1999-05-14 | Verfahren zur galvanischen verkupferung von substraten |
SK1691-2000A SK16912000A3 (sk) | 1998-05-16 | 1999-05-14 | Spôsob galvanického pomeďovania substrátov |
AU42617/99A AU4261799A (en) | 1998-05-16 | 1999-05-14 | Method for electro copperplating substrates |
JP2000549788A JP2002515549A (ja) | 1998-05-16 | 1999-05-14 | 基体の電気銅めっき方法 |
IL13941899A IL139418A0 (en) | 1998-05-16 | 1999-05-14 | Method for electro copperplating substrates |
IS5703A IS5703A (is) | 1998-05-16 | 2000-11-02 | Aðferð við koparhúðun undirlags |
NO20005777A NO20005777D0 (no) | 1998-05-16 | 2000-11-15 | Fremgangsmåte for elektro-forkobring av substrater |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19822076 | 1998-05-16 | ||
DE19822076.6 | 1998-05-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1999060188A2 true WO1999060188A2 (de) | 1999-11-25 |
WO1999060188A3 WO1999060188A3 (de) | 2000-01-13 |
Family
ID=7868038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1999/003321 WO1999060188A2 (de) | 1998-05-16 | 1999-05-14 | Verfahren zur galvanischen verkupferung von substraten |
Country Status (22)
Country | Link |
---|---|
US (1) | US6576111B1 (de) |
EP (1) | EP1080252B1 (de) |
JP (1) | JP2002515549A (de) |
KR (1) | KR100545664B1 (de) |
CN (1) | CN1170965C (de) |
AT (1) | ATE221930T1 (de) |
AU (1) | AU4261799A (de) |
CA (1) | CA2331750A1 (de) |
DE (1) | DE59902276D1 (de) |
DK (1) | DK1080252T3 (de) |
HU (1) | HUP0102016A3 (de) |
IL (1) | IL139418A0 (de) |
IS (1) | IS5703A (de) |
NO (1) | NO20005777D0 (de) |
PL (1) | PL344529A1 (de) |
RO (1) | RO119838B1 (de) |
RU (1) | RU2222643C2 (de) |
SK (1) | SK16912000A3 (de) |
TR (1) | TR200003368T2 (de) |
WO (1) | WO1999060188A2 (de) |
YU (1) | YU70900A (de) |
ZA (1) | ZA200006624B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003071010A1 (en) * | 2002-02-21 | 2003-08-28 | Atotech Deutschland Gmbh | Method for storage of a metal ion supply source in a plating equipment |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7776741B2 (en) | 2008-08-18 | 2010-08-17 | Novellus Systems, Inc. | Process for through silicon via filing |
US10472730B2 (en) | 2009-10-12 | 2019-11-12 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
US9109295B2 (en) * | 2009-10-12 | 2015-08-18 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
US20180142369A1 (en) * | 2015-06-26 | 2018-05-24 | Sumitimo Metal Mining Co., Ltd. | Electrically conductive substrate |
US10692735B2 (en) | 2017-07-28 | 2020-06-23 | Lam Research Corporation | Electro-oxidative metal removal in through mask interconnect fabrication |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0137397A2 (de) * | 1983-09-28 | 1985-04-17 | Blasberg-Oberflächentechnik GmbH | Saures galvanisches Kupferbad und Verfahren zu seiner Herstellung |
DE4001960A1 (de) * | 1990-01-24 | 1991-07-25 | Roland Schnetteler | Verfahren zum elektrochemischen beschichten von stahlbaendern mit zink-nickellegierungen |
US5186811A (en) * | 1991-04-18 | 1993-02-16 | Nippon Cmk Corp. | Method of manufacturing printed wiring boards |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62112996A (ja) * | 1985-11-11 | 1987-05-23 | Mitsubishi Metal Corp | 伝熱体 |
