WO1985001071A1 - Procede de depot d'un revetement - Google Patents

Procede de depot d'un revetement Download PDF

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Publication number
WO1985001071A1
WO1985001071A1 PCT/SU1983/000030 SU8300030W WO8501071A1 WO 1985001071 A1 WO1985001071 A1 WO 1985001071A1 SU 8300030 W SU8300030 W SU 8300030W WO 8501071 A1 WO8501071 A1 WO 8501071A1
Authority
WO
WIPO (PCT)
Prior art keywords
сђс
cutting tool
temperature
carbide
fact
Prior art date
Application number
PCT/SU1983/000030
Other languages
English (en)
Russian (ru)
Inventor
Alexei Georgievich Gavrilov
Leonid Stepanovich Guzei
Viktor Petrovich Zhed
Elena Ivanovna Kurbatova
Vyacheslav Nikolaevich Panin
Andrei Karlovich Sinelschikov
Valentin Glebovich Padalka
Original Assignee
Vsesojuzny Nauchno-Issledovatelsky Instrumentalny
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AT0908483A priority Critical patent/AT382892B/de
Priority to GB08508273A priority patent/GB2155044B/en
Application filed by Vsesojuzny Nauchno-Issledovatelsky Instrumentalny filed Critical Vsesojuzny Nauchno-Issledovatelsky Instrumentalny
Priority to NL8320315A priority patent/NL8320315A/nl
Priority to JP83503277A priority patent/JPS60502110A/ja
Priority to CH1660/85A priority patent/CH666054A5/de
Priority to BR8307748A priority patent/BR8307748A/pt
Priority to PCT/SU1983/000030 priority patent/WO1985001071A1/fr
Priority to AU20735/83A priority patent/AU559857B2/en
Priority to DE19833390523 priority patent/DE3390523C2/de
Priority to FR8321028A priority patent/FR2557595B1/fr
Priority to CA000444620A priority patent/CA1216252A/fr
Publication of WO1985001071A1 publication Critical patent/WO1985001071A1/fr
Priority to SE8501521A priority patent/SE454705B/sv
Priority to DK159385A priority patent/DK159385D0/da
Priority to FI851485A priority patent/FI80296C/fi
Priority to NO851558A priority patent/NO851558L/no

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/541Heating or cooling of the substrates

Definitions

  • the temperature of the reaction of carbidization would be 500-540 ° C, and this as a material for the cutting tool used steel.
  • the temperature of the carbidization reaction would be equal to 620-680°C, ⁇ vaya hard alloy.
  • titanium nitride as an evaporating carbon base material.
  • a titanium alloy be used as a vaporizable carbide base material.
  • the resulting invention allows to stabilize the composition of the formation of the thickness, which reduces the technical process of its application. Otherwise, the present invention excludes the risk of an explosion safety situation.
  • the best variant of the existence of the invention material consists in evaporating the carbide-bearing material in a vacuum with an arc discharge and applying voltage to the cutting tool. P ⁇ - ⁇ m they clean and warm up the working air of the cutting tool of the ka ⁇ day b ⁇ mbardpr ⁇ v ⁇ y and karbidization reaction temperature running tool. Then we vaporize the ⁇ carbid ⁇ - ⁇ brazcheg ⁇ material ⁇ yadensi ⁇ yu ⁇ at the working ⁇ ve ⁇ - n ⁇ st and ⁇ sya ⁇ vy ⁇ ezhushchego iyas ⁇ rumenta d ⁇ ⁇ braz ⁇ vania ⁇ - shelters.
  • ⁇ -5 - carbide of the building material is used titanium.
  • Titanium was used as a vaporized carbide-forming material, and as a material, steel of the following composition was used:
  • the coating was applied to the cutting inserts.
  • a hard alloy of the following composition was used:
  • the application of the penetration is similar to example I, with the exception of ⁇ g ⁇ , which is to clean the working surface of the plates of the bottom bombardi ⁇ v ⁇ ⁇ th and ⁇ nage of titanium pr ⁇ v ⁇ dizh with its heating up to a temperature of 620°C.
  • Tests were carried out on five slabs for each batch in the following modes: cutting speed V - 160 m/min; ⁇ dacha ⁇ -0.3 mm/ ⁇ b; cutting depth I - I mm.
  • Titanium nitrate is used as a vaporizable carbon fiber material
  • steel is used as a core material in Example I.
  • the working surface of the drills of the cataract b ⁇ mbardi ⁇ v ⁇ y and ⁇ nami nitrida ⁇ ita with ⁇ dn ⁇ temporary and temperature 5 ⁇ 0° ⁇ .
  • the voltage was syaizhazh d ⁇ 300 V and in the course of ⁇ réelle ⁇ minutes there was a ⁇ nden ⁇ atshchya and ⁇ n ⁇ v ni ⁇ tita n ⁇ t on the working load drill, s ⁇ pr ⁇ v ⁇ awaiting him by carbidization with carbon steel.
  • the thickness of the coating representing titanium carbide (N C) was 2 ⁇ m.
  • a titanium alloy of the following composition is used:
  • Titanium alloy was used as the vaporized carbide-forming material, with teriala ⁇ sn ⁇ vy ⁇ hard alloy, making up ⁇ g ⁇ privedey in example 2.
  • the application of the hole is similar to the example, with the exception of ⁇ g ⁇ , which is to clean the working surface of the drills of the bottom bomber ⁇ with titanium, aluminum and molybdenum pr ⁇ even with a daytime heating up to a temperature of 650 ° ⁇ .
  • Example 7 Application of the application on twist drills ⁇ 5 mm.
  • Example 8 Coating coating on cutting plates.
  • composition ⁇ Example 2 ⁇ stzh plates may exist up to a temperature of 680°C. Testing of plates is also similar to example 2. The test results are shown in Table 8.
  • test results given in the example 1,2,3,4,5,6,7,8 st ⁇ - -II- typical characteristics of drills.
  • the total invention allows to increase the rate of closure with a rate of 0.1-0.7 m ⁇ m/min, which reduces the time of the technical ⁇ g ⁇ cycle.
  • This invention can be successfully used to obtain here the melting of wear and tear on the cutting tool, burnt from any materials containing carbon in its composition, such as experience, hard alloys, ceramic alloys and others.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Food-Manufacturing Devices (AREA)
  • Materials For Medical Uses (AREA)

