M340427 八、新型說明： 【新型所屬之技術領域】 本創作係有關一種潔淨室系統，特別是一種次潔淨室包覆多個 微型主潔淨室之潔淨室系統。 【先前技術】 潔淨室（clean room)，亦稱為無塵室或清淨室。「潔淨室」是 指將一定空間範圍内之空氣中的微粒子、有害空氣、細菌等之污 染物排除，並將室内之溫度、潔淨度、室内壓力、氣流速度與氣 流分佈、噪音振動、照明及靜電控制在某一需求範圍内，而所給 予特別設計之房間。亦即是不論外在之空氣條件如何變化，其室 内均能維持原先所設定之潔淨度、溫濕度及壓力等性能之特性。 潔淨室最主要之作用在於控制產品（如矽晶片等）所接觸之大氣的 潔淨度及溫濕度，使產品能在一個良好之環境空間中生產、製造。 一般而言’潔淨室可分類為亂流式（turbulent flow)、層流式 (laminar)及複合式(mixed type)，例如，第1圖所示為習知垂直層 流式之潔淨室包含高壓潔淨室10a、中正壓潔淨室10b、中低壓潔 淨室l〇c、低正壓潔淨室l〇d、風車過濾元件組30a、30b、30c、 30d、調節閥（damper)20a、20b、20c，其中高壓潔淨室10a、中正 壓潔淨室l〇b、中低壓潔淨室10c、低正壓潔淨室lOd分別具有 20mmHg、1.5mmHg、1.25mmHg、0.5 mmHg 的空氣正壓，而高壓 潔淨室l〇a、中正壓潔淨室10b、中低壓潔淨室l〇c、低正壓潔淨 室 10d 設有風車過濾元件組 30a、30b、30c、30d (fan-filter unit， FFU)，當外氣分別經由風車過濾元件組30a、30b、30c、30d進入 高壓潔淨室l〇a、中正壓潔淨室10b、中低壓潔淨室l〇c、低正壓 潔淨室l〇d(如箭頭方向la、lb、lc、Id)，係以層流式空氣氣流運 5 M340427 動成均勻之直線形，使南壓潔淨室10a、中正壓潔淨室⑽保持 無塵狀態，而高壓潔淨室1Ga、中正壓潔淨室議、中低壓潔淨室 l〇c低正壓;^淨室10d之間的調節闕（如叫打)咖、2〇b、2〇c可沿 著箭頭方向le、If、lg調節各潔淨室之間的空氣壓力。 。 —;、、丨而，上述之潔淨室僅利用隔板(Partitional wall)區隔高壓潔 淨室、中正壓潔淨室、中低壓潔淨室、低正壓潔淨室，若調節閱 •調整的壓力不恰當會導致高壓潔淨室、中正壓潔淨室、中低壓潔 序室]低正壓潔淨室的風速不均勻導致整體潔淨室產生絮流，造 ，办淨效果變差，此外，—般而言，若於潔淨室增設生產機臺， 需使用隔板分隔時’尤其分隔的區域較多且區域小的情形下，亦 會造成整體潔淨室風速不均勾導致產生絮流，其運轉效率較差， =潔淨室的彈性運用”困難；另—方面，生產機臺多設鄰設 室之隔板旁，以避免影響整體氣流迴風，故維修或施工時 、：、玉間不足可能需要破壞隔板，而影響維修或施工的進度。 【新型内容】 Φ如、為L解決上述問題，本創作目的之—係提供潔淨室系統，其 統具有次潔淨室，次潔淨室内使用可調整式之隔板分 ®獨立之微型主潔淨室及迴風區，且每個微型主潔淨室可 大小關，以便工作人貞進行生產、維料作業，達到 试型主泳淨室易於彈性調整與擴充的功能。 本創作目的之-係提供潔淨室系統，迴 :_風通道區，可免除增設機台維修區及迴風 而增加機臺的設置空間。 本創，之另-目的係提供潔淨室系統，其具有多個微型主潔 m k濾元件及送風單元等裝修工程費用。 M340427 本創作之又一目的係提供潔淨室系統，其每個微型主潔淨室 可依照生產需求選用適當之過濾元件及送風單元，形成不同等級 的潔淨室，故整體潔淨室系統換氣（air charge)次數比習知潔淨室系 統較少，故耗能亦較少。 為了達到上述目的，本創作一實施例之一種潔淨室系統，包 含：一次潔淨室，其具有多個設置於次潔淨室上方的第一潔淨單 元；多個微型主潔淨室，其是以一隔板及一天花板分隔而成，並 設置於次潔淨室内，其中每一微型主潔淨室包含至少一送風單元 設置於天花板，藉以傳送次潔淨室的空氣進入微型主潔淨室内； 及至少一過濾元件連接送風單元及第一潔淨單元，藉以過濾送風 單元及第一潔淨單元的空氣；及多個迴風區設置於每一微型主潔 淨室之間，其中每一迴風區並設有一通口將每一微型主潔淨室的 空氣導入迴風區，而第一潔淨單元係抽取及過濾迴風區之空氣經 由次潔淨室進入至微型主潔淨室。 【實施方式】 第2圖所示為本創作一實施例潔淨室系統之部份截斷示意 圖。於本實施例中，一種潔淨室系統包含一次潔淨室100、多個微 型主潔淨室ll〇a、110b及一迴風區120a、120b、120c、第一潔淨 單元130a、130及第二潔淨單元160a、160b及過濾元件（170a至 170d)，其中，次潔淨室100具有第一潔淨單元130a、130b並設置 於次潔淨室100的上方；另，次潔淨室100包覆微型主潔淨室 110a、110b並以一隔板140及一天花板150分隔成獨立之微型主 潔淨室ll〇a、110b ;另，第一潔淨單元130a、130b可分別連接過 濾元件170a、170b，藉以過濾第一潔淨單元130a、130b送出之空 M340427 接續上述，微型主潔淨室ll〇a、ii〇b具有第二潔淨單元 160a、160b，而第二潔淨單元160a、160b包含一送風單元i62a、 162b及過濾元件17〇c至17〇d，其中送風單元162a、162b設置於 天花板150，藉以傳送次潔淨室10〇的空氣進入微型主潔淨室 110a、110b内；過濾元件17〇c至17〇d可連接送風單元162a、162b， 藉以過濾送風單元162a、162b送出之空氣。再者，迴風區120a、 120b、120c設置於微型主潔淨室1 、110b —側，迴風區120a、 120b、120c 並設有通口（18〇a 至 180d)。M340427 VIII. New description: [New technical field] This creation is about a clean room system, especially a clean room system in which a sub-clean room covers multiple micro-main clean rooms. [Prior Art] A clean room, also known as a clean room or a clean room. "Clean room" refers to the removal of particulates, harmful air, bacteria and other pollutants in the air within a certain space, and the indoor temperature, cleanliness, indoor pressure, airflow velocity and airflow distribution, noise vibration, lighting and Static electricity is controlled within a certain range of demand and is given a specially designed room. That is, no matter how the external air conditions change, the room can maintain the characteristics of the original cleanliness, temperature, humidity and pressure. The main function of the clean room is to control the