JP7164938B2 - 流量制御装置、流量制御方法、及び、流量制御装置用プログラム - Google Patents
流量制御装置、流量制御方法、及び、流量制御装置用プログラム Download PDFInfo
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F22/00—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for
- G01F22/02—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for involving measurement of pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37371—Flow
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Description
V1 ・・・上流側バルブ
V2 ・・・下流側バルブ
P1 ・・・上流側圧力センサ
P2 ・・・下流側圧力センサ
R ・・・流体抵抗
VL ・・・下流側容積
1 ・・・第1流量算出部
2 ・・・第2流量算出部
21 ・・・変化量算出部
22 ・・・流量演算部
3 ・・・流量制御部
4 ・・・圧力制御部
5 ・・・診断部
Claims (7)
- 流路に設けられた流体抵抗と、
流体抵抗の下流側に設けられた下流側バルブと、
前記流体抵抗、及び、前記下流側バルブの間における前記流路の容積中の圧力を測定する下流側圧力センサと、
前記流体抵抗を流れる第1流量を算出する第1流量算出部と、
第1流量、及び、前記下流側圧力センサで測定される下流側圧力の時間変化量から算出される換算流量に基づいて、前記下流側バルブから流出する第2流量を算出する第2流量算出部と、
設定流量と、第2流量とに基づいて前記下流側バルブを制御する流量制御部と、
前記下流側バルブが閉鎖されている状態において、第1流量と第2流量とを比較して異常の有無を診断する診断部と、を備えたことを特徴とする流量制御装置。 - 前記第2流量算出部が、
下流側圧力の時間変化量を算出する変化量算出部と、
第1流量と下流側圧力の時間変化量から算出される換算流量の差に基づいて、第2流量を算出する流量演算部と、を備えた請求項1記載の流量制御装置。 - 前記流体抵抗よりも上流側に設けられた上流側バルブと、
前記上流側バルブ、及び、前記流体抵抗の間における前記流路の容積中の圧力を測定する上流側圧力センサと、
設定圧力と、前記上流側圧力センサで測定される上流側圧力とに基づいて前記上流側バルブを制御する圧力制御部と、をさらに備えた請求項1記載の流量制御装置。 - 前記第1流量算出部が、上流側圧力、及び、下流側圧力に基づいて前記流体抵抗を流れる第1流量を算出するように構成された請求項3記載の流量制御装置。
- 前記流体抵抗を流れる第1流量に応じた検出信号を出力する流量検出機構をさらに備え、
前記第1流量算出部が、前記流量検出機構の出力する検出信号に基づいて第1流量を算出するように構成された請求項1記載の流量制御装置。 - 流路に設けられた流体抵抗と、流体抵抗の下流側に設けられた下流側バルブと、前記流体抵抗、及び、前記下流側バルブの間における前記流路の容積中の圧力を測定する下流側圧力センサと、を備えた流量制御装置を用いた流量制御方法であって、
前記流体抵抗を流れる第1流量を算出する第1流量算出ステップと、
第1流量、及び、前記下流側圧力センサで測定される下流側圧力の時間変化量から算出される換算流量に基づいて、前記下流側バルブから流出する第2流量を算出する第2流量算出ステップと、
設定流量と、第2流量とに基づいて前記下流側バルブを制御する流量制御ステップと、
前記下流側バルブが閉鎖されている状態において、第1流量と第2流量とを比較して異常の有無を診断する診断ステップと、を備えることを特徴とする流量制御方法。 - 流路に設けられた流体抵抗と、流体抵抗の下流側に設けられた下流側バルブと、前記流体抵抗、及び、前記下流側バルブの間における前記流路の容積中の圧力を測定する下流側圧力センサと、を備えた流量制御装置に用いられるプログラムであって、
前記流体抵抗を流れる第1流量を算出する第1流量算出部と、
第1流量、及び、前記下流側圧力センサで測定される下流側圧力の時間変化量から算出される換算流量に基づいて、前記下流側バルブから流出する第2流量を算出する第2流量算出部と、
設定流量と、第2流量とに基づいて前記下流側バルブを制御する流量制御部と、
前記下流側バルブが閉鎖されている状態において、第1流量と第2流量とを比較して異常の有無を診断する診断部と、としての機能をコンピュータに発揮させることを特徴とする流量制御装置用プログラム。
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KR1020180080692A KR102483417B1 (ko) | 2017-07-31 | 2018-07-11 | 유량 제어 장치, 유량 제어 방법, 및, 프로그램 기록 매체 |
CN201810762767.6A CN109324641B (zh) | 2017-07-31 | 2018-07-12 | 流量控制装置、流量控制方法和程序存储介质 |
TW107125734A TWI815814B (zh) | 2017-07-31 | 2018-07-25 | 流量控制裝置、流量控制方法和程式存儲介質 |
US16/048,750 US10545514B2 (en) | 2017-07-31 | 2018-07-30 | Flow rate control apparatus, flow rate control method, and program recording medium |
JP2021183490A JP2022010221A (ja) | 2017-07-31 | 2021-11-10 | 流量制御装置、流量制御方法、及び、流量制御装置用プログラム |
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US20190033896A1 (en) | 2019-01-31 |
CN109324641B (zh) | 2023-07-25 |
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