US7367241B2 - Differential pressure type flowmeter and differential pressure type flow controller - Google Patents

Differential pressure type flowmeter and differential pressure type flow controller Download PDF

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US7367241B2
US7367241B2 US10/563,226 US56322604A US7367241B2 US 7367241 B2 US7367241 B2 US 7367241B2 US 56322604 A US56322604 A US 56322604A US 7367241 B2 US7367241 B2 US 7367241B2
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flow rate
fluid
orifice
differential pressure
pressure type
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US20060236781A1 (en
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Tadahiro Ohmi
Kazuhiko Sugiyama
Tomio Uno
Nobukazu Ikeda
Kouji Nishino
Osamu Nakamura
Ryousuke Dohi
Atsushi Matsumoto
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Fujikin Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Definitions

  • the present invention is concerned with improvements in or relating to a differential pressure type flowmeter and differential pressure type flow controller (together hereinafter called a differential pressure type flowmeter and the like) employed for semiconductor manufacturing facilities, at chemical plants, food-products processing plants and the like.
  • the invention may be manufactured at a low cost and with a structural simplicity, and used in a state of so-called inline, and at the same time, make it possible that a flow rate of a fluid either under of criticality or non-criticality is measured or controlled with accuracy and in real time even in a small flow quantity range under a vacuum.
  • a differential pressure flowmeter and the like such as a mass flow type flowmeter (a thermal type mass flow meter) and the like and a buildup type flowmeter and the like have been widely used to measure or control a flow rate of process gases, raw material gases and the like.
  • a differential pressure type flowmeter and the like for which an orifice and a manometer are employed demonstrates excellent effects such as having nearly no restraints of the type of gases subject to control, being usable in a state of incline, and also measuring and controlling a flow rate being able to be performed in real time.
  • this type of a differential pressure type flowmeter and the like uses an equation for a flow rate computation derived from Bernoulli's theorem with the assumption that the fluid is non-compressible, and then the flow rate of the fluid is computed by giving some corrections to it. Therefore, if large pressure changes of the fluid arise (that is, when approximations that the fluid is non-compressible break), a substantial drop in accuracy of measuring and controlling a flow rate cannot be avoided, thus resulting in a failure of accurate flow rate measurements and controls.
  • Critical conditions for the velocity of a fluid to reach the velocity of sound is given by a critical value r c of a pressure ratio P 2 /P 1 .
  • n Cp/Cv where Cp is a constant pressure specific heat and Cv is a constant volume specific heat.
  • Cp a constant pressure specific heat
  • Cv a constant volume specific heat.
  • a proportional constant K is given by SC/T 1/2 and computed from conditions of substance and absolute temperature T.
  • P 1 designates a pressure on the upstream side of an orifice and P 2 a pressure on the downstream side of an orifice.
  • kPaA kilo Pascal Absolute pressure
  • the values of the aforementioned 2 parameters m and n have a dependence on the range of a flow rate to be measured and the type of a gas.
  • FIG. 14 is a block diagram of an improved pressure flow controller for which the aforementioned empirical flow rate equation Qc′. This was previously disclosed by inventors of the present invention in the TOKU-GAN No. 2001-399433.
  • the controller in the FIG. 14 is constituted as a flow controller. However, it is easily understood that it can be turned to be a differential pressure type flowmeter by eliminating a control valve 21 , a valve driving part 22 , and a flow rate comparison part 23 e.
  • 20 designates an orifice
  • 21 designates a control valve
  • 22 designates a valve driving part
  • 23 designates a control circuit
  • 23 a designates a pressure ratio computation part
  • 23 b designates a pressure ration computation part
  • 23 c designates a flow rate computation part
  • 23 d designates a flow rate computation part
  • 23 e designates a flow rate comparison part
  • P 1 designates a fluid pressure detector on the upstream side of an orifice
  • P 2 designates a fluid pressure detector on the downstream side of an orifice
  • T designates a fluid temperature detector
  • Qs designates a flow rate setting value signal
  • ⁇ Q designates a flow rate difference signal
  • Qc′ designates a flow rate computation value.
  • a flow rate difference ⁇ Q between a set flow rate Qs and a computed flow rate Qc is computed with a flow rate comparison part 23 e to operate a valve driving part 22 to control valve 21 so that the flow rate difference ⁇ Q reaches zero.
  • a flow rate comparison part 23 e a control valve 21 and a valve driving part 22 can be eliminated.