cleanliness and temperature and humidity of the atmosphere contacted by products (such as silicon wafers), so that the products can be produced and manufactured in a good environment. In general, 'clean rooms can be classified into turbulent flow, laminar, and mixed type. For example, Figure 1 shows a conventional vertical laminar clean room containing high pressure. Clean room 10a, medium positive pressure clean room 10b, medium and low pressure clean room l〇c, low positive pressure clean room l〇d, windmill filter element group 30a, 30b, 30c, 30d, damper 20a, 20b, 20c , wherein the high pressure clean room 10a, the medium positive pressure clean room l〇b, the medium and low pressure clean room 10c, and the low positive pressure clean room 10O have a positive air pressure of 20 mmHg, 1.5 mmHg, 1.25 mmHg, and 0.5 mmHg, respectively, and the high pressure clean room l 〇a, medium-pressure clean room 10b, medium-low pressure clean room l〇c, low positive pressure clean room 10d are provided with windmill filter element groups 30a, 30b, 30c, 30d (fan-filter unit, FFU) Through the windmill filter element group 30a, 30b, 30c, 30d, the high pressure clean room l〇a, the medium positive pressure clean room 10b, the medium and low pressure clean room l〇c, the low positive pressure clean room l〇d (such as the arrow direction la, lb) , lc, Id), using a laminar air flow 5 M340427 to move into a uniform straight line, so that the south pressure clean room 10a The medium-pressure clean room (10) maintains a dust-free state, while the high-pressure clean room 1Ga, the medium-pressure clean room, the medium-low pressure clean room l〇c low positive pressure; the clean room 10d between the adjustment 阙 (such as call) coffee 2〇b, 2〇c can adjust the air pressure between the clean rooms along the arrow directions le, If, and lg. . -;, 丨,, the above-mentioned clean room only uses a partition wall to separate the high-pressure clean room, the medium-pressure clean room, the medium-low pressure clean room, the low positive pressure clean room, if the pressure of adjustment and adjustment is not Properly causing high-pressure clean room, medium-pressure clean room, medium-low pressure clean room] The uneven wind speed of the low positive pressure clean room causes the whole clean room to generate flocculation, and the net effect is worse. In addition, in general If a production machine is added to the clean room, it is necessary to use a partition to separate the space. In particular, when there are many areas and the area is small, the overall clean room wind speed will be unevenly caused to cause flocculation, and the operation efficiency is poor. = The flexible use of the clean room is difficult; on the other hand, the production machine is located next to the partition of the adjacent room to avoid affecting the overall airflow returning. Therefore, during maintenance or construction, the shortage of jade may need to destroy the partition. , and affect the progress of maintenance or construction. [New content] Φ, for L to solve the above problems, the purpose of this creation is to provide a clean room system, which has a sub-clean room, the second clean room can be adjusted The board is divided into independent micro-main clean rooms