SE454705B - Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum - Google Patents

Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum

Info

Publication number
SE454705B
SE454705B SE8501521A SE8501521A SE454705B SE 454705 B SE454705 B SE 454705B SE 8501521 A SE8501521 A SE 8501521A SE 8501521 A SE8501521 A SE 8501521A SE 454705 B SE454705 B SE 454705B
Authority
SE
Sweden
Prior art keywords
carbide
evaporated
coating
cutting tool
titanium
Prior art date
Application number
SE8501521A
Other languages
English (en)
Swedish (sv)
Other versions
SE8501521D0 (sv
SE8501521L (sv
Inventor
A G Gavrilov
L S Guzei
V P Zhed
E I Kurbatova
V N Panin
A K Sinelschikov
V G Padalka
Original Assignee
Vni Instrument Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vni Instrument Inst filed Critical Vni Instrument Inst
Publication of SE8501521D0 publication Critical patent/SE8501521D0/xx
Publication of SE8501521L publication Critical patent/SE8501521L/
Publication of SE454705B publication Critical patent/SE454705B/sv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Food-Manufacturing Devices (AREA)
  • Materials For Medical Uses (AREA)
SE8501521A 1983-08-25 1985-03-27 Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum SE454705B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement

Publications (3)

Publication Number Publication Date
SE8501521D0 SE8501521D0 (sv) 1985-03-27
SE8501521L SE8501521L (sv) 1985-03-27
SE454705B true SE454705B (sv) 1988-05-24

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8501521A SE454705B (sv) 1983-08-25 1985-03-27 Forfarande for paforande av en beleggning medelst ljusbagsforangning i vakuum

Country Status (15)

Country Link
JP (1) JPS60502110A (fr)
AT (1) AT382892B (fr)
AU (1) AU559857B2 (fr)
BR (1) BR8307748A (fr)
CA (1) CA1216252A (fr)
CH (1) CH666054A5 (fr)
DE (1) DE3390523C2 (fr)
DK (1) DK159385D0 (fr)
FI (1) FI80296C (fr)
FR (1) FR2557595B1 (fr)
GB (1) GB2155044B (fr)
NL (1) NL8320315A (fr)
NO (1) NO851558L (fr)
SE (1) SE454705B (fr)
WO (1) WO1985001071A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE453369C (sv) * 1986-05-28 1989-10-16 Vni Instrument Inst Slitbestaendig belaeggning foer skaerverktyg och foerfarande foer paafoerande av belaeggningen
CH671238A5 (fr) * 1986-11-06 1989-08-15 Vni Instrument Inst
AT388394B (de) * 1987-01-09 1989-06-12 Vni Instrument Inst Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) * 1987-01-20 1989-05-26 Instr I Procede de fabrication d'outils de coupe
EP0404973A1 (fr) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Procédé et appareillage pour le revêtement de substrats
US5306407A (en) * 1989-06-27 1994-04-26 Hauzer Holding Bv Method and apparatus for coating substrates
RU2247794C2 (ru) * 2000-06-30 2005-03-10 Сент-Гобэн Абразивс, Инк. Способ покрытия суперабразива металлом
PL2236641T3 (pl) 2009-03-30 2012-05-31 Oerlikon Trading Ag Sposób wstępnej obróbki podłoży w procesie PVD

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
US3916052A (en) * 1973-05-16 1975-10-28 Airco Inc Coating of carbon-containing substrates with titanium carbide
CA1041881A (fr) * 1974-09-11 1978-11-07 Niels N. Engel Produit en acier revetu et methode de fabrication connexe
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
DE3030149C3 (de) * 1979-08-09 1996-12-19 Mitsubishi Materials Corp Schneidplättchen und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
FR2557595B1 (fr) 1986-07-11
FI80296B (fi) 1990-01-31
FI851485L (fi) 1985-04-12
FI80296C (fi) 1990-05-10
GB2155044B (en) 1987-11-18
NL8320315A (nl) 1985-07-01
AT382892B (de) 1987-04-27
GB2155044A (en) 1985-09-18
DK159385A (da) 1985-04-09
SE8501521D0 (sv) 1985-03-27
AU559857B2 (en) 1987-03-19
BR8307748A (pt) 1985-07-02
SE8501521L (sv) 1985-03-27
DK159385D0 (da) 1985-04-09
FI851485A0 (fi) 1985-04-12
DE3390523C2 (de) 1990-01-18
CA1216252A (fr) 1987-01-06
AU2073583A (en) 1985-03-29
ATA908483A (de) 1986-09-15
CH666054A5 (de) 1988-06-30
FR2557595A1 (fr) 1985-07-05
WO1985001071A1 (fr) 1985-03-14
NO851558L (no) 1985-04-18
JPS60502110A (ja) 1985-12-05
DE3390523T1 (de) 1985-08-08

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