WO1998037260A1 - Feuil de cuivre microporeux et solution de depot autocatalytique permettant d'obtenir ce feuil - Google Patents
Feuil de cuivre microporeux et solution de depot autocatalytique permettant d'obtenir ce feuil Download PDFInfo
- Publication number
- WO1998037260A1 WO1998037260A1 PCT/JP1998/000689 JP9800689W WO9837260A1 WO 1998037260 A1 WO1998037260 A1 WO 1998037260A1 JP 9800689 W JP9800689 W JP 9800689W WO 9837260 A1 WO9837260 A1 WO 9837260A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- copper
- electroless
- microporous
- plating solution
- represent
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/1648—Porous product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/125—Deflectable by temperature change [e.g., thermostat element]
- Y10T428/12514—One component Cu-based
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12903—Cu-base component
Definitions
- the present invention relates to a microporous metallic copper film, and more particularly, to a metallic copper film having an extremely large number of microscopic pores, an electroless copper plating liquid capable of forming the copper film, and
- the present invention relates to a plated product having the metallic copper film.
- multilayer printed circuit boards have been prepared by processing the copper foil of the copper-clad laminate to form printed wiring to prepare the copper-clad laminate for the inner layer, and then pre-surface-treating this copper foil (generally following degreasing).
- a needle-like film of copper oxide or copper oxynitride is formed by a treatment such as treatment, and the copper-clad laminate for the inner layer is impregnated with a thermosetting resin-impregnated substrate.
- a multilayer printed board is formed by omitting the above-mentioned copper foil roughening and oxide film formation.
- the copper foil surface is roughened, so that there is a problem that the pattern accuracy of the etching resist by the printing etching resist and the ultraviolet baking method is inferior.
- the present inventors have developed a method of forming a uniform acicular copper film having excellent adhesiveness by electroless copper plating as a method for solving the above-mentioned problems, and have applied for a patent ( Japanese Patent Application Laid-Open (JP-A) No. 4-11616 and PCTZJP 936 829).
- the present inventors have been studying to further expand this technology.As a result, depending on the surfactant used, it was possible to obtain a copper film having microporosity instead of a uniform acicular copper film. It has been found that a copper-clad laminate having an excellent adhesive copper film can also be obtained by this method.
- microporous copper film has never been known before, and is used not only as a copper-clad laminate but also as a metal filter, a catalyst, or a carrier thereof by extracting only this film. We have found that we can do this and completed the present invention.
- a first object of the present invention is to provide a metal copper film having 100,000 to 100 million micropores per cm 2 .
- a second object of the present invention is to provide an electroless copper plating solution containing a copper ion, a complexing agent, a hypophosphorous acid compound as a reducing agent and a metal catalyst for initiating a reduction reaction, further comprising an acetylene bond-containing compound.
- An object of the present invention is to provide an electroless copper plating liquid containing
- a third object of the present invention is to provide a plated product having a microporous copper film, which can be obtained by immersion in the electroless copper plating solution.
- FIG. 1 is a photograph (X5, 000) of a crystal structure showing the appearance of the electroless copper film of the present invention.
- R 2 represent an alkyl group
- R 3 and R 4 represent a hydrogen atom or a lower alkyl group
- acetylene bond-containing compound examples include alkyne diols such as 2,4,7,9-tetramethyl 5-decyne-1,4,7-diol and 3,6-dimethyl-4-octyne-1,3,6-diol. And sold under the product name such as Surfynol 104 (manufactured by Nissin Chemical Co., Ltd.).
- the components of the electroless copper plating solution of the present invention except for the above-mentioned acetylene bond-containing compound, it is prepared using a known electroless copper plating solution using a hypophosphorous compound as a reducing agent.
- a hypophosphorous compound as a reducing agent.
- copper ions during electroless copper plating can be obtained from ordinary copper salts such as copper sulfate, cupric chloride, and copper nitrate, and the complexing agent can complex the above copper ions.
- Any substance can be used, and for example, citric acid, tartaric acid, malic acid, EDTA, quadrol, glycine and the like can be used.
- hypophosphorous acid compound as a reducing agent examples include hypophosphorous acid, sodium hypophosphite, and the like.
- Nickel, cobalt, palladium, and the like include nickel, cobalt, and palladium as the reduction reaction initiating metal catalyst. Used in the form of
- the copper ion should be 0.007 to 0.160 mol ZI and the nickel ion should be 0.001 to 0.023 mol ZI.
- the molar ratio of copper ions to nickel ions is preferably about 13: 1.
- the molar ratio of the complexing agent to copper ions is preferably 1 to 10 times, and the hypophosphorous acid compound as the reducing agent is preferably added in an amount of about 0.1 to 1.0 molnoI.