and return air areas, and each micro-main clean room can be closed to the size of the work, so that the workers can carry out production and maintenance operations, and the function of the prototype main swimming room can be easily adjusted and expanded. The purpose of this creation is to provide a clean room system, back to: _ wind channel area, which can eliminate the additional machine maintenance area and return air to increase the installation space of the machine. The other, the purpose is to provide a clean room system, It has a plurality of micro-main cleaning mk filter elements and air supply units and other renovation engineering costs. M340427 Another purpose of this creation is to provide a clean room system, each of which can select appropriate filter elements and air supply units according to production needs. Forming different levels of clean rooms, so the overall clean room system has fewer air charges than the conventional clean room system, so the energy consumption is also less. In order to achieve the above object, a clean room of an embodiment of the present invention is created. The system comprises: a clean room having a plurality of first clean units disposed above the second clean room; and a plurality of miniature main clean rooms, each of which is a partition and a day flower Separated and disposed in the sub-clean room, wherein each micro-main clean room comprises at least one air supply unit disposed on the ceiling, thereby transmitting air of the second clean room into the micro main clean room; and at least one filter element connecting the air supply unit and the first a clean unit for filtering the air of the air supply unit and the first clean unit; and a plurality of return air zones are disposed between each of the micro main clean rooms, wherein each of the return air zones is provided with a port to clean each of the miniature mains The air of the chamber is introduced into the return air zone, and the air of the first clean unit extracting and filtering the return air zone enters the micro main clean room through the secondary clean room. [Embodiment] FIG. 2 is a clean room of an embodiment of the present invention. A schematic diagram of a partial cut-off of the system. In the present embodiment, a clean room system includes a clean room 100, a plurality of micro-main clean rooms 11a, 110b, and a return air zone 120a, 120b, 120c, and a first clean unit 130a. , 130 and second cleaning units 160a, 160b and filter elements (170a to 170d), wherein the secondary clean room 100 has first clean units 130a, 130b and is disposed in the secondary clean room 10 The upper clean room 100 covers the micro main clean rooms 110a, 110b and is separated into independent micro main clean rooms 11a, 110b by a partition 140 and a ceiling 150. In addition, the first clean unit 130a 130b can be respectively connected to the filter elements 170a, 170b, thereby filtering the air M340427 sent by the first clean units 130a, 130b to continue, the micro main clean rooms 11a, iib have the second clean units 160a, 160b, and the second The cleaning unit 160a, 160b includes a blowing unit i62a, 162b and filter elements 17〇c to 17〇d, wherein the air blowing unit 162a, 162b is disposed on the ceiling 150, thereby transferring the air of the secondary clean room 10〇 into the micro main clean room 110a, The filter elements 17〇c to 17〇d can be connected to the air blowing units 162a and 162b to filter the air sent from the air blowing units 162a and 162b. Further, the return air zones 120a, 120b, 120c are disposed on the side of the micro main clean room 1, 110b, and the return air zones 120a, 120b, 120c are provided with ports (18〇a to 180d).
