ATA908483A - Verfahren zum auftragen einer beschichtung - Google Patents

Verfahren zum auftragen einer beschichtung

Info

Publication number
ATA908483A
ATA908483A AT0908483A AT908483A ATA908483A AT A908483 A ATA908483 A AT A908483A AT 0908483 A AT0908483 A AT 0908483A AT 908483 A AT908483 A AT 908483A AT A908483 A ATA908483 A AT A908483A
Authority
AT
Austria
Prior art keywords
coating
applying
Prior art date
Application number
AT0908483A
Other languages
English (en)
Other versions
AT382892B (de
Inventor
Alexei Georgievich Gavrilov
Leonid Stepanovich Guzei
Viktor Petrovich Zhed
Elena Ivanovna Kurbatova
Vyacheslav Nikolaevich Panin
Andrei Karlovich Sinelschikov
Valentin Glebovich Padalka
Original Assignee
Vni Instrument Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vni Instrument Inst filed Critical Vni Instrument Inst
Publication of ATA908483A publication Critical patent/ATA908483A/de
Application granted granted Critical
Publication of AT382892B publication Critical patent/AT382892B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
AT0908483A 1983-08-25 1983-08-25 Verfahren zum auftragen einer beschichtung AT382892B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1983/000030 WO1985001071A1 (en) 1983-08-25 1983-08-25 Method for the deposition of a coating

Publications (2)

Publication Number Publication Date
ATA908483A true ATA908483A (de) 1986-09-15
AT382892B AT382892B (de) 1987-04-27

Family

ID=21616808

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0908483A AT382892B (de) 1983-08-25 1983-08-25 Verfahren zum auftragen einer beschichtung

Country Status (15)

Country Link
JP (1) JPS60502110A (de)
AT (1) AT382892B (de)
AU (1) AU559857B2 (de)
BR (1) BR8307748A (de)
CA (1) CA1216252A (de)
CH (1) CH666054A5 (de)
DE (1) DE3390523C2 (de)
DK (1) DK159385D0 (de)
FI (1) FI80296C (de)
FR (1) FR2557595B1 (de)
GB (1) GB2155044B (de)
NL (1) NL8320315A (de)
NO (1) NO851558L (de)
SE (1) SE454705B (de)
WO (1) WO1985001071A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE453369C (sv) * 1986-05-28 1989-08-08 Vni Instrument Inst Slitbestaendig belaeggning foer skaerverktyg och foerfarande foer paafoerande av belaeggningen
CH671238A5 (de) * 1986-11-06 1989-08-15 Vni Instrument Inst
AT388394B (de) * 1987-01-09 1989-06-12 Vni Instrument Inst Verfahren zur herstellung von schneidwerkzeug
FR2609726B1 (fr) * 1987-01-20 1989-05-26 Instr I Procede de fabrication d'outils de coupe
WO1991000374A1 (de) * 1989-06-27 1991-01-10 Hauzer Holding Bv Verfahren und vorrichtung zur beschichtung von substraten
EP0404973A1 (de) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Verfahren und Vorrichtung zur Beschichtung von Substraten
KR100777148B1 (ko) * 2000-06-30 2007-11-19 생-고뱅 어브레이시브즈, 인코포레이티드 초연삭제에 금속으로 코팅하는 방법
EP2236641B1 (de) 2009-03-30 2011-10-05 Oerlikon Trading AG, Trübbach Verfahren zur Vorbehandlung von Substraten fuer PVD Verfahren

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428546A (en) * 1966-09-27 1969-02-18 Atomic Energy Commission Apparatus for vacuum deposition on a negatively biased substrate
US3882579A (en) * 1972-03-13 1975-05-13 Granville Phillips Co Anti-wear thin film coatings and method for making same
US3912826A (en) * 1972-08-21 1975-10-14 Airco Inc Method of physical vapor deposition
US3916052A (en) * 1973-05-16 1975-10-28 Airco Inc Coating of carbon-containing substrates with titanium carbide
CA1041881A (en) * 1974-09-11 1978-11-07 Niels N. Engel Coated steel product and process of producing the same
JPS5462183A (en) * 1977-10-26 1979-05-18 Seiko Epson Corp Outside parts for pocket watch
ES494779A0 (es) * 1979-08-09 1981-03-16 Mitsubishi Metal Corp Procedimiento para la fabricacion de cuchillas dotadas de recubrimiento,para herramientas de corte

Also Published As

Publication number Publication date
CA1216252A (en) 1987-01-06
AU559857B2 (en) 1987-03-19
FR2557595B1 (fr) 1986-07-11
DE3390523T1 (de) 1985-08-08
DE3390523C2 (de) 1990-01-18
FI80296B (fi) 1990-01-31
FI80296C (fi) 1990-05-10
CH666054A5 (de) 1988-06-30
WO1985001071A1 (en) 1985-03-14
JPS60502110A (ja) 1985-12-05
NL8320315A (nl) 1985-07-01
SE8501521L (sv) 1985-03-27
GB2155044B (en) 1987-11-18
FR2557595A1 (fr) 1985-07-05
NO851558L (no) 1985-04-18
FI851485L (fi) 1985-04-12
GB2155044A (en) 1985-09-18
AU2073583A (en) 1985-03-29
DK159385A (da) 1985-04-09
SE454705B (sv) 1988-05-24
AT382892B (de) 1987-04-27
DK159385D0 (da) 1985-04-09
BR8307748A (pt) 1985-07-02
FI851485A0 (fi) 1985-04-12
SE8501521D0 (sv) 1985-03-27

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee