TR200003368T2 - Alt-tabakaların bakırla kaplanması için işlem - Google Patents
Alt-tabakaların bakırla kaplanması için işlemInfo
- Publication number
- TR200003368T2 TR200003368T2 TR2000/03368T TR200003368T TR200003368T2 TR 200003368 T2 TR200003368 T2 TR 200003368T2 TR 2000/03368 T TR2000/03368 T TR 2000/03368T TR 200003368 T TR200003368 T TR 200003368T TR 200003368 T2 TR200003368 T2 TR 200003368T2
- Authority
- TR
- Turkey
- Prior art keywords
- substrates
- copper coating
- virgin
- separate tank
- coating
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 abstract 1
- 230000002378 acidificating effect Effects 0.000 abstract 1
- 229910001431 copper ion Inorganic materials 0.000 abstract 1
- 239000003792 electrolyte Substances 0.000 abstract 1
- 230000001172 regenerating effect Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Automation & Control Theory (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Optical Integrated Circuits (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Tükenen bakir iyonlarinin ayrica tazelenmesi ile asidik bakir banyolari içinde çözünmeyen anodlar kullanilarak alt-tabakalarin bakirla kaplanmasi için bir islem olup, bu islemin özelligi, bakir iyonlarinin büyük kisminin dogrudan bakir karbonat ve/veya bazik bakir karbonat biçiminde saglanmasi, islem elektrolitine göre bir atlatma tarzinda çalistirilan ayri bir tank içinde diyaframlar ve yardimci elektrolitler ile dagitilmasi, gaz halindeki CO2'nin bahsedilen ayri tank içinde ayrilmasidir.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19822076 | 1998-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TR200003368T2 true TR200003368T2 (tr) | 2001-04-20 |
Family
ID=7868038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TR2000/03368T TR200003368T2 (tr) | 1998-05-16 | 1999-05-14 | Alt-tabakaların bakırla kaplanması için işlem |
Country Status (22)
| Country | Link |
|---|---|
| US (1) | US6576111B1 (tr) |
| EP (1) | EP1080252B1 (tr) |
| JP (1) | JP2002515549A (tr) |
| KR (1) | KR100545664B1 (tr) |
| CN (1) | CN1170965C (tr) |
| AT (1) | ATE221930T1 (tr) |
| AU (1) | AU4261799A (tr) |
| CA (1) | CA2331750A1 (tr) |
| DE (1) | DE59902276D1 (tr) |
| DK (1) | DK1080252T3 (tr) |
| HU (1) | HUP0102016A3 (tr) |
| IL (1) | IL139418A0 (tr) |
| IS (1) | IS5703A (tr) |
| NO (1) | NO20005777D0 (tr) |
| PL (1) | PL344529A1 (tr) |
| RO (1) | RO119838B1 (tr) |
| RU (1) | RU2222643C2 (tr) |
| SK (1) | SK16912000A3 (tr) |
| TR (1) | TR200003368T2 (tr) |
| WO (1) | WO1999060188A2 (tr) |
| YU (1) | YU70900A (tr) |
| ZA (1) | ZA200006624B (tr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3725083B2 (ja) * | 2002-02-21 | 2005-12-07 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | メッキ設備における金属イオン供給源の有効保存を可能とする方法 |
| US7776741B2 (en) | 2008-08-18 | 2010-08-17 | Novellus Systems, Inc. | Process for through silicon via filing |
| US10472730B2 (en) | 2009-10-12 | 2019-11-12 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
| US9109295B2 (en) * | 2009-10-12 | 2015-08-18 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
| JP6949409B2 (ja) * | 2015-06-26 | 2021-10-13 | 住友金属鉱山株式会社 | 導電性基板 |
| US10692735B2 (en) | 2017-07-28 | 2020-06-23 | Lam Research Corporation | Electro-oxidative metal removal in through mask interconnect fabrication |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0137397B1 (de) | 1983-09-28 | 1990-08-29 | Blasberg-Oberflächentechnik GmbH | Saures galvanisches Kupferbad und Verfahren zu seiner Herstellung |
| JPS62112996A (ja) * | 1985-11-11 | 1987-05-23 | Mitsubishi Metal Corp | 伝熱体 |
| DE4001960A1 (de) | 1990-01-24 | 1991-07-25 | Roland Schnetteler | Verfahren zum elektrochemischen beschichten von stahlbaendern mit zink-nickellegierungen |
| JPH04320088A (ja) | 1991-04-18 | 1992-11-10 | Cmk Corp | プリント配線板の製造方法 |
-
1999
- 1999-05-14 DK DK99952102T patent/DK1080252T3/da active
- 1999-05-14 IL IL13941899A patent/IL139418A0/xx unknown
- 1999-05-14 WO PCT/EP1999/003321 patent/WO1999060188A2/de active IP Right Grant