  • Curve A in FIG. 15 shows flow rate measurements or flow rate control characteristics with an improved pressure type flowmeter and the like
  • Patent Literature 1 TOKU-KOU-SHO No. 59-19365 Public Bulletin
  • Patent Literature 2 TOKU-KOU-SHO No. 59-19366 Public Bulletin
  • Patent Literature 3 TOKU-KAI-HEI No. 10-55218 Public Bulletin
  • a measurement error (% SP or %FS) becomes comparatively larger to the reference set flow rate when a pressure P 2 on the downstream side of an orifice becomes vacuum of less than approximately 200 Torr, thus resulting in occurrence of difficulties in practical use.
  • the present invention further modifies the second embodiment so that, by installing, with a control computation circuit, a pressure ratio computation circuit to compute the ratio of a fluid pressure P 1 on the upstream side of an orifice and a fluid pressure P 2 on the downstream side of an orifice, a critical condition judgment circuit to judge a state of the fluid by comparing the aforementioned computed pressure ratio and a fluid's critical pressure ratio, and a No.
  • the present invention is fundamentally so constituted that flow rate measurements can be performed with high accuracy over the wide flow rate range by combining a differential pressure type flowmeter for measuring a flow rate range of 100%-10% of the maximum flow rate range and a differential pressure type flowmeter for measuring a flow rate range of 10%-1% of the maximum flow rate range and by switching a fluid to be measured in accordance with the aforementioned flow rate ranges using a switching valve, to supply the fluid to the aforementioned differential pressure type flowmeters.
  • the present invention is fundamentally so constituted by forming it with a valve body 12 provided with a fluid inlet a, a fluid outlet b, a mounting hole 17 a for the No. 1 switching valve 10 , a mounting hole 17 b for the No.2 switching valve 11 , a mounting hole 18 a for a fluid pressure detector 2 on the upstream side of an orifice, a mounting hole 18 b for a fluid pressure detector 3 on the downstream side of an orifice, a mounting hole for a fluid temperature detector 4 on the upstream side of an orifice, fluid passages 16 a , 16 b and 16 e for directly passing through a fluid inlet a, the undersides of a mounting hole 17 a for the No.1 switching valve 10 , a mounting hole 18 a for a fluid pressure detector 2 on the upstream side of an orifice and a mounting hole 17 b for the No.2 switching valve 11 which are made in the interior of the aforementioned valve body 12 ,
  • the present invention further modifies the seventh embodiment so that a flow rate range up to 100%-10% of the maximum flow rate is measured by closing the No.1 switching valve 10 and opening the No.2 switching valve 11 , while a flow rate range up to 10%-1% of the maximum flow rate is measured by opening the No1 switching valve 10 and closing the No.2 switching valve 11 .
  • the present invention further modifies the fourth or seventh embodiments so that either one of the No.1 switching valve 10 or No.2 switching valve 11 is made to be a normal/close type valve and the other a normal/open type valve, and a operating fluid is supplied from one control electromagnetic valve Mv to driving cylinders 10 a and 10 b of both switching valves.
  • the present invention further modifies the seventh or eighth embodiments so that a pressure detector 2 to detect a pressure on the upstream side of an orifice, a pressure detector 3 to detect a pressure on the down stream side of an orifice, and a temperature detector 4 to detect a temperature on the upstream side of an orifice are made sharable with both differential pressure type flowmeters.
  • the structure of a differential pressure type flowmeter and the like is remarkably simplified, and it is so constituted that a flow rate computation is performed by using a novel empirical flow rate computation equation which makes it possible to obtain a computation flow rate value corresponding with the measured value with high accuracy, thus allowing the flowmeter and the like to be manufactured at low cost, and moreover, they take an inline form, and can be used without constraints of fitting positions, and a control flow rate is not influenced nearly at all by pressure changes, enabling highly accurate flow rate measurements or flow rate control in real time.
  • a control computation circuit is equipped with a correction data memory circuit for pressure changes, and a correction circuit for a computation flow rate, thus enabling easy correction even when pressure changes arise on the secondary side of an orifice. Therefore, highly accurate flow rate measurements or flow rate control can be achieved virtually without being influenced by pressure changes even a pressure P 2 on the secondary side of an orifice is under a vacuum (a low pressure of less than 50 Torr).
  • a differential pressure type flowmeter for a small flow quantity and a differential pressure type flowmeter for a large flow quantity are organically and integrally assembled. Therefore, highly accurate flow rate measurements with errors (% SP) of less than 1 (% SP) can be performed continuously over a wide flow rate range from the rated flow rate (100%) to a small flow quantity (1%) or approximately 1% of the rated flow rate, by both differential pressure type flowmeters being switched.