接續上述說明，第3圖所示為依據第2圖所示之潔淨室系統 之空氣流動循壞不思圖’清參閱苐3圖所示，空氣經由第·潔淨 單元130a、130b及過濾元件170a至170b進行初步過滤後送入次 潔淨室1 〇〇(如前頭方向A、B所不），下一步，次潔淨室1〇〇的空 氣分別經由送風單元162a、162b及過瀘、元件i70c至170d傳送及 二次過濾後，進入微型主潔淨室ll〇a、li〇b (如箭頭方向c、D所 示）；由於微型主潔淨室110a、ll〇b的空氣壓力大於次潔淨室1〇〇 的空氣壓力形成正壓狀態，微型主潔淨室u〇a、11〇b的空氣會由 通口（180a至180d)排出送入迴風區12〇a、12〇b、12〇c (如箭頭方 向E、F、G、H所不），接著，第一潔淨單元n〇a、13此會將迴風 區120a、120b、120b的空氣抽取(如箭頭方向w所示）並過濾後 送回次潔淨室1()0,如此微型主潔淨室11〇a、的空氣可以過 濾循環’使微型主潔淨室11Ga、11Gb料料的狀態。 根據上述，迴風區可作為迴風通道區及機台維修區，換言之， 迴風區可共構結合迴風通道區與機台維修區 修區及迴風通道區，進而省、充丨示y又铖口、、隹 人昌， 的空間，並增加製程空間， 以便工作人貝進行生產、維修等作業， 敉住之貫施例中 ,.^^. ^ , L 隔板可選用抗靜電或防火之材買， :二：及壓克力板分隔成多個微型主潔淨室；另， 板的表面具有—抗塵之環氧樹脂，藉以減少微塵㈣油)附著於 M340427 板上；於另一較佳之實施例中，微型主潔淨室的潔淨等級可於100 至loooo之間，而次潔淨室的潔淨等級可大於looooo以上，因此 整體潔淨室系統換氣(air charse)次數比全區的潔淨室系統均為等 級100較少，故耗能亦較少；再者，微型主潔淨室的空氣壓力大 於次潔淨室的空氣壓力，使微型主潔淨室的空氣可以保持正壓 (positive pressure)，使微塵能排出微型主潔淨室外。 第4圖所示為本創作一實施例潔淨室系統之部份戴斷示意 圖。於本實施例中，潔淨室系統包含一次潔淨室200、微型主潔淨 室 210a、210b、迴風區 220a、220b、220c、第一潔淨單元 230a、 230b、第二潔淨單元240a、204b及過濾元件244a、244b、244c、 244d，其中第一潔淨單元230a、230b内建導管風扇潔淨組（圖中未 示）及濾網（圖中未示）進行初步過濾，並利用風管250a、250b連接 分別次潔淨室200及迴風區220a、220b、220c ;另，第一潔淨單 元230a、230b之風管250a、250b可外接過濾元件244a、244b， 如高性能過遽濾、網，將濾網初步過滤之的空氣再送至過渡元件 244a、244b進行過濾，防止細小的微塵進入微型主潔淨室2l〇a、 210b 内。 接續上述，微型主潔淨室210a、210b的第二潔淨單元240a、 240b之送風單元242a、242b及過濾元件244c、244d分別可為風 車組及高性能過濾濾網，風車組及高性能過濾濾網兩者結合設置 於天花板260上，進行二次過濾；由於天花板26〇使用τ型格閘 (T-grid)之結構，本創作可依據微型主潔淨室的潔淨等級需求框設 適當數量的風車組，可減少風車組及高性能過濾濾網的使用量； 隔板270可使用塑膠布簾（curtain)，以任意調整及區隔迴風區的面 積大小。此外，本實施例的迴風方式與第3圖相似故不再此撰述。 於一較佳的實施例中，第一潔淨單元之導管風扇潔淨組可内建一 空調單元，藉以控制導管風扇潔淨組所送出空氣的溫、濕度進入 次潔淨室。 9 M340427 第5圖所示為依據第4圖所示潔淨室系統之生產機臺配置 圖’生產機臺標示為300a、300b，管路標示為31〇a、310b，而管 路310a、310b可為化學管路、配電管路、純水管路或排氣管路等，· 生產機臺300a、300b及管路310a、310b可設置於微型主潔淨室 210a、210b内並鄰設於隔板270旁，隔板270可以選用可調整式 之塑膠布簾，以任意調整及區隔迴風區22〇a、22〇b，若工作人員 進行機臺維修或二次配管(hook up)等作業時，僅需移動塑膠布簾 即可增加作業空間。 於一較佳之實施例中，潔淨室系統包含一外氣空調箱（Mau) 々卻無塵至内空氣及維持一定的相對濕度，以補充外界之空氣進 =潔淨室系統内。於另-較佳之實施例H爭室系統可依需求 設置緩衝區（buffer room)，例如，如第6圖所示，緩衝區（buffer r〇〇m) 可使用浴塵室（仏811罐61*) 400或傳遞盒(叩％13似）41如、41〇13，防 止外區人員或物品進出微型主潔淨室21〇a、21〇b而破壞潔淨室系 統之氣流與空氣壓力及消除帶有微塵之外區人員或物品進入微型 主潔淨室21Ga、21Gb。另-方面，為了調整微型主潔淨室21如、 21〇b及次潔淨室2GG的壓力差及空氣層流的風速，潔淨室系統可 δ又置一氣壓調節閥。 根據上述本創作冻淨至系統具有多個次潔淨室，係使用隔 板分隔為多個獨立之微型域淨室及迴風區，且每個微型主潔淨 室可，機臺的大小隔間，可依照生產需求選用適當的過遽元件及 ，風單7L ’微型主潔序室具調整彈性與易於擴充功能，微型主潔 淨室可形成不同等級的潔淨室。 ，…另一方面，本創作潔淨室系統的隔板為可調整式之防靜電塑 二廉’達成任意調整及區隔迴風區；再者，本創作之機台維修 品=風通道區共構，可免除增設機台維修區及迴風通道區，進 而即’迴風區的空間，並增加製程空間，以便卫作人員進行生產、 維修等作業；本創作潔淨㈣統其微型主潔淨室具有區域化及小 M340427 型化的優點，可節省過濾元件及送風 運轉能源。 單元等裝修工程 費用 ，節省 以上所述之實施例僅係為說明本創作之技術思想及特點，盆 =的在使熟習此項技蟄之人士能夠瞭解本創作之内容並據以實 施’當不能以之限定本創作之專利範圍’即大凡依本創作所揭示 之精神所作之均等變化或修飾，仍應涵蓋在本創作之專利範圍内。