GB2155044A - Method for the deposition of a coating - Google Patents

Method for the deposition of a coating

Info

Publication number
GB2155044A
GB2155044A GB08508273A GB8508273A GB2155044A GB 2155044 A GB2155044 A GB 2155044A GB 08508273 A GB08508273 A GB 08508273A GB 8508273 A GB8508273 A GB 8508273A GB 2155044 A GB2155044 A GB 2155044A
Authority
GB
United Kingdom
Prior art keywords
carbide
substrate
forming material
coating
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08508273A
Other versions
GB2155044B (en
Inventor
Alexei Georgievich Gavrilov
Leonid Stepanovich Guzei
Viktor Petrovich Zhed
Elena Ivanovna Kurbatova
Vyacheslav Nikolaevich Panin
Andrei Karlovich Sinelschikov
Valentin Glebovich Padalka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VNI INSTRUMENT INST
Original Assignee
VNI INSTRUMENT INST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VNI INSTRUMENT INST filed Critical VNI INSTRUMENT INST
Publication of GB2155044A publication Critical patent/GB2155044A/en
Application granted granted Critical
Publication of GB2155044B publication Critical patent/GB2155044B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Food-Manufacturing Devices (AREA)
  • Materials For Medical Uses (AREA)

Abstract

The method for depositing a coating, primarily on a substrate made of carbon-containing material of a metal-cutting tool, provides for evaporating a carbide-forming material by means of an arc discharge in vacuum. Then, a working surface of the substrate is cleaned and heated by cathode bombardment, which is effected by ions of the carbide-forming material, up to the temperature at which the carburization reaction of the carbide-forming material takes place with carbon of the substrate material. Then, the ions of the carbide-forming material are condensated on the working surface of the substrate.
GB08508273A 1983-08-25 1983-08-25 Method for the deposition of a coating Expired GB2155044B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (en) 1983-08-25 1983-08-25 Method for the deposition of a coating

Publications (2)

Publication Number Publication Date
GB2155044A true GB2155044A (en) 1985-09-18
GB2155044B GB2155044B (en) 1987-11-18

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08508273A Expired GB2155044B (en) 1983-08-25 1983-08-25 Method for the deposition of a coating

Country Status (15)

Country Link
JP (1) JPS60502110A (en)
AT (1) AT382892B (en)
AU (1) AU559857B2 (en)
BR (1) BR8307748A (en)
CA (1) CA1216252A (en)
CH (1) CH666054A5 (en)
DE (1) DE3390523C2 (en)
DK (1) DK159385D0 (en)
FI (1) FI80296C (en)
FR (1) FR2557595B1 (en)
GB (1) GB2155044B (en)
NL (1) NL8320315A (en)
NO (1) NO851558L (en)
SE (1) SE454705B (en)
WO (1) WO1985001071A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2190925A (en) * 1986-05-28 1987-12-02 Vni Instrument Inst Wear-resistant coating for a cutting tool and method of applying same
GB2199847A (en) * 1987-01-09 1988-07-20 Vni Instrument Inst Method for production of cutting tools
EP0404973A1 (en) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Process and apparatus for coating substrates
WO1991000374A1 (en) * 1989-06-27 1991-01-10 Hauzer Holding Bv Process and device for coating substrates

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH671238A5 (en) * 1986-11-06 1989-08-15 Vni Instrument Inst
FR2609726B1 (en) * 1987-01-20 1989-05-26 Instr I PROCESS FOR MANUFACTURING CUTTING TOOLS
RU2247794C2 (en) * 2000-06-30 2005-03-10 Сент-Гобэн Абразивс, Инк. Method for coating of superabrasive with metal
PT2236641E (en) * 2009-03-30 2012-01-06 Oerlikon Trading Ag Method for pre-treating substrates for pvd procedures

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2284408A1 (en) * 1974-09-11 1976-04-09 Engel Niels Cutting tools such as saw-blade teeth - ion-plated with hard metal converted to carbide, and teeth then pulse-hardened

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
US3916052A (en) * 1973-05-16 1975-10-28 Airco Inc Coating of carbon-containing substrates with titanium carbide
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
ES494779A0 (en) * 1979-08-09 1981-03-16 Mitsubishi Metal Corp PROCEDURE FOR THE MANUFACTURE OF BLADES EQUIPPED WITH COATING, FOR CUTTING TOOLS