  • control system can be further simplified by making the switching operation, for both differential pressure type flowmeter for a small quantity and differential pressure type flowmeter for a large quantity, automatic with a single-system control signal Sc.
  • the present invention achieves excellent, practical effects that all types of gases are measured or controlled over the wide flow rate range with high accuracy even when a gas of less than 100 Torr is used although the differential pressure type flowmeter and the like are structured simply and at low cost.
  • FIG. 1 is a basic block diagram of a differential pressure flowmeter according to the first embodiment of the present invention.
  • FIG. 2 is a diagram to show error characteristics of a differential pressure type flowmeter in FIG. 1 .
  • FIG. 3 is a diagram to show the relationships of “a flow rate, the secondary side pressure and error” in the event that the pipe resistance on the secondary side is changed at the time when a pressure P 2 on the downstream side of an orifice is the vacuum.
  • FIG. 4 shows a measurement circuit utilizes to obtain data in FIG. 3 .
  • FIG. 5 is a basic block diagram of a differential pressure flowmeter according to the second embodiment of the present invention.
  • FIG. 6 is a basic block diagram of a differential pressure flowmeter according to the third embodiment of the present invention.
  • FIG. 7 is a system diagram to show the whole configuration of a differential pressure type flowmeter according to the fourth embodiment of the present invention.
  • FIG. 8 is a cross-sectional schematic diagram of a major part of a differential pressure type flowmeter according to the fourth embodiment of the present invention.
  • FIG. 9 is an explanatory drawing of a switching operation system of a differential pressure type flowmeter for which a normal open type switching valve and a normal close type switching valve are employed according to the present invention.
  • FIG. 10 is a basic block diagram of the first embodiment of a differential pressure type flow controller according to the present invention.
  • FIG. 11 is a basic block diagram of the second embodiment of a differential pressure type flow controller according to the present invention.
  • FIG. 12 is a basic block diagram of the third embodiment of a differential pressure type flow controller according to the present invention.
  • FIG. 13 is a basic block diagram of the fourth embodiment of a differential pressure type flow controller according to the present invention.
  • FIG. 14 is a block diagram of an improved pressure type flow controller disclosed previously.
  • FIG. 15 is a diagram to show flow characteristics of an improved pressure type flow controller disclosed previously.
  • SF designates a Standard flow controller (a pressure type flow controller)
  • A designates a Differential pressure type flowmeter
  • V 21 -V 23 designate a Control valve on the secondary side
  • VP designates a Vacuum pump
  • a designates a Gas inlet
  • 1 ′ designates an Orifice for a small quantity
  • 5 c designates a Flow rate correction computation circuit
  • 5 f designates a Second flow rate computation circuit for computing a flow rate under critical conditions
  • 5 g designates a Comparison circuit for a set flow rate and computed flow rate
  • 17 b designates a Mounting hole for the No.2 switching valve
  • 18 b designates a Mounting hole for a pressure detector on the downstream side of an orifice
  • Mv designates a Control electromagnetic valve
  • FIG. 1 is a basic block diagram of a differential pressure type flowmeter according to the first embodiment of the present invention.
  • the differential pressure type flowmeter comprises an orifice 1 , an absolute pressure type pressure detector 2 on the upstream side of an orifice, an absolute pressure type pressure detector 3 on the downstream side of an orifice, a gas absolute temperature detector 4 on the upstream side of an orifice, a control computation circuit 5 , an output terminal 6 , an input terminal 7 , and the like.
  • 8 designates a gas supply facility and 9 a gas use facility (a chamber).
  • a gas flow rate Q passing through an orifice 1 under differential pressure conditions is computed by an empirical flow rate equation as the below-stated equation (1), and the computed value is outputted to the outside through the output terminal 6 .
  • Q C 1 ⁇ P 1 / ⁇ T ⁇ (( P 2 /P 1 ) m ⁇ ( P 2 /P 1 ) n ) 1/2 (1)
  • the aforementioned empirical flow rate equation Q is what is newly introduced by inventors of the present invention based on the following flow rate equation (2) based on the previously known continuous equation.
  • ⁇ designates a gas density, ⁇ a specific ratio of a gas, P 1 a pressure on the upstream side of an orifice, P 2 a pressure on the downstream side of an orifice, T a gas temperature, R a gas constant, and S a cross-sectional area of an orifice.