Following the above description, Fig. 3 shows the air flow in accordance with the clean room system shown in Fig. 2, and the air is passed through the cleaning units 130a and 130b and the filter element 170a. After the initial filtration to 170b, it is sent to the secondary clean room 1 〇〇 (if the front direction A, B does not), the next step, the air of the secondary clean room 1 经由 through the air supply unit 162a, 162b and the 泸, element i70c to After 170d transmission and secondary filtration, enter the micro main clean room ll〇a, li〇b (as indicated by the arrow directions c and D); since the air pressure of the micro main clean room 110a, ll〇b is greater than the secondary clean room 1〇 The air pressure of the crucible forms a positive pressure state, and the air of the micro main clean room u〇a, 11〇b is discharged from the port (180a to 180d) into the return air zone 12〇a, 12〇b, 12〇c (eg The arrow directions E, F, G, and H are not. Then, the first cleaning units n〇a, 13 will extract the air of the return air regions 120a, 120b, and 120b (as indicated by the arrow direction w) and filter them. Return to the clean room 1 () 0, so the micro main clean room 11 〇 a, the air can filter the cycle 'to make the micro main clean room 11Ga 11Gb material state material. According to the above, the return air zone can be used as the return air passage area and the machine maintenance area. In other words, the return air area can be combined with the return air passage area and the machine maintenance area repair area and the return air passage area, thereby saving and displaying y 铖 、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Or fire-resistant materials to buy, : 2: and acrylic sheets are divided into a plurality of micro-main clean rooms; in addition, the surface of the board has a dust-resistant epoxy resin to reduce the dust (4) oil) attached to the M340427 board; In another preferred embodiment, the cleanliness level of the micro-main clean room can be between 100 and loooo, and the cleanliness level of the second clean room can be greater than the looooo, so the overall clean room system has a higher air charse than the whole area. The clean room system has a level of less than 100, so the energy consumption is also less; in addition, the air pressure of the micro main clean room is greater than the air pressure of the second clean room, so that the air of the micro main clean room can maintain a positive pressure (positive pressure) ), so that the dust can be discharged from the micro-master Net outdoors. Figure 4 is a partial broken view of the clean room system of an embodiment of the present invention. In the present embodiment, the clean room system includes a primary clean room 200, a micro main clean room 210a, 210b, a return air zone 220a, 220b, 220c, a first clean unit 230a, 230b, a second clean unit 240a, 204b, and a filter element. 244a, 244b, 244c, 244d, wherein the first cleaning unit 230a, 230b has a built-in duct fan cleaning group (not shown) and a filter screen (not shown) for preliminary filtering, and is connected by ducts 250a, 250b respectively. The secondary clean room 200 and the return air zone 220a, 220b, 220c; in addition, the air ducts 250a, 250b of the first cleaning unit 230a, 230b may be externally connected to the filter elements 244a, 244b, such as high performance filter, mesh, preliminary filter The filtered air is sent to the transition elements 244a, 244b for filtration to prevent fine dust from entering the micro-master clean rooms 21a, 210b. Following the above, the air blowing