- 1999-05-14 DE DE59902276T patent/DE59902276D1/de not_active Expired - Lifetime
- 1999-05-14 SK SK1691-2000A patent/SK16912000A3/sk unknown
- 1999-05-14 KR KR1020007012742A patent/KR100545664B1/ko not_active IP Right Cessation
- 1999-05-14 YU YU70900A patent/YU70900A/sh unknown
- 1999-05-14 US US09/674,509 patent/US6576111B1/en not_active Expired - Fee Related
- 1999-05-14 EP EP99952102A patent/EP1080252B1/de not_active Expired - Lifetime
- 1999-05-14 RO ROA200001121A patent/RO119838B1/ro unknown
- 1999-05-14 CN CNB998062502A patent/CN1170965C/zh not_active Expired - Fee Related
- 1999-05-14 AU AU42617/99A patent/AU4261799A/en not_active Abandoned
- 1999-05-14 AT AT99952102T patent/ATE221930T1/de not_active IP Right Cessation
- 1999-05-14 RU RU2000131604/02A patent/RU2222643C2/ru not_active IP Right Cessation
- 1999-05-14 CA CA002331750A patent/CA2331750A1/en not_active Abandoned
- 1999-05-14 TR TR2000/03368T patent/TR200003368T2/tr unknown
- 1999-05-14 HU HU0102016A patent/HUP0102016A3/hu unknown
- 1999-05-14 JP JP2000549788A patent/JP2002515549A/ja active Pending
- 1999-05-14 PL PL99344529A patent/PL344529A1/xx unknown
-
2000
- 2000-11-02 IS IS5703A patent/IS5703A/is unknown
- 2000-11-15 ZA ZA200006624A patent/ZA200006624B/xx unknown
- 2000-11-15 NO NO20005777A patent/NO20005777D0/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| WO1999060188A3 (de) | 2000-01-13 |
| NO20005777L (no) | 2000-11-15 |
| ATE221930T1 (de) | 2002-08-15 |
| US6576111B1 (en) | 2003-06-10 |
| AU4261799A (en) | 1999-12-06 |
| HUP0102016A2 (hu) | 2001-09-28 |
| NO20005777D0 (no) | 2000-11-15 |
| ZA200006624B (en) | 2001-06-01 |
| WO1999060188A2 (de) | 1999-11-25 |
| YU70900A (sh) | 2003-02-28 |
| CN1301313A (zh) | 2001-06-27 |
| RU2222643C2 (ru) | 2004-01-27 |
| EP1080252B1 (de) | 2002-08-07 |
| DE59902276D1 (de) | 2002-09-12 |
| HUP0102016A3 (en) | 2002-03-28 |
| CN1170965C (zh) | 2004-10-13 |
| KR100545664B1 (ko) | 2006-01-24 |
| EP1080252A1 (de) | 2001-03-07 |
| KR20010043597A (ko) | 2001-05-25 |
| IS5703A (is) | 2000-11-02 |
| JP2002515549A (ja) | 2002-05-28 |
| IL139418A0 (en) | 2001-11-25 |
| DK1080252T3 (da) | 2003-01-06 |
| RO119838B1 (ro) | 2005-04-29 |
| SK16912000A3 (sk) | 2001-08-06 |
| PL344529A1 (en) | 2001-11-05 |
| CA2331750A1 (en) | 1999-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE242821T1 (de) | Alkalisches zink-nickelbad | |
| IL141658A0 (en) | Gas diffusion structure perpendicular to the membrane of polymer-electrolyte membrane fuel cells | |
| MY124198A (en) | Electrolyte rebalancing system | |
| HK1021211A1 (en) | Electrochemical half-cell with pressure compensation | |
| AU2018692A (en) | Electrolytic cell and capillary slit electrode for gas-developing or gas-consuming electrolytic reactions and electrolysis process therefor | |
| MY118103A (en) | Process for the removal of sulfate ions | |
| ATE31431T1 (de) | Kathode zur elektrolytischen herstellung von wasserstoff und ihre anwendung. | |
| TR200003368T2 (tr) | Alt-tabakaların bakırla kaplanması için işlem | |
| ES2156007T3 (es) | Semicelula electroquimica con difusion gaseosa. | |
| NO953111D0 (no) | Elektrodeanordning for gassdannende elektrolyseprosesser i celler med ionebyttemembran eller med diafragma | |
| ES2076034T5 (es) | Electrodo para cuba electrolitica, su utilizacion y procedimiento que lo emplea. | |
| WO2004014806A3 (en) | A combined electrochemical system for scale treatment and eradicating legionella pneumophila bacteria in water supply systems | |
| DK0907980T3 (da) | Fremgangsmåde til fremstilling af menbranelektrodeenheder (ME) til polymer-elektrolytmembran (PEM)-brændselsceller | |
| BG101700A (en) | Method for increasing the extra energy in the waterelectrolysis | |
| DE50009777D1 (de) | Verfahren zur Herstellung von Halogenen durch Gasphasenelektrolyse | |
| DE3664057D1 (en) | Process for the electrolysis of sulfate-containing brine | |
| GB2365421A (en) | Method | |
| IT1292768B1 (it) | Cella elettrolitica per la produzione di ossigeno e idrogeno tramite elettrolisi. |