CH666054A5 - Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. - Google Patents

Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. Download PDF

Info

Publication number
CH666054A5
CH666054A5 CH1660/85A CH166085A CH666054A5 CH 666054 A5 CH666054 A5 CH 666054A5 CH 1660/85 A CH1660/85 A CH 1660/85A CH 166085 A CH166085 A CH 166085A CH 666054 A5 CH666054 A5 CH 666054A5
Authority
CH
Switzerland
Prior art keywords
carbide
evaporating
coating
titanium
forming substance
Prior art date
Application number
CH1660/85A
Other languages
German (de)
English (en)
Inventor
Alexei Georgievich Gavrilov
Leonid Stepanovich Guzei
Viktor Petrovich Zhed
Elena Ivanovna Kurbatova
Vyacheslav Nikolaevich Panin
Andrei Karlovich Sinelschikov
Valentin Glebovich Padalka
Original Assignee
Vni Instrument Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vni Instrument Inst filed Critical Vni Instrument Inst
Publication of CH666054A5 publication Critical patent/CH666054A5/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Food-Manufacturing Devices (AREA)
  • Materials For Medical Uses (AREA)
CH1660/85A 1983-08-25 1983-08-25 Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges. CH666054A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (fr) 1983-08-25 1983-08-25 Procede de depot d'un revetement

Publications (1)

Publication Number Publication Date
CH666054A5 true CH666054A5 (de) 1988-06-30

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1660/85A CH666054A5 (de) 1983-08-25 1983-08-25 Verfahren zum beschichten eines werkzeuges, insbesondere eines spanenden werkzeuges.

Country Status (15)

Country Link
JP (1) JPS60502110A (fr)
AT (1) AT382892B (fr)
AU (1) AU559857B2 (fr)
BR (1) BR8307748A (fr)
CA (1) CA1216252A (fr)
CH (1) CH666054A5 (fr)
DE (1) DE3390523C2 (fr)
DK (1) DK159385D0 (fr)
FI (1) FI80296C (fr)
FR (1) FR2557595B1 (fr)
GB (1) GB2155044B (fr)
NL (1) NL8320315A (fr)
NO (1) NO851558L (fr)
SE (1) SE454705B (fr)
WO (1) WO1985001071A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3941918A1 (de) * 1989-06-27 1991-01-03 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH669347A5 (fr) * 1986-05-28 1989-03-15 Vni Instrument Inst
CH671238A5 (fr) * 1986-11-06 1989-08-15 Vni Instrument Inst
AT388394B (de) * 1987-01-09 1989-06-12 Vni Instrument Inst Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) * 1987-01-20 1989-05-26 Instr I Procede de fabrication d'outils de coupe
EP0439561B1 (fr) * 1989-06-27 1994-02-16 Hauzer Holding B.V. Procede et dispositif d'enduction de substrats
WO2002002844A2 (fr) * 2000-06-30 2002-01-10 Saint-Gobain Abrasives, Inc. Procede de metallisation d'un superabrasif
ATE527390T1 (de) 2009-03-30 2011-10-15 Oerlikon Trading Ag Verfahren zur vorbehandlung von substraten fuer pvd verfahren

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
US3916052A (en) * 1973-05-16 1975-10-28 Airco Inc Coating of carbon-containing substrates with titanium carbide
CA1041881A (fr) * 1974-09-11 1978-11-07 Niels N. Engel Produit en acier revetu et methode de fabrication connexe
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
ES494779A0 (es) * 1979-08-09 1981-03-16 Mitsubishi Metal Corp Procedimiento para la fabricacion de cuchillas dotadas de recubrimiento,para herramientas de corte

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3941918A1 (de) * 1989-06-27 1991-01-03 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten

Also Published As

Publication number Publication date
SE8501521D0 (sv) 1985-03-27
FI851485A0 (fi) 1985-04-12
NL8320315A (nl) 1985-07-01
FR2557595B1 (fr) 1986-07-11
WO1985001071A1 (fr) 1985-03-14
DK159385A (da) 1985-04-09
AU2073583A (en) 1985-03-29
BR8307748A (pt) 1985-07-02
FI80296C (fi) 1990-05-10
DE3390523C2 (de) 1990-01-18
FR2557595A1 (fr) 1985-07-05
AT382892B (de) 1987-04-27
JPS60502110A (ja) 1985-12-05
NO851558L (no) 1985-04-18
FI851485L (fi) 1985-04-12
AU559857B2 (en) 1987-03-19
GB2155044A (en) 1985-09-18
DE3390523T1 (de) 1985-08-08
FI80296B (fi) 1990-01-31
SE8501521L (sv) 1985-03-27
ATA908483A (de) 1986-09-15
GB2155044B (en) 1987-11-18
CA1216252A (fr) 1987-01-06
SE454705B (sv) 1988-05-24
DK159385D0 (da) 1985-04-09

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