TWI893301B - 空調系統 - Google Patents

空調系統

Info

Publication number
TWI893301B
TWI893301B TW111116129A TW111116129A TWI893301B TW I893301 B TWI893301 B TW I893301B TW 111116129 A TW111116129 A TW 111116129A TW 111116129 A TW111116129 A TW 111116129A TW I893301 B TWI893301 B TW I893301B
Authority
TW
Taiwan
Prior art keywords
fan
air
cleanroom
chamber
cleanrooms
Prior art date
Application number
TW111116129A
Other languages
English (en)
Chinese (zh)
Other versions
TW202248575A (zh
Inventor
西村典俊
今口信弘
松崎和仁
佐藤祐一
Original Assignee
日商日立環球生活方案股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立環球生活方案股份有限公司 filed Critical 日商日立環球生活方案股份有限公司
Publication of TW202248575A publication Critical patent/TW202248575A/zh
Application granted granted Critical
Publication of TWI893301B publication Critical patent/TWI893301B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
  • Air Conditioning Control Device (AREA)
TW111116129A 2021-06-04 2022-04-28 空調系統 TWI893301B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2021/021407 2021-06-04
PCT/JP2021/021407 WO2022254705A1 (ja) 2021-06-04 2021-06-04 空調システム

Publications (2)

Publication Number Publication Date
TW202248575A TW202248575A (zh) 2022-12-16
TWI893301B true TWI893301B (zh) 2025-08-11

Family

ID=84323001

Family Applications (3)

Application Number Title Priority Date Filing Date
TW111116129A TWI893301B (zh) 2021-06-04 2022-04-28 空調系統
TW114125948A TW202542459A (zh) 2021-06-04 2022-04-28 空調系統
TW113135073A TWI908335B (zh) 2021-06-04 2022-04-28 空調系統

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW114125948A TW202542459A (zh) 2021-06-04 2022-04-28 空調系統
TW113135073A TWI908335B (zh) 2021-06-04 2022-04-28 空調系統

Country Status (4)

Country Link
US (1) US20240247817A1 (https=)
JP (1) JP7649850B2 (https=)
TW (3) TWI893301B (https=)
WO (1) WO2022254705A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024166344A1 (https=) * 2023-02-10 2024-08-15
WO2025062587A1 (ja) * 2023-09-21 2025-03-27 日立グローバルライフソリューションズ株式会社 クリーンルーム施設
JP7825739B2 (ja) * 2024-01-19 2026-03-06 日立グローバルライフソリューションズ株式会社 クリーンルーム施設
EP4610178A1 (de) * 2024-02-29 2025-09-03 Rotzinger PharmaPack GmbH Automatisierte produktionseinrichtung und produktionslinie

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW220004B (en) * 1993-04-23 1994-02-01 Ind Tech Res Inst A method of producing semiconductor integrated circuit elements and its plant
TW365641B (en) * 1996-09-20 1999-08-01 Mitsubishi Electric Corp Clean room
TWM340427U (en) * 2008-04-16 2008-09-11 Powertech Technology Inc Cleanroom system
TWM396937U (en) * 2010-04-30 2011-01-21 Taiwan Mika Engineering Consultants Co Ltd The dry cooling coil (FFU+ Dry coil) for cleanroom.

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291848A (ja) * 1985-06-19 1986-12-22 Hitachi Ltd クリ−ンル−ム
JPH0560356A (ja) * 1991-09-03 1993-03-09 Hitachi Plant Eng & Constr Co Ltd クリーンルーム
JP3040296B2 (ja) * 1993-11-26 2000-05-15 松下精工株式会社 空調用吹出し装置
JPH08327106A (ja) * 1995-05-31 1996-12-13 Taikisha Ltd クリーンルーム設備
JP4811800B2 (ja) 1999-05-25 2011-11-09 高砂熱学工業株式会社 低露点のクリーンルーム装置
JP2003083578A (ja) 2001-09-11 2003-03-19 Hitachi Ltd クリーンルーム
JP2005114317A (ja) 2003-10-10 2005-04-28 Taikisha Ltd 陰陽圧切換式換気設備
JP5117995B2 (ja) 2008-10-28 2013-01-16 株式会社大気社 室圧制御システム
JP2014070748A (ja) 2012-09-27 2014-04-21 Dainippon Printing Co Ltd クリーンルームの区画方法、クリーンルーム
JP6501679B2 (ja) 2015-08-31 2019-04-17 株式会社日立製作所 クリーンルーム用空調システム
JP6505551B2 (ja) 2015-08-31 2019-04-24 株式会社日立製作所 クリーンルーム用排気ユニット
JP6770357B2 (ja) 2016-07-11 2020-10-14 株式会社日立プラントサービス クリーンルーム用空調システム
CN110307603A (zh) 2019-07-22 2019-10-08 伍刚 一种用于洁净室的集成式空调净化系统
CA3150088C (en) 2019-12-04 2023-10-10 Mitsuru SEKIZAWA Air conditioning system
JP6810301B1 (ja) 2020-04-21 2021-01-06 日立グローバルライフソリューションズ株式会社 クリーンブース
JP7491773B2 (ja) 2020-08-19 2024-05-28 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム
CN111829103A (zh) 2020-08-19 2020-10-27 江苏博创翰林光电高科技有限公司 分布式节能型恒温洁净室

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW220004B (en) * 1993-04-23 1994-02-01 Ind Tech Res Inst A method of producing semiconductor integrated circuit elements and its plant
TW365641B (en) * 1996-09-20 1999-08-01 Mitsubishi Electric Corp Clean room
TWM340427U (en) * 2008-04-16 2008-09-11 Powertech Technology Inc Cleanroom system
TWM396937U (en) * 2010-04-30 2011-01-21 Taiwan Mika Engineering Consultants Co Ltd The dry cooling coil (FFU+ Dry coil) for cleanroom.

Also Published As

Publication number Publication date
US20240247817A1 (en) 2024-07-25
JP7649850B2 (ja) 2025-03-21
WO2022254705A1 (ja) 2022-12-08
TWI908335B (zh) 2025-12-11
CA3219696A1 (en) 2022-12-08
TW202542459A (zh) 2025-11-01
TW202500927A (zh) 2025-01-01
TW202248575A (zh) 2022-12-16
JPWO2022254705A1 (https=) 2022-12-08

Similar Documents

Publication Publication Date Title
TWI893301B (zh) 空調系統
JP7649905B2 (ja) 空調システム及びクリーンルーム施設
US12498130B2 (en) Systems and methods for refrigerant leak management
US10935454B2 (en) Systems and methods for refrigerant leak management
JP2012202558A (ja) クリーンルーム空調システム
JP7746535B2 (ja) クリーンルーム施設
CN113811729A (zh) 空调系统
CN105465942A (zh) 热交换式换气装置
CA3219696C (en) Air conditioning system
JP4712853B2 (ja) 室圧制御システム
CN208720373U (zh) 一种新风滤毒空调系统
HK40068920A (en) Air conditioning system
TWI893499B (zh) 無塵室設施
JP2001221473A (ja) 給気ユニットおよび給気設備
CN120659958A (zh) 无尘室设施
CN108844147A (zh) 一种新风滤毒空调系统
JPS6071845A (ja) 空調防塵室の局所排気装置