units 242a, 242b and the filter elements 244c, 244d of the second cleaning units 240a, 240b of the micro main clean rooms 210a, 210b can be a windmill set and a high performance filter screen, a windmill set and a high performance filter screen, respectively. The two are combined on the ceiling 260 for secondary filtration; since the ceiling 26〇 uses the structure of the T-grid, the creation can set the appropriate number of windmills according to the clean level requirements of the miniature main clean room. The utility model can reduce the usage of the windmill group and the high-performance filter screen; the partition 270 can use a plastic curtain to adjust and distinguish the size of the return air zone. In addition, the return air mode of this embodiment is similar to that of FIG. 3 and will not be described again. In a preferred embodiment, the duct fan cleaning group of the first clean unit can have an air conditioning unit built therein to control the temperature and humidity of the air sent by the duct fan cleaning group to enter the sub-clean room. 9 M340427 Figure 5 shows the production machine configuration diagram of the clean room system according to Figure 4. 'The production machine is labeled 300a, 300b, the pipeline is labeled 31〇a, 310b, and the pipelines 310a, 310b can be For the chemical pipeline, the distribution pipeline, the pure water pipeline or the exhaust pipeline, etc., the production machines 300a, 300b and the pipelines 310a, 310b may be disposed in the micro main clean rooms 210a, 210b and adjacent to the partition 270. Next, the partition plate 270 can be adjusted with an adjustable plastic curtain to arbitrarily adjust and separate the return air zones 22〇a, 22〇b, if the staff performs machine maintenance or hook up operations. Just move the plastic curtain to increase the working space. In a preferred embodiment, the clean room system includes an external air conditioning box (Mau) that is dust-free to internal air and maintains a relative relative humidity to supplement the outside air into the clean room system. In another preferred embodiment, the room system can be configured with a buffer room as needed. For example, as shown in FIG. 6, the buffer (buffer r〇〇m) can use a bath room (仏811 can 61) *) 400 or transfer box (叩%13 like) 41, such as 41〇13, to prevent outside personnel or articles from entering and leaving the micro-main clean room 21〇a, 21〇b and destroying the airflow and air pressure of the clean room system and eliminating the belt Persons or articles outside the dusty area enter the micro-main clean room 21Ga, 21Gb. On the other hand, in order to adjust the pressure difference between the micro-main clean room 21, 21 〇 b and the second clean room 2GG and the air velocity of the air laminar flow, the clean room system can be further provided with a gas pressure regulating valve. According to the above-mentioned creation, the system has a plurality of sub-clean rooms, which are partitioned into a plurality of independent micro-domain clean rooms and return air zones, and each micro-main clean room can be, the size of the machine, Appropriate over-twist components can be selected according to the production requirements. The wind single 7L 'micro main cleaning chamber