  • the equation (2) has been publicly known.
  • Q designates a volume flow rate (SCCM) converted to a standard state
  • C a coefficient including a cross-sectional area S of an orifice 1
  • P 1 an absolute pressure (Pa) on the upstream side of an orifice
  • P 2 an absolute pressure (Pa) on the downstream side of an orifice
  • T an absolute temperature (K) on the upstream side of an orifice.
  • FIG. 2 is the measured values to show relationships of a set flow rate value (%), pressure P 1 and P 2 (Torr) and error (% SP) of a differential pressure type flowmeter (100% set value 2000 sccm) in FIG. 1 .
  • FIG. 3 is a diagram to show relationships of a pressure P 2 (Torr) on the secondary side of an orifice, a set flow rate (%), errors (% SP) and piping conditions on the secondary side of a differential pressure type flowmeter according to the present invention, where 9 a is in the event that a set flow rate (%) is 100 sccm, 9 b 200 sccm, 9 c 400 sccm, 9 d 600 sccm, 9 g 1200 sccm, 9 j 1800 scm, and 9 k 2000 sccm (100%) respectively, The maximum flow rate (100%) of a differential pressure type flowmeter employed herewith is 2000 sccm.
  • FIG. 4 illustrates a measurement circuit to obtain error correction coefficients in FIG. 3 , for which a pressure type flow controller is employed for a standard flow controller SF, and a control valve V 2 is removably secured to change piping conditions on the secondary side, to adjust the flow rates of a supply gas (N 2 to be adjusted at 11 points) at an interval of 200 sccm over the flow rate range of 100 sccm-2000 sccm by using the standard flow controller SF, to measure P 1 , P 2 and Q of a differential pressure type flowmeter A, and also to measure a pressure P 2 on the downstream side of an orifice each time adjustment is made.
  • a supply gas N 2 to be adjusted at 11 points
  • Adjustments of the secondary side pipe resistance were made on 4 cases, that is, when no control valve V 2 is used (or when a differential pressure type flowmeter A is directly connected to a vacuum pump with an approximately 100 mm long pipe of an internal diameter of 4.35 mm ⁇ ), when a control valve V 2 with the Cv value of 0.3 is used, when a control valve V 2 with the Cv value of 0.2 is used, and when a control valve V 2 with the Cv value of 0.1 is used.
  • flow rates were measured at 11 points between 100 scm-2000 sccm.
  • a supply pressure p 1 to a pressure type flow controller was approximately 300 kPaG, and the secondary side of an orifice of a differential pressure type flowmeter A was continuously evacuated by a vacuum pump Vp (300 liters/min and the maximum pressure achieved 1.2 ⁇ 10 ⁇ 2 Torr).
  • a differential pressure type flowmeter in use with 2000 sccm displays 2000 sccm for the measured value, and a pressure P 2 on the downstream side of an orifice is 60 Torr, it means that the measured value (2000 sccm) includes an error (% SP) of +2%. Then, the measured value of 2000 sccm is corrected to 1960 sccm by correcting for +2%.
  • FIG. 5 illustrates a basic constitution of the present invention for which the aforementioned correction means is employed. That is, a control computation circuits 5 of a differential pressure type flowmeter in FIG. 1 showing the first embodiment is equipped with a correction data memory circuit 5 b and a flow rate value correction computation circuit 5 c.
  • a pressure P 2 on the downstream side of an orifice is referred to a flow rate value Q computed by using a flow rate empirical equation with the aforementioned flow rate computation circuit 5 a , to draw out the error (% SP) with a pressure P 2 from the correction data memory circuit 5 b , thus eliminating much of the error (% SP) from the aforementioned flow rate computation value Q and outputting, to an output terminal 6 to the outside, a flow rate value Q′ close to vicinity of the value after correcting with the correction computation circuit 5 c.
  • FIG. 6 illustrates the third embodiment of the present invention.
  • a pressure ratio computation circuit 5 d a critical conditions judgment circuit 5 e , and a flow rate computation circuit 5 f for critical conditions are added to a control computation circuit 5 in FIG. 5 .
  • the ratio ( ⁇ ) of a pressure P 1 on the upstream side of an orifice versus a pressure P 2 on the downstream side of an orifice is determined, and a pressure ratio ( ⁇ ) and a critical pressure ration ( ⁇ c) are compared.
  • a computation value Q is corrected with the flow rate correction computation circuit 5 c
  • a connected flow rate value Q′ is outputted from the output terminal 6 .