-
1999
- 1999-05-14 IL IL13941899A patent/IL139418A0/xx unknown
- 1999-05-14 US US09/674,509 patent/US6576111B1/en not_active Expired - Fee Related
- 1999-05-14 SK SK1691-2000A patent/SK16912000A3/sk unknown
- 1999-05-14 PL PL99344529A patent/PL344529A1/xx unknown
- 1999-05-14 AU AU42617/99A patent/AU4261799A/en not_active Abandoned
- 1999-05-14 KR KR1020007012742A patent/KR100545664B1/ko not_active IP Right Cessation
- 1999-05-14 EP EP99952102A patent/EP1080252B1/de not_active Expired - Lifetime
- 1999-05-14 RU RU2000131604/02A patent/RU2222643C2/ru not_active IP Right Cessation
- 1999-05-14 RO ROA200001121A patent/RO119838B1/ro unknown
- 1999-05-14 TR TR2000/03368T patent/TR200003368T2/xx unknown
- 1999-05-14 YU YU70900A patent/YU70900A/sh unknown
- 1999-05-14 HU HU0102016A patent/HUP0102016A3/hu unknown
- 1999-05-14 DE DE59902276T patent/DE59902276D1/de not_active Expired - Lifetime
- 1999-05-14 AT AT99952102T patent/ATE221930T1/de not_active IP Right Cessation
- 1999-05-14 WO PCT/EP1999/003321 patent/WO1999060188A2/de active IP Right Grant
- 1999-05-14 CA CA002331750A patent/CA2331750A1/en not_active Abandoned
- 1999-05-14 DK DK99952102T patent/DK1080252T3/da active
- 1999-05-14 CN CNB998062502A patent/CN1170965C/zh not_active Expired - Fee Related
- 1999-05-14 JP JP2000549788A patent/JP2002515549A/ja active Pending
-
2000
- 2000-11-02 IS IS5703A patent/IS5703A/is unknown
- 2000-11-15 ZA ZA200006624A patent/ZA200006624B/xx unknown
- 2000-11-15 NO NO20005777A patent/NO20005777D0/no not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0137397A2 (de) * | 1983-09-28 | 1985-04-17 | Blasberg-Oberflächentechnik GmbH | Saures galvanisches Kupferbad und Verfahren zu seiner Herstellung |
DE4001960A1 (de) * | 1990-01-24 | 1991-07-25 | Roland Schnetteler | Verfahren zum elektrochemischen beschichten von stahlbaendern mit zink-nickellegierungen |
US5186811A (en) * | 1991-04-18 | 1993-02-16 | Nippon Cmk Corp. | Method of manufacturing printed wiring boards |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003071010A1 (en) * | 2002-02-21 | 2003-08-28 | Atotech Deutschland Gmbh | Method for storage of a metal ion supply source in a plating equipment |
Also Published As
Publication number | Publication date |
---|---|
NO20005777L (no) | 2000-11-15 |
US6576111B1 (en) | 2003-06-10 |
ZA200006624B (en) | 2001-06-01 |
ATE221930T1 (de) | 2002-08-15 |
HUP0102016A2 (hu) | 2001-09-28 |
AU4261799A (en) | 1999-12-06 |
TR200003368T2 (tr) | 2001-04-20 |
DE59902276D1 (de) | 2002-09-12 |
KR100545664B1 (ko) | 2006-01-24 |
CA2331750A1 (en) | 1999-11-25 |
CN1301313A (zh) | 2001-06-27 |
EP1080252A1 (de) | 2001-03-07 |
IL139418A0 (en) | 2001-11-25 |
HUP0102016A3 (en) | 2002-03-28 |
RO119838B1 (ro) | 2005-04-29 |
CN1170965C (zh) | 2004-10-13 |
EP1080252B1 (de) | 2002-08-07 |
WO1999060188A3 (de) | 2000-01-13 |
RU2222643C2 (ru) | 2004-01-27 |
KR20010043597A (ko) | 2001-05-25 |
YU70900A (sh) | 2003-02-28 |
SK16912000A3 (sk) | 2001-08-06 |
DK1080252T3 (da) | 2003-01-06 |
NO20005777D0 (no) | 2000-11-15 |
JP2002515549A (ja) | 2002-05-28 |
IS5703A (is) | 2000-11-02 |
PL344529A1 (en) | 2001-11-05 |
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