can adjust the elasticity and easy to expand. The micro main clean room can form different levels of clean room. On the other hand, the partition of the clean room system of this creation is an adjustable anti-static plastic and two cheaper 'to achieve any adjustment and separate return air zone; in addition, the machine maintenance of this creation = wind channel area Structure, can be added to add machine maintenance area and return air passage area, and then the space of the 'return air area, and increase the process space, so that the guards can carry out production, maintenance and other operations; the creation of clean (four) unified its micro-main clean room It has the advantages of regionalization and small M340427 type, which can save filter elements and air supply energy. Units and other renovation projects, saving the above-mentioned examples are only to illustrate the technical ideas and characteristics of this creation, the people who are familiar with this technology can understand the content of this creation and implement it 'when not It is intended to limit the scope of the patents of this creation, that is, the equivalent changes or modifications made by the authors in the spirit of this creation should still be covered by the scope of this creation.
11 M340427 【圖式簡單說明】 第1圖所示為習知垂直層流式之潔淨室。 第2圖所示為本創作一實施例潔淨室系 圖。 ， 之部份戴斷示意 第3圖所示為依據第 示意圖 2圖所示之潔_統之空氣流動循環 圖所不為本創作-實施例潔淨室系統之部份載 第5圖所示為依據第4圖所示潔淨室系統之生產 第6圖所示為依據第5圖所示潔淨室系統設 圖0 斷示意 機臺配置圖。 置緩衝區之示意 【主要元件符號說明】11 M340427 [Simple description of the diagram] Figure 1 shows a conventional vertical laminar flow clean room. Fig. 2 is a diagram showing the clean room of an embodiment of the present invention. Part of the wear-breaking diagram shown in Figure 3 is based on the air flow cycle diagram shown in Figure 2, which is shown in Figure 5 as part of the clean room system. According to the production of the clean room system shown in Fig. 4, Fig. 6 is a schematic diagram showing the configuration of the machine according to the clean room system shown in Fig. 5. Schematic diagram of the buffer [Main component symbol description]
10a 10b 10c 10d 20a〜20c 30a〜30d la〜lg 100、200 100a、100b、210a、210b 高壓潔淨室 中正壓潔淨室 中低壓潔淨室 低正壓潔淨室 調節閥 風車過濾元件組 空氣流動方向 次潔淨室 微型主潔淨室 M340427 120a、120b、120c 迴風區 220a、220b、220c 迴風區 130a、130b、230a、230b 第一潔淨單元 140、270 隔板 150、260 天花板 160a、160b、240a、240b 第二潔淨單元 162a、162b、242a、242b 送風單元 170a〜170d、244a〜244d 過濾元件 180a〜180d 通口 230a、230b 送風單元 250a、250b 風管 300a、300b 生產機臺 310a、310b 管路 400 浴塵室 410a、410b 傳遞盒 A〜J 空氣流動方向 1310a 10b 10c 10d 20a~20c 30a~30d la~lg 100, 200 100a, 100b, 210a, 210b High pressure clean room medium pressure clean room medium low pressure clean room low positive pressure clean room control valve windmill filter element group air flow direction Clean room micro main clean room M340427 120a, 120b, 120c return air area 220a, 220b, 220c return air area 130a, 130b, 230a, 230b first clean unit 140, 270 partition 150, 260 ceiling 160a, 160b, 240a, 240b Second cleaning unit 162a, 162b, 242a, 242b air supply units 170a to 170d, 244a to 244d filter elements 180a to 180d, ports 230a, 230b, air supply units 250a, 250b, air ducts 300a, 300b, production machines 310a, 310b, line 400, bath Dust chambers 410a, 410b transfer boxes A~J air flow direction 13