  • the flow rate range of 100-10(%) is the limit to make possible retraining errors of flow rate measurement values to the range (for example, less than 1 (% SP)) bearable for practical use.
  • the flow rate is less than 10 (%). It becomes difficult to hold errors to less than 1 (% SP) even with a correction being performed.
  • FIG. 7 is a whole block diagram of a differential pressure type flowmeter according to the fourth embodiment.
  • 10 designates the No.1 switching valve (NC type), 11 the No.2 switching valve (NC type), a a gas inlet side, b a gas outlet side, 1 ′ the No.1 orifice (for a small quantity), 1 ′′ the No.2 orifice (for a large quantity), 5 ′ the No.1 control computation circuit, and 5 ′′ the No.2 control computation circuit.
  • a differential pressure type flow controller for a small flow quantity side i.e., a flow rate range of 10-100 sccm
  • a differential pressure type flow controller for a large flow quantity side i.e., a flow rate range of 100-1000 sccm
  • highly accurate measurements of a flow rate can be achieved over the wide flow range of 1000 sccm(100%)-10 sccm (1%) with errors of less than 1 (% SP) by using both differential pressure type flow controllers.
  • FIG. 8 is a cross-sectional schematic diagram of a major part of a differential pressure type flowmeter according to the fourth embodiment of the present invention. It is to be noted that the No.1 and No.2 control computation circuits 5 ′ and 5 ′′ and the like are omitted herewith.
  • 12 designates a body, 13 a and 13 b seals, 14 a a mounting bolt for an absolute type pressure detector 2 on the upstream side of an orifice, 14 b a mounting bolt for an absolute type pressure detector 3 on the downstream side of an orifice, 15 a and 15 b diaphragm mechanisms, and 11 a and 11 b driving cylinders.
  • a body 12 made of stainless steel is formed by hermetically assembling a gas inlet element 12 a , a gas element 12 b , the No.1 body element 12 c and the No.2 body element 12 d.
  • a mounting hole for a gas temperature detector 4 on the upstream side of an orifice is formed on the No.1 body element 12 c.
  • fluid passages 16 a , 16 b and 16 e for communication of a fluid inlet a, a fluid outlet b, the underside of a mounting hole 17 a for the No.1 switching valve 10 , the underside of a mounting hole 18 b for a pressure detector 2 on the upstream side of an orifice and the underside of a mounting hole 17 b for the No.2 switching valve 11 ; a fluid passage 16 f for communication of the undersides of a mounting hole 17 a and a mounting hole 17 b ; a fluid passage 16 c for communication of the undersides of a mounting hole 17 b and a mounting hole 18 b ; and a fluid passage 16 d for communication of the underside of a mounting hole 18 b and a fluid outlet b.
  • a fluid passage 16 there is made an orifice 1 ′ for a small flow quantity, and on a fluid passage 16 a (or 16 b ), there is made an orifice 1 ′′ for a large flow quantity.
  • an orifice 1 ′ and 1 ′′ there are arranged orifices 1 ′ and 1 ′′ on the contacting faces of both body elements 12 c and 12 d.
  • valve seats for communication of fluid passages 16 e and 16 d formed on the undersides of the aforementioned mounting holes 17 a and 17 b are made to open/close with valve mechanisms 15 a and 15 b for the No.1 switching valve 10 and No.2 switching valve 11 .
  • opening and closing valve seats opening and closing are performed between the passage 16 e and passage 16 f and also between the passage 16 c and passage 16 b.
  • a passage 16 c communicates between a mounting hole 17 b and a mounting hole 18 b all the time.
  • the No.1 switching valve 10 is made to close, while the No.2 switching valve 11 is made to open so that a gas flowed in from a gas inlet a is flowed out from a gas outlet through a passage 16 a , an orifice 1 ′′, a passage 16 b , a passage 16 c and a passage 16 d .
  • a flow rate computation is performed with the No.2 control computation circuit 5 ′′ (not illustrated) to be outputted to appropriate points.
  • the No.1 switching valve 10 is made open while the No.2 switching valve 11 is made close so that a gas flows out from a gas outlet b through a passage 16 a , a passage 16 e , an orifice 1 ′ for a small flow quantity, a passage 16 f , a passage 16 c and a passage 16 d .
  • a flow rate computation is performed with the No.1 control computation circuit 5 ′, to be outputted to appropriate points just same as in the case of measurements for a large flow quantity range.
