JPWO2022254705A1 - - Google Patents

Info

Publication number
JPWO2022254705A1
JPWO2022254705A1 JP2023525323A JP2023525323A JPWO2022254705A1 JP WO2022254705 A1 JPWO2022254705 A1 JP WO2022254705A1 JP 2023525323 A JP2023525323 A JP 2023525323A JP 2023525323 A JP2023525323 A JP 2023525323A JP WO2022254705 A1 JPWO2022254705 A1 JP WO2022254705A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023525323A
Other languages
Japanese (ja)
Other versions
JPWO2022254705A5 (https=
JP7649850B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022254705A1 publication Critical patent/JPWO2022254705A1/ja
Publication of JPWO2022254705A5 publication Critical patent/JPWO2022254705A5/ja
Application granted granted Critical
Publication of JP7649850B2 publication Critical patent/JP7649850B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
  • Air Conditioning Control Device (AREA)
JP2023525323A 2021-06-04 2021-06-04 空調システム Active JP7649850B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/021407 WO2022254705A1 (ja) 2021-06-04 2021-06-04 空調システム

Publications (3)

Publication Number Publication Date
JPWO2022254705A1 true JPWO2022254705A1 (https=) 2022-12-08
JPWO2022254705A5 JPWO2022254705A5 (https=) 2024-01-24
JP7649850B2 JP7649850B2 (ja) 2025-03-21

Family

ID=84323001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023525323A Active JP7649850B2 (ja) 2021-06-04 2021-06-04 空調システム

Country Status (4)

Country Link
US (1) US20240247817A1 (https=)
JP (1) JP7649850B2 (https=)
TW (3) TWI893301B (https=)
WO (1) WO2022254705A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024166344A1 (https=) * 2023-02-10 2024-08-15
WO2025062587A1 (ja) * 2023-09-21 2025-03-27 日立グローバルライフソリューションズ株式会社 クリーンルーム施設
JP7825739B2 (ja) * 2024-01-19 2026-03-06 日立グローバルライフソリューションズ株式会社 クリーンルーム施設
EP4610178A1 (de) * 2024-02-29 2025-09-03 Rotzinger PharmaPack GmbH Automatisierte produktionseinrichtung und produktionslinie

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291848A (ja) * 1985-06-19 1986-12-22 Hitachi Ltd クリ−ンル−ム
JPH0560356A (ja) * 1991-09-03 1993-03-09 Hitachi Plant Eng & Constr Co Ltd クリーンルーム
JPH06307108A (ja) * 1993-04-23 1994-11-01 Ind Technol Res Inst 半導体集積回路デバイスを生産するための生産プラント及び該プラントの構築方法
JPH08327106A (ja) * 1995-05-31 1996-12-13 Taikisha Ltd クリーンルーム設備
JPH1096332A (ja) * 1996-09-20 1998-04-14 Mitsubishi Electric Corp クリーンルーム
JP2000337675A (ja) * 1999-05-25 2000-12-08 Takasago Thermal Eng Co Ltd 低露点のクリーンルーム装置
JP2003083578A (ja) * 2001-09-11 2003-03-19 Hitachi Ltd クリーンルーム
JP2005114317A (ja) * 2003-10-10 2005-04-28 Taikisha Ltd 陰陽圧切換式換気設備
JP2010107064A (ja) * 2008-10-28 2010-05-13 Taikisha Ltd 室圧制御システム
JP2014070748A (ja) * 2012-09-27 2014-04-21 Dainippon Printing Co Ltd クリーンルームの区画方法、クリーンルーム
WO2017038484A1 (ja) * 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム及びそれに用いられる排気ユニット
JP2017048940A (ja) * 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム
JP2018009713A (ja) * 2016-07-11 2018-01-18 株式会社日立製作所 クリーンルーム用空調システム
CN110307603A (zh) * 2019-07-22 2019-10-08 伍刚 一种用于洁净室的集成式空调净化系统
CN111829103A (zh) * 2020-08-19 2020-10-27 江苏博创翰林光电高科技有限公司 分布式节能型恒温洁净室
JP6810301B1 (ja) * 2020-04-21 2021-01-06 日立グローバルライフソリューションズ株式会社 クリーンブース
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
JP2022034851A (ja) * 2020-08-19 2022-03-04 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3040296B2 (ja) * 1993-11-26 2000-05-15 松下精工株式会社 空調用吹出し装置
TWM340427U (en) * 2008-04-16 2008-09-11 Powertech Technology Inc Cleanroom system
TWM396937U (en) * 2010-04-30 2011-01-21 Taiwan Mika Engineering Consultants Co Ltd The dry cooling coil (FFU+ Dry coil) for cleanroom.

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291848A (ja) * 1985-06-19 1986-12-22 Hitachi Ltd クリ−ンル−ム
JPH0560356A (ja) * 1991-09-03 1993-03-09 Hitachi Plant Eng & Constr Co Ltd クリーンルーム
JPH06307108A (ja) * 1993-04-23 1994-11-01 Ind Technol Res Inst 半導体集積回路デバイスを生産するための生産プラント及び該プラントの構築方法
JPH08327106A (ja) * 1995-05-31 1996-12-13 Taikisha Ltd クリーンルーム設備
JPH1096332A (ja) * 1996-09-20 1998-04-14 Mitsubishi Electric Corp クリーンルーム
JP2000337675A (ja) * 1999-05-25 2000-12-08 Takasago Thermal Eng Co Ltd 低露点のクリーンルーム装置
JP2003083578A (ja) * 2001-09-11 2003-03-19 Hitachi Ltd クリーンルーム
JP2005114317A (ja) * 2003-10-10 2005-04-28 Taikisha Ltd 陰陽圧切換式換気設備
JP2010107064A (ja) * 2008-10-28 2010-05-13 Taikisha Ltd 室圧制御システム
JP2014070748A (ja) * 2012-09-27 2014-04-21 Dainippon Printing Co Ltd クリーンルームの区画方法、クリーンルーム
WO2017038484A1 (ja) * 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム及びそれに用いられる排気ユニット
JP2017048941A (ja) * 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム及びそれに用いられる排気ユニット
JP2017048940A (ja) * 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム
JP2018009713A (ja) * 2016-07-11 2018-01-18 株式会社日立製作所 クリーンルーム用空調システム
CN110307603A (zh) * 2019-07-22 2019-10-08 伍刚 一种用于洁净室的集成式空调净化系统
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
JP6810301B1 (ja) * 2020-04-21 2021-01-06 日立グローバルライフソリューションズ株式会社 クリーンブース
CN111829103A (zh) * 2020-08-19 2020-10-27 江苏博创翰林光电高科技有限公司 分布式节能型恒温洁净室
JP2022034851A (ja) * 2020-08-19 2022-03-04 株式会社日立プラントサービス 給排気システム及びクリーンルームシステム

Also Published As

Publication number Publication date
US20240247817A1 (en) 2024-07-25
JP7649850B2 (ja) 2025-03-21
WO2022254705A1 (ja) 2022-12-08
TWI908335B (zh) 2025-12-11
CA3219696A1 (en) 2022-12-08
TW202542459A (zh) 2025-11-01
TWI893301B (zh) 2025-08-11
TW202500927A (zh) 2025-01-01
TW202248575A (zh) 2022-12-16

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