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2284408A1 (en) * 1974-09-11 1976-04-09 Engel Niels Cutting tools such as saw-blade teeth - ion-plated with hard metal converted to carbide, and teeth then pulse-hardened

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
}ELEKTRONNAYA PROMYSHLENNOST}, VYPUSK 3(87), 1980 (ZNII }ELEKTRONIKA}, MOSCOW): PAGESS 28, 29 *
}FIZIKI I. KHIMIA OBRABOTKI MATERIALOV}, NO. 4, 1979 (MOSCOW) PAGES 19, 24, 25 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2190925A (en) * 1986-05-28 1987-12-02 Vni Instrument Inst Wear-resistant coating for a cutting tool and method of applying same
GB2190925B (en) * 1986-05-28 1990-12-05 Vni Instrument Inst Wear-resistant coating for cutting tools and method of applying same
GB2199847A (en) * 1987-01-09 1988-07-20 Vni Instrument Inst Method for production of cutting tools
GB2199847B (en) * 1987-01-09 1991-08-07 Vni Instrument Inst Method for production of cutting tools
EP0404973A1 (en) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Process and apparatus for coating substrates
WO1991000374A1 (en) * 1989-06-27 1991-01-10 Hauzer Holding Bv Process and device for coating substrates

Also Published As

Publication number Publication date
FR2557595A1 (en) 1985-07-05
SE8501521D0 (en) 1985-03-27
AU2073583A (en) 1985-03-29
SE454705B (en) 1988-05-24
JPS60502110A (en) 1985-12-05
NL8320315A (en) 1985-07-01
ATA908483A (en) 1986-09-15
GB2155044B (en) 1987-11-18
DE3390523C2 (en) 1990-01-18
NO851558L (en) 1985-04-18
DE3390523T1 (en) 1985-08-08
FI851485L (en) 1985-04-12
FR2557595B1 (en) 1986-07-11
FI80296B (en) 1990-01-31
CA1216252A (en) 1987-01-06
CH666054A5 (en) 1988-06-30
AU559857B2 (en) 1987-03-19
DK159385A (en) 1985-04-09
BR8307748A (en) 1985-07-02
AT382892B (en) 1987-04-27
WO1985001071A1 (en) 1985-03-14
FI851485A0 (en) 1985-04-12
SE8501521L (en) 1985-03-27
FI80296C (en) 1990-05-10
DK159385D0 (en) 1985-04-09

Similar Documents

Publication Publication Date Title
DE3480414D1 (en) Decorative carbon coating and method
DE3573806D1 (en) Surface treatment process
JPS5625960A (en) Surface-coated high speed steel material for cutting tool
EP0328257A3 (en) Magnetron sputtering apparatus and process
EP0838831A3 (en) Electron emissive film and method
JPS6483656A (en) Method and vacuum painting machine for applying film to base layer
GB2361938B (en) Soil-resistant coating for glass surfaces
EP1424405A3 (en) Method and apparatus for fabricating coated substrates
MX9304930A (en) METHOD OF PREPARATION OF SURFACE AND DEPOSITION FOR TITANIUM NITRIDE ON CARBONACEOUS MATERIALS.
FR2464309B1 (en) PROCESS FOR PRODUCING GOLD-COLORED COATINGS
GB2155044A (en) Method for the deposition of a coating
IL90778A0 (en) Production of a protective film on a magnesium based substrate
EP0269112A3 (en) Method of forming a thin crystalline metal film
US6136167A (en) Portable apparatus for thin deposition
JPS5457477A (en) Throw away tip of coated tool steel
EP0095384A3 (en) Vacuum deposition apparatus
CA2289873A1 (en) A method and an apparatus for plasma treating the surface of substrates
SE8604842D0 (en) PROCESS FOR DEPOSIT OF A WEAR-RESISTANT COATING ONTO A CUTTING TOOL FROM A CARBON CONTAINING MATERIAL
JPS5521553A (en) Device for fabricating film
Brossa DEVELOPMENTS AND APPLICATIONS OF CVD CERAMIC COATINGS.
JPS5742331A (en) Manufacture for deposited film
JPS6417867A (en) Manufacture of carbon and boron nitride
Radzimski et al. Self-sputtering with d. c. magnetron source: target material consideration
JPS55107775A (en) Sputtering target
Aksenov Coatings Produced by Vacuum Condensation of Plasma Streams(Method of Condensation With Ionic Bombardment)

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19920825