  • the No.1 switching valve 10 and No.2 switching valve 11 are made to be valves of a normal close type, and it is so made that an operating fluid is supplied to driving cylinders 11 a and 11 b of switching valves 10 and 11 respectively via independent control electromagnetic valves.
  • either one of the No.1 switching valve 10 and No.2 switching valve can be made to be a valve of a normal close type while the other is made to be a valve of a normal open type so that an operating fluid is supplied to both switching valves 10 and 11 from one control electromagnetic valve.
  • switching operation for both switching valves 10 and 11 can be performed with one control electromagnetic valve Mv, and a control signal Sc can be made of one channel.
  • FIG. 10 illustrates the first embodiment of a differential pressure type flow controller according to the present invention.
  • the aforementioned differential pressure type flowmeter shown in FIG. 1 is equipped with a control valve 21 and a valve driving part 22 , and a control computation circuit 5 is equipped with a flow rate comparison circuit 5 g whereat a flow rate difference ⁇ Q between a set flow rate Qs inputted from the outside and the computed flow rate Q computed with a flow rate computation circuit 5 a is computed, thus the flow rate difference ⁇ Q being inputted to a valve driving part 22 as a control signal.
  • a control valve 21 is operated so that the aforementioned flow rate difference ⁇ Q is moved toward a zero direction, thus the gas flow rate passing through an orifice 1 being controlled to be a set flow rate Qs.
  • FIG. 11 illustrates the second embodiment of a differential pressure type flow controller.
  • the aforementioned differential pressure type flow controller in FIG. 5 is equipped with a control valve 21 and a valve driving part 22 , and a control computation circuit 5 is equipped with a flow rate comparison circuit 5 g.
  • a flow rate difference ⁇ Q is computed by using the corrected flow rate Q′ which has been error-corrected on the computed flow rate Q with the correction computation circuit, thus a control valve 21 being controlled by opening/closing toward to the direction where the flow rate difference ⁇ Q becomes zero.
  • FIG. 12 illustrates the third embodiment of a differential pressure type flow controller. It is so constituted that the afore-mention differential pressure type flowmeter is equipped with a control valve 21 and a valve driving part 22 , and a control computation circuit 5 is equipped with a flow rate comparison circuit 5 g while a correction data memory circuit 5 b and a correction computation circuit 5 c are removed.
  • a flow rate difference ⁇ Q is computed by using the computed flow rate Q from the No.2 flow rate computation circuit 5 f when the gas flow is under critical conditions
  • a flow rate difference ⁇ Q is computed by using the computed flow rate Q from the No.1 flow rate computation circuit 5 a when the gas flow is non-critical conditions so that a control valve 21 is controlled by opening/closing toward the direction where the flow rate difference ⁇ Q becomes zero.
  • FIG. 13 illustrates the fourth embodiment of a differential pressure type flow controller. It is so constituted that the aforementioned differential pressure type flowmeter in FIG. 6 is equipped with a control valve 21 and a valve driving part 22 , and a control computation circuit 5 is equipped with a flow rate comparison circuit 5 g.
  • a flow rate difference ⁇ Q is computed by using the computed flow rate Q from the No.2 flow rate computation circuit 5 f when the gas flow is under critical conditions, and a flow rate difference ⁇ Q is computed by using the flow rate Q′ from the correction computation circuit 5 c corrected to the computed flow rate Q from the flow rate computation circuit 5 a so that a control valve 21 is controlled by opening/closing toward the direction where the flow rate difference ⁇ Q becomes zero.
  • the present invention is widely usable mainly for semiconductor manufacturing facilities, at chemical plants, food-produced processing plants and the like. It is also widely usable in the fields where fluids such as gases, liquids and the like are dealt with.

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  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
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US10054959B2 (en) 2013-03-15 2018-08-21 Bhushan Somani Real time diagnostics for flow controller systems and methods
US11313756B2 (en) * 2015-12-25 2022-04-26 Futikin Incorporated Flow rate control device and abnormality detection method using flow rate control device
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US11300983B2 (en) 2017-02-27 2022-04-12 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
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IL172662A0 (en) 2006-04-10
KR20060022682A (ko) 2006-03-10
KR100740914B1 (ko) 2007-07-20
TWI245113B (en) 2005-12-11
JP4204400B2 (ja) 2009-01-07
EP1643218A4 (en) 2007-05-09
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US20060236781A1 (en) 2006-10-26
WO2005003694A1 (ja) 2005-01-13
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