- a suitable amount may be experimentally determined and blended in accordance with the above-mentioned ratio.
- various other components can be added to the electroless plating solution of the present invention, if necessary.
- examples of other components include a buffer for adjusting pH and the like.
- the electroless copper plating solution of the present invention may be prepared as a thick composition for an electroless copper plating solution, and may be diluted several times to ten and several times with water or the like when used.
- the electroless copper plating of the present invention can be carried out by a conventional method using the electroless copper plating solution of the present invention obtained as described above. In practice, it is preferable to remove oxygen in the electroless copper plating solution in advance, and it is preferable to blow an inert gas such as a nitrogen gas or an argon gas before the electroless copper plating.
- an inert gas such as a nitrogen gas or an argon gas
- the temperature of the electroless copper plating solution is preferably about 40 to 100 ° C., and the plating time is preferably 5 minutes or more. Further, in the electroless copper plating of the present invention, it is preferable to use rocking stirring in order to prevent unnecessary oxidation. However, stirring and deoxygenation can be performed simultaneously using an inert gas. Furthermore, the pH of the electroless copper plating of the present invention is preferably in the range of pH 8 to 10.
- Electroless copper film to be deposited from an electroless copper plated solution described above are those having the appearance shown in FIG. 1, the number of the fine pores, 1 cm 2 per 1 0 0 0 0 0-1 , 0 0 0, 0 0 0, 0 0 0 and generally in the range of 3, 0 0 0, 0 0 0 ⁇ 3 0 0, 0 0 0, 0 0 0 It is.
- the diameter of the micropores is also in the range of 0.1 to 100 jum, generally in the range of 0.1 to 1 ° jum.
- Such a copper film having a large number of micropores is a novel one that has not been known so far, and has a great significance in that it is manufactured by a simple chemical method.
- Such a copper film has excellent adhesiveness as a result of the prepreg penetrating into a large number of micropores.
- a copper foil having a large number of micropores can be obtained, and this is used as a filter.
- a suitable metal for example, a noble metal such as rhodium or a metal such as nickel may be deposited on such a copper foil to be used as a catalyst.
- an acetylene bond-containing surfactant disclosed in Japanese Patent Application Laid-Open No. 4-116161 for example, Surfynol 465 (Nissin)
- Surfynol 465 Nisin
- Kagaku Kogyo The addition of (manufactured by Kagaku Kogyo) resulted in a microporous copper film in which small needles grew throughout.
- Example 1 Example 1
- an electroless copper plating solution was prepared according to a conventional method.
- the adhesive strength of the microporous copper film of the present invention to various resin base materials was examined by applying the electroless copper plating of the composition of Example 1 and then pressing and bonding through a pre-preda to the peel strength of the prepared multilayer board. .
- microporous copper film of the present invention was an effective inner layer copper foil treatment especially for a recent resin base material having high heat resistance, electrical reliability, chemical resistance and the like.
- an electroless copper plating solution was prepared according to a conventional method.
- Nickel sulfate to 0.0024 m o
- Electroless copper plating was applied to the copper clad laminate for inner layer (FR-4) in the same manner as in Example 1. However, when the adhesive strength was measured, it was 1.3 kgf Zcm. Observation with a scanning electron microscope revealed that small needle-like crystals grew throughout the inside, including the inside of the microporous body. Industrial applicability
- the microporous copper film of the present invention can obtain high adhesive strength by being deposited between a base copper foil and various resin base materials, but it also utilizes the property of microporosity. Many applications are expected.
- Examples include metal microfilters, catalysts or their supports.
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU62297/98A AU6229798A (en) | 1997-02-21 | 1998-02-19 | Microporous copper film and electroless copper plating solution for obtaining the same |
US09/355,983 US6329072B1 (en) | 1997-02-21 | 1998-02-19 | Microporous copper film and electroless copper plating solution for obtaining the same |
DE69807658T DE69807658T2 (de) | 1997-02-21 | 1998-02-19 | Mikroporöser kupferfilm und lösung für stromlose kupferplattierung zur herstellung derselben |
KR10-1999-7007206A KR100495531B1 (ko) | 1997-02-21 | 1998-02-19 | 미세 다공성 동피막 및 이를 얻기 위한 무전해 동도금액 |
EP98904387A EP0964076B1 (en) | 1997-02-21 | 1998-02-19 | Microporous copper film and electroless copper plating solution for obtaining the same |
HK00104452A HK1025365A1 (en) | 1997-02-21 | 2000-07-19 | Microporous copper film and electroless copper plating solution for obtaining the same. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9/52507 | 1997-02-21 | ||
JP05250797A JP3198066B2 (ja) | 1997-02-21 | 1997-02-21 | 微多孔性銅皮膜およびこれを得るための無電解銅めっき液 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/355,983 A-371-Of-International US6329072B1 (en) | 1997-02-21 | 1998-02-19 | Microporous copper film and electroless copper plating solution for obtaining the same |
US09/986,620 Continuation US20020046679A1 (en) | 1997-02-21 | 2001-11-09 | Microporous copper film and electroless copper plating solution for obtaining the same |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998037260A1 true WO1998037260A1 (fr) | 1998-08-27 |
Family
ID=12916654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1998/000689 WO1998037260A1 (fr) | 1997-02-21 | 1998-02-19 | Feuil de cuivre microporeux et solution de depot autocatalytique permettant d'obtenir ce feuil |
Country Status (11)
Country | Link |
---|---|
US (2) | US6329072B1 (ja) |
EP (1) | EP0964076B1 (ja) |
JP (1) | JP3198066B2 (ja) |
KR (1) | KR100495531B1 (ja) |
CN (1) | CN1204291C (ja) |
AU (1) | AU6229798A (ja) |
DE (1) | DE69807658T2 (ja) |
HK (1) | HK1025365A1 (ja) |
MY (1) | MY128899A (ja) |
TW (1) | TW402644B (ja) |
WO (1) | WO1998037260A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9017463B2 (en) | 2012-05-22 | 2015-04-28 | Byd Company Limited | Copper plating solution and method for preparing the same |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3986743B2 (ja) * | 2000-10-03 | 2007-10-03 | 株式会社日立製作所 | 配線基板とその製造方法及びそれに用いる無電解銅めっき液 |
JP2003013247A (ja) * | 2001-04-24 | 2003-01-15 | Murata Mfg Co Ltd | 無電解銅めっき浴及び高周波用電子部品 |
DE10221503A1 (de) * | 2002-05-14 | 2003-11-27 | Infineon Technologies Ag | Zur wenigstens teilweisen Beschichtung mit einer Substanz bestimmter Metallgegenstand |
US20050112432A1 (en) * | 2002-08-27 | 2005-05-26 | Jonah Erlebacher | Method of plating metal leafs and metal membranes |
CN100497732C (zh) * | 2005-08-19 | 2009-06-10 | 广东光华化学厂有限公司 | 混合型非甲醛还原剂的化学镀铜液 |
US8040070B2 (en) * | 2008-01-23 | 2011-10-18 | Cree, Inc. | Frequency converted dimming signal generation |
JP5176618B2 (ja) * | 2008-03-17 | 2013-04-03 | 株式会社村田製作所 | インプリント用金型、およびそれを用いたインプリント方法 |
JP4516991B2 (ja) * | 2008-06-26 | 2010-08-04 | シャープ株式会社 | 電子写真用キャリア及びその用途 |
JP5673682B2 (ja) * | 2010-08-31 | 2015-02-18 | 株式会社村田製作所 | 多孔質無電解めっき膜、電極、集電体、それを用いた電気化学センサ、蓄電デバイス及び摺動部材並びに多孔質無電解めっき膜の製造方法 |
US20140370259A1 (en) * | 2012-02-02 | 2014-12-18 | Nano-Nouvelle Pty Ltd | Thin coatings on materials |
JP2015001016A (ja) * | 2013-06-17 | 2015-01-05 | 古河電気工業株式会社 | 銅箔、銅張積層板及びプリント配線板 |
CN103481583B (zh) * | 2013-10-09 | 2017-01-04 | 北京科技大学 | 一种表面具有多孔结构的处理铜箔的制备方法 |
CN103531815B (zh) * | 2013-10-25 | 2015-12-09 | 深圳清华大学研究院 | 集流体用穿孔箔及其制作方法 |
US10648096B2 (en) * | 2014-12-12 | 2020-05-12 | Infineon Technologies Ag | Electrolyte, method of forming a copper layer and method of forming a chip |
KR101809985B1 (ko) * | 2017-03-30 | 2017-12-18 | 와이엠티 주식회사 | 다공성 구리박의 제조방법 및 이를 이용한 다공성 구리박 |
Citations (5)
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JPS62256970A (ja) * | 1986-04-25 | 1987-11-09 | マイン・セイフテイ・アブライアンセス・カンパニ− | 無電解銅メツキ浴とメツキ法 |
JPH03215678A (ja) * | 1989-09-05 | 1991-09-20 | Shinko Electric Ind Co Ltd | 無電解金めっき液 |
JPH04116176A (ja) * | 1990-09-04 | 1992-04-16 | Hideo Honma | 無電解銅めっき液および無電解銅めっき方法 |
JPH05222576A (ja) * | 1992-02-10 | 1993-08-31 | Tsubakimoto Chain Co | 金属表面処理方法 |
JPH05301991A (ja) * | 1990-05-18 | 1993-11-16 | Japan Gore Tex Inc | 金属膜を有する多孔質フッ素樹脂材料及びその製造方法 |
Family Cites Families (7)
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JPS5911678B2 (ja) | 1979-12-06 | 1984-03-16 | 松下電器産業株式会社 | 多孔質銅薄膜の製造法 |
EP0132594B1 (en) * | 1983-07-25 | 1988-09-07 | Hitachi, Ltd. | Electroless copper plating solution |
JPS6416176A (en) | 1987-07-10 | 1989-01-19 | Nec Corp | High speed vtr |
JPH01309997A (ja) | 1988-06-09 | 1989-12-14 | Kanto Kasei Kogyo Kk | 耐食性に優れた銅−ニッケル−クロム光沢電気めっき方法およびそれにより得られためっき皮膜 |
JPH02118097A (ja) | 1988-10-27 | 1990-05-02 | Eagle Ind Co Ltd | 軸受摺動面の表面処理方法 |
JPH06306768A (ja) | 1993-04-19 | 1994-11-01 | Denki Kagaku Kogyo Kk | 複合多孔質中空繊維及びその製造方法 |
JPH08243365A (ja) | 1995-03-13 | 1996-09-24 | Hitoshi Kobayashi | 金属製濾過膜 |
-
1997
- 1997-02-21 JP JP05250797A patent/JP3198066B2/ja not_active Expired - Lifetime
-
1998
- 1998-02-19 US US09/355,983 patent/US6329072B1/en not_active Expired - Fee Related
- 1998-02-19 KR KR10-1999-7007206A patent/KR100495531B1/ko not_active IP Right Cessation
- 1998-02-19 DE DE69807658T patent/DE69807658T2/de not_active Expired - Lifetime
- 1998-02-19 EP EP98904387A patent/EP0964076B1/en not_active Expired - Lifetime
- 1998-02-19 AU AU62297/98A patent/AU6229798A/en not_active Abandoned
- 1998-02-19 CN CNB988027399A patent/CN1204291C/zh not_active Expired - Fee Related
- 1998-02-19 WO PCT/JP1998/000689 patent/WO1998037260A1/ja active IP Right Grant
- 1998-02-20 MY MYPI98000739A patent/MY128899A/en unknown
- 1998-02-20 TW TW087102387A patent/TW402644B/zh active
-
2000
- 2000-07-19 HK HK00104452A patent/HK1025365A1/xx not_active IP Right Cessation
-
2001
- 2001-11-09 US US09/986,620 patent/US20020046679A1/en not_active Abandoned
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JPS62256970A (ja) * | 1986-04-25 | 1987-11-09 | マイン・セイフテイ・アブライアンセス・カンパニ− | 無電解銅メツキ浴とメツキ法 |
JPH03215678A (ja) * | 1989-09-05 | 1991-09-20 | Shinko Electric Ind Co Ltd | 無電解金めっき液 |
JPH05301991A (ja) * | 1990-05-18 | 1993-11-16 | Japan Gore Tex Inc | 金属膜を有する多孔質フッ素樹脂材料及びその製造方法 |
JPH04116176A (ja) * | 1990-09-04 | 1992-04-16 | Hideo Honma | 無電解銅めっき液および無電解銅めっき方法 |
JPH05222576A (ja) * | 1992-02-10 | 1993-08-31 | Tsubakimoto Chain Co | 金属表面処理方法 |
Non-Patent Citations (1)
Title |
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See also references of EP0964076A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9017463B2 (en) | 2012-05-22 | 2015-04-28 | Byd Company Limited | Copper plating solution and method for preparing the same |
Also Published As
Publication number | Publication date |
---|---|
US20020046679A1 (en) | 2002-04-25 |
MY128899A (en) | 2007-02-28 |
EP0964076A1 (en) | 1999-12-15 |
TW402644B (en) | 2000-08-21 |
DE69807658D1 (de) | 2002-10-10 |
KR100495531B1 (ko) | 2005-06-14 |
DE69807658T2 (de) | 2003-05-08 |
US6329072B1 (en) | 2001-12-11 |
JPH10237664A (ja) | 1998-09-08 |
EP0964076B1 (en) | 2002-09-04 |
JP3198066B2 (ja) | 2001-08-13 |
HK1025365A1 (en) | 2000-11-10 |
AU6229798A (en) | 1998-09-09 |
CN1248300A (zh) | 2000-03-22 |
KR20000070941A (ko) | 2000-11-25 |
EP0964076A4 (en) | 2000-01-26 |
CN1204291C (zh) | 2005-06-01 |
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