Abstract

Le procédé de dépôt d'un revêtement, essentiellement sur un substrat constitué en un matériau contenant du carbone d'un outil de coupe de métaux, consiste à effectuer l'évaporation d'un matériau de formation de carbure par décharge en arc sous vide. Ensuite, une surface de travail du substrat est nettoyée et chauffée par bombardement cathodique, effectué par des ions du matériau de formation de carbure, jusqu'à atteindre la température à laquelle la réaction de carburation du matériau de formation de carbure a lieu avec le carbone du matériau du substrat. Ensuite les ions du matériau de formation de carbure sont condensés sur la surface de travail du substrat.
PCT/SU1983/000030 1983-08-25 1983-08-25 Procede de depot d'un revetement WO1985001071A1 (fr)

Priority Applications (15)

Application Number Priority Date Filing Date Title
DE19833390523 DE3390523C2 (de) 1983-08-25 1983-08-25 Verfahren zum Auftragen einer Beschichtung auf dieOberfl{che eines spanenden Werkzeugs
AU20735/83A AU559857B2 (en) 1983-08-25 1983-08-25 Method for the deposition of a coating
NL8320315A NL8320315A (nl) 1983-08-25 1983-08-25 Werkwijze voor het aanbrengen van een bekleding.
GB08508273A GB2155044B (en) 1983-08-25 1983-08-25 Method for the deposition of a coating
CH1660/85A CH666054A5 (de) 1983-08-25 1983-08-25 Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges.
BR8307748A BR8307748A (pt) 1983-08-25 1983-08-25 Processo para aplicacao de revestimento predominantemente em ferramentas de corte
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement
AT0908483A AT382892B (de) 1983-08-25 1983-08-25 Verfahren zum auftragen einer beschichtung
JP83503277A JPS60502110A (ja) 1983-08-25 1983-08-25 被膜塗布方法
FR8321028A FR2557595B1 (fr) 1983-08-25 1983-12-29 Procede de depot de revetements et revetements obtenus par ledit procede
CA000444620A CA1216252A (fr) 1983-08-25 1984-01-04 Methode d'enduction
SE8501521A SE454705B (sv) 1983-08-25 1985-03-27 Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum
DK159385A DK159385D0 (da) 1983-08-25 1985-04-09 Fremgangsmaade til paafoering af et overtraek paa et basisemne
FI851485A FI80296C (fi) 1983-08-25 1985-04-12 Foerfarande foer paofoerande av ett oeverdrag i synnerhet pao skaerverktyg.
NO851558A NO851558L (no) 1983-08-25 1985-04-18 Paafoering av et belegg paa skjaereverktoey.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement

Publications (1)

Publication Number Publication Date
WO1985001071A1 true WO1985001071A1 (fr) 1985-03-14

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement

Country Status (15)

Country Link
JP (1) JPS60502110A (fr)
AT (1) AT382892B (fr)
AU (1) AU559857B2 (fr)
BR (1) BR8307748A (fr)
CA (1) CA1216252A (fr)
CH (1) CH666054A5 (fr)
DE (1) DE3390523C2 (fr)
DK (1) DK159385D0 (fr)
FI (1) FI80296C (fr)
FR (1) FR2557595B1 (fr)
GB (1) GB2155044B (fr)
NL (1) NL8320315A (fr)
NO (1) NO851558L (fr)
SE (1) SE454705B (fr)
WO (1) WO1985001071A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002002844A2 (fr) * 2000-06-30 2002-01-10 Saint-Gobain Abrasives, Inc. Procede de metallisation d'un superabrasif

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE453369C (sv) * 1986-05-28 1989-10-16 Vni Instrument Inst Slitbestaendig belaeggning foer skaerverktyg och foerfarande foer paafoerande av belaeggningen
CH671238A5 (fr) * 1986-11-06 1989-08-15 Vni Instrument Inst
AT388394B (de) * 1987-01-09 1989-06-12 Vni Instrument Inst Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) * 1987-01-20 1989-05-26 Instr I Procede de fabrication d'outils de coupe
EP0404973A1 (fr) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Procédé et appareillage pour le revêtement de substrats
US5306407A (en) * 1989-06-27 1994-04-26 Hauzer Holding Bv Method and apparatus for coating substrates
PL2236641T3 (pl) 2009-03-30 2012-05-31 Oerlikon Trading Ag Sposób wstępnej obróbki podłoży w procesie PVD

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2284408A1 (fr) * 1974-09-11 1976-04-09 Engel Niels Outil de coupe en acier et son procede de realisation

Family Cites Families (6)

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Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
US3916052A (en) * 1973-05-16 1975-10-28 Airco Inc Coating of carbon-containing substrates with titanium carbide
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
DE3030149C3 (de) * 1979-08-09 1996-12-19 Mitsubishi Materials Corp Schneidplättchen und Verfahren zu seiner Herstellung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2284408A1 (fr) * 1974-09-11 1976-04-09 Engel Niels Outil de coupe en acier et son procede de realisation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Elektronnaya promyshlennost", VYPUSK 3(87), 1980 (ZNII "Elektronika", Moscow): E.F. Benua et al. "Metody povyshenia stoikosti i dolgovechnosti instrumenta i tekhnologicheskoi osnostki", pages 28, 29 *
"Fizika i. khimia obrabotki materialov", No. 4, 1979 (Moscow): V.G. Bren et al., "Izmenenie fazovogo sostava i strukturi poverkhnostnykh sloev stali pod vozdeistviem bombardirovki ionami molibdena", pages 19, 24, 25 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002002844A2 (fr) * 2000-06-30 2002-01-10 Saint-Gobain Abrasives, Inc. Procede de metallisation d'un superabrasif
WO2002002844A3 (fr) * 2000-06-30 2002-05-02 Saint Gobain Abrasives Inc Procede de metallisation d'un superabrasif

Also Published As

Publication number Publication date
FR2557595B1 (fr) 1986-07-11
FI80296B (fi) 1990-01-31
FI851485L (fi) 1985-04-12
FI80296C (fi) 1990-05-10
GB2155044B (en) 1987-11-18
NL8320315A (nl) 1985-07-01
AT382892B (de) 1987-04-27
GB2155044A (en) 1985-09-18
SE454705B (sv) 1988-05-24
DK159385A (da) 1985-04-09
SE8501521D0 (sv) 1985-03-27
AU559857B2 (en) 1987-03-19
BR8307748A (pt) 1985-07-02
SE8501521L (sv) 1985-03-27
DK159385D0 (da) 1985-04-09
FI851485A0 (fi) 1985-04-12
DE3390523C2 (de) 1990-01-18
CA1216252A (fr) 1987-01-06
AU2073583A (en) 1985-03-29
ATA908483A (de) 1986-09-15
CH666054A5 (de) 1988-06-30
FR2557595A1 (fr) 1985-07-05
NO851558L (no) 1985-04-18
JPS60502110A (ja) 1985-12-05
DE3390523T1 (de) 1985-08-08

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